JP2016137705A5

JP2016137705A5 -

Info

Publication number: JP2016137705A5
Application number: JP2015233689A
Authority: JP
Filing date: 2015-11-30
Publication date: 2018-12-27
Anticipated expiration: 2035-11-30

Description

本発明の液体吐出ヘッドの素子基板は、基材と、基材上に位置する絶縁膜と、液体を吐出するための熱エネルギーを発生する発熱抵抗素子と、発熱抵抗素子を覆う保護膜と、絶縁膜内に設けられ発熱抵抗素子に電流を供給するための第１の電気配線層層と、絶縁膜内を延びて第１の電気配線層と発熱抵抗素子とを接続する複数の第１の接続部材と、絶縁膜内を延びて第１の電気配線層と発熱抵抗素子とを接続する複数の第２の接続部材と、を有している。電流は、複数の第１の接続部材から複数の第２の接続部材へ、発熱抵抗素子を第１の方向に沿って流れるようにされ、素子基板の発熱抵抗素子が設けられる面に直交する方向からみて、複数の第１の接続部材および複数の第２の接続部材は第１の方向と交差する第２の方向に沿って配設されている。 The element substrate of the liquid discharge head of the present invention includes a base material, an insulating film positioned on the base material, a heating resistor element that generates thermal energy for discharging the liquid, a protective film that covers the heating resistor element, a first electric wiring layer layer for supplying an electric current to the heating resistor element provided in the insulating film, a first plurality of connecting the heating resistance element and the first electric wiring layer extends through the insulating film A connecting member and a plurality of second connecting members that extend through the insulating film and connect the first electrical wiring layer and the heating resistor element . A current is caused to flow from the plurality of first connection members to the plurality of second connection members along the first direction along the first direction, and is perpendicular to the surface of the element substrate on which the heat generation resistance elements are provided. In view of this, the plurality of first connection members and the plurality of second connection members are disposed along a second direction that intersects the first direction.

Claims

A base material; an insulating film positioned on the base material; a heating resistance element that generates thermal energy for discharging liquid; a protective film that covers the heating resistance element; and the heat generation provided in the insulating film. a first electric wiring layer for supplying current to the resistive element, a plurality of first connecting members for connecting the and extends in the insulating film of the first electric wiring layer and the heating resistor element, wherein a device substrate of a liquid discharge head for chromatic and a plurality of second connecting members for connecting said first electric wiring layer extends through the insulating film and said heating resistor elements, a,
The current flows from the plurality of first connection members to the plurality of second connection members through the heating resistor element along a first direction;
The plurality of first connection members and the plurality of second connection members are in a second direction intersecting the first direction when viewed from a direction orthogonal to the surface of the element substrate on which the heating resistor element is provided. An element substrate of the liquid discharge head, which is disposed along the line.

The contact surfaces of the plurality of first connection members with the heating resistance elements, the contact surfaces of the plurality of second connection members with the heating resistance elements, and the heating resistance elements of the insulating film The element substrate of the liquid discharge head according to claim 1, wherein the element substrate is provided on the same plane as the contact surface.

Viewed from front Kijika direction orthogonal, the plurality of first connecting members and said plurality of second connecting members are covered with the heat-generating resistor elements, elements of the liquid discharge head according to claim 1 or 2 substrate.

A second electric wiring layer provided in a layer different from the first electric wiring layer of the insulating film for supplying a current to the heating resistance element;
A third electric wiring layer provided in a layer different from the first electric wiring layer and the second electric wiring layer of the insulating film and including a logic power supply wiring for driving the heating resistance element ; The element substrate of the liquid ejection head according to claim 1, comprising:

5. The liquid ejection head according to claim 4, wherein the first electric wiring layer and the second electric wiring layer are arranged closer to the heating resistance element than the third electric wiring layer. 6. Element substrate.

A second electric wiring layer provided in a layer different from the first electric wiring layer of the insulating film for supplying a current to the heating resistance element;
A fourth electric wiring layer provided in a layer different from the first electric wiring layer and the second electric wiring layer of the insulating film and including a signal wiring for driving the heating resistor element ; The element substrate of the liquid ejection head according to claim 1, further comprising:

The heating resistor element includes a first connection region to which the plurality of first connection members are connected, a second connection region to which the plurality of second connection members are connected, and the first connection region. and provided between the second connecting region has a bubble-generating region where liquid is foamed, the said first connecting region and the second connection region, wherein the bubble-generating region in the second direction The element substrate of the liquid discharge head according to claim 1, wherein the element substrate extends in a range including the entire length of the liquid discharge head.

8. The element substrate of the liquid ejection head according to claim 1, wherein the plurality of first connection members and the plurality of second connection members are plugs extending through the insulating film. 9.

In the heating resistor element, the first electrode region including the first connection region to which the plurality of first connection members are connected and the plurality of second connection members are connected in the first direction. that a second electrode region comprising a second connection region, a central region located between the first electrode region and the second electrode region, is divided into, the said first electrode region the said central region and the second electrode regions have the same size relates the second direction, the element substrate of the liquid discharge head according to any one of claims 1 to 8.

In the heating resistor element, the first electrode region including the first connection region to which the plurality of first connection members are connected and the plurality of second connection members are connected in the first direction. A plurality of first connection members that are partitioned into a second electrode region including a second connection region, and a central region located between the first electrode region and the second electrode region. in the total length in the second direction of the second direction of the first der than 50% of the length in the second direction of the electrode area is, the plurality of second connecting members total length is Ru der than 50% of the length in the second direction of the second electrode region, the element substrate of the liquid discharge head according to any one of claims 1 9.

