JP2016080718A - Method for manufacturing optical member - Google Patents

Method for manufacturing optical member Download PDF

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JP2016080718A
JP2016080718A JP2014208097A JP2014208097A JP2016080718A JP 2016080718 A JP2016080718 A JP 2016080718A JP 2014208097 A JP2014208097 A JP 2014208097A JP 2014208097 A JP2014208097 A JP 2014208097A JP 2016080718 A JP2016080718 A JP 2016080718A
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antireflection layer
peripheral surface
lens
antireflection
ring
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JP6439366B2 (en
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歳久 木下
Toshihisa Kinoshita
歳久 木下
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Ricoh Imaging Co Ltd
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Ricoh Imaging Co Ltd
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Abstract

PROBLEM TO BE SOLVED: To provide an easy method for masking with an accurate boundary line.SOLUTION: A method for manufacturing an optical member is provided, which comprises disposing an antireflection layer on a substrate. The substrate has a recessed part, a groove, or a projection between a part where an antireflection layer is to be disposed and a part where an antireflection layer is not to be formed, for preventing adhesion of a resist film in the part where an antireflection layer is to be formed. In the method for manufacturing an optical member, a resist film is formed on the part where an antireflection layer is not to be formed, the substrate with the resist film formed thereon is subjected to an antireflection treatment, and then the resist film is removed.SELECTED DRAWING: Figure 7

Description

本発明は、カメラ、顕微鏡等の光学装置に用いる鏡筒等の光学部材の製造方法に関する。   The present invention relates to a method for manufacturing an optical member such as a lens barrel used in an optical apparatus such as a camera or a microscope.

撮影レンズ、プリズム等の光学素子を保持するカメラ、顕微鏡等の光学装置の鏡筒等の光学部材は、内壁面に反射防止処理を施すのが一般的であり、それにより光学系の光路から外れた光の反射を抑え、もってゴーストやフレアの発生を抑える。鏡筒内で光路から外れた光の反射を抑えるために、種々の提案がなされている。   An optical member such as a lens holding an optical element such as a photographing lens or a prism, or a lens barrel of an optical device such as a microscope is generally subjected to an antireflection treatment on the inner wall surface, thereby deviating from the optical path of the optical system. Suppresses the reflection of light and suppresses the generation of ghosts and flares. Various proposals have been made to suppress reflection of light deviating from the optical path in the lens barrel.

内壁面に反射防止処理を施す際、反射防止処理を行わない部分にマスキングを行うことにより、内壁面の反射防止層を設ける箇所に選択的に反射防止処理を施すことができる。マスキング方法としては、樹脂製の粘着テープを貼る方法や、マスキング用治具を取り付ける方法が挙げられる。しかし、粘着テープを貼る方法ではカメラ鏡筒の内壁のような狭い場所や、小さい部品に正確に張ることが難しい。マスキング用治具を用いる方法では正確な寸法精度と密着力が要求されるため、治具が高価になることや、レジスト剤の浸み込みを完全に防止することは難しい。   When the antireflection treatment is performed on the inner wall surface, masking is performed on a portion where the antireflection treatment is not performed, so that the antireflection treatment can be selectively performed on the portion on the inner wall surface where the antireflection layer is provided. Examples of the masking method include a method of sticking a resin adhesive tape and a method of attaching a masking jig. However, it is difficult to apply an adhesive tape to a narrow place such as the inner wall of a camera barrel or small parts accurately. In the method using the masking jig, accurate dimensional accuracy and adhesion are required, so that the jig becomes expensive and it is difficult to completely prevent the resist agent from entering.

特開2010-186157号公報(特許文献1)は、鏡枠部材の表面のうち、反射防止面形成面以外の面にマスキングを施し、鏡枠部材の表面のマスキングを施していない他の部分に反射防止処理を施した後、マスキングを除去する鏡枠部材の表面加工方法を開示している。しかしこの方法では、反射防止処理を施す面にもレジスト剤が付着しないようにマスキングを施すことが難しい。   JP-A-2010-186157 (Patent Document 1) discloses that the surface of the lens frame member is masked on a surface other than the antireflection surface forming surface, and the surface of the lens frame member is not masked. A surface processing method of a lens frame member is disclosed in which masking is removed after performing antireflection treatment. However, with this method, it is difficult to perform masking so that the resist agent does not adhere to the surface subjected to the antireflection treatment.

特開2010-186157号公報JP 2010-186157 A

従って本発明の目的は、反射防止層が設けられる部分と反射防止層が設けられない部分とを簡便に区分けしつつ、反射防止層を備えた光学部材を製造する方法を提供することである。   Accordingly, an object of the present invention is to provide a method for producing an optical member having an antireflection layer while easily distinguishing a portion where an antireflection layer is provided from a portion where no antireflection layer is provided.

上記課題に鑑み鋭意研究の結果、本発明者は、反射防止層が設けられる部分と反射防止層が設けられない部分との間に、反射防止層が設けられる部分にレジスト膜が付着するのを防止するための凹部、溝部又は突起部を有する基材を用いてマスキング及び反射防止処理を行うことにより、反射防止層を備えた光学部材を簡便に製造することができることを発見し、本発明に想到した。   As a result of intensive studies in view of the above problems, the present inventors have found that the resist film adheres to the portion where the antireflection layer is provided between the portion where the antireflection layer is provided and the portion where the antireflection layer is not provided. It was discovered that an optical member provided with an antireflection layer can be easily produced by performing masking and antireflection treatment using a base material having a recess, groove or protrusion for preventing the present invention. I came up with it.

本発明の一実施態様による光学部材の製造方法は、基材に反射防止層を設けることにより光学部材を製造する方法であって、前記基材は、前記反射防止層が設けられる部分と前記反射防止層が設けられない部分との間に、前記反射防止層が設けられる部分にレジスト膜が付着するのを防止するための凹部、溝部又は突起部を有し、前記反射防止層が設けられない部分にレジスト膜を形成し、前記レジスト膜が形成された前記基材に反射防止処理を施した後、前記レジスト膜を除去することを特徴とする。   An optical member manufacturing method according to an embodiment of the present invention is a method of manufacturing an optical member by providing an antireflection layer on a base material, wherein the base material includes a portion on which the antireflection layer is provided and the reflective surface. There is a recess, groove or protrusion for preventing the resist film from adhering to the portion where the antireflection layer is provided between the portion where the antireflection layer is not provided, and the antireflection layer is not provided A resist film is formed on the portion, and the substrate on which the resist film is formed is subjected to an antireflection treatment, and then the resist film is removed.

前記反射防止処理は、基材にめっき処理を施し、又はめっき処理を施した後にエッチング処理を施すのが好ましい。   In the antireflection treatment, it is preferable that the base material is subjected to a plating treatment, or the etching treatment is performed after the plating treatment.

