JP2016152365A - Resistor and manufacturing method thereof - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a resistor reduced in a temperature coefficient of resistance (TCR).SOLUTION: A resistor includes a resistive element 3x, current terminals 21d, 25d having higher conductivity than the resistive element, and voltage detection terminals 23d, 27d shunted from the current terminals. The resistive element includes projections 3a, 3b projecting in a direction substantially orthogonal to an arrangement direction of the current terminals, and the projection amount of each projection is selected such that a TCR value of the resistor approaches zero.SELECTED DRAWING: Figure 3

Description

  The present invention relates to a resistor and a manufacturing method thereof.

  In recent years, there has been a demand for a resistor for current detection in which the resistance value is adjusted with high accuracy and the influence of variation in resistance value due to temperature change is minimized.

  As a structure for adjusting a temperature coefficient of resistance (hereinafter also referred to as “TCR”) in a resistor, there is the following document.

  According to Patent Document 1, a plate-shaped resistor and a metal plate resistor having a plate-like electrode joined to both ends of the resistor, the electrode and the resistor part joined to the electrode are included. The electrode part is provided with a slit, and the electrode part is formed into a four-terminal structure by the slit. By providing the slit, the resistance temperature coefficient of the resistor can be reduced more than the resistance temperature coefficient of the resistor.

JP 2007-329421 A

  The technique described in Patent Document 1 adjusts the TCR value according to the terminal shape.

  However, recently, there is a demand for a technique that enables more accurate resistance value adjustment and fine adjustment of the TCR value.

  An object of the present invention is to provide a resistor capable of adjusting a resistance value with higher accuracy. It is another object of the present invention to provide a resistor and a manufacturing method that can be adjusted and designed to have an optimum resistance temperature coefficient in order to enable highly accurate current detection.

  According to an aspect of the present invention, there is provided a resistor comprising a resistor, a current terminal having higher conductivity than the resistor, and a voltage detection terminal shunted from the current terminal, wherein the resistor The body is provided with a resistor having a protruding portion protruding in a direction substantially orthogonal to the arrangement direction of the current terminals.

  It is preferable that the protrusion is provided between the current terminals and between the voltage detection terminals. The protrusion may be formed with a recess. The resistance value can be adjusted by cutting the protruding portion.

  The protruding amounts of the protruding portions formed between the current terminals and between the voltage detection terminals may be different. The protrusion amounts of the protrusions formed between the current terminals and between the voltage detection terminals are selected so that the TCR value of the resistor approaches zero.

  According to another aspect of the present invention, a long resistor comprising a predetermined resistance metal material and an electrode material having a conductivity higher than that of the resistance metal material and having a first side and a second side. Prepare a ceramic material, and form a first cut portion in the resistor material from the first side and the second side, thereby connecting the individualized regions between the first cut portions. A method of manufacturing a resistor is provided, in which a connecting portion is formed, and then the connecting portion is cut so as to form a protruding portion protruding in a resistor portion between terminals of the electrode material.

  The step of cutting the connecting portion can be cut so that the protruding amount of the protruding portion is different.

  The step of cutting the connecting portion may be performed by selecting the amount of protrusion of the protrusion so that the TCR value of the resistor approaches zero. A step of adjusting the resistance value by cutting the protrusion.

  According to the present invention, highly accurate resistance value adjustment is possible. In addition, the temperature coefficient of resistance of the resistor can be adjusted or designed.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a diagram showing an outline of a process for manufacturing a resistor as a first example of a method for manufacturing a resistor according to the present embodiment, and the drawings shown from T1 to T5 show planar structures in different processes. . It is a figure which shows the modification of FIG. 1A. It is a figure which shows a structure in order of a manufacturing process about FIG. 1A. It is a figure which shows the modification of FIG. 2A. It is a perspective view which shows one structural example of the resistor in this Embodiment manufactured by the process shown to FIG. 1A and FIG. 2A. It is a figure which shows the modification of FIG. It is a figure which shows the modification of FIG. It is a figure which shows the modification of FIG. It is a figure which shows an example of the adjustment process of resistance value. It is a figure which shows the principle of the protrusion part dependence of TCR. It is a figure which shows the principle of the protrusion part dependence of TCR. It is a figure which shows the protrusion ratio dependence of both protrusion parts of TCR.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

