JP2016181623A - Method for manufacturing printed wiring board - Google Patents

Method for manufacturing printed wiring board Download PDF

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JP2016181623A
JP2016181623A JP2015061543A JP2015061543A JP2016181623A JP 2016181623 A JP2016181623 A JP 2016181623A JP 2015061543 A JP2015061543 A JP 2015061543A JP 2015061543 A JP2015061543 A JP 2015061543A JP 2016181623 A JP2016181623 A JP 2016181623A
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hole
resist film
wall surface
printed wiring
wiring board
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JP6491919B2 (en
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尚輝 麻場
Naoki Asaba
尚輝 麻場
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Kyocera Corp
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Kyocera Corp
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Abstract

PROBLEM TO BE SOLVED: To provide a method for manufacturing a printed wiring board, by which a resist film in a through-hole can be partially removed with high accuracy so as to form a conductor films divided in a plurality of numbers in a circumferential direction of the through-hole.SOLUTION: The method for manufacturing a printed wiring board includes steps of: forming a through-hole preparatory hole 5A penetrating top and back surfaces of an insulating resin plate 2; forming a metal plating film 4 on at least an inner wall surface of the through-hole preparatory hole 5A; forming a resist film 6 on the inner wall surface of the through-hole 5 where the metal plating film 4 is formed; partially removing the resist film 6 on the inner wall surface of the through-hole 5 to divide the resist film into a plurality of numbers in a circumferential direction of the through-hole 5; removing the metal plating film 4 exposed from the resist film 6; and removing the resist film 6 remaining on the inner wall surface of the through-hole 5. The step of partially removing the resist film 6 on the inner wall surface of the through-hole 5 is carried out by irradiating inside the through-hole 5 with laser light.SELECTED DRAWING: Figure 1

Description

本発明は、印刷配線板の製造方法に関する。   The present invention relates to a method for manufacturing a printed wiring board.

従来、チップ部品などを搭載する印刷配線板の表裏面および内層を接続するものとしてスルーホールが用いられてきた。このスルーホールの孔の内壁には導体として金属めっき皮膜が全面にわたって形成され、表裏面の回路および内層の回路を接続している。スルーホール1つは1ネットのみを保持する。
また、スルーホールには、特許文献1に示すように、スルーホールの内壁に形成されためっき皮膜(導体皮膜)がスルーホールの周方向に複数に分割されて表裏の対応する配線パターンに接続される、分割されたスルーホール(半割スルーホール)がある。
このような半割スルーホールは、スルーホールの内壁面の導体皮膜を軸方向に平行に除去して分割している。分割されたそれぞれの導体皮膜は回路的に切断されている。また、半割スルーホールは、このスルーホールの部位で印刷配線板を切断することにより、端面に外部接続用の側面回路(側面電極)を形成する印刷配線板の製造などにも利用される(特許文献2)。
Conventionally, through-holes have been used to connect the front and back surfaces and inner layers of printed wiring boards on which chip components and the like are mounted. On the inner wall of the through hole, a metal plating film is formed over the entire surface as a conductor to connect the circuit on the front and back surfaces and the circuit on the inner layer. One through hole holds only one net.
Also, as shown in Patent Document 1, a plating film (conductor film) formed on the inner wall of the through hole is divided into a plurality of through holes in the circumferential direction of the through hole and connected to corresponding wiring patterns on the front and back sides. There are divided through holes (half through holes).
Such a halved through hole is divided by removing the conductor film on the inner wall surface of the through hole in parallel with the axial direction. Each of the divided conductor films is cut in a circuit. The half through-hole is also used for manufacturing a printed wiring board in which a side circuit (side electrode) for external connection is formed on an end surface by cutting the printed wiring board at a portion of the through hole ( Patent Document 2).

スルーホールを形成する製造方法としては以下の(i)〜(iv)の工程を含む方法が用いられていた。
(i)スルーホール内壁面にめっき皮膜およびレジスト膜を形成する
(ii)スルーホール内壁面を露光し、分割領域を形成する
(iii)露光したレジスト膜を現像で除去し、分割領域のめっき膜を露出させる
(iv)露出しためっき膜をエッチングにて除去し、残ったレジスト膜を剥離する
露光は、スルーホール内壁面の所定位置に光を照射するため、特殊レンズ(プリズムシート)が使用される。この特殊レンズは、平行光である入射光を一方向に散乱した透過光に変換し、特定方向のみに光を照射できるようにしたものである。
As a manufacturing method for forming a through hole, a method including the following steps (i) to (iv) has been used.
(I) Form a plating film and a resist film on the inner wall surface of the through hole. (Ii) Expose the inner wall surface of the through hole to form a divided region. (Iii) Remove the exposed resist film by development, and a plated film in the divided region. (Iv) Remove the exposed plating film by etching, and peel off the remaining resist film. For exposure, a special lens (prism sheet) is used to irradiate light at a predetermined position on the inner wall surface of the through hole. The This special lens converts incident light, which is parallel light, into transmitted light scattered in one direction so that light can be irradiated only in a specific direction.

