JP6786659B2 - Liquid storage container - Google Patents

Description

The present invention relates to a liquid storage container, and more particularly to a liquid storage container used by being housed in an outer container provided for storage and transportation of fluid contents in the fields of industrial chemicals, pharmaceuticals, cosmetic raw materials, and the like.

Conventionally, in the fields of industrial chemicals, pharmaceuticals, cosmetic raw materials, etc., liquid storage containers that are placed inside outer containers made of aluminum, steel, stainless steel, fiberboard, etc. for storage and transportation and store fluid content liquids have been used. in use.

Such a liquid storage container can be reused simply by removing the used liquid storage container from the outer container and setting a new liquid storage container in the outer container. Therefore, for example, a liquid storage container is used. Compared to directly filling an outer container such as steel with fluid contents, it has the advantage of saving the trouble of cleaning, and is widely used as a container for industrial chemicals, pharmaceuticals, and cosmetic raw materials. ..

By the way, in a photolithography process related to display and semiconductor manufacturing, a photosensitive resin (resist) is used as a material for forming a fine line pattern on a base material.

On the other hand, especially in the semiconductor field, the line width required for a fine line pattern is narrowing year by year due to the improvement of the circuit integration rate, and in recent years, the pattern is formed with a minute line width of 100 nm or less, up to a minute line width of 30 nm or less. Is beginning to be sought after.

In the field of resists where such a line width is required, the presence of particles in the resist as a content liquid causes a deterioration in yield.

That is, when particles are mixed in the resist applied on the base material, the pattern is missing during resist curing and development because there is no resist in the particle part, and the fine wire is broken depending on the size of the particles. It ends up.

In order to reduce the occurrence rate of such disconnection, it is required to reduce the size and number of particles in the resist solution.

Further, when forming a pattern using a resist, it is necessary to take steps such as development, etching, and cleaning.

Also in these steps, the presence of particles in the content liquid is not preferable.

That is, in the developing process, the resist directly under the portion where the particles are present is not developed. Further, in the etching step, it is not possible to etch directly under the portion where the particles are present. Further, in the cleaning process, problems such as particles remaining on the base material occur.

In order to reduce the incidence of these defects, it is required to reduce the particle size and number in these content liquids.

Further, similarly to the above particles, the amount of metal ions in the content liquid is also required to be reduced.

That is, when the content liquid is a resist, when metal ions, especially alkali metal ions, are present in the resist, they remain as fixed positive charges in the layer (transistor element, etc.) formed on the substrate, and the transistor. Problems such as changing the charge characteristics of the element occur.

Further, when forming a battery or wiring, residual metal ions become a factor of migration.

Even when the content liquid is a developing solution, an etching solution, or a cleaning solution, the same risk occurs when metal ions are contained.

In recent years, with the miniaturization and thinning of elements, the required specifications for metal ions in the layer due to contamination have become extremely small, and in the photolithography process, control of the number of metal ions on the order of ppt is required.

In addition to the above, reduction of the amount of organic impurities in the content liquid is also required.

That is, the presence of organic impurities in the resist solution adversely affects the curing of the resist and the formation of fine line patterns.

Further, in the developing / etching process, it becomes a factor that hinders the efficiency of developing / etching, and further, in the cleaning process, problems such as organic impurities remaining on the base material occur.

In this way, in order to avoid organic contamination of the content liquid, it is necessary to sufficiently reduce the organic impurities in the content liquid.

Japanese Patent No. 3929000 Japanese Patent No. 4926536 Japanese Unexamined Patent Publication No. 2014-104609

The present invention has been made in consideration of the above points, and an object of the present invention is to provide a liquid storage container capable of suppressing the amount of particles in the content liquid and the amount of elution of metal ions and organic substances low.

The present invention is a liquid storage container that is arranged in an outer container and stores the content liquid inside. The liquid storage container is formed by molding the internal volume of the liquid storage container into 3 L, and the inside of the 3 L internal volume is formed. The number of particles having a diameter of 0.1 μm when filled with pure water is 15 particles / mL or less, and the internal volume of the liquid storage container is formed into 3 L, and the inside of this 3 L internal volume is filled with hydrochloric acid. , Na, K, Be, Mg, Ca each metal ion elution amount is less than 0.02 ppb, the innermost layer of the liquid storage container contains a low density polyolefin film, and the contact area is 45,000 mm with 13 mL of dimethyl carbonate. ^It is a liquid storage container characterized in that the elution amount of alcans of C _{10 to} C ₂₈ is 200 ppm or less in terms of toluene when the innermost layers are brought into contact with each other so as to be 2.

The present invention may be a liquid storage container characterized in that the number of particles having a diameter of 0.2 μm is 5 particles / mL or less when the inside of the liquid storage container is filled with pure water.

