JP2016118727A - Protective film for dry film resist and photosensitive resin laminate - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a protective film which has excellent mold releasability, antistatic properties, adhesibility, and winding characteristics, as a protective film for a dry film resist, and to provide a photosensitive resin laminate in which the protective film is laminated.SOLUTION: A protective film for a dry film resist is provided that has on one surface of a polyester film, a coating layer formed of an application liquid containing: a long-chain alkyl group-containing compound and an antistatic agent; and an acrylic resin or polyvinyl alcohol, and that has a maximum protrusion height (Rt) of the surface of the coating layer of 0.1-1.0 μm. A photosensitive resin laminate is also provided that has a configuration in which the above protective film is laminated on the surface of a photosensitive resin layer formed on a base film.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a protective film constituting a photosensitive resin laminate used in a process of a dry film resist (hereinafter sometimes abbreviated as DFR) for producing a semiconductor printed circuit board and the like, and a photosensitive resin laminate. is there.

  Conventionally, a photosensitive resin laminate used in a dry film resist (DFR) process has a laminate configuration of base film / photosensitive resin layer / protective film.

  In the DFR process, the protective film having the laminate structure is generally peeled off, the photosensitive resin layer is pressure-bonded to a copper foil substrate, a pattern mask is placed on the base film, and the photosensitive resin layer is formed from the base film side. It consists of a manufacturing process in which a circuit is formed on a substrate by exposing, peeling off and developing the base film.

  Thus, in order to draw a circuit image by exposure with ultraviolet rays or the like by placing a pattern mask on the base film, the base film needs appropriate light transmittance and smoothness. Therefore, a polyester film having good UV transmission, excellent transparency, and good surface smoothness is used for the base film.

  On the other hand, a polyethylene film is generally used as the protective film. The film protects the photosensitive resin layer, and at the same time, when the laminate composed of the base film / photosensitive resin layer / protective film is wound into a roll, the film is interposed between the back surface of the base film and the photosensitive resin composition layer. In this case, it also serves as a so-called blocking prevention in which the base film and the photosensitive resin layer adhere (or adhere) to each other. Therefore, a moderate release property is required for the protective film.

  When the peeling force of the protective film is too strong, when the laminate is wound into a roll shape, a winding shift or the like is generated, and the photosensitive resin layer is damaged. On the other hand, when the peeling force of the protective film is too weak, there arises a problem that the protective film easily peels from the photosensitive resin layer in a scene where it is not necessary to peel off.

  Since the protective film cannot be reused after peeling and must be disposed of, Patent Documents 1 to 3 include a laminate that does not use a protective film by providing the base film with the function of the protective film. It is disclosed.

  In Patent Documents 1 and 2, on one surface of the base film constituting the base film, medium density polyethylene is laminated to a thickness of 15 μm by an extrusion laminating method, and a release layer is provided. A method of providing a photosensitive resin composition layer on the surface is disclosed.

  However, the release layer made of medium density polyethylene has a large thickness, consumes a large amount of polyethylene and is expensive, the laminate roll becomes large and heavy, handling properties are lowered, and workability thereafter is also lowered. .

  In Patent Documents 1 to 3, a polyethyleneimine alkyl modified substance dissolved in an organic solvent is applied in a thickness of 0.1 μm on one surface of a base film constituting the base film, and a release layer is provided. A method of providing a photosensitive resin composition layer on the other surface of the base film is disclosed. However, the release layer has an excessively high peel strength and also has an insufficient peel strength stability with respect to temperature changes.

  In recent years, with the further miniaturization of electronic devices, there has been a demand for higher density of printed wiring boards, and there is an urgent need for further thinning of the conductor pattern formed on the surface of the insulating substrate.

  Therefore, the thickness fluctuation of the polyethylene film and the large number of fish eyes used as the protective film are one of the factors that make it difficult to further increase the density of the printed wiring board.

  That is, the dry film resist is manufactured by drying the photoresist layer applied on the base film and then laminating the protective film on the photoresist layer. However, when laminating the protective film, the photoresist is flexible and is applied to the surface of the protective film. If there are irregularities due to fish eyes, this is transferred to the photoresist layer, resulting in irregularities on the surface of the photoresist layer, causing poor adhesion of the photoresist layer to the insulating substrate, leading to defects in the conductor pattern.

  In addition, polyethylene film is molded by melt extrusion, but because of its high melt viscosity, it is extremely difficult to filter with a high performance filter during extrusion, and the problem of fish eyes etc. in the molded sheet is unavoidable, It is very difficult to completely remove fish eyes.

  Furthermore, it is difficult to obtain a uniform thickness by the inflation method, which is a general method for producing a polyethylene film, and it is inevitable that the thickness fluctuation problem is unavoidable.

  Therefore, it is difficult to meet the demand for higher density of the printed wiring board using polyethylene as the protective film.

  On the other hand, Patent Document 4 describes a polyester film for dry film resist using a polyester film as an alternative to a polyethylene film. However, in order to ensure releasability, the polyester film is required to have the same flexibility as a polyethylene film, and it is coated with a release agent to provide releasability and to copolymerize long-chain aliphatic dicarboxylic acids, etc. Ingredients and / or polyolefins are blended to give flexibility. Since the film described in the above publication is not sufficiently releasable by the coat layer, it is necessary to give the base film flexibility.

  Furthermore, the protective film is liable to generate static electricity due to contact friction and peeling during the processing process and use of the product, and dust and small dust are likely to adhere. Therefore, there is a risk of in-process contamination and contamination. For this reason, a method of applying an antistatic agent to the surface of the polyester film and laminating it (patent document 5) and the like have been proposed for applications in which foreign matter mixing and charging are disliked.

Japanese Patent No. 2888253 Japanese Patent No. 3920094 JP 2003-191424 A JP-A-6-297565 Japanese Patent Laid-Open No. 7-26223

  The present invention has been made in view of the above circumstances, and the problem to be solved is as a protective film for a dry film resist, a protective film having good releasability, antistatic properties, adhesion, and winding properties, and the protection. It is providing the photosensitive resin laminated body with which the film was laminated | stacked.

  As a result of intensive studies in view of the above circumstances, the present inventors have found that the above problem can be easily solved by a protective film having a specific configuration, and have completed the present invention.

  That is, the gist of the present invention includes a coating layer formed from a coating solution containing a long-chain alkyl group-containing compound and an antistatic agent and an acrylic resin or polyvinyl alcohol on one side of a polyester film. The maximum protrusion height (Rt) on the surface is 0.1 to 1.0 μm, and the protective film is formed on the surface of the photosensitive resin layer formed on the base film and the protective film for dry film resist It exists in the photosensitive resin laminated body characterized by having the laminated structure.

  The protective film for dry film resist of the present invention has good releasability of the protective film, antistatic property of the protective film, adhesion of the photosensitive resin layer to the copper foil, and good winding characteristics as the photosensitive resin layer laminate. , Its industrial value is high.

Typical sectional drawing which shows the photosensitive resin laminated body of this invention

  In the present invention, the polyester film constituting the protective film may be a single layer structure or a laminated structure. For example, the polyester film may be a four-layer or a double-layer or a three-layer structure as long as the gist of the present invention is not exceeded. It may be a multilayer having more than that, and is not particularly limited.

  The polyester used for the polyester film in the present invention may be a homopolyester or a copolyester. In the case of a homopolyester, those obtained by polycondensation of an aromatic dicarboxylic acid and an aliphatic glycol are preferred. Examples of the aromatic dicarboxylic acid include terephthalic acid and 2,6-naphthalenedicarboxylic acid, and examples of the aliphatic glycol include ethylene glycol, diethylene glycol, and 1,4-cyclohexanedimethanol. Representative polyester includes polyethylene terephthalate (PET) and the like. On the other hand, examples of the dicarboxylic acid component of the copolyester include isophthalic acid, phthalic acid, terephthalic acid, 2,6-naphthalenedicarboxylic acid, adipic acid, sebacic acid, and oxycarboxylic acid (eg, P-oxybenzoic acid). 1 type or 2 types or more are mentioned, As a glycol component, 1 type or 2 types or more, such as ethylene glycol, diethylene glycol, propylene glycol, butanediol, 1, 4- cyclohexane dimethanol, neopentyl glycol, is mentioned. In any case, the polyester referred to in the present invention refers to a polyester that is usually 60 mol% or more, preferably 80 mol% or more of polyethylene terephthalate or the like which is an ethylene terephthalate unit.

  In the present invention, it is preferable to blend particles in the polyester layer mainly for the purpose of imparting slipperiness. The kind of the particle to be blended is not particularly limited as long as it is a particle capable of imparting slipperiness. Specific examples thereof include silica, calcium carbonate, magnesium carbonate, barium carbonate, calcium sulfate, calcium phosphate, and phosphoric acid. Examples of the particles include magnesium, kaolin, aluminum oxide, and titanium oxide. Further, the heat-resistant organic particles described in JP-B-59-5216, JP-A-59-217755 and the like may be used. Examples of other heat-resistant organic particles include thermosetting urea resins, thermosetting phenol resins, thermosetting epoxy resins, benzoguanamine resins, and the like. Furthermore, it is possible to use precipitated particles in which a part of a metal compound such as a catalyst is precipitated and finely dispersed during the polyester production process.

