JP2016110060A - Optical unit, optical device and manufacturing method of optical device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an optical unit that has a position adjustment mechanism of an optical element cassette in which the optical element cassette made up of an optical modulation element is exchangeable with respect to the optical unit assembled in an optical device, and an optical axis alignment of the optical modulation element with the optical device can be adjusted even when an external connector is connected to a connector of the optical element cassette.SOLUTION: An optical unit has: a housing; an optical element cassette 30; anchoring means 60 that anchors a position of the optical element cassette; and a position adjustment mechanism that is capable of moving the optical element cassette 30 to be loaded in the housing in a direction vertical to an optical axis of the optical element cassette 30. The optical element cassette comprises: an optical modulation element 31 that is driven by a drive signal; and a connector 33 that is adapted to connect to an external cable 70, and the anchoring means comprises an opening part 62 through which the connector 33 or the external cable 70 is insertable. The opening part 62 has a size of a range where the connector 33 or the external 70 moves due to the position adjustment mechanism.SELECTED DRAWING: Figure 2

Description

  The present invention relates to an optical unit having a light modulation element capable of phase modulation of light and an optical apparatus such as a microscope provided with the optical unit.

Conventionally, an optical device such as a laser microscope or an optical pickup device that detects information such as the shape of an object by irradiating the object with light or causes some change in the object has been used. . In such an optical apparatus, various types of light modulation elements that enable super-resolution and correct wavefront aberration generated in an optical system have been developed.
In addition, such a light modulation element can be easily attached to and removed from the optical device according to the use environment, and as an optical unit in which electrical connection of an external cable for driving the light modulation element is ensured. Is required.

  As a conventional technique for incorporating a light modulation element in an easily replaceable manner, for example, an image display element made of a liquid crystal element is housed in a replacement case, and the connector part of the replacement case is inserted into the connector part of the apparatus body. A liquid crystal projector in which electrical connection and positioning are made is known (for example, see Patent Document 1).

  Therefore, even if a video display element made of a liquid crystal element has deteriorated or failed over time, the user only needs to insert the replacement case connector in accordance with the connector of the apparatus body, and the user can install the replacement case, that is, the liquid crystal element video display element. It is possible to provide a liquid crystal projector that can be easily and easily replaced.

Japanese Patent Laying-Open No. 2005-208488 (page 4, FIG. 2)

  However, in the prior art shown in Patent Document 1, there is no description about adjustment for aligning the optical axis of the optical system of the liquid crystal projector apparatus main body and the optical axis of the image display element made up of liquid crystal elements, and it is installed in the apparatus main body. When the connector of the replacement case is inserted into the connector, electrical connection is made, and at the same time, the position of the replacement case is determined by the position of the connector of the device body, so the accurate optical axis between the liquid crystal element and the device body Cannot be adjusted.

  For this reason, the structure of the replacement case cannot be applied to an apparatus in which the alignment accuracy between the optical axis of the optical system and the optical axis of the liquid crystal element is stricter, such as a laser microscope or an optical pickup device.

  Therefore, the present invention has been made to solve these problems, and the optical axis of the light modulation element can be accurately adjusted even if the connector of the optical element cassette having the light modulation element is connected to the external connector. An optical unit is provided.

  In order to achieve the above object, the optical unit of the present invention employs the configuration described below.

  Position in which the casing, the optical element cassette, the fixing means for fixing the position of the optical element cassette, and the optical element cassette placed in the casing can be moved in a direction perpendicular to the optical axis of the optical element cassette The optical element cassette includes an optical modulation element driven by a drive signal and a connector for connecting to an external cable, and the fixing means can be inserted into the connector or the external cable. The size of the opening is set larger than the range in which the connector or the external cable moves by the position adjusting mechanism so that the connector or the external cable does not come into contact with the fixing means.

  As a result, even if the position of the optical axis of the light modulation element is adjusted, the connector and the external cable are fixed because the fixing means has an opening that secures the movement range of the connector and the external cable that move together. Without interfering with the means, the position adjustment of the optical element cassette is facilitated, and the optical axis can be aligned with high accuracy.

  The position adjustment mechanism may have a first position adjustment unit that performs positioning in a first direction perpendicular to the optical axis.

  This facilitates adjustment of the optical axis position of the optical element cassette.

  The position adjusting mechanism may include a second position adjusting unit that performs positioning in a second direction perpendicular to the optical axis and the first direction.

  Thereby, after the optical element cassette is arranged in the optical unit, the position adjustment of the two-dimensional plane orthogonal to the optical axis can be performed by the first position adjusting means and the second position adjusting means. Axis alignment is possible.

  In addition, at least one of the first position adjusting unit and the second position adjusting unit is in contact with a screw that contacts a predetermined surface in a direction perpendicular to the optical axis of the optical element cassette and a screw of the optical element cassette. A spring having a biasing force in the direction of the surface where the screw abuts on the surface opposite to the surface may be used.

  Accordingly, the position adjustment can be performed by the screw feed amount, and the optical element cassette can be smoothly moved and positioned by the biasing force of the spring, so that the optical axis can be easily adjusted with high accuracy.

  Further, the urging force of the spring of the first position adjusting means and the urging force of the spring of the second position adjusting means may be different from each other.

  Thereby, in the position adjustment of the optical element cassette, the optical axis of the optical element cassette can be adjusted smoothly.

  At least one of the first position adjusting unit and the second position adjusting unit may include a biasing force avoiding unit for temporarily preventing the biasing force of the spring from being applied to the optical element cassette.

  Thereby, the operation | movement which replaces | exchanges an optical element cassette becomes very easy.

  The case may be configured such that the optical element cassette can be taken in and out from a direction perpendicular to the optical axis.

  This facilitates replacement of the optical element cassette.

  The housing may include an attachment / detachment mechanism that is attachable / detachable to / from a predetermined optical system.

  As a result, the optical unit can be easily attached and detached and can be accurately arranged.

  The optical element cassette has a light modulation direction for performing light modulation with respect to a predetermined polarization direction, and the attachment / detachment mechanism is arranged so that the light modulation direction is substantially the same as the linearly polarized light incident on the housing. The attaching / detaching direction may be fixed.

  Thereby, even if the optical unit is attached / detached, it is easy to attach using the attaching / detaching mechanism, the setting position is highly reproducible, and there is no deviation between the light modulation direction and the polarization plane.