The present invention may be a liquid storage container characterized in that the elution amount of metal ions of element numbers 24 to 30 is less than 0.02 ppb when the inside of the liquid storage container is filled with hydrochloric acid. ..

The present invention may be a liquid storage container characterized in that the liquid storage container has an inner bag and an outer bag.

The present invention may be a liquid storage container characterized in that the liquid storage container has a bag main body and a spout provided at a side edge portion of the bag main body.

The present invention may be a liquid storage container characterized in that the bag body and the spout are integrally molded, and the spout projects outward from the upper edge of the bag body.

As described above, according to the present invention, the amount of particles in the content liquid and the amount of elution of metal ions and organic substances can be kept low.

FIG. 1 is a plan view showing a liquid storage container according to the present invention. FIG. 2 is a perspective view showing a spout. FIG. 3 is a side view showing the spout. FIG. 4 is a side view of the spout viewed from a direction 90 ° different from that of FIG. 3 (a). FIG. 5 is a top view showing a spout. FIG. 6 is a bottom view showing the spout. FIG. 7 is a side view showing a spout attached to the bag body. 8 (a) and 8 (b) are views showing a state in which the liquid storage container is inserted into the outer container. FIG. 9 is a cross-sectional view showing the layer structure of the bag body of the liquid storage container. 10 (a) is a view showing a folded liquid storage container, FIG. 10 (b) is an enlarged view of part B of FIG. 10 (a), and FIG. 10 (c) is an enlarged view of part C of FIG. 10 (a). .. FIG. 11 is a diagram showing a state in which the bag body of the liquid storage container is folded in a belly shape via a vertical folding curve. FIG. 12 is a diagram showing a state in which the bag body of the liquid storage container is folded via an upward lateral folding curve and a downward lateral folding curve. FIG. 13 is a diagram showing a triangular bent portion formed by bending the bag body of the liquid storage container through a folding curve. FIG. 14 is a diagram showing a method of manufacturing a liquid storage container. FIG. 15 is a diagram showing the number of particles in the bag body of the liquid storage container. FIG. 16 is a diagram showing a modified example of the liquid storage container. FIG. 17 is a diagram showing the appearance of the bag body. FIG. 18 is a diagram showing the amount of metal eluted from the liquid storage container. FIG. 19 is a diagram showing a modified example of the liquid storage container according to the present invention. FIG. 20 is a diagram showing the amount of alkane elution in the liquid storage container.

<Embodiment of the present invention>
Hereinafter, embodiments for carrying out the present invention will be described with reference to the drawings.

Here, FIG. 1 is a plan view showing an embodiment of the liquid storage container according to the present invention, FIG. 2 is a perspective view of the spout, FIG. 3 is a side view of the spout, and FIG. 4 is a spout. It is a side view seen from a direction different from FIG. 3 by 90 °, FIG. 5 is a top view of the spout, FIG. 6 is a bottom view of the spout, and FIG. 7 is a side view of the spout attached to the bag body. Is.

In the liquid storage container 1 according to the present embodiment, the multilayer films 2 in which the outer bag 20 and the inner bag 21 are overlapped are overlapped so that the inner bags 21 face each other to form a total of four sheets, and the four sides thereof are heat-sealed. The bag main body 3 is provided with the heat-sealed portion 10 formed therein, and the spout 40 arranged on the upper edge 3a of the bag main body 3 and previously heat-sealed between the inner bags 21.

In the present embodiment, the bag body 3 is obtained by laminating the multilayer films 2 so that the inner bags 21 face each other and heat-sealing the four sides to form the heat-sealing portion 10, but the present invention is limited to this. For example, the multilayer film 2 may be bent so that the inner bags 21 face each other, and then the three overlapping outer peripheral sides are heat-sealed. Further, each of the inner edges of the heat seal portion 10 may be formed so that the inner edges thereof are arcuate. As a result, the structure is such that the fluid contents are unlikely to remain at the corners. Further, the bag body does not necessarily have to be composed of multiple films, and the film structure of the package body 3 can be appropriately selected according to the contents and the amount.

As described above, the bag body 3 is obtained by superimposing two multilayer films 2 and heat-sealing the peripheral edge to form the heat-sealing portion 10. In this case, the bag body 3 has a rectangular shape having an upper edge 3a, a bottom edge 3b, and two side edges 3c and 3c. Further, the upper edge 3a includes two upper edge heat seal portions 10a, the bottom edge 3b includes one bottom edge heat seal portion 10b, and each side edge 3c and 3c includes one side edge heat seal portion 10c. The heat seal portion 10 is composed of the upper edge heat seal portion 10a, the bottom edge heat seal portion 10b, and the side edge heat seal portion 10c.