前記基材は鏡筒又は前記鏡筒の光学素子支持枠、間隔環及び押さえ環の少なくとも一種の内部環であるのが好ましく、前記凹部、前記溝部又は前記突起部は環状であるのが好ましい。   The substrate is preferably a lens barrel or at least one internal ring of an optical element support frame, a spacing ring, and a pressing ring of the lens barrel, and the recess, the groove, or the protrusion is preferably annular.

前記反射防止層は0.1〜30μmのピッチでランダムに形成された高さ0.5〜20μmの多数の微小突起を有するのが好ましい。   The antireflection layer preferably has a large number of minute protrusions having a height of 0.5 to 20 μm, which are randomly formed at a pitch of 0.1 to 30 μm.

前記基材の他の基材と接する部分には前記反射防止層が設けられていないのが好ましく、前記他の基材がレンズであるのが好ましく、前記突起部がレンズと当接するのが好ましい。前記基材の前記他の基材と接する部分の少なくとも一端に前記凹部が設けられているのが好ましい。   It is preferable that the antireflection layer is not provided in a portion in contact with the other base material of the base material, the other base material is preferably a lens, and the protrusion is preferably in contact with the lens. . It is preferable that the concave portion is provided at at least one end of a portion of the base material that contacts the other base material.

本発明によれば、反射防止層が設けられる部分と反射防止層が設けられない部分との間に、反射防止層が設けられる部分にレジスト膜が付着するのを防止するための凹部、溝部又は突起部を有する基材を用いてマスキング及び反射防止処理を行うことにより、反射防止層を備えた光学部材を簡便に製造することができる。   According to the present invention, the concave portion, the groove portion, or the groove portion for preventing the resist film from adhering to the portion where the antireflection layer is provided between the portion where the antireflection layer is provided and the portion where the antireflection layer is not provided. By performing masking and antireflection treatment using a substrate having a protrusion, an optical member having an antireflection layer can be easily produced.

反射防止層を有する鏡筒にレンズを装着した例を示す縦断面図である。It is a longitudinal cross-sectional view which shows the example which mounted | wore the lens barrel which has an antireflection layer. 間隔環の一例を示す縦断面図である。It is a longitudinal cross-sectional view which shows an example of a space | interval ring. 図2の間隔環に反射防止層を形成する方法を示す図である。It is a figure which shows the method of forming an antireflection layer in the space | interval ring of FIG. 反射防止層を有する間隔環を示す図である。It is a figure which shows the space | interval ring which has an antireflection layer. 間隔環の別の例を示す縦断面図である。It is a longitudinal cross-sectional view which shows another example of a space | interval ring. 間隔環のさらに別の例を示す縦断面図である。It is a longitudinal cross-sectional view which shows another example of a space | interval ring. 図6の間隔環に反射防止層を形成する方法を示す図である。It is a figure which shows the method of forming an antireflection layer in the space | interval ring of FIG. 反射防止層を有する間隔環を示す図である。It is a figure which shows the space | interval ring which has an antireflection layer. 間隔環のさらに別の例を示す縦断面図である。It is a longitudinal cross-sectional view which shows another example of a space | interval ring. 図9の間隔環に反射防止層を形成する方法を示す図である。It is a figure which shows the method of forming an antireflection layer in the space | interval ring of FIG. 反射防止層を有する間隔環を示す図である。It is a figure which shows the space | interval ring which has an antireflection layer. 内方フランジの一例を示す縦断面図である。It is a longitudinal cross-sectional view which shows an example of an inner flange. 図12の内方フランジに反射防止層を形成する方法を示す図である。FIG. 13 is a view showing a method of forming an antireflection layer on the inner flange of FIG. 反射防止層を有する内方フランジを示す図である。It is a figure which shows the inner flange which has an antireflection layer. 第一の押さえ環の一例を示す縦断面図である。It is a longitudinal cross-sectional view which shows an example of a 1st pressing ring. 図14の第一の押さえ環に反射防止層を形成する方法を示す図である。FIG. 15 is a diagram showing a method of forming an antireflection layer on the first pressing ring of FIG. 反射防止層を有する第一の押さえ環を示す図である。It is a figure which shows the 1st pressing ring which has an antireflection layer.

本発明の光学部材の製造方法は、鏡筒又は鏡筒の光学素子支持枠、間隔環及び押さえ環の少なくとも一種の内部環からなる基材に対して好適に用いることができる。従って、本発明の光学部材の製造方法を、基材として鏡筒及び内部環を用いて添付図面を参照して以下詳細に説明する。しかし、本発明は勿論それらに限定されるものではない。各実施形態に関する説明は、特に断りがなければ他の実施形態にも適用できる。   The method for producing an optical member of the present invention can be suitably used for a base material composed of a lens barrel or an optical element support frame of the lens barrel, a spacing ring, and an inner ring of a pressing ring. Therefore, the optical member manufacturing method of the present invention will be described in detail below with reference to the accompanying drawings using a lens barrel and an inner ring as a base material. However, the present invention is not limited to them. The description regarding each embodiment is applicable also to other embodiment unless there is particular notice.

[1] 従来の鏡筒
反射防止層を形成した従来の鏡筒及び内部環の一例を図1に示す。従来の一般的な鏡筒及び内部環とそれらの表面に設けられた反射防止層について説明した上で、図2以降で本発明の各実施例を詳細に説明する。図1には説明のために、鏡筒により支持されるレンズを記載している。以下の説明では図1の左側を「前方」とし、右側を「後方」とする。
[1] Conventional barrel FIG. 1 shows an example of a conventional barrel and an inner ring in which an antireflection layer is formed. The conventional general lens barrel and the inner ring and the antireflection layer provided on the surface thereof will be described, and each embodiment of the present invention will be described in detail with reference to FIG. For the sake of explanation, FIG. 1 shows a lens supported by a lens barrel. In the following description, the left side of FIG. 1 is “front” and the right side is “rear”.

