JP2016141470A - Liquid storage container - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce a content of particles, a content of eluted metal ions and a content of eluted organic matter in content liquid.SOLUTION: A liquid storage container is characterized in that the number of particles of 0.1 μm in diameter is 15/mL or less, Li, an amount of the elution of each metal ion of Na, K, Be, Mg, and Ca is 0.02 ppb or less, and an amount of the elution of C10-C28 alkane is 200 ppm or less in terms of toluene.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a liquid storage container, and more particularly to a liquid storage container that is used by being housed in an outer container that is used for storage and transportation of fluid contents in the fields of industrial chemicals, pharmaceuticals, and cosmetics.

  Conventionally, in industrial chemicals, pharmaceuticals and cosmetics raw materials, etc., liquid storage containers that are placed inside exterior containers made of aluminum, steel, stainless steel, fiberboard, etc. for storage and transportation and contain fluid contents It is used.

  Such a liquid storage container can be reused by simply removing a used liquid storage container from the outer container and setting a new liquid storage container in the outer container. Compared to filling fluid contents in steel or other external containers directly, it has the advantage of eliminating the hassle of washing, etc., and is widely used as a container for industrial chemicals, pharmaceuticals and cosmetic raw materials .

  By the way, in a photolithography process related to display and semiconductor manufacturing, a photosensitive resin (resist) is used as a material for forming a fine line pattern on a substrate.

  On the other hand, particularly in the semiconductor field, the line width required for the fine line pattern has been reduced year by year due to the improvement of the circuit integration rate. In recent years, the pattern is formed with a fine line width of 100 nm or less. Is starting to be demanded.

  In the resist field where such a line width is required, the presence of particles in the resist as the content liquid causes a deterioration in yield.

  In other words, if particles are mixed in the resist applied on the substrate, there is no resist in the particle part, so the pattern will be lost during resist curing / development. Depending on the size of the particles, the fine line may be broken. End up.

  In order to reduce the occurrence rate of such disconnection, it is required to reduce the size and number of particles in the resist solution.

  When a pattern is formed using a resist, it is necessary to take steps such as development, etching, and cleaning.

  Also in these steps, the presence of particles in the content liquid is not preferable.

  That is, in the development process, the resist immediately below the portion where the particles are present is not developed. Further, in the etching process, it is not possible to etch immediately below the part where the particles exist. Further, in the cleaning process, problems such as particles remaining on the base material occur.

  In order to reduce the incidence of these problems, it is required to reduce the size and number of particles in these liquid contents.

  In addition, as in the case of the above particles, the amount of metal ions in the content liquid is also required to be reduced.

  That is, when the content liquid is a resist, when metal ions, particularly alkali metal ions, are present in the resist, they remain as fixed positive charges in a layer (transistor element or the like) formed on the base material. There arises a problem that the charge characteristics of the element are changed.

  Further, when forming a battery or wiring, residual metal ions cause migration.

  Even in the case where the content liquid is a developer, an etching liquid, or a cleaning liquid, the same risk occurs when metal ions are contained.

  In recent years, with the miniaturization and thinning of elements, the required specifications for metal ions in the layer due to contamination have been reduced to a minimum, and the number of metal ions in the ppt order is required in the photolithography process.

  In addition to the above, reduction of the amount of organic impurities in the content liquid is also required.

  That is, when organic impurities are present in the resist solution, the resist is hardened and the fine line pattern is adversely affected.

  In the development / etching process, it becomes a factor that hinders the efficiency of development / etching, and in the cleaning process, problems such as organic impurities remaining on the substrate occur.

  Thus, in order to avoid organic contamination of the content liquid, it is necessary to sufficiently reduce the organic impurities in the content liquid.

Japanese Patent No. 3929000 Japanese Patent No. 4926536 JP 2014-104609 A

  The present invention has been made in view of the above points, and an object of the present invention is to provide a liquid storage container that can keep the amount of particles in the content liquid, the elution amount of metal ions and organic substances low.

The present invention provides a liquid storage container that is disposed in an exterior container and stores a content liquid therein, and the liquid storage container is formed with an internal volume of the liquid storage container of 3 L, and the interior of the 3 L internal volume is formed inside the liquid storage container. When filled with pure water, the number of particles with a diameter of 0.1 μm is 15 particles / mL or less, the inner volume of the liquid storage container is molded to 3 L, and the interior of this 3 L inner volume is filled with hydrochloric acid. , Na, K, Be, Mg, and Ca, the amount of elution of each metal ion is less than 0.02 ppb, the innermost layer of the liquid container contains a low density polyolefin film, and the contact area is 45000 mm in 13 mL of dimethyl carbonate. liquid yield the elution amount of alkane of C ₁₀ -C ₂₈ when the contacting the innermost layer to ² become as is characterized by comprising a 200ppm or less with toluene terms It is a container.

