JP2016112888A - Liquid discharge head, liquid discharge unit and device for discharging liquid - Google Patents

Abstract

PROBLEM TO BE SOLVED: To solve such a problem that trapping of foreign matters by a filter part causes clogging of a filter hole, and refilling to individual liquid chamber is not in time to cause a discharge defect.SOLUTION: A filter part 90 is disposed between a common liquid chamber 10 and individual liquid chamber 6. The filter part 90 has a plurality of slit grooves 91 formed on the surface of the common liquid chamber side of a holding substrate 50, and the slit grooves 91 are formed along the direction orthogonal to a nozzle arrangement direction. Plural slit grooves 91 are disposed side-by-side in the nozzle arrangement direction and are divided into an upstream side portion 91a communicating with the common liquid chamber 10 and a downstream side portion 91b shielded from the common liquid chamber 10.SELECTED DRAWING: Figure 6

Description

  The present invention relates to a liquid discharge head, a liquid discharge unit, and an apparatus for discharging liquid.

  In a liquid discharge head (droplet discharge head), if a foreign substance is mixed into an individual liquid chamber that communicates with a nozzle, a discharge failure occurs.

  In view of this, conventionally, for example, a device including a filter unit in which a plurality of filter holes are formed between a plurality of individual liquid chambers and a common liquid chamber is known (Patent Document 1).

JP 2014-00579 A

  However, trapping foreign matter by the filter section clogs the filter hole, narrows the liquid supply flow path from the common liquid chamber to the individual liquid chamber, and fails to refill the individual liquid chamber in time, resulting in poor discharge ( There is a problem that nozzle down occurs.

  The present invention has been made in view of the above problems, and an object thereof is to reduce supply shortage due to trapping of foreign matters by a filter unit.

In order to solve the above-described problem, a liquid discharge head according to claim 1 of the present invention includes:
A plurality of nozzles for discharging liquid;
A plurality of individual liquid chambers through which the nozzle communicates;
A common liquid chamber communicating with the plurality of individual liquid chambers,
Between the common liquid chamber and the individual liquid chamber, a filter unit for filtering liquid is disposed,
The filter unit has a plurality of slit grooves arranged in the nozzle arrangement direction,
The slit groove has a width in a short direction that is less than an opening diameter of the nozzle,
The slit groove has an upstream portion facing the common liquid chamber and a downstream portion not facing the common liquid chamber in the longitudinal direction, and the downstream portion communicates with the individual liquid chamber. did.

  According to the present invention, supply shortage due to trapping of foreign matters can be reduced.

FIG. 4 is an explanatory cross-sectional view along a direction orthogonal to a nozzle arrangement direction of an example of a liquid discharge head according to the present invention. It is principal part expanded sectional explanatory drawing of FIG. It is a principal part sectional view similarly along a nozzle arrangement direction. It is sectional explanatory drawing in alignment with the direction orthogonal to the nozzle arrangement direction with which it uses for description of 1st Embodiment of this invention. It is a principal part sectional view similarly along a nozzle arrangement direction. It is a principal part section explanatory drawing which follows a direction which intersects perpendicularly with a nozzle arrangement direction. It is a plane explanatory view of a holding substrate which is also a groove member. It is a plane explanatory view in the state where the upper channel formation substrate which is a lid member was similarly piled up on the holding substrate. It is principal part cross-sectional explanatory drawing along the direction orthogonal to the nozzle arrangement direction with which it uses for description of an effect | action of the embodiment. It is a plane explanatory drawing similarly. It is sectional explanatory drawing in alignment with the direction orthogonal to the nozzle arrangement direction with which it uses for description of 2nd Embodiment of this invention. It is plane explanatory drawing of the holding substrate which is a groove member with which it uses for description of 3rd Embodiment of this invention. It is a plane explanatory view in the state where the upper channel formation substrate which is a lid member was similarly piled up on the holding substrate. FIG. 14 is an explanatory cross-sectional view of a main part along the nozzle arrangement direction corresponding to the AA line of FIG. 13. It is plane explanatory drawing of the holding substrate which is a groove member with which it uses for description of 4th Embodiment of this invention. It is a plane explanatory view in the state where the upper channel formation substrate which is a lid member was similarly piled up on the holding substrate. It is plane explanatory drawing of the holding substrate which is a groove member with which it uses for description of 5th Embodiment of this invention. It is a plane explanatory view in the state where the upper channel formation substrate which is a lid member was similarly piled up on the holding substrate. It is sectional explanatory drawing in alignment with the direction orthogonal to the nozzle arrangement direction with which it uses for description of 6th Embodiment of this invention. It is plane | planar explanatory drawing of the holding substrate which is a groove member with which it uses for description of 7th Embodiment of this invention. It is a plane explanatory view of the upper channel formation substrate which is also a lid member. It is a plane explanatory view of a channel board similarly. It is a plane explanatory view of the state where the upper channel formation substrate was similarly piled up on the holding substrate. It is plane explanatory drawing of the state which accumulated the upper flow path formation board | substrate which is a cover member on the holding board | substrate which is a groove member with which description of 8th Embodiment of this invention is provided. It is principal part cross-sectional explanatory drawing along the direction orthogonal to the nozzle arrangement direction with which it uses for description of 9th Embodiment of this invention. It is a plane explanatory view in the state where the upper channel formation substrate which is a lid member was piled up on the holding substrate which is the groove member used for explanation of the 10th embodiment of the present invention. It is a plane explanatory view of the upper channel formation substrate of the embodiment. It is a plane explanatory view in the state where the upper channel formation substrate which is a lid member was piled up on the holding substrate which is a groove member for explanation of the 11th embodiment of the present invention. It is principal part cross-sectional explanatory drawing in alignment with the direction orthogonal to the nozzle arrangement direction with which it uses for description of 12th Embodiment of this invention. It is sectional explanatory drawing in alignment with the direction orthogonal to the nozzle arrangement direction with which it uses for description of 13th Embodiment of this invention. It is sectional explanatory drawing which follows the direction orthogonal to the nozzle arrangement direction with which it uses for description of 14th Embodiment of this invention. It is the plane explanatory view similarly seen from the common liquid chamber side of the holding substrate. It is sectional explanatory drawing which follows the BB line of FIG. It is the plane explanatory view which similarly saw the holding substrate from the diaphragm member side. It is sectional explanatory drawing with which it uses for description of an effect | action of the embodiment. It is a plane explanatory drawing similarly. It is sectional explanatory drawing which follows the CC line | wire of FIG. 32 of the holding substrate with which it uses for description of the different example of 15th Embodiment of this invention. It is plane explanatory drawing seen from the common liquid chamber side of the holding substrate with which it uses for description of the manufacturing process of the holding substrate of 14th Embodiment. It is sectional explanatory drawing which follows the BB line of FIG. 32 similarly. Similarly, a plan view of the holding substrate viewed from the diaphragm member side It is side explanatory drawing of the mechanism part of an example of the apparatus which discharges the liquid which concerns on this invention provided with the liquid discharge unit which concerns on this invention. It is principal part plane explanatory drawing of the mechanism part.