  An optical device manufacturing method according to the present invention includes an optical element cassette provided with an optical modulation element driven by a drive signal and a connector for connecting to an external cable, and an optical unit for mounting the optical element cassette inside a housing. And an optical system having an objective lens, a step of connecting the optical unit and the optical system, and a position adjustment mechanism provided in the optical unit, and the optical axis of the objective lens and the optical system. An optical axis adjusting step for aligning the optical axis of the element cassette, a fixing step for fixing the position of the optical element cassette to the housing by a fixing means provided in the optical unit, and a cable or connector provided on the fixing means or an external The position adjustment mechanism prevents the connector or the external cable from coming into contact with the fixing means so that the cable can be inserted. And an external cable connection step for connecting the external cable and the connector through the opening set larger than the moving range of the optical cable, and the optical axis adjustment step is performed by positioning the optical element cassette by the position adjustment mechanism. The optical element cassette is moved in a direction perpendicular to the optical axis of the optical element cassette.

  As a result, the adjustment range of the optical axis position of the optical element cassette is secured by the position adjustment mechanism and the opening of the optical unit, and the optical axis of the optical device and the optical axis of the optical element cassette are easily and accurately aligned. Optical devices can be manufactured.

  As described above, according to the optical unit of the present invention, it is possible to replace an optical element cassette in which a light modulation element capable of obtaining light modulation such as aberration correction and super-resolution of coma aberration, spherical aberration, and tilt aberration is incorporated. Even if an external cable is connected to the connector of the optical element cassette and the optical axis of the optical device and the optical axis of the light modulation element are adjusted to adjust the position of the optical unit through which the connector or external cable passes. Without the interference between the opening and the connector, the movement range of the optical element cassette can be secured and the optical axis can be aligned with high accuracy.

It is a perspective view for demonstrating the optical apparatus with which 1st Embodiment of the optical unit of this invention was integrated. It is a disassembled perspective view of 1st Embodiment of the optical unit of this invention. It is a top view for demonstrating the position adjustment mechanism of 1st Embodiment of the optical unit of this invention. It is a perspective view for demonstrating the manufacturing process of the optical apparatus incorporating 1st Embodiment of the optical unit of this invention. FIG. 5 is a perspective view for explaining a manufacturing process of the optical device in the process subsequent to FIG. 4 described above. FIG. 6 is a perspective view and a front view for explaining a manufacturing process of the optical device in the process subsequent to FIG. 5 described above. FIG. 7 is a perspective view for explaining a manufacturing process of the optical device in the process subsequent to FIG. 6. It is a perspective view which shows the modification of 1st Embodiment of the optical unit of this invention. It is a top view for demonstrating the modification of 1st Embodiment of the optical unit of this invention. It is a perspective view which shows 2nd Embodiment of the optical unit of this invention. It is a perspective view for demonstrating the optical apparatus with which 3rd Embodiment of the optical unit of this invention was integrated. It is a disassembled perspective view of 3rd Embodiment of the optical unit of this invention. It is the partial front view which looked at 3rd Embodiment of the optical unit of this invention from the arrow G of FIG. It is a top view for demonstrating the movement range of an optical element cassette by the optical unit in 3rd Embodiment of the optical unit of this invention.

  The optical unit of the present invention includes a replaceable optical element cassette that is incorporated between the main body of the optical device and the objective lens, and an external cable that is connected to a connector of the optical element cassette fixes the optical element cassette. So that the connector or the external cable can be inserted therethrough and has a sufficiently large opening. This opening has a characteristic feature that the movement range is secured without interfering with a connector or an external cable that moves in conjunction with adjustment of the optical axis position of the optical element cassette.

Hereinafter, an optical unit will be described in detail with reference to the drawings, and a method for manufacturing an optical device including the optical unit will be described in detail.
A first embodiment of an optical unit incorporated in an optical apparatus will be described with reference to FIGS. Next, a method for manufacturing an optical device in which the optical unit of the first embodiment is mounted will be described with reference to FIGS. And the modification of 1st Embodiment of an optical unit is demonstrated using FIG. 8 and FIG. A second embodiment of the optical unit will be described with reference to FIG. A third embodiment of the optical unit will be described with reference to FIGS.

In the first embodiment, an example of the relationship between the connector and the external cable of the optical element cassette and the opening of the fixing means is shown.
In the modification of the first embodiment, a configuration example different from that of the first embodiment is shown in the relationship between the connector of the optical element cassette and the opening of the fixing means.
The second embodiment shows a configuration example in which an attachment / detachment mechanism different from the optical unit of the first embodiment is formed.
In the third embodiment, a configuration example of a position adjusting unit different from the optical unit of the first embodiment is shown.

[Description of Configuration of First Embodiment of Optical Unit: FIGS. 1 to 3]
First, the configuration of the first embodiment of the optical unit will be described with reference to FIGS.
FIG. 1 is a perspective view of an optical device in which an optical unit according to the first embodiment of the present invention is incorporated in an optical system having an objective lens. FIG. 2 is an exploded perspective view for explaining the configuration of the optical unit, and FIG. 3 is a plan view including a partial cross-section for explaining the position adjusting mechanism of the optical unit. In addition, in each figure, the same number is attached | subjected to the same structural member, and the overlapping description is abbreviate | omitted.

FIG. 1 is a perspective view for explaining an optical device 100 in which an optical unit is mounted between an optical device main body and an objective lens. Here, the optical device main body 2 has an optical system in which optical elements such as a light source and a lens are incorporated. Generally, the more complicated the configuration, the larger the size, but in this figure, it is simply shown. Further, the structure of the attachment portion of the objective lens 3 includes, for example, a revolver system, but in this drawing, it is schematically shown partially.

As shown in FIG. 1, the outer shape of the optical unit 1 is formed by a housing 4 including a top lid 20 and a bottom lid 40 and a front lid 61, and an opening 62 through which an external cable 70 is inserted is formed in the front lid 61. Has been. The optical unit 1 is mounted between the objective lens mounting portion (not shown) of the optical device body 2 and the objective lens 3. For example, when the optical device body 2 and the objective lens 3 are configured to be screwed together, the optical unit 1 is the same as the objective lens 3 on the side (upper cover 20 described later) connected to the objective lens mounting portion of the optical device body 2. A male screw is formed, and the same female screw as that of the objective lens mounting portion of the optical device body 2 is formed on the side (lower lid 40 described later) connected to the objective lens 3. That is, the optical device main body 2 and the objective lens 3 are screwed and connected.
Note that the case 4 of the optical unit 1 will be described with a configuration in which the upper lid 20 and the lower lid 40 are separate from each other. However, the configuration is not limited to this configuration, and may be an integrally formed configuration.