  Hereinafter, a method for manufacturing a resistor according to an embodiment of the present invention will be described in detail with reference to the drawings, taking as an example a method for manufacturing a resistor having a butted structure in which end surfaces of a resistor and an electrode are butted together. . This manufacturing method can also be applied to a structure in which a resistor and an electrode are connected on the surface.

(First embodiment)
First, a method for manufacturing a resistor according to the first embodiment of the present invention will be described.
FIG. 1A is a diagram illustrating an outline of a process for manufacturing a resistor as a first example of a method for manufacturing a resistor according to the present embodiment. The figures shown from T1 to T5 show planar structures in different processes. On the other hand, FIG. 2A is a figure which shows a structure in order of a manufacturing process.

  As a long resistor material, for example, a plate-shaped (band-shaped) resistor material 1, as shown in FIG. 1A and FIG. 2A (a), a long electrode material is also provided on both sides of a long resistor material 3. Can be used. This structure can be manufactured as follows.

For example, a long flat plate-like resistance material 3 (width W ₁ ) and an electrode material having a higher conductivity than the resistance material 3, and a long flat plate-like first electrode material similar to the resistance material 3 5 (width W ₂ ) and a second electrode material 7 (width W ₂ , though not necessarily the same width as the first electrode material 5) are prepared. And it arrange | positions so that the both end surfaces of the resistance material 3 and the end surface of the 1st electrode material 5 and the 2nd electrode material 7 may contact, and may form a junction part, for example, both junction parts by an electron beam, a laser beam, etc. Are welded to form a single flat plate. Various adjustments regarding the resistance value and the shape can be performed depending on the joining position (see T1 in FIG. 1A and FIG. 2A (a)). By allowing the resistor material 1 to be separated (divided) in a direction (second direction) perpendicular to the longitudinal direction (first direction), a butt-structured resistor can be formed. .

  For example, a feed hole (pilot hole) 11 for feeding the resistor material 1 is formed in the resistance material 3 for each segmented region.

  As the material for the resistance material 3, a metal plate material such as Cu, Cu—Ni, Cu—Mn, or the like can be used. Cu or the like can be used as the material for the first and second electrode materials 5 and 7.

  Here, the side on the first electrode material 5 side is referred to as a first side, and the side on the second electrode material 7 side is referred to as a second side.

Then, in FIG. 1A T2, as shown in FIG. 2A (b), the resistor from the first side edge and a second side edge of the material 1 of width L ₂ toward the first direction perpendicular to the second direction First cut portions 15 and 15 are formed. Here, the first cut portions 15 and 15 are in a state in which all of the first electrode material 5 and the second electrode material 7 are excised and part of the resistance material 3 is entered. That is, it is preferable that the lengths of the first cut portions 15 and 15 are W ₂ + α (2α <W ₁ ). The first cut portion 15, 15, a part of the width of the electrode member 5, 7 and the resistor member 3 is defined by _{L 1.}

Then, as indicated by T2, singulation region of width L ₁ of the dividing resistors is formed. A connecting portion 8 that connects the singulated regions is formed between the first cut portions 15 and 15. Here, an example in which the feed hole 11 is formed in the connecting portion 8 is shown.

  In this structure, since the resistor structure before the division is connected only by the resistor material 3 by the connecting portion 8, it is possible to reduce variations in the characteristics of the resistor due to the electrode material remaining as will be described later. In addition, since the electrode region can be defined before the dividing (dividing) step T5, the terminal size of each resistor can be kept constant. Further, since the electrode width is defined before the singulation step T5, the resistance value can be arbitrarily finely adjusted according to the cutting position for singulation.