しかしながら、プリズムは予めサイズが決まっており、かつスルーホール配置に合わせて位置を微調整できないため、スルーホール内の所定位置(分割領域)に狙い通りに光を当てることは困難であり、レジスト膜の除去が不十分になるという問題もあった。
また、プリズムを用いた場合、散乱光であるため、微細領域の露光が困難であり、小径の半割スルーホールの形成は困難であった。
However, since the size of the prism is determined in advance and the position cannot be finely adjusted according to the arrangement of the through hole, it is difficult to irradiate light to a predetermined position (divided region) in the through hole as intended. There was also a problem that the removal of water became insufficient.
Further, when a prism is used, since it is scattered light, it is difficult to expose a fine region, and it is difficult to form a small-diameter half through hole.

特開平8−195539号公報JP-A-8-195539 特開2006−229033号公報JP 2006-229033 A

本発明の課題は、スルーホール内のレジスト膜を高い精度で部分的に除去し、スルーホールの周方向に複数に分割された導体皮膜を形成することができる印刷配線板の製造方法を提供することである。   The subject of this invention provides the manufacturing method of the printed wiring board which can remove the resist film in a through hole partially with high precision, and can form the conductor film divided | segmented into the circumferential direction of the through hole into plurality. That is.

本発明は、上記課題を解決するべく完成されたものであって、以下の構成からなる。
(1)絶縁樹脂板の表裏面を貫通するスルーホール下孔を形成する工程と、少なくとも前記スルーホール下孔内壁面に金属めっき膜を形成する工程と、前記金属めっき膜を形成したスルーホール内壁面にレジスト膜を形成する工程と、スルーホール内壁面のレジスト膜を部分的に除去して、スルーホールの周方向に複数に分割する工程と、レジスト膜から露出した金属めっき膜を除去する工程と、スルーホール内壁面に残ったレジスト膜を除去する工程とを含む印刷配線板の製造方法であって、前記スルーホール内壁面のレジスト膜の部分的な除去が、レーザを前記スルーホール内に照射して行われることを特徴とする印刷配線板の製造方法。
(2)前記金属めっき膜を、前記スルーホール内壁面から前記絶縁樹脂板の表裏面にかけて形成し、前記絶縁樹脂板の表裏面に形成した金属めっき膜の表面にレジスト膜を形成し、ついで前記スルーホールの周方向に複数に分割された部位に連通するレジスト膜および金属めっき膜を除去し、さらにスルーホール内壁面に残ったレジスト膜を除去するにあたり、絶縁樹脂板の表裏面に残ったレジスト膜も除去してランドを形成する(1)に記載の印刷配線板の製造方法。
(3)前記スルーホールの径が、0.85〜0.15mmである(1)または(2)に記載の印刷配線板の製造方法。
(4)前記スルーホール内壁面に残ったレジスト膜を除去した後、前記スルーホールの分割領域で印刷配線板を切断して、印刷配線板の辺部または角部に端面スルーホールを形成する(1)〜(3)のいずれかに記載の印刷配線板の製造方法。
The present invention has been completed in order to solve the above problems, and has the following configuration.
(1) A step of forming a through hole pilot hole penetrating the front and back surfaces of the insulating resin plate, a step of forming a metal plating film on at least the inner wall surface of the through hole lower hole, and a through hole in which the metal plating film is formed A step of forming a resist film on the wall surface, a step of partially removing the resist film on the inner wall surface of the through hole and dividing the resist film into a plurality of portions in the circumferential direction of the through hole, and a step of removing the metal plating film exposed from the resist film And a step of removing the resist film remaining on the inner wall surface of the through hole, wherein the partial removal of the resist film on the inner wall surface of the through hole is performed by placing a laser in the through hole. A method for producing a printed wiring board, which is performed by irradiation.
(2) The metal plating film is formed from the inner wall surface of the through hole to the front and back surfaces of the insulating resin plate, and a resist film is formed on the surface of the metal plating film formed on the front and back surfaces of the insulating resin plate. Resist remaining on the front and back surfaces of the insulating resin plate when removing the resist film and metal plating film communicating with the plurality of parts divided in the circumferential direction of the through hole and further removing the resist film remaining on the inner wall surface of the through hole The method for manufacturing a printed wiring board according to (1), wherein the land is also formed by removing the film.
(3) The manufacturing method of the printed wiring board as described in (1) or (2) whose diameter of the said through hole is 0.85-0.15 mm.
(4) After removing the resist film remaining on the inner wall surface of the through-hole, the printed wiring board is cut at the through-hole divided region to form end face through-holes at the sides or corners of the printed wiring board ( The manufacturing method of the printed wiring board in any one of 1)-(3).

