JP2016169953A - Measurement device, measurement unit, and method for measuring amount of dimension change - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a measurement device, a measurement unit, and a method for measuring the amount of a dimension change for accurately measuring the amount of a change in the length of a measurement sample.SOLUTION: A support base 110 supports a measurement sample 500 along a length measurement direction P at a prescribed angle a of inclination against the vertical direction. A placement surface 120 is formed on the support base 110 so as to come in contact with the measurement sample 500 along the length measurement direction P, and an abutting surface 130 is provided at a vertically downward end of the support base 110. The abutting surface 130 comes in contact with a lower end 501 of the measurement sample 500. A first length measurement sensor 140 is provided at a vertically upward end of the support base 110, and the first length measurement sensor 140 is attached to the support base 110 so as to face an upper end 502 of the measurement sample 500 without touching the upper end 502 of the measurement sample 500. The first length measurement sensor 140 detects the amount of a change in a length S to the other end of the measurement sample 500 in the length measurement direction P.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a measuring device and the like, for example, to a device for measuring a change in length of a measurement sample.

  Changes in the object dimensions over time include various types such as those due to moisture absorption / extraction and temperature change, and creep deformation.

  On the other hand, in recent years, stricter dimensional stability is required for measurement results with the progress of measurement engineering and precision engineering. In particular, there are products that require dimensional stability of the order of micrometers (μm) or nanometers (nm) for large structures of the order of meters (m), such as antenna reflectors and optical telescopes. Therefore, it is required to eliminate the error factor as much as possible with respect to the change of the object size with time and to provide more accurate measurement.

  Patent Document 1 discloses an apparatus for measuring a change in dimension, in which an upper end portion of a measurement sample is fixed, a lower end portion of the measurement sample is a free end, and a change amount of the lower end portion is measured.

  FIG. 8 is a diagram showing the configuration of the measuring apparatus described in Patent Document 1. As shown in FIG. As shown in FIG. 8, the upper end portion of the strip-shaped measurement sample 800 is held by the reference plate 700 by a screw press of the fixing portion 701 in a constant temperature and humidity chamber (not shown). An opening 702 is formed on the lower end side of the reference plate 700. The lower end portion of the measurement sample 800 is a free end that can be expanded and contracted, and is disposed in the opening 702. A laser contour measuring instrument (not shown) measures a distance D between the lower end Z1 of the opening 702 and the lower end Z2 of the measurement sample 800.

  A technique related to the present invention is also disclosed in Patent Document 2.

JP-A-5-149899 Japanese Patent Laid-Open No. 11-83417

  However, in the invention described in Patent Document 1, the measurement sample 800 is held on the reference plate 700 by holding the fixing portion 701 with screws (gripping and fixing method). For this reason, there is a problem that the force (gripping force) for holding the measurement sample 800 on the reference plate 700 by the screw pressing of the fixing portion 701 decreases with time, and the measurement result of the distance D is affected. In particular, when there is a high demand for measurement accuracy, the stress itself applied to the measurement sample 800 by holding the screw press of the fixing portion 701 may cause a measurement error.

  This invention is made | formed in view of such a situation, and the objective of this invention is providing the measuring apparatus which can measure the variation | change_quantity of the length of a measurement sample correctly.

  The measurement apparatus of the present invention includes a support base that supports a measurement sample by being inclined at a predetermined inclination angle with respect to a vertical direction along the length measurement direction of the measurement sample, and the measurement sample along the length measurement direction of the measurement sample. A mounting surface formed on the support table so as to contact the measurement sample, an abutting end surface provided at an end portion on the vertically lower side of the support table and in contact with one end portion of the measurement sample, and the support table Is mounted on the support base so as to face the other end of the measurement sample without contacting the other end of the measurement sample, and in the length measuring direction of the measurement sample. And a dimensional change detection unit that detects a change in length to the other end of the measurement sample.

