JP2016075375A - Vibration control device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a vibration control device capable of improving vibration control performance in a horizontal direction.SOLUTION: A vibration control device 10 includes a support part 100 supported by at least one of first viscoelastic bodies 400 so as to allow circumferential movement, a placement part 200 on which a vibration control target 900 is placed, and a connection mechanism 300 connecting the support part 100 and the placement part 200, and the connection mechanism 300 has at least one of second viscoelastic bodies 350 allowing circumferential movement of the placement part 200 to the support part 100. Preferably, the connection mechanism 300 further includes a suspension plate part 302 suspending the placement part 200, and the suspension plate part 302 is supported by at least one of the second viscoelastic bodies 350 from a gravity direction lower side.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a vibration isolator.

  Patent Document 1 discloses a lower plate that is horizontally fixed, an upper plate that is horizontally disposed at a predetermined interval above the lower plate and supports a supported object such as a structure, and the lower plates. An intermediate plate horizontally disposed between the upper plate and a through hole in the center; a first viscoelastic body that connects the lower plate and the upper plate to each other through the through hole of the intermediate plate; and the lower plate At least three or more first compression coil springs arranged around the viscoelastic body so as to extend in the vertical direction between the plate and the intermediate plate, and the horizontal direction between the intermediate plate and the upper plate At least three or more second compression coil springs extending in the vertical direction at the same position as the first compression coil springs, and the corresponding first and second compression coil springs are respectively connected to the first viscous coil springs. Arranged at point symmetry or equiangular intervals around the center line of the elastic body An anti-vibration device that extends vertically between the lower plate and the intermediate plate so as to connect the lower plate and the intermediate plate to each other at a position that does not interfere with the first compression coil spring in the horizontal direction. A vibration isolator is described in which a plurality of second viscoelastic bodies are arranged.

  Patent Document 2 includes a plate-like equipment mounting bench, a vibration damper that supports the equipment mounting bench at the bottom four corners, a vibration sensor that measures the vibration of the equipment mounting bench, and the equipment mounting bench. In an active vibration isolator comprising an actuator to be moved and a controller for calculating a control output for the actuator based on vibration information from the vibration sensor, a coil spring is provided in the vertical direction as each of the vibration dampers, and is provided near the coil spring. An active type vibration isolator is described in which the actuator and the vibration sensor are provided.

JP 2008-20012 A JP 2002-195343 A

  In the prior art, the anti-vibration performance in the horizontal direction is not sufficient.

  An object of this invention is to provide the vibration isolator which can improve the vibration proof performance in a horizontal direction.

  The present invention according to claim 1 includes a support portion supported by at least one first viscoelastic body so as to allow circumferential movement, and a placement portion on which a vibration isolation object is placed. A connecting mechanism that connects the support part and the mounting part, wherein the connecting mechanism allows at least one second movement of the mounting part in a circumferential direction relative to the support part. This is a vibration isolator having a viscoelastic body.

According to a second aspect of the present invention, the connection mechanism further includes a suspension part for suspending the mounting part.
The anti-vibration device according to claim 1, wherein the suspension portion is supported from below in the direction of gravity by at least one of the second viscoelastic bodies.

  According to a third aspect of the present invention, the connection mechanism further includes a suspension portion for suspending the mounting portion, and the suspension portion is suspended by the plurality of second viscoelastic bodies. The vibration isolator according to claim 1.

  According to a fourth aspect of the present invention, the connection mechanism includes a plurality of the second viscoelastic bodies, and each of the plurality of second viscoelastic bodies suspends the mounting portion, and the one end portion side is 2. The anti-vibration device according to claim 1, wherein the anti-vibration device is connected to each of the placement units, and is arranged so that line segments extending from the one end side to the other end side intersect at one point.

  According to a fifth aspect of the present invention, the coupling mechanism includes a plurality of the second viscoelastic bodies, and each of the plurality of second viscoelastic bodies hangs the mounting portion, and the one end portion side is It is a vibration isolator of Claim 1 arrange | positioned so that it may be connected with the said mounting part respectively and the other end part side may be supported by one point.

  According to the present invention, the anti-vibration performance in the horizontal direction can be improved.

