JP2016076054A - Evaluation device and evaluation method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To quantitatively present reproducibility of behavior of a manipulated variable MV.SOLUTION: An evaluation device comprises: a setting value change unit 10 which changes a set point SP according to an instruction from the outside; a manipulated variable calculation unit 12 which calculates a manipulated variable MV on the basis of a set point SP and a controlled variable PV measured by a measuring instrument; a manipulated variable output unit 13 which outputs the manipulated variable MV to a control object; a reference manipulated variable storage unit 20 which stores in advance a reference change pattern MVX showing standard time change of the manipulated variable MV during control response accompanied by change of the set point SP; evaluation index calculation units 21-24 which calculate difference between the manipulated variable MV during control response and the reference change pattern MVX as an evaluation index with reference to the reference change pattern MVX; and an evaluation index presentation unit 25 which presents the calculated evaluation index.SELECTED DRAWING: Figure 4

Description

  The present invention relates to an evaluation apparatus and an evaluation method for calculating an evaluation index obtained by processing an operation amount MV so that a characteristic of a control response in a transient state is likely to appear.

  In semiconductor manufacturing equipment, EES (Equipment Engineering System) has entered a practical stage. The EES is a system that checks whether or not a semiconductor manufacturing apparatus is functioning normally with data and improves the reliability and productivity of the apparatus. The main purpose of EES is failure detection (FD: Fault Detection) and failure prediction (FP: Fault Prediction) for the device itself (see Non-Patent Document 1).

  In FD / FP, there is a way of grasping hierarchies of device control level, module level, subsystem level, and I / O device level. The FD / FP at the device control level is an FD / FP that monitors / detects whether the device function is operating within the allowable range of the device specification based on the processing conditions specified by the host or the operator. The module level FD / FP is FD / FP for monitoring / detecting whether a module constituted by a device or a subsystem can perform processing according to an instruction value. The subsystem level FD / FP is an FD / FP that monitors / detects whether a complex system including a plurality of devices that perform feedback control is operating stably based on some parameter settings. The FD / FP at the I / O device level is FD / FP that monitors / detects whether the sensors and actuators constituting the apparatus are operating stably as designed values. As described above, the main subjects at the I / O device level are sensors and actuators.

Regarding the FD / FP of the actuator, it can be said that the sequence control operation that requires only the bit string data (actuator data) of (0, 1) is in a practical stage.
On the other hand, regarding the FD / FP of the sensor, process quantities such as temperature, pressure, and flow rate become target data. For these data, msec. It is not reasonable to save all data at the level. Therefore, an EES-compliant substrate processing apparatus (see Patent Document 1) that checks the representative value by converting the sensor data into a representative value for each processing unit managed by the apparatus or for a certain period of time has been proposed. ing. The representative value is a maximum value, a minimum value, an average value, or the like. If FD / FP can be realized with these representative values, the amount of communication, the amount of required memory, and the like can be greatly reduced as compared with the case of monitoring all data.

  As FD / FP using a representative value, heater breakage FP due to deterioration, heater breakage FD due to overcurrent, and the like are known. When the heater deteriorates, the average value of the heater resistance value (non-process amount) gradually increases. Therefore, if the average value of the heater resistance value is checked as a representative value, the heater disconnection due to the deterioration is predicted. be able to. In addition, when the heater is disconnected due to an overcurrent, the maximum value of the heater resistance suddenly increases. If the maximum value of the heater resistance is checked as a representative value, the heater disconnection due to the overcurrent is detected. be able to.

  Here, the control loop corresponding to the subsystem (controller level for executing PID control or the like) is characteristic of the temperature control response of the heating device as in Patent Document 2 (corresponding to a representative value, and corresponds to the set value SP). A control device that calculates and holds a control amount PV overshoot amount or the like) has been proposed (see Patent Document 2). The technique disclosed in Patent Document 2 is a technique for storing a control result in an EEPROM (Electrically Erasable Programmable Read Only Memory) in order to grasp a control malfunction state.