  In addition, when cutting the singulated area by the connecting portion 8, cut at two positions on both sides of the feed hole 11 so as not to include the feed hole 11 (so that the area including the feed hole 11 is cut off). To do. As shown in the plan view of T2, electrodes 21a and 25a are formed on both sides of the resistance material 3.

  In addition, although 2nd notch parts 17 and 17 are described in each drawing, 2nd notch parts 17 and 17 are demonstrated in 2nd Embodiment.

  Next, as shown in T3 of FIG. 1A, FIG. 2A (c), and a cross-sectional view, the electrodes 21a and 25a on both sides of the resistance material 3 are bent downward in the plan view by using press working or the like (processing 1). Electrodes 21c and 25c are formed as shown in the sectional view. Further, as shown in T4 of FIG. 1A, FIG. 2A (d), and a cross-sectional view, a process 2 for bending at a position further inside than the folding position of the process 1 is performed, such as electrodes 22d and 26d on both sides of the resistance material 3. By doing so, as shown in the sectional view of T4, an inner bending structure (C-shaped structure) in which the terminal portion is bent inward is formed.

  According to these steps T3 and T4, since the tip regions of both the electrodes 21c and 25c are free, there is an advantage that it is easy to process the electrodes 21c and 25c such as an internal bending structure.

  Next, the resistor material 1 is cut along the second direction at positions that do not include the region where the feed hole 11 of the connecting portion 8 is formed, and is separated into individual pieces. As shown in e), individual divided resistors X can be formed.

  At this time, the resistance value in the resistor X can be adjusted by finely adjusting the cutting position at the time of singulation.

By dividing into individual pieces, a resistor X having a butt structure in which the resistor 3x and the electrodes 22d and 26d at both ends thereof are joined at the end faces is completed. The width of the resistor X in the first direction is L ₃ , and a protruding portion to be described later remains in the resistor 3x on the cut connecting portion 8 side.

  FIG. 3 is a perspective view showing a configuration example of the resistor in the present embodiment manufactured by the process shown in FIGS. 1A and 2A.

  As shown in FIG. 3, in the resistor X according to the present embodiment, the end faces of the resistor 3x and the electrodes 22d and 26d have a butted structure, and the electrodes 22d and 26d constituting the terminal portion are on the inside. It has a bent inner bending structure.

Electrode 22d constituting the electrode terminal portion, the direction of the side of the resistor 3x perpendicular to 26 d, as shown in Figure 1A, by having a large width L ₃ than the width L ₁ of the resistor 3x, total on both sides (L 3 _-L 1 _-a: a is two the distance between the cutting position of the containing feed holes 11) first as a first width along the direction of the only resistor 3x increases 1 The protruding portion 3a and the second protruding portion 3b are formed. In this example, a concave portion 3c formed by a trimming process for adjusting a resistance value, which will be described later, remains on the side portion of the second protruding portion 3b.

  In order to form the structure shown in FIG. 3, division processing for singulation was performed by the first cut portion 15 in a state where electrodes were separated between adjacent singulation regions. As described above, since the first notch 15 enters the resistor 3x, no excess electrode material remains in the connecting portion 8. Therefore, it is possible to reduce variations in resistance value characteristics of the resistor X due to the remaining state of the electrode material when the electrode material remains.

  In addition, the resistance value can be adjusted by finely adjusting the cut position (first direction) at the time of separation in the process T5.

  In addition, before performing the division | segmentation by the cutting | disconnection of the connection part 8, by bending the electrode (terminal) of the both sides of the resistor 3x outside by process 1 (T3) and process 2 (T4), as shown in FIG. It is also possible to make a resistor having an outer bent terminal structure.

