JP2016130573A - Vibration-proof member and sensor device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a vibration-proof member that can restrain vibration transmission in a direction along a vertical direction and a direction along a horizontal direction intersecting with the vertical direction, and a sensor device including the vibration-proof member.SOLUTION: A vibration-proof member 10 includes: upper surface side supporting parts connected to the side of an upper surface of an elastic deformation part 30; and lower surface side supporting parts connected to the side of a lower surface. One of the upper surface side supporting parts is arranged at one end part of the elastic deformation part 30, and two of them are arranged at another end part of the elastic deformation part 30. Two of the lower surface side supporting parts are arranged at the one end part, and one of them is arranged at the other end part. The elastic deformation part 30 includes: a first elastic deformation part 31 that extends from the upper surface side supporting part at the one end part toward the upper surface side supporting parts at the other end part; and a second elastic deformation part 32 that extends from the lower surface side supporting part at the other end part toward the lower surface side supporting parts at the one end part. The first elastic deformation part 31 is easy to elastically deform on a first axis, and the second elastic deformation part 32 is easy to elastically deform on a second axis. The first elastic deformation part 31 and the second elastic deformation part 32 are mutually connected with a tie bar 33.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a vibration isolating member and a sensor device including a vibration isolating member that realizes a vibration isolating structure for a sensor element.

  Conventionally, in various fields such as the automobile industry, precision equipment industry, and construction, sensor devices equipped with an inertial sensor that detects an inertial amount such as a body posture, various precision devices, and a displacement of a posture or a tilt of a building are widely used. . In recent years, sensor devices have been required to accurately detect a smaller amount of inertia, thus avoiding false detections caused by environmental vibrations or vibrations due to impact application being transmitted to sensor elements mounted on sensor devices. Therefore, a technique for suppressing vibration transmission is required.

  As a technique for suppressing vibration transmission, for example, Patent Document 1 discloses that a pressed portion (deformation fulcrum forming portion) serving as a fulcrum for deformation in a direction along the vertical direction (thickness direction) and a portion to be subjected to deformation. A leaf spring having a pressing part (action point forming part) serving as an action point for applying a load to the pressing member (sensor element) and an arm part connected to the pressing part via a central plate is disclosed. In the leaf spring of Patent Document 1, by supporting the sensor element with the pressing portion, when a load due to vibration is applied, the arm portion connecting the pressed portion and the pressing portion is deformed to function as a leaf spring, and the sensor Vibration transmission to the element can be suppressed.

JP 2014-16026 A

2. Description of the Related Art In recent years, sensor devices that perform structure health monitoring that detects vibration and inclination by an inertial sensor disposed on a structure such as a bridge and monitors the soundness of the structure have been used. Since such sensor devices are installed in various changing environments, vibrations and shocks in various directions such as the direction along the vertical direction and the direction along the horizontal direction perpendicular to the vertical direction are applied. The In structure health monitoring, if vibration different from the inertial amount is transmitted to the inertial sensor element, it may cause a false detection, and it is necessary to take measures to suppress vibration transmission.
However, in the leaf spring as the vibration isolating member described in Patent Document 1, vibration transmission in the direction along the vertical direction can be suppressed, but vibration in the direction along the horizontal direction cannot be suppressed. In a sensor device equipped with the sensor device, there is a possibility that a false detection due to vibration transmission may occur or the sensor element may be destroyed due to excessive vibration such as impact application.

  The present invention relates to a vibration isolating member capable of suppressing transmission of vibrations in a direction along a vertical direction and in a direction along a horizontal direction intersecting the vertical direction, and a sensor device including the vibration isolating member. The purpose is to provide.

  Application Example 1 The vibration isolation member according to this application example defines a first axis, a second axis orthogonal to the first axis, and a virtual plane including the first axis and the second axis. In this case, an elastic deformation portion and a support portion connected to each of one end and the other end of the elastic deformation portion, and the support portion of the virtual plane at each of the one end and the other end. An upper surface side support portion connected to the upper surface and a lower surface side support portion connected to the lower surface of the virtual plane are arranged along the second axis, and the upper surface side support portion is one on the one end side. Two on the other end side, two on the lower end side support portion are arranged on the one end side, and one on the other end side, and the elastic deformation portion is on the upper surface side on the one end side. A first elastic deformation portion extending from the support portion toward each of the upper surface side support portions on the other end side; A second elastic deformation portion extending from the surface side support portion toward each of the lower surface side support portions on the one end side, and the first elastic deformation portion is easily elastically deformed on the first shaft, The second elastic deformation part is easy to elastically deform on the second shaft, and the first elastic deformation part and the second elastic deformation part are connected to each other.