Further, the upper edge 3a of the bag body 3 includes two upper edge heat seal portions 10a as described above. By dividing the heat-sealed portion 10a of the upper edge 3a into two in this way, as compared with the case where, for example, one heat-sealed portion having the width of two heat-sealed portions 10a is formed on the upper edge 3a. It is preferable because the upper edge 3a can be formed relatively soft. However, one upper edge heat seal portion 10a may be provided on the upper edge 3a of the bag body 3 (see FIG. 19).

Further, the spout 40 includes a spout mounting portion 50 that is heat-sealed to the upper edge 3a of the bag main body 3 and a spout main body 41 that is connected to the spout mounting portion 50 and projects outward from the bag main body 3. A spout flange 42 is provided at the upper end of the spout main body 41. Further, as shown in FIG. 1, the spout 40 is heat-sealed between the inner bags 21 of the multilayer film 2 at the spout mounting portion 50.

As shown in FIGS. 2 to 7, the spout attachment portion 50 of the spout 40 is an elliptical cylinder having a central portion 51 and a thin portion 52 provided on both sides of the central portion 51 and having a thickness thinner than that of the central portion 51. It consists of a body, is flat and has a through hole 45 in the central portion 51. Normally, when the spout 40 is heat-sealed between the inner bags 21 of the multilayer film 2 at the spout mounting portion 50, there is a gap between the inner bags 21 and the two regions surrounded by the ends of the spout mounting portion 50. It can easily cause poor sealing. In order to prevent this, thin-walled portions 52 are provided on both sides, and the thin-walled portions 52 are melted at the time of heat fusion to prevent the formation of gaps.

Further, the spout main body 41 of the spout 40 is formed of a tubular body having a substantially U-shaped cross section, and a spout flange 42 is provided on the peripheral edge of the upper end thereof. An opening 44 is formed in the bottom 43 of the spout main body 41. Ventilation can be ensured between the liquid storage container 1 and the outer container 5 described later by the opening 44, and when the content liquid is pumped out during use, the liquid storage container 1 and the outer container 5 are pumped through the opening 44. A gas is sealed between the two, and pressure is applied from the outside of the liquid storage container 1 to smoothly pump out the content liquid inside the liquid storage container 1. Further, the bottom portion 43 in the spout main body 41 is provided with a spout upper member 70 extending in the vertical direction.

The spout flange 42 of the spout 40 is attached to the opening 5a formed in the outer container 5, and the liquid storage container 1 is supported in the outer container 5.

The spout 40 is preferably manufactured by an injection molding method. The resin used for this is not particularly limited as long as it is an injection-moldable resin, but since it is bonded to the resin constituting the inner surface of the inner bag 21 of the multilayer film 2 by heat fusion, the inner bag 21 It is necessary to appropriately select the resin depending on the resin constituting the inner surface, but usually, high-density polyethylene which is rigid even at a high temperature and is hard to be brittle at a low temperature is preferable.

Next, the multilayer film 2 constituting the bag body 3 will be described. In the present embodiment, the multilayer film 2 is composed of a film forming the outer bag 20 and a film forming the inner bag 21.

As shown in FIG. 9, as the outer bag 20 of the bag body 3, a laminate of unstretched nylon (thickness 20 μm) 20a / linear low-density polyethylene (thickness 40 μm) 20b can be used, and the inner bag 21 can be used. As the material, linear low-density polyethylene (thickness 70 μm) can be used.

In this case, since the outer bag 20 contains unstretched nylon 20a, the degree of elongation of the outer bag 20 can be increased. For example, the outer bag 20 has an degree of elongation of 300% to 500%. Since the outer bag 20 can have a high degree of elongation in this way, the bag body 3 can be made soft as a whole, and the bag body 3 is inserted into the outer container 5 as described later, and the bag body 3 is inserted. When the bag body 3 is inflated in the outer container by supplying nitrogen gas or clean dry air to the inside, the bag body 3 can be inflated smoothly.

The material of the bag body 3 is not limited to the above-mentioned material.

For example, as the material of the inner bag 21, a material such as low-density polyethylene or a mixture of low-density polyethylene and linear low-density polyethylene can be used.

The material of the outer bag 20 is a material having an elongation of 300% to 500%, for example, unstretched nylon, low density polyethylene, linear low density polyethylene, a mixture of low density polyethylene and linear low density polyethylene. , Etc. can be used.
Polyolefins typified by these various types of polyethylene may contain low molecular weight components derived from the manufacturing process. Therefore, in order to prevent elution of low molecular weight alkanes having 10 to 28 carbon atoms (C _{10 to} C ₂₈ ), which are low molecular weight components, it is important to appropriately select a polyolefin material.

Next, the material of the bag body 3 of the liquid storage container 1 will be further described.