Next, the overall configuration of the optical unit 1 of the first embodiment will be described in detail with reference to FIG.
As shown in FIG. 2, the optical unit 1 includes an upper lid 20, an optical element cassette 30, a lower lid 40, a fixing means 60, and an external cable 70. Here, in the three-dimensional XYZ axis, the Z-axis direction is the direction of the central axis 80 of the optical unit 1, the X-axis direction is a first position adjustment direction for adjusting and moving the optical element cassette 30, and the Y-axis is This is the second position adjustment direction for adjusting and moving the optical element cassette 30, and is also the direction in which the optical element cassette 30 is inserted into and removed from the optical unit 1.

The upper lid 20 is formed with a cylindrical portion 21 projecting in the Z-axis direction on the upper surface, and further with a male screw portion 211 on the outer peripheral surface thereof. The male screw portion 211 is screwed with the objective lens mounting portion of the optical device body 2. As a result, the central axis 80 of the cylindrical portion 21 and the central axis of the opening provided in the objective lens mounting portion of the optical device body 2 are coupled coaxially in the Z-axis direction.
In addition, the upper lid 20 is formed with a connecting portion 22 for connecting to a lower lid 40 described later.

The optical element cassette 30 includes a light modulation element 31, a light modulation element holder 32, and a connector 33.
As the light modulation element 31, for example, a liquid crystal element that optically modulates incident light by a drive signal can be used. In order to obtain a drive signal from the outside via a connector 33 described later, it is preferable that the light modulation element 31 is electrically connected to the connector 33 by a cable such as FPC. Further, a single or a plurality of light modulation elements 31 may be used in accordance with the desired light modulation.
The light modulation element holder 32 holds the light modulation element 31 and has an opening at a portion corresponding to the light modulation region of the light modulation element 31.
The connector 33 is fixed to, for example, one end of the light modulation element holder 32 and is connected to the external cable 70 to receive a drive signal from a control device (not shown).
This makes it possible to electrically control light modulation such as wavefront aberration correction and super-resolution of the light modulation element 31.

  The lower lid 40 includes a left side wall 42, a right side wall 43, a rear side wall 44, and a bottom 41 of a U-shaped side wall that can incorporate the optical element cassette 30, and is a front side that is a U-shaped opening. The open end of the lid mounting portion 45 is formed so that the optical element cassette 30 can be taken in and out.

  The lower lid 40 is provided with a plurality of X-axis pressing means 51, an X-axis screw member 52, and a plurality of Y-axis pressing means 53, and an optical device built in with these and a Y-axis screw member 54 described later. The position of the element cassette 30 in the XY plane can be adjusted. Details of the position adjustment method will be described later.

The circular opening 46 formed in the downward direction of the Z axis from the bottom 41 has a female screw portion 411.
Is formed on the inner side, and its central axis is coaxial with the central axis 80 of the upper lid 20 so that the objective lens 3 can be screwed together. The opening 46 described above may be a cylindrical portion protruding downward in the Z axis.

  Here, when the lower lid 40 and the objective lens 3 are screwed together, the male screw portion of the objective lens 3 interferes with the optical element cassette 30 so that the positional adjustment of the optical element cassette 30 described later is not hindered. The length of the screw portion 411 may be longer than the male screw portion of the objective lens, or a partition may be provided between the bottom portion 41 and the opening portion 46.

  The lower lid 40 is formed with a connecting portion 47 for connecting to the above-described upper lid 20 and corresponds to the position of the connecting portion 22 of the above-described upper lid 20. Examples of the connection method between the connection part 22 and the connection part 47 include screwing and a method of press-fitting by forming a convex part on one side and a concave part on the other side.

  As a result, the optical unit 1 composed of the housing 4 formed by the upper lid 20 and the lower lid 40 has an optical device as shown in FIG. 1 by screw connection of the male screw portion 211 and the female screw portion 411 formed in both the upper and lower directions. The main body 2 and the objective lens 3 are arranged and incorporated. Here, when the central axis of the opening of the optical device body 2 and the central axis of the objective lens 3 coincide with the optical axis of the optical system, the optical axis of the optical element cassette 30 is set to the cylindrical portion 21 of the optical unit 1. The optical axis of the entire optical system after incorporating the optical unit 1 can be matched by matching the central axis of the opening 46 and the optical axis of the optical system is the center of the opening of the optical device body 2. The axis and the center axis of the objective lens 3 may be displaced. In such a case, the optical axis can be aligned by adjusting the optical axis of the optical element cassette 30 by the position adjusting means of the optical unit 1 described later.

The fixing means 60 has a configuration in which an opening 62, a Y-axis screw member 54, and a connection portion 63 for connecting to the lower lid 40 are formed in the front lid 61, and a position facing the back side wall 44 in the Y-axis direction. Placed in. The connecting portion 63 is connected to a connecting portion 48 formed on the surface of the front lid attaching portion 45 of the lower lid 40.
Therefore, the optical element cassette 30 is mounted in a space surrounded by the upper lid 20, the lower lid 40 and the fixing means 60.

  The opening 62 is an opening through which the external cable 70 can be inserted to connect the connector 33 of the optical element cassette 30 and the external cable 70, and the size of the opening is adjusted in the position of the optical element cassette 30 in the X-axis direction. In order to prevent the connector 33 moving simultaneously with the optical element cassette 30 from coming into contact with the optical element cassette 30, the connector 33 is formed in a size that covers the moving area.

Next, details of the position adjusting means of the optical element cassette 30 will be described with reference to FIGS.
As shown in FIG. 2, the position adjustment of the optical element cassette 30 in the X-axis direction is performed on the left side wall 42 and the right side wall 43 formed by opposing walls on the U-shaped side wall formed on the lower lid 40. The first position adjusting means for bearing is configured. The first position adjusting means includes, for example, an X-axis pressing means 51 that applies an urging force to the left side wall 42 in the X-axis direction, and the right-side wall 43 is urged by the urging force of the X-axis pressing means 51. The optical element cassette 30 can be translated in the positive and negative directions of the X axis by having an opposing X axis screw member 52 and turning the X axis screw member 52 to the right or left.

The X-axis screw member 52 may be a combination of a screw with a hexagonal hole disposed in the right side wall 43 and an adjustment screw with a pin that fits into the hexagonal hole, and is adjusted after adjusting the position in the X-axis direction. By removing the screw, there is no risk of misalignment due to malfunction, and the position of the optical element cassette 30 in the X-axis direction can be stored. This can also be used for the Y screw member 54 in position adjustment in the Y-axis direction, which will be described later.

  The second position adjusting means is a position adjusting means for adjusting the position of the optical element cassette 30 in the Y-axis direction. The second position adjusting means is in the fixing means 60 facing the back side wall 44 and is biased in the Y-axis direction of the back side wall 44. The Y-axis pressing means 53 for adding and the Y-axis screw member 54 of the fixing means 60. Then, the optical element cassette 30 can be translated in the positive and negative directions of the Y axis by turning the Y axis screw member 54 to the right or left.

