JP2016087915A - Printer and printing method for electronic device pattern - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a printer and a printing method by which printability of a pattern of an electronic device can be improved in the case that printing of plural times is performed on a surface of a printed body.SOLUTION: A printer for an electronic device pattern has: a table Tw which loads a work plate Pw thereon while holding the work plate; a roller Bk on a surface of which a liquid film is formed; a moving mechanism which relatively moves the table Tw thereby coating the work plate Pw with the liquid film; analysis means 20 for analyzing a shape of the work plate Pw; and drive control means 30 which controls a position and drive of the roller Bk on the basis of the analysis result analyzed by the analysis means 20. The analysis means 20 calculates any one of a shift amount, a magnification ratio, an orthogonal degree and a rotation amount concerning deformation of the work plate Pw as a strain amount of the work plate Pw on the basis of the detection result of the shape of the work plate Pw, and calculates a correction value which controls any one of a position and a rotational speed of the roller Bk on the basis of the calculated strain amount, and the drive control means 30 controls the roller Bk on the basis of the calculated correction value.SELECTED DRAWING: Figure 1

Description

  The present invention relates to an electronic device pattern printing apparatus and a printing method thereof.

  As a method for forming a pattern of an electronic device, a printing method has been proposed. In recent years, the pattern of an electronic device has been required to have high dimensional accuracy, for example, as the pixels of a liquid crystal display become finer. As a printing method capable of printing a pattern having high dimensional accuracy, a reverse printing method is used. Has been proposed (see, for example, Patent Document 1).

  In Patent Documents 2 and 3, as a reverse printing method, first, ink is applied to the surface of a roller transfer cylinder (roller), and then the roller transfer cylinder is rotated on a letterpress (master plate) to remove a part of the ink. Then, a technique is disclosed in which the ink remaining on the surface of the roller transfer cylinder is transferred to a substrate to be printed (work plate).

JP-A-4-279349 JP-A-11-58921 Japanese Patent No. 3689536

  However, Patent Document 1 does not describe a method in which another process (for example, a heating process) is performed after printing on the surface of the printing medium, and then further printing is performed on the surface of the printing medium. Further, in the technique disclosed in Patent Document 1, when a printing process is performed after printing on the surface of the printing medium, for example, when the printing medium is deformed by heating, a pattern corresponding to the deformation is further provided. You may not be able to print. That is, in the technique disclosed in Patent Document 1, when printing is performed a plurality of times on the surface of the printing object, there may be a case where high dimensional accuracy required for printing the pattern of the electronic device cannot be realized.

  SUMMARY OF THE INVENTION In view of the above circumstances, an object of the present invention is to provide an electronic device pattern printing apparatus or a printing method thereof in the case where printing is performed a plurality of times on the surface of a substrate.

  According to one aspect of the present invention, there is provided an electronic device pattern printing apparatus, comprising: a holding member that holds the work plate; a table on which the holding member is mounted; a roller having a liquid film formed on a surface; Based on the moving mechanism for applying the liquid film to the work plate by relatively moving the table, the analysis means for analyzing the shape of the work plate, and the analysis result analyzed by the analysis means, Drive control means for controlling the position and drive of the roller to perform printing, and the analysis means uses the detection result of detecting the shape of the work board as a distortion amount of the work board. Calculate any one of the shift amount, magnification, orthogonality or rotation amount related to the deformation, and calculate a correction value for controlling either the roller position or the rotation speed based on the calculated distortion amount , The drive control means, on the basis of the calculated correction value, and controls the rollers, the printing device of the electronic device pattern.

  According to another aspect of the present invention, there is provided an electronic device pattern printing apparatus, a holding member for holding the work plate, a table for mounting the holding member, a roller having a liquid film formed on a surface thereof, Based on the moving mechanism for applying the liquid film to the work plate by relatively moving the table, the analysis means for analyzing the shape of the work plate, and the analysis result analyzed by the analysis means, Drive control means for controlling the position and drive of the roller to perform printing, and the analysis means uses the detection result of detecting the shape of the work board as a distortion amount of the work board. A shift amount, a magnification, an orthogonality, and a rotation amount relating to the deformation are calculated, a correction value for controlling any one of the roller position and the rotation speed is calculated based on the calculated distortion amount, and the drive control is calculated. It means, on the basis of the calculated correction value, and controls the rollers, the printing device of the electronic device pattern.

  According to another aspect of the present invention, there is provided an electronic device pattern printing method in which a liquid film on a surface of a roller is partially removed with a relief plate to form a reverse pattern, and then the reverse pattern is transferred to a work board. An analysis step for analyzing the shape of the workpiece plate, a relief plate holding step for holding the relief plate with a first table, a workpiece plate holding step for holding the workpiece plate with a second table, and holding the relief plate Moving the first table below the roller and partially removing the liquid film at the convex portion on the surface of the relief plate; and the second table holding the work plate, A pattern printing step that moves below the roller and transfers the reverse pattern to the surface of the work plate, and the analysis step detects the shape of the work plate. Based on the output result, calculate any one of shift amount, magnification, orthogonality or rotation amount related to deformation of the workpiece plate as the distortion amount of the workpiece plate, and the position of the roller based on the calculated distortion amount Alternatively, a correction value for controlling any one of the rotational speeds is calculated, and the pattern printing step further includes a drive control step for controlling the roller based on the calculated correction value. An electronic device pattern printing method is provided.

  The present invention may be a program for causing a computer to execute the above electronic device pattern printing method. The present invention may be a recording medium on which the program is recorded.

  According to the electronic device pattern printing apparatus or the printing method thereof according to the present invention, it is possible to improve the printability of the pattern of the electronic device when printing is performed a plurality of times on the surface of the substrate.

1 is a schematic external view illustrating an example of an electronic device pattern printing apparatus according to an embodiment of the present invention. It is explanatory drawing explaining the printing method of the printing apparatus of the electronic device pattern which concerns on embodiment of this invention. It is a schematic external view explaining an example of the detection means of the printing apparatus of the electronic device pattern which concerns on embodiment of this invention. It is explanatory drawing explaining an example of the calibration pattern used for the printing apparatus of the electronic device pattern which concerns on embodiment of this invention. It is explanatory drawing explaining the example of the distortion amount which the analysis means of the printing device of the electronic device pattern which concerns on embodiment of this invention calculates. It is explanatory drawing explaining the example of the adjustment parameter which the analysis means of the printing device of the electronic device pattern which concerns on embodiment of this invention calculates. It is a flowchart explaining an example of operation | movement of the printing apparatus of the electronic device pattern which concerns on embodiment of this invention. It is explanatory drawing explaining an example of the analysis result (distortion amount) of the analysis means of the printing device of the electronic device pattern which concerns on embodiment of this invention. It is explanatory drawing explaining an example of the correction result (shift amount) of the analysis means of the printing apparatus of the electronic device pattern which concerns on embodiment of this invention. It is explanatory drawing explaining an example of the correction result (shift amount and rotation amount) of the analysis means of the printing apparatus of the electronic device pattern which concerns on embodiment of this invention. It is explanatory drawing explaining an example of the correction result (shift amount, rotation amount, and orthogonality) of the analysis part of the printing apparatus of the electronic device pattern which concerns on embodiment of this invention. It is explanatory drawing explaining an example of the correction result (shift amount, rotation amount, orthogonality, and Y-axis magnification) of the analysis means of the electronic device pattern printing apparatus according to the embodiment of the present invention. It is explanatory drawing explaining an example of the correction result (shift amount, rotation amount, orthogonality, Y-axis magnification, and X-axis magnification) of the analysis means of the electronic device pattern printing apparatus according to the embodiment of the present invention. It is a flowchart figure explaining an example of operation | movement of the electronic device pattern printing apparatus which concerns on Example 1 of this invention. It is a flowchart explaining an example of operation | movement of the printing apparatus of the electronic device pattern which concerns on the modification 1 of Example 1 of this invention. It is a flowchart explaining an example of operation | movement of the printing apparatus of the electronic device pattern which concerns on the modification 2 of Example 1 of this invention. It is explanatory drawing explaining an example of operation | movement of the printing apparatus of the electronic device pattern which concerns on Example 2 of this invention. It is a flowchart explaining an example of operation | movement of the printing apparatus of the electronic device pattern which concerns on Example 2 of this invention. It is a flowchart figure explaining an example of operation | movement of the electronic device pattern printing apparatus which concerns on Example 3 of this invention. 1 is a schematic external view illustrating an example of a blanket structure of an electronic device pattern printing apparatus according to an embodiment of the present invention. It is a schematic external view explaining an example of the blanket body tension | tensile_strength attachment mechanism of the printing apparatus of the electronic device pattern which concerns on embodiment of this invention. It is a figure for demonstrating the roller external shape of the printing apparatus of the electronic device pattern which concerns on embodiment of this invention. It is a flowchart figure explaining an example of blanket exchange attachment operation in the printing device of the electronic device pattern concerning the embodiment of the present invention. It is a figure for demonstrating the stress which generate | occur | produces with a tension | pulling or a compressive force.