JP 2010-219460 A JP 2009-217439 A

“Explanation on device function performance confirmation at device level”, Japan Electronics and Information Technology Industries Association, March 23, 2005

  As described above, the FD / FP can be put into practical use if it is a non-process amount. However, with respect to the process amount, there are few things that can realize FD / FP as in the case of non-process amount with only a simple representative value, and there is a problem that the FD / FP function cannot be sufficiently realized. Since the EES distributed arrangement in the device is an effective implementation method for improving the overall efficiency of the EES, it is required to further strengthen the FD / FP function that directly handles the most important control state itself at the controller level. ing.

  In the technique disclosed in Patent Document 2, a control amount PV (temperature at the time of temperature rise in the case of heating temperature control) is recorded as a feature amount of a control response in a transient state. However, the manipulated variable MV is also important as FD / FP for control. In this case, if a specific target value (set value SP) is used as a reference like the control amount PV, an evaluation index can be easily given, but the operation amount MV is not simple in that respect. Improvement is necessary to incorporate the manipulated variable MV as an evaluation index.

  The present invention has been made to solve the above-described problem, and calculates an operation index by processing an operation amount MV so that a characteristic of a control response in a transient state (for example, at the time of temperature rise) is likely to appear. An object of the present invention is to provide an evaluation apparatus and an evaluation method capable of quantitatively presenting the reproducibility of the behavior of the quantity MV. In other words, the present invention provides a simple FD / FP-related function that can be built in and externally attached, particularly at a simple controller level.

  The evaluation apparatus according to the present invention calculates the operation amount MV based on the setting value changing means for changing the setting value SP according to an instruction from the outside, and the control value PV measured by the setting value SP and the measuring instrument. Means, an operation amount output means for outputting the operation amount MV to a control target, and a reference change pattern MVX indicating a standard time change of the operation amount MV during the control response accompanying the change of the set value SP is stored in advance. With reference to the reference operation amount storage means and the reference change pattern MVX stored in the reference operation amount storage means, the difference between the operation amount MV and the reference change pattern MVX in the control response is calculated as an evaluation index. And an evaluation index calculating means.

Further, one configuration example of the evaluation apparatus of the present invention is characterized by further comprising evaluation index presenting means for presenting the evaluation index calculated by the evaluation index calculating means.
Moreover, in one configuration example of the evaluation apparatus of the present invention, the evaluation index calculation means calculates the evaluation index separately for an evaluation index in the first half of the control response and an evaluation index in the second half of the control response. is there.
Further, in one configuration example of the evaluation apparatus of the present invention, the evaluation index calculation means includes an evaluation index having a positive difference between the operation amount MV and the reference change pattern MVX, and the operation amount MV and the reference change pattern. The evaluation index is calculated by dividing it into an evaluation index whose difference from MVX is a negative value.

  In the evaluation method of the present invention, the operation for calculating the operation amount MV based on the setting value changing step for changing the setting value SP according to an instruction from the outside and the control value PV measured by the setting value SP and the measuring instrument. An amount calculation step, an operation amount output step for outputting the operation amount MV to a control target, and a reference change pattern MVX indicating a standard time change of the operation amount MV during a control response accompanying the change of the set value SP are previously stored. An evaluation index calculation step of calculating a difference between the operation amount MV in the control response and the reference change pattern MVX as an evaluation index with reference to the stored reference operation amount storage means. .

  According to the present invention, by calculating the difference between the manipulated variable MV in the control response accompanying the change of the set value SP and the reference change pattern MVX as an evaluation index, the characteristics of the control response in the transient state can easily appear. The manipulated variable MV can be processed and captured, and the reproducibility of the behavior of the manipulated variable MV with respect to the reference change pattern MVX can be presented quantitatively. In the present invention, even when it is difficult for the control amount PV to differ from the set value SP, the device to be controlled has deteriorated, or the control parameter (PID parameter) of the operation amount calculation means is set inappropriately. In other words, the difference between the operation amount MV and the reference change pattern MVX is likely to appear, so that the operator can recognize the feature of the difference and estimate the cause of the difference.

It is a figure explaining the principle 2 of this invention. It is a figure explaining the principle 2 of this invention. It is a figure explaining the principle 2 of this invention. It is a block diagram which shows the structure of the evaluation apparatus which concerns on embodiment of this invention. It is a block diagram which shows the structure of the heating apparatus which concerns on embodiment of this invention. It is a flowchart which shows operation | movement of the evaluation apparatus which concerns on embodiment of this invention. It is a figure which shows the example of a display of the evaluation parameter | index which concerns on embodiment of this invention. It is a figure which shows the other example of a display of the evaluation parameter | index which concerns on embodiment of this invention.