  On the other hand, the shape of the particles to be used is not particularly limited, and any of a spherical shape, a block shape, a rod shape, a flat shape, and the like may be used. Moreover, there is no restriction | limiting in particular also about the hardness, specific gravity, a color, etc. These series of particles may be used in combination of two or more as required.

  Moreover, the average particle diameter of the particle | grains to be used is 0.01-3 micrometers normally, Preferably it is the range of 0.01-1 micrometer. When the average particle diameter is less than 0.01 μm, the particles are likely to aggregate and dispersibility may be insufficient. On the other hand, when the average particle diameter exceeds 3 μm, the surface roughness of the film becomes too rough and There may be a problem when a release layer is applied in the process.

  Furthermore, the particle content in the polyester layer is usually in the range of 0.001 to 5% by weight, preferably 0.005 to 3% by weight. When the particle content is less than 0.001% by weight, the slipperiness of the film may be insufficient. On the other hand, when the content exceeds 5% by weight, the transparency of the film is insufficient. There is.

  The method for adding particles to the polyester layer is not particularly limited, and a conventionally known method can be adopted. For example, it can be added at any stage for producing the polyester constituting each layer, but the polycondensation reaction may proceed preferably after the esterification stage or after the transesterification reaction.

  Also, a method of blending a slurry of particles dispersed in ethylene glycol or water with a vented kneading extruder and a polyester raw material, or a blending of dried particles and a polyester raw material using a kneading extruder. It is done by methods.

  In addition to the above-mentioned particles, conventionally known antioxidants, antistatic agents, thermal stabilizers, lubricants, dyes, pigments, and the like can be added to the polyester film in the present invention as necessary.

  The thickness of the polyester film constituting the protective film of the present invention is preferably in the range of 9 to 25 μm and more preferably in the range of 9 to 20 μm in order to improve the handleability for use. When the film thickness is less than 9 μm, the film strength is insufficient, and the handleability may be lowered. On the other hand, when it exceeds 25 μm, when the protective film is used to form a photosensitive resin laminate, the protective film is too thick, and workability may be reduced.

  Next, although the manufacture example of the polyester film in this invention is demonstrated concretely, it is not limited to the following manufacture examples at all.

  First, a method of using the polyester raw material described above and cooling and solidifying a molten sheet extruded from a die with a cooling roll to obtain an unstretched sheet is preferable. In this case, in order to improve the flatness of the sheet, it is necessary to improve the adhesion between the sheet and the rotary cooling drum, and an electrostatic application adhesion method and / or a liquid application adhesion method are preferably employed. Next, the obtained unstretched sheet is stretched in the biaxial direction. In that case, first, the unstretched sheet is stretched in one direction by a roll or a tenter type stretching machine. The stretching temperature is usually 70 to 120 ° C., preferably 80 to 110 ° C., and the stretching ratio is usually 2.5 to 7 times, preferably 3.0 to 6 times. Subsequently, the extending | stretching temperature orthogonal to the extending | stretching direction of the 1st step is 70-170 degreeC normally, and a draw ratio is 3.0-7 times normally, Preferably it is 3.5-6 times, More preferably, it is 5.0-6. Is double. Subsequently, heat treatment is performed at a temperature of 180 to 270 ° C. under tension or under relaxation within 30% to obtain a biaxially oriented film. In the above-described stretching, a method in which stretching in one direction is performed in two or more stages can be employed. In that case, it is preferable to carry out so that the draw ratios in the two directions finally fall within the above ranges.

  The simultaneous biaxial stretching method can also be adopted for the production of the polyester film in the present invention. The simultaneous biaxial stretching method is a method in which the unstretched sheet is usually stretched and oriented in the machine direction and the width direction at 70 to 120 ° C., preferably 80 to 110 ° C., and the stretching ratio is as follows: The area magnification is 4 to 50 times, preferably 7 to 35 times, and more preferably 10 to 25 times. Subsequently, heat treatment is performed at a temperature of 170 to 250 ° C. under tension or under relaxation within 30% to obtain a stretched oriented film. With respect to the simultaneous biaxial stretching apparatus that employs the above-described stretching method, conventionally known stretching methods such as a screw method, a pantograph method, and a linear drive method can be employed.

  Furthermore, a so-called coating stretching method (in-line coating) in which the film surface is treated during the above-described polyester film stretching step can be applied. When a coating layer is provided on a polyester film by a coating stretching method, coating can be performed simultaneously with stretching and the thickness of the coating layer can be reduced according to the stretching ratio, producing a film suitable as a polyester film. it can.

  In the present invention, it is an essential requirement to have a coating layer formed from a coating solution containing a long-chain alkyl group-containing compound and an antistatic agent and an acrylic resin or polyvinyl alcohol.

  In order to impart both release properties and antistatic properties to the coating film, examinations were made in combination with a release agent and an antistatic agent. As a result, transparency sometimes deteriorated. As a result of various studies by the present inventors, it has been found that by adding at least one of acrylic resin or polyvinyl alcohol, transparency is improved and a film having higher adaptability such as a protective film can be produced for the first time.

  The coating layer in this invention is provided in order to improve the mold release performance suitable as a protective film, and to provide antistatic properties.

  The long-chain alkyl group-containing compound used for forming the coating layer of the film of the present invention is used for improving the mold release property of the film.

  The long-chain alkyl compound is a compound having a linear or branched alkyl group having usually 6 or more, preferably 8 or more, more preferably 12 or more carbon atoms. Examples of the alkyl group include hexyl group, octyl group, decyl group, lauryl group, octadecyl group, and behenyl group. Examples of the compound having an alkyl group include various long-chain alkyl group-containing polymer compounds, long-chain alkyl group-containing amine compounds, long-chain alkyl group-containing ether compounds, and long-chain alkyl group-containing quaternary ammonium salts. . In view of heat resistance and contamination, a polymer compound is preferable. Further, from the viewpoint of effectively obtaining releasability, a polymer compound having a long-chain alkyl group in the side chain is more preferable.

The polymer compound having a long-chain alkyl group in the side chain can be obtained by reacting a polymer having a reactive group with a compound having an alkyl group capable of reacting with the reactive group. Examples of the reactive group include a hydroxyl group, an amino group, a carboxyl group, and an acid anhydride.
Examples of the compound having such a reactive group include polyvinyl alcohol, polyethyleneimine, polyethyleneamine, a reactive group-containing polyester resin, and a reactive group-containing poly (meth) acrylic resin. Among these, polyvinyl alcohol is preferable in view of releasability and ease of handling.

  Examples of the compound having an alkyl group capable of reacting with the reactive group include, for example, long-chain alkyl group-containing isocyanates such as hexyl isocyanate, octyl isocyanate, decyl isocyanate, lauryl isocyanate, octadecyl isocyanate, and behenyl isocyanate, hexyl chloride, and octyl chloride. Long chain alkyl group-containing acid chlorides such as decyl chloride, lauryl chloride, octadecyl chloride, and behenyl chloride, long chain alkyl group-containing amines, and long chain alkyl group-containing alcohols. Among these, long chain alkyl group-containing isocyanates are preferable, and octadecyl isocyanate is particularly preferable in consideration of releasability and ease of handling.

  In addition, a polymer compound having a long-chain alkyl group in the side chain can also be obtained by copolymerization of a long-chain alkyl (meth) acrylate polymer or a long-chain alkyl (meth) acrylate and another vinyl group-containing monomer. . Examples of the long-chain alkyl (meth) acrylate include hexyl (meth) acrylate, octyl (meth) acrylate, decyl (meth) acrylate, lauryl (meth) acrylate, octadecyl (meth) acrylate, and behenyl (meth) acrylate. It is done.

  In the present invention, it is essential to use a long-chain alkyl group-containing compound in order to improve the mold releasability of the film, but a plurality of conventionally known release agents may be used in combination. Examples of conventionally known release agents include waxes, fluorine compounds, and silicone compounds.

  Antistatic agents used for forming the coating layer include ion conductive polymer compounds such as ammonium group-containing compounds, polyether compounds, sulfonic acid compounds, and betaine compounds, polyacetylene, polyphenylene, polyaniline, polypyrrole, and polyisothia. Π-electron conjugated polymer compounds such as naphthene and polythiophene can be mentioned. These are used to impart antistatic properties to the film. Among these, an ion conductive polymer compound is preferable, and an ammonium group-containing compound is particularly preferable.