本発明の印刷配線板の製造方法によれば、プリズムによる露光に代えてレーザを使用することにより、スルーホール内の所定位置のレジスト膜を精度よく除去できるので、金属めっき膜の残りなどが無い精度の良いエッチングが可能になる。
また、レーザを使用することにより、微細領域のレジスト膜除去が容易となり、例えば、小径のスルーホールにも複数に分割された導体膜を精度よく形成することができる。
According to the method for manufacturing a printed wiring board of the present invention, the resist film at a predetermined position in the through hole can be accurately removed by using a laser instead of the exposure by the prism, so there is no remaining metal plating film. Etching with high accuracy becomes possible.
Further, by using a laser, it is easy to remove a resist film in a fine region. For example, a conductor film divided into a plurality of through holes having a small diameter can be accurately formed.

(a)は、本発明の製造方法によって得られる印刷配線板の一例を示す平面図であり、(b)は(a)のA−A’線断面図である。(A) is a top view which shows an example of the printed wiring board obtained by the manufacturing method of this invention, (b) is the sectional view on the A-A 'line of (a). (a)〜(d)は、本発明に係る印刷配線板の製造方法の一実施形態を示す工程説明図である。(A)-(d) is process explanatory drawing which shows one Embodiment of the manufacturing method of the printed wiring board concerning this invention. (e)〜(g)は、図2から続く工程説明図である。(E)-(g) is process explanatory drawing continued from FIG. (a)〜(d)は、図2、図3に示す印刷配線板の製造方法をより詳細に示す工程説明図である。(A)-(d) is process explanatory drawing which shows the manufacturing method of the printed wiring board shown in FIG. 2, FIG. 3 in detail. (e)〜(g)は、図4から続く工程説明図である。(E)-(g) is process explanatory drawing continued from FIG. 本発明における端面スルーホールの一例を示す斜視図である。It is a perspective view which shows an example of the end surface through hole in this invention.

図1(a)は、印刷配線板10のスルーホール5部分を示す平面図である。この印刷配線板10は、図1(b)に示すように、絶縁樹脂板2の表裏面を貫通したスルーホール5を備え、このスルーホール5内壁面には、部分的にスリット状に非導電化して分割された金属めっき膜4(例えば銅めっき膜等の導体皮膜)が形成されている。印刷配線板10の表裏面には、各金属めっき膜4と連続するランド8が形成され、絶縁樹脂板2の表裏面にある図示しない配線パターンに接続される。   FIG. 1A is a plan view showing a through hole 5 portion of the printed wiring board 10. As shown in FIG. 1B, the printed wiring board 10 includes a through hole 5 penetrating the front and back surfaces of the insulating resin plate 2, and the inner wall surface of the through hole 5 is partially non-conductive in a slit shape. A metal plating film 4 (for example, a conductor film such as a copper plating film) divided into two pieces is formed. Lands 8 that are continuous with the respective metal plating films 4 are formed on the front and back surfaces of the printed wiring board 10, and are connected to a wiring pattern (not shown) on the front and back surfaces of the insulating resin plate 2.

絶縁樹脂板2を形成する樹脂としては、例えば、エポキシ樹脂、ビスマレイミド−トリアジン樹脂、ポリイミド樹脂、ポリフェニレンエーテル(PPE)樹脂、フェノール樹脂、ポリテトラフルオロエチレン(PTFE)樹脂、ケイ素樹脂、ポリブタジエン樹脂、ポリエステル樹脂、メラミン樹脂、ユリア樹脂、ポリフェニレンサルファイド(PPS)樹脂、ポリフェニレンオキシド(PPO)樹脂などが挙げられる。これらの樹脂は2種以上を混合してもよい。絶縁樹脂板2を形成する樹脂には、上述の無機充填材、フェノール樹脂やメタクリル樹脂からなる有機充填材が含まれていてもよい。
また、印刷配線板10には、絶縁樹脂板2だけではなく、絶縁板と、この絶縁板の両側に積層された絶縁樹脂板2とからなる積層板を用いてもよい。この積層板は、絶縁板に絶縁樹脂板2が積層された後、プレス処理等によって形成される。
Examples of the resin that forms the insulating resin plate 2 include epoxy resin, bismaleimide-triazine resin, polyimide resin, polyphenylene ether (PPE) resin, phenol resin, polytetrafluoroethylene (PTFE) resin, silicon resin, polybutadiene resin, Examples thereof include polyester resin, melamine resin, urea resin, polyphenylene sulfide (PPS) resin, polyphenylene oxide (PPO) resin, and the like. Two or more of these resins may be mixed. The resin forming the insulating resin plate 2 may include the above-described inorganic filler, and an organic filler made of a phenol resin or a methacrylic resin.
Further, the printed wiring board 10 may be a laminated board including not only the insulating resin board 2 but also an insulating board and the insulating resin boards 2 laminated on both sides of the insulating board. This laminated plate is formed by pressing or the like after the insulating resin plate 2 is laminated on the insulating plate.