  The present invention may be a liquid storage container characterized in that the number of particles having a diameter of 0.2 μm is 5 / mL or less when the liquid storage container is filled with pure water.

  The present invention may be a liquid storage container in which the amount of elution of metal ions of element numbers 24 to 30 is less than 0.02 ppb when the liquid storage container is filled with hydrochloric acid. .

  In the present invention, the liquid storage container may include an inner bag and an outer bag.

  The liquid storage container according to the present invention may be characterized in that the liquid storage container includes a bag body and a spout provided at a side edge of the bag body.

  The present invention may be a liquid storage container in which the bag main body and the spout are integrally formed, and the spout protrudes outward from an upper edge of the bag main body.

  As described above, according to the present invention, the amount of particles in the content liquid and the amount of elution of metal ions and organic substances can be kept low.

FIG. 1 is a plan view showing a liquid container according to the present invention. FIG. 2 is a perspective view showing a spout. FIG. 3 is a side view showing the spout. FIG. 4 is a side view of the spout viewed from a direction 90 ° different from that in FIG. FIG. 5 is a top view showing the spout. FIG. 6 is a bottom view showing the spout. FIG. 7 is a side view showing the spout attached to the bag body. 8A and 8B are views showing a state in which the liquid storage container is inserted into the outer container. FIG. 9 is a cross-sectional view showing the layer structure of the bag body of the liquid storage container. 10A is a diagram showing the folded liquid storage container, FIG. 10B is an enlarged view of a portion B in FIG. 10A, and FIG. 10C is an enlarged view of a portion C in FIG. 10A. . FIG. 11 is a view showing a state in which the bag body of the liquid storage container is folded in a belly shape through a vertical folding line. FIG. 12 is a view showing a state in which the bag body of the liquid storage container is folded through an upper lateral folding curve and a lower lateral folding curve. FIG. 13 is a view showing a triangular bent portion formed by folding a bag body of a liquid storage container through a folding line. FIG. 14 is a diagram showing a method for manufacturing a liquid container. FIG. 15 is a diagram showing the number of particles in the bag body of the liquid storage container. FIG. 16 is a view showing a modification of the liquid storage container. 17 is a diagram showing the appearance of the bag body. FIG. 18 is a diagram showing a metal elution amount of the liquid storage container. FIG. 19 is a view showing a modification of the liquid container according to the present invention. FIG. 20 is a diagram showing the alkane elution amount of the liquid container.

<Embodiment of the present invention>
Hereinafter, embodiments for carrying out the present invention will be described with reference to the drawings.

  Here, FIG. 1 is a plan view showing an embodiment of a liquid container according to the present invention, FIG. 2 is a perspective view of a spout, FIG. 3 is a side view of the spout, and FIG. FIG. 5 is a side view as viewed from a direction 90 ° different from FIG. 3, FIG. 5 is a top view of the spout, FIG. 6 is a bottom view of the spout, and FIG. 7 is a side view of the spout attached to the bag body. It is.

  In the liquid storage container 1 according to the present embodiment, the multiplex film 2 in which the outer bag 20 and the inner bag 21 are overlapped is overlapped so that the inner bags 21 face each other to make a total of four sheets, and the four sides are heat-sealed. The bag body 3 in which the heat seal portion 10 is formed, and the spout 40 disposed on the upper edge 3a of the bag body 3 and heat-sealed in advance between the inner bags 21 are provided.

  In this embodiment, the bag body 3 is obtained by laminating the multiple films 2 so that the inner bags 21 face each other, and heat-sealing the four sides to form the heat-seal portion 10, but this is not limitative. For example, after the multiple film 2 is folded so that the inner bags 21 face each other, the three outer peripheral sides that overlap each other may be heat-sealed. Moreover, you may form each inner edge part of the heat seal part 10 so that the inner edge may become arc shape. As a result, a structure in which the fluid content hardly remains at the corners is obtained. Moreover, the bag body does not necessarily need to be composed of multiple films, and the film structure of the package body 3 can be selected as appropriate according to the contents and quantity.

  Note that, as described above, the bag body 3 is obtained by stacking the two multiple films 2 and heat-sealing the periphery to form the heat seal portion 10. In this case, the bag body 3 has a rectangular shape having an upper edge 3a, a bottom edge 3b, and two side edges 3c, 3c. The upper edge 3a includes two upper edge heat seal portions 10a, the bottom edge 3b includes one bottom edge heat seal portion 10b, and each side edge 3c, 3c includes one side edge heat seal portion 10c. The upper edge heat seal portion 10a, the bottom edge heat seal portion 10b, and the side edge heat seal portion 10c constitute the heat seal portion 10.