The bag body 3 of the liquid storage container 1 has 15 particles / mL having a diameter of 0.1 μm inside the bag body 3 when the inside of the bag body 3 formed so as to have an internal volume of 3 L is filled with pure water. It is preferably 5.7 to 11.7 pieces / mL (see FIG. 15).

The number of particles having a diameter of 0.15 μm is 2.9 to 5.4 particles / mL, and the number of particles having a diameter of 0.2 μm is 5 particles / mL or less, preferably 1.4 to 2.8 particles / mL. It is mL, and the number of particles with a diameter of 0.3 μm is 0.5 to 1.0 particles / mL, and the number of particles with a diameter of 0.5 μm is 0.1 to 0.2 particles / mL. There is.

When forming a pattern using a resist by at least 15 particles / mL for particles with a diameter of 0.1 μm and up to 5 particles / mL for particles with a diameter of 0.2 μm, a developer, an etching solution, When a process such as development, etching, and cleaning is performed using a cleaning solution, it is possible to reduce the process load of defect repair of defects caused by the presence of particles.

In addition, each of Li, Na, K, Be, Mg, and Ca inside the bag body when the inside of the bag body 3 formed so as to have an internal volume of 3 L is filled with hydrochloric acid and stored at 60 ° C. for 1 week. The elution amount of metal ions is less than 0.02 ppb in each case. Further, when the inside of the bag body 3 formed so as to have an internal volume of 3 L is filled with hydrochloric acid and stored at 60 ° C. for 1 week, the elution amount of metal ions of element numbers 24 to 30, that is, Cr, Mn, The elution amount of metal ions of Fe, Co, Ni, Cu, and Zn is also less than 0.02 ppb. Furthermore, the elution amount of metal ions of Au, Ag, and Al is also less than 0.02 ppb (see FIG. 18).
When the content liquid is a resist, if metal ions, especially alkali metal ions, are present in the resist, they remain as fixed positive charges in the layer (transistor element, etc.) formed on the substrate, and the transistor element Problems such as changing the charge characteristics may occur. When the abundance of metal ions is less than 0.02 ppb, it is possible to suppress deterioration in performance such as charge characteristics of the transistor element.

Further, as described above, the innermost layer of the bag body 3 is made of a low-density polyolefin film, and when the innermost layer of the bag body 3 is brought into contact with 13 mL of dimethyl carbonate so that the contact area is 45,000 mm ² , the inside of the bag body 3 is formed. The elution amount of alkanes (organic matter elution amount) of C _{10 to} C ₂₈ to C _{10 to} C ₂₈ is 200 ppm or less in terms of toluene.
When the content liquid is applied to the base material to form a thin film, if the content liquid contains a large amount of low molecular weight organic components, the low molecular weight components are adsorbed on the surface of the base material, which hinders the formation of the thin film. May occur. When the amount of alkanes C _{10 to} C ₂₈ eluted in the content liquid is 200 ppm or less in terms of toluene, a thin film can be formed without causing these problems.

As described above, for the bag body 3 of the liquid storage container 1, the number of particles, the amount of metal ion elution, and the amount of organic matter elution are determined as described above, so that the resist used when manufacturing a display or a semiconductor is used as the content liquid. Even in this case, the display and semiconductor as final products can be manufactured finely and accurately.

The bag body 3 of the liquid storage container 1 having such a configuration is manufactured as follows.

First, as shown in FIG. 14A, a tubular inner bag 21 whose inside is filled with clean air is manufactured by an inflation molding machine 80 using clean air that has passed through a clean filter 81, and the tubular inner bag 21 is manufactured. The inner surfaces of 21 are wound so as to face each other and come into contact with each other. Next, as shown in FIG. 14 (b), the tubular inner bag 21 wound as described above is unwound so that the inner surfaces face each other and are in contact with each other, and the inner bags 21 are unwound above and below the outer surface. A film for the outer bag 20 is arranged to form a multilayer film 2. Next, the tubular inner bag 21 unwound so that the film for the outer bag 20 and the inner surfaces face each other in contact with each other is heat-sealed by a heat-sealing device (not shown), and the side edge heat-sealing portion 10c, A heat seal portion 10 composed of 10c, an upper edge heat seal portion 10a, and a bottom edge heat seal portion 10b is formed. At this time, only the portion where the spout attachment portion 50 of the spout 40 is later inserted into the upper edge heat-sealed portion 10a and heat-welded is left as an unsealed portion without heat-sealing. Next, the strip-shaped film in which the outer bag 20 and the inner bag 21 are heat-sealed to form the heat-sealed portion 10 is cut for each bag body to manufacture the bag body 3.