  The dimension change detection method of the present invention is a dimension for detecting a change amount of the length of a measurement sample using a measurement device and a measurement unit that accommodates the measurement device and includes a test tank that can control internal temperature and humidity. In the variation detection method, the measurement apparatus includes a support base that supports the measurement sample by tilting the measurement sample at a predetermined inclination angle with respect to a vertical direction along the length measurement direction of the measurement sample, and measuring the measurement sample. A mounting surface formed on the support base so as to come into contact with the measurement sample along the longitudinal direction, and an abutting portion which is provided at an end portion on the vertically lower side of the support base and contacts one end portion of the measurement sample An end face, provided at an end of the support table vertically above, and attached to the support table so as to face the other end of the measurement sample without contacting the other end of the measurement sample; The measurement sample in the measurement direction of the measurement sample A dimensional change amount detection unit that detects a change amount of the length to the other end, a measurement sample placement step of placing the measurement sample on the placement surface of the support, and a measurement sample A control step for controlling the temperature and humidity in the test tank in a state in which one end is in contact with the abutting end surface, and the dimensional change detection unit is configured to adjust the measurement sample in the length measurement direction of the measurement sample. A dimensional change detection step for detecting a change in length to the other end.

  According to the measuring apparatus according to the present invention, the amount of change in the length of the measurement sample can be accurately measured.

It is a side view which shows typically the state which has arrange | positioned the measuring apparatus in the 1st Embodiment of this invention in a test tank. It is a figure which shows the arrow A of FIG. It is a side view which shows typically the state which has arrange | positioned the measuring apparatus in the 1st Embodiment of this invention in a test tank, Comprising: It is a figure which shows the force relationship added to a mounting surface. It is a side view which shows typically the state which has arrange | positioned the cooling device in the 1st Embodiment of this invention in a test tank, Comprising: It is a figure for demonstrating the minimum value of the inclination-angle of a support stand. It is a figure which shows the state which mounted the modification of the shape of the measurement sample on the mounting surface, Comprising: It is a figure corresponded to the arrow A of FIG. It is a top view which shows typically the state which has arrange | positioned several measuring apparatuses in the 1st Embodiment of this invention in a test tank. It is a side view which shows typically the state which has arrange | positioned the measuring apparatus in the 2nd Embodiment of this invention in a test tank. It is a figure which shows the structure of the measuring apparatus of patent document 1. FIG.

<First Embodiment>
A configuration of the measuring apparatus 100 according to the first embodiment of the present invention will be described. FIG. 1 is a side view schematically showing a state in which the measuring apparatus 100 is arranged in a test tank 200. FIG. 2 is a diagram showing an arrow A in FIG. The measuring device 100 and the test tank 200 constitute a measuring unit 1000. That is, the measurement unit 1000 includes the measurement device 100 and the test tank 200.

  As shown in FIG. 1, the measuring apparatus 100 is accommodated in a test tank 200.

  The test tank 200 accommodates the measuring device 100 and can control the internal temperature and humidity.

  As shown in FIGS. 1 and 2, the measuring apparatus 100 includes a support base 110, a mounting surface 120, an abutment surface 130, a first length measuring sensor 140, and a support column 150. Yes.

  As shown in FIGS. 1 and 2, the measurement sample 500 is formed in a cylindrical shape, for example. Note that the measurement sample 500 may be formed in a polygonal column shape in addition to the columnar shape.

  As shown in FIG. 1 and FIG. 2, the support base 110 is configured to place a measurement sample 500 along a length measurement direction P of the measurement sample 500 with a predetermined inclination angle a (rad (radian)) with respect to the vertical direction. Support with tilting. However, the inclination angle a <π / 2 (rad). That is, the length measurement direction P of the measurement sample 500 is set parallel to the direction of the predetermined inclination angle a (rad) with respect to the vertical direction. A low thermal expansion material (for example, Super Invar alloy [thermal expansion coefficient <1.0 × 10 −6 (/ K (Calvin)]) is used as the material of the support base 110.

  As shown in FIGS. 1 and 2, the mounting surface 120 is formed on the support base 110 so as to contact the measurement sample 500 along the length measurement direction P of the measurement sample 500. As shown in FIG. 2, the pair of placement surfaces 120 are provided so as to incline in a direction approaching the center line CL <b> 1 of the support base 110 from the vertically upper side to the vertically lower side. Thereby, the center of the circular end surface of the measurement sample 500 is regulated so as to be arranged on the center line CL1 by the weight of the measurement sample 500. In addition, as the material which comprises the mounting surface 120, the low thermal expansion raw material (for example, super invar alloy) is used similarly to the support stand 110. FIG.

  As shown in FIG. 1, the abutting surface 130 is provided at an end portion on the vertically lower side of the support base 110. Further, the abutting surface 130 comes into contact with the lower end portion of the measurement sample 500.