  Since a coating layer formed from a coating liquid containing a π-conjugated conductive polymer such as polythiophene or polyaniline is generally strongly colored, it may not be suitable for optical applications requiring transparency. In addition, since π-conjugated conductive polymer paints are generally more expensive than ion conductive paints, ion conductive antistatic agents are preferably used from the viewpoint of manufacturing cost.

  The ammonium group-containing compound refers to a compound having an ammonium group in the molecule, and is preferably a polymer compound having an ammonium group. For example, a polymer containing a monomer having an ammonium group and an unsaturated double bond as components can be used.

  Specific examples of such a polymer include a polymer having a constituent represented by the following formula (1) or the following formula (2) as a repeating unit. These homopolymers and copolymers, and other plural components may be copolymerized. From the viewpoint of improving the compatibility with other materials and the transparency of the resulting coating film, a polymer having a constituent represented by the following formula (1) as a repeating unit is preferred. Moreover, the polymer which has the structural element shown by following formula (2) as a repeating unit from the viewpoint of the high antistatic performance obtained and heat resistance is preferable.

In the above formula (1), R ² is —O— or —NH—, R ³ is an alkylene group, or other structure capable of forming the structure of formula (1), R ¹ , R ⁴ , R ⁵ , R ⁶ Are each a hydrogen atom, an alkyl group, a phenyl group or the like, and these alkyl group and phenyl group may be substituted with the following groups. Substitutable groups include, for example, hydroxy group, amide group, ester group, alkoxy group, phenoxy group, naphthoxy group, thioalkoxy group, thiophenoxy group, cycloalkyl group, trialkylammonium alkyl group, cyano group, halogen, etc. is there.

In said formula (2), R < ¹ >, R < ² > is respectively independently a hydrogen atom, an alkyl group, a phenyl group, etc., These alkyl groups and a phenyl group may be substituted by the group shown below. Substitutable groups include, for example, hydroxyl group, amide group, ester group, alkoxy group, phenoxy group, naphthoxy group, thioalkoxy group, thiophenoxy group, cycloalkyl group, trialkylammonium alkyl group, cyano group, halogen, etc. is there. R ¹ and R ² may be chemically bonded. For example, — (CH ₂ ) _m — (m is an integer of 2 to 5), —CH (CH ₃ ) CH (CH ₃ ) —, -CH = CH-CH = CH - , - CH = CH-CH = N -, - CH = CH-N = C -, - CH 2 OCH 2 -, - (CH 2) 2 O (CH 2) 2 - Etc.

  In the case of a polymer having the structural element represented by the above formula (1) as a repeating unit, the viewpoint of improving the compatibility with other materials and improving the transparency of the resulting coating film, and further improving the releasability From the viewpoint of, it is preferable to copolymerize with other repeating units. Other repeating units include, for example, alkyl acrylates such as methyl acrylate, ethyl acrylate, propyl acrylate, and butyl acrylate, and alkyl methacrylates such as methyl methacrylate, ethyl methacrylate, propyl methacrylate, and butyl methacrylate. Can be mentioned.

  In the case of a polymer having the constituent represented by the above formula (2) as a repeating unit, it is preferably copolymerized with another repeating unit from the viewpoint of suppressing a decrease in releasability. Other repeating units include, for example, alkyl acrylates, alkyl methacrylates, and acrylamides such as n-methylol acrylamide.

  Further, from the viewpoint of further improving the antistatic performance, a homopolymer having the constituent represented by the above formula (2) as a repeating unit is preferable.

X ⁻ in the above formulas (1) and (2) can be appropriately selected within a range not impairing the gist of the present invention. Examples include halogen ions, sulfonates, phosphates, nitrates, alkyl sulfonates, and carboxylates.

A polymer having a component represented by the above formula (1) is preferable because of excellent transparency of the resulting coating layer. However, in the coating stretching method, heat resistance may be inferior, and when used in the coating stretching method, X ⁻ is preferably not a halogen.

  A compound represented by the above formula (2) or other ammonium base in the polymer skeleton is excellent in heat resistance and is preferable.

  In addition, the polymer in which the constituents represented by the above formulas (1) to (2) and the polyethylene glycol-containing (meth) acrylate are copolymerized has a flexible structure, and is uniform during coating and stretching. It is preferable because an excellent coating layer can be obtained.

  Alternatively, a coating layer having excellent uniformity can also be obtained by coating a polyethylene glycol-containing (meth) acrylate polymer in a coating solution.

  Specific examples of the polyethylene glycol-containing (meth) acrylate include polyethylene glycol monoacrylate, polypropylene glycol monoacrylate, polyethylene glycol diacrylate (the polymerization degree of polyethylene glycol units is preferably in the range of 4 to 14), and polypropylene glycol diacrylate. Acrylate, polytetramethylene glycol diacrylate, poly (ethylene glycol-tetramethylene glycol) diacrylate, poly (propylene glycol-tetramethylene glycol) diacrylate, polyethylene glycol-polypropylene glycol-polyethylene glycol diacrylate, polypropylene glycol-polybutylene glycol Monomethacrylate, methoxypolyethylene glycol Methacrylate, methoxy polyethylene glycol monoacrylate, octoxy polyethylene glycol-polypropylene glycol monomethacrylate, octoxy polyethylene glycol-polypropylene glycol monoacrylate, lauroxy polyethylene glycol monomethacrylate, lauroxy polyethylene glycol monoacrylate, stearoxy polyethylene glycol monomethacrylate, steer Examples include polymers starting from loxypolyethylene glycol monoacrylate, allyloxypolyethylene glycol monomethacrylate, allyloxypolyethylene glycol monoacrylate and the like.

  Moreover, the number average molecular weight of an ammonium group containing compound is 1000-500000 normally, Preferably it is 2000-350,000, More preferably, it is 5000-200000. When the molecular weight is less than 1000, the strength of the coating film may be weak or the heat resistance stability may be poor. On the other hand, when the molecular weight exceeds 500,000, the viscosity of the coating solution increases, and the handleability and applicability may deteriorate.

  At least one of acrylic resin or polyvinyl alcohol is used for forming the coating layer, and this is used for improving the transparency of the film.

  The acrylic resin is a polymer composed of a polymerizable monomer having a carbon-carbon double bond, as typified by acrylic and methacrylic monomers. These may be either a homopolymer or a copolymer. Moreover, the copolymer of these polymers and other polymers (for example, polyester, polyurethane, etc.) is also included. For example, a block copolymer or a graft copolymer. Alternatively, a polymer (possibly a mixture of polymers) obtained by polymerizing a polymerizable monomer having a carbon-carbon double bond in a polyester solution or a polyester dispersion is also included. Similarly, a polymer (in some cases, a mixture of polymers) obtained by polymerizing a polymerizable monomer having a carbon-carbon double bond in a polyurethane solution or polyurethane dispersion is also included. Similarly, a polymer obtained by polymerizing a polymerizable monomer having a carbon-carbon double bond in another polymer solution or dispersion (in some cases, a polymer mixture) is also included. Moreover, it is also possible to contain a hydroxyl group and an amino group. From the viewpoint of suppressing the deterioration of transparency due to the coating film, it preferably contains a hydroxyl group.

  The polymerizable monomer having a carbon-carbon double bond is not particularly limited, but particularly representative compounds include, for example, acrylic acid, methacrylic acid, crotonic acid, itaconic acid, fumaric acid, maleic acid, citracone. Various carboxyl group-containing monomers such as acids, and salts thereof; 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, 4-hydroxybutyl (meth) acrylate, monobutyl hydroxyl fumarate, Various hydroxyl group-containing monomers such as monobutylhydroxy itaconate; various monomers such as methyl (meth) acrylate, ethyl (meth) acrylate, propyl (meth) acrylate, butyl (meth) acrylate, lauryl (meth) acrylate ( (Meth) acrylic acid esters; Various nitrogen-containing compounds such as meth) acrylamide, diacetone acrylamide, N-methylolacrylamide or (meth) acrylonitrile; various styrene derivatives such as styrene, α-methylstyrene, divinylbenzene, vinyltoluene, vinyl propionate Various vinyl esters such as: Various silicon-containing polymerizable monomers such as γ-methacryloxypropyltrimethoxysilane, vinyltrimethoxysilane, etc .; Phosphorus-containing vinyl monomers; Various such as vinyl chloride and biridene chloride And various conjugated dienes such as butadiene.

  When the acrylic resin contains a hydroxyl group, the hydroxyl value of the acrylic resin is preferably 2 to 100 mgKOH / g, more preferably 5 to 50 mgKOH / g. When the hydroxyl value falls within the above range, the coating appearance and transparency are improved.