After that, the spout mounting portion 50 of the spout 40 is inserted into the inner bag 21 from the unsealed portion of the upper edge heat-sealed portion 10a of the bag body 3, and the heat-sealing is performed from above the outer bag 20. The inner bag 21 and the spout attachment portion 50 are heat-welded to obtain the liquid storage container 1.
All of these series of steps are performed in a clean room.

By doing so, the liquid storage container 1 can be manufactured without exposing the inner surface of the inner bag 21 of the bag body 3 to anything other than the clean air that has passed through the clean filter 81. That is, in the manufacturing process of the liquid storage container 1, it is possible to prevent particles and metal ions from adhering to the inner surface of the inner bag 21.
As a result, the liquid storage container 1 having the above-mentioned characteristics can be obtained.
When the liquid storage container 1 is obtained by a film forming method such as the T-die method for obtaining the inner bag 21 in the form of a film, it is inevitable that the inner surface of the inner bag 21 comes into contact with a metal such as a guide roll, and the film forming step. The metal contamination on the inner surface of the inner bag 21 becomes large, and the amount of metal ions eluted increases.

Next, the shape of the bag body 3 will be described. As shown in FIGS. 10 to 13, the bag body 3 includes a plurality of vertically extending, for example, five belly abdomen 12 formed by being folded into a belly shape through four vertical folding curves 11. (See FIGS. 10 and 11).
In this case, each of the abdomen 12 of the bag body 3 has substantially the same width W. The spout 40 attached to the bag body 3 is arranged corresponding to the central abdomen 12 of the five abdomen 12.

Further, after the bag body 3 is folded through the vertical folding curve 11 to form the five abdomen 12, the bag body 3 passes through the upward lateral folding curve 15a and the downward lateral folding curve 15b. It is folded to form a folded portion 16 extending laterally (see FIG. 12).

After that, the bag body 3 may be bent along the folding curve 13 to form the triangular bent portion 14 (see FIG. 10B).

In this way, as shown in FIGS. 10A and 10B, a liquid storage container 1 in which a plurality of belly abdomen 12, a folding portion 16, and a triangular bent portion 14 are formed is prepared in the bag body 3. To.
It should be noted that any of the plurality of abdominal abdomen 12 and the folded portion 16 may be formed first.

Next, as shown in FIGS. 8A and 8B, the liquid storage container 1 is further folded in the vertical direction to form an elongated shape in the vertical direction, and the liquid storage container 1 is formed from the opening 5a into the outer container 5. Will be inserted into.

Next, the injection port 40 of the liquid storage container 1 is attached to the opening 5a of the outer container 5. In this case, the spout flange 42 of the spout main body 41 of the spout 40 engages with the opening 5a of the outer container 5 (see FIG. 7).

Next, an inflatable jig (not shown) is attached to the spout 40 of the liquid storage container 1, and nitrogen gas or clean dry air is supplied into the liquid storage container 1 using this inflatable jig to supply the outer container 5 with nitrogen gas or clean dry air. The bag body 3 of the liquid storage container 1 swells inside.

Next, the action of inflating the liquid storage container 1 in the outer container 5 will be described in detail below.

When the liquid storage container 1 is inserted into the outer container 5, first, the portion of the bag body 3 of the liquid storage container 1 below the folding portion 16 falls due to its own weight, and the bag body 3 expands.

Next, as described above, the bag body 3 is inflated by supplying nitrogen gas or clean dry air into the liquid storage container 1 using an inflatable jig. Along with this, the bag body 3 folded in a belly shape through the vertical folding curve 11 is spread flat.

At this time, if a triangular bent portion 14 formed by bending through the folding curve 13 is formed in the upper portion of the bag main body 3, the upper edge of the bag main body 3 is formed when the bag main body 3 expands. The corner portion of 3a does not get caught in the opening 5a of the outer container 5, and thus the bag body 3 is prevented from being damaged.

Further, since the upper edge 3a of the bag body 3 includes one or two upper edge heat-sealing portions 10a, the upper edge 3a can be configured to be softer than in the case of including a wide heat-sealing portion, and the bag body 3a can be formed softer. 3 can be expanded more smoothly in the outer container 5. Furthermore, since the outer bag 20 of the bag body 3 has an elongation degree of 300% to 500%, the flexibility of the bag body 3 can be increased and the expansion action of the bag body 3 can be easily performed.

In this way, a combination of the outer container and the liquid storage container is obtained. After that, the inflating jig is removed from the spout 40, a content liquid filling machine (not shown) is attached to the spout 40, and the content liquid is filled into the liquid storage container from the content liquid filling machine.

After the content liquid is filled in the liquid storage container, as shown in FIG. 7, the spout that holds the liquid distribution nozzle 60 in the spout main body 41 of the spout 40 mounted in the opening 5a of the outer container 5. The upper member 70 is mounted, and the liquid distribution nozzle 60 is inserted into the spout upper member 70.