  As shown in FIG. 1, the first length measuring sensor 140 is provided at the end of the support table 110 on the vertically upper side. The first length measurement sensor 140 is attached to the support 110 so as to face the upper end 502 of the measurement sample 500 without contacting the other end of the measurement sample 500. The first length measurement sensor 140 detects or measures a change amount of the length S to the upper end portion 502 of the measurement sample 500 in the length measurement direction P of the measurement sample 500. The first length measurement sensor 140 corresponds to a dimensional change amount detection unit of the present invention.

  As shown in FIG. 1, the support column 150 supports the support base 110. That is, the support column 150 supports the support base 110 such that the support base 110 is inclined at a predetermined inclination angle a (rad) with respect to the vertical direction.

  Here, the force relationship applied to the mounting surface 120 will be described. FIG. 3 is a side view schematically showing a state in which the measuring apparatus 100 is disposed in the test tank 200, and is a diagram showing a force relationship applied to the placement surface 120.

  When the gravitational acceleration is g (m / s2), the mass of the measurement sample is M (kg), and the maximum static friction coefficient between the measurement sample 500 and the placement surface 120 is μ, the force relationship applied to the placement surface 120 is It is shown in FIG.

  In order for the measurement sample 500 to contact the abutting end surface 130 by its own weight, it is necessary to satisfy the following (Formula 1). Note that b (rad) = π / 2−a.

μ × M × g × cos b <M × g × sin b (Formula 1)
When (Formula 1) is modified, the following (Formula 2) is obtained.

tan b> μ (Expression 2)
The minimum value of the inclination angle a, that is, the maximum value of b will be described. FIG. 4 is a side view schematically showing a state in which the measuring apparatus 100 is arranged in the test tank 200 and is a view for explaining the minimum value of the inclination angle a of the support base 110.

  As shown in FIG. 4, it is necessary to prevent the measurement sample 500 from falling in a direction away from the placement surface 120 even when the inclination angle a is reduced.

  Here, the length of the measurement sample in the measurement direction P of the measurement sample 500 is L (mm), and the length of the measurement object in the direction perpendicular to the measurement measurement direction P of the measurement sample 500 is H (mm). ), The following (Equation 3) holds.

tan b> L / H (Equation 3)
Therefore, the following (Expression 4) is derived from (Expression 2) and (Expression 3).

μ <tan b <L / H (Formula 4)
As described above, since b (rad) = π / 2−a, (Expression 4) is transformed into the following (Expression 5).

μ <tan (π / 2−a) <L / H (Formula 5)
As described above, by setting the inclination angle a (rad) so as to satisfy (Equation 5), the lower end portion 501 of the measurement sample 500 is in contact with the placement surface 120 while the measurement sample 500 is in contact with the placing surface 130. Abut. Further, as described above with reference to FIG. 2, the pair of placement surfaces 120 are provided so as to incline in a direction approaching the center line CL <b> 1 of the support base 110 from the vertically upper side to the vertically lower side. . Thereby, the center of the circular end surface of the measurement sample 500 is regulated so as to be arranged on the center line CL by the weight of the measurement sample 500.

  Further, a low thermal expansion material is used as the material constituting the support base 110 and the mounting surface 120. For this reason, the thermal expansion of the support base 110 and the mounting surface 120 is reduced. Therefore, the change in the arrangement position of the first length measuring sensor 140 can be suppressed to be extremely small. Therefore, the first length measurement sensor 140 detects or measures the amount of change in the length S to the upper end 502 of the measurement sample 500 in the measurement direction P of the measurement sample 500, thereby changing the dimension of the measurement sample 500. The amount can be measured or detected. Here, as the principle and type of the first measurement sensor 140, a suitable one is selected according to the measurement accuracy. For example, when accuracy is required to the order of μm (micrometer), an ultrasonic displacement sensor can be used for the first length measurement sensor 140. On the other hand, when accuracy is not required to the order of μm, a laser displacement meter, a capacitance sensor, a laser interferometer, or the like can be used for the first length measurement sensor 140.

  The configuration of the measuring apparatus 100 has been described above.

  Next, a method for measuring the amount of change in the length of the measurement sample 500 using the measurement apparatus 100 will be described.

  First, the inside of the test tank 200 is controlled to a normal temperature and normal humidity state, for example. Note that the normal temperature and normal humidity state is, for example, according to ISO 554-1976, a temperature of 23 ° C. and a relative humidity of 50% as a standard state recommended for testing.