  Polyvinyl alcohol is a compound having a polyvinyl alcohol moiety. For example, conventionally known polyvinyl alcohols including modified compounds partially acetalized or butyralized with respect to polyvinyl alcohol can be used. The degree of polymerization of polyvinyl alcohol is not particularly limited, but is usually 100 or more, preferably in the range of 300 to 40,000. When the degree of polymerization is less than 100, the water resistance of the coating layer may decrease. The saponification degree of polyvinyl alcohol is not particularly limited, but is usually 70 mol% or more, preferably in the range of 70 to 99.9 mol%, more preferably 80 to 97 mol%, and particularly preferably 86 to 97 mol%. A saponified polyvinyl acetate of 95 mol% is practically used.

  In forming the coating layer of the film of the present invention, various polymers other than acrylic resin and polyvinyl alcohol and crosslinking agents can be used in combination.

  Specific examples of the polymer include polyester resin, urethane resin, polyalkylene glycol, polyalkyleneimine, methylcellulose, hydroxycellulose, starches and the like.

  The polyester resin includes, for example, those composed of the following polyvalent carboxylic acid and polyvalent hydroxy compound as main constituent components. That is, as the polyvalent carboxylic acid, terephthalic acid, isophthalic acid, orthophthalic acid, phthalic acid, 4,4′-diphenyldicarboxylic acid, 2,5-naphthalenedicarboxylic acid, 1,5-naphthalenedicarboxylic acid, and 2,6 -Naphthalenedicarboxylic acid, 2,7-naphthalenedicarboxylic acid, 1,4-cyclohexanedicarboxylic acid, 2-potassium sulfoterephthalic acid, 5-sodium sulfoisophthalic acid, adipic acid, azelaic acid, sebacic acid, dodecanedicarboxylic acid, glutar Acid, succinic acid, trimellitic acid, trimesic acid, pyromellitic acid, trimellitic anhydride, phthalic anhydride, p-hydroxybenzoic acid, trimellitic acid monopotassium salt and ester-forming derivatives thereof can be used. As the polyvalent hydroxy compound, ethylene Recall, 1,2-propylene glycol, 1,3-propylene glycol, 1,3-propanediol, 1,4-butanediol, 1,6-hexanediol, 2-methyl-1,5-pentanediol , Neopentyl glycol, 1,4-cyclohexanedimethanol, p-xylylene glycol, bisphenol A-ethylene glycol adduct, diethylene glycol, triethylene glycol, polyethylene glycol, polypropylene glycol Polytetramethylene glycol, polytetramethylene oxide glycol, dimethylolpropionic acid, glycerin, trimethylolpropane, sodium dimethylolethylsulfonate, potassium dimethylolpropionate, and the like can be used. One or more compounds may be appropriately selected from these compounds, and a polyester resin may be synthesized by a conventional polycondensation reaction.

  The urethane resin is a polymer compound having a urethane bond in the molecule. Usually, urethane resin is prepared by reaction of polyol and isocyanate. Examples of the polyol include polycarbonate polyols, polyester polyols, polyether polyols, polyolefin polyols, and acrylic polyols. These compounds may be used alone or in combination.

  Polycarbonate polyols are obtained from a polyhydric alcohol and a carbonate compound by a dealcoholization reaction. Examples of the polyhydric alcohols include ethylene glycol, 1,2-propylene glycol, 1,3-propylene glycol, 1,2-butanediol, 1,3-butanediol, 1,4-butanediol, 1,5-pentane. Diol, 1,6-hexanediol, 1,4-cyclohexanediol, 1,4-cyclohexanedimethanol, 1,7-heptanediol, 1,8-octanediol, 1,9-nonanediol, 1,10-decane Diol, neopentyl glycol, 3-methyl-1,5-pentanediol, 3,3-dimethylol heptane and the like can be mentioned. Examples of the carbonate compound include dimethyl carbonate, diethyl carbonate, diphenyl carbonate, and ethylene carbonate. Examples of polycarbonate polyols obtained from these reactions include poly (1,6-hexylene) carbonate, poly (3- And methyl-1,5-pentylene) carbonate.

  Polyester polyols include polycarboxylic acids (malonic acid, succinic acid, glutaric acid, adipic acid, pimelic acid, suberic acid, sebacic acid, fumaric acid, maleic acid, terephthalic acid, isophthalic acid, etc.) or their acid anhydrides. Product and polyhydric alcohol (ethylene glycol, diethylene glycol, triethylene glycol, propylene glycol, dipropylene glycol, tripropylene glycol, butanediol, 1,3-butanediol, 1,4-butanediol, 2,3-butanediol, 2-methyl-1,3-propanediol, 1,5-pentanediol, neopentyl glycol, 1,6-hexanediol, 3-methyl-1,5-pentanediol, 2-methyl-2,4-pentanediol 2-methyl-2-propyl-1 3-propanediol, 1,8-octanediol, 2,2,4-trimethyl-1,3-pentanediol, 2-ethyl-1,3-hexanediol, 2,5-dimethyl-2,5-hexanediol 1,9-nonanediol, 2-methyl-1,8-octanediol, 2-butyl-2-ethyl-1,3-propanediol, 2-butyl-2-hexyl-1,3-propanediol, cyclohexane Diol, bishydroxymethylcyclohexane, dimethanolbenzene, bishydroxyethoxybenzene, alkyl dialkanolamine, lactone diol, etc.).

  Examples of polyether polyols include polyethylene glycol, polypropylene glycol, polyethylene propylene glycol, polytetramethylene ether glycol, polyhexamethylene ether glycol, and the like.

  Examples of the polyisocyanate compound used for obtaining the urethane resin include aromatic diisocyanates such as tolylene diisocyanate, xylylene diisocyanate, methylene diphenyl diisocyanate, phenylene diisocyanate, naphthalene diisocyanate, and tolidine diisocyanate, α, α, α ′, α ′. -Aliphatic diisocyanates having aromatic rings such as tetramethylxylylene diisocyanate, aliphatic diisocyanates such as methylene diisocyanate, propylene diisocyanate, trimethylhexamethylene diisocyanate, hexamethylene diisocyanate, cyclohexane diisocyanate, methylcyclohexane diisocyanate, isophorone diisocyanate, dicyclohexyl Methanzi Cyanate, alicyclic diisocyanates such as isopropylidene dicyclohexyl diisocyanates. These may be used alone or in combination.

  A chain extender may be used when synthesizing the urethane resin, and the chain extender is not particularly limited as long as it has two or more active groups that react with an isocyanate group. Alternatively, a chain extender having two amino groups can be mainly used.

  Examples of the chain extender having two hydroxyl groups include aliphatic glycols such as ethylene glycol, propylene glycol and butanediol, aromatic glycols such as xylylene glycol and bishydroxyethoxybenzene, and esters such as neopentyl glycol hydroxypivalate. And glycols such as glycols. Examples of the chain extender having two amino groups include aromatic diamines such as tolylenediamine, xylylenediamine, and diphenylmethanediamine, ethylenediamine, propylenediamine, hexanediamine, 2,2-dimethyl-1,3- Propanediamine, 2-methyl-1,5-pentanediamine, trimethylhexanediamine, 2-butyl-2-ethyl-1,5-pentanediamine, 1,8-octanediamine, 1,9-nonanediamine, 1,10- Aliphatic diamines such as decane diamine, 1-amino-3-aminomethyl-3,5,5-trimethylcyclohexane, dicyclohexylmethanediamine, isopropylidenecyclohexyl-4,4′-diamine, 1,4-diaminocyclohexane, 1, 3-Bisaminomethylcyclohexa And alicyclic diamines such as

  The urethane resin in the present invention may use a solvent as a medium, but preferably uses water as a medium. In order to disperse or dissolve the urethane resin in water, there are a forced emulsification type using an emulsifier, a self-emulsification type in which a hydrophilic group is introduced into the urethane resin, and a water-soluble type. In particular, the self-emulsification type in which an ionic group is introduced into the structure of the urethane resin to form an ionomer is preferable because of excellent storage stability of the liquid and water resistance and transparency of the resulting coating layer. Examples of the ionic group to be introduced include various groups such as a carboxyl group, sulfonic acid, phosphoric acid, phosphonic acid, quaternary ammonium salt, and the like, and a carboxyl group is preferable. As a method for introducing a carboxyl group into a urethane resin, various methods can be taken in each stage of the polymerization reaction. For example, there are a method of using a carboxyl group-containing resin as a copolymer component during prepolymer synthesis, and a method of using a component having a carboxyl group as one component such as polyol, polyisocyanate, and chain extender. In particular, a method in which a desired amount of carboxyl groups is introduced using a carboxyl group-containing diol depending on the amount of this component charged is preferred. For example, dimethylolpropionic acid, dimethylolbutanoic acid, bis- (2-hydroxyethyl) propionic acid, bis- (2-hydroxyethyl) butanoic acid and the like are copolymerized with a diol used for polymerization of a urethane resin. Can do. The carboxyl group is preferably in the form of a salt neutralized with ammonia, amine, alkali metal, inorganic alkali or the like. Particularly preferred are ammonia, trimethylamine and triethylamine. In such a polyurethane resin, a carboxyl group from which a neutralizing agent is removed in a drying step after coating can be used as a crosslinking reaction point by another crosslinking agent. Thereby, it is possible to further improve the durability, solvent resistance, water resistance, blocking resistance, and the like of the obtained coating layer, as well as excellent stability in a liquid state before coating.