According to this application example, in the virtual plane including the first axis and the second axis orthogonal to the first axis, the first surface extends from the upper surface side support portion of one end portion toward the upper surface side support portion of the other end portion. A first elastically deformable portion that is easily elastically deformed to the first axis, and an elastic portion that extends from the lower surface side support portion of the other end portion toward the lower surface side support portion of the one end portion and is orthogonal to the first axis The second elastic deformation part which is easy to deform has an elastic deformation part connected to each other by a tie bar. Further, one upper surface side support portion is disposed at one end of the elastic deformation portion and two at the other end portion, and two lower surface support portions are disposed at one end portion of the elastic deformation portion elastic deformation portion. One is arranged at the other end, and the first elastic deformation part and the second elastic deformation part in the elastic deformation part, and the upper surface side support part and the lower surface side support part are respectively connected and arranged with good balance. . Thereby, in the elastic deformation part connected between the upper surface side support part and the lower surface side support part, vibration transmission in the first axial direction is suppressed by the first elastic deformation part that is easily elastically deformed to the first axis. In addition, the vibration transmission of the second axis perpendicular to the first axis can be suppressed by the second elastic deformation part that is easily elastically deformed to the second axis.
Therefore, it is possible to provide a vibration-proof member that can suppress vibration transmission in a three-dimensional direction in a thin shape.

  Application Example 2 In the vibration isolating member according to the application example described above, the elastic member portion is disposed between an upper surface connected to the upper surface side support portion and a lower surface connected to the lower surface side support portion. It is preferable.

  According to this application example, vibration transmission in a three-dimensional direction is suppressed between the upper surface side support member supported by the upper surface side support portion and the lower surface side support member supported by the lower surface side support portion. An anti-vibration structure can be configured.

  Application Example 3 In the vibration isolating member according to the application example described above, it is preferable that the upper surface side support portion and the lower surface side support portion are formed in a shape that defines an interval between the upper surface and the lower surface.

  According to this application example, the vertical direction of the vibration isolation member constituting the vibration isolation structure between the upper surface side support member supported by the upper surface side support portion and the lower surface side support member supported by the lower surface side support portion. The thickness of the second axis (thickness direction) along the direction can be arbitrarily adjusted, and the thickness can be particularly reduced.

  Application Example 4 In the vibration isolating member according to the application example described above, a triangle formed by connecting the upper surface side support portion and a triangle formed by connecting the lower surface side support portion are formed from the one end portion. It is preferable that they are formed symmetrically with respect to a virtual center line extending to the other end.

  According to this application example, in the elastic deformation portion, vibration transmission is suppressed in a balanced manner by the first elastic deformation portion and the second elastic deformation portion, vibration in each of the three-dimensional directions is suppressed on average, and vibration It is possible to provide an anti-vibration member that quickly terminates the vibration.

  Application Example 5 In the vibration isolating member according to the application example described above, it is preferable that the first elastic deformation portion or the first elastic deformation portion is provided with a bent portion.

  According to this application example, after forming a prototype of the elastically deformable portion by punching such as a press, and then bending to form a bent portion, each part of the first elastically deformable portion and the second elastically deformable portion is formed. It is possible to efficiently form a vibration isolating member having a desired elasticity.

  Application Example 6 In the vibration isolating member according to the application example, a damper member is bonded to at least one of the upper surface side and the lower surface side of the elastic deformation portion.

  According to this application example, when the elastic deformation portion is elastically deformed and vibration transmission is suppressed by the damper joined to the elastic deformation portion, the attenuation of the kinetic energy generated in the elastic deformation portion is promoted, and the vibration is suppressed. It is possible to provide a vibration isolating member that terminates the vibration of the elastically deforming portion when transmission is suppressed in a shorter time.

  Application Example 7 A sensor device according to this application example is characterized in that a sensor element is mounted on at least one of the upper surface side and the lower surface side of the vibration isolation member according to the application example.

  According to this application example, the sensor device is configured such that the sensor element is mounted on the vibration-proof member described in the application example above, so that vibration transmission in a three-dimensional direction is suppressed, and erroneous detection is suppressed. Can be provided in a thin shape.