  Moreover, the upper edge 3a of the bag body 3 includes the two upper edge heat seal portions 10a as described above. In this way, by dividing the heat seal portion 10a of the upper edge 3a into two, for example, compared to a case where one heat seal portion having a width of two heat seal portions 10a is formed on the upper edge 3a, Since the upper edge 3a can be comprised comparatively softly, it is preferable. However, one upper edge heat seal portion 10a may be provided on the upper edge 3a of the bag body 3 (see FIG. 19).

  The spout 40 includes a spout attachment part 50 that is heat-sealed to the upper edge 3a of the bag body 3 and a spout body 41 that is connected to the spout attachment part 50 and protrudes outward from the bag body 3. A spout flange 42 is provided at the upper end of the spout main body 41. Further, as shown in FIG. 1, the spout 40 is heat-sealed between the inner bags 21 of the multiplex film 2 at the spout attachment portion 50.

  As shown in FIGS. 2 to 7, the spout mounting portion 50 of the spout 40 is an elliptic cylinder having a central portion 51 and thin portions 52 which are provided on both sides of the central portion 51 and are thinner than the thickness of the central portion 51. The body is flat and has a through hole 45 in the central portion 51. Usually, when the spout 40 is heat-sealed between the inner bags 21 of the multiplex film 2 at the spout mounting portion 50, there is a gap between two regions surrounded by the inner bag 21 and the end of the spout mounting portion 50. It is easy to become poorly sealed. In order to prevent this, thin portions 52 are provided on both sides, and a gap is prevented by melting the thin portions 52 during heat fusion.

  Further, the spout main body 41 of the spout 40 is formed of a cylindrical body having a substantially U-shaped cross section, and a spout flange 42 is provided at the upper peripheral edge. An opening 44 is formed in the bottom 43 of the spout main body 41. The opening 44 can ensure ventilation between the liquid storage container 1 and an outer container 5 to be described later. When the content liquid is pumped out during use, the liquid storage container 1 and the outer container 5 are opened through the opening 44. The gas can be sealed between the two and a pressure can be applied from the outside of the liquid storage container 1 to smoothly pump out the content liquid inside the liquid storage container 1. Further, a spout upper member 70 is provided at the bottom 43 in the spout main body 41 so as to extend in the vertical direction.

  A spout flange 42 of the spout 40 is attached to an opening 5 a formed in the outer container 5, and the liquid storage container 1 is supported in the outer container 5.

  The spout 40 is preferably manufactured by an injection molding method. The resin used for this is not particularly limited as long as it is a resin that can be injection-molded. However, since the resin constituting the inner surface of the inner bag 21 of the multiplex film 2 is bonded by thermal fusion, Although it is necessary to select appropriately depending on the resin constituting the inner surface, high-density polyethylene that is rigid at high temperatures and hardly brittle at low temperatures is preferable.

  Next, the multiple film 2 constituting the bag body 3 will be described. In the present embodiment, the multiple film 2 is composed of a film constituting the outer bag 20 and a film constituting the inner bag 21.

  As shown in FIG. 9, a laminate of unstretched nylon (thickness 20 μm) 20 a / linear low density polyethylene (thickness 40 μm) 20 b can be used as the outer bag 20 of the bag body 3. As this, linear low density polyethylene (thickness 70 μm) can be used.

  In this case, since the outer bag 20 includes the unstretched nylon 20a, the degree of elongation of the outer bag 20 can be increased. For example, the outer bag 20 has a degree of elongation of 300% to 500%. Thus, since the outer bag 20 can have a high degree of elongation, the bag body 3 can be made soft as a whole, and the bag body 3 is inserted into the outer container 5 as will be described later. When the bag body 3 is inflated in the outer container by supplying nitrogen gas or clean dry air into the inside, the bag body 3 can be smoothly inflated.

  In addition, as a material of the bag main body 3, it is not restricted to what was mentioned above.

  For example, as the material of the inner bag 21, a material such as low density polyethylene or a mixture of low density polyethylene and linear low density polyethylene can be used.

The material of the outer bag 20 is one having an elongation of 300% to 500%, such as unstretched nylon, low density polyethylene, linear low density polyethylene, a mixture of low density polyethylene and linear low density polyethylene. , Etc. can be used.
Polyolefins represented by these various polyethylenes may contain low molecular weight components derived from the production process. Therefore, in order to prevent elution of a low molecular weight alkane having 10 to 28 carbon atoms (C _{10 to} C ₂₈ ), which is a low molecular weight component, it is important to select a polyolefin material appropriately.