  Specific examples of the crosslinking agent include melamine compounds, oxazoline compounds, epoxy compounds, isocyanate compounds, carbodiimide compounds, silane coupling compounds, and the like. Among these crosslinking agents, it is particularly preferable to use a melamine compound from the viewpoint of high crosslinking density. Moreover, these crosslinking agents may use 2 or more types together.

  The melamine compound is a compound having a melamine skeleton in the compound. For example, an alkylolized melamine derivative, a compound partially or completely etherified by reacting an alcohol with an alkylolated melamine derivative, and these Mixtures can be used. As alcohol used for etherification, methyl alcohol, ethyl alcohol, isopropyl alcohol, n-butanol, isobutanol and the like are preferably used. Moreover, as a melamine compound, either a monomer or a multimer more than a dimer may be sufficient, or a mixture thereof may be used. Further, a product obtained by co-condensing urea or the like with a part of melamine can be used, and a catalyst can be used to increase the reactivity of the melamine compound.

  The oxazoline compound is a compound having an oxazoline group in the molecule, and a polymer containing an oxazoline group is particularly preferable, and can be prepared by polymerization of an addition polymerizable oxazoline group-containing monomer alone or with another monomer. Addition polymerizable oxazoline group-containing monomers include 2-vinyl-2-oxazoline, 2-vinyl-4-methyl-2-oxazoline, 2-vinyl-5-methyl-2-oxazoline, 2-isopropenyl-2-oxazoline, 2-isopropenyl-4-methyl-2-oxazoline, 2-isopropenyl-5-ethyl-2-oxazoline, and the like can be mentioned, and one or a mixture of two or more thereof can be used. Among these, 2-isopropenyl-2-oxazoline is preferred because it is easily available industrially. The other monomer is not limited as long as it is a monomer copolymerizable with an addition polymerizable oxazoline group-containing monomer. For example, alkyl (meth) acrylate (the alkyl group includes a methyl group, an ethyl group, an n-propyl group, an isopropyl group, (meth) acrylic acid esters such as n-butyl group, isobutyl group, t-butyl group, 2-ethylhexyl group, cyclohexyl group); acrylic acid, methacrylic acid, itaconic acid, maleic acid, fumaric acid, crotonic acid, styrene Unsaturated carboxylic acids such as sulfonic acid and its salts (sodium salt, potassium salt, ammonium salt, tertiary amine salt, etc.); Unsaturated nitriles such as acrylonitrile, methacrylonitrile; (meth) acrylamide, N-alkyl ( (Meth) acrylamide, N, N-dialkyl (meth) acrylamide, As the alkyl group, unsaturated amides such as methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, isobutyl group, t-butyl group, 2-ethylhexyl group and cyclohexyl group); vinyl acetate Vinyl esters such as vinyl propionate; vinyl ethers such as methyl vinyl ether and ethyl vinyl ether; α-olefins such as ethylene and propylene; halogen-containing α, β-unsaturated monomers such as vinyl chloride and vinylidene chloride; styrene, An α, β-unsaturated aromatic monomer such as α-methylstyrene can be used, and one or more of these monomers can be used.

  The epoxy compound is a compound having an epoxy group in the molecule, and examples thereof include condensates of epichlorohydrin with ethylene glycol, polyethylene glycol, glycerin, polyglycerin, bisphenol A and the like hydroxyl groups and amino groups, There are polyepoxy compounds, diepoxy compounds, monoepoxy compounds, glycidylamine compounds, and the like. Examples of the polyepoxy compound include sorbitol polyglycidyl ether, polyglycerol polyglycidyl ether, pentaerythritol polyglycidyl ether, diglycerol polyglycidyl ether, triglycidyl tris (2-hydroxyethyl) isocyanate, glycerol polyglycidyl ether, trimethylolpropane. Examples of the polyglycidyl ether and diepoxy compound include neopentyl glycol diglycidyl ether, 1,6-hexanediol diglycidyl ether, resorcin diglycidyl ether, ethylene glycol diglycidyl ether, polyethylene glycol diglycidyl ether, and propylene glycol diglycidyl ether. , Polypropylene glycol diglycidyl ether, poly Examples of tetramethylene glycol diglycidyl ether and monoepoxy compounds include allyl glycidyl ether, 2-ethylhexyl glycidyl ether, phenyl glycidyl ether, and glycidyl amine compounds such as N, N, N ′, N′-tetraglycidyl-m-xylyl. Examples include range amine and 1,3-bis (N, N-diglycidylamino) cyclohexane.

  The cross-linking agent is used in a design that improves the performance of the coating layer by reacting in the drying process or the film forming process. It can be inferred that unreacted products of these crosslinking agents, compounds after the reaction, or mixtures thereof exist in the finished coating layer.

  Moreover, in the range which does not impair the main point of this invention, it is also possible to use particle | grains together for the purpose of the formation of the coating layer of the film of this invention for the purpose of the blocking property of a coating layer, slipperiness improvement, etc.

  Furthermore, as long as it does not impair the gist of the present invention, an antifoaming agent, a coating property improver, a thickener, an organic lubricant, an ultraviolet absorber, an antioxidant, a foaming agent, It is also possible to use dyes, pigments and the like in combination.

  As a ratio with respect to all the non-volatile components in the coating liquid which forms the coating layer which comprises the protective film in this invention, a mold release agent is the range of 8-70 weight% normally, Preferably it is the range of 10-60 weight%, More preferably. Is in the range of 15-50% by weight. If the amount is less than 8% by weight, sufficient release performance may not be obtained. If the amount is more than 70% by weight, other components may be small, so that antistatic properties and transparency may not be obtained.

  The ratio of the antistatic agent is usually in the range of 10 to 70% by weight, preferably in the range of 15 to 60% by weight, more preferably as the ratio to the total nonvolatile components in the coating liquid forming the coating layer constituting the protective film in the present invention. Is in the range of 20-50% by weight. When the amount is less than 10% by weight, sufficient antistatic performance may not be obtained. When the amount is more than 70% by weight, other components may be small, and thus releasability and transparency may not be obtained.

  As a ratio with respect to all the non-volatile components in the coating liquid which forms the coating layer which comprises the protective film in this invention, an acrylic resin or polyvinyl alcohol is the range of 3-70 weight% normally, Preferably it is the range of 5-60 weight%, More preferably, it is the range of 10-50 weight%. When it is out of the above range, there is a possibility that sufficient transparency cannot be obtained, or that antistatic property and releasability cannot be obtained.

  As a ratio with respect to all the non-volatile components in the coating liquid which forms the coating layer which comprises the protective film in this invention, a crosslinking agent is the range of 6 to 70 weight% normally, Preferably it is the range of 10 to 70 weight%, More preferably It is in the range of 20 to 70% by weight. When the amount is less than 6% by weight, the surface roughness of the photosensitive resin layer after protective peeling may be high, and sufficient adhesion to the substrate copper foil may not be obtained. In such a case, sufficient releasability may not be obtained.

  When providing a coating layer by in-line coating, the above-mentioned series of compounds is applied as an aqueous solution or dispersion, and the coating solution adjusted to a solid content concentration of about 0.1 to 50% by weight as a guide is applied onto the polyester film. It is preferable to produce a protective film. Moreover, in the range which does not impair the main point of this invention, a small amount of organic solvents may be contained in the coating liquid for the purpose of improving dispersibility in water, improving film-forming properties, and the like. Only one type of organic solvent may be used, or two or more types may be used as appropriate.

  Regarding the protective film in the present invention, the coating amount (after drying) of the coating layer provided on the polyester film is usually 0.005 to 1 μm, preferably 0.01 to 0.2 μm, more preferably 0.02 to 0.00. It is 1 μm, particularly preferably in the range of 0.02 to 0.04 μm. If the coating amount (after drying) exceeds 1 μm, the appearance and transparency may be deteriorated. If the coating amount (after drying) is less than 0.005 μm, sufficient release properties and antistatic properties are obtained. It may not be possible.

  Examples of the method for forming the coating layer of the present invention include gravure coating, reverse roll coating, die coating, air doctor coating, blade coating, rod coating, bar coating, curtain coating, knife coating, transfer roll coating, squeeze coating, and impregnation. Conventionally known coating methods such as coat, kiss coat, spray coat, calendar coat, and extrusion coat can be used.

  In the present invention, the drying and curing conditions for forming the coating layer on the polyester film are not particularly limited. For example, when the coating layer is provided by off-line coating, it is usually 3 to 40 at 80 to 200 ° C. The heat treatment may be performed for 2 seconds, preferably 100 to 180 ° C. for 3 to 40 seconds.