  The width W1 of the opening 62 of the front lid 61 is set to a value that is slightly larger than the width W2 of the connector 33 or the width W3 of the external cable 70 than the movement range by the optical axis adjustment of the optical element cassette 30. Therefore, even if the optical element cassette 30 moves in the XY direction, that is, the XY plane in the front, rear, left, and right directions, the opening 62 does not interfere with or collide with the external cable 70 and the connector 33 that move in conjunction with each other. The alignment position can be adjusted.

  Next, the configuration and adjusting method of the position adjusting means of the optical element cassette 30 built in the housing 4 will be described in detail with reference to FIG. FIG. 3 shows an optical modulation element cassette 30 built in the housing 4, first and second position adjusting means for adjusting the optical axis, and an opening 62 through which an external cable 70 connected to the connector 33 is inserted. FIG. 6 is a plan view for explaining the above, and for easy explanation, the top lid 20 is omitted and the front lid 61 is a partial cross-sectional view. Then, as in the coordinate system shown in the figure, the horizontal direction on the paper is the X axis, the vertical direction is the Y axis, and the direction perpendicular to the paper is the Z axis direction.

  As shown in FIG. 3A, the optical element cassette 30 includes a first position adjusting unit including a plurality of X-axis pressing units 51 and an X-axis screw member 52, a plurality of Y-axis pressing units 53, and a Y-axis screw. The urging force and the feed amount of the screw member from each of the second position adjusting means including the member 54 are received by the side surfaces thereof, and are formed to be movable in the X-axis direction and the Y-axis direction.

  A plurality of X-axis pressing means 51 that bear the urging force of the first position adjusting means and are arranged on the left side wall 42 are formed of an X-axis pressing piece 511, an X-axis pressing spring 512, and an X-axis pressing release knob 513. . The X-axis pressing piece 511 receives a biasing force from the X-axis pressing spring 512 and presses the side surface of the light modulation element holder 32. The cylindrical end surface of the X-axis pressing piece 511 that comes into contact with the light modulation element holder 32 is formed into a smooth flat surface or a spherical surface so that the optical element cassette 30 moves smoothly in the Y-axis direction.

  The X-axis screw member 52 disposed on the right side wall 43 that bears the screw feed of the first position adjusting unit is paired with the plurality of X-axis pressing units 51 on the left side wall 42 and contacts the side surface of the light modulation element holder 32. In contact with the urging force of the X-axis pressing means 51, the optical element cassette 30 can be translated in the left-right direction of the X-axis by the screw feed amount of the X-axis screw member 52. .

  The X-axis press release knob 513 is an urging force avoiding means, and makes it easy to put the optical element cassette 30 in and out of the housing 4 of the optical unit 1 and replace it. That is, by pulling the X-axis press release knob 513 in the direction of the arrow A outside the left side wall 42 of the housing 4, the tip of the X-axis press piece 511 is pulled close to the inner side surface of the left side wall 42, and the optical element cassette 30. Thus, it is possible to prevent the optical element cassette 30 from colliding with the X-axis pressing piece 511 and interference. The size of the X-axis press release knob 513 is set so that two fingers can be picked and handled at the same time, and the optical element cassette 30 can be easily inserted and removed.

In the present embodiment, the urging force avoiding means is the X-axis press release knob 513, but it is obvious that a configuration in which two knobs are simultaneously hooked and pulled by a jig having a general simple configuration may be used.

  A plurality of Y-axis pressing means 53 that bear the urging force of the second position adjusting means and are arranged on the back side wall 44 are composed of a Y-axis pressing piece 531 and a Y-axis pressing spring built-in piece 532 that incorporates a Y-axis pressing spring. It is formed. The Y-axis pressing piece 531 receives a biasing force from the Y-axis pressing spring built-in piece 532 and presses the side surface of the light modulation element holder 32. The contact surface of the Y-axis pressing piece 531 with the light modulation element holder 32 forms a smooth flat surface or a spherical surface on the cylindrical end surface similarly to the X-axis pressing piece 511, and the optical element cassette 30 moves in the X-axis direction. Is smooth.

  The plurality of Y-axis screw members 54 of the front lid 61 that bears the screw feed of the second position adjusting means are arranged at positions that balance the urging forces of the plurality of Y-axis pressing means 53, and the side surface of the light modulation element holder 32. The plurality of Y-axis screw members 54 are alternately and gradually screwed to allow the optical element cassette 30 to translate in the front-rear direction of the Y-axis according to the screw feed amount.

  Here, when either one of the urging forces is larger than the other, the optical element cassette 30 is fixed by the position adjusting means with the larger urging force, so the position adjustment in the direction with the smaller urging force is performed. Even if it goes, there is a possibility that the position of the optical element cassette 30 cannot be moved. In particular, even if it is possible to move the screw member in the direction of pushing in, the screw member may not be moved in the direction of opening and pulling in. In such a case, it is preferable to provide an urging force releasing means on the position adjusting means having the larger urging force. With the above-described configuration, the biasing force by the X-axis pressing unit 51 of the first position adjusting unit is set larger than the biasing force by the Y-axis pressing unit 53 of the second position adjusting unit, and adjustment in the Y-axis direction is performed. In this case, the X-axis pressing release knob 513 temporarily releases the urging force in the X-axis direction, so that the position adjustment in the Y-axis direction can be performed smoothly. Since the optical axis adjustment in the X-axis direction is larger than the urging force in the Y-axis direction, it is possible to move without having to release the urging force in the Y-axis direction. Therefore, if the position in the X-axis direction is adjusted after the adjustment in the Y-axis direction, the optical axis adjustment can be performed smoothly without shifting the determined position in the Y-axis direction.

  When the urging force by the Y-axis pressing means 53 is set larger than the urging force by the X-axis pressing means 51, a Y-axis pressing release knob that is an urging force releasing means is provided in the Y-axis direction, and the optical axis adjustment order is also set. After the adjustment in the X axis direction, the position adjustment in the Y axis direction can be performed smoothly. Further, when the magnitude relationship of the urging force of each axis changes according to the environment, a pressing release knob that is an urging force releasing means may be provided on either the X axis or the Y axis.

  As described above, the width W1 of the opening 62 is set so that the connector 33 having the width W2 and the external cable 70 having the width W3 do not come into contact with each other even when the position of the optical element cassette 30 is adjusted. Since it is set to a value slightly larger than the moving range by adjustment and the movable range by the optical axis adjustment of the optical element cassette 30 is secured, the position adjustment of the optical element cassette 30 can be easily performed with high accuracy.