  The present invention will be described using an electronic device pattern printing apparatus (hereinafter referred to as a “printing apparatus 100”) according to a non-limiting exemplary embodiment with reference to the accompanying drawings. The present invention is not limited to the printing apparatus 100 described below, and transfers a pattern formed on the surface of a roller (for example, a roller transfer cylinder) to a predetermined surface (for example, a work plate) (apparatus, apparatus, unit, system, etc.) ) As long as it can be used.

In the following description, the same or corresponding devices, parts, or members described in all the attached drawings are denoted by the same or corresponding reference numerals, and redundant description is omitted. Also, the drawings are not intended to show a limited relationship between devices, parts or members unless specifically described. Accordingly, specific correlations can be determined by one skilled in the art in light of the following non-limiting embodiments.
<First Embodiment>
The printing apparatus 100 according to the first embodiment of the present invention will be described in the following order.

1. Configuration of printing apparatus (FIGS. 1 and 2)
2. Detection means (FIGS. 3 and 4)
3. Analysis means 3-1 Calculation of distortion amount (FIG. 5)
3-2 Calculation of correction value (Fig. 6)
4). Example of operation of printing apparatus (FIGS. 7 to 13)
5. Program and recording medium Example 1 (example of printing apparatus, FIGS. 14 to 16)
7). Example 2 (example of printing apparatus for further adjusting misalignment, FIGS. 17 and 18)
8). Example 3 (example of printing apparatus for further determining replacement time, FIG. 19)
[1. Configuration of printing device]
A printing apparatus 100 according to the present embodiment will be described with reference to FIGS. 1 and 2. Here, FIG. 1 is a schematic external view for explaining an example of the printing apparatus 100. FIG. 2 is an explanatory diagram for explaining a printing method of the printing apparatus 100. The printing apparatus 100 shown in FIG. 1 is an example, and the printing apparatus according to the present invention is not limited to the one shown in FIG.

  In FIG. 1, the X direction is the direction in which the table is moved (the transfer direction of a master table Tm and work table Tw described later). The Y direction is a direction orthogonal to the X direction, and is a width direction of the master table Tm or the like. The Z direction is a vertical direction (a direction orthogonal to the X direction and the Y direction). The θ direction is a rotation direction around the Z axis.

  The printing apparatus 100 is an apparatus that uses a method (reverse printing method) in which a liquid film on the surface of a roller is partially removed with a relief plate to form a reversal pattern, and then the reversal pattern is transferred to a work board. That is, the printing apparatus 100 forms a reverse pattern on the surface of the roller by synchronizing the rotation operation of the roller and the rectilinear operation of the relief printing plate (master plate), and the rotation operation of the roller and the rectilinear operation of the work plate (printed body). Are printed (transferred) on the substrate to be reversed.

  The printing apparatus 100 can be used as a printing machine, for example, when manufacturing a pattern of an electronic device (printed electronics device or the like). Further, the printing apparatus 100 can be used as a semiconductor manufacturing apparatus that is used, for example, when a pattern such as line and space is formed on a substrate (substrate) in a semiconductor manufacturing process. The line and space can be formed, for example, by printing silver nano ink.

  As shown in FIG. 1, the printing apparatus 100 forms a roller (roller transfer cylinder, transfer roller, etc.) Bk that is rotatably supported by a roller support Bkp, and a liquid film (for example, an ink film) on the surface of the roller Bk. An ink coater Ict. Further, the printing apparatus 100 includes a master table (first table) Tm that holds a relief plate Pr that forms a reverse pattern, and a work table (second table) Tw that holds a work plate Pw onto which the reverse pattern is transferred. .

  Further, the printing apparatus 100 analyzes the shape of the work board Pw based on the detection means 10 (11, 12) for detecting the shape of the work board Pw held on the work table Tw and the detection result detected by the detection means 10. Analyzing means 20 for performing. Note that the printing apparatus 100 according to the present invention may be configured to input a detection result (the shape of the work plate Pw) performed outside the printing apparatus 100 instead of including the detection unit 10. The printing apparatus 100 according to the present invention may be configured to include any one of the first detection unit 11 or the second detection unit 12 as the detection unit 10.

  Furthermore, the printing apparatus 100 includes a drive control unit 30 (movement correction unit 31M, rotation correction unit 31R, and magnification correction unit 31E, which will be described later), a master table Tm, and a work table Tw that control the operation (rotation and the like) of the roller Bk. And guide mechanisms Gd that respectively move below the roller Bk (X direction in the drawing). Here, the master table Tm and the work table Tw may be configured to be detachable from the guide mechanism Gd.

  The printing apparatus 100 includes a cleaning unit for cleaning the relief printing plate Pc, an organic cleaning of the surface, an ionized air flow, a surface energy adjustment mechanism such as a UV irradiator, and a workpiece on the downstream side with respect to the conveying direction of the roller Bk. A configuration provided with a fixing device (heating means) for fixing the pattern printed on the plate may be used.

  As shown in FIG. 2A, in this embodiment, the printing apparatus 100 rotates the roller Bk using the drive control unit 30, and uses the ink coater Ict to apply the liquid (ink) in the ink tank Itk to the roller Bk. Supply to the surface. Specifically, the printing apparatus 100 sets a predetermined distance between the tip of the ink coater Ict and the surface of the roller Bk, rotates the roller Bk in the direction Ra in the drawing, and forms a desired region on the surface of the roller Bk. A liquid (ink) is supplied at a desired film thickness. At this time, the printing apparatus 100 forms the liquid film PTa on the surface of the roller Bk.

  Next, as shown in FIG. 2B, the printing apparatus 100 moves the relief printing plate Pr in the X direction (Mb in the drawing) using the guide mechanism Gd, and the roller Bk that rotates in the Rb direction in the drawing. The convex portions Pra of the relief plate Pr are sequentially brought into contact with the surface. At this time, the liquid film PTa on the surface of the roller Bk is partially removed. That is, the printing apparatus 100 forms the reverse pattern PTb on the surface of the roller Bk.

  Next, as shown in FIG. 2C, the printing apparatus 100 moves the work plate Pw in the X direction (Mc in the drawing) using the guide mechanism Gd, and the roller Bk that rotates in the Rc direction in the drawing. The reverse pattern PTb on the surface is brought into contact with the surface of the work plate Pw. At this time, the reverse pattern PTb is transferred to the surface of the work plate Pw. That is, the printing apparatus 100 forms the pattern PTc on the surface of the work board Pw (printed body).

  As a result, the printing apparatus 100 can print (transfer) a desired pattern (PTc) on the substrate to be printed (the surface of the work board Pw).

  The roller Bk is a rotating body that transfers the reverse pattern PTb to the work plate Pw. The roller Bk is rotatably supported on the rotation shaft 31r (FIG. 1). In the roller Bk, the reverse pattern PTb is formed on the surface of the roller Bk by the relief plate Pr.

  In this embodiment, the roller Bk uses a cylinder in which a silicone water-repellent blanket Bks (FIG. 2) is wound around the outer periphery of the roller Bk. The roller Bk may have a configuration in which a resin sheet (for example, a silicone resin sheet) is wound around a metal cylindrical body (for example, an elastic body made of polyurethane).

  Further, the roller Bk according to the present invention is controlled asynchronously with the rectilinear operation of the relief printing plate Pr and the work plate Pw using a pinion, a clutch, a speed reducer (not shown) or the like. Specifically, the driving and position of the roller Bk are controlled by the control of the drive control unit 30 based on the correction value determined using the distortion amount calculated from the shape of the work plate Pw. The roller Bk is rotated around the rotation shaft 31r in synchronization or asynchronously with the rectilinear operation of the relief printing plate Pr and the work plate Pw, for example, by driving of the rotation correction unit 31R (drive control unit 30). In addition, the roller Bk indicates the position of the rotation shaft 31r in synchronization with or asynchronously with the rectilinear operation of the relief printing plate Pr and the work plate Pw, for example, by driving the movement correction unit 31M and / or the magnification correction unit 31E (drive control unit 30). 1 is moved in the X, Y, and Z directions.

  The amount of distortion and the correction value for controlling the operation of the roller Bk will be described later [3. Analysis means]. An example of the operation in which the roller Bk is controlled based on the distortion amount and the correction value will be described later [4. Example of operation of printing apparatus] and an example.

  The relief plate Pr is a plate (such as a master plate) having an uneven surface shape. As the relief Pr, a flat plate is used in this embodiment. Further, the relief plate Pr is placed on the master table Tm. Further, the relief plate Pr is moved in the X direction (FIG. 2) by the guide mechanism Gd while being placed on the master table Tm.

  The relief plate Pr is formed with a projection portion Pra corresponding to the reverse pattern of the pattern printed on the work plate Pw on the surface thereof. In addition, the letterpressor Pr partially removes the liquid (ink) from the liquid film (PTa in FIG. 2) on the surface of the roller Bk by bringing the convex part Pra into contact with the surface of the roller Bk. PTb).

  The work board Pw is a substrate to be printed on which a pattern is formed. For the work plate Pw, for example, a plate-like, film-like or sheet-like printed material is used. The work plate Pw is placed on the work table Tw. Further, the work plate Pw is moved in the X direction (FIG. 2) by the guide mechanism Gd while being placed on the work table Tw.

  A reverse pattern (PTb in FIG. 2) formed on the surface of the roller Bk is transferred to the work plate Pw. That is, a desired pattern (PTc in FIG. 2) is printed on the work plate Pw.