  On the other hand, when the coating layer is provided by in-line coating, heat treatment is usually performed at 70 to 270 ° C. for 3 to 200 seconds as a guide.

  Further, irrespective of off-line coating or in-line coating, heat treatment and active energy ray irradiation such as ultraviolet irradiation may be used in combination as required. The polyester film constituting the laminated polyester film in the present invention may be subjected to surface treatment such as corona treatment or plasma treatment in advance.

  The maximum protrusion height (Rt) on the coating layer surface of the protective film of the present invention needs to be 0.1 to 1.0 μm. When Rt is less than 0.1 μm, wrinkles are generated when the protective film is wound in a roll shape, or when the protective film and the base film to which the photosensitive resin layer is applied are laminated in a roll shape. Or at the same time, the air accompanying the film is difficult to escape when it is wound at a high speed, thereby causing an end face shift of the roll. On the other hand, when Rt exceeds 1.0 μm, an air pool is generated between the protective film and the photoresist, and the resist tends to be hardened due to the reaction between oxygen and the resist. Also, the surface shape transfer increases the roughening of the surface of the photosensitive resin layer after peeling, causing poor adhesion to the substrate copper foil, leading to circuit defects.

  The peel strength of the protective film of the present invention from the adhesive tape is preferably 2000 mN / cm or less, more preferably 1700 mN / cm or less, and still more preferably 1200 mN / cm or less. When the peeling force is higher than 2000 mN / cm, it may not be smoothly peeled off from the resist layer in contact with the coating layer.

The surface resistance value of the protective film of the present invention is preferably 5 × 10 ¹² Ω or less, more preferably 5 × 10 ¹¹ Ω or less, further preferably 1 × 10 ¹¹ Ω or less, and particularly preferably 1 × 10 ¹⁰ Ω or less. is there.

  In the present invention, the film haze of the protective film is preferably in the range of 1 to 7%, preferably 2 to 7%, more preferably 3 to 7%. When the film haze is less than 1%, a defective portion that does not necessarily need to be detected may be detected, which may induce a decrease in yield. On the other hand, if it exceeds 7%, the transparency is lowered, which may cause trouble in the inspection process with optical evaluation.

  When providing a coating layer by in-line coating, the above-mentioned series of compounds is applied as an aqueous solution or dispersion, and the coating solution adjusted to a solid content concentration of about 0.1 to 50% by weight as a guide is applied onto the polyester film. It is preferable to produce a laminated polyester film. Moreover, in the range which does not impair the main point of this invention, a small amount of organic solvents may be contained in the coating liquid for the purpose of improving dispersibility in water, improving film-forming properties, and the like. Only one type of organic solvent may be used, or two or more types may be used as appropriate.

  Further, the polyester film constituting the protective film may be subjected to surface treatment such as corona treatment or plasma treatment in advance.

  Next, the photosensitive resin layer which comprises the laminated body in this invention is demonstrated below.

  As the photosensitive resin layer constituting the photosensitive resin laminate of the present invention, a conventional photoresist layer can be used. In general, a negative resist is generally used as the DFR photoresist layer, and is mainly composed of a thermoplastic resin and a photosensitive material which are dissolved or swelled in a developer. Only a portion exposed in the DFR process forms a circuit (image) by development, and an unexposed portion is dissolved and removed by a developer.

  Examples of the thermoplastic resin include novolak resin, resol resin, polyvinylphenol resin, polyacrylic acid resin, polyurethane resin, polyester resin, polyamide resin, and epoxy resin. Also, styrene-butadiene block copolymer resin, styrene-isoprene copolymer resin, styrene-butadiene random copolymer resin, acrylonitrile-butadiene random copolymer resin, styrene-isoprene random copolymer resin, methyl methacrylate-butadiene random copolymer resin. , Polybutadiene, polyisoprene, natural rubber and the like may be contained. As the thermoplastic resin, these may be used alone or as a mixture of two or more.

  Further, as the photosensitive material, a compound having a photopolymerizable group or a photoreactive group is used. Specific examples include ethylenically unsaturated monomers and ethylenically unsaturated prepolymers.

  Specific examples of the ethylenically unsaturated monomer include, for example, styrene, o-methylstyrene, m-methylstyrene, p-methylstyrene, p-tert-butylstyrene, 1,3-dimethylstyrene, chlorostyrene, vinylnaphthalene, Aromatic vinyl monomers such as vinyl anthracene, divinylbenzene, and trivinylbenzene; ethylenically unsaturated nitrile monomers such as acrylonitrile and methacrylonitrile; methyl acrylate, ethyl acrylate, propyl acrylate, and acrylic acid n- Amyl, isoamyl acrylate, hexyl acrylate, ethyl hexyl acrylate, octyl acrylate, glycidyl acrylate, methyl methacrylate, ethyl methacrylate, propyl methacrylate, n-amyl methacrylate, isoamyl methacrylate, Hexyl crylate, ethyl hexyl methacrylate, octyl methacrylate, hydroxyethyl acrylate, hydroxypropyl acrylate, hydroxyethyl methacrylate, hydroxypropyl methacrylate, glycidyl methacrylate, ethylene glycol diacrylate, trimethylolpropane triacrylate, 1,4 -Butanediol diacrylate, 1,4-butanediol dimethacrylate, propylene glycol diacrylate, 1,6-hexanediol diacrylate, 1,6-hexanediol dimethacrylate, 1,9-nonanediol diacrylate, 1,9 -Nonanediol dimethacrylate, methoxyethylene glycol acrylate, methoxypropylene glycol methacrylate, methoxyethylene glycol Ethylenically unsaturated carboxylic acid ester monomers such as ethyl methacrylate, methoxypropylene glycol acrylate, diethyl maleate, dimethyl itaconate, dioctyl fumarate; ethylenically unsaturated glycidyl ethers such as allyl glycidyl ether; acrylic acid, methacrylic acid Ethylenically unsaturated monocarboxylic acids such as maleic acid, fumaric acid, citraconic acid and itaconic acid; ethylenically unsaturated polycarboxylic acids such as monoethyl maleate and monomethyl itaconate; Partially esterified products: ethylene acrylate phosphate, trimethylene phosphate, propylene acrylate phosphate, tetramethylene acrylate phosphate, bisethylene acrylate phosphate, bistrimethylene acrylate phosphate, vinyl phosphate Phosphoric ester group-containing ethylenic compounds such as tetramethylene acrylate, phosphoric acid diethylene glycol acrylate, phosphoric acid triethylene glycol acrylate, phosphoric acid polyethylene glycol acrylate, phosphoric acid bisdiethylene glycol acrylate, phosphoric acid bistriethylene glycol acrylate, phosphoric acid bispolyethylene glycol acrylate, and the corresponding methacrylates Examples thereof include unsaturated monomers.

  On the other hand, as an ethylenically unsaturated prepolymer, an ethylenically unsaturated compound having a reactive group such as a carboxyl group, a hydroxyl group, or an isocyanate group is used for polyester, polyurethane, polyether, epoxy resin, acrylic resin, etc. Those having an unsaturated group introduced therein are used. Examples of such ethylenically unsaturated prepolymers include unsaturated polyesters, unsaturated polyurethanes, unsaturated polyethers, unsaturated epoxy resins, and unsaturated acrylic resins.

The content of the photosensitive material is usually preferably 5 to 100 parts by mass with respect to 100 parts by mass of the thermoplastic resin for the purpose of the present invention. In addition, the photosensitive resin layer may contain a photopolymerization initiator, a plasticizer, a storage stabilizer, a surfactant, a colorant, and the like as long as the gist of the present invention is not impaired.

  Examples of the photopolymerization initiator include α-diketones such as diacetyl and benzyl; acyloins such as benzoin and pivaloin; acyloin ethers such as benzoin methyl ether, benzoin ethyl ether and benzoin isopropyl ether; anthraquinone and 1,4-naphthoquinone A polynuclear quinone; a benzophenone such as methyl-o-benzoylbenzoate; and a phenyl ketone such as 2,2-dimethoxy-2-phenylacetophenone. In general, the content of the photopolymerization initiator is preferably 0.1 to 10 parts by mass with respect to 100 parts by mass of the total amount of the thermoplastic resin and the photosensitive material.

  In order to ensure the flexibility of the resulting photosensitive resin layer, a plasticizer may be used in combination. The plasticizer is not particularly limited as long as it is uniformly compatible with other components forming the photosensitive resin layer and exhibits a plasticizing effect. Specific examples of the plasticizer include, for example, glycerin, polyethylene glycol, benzenesulfonamide, toluenesulfonamide, N-ethyltoluenesulfonamide, N-methyltoluenesulfonamide, p-hydroxylbenzoic acid ester, various olefin oligomers, vinyl oligomers. And hydrocarbon oils such as diene oligomers, naphthine oils and paraffin oils.