1 is a schematic perspective view illustrating an overall configuration of a sensor device according to Embodiment 1. FIG. (A) is a top view which shows the vibration proof member concerning Embodiment 1, (b) is the sectional view on the AA line of (a). The schematic perspective view which shows the state which attached the upper side board | substrate and the lower side board | substrate to the vibration isolator. FIG. 5 is a schematic perspective view showing a vibration isolating member according to Embodiment 2. The variation of the form of the arm part in the modification of a vibration isolator is typically shown, (a) is a partial top view which shows one variation, (b) is a fragmentary sectional view which shows another variation.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In each of the following drawings, each layer and each member may be shown on a different scale from the actual scale in order to make each layer and each member recognizable.

(Embodiment 1)
FIG. 1 is a schematic perspective view illustrating the entire configuration of the sensor device according to the first embodiment. 2A and 2B show a vibration isolating member provided in the sensor device, where FIG. 2A is a plan view and FIG. 2B is a cross-sectional view taken along line AA in FIG. FIG. 3 is a schematic perspective view showing a state in which the upper substrate and the lower substrate are attached to the vibration isolation member. Note that FIG. 1 is illustrated by cutting out a part of the case 3 as a housing for convenience of describing the internal configuration of the sensor device.
First, a schematic configuration of the sensor device 1 according to the first embodiment will be described.

  In FIG. 1, the sensor device 1 includes a base 2, a vibration isolating member 10, a lower substrate 21, an upper substrate 22, a sensor package 50 incorporating a sensor element 55, a case 3, and the like.

  A lower substrate 21 is fixed on the base 2. An anti-vibration member 10 is connected on the lower substrate 21, and an upper substrate 22 is connected on the anti-vibration member 10. That is, the lower substrate 21 and the upper substrate 22 are connected on the base 2 with the vibration isolating member 10 interposed therebetween, and vibration transmission between the lower substrate 21 and the upper substrate 22 is suppressed by the vibration isolating member 10. An anti-vibration structure is configured. The detailed structure of the vibration isolator 10 and the details of the connection structure between the vibration isolator 10 and the lower substrate 21 and the upper substrate 22 will be described later.

  A sensor package 50 is fixed on the upper substrate 22. The sensor package 50 includes a package container 51 having an upper surface opened, a sensor element 55 having a free end and a fixed end, and a fixed end fixed in the package container 51, and a package container 51 to which the sensor element 55 is fixed. The lid 52 is joined so as to close the opening.

  On the base 2 on which the sensor package 50 is disposed on the upper substrate 22 of the vibration isolation structure formed by the lower substrate 21, the vibration isolation member 10, and the upper substrate 22, the vibration isolation structure and the sensor package 50 are arranged on the base 2. The covering case 3 is joined. Although not shown, the upper substrate 22 and the sensor package 50, and the lower substrate 21 and the base 2 are electrically connected to each other, and the upper substrate 22 and the lower substrate 21 are electrically connected by a flexible substrate or the like. It is connected. As a result, the sensor element 55 of the sensor package 50 can be connected to the outside via an external connection terminal (not shown) drawn to the outside of the base 2.

Next, the vibration isolator 10 will be described in detail.
In FIG. 2 (a), the vibration isolator 10 is formed by pressing a spring steel plate material or the like to create a prototype and then molding it into a desired shape. The vibration isolation member includes an elastic deformation portion 30 having a main surface in the direction of the first axis along the horizontal direction (left and right direction in FIG. 2A), and the first axis of the elastic deformation portion 30. In FIG. 4, upper surface side support portions 37a, 37b, and 37c and lower surface side support portions 38a, 38b, and 38c as support portions respectively connected to opposite ends are provided.

  The upper surface side support portions 37a, 37b, and 37c are bent from the elastic deformation portion 30 to the upper surface side along the second axis along the vertical direction orthogonal to the first axis, and are respectively disposed. Further, the lower surface side support portions 38a, 38b, and 38c are bent from the elastic deformation portion 30 to the lower surface side on the second axis, and are respectively disposed. The upper surface side support portions 37 a, 37 b, and 37 c have one upper surface side support portion 37 a disposed at one end portion of the elastic deformation portion 30, and two upper surface side support portions 37 b, 37c is arranged. The lower surface side support portions 38 a, 38 b, and 38 c have two lower surface side support portions 38 a and 38 b disposed at one end portion of the elastic deformation portion 30, and one lower surface side at the other end portion of the elastic deformation portion 30. A support portion 38c is disposed.