  Embodiments of the present invention will be described below with reference to the accompanying drawings. An example of a liquid discharge head according to the present invention will be described with reference to FIGS. FIG. 1 is a cross-sectional explanatory view along a direction orthogonal to the nozzle arrangement direction of the liquid discharge head, FIG. 2 is an enlarged main cross-sectional explanatory view of FIG. 1, and FIG. 3 is a main cross-sectional explanatory view along the nozzle arrangement direction. .

  This liquid discharge head includes a nozzle plate 1, a flow path plate 2, a vibration plate member 3, a piezoelectric element 11 that is a pressure generating means, a holding substrate 50 that also functions as a groove member, and an upper flow path that also functions as a lid member. A member 60 and a frame member 70 also serving as a common liquid chamber member are provided.

  The nozzle plate 1 is formed with a plurality of nozzles 4 for discharging liquid. Here, the configuration is such that two nozzle rows in which the nozzles 4 are arranged are arranged, but may be one row or three or more rows.

  The flow path plate 2, together with the nozzle plate 1 and the vibration plate member 3, has an individual liquid chamber 6 that communicates with the nozzle 4, a fluid resistance portion 7 that communicates with the individual liquid chamber 6, and a liquid introduction portion (passage) 8 that communicates with the fluid resistance portion 7. Forming. It should be noted that the individual flow passages 5 and 5 constituted by the individual liquid chamber 6, the fluid resistance portion 7 and the liquid introduction portion 8 are separated by a partition wall portion 5A.

  The individual flow path 5 is formed by the frame member 70 through the passage (opening) 9 of the diaphragm member 3, the passage 51 of the holding substrate 50, and the slit groove 91 of the filter portion 90 described later in detail. To the common liquid chamber 10. The liquid is supplied to the common liquid chamber 10 of the frame member 70 from the outside through the supply port 71.

  The vibration plate member 3 is a wall surface member that forms a deformable vibration region (vibration plate) 30 that forms a part of the wall surface of the individual liquid chamber 6. In the present embodiment, the diaphragm member 3 and the channel plate 2 are collectively referred to as the channel member 20.

  A piezoelectric element 11 is provided integrally with the vibration region 30 on the surface of the vibration member 30 opposite to the individual liquid chamber 6 in the vibration region 30, and the vibration region 30 and the piezoelectric element 11 constitute a piezoelectric actuator. .

  The piezoelectric element 11 is configured by sequentially laminating a lower electrode 13, a piezoelectric layer (piezoelectric body) 12, and an upper electrode 14 from the vibration region 30 side. An insulating film 21 is formed on the piezoelectric element 11.

  The lower electrode 13 serving as a common electrode of the plurality of piezoelectric elements 11 is connected to the common electrode power supply wiring pattern 102 via the common electrode wiring 15.

  Further, the upper electrode 14 serving as an individual electrode of the piezoelectric element 11 is connected to a drive IC (driver IC) 500 by a connection pad 101 via an individual electrode wiring 16. The driver IC 500 is mounted on the flow path member 20 by flip chip bonding so as to cover the region between the rows of piezoelectric element rows.

  The holding substrate 50 is bonded onto the flow path member 20, and together with the passage 51, a recess 52 that accommodates the piezoelectric element 11 and an opening 59 that accommodates the driver IC 500 are formed.

  In the liquid ejection head configured as described above, a voltage is applied between the upper electrode 14 and the lower electrode 13 of the piezoelectric element 11 from the driver IC 500, whereby the piezoelectric layer 12 expands in the electrode stacking direction, that is, the electric field direction, and vibrates. Shrink in a direction parallel to the region 30.

  At this time, since the lower electrode 13 side is constrained by the vibration region 30, a tensile stress is generated on the lower electrode 13 side of the vibration region 30, and the vibration region 30 bends toward the individual liquid chamber 6 side and applies the internal liquid. By pressurizing, the liquid is discharged from the nozzle 4.