  Examples of the storage stabilizer include hydroquinone, pyrogallol, p-methoxyphenol, t-butylcatechol, 2,6-di-t-butyl-p-cresol, 2,2-di-t-butyl-p-cresol, and the like. Phenols; quinones such as benzoquinone, p-toluquinone and p-xyloquinone; and amines such as phenyl-α-naphthylamine.

  As the surfactant, an anionic surfactant, a nonionic surfactant, a cationic surfactant, or an amphoteric surfactant can be used. Among these, nonionic surfactants and anionic surfactants are preferable, and anionic surfactants are particularly preferable from the viewpoints of compatibility and water development effect.

  With respect to the method for producing the photosensitive resin layer, for example, each component constituting the photosensitive resin composition is dissolved in water or an organic solvent, mixed well to obtain a homogeneous solution, and then on the surface of the base film. In addition, after coating and drying by a conventional known coating method, for example, reverse coating method, gravure coating method, rod coating method, bar coating method, die coating method, etc., the thickness (after drying) is 1 to 1. A method of forming a 1000 μm photosensitive resin layer can be employed.

  In addition, the photosensitive resin layer can be formed on the base film by preliminarily removing the solvent of the photosensitive resin layer forming material by heat-pressing the base film with a nip roll or the like.

Furthermore, a method in which each component constituting the photosensitive resin composition is sufficiently mixed with a kneader, a Banbury mixer, etc., is press-molded on the base film to form a photosensitive resin layer, and other cast molding, extrusion molding, etc. Conventionally known methods such as a method of forming a photosensitive resin layer can be used.

  EXAMPLES Hereinafter, although an Example demonstrates this invention further in detail, this invention is not limited to a following example, unless the summary is exceeded. The measuring method used in the present invention is as follows.

(1) Measurement of intrinsic viscosity (dl / g) of polyester 1 g of polyester from which other polymer components and pigments incompatible with polyester have been removed are precisely weighed and mixed with phenol / tetrachloroethane = 50/50 (weight ratio). 100 ml of solvent was added and dissolved, and measurement was performed at 30 ° C.

(2) Measurement of average particle diameter (d ₅₀ : μm) Integration (weight basis) 50% in equivalent spherical distribution measured using centrifugal sedimentation type particle size distribution measuring device (SA-CP3 type manufactured by Shimadzu Corporation) Was the average particle size.

(3) Film haze measurement of protective film Film haze was measured with the haze meter "HM-150" by the Murakami Color Research Laboratory Co., Ltd. according to JIS-K-7136.

(4) Maximum protrusion height (Rt) of the protective film
It calculated | required as follows using the Kosaka Laboratory Co., Ltd. surface roughness measuring device (SE-3F). That is, when a portion having a reference length of 2.5 mm is extracted from the film cross-section curve in the direction of the center line, and the extracted portion is sandwiched by two straight lines of the maximum parallel value and the minimum value on the average line, the interval between the two straight lines is set. Measurement was made in the direction of the vertical magnification of the cross-sectional curve, and the value expressed in units of micrometers (μm) was taken as the maximum protrusion height (Rt) of the extracted portion. The maximum protrusion height was obtained by obtaining 10 cross-sectional curves from the surface of the sample film and expressing the average value of the maximum heights of the extracted portions obtained from these cross-sectional curves.

(5) Peeling force evaluation of release film Adhesive tape (“No. 31B” manufactured by Nitto Denko Corporation) was reciprocated with a 2 kg rubber roller on the surface of the release layer of the sample film, and left at room temperature for 1 hour. The peel force was measured. For the peeling force, “Ezgraph” manufactured by Shimadzu Corporation was used, and 180 ° peeling was performed under the condition of a tensile speed of 300 mm / min.

(6) Evaluation of surface resistance value of protective film Using a high resistance measuring instrument manufactured by Japan Hewlett-Packard Co., Ltd .: HP4339B and measuring electrode: HP16008B, the sample was conditioned for 30 minutes in a measurement atmosphere of 23 ° C. and 50% RH. The surface resistance value was measured.

(7) Releasability of protective film (practical property substitution evaluation)
A coating solution composed of the following photosensitive resin composition is applied onto a polyester film (trade name: Diafoil: R310 type, 16 μm thickness) as a base film, and heated at 100 ° C. in a hot air circulating furnace at 10 ° C. A heat treatment was performed for 1 minute to form a photosensitive resin layer having a thickness (after drying) of 1.5 μm. Next, each protective film obtained in Examples and Comparative Examples was laminated so that the coating layer of the protective film was in contact with the surface of the photosensitive resin layer, and a roll having a film width of 1000 mm and a winding length of 2000 m. A photosensitive resin laminate was obtained.
(Photosensitive resin layer composition)
Photosensitive resin methyl methacrylate / methacrylic acid / 2-ethylhexyl acrylic acid) 45 parts Photopolymerization initiator (Irgacure 907: manufactured by Ciba Specialty Chemicals) 6 parts Curing agent (hexamethoxymethylmelamine) 5 parts Colorant (methyl violet) 5 parts solvent (methyl ethyl ketone) 70 parts solvent (propylene glycol monomethyl ether) 25 parts

Using the resulting photosensitive resin laminate, cut to a width of 15 mm in advance, peel off the protective film from the photosensitive resin laminate with a tensile tester, and releasability and the surface state of the photosensitive resin layer surface Observed and judged using the following criteria.
(Criteria)
○: When the protective film is peeled off, the surface of the photosensitive resin layer is not scratched (practically problematic level)
Δ: When the protective film is peeled off, it peels off but does not damage the photosensitive resin layer (a level that may cause a problem in practice).
X: Peeling is not smooth and scratches the surface of the photosensitive resin layer (practically problematic level)

(8) Adhesion of photosensitive resin to copper foil (practical property substitution evaluation)
The protective film was peeled off from the photosensitive resin laminate, and the exposed photosensitive resin layer surface and a copper foil having a thickness of 70 μm were laminated. The processing status at that time was determined according to the following criteria.
(Criteria)
◯: Excellent adhesion when laminating a photosensitive resin layer to a copper foil, and the photosensitive resin layer does not easily peel off (practically problematic level)
Δ: When the photosensitive resin layer is laminated on the copper foil, there is a part where the photosensitive resin layer is partially peeled off (a level that may cause a problem in practical use).
X: Adhesiveness is poor when the photosensitive resin layer is laminated on the copper foil, and the photosensitive resin layer is easily peeled off (practically problematic level)

(9) Antistatic property evaluation of protective film (practical property substitution evaluation by ash test)
Under the measurement conditions of 23 ° C. and 50% RH, hold a protective film sample of 200 mm x 30 mm with both hands on a specified cotton cloth in JIS080 (attached white cloth for dyeing fastness test), and rub the film coated surface 20 times back and forth for protection. The film was charged. Next, the ash of the cigarette was brought close to the film application surface, the distance (unit: mm) at which the ash particles began to adhere to the protective film surface was measured, and the determination was made according to the following criteria.
(Criteria)
◯: Distance 0 mm or more and less than 10 mm (good antistatic property)
Δ: Distance of 10 mm or more and less than 20 mm (antistatic property: normal)
X: Distance exceeding 20 mm (anti-static property failure)

(10) Winding characteristics of photosensitive resin laminate (practical characteristics substitution evaluation)
About each photosensitive resin laminated body used by evaluation of said (7) term, it determined by the following determination criteria regarding the winding characteristic.
(Criteria)
◯: There is almost no winding tightening or winding deviation of the photosensitive resin layer, and no wrinkles on the roll (practically problematic level)
Δ: A small portion of the photosensitive resin layer is tightly wound or the roll is wrinkled (a level that may cause a problem in practical use).
X: There is tightness of the photosensitive resin layer and wrinkles of the roll (practically problematic level)

(11) Comprehensive evaluation (practical property substitution evaluation)
Using the photosensitive resin laminates produced in the examples and comparative examples, each evaluation item of the releasability of the protective film, the adhesion of the photosensitive resin to the copper foil, the winding characteristics of the photosensitive resin laminate, Comprehensive evaluation was performed according to the following criteria.
<Criteria>
○: All of the release properties of the protective film, the adhesion of the photosensitive resin to the copper foil, and the winding characteristics of the photosensitive resin laminate are ○ (a level that causes no problem in practice).
Δ: At least one of the releasability of the protective film, the adhesion of the photosensitive resin to the copper foil, and the winding characteristics of the photosensitive resin laminate is Δ (a level that may cause a problem in practice).
X: At least one of the releasability of the protective film, the adhesiveness of the photosensitive resin to the copper foil, and the winding characteristics of the photosensitive resin laminate is x (practically problematic level)

The polyester used in the examples and comparative examples was prepared as follows.
<Method for producing polyester (A)>
Using 100 parts by weight of dimethyl terephthalate and 60 parts by weight of ethylene glycol as starting materials, 0.09 parts by weight of magnesium acetate tetrahydrate as a catalyst is placed in the reactor, the reaction start temperature is set to 150 ° C., and the methanol is distilled off gradually. The reaction temperature was raised to 230 ° C. after 3 hours. After 4 hours, the transesterification reaction was substantially terminated. After adding 0.04 part by weight of ethyl acid phosphate to this reaction mixture, 0.04 part by weight of antimony trioxide was added, and a polycondensation reaction was carried out for 4 hours. That is, the temperature was gradually raised from 230 ° C. to 280 ° C. On the other hand, the pressure was gradually reduced from normal pressure, and finally 0.3 mmHg. After the start of the reaction, the reaction was stopped at a time corresponding to an intrinsic viscosity of 0.63 due to a change in stirring power of the reaction tank, and the polymer was discharged under nitrogen pressure. The intrinsic viscosity of the obtained polyester (A) was 0.63.