  The elastic deformation portion 30 includes arm portions 31a and 31b extending from the upper surface side support portion 37a at one end portion toward the upper surface side support portion 37b at the other end portion, and the other end portion from the arm portion 31a. A first elastically deformable portion 31 having an arm portion 31c extending toward the upper surface side support portion 37c, and extending from a lower surface side support portion 38c at the other end portion toward a lower surface side support portion 38a at one end portion. Arm portions 32c and 32a, and a second elastic deformation portion 32 having an arm portion 32b extending from the arm portion 32c toward the lower surface side support portion 38b at one end portion. The first elastic deformation part 31 and the second elastic deformation part 32 are connected to each other by a tie-bar 33 arranged at the center between one end and the other end of the elastic deformation part 30. . That is, the first elastic deformation portion 31 and the second elastic deformation portion 32 are formed including a part of the tie bar 33.

  The first elastic deformation portion 31 includes an arm portion 31a that connects the upper surface side support portion 37a at one end portion to the tie bar 33 with the shortest length, and an upper surface side support portion 37b and an upper surface side support portion at the other end portion. The arm portion 31b and the arm portion 31c that connect each of 37c to the tie bar 33 with the shortest length, and a part of the tie bar 33 are formed. On the other hand, in the second elastic deformation portion 32, the arm portion 32 a and the arm portion 32 b connected to the tie bar 33 from each of the lower surface side support portion 38 a and the lower surface side support portion 38 b at one end portion are arranged in the horizontal direction ( A bent portion bent at the first axis) is provided. In the present embodiment, both the arm portion 32a and the arm portion 32b extend from the lower surface side support portions 38a and 38b to the other end portion side, then bend in a direction approaching each other on the first axis, and the upper surface side support portion 37a. Bent to the other end side so as to be parallel to the arm portion 31a at a position not contacting the arm portion 31a extending from the tie bar 33 to the tie bar 33, then bent in a direction away from each other on the first axis, and again the other end portion It is formed to have a bent shape that is bent to the side and connected to the tie bar 33. Further, the arm portion 32c that extends from the lower surface side support portion 38c of the other end portion to the one end portion side and is connected to the tie bar 33 extends from the lower surface side support portion 38c to the one end portion side, Positions that extend in two directions that are separated from each other on the first axis and that do not contact the arm portion 31b that extends from the upper surface side support portion 37b to the tie bar 33 and the arm portion 31c that extends from the upper surface side support portion 37c to the tie bar 33. Then, the arm portion 31b or the arm portion 31c is bent toward one end side so as to be parallel to the arm portion 31c, and further bent in the direction of approaching each other on the first axis, joined again at the center, and then again one of the two ends. It is formed to have a bent shape that is bent to the end side and connected to the tie bar 33. Thereby, in the elastic deformation part 30, the 1st elastic deformation part 31 is easy to elastically deform to a 1st axis | shaft compared with the 2nd elastic deformation part 32, and the 2nd elastic deformation part 32 is the 1st elastic deformation part 31. Compared to the second axis, the second axis perpendicular to the first axis is easily elastically deformed.

  As described above, the vibration isolator 10 formed in the shape described above includes a triangle formed by connecting the upper surface side support portions 37a, 37b, and 37c, and a triangle formed by connecting the lower surface side support portions 38a, 38b, and 38c. Are symmetric with respect to a virtual center line P extending from one end to the other end. Further, the shape of the elastic deformation portion 30 including the first elastic deformation portion 31 and the second elastic deformation portion 32 formed by connecting each arm portion and the tie bar 33 is also symmetrical with respect to the virtual center line P. It has become. Thereby, in the elastic deformation part 30, vibration transmission can be suppressed in a balanced manner by the first elastic deformation part 31 and the second elastic deformation part 32, and the vibrations in the three-dimensional directions of the first axis and the second axis can be suppressed. It can be set as the vibration isolator 10 which suppresses the average and terminates quickly.