  Next, the measurement sample 500 is placed on the placement surface 120 of the support base 110. At this time, the lower end portion 501 of the measurement sample 500 is brought into contact with the abutting surface 130. Accordingly, the measurement sample 500 is stably held on the support base 110 in a regulated state by the weight of the measurement sample 500.

  In this state, the first length measurement sensor 140 measures the change amount (displacement) of the length S to the upper end portion 502 of the measurement sample 500 in the length measurement direction P of the measurement sample 500.

  Then, after changing the state in the test tank 200 according to the test purpose, the change amount of the length S is repeatedly measured until the change amount of the length S is saturated. Thereby, the variation | change_quantity of the length S for every factor can be measured.

  For example, when the temperature 23 ° C. and the relative humidity 50% are continuously maintained, the amount of change in the length S due to the mechanical factor of the measurement sample 500 can be measured. Further, for example, when the humidity is changed to an arbitrary value while maintaining the relative humidity of 50%, the amount of humidity distortion can be measured by measuring the change amount of the length S with respect to the temperature change. Further, for example, when the temperature is changed to 23 ° C. and the relative humidity is 0% and the state is maintained for a long time, the amount of exhaust distortion can be measured by measuring the amount of change of the length S with respect to the temperature change.

  The method for measuring the amount of change in the length of the measurement sample 500 using the measurement apparatus 100 has been described above.

  As described above, the measuring apparatus 100 according to the first embodiment of the present invention includes the support base 110, the mounting surface 120, the abutting end surface 130, and the first length measurement sensor 140 (dimension change detection unit). And. The support table 110 supports the measurement sample 500 by being inclined at a predetermined inclination angle a with respect to the vertical direction along the length measurement direction P of the measurement sample 500. The mounting surface 120 is formed on the support base 110 so as to contact the measurement sample 500 along the length measurement direction P of the measurement sample 500. The abutting end surface 130 is provided at an end portion on the vertically lower side of the support base 110. The abutting end surface 130 comes into contact with one end portion (lower end portion 501) of the measurement sample 500. The first length measurement sensor 140 is provided at the end of the support base 110 on the vertical upper side. The first length measuring sensor 140 is attached to the support base 110 so as to face the other end of the measurement sample 500 without contacting the other end (upper end 502) of the measurement sample 500. The first length measurement sensor 140 detects the amount of change in the length S to the other end of the measurement sample 500 in the length measurement direction P of the measurement sample 500.

  In this way, the support base 110 supports the measurement sample 500 by inclining it at a predetermined inclination angle a with respect to the vertical direction along the length measurement direction P of the measurement sample 500. Moreover, the mounting surface 120 is formed on the support base 110 so as to contact the measurement sample 500 along the length measurement direction P of the measurement sample 500, and one end portion (lower end portion 501) of the measurement sample 500 is formed. The abutting end surface 130 is brought into contact with and is supported on the mounting surface 120 of the support base 110. As described above, in the measurement apparatus 100 of the present invention, the measurement sample 500 is stably held on the support 110 in a regulated state by the weight of the measurement sample 500. Thereby, the state which supported the measurement sample 500 on the support stand 110 can be stabilized, without changing for a long time. As a result, according to the measuring apparatus 100 of the present invention, the change amount of the length S of the measurement sample 500 can be accurately measured.

  Therefore, even when a plurality of measurement apparatuses 100 according to the first embodiment of the present invention are provided, each of the plurality of measurement samples 500 is regulated by its own weight. And stably held on each support 110. Therefore, the state in which the measurement sample 500 is supported on the support base 110 is not different between each of the plurality of measurement apparatuses 100. For this reason, each of the plurality of measuring devices 100 can accurately measure the amount of change in the length S of the measurement sample 500 without a large difference between each of the plurality of measuring devices 100.

  In the measurement apparatus 100 of the present invention, unlike the invention described in Patent Document 1, the measurement sample 500 is not held on the support base 110 by screw pressing of the fixing portion. For this reason, as in the invention described in Patent Document 1, the force (gripping force) for holding the measurement sample decreases with time, and the influence on the measurement result of the length of the measurement object can be reduced.