  Further, in the above embodiment, as the resistor material 1, as shown in FIG. 1A and FIG. 2A (a), a structure in which a long electrode material is also bonded to both sides of a long resistor material. However, as the resistor material 1, a structure having only a long resistance material may be used, and an electrode may be formed in a later arbitrary step.

  Next, a process similar to the above-described process, in which the terminal is not bent or separated before being bent, will be described with reference to FIGS. 1B and 2B. In the steps shown in FIGS. 1B and 2B, among steps T1 to T5 shown in FIGS. 1A and 2A, step T1 corresponds to step T11, step T2 corresponds to step T12, and step T5 corresponds to step T13. 3 and 4, the first protrusion 3 a and the second protrusion 3 b are also formed in the structure of FIG. 5.

  By such a simple process, as shown in FIG. 5, it is possible to manufacture a resistor having a butt structure and a terminal portion that is not bent. Thereafter, the shape of the terminal portion may be adjusted as necessary.

(Second Embodiment)
Next, a method for manufacturing a resistor according to the second embodiment of the present invention will be described with reference to FIGS. 1A and 1B, FIGS. 2A and 2B, and the like.

In the present embodiment, as described above, as shown in T2 of FIG. 1A, FIG. 2A (b), T12 of FIG. 1B, and FIG. 2B (b), the first side and the second side of the resistor material 1 are used. Second notches 17 and 17 having a predetermined width are formed from a side toward a second direction perpendicular to the first direction. The second cut portions 17 and 17 divide the electrode regions at both ends defined by the first cut portion 15 into first electrode terminals 21a and 23a and second electrode terminals 25a and 27a, respectively. Each of the first electrode terminals 21a and 23a and each of the second electrode terminals 25a and 27a are connected in a region on the resistor side of the electrode material. That is, the length (cut length) of the second cut portions 17 and 17 is W ₂ −β (β> 0). The widths of the second notches 17 and 17 are arbitrary, but the positions of the first electrode terminals 21a and 23a and the positions of the second electrode terminals 25a and 27a are set to the desired widths. Adjust the width. Here, the first electrode terminals 21a, 25a width of the _{W 12,} the second electrode terminals 23a, 27a width of the _{W 11.}

The processes after T3 are the same as those in the first embodiment.
As shown in FIGS. 1A and 1B, the first cut portion 15 is connected only by the resistance material 3, and W ₁₁ and W ₁₂ are determined by the second cut portion 17, and then the connecting portion 8 is changed. Since it cut | disconnects and divides | segments by structure T13, a bigger margin can be given regarding the cutting position for a division | segmentation.

  The formation timing of the second cut portions 17 and 17 may be the same as the formation timing of the first cut portions 15 and 15 and is preferably up to the process until the subsequent singulation process.

In order to demarcate the first electrode terminals 21a and 23a and the second electrode terminals 25a and 27a before the singulation (division) step T13, the first electrode terminals 21a, The terminal sizes (including W ₁₁ and W ₁₂ ) of 23a and the second electrode terminals 25a and 27a can be kept constant.

  Through the above steps, as shown in FIGS. 3 to 5, a resistor having a butt structure having different terminal structures can be manufactured. Here, the first electrode terminals 21a and 23a, the first electrode terminals 21d and 23d (22d) corresponding to the second electrode terminals 25a and 27a, and the second electrode terminals 25d and 27d at T2 in FIG. 1A. In (26d), the electrode terminals 21d and 25d can be used as current terminals in 4-terminal measurement, and the electrode terminals 23d and 27d can be used as voltage terminals in 4-terminal measurement. Although FIG. 3 has been described as an example here, the same applies to FIGS. That is, in FIG. 4, the first electrode terminals 31d and 35d can be used as current terminals in the four-terminal measurement, and the second electrode terminals 33d and 37d can be used as voltage terminals in the four-terminal measurement. Further, in FIG. 5, the first electrode terminals 21a and 25a can be used as current terminals in the four-terminal measurement, and the second electrode terminals 23a and 27a can be used as voltage terminals in the four-terminal measurement. The same applies to the structures of FIGS. 1B and 2B.