  Next, the material of the bag body 3 of the liquid storage container 1 will be further described.

  The bag body 3 of the liquid storage container 1 has a 15 μm / mL number of 0.1 μm diameter particles in the bag body 3 when the bag body 3 is filled with pure water. Preferably it is 5.7-11.7 piece / mL (refer FIG. 15).

  The number of particles having a diameter of 0.15 μm is 2.9 to 5.4 particles / mL, and the number of particles having a diameter of 0.2 μm is 5 particles / mL or less, preferably 1.4 to 2.8 particles / mL. The number of particles having a diameter of 0.3 μm is 0.5 to 1.0 / mL, and the number of particles having a diameter of 0.5 μm is 0.1 to 0.2 / mL. Yes.

  In the case of forming a pattern using a resist by setting the particle size to at least 15 particles / mL for particles having a diameter of 0.1 μm and to 5 particles / mL for particles having a size of 0.2 μm, a developer / etching solution / In the case where steps such as development, etching, and cleaning are performed using a cleaning liquid, it is possible to reduce the process load of defect correction due to the presence of particles.

  Each of the Li, Na, K, Be, Mg, and Ca inside the bag body when the bag body 3 molded to have an internal volume of 3 L is filled with hydrochloric acid and stored at 60 ° C. for 1 week. The amount of metal ions eluted is less than 0.02 ppb. Furthermore, the amount of elution of metal ions of element numbers 24 to 30 when the inside of the bag body 3 molded so as to have an internal volume of 3 L is filled with hydrochloric acid and stored at 60 ° C. for 1 week, that is, Cr, Mn, The elution amount of metal ions of Fe, Co, Ni, Cu, and Zn is also less than 0.02 ppb. Furthermore, the elution amount of metal ions of Au, Ag, and Al is less than 0.02 ppb (see FIG. 18). When the content liquid is a resist, when metal ions, particularly alkali metal ions are present in the resist, they remain as fixed positive charges in a layer (transistor element or the like) formed on the base material. There may be a problem that the charge characteristics are changed. When the metal ion abundance is less than 0.02 ppb, it is possible to suppress a decrease in performance such as charge characteristics of the transistor element.

Further, as described above, the innermost layer of the bag body 3 is made of a low density polyolefin film, and when the innermost layer of the bag body 3 is brought into contact with 13 mL of dimethyl carbonate so that the contact area is 45000 mm ² , elution amount of alkane of _C 10 _{-C 28} to (organic elution volume) has a 200ppm or less in toluene conversion.
When forming a thin film by applying the content liquid to the base material, if the content liquid contains a large amount of low molecular weight organic substances, the low molecular weight component will be adsorbed on the surface of the base material and hinder the formation of the thin film. May occur. When the amount of the C ₁₀ -C ₂₈ alkane eluted in the content liquid is 200 ppm or less in terms of toluene, a thin film can be formed without these problems.

  Thus, about the bag main body 3 of the liquid storage container 1, the resist used when manufacturing a display and a semiconductor as a content liquid was used by determining the number of particles, the amount of metal ion elution, and the amount of organic substance elution as described above. Even in this case, the display and the semiconductor as the final product can be manufactured finely and with high accuracy.

  The bag body 3 of the liquid container 1 having such a configuration is manufactured as follows.

  First, as shown in FIG. 14 (a), a cylindrical inner bag 21 filled with clean air is manufactured by an inflation molding machine 80 using clean air that has passed through a clean filter 81, and the cylindrical inner bag It winds up so that the inner surfaces of 21 may contact and oppose. Next, as shown in FIG. 14 (b), the cylindrical inner bag 21 wound up as described above is unwound so that the inner surfaces are opposed to each other, and above and below the outer surface of the inner bag 21. A film for the outer bag 20 is arranged to form the multiple film 2. Next, the film for the outer bag 20 and the cylindrical inner bag 21 unwound so that the inner surfaces face and face each other are heat sealed by a heat seal device (not shown), and the side edge heat seal portion 10c, 10c, the heat seal part 10 which consists of the upper edge heat seal part 10a and the bottom edge heat seal part 10b is formed. At this time, in the upper edge heat seal portion 10a, only the portion where the spout attachment portion 50 of the spout 40 is inserted and heat-sealed later is left unsealed without heat sealing. Next, the belt-shaped film in which the outer bag 20 and the inner bag 21 are heat-sealed to form the heat-seal portion 10 is cut for each bag body to manufacture the bag body 3.