  The master table Tm is for placing the relief plate Pr and fixing the relief plate Pr. The master table Tm fixes the relief Pr using, for example, a porous chuck or a vacuum chuck. Further, the master table Tm is moved in the transport direction (X direction in FIG. 1) by the guide mechanism Gd with the relief Pr being fixed.

  The work table Tw has a work plate Pw mounted thereon and fixes the work plate Pw. As with the master table Tm, the work table Tw fixes the work plate Pw using, for example, a porous chuck or a vacuum chuck. Further, the work table Tw is moved in the transport direction (X direction in FIG. 1) by the guide mechanism Gd with the work plate Pw fixed.

  Note that the master table Tm and the work table Tw are the X direction, the Y direction, the Z direction, the rotation direction with the X direction as the axis, and the rotation direction with the Y direction as the axis. Also, a configuration in which a mechanism (not shown) that can be finely moved in the θ direction may be incorporated. Thereby, the master table Tm and the work table Tw can adjust the positional deviation of the relief plate Pr or the work plate Pw.

  The detection means 10 is a means for detecting the shape of the work plate. As illustrated in FIG. 1, the detection unit 10 includes a first detection unit 11 and a second detection unit 12 in the present embodiment. The 1st detection part 11 and the 2nd detection part 12 can use the well-known technique which can detect the shape of the workpiece | work board Pw. The configuration of the first detection unit 11 will be described later [2. Detection means].

  The analysis means 20 is a means for analyzing the shape of the work plate Pw. The analysis unit 20 is calculated by the strain amount calculation unit 21 that calculates the strain amount of the work plate Pw based on the detection result (for example, the deformation amount) that the detection unit 10 detects the shape of the work plate Pw, and the strain amount calculation unit 21 calculates. A correction value calculation unit 22 that calculates a control value (correction value) for controlling the operation of the roller Bk based on the distortion amount. The analysis unit 20 may be configured to use resources (CPU, memory, etc.) such as a controller that is preinstalled in the printing apparatus 100. The analysis means 20 (distortion amount calculation unit 21, correction value calculation unit 22) will be described later [3. Analysis means].

  The drive control means 30 is a means for controlling the operation (rotation position, rotation speed, rotation start timing, etc.) of the roller Bk. The drive control means 30 includes a rotation correction unit 31R that rotates the roller Bk about the rotation shaft 31r, a movement correction unit 31M that controls (moves) the position of the pattern printed (transferred) on the work plate Pw, A magnification correction unit 31E for controlling (reducing or enlarging) the magnification of the pattern printed (transferred) on the plate Pw.

  The rotation correction unit 31R corrects (controls) the rotation speed and rotation start timing of the roller Bk. As a result, the rotation correcting unit 31R changes the size and position of the pattern printed (transferred) on the work board Pw. A known technique can be used as the mechanism by which the rotation correction unit 31R changes the rotation speed of the roller Bk.

  The movement correction unit 31M corrects (controls) the position of the roller Bk by moving the position of the rotation shaft 31r. Accordingly, the movement correction unit 31M corrects (moves) the position of the pattern printed (transferred) on the work board Pw. A known technique can be used as the mechanism by which the movement correction unit 31M moves the position of the rotation shaft 31r.

  The magnification correction unit 31E corrects (controls) the rotation speed of the roller Bk. The magnification correction unit 31E corrects the position of the rotation shaft 31r with respect to the work plate Pw. Accordingly, the magnification correction unit 31E corrects (changes) the magnification in the transport direction of the pattern printed (transferred) on the work board Pw by changing the rotation speed of the roller Bk. The magnification correction unit 31E corrects (changes) the magnification in the direction orthogonal to the conveyance direction of the pattern printed (transferred) on the work board Pw by tilting the position of the rotation shaft 31r. A known technique can be used as the mechanism for changing the rotation speed of the roller Bk and the mechanism for moving the position of the rotation shaft 31r by the magnification correction unit 31E.

  The guide mechanism Gd is a mechanism for moving the master table Tm and the work table Tw below the roller Bk (X direction in FIG. 1). In this embodiment, the guide mechanism Gd uses a linear guide. As the guide mechanism Gd, a known mechanism that can move the master table Tm or the like may be used.

[2. Detection means]
The first detection unit 11 and the second detection unit 12 of the detection unit 10 according to the present invention will be described with reference to FIGS. 3 and 4. The configuration of the second detection unit 12 is basically the same as the configuration of the first detection unit 11 except that the surface of the roller Bk is not detected, and thus the description thereof is omitted. Here, FIG. 3 is a schematic external view for explaining an example of the detecting means according to the present embodiment. FIG. 4 is an explanatory diagram for explaining an example of a calibration pattern used in the printing apparatus 100.

  As shown in FIG. 3, the first detection unit 11 includes a strobe light source 11 a, a half mirror 11 c, and an imaging unit (for example, a charge coupled device (CCD)) 11 e. The first detection unit 11 includes lenses 11b, 11d, 11f, and 11g as an optical system. The first detector 11 irradiates the roller Bk and the work plate Pw with light emitted from the strobe light source 11a via the half mirror 11c, and takes an image of the surface of the roller Bk and the work plate Pw using the image pickup unit 11e. (To detect. At this time, the 1st detection part 11 condenses light using the lens 11b etc. FIG. The first detection unit 11 may further include a TDI (Time Delay Integration) sensor and acquire an image with a high SN ratio.

  In addition, the detection means 10 (the 1st detection part 11 and the 2nd detection part 12) is not limited to what is shown in FIG. Further, the printing apparatus 100 according to the present invention may be configured to input a detection result (for example, information related to deformation of the work plate Pw) detected in advance outside the printing apparatus 100.

  The 1st detection part 11 detects the inversion pattern PTb previously formed in the surface of the letterpress Pc using the imaging part 11e. Moreover, the 1st detection part 11 detects the surface shape (for example, damage, abrasion, etc.) of the letterpress plate Pc. Furthermore, the printing apparatus 100 may use the detection result of the first detection unit 11 in order to synchronize (for example, alignment) or asynchronously the rotation operation of the roller Bk and the rectilinear operation of the relief plate Pc and the work plate Pw.

  Moreover, the 1st detection part 11 which concerns on this invention detects the deformation | transformation of the surface shape of the work board Pw by detecting the calibration pattern previously formed in the surface of the work board Pw. That is, the printing apparatus 100 detects the deformation of the surface shape of the work board Pw by detecting after the deformation a calibration pattern previously formed on the surface of the work board Pw before the work board Pw is deformed.

  Specifically, for example, as illustrated in FIG. 4, the first detection unit 11 includes a difference ΔX between the calibration pattern PTs1 before the work plate Pw is deformed and the calibration pattern PTs2 after the work plate Pw is deformed. By detecting ΔY, the deformation amount (ΔX, ΔY) of the surface shape of the work plate Pw can be detected. The calibration pattern that can be used in the present invention is not limited to that shown in FIG.

[3. Analysis method]
The distortion amount calculation unit 21 of the analysis unit 20 according to the present invention will be described with reference to FIG. Moreover, the correction value calculation part 22 of the analysis means 20 which concerns on this invention is demonstrated using FIG. Here, FIG. 5 is an explanatory diagram illustrating an example of the distortion amount analyzed by the analysis unit 20 of the printing apparatus 100 according to the present embodiment. FIG. 6 is an explanatory diagram illustrating an example of the adjustment parameter corresponding to the correction value calculated by the analysis unit 20. Note that the distortion amount and the correction value calculated by the analysis unit 20 (the distortion amount calculation unit 21 and the correction value calculation unit 22) according to the present invention are not limited to those illustrated in FIGS.

[3-1 Calculation of distortion amount]
The distortion amount calculation unit 21 calculates the distortion amount of the work plate Pw. The distortion amount calculation unit 21 calculates the distortion amount of the work plate Pw based on the detection result (for example, the deformation amount of the surface shape of the work plate Pw) detected by the detection unit 10. The distortion amount calculation unit 21 calculates, as the distortion amount, for example, a shift amount (shift), a scaling factor (scaling), an orthogonality (orthogonality), a rotation amount (rotation), and other residual errors. Note that the distortion amount calculation unit 21 may use information input from the outside of the printing apparatus 100 (a detection result detected in advance).

  Specifically, as shown in FIGS. 5A to 5D, the distortion amount calculation unit 21 decomposes the deformation amount detected by the detection unit 10 and uses the shift amount (Tx, Ty), magnification (Ex, Ey), orthogonality (Co), and rotation amount (Rw) are calculated. Further, as shown in FIG. 5E, the distortion amount calculation unit 21 calculates an in-plane residual error (εx, εy) as another distortion amount.

  Here, the deformation amount (Dx, Dy) can be expressed by the following equation.

(Equation 1)
Dx (X, Y) = Tx− (Rw + Co) × Y + Ex × X + εx
(Equation 2)
Dy (X, Y) = Ty + Rw × X + Ex × Y + εy
Based on (Equation 1) and (Equation 2), the distortion amount calculation unit 21 uses, for example, the least square method, the shift amount (Tx, Ty), the magnification (Ex, Ey), the orthogonality (Co), and the rotation The quantity (Rw) and the in-plane residual error (εx, εy) can be calculated. The distortion amount calculation unit 21 may calculate the shift amount (Tx, Ty) or the like using, for example, Lagrange's undetermined multiplier method.