The liquid distribution nozzle 60 inserted into the spout upper member 70 penetrates the through hole 45 of the spout 40 and extends into the bag body 3 of the liquid storage container 1. Further, the liquid distribution nozzle 60 has a large diameter portion 63 formed at the upper end thereof and a dome-shaped portion 61 formed at the lower end thereof, and a plurality of openings 62 are formed in the dome-shaped portion 61. The dome-shaped portion 61 has a hemispherical shape, and a plurality of openings 62 are formed on the hemispherical surface. In the dome-shaped portion 61, the lower end of the liquid distribution nozzle 60 may be formed in a hemispherical shape, or the hemispherical nozzle cap may be attached to the lower end of the liquid distribution nozzle 60.

The liquid distribution nozzle 60 inserted into the spout upper member 70 has a large diameter portion 63 provided at the upper end thereof engaged with the spout upper member 70 and is held by the spout upper member 70.

In this way, after completing the step of filling the liquid storage container 1 with the content liquid, a cap (not shown) is attached to the opening 5a of the outer container 5. At this time, a thick film that can be penetrated without dust generation is pierced by the tip of the dispenser when a sealing member called a break seal (dispenser (not shown) described later) is attached between the cap and the spout upper member 70. ) Is intervened. Therefore, the spout 40 and the liquid distribution nozzle 60 are sealed by the break seal and the cap. In this way, the spout 40 and the large diameter portion 63 of the liquid distribution nozzle 60 are sealed. In this case, the cap engages with the external screw 5b provided on the outer periphery of the opening 5a. Further, the cap is composed of a cap body and an upper cap, and the upper cap can be removed from the cap body.

When the content liquid in the liquid storage container 1 is discharged to the outside, the upper cap is removed from the cap body, and the large diameter portion 63 of the liquid distribution nozzle 60 is connected to the dispenser via the break seal and the cap body.

Next, nitrogen gas is supplied from the pressurized gas source (not shown) into the spout main body 41 of the spout 40, and then the nitrogen gas is supplied from the opening 44 to the outer container 5 and the bag main body 3 of the liquid storage container 1. Enter the space between. Next, the bag body 3 is pressed from the outside by nitrogen gas, the content liquid in the bag body 3 enters the liquid distribution nozzle 60 through the opening 62 of the dome-shaped portion 61, and the content liquid in the liquid distribution nozzle 60 is subsequently large. It is discharged from the diameter portion 63 to the dispenser side.

During this period, since the liquid distribution nozzle 60 has a dome-shaped portion 61 at the lower end thereof, when the content liquid in the bag body 3 is discharged outward from the large diameter portion 63 via the liquid distribution nozzle 60, the liquid distribution nozzle 60 Even if the lower end abuts on the inner surface of the bag body 3, the lower end of the liquid distribution nozzle 60 prevents the bag body 3 from being damaged.

Further, the content liquid in the bag body 3 is sucked into the liquid distribution nozzle 60 through a plurality of openings 62 provided in the dome-shaped portion 61, and is discharged from the large diameter portion 63 to the dispenser side. Therefore, as compared with the case where a single opening is provided at the center of the lower end of the liquid distribution nozzle 60, the bag body 3 is in close contact with the liquid distribution nozzle 60 and is inside the liquid distribution nozzle 60 even if the remaining amount of the content liquid is small. It prevents the contents liquid from becoming difficult to flow.

<Modified example of the present invention>
Next, a modified example of the present invention will be described with reference to FIG.

In the above embodiment, an example is shown in which the liquid storage container 1 has the bag main body 3 and the spout 40 attached to the upper edge 3a of the bag main body 3 separately from the bag main body 3, but the present invention is limited to this. The liquid storage container 1 may have a bag body 3 and a spout 40 that protrudes outward from the upper edge 3a of the bag body 3 and is integrally molded with the bag body 3, and has an inner bag and an outer bag. You may have an inner bag instead of having.

The bag body 3 and the spout 40 can be integrally molded from, for example, low-density polyethylene, linear low-density polyethylene, low-density polyethylene and linear low-density polyethylene.

In this modification, the spout 40 of the bag body 3 is heat-sealed and sealed by the spout tip 40t and the spout side edge heat-sealing portion 40u, and the liquid storage container 1 is configured to be flat as a whole. ing.