  Next, a first embodiment of the present invention will be described with reference to FIGS. 4 is a cross-sectional explanatory diagram along a direction orthogonal to the nozzle arrangement direction for explaining the embodiment, and FIG. 5 is a principal cross-sectional explanatory diagram along the nozzle arrangement direction. FIG. 6 is a cross-sectional view of a principal part along the direction orthogonal to the nozzle arrangement direction, FIG. 7 is a plan view of a holding substrate that is also a groove member, and FIG. 8 is an upper flow path that is a lid member on the holding substrate. It is plane explanatory drawing of the state which accumulated the board | substrate. The surface coating applied to the holding substrate is for distinguishing the surface from the other parts and does not indicate a cross section (the same applies to the following).

  In the present embodiment, the filter unit 90 is disposed between the common liquid chamber 10 and the individual liquid chamber 6.

  The filter unit 90 has a plurality of slit grooves 91 formed on the common liquid chamber side surface of the holding substrate 50 that is a groove member. The slit grooves 91 are formed along a direction orthogonal to the nozzle arrangement direction, and the plurality of slit grooves 91 are arranged side by side in the nozzle arrangement direction.

  Here, the slit groove 91 has a width W1 in the short direction (here, the nozzle arrangement direction) smaller than the opening diameter D of the nozzle 4 (W1 <D). Here, the opening diameter means the diameter when the nozzle 4 is circular in a plan view, and means the minimum width of the opening when the nozzle 4 has a shape other than the circular shape.

  Further, the slit groove 91 has a depth H1 less than the opening diameter D of the nozzle 4 (H1 <D). By setting the depth H1 of the slit groove 91 to be less than the opening diameter D of the nozzle 4, it is also possible to capture a shape deviating from a spherical shape, for example, a rod-shaped foreign matter.

  The slit groove 91 can be formed by half etching, for example.

  The slit groove 91 is divided in the longitudinal direction into an upstream portion 91 a that faces the common liquid chamber 10 and a downstream portion 91 b that does not face the common liquid chamber 10.

  That is, an upper flow path forming member (upper flow path forming substrate) 60 as a lid member is provided on the common liquid chamber 10 side of the holding substrate 50 as a groove member. The upper flow path forming member 60 is formed with an opening 92 that leads the upstream portion 91a of the slit groove 91 to the common liquid chamber 10, and includes a downstream portion 91b of the slit groove 91 in a portion other than the opening 92. Covering.

  Accordingly, the upstream portion 91a of the slit groove 91 faces the common liquid chamber 10 through the opening 92, and the downstream portion 91b of the slit groove 91 is covered with the upper flow path forming member 60 and faces the common liquid chamber 10. The downstream portion 91 b communicates with the individual liquid chamber 6.

  At this time, the wall surface 92 a of the opening 92 of the upper flow path forming member 60 serves as a boundary that partitions the upstream portion 91 a and the downstream portion 91 b of the slit groove 91. The boundary position may be at any position in the longitudinal direction of the slit groove 91.

  In the present embodiment, the holding substrate 50 is formed with a passage 51 through the slit groove 91 for each individual flow path 5 (individual liquid chamber 6), and each passage 51 is separated by a partition wall 53. Two slit grooves 91 communicate with one passage 51.

  The operation of this embodiment configured as described above will be described with reference to FIGS. FIG. 9 is a cross-sectional explanatory view of a main part along a direction orthogonal to the nozzle arrangement direction for the same description, and FIG.

  When the liquid supplied from the common liquid chamber 10 to the individual liquid chamber 6 includes a foreign matter 99 having a size (minimum length) larger than the nozzle diameter D, the foreign matter 99 is a slit groove having a width smaller than the nozzle diameter D. 91 cannot enter.

  At this time, as shown by a flow 300, the liquid in the common liquid chamber 10 flows from the common liquid chamber 10 into the slit groove 91 and flows toward the individual liquid chamber 6, so that the foreign matter 99 is also in the slit groove of the holding substrate 50. It moves to the downstream side along the surface on the opening side of 91.

  Since the downstream portion 91b of the slit groove 91 is blocked by the upper flow path forming member 60, as shown in FIGS. 9 and 10, the foreign matter is blocked by the wall surface 92a of the opening 92 of the upper flow path forming member 60. 99 is dammed up.

  Accordingly, a part of the slit groove 91 is blocked by the trapped foreign matter 99, but the upstream portion 91a other than the portion where the foreign matter 99 is trapped remains open to the common liquid chamber 10. As a result, the supply of the liquid to the individual liquid chamber 6 is continued through the portion upstream of the trapped foreign matter 99 in the slit groove 91.

  Further, the portion of the slit groove 91 that is open to the common liquid chamber 10 is not completely blocked by the foreign matter 99, and a supply flow path from the common liquid chamber 10 to the individual liquid chamber 6 can be secured over a long period of time. Therefore, it is possible to reduce discharge defects due to insufficient refill.

  Moreover, in this embodiment, since the several slit groove | channel 91 is connected to the one channel | path 51 divided for every individual flow path 5, even if the one part slit groove | channel 91 whole is closed, other Liquid can be supplied to the passage 51 through the slit groove 91.

  Therefore, the supply flow path from the common liquid chamber 10 to the individual liquid chamber 6 can be secured for a longer period of time, so that discharge failures due to insufficient refill can be reduced.

  In addition, since the channel | path 51 is provided for every separate flow path 5, a flow path becomes narrow and the flow rate of a liquid rises and initial stage filling property improves. This is because even if bubbles are mixed in the liquid due to an increase in the flow velocity, the bubbles can easily flow toward the nozzle side by suction or pressurization.

  Next, a second embodiment of the present invention will be described with reference to FIG. FIG. 11 is a cross-sectional explanatory diagram along a direction orthogonal to the nozzle arrangement direction for explaining the embodiment.