[3-2 Calculation of correction value]
The correction value calculation unit 22 calculates a correction value for controlling the roller Bk based on the distortion amount calculated by the distortion amount calculation unit 21. Here, the correction value is a value corresponding to the distortion amount (shift amount (Tx, Ty), magnification (Ex, Ey), orthogonality (Co), and rotation amount (Rw)) calculated by the distortion amount calculation unit 21. It is. That is, the correction value is a value corresponding to the deformation amount of the surface shape of the work plate Pw. The printing apparatus 100 sets an adjustment parameter used when the drive control unit 30 controls (moves or rotates) the roller Bk based on the correction value.

  Specifically, as shown in FIG. 6, the correction value calculation unit 22 calculates correction values corresponding to the following adjustment parameters (1) to (6). Here, FIG. 6 is an explanatory diagram Img1 for explaining the relationship between the roller Bk and the work plate Pw for the adjustment parameters M1 to M6, an explanatory diagram Img2 for explaining the pattern PTc printed on the work plate Pw, respectively. Indicates.

(1) Adjustment parameter M1 without deformation
(2) Adjustment parameter M2 for reduction in X direction (roller pressing)
(3) Adjustment parameter M3 for reduction in the Y direction (roller tilt in the Z direction)
(4) Adjustment parameter M4 for reduction in the Y direction (inclination of the XY plane of the roller)
(5) Adjustment parameter M5 for enlargement in the X direction (roller deceleration)
(6) Adjustment parameter M6 for reduction in X direction (roller acceleration)
Note that the printing apparatus 100 can change the amount and magnification by which the roller (roller Bk) is pushed into the substrate (work plate Pw) based on the adjustment parameter M2 using the movement correction unit 31M. The printing apparatus 100 uses the movement correction unit 31M and the magnification correction unit 31E to change the magnification in the Y direction of the pattern (pattern PTc) printed on the substrate (work board Pw) based on the adjustment parameter M3. Can do. The printing apparatus 100 can change the rotational position of the pattern (pattern PTc) printed on the substrate (work board Pw) based on the adjustment parameter M4 using the movement correction unit 31M. The printing apparatus 100 uses the rotation correction unit 31R to change the magnification in the X direction (conveyance direction) of the pattern (pattern PTc) printed on the substrate (work plate Pw) using the adjustment parameters M5 and M6. be able to.

[4. Example of printer operation]
An example of the operation of the printing apparatus 100 according to the present embodiment will be described with reference to FIGS. 7 and 8 to 13. Here, FIG. 7 is a flowchart for explaining an example of the operation of the printing apparatus 100. FIG. 8 is an explanatory diagram illustrating an example of an analysis result (amount of distortion) of the analysis unit 20 of the printing apparatus 100. FIG. 9 is an explanatory diagram for explaining an example of a correction result (shift amount correction) of the analysis unit 20 of the printing apparatus 100. FIG. 10 is an explanatory diagram for explaining an example of a correction result (correction of shift amount and rotation amount) of the analysis unit 20 of the printing apparatus 100. FIG. 11 is an explanatory diagram illustrating an example of a correction result (shift amount, rotation amount, and orthogonality correction) of the analysis unit 20 of the printing apparatus 100. FIG. 12 is an explanatory diagram illustrating an example of a correction result (correction of shift amount, rotation amount, orthogonality, and Y-axis magnification) of the analysis unit 20 of the printing apparatus 100. FIG. 13 is an explanatory diagram for explaining an example of correction results (shift amount, rotation amount, orthogonality, Y-axis magnification, and X-axis magnification correction) of the analysis unit 20 of the printing apparatus 100. 8 to 13 show contour maps of the amount of distortion on the surface (XY plane) of the work plate Pw, the direction of the arrow indicates the direction of distortion, and the length of the arrow indicates the amount of distortion.

  As illustrated in FIG. 7, the printing apparatus 100 starts a printing operation based on information input to the printing apparatus 100 in step S701. After the start, the printing apparatus 100 proceeds to step S702.

  In step S702, the detection means 10 (printing apparatus 100) detects the surface shape (deformation amount) of the work plate Pw as a detection step. Thereafter, the printing apparatus 100 proceeds to step S703. Note that the printing apparatus 100 may use a method in which a deformation amount that is measured or calculated in advance is input in step S702.

  In step S703, the analysis unit 20 (printing apparatus 100) uses the distortion amount calculation unit 21 as an analysis step, and based on the detection result (deformation amount) detected in step S702, the distortion amount (shift) of the work plate Pw. Amount (Tx, Ty), magnification (Ex, Ey), orthogonality (Co), and rotation amount (Rw)) are calculated. The distortion amount calculation unit 21 calculates, for example, the distortion amount shown in FIG. Thereafter, the printing apparatus 100 proceeds to step S704.

  In step S704, the analysis unit 20 calculates (i) a correction value related to the shift amount using the correction value calculation unit 22 as an analysis step. When the adjustment value is set based on the calculated correction value of the shift amount, the correction value calculation unit 22 prints a pattern using, for example, the distortion amount (deformation of the work plate Pw) shown in FIG. 8 as the distortion amount shown in FIG. can do.

  The analysis unit 20 further calculates (ii) a correction value related to the rotation amount. When the adjustment parameter is further set based on the calculated correction value of the rotation amount, the correction value calculation unit 22 can print a pattern using, for example, the distortion amount shown in FIG. 9 as the distortion amount shown in FIG.

  The analysis unit 20 further calculates (iii) a correction value related to the orthogonality. When the adjustment parameter is further set based on the calculated correction value of the orthogonality, the correction value calculation unit 22 can print a pattern using, for example, the distortion amount shown in FIG. 10 as the distortion amount shown in FIG.

  Further, the analysis unit 20 further calculates (iv) a correction value related to the Y-axis magnification. When the adjustment parameter is further set based on the calculated correction value of the Y-axis magnification, the correction value calculation unit 22 can print a pattern using, for example, the distortion amount shown in FIG. 11 as the distortion amount shown in FIG.

  The analysis unit 20 further calculates (v) a correction value related to the X-axis magnification. When the adjustment value is further set based on the calculated correction value of the X-axis magnification, the correction value calculation unit 22 can print a pattern using, for example, the distortion amount shown in FIG. 12 as the distortion amount shown in FIG.

  Here, the printing apparatus 100 prints on the work plate Pw using a correction value (adjustment parameter) including at least one of a correction value for shift amount, rotation amount, orthogonality, Y-axis magnification, and X-axis magnification. The pattern to be printed may be deformed and printed with desired printing accuracy (dimensional accuracy). That is, the printing apparatus 100 prints a pattern on the work plate Pw using a combination of adjustment parameters (correction values) that achieve the desired dimensional accuracy in order to print with the desired printing accuracy (dimensional accuracy) (described later). Step S705) may be controlled.

  Thereafter, the printing apparatus 100 proceeds to step S705.

  In step S705, the printing apparatus 100 holds the relief plate Pc on the master table Tm as a relief holding step. Further, the printing apparatus 100 holds the work board Pw on the work table Tw as the work board holding step. Further, the printing apparatus 100 conveys the held relief plate Pc and the work plate Pw below the roller Bk. At this time, as a reversal pattern forming step, the printing apparatus 100 partially removes the liquid film on the surface of the roller Bk with the convex portion Pca on the surface of the relief plate Pc to form a reversal pattern PTb (FIG. 2). Moreover, the printing apparatus 100 transfers (prints) the reverse pattern PTb on the surface of the work board Pw as a pattern printing step.

  Here, the printing apparatus 100 controls the position and driving (rotation speed, etc.) of the roller Bk using the correction value (adjustment parameter) calculated in step S704 when transferring the reverse pattern PTb. Thereby, the printing apparatus 100 can transfer (print) the pattern deform | transformed based on the correction value on the surface of the work board Pw.

  Thereafter, the printing apparatus 100 proceeds to step S706.

  In step S <b> 706, the analysis unit 20 (printing apparatus 100) calculates the in-plane residual error (εx, εy) using the correction value calculation unit 22. Thereafter, the printing apparatus 100 proceeds to step S707. Note that the printing apparatus 100 may proceed to step S707 without performing step S706.

  In step S707, the printing apparatus 100 determines whether to end the printing operation. The printing apparatus 100 can determine whether or not to end the printing operation based on information input to the printing apparatus 100, for example. If it is determined that the printing operation is to be ended, the printing apparatus 100 proceeds to END in the drawing and ends the printing operation. If it is determined that the printing operation is not terminated, the printing apparatus 100 returns to step S702 and repeats the printing operation.

  As described above, according to the electronic device pattern printing apparatus 100 or the printing method (printing operation) of the electronic device pattern according to the present embodiment, the analysis result obtained by analyzing the deformation amount (distortion amount) of the substrate (work board Pw) is obtained. Based on this, the pattern to be printed can be deformed. That is, according to the printing apparatus 100 or the printing method thereof according to the present embodiment, for example, when printing is performed a plurality of times on the surface of the printing body (work board Pw), before the printing body is deformed. When the printed pattern is superimposed on the printed pattern after it is deformed (overlapping), the pattern is printed so as to correspond to the deformation of the printed pattern accompanying the deformation of the printed object. Can do.