  As shown in FIG. 3, the resistor X according to the present embodiment can perform current detection by four-terminal measurement using voltage terminals 23d and 27d for voltage measurement and current terminals 21d and 25d for current measurement. It can be done.

  In step T12, since both electrode portions are free, there is an advantage that the first cut portions 15 and 15 for forming the four-terminal structure can be easily processed.

  In addition, since the second cut portions 17 and 17 are processed before being singulated, the size of the terminals (current terminals and voltage detection terminals) can be made constant in each resistor X. There is an advantage that there is little influence of size variation at the time of mounting for performing four-terminal measurement.

  If the first cut portions 15 and 15 and the second cut portions 17 and 17 are formed at the same timing, it is possible to define an individualized region and a 4-terminal structure in the same process.

  As will be described later, also in the structure shown in FIG. 4, current detection by four-terminal measurement can be performed by voltage terminals 33d and 37d for voltage measurement and current terminals 31d and 35d for current measurement. Even in the structure where the terminal shown in FIG. 5 is not bent, the current detection by the four-terminal measurement can be performed by the voltage terminals 23a and 27a for voltage measurement and the current terminals 21a and 25a for current measurement.

  A more detailed structure of the resistor manufactured by the manufacturing method according to the first and second embodiments of the present invention will be described with reference to FIGS.

  As shown in FIG. 3, a resistor X having an inwardly bent terminal (C-shaped terminal) structure includes a butt joint between the side surfaces of voltage terminals 23d and 27d for voltage measurement, and electrodes and resistors in the resistor 3x. Beyond the first side regions 53 and 54 having the same side surface beyond the portions 51 and 52, the side surfaces of the current terminals 21d and 25d for current measurement, and the butt joint portions 51 and 52 of the electrodes and resistors Second side regions 55 and 56 having flush side surfaces.

  Similarly, in the structure of FIG. 4, the resistor 3x has a side surface that is flush with the side surfaces of the voltage measuring voltage terminals 33d and 37d and the butt joint portions 51 and 52 between the electrodes and the resistor. 1 side regions 53, 54, side surfaces of current terminals 31d, 35d for current measurement, and second side regions 55, 56 having side surfaces that are flush with the butt joints 51, 52 of the electrodes and resistors. And have.

  Similarly, in the structure of FIG. 5, the resistor 3x has a side surface that is flush with the side surfaces of the voltage measuring voltage terminals 23a and 27a and the butt joint portions 51 and 52 between the electrodes and the resistor. First side regions 53, 54, side surfaces of current terminals 21a, 25a for current measurement, and second side regions 55, 56 having side surfaces that are flush with the butt joints 51, 52 of the electrodes and resistors. And have.

  In FIG. 5, the first protrusion 3a is provided between voltage terminals 23a and 27a for voltage measurement, and the second protrusion 3b is provided between current terminals 21a and 25a for current measurement. The same applies to FIGS. 4 and 5.

  In addition, the protrusion amount of these 1st and 2nd protrusion parts 3a and 3b can be adjusted with the cutting position of process T5 of FIG. 1A, and process T13 of FIG. 1B.

  Further, as shown in FIG. 6, in the regions indicated by the circles 103a to 103d, unlike the configuration of FIG. 5, at least one of the protruding portions 3a and 3b also leaves a part of the electrode in addition to the resistor. Thus, it may be a part of the protruding portion. In this way, the resistance value of the resistor can be adjusted by increasing the substantial width of the resistor.

Hereinafter, the advantage by providing a protrusion part is demonstrated.
As shown in FIGS. 3 to 5, the resistor X according to the embodiment of the present invention has a first protrusion 3a and a second protrusion 3b (here, a recess 3c) on the side surface of the resistor 3x. It is divided into two). The first protrusion 3a has a side surface 63 in the second direction. The second protrusion 3b has side surfaces 65 and 66 in the second direction.