図1に示す鏡筒1は、中間部に径方向内向きに突出した内方フランジ12を一体的に備え、前方の内周面に雌ねじ部110が形成され、後方の外周面に雄ねじ部120が形成された鏡筒本体10と、鏡筒本体10の雌ねじ部110と螺合する雄ねじ部130を外周面に備える第一の押さえ環13と、前方に径方向内向きに突出して設けられた内方フランジ40を有する間隔環14と、鏡筒本体10の雌ねじ部120と螺合する雄ねじ部150を外周面に備える第二の押さえ環15とを備える。鏡筒本体10、第一の押さえ環13、間隔環14及び第二の押さえ環15は光軸Oを中心とする同心をなしている。   The lens barrel 1 shown in FIG. 1 is integrally provided with an inward flange 12 projecting radially inward at an intermediate portion, a female screw portion 110 is formed on the front inner peripheral surface, and a male screw portion 120 is formed on the rear outer peripheral surface. Formed on the outer peripheral surface of the barrel main body 10 formed with the male screw portion 110 to be engaged with the female screw portion 110 of the barrel main body 10, and provided to project forward inward in the radial direction. A spacing ring 14 having an inner flange 40 and a second pressing ring 15 having a male threaded portion 150 screwed with a female threaded portion 120 of the lens barrel body 10 on the outer peripheral surface are provided. The lens barrel body 10, the first pressing ring 13, the spacing ring 14 and the second pressing ring 15 are concentric with the optical axis O as the center.

図1に示すように、鏡筒1の内部に、樹脂製又はガラス製で無色透明かつ光軸Oを中心とする回転対称形状の第一のレンズL1、第二のレンズL2及び第三のレンズL3を設置することができる。   As shown in FIG. 1, a first lens L1, a second lens L2, and a third lens, which are made of resin or glass, are colorless and transparent, and have a rotationally symmetric shape about the optical axis O, as shown in FIG. L3 can be installed.

第一のレンズL1は、前端縁が第一の押さえ環13の後面と当接しており、後端縁が内方フランジ12の前面と当接している。第二のレンズL2は、前端縁が内方フランジ12の後面と当接しており、後端縁が間隔環14の前面と当接している。第三のレンズL3は、前端縁が間隔環14の後面と当接しており、後端縁が第二の押さえ環15の前面と当接している。   The front end edge of the first lens L1 is in contact with the rear surface of the first pressing ring 13, and the rear end edge is in contact with the front surface of the inner flange 12. In the second lens L2, the front end edge is in contact with the rear surface of the inner flange 12, and the rear end edge is in contact with the front surface of the spacing ring. In the third lens L3, the front end edge is in contact with the rear surface of the spacing ring 14, and the rear end edge is in contact with the front surface of the second pressing ring 15.

鏡筒本体10の内方フランジ12、第一の押さえ環13及び間隔環14の内壁面のうち、反射防止を要する面に反射防止層がそれぞれ設けられている。すなわち、図1に示す例では、内方フランジ12の内周面、前面及び後面の第一のレンズL1及び第二のレンズL2と接していない部分に反射防止層12a,12bが設けられており、第一の押さえ環13の内周面及び前面の第一のレンズL1と接していない部分に反射防止層13aが設けられており、間隔環14の内周面、前面及び後面の第二のレンズL2及び第三のレンズL3と接していない部分に反射防止層14a,14bが設けられている。鏡筒1の反射防止層は、レンズや各部材と嵌合する面を除く部分全てに設けられていれば最も反射防止効果が得られるが、少なくともレンズ等の光学素子に挟まれる領域に設けられているのが望ましい。   Of the inner wall surfaces of the inner flange 12, the first pressing ring 13, and the spacing ring 14 of the lens barrel body 10, antireflection layers are provided on the surfaces that require antireflection, respectively. That is, in the example shown in FIG. 1, the antireflection layers 12a and 12b are provided on the inner peripheral surface, the front surface, and the rear surface of the inner flange 12 at portions not in contact with the first lens L1 and the second lens L2. The antireflection layer 13a is provided on the inner peripheral surface of the first pressing ring 13 and the portion of the front surface that is not in contact with the first lens L1, and the second inner surface, front surface, and rear surface of the spacing ring 14 are provided. Antireflection layers 14a and 14b are provided in portions not in contact with the lens L2 and the third lens L3. The antireflection layer of the lens barrel 1 provides the most antireflection effect as long as it is provided on all parts except the surface that fits the lens and each member, but is provided at least in a region sandwiched between optical elements such as a lens. It is desirable.

図1の例では内方フランジ12、第一の押さえ環13及び間隔環14に設けたが、反射防止層を設ける箇所はそれらに限定されず、鏡枠部材のあらゆる箇所に取り付けることができる。例えば、内部を光路が通過する部材であれば内壁面は円筒形に限定されず、カメラボディの内のミラーボックス内の壁面や、ファインダー光路の壁面のような円筒形でない壁面にも反射防止層を設けることができる。さらに、反射防止層を設ける鏡筒はカメラに限定されず、顕微鏡の鏡筒にも取り付け可能である。   In the example of FIG. 1, the inner flange 12, the first pressing ring 13, and the spacing ring 14 are provided. However, the place where the antireflection layer is provided is not limited thereto, and can be attached to any part of the lens frame member. For example, the inner wall surface is not limited to a cylindrical shape as long as it is a member through which the optical path passes, and the antireflection layer is also applied to the wall surface in the mirror box in the camera body and the non-cylindrical wall surface such as the wall surface of the finder optical path. Can be provided. Further, the lens barrel provided with the antireflection layer is not limited to the camera, and can be attached to the microscope barrel.

鏡筒の材料は特に限定されないが、アルミニウム又はアルミニウムを主成分とする合金からなるのが好ましい。また反射防止効果をより高めるために、鏡筒の内壁面にアルマイト処理又は黒アルマイト処理が施されているのが好ましい。また鏡筒の構成は図1のものに限らず、光学素子の支持・位置決めを行うものであれば、種々のものを採用することができる。例えば、鏡筒はレンズ等の光学素子同士の間隔を調整する間隔環や、鏡筒内に取り付けられ、光学素子を設置する光学素子支持枠等の内部環を有していても良い。   The material of the lens barrel is not particularly limited, but is preferably made of aluminum or an alloy containing aluminum as a main component. In order to further enhance the antireflection effect, it is preferable that the inner wall surface of the lens barrel is subjected to an alumite treatment or a black alumite treatment. The configuration of the lens barrel is not limited to that shown in FIG. 1, and various configurations can be adopted as long as they support and position the optical element. For example, the lens barrel may have an interval ring that adjusts the interval between optical elements such as lenses, or an internal ring such as an optical element support frame that is attached in the lens barrel and installs the optical elements.

[2] 光学素子の製造方法
(1) 間隔環
図2は本発明に用いる間隔環24の一例を示す。図2に示す間隔環24は、外周面241の両端に環状の凹部242,242が設けられている。
[2] Manufacturing method of optical element
(1) Interval Ring FIG. 2 shows an example of the interval ring 24 used in the present invention. The spacing ring 24 shown in FIG. 2 is provided with annular recesses 242 and 242 at both ends of the outer peripheral surface 241.