  In the present embodiment, the downstream wall surface that dams up the foreign matter in the opening 92 of the upper flow path forming member 60 is an inclined surface 92b that extends toward the common liquid chamber 10 side.

  As a result, foreign matter easily returns to the common liquid chamber 10 side by convection due to the liquid flowing into the common liquid chamber 10, and is trapped on the wall surface on the downstream side of the opening 92 of the upper flow path forming member 60 so that the slit groove 91 is formed. Foreign matter to be blocked can be reduced.

  Next, a third embodiment of the present invention will be described with reference to FIGS. FIG. 12 is an explanatory plan view of a holding substrate, which is a groove member for explaining the embodiment, FIG. 13 is an explanatory plan view of an upper flow path forming substrate, which is also a lid member, on the holding substrate, and FIG. FIG. 14 is an explanatory cross-sectional view of a main part along the nozzle arrangement direction corresponding to the AA line of FIG. 13.

  In this embodiment, the passage 51 of the holding substrate 50 communicates with all the individual liquid chambers 6 (individual flow paths 5) without providing the partition wall 53 of the first embodiment.

  Further, a common passage 54 through all the slit grooves 91 is formed in the holding substrate 50, and the common passage 54 communicates with the passage 51.

  Since it comprised in this way, as shown in FIG. 13, even if the foreign material 99 block | closes some slit grooves 91 intensively, liquid supply is continued from the remaining slit grooves 91. FIG. As a result, as shown in FIGS. 13 and 14, the liquid is supplied from the other slit grooves 91 to the individual flow paths 5 close to the closed slit grooves 91 as shown by the flow 300.

  Therefore, since a supply flow path from the common liquid chamber 10 to the individual liquid chamber 6 can be secured over a long period of time, ejection failure due to insufficient refill can be reduced.

  Next, a fourth embodiment of the present invention will be described with reference to FIGS. FIG. 15 is an explanatory plan view of a holding substrate which is a groove member for explaining the embodiment, and FIG. 16 is an explanatory plan view of a state in which an upper flow path forming substrate which is a lid member is also stacked on the holding substrate.

  In the present embodiment, in the third embodiment, the common passage 55 along the nozzle arrangement direction passing through all the slit grooves 91 in the downstream portion 91b of the slit groove 91 covered with the upper flow path forming member 60, 56 is formed.

  As a result, more liquid flows occur between the slit grooves 91 than in the third embodiment.

  Next, a fifth embodiment of the present invention will be described with reference to FIGS. FIG. 17 is an explanatory plan view of a holding substrate that is a groove member for explaining the embodiment, and FIG. 18 is an explanatory plan view of an upper flow path forming substrate that is a lid member on the holding substrate.

  In the present embodiment, the holding substrate 50 is provided with the partition walls 53 of the first embodiment for each predetermined number (two in this example) of the individual flow paths 5, and the passage 51 is provided for each predetermined number (in this example). Two) individual flow paths 5.

  By configuring in this way, while ensuring the liquid supply, the size of the passage 51 is reduced to increase the flow velocity, and the bubble discharge performance is improved.

  Next, a sixth embodiment of the present invention will be described with reference to FIG. FIG. 19 is a cross-sectional explanatory diagram along a direction orthogonal to the nozzle arrangement direction for explaining the embodiment.

  In the present embodiment, the fluid resistance portion 7 is formed in the downstream portion 91 b covered with the upper flow path forming member 60 of the slit groove 91.

  That is, by reducing the depth of the slit groove 91 and increasing the fluid resistance, the downstream portion 91 b covered with the upper flow path forming member 60 can be used as the fluid resistance portion 7.

  For example, if the length of the downstream portion 91b covered with the upper flow path forming member 60 of the slit groove 91 is 300 μm, the width is 16 μm, and the depth is 50 μm, the fluid resistance portion 7 can be functioned.

  As a result, compared to the configuration of the first embodiment, the head chip size in the direction orthogonal to the nozzle arrangement direction can be shortened by the amount that the fluid resistance portion 7 of the first embodiment can be omitted.

  Next, a seventh embodiment of the present invention will be described with reference to FIGS. 20 is an explanatory plan view of a holding substrate, which is a groove member for explanation of the embodiment, FIG. 21 is an explanatory plan view of an upper flow path forming substrate, which is also a lid member, and FIG. 22 is an explanatory plan view of a flow path plate. FIG. 23 is an explanatory plan view of the state in which the upper flow path forming substrate is also stacked on the holding substrate.

  In the present embodiment, one or a plurality of dummy individual channels 81 are arranged at both ends in the nozzle arrangement direction.

  Then, the passage 51 and the slit groove 91 of the holding substrate 50 are formed up to a region communicating with the dummy individual flow path 81. Similarly, the opening 92 of the upper flow path forming member 60 is also formed with the slit groove 91 leading to the dummy individual flow path 81. A region leading to the common liquid chamber 10 is formed.

  Thus, the common liquid chamber 10 can be made to reach the dummy individual flow path 81, and bubbles can be discharged through the dummy individual flow path 81.

  Next, an eighth embodiment of the present invention will be described with reference to FIG. FIG. 24 is a plan view illustrating a state in which an upper flow path forming substrate that is a lid member is overlaid on a holding substrate that is a groove member for explanation of the embodiment.

  In the present embodiment, in the plan view, the opening 92 of the upper flow path forming member 60 has a width in a direction orthogonal to the nozzle arrangement direction on the end side in the nozzle arrangement direction narrower than the width of the central portion.

  Thus, by narrowing the end portion of the opening 92 of the upper flow path forming member 60 in the nozzle arrangement direction, the flow rate at the end portion can be increased and the bubble discharge performance can be improved.