  The movable range by adjusting the optical axis of the optical element cassette 30 described above is such that the side surface of the optical element cassette 30 abuts the left side wall 42 and the right side wall 43 in the X axis direction, and the rear side wall 44 and the front lid 61 in the Y axis direction. Up to the position. In the movement range of the optical element cassette 30, there is nothing that obstructs the movement range in the Y-axis direction, but in the movement range in the X-axis direction, the connector 33 and the external cable 70 that move in conjunction with the optical element cassette 30 and the opening are opened. It is necessary to prevent contact with the portion 62.

FIG. 3B is a view for explaining the movement range in the X-axis direction of the optical axis adjustment of the optical element cassette 30. That is, in FIG. 3A, the optical element cassette 30 is arranged at the substantially center inside the optical unit 1, but in FIG. 3B, the optical element cassette 30 is different from that in the first position adjusting mechanism X. FIG. 5 is an example of moving to the left end by the shaft screw member 52, and is a view for explaining the positional relationship between the connector 33 and the external cable 70 and the opening 62 moved in conjunction with the optical element cassette 30.

As shown in FIG. 3 (b), the optical element cassette 30 translates in the left direction against the urging force of the plurality of X-axis pressing means 51 as the X-axis screw member 52 is rotated to the right. Eventually, the side surface of the optical element cassette 30 comes into contact with the left side wall 42. In order to prevent interference between the connector 33 and the external cable 70 that move in conjunction with the optical element cassette 30 and the opening 62 at the left end position, a gap δ is set.
It goes without saying that the parallel movement of the optical element cassette 30 in the X-axis direction also contributes to the urging forces of the plurality of Y-axis pressing means 53 of the second position adjustment mechanism and the plurality of Y-axis screw members 54.

  Similarly, when the optical element cassette 30 is disposed in contact with the right side wall 43 at the right end opposite to that shown in FIG. 3B, the interference between the connector 33 and the external cable 70 and the opening 62 is similarly prevented. Therefore, a gap δ (not shown) is set. A value twice as large as the gap δ corresponds to a value slightly larger than the moving range by the optical axis adjustment described above.

  That is, in the optical axis adjustment of the optical element cassette 30, even if the optical element cassette 30 moves to the left and right ends in the X-axis direction, the connector 33 and the external cable 70 interlocked with the optical element cassette 30 are connected to the opening 62. Since there is a gap δ between them, the movement range of the optical axis adjustment is ensured without any collision or interference, and the optical element cassette 30 can be easily adjusted with high accuracy.

  Therefore, it is easy to strictly align the optical axis of the optical device and the optical axis of the light modulation element, and aberration correction for coma, spherical aberration, tilt aberration can be performed in an optical device incorporating such an optical unit. It becomes possible to easily impart characteristics such as super-resolution.

[Description of Manufacturing Method of Optical Device with Optical Unit: FIGS. 4 to 7]
Here, the manufacturing method of the optical apparatus provided with the optical unit of the first embodiment according to the present invention will be described with reference to FIGS.
The manufacturing process of this manufacturing method has five stages, a process of connecting the optical unit and the optical system, a process of incorporating the optical element cassette into the optical unit, a fixing process of fixing the position of the optical element cassette to the housing, and the outside An external cable connecting process for connecting the cable and the connector, and an optical axis adjusting process.
In addition, in each figure, the same number is attached | subjected to the same structural member, and the overlapping description is abbreviate | omitted.

First, a process for connecting the optical unit and the optical system will be described with reference to FIGS.
As shown in FIG. 4A, the objective lens 3 is removed from the optical device body 2 and the optical unit 1 is assembled between the two. The optical unit 1 is in the form of a housing 4 in which the upper lid 20 is connected to the lower lid 40 incorporating the X-axis pressing means 51, the X-axis screw member 52, and the Y-axis pressing means by screwing or the like.

  As a result, as shown in FIG. 4B, the optical unit 1 is screwed and connected to the optical device main body 2, and then the objective lens 3 is screwed and connected to the optical unit 1, so that the optical device main body 2 is connected. The optical unit 1 is incorporated in and integrated with the optical system.

Next, the process of incorporating the optical element cassette into the optical unit will be described with reference to FIGS.
As shown in FIG. 5A, the optical element cassette 30 is assembled into the optical unit 1, and the optical element cassette 30 is inserted into the open end of the front lid mounting portion 45 from the arrow B direction, It is placed in a space formed inside. At this time, an X-axis pressing piece 511 (see FIG. 3A) is obtained by an operation of picking the two pressing release knobs 513 serving as the urging force avoiding means with the fingertips and pulling them in the outer direction of the casing 4 (direction of arrow A). Collision and interference between the tip of the optical element cassette 30 and the optical element cassette 30 are prevented, and the optical element cassette 30 can be easily assembled.

  Then, as shown in FIG. 5B, the optical element cassette 30 is inserted into the optical unit 1, and the optical element cassette 30 and its connector 33 are placed in the internal space of the housing 4.

Next, a fixing process for fixing the optical element cassette to the internal space of the housing will be described with reference to FIGS. 6 (a), 6 (b), and 6 (c).
As shown in FIG. 6A, as a fixing process for fixing the optical element cassette 30 to the internal space of the housing 4, the front lid 61 of the fixing means 60 and the front lid mounting portion 45 of the housing 4 are connected. Connection is made by the unit 63 and the connection unit 48. As a connection method, for example, screwing using the connection portion 63 as a screw member and the connection portion 48 as a female screw hole can be used.

  As shown in FIG. 6B, the front lid 61 is screwed to the housing 4, and the optical element cassette 30 is placed in the internal space of the housing 4 by the fixing means 60. It is fixed at the temporary position by the biasing force of the position adjusting means. Inside the opening 62 of the front lid 61, the connector 33 of the optical element cassette 30 is disposed so as to be connectable to an external cable.

  FIG. 6C is a front view of the fixing means of FIG. As described above, the front lid 61 of the fixing means 60 has the opening 62 and has a plurality of Y-axis screw members 54. The width W1 of the opening 62 through which the external cable is inserted is shown with respect to the width W2 of the connector 33 of the optical element cassette. As is apparent from the figure, the width W1 of the opening 62 is set to a value that is slightly larger than the width W2 of the connector 33 than the range of movement of the connector 33 in the left-right direction (X-axis direction) that is interlocked by position adjustment. It is possible to easily adjust the optical axis by preventing contact.

Next, the external cable connection process will be described with reference to FIGS.
As shown in FIG. 7A, the external cable 70 is inserted through the opening 62 from the direction of the arrow D and is inserted into the connector 33 to be electrically connected. FIG. 7B shows an appearance after the external cable 70 and the connector 33 are connected. Then, the light modulation element can be driven by a drive signal from a control device (not shown) connected to one of the external cables 70.