図3は間隔環24の外周面以外に反射防止層24aを形成する工程を示す。反射防止層24aを間隔環24の外周面以外に設けることにより、間隔環24に反射防止効果を付与することができる。図3(1) は図2に示す間隔環24の片断面図を示しており、図3(1) に示す凹部242,242は間隔環24の外周面に沿って環状に形成されている。以降の図面でも同様である。   FIG. 3 shows a process of forming the antireflection layer 24a other than the outer peripheral surface of the spacing ring 24. By providing the antireflection layer 24a other than the outer peripheral surface of the spacing ring 24, the spacing ring 24 can be provided with an antireflection effect. FIG. 3 (1) shows a half sectional view of the spacing ring 24 shown in FIG. 2, and the recesses 242 and 242 shown in FIG. 3 (1) are annularly formed along the outer peripheral surface of the spacing ring 24. The same applies to the subsequent drawings.

間隔環24の外周面241にレジスト剤を塗布し、乾燥することによりレジスト膜24bを形成する(図3(2))。レジスト剤の塗布は、間隔環24の外周面以外にマスキング剤が付着しないように、刷毛や筆等により行うのが望ましい。レジスト剤は特に限定されないが、めっき処理に好適に用いられる等が挙げられる。   A resist agent is applied to the outer peripheral surface 241 of the spacing ring 24 and dried to form a resist film 24b (FIG. 3 (2)). The resist agent is preferably applied with a brush, a brush, or the like so that the masking agent does not adhere to other than the outer peripheral surface of the spacing ring 24. Although a resist agent is not specifically limited, The thing etc. which are used suitably for a plating process are mentioned.

間隔環24の外周面241にレジスト剤を塗布する際、レジスト剤が外周面241から僅かにはみ出したとしても、両端に設けられた凹部242,242に垂れ込むが、レジスト剤が間隔環24の側面にまで届くことはない。すなわち、間隔環24の外周面241の両端に凹部242,242を設けることにより、レジスト膜24bが間隔環24の側面にも付着するのを防止することができる。   When applying the resist agent to the outer peripheral surface 241 of the spacing ring 24, even if the resist agent slightly protrudes from the outer peripheral surface 241, the resist agent hangs down into the recesses 242 and 242 provided at both ends. It never reaches the side. That is, by providing the recesses 242 and 242 at both ends of the outer peripheral surface 241 of the spacing ring 24, it is possible to prevent the resist film 24b from adhering to the side surfaces of the spacing ring 24.

間隔環24をニッケルめっき処理又はニッケル合金めっき処理等のめっき処理を行うことにより、間隔環24の内周面及び両側面に反射防止層24aを形成する(図3(3))。レジスト膜24bは間隔環24の内周面及び両側面に形成されていないため、間隔環14の内周面及び両側面に確実に反射防止層24aを形成することができる。反射防止層24aの厚みは3〜90μmであるのが好ましい。以降に説明する反射防止層の厚みも反射防止層24aと同じで良い。   By performing a plating process such as nickel plating or nickel alloy plating on the spacing ring 24, an antireflection layer 24a is formed on the inner peripheral surface and both side surfaces of the spacing ring 24 (FIG. 3 (3)). Since the resist film 24b is not formed on the inner peripheral surface and both side surfaces of the spacing ring 24, the antireflection layer 24a can be reliably formed on the inner peripheral surface and both side surfaces of the spacing ring 14. The thickness of the antireflection layer 24a is preferably 3 to 90 μm. The thickness of the antireflection layer described below may be the same as that of the antireflection layer 24a.

間隔環24の反射防止層24aにエッチング処理を施しても良い。これにより、間隔環24の反射防止層24aに多数の微小突起がランダムに形成される。微小突起の高さは0.5〜20μmであるのが好ましく、ピッチが0.1〜30μmであるのが好ましい。このエッチング処理は、例えば、硝酸など(硝酸エッチング)によりを行う。エッチング処理はレジスト膜24bを除去する前に行っても良いし、レジスト膜24bを除去した後に行っても良い。またエッチング処理前の反射防止層24aの微小突起の高さ及びピッチが上記数値範囲に含まれる場合、このエッチング工程を省略しても良い。このように部材表面に多数の微小突起がランダムな配列で形成された微細凹凸構造を設けることにより、可視光波長に対して反射防止効果を得ることができる。微細凹凸構造による反射防止特性に関する説明については、特開2010-186157号を参照されたい。   The antireflection layer 24a of the spacing ring 24 may be etched. As a result, a large number of minute protrusions are randomly formed on the antireflection layer 24a of the spacing ring 24. The height of the microprotrusions is preferably 0.5 to 20 μm, and the pitch is preferably 0.1 to 30 μm. This etching process is performed by, for example, nitric acid (nitric acid etching). The etching process may be performed before the resist film 24b is removed, or may be performed after the resist film 24b is removed. In addition, when the height and pitch of the minute protrusions of the antireflection layer 24a before the etching treatment are included in the above numerical range, this etching step may be omitted. As described above, by providing a fine concavo-convex structure in which a large number of minute protrusions are formed in a random arrangement on the surface of the member, an antireflection effect can be obtained with respect to visible light wavelengths. Refer to Japanese Patent Application Laid-Open No. 2010-186157 for an explanation of the antireflection characteristics by the fine uneven structure.

レジスト膜24bを除去することにより、内周面及び両側面に反射防止層14aが設けられた間隔環24が得られる(図3(4))。レジスト膜24bの除去は、例えば間隔環24をレジスト剥離剤に浸漬してレジスト膜24bを剥離させた後、純水で洗浄することにより行う。   By removing the resist film 24b, the spacing ring 24 having the antireflection layer 14a provided on the inner peripheral surface and both side surfaces is obtained (FIG. 3 (4)). The removal of the resist film 24b is performed, for example, by immersing the spacing ring 24 in a resist remover to remove the resist film 24b and then washing with pure water.

反射防止層24aが設けられた間隔環24を鏡筒本体10に設置し、第二のレンズL2及び第三のレンズL3を取り付けた例を図5に示す。図5に示すように、鏡筒本体10の内周面と接する間隔環24の外周面241には反射防止層24aは設けられていない。なお反射防止層24aは図3(4) に示すように凹部242,242の一部にも形成されていても良い。凹部242,242は鏡筒本体10と接しないため、鏡筒本体10との摺接することにより反射防止層が破壊されることがなく、凹部242,242と鏡筒本体10との間の隙間に光が捕捉されることにより、その部分の光の反射を抑えることが出来る。   FIG. 5 shows an example in which the interval ring 24 provided with the antireflection layer 24a is installed in the barrel main body 10 and the second lens L2 and the third lens L3 are attached. As shown in FIG. 5, the antireflection layer 24 a is not provided on the outer peripheral surface 241 of the spacing ring 24 in contact with the inner peripheral surface of the barrel body 10. The antireflection layer 24a may also be formed in a part of the recesses 242 and 242 as shown in FIG. 3 (4). Since the recesses 242 and 242 do not contact the lens barrel body 10, the antireflection layer is not destroyed by sliding contact with the lens barrel body 10, and the gap between the recesses 242 and 242 and the lens barrel body 10 is not broken. By capturing the light, reflection of the light at that portion can be suppressed.