  Next, a ninth embodiment of the present invention will be described with reference to FIG. FIG. 25 is a cross-sectional explanatory view of a main part along a direction orthogonal to the nozzle arrangement direction for explaining the embodiment.

  In the present embodiment, in the first embodiment, the upper flow path forming member 60 includes all the slit grooves 91 between the holding substrate 50 inside the portion facing the downstream portion 91 b of the slit groove 91. A recessed portion 61 is formed.

  Thereby, since the recessed part 61 becomes a channel | path which passes between each slit groove | channel 91, even if a part of slit groove | channel 91 is obstruct | occluded with the foreign material 99, it can pass between the channel | paths 51, and the remaining slit groove | channel 91 is carried out. The liquid supplied from is supplied to each passage 51.

  Therefore, since a supply flow path from the common liquid chamber 10 to the individual liquid chamber 6 can be secured over a long period of time, ejection failure due to insufficient refill can be reduced.

  That is, the upper flow path forming member 60 as the lid member does not need to close the entire downstream portion 91b of the slit groove 91, and may divide the upstream portion 91a and the downstream portion 91b.

Next, a tenth embodiment of the present invention will be described with reference to FIGS. FIG. 26 is an explanatory plan view of a state in which an upper flow path forming substrate as a lid member is overlaid on a holding substrate that is a groove member for explaining the embodiment, and FIG. 27 is a plan view of the upper flow path forming substrate in the same embodiment. It is explanatory drawing. In addition, the hatching part of FIG. 27 shows parts (parts with meat) other than an opening part, and does not represent a cross section.
It is.

  In the present embodiment, a recess 94 is formed in a portion corresponding to the space between the slit grooves 91 in a plan view on the wall surface 92a of the opening 92 that blocks the foreign matter.

  As a result, foreign matter can escape to the concave portions 94 between the slit grooves 91, and the opening of the slit groove 91 with foreign matter can be reduced.

  Next, an eleventh embodiment of the present invention will be described with reference to FIG. FIG. 28 is an explanatory plan view of a state in which an upper flow path forming substrate that is a lid member is stacked on a holding substrate that is a groove member for explanation of the embodiment.

  In the present embodiment, the wall surface 92a of the opening 92 that dams up the foreign matter is formed in a saw blade shape, and a concave portion 95 is formed in which the portion corresponding to the space between the slit grooves 91 is the tip of the saw blade in plan view.

  In this way, by forming the slit groove 91 so that the upper part of the slit groove 91 is the tip of the sawtooth, foreign matter can be more efficiently escaped between the slit grooves 91, and the opening of the slit groove 91 can be reduced.

  Next, a twelfth embodiment of the present invention is described with reference to FIG. FIG. 29 is an explanatory cross-sectional view of a main part along a direction orthogonal to the nozzle arrangement direction for explaining the embodiment.

  In each of the embodiments described above, the holding substrate 50 also serves as a groove member. In this embodiment, the groove member 150 that forms the slit groove 91 is connected to the holding substrate 50 and the upper flow path forming member 60 that is a lid member. Arranged in between. The groove member 150 has a passage 151 through the passage 51 of the holding substrate 50 and the slit groove 91.

  In this case, in this embodiment, the groove member 150 is formed with a slit penetrating in the thickness direction, and the side opposite to the common liquid chamber 10 is closed with the holding substrate 50 to form the slit groove 91. The slit groove 91 may be formed by only 150.

  If comprised in this way, the design freedom of the holding | maintenance board | substrate 50 will become high.

  Next, a thirteenth embodiment of the present invention will be described with reference to FIG. FIG. 30 is a cross-sectional explanatory diagram along a direction orthogonal to the nozzle arrangement direction for explaining the embodiment.

  In each of the above embodiments, the upper flow path forming member 60 that is a lid member different from the frame member 70 is provided. In the present embodiment, the frame member 70 is provided with a lid portion 160 that serves as a lid member. It is integrally formed.

  If comprised in this way, the joining process of a cover member and a frame member can be skipped, and an assembly man-hour can be reduced.

  Next, a fourteenth embodiment of the present invention will be described with reference to FIGS. FIG. 31 is a cross-sectional explanatory view taken along a direction orthogonal to the nozzle arrangement direction for explaining the embodiment, FIG. 32 is a plan explanatory view as seen from the common liquid chamber side of the holding substrate, and FIG. 33 is a BB of FIG. FIG. 34 is an explanatory plan view of the holding substrate as seen from the diaphragm member side.

  Also in this embodiment, the filter unit 90 has a plurality of slit grooves 91 arranged side by side in the nozzle arrangement direction. A part of the slit groove 91, here the downstream end of the slit groove 91, faces the passage 51 of the holding substrate 50 and becomes a filter hole through the common liquid chamber 10 and the passage 51 on the individual liquid chamber side. A through hole 93 is formed. The width of the through holes 93 in the nozzle arrangement direction (the width in the short direction) is the same as that of the slit groove 91, but if it is less than the opening diameter of the nozzle 4, it need not be the same width as the slit groove 91.

  That is, in the present embodiment, the holding substrate 50 has the common liquid chamber side of the passage 51 passing through the common liquid chamber 10 and the individual liquid chamber 6 side as a through hole 93 less than the opening diameter of the nozzle 4 serving as a filter hole, The through hole 93 is communicated with the slit groove 91. Here, the slit groove 91 and the like of the holding substrate 50 are formed. However, similarly to the twelfth embodiment, apart from the holding substrate 50, the slit groove 91 and the through hole divided for each slit groove 91 are provided. The member (filter member) which forms 93 can also be used.