  In Patent Document 2, as an invention of a measuring jig such as a rate of change in length, a measurement sample (test body 10) is arranged on a jig body 2 provided at an inclination, and What measures the amount of change in length is disclosed. In the invention of the measurement jig described in Patent Document 2, the end portion on the vertically lower side of the measurement sample comes into contact with the protrusion 3 a attached to the jig body 2. Further, the tip sensor 4a of the dial gauge 4 comes into contact with the end portion on the vertically upper side of the measurement sample.

  The measurement apparatus 100 of the present invention is compared with the invention described in Patent Document 2. In the invention described in Patent Document 2, the change amount of the length of the measurement sample is measured by the tip sensor 4a of the dial gauge 4 coming into contact with the vertical upper end of the measurement sample. On the other hand, in the measuring apparatus 100 of the present invention, the first length measuring sensor 140 does not contact the upper end portion 502 of the measurement sample 500, and the amount of change in the length S to the upper end portion 502 of the measurement sample 500. Measure. In this respect, the measuring apparatus 100 of the present invention and the invention described in Patent Document 2 are different from each other.

  In the measuring apparatus 100 according to the first embodiment of the present invention, the predetermined angle is a (radian). Further, the maximum static friction coefficient between the measurement sample 500 and the mounting surface 120 was μ. Further, the length of the measurement sample in the length measurement direction P of the measurement sample 500 is L (mm), and the length of the measurement sample 500 in the direction perpendicular to the length measurement direction P of the measurement sample 500 is H (mm). . At this time, the relational expression of μ <tan (π / 2−a) <L / H is satisfied.

  Thereby, the measurement sample 500 can be reliably brought into contact with the abutting end surface 130 by the weight of the measurement sample 500. In addition, even when the inclination angle a decreases, the measurement sample 500 can be prevented from falling in a direction away from the placement surface 120.

  The measurement unit 1000 according to the first embodiment of the present invention includes a measurement device 100 and a test tank 200. The measuring apparatus 100 has a configuration as described above. The test tank 200 accommodates the measuring device 100 and controls the temperature and humidity inside the test tank 200.

  Thereby, the variation | change_quantity of the length of the measurement sample 500 is detectable, changing the environment (temperature and humidity in the test tank 200) where the said measurement sample 500 is arrange | positioned.

  In addition, the dimensional change measurement method in the first embodiment of the present invention is a method for detecting the change in the length of the measurement sample 500 using the measurement apparatus 100 and the measurement unit 1000 including the test tank 200. . The test tank 200 accommodates the measuring device 100 and controls the temperature and humidity inside the test tank 200.

  At this time, the measuring apparatus 100 includes a support base 110, a placement surface 120, an abutting end surface 130, and a first length measurement sensor 140 (a dimensional change detection unit). The support table 110 supports the measurement sample 500 by being inclined at a predetermined inclination angle a with respect to the vertical direction along the length measurement direction P of the measurement sample 500. The mounting surface 120 is formed on the support base 110 so as to contact the measurement sample 500 along the length measurement direction P of the measurement sample 500. The abutting end surface 130 is provided at an end portion on the vertically lower side of the support base 110. The abutting end surface 130 comes into contact with one end portion (lower end portion 501) of the measurement sample 500. The first length measurement sensor 140 is provided at the end of the support base 110 on the vertical upper side. The first length measuring sensor 140 is attached to the support base 110 so as to face the other end of the measurement sample 500 without contacting the other end (upper end 502) of the measurement sample 500. The first length measurement sensor 140 detects the amount of change in the length S to the other end of the measurement sample 500 in the length measurement direction P of the measurement sample 500.

  The dimensional change measurement method according to the first embodiment of the present invention includes a measurement sample placement step, a control step, and a dimensional change detection step. In the measurement sample placement step, the measurement sample 500 is placed on the placement surface 120 of the support base 110. In the control step, the temperature and humidity in the test chamber 200 are controlled in a state where one end portion (lower end portion 501) of the measurement sample 500 is in contact with the abutting end surface 130. In the dimensional change detection step, the dimensional change detection unit detects a change in the length S to the other end (upper end 502) of the measurement sample 500 in the measurement direction P of the measurement sample 500.

  The effects of the measurement apparatus 100 and the measurement unit 1000 described above can also be achieved by the dimensional change measurement method according to the first embodiment of the present invention.