The two first connecting members at both ends with respect to the second direction are separated from the peripheral edge of the heating resistor element by the same distance in the second direction, and 2 at both ends with respect to the second direction. 11. The element of the liquid ejection head according to claim 1, wherein the two second connection members are separated by the same distance from a peripheral edge portion of the heating resistor element in the second direction. substrate.

The distance between the peripheral edge of each said heating resistor elements of the two first connection members at both ends with respect to said second direction, in the second direction of the plurality of first connecting member Ri 1 less der than 1/4 of the average distance, the distance between the periphery of each said heating resistor element two second connecting members at both end portions with respect to said second direction, said plurality the second Ru 1 less der than 1/4 of the average distance in the second direction of the connection member, the element substrate of the liquid discharge head according to any one of claims 1 to 11.

In the heating resistor element, the first electrode region including the first connection region to which the plurality of first connection members are connected and the plurality of second connection members are connected in the first direction. that a second electrode region comprising a second connection region, a central region located between the first electrode region and the second electrode region, is divided into the first electrode region and the the second electrode region has a longer dimension than the central region relates to the aforementioned second direction, the element substrate of the liquid discharge head according to any one of claims 1 to 8.

The first connection region and the second connection region, wherein regard second direction is disposed within the central region, the element substrate of the liquid discharge head according to claim 1 3.

The distance between the periphery of each before and Symbol heating resistance element of the two said first connecting member of both end portions with respect to said second direction, in the second direction of the plurality of first connecting member average rather larger than the interval, the distance between the periphery of each said heating resistor element two second connecting members at both end portions with respect to said second direction, said plurality of second connecting members have greater than average distance in the second direction, the element substrate of the liquid discharge head according to any one of claims 1 11, 13 and 14.

In the heating resistor element, the first electrode region including the first connection region to which the plurality of first connection members are connected and the plurality of second connection members are connected in the first direction. A second electrode region including a second connection region, and a central region located between the first electrode region and the second electrode region, the central region and the base material The element substrate of the liquid discharge head according to claim 1, wherein an electric wiring layer different from the first electric wiring layer is disposed on the insulating film between the first and second insulating films.

The element substrate of the liquid discharge head according to claim 16, wherein the another electric wiring layer is electrically connected to the base material.

In the heating resistor element, the first electrode region including the first connection region to which the plurality of first connection members are connected and the plurality of second connection members are connected in the first direction. A second electrode region including a second connection region, and a central region located between the first electrode region and the second electrode region , the central region and the base material the insulation on the film are arranged transistors, the element substrate of the liquid discharge head according to any one of claims 1 to 17 between.

Film thickness before Symbol heating resistance element is in the range of 0.01 to 0.05 [mu] m, the thickness of the protective layer is in the range of 0.15～0.3Myuemu, any one of claims 1 to 18 The element substrate of the liquid discharge head described in 1 .

The average interval in the second direction of the plurality of first connecting members and the average interval in the second direction of the plurality of second connecting members are 1.2 μm or less. The element substrate of the liquid discharge head according to any one of the above.

21. The element substrate of a liquid ejection head according to claim 1, wherein the second direction is a longitudinal direction of the element substrate.

2. A plurality of the heating resistance elements, and a plurality of supply ports arranged along a direction in which the plurality of heating resistance elements are arranged to supply liquid to the plurality of heating resistance elements. 22. The element substrate of the liquid ejection head according to any one of items 1 to 21.

Arranged along the direction in which the plurality of heating resistance elements are arranged, and includes a plurality of recovery ports for recovering the liquid supplied from the plurality of supply ports, via the supply port and the recovery port The element substrate of the liquid ejection head according to claim 22, wherein the liquid is circulated.

A liquid discharge head comprising an element substrate,
The element substrate includes a base material, an insulating film positioned on the base material, a heating resistor element that generates thermal energy for discharging a liquid, a protective film that covers the heating resistor element, and an insulating film Connecting the first electrical wiring layer for supplying current to the heating resistor element and the back surface of the heating resistor element on the side where the protective film is provided, A plurality of first connecting members extending in the insulating film; and a plurality of second connecting members extending in the insulating film for connecting the first electrical wiring layer and the back surface of the heating resistor element. Have
The plurality of first connection members are connected to one end side in the first direction of the heating resistor element when viewed from a direction orthogonal to the surface on which the heating resistor element is provided on the element substrate, The connecting member is connected to the other end side in the first direction of the heating resistor element,
Viewed from the direction of the perpendicular, the plurality of first connecting members and said plurality of second connecting members, the first along the second direction crossing the direction are disposed, the liquid discharge head .

A second electric wiring layer provided in a layer different from the first electric wiring layer of the insulating film for supplying a current to the heating resistance element;
A third electric wiring layer provided in a layer different from the first electric wiring layer and the second electric wiring layer of the insulating film and including a logic power supply wiring for driving the heating resistance element ; comprising a liquid discharge head according to claim 2 4.

A second electric wiring layer provided in a layer different from the first electric wiring layer of the insulating film for supplying a current to the heating resistance element;
A fourth electric wiring layer provided in a layer different from the first electric wiring layer and the second electric wiring layer of the insulating film and including a signal wiring for driving the heating resistor element ; comprising, a liquid discharge head according to claims 2 to 4 or 2 5.

26. The liquid discharge head according to claim 25 , wherein the first electric wiring layer and the second electric wiring layer are arranged on a side closer to the heating resistance element with respect to the third electric wiring layer. .

A drive circuit for driving the heating resistor element is provided on the insulating film side of the substrate, and the third electric wiring layer includes the first electric wiring layer and the second electric wiring layer. The liquid ejection head according to claim 25 , wherein the liquid ejection head is disposed on a side closer to the drive circuit with respect to the wiring layer.