  In the present embodiment, the passage 51 of the holding substrate 50 has one elongated hole shape in the direction orthogonal to the nozzle arrangement direction, and communicates with all the individual liquid chambers 6 and also with all the through holes 93. It is configured.

  Next, the operation of this embodiment configured as described above will be described with reference to FIGS. FIG. 35 is a sectional explanatory view for explaining the same, and FIG. 36 is a plan explanatory view.

  When the foreign material 99 having a size (minimum length) larger than the nozzle diameter D is included in the liquid supplied to the individual liquid chamber 6 from the common liquid chamber 10 side, the foreign material 99 is a slit having a width smaller than the nozzle diameter D. It cannot enter into the groove 91 and the through hole 93.

  At this time, as shown by a flow 300, the liquid in the common liquid chamber 10 flows from the common liquid chamber 10 into the slit groove 91 and flows toward the individual liquid chamber 6, so that the foreign matter 99 is also in the slit groove of the holding substrate 50. It moves to the downstream side along the surface on the opening side of 91.

  Therefore, foreign matter 99 accumulates on the common liquid chamber 10 side of the downstream through hole 93 and gradually closes the common liquid chamber 10 side of the through hole 93, but the through hole 93 communicates with the slit groove 91. Accordingly, the slit grooves 91 other than the portion where the foreign matter 99 is trapped remain open to the common liquid chamber 10. Thereby, the supply of the liquid to the individual liquid chamber 6 is continued through the part where the foreign matter 99 of the through hole 93 and the slit groove 91 is not trapped.

  And the part opened to the common liquid chamber 10 of the through-hole 93 and the slit groove | channel 91 is not obstruct | occluded with the foreign material 99, and the supply flow path from the common liquid chamber 10 to the individual liquid chamber 6 is made over a long period of time. Since it can be ensured, ejection failure due to insufficient refill can be reduced.

  Further, in the present embodiment, the through holes 93 communicate with the passages 51 that lead to all the individual liquid chambers 6, so that even if some of the slit grooves 91 are closed, the other through holes 93 and slit grooves 91 are used. Liquid can be supplied to the passage 51.

  Therefore, the supply flow path from the common liquid chamber 10 to the individual liquid chamber 6 can be secured for a longer period of time, so that discharge failures due to insufficient refill can be reduced.

  Next, a different example of the fifteenth embodiment of the present invention will be described with reference to FIG. FIG. 37 is a cross-sectional explanatory view taken along the line CC of FIG. 32 of the holding substrate for explaining the embodiment.

  In the first example shown in FIG. 37A, the passage 51 of the holding substrate 50 is provided for each individual liquid chamber 6. One (or a plurality of) through holes 93 are also arranged for one passage 51.

  In the second example shown in FIG. 37B, a passage 51 of the holding substrate 50 is provided for each of the plurality of individual liquid chambers 6, and a plurality of through holes 93 are arranged for one passage 51.

  Also in this embodiment, the same effect as that of the fourteenth embodiment can be obtained.

  Next, an example of the manufacturing process of the holding substrate according to the fourteenth embodiment will be described with reference to FIGS. FIG. 38 is an explanatory plan view of the holding substrate provided for the same explanation as viewed from the common liquid chamber side, FIG. 39 is a sectional explanatory view taken along the line BB of FIG. 32, and FIG. FIG.

  As shown in each drawing (a), a substrate 600 to be a holding substrate 50 is prepared. 39 (b) and 40 (b), the concave portion 52 in which the piezoelectric element 11 is disposed and the driver IC 500 are accommodated from the surface of the substrate 600 that is the surface of the holding substrate 50 on the diaphragm member 3 side. A part 59b of the opening 59 and a part 51a of the passage 51 are half-etched.

  Next, as shown in FIGS. 38 (c) and 39 (c), the through hole 93 and a part 59 a of the opening 59 are half-cut from the surface of the substrate 600 which is the surface of the holding substrate 50 on the common liquid chamber 10 side. Etch. Further, as shown in each figure (d), the slit groove 91 is half-etched. At this time, the passage 51 and the through hole 93 are connected, and the opening 59 penetrates and opens. In the case where a silicon wafer is half-etched from both sides as the substrate 600, wet etching with KOH or the like is preferable.

  The above embodiments can be combined as long as they do not interfere with each other.

  Next, an example of a device for ejecting a liquid according to the present invention including the liquid ejection unit according to the present invention will be described with reference to FIGS. 41 and 42. FIG. 41 is an explanatory side view of the mechanism portion of the apparatus, and FIG. 42 is an explanatory plan view of an essential part of the mechanism portion.

  The apparatus for discharging the liquid is a serial type image forming apparatus. A carriage 433 is held so as to be reciprocally movable in the main scanning direction (arrow direction) by main and sub guide rods 431 and 432 which are guide members horizontally mounted on the left and right side plates 421A and 421B.

  In the carriage 433, two liquid discharge units 430 (430A, 430A, 430A, 430A, 430A) according to the present invention are integrated with a liquid discharge head 434 according to the present invention and a head tank (also referred to as a sub tank) 435 that supplies liquid to the liquid discharge head 434. 430B). The liquid discharge head 434 is mounted with a nozzle row composed of a plurality of nozzles in the sub-scanning direction orthogonal to the main scanning direction and the liquid discharging direction facing downward.

  Here, the liquid discharge head 434 has two nozzle rows. Then, one nozzle row of the liquid discharge head 434 of one liquid discharge unit 430A discharges black (K) liquid, and the other nozzle row discharges cyan (C) liquid.