[Principle of Invention 1]
In the case of feedback control, particularly when the set value SP lamp is input (when the set value SP is gradually changed at a constant change rate ΔSP), the control amount PV is a control operation that follows the set value SP. That is, the control amount PV is compensated with high reproducibility. Therefore, even if device deterioration to the extent that it can be controlled (for example, aging changes little by little) has occurred, it is difficult for a difference to appear in the control amount PV. Thus, the point that the difference hardly appears in the control amount PV is a portion that is greatly different from the case of handling the set value SP step input as in Patent Document 2.

  On the other hand, the operation amount MV for causing the control amount PV to follow the set value SP is for compensation so that no difference appears in the control amount PV. A considerable difference must appear in MV. Accordingly, the inventor has focused on focusing on the evaluation of the manipulated variable MV against the transient state of the control response associated with the reference SP change pattern.

  However, since the cumulative value of the manipulated variable MV itself has an absolute value, it is difficult to quantify a minute difference over time. Thus, assuming a state in which the control amount PV is substantially reproduced by feedback control based on PID calculation, the inventors first came to define a reference change pattern MVX of the operation amount MV. If the evaluation index is quantified based on the difference between the reference change pattern MVX and the actually obtained control response operation amount MV, the reproducibility of the behavior of the operation amount MV is quantitatively (numerized). Can present.

[Principle of Invention 2]
When considering the overall control response, (A) the sum of the positive side of the first half (MV-MVX> 0), (B) the sum of the negative side of the first half (MV-MVX <0), (C) the positive side of the second half (MV) Dividing the evaluation index into four sums, the sum of (MV-MVX> 0) and (D) the sum of the negative side (MV-MVX <0) in the latter half cancels the difference between the positive and negative sides in the overall control response. This is preferable because it can be made difficult to occur.

  1 (A), FIG. 1 (B), FIG. 2 (A), FIG. 2 (B), FIG. 3 (A), and FIG. 3 (B) are diagrams for explaining the principle 2 of the invention. A), FIG. 2A, and FIG. 3A are diagrams showing changes in the control amount PV, and FIG. 1B, FIG. 2B, and FIG. 3B are FIG. 1A and FIG. It is a figure which shows the change of the manipulated variable MV corresponding to 2 (A) and FIG. 3 (A). 1A and 1B show a pattern in which the sum of positive values of (MV-MVX) increases in the first half of the control response, and FIGS. 2A and 2B show the first half of the control response. FIG. 3A shows a pattern in which the sum of negative values of (MV−MVX) increases, and FIGS. 3A and 3B show patterns in which the sum of (MV−MVX) increases over the entire control response.

  For example, due to some temporary disturbance, an operation amount MV larger than the reference change pattern MVX is output in the first half of the control response as shown in FIG. 1B, and the control response is more prompt than the standard case. Suppose that progressed. In this case, because of feedback control based on PID calculation, the compensation operation is such that the manipulated variable MV is output in a smaller amount than the reference change pattern MVX in the second half of the control response. That is, the sum of the positive values of (MV-MVX) is increased in the first half of the control response, and the sum of the negative values of (MV-MVX) is increased in the second half of the control response.

  Further, due to some temporary disturbance, the manipulated variable MV is output in the first half of the control response, which is slightly smaller than the reference change pattern MVX, as shown in FIG. 2B, and accordingly, the control response is delayed from the standard case. And proceed. In this case, because of the feedback control by the PID calculation, the compensation operation is such that the manipulated variable MV is output in the latter half of the control response, which is larger than the reference change pattern MVX. That is, the sum of the negative values of (MV−MVX) increases in the first half of the control response, and the sum of the positive values of (MV−MVX) increases in the second half of the control response.

  If the PID parameter is appropriately adjusted so that the control response does not vibrate, either the positive side or the negative side of the first half of the control response, or the positive side or the negative side of the second half of the control response as described above. Since the difference between the manipulated variable MV and the reference change pattern MVX appears, the operator can recognize the difference feature.