<Second Embodiment>
A configuration of a measuring apparatus 100A according to the second embodiment of the present invention will be described. FIG. 7 is a side view schematically showing a state in which the measuring apparatus 100 </ b> A is arranged in the test tank 200. In FIG. 7, constituent elements that are equivalent to the constituent elements shown in FIGS. 1 to 6 are given the same reference numerals as those shown in FIGS. 1 to 6. Moreover, the arrow A shown in FIG. 7 is also the same as FIG. The measuring apparatus 100A and the test tank 200 constitute a measuring unit 1000A. That is, the measurement unit 1000A includes a measurement device 100A and a test tank 200.

  Here, FIG. 1 and FIG. 7 are compared. 7 is different from FIG. 1 in that a second length measuring sensor 160 is newly added. From this relationship, it is assumed that the configuration including the first length measurement sensor 140 and the second length measurement sensor 160 is the dimensional change amount detection unit 170.

  As shown in FIG. 1, the measuring apparatus 100 includes a support base 110, a mounting surface 120, an abutment surface 130, a first length measurement sensor 140, a support column 150, and a second length measurement. Sensor 160.

  As shown in FIG. 7, the second length measurement sensor 160 is provided at an end portion on the vertically upper side of the support base 110. The second length measurement sensor 160 is attached to the support 110 so as to face the upper end 502 of the measurement sample 500 without contacting the other end of the measurement sample 500. The second length measurement sensor 160 detects or measures the amount of change in the length SA up to the abutting surface 130 in the length measurement direction P of the measurement sample 500. The first length measurement sensor 140 and the second length measurement sensor 160 are included in the dimensional change detection unit 170. That is, the dimensional change detection unit 170 of the present invention includes the first length measurement sensor 140 and the second length measurement sensor 160.

  Then, the dimensional change detection unit 170 of the present invention, based on the difference between the measurement values of the first length measurement sensor 140 and the second length measurement sensor 160, the measurement sample 500 in the length measurement direction P of the measurement sample 500. The amount of change in the distance S to the upper end 502 (the other end) is detected. More specifically, the dimensional change detection unit of the present invention is a relative difference between the measurement result (length S) of the first length measurement sensor 140 and the measurement result (length SA) of the second measurement sensor 160. Is calculated, and the amount of change in the distance S to the upper end 502 (the other end) of the measurement sample 500 in the length measurement direction P of the measurement sample 500 is detected.

  Thereby, since the expansion / contraction amount of the support base 110 can be offset, the measurement accuracy of the change amount of the distance S to the upper end portion 502 (the other end portion) of the measurement sample 500 can be improved. In the measurement apparatus 100A in the present embodiment, the length of the support base 110 in the length measurement direction P of the measurement sample 500 can be measured by the second length measurement sensor 160. It does not have to be formed of an expanded material. However, by forming the support base 110 with a low thermal expansion material, deformation due to the expansion and contraction of the support base 110 can be suppressed in directions other than the length measurement direction P, and the reliability of the measurement result can be improved.

  As the second length measurement sensor 160, a suitable one according to the measurement accuracy is selected in the same manner as the first length measurement sensor 140. On the other hand, depending on the dimensions of the support table 110 and the measurement sample 500, the measurement distance becomes long. Therefore, a sensor having a long maximum measurable distance, such as a laser interferometer, is used for the second length measuring sensor 160.

  Further, the first length measuring sensor 140 and the second length measuring sensor 160 do not necessarily have the same principle, but it is known that the reliability of the measurement result is improved by using the same length measuring sensor. It has been.

  In the present embodiment as well, a plurality of sets of measuring devices 100A can be prepared in the test tank 200 according to the number of measurement samples 500, as in the first embodiment. Thereby, the change of the length of the some measurement sample 500 can be measured simultaneously, without producing the dispersion | variation by a fixing system like the technique of patent document 1. FIG.

  In the present embodiment, the addition of the second length measuring sensor 160 increases the cost of the test system. On the other hand, the measurement apparatus 100A according to the present embodiment is suitable for measurement that requires high accuracy and high resolution so that even the fine thermal expansion of the support base 110 is affected.

  The configuration of the measurement apparatus 100A has been described above.

  Next, a method for measuring the amount of change in the length of the measurement sample 500 using the measurement apparatus 100A will be described.

  First, the inside of the test tank 200 is controlled to a normal temperature and normal humidity state, for example. Next, the measurement sample 500 is placed on the placement surface 120 of the support base 110. At this time, the lower end portion 501 of the measurement sample 500 is brought into contact with the abutting surface 130.