Next, the optical axis adjustment process will be described with reference to FIG.
As shown in FIG. 7B, in the optical axis adjustment step, the X-axis direction is determined by the X-axis screw member 52 of the first position adjustment mechanism, and the Y-axis direction is determined by the Y-axis screw of the second position adjustment mechanism. The member 54 moves the optical element cassette from the temporary position in the XY-axis direction without contact and interference between the opening, the connector, and the external cable, so that the optical axis of the objective lens 3 and the optical axis of the optical element cassette 30 Accurate alignment adjustment is possible.

By incorporating the optical unit 1 of the present invention between the optical device body 2 and the objective lens 3 by the manufacturing process as described above, the optical axis position can be easily adjusted with high accuracy, and wavefront aberration can be corrected, It is possible to provide the optical device with characteristics that enable super-resolution.
The process of incorporating the optical element cassette into the optical unit, the fixing process of fixing the optical element cassette in the internal space of the housing, and the external cable connecting process of connecting the external cable and the connector connect the optical unit and the optical system. You may carry out before a process.

[Description of Configuration of Modification of First Embodiment of Optical Unit: FIGS. 8 and 9]
Next, a modification of the first embodiment of the optical unit described above will be described with reference to FIGS.
FIG. 8A is a perspective view showing the same form as FIG. 6B after the fixing process of fixing the optical element cassette to the internal space of the housing, which is the manufacturing process of the first embodiment, FIG. 8B is a partially enlarged view around the fixing means. FIG. 9 is a plan view in which the upper lid is omitted and the front lid is a partial cross section, similar to FIG. 3 of the first embodiment. In addition, in each figure, the same number is attached | subjected to the same structural member, and the overlapping description is abbreviate | omitted.

  A feature of the modification of the first embodiment is that a configuration in which the connector 33 of the optical element cassette projects from the opening of the optical unit 1 is formed. In other words, in the first embodiment, the connector 33 is disposed on the inner side of the outer surface of the opening 62 of the front lid 61. However, in the modification of the first embodiment, the connector 33 is provided in the opening of the front lid 61. It is characterized by being formed to protrude outward from 62.

  As shown in FIG. 8A, the optical unit 1 is mounted between the optical device main body 2 and the objective lens 3 as in the first embodiment. The optical element cassette built in the optical unit 1 forms a configuration in which the connector 33 protrudes slightly from the embodiment. The upper lid 20 and the lower lid 40 of the optical unit 1 are formed slightly shorter in the Y-axis direction than in the embodiment.

  As a result, the connector 33 is formed so as to protrude outward from the surface of the opening 62 of the front lid 61, so that the connector 33 can be seen well in appearance and connection with the external cable 70 is facilitated.

  As shown in the partially enlarged view of FIG. 8B, the fixing means 60 is formed by a front lid 61, an opening 62, and a plurality of Y-axis screw members 54, as in the first embodiment. The connector 33 protrudes from the outer surface of the opening 62 and is held. Therefore, as described above, it is possible to connect the external cable 70 while looking at the connector 33, and the operation of inserting and connecting the external cable 70 to the connector 33 without connecting by hand is very easy.

  As in the first embodiment, as shown in FIG. 9, in the optical unit 1, the light modulation element cassette 30 includes a first position adjusting unit including an X-axis pressing unit 51 and an X-axis screw member 52, Y By the second position adjusting means comprising the axis pressing means 53 and the Y-axis screw member 54, smooth movement in the XY plane is possible, and alignment adjustment of the optical axis is possible.

  Accordingly, the width W1 of the opening 62 may be set to a value slightly larger than the movement range in the X-axis direction by adjusting the optical axis of the optical element cassette 30 so that the width W2 of the connector 33 does not contact the connector 33. Therefore, it is possible to provide the optical unit 1 having an easy and highly accurate optical axis position adjusting mechanism without considering the width of the external cable.

[Description of Configuration of Second Embodiment of Optical Unit: FIG. 10]
Next, a second embodiment will be described with reference to FIG. The optical unit 1 according to the first embodiment has a male screw portion 211 formed in the cylindrical portion 21 and has a detachable mechanism that can be attached and detached by screwing with the optical device main body 2. On the other hand, in this embodiment, it has the attachment / detachment mechanism which fits with the optical apparatus main body 2 by sliding to a predetermined direction.
Such a configuration is effective for, for example, an optical apparatus such as a confocal laser microscope that acquires a high-resolution two-dimensional image or observes a three-dimensional image using the characteristics of laser light as coherent light. . In order to optically modulate the coherent light of the laser light emitted from such an optical device main body, the polarization direction is matched with the light modulation direction of the light modulation element mounted on the optical unit, and the optical device It is important to match the optical axes of the optical units. This is because the polarization direction of the coherent light emitted from these optical devices is a predetermined direction.

  As shown in FIG. 10A, the optical unit 1 of the second embodiment is attached between the optical device main body 2 and the objective lens 3 as in the first embodiment. The difference is that the optical device main body 2 has an arrhythmia 26, and the optical unit 1 and the optical device main body 2 are attached via an attaching / detaching mechanism 23 provided in the optical unit 1. That is, by inserting and positioning the attachment / detachment mechanism 23 composed of the arigata 24 and the connecting member 25 with respect to the antimizo 26 of the optical device body 2 from the direction of the arrow F, the attachment / detachment of the optical unit 1 is easy and accurate. Placement is possible. Note that the XYZ axes shown in the figure are coordinate axes in exactly the same direction as described in FIG.

By attaching the arigata 24 of the attaching / detaching mechanism 23 to the antimizo 26 of the optical device main body 2, the orientation of the optical device main body 2 and the optical unit 1 is always assembled to be constant.
Therefore, if the polarization direction of the laser light emitted from the optical device main body 2 is known, the light modulation direction of the optical unit 1 can be set in accordance therewith, and can be matched without any adjustment. . For example, as shown in FIG. 10A, if the polarization direction of the laser light of the optical device main body 2 is the groove direction (Y-axis direction) of the arimizo 26, the optical modulation element when incorporated in the optical unit 1 By assembling via the connecting member 25 so that the light modulation direction of the laser beam is aligned with the formation direction (Y-axis direction) of the alligator 24, the polarization direction of the laser light and the light modulation direction of the optical modulation element are easily aligned. be able to.