前記印刷配線板10は、図1(b)では両面印刷配線板であるが、これに限定されず、層数を増やしたビルドアップ層としてもよい。さらに、ビルドアップ印刷配線板に限らず、通常の多層印刷配線板、貼り合わせ多層印刷配線板、多重多層印刷配線板などに適用できる。また、図では省略しているが、分割されたスルーホール以外に導体層間を貫通する通常のスルーホールやビアで電気的に接続していることは言うまでもない。   The printed wiring board 10 is a double-sided printed wiring board in FIG. 1B, but is not limited thereto, and may be a build-up layer with an increased number of layers. Furthermore, the present invention is not limited to build-up printed wiring boards, and can be applied to ordinary multilayer printed wiring boards, bonded multilayer printed wiring boards, and multiple multilayer printed wiring boards. Further, although omitted in the drawing, it goes without saying that other than the divided through holes, they are electrically connected by normal through holes or vias penetrating the conductor layers.

スルーホール5は、絶縁樹脂板2の表裏面を貫通するようにドリル加工やレーザ加工を施してスルーホール下孔5Aを形成し、このスルーホール下孔5Aの内壁面に金属めっき膜4およびレジスト膜6を設けて、レーザで選択的にレジスト膜6を除去することにより形成される。   The through hole 5 is drilled or laser processed so as to penetrate the front and back surfaces of the insulating resin plate 2 to form a through hole lower hole 5A, and the metal plating film 4 and resist are formed on the inner wall surface of the through hole lower hole 5A. The film 6 is provided, and the resist film 6 is selectively removed with a laser.

金属めっき膜4としては、エッチング等の加工のしやすさから、銅めっき膜であるのがよい。   The metal plating film 4 is preferably a copper plating film from the viewpoint of ease of processing such as etching.

次に、本実施形態に係る印刷配線板の製造方法を説明する。この印刷配線板の製造方法は、下記の工程(I)〜(VI)を含む。
(I)絶縁樹脂板の表裏面を貫通するスルーホール下孔を形成する工程
(II)絶縁樹脂板の表裏面およびスルーホール下孔の内壁面に金属めっき膜を形成する工程
(III)絶縁樹脂板の表裏面およびスルーホールの内壁面にレジスト膜を形成する工程
(IV)スルーホールの少なくとも一方の開口にパターンマスクを配置し、このパターンマスクの開口から紫外線を照射し、レーザを前記スルーホール内に照射して、スルーホール内壁面のレジスト膜を部分的に除去して、現像して露光部分のレジストを除去してスルーホールの周方向に複数に分割する工程
(V)レジスト膜から露出した金属めっき膜を除去するエッチング工程
(VI)スルーホール内壁面に残ったレジスト膜を除去する工程
Next, a method for manufacturing a printed wiring board according to this embodiment will be described. This method for manufacturing a printed wiring board includes the following steps (I) to (VI).
(I) Step of forming through hole pilot holes penetrating front and back surfaces of insulating resin plate (II) Step of forming metal plating film on front and rear surfaces of insulating resin plate and inner wall surface of through hole lower hole (III) Insulating resin Step of forming a resist film on the front and back surfaces of the plate and the inner wall surface of the through hole (IV) A pattern mask is disposed in at least one opening of the through hole, ultraviolet rays are irradiated from the opening of the pattern mask, and the laser is transmitted through the through hole. The resist film on the inner wall surface of the through hole is partially removed and developed to remove the resist in the exposed portion and divided into a plurality of portions in the circumferential direction of the through hole. (V) Exposed from the resist film Etching process to remove the plated metal film (VI) Process to remove the resist film remaining on the inner wall surface of the through hole