  In this state, the first length measurement sensor 140 measures the change amount (displacement) of the length S to the upper end portion 502 of the measurement sample 500 in the length measurement direction P of the measurement sample 500. Further, the second length measurement sensor 160 measures the amount of change in the length SA of the measurement sample 500 to the abutting surface 130 in the length measurement direction P.

  Then, the dimensional change amount detection unit 170 is based on the difference between the measurement values of the first length measurement sensor 140 and the second length measurement sensor 160, and the upper end portion 502 of the measurement sample 500 in the length measurement direction P of the measurement sample 500. The amount of change in the distance S to (the other end) is detected. More specifically, the dimensional change detection unit of the present invention is a relative difference between the measurement result (length S) of the first length measurement sensor 140 and the measurement result (length SA) of the second measurement sensor 160. Is calculated, and the amount of change in the distance S to the upper end 502 (the other end) of the measurement sample 500 in the length measurement direction P of the measurement sample 500 is detected.

  Then, after changing the state in the test tank 200 according to the test purpose, the change amount of the length S is repeatedly measured until the change amount of the length S is saturated. Thereby, the variation | change_quantity of the length S for every factor can be measured.

  The method for measuring the amount of change in the length of the measurement sample 500 using the measurement apparatus 100A has been described above.

  As described above, in the measuring apparatus 100A according to the second embodiment of the present invention, the dimensional change detection unit 170 includes the first length measurement sensor 140 and the second length measurement sensor 160. The first length measurement sensor 140 measures the amount of change in the length S up to the upper end 502 (the other end) of the measurement sample 500 in the length measurement direction P of the measurement sample 500. The second length measurement sensor 160 measures the amount of change in the length SA to the abutting surface 130 in the length measurement direction P of the measurement sample 500. Then, the dimensional change amount detection unit 170 is based on the difference between the measurement values of the first length measurement sensor 140 and the second length measurement sensor 160, and the upper end portion 502 of the measurement sample 500 in the length measurement direction P of the measurement sample 500. The amount of change in the distance S to (the other end) is detected.

  In this way, the dimensional change detection unit 170 is based on the difference between the measurement values of the first length measurement sensor 140 and the second length measurement sensor 160, and the upper end of the measurement sample 500 in the length measurement direction P of the measurement sample 500. The amount of change in the distance S to the unit 502 (the other end) is detected. More specifically, the dimensional change detection unit of the present invention is a relative difference between the measurement result (length S) of the first length measurement sensor 140 and the measurement result (length SA) of the second measurement sensor 160. Is calculated, and the amount of change in the distance S to the upper end 502 (the other end) of the measurement sample 500 in the length measurement direction P of the measurement sample 500 is detected.

  Thereby, since the expansion / contraction amount of the support base 110 can be offset, the measurement accuracy of the change amount of the distance S to the upper end portion 502 (the other end portion) of the measurement sample 500 can be improved. In the measurement apparatus 100A in the present embodiment, the length of the support base 110 in the length measurement direction P of the measurement sample 500 can be measured by the second length measurement sensor 160. It does not have to be formed of an expanded material.

  In addition, the dimensional change measurement method in the second embodiment of the present invention is a method for detecting the change in the length of the measurement sample 500 using the measurement device 100A and the measurement unit 1000A including the test tank 200. .

  At this time, the dimensional change detection unit 170 includes a first length measurement sensor 140 and a second length measurement sensor 160. The first length measurement sensor 140 measures the amount of change in the length S up to the upper end 502 (the other end) of the measurement sample 500 in the length measurement direction P of the measurement sample 500. The second length measurement sensor 160 measures the amount of change in the length SA to the abutting surface 130 in the length measurement direction P of the measurement sample 500.

  The dimensional change detection step includes a first measurement step and a second measurement step. In the first measurement step, the first length measurement sensor 140 measures the amount of change in the length S to the upper end portion 502 (the other end portion) of the measurement sample 500 in the length measurement direction P of the measurement sample 500. In the second measurement step, the second length measurement sensor 160 measures the amount of change in the length SA of the measurement sample 500 to the abutment surface 130 in the length measurement direction P. Then, the dimensional change amount detection unit 170 is based on the difference between the measurement values of the first length measurement sensor 140 and the second length measurement sensor 160, and the upper end portion 502 of the measurement sample 500 in the length measurement direction P of the measurement sample 500. A change amount S of the distance to (the other end) is detected.