That is, as shown in FIG. 14A, using the clean air that has passed through the clean filter 81, the inflation molding machine 80 manufactures a tubular inner bag 21 whose inside is filled with clean air, and the inner bag of the tubular shape is manufactured. The inner surfaces of the bag 21 are wound so as to face each other and come into contact with each other. Next, the tubular inner bag 21 wound as described above is unwound so that the inner surfaces face each other and are in contact with each other, and heat-sealed by a heat-sealing device to heat-seal the side edge heat-sealing portions 10c and 10c. A heat seal portion 10 including an upper edge heat seal portion 10a, a bottom edge heat seal portion 10b, a spout side edge heat seal portion 40u, and a spout tip 40t is formed. Next, by cutting the strip-shaped film on which the heat seal portion 10 is formed for each bag body, a liquid storage container 1 in which the bag body 3 and the spout 40 are integrally formed can be obtained. In this modified example, the spout can be opened by cutting the spout tip 40t, and the liquid can be filled inside the liquid storage container 1 and stored.

Next, specific examples of the present invention will be described.

(Example 1)
A bag body using a ULPA filter (specified by JIS Z 8122) as a clean filter 81, a low density polyethylene resin (specifically, UBE polyethylene B128 manufactured by Ube Maruzen Polyethylene Co., Ltd.) by an inflation molding machine (manufactured by WINDMOELLER & HOELSCHER CORPORATION). 3 was prepared to have a thickness of 70 μm (see FIG. 14 (a)). After that, in the embodiment of the modified example, the liquid storage container 1 was manufactured so that the internal volume of the bag body 3 was 3 L as shown in FIG.

At this time, when the inside of the liquid storage container 1 is filled with pure water, the number of particles having a diameter of 0.1 μm is 5.7 particles / mL, the number of particles having a diameter of 0.15 μm is 2.9 particles / mL, and 0. The number of particles having a diameter of 2 μm was 1.4 / mL, the number of particles having a diameter of 0.3 μm was 0.5 particles / mL, and the number of particles having a diameter of 0.5 μm was 0.1 particles / mL (see FIG. 15). ).

(Example 2)
A liquid storage container 1 having a bag body 3 was produced in the same manner as in Example 1 except that a HEPA filter (specified by JIS Z 8122) was used as the clean filter 81 (see FIGS. 14 and 17).

At this time, when the inside of the liquid storage container 1 is filled with pure water, the number of particles having a diameter of 0.1 μm is 11.7 particles / mL, the number of particles having a diameter of 0.15 μm is 5.4 particles / mL, and 0. The number of particles with a diameter of .2 μm was 2.8 / mL, the number of particles with a diameter of 0.3 μm was 1.0 / mL, and the number of particles with a diameter of 0.5 μm was 0.2 / mL (see FIG. 15). ).

(Comparative Example 1)
A liquid storage container 1 was produced in the same manner as in Example 1 except that the clean filter 81 was not used (see FIGS. 14 and 17).

At this time, when the inside of the liquid storage container 1 is filled with pure water, the number of particles having a diameter of 0.1 μm is 59.4 particles / mL, the number of particles having a diameter of 0.15 μm is 36.0 particles / mL, and 0. The number of particles with a diameter of 2 μm was 21.2 particles / mL, the number of particles with a diameter of 0.3 μm was 9.4 particles / mL, and the number of particles with a diameter of 0.5 μm was 2.7 particles / mL (see FIG. 15). ).

From the above, by forming an inflation film using a ULPA filter or a HEPA filter as the clean filter 81, a liquid storage container 1 having a bag body 3 having desired particle characteristics could be obtained.

(Example 3)
The bag body 3 was molded using the same material as in Example 1 and in the same manner.

The bag body 3 was cut into a film having an area of 22,500 mm ^{2, and} the film having a contact area of 45,000 mm ² on the front and back surfaces was immersed in 13 mL of dimethyl carbonate and allowed to stand at 60 ° C. for 1 week.
After that, it was confirmed by using a gas chromatograph mass spectrometer (manufactured by Shimadzu Corporation, product name: GCMS-QP2010) whether or not C _{10 to} C ₂₈ alkanes were eluted from the film into dimethyl carbonate, and calculated in terms of toluene. did.
Result, the amount of alkanes eluted _C 10 _{-C 28} in 131.7ppm with toluene terms, were eligible (see FIG. 20).

(Example 4)
As the material of the bag body 3 of Example 1, a linear low-density polyethylene resin, specifically, Ultozex 3500ZA of Prime Polymer Co., Ltd. was used.

In the same manner as in Example 3, was calculated with toluene converted to confirm alkane amount eluted from the bag body 3, the amount of alkanes eluted C ₁₀ -C ₂₈ in 32.3ppm with toluene conversion, It was eligible (see Figure 20).

(Example 5)
As the material of the bag body 3 of Example 1, a linear low-density polyethylene resin, specifically, kernel KF273 of Japan Polyethylene Corporation was used.