In the vibration isolator 10 described above, the upper surface side support portions 37a, 37b, 37c, the lower surface side support portions 38a, 38b, 38c, the tie bar 33, and the arm portions 31a, 31b, 31c of the first elastic deformation portion 31 and The connection portions to which the arm portions 32a, 32b, and 32c of the second elastic deformation portion 32 are respectively connected are gradually expanded from the respective arm portions 31a to 31c and 32a to 32c toward the respective connection portions and then connected. A taper 35 is formed. Thereby, compared with the case where the taper 35 is not formed in each connection part, the intensity | strength of each arm part 31a-31c, 32a-32c and each connection part can be ensured more.
Further, at both ends of the tie bar 33, projecting portions 33a projecting outward from the joint portions with the arm portions 31b, 31c, 32a, 32b are formed.

  As shown in FIG. 3, the lower substrate 21 is fixed below the vibration isolation member 10, and the upper substrate 22 is fixed above the vibration isolation member 10. Specifically, the lower substrate 21 is fixed to the lower surface side support portions 38 a, 38 b, 38 c of the vibration isolation member 10 with screws 25. Further, the upper substrate 22 is fixed to the upper surface side support portions 37 a, 37 b, and 37 c of the vibration isolation member 10 by screws 25. The method for fixing the vibration isolator 10 to the lower substrate 21 and the upper substrate 22 is not limited to the method using the screws 25, and various fixing methods such as bonding with an adhesive and soldering can be employed. As can be seen from FIG. 3, the elastic deformation between the upper substrate 22 on the upper surface side connected to the upper surface side support portions 37a to 37c and the lower substrate 21 on the lower surface side connected to the lower surface side support portions 38a to 38c. Part 30 is arranged. Here, in the vibration isolator 10, the upper surface side support portions 37a to 37c and the lower surface side support portions 38a to 38c are formed between the upper substrate 22 disposed on the upper surface side and the lower substrate 21 disposed on the lower surface side. It is formed in a shape that defines the interval (see also FIG. 2B). Accordingly, the upper substrate 22 as the upper surface side support member supported by the upper surface side support portions 37a to 37c and the lower substrate 21 as the lower surface side support member supported by the lower surface side support portions 38a to 38c. A vibration-proof structure that suppresses vibration transmission in a three-dimensional direction can be configured. The thickness of the second axis (thickness direction) of the vibration-proof structure between the upper substrate 22 supported by the upper surface side support portions 37a to 37c and the lower substrate 21 supported by the lower surface side support portions 38a to 38c. Can be arbitrarily adjusted by the design of the shapes of the upper surface side support portions 37a to 37c and the lower surface side support portions 38a to 38c, and there is an effect that it is particularly easy to reduce the thickness.

  As described above, according to the vibration isolating member 10 according to the present embodiment and the sensor device 1 including the same, the following effects can be obtained.

The vibration isolator 10 of the present embodiment has a main surface in the direction of the first axis along the horizontal direction, and the upper surface side support portions 37b and 37c at the other end portion from the upper surface side support portion 37a at one end portion. A first elastically deformable portion 31 that extends toward the first shaft and is easily elastically deformed to the first shaft; and a second elastic portion that extends from the lower surface side support portion 38c of the other end portion toward the lower surface side support portions 38a and 38b of one end portion. A second elastic deformation portion 32 that is easily elastically deformed on a second axis orthogonal to one axis has an elastic deformation portion 30 connected to each other by a tie bar 33.
Thereby, in the elastic deformation part 30 which has the main surface in the direction of the 1st axis | shaft and was connected between the upper surface side support parts 37a-37c and the lower surface side support parts 38a-38c, it elastically deforms to a 1st axis | shaft. The easy first elastic deformation part 31 can suppress vibration transmission in the first direction along the horizontal direction, that is, the X direction when the elastic deformation part 30 is viewed in plan and the Y direction orthogonal to the X direction. By virtue of the second elastic deformation part 32 that is easily elastically deformed to the second axis, vibration transmission of the second axis along the vertical direction can be suppressed.
Therefore, it is possible to provide the vibration isolating member 10 that can suppress vibration transmission in the three-dimensional directions of the first axis and the second axis.