It is a perspective view which shows the vibration isolator which concerns on the 1st Embodiment of this invention. FIG. 2A is a plan view and FIG. 2B is a side view of the vibration isolator shown in FIG. FIG. 3 is a diagram for explaining the operation of the vibration isolator shown in FIG. 1. FIG. 3A is a diagram showing the vibration isolator in a state where no vibration is applied, and FIG. It is a figure which shows the vibration isolator in the state. It is a perspective view which shows the vibration isolator which concerns on the 2nd Embodiment of this invention. FIG. 5A is a cross-sectional view showing a cross section taken along line AA in FIG. 5B, and FIG. 5B is a side view. It is a perspective view which shows the vibration isolator which concerns on the 3rd Embodiment of this invention. The vibration isolator shown in FIG. 6 is shown, FIG. 7 (a) is a view showing a cross section taken along line BB in FIG. 7 (b), and FIG. 7 (b) is a side view. It is a perspective view which shows the vibration isolator which concerns on the 4th Embodiment of this invention. The vibration isolator shown in FIG. 8 is shown, FIG. 9A is a plan view, and FIG. 9B is a side view. It is a perspective view which shows the vibration isolator which concerns on the 5th Embodiment of this invention. FIG. 11A is a plan view and FIG. 11B is a side view of the vibration isolator shown in FIG. It is a perspective view which shows the vibration isolator which concerns on the 6th Embodiment of this invention. The vibration isolator shown in FIG. 12 is shown, FIG. 13 (a) is a cross-sectional view showing a cross section taken along line CC in FIG. 13 (b), and FIG. 13 (b) is a side view. FIG. 14A is a diagram for explaining the operation of the vibration isolator shown in FIG. 12, FIG. 14A is a diagram showing the vibration isolator in a state where vibration is not applied, and FIG. 14B is a diagram where vibration is applied. It is a figure which shows the vibration isolator in the state. FIG. 15A shows a vibration isolator according to a seventh embodiment of the present invention, FIG. 15A is a cross-sectional view taken along line DD in FIG. 15B, and FIG. 15B is a side view. . FIG. 16A is a cross-sectional view showing a cross section taken along the line EE in FIG. 16B, and FIG. 16B is a side view. It is a graph which shows the effect of the present invention.

  Next, embodiments of the present invention will be described with reference to the drawings. 1 and 2 show a vibration isolator 10 according to a first embodiment of the present invention. As shown in FIGS. 1 and 2, the vibration isolator 10 includes a support portion 100, a placement portion 200, a coupling mechanism 300, and leg members 402.

  The support unit 100 is supported by, for example, four leg members 402 so as to allow circumferential movement from below in the direction of gravity. The support unit 100 includes a bottom plate 102 and a top plate 104, and the bottom plate 102 and the top plate 104 are connected by, for example, four column members 110 to form a frame. Further, for example, four through holes 106 are formed in the top plate 104. The four through holes 106 are formed so as to be arranged on the circumference of one circle 952.

  The leg member 402 is used as a first viscoelastic body 400 that allows movement of the support portion 100 in the circumferential direction with respect to the installation surface 920 (see FIG. 3), for example, a cylindrical rubber block or a coil spring. Can be used. The leg member 402 may be a viscoelastic body that expands and contracts at least in the direction of gravity, and other members may be used in place of the rubber lump or the coil spring. Each leg member 402 is attached to the lower end of the bottom plate 102 at the upper end. In addition, in a state where the vibration isolator 10 is installed on the installation surface 920, the respective lower ends contact the installation surface 920.

  A plurality of leg members 402 such as four are arranged on the circumference of one circle 954. The circle 954 is concentric with the circle 952. As long as the leg member 402 allows the movement of the support portion 100 in the circumferential direction, the number of the leg members 402 is not limited to four, and at least one leg member 402 is sufficient.

  When one leg member 402 is provided, the leg member 402 is not only expanded and contracted vertically but also in a direction parallel to the installation surface 920 in order to allow circumferential movement of the support portion 100 with respect to the installation surface 920. It is also necessary to be a viscoelastic body that can stretch and deform.

  The object for vibration isolation 900 is placed on the placement unit 200. As the anti-vibration object 900, for example, an exposure machine that forms a circuit pattern of an electronic device used in a computer or communication equipment, or a three-dimensional shape measurement that reads a high-precision shape of an optical element used for optical measurement using a blue laser. Examples of such devices include devices that have a problem with nanometer accuracy, such as electron microscopes used in apparatus and gene analysis. The placement unit 200 includes a bottom plate 202 and a top plate 204, and the top plate 204 and the bottom plate 202 are connected by, for example, four column members 210 to form a frame. As shown in FIG. 2B, the image stabilization target 900 is placed on the upward surface of the bottom plate 202 in the direction of gravity.