  Next, as shown in FIG. 10B, the adjustment of the optical axis alignment after the optical unit 1 is attached between the optical device main body 2 and the objective lens 3 via the attaching / detaching mechanism 23 is the first embodiment. In the same manner as the optical axis adjustment step shown in FIG. 7B, the X-axis screw member 52 of the first position adjustment mechanism and the Y-axis screw member 54 of the second position adjustment mechanism The optical element cassette can be moved in the XY-axis direction without the external cable coming into contact with and interfering with each other, so that it is possible to accurately adjust the alignment between the optical axis of the optical device body 2 and the optical axis of the optical element cassette.

  Furthermore, even if the optical unit is attached / detached after the alignment adjustment, it is easy to attach by the attaching / detaching mechanism, and it is possible to provide an optical unit with high reproducibility of the light modulation direction and the optical axis center position after setting.

  In the present embodiment, the optical device main body 2 has been described as having a configuration having the arimizo 26. However, there is a case where the optical device main body 2 does not have a ground groove and has only a female thread portion for screwing. In such a case, a jig having a male screw part and an arbor that can be screwed into the optical device main body 2 may be separately prepared and connected to the optical device main body 2. Accordingly, the optical unit described in the second embodiment can be used for the optical device body.

[Description of Configuration of Third Embodiment of Optical Unit: FIGS. 11 to 14]
Next, a third embodiment will be described with reference to FIGS. The difference from the optical unit 1 of the first embodiment resides in the position adjusting means of the optical element cassette, and only the arrangement and shape of the X-axis screw member and the Y-axis screw member are different. That is, the screw member for adjusting the optical axis is provided on the side wall of the optical unit 1 containing the optical element cassette in the first embodiment, but is provided in the optical element cassette in the third embodiment. Is different.

FIG. 11 is a perspective view of an optical device in which an optical unit according to the third embodiment of the present invention is incorporated in an optical system having an objective lens, as in FIG. FIG. 12 is an exploded perspective view for explaining the configuration of the optical unit, as in FIG. FIG. 13 is a front view seen from the arrow G in FIG. 11 for explaining the screw member of the position adjusting mechanism of the optical unit. FIG. 14 is a plan view for explaining the position adjustment mechanism of the optical unit, as in FIG.
In addition, the same number is attached | subjected to the same structural member as 1st Embodiment, and the overlapping description is abbreviate | omitted.

  As shown in FIG. 11, the optical unit 1 of the third embodiment is screwed between the optical device main body 2 and the objective lens 3 to form the optical device 100, as in the first embodiment. doing. In the third embodiment, the lower lid 40 has an X-axis long hole 49, and the front lid 61 has two Y-axis long holes 64. The X-axis screw member 52 and the Y-axis screw member in the first embodiment 54 is formed in place of the arranged position. The X-axis long hole 49 and the Y-axis long hole 64 have dimensions that allow an adjustment driver 71 to rotate the X-axis screw member 55 and the Y-axis screw member 56 (see FIG. 12 described later) to pass therethrough. Is formed.

Next, the overall configuration of the optical unit 1 of the third embodiment will be described in detail with reference to FIG.
As shown in FIG. 12, the optical unit 1 of the third embodiment has basically the same configuration as that of the first embodiment shown in FIG. 2, and has an upper lid 20, an optical element cassette 30, a lower lid 40, and fixing means 60. And it is comprised with the external cable 70, and description is abbreviate | omitted about the overlapping structural member.

  Corresponding to the X-axis long hole 49 and the two Y-axis long holes 64 described above, the X-axis of the first position adjusting mechanism is provided on the side wall of the light modulation element holder 32 of the optical element cassette 30 built in the optical unit 1. A screw member 55 and two Y-axis screw members 56 of the second position adjusting mechanism are formed. As the X-axis screw member 55 and the Y-axis screw member 56, it is desirable to employ an ultra-low-head hexagon socket head screw with a thin screw head.

  Here, the three-dimensional XYZ axes are the same as those in FIG. 2, the X and Y axis directions are the first and second position adjustment directions of the optical element cassette 30, respectively, and the Z axis direction is the center of the optical unit 1. It corresponds to the direction of the axis 80. The first position adjusting means presses the optical element cassette 30 in the X-axis direction by the X-axis pressing means 51 disposed on the left side wall 42 so that the screw head of the X-axis screw member 55 contacts the right side wall 43. Thus, the position in the X-axis direction is determined.

  Then, the adjustment driver 71 is inserted into the hexagon hole of the X-axis screw member 55 through the X-axis long hole 49 formed in the right side wall 43 and rotated clockwise or counterclockwise. By changing the protrusion amount of the head from the side wall of the light modulation element holder 32, the optical element cassette 30 can be reciprocated in the X-axis direction (first position adjustment direction).

  Since the second position adjusting means in the Y-axis direction has the opening 62 of the connector 33 at the center, the Y-axis screw member 56 balances the force and is arranged at two locations. Then, the Y-axis direction of the optical element cassette 30 is obtained by pressing the Y-axis screw member 56 in the Y-axis direction by the Y-axis pressing means 53 disposed on the back side wall 44 so that the screw head contacts the front lid 61. The position of is determined.

  Then, the two adjustment drivers 71 are fitted into the hexagonal holes of the Y-axis screw member 56 through the two Y-axis long holes 64 formed in the front lid 61, and rotated clockwise or counterclockwise. By changing the protruding amount of the screw head of the shaft screw member 55 from the side wall of the light modulation element holder 32, the optical element cassette 30 can be reciprocated in the Y-axis direction (second position adjustment direction). Become.

Therefore, the optical axis of the light modulation element 31 and the optical axis of the optical device 100 are adjusted by the protruding amount of the X-axis screw member 55 of the first position adjusting unit and the Y-axis screw member 56 of the second position adjusting unit. It becomes possible to do. In addition, since the X-axis screw member 55 and the Y-axis screw member 56 are integrated and integrated into the optical element cassette 30 having the light modulation element 31, the amount of protrusion is position data that matches the optical axis alignment.

  In other words, the optical element cassette 30 holds the optical axis position data of the light modulation element 31 with the protruding amounts of the X-axis screw member 55 and the Y-axis screw member 56 only by adjusting the optical axis at the first time of assembly. Thus, even if the optical element cassette 30 is inserted and removed, the optical axis alignment is reproducible and readjustment is not necessary.

  Further, the clamp screw 57 is provided so that the X-axis screw member 55 and the Y-axis screw member 56 can be fixed from the upper surface of the light modulation element holder 32, and after the optical axis alignment adjustment, the X-axis screw member 55 and the Y-axis screw member. By screwing and tightening to 56, the amount of protrusion is reliably fixed, and further, it is possible to provide the optical element cassette 30 with reliable reproducibility.