本発明に係る印刷配線板の製造方法を、図面に基づいて説明する。図2(a)に示すように、絶縁樹脂板2を準備する。絶縁樹脂板2は、表裏に銅箔が積層されている両面銅張積層板が適している。銅箔厚は、例えば12μmとする。絶縁樹脂板2にレーザ加工またはドリル加工を施し、絶縁樹脂板2を貫通するスルーホール下孔5Aを形成し、このスルーホール下孔5Aの内壁面および絶縁樹脂板2の表裏面2A,2Bに金属めっき膜4を設ける。次に、図2(b)に示すように、金属めっき膜4の表面にレジスト膜6を積層する。このレジスト膜6としては、スルーホール5の内壁面にもレジスト膜6を形成するうえで、例えば電着レジストが好適である。本実施形態で使用の電着レジストはネガ型であり、例えば日本ペイント(株)製P−1000などが使用可能である。   A method for producing a printed wiring board according to the present invention will be described with reference to the drawings. As shown in FIG. 2A, an insulating resin plate 2 is prepared. The insulating resin plate 2 is suitably a double-sided copper-clad laminate in which copper foils are laminated on the front and back. Copper foil thickness shall be 12 micrometers, for example. Laser processing or drilling is performed on the insulating resin plate 2 to form a through-hole lower hole 5A penetrating the insulating resin plate 2, and the inner wall surface of the through-hole lower hole 5A and the front and rear surfaces 2A and 2B of the insulating resin plate 2 are formed. A metal plating film 4 is provided. Next, as shown in FIG. 2B, a resist film 6 is laminated on the surface of the metal plating film 4. As the resist film 6, for example, an electrodeposition resist is suitable for forming the resist film 6 on the inner wall surface of the through hole 5. The electrodeposition resist used in the present embodiment is a negative type, and for example, P-1000 manufactured by Nippon Paint Co., Ltd. can be used.

次に、図2(c)に示すように、絶縁樹脂板2の表面2Aにあるスルーホール5上にパターンマスク70を配置し、紫外線UVを照射して、表面2Aを露光する。
次に、図2(d)に示すように、絶縁樹脂板2の表裏を反転させ、図3(e)に示すように、スルーホール5の裏面2Bにあるスルーホール5上に別のパターンマスク70’を配置し、紫外線UVを照射して露光する。
次に、図3(f)に示すように、パターンマスク70’を除去後、スルーホール5の内壁面のレジスト膜6をレーザ装置によりレーザ光Lを照射し部分的に除去する。
Next, as shown in FIG. 2C, a pattern mask 70 is placed on the through hole 5 in the surface 2A of the insulating resin plate 2, and the surface 2A is exposed by irradiating ultraviolet rays UV.
Next, as shown in FIG. 2 (d), the front and back of the insulating resin plate 2 are reversed, and another pattern mask is formed on the through hole 5 on the back surface 2B of the through hole 5 as shown in FIG. 3 (e). 70 'is placed and exposed by irradiating with ultraviolet UV.
Next, as shown in FIG. 3F, after removing the pattern mask 70 ', the resist film 6 on the inner wall surface of the through hole 5 is partially removed by irradiating the laser beam L with a laser device.

しかる後、現像して露光部分以外のレジスト膜を除去し、次に露出した金属めっき膜4をエッチングにより除去し、最後に、残ったレジスト膜6を剥離し、分割領域7で金属めっき膜4(導体皮膜)が周方向に分割された半割スルーホール5を有する印刷配線板10を得る。印刷配線板10の表裏面には、スルーホール5の金属めっき膜4と連続するランド8が形成されている。(図3(g))   Thereafter, development is performed to remove the resist film other than the exposed portion, and then the exposed metal plating film 4 is removed by etching. Finally, the remaining resist film 6 is peeled off, and the metal plating film 4 is separated in the divided regions 7. The printed wiring board 10 having the half through-hole 5 in which the (conductor film) is divided in the circumferential direction is obtained. On the front and back surfaces of the printed wiring board 10, lands 8 that are continuous with the metal plating film 4 of the through holes 5 are formed. (Fig. 3 (g))

スルーホール5内に分割領域7を設けるためのレーザ装置は、XYを数値制御で照射位置を動かす。レーザ光は指向性に優れているので、高い精度でスルーホール5内に分割領域7を形成できる。また、レーザ光の特性から、スルーホール5が小径であっても適用可能であり、通常、スルーホールの径が、0.85〜0.15mm、好ましくは、0.35〜0.15mmであるのがよい。
なお、レーザ光Lは、スルーホール5内壁面のレジスト膜6を除去できるならば、絶縁樹脂板2の表裏面のどちらか一方からの照射だけでもよい。
The laser device for providing the divided region 7 in the through hole 5 moves the irradiation position by numerical control of XY. Since the laser beam is excellent in directivity, the divided region 7 can be formed in the through hole 5 with high accuracy. Further, it can be applied even if the through hole 5 has a small diameter due to the characteristics of the laser beam. Usually, the diameter of the through hole is 0.85 to 0.15 mm, preferably 0.35 to 0.15 mm. It is good.
The laser beam L may be irradiated only from either the front or back surface of the insulating resin plate 2 as long as the resist film 6 on the inner wall surface of the through hole 5 can be removed.