<Method for producing polyester (B)>
In the polyester (A) production method, after adding 0.04 part by weight of ethyl acid phosphate, 0.2 part by weight of silica particles having an average particle diameter of 2 μm and 0.04 part by weight of antimony trioxide are added to obtain the intrinsic viscosity. A polyester (B) was obtained using the same method as the production method of the polyester (A) except that the polycondensation reaction was stopped at a time corresponding to 0.65. The obtained polyester (B) had an intrinsic viscosity of 0.65.

<Method for producing polyester (C)>
In the production method of the polyester (B), the polyester (B) is used except that 0.5 parts by weight of silica particles having an average particle diameter of 0.9 μm is added instead of 0.2 parts by weight of silica particles having an average particle diameter of 2 μm. Polyester (C) was obtained using the same method as the production method. The obtained polyester (C) had an intrinsic viscosity of 0.65.

<Method for producing polyester (D)>
In the method for producing polyester (B), the method for producing polyester (B), except that 0.7 parts by weight of silica particles having an average particle diameter of 2 μm is added instead of 0.2 parts by weight of silica particles having an average particle diameter of 2 μm. A polyester (D) was obtained using the same method as described above. The obtained polyester (D) had an intrinsic viscosity of 0.65.

<Method for producing polyester (E)>
In the production method of polyester (B), polyester (B) is used except that 0.5 parts by weight of silica particles having an average particle diameter of 0.2 μm is added instead of 0.2 parts by weight of silica particles having an average particle diameter of 2 μm. Polyester (E) was obtained using the same method as the production method. The obtained polyester (E) had an intrinsic viscosity of 0.65.

<Method for producing polyester (F)>
In the production method of the polyester (B), the polyester (B) is made by adding 1.5 parts by weight of silica particles having an average particle diameter of 3.5 μm instead of 0.2 parts by weight of silica particles having an average particle diameter of 2 μm. Polyester (F) was obtained using the same method as the production method. The obtained polyester (F) had an intrinsic viscosity of 0.65.

Examples of compounds constituting the coating layer are as follows.
(Example compounds)
・ Release agent (long-chain alkyl compound): (IA)
To a four-necked flask, 200 parts of xylene and 600 parts of octadecyl isocyanate were added and heated with stirring. From the time when xylene began to reflux, 100 parts of polyvinyl alcohol having an average degree of polymerization of 500 and a degree of saponification of 88 mol% was added in small portions over a period of about 2 hours. After the addition of polyvinyl alcohol, the reaction was completed by further refluxing for 2 hours. When the reaction mixture was cooled to about 80 ° C. and added to methanol, the reaction product was precipitated as a white precipitate. This precipitate was filtered off, added with 140 parts of xylene, and heated to dissolve completely. After repeating the operation of adding methanol again to precipitate several times, the precipitate was washed with methanol and dried and ground.

・ Antistatic agent: IIA
A polymer compound having a number average molecular weight of 30000, obtained by copolymerizing a structural unit of the following formula 3-1 and a structural unit of the following formula 3-2 in a weight ratio of 95/5.

・ Antistatic agent: IIB
A high molecular compound having a number average molecular weight of 30000, copolymerized with the structural unit of Formula 3-1.

・ Antistatic agent: IIC
A copolymer having a weight ratio of 75/12/15/30 of 2- (trimethylamino) ethyl methacrylate / ethyl methacrylate / butyl methacrylate / polyethylene glycol-containing monoacrylate whose counter ion is methyl sulfonate. Number average molecular weight is 40,000.

・ Antistatic agent: IID
Antistatic agent having a number average molecular weight of 50,000, comprising a structural unit of the following formula 4.

Acrylic resin: (IIIA) Aqueous dispersion of acrylic resin polymerized with the following composition: ethyl acrylate / n-butyl acrylate / methyl methacrylate / N-methylol acrylamide / acrylic acid = 65/21/10/2/2 (% by weight) Emulsion polymer (emulsifier: anionic surfactant). Hydroxyl value 11 mg KOH / g.

Acrylic resin: (IIIB) Aqueous dispersion of acrylic resin polymerized with the following composition: ethyl acrylate / methyl acrylate / 2-hydroxyethyl methacrylate / N-methylol acrylamide / acrylic acid = 65/28/3/2/2 (% by weight ) Emulsion polymer (emulsifier: anionic surfactant). Hydroxyl value 24 mgKOH / g.

・ Polyvinyl alcohol: (IIIC)
Polyvinyl alcohol / hexamethoxymethylol melamine having a saponification degree of 88 mol% and a polymerization degree of 500: (IV)

Example 1:
The mixed raw materials in which the polyesters (A) and (B) are mixed at a ratio of 5% and 95%, respectively, are used as the outermost layer (surface layer) raw material, and only the polyester (A) is used as the intermediate layer raw material in two extruders Each is supplied, melted at 285 ° C., and then coextruded in a layer configuration of two types and three layers (surface layer / intermediate layer / surface layer = 2: 8: 2 discharge amount) onto a cooling roll set to 40 ° C. Cooled and solidified to obtain an unstretched sheet. Next, the film was stretched 3.4 times in the longitudinal direction at a film temperature of 85 ° C. using the difference in peripheral speed of the roll, and then the coating solution 1 shown in Table 1 below was applied to one side of the longitudinally stretched film, which was led to a tenter. The film is stretched 4.1 times at 110 ° C. in the transverse direction, heat treated at 230 ° C. for 10 seconds, relaxed by 2% in the transverse direction, and has a thickness of 12 μm having a coating layer (after drying) of 0.03 μm. A protective film was obtained.

Examples 2-18:
A protective film was obtained in the same manner as in Example 1 except that the coating composition was changed to the coating composition shown in Table 1 in Example 1.

Example 19:
In Example 1, the raw material composition of the surface layer of the polyester film constituting the protective film was manufactured in the same manner as in Example 1 except that the polyesters (A) and (C) were changed to proportions of 5% and 95%, respectively. A protective film was obtained.

Example 20:
In Example 1, the raw material composition of the surface layer of the polyester film constituting the protective film was produced in the same manner as in Example 1 except that the polyester (A) and (D) were changed to 5% and 95%, respectively. A protective film was obtained.

Example 21:
A protective film was obtained in the same manner as in Example 1 except that the coating composition was changed to the coating composition shown in Table 1 in Example 1.

Comparative Example 1:
In Example 1, it manufactured like Example 1 except not providing an application layer, and obtained the polyester film. When the completed laminated polyester film was evaluated, it was as shown in Table 2 and was inferior in releasability and antistatic properties.

Comparative Examples 2-3:
A protective film was obtained in the same manner as in Example 1 except that the coating composition was changed to the coating composition shown in Table 1 in Example 1.

Comparative Example 4:
In Example 1, the raw material composition of the surface layer of the polyester film constituting the protective film was manufactured in the same manner as in Example 1 except that the polyesters (A) and (E) were changed to proportions of 5% and 95%, respectively. A protective film was obtained.

Comparative Example 5:
In Example 1, the raw material composition of the surface layer of the polyester film constituting the protective film was manufactured in the same manner as in Example 1 except that the polyesters (A) and (F) were changed to proportions of 5% and 95%, respectively. A protective film was obtained.

Comparative Example 6:
A protective film was obtained in the same manner as in Example 1 except that the coating composition was changed to the coating composition shown in Table 1 in Example 1.

  About the characteristic of each protective film obtained by the said Example and comparative example, it shows to the following Tables 1-2.

  The film of the present invention can be suitably used as a protective film for a dry film resist.

30 Photosensitive resin laminate
11 Polyester film 12 Coating layer 20 Protective film 13 Photosensitive resin layer 14 Base film

Claims (2)

One side of the polyester film has a coating layer formed from a coating solution containing a long-chain alkyl group-containing compound and an antistatic agent and an acrylic resin or polyvinyl alcohol, and the maximum protrusion height (Rt) of the coating layer surface ) Is 0.1 to 1.0 μm. A protective film for dry film resists. A photosensitive resin laminate having a structure in which the protective film according to claim 1 is laminated on a surface of a photosensitive resin layer formed on a base film.