  On the other hand, when the PID parameter is set inappropriately such that the control response becomes oscillating, the positive side of the first half of the control response, the positive side of the first half of the control response, and the positive side of the second half of the control response as shown in FIG. Since the difference between the manipulated variable MV and the reference change pattern MVX is likely to appear on the side and the negative side, the operator can recognize the difference feature.

  As described above, (A) the sum of positive values of (MV-MVX) in the first half of the control response, (B) the sum of negative values of (MV-MVX) in the first half of the control response, (C) (MV) of the second half of the control response. In the feedback control system based on the PID calculation, it is extremely reasonable to divide the sum into the sum of positive values of -MVX) and (D) the sum of negative values of (MV-MVX) in the latter half of the control response.

[Embodiment]
Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 4 is a block diagram showing the configuration of the evaluation apparatus according to the embodiment of the present invention. This embodiment is an example corresponding to Principle 1 and Principle 2 of the invention. Here, a description will be given as an example in which the evaluation device is realized by a simple controller (temperature controller). The evaluation apparatus according to the present embodiment includes a temperature controller control function unit 1 that is a general configuration conventionally provided in a temperature controller, and an evaluation function unit 2 that is a characteristic configuration of the present embodiment. Is done.

  The temperature controller control function unit 1 includes a set value changing unit 10 that changes the set value SP according to an instruction from the outside of the temperature controller, a control amount input unit 11 that inputs a control amount PV from a measuring instrument, and a set value SP. An operation amount calculation unit 12 that calculates the operation amount MV based on the control amount PV and an operation amount output unit 13 that outputs the operation amount MV to the outside of the temperature controller are provided.

  The evaluation function unit 2 includes a reference operation amount storage unit 20 that stores in advance a reference change pattern MVX indicating a standard time change of the operation amount MV during a control response accompanying a change in the set value SP, and a change in the set value SP. The evaluation index calculation unit 21 that calculates the sum of positive values of (MV-MVX) in the first half of the control response as the evaluation index A and the sum of negative values of (MV-MVX) in the first half of the control response are calculated as the evaluation index B. Evaluation index calculation unit 22, evaluation index calculation unit 23 that calculates the sum of positive values of (MV−MVX) in the second half of the control response associated with the change in set value SP, and (MV−MVX) in the second half of the control response ) As an evaluation index D, and an evaluation index presenting section 25 that presents (displays) the calculated evaluation index A, evaluation index B, evaluation index C, and evaluation index D It has.

4 corresponds to the first principle of the present invention, and the evaluation index calculating units 21 to 24 and the evaluation index presenting unit 25 correspond to the second principle of the present invention.
FIG. 5 is a block diagram illustrating a configuration of a heating device to which the present embodiment is applied. The heating apparatus includes a heat treatment furnace 100 that heats an object to be treated, an electric heater 101, a temperature sensor 102 that measures the temperature in the heat treatment furnace 100, and a temperature that controls the temperature in the heat treatment furnace 100. It is comprised from the meter 103, the electric power regulator 104, the electric power supply circuit 105, and PLC (Programmable Logic Controller) 106 which controls the whole heating apparatus.

  The temperature controller 103 calculates the operation amount MV so that the control amount PV (temperature) measured by the temperature sensor 102 matches the set value SP. The set value SP is set by an operator, for example. The power regulator 104 determines power according to the operation amount MV, and supplies the determined power to the electric heater 101 through the power supply circuit 105. Thus, the temperature controller 103 controls the temperature of the object to be heated in the heat treatment furnace 100. The temperature controller control function unit 1 and the evaluation function unit 2 in FIG. 4 are mounted on the temperature controller 103.

  Hereinafter, the operation of the evaluation apparatus of the present embodiment will be described with reference to FIG. FIG. 6 is a flowchart showing the operation of the evaluation apparatus. Here, a case will be described in which the set value SP is a temperature set value and the control amount PV is a temperature measurement value, and for example, data on the operation amount MV during temperature control of the heating apparatus shown in FIG. 5 is collected and evaluated.

  First, the operator preliminarily sets change information for specifying the change contents of the set value SP in the set value changing unit 10 (step S1 in FIG. 6), and is in a control response accompanying the change of the set value SP based on the change information. A reference change pattern MVX indicating a standard time change of the operation amount MV is preset in the reference operation amount storage unit 20 (step S2 in FIG. 6).