  Thereby, according to the printing apparatus 100 or the printing method of the present invention, the printability (dimensional accuracy) of the pattern to be printed can be improved even when the printing medium is deformed, and the pattern printing can be performed. Productivity can be improved. In addition, according to the printing apparatus 100 or the printing method according to the present embodiment, the dimensional accuracy of a pattern to be printed can be improved, so that the occurrence of a print pattern defect due to a decrease in the dimensional accuracy of the pattern is prevented. be able to. According to the printing apparatus 100 or the printing method thereof, for example, after a pattern is printed on the surface of the printing object, another process (for example, a heating process) is performed and then further printing is performed on the surface of the printing object. Even when the printing medium is deformed by the process (heating), a pattern corresponding to the deformation can be further printed.

[5. Program and recording medium]
The program according to the present embodiment is a method for printing an electronic device pattern in which a liquid film on a surface of a roller is partially removed with a relief plate to form a reversal pattern, and then the reversal pattern is transferred to a work board. An analysis step for analyzing the shape of the workpiece plate, a relief holding step for holding the relief plate with a first table, a workpiece plate holding step for holding the workpiece plate with a second table, and the relief plate holding the relief plate A reverse pattern forming step of moving the first table below the roller and partially removing the liquid film at the convex portion of the surface of the relief plate; and the second table holding the work plate as the roller A pattern printing step of transferring the reverse pattern onto the surface of the work plate, and the analysis step detects the shape of the work plate. The amount of distortion of the work plate is calculated based on the detected result, the correction value for controlling the roller is calculated based on the calculated amount of distortion, and the pattern printing step includes the correction value calculated in the analysis step. The electronic device pattern printing method is further characterized by further including a drive control step of controlling the position and drive of the roller based on the above. According to this, an effect equivalent to that of the printing apparatus 100 or the printing method according to the embodiment of the present embodiment can be obtained.

  Note that the present embodiment may be a recording medium that can be read by a computer in which the program is recorded. The recording medium on which the program is recorded includes a flexible disk (FD), a CD-ROM (Compact Disk-ROM), a CD-R (CD Recordable), a DVD (Digital Versatile Disk), and other computer-readable media, and A semiconductor memory such as a flash memory, a RAM, and a ROM, a memory card, an HDD (Hard Disc Drive), and other computer-readable devices can be used. Further, the recording medium on which the program is recorded may be a program (so-called differential file) installed in an existing printing apparatus via a network or the like.

  The printing apparatus according to the present embodiment will be described using the printing apparatus according to the example.

[Example 1]
An example of the operation (printing method) of the printing apparatus according to the first embodiment will be described with reference to FIG. FIG. 14 is a flowchart for explaining an example of the operation of the printing apparatus according to the present embodiment.

  As illustrated in FIG. 14, the printing apparatus according to the present embodiment starts a printing operation in step S1401 based on information input to the printing apparatus. After the start, the printing apparatus goes to step S1402.

  In step S1402, the printing apparatus according to the present embodiment receives a correction value from the outside of the printing apparatus. Thereafter, the printing apparatus goes to step S1403.

  In step S1403, the printing apparatus according to this embodiment sets an adjustment parameter using the correction value input in step S1402. Thereafter, the printing apparatus goes to step S1404.

  In step S1404, the printing apparatus according to the present embodiment holds the relief plate Pw on the master table Tm, holds the work plate Pw on the work table Tw, and conveys the held relief plate Pc and the work plate Pw below the roller Bk. . After the conveyance, the printing apparatus goes to step S1405.

  In step S1405, the printing apparatus according to the present embodiment forms the reverse pattern PTb on the surface of the roller Bk using the relief plate Pw. Thereafter, the printing apparatus goes to step S1406.

  In step S1406, the printing apparatus according to the present embodiment transfers (prints) the reverse pattern PTb on the surface of the work board Pw. Here, the printing apparatus controls the position and driving (rotation speed, etc.) of the roller Bk using the adjustment parameters set in step S1403 when transferring the reverse pattern PTb. Thereby, the printing apparatus can transfer (print) the pattern deform | transformed based on the correction value on the surface of the work board Pw. Note that the printing apparatus may deform the pattern transferred to the surface of the work board Pw using a fine movement mechanism incorporated in the master table Tm and the work table Tw.

  Thereafter, the printing apparatus goes to step S1407.

  In step S1407, the printing apparatus according to the present embodiment determines whether to end the printing operation. For example, the printing apparatus can determine whether or not to end the printing operation based on information input to the printing apparatus. If it is determined that the printing operation is to be ended, the printing apparatus proceeds to END in the drawing and ends the printing operation. If it is determined that the printing operation is not terminated, the printing apparatus returns to step S1402 and repeats the printing operation.

  As described above, the printing apparatus according to Example 1 can obtain the same effects as those of the printing apparatus 100 according to the embodiment or the printing method thereof.

[Modification 1 of Example 1]
An example of the operation (printing method) of the printing apparatus according to the first modification of the first embodiment will be described with reference to FIG. FIG. 15 is a flowchart for explaining an example of the operation of the printing apparatus according to the first modification of the first embodiment.

  As illustrated in FIG. 15, the printing apparatus according to the present modification starts a printing operation in step S1501 based on information input to the printing apparatus. Here, in the present modification, the printing apparatus uses a distortion amount (for example, shift amount (Tx, Ty), magnification (Ex, Ey), orthogonality (Co), rotation amount (Rw), or in-plane residual error ( εx, εy), etc.). Thereafter, the printing apparatus goes to step S1502.

  In step S1502, the printing apparatus according to this modification example calculates a correction value based on the amount of distortion input from the outside of the printing apparatus. Thereafter, the printing apparatus goes to step S1503.

  In step S1503, the printing apparatus according to the present modification further receives a predetermined allowable value. Here, the predetermined allowable value is a value corresponding to the dimensional accuracy of the pattern during printing and other specifications of the printing apparatus. Further, the predetermined allowable value may be a value determined in advance by experiment or calculation. Further, the predetermined allowable value may be a value that takes into account, for example, position variation due to the nip pressure distribution of the roller Bk, detection error of the detection means 10, and the like.

  Thereafter, the printing apparatus goes to step S1504.

  In step S1504, the printing apparatus according to the present modification sets adjustment parameters using the correction values calculated in step S1502. Specifically, the printing apparatus selects an adjustment parameter or a combination of adjustment parameters (for example, M1 to M6 in FIG. 6) that achieves the predetermined allowable value input in step S1503.

  Thereafter, the printing apparatus goes to step S1505.

  In steps S1505 to S1508, the printing apparatus according to the present modification transfers (prints) the reverse pattern onto the surface of the work board Pw in the same manner as the printing apparatus according to the first embodiment (steps S1404 to S1407 in FIG. 14). To do.

  As described above, the printing apparatus according to the first modification of the first embodiment can obtain the same effects as the printing apparatus 100 according to the embodiment or the printing method thereof and the printing apparatus according to the first embodiment.

[Modification 2 of Embodiment 1]
An example of the operation of the printing apparatus according to the second modification of the first embodiment (operation for calculating correction values) will be described with reference to FIG. FIG. 16 is a flowchart for explaining an example of the operation of the printing apparatus according to the second modification of the first embodiment. Note that other operations of the printing apparatus according to the present modification are the same as the operations of the printing apparatus according to the first embodiment, and thus description thereof is omitted.

  As illustrated in FIG. 16, the printing apparatus according to the present modification starts calculating a correction value based on information input to the printing apparatus in step S1601. After the start, the printing apparatus goes to step S1602.

  In step S1602, the printing apparatus according to this variation calculates a correction value related to the shift amount. Thereafter, the printing apparatus goes to step S1603.

  In step S1603, the printing apparatus according to the present modification determines whether or not to end the operation for calculating the correction value. Specifically, the printing apparatus determines whether or not the residual distortion amount when corrected using the calculated correction value is within a predetermined range, and calculates an correction value when it is within the predetermined range. It can be determined that the process ends. When it is determined that the operation for calculating the correction value is to be ended, the printing apparatus proceeds to END in the drawing, and ends the operation for calculating the correction value. If it is determined that the operation for calculating the correction value is not finished, the printing apparatus advances to step S1604.

  In step S1604, the printing apparatus according to this variation calculates a correction value related to the rotation amount. Thereafter, the printing apparatus goes to step S1605.

  In step S1605, the printing apparatus according to the present modification determines whether or not to end the operation for calculating the correction value, similarly to step S1603. When it is determined that the operation for calculating the correction value is to be ended, the printing apparatus proceeds to END in the drawing, and ends the operation for calculating the correction value. If it is determined that the operation of calculating the correction value is not finished, the printing apparatus proceeds to step S1606.

  In step S1606, the printing apparatus according to this variation calculates a correction value related to the magnification in the X direction (FIG. 1) of the pattern to be printed. Here, the printing apparatus may further calculate a correction value related to the magnification in the Y direction (FIG. 1) of the pattern to be printed. Thereafter, the printing apparatus goes to step S1607.