  The connection mechanism 300 connects the support unit 100 and the placement unit 200. The coupling mechanism 300 includes a suspension plate 302 that is used as a suspension unit that supports the placement unit 200 so as to suspend, for example, four suspension members 352, and, for example, one leg member 354. Have

  The suspension member 352 is used as a second viscoelastic body 350 that allows the circumferential movement of the placement unit 200 with respect to the support unit 100. As the suspension member 352, for example, a coil spring which is a viscoelastic body can be used. Each of the suspension members 352 is disposed so as to penetrate the through hole 106, each upper end portion is attached to a downward surface in the gravity direction of the suspension plate 302, and each lower end portion is a top plate 204 is connected to the upward surface in the gravity direction.

  The four suspension members 352 are preferably the same length. Further, the upper ends of the four suspension members 352 are attached to the suspension plate 302 so as to be arranged on the circumference of a circle 954. Further, the lower ends of the four suspension members 352 are respectively arranged on the circumference of a circle 954. In addition, in a state where no vibration is applied to the vibration isolator 10, the four hanging members 352 are arranged so as to be in a horizontal state.

  The suspension member 352 may be a viscoelastic body, and for example, a string-like rubber member or the like can be used instead of the coil spring.

  The leg member 354 is used as the second viscoelastic body 350 that allows the circumferential movement of the mounting portion 200 with respect to the support portion 100 in the same manner as the suspension member 352, and supports the suspension plate 302 from below in the gravity direction. doing. In this embodiment, there is one leg member 354. As the leg member 354, for example, a cylindrical rubber lump or a coil spring can be used. When there is one leg member 354, the leg member 354 needs to be a member that expands and contracts in the gravity direction and the horizontal direction and deforms.

  The leg member 354 has an upper end portion attached to a downward surface in the gravity direction of the suspension plate 302 and a lower end portion attached to an upward surface in the gravity direction of the top plate 204. Further, the leg member 354 is disposed so as to be positioned at the center of concentric circles 952 and 954.

  3A and 3B are diagrams for explaining the operation of the vibration isolator 10, FIG. 3A is a diagram showing the vibration isolator 10 in a state where no vibration is applied, and FIG. It is a figure which shows the vibration isolator 10 in the added state. For example, if horizontal vibration is applied to the vibration isolator 10 in the state shown in FIG. 3A due to the installation surface 920 vibrating in the horizontal direction, the four leg members 402 are Each expands and contracts in the direction of gravity as indicated by an arrow a and deforms. Each of the four suspension members 352 expands and contracts in the direction of gravity, so that the support unit 100 is circumferentially centered on the center of the circle 954 with respect to the installation surface 920 as indicated by the arrow b. Do exercise.

  At this time, when the support portion 100 moves in the circumferential direction in a state where gravity is applied to the placement portion 200, the four suspension members 352 expand and contract, and the leg members 354 move in the horizontal direction. And deform in the direction of gravity. Then, the four suspension members 352 expand and contract, and the leg member 354 is deformed in the horizontal direction and the gravity direction, so that the placement unit 200 moves the leg member 354 relative to the support unit 100 as indicated by an arrow c. Make a movement in the circumferential direction (centered around the center of the circle 952). Then, the circumferential movement of the mounting part 200 cancels the circumferential movement of the support part 100. As described above, in the vibration isolator 10 according to the first embodiment, the horizontal vibration applied to the vibration isolator 10 is caused by the circumferential motion of the support portion 100 with respect to the installation surface 920 and the support portion 100. Is canceled by converting the movement of the mounting portion 200 into two circumferential movements.

  In the above description, the case where both the suspension member 352 and the leg member 354 are viscoelastic bodies has been described as an example, but the connection mechanism 300 includes at least one second viscoelastic body 350. That's fine. For this reason, when the leg member 354 is a viscoelastic body, the hanging member 352 does not need to be viscoelastic, and a string-like member or a rod-like member that does not expand and contract can be used as the hanging member 352. . Moreover, since the connection mechanism 300 should just have at least 1 2nd viscoelastic body, when the suspending member 352 is a viscoelastic body, the leg member 354 does not need to be a viscoelastic body.