As the change information, for example, the final target set value SPL [%] and the change rate ΔSP [% / sec. There is.
The reference change pattern MVX represents a standard operation amount MV during a control response when there is no deterioration in the device to be controlled (heating device in the example of the present embodiment), each time after the start of changing the set value SP. It is determined every time. The reference change pattern MVX may be confirmed by, for example, performing a test for changing the set value SP according to the content of the change information in advance.

When the set value changing unit 10 does not change the set value SP (NO in step S3 in FIG. 6), the set value changing unit 10 inputs the initial set value SPI to the manipulated variable calculating unit 12 and the evaluation index calculating units 21 to 24 as the set value SP. (FIG. 6, step S4).
The control amount PV is measured by a measuring instrument (temperature sensor 102 in the example of FIG. 5), and is input to the operation amount calculation unit 12 and the evaluation index calculation units 21 to 24 via the control amount input unit 11 (FIG. 6). Step S5).

The operation amount calculator 12 calculates the operation amount MV based on the set value SP and the control amount PV by a known PID control calculation (step S6 in FIG. 6).
The operation amount output unit 13 outputs the operation amount MV calculated by the operation amount calculation unit 12 to the control target (step S7 in FIG. 6). In the example of FIG. 5, the power regulator 104 is the actual output destination of the manipulated variable MV.

  The processes in steps S4 to S7 as described above are repeatedly executed for each control cycle until the set value SP is changed or the control is terminated by an instruction from the operator (YES in step S8 in FIG. 6).

  Next, the set value changing unit 10 changes the set value SP in accordance with the specification specified by the change information when a predetermined set value change start time comes or when an instruction to change the set value SP is received from the operator. (FIG. 6, step S9). Specifically, as shown in FIGS. 1 (A), 2 (A), and 3 (A), the set value SP is changed from the initial set value SPI in a ramp shape. The change rate ΔSP included in the change information defines the change in the set value SP at this time. Further, the set value changing unit 10 notifies the evaluation index calculating units 21 to 24 that the change of the set value SP is started.

The processes in steps S10, S11, and S12 in FIG. 6 are the same as steps S5, S6, and S7, respectively. Thus, a control response accompanying the change of the set value SP is started.
Next, when the change of the set value SP is started, the evaluation index calculation unit 21 refers to the reference change pattern MVX stored in the reference operation amount storage unit 20 and accumulates positive values of (MVi−MVXi). The value A is calculated as follows (step S13 in FIG. 6).
A = Σ (MVi−MVXi) (1)

  MVi is the operation value MV, MVXi calculated by the operation amount calculation unit 12 at the current control time point i at which the integrated value A and the later-described integrated value B are to be calculated, and the operation value at the control time point i determined by the reference change pattern MVX. The quantity MV. The evaluation index calculation unit 21 calculates Equation (1) only when (MVi−MVXi)> 0 in the first half of the control response.

  In the reference change pattern MVX, the change start time of the set value SP is set as time 0, and the subsequent change in the manipulated variable MV is determined for each time. Therefore, if the time when the set value changing unit 10 actually starts changing the set value SP is ST, the manipulated variable MV at time (i-ST) is obtained from the reference change pattern MVX, and this is obtained as the reference change pattern. The manipulated variable MV at the control point i determined by MVX may be used.

When the change of the set value SP is started, the evaluation index calculation unit 22 refers to the reference change pattern MVX stored in the reference operation amount storage unit 20 and calculates the negative integrated value B of (MVi−MVXi). The following equation is calculated (step S14 in FIG. 6).
B = Σ (MVi−MVXi) (2)
The evaluation index calculation unit 22 performs the calculation of Expression (2) only when (MVi−MVXi) <0 in the first half of the control response.

In the second half of the control response, the evaluation index calculation unit 23 refers to the reference change pattern MVX stored in the reference operation amount storage unit 20 and calculates the positive integrated value C of (MVj−MVXj) as follows: (Step S15 in FIG. 6).
C = Σ (MVj−MVXj) (3)

  MVj is the operation value MV and MVXj calculated by the operation amount calculation unit 12 at the current control time point j at which the integrated value C and the integrated value D to be described later are calculated. The operation values at the control time point j determined by the reference change pattern MVX. The quantity MV. The evaluation index calculation unit 23 performs the calculation of Expression (3) only when (MVj−MVXj)> 0 in the second half of the control response. Similarly to the above, if the time when the set value changing unit 10 actually starts changing the set value SP is ST, the manipulated variable MV at time (j-ST) is obtained from the reference change pattern MVX, and this is obtained. The manipulated variable MV at the control time j determined by the reference change pattern MVX may be used.