  In addition, one nozzle row of the liquid discharge head 434 of the other liquid discharge unit 430B discharges magenta (M) liquid, and the other nozzle row discharges yellow (Y) liquid.

  Note that, here, two liquid discharge heads are used to discharge four colors of liquid, but four nozzle rows are arranged in one liquid discharge head, and four liquids are discharged from one liquid discharge head. Each color can also be ejected.

  In addition, “integration” in the liquid discharge units 430A and 430B means that the liquid discharge head 434 and the head tank 435 are fixed directly or via a filter member or the like by a fastening member or an adhesive, or It means that they are connected to each other by tubes.

  A main tank 410 (410k, 410c, 201m, 210y), which is a liquid cartridge of each color, is detachably attached to the cartridge holder 404 on the apparatus main body side. Then, the liquids of the respective colors are fed from the main tanks 410 of the respective colors to the head tanks 435 of the respective liquid discharge units 430A and 430B through the supply tubes 436 of the respective colors by the liquid feeding unit 424 including a liquid feeding pump.

  On the other hand, as a paper feeding unit for feeding the paper 442 stacked on the paper stacking unit (pressure plate) 441 of the paper feed tray 402, a half-moon roller (feeding) that separates and feeds the paper 442 from the paper stacking unit 441 one by one. Paper separation roller 443 and a separation pad 444 facing the paper feeding roller 443.

  Further, a guide 445 for conveying and guiding the fed paper 442, a counter roller 446, a conveyance guide member 447, and a pressing member 448 having a tip pressure roller 449 are provided. Further, a transport belt 451 is provided as a transport unit that sucks the transported paper 442 and transports the transported paper 442 at a position facing the liquid discharge head 434 of the liquid discharge unit 430.

  Here, the conveyance belt 451 is an endless belt, and is configured to be wound around the conveyance roller 452 and the tension roller 453 so as to circulate in the belt conveyance direction (sub-scanning direction). Here, an electrostatic conveyance belt charged by a charging roller 456 that is a charging unit is used as the conveyance belt 451. However, the conveyance belt 451 may be a conveyance belt that is attracted by air suction. Moreover, as a conveyance means, you may convey by two rollers, without using a conveyance belt.

  A separation claw 461 for separating the paper 442 from the transport belt 451, a paper discharge roller 462, and a paper discharge roller 463 are provided on the downstream side of the tension roller 453 around which the transport belt 451 is wound. A paper discharge tray 403 is provided below.

  A double-sided unit 471 is detachably attached to the back surface of the apparatus main body. The duplex unit 471 takes in and reverses the sheet 442 returned by the reverse rotation of the transport belt 451 and feeds it again between the counter roller 446 and the transport belt 451. The upper surface of the duplex unit 471 is a manual feed tray 472.

  Further, a maintenance / recovery mechanism 481 for maintaining and recovering the state of the nozzles of the liquid discharge heads 434 of the liquid discharge units 430A and 430B is disposed in the non-print region on one side in the scanning direction of the carriage 433.

  The maintenance / recovery mechanism 481 includes caps 482a and 482b for capping the nozzle surface of the liquid discharge head 434. The maintenance / recovery mechanism 481 includes a blade member 483 for wiping the nozzle surface. In addition, the maintenance / recovery mechanism 481 includes an empty discharge receptacle 484 for receiving a liquid when performing an empty discharge for discharging a liquid that does not contribute to image formation in order to discharge the thickened liquid.

  In the non-printing area on the other side in the scanning direction of the carriage 433, an empty discharge receiver 488 that receives liquid when empty discharge is performed during image formation or the like is disposed. The idle discharge receptacle 488 includes an opening 489 along the nozzle row direction of the liquid discharge head 434.

  In this image forming apparatus, the paper 442 is separated and fed one by one from the paper feed tray 402, and the paper 442 fed substantially vertically upward is guided by the guide 445, and between the transport belt 451 and the counter roller 446. It is sandwiched and conveyed. Further, the leading edge of the sheet 442 is guided by the conveying guide 437 and pressed against the conveying belt 451 by the leading end pressing roller 449, and the conveying direction is changed by approximately 90 °.

  When the paper 442 is fed onto the charged transport belt 451, the paper 442 is attracted to the transport belt 451, and the paper 442 is transported in the sub-scanning direction by the circular movement of the transport belt 451.

  Therefore, by driving the liquid discharge heads 434 of the liquid discharge units 430A and 430B according to the image signal while moving the carriage 433, liquid is discharged onto the stopped paper 442 to record an image for one line. . Then, after the sheet 442 is conveyed by a predetermined amount, image formation of the next row is performed. Upon receiving a recording end signal or a signal that the trailing edge of the paper 442 has reached the recording area, the recording operation is finished and the paper 442 is discharged onto the paper discharge tray 403.

  As described above, since the image forming apparatus includes the liquid discharge head or the liquid discharge head unit according to the present invention, a high-quality image can be stably formed.

  In the present application, the “apparatus for ejecting liquid” is an apparatus capable of ejecting a liquid to an object to which the liquid can adhere.

  This “device for discharging liquid” is not only a portion for discharging liquid, but also means for feeding, transporting, and discharging a member to which the liquid adheres, and other pre-processing devices and post-processing devices. Devices and the like can be included.

  In addition, the “device for ejecting liquid” includes devices called conventional recording devices, printing devices, image forming devices, droplet ejecting devices, liquid ejecting devices, processing liquid coating devices, three-dimensional modeling devices themselves. It is.

  Further, the “apparatus for ejecting liquid” is not limited to the one in which a significant image such as a character or a figure is visualized by the ejected and adhered liquid. For example, what forms a pattern etc. which does not have a meaning itself, and what forms a three-dimensional image are also included.