Thereafter, the spout attachment portion 50 of the spout 40 is inserted into the inner bag 21 from the unsealed portion of the upper edge heat seal portion 10a of the bag body 3, and heat sealing is performed from above the outer bag 20. The inner bag 21 and the spout attachment part 50 are thermally welded, and the liquid storage container 1 is obtained.
These series of steps are all performed in a clean room.

By doing in this way, the liquid storage container 1 can be produced, without making the inner surface of the inner bag 21 of the bag main body 3 touch other than the clean air which passed the clean filter 81. In other words, particles and metal ions can be prevented from adhering to the inner surface of the inner bag 21 in the manufacturing process of the liquid storage container 1.
As a result, the liquid storage container 1 having the above characteristics can be obtained.
When the liquid storage container 1 is obtained by a film forming method for obtaining the inner bag 21 in a film shape, such as a T-die method, it is inevitable that the inner surface of the inner bag 21 is in contact with a metal such as a guide roll. The metal contamination on the inner surface of the inner bag 21 increases, and the amount of metal ion elution increases.

Next, the shape of the bag body 3 will be described. As shown in FIGS. 10 to 13, the bag body 3 includes a plurality of bellows portions 12 formed by being folded in a bellows shape through a plurality of, for example, four longitudinal folding lines 11 extending in the vertical direction. (See FIGS. 10 and 11).
In this case, each belly portion 12 of the bag body 3 has substantially the same width W. The spout 40 attached to the bag body 3 is arranged corresponding to the central belly portion 12 among the five belly portions 12.

  Further, after the bag body 3 is folded along the vertical folding line 11 to form the five bellows portions 12, the bag body 3 is connected via the upper lateral folding line 15 a and the lower lateral folding line 15 b. It is folded and the folding part 16 extended in a horizontal direction is formed (refer FIG. 12).

  Thereafter, the bag body 3 may be bent along the folding line 13 to form the triangular bent portion 14 (see FIG. 10B).

Thus, as shown in FIGS. 10A and 10B, the liquid storage container 1 is prepared in which the bag body 3 is formed with the plurality of bellows portions 12, the folding portions 16, and the triangular bent portions 14. The
Note that any of the plurality of belly portions 12 and the folding portions 16 may be formed first.

  Next, as shown in FIGS. 8 (a) and 8 (b), the liquid storage container 1 is further folded in the vertical direction to be formed in an elongated shape in the vertical direction, and the liquid storage container 1 is formed in the outer container 5 from the opening 5a. Inserted into.

  Next, the spout 40 of the liquid storage container 1 is attached to the opening 5 a of the outer container 5. In this case, the spout flange 42 of the spout main body 41 of the spout 40 is engaged with the opening 5a of the outer container 5 (see FIG. 7).

  Next, an expansion jig (not shown) is attached to the spout 40 of the liquid storage container 1, and nitrogen gas or clean dry air is supplied into the liquid storage container 1 using the expansion jig, and the outer container 5. Inside, the bag body 3 of the liquid container 1 swells.

  Next, the effect | action which expands the liquid storage container 1 in the exterior container 5 is explained in full detail below.

  When the liquid storage container 1 is inserted into the outer container 5, first, a portion of the bag body 3 of the liquid storage container 1 below the folding part 16 falls due to its own weight, and the bag body 3 expands.

  Next, as described above, the bag body 3 is inflated by supplying nitrogen gas or clean dry air into the liquid storage container 1 using an inflating jig. Along with this, the bag body 3 folded in an abdomen shape through the longitudinal folding line 11 is expanded flat.

  At this time, in the case where a triangular bent portion 14 formed by folding through the folding line 13 is formed in the upper portion of the bag body 3, the upper edge of the bag body 3 is expanded when the bag body 3 expands. The corners of 3a are not caught by the opening 5a of the outer container 5, and thus the bag body 3 is prevented from being damaged.

  Further, since the upper edge 3a of the bag body 3 includes one or two upper edge heat seal portions 10a, the upper edge 3a can be made softer than the case of including a wide heat seal portion. 3 can be expanded more smoothly in the outer container 5. Furthermore, since the outer bag 20 of the bag body 3 has an elongation of 300% to 500%, the flexibility of the bag body 3 can be enhanced and the expansion action of the bag body 3 can be easily performed.

  In this way, a combined body of the exterior container and the liquid storage container is obtained. Thereafter, the inflating jig is removed from the spout 40, a content liquid filling machine (not shown) is attached to the spout 40, and the content liquid is filled into the liquid storage container from the content liquid filling machine.