レーザ光Lは、金属めっき4を削らず、表面のレジスト膜6のみを削り取るように出力(エネルギー)を調整するのが好ましい。
また、このレーザLの種類としては、CO2レーザ、UV−YAGレーザなどが挙げられる。
It is preferable to adjust the output (energy) of the laser beam L so as not to scrape the metal plating 4 but to scrape only the resist film 6 on the surface.
As the kind of the laser L, CO 2 laser, and the like UV-YAG laser.

図4(a)〜(d)および図5(e)〜(k)は、図2、図3に示す印刷配線板の製造方法をより詳細に示す図であり、各図は、絶縁樹脂板2の表面2A、絶縁樹脂板2の断面および絶縁樹脂板2の裏面2Bをそれぞれ示している。なお、断面図は、図4(a)のB−B’線断面図であり、以降B−B’線は省略している。   4 (a) to 4 (d) and FIGS. 5 (e) to 5 (k) are diagrams showing in more detail the manufacturing method of the printed wiring board shown in FIGS. 2 and 3, and each figure is an insulating resin plate. 2 shows a front surface 2A, a cross section of the insulating resin plate 2, and a back surface 2B of the insulating resin plate 2. The cross-sectional view is a cross-sectional view taken along the line B-B ′ of FIG. 4A, and the B-B ′ line is omitted hereinafter.

図4(a)に示すように、絶縁樹脂板2に表裏面を貫通するスルーホール5を設け、絶縁樹脂板2の表裏面2A,2Bおよびスルーホール5内壁面に金属めっき膜4を形成し、さらに電着レジストにより金属めっき膜4の表面にレジスト膜6で被覆する。   As shown in FIG. 4A, through-holes 5 penetrating the front and back surfaces are provided in the insulating resin plate 2, and the metal plating film 4 is formed on the front and back surfaces 2A and 2B of the insulating resin plate 2 and the inner wall surface of the through-hole 5. Further, the surface of the metal plating film 4 is covered with a resist film 6 with an electrodeposition resist.

次に、図4(b)に示すように、スリット71を有する遮光性のパターンマスク70を絶縁樹脂板2の表面に配置し、紫外線UVを照射して、絶縁樹脂板2の表面ランド21以外を露光する   Next, as shown in FIG. 4B, a light-shielding pattern mask 70 having slits 71 is arranged on the surface of the insulating resin plate 2 and irradiated with ultraviolet rays UV, so that other than the surface land 21 of the insulating resin plate 2. To expose

次に、図4(c)に示すように、縁樹脂板2の裏面にあるスリット73を有するパターンマスク70’を配置し、紫外線UVを照射して表面ランド21’を露光する。
表裏面からそれぞれ露光された絶縁樹脂板2は、両面の表面ランド21、21’と、前記スルーホール5の内壁面が部分的に露光された状態となる。
次に、図4(d)に示すように、パターンマスク70’を除去後、スルーホール5の内壁面のレジスト膜6をレーザ装置によりレーザ光Lを照射し部分的に除去する。
Next, as shown in FIG. 4C, a pattern mask 70 ′ having a slit 73 on the back surface of the edge resin plate 2 is disposed, and the surface land 21 ′ is exposed by irradiating ultraviolet rays UV.
The insulating resin plates 2 exposed from the front and back surfaces are in a state where the surface lands 21 and 21 ′ on both sides and the inner wall surface of the through hole 5 are partially exposed.
Next, as shown in FIG. 4D, after removing the pattern mask 70 ', the resist film 6 on the inner wall surface of the through hole 5 is partially removed by irradiating the laser beam L with a laser device.

次に、図5(e)に示すように、露光したレジスト膜6を現像液で除去し、分割領域7の下部のスルーホール5の内壁面の金属めっき膜4を部分的に露出させる。   Next, as shown in FIG. 5E, the exposed resist film 6 is removed with a developing solution, and the metal plating film 4 on the inner wall surface of the through hole 5 below the divided region 7 is partially exposed.