  In addition, the above-mentioned “thing to which the liquid adheres” means that the liquid can adhere even temporarily. In place of the term “member to which the liquid adheres”, when an alternative term such as paper, medium, recording medium, recording medium, recording paper, recording paper, powder layer (powder layer) is used, the alternative Unless otherwise specified, the term is intended to include a member to which all liquids adhere.

  Further, the material of the “member to which the liquid adheres” may be any material as long as the liquid such as paper, thread, fiber, fabric, leather, metal, plastic, glass, wood, ceramics can be adhered even temporarily.

  In addition, “liquid” includes ink, processing liquid, DNA sample, resist, pattern material, binder, and the like.

  Further, the “device for ejecting liquid” includes both a serial type device that moves the liquid ejection head and a line type device that does not move the liquid ejection head, unless otherwise specified.

  In addition, the “liquid discharge unit” means a unit in which liquid discharge portions are integrated. For example, the “liquid discharge unit” includes a head tank, a carriage, a supply mechanism, a maintenance mechanism, and a main scanning movement mechanism arbitrarily combined with a liquid discharge head.

  For example, the “liquid discharge unit” includes the liquid discharge head and the head tank described in the above embodiment integrated, the liquid discharge head and the carriage integrated, and the liquid discharge head, the head tank, and the carriage integrated. Things are included.

  In addition, a liquid filter unit in which a filter unit (a filter member and a distribution channel described above are added) is added to these liquid discharge units.

  Also included are those in which the liquid ejection head and the maintenance mechanism are integrated, those in which the liquid ejection head, the maintenance mechanism, and the main scanning movement mechanism are integrated, and those in which the liquid ejection head, the main scanning movement mechanism, and the supply mechanism are integrated. It is.

  The main scanning movement mechanism is configured by combining a carriage, a guide member for guiding the carriage, or a driving source and a carriage movement mechanism. The supply mechanism includes a loading unit on which a main tank is mounted, a tube, a head tank, and the like. The maintenance mechanism is a combination of at least two of a cap, a wiper member, a suction means such as a suction pump leading to the cap, and an idle discharge receiver.

  Furthermore, the “liquid discharge unit” includes a unit constituted by a part excluding a mechanism for transporting a liquid adhering unit from the mechanism unit described in the embodiment.

  The “liquid discharge head” is not limited to the pressure generating means to be used. For example, in addition to the piezoelectric actuator as described in the above embodiment (a multilayer piezoelectric element may be used), a thermal actuator using an electrothermal conversion element such as a heating resistor, a diaphragm and a counter electrode are included. An electrostatic actuator or the like may be used.

  In addition, the terms “image formation”, “recording”, “printing”, “printing”, “printing”, “modeling” and the like in the terms of the present application are all synonymous.

DESCRIPTION OF SYMBOLS 1 Nozzle plate 2 Flow path plate 3 Vibration board member 4 Nozzle 6 Individual liquid chamber 10 Common liquid chamber 11 Piezoelectric element 50 Holding substrate (groove member)
51 passage 54-56 common passage 60 upper channel formation member (lid member)
70 Frame member 90 Filter portion 91 Slit groove 92 Opening portion 93 Through hole 430 Liquid discharge unit 434 Liquid discharge head

Claims (9)

A plurality of nozzles for discharging liquid;
A plurality of individual liquid chambers through which the nozzle communicates;
A common liquid chamber communicating with the plurality of individual liquid chambers,
Between the common liquid chamber and the individual liquid chamber, a filter unit for filtering liquid is disposed,
The filter unit has a plurality of slit grooves arranged in the nozzle arrangement direction,
The slit groove has a width in a short direction that is less than an opening diameter of the nozzle,
The slit groove has an upstream portion facing the common liquid chamber and a downstream portion not facing the common liquid chamber in the longitudinal direction, and the downstream portion communicates with the individual liquid chamber. A liquid discharge head. A groove member forming the slit groove;
And a lid member that covers a downstream portion of the slit groove of the groove member and that has an opening that leads the upstream portion of the slit groove to the common liquid chamber. The liquid discharge head according to 1. The liquid ejection head according to claim 2, wherein the groove member is formed with a common passage through the slit groove adjacent to the downstream portion of the slit groove. The liquid discharge head according to claim 2, wherein a fluid resistance portion is formed in a portion of the slit groove covered with the lid member. The liquid ejection head according to claim 2, wherein the opening of the lid member has a width in a direction perpendicular to the nozzle arrangement direction, and an end side is narrower than a center portion in the nozzle arrangement direction. The wall surface of the opening of the lid member serving as a boundary between the upstream portion and the downstream portion of the slit groove is provided with an inclined surface that is inclined in a direction extending toward the common liquid chamber. The liquid discharge head according to claim 2. A plurality of nozzles for discharging liquid;
A plurality of individual liquid chambers through which the nozzle communicates;
A common liquid chamber communicating with the plurality of individual liquid chambers,
Between the common liquid chamber and the individual liquid chamber, a filter unit for filtering liquid is disposed,
The filter unit has a plurality of slit grooves arranged in the nozzle arrangement direction,
The slit groove has a width in a short direction that is less than an opening diameter of the nozzle,
A part of the slit groove constitutes a through hole that passes through the common liquid chamber and the individual liquid chamber side, and the through hole has a width in a short side direction that is less than an opening diameter of the nozzle, Liquid discharge head.   A liquid discharge unit comprising the liquid discharge head according to claim 1.   An apparatus for ejecting liquid, comprising the liquid ejection head according to claim 1 or the liquid ejection unit according to claim 8.

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