In the second half of the control response, the evaluation index calculation unit 24 refers to the reference change pattern MVX stored in the reference operation amount storage unit 20, and calculates the negative integrated value D of (MVj−MVXj) as follows: (Step S16 in FIG. 6).
D = Σ (MVj−MVXj) (4)
The evaluation index calculation unit 24 calculates Equation (4) only when (MVj−MVXj) <0 in the second half of the control response.

In this way, the processes in steps S9 to S16 are repeatedly executed for each control period until the control response accompanying the change of the set value SP is completed (YES in step S17 in FIG. 6).
Here, the overall control response refers to the entire control response period in which the control amount PV follows the final target set value SPL from the initial set value SPI as the set value SP is changed. Since the set value changing unit 10 changes the set value SP from the initial set value SPI in a ramp shape at a constant change rate ΔSP, it is possible to calculate in advance when the set value SP reaches the final target set value SPL. A time obtained by adding the predetermined time T to the time when the set value SP reaches the final target set value SPL can be calculated in advance as the end time of the control response accompanying the change of the set value SP. What value should be set for the predetermined time T for determining the end time may be confirmed by conducting a test for changing the set value SP in advance.

  The first half of the control response is a control response period in which the control amount PV follows from the initial set value SPI to the middle of the final target set value SPL as the set value SP is changed. Therefore, if the set value changing unit 10 can calculate the end time of the control response as described above, it also calculates in advance the intermediate time from the start time of the control response (change start time of the set value SP) to the end time of the control response. It will be possible. The set value changing unit 10 notifies the evaluation index calculating units 21 to 24 that the intermediate time has been reached when the intermediate time of the control response is reached.

  The second half of the control response refers to a control response period in which the control amount PV follows from the end of the first half (intermediate time) to the final target set value SPL. The set value changing unit 10 notifies the evaluation index calculating units 21 to 24 that the end time has been reached when the end time of the control response is reached.

  The evaluation index calculation unit 21 calculates the equation (1) only when (MVi−MVXi)> 0 in the first half of the control response from the start time of the control response (change start time of the set value SP) to the intermediate time of the control response. Calculations can be performed. By repeating the integration of Expression (1), the integrated value A becomes an evaluation index A that is the sum of positive values of (MVi−MVXi) in the first half of the control response. Similarly, the evaluation index calculation unit 22 may perform the calculation of Expression (2) only when (MVi−MVXi) <0 in the first half of the control response. By repeating the integration of Expression (2), the integrated value B becomes the evaluation index B that is the sum of the negative values of (MVi−MVXi) in the first half of the control response.

  The evaluation index calculation unit 23 calculates the expression (3) only when (MVj−MVXj)> 0 in the second half of the control response from the first half end time of the control response (intermediate time of the control response) to the end time of the control response. Calculations can be performed. By repeating the integration of Expression (3), the integrated value C becomes an evaluation index C that is the sum of positive values of (MVj−MVXj) in the latter half of the control response. Similarly, the evaluation index calculation unit 24 may perform the calculation of Expression (4) only when (MVj−MVXj) <0 in the second half of the control response. By repeating the integration of Expression (4), the integration value D becomes an evaluation index D that is the sum of the negative values of (MVj−MVXj) in the latter half of the control response.

The evaluation index presenting unit 25 sends the evaluation index A, the evaluation index B, the evaluation index C, and the evaluation index D calculated by the evaluation index calculation units 21 to 24 to the operator after the end of the control response accompanying the change of the set value SP. To present (display) (step S18 in FIG. 6).
After the completion of the control response accompanying the change of the set value SP, the control based on the set value SP = SPL is continued by the processes of steps S4 to S7.