13 is a diagram for explaining the positional relationship between the X-axis screw member 55 and the X-axis long hole 49 of the right side wall 43 of the lower lid, and is a partial front view as seen from the arrow G in FIG. .
As shown in FIG. 13, the slit width W4 of the X-axis long hole 49 is narrower than the flat portion 552 of the screw head of the X-axis screw member 55 and slightly smaller than the thickness of the adjustment driver 71 fitted in the hexagon hole 551 of the screw head. Large dimensions are set. Therefore, the force received from the X-axis pressing means can be stably received by the flat portion 552 of the screw head. The length of the X-axis long hole 49 is set to be slightly longer than the moving distance of the optical element cassette 30 in the Y-axis direction. Therefore, the X-axis screw member 55 can be adjusted regardless of the protruding amount of the Y-axis screw member 56.
This configuration is similarly formed with respect to the Y-axis screw member 56 and the Y-axis long hole 64 of the front lid 61.

FIG. 14 is a plan view of the optical unit 1 when the adjustment screwdriver 71 is turned counterclockwise so that the left side surface of the optical element cassette 30 contacts the left side wall 42 to project the X-axis screw member 55. .
As shown in FIG. 14, as in FIG. 3B, the optical element cassette 30 is at a position close to the left end, and the connector 33 and the external cable 70 that move in conjunction with the optical element cassette 30 are opened. It shows that the gap δ is set between the parts 62 in order to prevent interference.
That is, just as in the first embodiment, the optical axis adjustment moving range is ensured, the optical element cassette 30 can be easily adjusted with high precision, and the optical element cassette has reproducibility in optical axis alignment. Can be provided. The adjustment driver 71 may remain connected to adjust the protruding amount of the X-axis screw member 55 or the Y-screw member 56, but may be removed because it is unnecessary after the optical axis alignment.

  As described above, the optical apparatus according to a preferred embodiment of the present invention has been described with reference to an optical apparatus for a microscope with a strict optical axis adjustment, but in addition, an optical apparatus having an optical system such as an optical pickup, a fundus examination apparatus (OCT), or a projector. It is applicable to.

  The present invention is not limited to the above-described embodiments and modifications of the optical device, and it is not necessary to perform all of them, and variously within the scope of the contents described in the claims. It goes without saying that changes and omissions can be made.

DESCRIPTION OF SYMBOLS 1 Optical unit 2 Optical apparatus main body 3 Objective lens 4 Housing | casing 20 Upper cover 21 Cylindrical part 22,47,48,63 Connection part 23 Detachment mechanism 24 Arigata 25 Connecting member 26 Arimiso 30 Optical element cassette 31 Light modulation element 32 Light modulation element holder 33 Connector 40 Lower lid 41 Bottom 42 Left side wall 43 Right side wall 44 Back side wall 45 Front lid mounting part 46 Opening 49 X-axis long hole 51 X-axis pressing means 52, 55 X-axis screw member 53 Y-axis pressing means 54, 56 Y Shaft screw member 60 Fixing means 61 Front lid 62 Opening portion 64 Y-axis long hole 70 External cable 71 Adjustment driver 80 Center shaft 100 Optical device 211 Male screw portion 411 Female screw portion 511 X-axis pressing piece 512 X-axis pressing spring 513 X-axis Press release knob 531 Y-axis pressing piece 532 Y-axis pressing spring built-in piece

Claims (11)

A housing,
An optical element cassette;
Fixing means for fixing the position of the optical element cassette;
A position adjustment mechanism capable of moving the optical element cassette placed in the housing in a direction perpendicular to the optical axis of the optical element cassette,
The optical element cassette includes a light modulation element driven by a drive signal and a connector for connecting to an external cable,
The fixing means includes an opening through which the connector or the external cable can be inserted,
The size of the opening is set to be larger than the range in which the connector or the external cable moves by the position adjusting mechanism so that the connector or the external cable does not contact the fixing means. unit. The optical unit according to claim 1, wherein the position adjustment mechanism includes a first position adjustment unit that performs positioning in a first direction perpendicular to the optical axis. The optical unit according to claim 2, wherein the position adjustment mechanism includes a second position adjustment unit that performs positioning in a second direction perpendicular to the optical axis and the first direction. At least one of the first position adjusting means and the second position adjusting means includes a screw that contacts a predetermined surface in a direction perpendicular to the optical axis of the optical element cassette, and the optical element cassette. 4. The optical unit according to claim 2, wherein the optical unit is a spring having a biasing force in a direction of a surface against which the screw abuts on a surface opposite to a surface against which the screw abuts. 5. The optical unit according to claim 4, wherein an urging force of the spring of the first position adjusting unit and an urging force of the spring of the second position adjusting unit are different from each other. At least one of the first position adjusting unit and the second position adjusting unit includes a biasing force avoiding unit for temporarily preventing the biasing force of the spring from being applied to the optical element cassette. The optical unit according to claim 4 or 5. The optical unit according to any one of claims 1 to 6, wherein the housing is configured to allow the optical element cassette to be taken in and out from a direction perpendicular to the optical axis. The optical unit according to any one of claims 1 to 7, wherein the housing includes an attachment / detachment mechanism that is attachable to and detachable from a predetermined optical system. The optical element cassette has a light modulation direction for performing light modulation with respect to a predetermined polarization direction,
The optical unit according to claim 8, wherein the attachment / detachment direction of the attachment / detachment mechanism is fixed so that the light modulation direction is substantially the same as the linearly polarized light incident on the housing. . An optical unit according to any one of claims 1 to 9 and an optical system having an objective lens, wherein the position adjustment mechanism is configured such that an optical axis of the objective lens and an optical axis of the optical element cassette are An optical device characterized in that the optical element cassette can be moved so as to match. An optical element cassette including a light modulation element driven by a drive signal and a connector for connecting to an external cable;
An optical unit for placing the optical element cassette in a housing;
An optical system having an objective lens;
A method of manufacturing an optical device comprising:
Connecting the optical unit and the optical system;
An optical axis adjusting step for aligning the optical axis of the objective lens and the optical axis of the optical element cassette by a position adjusting mechanism provided in the optical unit;
A fixing step of fixing the position of the optical element cassette to the housing by a fixing means provided in the optical unit;
The position adjusting mechanism is configured so that the connector or the external cable provided in the fixing means can be inserted into the external cable or the connector, and the connector or the external cable is not in contact with the fixing means. An external cable connecting step of connecting the external cable and the connector through the opening set larger than the range in which the connector or the external cable moves by the optical axis adjusting step, A method for manufacturing an optical device, wherein the optical element cassette is moved in a direction perpendicular to the optical axis of the optical element cassette by an adjustment mechanism.

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