  The first projecting portion 3a and the second projecting portion 3b have characteristics as shapes. For example, the positions of the respective corner portions can be used as positional marks. If the positions of the corner portions of the first protrusion 3a and the second protrusion 3b are used as a reference, the position of the resistor A can be accurately identified. When adjusting the resistance value of each resistor X, the position of the resistor is mechanically automatically detected using a position detection mechanism that detects the position by touching these protrusions. It is possible to adjust the resistance value based on the position.

  Further, the region where the first projecting portion 3a and the second projecting portion 3b are formed and the positions of the side surfaces 63, 65, 66, and corners are detected by visual observation or image analysis, and the current is determined based on these positions. Trimming processing for adjusting the resistance value can be easily performed on one or both of the resistors on the terminal side and the voltage terminal side. 3 to 5 show examples in which the recess 3c is formed by cutting a part of the second protrusion 3b to adjust the resistance value. Such a recess may be formed in the first protrusion 3a, or may be formed in both the first protrusion 3a and the second protrusion 3b. The resistance value can be adjusted by cutting the resistor using a known method such as a press, an end mill, a grinder, or a grindstone.

  For example, in the structure shown in FIG. 7 corresponding to FIG. 5, when the resistance value is adjusted using the trimming means 101 for adjusting the resistance value, the protruding portion is used as a reference as described above, so that the resistance of the resistor is adjusted. It is possible to prevent a resistance value adjustment failure due to the misalignment of trimming, and to prevent problems such as damage to the terminal portions 21a, 23a, 25a, and 27a due to the misalignment.

  Further, when it is necessary to reduce the width (distance between terminals) of the resistor 3x in order to reduce the size or the resistance value of the resistor X (for example, about 2 mm), it is particularly preferable to mark the protruding portion. Useful.

  The first projecting portion 3a and the second projecting portion 3b are displaced outward from the substantial resistor portion (between the terminals, particularly the shortest distance between the current terminals) between the voltage detection terminals and the current terminals, respectively. It will be a place. For this reason, for example, even if the second protrusion 3b is processed so that the recess 3c is formed to some extent (the resistor width is not narrower than the electrode width) as shown in FIG. Does not have a big impact. Therefore, the resistance value can be finely adjusted.

(Third embodiment)
In the present embodiment, a technique for adjusting the TCR value using the first protrusion 3a and the second protrusion 3b will be described.

  Below, the result of having performed theoretical calculation by the simulation about the influence which protrusion amount has on TCR characteristic is shown.

  Here, in the structure of FIG. 8 based on the structure of the resistor shown in FIG. 5, the protrusion amounts of the first protrusion 3a and the second protrusion 3b on the first side and the second side are TCR. Consider the impact on

Here, let B be the amount of protrusion of the second protrusion 3b on the current terminal 21a side provided between the current terminals, and let the amount of protrusion of the first protrusion 3a on the voltage terminal 23a side provided between the voltage terminals be B. A. The protrusion amount A + the protrusion amount B = 1. That is, the ratio dependency of the protrusion amount A and the protrusion amount B of the TCR value was obtained.
The resistance temperature coefficient of the resistor is defined as follows.

TCR = (R _{125 ° C.−} R _{25 ° C.} ) / R _{25 ° C.} × 1 / (T _{125 ° C.−} T _{25 ° C.} ) × 10 ⁶

FIG. 8 is a diagram schematically showing the distribution of the current I ₁ when the ratio between the protrusion amount A and the protrusion amount B is 1: 1 (A = B). ratio of the amount of protrusion B is 1: is a diagram schematically showing the distribution of the current I ₂ in the case of 3.