  7 and 8 are diagrams showing display examples of the evaluation indexes A to D. FIG. FIG. 7 shows a display example of a pattern in which the sum of positive values of (MV−MVX) increases in the first half of the control response, and FIG. 8 shows a pattern in which the sum of negative values of (MV−MVX) increases in the first half of the control response. A display example is shown.

  Thus, in the present embodiment, by calculating and presenting the evaluation indexes A to D, the reproducibility of the behavior of the manipulated variable MV with respect to the reference change pattern MVX can be presented quantitatively (in numerical form). In the present embodiment, as described with reference to FIGS. 1A, 1B, 2A, 2B, 3A, and 3B, the control amount PV is increased. Even when it is difficult to show a difference from the set value SP, if the device to be controlled has deteriorated or the PID parameter of the operation amount calculation unit 12 is set inappropriately, the operation amount MV and the reference change pattern Since the difference from MVX is likely to appear, the operator can recognize the difference feature and can estimate the cause of the difference.

  In the present embodiment, the calculated evaluation indexes A to D are presented. However, the present invention is not limited to this, and the evaluation indexes A to D may be recorded in a storage unit such as an EEPROM.

  The evaluation apparatus described in the present embodiment can be realized by a computer having a CPU (Central Processing Unit), a storage device, and an interface, and a program for controlling these hardware resources. The CPU executes the processing described in the present embodiment in accordance with a program stored in the storage device.

  The present invention can be applied to a technique for capturing an operation amount MV as a feature amount of a control response in a transient state.

  DESCRIPTION OF SYMBOLS 1 ... Temperature controller control function part, 2 ... Evaluation function part, 10 ... Setting value change part, 11 ... Control amount input part, 12 ... Operation amount calculation part, 13 ... Operation amount output part, 20 ... Reference | standard operation amount memory | storage part 21, 22, 23, 24... Evaluation index calculation unit, 25... Evaluation index presentation unit.

Claims (8)

A setting value changing means for changing the setting value SP according to an instruction from the outside;
An operation amount calculating means for calculating an operation amount MV based on the set value SP and the control amount PV measured by the measuring instrument;
An operation amount output means for outputting the operation amount MV to a control target;
Reference operation amount storage means for storing in advance a reference change pattern MVX indicating a standard time change of the operation amount MV during a control response accompanying the change of the set value SP;
An evaluation index calculation unit that refers to a reference change pattern MVX stored in the reference operation amount storage unit and calculates a difference between the operation amount MV in the control response and the reference change pattern MVX as an evaluation index; An evaluation apparatus characterized by that. The evaluation apparatus according to claim 1,
And an evaluation index presenting means for presenting the evaluation index calculated by the evaluation index calculating means. The evaluation apparatus according to claim 1 or 2,
The evaluation index calculating means calculates the evaluation index separately for an evaluation index in the first half of the control response and an evaluation index in the second half of the control response. In the evaluation apparatus according to any one of claims 1 to 3,
The evaluation index calculation means is divided into an evaluation index in which the difference between the manipulated variable MV and the reference change pattern MVX is a positive value, and an evaluation index in which the difference between the manipulated variable MV and the reference change pattern MVX is a negative value. And calculating the evaluation index. A setting value changing step for changing the setting value SP in accordance with an instruction from the outside;
An operation amount calculating step for calculating an operation amount MV based on the set value SP and the control amount PV measured by the measuring instrument;
An operation amount output step of outputting the operation amount MV to a control target;
With reference to reference operation amount storage means for storing in advance a reference change pattern MVX indicating a standard time change of the operation amount MV during the control response accompanying the change of the set value SP, the operation amount MV during the control response and And an evaluation index calculating step of calculating a difference from the reference change pattern MVX as an evaluation index. The evaluation method according to claim 5, wherein
The evaluation method further includes an evaluation index presenting step for presenting the evaluation index calculated in the evaluation index calculating step. In the evaluation method according to claim 5 or 6,
The evaluation index calculating step includes a step of calculating the evaluation index separately for an evaluation index in the first half of the control response and an evaluation index in the second half of the control response. The evaluation method according to any one of claims 5 to 7,
The evaluation index calculation step is divided into an evaluation index in which the difference between the manipulated variable MV and the reference change pattern MVX is a positive value, and an evaluation index in which the difference between the manipulated variable MV and the reference change pattern MVX is a negative value. And calculating the evaluation index.