In the same manner as in Example 3, was calculated with toluene converted to confirm alkane amount eluted from the bag body 3, the amount of alkanes eluted C ₁₀ -C ₂₈ in 35.6ppm with toluene conversion, It was eligible (see Figure 20).

(Comparative Example 2)
As the material of the bag body 3 of Example 1, a linear low-density polyethylene resin, specifically Ube-Maruzen Polyethylene Co., Ltd.'s Umerit 165HK was used.

In the same manner as in Example 3, the amount of alkane eluted from the bag body 3 was confirmed and calculated in terms of toluene. As a result, the amount of eluted alkanes C _{10 to} C ₂₈ was 427.6 ppm in terms of toluene. It was ineligible (see Figure 20).

(Comparative Example 3)
In the same manner as in Example 1, a low-density polyethylene resin, specifically Novatec LD LF547C manufactured by Japan Polyethylene Corporation, was used as the material of the bag body 3.

In the same manner as in Example 3, was calculated with toluene converted to confirm alkane amount eluted from the bag body 3, the amount of alkanes eluted C ₁₀ -C ₂₈ in 231.7ppm with toluene conversion, It was ineligible (see Figure 20).

From the above, by appropriately selecting the material of the bag body 3, it was possible to obtain the liquid storage container 1 having the desired alkane elution amount characteristic.

(Example 6)
The liquid storage container 1 is formed by using the same material as in Example 1 and molding the bag body 3 in the same manner in the manner of the modified example as shown in FIG. 17 so that the internal volume of the bag body 3 is 3 L. Made.

The liquid storage container 1 was filled with 3 L of hydrochloric acid (Wako Pure Chemical, SC grade), being careful not to be contaminated from the surrounding environment, and allowed to stand at 60 ° C. for 1 week. Then, the amount of metal ions eluted from the inner bag 21 into hydrochloric acid was confirmed using ICP-MS (ELAN DRC2, manufactured by Perkin Elemer).
As a result, the amount of metal ions eluted was less than 0.02 ppb, which was suitable. (See Fig. 18)

(Comparative Example 4)
The bag body 3 molded by the same method using the same material as in Comparative Example 1 was used to prepare a liquid storage container 1 in the same manner as in Example 6.

In the same manner as in Example 6, the amount of metal ions eluted from the bag body 3 into hydrochloric acid was measured.
As a result, the amount of eluted metal ions exceeded 0.02 ppb depending on the metal species, which was ineligible. (See Fig. 18)

From the above, the liquid storage container 1 having the desired metal ion elution characteristics could be obtained by forming an inflation film using a ULPA filter or a HEPA filter as the clean filter 81.

1 Liquid storage container 3 Bag body 3a Upper edge 3b Bottom edge 3c Side edge 5 Outer container 5a Opening 10 Heat seal part 20 Outer bag 21 Inner bag 40 Inlet 41 Inlet body 42 Inlet flange 50 Inlet mounting part 51 Center Part 52 Thin-walled part 60 Liquid distribution nozzle 61 Dome-shaped part 62 Opening hole 70 Outlet upper member 80 Inflation forming machine 81 Clean filter

Claims (7)

In the storage container where the contents are stored
In the storage container, when the inside of the storage container is filled with 3 L of hydrochloric acid and left at 60 ° C. for 1 week , each of Li, Na, K, Be, Mg and Ca per 192400 mm ^{2 of} the internal surface area. The amount of metal ions in the hydrochloric acid is less than 0.02 ppb.
The innermost layer of the storage container contains a polyolefin material, and when the innermost layer is brought into contact with 13 mL of dimethyl carbonate so that the contact area is 45,000 mm ^2, and allowed to stand at 60 ° C. for 1 week , C _{10 to} C _A storage container in which the elution amount of ₂₈ alkanes is 200 ppm or less in terms of toluene. The storage container according to claim 1, wherein when the inside of the storage container is filled with 3 L of pure water, the number of particles having a diameter of 0.1 μm per 192400 mm ² internal surface area is 15 particles / mL or less. The storage container according to claim 1 or 2, wherein when the inside of the storage container is filled with 3 L of pure water, the number of particles having a diameter of 0.2 μm per 192400 mm ² internal surface area is 5 particles / mL or less. The receiving container possess an inner bag and outer bag,
The storage container according to any one of claims 1 to 3, wherein the innermost layer is a layer forming the inner surface of the inner bag . The storage container according to any one of claims 1 to 3, wherein the storage container has a bag main body and a spout provided on the upper edge of the bag main body. The bag body has an inner bag and an outer bag.
The storage container according to claim 5, wherein the innermost layer is a layer forming the inner surface of the inner bag. The storage container according to claim 5 or 6 , wherein the bag body and the spout are integrally molded, and the spout projects outward from the upper edge of the bag body.

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