  In step S1607, the printing apparatus according to the present modification determines whether or not to end the operation for calculating the correction value, similarly to step S1603. When it is determined that the operation for calculating the correction value is to be ended, the printing apparatus proceeds to END in the drawing, and ends the operation for calculating the correction value. If it is determined that the operation of calculating the correction value is not finished, the printing apparatus goes to step S1608.

  In step S1608, the printing apparatus according to this variation calculates a correction value related to the orthogonality. Thereafter, the printing apparatus proceeds to END in the drawing, and ends the operation for calculating the correction value.

  As described above, the printing apparatus according to the second modification of the first embodiment can obtain the same effects as the printing apparatus 100 according to the embodiment or the printing method thereof and the printing apparatus according to the first embodiment.

  In addition, the printing apparatus according to the second modification of the first embodiment can select a correction value to be calculated based on a predetermined allowable value. Therefore, for example, the accuracy of a pattern to be printed or the ease of contents to be corrected or It is possible to select to calculate a desired correction value (or a combination thereof) according to the function installed in the printing apparatus.

[Example 2]
An example of the operation (printing method) of the printing apparatus according to the second embodiment will be described with reference to FIGS. 17 and 18. FIG. 17 is an explanatory diagram for explaining an example of the operation of the printing apparatus according to the present embodiment. FIG. 18 is a flowchart for explaining an example of the operation of the printing apparatus according to the present embodiment.

  The printing apparatus according to the present embodiment implements a printing method in consideration of wear of the roller Bk that occurs when printing is performed by pressing the surface of the roller Bk against the relief plate Pc or the like in the reverse printing method. For example, as shown in FIGS. 17B and 17C, the calculated positional deviation amount Δdm is used to correct the separation distance (gap) between the roller Bk, the relief plate Pc, and the work plate Pw, and the roller Bk The rotation operation and the rectilinear operation of the relief plate Pc and the work plate Pw are synchronized. This will be specifically described below.

  As illustrated in FIG. 18, the printing apparatus according to the present embodiment starts a printing operation based on information input to the printing apparatus in step S <b> 1801. After the start, the printing apparatus goes to step S1802.

  In step S1802, the printing apparatus according to the present embodiment receives a correction value from the outside of the printing apparatus. Thereafter, the printing apparatus goes to step S1803.

  In step S1803, the printing apparatus according to the present embodiment analyzes the positional deviation amount Δdm (FIG. 17B). First, the printing apparatus detects the state of the surface of the roller Bk using the first detection unit 11 (FIG. 3). Here, the printing apparatus detects the wear location and the wear amount on the surface of the roller Bk. Next, the printing apparatus calculates a positional deviation amount Δdm based on the detection result detected by the first detection unit 11.

  Here, the printing apparatus may be configured to newly use a detection unit (detection unit) without using the first detection unit 11. The printing apparatus may be a method of selecting the positional deviation amount Δdm using a map of correspondence between the wear amount and the positional deviation amount stored in advance.

  In the printing apparatus according to the present embodiment, the first detection unit 11 corresponds to a second detection unit described in the claims.

  Thereafter, the printing apparatus goes to step S1804.

  In step S1804, the printing apparatus according to this embodiment sets an adjustment parameter using the correction value input in step S1802 and the positional deviation amount Δdm calculated in step S1803. Thereafter, the printing apparatus goes to step S1805.

  In steps S1805 to S1808, the printing apparatus according to the present embodiment transfers (prints) the reverse pattern onto the surface of the work plate Pw, similarly to the printing apparatus according to the first embodiment (steps S1404 to S1407). Here, in this embodiment, the printing apparatus uses the drive control means 30 (movement correction unit 31M, rotation correction unit 31R) based on the calculated positional deviation amount Δdm, and uses the roller Bk, the relief plate Pc, and the work plate Pw. The rotation distance of the roller Bk and the rectilinear movement of the relief plate Pc and the work plate Pw are synchronized (FIGS. 17B and 17C).

  As described above, the printing apparatus according to the second embodiment can obtain the same effects as those of the printing apparatus 100 according to the embodiment or the printing method thereof.

  Further, the printing apparatus according to the second embodiment can synchronize the rotation operation of the roller Bk and the rectilinear operation of the relief plate Pc and the work plate Pw using the calculated positional deviation amount Δdm even when the roller Bk is worn. Therefore, the dimensional accuracy of the pattern to be printed can be improved.

[Example 3]
An example of the operation (printing method) of the printing apparatus according to the third embodiment will be described with reference to FIG. FIG. 19 is an explanatory diagram illustrating an example of the operation of the printing apparatus according to the present embodiment.

  The printing apparatus according to the present embodiment implements a printing method in consideration of wear of the roller Bk that occurs when printing is performed by pressing the surface of the roller Bk against the relief plate Pc or the like in the reverse printing method. That is, the printing apparatus according to the present embodiment further includes a determination unit that determines whether or not to replace the roller Bk based on the wear of the roller Bk. This will be specifically described below.

  As shown in FIG. 19, the printing apparatus according to the present embodiment starts a printing operation based on information input to the printing apparatus in step S1901. After the start, the printing apparatus goes to step S1902.

  In step S1902, the printing apparatus according to the present embodiment receives a correction value from the outside of the printing apparatus. Thereafter, the printing apparatus goes to step S1903.

  In step S1903, the printing apparatus according to the present embodiment sets adjustment parameters. Specifically, the printing apparatus first detects the state of the surface of the roller Bk using the first detection unit 11 (FIG. 3). Here, the printing apparatus detects the amount of wear and the wear location on the surface of the roller Bk. Further, the printing apparatus may detect the amount of wear on the surface of the roller Bk by detecting the shape of the reverse pattern PTb (FIG. 3) on the surface of the roller Bk. Furthermore, the printing apparatus may detect the amount of wear on the surface of the roller Bk by comparing a portion where the reverse pattern PTb on the surface of the roller Bk is formed with a portion where the reverse pattern PTb is not formed. .

  Next, the printing apparatus calculates a correction value based on the detection result detected by the first detection unit 11. The printing apparatus adjusts the film thickness of the liquid film (PTa in FIG. 2A) formed on the surface of the roller Bk based on, for example, the amount of wear on the surface of the roller Bk (for example, M2 in FIG. 6). Set.

  Thereafter, the printing apparatus goes to step S1904.

  In steps S1904 to S1906, the printing apparatus according to the present embodiment transfers (prints) the reverse pattern onto the surface of the work plate Pw, similarly to the printing apparatus according to the first embodiment (steps S1404 to S1406). Thereafter, the printing apparatus goes to step S1907.

  In step S1907, the printing apparatus according to the present embodiment determines whether to replace the roller Bk. Specifically, the printing apparatus can determine whether or not to replace the roller Bk using the determination unit based on the amount of wear on the surface of the roller Bk detected in step S1903. For example, the printing apparatus may determine to replace the roller Bk when the wear amount exceeds a predetermined amount. If it is determined that the roller Bk is to be replaced, the printing apparatus proceeds to END in the drawing and ends the printing operation. If it is determined that the roller Bk is not to be replaced, the printing apparatus goes to step S1908.

  In step S1908, the printing apparatus according to the present embodiment determines whether to end the printing operation. For example, the printing apparatus can determine whether or not to end the printing operation based on information input to the printing apparatus. If it is determined that the printing operation is to be ended, the printing apparatus proceeds to END in the drawing and ends the printing operation. If it is determined that the printing operation is not terminated, the printing apparatus returns to step S1902 and repeats the printing operation.

  As described above, the printing apparatus according to the third embodiment can obtain the same effects as those of the printing apparatus 100 according to the embodiment or the printing method thereof.

Further, the printing apparatus according to the third embodiment can determine the replacement time of the roller Bk based on the detected wear amount. Furthermore, since the printing apparatus according to the third embodiment can determine the replacement time of the roller Bk, printing failure due to wear of the roller Bk can be prevented.
Second Embodiment
Next, a printing apparatus 100 according to the second embodiment will be described. The main configuration of the electronic device pattern printing apparatus 100 in FIG. 1 and the printing method of the electronic device pattern printing apparatus 100 in FIG. 2 are the same as those in the first embodiment except for the points described below, and thus the description thereof is omitted. To do.

  The reverse printing method using the roller Bk (roller transfer cylinder) can easily obtain the dimensional accuracy required for printing the electronic device pattern as compared with the conventional printing method.

  On the other hand, the blanket Bks such as a silicone resin attached to the surface of the roller Bk contacts the relief printing plate or the substrate to be printed at the time of printing, so that it is gradually damaged and becomes a factor of increasing pattern defects as the number of printing increases. Therefore, it is necessary to replace the blanket Bks that has been damaged beyond the allowable range. However, if the blanket Bks is glued to the roller Bk, it is not easy to peel off the blanket Bks from the roller Bk and replace it with a new blanket Bks, and the downtime of the printing apparatus 100 becomes longer and the productivity decreases. Challenges arise. Further, since the state of the blanket Bks changes each time it is replaced with a new blanket Bks, machine differences are likely to occur, and it has been difficult to perform uniform high-precision processing.