図3及び4にて説明した実施例では間隔環24の第二のレンズL2及び第三のレンズL3と接する部分に反射防止層24aが設けられているが、第二のレンズL2及び第三のレンズL3と接する部分に反射防止層が設けられていない間隔環の実施例について以下説明する。   In the embodiment described with reference to FIGS. 3 and 4, the antireflection layer 24a is provided on the part of the spacing ring 24 in contact with the second lens L2 and the third lens L3, but the second lens L2 and the third lens L3 are provided. An example of an interval ring in which an antireflection layer is not provided in a portion in contact with the lens L3 will be described below.

図5は本発明に用いる間隔環34の別の例を示す。図5に示す間隔環34は、外周面341の両端部に環状の溝部342,342が設けられている。図2及び3の間隔環24と同様に間隔環34の外周面341のみにレジスト剤を塗布する。間隔環34の外周面341にレジスト剤を塗布する際、レジスト剤が外周面341から僅かにはみ出したとしても、両端部に設けられた溝部342,342に垂れ込むことにより、溝部342,342でレジスト剤を補足し、レジスト剤が間隔環34の側面にまで届くことはない。すなわち、間隔環34の外周面341の両端部に環状の溝部342,342を設けることにより、レジスト剤が間隔環34の側面にも付着するのを防止することができる。   FIG. 5 shows another example of the spacing ring 34 used in the present invention. The spacing ring 34 shown in FIG. 5 is provided with annular grooves 342 and 342 at both ends of the outer peripheral surface 341. Similar to the spacing ring 24 in FIGS. 2 and 3, a resist agent is applied only to the outer peripheral surface 341 of the spacing ring 34. When a resist agent is applied to the outer peripheral surface 341 of the spacing ring 34, even if the resist agent slightly protrudes from the outer peripheral surface 341, the resist agent drips into the groove portions 342 and 342 provided at both end portions, so that the groove portions 342 and 342 The resist agent is supplemented, and the resist agent does not reach the side surface of the spacing ring 34. That is, by providing the annular grooves 342 and 342 at both ends of the outer peripheral surface 341 of the spacing ring 34, it is possible to prevent the resist agent from adhering to the side surfaces of the spacing ring 34.

図6は本発明に用いる間隔環のさらに別の例を示す。図6に示す間隔環44は、外周面441の後端に設けられた環状の凹部451と、後面442の内周面側に設けられた環状の溝部452と、前面443の外周面側に設けられた環状の溝部453と、内周面444の後端に設けられた環状の突起部454とを有する。   FIG. 6 shows still another example of the spacing ring used in the present invention. 6 is provided on the outer peripheral surface side of the front surface 443, the annular recess 451 provided on the rear end of the outer peripheral surface 441, the annular groove portion 452 provided on the inner peripheral surface side of the rear surface 442. An annular groove portion 453 and an annular protrusion 454 provided at the rear end of the inner peripheral surface 444.

図7は間隔環44の外周面以外に反射防止層44a,44bを形成する工程を示す。図7(1) は図6に示す間隔環44の片断面図を示す。間隔環44の外周面441及び前面443の外周面側部4431と、後面442の内周面側部4422及び突起部454の後面側とにレジスト剤を塗布し、乾燥することによりレジスト膜44c,44dを形成する(図7(2))。レジスト剤の塗布及びレジスト膜は上記と同じで良い。   FIG. 7 shows a process of forming the antireflection layers 44 a and 44 b other than the outer peripheral surface of the spacing ring 44. FIG. 7 (1) is a half sectional view of the spacing ring 44 shown in FIG. A resist agent is applied to the outer peripheral surface side portion 4431 of the outer peripheral surface 441 and the front surface 443 of the spacing ring 44, and the inner peripheral surface side portion 4422 and the rear surface side of the projection 454 of the rear surface 442, and dried to form a resist film 44c, 44d is formed (FIG. 7 (2)). The application of the resist agent and the resist film may be the same as described above.

間隔環44にレジスト剤を塗布する際、前面443の外周面側部4431と内周面側部4432との間に溝部453が設けられているので、外周面側部4431に塗布したレジスト剤は溝部453に補足され、内周面側部4432に流れ込むのを防止することができる。また後面442の内周面側部4422と外周面側部4421との間に溝部452が設けられているので、内周面側部4422に塗布したレジスト剤は溝部452に補足され、外周面側部4421に流れ込むのを防止することができる。加えて、突起部454を設けることにより内周面側部4422に塗布したレジスト剤が内周面344に流れ込むのを防止することができる。   When applying the resist agent to the spacing ring 44, since the groove portion 453 is provided between the outer peripheral surface side portion 4431 and the inner peripheral surface side portion 4432 of the front surface 443, the resist agent applied to the outer peripheral surface side portion 4431 is It is supplemented by the groove portion 453 and can be prevented from flowing into the inner peripheral surface side portion 4432. Further, since a groove 452 is provided between the inner peripheral surface side portion 4422 and the outer peripheral surface side portion 4421 of the rear surface 442, the resist agent applied to the inner peripheral surface side portion 4422 is supplemented by the groove portion 452, and the outer peripheral surface side. Flowing into the portion 4421 can be prevented. In addition, the provision of the protrusion 454 can prevent the resist agent applied to the inner peripheral surface side portion 4422 from flowing into the inner peripheral surface 344.

図3(3)及び(4) と同様に間隔環44に反射防止処理を施した後、レジスト膜44c,44dを除去することにより、前面443の内周面側部4432及び内周面444に反射防止層44aが形成され、後面442の外周面側部4421に反射防止層44bが形成された間隔環44が得られる。   Similar to FIGS. 3 (3) and (4), after the anti-reflection treatment is applied to the spacing ring 44, the resist films 44c and 44d are removed, so that the inner peripheral surface side portion 4432 and the inner peripheral surface 444 of the front surface 443 are removed. An antireflection layer 44a is formed, and an interval ring 44 is obtained in which an antireflection layer 44b is formed on the outer peripheral surface side portion 4421 of the rear surface 442.