  The effects of the measurement apparatus 100A and the measurement unit 1000A described above can also be achieved by the dimensional change measurement method according to the second embodiment of the present invention.

  The present invention has been described above based on the embodiment. The embodiment is an exemplification, and various modifications, increases / decreases, and combinations may be added to the above-described embodiments without departing from the gist of the present invention. It will be understood by those skilled in the art that modifications to which these changes, increases / decreases, and combinations are also within the scope of the present invention.

DESCRIPTION OF SYMBOLS 100,100A Measuring apparatus 110 Support stand 120 Mounting surface 130 Abutting surface 140 1st length measurement sensor 150 Support pillar part 160 2nd length measurement sensor 170 Dimensional change detection part 200 Test tank 500 Measurement sample 1000, 1000A measurement unit

Claims (6)

A support base for supporting the measurement sample by inclining at a predetermined inclination angle with respect to the vertical direction along the length measurement direction of the measurement sample;
A mounting surface formed on the support so as to contact the measurement sample along the length measurement direction of the measurement sample;
An abutting end surface provided at an end portion of the support base on the vertically lower side and in contact with one end portion of the measurement sample;
Provided at the end on the vertically upper side of the support base, attached to the support base so as to face the other end of the measurement sample without contacting the other end of the measurement sample, A measurement apparatus comprising: a dimensional change amount detection unit that detects a change amount of a length to the other end of the measurement sample in the length measurement direction. The predetermined angle is a (radian), the maximum static friction coefficient between the measurement sample and the mounting surface is μ, and the length of the measurement sample in the measurement direction of the measurement sample is L (mm). When the length of the measurement sample in the direction perpendicular to the measurement direction of the measurement sample is H (mm),
μ <tan (π / 2−a) <L / H
The measuring apparatus according to claim 1, wherein the relational expression is satisfied. The dimensional change detection unit is
A first length measurement sensor for measuring a change in length of the measurement sample in the length measurement direction to the other end of the measurement sample;
A second length measurement sensor for measuring a change in length of the measurement sample to the abutting surface in the length measurement direction;
The amount of change in the distance to the other end of the measurement sample in the length measurement direction of the measurement sample is detected based on a difference between measurement values of the first length measurement sensor and the second length measurement sensor. 3. The measuring device according to 1 or 2. The measuring apparatus according to any one of claims 1 to 3,
A measurement unit comprising: a test tank that houses the measurement device and controls internal temperature and humidity. A dimensional change detection method for detecting a change in the length of a measurement sample using a measurement unit including a measurement device and a measurement unit including a test tank capable of controlling the temperature and humidity inside the measurement device,
The measuring device is
A support base for supporting the measurement sample by inclining at a predetermined inclination angle with respect to the vertical direction along the length measurement direction of the measurement sample;
A mounting surface formed on the support so as to contact the measurement sample along the length measurement direction of the measurement sample;
An abutting end surface provided at an end portion of the support base on the vertically lower side and in contact with one end portion of the measurement sample;
Provided at the end on the vertically upper side of the support base, attached to the support base so as to face the other end of the measurement sample without contacting the other end of the measurement sample, A dimensional change detection unit that detects a change in length to the other end of the measurement sample in the measurement direction;
A measurement sample placement step of placing the measurement sample on the placement surface of the support;
A control step of controlling the temperature and humidity in the test chamber in a state where one end of the measurement sample is in contact with the abutting end surface;
A dimensional change detection method, comprising: a dimensional change detection step in which the dimensional change detection unit detects a change in length to the other end of the measurement sample in the measurement direction of the measurement sample. The dimensional change detection unit is
A first length measurement sensor for measuring a change in length of the measurement sample in the length measurement direction to the other end of the measurement sample;
A second length measurement sensor for measuring a change in length to the abutting surface in the measurement direction of the measurement sample;
The dimensional change detection step includes
A first measurement step in which the first length measurement sensor detects a change in length to the other end of the measurement sample in the length measurement direction of the measurement sample;
A second measurement step in which the second length measurement sensor measures the amount of change in length to the abutting surface in the length measurement direction of the measurement sample;
The dimensional change detection unit is a distance to the other end of the measurement sample in the measurement direction of the measurement sample based on a difference between measurement values of the first length measurement sensor and the second length measurement sensor. The dimensional change detection method according to claim 5, further comprising a dimensional change detection step for detecting a change amount of.

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