  4 and 5 show a vibration isolator 10 according to a second embodiment of the present invention. Hereinafter, the difference between the vibration isolator 10 according to the first embodiment and the vibration isolator 10 according to the second embodiment will be described.

  The vibration isolator 10 according to the first embodiment described above has four leg members 402 used as the first viscoelastic body 400. On the other hand, the vibration isolator 10 according to the second embodiment has eight leg members 402. The eight leg members 402 are arranged at equal intervals on the circumference of one circle 956. The circle 956 is in a state where the four through holes 106 are arranged concentrically with a circle 952 that is a circle arranged on the circumference. Since the parts other than those described above are the same as those of the vibration isolator 10 according to the first embodiment described above, description thereof will be omitted.

  6 and 7 show a vibration isolator 10 according to a third embodiment of the present invention. Hereinafter, the difference between the vibration isolator 10 according to the first embodiment and the vibration isolator 10 according to the first embodiment will be described.

  The vibration isolator 10 according to the first embodiment described above has four leg members 402 used as the first viscoelastic body 400. On the other hand, the vibration isolator 10 according to the third embodiment has eight leg members 402 similarly to the vibration isolator 10 according to the second embodiment. The eight leg members 402 are arranged at equal intervals on the circumference of one circle 956.

  Further, the vibration isolator 10 according to the first embodiment described above has the four suspension members 352 and the one leg member 354 as the second viscoelastic body 350. In contrast, the vibration isolator 10 according to the third embodiment includes one hanging member 352 and eight leg members 354 as the second viscoelastic body 350. The eight leg members 354 are arranged on the circumference of one circle 958.

  Since there is one suspension member 352, in the vibration isolator 10 according to the first embodiment, four through-holes 106 formed in the top plate 104 are one in the third embodiment. Is formed. The through hole 106 is formed so as to be positioned at the center of the circle 958. Since the parts other than those described above are the same as those of the vibration isolator 10 according to the first embodiment described above, description thereof will be omitted.

  Also in the vibration isolator 10 according to the third embodiment, as in the case of the vibration isolator 10 according to the first embodiment, the coupling mechanism 300 includes at least one second viscoelastic body 350. Good. For this reason, when the leg member 354 is a viscoelastic body, the hanging member 352 does not need to be viscoelastic, and when the hanging member 352 is a viscoelastic body, the leg member 354 is a viscoelastic body. I don't need it.

  8 and 9 show a vibration isolator 10 according to a fourth embodiment of the present invention. Hereinafter, the difference between the vibration isolator 10 according to the first embodiment and the vibration isolator 10 according to the fourth embodiment will be described.

  The vibration isolator 10 according to the first embodiment described above has four leg members 402 used as the first viscoelastic body 400. On the other hand, the vibration isolator 10 according to the fourth embodiment is a leg similar to the vibration isolator 10 according to the second embodiment described above and the vibration isolator 10 according to the third embodiment described above. Eight members 402 are provided. The eight leg members 402 are arranged at equal intervals on the circumference of one circle 956 (not shown in FIGS. 8 and 9, see FIGS. 5 and 7).

  In addition, the vibration isolator 10 according to the first embodiment described above includes a suspension plate 302 used as a suspension portion and four suspension members 352 used as the second viscoelastic body 350. And one leg member 354 that is also used as the second viscoelastic body 350. On the other hand, the vibration isolator 10 according to the fourth embodiment includes a suspension member 304 used as a suspension portion and a coil spring 1 or the like used as a second viscoelastic body. Each of the suspension members 352 and, for example, eight leaf spring members 356 that are also used as the second viscoelastic body are provided.

  The suspension member 304 is, for example, a columnar member, and one suspension member 352 is attached to the lower surface of the suspension member 304 in the gravity direction. Further, since there is one suspension member 352, in the vibration isolator 10 according to the first embodiment, four through holes 106 formed in the top plate 104 are formed in the third embodiment. One is formed.

  As the leaf spring member 356, for example, a wedge-shaped and plate-shaped metal is used. One end portion of each leaf spring member 356 is attached to the upward surface of the top plate 104 in the direction of gravity of the top plate 104 and the upward surface of the protruding portion 108 attached so as to protrude from the upward surface. The other end of the leaf spring member 356 is attached to the upward surface of the suspension member 304. And in the vibration isolator 10 which concerns on this 4th Embodiment, the suspension member 304 used as the suspension part which suspends the mounting part 200 is used as the 2nd viscoelastic body 350. The plurality of leaf spring members 356 are suspended.