反射防止層44a,44bが設けられた間隔環44を鏡筒本体10に設置し、第二のレンズL2及び第三のレンズL3を取り付けた例を図8に示す。図8に示すように、鏡筒本体10の内周面と接する間隔環44の外周面441には反射防止層が設けられておらず、第二のレンズL2及び第三のレンズL3と接する部分にも反射防止層が設けられていない。そのため、反射防止層44a,44bにより十分な反射防止効果が得られつつ、鏡筒本体やレンズとの接触により反射防止層が破壊され、その破片が粉としてレンズや他の部品等に付着するのを防止することができる。   FIG. 8 shows an example in which the spacing ring 44 provided with the antireflection layers 44a and 44b is installed in the lens barrel body 10, and the second lens L2 and the third lens L3 are attached. As shown in FIG. 8, the outer peripheral surface 441 of the spacing ring 44 in contact with the inner peripheral surface of the lens barrel body 10 is not provided with an antireflection layer, and is in contact with the second lens L2 and the third lens L3. Also, no antireflection layer is provided. Therefore, while the antireflection layers 44a and 44b provide a sufficient antireflection effect, the antireflection layer is destroyed by contact with the lens barrel body or the lens, and the fragments adhere to the lens or other parts as powder. Can be prevented.

図9は本発明に用いる間隔環のさらに別の例を示す。図9に示す間隔環54は、外周面541の後端に設けられた環状の凹部551と、後面542の内周面側の端部に設けられた環状の突起部552と、前面543の外周面側の端部に設けられた環状の突起部553と、内周面544の後端に設けられた環状の突起部554とを有する。   FIG. 9 shows still another example of the spacing ring used in the present invention. 9 includes an annular recess 551 provided at the rear end of the outer peripheral surface 541, an annular protrusion 552 provided at the inner peripheral surface end of the rear surface 542, and an outer periphery of the front surface 543. An annular protrusion 553 provided at the end on the surface side and an annular protrusion 554 provided at the rear end of the inner peripheral surface 544 are provided.

図10は間隔環54の外周面以外に反射防止層54a,54bを形成する工程を示す。図10(1) は図9に示す間隔環54の片断面図を示す。間隔環54の外周面541及び前面543の突起部553の前面側と、後面542の突起部552の後面側及び内周面側とにレジスト剤を塗布し、乾燥することによりレジスト膜54c,54dを形成する(図10(2))。レジスト剤の塗布及びレジスト膜は上記と同じで良い。   FIG. 10 shows a process of forming the antireflection layers 54a and 54b other than the outer peripheral surface of the spacing ring 54. FIG. 10 (1) is a half sectional view of the spacing ring 54 shown in FIG. Resist films 54c and 54d are formed by applying a resist agent to the front surface side of the outer peripheral surface 541 of the spacing ring 54 and the protrusion 553 of the front surface 543 and the rear surface side and inner peripheral surface of the protrusion 552 of the rear surface 542 and drying. (FIG. 10 (2)). The application of the resist agent and the resist film may be the same as described above.

間隔環54にレジスト剤を塗布する際、外周面541と前面543との間に突起部553が設けられているので、外周面541に塗布したレジスト剤が前面543に流れ込むのを防止することができる。また外周面541の後端に凹部551が設けられているので、外周面541に塗布したレジスト剤は凹部551の一部に流れ込むに留まり、後面542に流れ込むのを防止することができる。加えて、内周面544の後端突起部554を設けることにより、突起部552に塗布したレジスト剤が内周面544に流れ込むのを防止することができる。   When applying the resist agent to the spacing ring 54, the protrusion 553 is provided between the outer peripheral surface 541 and the front surface 543, so that the resist agent applied to the outer peripheral surface 541 can be prevented from flowing into the front surface 543. it can. Further, since the concave portion 551 is provided at the rear end of the outer peripheral surface 541, the resist agent applied to the outer peripheral surface 541 can only flow into a part of the concave portion 551 and can be prevented from flowing into the rear surface 542. In addition, by providing the rear end protrusion 554 of the inner peripheral surface 544, the resist agent applied to the protrusion 552 can be prevented from flowing into the inner peripheral surface 544.

図3(3)及び(4) と同様に間隔環54に反射防止処理を施した後、レジスト膜54c,54dを除去することにより、前面543及び内周面544に反射防止層54aが形成され、後面542に反射防止層54bが形成された間隔環54が得られる。なお反射防止層54aは前面543の突起部553や内周面544の突起部554の一部にも形成されていても良く、反射防止層54bは外周面541の凹部551や後面542の突起部552の一部にも形成されていても良い。   Similar to FIGS. 3 (3) and (4), after the antireflection treatment is applied to the spacing ring 54, the resist films 54c and 54d are removed, whereby the antireflection layer 54a is formed on the front surface 543 and the inner peripheral surface 544. Thus, the spacing ring 54 in which the antireflection layer 54b is formed on the rear surface 542 is obtained. The antireflection layer 54a may be formed on a part of the protrusion 553 on the front surface 543 and the protrusion 554 on the inner peripheral surface 544, and the antireflection layer 54b is formed on the recess 551 on the outer peripheral surface 541 and the protrusion on the rear surface 542. It may also be formed on part of 552.

反射防止層54a,54bが設けられた間隔環54を鏡筒本体10に設置し、第二のレンズL2及び第三のレンズL3を取り付けた例を図11に示す。図11に示すように、第二のレンズL2は間隔環54の突起部553の前面と当接し、第三のレンズL3は突起部552の後面と当接する。鏡筒本体10の内周面と接する間隔環54の外周面541には反射防止層が設けられておらず、第二のレンズL2及び第三のレンズL3と接する部分にも反射防止層が設けられていない。そのため、反射防止層54a,54bにより十分な反射防止効果が得られつつ、鏡筒本体やレンズとの接触により反射防止層が破壊され、その破片が粉としてレンズや他の部品等に付着するのを防止することができる。   FIG. 11 shows an example in which the interval ring 54 provided with the antireflection layers 54a and 54b is installed in the lens barrel body 10, and the second lens L2 and the third lens L3 are attached. As shown in FIG. 11, the second lens L2 is in contact with the front surface of the protrusion 553 of the spacing ring 54, and the third lens L3 is in contact with the rear surface of the protrusion 552. No antireflection layer is provided on the outer peripheral surface 541 of the spacing ring 54 in contact with the inner peripheral surface of the lens barrel body 10, and an antireflection layer is also provided on the portion in contact with the second lens L2 and the third lens L3. It is not done. Therefore, while the antireflection layers 54a and 54b provide a sufficient antireflection effect, the antireflection layer is destroyed by contact with the lens barrel body and the lens, and the fragments adhere to the lens and other parts as powder. Can be prevented.