次に、図5(f)に示すように、露出した金属めっき膜4をエッチングにて除去する。次に、図5(g)に示すように、スルーホール5内壁面に残ったレジスト膜6を剥離すると、分割領域7の下部で内壁面の周方向の各回路間の電気的接続を断絶したスルーホール5が完成する。レジスト膜6の剥離は、例えば水酸化ナトリウム溶液により行うことができる。   Next, as shown in FIG. 5F, the exposed metal plating film 4 is removed by etching. Next, as shown in FIG. 5G, when the resist film 6 remaining on the inner wall surface of the through hole 5 is peeled off, the electrical connection between the circuits in the circumferential direction of the inner wall surface is cut off at the lower part of the divided region 7. The through hole 5 is completed. The resist film 6 can be peeled off with, for example, a sodium hydroxide solution.

スルーホール5は、分割領域7で印刷配線板10を切断して、印刷配線板10の辺部または角部に端面スルーホール51を形成することもできる。図6は、印刷配線板10の辺部に形成した端面スルーホール51を示しており、スルーホールの内壁面の金属めっき膜4が外部に露呈して、印刷配線板10の側面電極を形成している。このような端面スルーホール51は主に外部接続用などに用いられる。   The through-hole 5 can also be formed by cutting the printed wiring board 10 in the divided region 7 to form the end face through-hole 51 at the side or corner of the printed wiring board 10. FIG. 6 shows an end face through hole 51 formed in a side portion of the printed wiring board 10, and the metal plating film 4 on the inner wall surface of the through hole is exposed to the outside to form a side electrode of the printed wiring board 10. ing. Such an end face through hole 51 is mainly used for external connection or the like.

以上述べたように、本発明の印刷配線板の製造方法によれば、従来のプリズムによる露光の代わりに、照射位置を自在に動かせるレーザで、スルーホール5内壁面の所定位置のレジスト膜6を精度よく除去することができるので、スルーホール5内の金属めっき膜4をエッチングにて除去することにより、めっき膜の残渣が残ることがなく、分割領域7にてスルーホール5を確実に電気的に分割することができる。
また、プリズムを使用しないため露光光が散乱光にはならず、微細回路の露光が容易となり、より小径のスルーホールを形成することもできる。
As described above, according to the method for manufacturing a printed wiring board of the present invention, the resist film 6 at a predetermined position on the inner wall surface of the through-hole 5 can be formed with a laser that can move the irradiation position freely, instead of the exposure by the conventional prism. Since the metal plating film 4 in the through hole 5 can be removed by etching because the metal plating film 4 in the through hole 5 can be removed by etching, the plating film residue does not remain, and the through hole 5 is reliably electrically connected in the divided region 7. Can be divided into
Further, since the prism is not used, the exposure light does not become scattered light, the fine circuit can be easily exposed, and a through hole having a smaller diameter can be formed.

また、スルーホール5の周方向に分割された金属めっき膜4(導体皮膜)の分割数は特に制限されないが、レーザを使用したことにより高精度な多分割が可能となったため、2分割以上で、例えば6分割でも可能である。   Further, the number of divisions of the metal plating film 4 (conductor film) divided in the circumferential direction of the through hole 5 is not particularly limited. However, since a high-precision multi-division is possible by using a laser, the number of divisions is more than two. For example, even 6 divisions are possible.

なお、上記の実施形態ではネガ型の電着レジストを使用したが、ポジ型の電着レジストを使用してもよい。この場合は、パターンマスクは図示したものとは逆パターンのマスクを使用する必要がある。その他は前述の実施形態と同じである。   In the above embodiment, a negative electrodeposition resist is used, but a positive electrodeposition resist may be used. In this case, it is necessary to use a mask having a reverse pattern to that shown in the figure. Others are the same as the above-mentioned embodiment.

2 絶縁樹脂板
4 金属めっき膜
5 スルーホール
5A スルーホール下孔
6 レジスト膜
7 分割領域
8 ランド
21、21’ 表面ランド
70、70’ パターンマスク
71、73 スリット
9 ソルダーレジスト
10 印刷配線板
51 端面スルーホール
UV 紫外線
L レーザ光
2 Insulating resin plate 4 Metal plated film 5 Through hole 5A Through hole pilot hole 6 Resist film 7 Divided region 8 Land 21, 21 'Surface land 70, 70' Pattern mask 71, 73 Slit 9 Solder resist 10 Printed wiring board 51 End surface through Hall UV UV L Laser light

Claims (4)