  After the content liquid is filled into the liquid storage container, as shown in FIG. 7, the spout holding the liquid distribution nozzle 60 in the spout main body 41 of the spout 40 attached to the opening 5 a of the outer container 5. The upper member 70 is attached, and the liquid distribution nozzle 60 is inserted into the spout upper member 70.

  The liquid distribution nozzle 60 inserted into the spout upper member 70 passes through the through hole 45 of the spout 40 and extends into the bag body 3 of the liquid storage container 1. The liquid distribution nozzle 60 has a large-diameter portion 63 formed at its upper end and a dome-shaped portion 61 formed at its lower end, and a plurality of apertures 62 are formed in the dome-shaped portion 61. The dome-shaped portion 61 has a hemispherical shape, and a plurality of apertures 62 are formed on the hemispherical surface. In the dome-shaped portion 61, the lower end of the liquid distribution nozzle 60 may be formed in a hemispherical shape, or a nozzle cap formed in a hemispherical shape may be attached to the lower end of the liquid distribution nozzle 60.

  The liquid distribution nozzle 60 inserted into the spout upper member 70 is held by the spout upper member 70 with the large-diameter portion 63 provided at the upper end thereof engaged with the spout upper member 70.

  In this manner, after the content liquid filling process into the liquid storage container 1 is completed, a cap (not shown) is attached to the opening 5 a of the outer container 5. At this time, a sealing member called a break seal (a dispenser (not shown) to be described later) is pierced by the tip of the dispenser between the cap and the spout upper member 70, and a thick film that can penetrate without dust generation. ) Intervenes. For this reason, the spout 40 and the liquid distribution nozzle 60 are sealed by this break seal and cap. In this way, the spout 40 and the large diameter portion 63 of the liquid distribution nozzle 60 are sealed. In this case, the cap engages with an external screw 5b provided on the outer periphery of the opening 5a. The cap includes a cap body and an upper cap, and the upper cap can be detached from the cap body.

  When the content liquid in the liquid storage container 1 is discharged to the outside, the upper cap is removed from the cap body, and the large diameter portion 63 of the liquid distribution nozzle 60 is connected to the dispenser via the break seal and the cap body.

  Next, nitrogen gas is supplied from a pressurized gas source (not shown) into the spout main body 41 of the spout 40, and then the nitrogen gas passes through the opening 44 and the bag main body 3 of the liquid container 1. Enter the space between. Next, the bag body 3 is pressed by nitrogen gas from the outside, and the content liquid in the bag body 3 enters the liquid distribution nozzle 60 through the opening 62 of the dome-shaped portion 61, and the content liquid in the liquid distribution nozzle 60 subsequently becomes large. It is discharged from the diameter part 63 to the dispenser side.

  During this time, since the liquid distribution nozzle 60 has the dome-shaped portion 61 at the lower end thereof, when the content liquid in the bag body 3 is discharged outward from the large diameter portion 63 via the liquid distribution nozzle 60, Even if the lower end contacts the inner surface of the bag main body 3, the bag main body 3 is prevented from being damaged by the lower end of the liquid distribution nozzle 60.

  Further, the content liquid in the bag body 3 is sucked into the liquid distribution nozzle 60 through a plurality of apertures 62 provided in the dome-shaped portion 61 and discharged from the large diameter portion 63 to the dispenser side. For this reason, compared with the case where a single opening is provided at the center of the lower end of the liquid distribution nozzle 60, the bag body 3 is in close contact with the liquid distribution nozzle 60 in the liquid distribution nozzle 60 even when the remaining amount of content liquid is reduced. It is prevented that the content liquid becomes difficult to flow.

<Modification of the present invention>
Next, a modification of the present invention will be described with reference to FIG.

  In the said embodiment, although the liquid storage container 1 showed the example which has the bag main body 3 and the spout 40 attached to the upper edge 3a of the bag main body 3 separately from the bag main body 3, it is not restricted to this. The liquid storage container 1 may have a bag main body 3 and a spout 40 that protrudes outward from the upper edge 3a of the bag main body 3 and is integrally formed with the bag main body 3, and includes an inner bag and an outer bag. Instead of having an inner bag, it may have an inner bag.

  The bag body 3 and the spout 40 can be integrally formed from, for example, low density polyethylene, linear low density polyethylene, low density polyethylene and linear low density polyethylene, or the like.

  In this modification, the spout 40 of the bag body 3 is heat-sealed and sealed by a spout tip 40t and a spout side edge heat seal part 40u, and the liquid storage container 1 is configured to be flat as a whole. ing.