  In order to facilitate the replacement of the blanket Bks, for example, as disclosed in Japanese Patent Application Laid-Open No. 2007-203547, a tension tension means is used in which both ends of the blanket are grasped, the blanket is extended, and wound around and fixed to the roller transfer cylinder. . However, if the surface is damaged while the blanket is pulled, the damaged portion is likely to expand, and the blanket may become unusable due to slight damage.

  Therefore, the printing apparatus 100 according to the second embodiment provides a blanket Bks that is easy to replace the blanket Bks and is robust against damage without applying a tensile force or the like to the blanket Bks. Furthermore, when the blanket Bks is damaged and pattern defects increase, and the damage of the blanket Bks exceeds an allowable value, the blanket Bks can be easily replaced, and the printing apparatus 100 is provided in which the downtime of the apparatus is greatly reduced.

  The blanket Bks according to the present embodiment can be attached to the roller Bk by using a pattern formed on the surface of the roller Bk (for example, a roller transfer cylinder) on a predetermined surface (for example, a workpiece) other than the printing apparatus 100 described below. Any device can be used as long as it can be transferred to a plate (apparatus, equipment, unit, system, etc.).

  The printing apparatus 100 according to the second embodiment of the present invention will be described in the order shown below.

1. 1. Configuration of blanket body and blanket fixture jig Example of operation of printing apparatus [1. Configuration of blanket body and blanket fixture jig]
The configuration of the blanket attachment jig for performing tension winding around the blanket body and the roller cylinder according to the present embodiment will be mainly described with reference to FIGS. 20 to 23.

  Here, FIG. 20A is a diagram for explaining a configuration of a blanket body 200 including a water-repellent blanket Bks made of silicone rubber wound around the outer periphery of the roller Bk of the printing apparatus 100 according to the present embodiment. .

  FIG. 20B is a cross section of FIG. 20A taken along line AA. As shown in FIG. 20A, the water-repellent blanket Bks (hereinafter also referred to as “blanket Bks”) is smaller than the base plate 201 and is attached to the base plate 201.

  The base plate 201 is a base layer of a blanket Bks on which a liquid film is formed, and is formed from a metal or the like whose elastic coefficient is one digit or more smaller than that of the blanket Bks.

  As shown in FIG. 20B, the blanket Bks includes, for example, a 0.8 mm polyurethane layer 101, a 0.25 mm PET (polyethylene terephthalate) layer 102, and a 0.2 mm PDMS (polydimethylsiloxane) layer 103. Have. This blanket Bks is affixed to the base plate 201. Examples of the base plate 201 include a metal plate such as a stainless steel / nickel alloy thin plate having a film thickness of 0.1 mm and a film thickness variation of ± 5 μm or less.

  A PET layer 102 is preferably interposed between the blanket Bk and the base plate 201. However, the blanket Bk may be directly fixed to the base plate 201 without the PET layer 102 interposed.

  Here, the preferable form as the baseplate 201 of the blanket body 200 is described below. Since it is not desired to apply an external force such as a tensile force as much as possible to the blanket Bks, it is desirable to increase the elastic coefficient of the base plate used for the blanket body 200 as much as possible.

As shown in FIG. 24, generally, the stress generated by the tensile or compressive force is obtained by dividing the force (load) F acting on the member by the cross-sectional area A of the member.
σ = F / A (σ: stress, F: load, A: cross-sectional area)
If the elongation due to the load F of this member is δ, the elongation δ is expressed by the following equation.
δ = FL / EA (δ: elongation, F: load, L: length, E: longitudinal elastic modulus, A: cross-sectional area)
Looking at the above equation in terms of the relationship between force and elongation, EA / L corresponds to the spring constant of the bar, and can be regarded as a parameter governing rigidity against tension or compression.

  If δM of the base plate 201 is made as large as possible with respect to the extension δB of the blanket body 200, the extension of the blanket body 200 can be suppressed to be equal to or less than the extension of the base plate 201 at the maximum. If, for example, a stainless steel / nickel alloy is used as the base plate 201, if the cross-sectional areas of both are the same, the elastic modulus is different by two digits. As a result, even when a tensile force is applied to the blanket body 200 of the present embodiment, the amount of elongation can be suppressed to 1/100 or less as compared with a conventional method of applying tension to a single blanket.

  The pasting is performed using, for example, a spray paste. Both ends of the base plate 201 (in this embodiment, a stainless steel / nickel alloy thin plate) are fixed to mounting brackets 202 used for mounting on the roller Bk. If welding is performed so that the base plate 201 is not deformed when the base plate 201 and the mounting bracket 202 are fixed, laser welding, electron beam welding, or the like may be used. Alternatively, there are cases where the mounting bracket is divided into two parts and mechanically clamped and fixed by them.

  FIG. 21A is a diagram illustrating a state in which the blanket body 200 is wound around the roller Bk. FIG. 21B is a cross section of FIG. 21A taken along line BB.

  One mounting bracket 202 is inserted into a groove 205 provided on the outer periphery of the roller Bk, pressed by a pressing bracket 206, and fixed to the roller Bk by a screw 207. In this state, the blanket body 200 is wound around the roller Bk.

  The other mounting bracket 202 of the blanket body 200 is inserted into the insertion groove 212 provided on the holding winding shaft 211 of the blanket body tension mounting mechanism 210 embedded in the roller Bk. The both ends of the holding winding shaft 211 are rotatably fixed by guide shafts incorporated in the roller Bk. A holding spring 213 is incorporated in the insertion groove 212, and is thereby fixed without rattling in the groove 212. One end of the end winding shaft 211 protrudes from the end surface of the roller Bk and is connected to a reduction gear drive unit with brake 214 shown in FIG. In addition, the winding shaft 211 rotates in a direction in which the blanket body 200 is wound, and a tension is applied to the blanket body 200 by the brake-equipped reduction gear drive unit 214 so that the blanket body 200 is wound around the roller Bk without rattling.

  The roller Bk configured as described above is rotatably attached to the roller support portion Bkp of the printing press 100 via the rotation shaft 31r.

FIG. 22 is a view for explaining the outer shape of the roller Bk around which the blanket body 200 is wound. The outer shape of the roller Bk is substantially barrel-shaped as shown in FIG. Here, the substantially barrel shape is defined as follows. That is, it has a structure in which a first cylinder having at least a width d _ri and a second tapered cylinder having a width _dt whose diameter decreases toward the outside are provided on both sides of the first cylinder. A structure in which a third cylinder is attached to the outside of the second tapered cylinder as shown in FIG.

Although the blanket body 200 is stretched around the roller Bk, a force that shifts the blanket body 200 is applied during printing. In order to prevent the blanket body 200 from being displaced by this force, a step is provided on the outer shape of the roller Bk. The center part of the roller Bk is flattened with a width d _ri larger than the width dB (see FIG. 20) of the blanket Bks. The outer side has a width d _ro larger than the width dM (see FIG. 20) of the base plate 201 such as a metal thin plate, and the outer side from the end of the width d _ri has a gentle taper shape. The level difference may be about 1 to 2 mm metal thin plate. If an extreme step is provided, the base plate 201 such as a metal thin plate may be wrinkled, which is not preferable. What is necessary is just to bend the both ends of the blanket body 200 to such an extent that deformation | transformation of a wrinkle etc. does not generate | occur | produce in the baseplate 201. FIG.

[2. Example of printer operation]
Next, a process for replacing a blanket using the printing apparatus 100 configured as described above will be described. Here, FIG. 23 is a flowchart showing an example of a blanket replacement step according to the present embodiment.

  As described with reference to FIG. 2, the printing apparatus 100 according to the present embodiment forms the reverse pattern PTb by partially removing the liquid film on the surface of the roller Bk with the relief plate Pc. A reversal printing method for transferring to the plate Pw is used. This will be specifically described below.

  FIG. 23 is a flowchart relating to a process in which the printing apparatus 100 (FIG. 1) attaches the blanket Bks used in the printing process to the roller Bk before starting printing or replaces the blanket Bks attached to the roller Bk.

  It is assumed that the blanket Bks is removed from the surface of the roller Bk when starting to attach or replace the blanket Bks by the blanket replacement process according to the present embodiment.

In step S601, the mounting bracket 202, which is one end of the blanket body 200, is inserted into the groove 205 provided in the roller Bk, and is fixed to the roller Bk with the pressing screw 207 using the pressing bracket 206.
In step S602, the roller Bk is rotated slowly, and the other mounting bracket 202 of the blanket body 200 is inserted into the insertion groove 212 provided in the holding winding shaft 211 of the blanket body tension mounting mechanism 210 embedded in the roller Bk. A holding spring 213 is incorporated in the insertion groove 212, and is thereby fixed without rattling in the groove 212.
In step S603, the brake-equipped reduction gear drive unit 214 connected to one end of the gripper winding shaft 211 is driven to slowly apply a tensile force to the blanket body 200, and the blanket body 200 is wound around the roller Bk without generation of wrinkles. Go. After confirming that the blanket body 200 has been reliably wound, the brake of the reduction gear drive unit with brake 214 is operated, and the movement of the holding winding shaft 211 is completely stopped.

  In step S604, the winding state is confirmed, and if there are no defects such as wrinkles, the replacement operation is terminated. In step S604, the winding state is confirmed, and if a defect such as a wrinkle is found, the process returns to step S602 and the mounting operation is performed again.