Further, in the vibration isolating member 10 of the present embodiment, the upper surface side support portions 37a to 37c have one upper surface side support portion 37a at one end portion and two upper surface side support portions at the other end portion in the elastic deformation portion 30. Portions 37b and 37c are arranged, and the lower surface side support portion 38c includes two lower surface side support portions 38a and 38b at one end of the elastic deformation portion 30, and one lower surface side support portion 38c at the other end portion. Are arranged, and the first elastic deformation portion 31 and the second elastic deformation portion 32 in the elastic deformation portion 30, and the upper surface side support portions 37a to 37c and the lower surface side support portions 38a to 38c are arranged in a balanced manner and connected. Has been. Moreover, a triangle formed by connecting the upper surface side support portions 37a, 37b, and 37c and a triangle formed by connecting the lower surface side support portions 38a, 38b, and 38c extend from one end portion to the other end portion. They are formed so as to be symmetrical with respect to the virtual center line P.
With such a configuration, in the elastic deformation portion 30, vibration transmission can be suppressed in a balanced manner by the first elastic deformation portion 31 and the second elastic deformation portion 32, and each of the three dimensions of the first axis and the second axis can be suppressed. It is possible to realize the vibration isolating member 10 capable of terminating the vibration in the direction on average and early.

The sensor device 1 according to the present embodiment is formed on an upper substrate 22 having a vibration isolation structure formed by a lower substrate 21 fixed to the lower side with the vibration isolation member 10 interposed therebetween and an upper substrate 22 fixed to the upper side. The case 3 is joined to the base 2 on which the sensor package 50 is disposed.
As a result, vibration in the three-dimensional direction due to environmental vibration or impact application is alleviated by the vibration isolation structure by the vibration isolation member 10 and the like, and vibration transmission to the sensor element 55 of the sensor package 50 is suppressed. It is possible to provide a thin sensor device 1 in which erroneous detection due to unnecessary vibration transmission to 55 is suppressed, and destruction of the sensor element 55 due to excessive vibration is suppressed.

(Embodiment 2)
FIG. 4 is a schematic perspective view showing a vibration isolator according to the second embodiment. The vibration isolating member 10D according to the second embodiment will be described with reference to this drawing. In addition, about the component same as Embodiment 1, the same number is used and the overlapping description is abbreviate | omitted.

  In FIG. 4, in the vibration isolating member 10 </ b> D according to the second embodiment, damper members 77 and 78 are joined to the upper surface side and the lower surface side of the elastic deformation portion 30 of the vibration isolating member 10 according to the first embodiment. In the present embodiment, a damper member 77 is joined to the upper surface side of the elastic deformation portion 30, and a damper member 78 is joined to the lower surface side of the elastic deformation portion 30. As the damper members 77 and 78, it is preferable to use those formed of a polymer material such as plastic or rubber having relatively significant viscoelasticity.

  According to the vibration isolating member 10D of the second embodiment, in addition to the effects in the first embodiment, the following effects can be obtained. That is, when the elastic deformation portion 30 is elastically deformed to suppress vibration transmission, the damper members 77 and 78 that are in close contact with and joined to the elastic deformation portion 30 attenuate the vibration energy generated in the elastic deformation portion 30. Since it is promoted, it is possible to provide a vibration isolating member 10D that terminates the vibration of the elastic deformation portion 30 when vibration transmission is suppressed in a short time.

FIG. 5 schematically shows variations of the form of the arm portion in the vibration isolator 10 of the above embodiment, (a) is a partial plan view showing one variation, and (b) shows another variation. It is a fragmentary sectional view.
The form of the arm portion shown in FIG. 5 can be applied to each arm portion of the vibration isolating member 10 of the first embodiment shown in FIG. In detail, in the elastic deformation part 30 of the vibration isolator 10 of Embodiment 1 shown in FIG. 2, with respect to the arm parts 32a-32c of the 2nd elastic deformation part 32 which is adjusting the elasticity by forming a bending shape. In the following description, the elasticity of the arm portion can be adjusted without forming a bent shape.

  The arm portion 30x shown in FIG. 5A has a wide portion 34a and a narrow portion 34b formed to be narrower than the wide portion 34a. According to this, by forming the narrow portion 34b within a range in which elastic deformation can be held with respect to vibration of a predetermined magnitude for which vibration transmission is desired to be suppressed in the vibration isolating member, desired elastic deformation characteristics are provided in the arm portion 30x. Can be given.

  Further, the arm portion 30x ′ shown in FIG. 5B includes a thick portion 34a ′ having a large thickness and a thin portion 34b ′ having a thickness smaller than the thick portion 34a ′. According to this, by forming the thin portion 34b ′ within a range in which elastic deformation can be maintained with respect to vibration of a predetermined magnitude for which vibration transmission is desired to be suppressed in the vibration isolating member, desired elasticity is provided to the arm portion 30x ′. Deformation characteristics can be given.

  The embodiment of the present invention made by the inventor has been specifically described above, but the present invention is not limited to the above-described embodiment, and various modifications are made without departing from the scope of the present invention. Is possible.