  That is, as shown in FIG. 14A, a tubular inner bag 21 whose interior is filled with clean air is manufactured by an inflation molding machine 80 using clean air that has passed through a clean filter 81, and the tubular inner It winds up so that the inner surfaces of the bag 21 may face each other. Next, the cylindrical inner bag 21 wound up as described above is unwound so that the inner surfaces face each other and are heat-sealed by a heat-sealing device, and the side edge heat-sealing portions 10c, 10c, The heat seal part 10 which consists of the upper edge heat seal part 10a, the bottom edge heat seal part 10b, the spout side edge heat seal part 40u, and the spout tip 40t is formed. Next, the liquid film container 1 in which the bag body 3 and the spout 40 are integrally formed is obtained by cutting the belt-like film formed with the heat seal portion 10 for each bag body. In this modification, the spout tip 40t is cut to open the spout, and the liquid can be filled into the liquid storage container 1 and stored.

  Next, specific examples of the present invention will be described.

Example 1
Using a ULPA filter (specified by JIS Z 8122) as the clean filter 81, using an inflation molding machine (manufactured by WINDMOELLER & HOELSCHER CORPORATION), using a low-density polyethylene resin, specifically, UBE polyethylene B128 from Ube Maruzen Polyethylene Co., Ltd. 3 was produced with a thickness of 70 μm (see FIG. 14A). Thereafter, the liquid storage container 1 was produced in a modified example so that the internal volume of the bag body 3 was 3L as shown in FIG.

  At this time, the number of particles when the interior of the liquid container 1 is filled with pure water is 5.7 particles / mL for 0.1 μm diameter particles, 2.9 particles / mL for 0.15 μm diameter particles, 0 The number of particles having a diameter of 2 μm was 1.4 / mL, the number of particles having a diameter of 0.3 μm was 0.5 / mL, and the number of particles having a diameter of 0.5 μm was 0.1 / mL (see FIG. 15). ).

(Example 2)
A liquid storage container 1 having a bag body 3 was produced in the same manner as in Example 1 except that a HEPA filter (specified by JIS Z 8122) was used as the clean filter 81 (see FIGS. 14 and 17).

  At this time, when the liquid container 1 is filled with pure water, the number of particles having a diameter of 0.1 μm is 11.7 / mL, the number of particles having a diameter of 0.15 μm is 5.4 / mL, 0 The number of particles having a diameter of 2 μm was 2.8 / mL, the number of particles having a diameter of 0.3 μm was 1.0 / mL, and the number of particles having a diameter of 0.5 μm was 0.2 / mL (see FIG. 15). ).

(Comparative Example 1)
A liquid container 1 was produced in the same manner as in Example 1 except that the clean filter 81 was not used (see FIGS. 14 and 17).

  At this time, the number of particles when the inside of the liquid container 1 is filled with pure water is 59.4 / mL for 0.1 μm diameter particles, 36.0 / mL for 0.15 μm diameter particles, 0 The number of particles having a diameter of 2 μm was 21.2 / mL, the number of particles having a diameter of 0.3 μm was 9.4 / mL, and the number of particles having a diameter of 0.5 μm was 2.7 / mL (see FIG. 15). ).

  From the above, by performing inflation film formation using a ULPA filter or a HEPA filter as the clean filter 81, the liquid storage container 1 having the bag body 3 having desired particle characteristics can be obtained.

Example 3
The bag body 3 was molded using the same material as in Example 1 and the same method.

The bag body 3 was cut into a film having an area of 22,500 mm ^{2 and} a film having a contact area of 45000 mm ² on the front and back sides was immersed in 13 mL of dimethyl carbonate and allowed to stand at 60 ° C. for 1 week.
Thereafter, whether or not C _{10 to} C ₂₈ alkane was eluted from the film into dimethyl carbonate was confirmed using a gas chromatograph mass spectrometer (manufactured by Shimadzu Corporation, product name: GCMS-QP2010) and calculated in terms of toluene. did.
As a result, the amount of the eluted C ₁₀ -C ₂₈ alkane was 131.7 ppm in terms of toluene, which was qualified (see FIG. 20).

Example 4
As a material of the bag body 3 of Example 1, linear low density polyethylene resin, specifically, Ultimex 3500ZA of Prime Polymer Co., Ltd. was used.

In the same manner as in Example 3, the amount of alkane eluted from the bag body 3 was confirmed and calculated in terms of toluene, and the amount of C ₁₀ -C ₂₈ alkane eluted was 32.3 ppm in terms of toluene. Eligible (see Figure 20).

(Example 5)
As the material of the bag body 3 of Example 1, linear low density polyethylene resin, specifically, kernel KF273 manufactured by Nippon Polyethylene Co., Ltd. was used.