(2) 内方フランジ
図12は本発明に用いる鏡筒本体の内方フランジの一例を示す。図12に示す内方フランジ22は、内周面221の後端に設けられた環状の溝部224と、前面222の外周面側に設けられた環状の溝部225と、後面223の内周面側の端部に設けられた環状の突起部226とを有する。
(2) Inner flange FIG. 12 shows an example of the inner flange of the lens barrel body used in the present invention. The inner flange 22 shown in FIG. 12 includes an annular groove 224 provided at the rear end of the inner peripheral surface 221, an annular groove 225 provided on the outer peripheral surface side of the front surface 222, and an inner peripheral surface side of the rear surface 223. And an annular projecting portion 226 provided at the end portion.

図13は内方フランジ22の外周面以外に反射防止層22a,22bを形成する工程を示す。図13(1) は図12に示す鏡筒本体10の内方フランジ22の片断面図を示す。内方フランジ22の前面222の外周面側部2221と、後面223の突起部226とにレジスト剤を塗布し、乾燥することによりレジスト膜22c,22dを形成する(図13(2))。レジスト剤の塗布及びレジスト膜は上記と同じで良い。また図13(2) に示すように、鏡筒本体10の内方フランジ22のみに反射防止層を形成する場合、内方フランジ22以外の鏡筒本体10の表面にもレジスト膜22eを設ける。   FIG. 13 shows a process of forming the antireflection layers 22a and 22b other than the outer peripheral surface of the inner flange 22. FIG. 13 (1) shows a half sectional view of the inner flange 22 of the barrel body 10 shown in FIG. A resist agent is applied to the outer peripheral surface side portion 2221 of the front surface 222 of the inner flange 22 and the protrusion 226 of the rear surface 223, and dried to form resist films 22c and 22d (FIG. 13 (2)). The application of the resist agent and the resist film may be the same as described above. As shown in FIG. 13 (2), when an antireflection layer is formed only on the inner flange 22 of the lens barrel body 10, a resist film 22e is also provided on the surface of the lens barrel body 10 other than the inner flange 22.

内方フランジ22にレジスト剤を塗布する際、前面222の外周面側部2221と内周面側部222との間に溝部225が設けられているので、外周面側部2221に塗布したレジスト剤は溝部225に補足され、内周面側部2222に流れ込むのを防止することができる。また後面223に突起部226が設けられ、かつ内周面221の後端に溝部224が設けられているので、突起部226に塗布したレジスト剤が内周面221や後面223に流れ込むのを防止することができる。   Since a groove 225 is provided between the outer peripheral surface side portion 2221 and the inner peripheral surface side portion 222 of the front surface 222 when applying the resist agent to the inner flange 22, the resist agent applied to the outer peripheral surface side portion 2221 Is supplemented by the groove portion 225, and can be prevented from flowing into the inner peripheral surface side portion 2222. In addition, since the protrusion 226 is provided on the rear surface 223 and the groove 224 is provided at the rear end of the inner peripheral surface 221, the resist applied to the protrusion 226 is prevented from flowing into the inner peripheral surface 221 and the rear surface 223. can do.

図3(3)及び(4) と同様に内方フランジ22に反射防止処理を施した後、レジスト膜22c,22dを除去することにより、前面222の内周面側部2222及び内周面221に反射防止層22aが形成され、後面223に反射防止層22bが形成された内方フランジ22が得られる。なお反射防止層22aは内周面221の溝部224や前面222の溝部225の一部にも形成されていても良く、反射防止層22bは後面223の突起部226の一部にも形成されていても良い。   Similar to FIGS. 3 (3) and (4), the inner flange 22 is subjected to antireflection treatment, and then the resist films 22c and 22d are removed, whereby the inner peripheral surface side portion 2222 and the inner peripheral surface 221 of the front surface 222 are removed. The inner flange 22 having the antireflection layer 22a formed on the rear surface 223 and the antireflection layer 22b formed on the rear surface 223 is obtained. The antireflection layer 22a may be formed on a part of the groove 224 on the inner peripheral surface 221 and a part of the groove 225 on the front surface 222, and the antireflection layer 22b is also formed on a part of the protrusion 226 on the rear surface 223. May be.

反射防止層22a,22bが設けられた内方フランジ22に第一のレンズL1及び第二のレンズL2を取り付けた例を図14に示す。図14に示すように、第二のレンズL2は突起部226の後面と当接する。第一のレンズL1及び第二のレンズL2と接する部分に反射防止層が設けられていない。そのため、反射防止層22a,22bにより十分な反射防止効果が得られつつ、レンズとの接触により反射防止層が破壊され、その破片が粉としてレンズや他の部品等に付着するのを防止することができる。   An example in which the first lens L1 and the second lens L2 are attached to the inner flange 22 provided with the antireflection layers 22a and 22b is shown in FIG. As shown in FIG. 14, the second lens L2 contacts the rear surface of the protrusion 226. An antireflection layer is not provided in a portion in contact with the first lens L1 and the second lens L2. Therefore, it is possible to prevent the antireflection layer from being destroyed due to contact with the lens and the fragments from adhering to the lens or other parts as a powder while obtaining a sufficient antireflection effect by the antireflection layers 22a and 22b. Can do.

(3) 第一の押さえ環
図15は本発明に用いる第一の押さえ環の一例を示す。図15に示す第一の押さえ環23は、外周面に設けられた雄ねじ部231と、前面232の外周面側に設けられた溝部235と、内周面234の後面側に設けられた溝部236とを有する。
(3) First presser ring FIG. 15 shows an example of the first presser ring used in the present invention. 15 includes a male screw portion 231 provided on the outer peripheral surface, a groove portion 235 provided on the outer peripheral surface side of the front surface 232, and a groove portion 236 provided on the rear surface side of the inner peripheral surface 234. And have.

図16は第一の押さえ環23の前面及び内周面に反射防止層23aを形成する工程を示す。図16(1) は図15に示す第一の押さえ環23の片断面図を示す。第一の押さえ環23の雄ねじ部231、後面233、前面232の外周面側部2321及び内周面234の後面側部2342にレジスト剤を塗布し、乾燥することによりレジスト膜23bを形成する(図16(2))。レジスト剤の塗布及びレジスト膜は上記と同じで良い。   FIG. 16 shows a step of forming the antireflection layer 23a on the front surface and the inner peripheral surface of the first pressing ring 23. FIG. 16 (1) is a half sectional view of the first pressing ring 23 shown in FIG. The resist film 23b is formed by applying a resist agent to the external thread side 231 of the first presser ring 23, the rear surface 233, the outer peripheral surface side portion 2321 of the front surface 232, and the rear surface side portion 2342 of the inner peripheral surface 234, and drying. Fig. 16 (2)). The application of the resist agent and the resist film may be the same as described above.