  For example, in the above embodiment, the sensor device 1 having the vibration isolation structure that suppresses vibration transmission by the vibration isolation member 10 with respect to one sensor package 50 has been described. Not only this but the vibration-proof structure which suppresses vibration transmission with respect to several sensor packages or several sensor elements 55 by using the vibration-proof member 10,10D, 110,210 of the said embodiment and modification. Can be realized.

  Further, the routing shape of the elastically deforming portion of the vibration isolating member is not limited to the shape of the vibration isolating member 10, 10D, 110, 210 described in the above embodiment. It can be set as the shape which added the various change in the range which does not deviate from the summary of the said embodiment and modification.

  Further, in the vibration isolating member 10D of the second embodiment, the damper member 77 is joined to substantially the entire upper surface side of the elastic deformation portion 30, and the damper member 78 is joined to substantially the entire lower surface side of the elastic deformation portion 30. Not limited to this. By fixing the damper member to at least a part of the upper surface side or the lower surface side of the elastic deformation portion 30, it is possible to obtain an effect of promoting the attenuation of vibration of the elastic deformation portion 30 by the damper member.

  DESCRIPTION OF SYMBOLS 1 ... Sensor apparatus, 2 ... Base, 3 ... Case 10, 10D, 110, 210 ... Vibration-proof member, 21 ... Lower side board, 22 ... Upper side board, 25 ... Screw, 30, 130, 230 ... Elastic deformation part, 31, 131, 231... First elastic deformation part, 31 a to 31 c, 32 a to 32 c, 30 x, 30 x ′, 131 a to 131 c, 231 a to 231 c... Arm part, 32, 132, 232. 133, 233 ... Tie bar, 34a ... Wide part, 34b ... Narrow part, 34a '... Thick part, 34b' ... Thin part, 35 ... Taper, 37a-37c, 137a-137c, 237a-237c ... Upper surface side support part, 38a to 38c, 138a to 138c, 238a to 238c ... lower surface side support, 50 ... sensor package, 51 ... package container, 52 ... lid, 55 ... sensor Child, 77, 78 ... damper member.

Claims (7)

When defining a first axis, a second axis orthogonal to the first axis, and a virtual plane including the first axis and the second axis,
An elastic deformation part;
A support part connected to each of one end and the other end of the elastic deformation part,
The support portion includes an upper surface side support portion connected to the upper surface of the virtual plane at each of the one end and the other end, and a lower surface side support portion connected to the lower surface of the virtual plane on the second axis. Arranged along the
The upper surface side support portion is disposed on one end side of the elastic deformation portion and two on the other end side of the elastic deformation portion,
Two of the lower surface side support portions are arranged on the one end side and one on the other end side,
The elastic deformation portion includes a first elastic deformation portion extending from the upper surface side support portion on the one end side toward the upper surface side support portion on the other end side, and the lower surface side support on the other end side. A second elastic deformation portion extending from each portion toward each of the lower surface side support portions on the one end side,
The first elastic deformation part is easy to elastically deform on the first axis, the second elastic deformation part is easy to elastically deform on the second axis,
The vibration isolating member, wherein the first elastic deformation portion and the second elastic deformation portion are connected to each other. The vibration isolator according to claim 1,
The vibration isolating member, wherein the elastic deformation portion is disposed between an upper surface connected to the upper surface side support portion and a lower surface connected to the lower surface side support portion. In the vibration isolator according to claim 1 or 2,
The anti-vibration member, wherein the upper surface side support portion and the lower surface side support portion are formed in a shape that defines a gap between the upper surface and the lower surface. In the vibration isolator as described in any one of Claims 1-3,
A triangle formed by connecting the upper surface side support portion and a triangle formed by connecting the lower surface side support portion are mutually with respect to a virtual center line extending from the one end portion to the other end portion. An anti-vibration member formed in line symmetry. In the vibration isolator as described in any one of Claims 1-4,
A vibration isolating member, wherein the first elastic deformation portion or the second elastic deformation portion is provided with a bent portion. In the vibration isolator as described in any one of Claims 1-5,
A vibration isolation member, wherein a damper member is joined to at least one of the upper surface side and the lower surface side of the elastic deformation portion.   A sensor device, wherein a sensor element is mounted on at least one of the upper surface side and the lower surface side of the vibration isolating member according to any one of claims 1 to 6.

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