In the same manner as in Example 3, the amount of alkane eluted from the bag body 3 was confirmed and calculated in terms of toluene. The amount of eluted C ₁₀ -C ₂₈ alkane was 35.6 ppm in terms of toluene. Eligible (see Figure 20).

(Comparative Example 2)
As a material of the bag body 3 of Example 1, linear low density polyethylene resin, specifically, Umerit 165HK of Ube Maruzen Polyethylene Co., Ltd. was used.

In the same manner as in Example 3, the amount of alkane eluted from the bag body 3 was confirmed and calculated in terms of toluene, and the amount of eluted C _{10 to} C ₂₈ alkane was 427.6 ppm in terms of toluene. Not qualified (see Figure 20).

(Comparative Example 3)
In the same manner as in Example 1, low density polyethylene resin, specifically, Novatec LD LF547C manufactured by Nippon Polyethylene Co., Ltd. was used as the material for the bag body 3.

In the same manner as in Example 3, the amount of alkane eluted from the bag body 3 was confirmed and calculated in terms of toluene. The amount of the eluted C _{10 to} C ₂₈ alkane was 231.7 ppm in terms of toluene. Not qualified (see Figure 20).

  From the above, it was possible to obtain the liquid storage container 1 having desired alkane elution amount characteristics by appropriately selecting the material of the bag body 3.

Example 6
The bag main body 3 formed using the same material as that of the first embodiment and by the same method is modified as shown in FIG. 17, and the liquid container 1 is placed so that the internal volume of the bag main body 3 is 3L. Produced.

The liquid storage container 1 was filled with 3 L of hydrochloric acid (Wako Pure Chemicals, SC grade) with care so that there was no contamination from the surrounding environment, and was allowed to stand at 60 ° C. for 1 week. Thereafter, the elution amount of metal ions from the inner bag 21 to hydrochloric acid was confirmed using ICP-MS (ELAN DRC2, manufactured by PerkinElmer).
As a result, the amount of eluted metal ions was less than 0.02 ppb and was qualified. (See Figure 18)

(Comparative Example 4)
A liquid container 1 was produced in the same manner as in Example 6 using a bag body 3 formed using the same material as in Comparative Example 1 and in the same manner.

In the same manner as in Example 6, the amount of metal ions eluted from the bag body 3 into hydrochloric acid was measured.
As a result, the amount of the eluted metal ions exceeded 0.02 ppb depending on the metal species, and was unqualified. (See Figure 18)

  From the above, by performing inflation film formation using a ULPA filter or a HEPA filter as the clean filter 81, the liquid storage container 1 having desired metal ion elution characteristics can be obtained.

DESCRIPTION OF SYMBOLS 1 Liquid container 3 Bag main body 3a Upper edge 3b Bottom edge 3c Side edge 5 Exterior container 5a Opening part 10 Heat seal part 20 Outer bag 21 Inner bag 40 Outlet 41 Outlet body 42 Outlet flange 50 Outlet attachment part 51 Center Portion 52 Thin portion 60 Liquid distribution nozzle 61 Dome-shaped portion 62 Open hole 70 Outlet upper member 80 Inflation molding machine 81 Clean filter

Claims (6)

In the liquid storage container that is arranged in the outer container and the content liquid is stored inside,
The liquid storage container has an internal volume of the liquid storage container of 3 L, and the number of particles having a diameter of 0.1 μm when the interior of the 3 L internal volume is filled with pure water is 15 / mL or less,
When the inner volume of the liquid storage container is molded to 3 L and the interior of this 3 L inner volume is filled with hydrochloric acid, the elution amount of each metal ion of Li, Na, K, Be, Mg, Ca is 0.02 ppb. Is less than
The innermost layer of the liquid container contains a low-density polyolefin film, and when the innermost layer is brought into contact with 13 mL of dimethyl carbonate so that the contact area is 45000 mm ² , the elution amount of the C _{10 to} C ₂₈ alkane is toluene. A liquid container characterized by being 200 ppm or less in terms of conversion.   The liquid container according to claim 1, wherein the number of particles having a diameter of 0.2 μm is 5 / mL or less when the liquid container is filled with pure water.   3. The liquid storage container according to claim 1, wherein the amount of elution of metal ions having element numbers of 24 to 30 when the liquid storage container is filled with hydrochloric acid is less than 0.02 ppb.   The liquid storage container according to claim 1, wherein the liquid storage container includes an inner bag and an outer bag.   The liquid container according to any one of claims 1 to 4, wherein the liquid container includes a bag body and a spout provided at a side edge of the bag body.   The liquid container according to claim 5, wherein the bag body and the spout are integrally formed, and the spout protrudes outward from an upper edge of the bag body.

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