絶縁樹脂板の表裏面を貫通するスルーホール下孔を形成する工程と、
少なくとも前記スルーホール下孔内壁面に金属めっき膜を形成する工程と、
前記金属めっき膜を形成したスルーホール内壁面にレジスト膜を形成する工程と、
スルーホール内壁面のレジスト膜を部分的に除去して、スルーホールの周方向に複数に分割する工程と、
レジスト膜から露出した金属めっき膜を除去する工程と、
スルーホール内壁面に残ったレジスト膜を除去する工程とを含む印刷配線板の製造方法であって、
前記スルーホール内壁面のレジスト膜の部分的な除去が、レーザを前記スルーホール内に照射して行われることを特徴とする印刷配線板の製造方法。
Forming a through-hole pilot hole penetrating the front and back surfaces of the insulating resin plate;
Forming a metal plating film on at least the inner wall surface of the through-hole lower hole;
Forming a resist film on the inner wall surface of the through hole formed with the metal plating film;
A process of partially removing the resist film on the inner wall surface of the through hole and dividing the resist film into a plurality in the circumferential direction of the through hole;
Removing the exposed metal plating film from the resist film;
A method of manufacturing a printed wiring board including a step of removing the resist film remaining on the inner wall surface of the through hole,
The method for manufacturing a printed wiring board, wherein the partial removal of the resist film on the inner wall surface of the through hole is performed by irradiating the through hole with a laser.
前記金属めっき膜を、前記スルーホール内壁面から前記絶縁樹脂板の表裏面にかけて形成し、前記絶縁樹脂板の表裏面に形成した金属めっき膜の表面にレジスト膜を形成し、ついで前記スルーホールの周方向に複数に分割された部位に連通するレジスト膜および金属めっき膜を除去し、さらにスルーホール内壁面に残ったレジスト膜を除去するにあたり、絶縁樹脂板の表裏面に残ったレジスト膜も除去してランドを形成する請求項1に記載の印刷配線板の製造方法。   The metal plating film is formed from the inner wall surface of the through hole to the front and back surfaces of the insulating resin plate, a resist film is formed on the surface of the metal plating film formed on the front and back surfaces of the insulating resin plate, and then the through hole is formed. Remove the resist film and metal plating film communicating with the part divided into multiple parts in the circumferential direction, and also remove the resist film remaining on the front and back surfaces of the insulating resin plate when removing the resist film remaining on the inner wall surface of the through hole The printed wiring board manufacturing method according to claim 1, wherein the land is formed. 前記スルーホールの径が、0.85〜0.15mmである請求項1または2に記載の印刷配線板の製造方法。   The printed wiring board manufacturing method according to claim 1, wherein a diameter of the through hole is 0.85 to 0.15 mm. 前記スルーホール内壁面に残ったレジスト膜を除去した後、前記スルーホールの分割領域で印刷配線板を切断して、印刷配線板の辺部または角部に端面スルーホールを形成する請求項1〜3のいずれかに記載の印刷配線板の製造方法。   The resist film remaining on the inner wall surface of the through hole is removed, and then the printed wiring board is cut at the divided region of the through hole to form an end surface through hole at a side or corner of the printed wiring board. 4. A method for producing a printed wiring board according to any one of 3 above.
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Publication number Priority date Publication date Assignee Title
CN114501833A (en) * 2020-10-23 2022-05-13 深南电路股份有限公司 Method for processing solder mask on circuit board
US11778742B2 (en) 2019-03-19 2023-10-03 Nec Corporation Through-hole via and circuit board

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JPH08195539A (en) * 1995-01-18 1996-07-30 Eastern:Kk Printed circuit board and manufacture thereof
JPH10270826A (en) * 1997-03-21 1998-10-09 Sony Corp Manufacture of printed wiring board
JPH11150365A (en) * 1997-11-19 1999-06-02 Nissha Printing Co Ltd Manufacture of printed wiring board with through-hole

Patent Citations (3)

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Publication number Priority date Publication date Assignee Title
JPH08195539A (en) * 1995-01-18 1996-07-30 Eastern:Kk Printed circuit board and manufacture thereof
JPH10270826A (en) * 1997-03-21 1998-10-09 Sony Corp Manufacture of printed wiring board
JPH11150365A (en) * 1997-11-19 1999-06-02 Nissha Printing Co Ltd Manufacture of printed wiring board with through-hole

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11778742B2 (en) 2019-03-19 2023-10-03 Nec Corporation Through-hole via and circuit board
CN114501833A (en) * 2020-10-23 2022-05-13 深南电路股份有限公司 Method for processing solder mask on circuit board
CN114501833B (en) * 2020-10-23 2024-05-14 深南电路股份有限公司 Processing method of solder mask layer on circuit board

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