  Compared to the example of FIG. 8, in the case of the example of FIG. 9, the resistance between the voltage terminals 23a is reduced by the amount by which the protruding amount of the first protruding portion 3a is reduced. Therefore, it is estimated that the current flowing through the resistor at the voltage terminal 23a portion is reduced, the contribution of the TCR of the Cu electrode is relatively large, and the TCR of the entire resistor is higher than in the case of FIG.

FIG. 10 is a diagram showing the result of calculating the protrusion amount ratio dependency of TCR by calculation.
As shown in FIG. 10, it can be seen that the TCR value fluctuates in the plus or minus direction depending on the ratio balance of the protrusion amounts A and B with the example 1 in FIG. 8 as the reference value. As the protrusion amount A ratio increases (when the protrusion amount B ratio decreases), the TCR has a negative correlation. Therefore, it can be said that the above estimation is valid. In Example 2 of FIG. 9, the TCR is high.

  As described above, it is possible to adjust the TCR characteristics by considering the protrusion amount balance at the time of designing the resistor.

  Further, the amount of protrusion of the first protrusion 3a and the second protrusion 3b formed between the voltage detection terminals and between the current terminals is selected so that the TCR value of the resistor approaches zero. Thus, the resistance temperature coefficient of the resistor can be reduced. Due to this adjustment, the protrusion amounts A and B may be different from each other. Further, when the resistance value is adjusted by cutting the protruding portions of the resistor (the first protruding portion 3a and the second protruding portion 3b), the protruding amount in consideration of the TCR value corrected by the resistance value adjustment. A and B may be designed in advance.

  In the above-described embodiment, the configuration and the like illustrated in the accompanying drawings are not limited to these, and can be appropriately changed within a range in which the effect of the present invention is exhibited. In addition, various modifications can be made without departing from the scope of the object of the present invention.

  Each component of the present invention can be arbitrarily selected, and an invention having a selected configuration is also included in the present invention.

  The present invention can be used as a method for manufacturing a resistor.

X ... resistor, 1 ... resistor material, 3 ... resistive material, 3a ... first protrusion, 3b ... second protrusion, 3c ... concave, 3x ... resistor, 5 ... first electrode material, 7 ... 2nd electrode material, 8 ... Connection part, 11 ... Feed hole (pilot hole), 15 ... 1st cut part, 17 ... 2nd cut part, 23d, 27d ... Voltage terminal for voltage measurement, 21d, 25d: Current terminal for current measurement.

Claims (9)

A resistor,
A resistor comprising a current terminal having higher conductivity than the resistor, and a voltage detection terminal shunted from the current terminal,
The resistor is provided with a protruding portion protruding in a direction substantially orthogonal to the arrangement direction of the current terminals. The protrusion is
The resistor according to claim 1, which is provided between the current terminals and between the voltage detection terminals.   The resistor according to claim 1, wherein the protrusion has a recess.   3. The resistor according to claim 2, wherein the protruding amounts of the protruding portions formed between the current terminals and between the voltage detection terminals are different. 4.   The protrusion amount of the protrusions formed respectively between the current terminals and between the voltage detection terminals is selected so that the TCR value of the resistor approaches zero. The resistor described. Consisting of a predetermined resistance metal material and an electrode material having a higher conductivity than the resistance metal material, preparing a long resistor material having a first side and a second side;
By forming a first cut portion in the resistor material from the first side edge and the second side edge, a connecting portion for connecting individualized regions between the first cut portions is formed,
Next, a method for manufacturing a resistor, in which the connecting portion is cut so as to form a protruding portion protruding in a resistor portion between terminals by the electrode material. The step of cutting the connecting portion includes:
The method of manufacturing a resistor according to claim 6, wherein cutting is performed so that the protruding amount of the protruding portion is different. The step of cutting the connecting portion includes:
The method of manufacturing a resistor according to claim 6, wherein the protruding amount of the protruding portion is selected and cut so that the TCR value of the resistor approaches zero.   The method for manufacturing a resistor according to any one of claims 6 to 8, further comprising a step of adjusting a resistance value by cutting the protruding portion.

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