第一の押さえ環23にレジスト剤を塗布する際、前面232の外周面側部2321と内周面側部2322との間に溝部235が設けられているので、外周面側部2321に塗布したレジスト剤は溝部235に補足され、内周面側部2322に流れ込むのを防止することができる。また内周面234の後面側部2342と前面側部2341との間に溝部236が設けられているので、後面側部2342に塗布したレジスト剤は溝部236に補足され、前面側部2341に流れ込むのを防止することができる。   When the resist agent is applied to the first holding ring 23, the groove portion 235 is provided between the outer peripheral surface side portion 2321 and the inner peripheral surface side portion 2322 of the front surface 232, so that it was applied to the outer peripheral surface side portion 2321. The resist agent is supplemented by the groove portion 235 and can be prevented from flowing into the inner peripheral surface side portion 2322. Further, since the groove 236 is provided between the rear side 2342 and the front side 2341 of the inner peripheral surface 234, the resist applied to the rear side 2342 is supplemented by the groove 236 and flows into the front side 2341. Can be prevented.

図3(3)及び(4) と同様に第一の押さえ環23に反射防止処理を施した後、レジスト膜23bを除去することにより、前面232の内周面側部2322及び内周面234の前面側部2341に反射防止層23aが形成された第一の押さえ環23が得られる。   Similar to FIGS. 3 (3) and 3 (4), the first presser ring 23 is subjected to antireflection treatment, and then the resist film 23b is removed, whereby the inner peripheral surface side portion 2322 and the inner peripheral surface 234 of the front surface 232 are removed. The first presser ring 23 having the antireflection layer 23a formed on the front side portion 2341 is obtained.

反射防止層23aが設けられた第一の押さえ環23を設置し、第一のレンズL1を取り付けた例を図17に示す。図17に示すように、鏡筒本体10の雌ねじ部110と螺合する第一の押さえ環23の雄ねじ部231には反射防止層が設けられておらず、第一のレンズL1と接する部分にも反射防止層が設けられていない。そのため、反射防止層23aにより十分な反射防止効果が得られつつ、鏡筒本体やレンズとの接触により反射防止層が破壊され、その破片が粉としてレンズや他の部品等に付着するのを防止することができる。   FIG. 17 shows an example in which the first pressing ring 23 provided with the antireflection layer 23a is installed and the first lens L1 is attached. As shown in FIG. 17, the male thread portion 231 of the first presser ring 23 that is screwed with the female thread portion 110 of the barrel body 10 is not provided with an antireflection layer, and is in a portion in contact with the first lens L1. No antireflection layer is provided. Therefore, while the antireflection layer 23a provides a sufficient antireflection effect, the antireflection layer is destroyed by contact with the lens barrel and the lens, and the fragments are prevented from adhering to the lens or other parts as powder. can do.

1・・・鏡筒
10・・・鏡筒本体
12,22・・・内方フランジ
13,23・・・第一の押さえ環
14,24,34,44,54・・・間隔環
15・・・第二の押さえ環
1 ... Tube
10 ... Body body
12,22 ... Inner flange
13, 23 ... First presser ring
14, 24, 34, 44, 54 ... spacing ring
15 ... second presser ring

Claims (9)

基材に反射防止層を設けることにより光学部材を製造する方法であって、
前記基材は、前記反射防止層が設けられる部分と前記反射防止層が設けられない部分との間に、前記反射防止層が設けられる部分にレジスト膜が付着するのを防止するための凹部、溝部又は突起部を有し、
前記反射防止層が設けられない部分にレジスト膜を形成し、前記レジスト膜が形成された前記基材に反射防止処理を施した後、前記レジスト膜を除去することを特徴とする光学部材の製造方法。
A method for producing an optical member by providing an antireflection layer on a substrate,
The substrate has a recess for preventing a resist film from adhering to a portion where the antireflection layer is provided between a portion where the antireflection layer is provided and a portion where the antireflection layer is not provided, Having a groove or protrusion,
A resist film is formed on a portion where the antireflection layer is not provided, and the resist film is removed after the antireflection treatment is performed on the base material on which the resist film is formed. Method.
請求項1に記載の光学部材の製造方法であって、前記反射防止処理は、基材にめっき処理を施し、又はめっき処理を施した後にエッチング処理を施すことにより行うことを特徴とする光学部材の製造方法。 2. The optical member manufacturing method according to claim 1, wherein the antireflection treatment is performed by performing a plating process on the base material, or performing an etching process after the plating process is performed. 3. Manufacturing method. 請求項1又は2に記載の光学部材の製造方法において、前記基材は鏡筒又は前記鏡筒の光学素子支持枠、間隔環及び押さえ環の少なくとも一種の内部環であることを特徴とする光学部材の製造方法。 3. The optical member manufacturing method according to claim 1, wherein the base material is a lens barrel or an optical element support frame of the lens barrel, an interval ring, and an inner ring of a pressing ring. Manufacturing method of member. 請求項1〜3のいずれかに記載の光学部材の製造方法において、前記凹部、前記溝部又は前記突起部は環状であることを特徴とする光学部材の製造方法。 The method for manufacturing an optical member according to claim 1, wherein the concave portion, the groove portion, or the protrusion is annular. 請求項1〜4のいずれかに記載の光学部材の製造方法において、前記反射防止層は0.1〜30μmのピッチでランダムに形成された高さ0.5〜20μmの多数の微小突起を有することを特徴とする光学部材の製造方法。 5. The method of manufacturing an optical member according to claim 1, wherein the antireflection layer has a large number of micro protrusions having a height of 0.5 to 20 [mu] m, which are randomly formed at a pitch of 0.1 to 30 [mu] m. A method for manufacturing an optical member. 請求項1〜5のいずれかに記載の基材において、前記基材の他の基材と接する部分には前記反射防止層を設けないことを特徴とする光学部材の製造方法。 6. The method for producing an optical member according to claim 1, wherein the antireflection layer is not provided in a portion in contact with the other base material of the base material. 請求項6に記載の光学部材の製造方法であって、前記他の基材がレンズであることを特徴とする光学部材の製造方法。 The method for manufacturing an optical member according to claim 6, wherein the other base material is a lens. 請求項7に記載の光学部材の製造方法であって、前記突起部がレンズと当接することを特徴とする光学部材の製造方法。 The method for manufacturing an optical member according to claim 7, wherein the protrusion is in contact with a lens. 請求項6〜8のいずれかに記載の光学部材の製造方法であって、前記基材の前記他の基材と接する部分の少なくとも一端に前記凹部が設けられていることを特徴とする光学部材の製造方法。 9. The optical member manufacturing method according to claim 6, wherein the concave portion is provided at at least one end of a portion of the base material that is in contact with the other base material. Manufacturing method.
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