  According to the blanket body 200 and the blanket body tension attachment mechanism 210 described above, the blanket Bks can be replaced easily and in a short time. Further, since the replacement work of the blanket Bks is easy, it is possible to easily deal with the automation of the replacement of the blanket Bks.

  The blanket body 200 attached in this way is firmly fixed to the roller Bk. On the other hand, since the elastic coefficient of the base plate 201 is two digits or more larger than the elastic coefficient of the blanket Bks, even if a large tensile force is applied to the blanket body 200, an external force such as a tensile force hardly acts on the blanket Bks itself. For this reason, damage to the blanket Bks is extremely less than that of a conventional printing apparatus in which a tensile force is applied to the blanket Bks itself for fixing and the roller Bk is fixed. As a result, the number of times of use (lifetime) of the blanket Bks is significantly increased.

  When replacing the blanket Bks, the replacement work can be performed without directly contacting the blanket Bks, and the blanket Bks is not unnecessarily dirty or damaged. Further, since the blanket body 200 is prepared in advance, the mechanical accuracy such as the flatness of the blanket body 200 can be grasped before being attached to the printing apparatus 100. Thereby, compared with the conventional method of attaching the blanket Bks for the first time after attachment to the printing apparatus 100, the efficiency of the exchange work and the reproducibility of the blanket attachment performance in the exchange are significantly improved. Accordingly, the correction printing shown in the first embodiment can be performed with higher accuracy.

  Since the roller Bk to which the blanket body 200 is attached has a substantially barrel shape, the blanket body 200 is not laterally shifted during printing, and the posture of the blanket body 200 can be kept unchanged, so that the printing performance does not fluctuate.

  Thus, according to the blanket body 200 and the blanket body tension jig 210 according to the present embodiment, the blanket Bks replacement operation is extremely easy and stable mounting performance of the blanket Bks can be realized. Furthermore, according to the electronic device pattern printing apparatus 100 incorporating these mechanisms, it is possible to easily replace the blanket Bks, and to provide a blanket that is robust against damage without applying tension to the blanket Bks. Further, when the blanket is damaged and the pattern defect increases and exceeds the allowable value, the blanket can be easily replaced, and the downtime of the apparatus accompanying the replacement of the blanket Bks can be reduced. Furthermore, since the number of times the blanket Bks is used increases, the electronic device can be manufactured at a lower cost compared to the conventional printing process.

  The present invention has been described above with reference to the embodiments of the present invention. However, the present invention is not limited to the above-described embodiments, and various changes or modifications can be made in light of the appended claims. Is possible.

For example, an electromagnet may be incorporated in the roller, and the blanket base plate may be fixed to the roll over the entire surface. In this way, it is possible to further suppress a slight shift of the blanket body, and the printing performance can be further improved.
For example, although the case where the reverse printing method was used was demonstrated in the said embodiment, the printing apparatus 100 which concerns on this invention is not restricted to this. For example, the present invention can also be applied to printing by letterpress printing, gravure printing, and silk screen printing. In this case, the roller Bk in the above embodiment is read as a plate cylinder. Further, the roller Bk may have a flat plate shape instead of a roller shape. The printed material is preferably used for flexible plastic substrates such as PC and PET, but may be used for non-flexible substrates such as glass substrates and semiconductor substrates. The printing apparatus 100 according to the present invention can print an electronic device pattern.

DESCRIPTION OF SYMBOLS 100: Electronic device pattern printing apparatus 10: Detection means 11: 1st detection part 12: 2nd detection part 20: Analysis means (distortion amount calculation part, correction value calculation part)
30: Drive control means 31E: Magnification correction unit 31M: Movement correction unit 31R: Rotation correction unit 31r: Rotating shaft Bk: Roller (roller transfer cylinder, etc.)
Bkp: Roller support Bks: Water repellent blanket Gd: Linear guide (guide mechanism)
Ict: Ink coater Itk: Ink tank M1, M2, M3, M4, M5, M6: Adjustment parameter Pc: Letterpress (master plate, etc.)
Pca: Convex part of letterpress Pw: Work plate (printed body, etc.)
PTa: Liquid film (ink film, etc.)
PTb: Inversion pattern PTc: Pattern (print pattern, etc.)
PTs1, PTs2: Calibration pattern Tm, Tma, Tmb: Master table (first table)
Tw, Twa, Twb: Work table (second table)
Dx, Dy: Deformation amount
Tx, Ty: Shift amount
Ex, Ey: Magnification
Co: orthogonality
Rw: Rotation amount εx, εy: In-plane residual error 200: Blanket body 201: Base plate 202: Mounting bracket 205: Groove 206: Pressing bracket 207: Screw 210: Blanket body tension mounting mechanism 211: Holding reel 212: Insertion groove 213: Presser spring 214: Reduction gear drive with brake

Claims (13)

An electronic device pattern printing apparatus comprising:
A holding member for holding the workpiece plate;
A table on which the holding member is mounted;
A roller having a liquid film formed on the surface;
A moving mechanism for applying the liquid film to the work plate by relatively moving the table;
Analyzing means for analyzing the shape of the work plate;
Drive control means for controlling the position and drive of the roller to perform printing based on the analysis result analyzed by the analysis means;
The analysis means calculates one of a shift amount, a magnification, an orthogonality, and a rotation amount related to the deformation of the work plate as a distortion amount of the work plate based on a detection result obtained by detecting the shape of the work plate. Calculating a correction value for controlling any one of the position and the rotational speed of the roller based on the calculated distortion amount;
The drive control means controls the roller based on the calculated correction value.
Electronic device pattern printing device. An electronic device pattern printing apparatus comprising:
A holding member for holding the workpiece plate;
A table on which the holding member is mounted;
A roller having a liquid film formed on the surface;
A moving mechanism for applying the liquid film to the work plate by relatively moving the table;
Analyzing means for analyzing the shape of the work plate;
Drive control means for controlling the position and drive of the roller to perform printing based on the analysis result analyzed by the analysis means;
The analysis means calculates a shift amount, a magnification, an orthogonality, and a rotation amount related to the deformation of the work plate as a distortion amount of the work plate based on a detection result of detecting the shape of the work plate, and calculates the distortion Calculating a correction value for controlling any one of the position and the rotational speed of the roller based on the amount;
The drive control means controls the roller based on the calculated correction value.
Electronic device pattern printing device. It further has detection means for detecting the shape of the workpiece plate,
The analysis means analyzes the shape of the workpiece plate based on the detection result detected by the detection means.
The electronic device pattern printing apparatus according to claim 1, wherein the electronic device pattern printing apparatus is characterized in that: A second detecting means for detecting the shape of the roller;
The drive control means controls the rotation start timing of the roller by further using the detection result detected by the second detection means;
The electronic device pattern printing apparatus according to any one of claims 1 to 3, wherein the electronic device pattern printing apparatus is characterized in that: A judgment means for judging the replacement time of the roller;
The determination means determines whether or not to replace the roller based on the detection result detected by the second detection means and / or the number of times the roller has printed.
The electronic device pattern printing apparatus according to claim 4, wherein: After partially removing the liquid film on the surface of the roller with a relief plate to form a reversal pattern, a reversal printing method is used in which the reversal pattern is transferred to a work plate.
The electronic device pattern printing apparatus according to claim 1, wherein the electronic device pattern printing apparatus is characterized in that: A blanket body having a blanket and a base layer on which the blanket is affixed and having an elastic modulus smaller by one digit or more than the blanket;
The blanket body is wound around the roller and fixed.
The electronic device pattern printing apparatus according to claim 1, wherein the electronic device pattern printing apparatus is characterized in that: The foundation layer is a metal layer.
The electronic device pattern printing apparatus according to claim 6, wherein: The blanket body has a PET layer between the blanket and the base layer.
9. The electronic device pattern printing apparatus according to claim 7 or 8, wherein: The blanket body is fixed to the roller at both ends of the base layer to which the blanket is not attached,
The electronic device pattern printing apparatus according to any one of claims 7 to 9, wherein the electronic device pattern printing apparatus is characterized in that: A method of printing an electronic device pattern in which a liquid film on a surface of a roller is partially removed with a relief plate to form a reversal pattern, and then the reversal pattern is transferred to a work board,
An analysis step of analyzing the shape of the workpiece plate;
A relief holding step for holding the relief on a first table;
A work plate holding step for holding the work plate on a second table;
A reversal pattern forming step of moving the first table holding the relief plate below the roller and partially removing the liquid film at a projection on the surface of the relief plate;
A pattern printing step of moving the second table holding the work board below the roller and transferring the reverse pattern to the surface of the work board,
The analysis step calculates one of a shift amount, a magnification, an orthogonality, and a rotation amount related to the deformation of the work plate as a distortion amount of the work plate based on a detection result obtained by detecting the shape of the work plate. Calculating a correction value for controlling any one of the position and the rotational speed of the roller based on the calculated distortion amount;
The pattern printing step further includes a drive control step of controlling the roller based on the calculated correction value.
A method for printing an electronic device pattern.   The program for making a computer perform the printing method of the electronic device pattern of Claim 11.   A recording medium on which the program according to claim 12 is recorded.

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