  The number of the leaf spring members 356 may be at least two, and may be any number other than eight, such as any one of two to seven. Also in the vibration isolator 10 according to the fourth embodiment, the coupling mechanism 300 has at least one second viscoelastic body 350 as in the vibration isolator 10 according to the first embodiment described above. do it. For this reason, since the leaf spring member 356 is a viscoelastic body, the hanging member 352 does not necessarily need to be a viscoelastic body. For this reason, it can replace with using a coil spring etc. as the suspending member 352, and can use the string-shaped member and rod-shaped member which do not expand and contract. Since the parts other than those described above are the same as those of the vibration isolator 10 according to the first embodiment described above, description thereof will be omitted.

  10 and 11 show a vibration isolator 10 according to a fifth embodiment of the present invention. Hereinafter, the difference between the vibration isolator 10 according to the fourth embodiment and the vibration isolator 10 according to the fifth embodiment will be described.

  In the vibration isolator 10 according to the above-described fourth embodiment, the leaf spring member 356 has one end attached to the upward surface of the protrusion 108 and the other end attached to the suspension member 304. It was attached to the upward surface. On the other hand, in the fifth embodiment, the plate spring member 356 has a substantially vertical surface in which each end portion is a surface opposite to the surface of the protruding portion 108 facing the suspension member 304. Each other end is attached to a substantially vertical surface of the suspension member 304. Since the parts other than those described above are the same as those of the vibration isolator 10 according to the fourth embodiment described above, description thereof will be omitted.

  12 and 13 show a vibration isolator 10 according to a sixth embodiment of the present invention. Hereinafter, the difference between the vibration isolator 10 according to the first embodiment and the vibration isolator 10 according to the first embodiment will be described.

  The vibration isolator 10 according to the first embodiment described above has four leg members 402 used as the first viscoelastic body 400. On the other hand, the vibration isolator 10 according to the sixth embodiment has eight leg members 402 as in the vibration isolator 10 according to the second embodiment described above. The eight leg members 402 are arranged at equal intervals on the circumference of one circle 956 (not shown in FIGS. 12 and 13, see FIGS. 5 and 7).

  In addition, the vibration isolator 10 according to the first embodiment described above includes a suspension plate 302 used as a suspension portion and four suspension members 352 used as the second viscoelastic body 350. And one leg member 354 that is also used as the second viscoelastic body 350. On the other hand, the vibration isolator 10 according to the sixth embodiment does not include the suspension plate 302 and the leg member 354, but includes four suspension members used as the second viscoelastic body. 352.

  The suspension member 352 suspends the placement unit 200. More specifically, one end 352 a of the suspension member 352 is attached to the upper surface of the top plate 204 of the placement unit 200, and the other end 352 b of the suspension member 352 is below the top plate 104 of the support unit 100. Four suspension members 352 suspend the mounting portion 200 so as to be mounted on the side surface.

  Further, the four suspension members 352 are arranged such that a line segment L extending from the one end 352a to the other end 352b intersects at one point P. There may be at least three suspension members 352, and for example, the number of suspension members 352 may be other than four such as three or five. Even when the number of the suspension members 352 is other than four, the line segments L extending from the one end 352a to the other end 352b of each suspension member 352 intersect at one point P. It is necessary to dispose a plurality of suspension members 352 on the other side. Except for the part described above, the configuration is the same as that of the vibration isolator 10 according to the first embodiment described above, and thus the description of the same configuration is omitted.

  FIG. 14 is a diagram for explaining the operation of the vibration isolator 10 according to the sixth embodiment, and FIG. 14A is a diagram illustrating the vibration isolator 10 in a state where no vibration is applied. 14 (b) is a diagram showing the vibration isolator 10 in a state where vibration is applied. For example, when horizontal vibration is applied to the vibration isolator 10 in the state shown in FIG. 14A due to the installation surface 920 vibrating in the horizontal direction, the plurality of leg members 402 are Each expands and contracts in the direction of gravity as indicated by an arrow a and deforms. As each of the four suspension members 352 expands and contracts in the direction of gravity and deforms, the support unit 100 moves in the circumferential direction with respect to the installation surface 920 as indicated by an arrow b.

  At this time, the four suspension members 352 expand and contract by the support unit 100 moving in the circumferential direction in a state where gravity is acting on the mounting unit 200. As the four suspension members 352 expand and contract, the placement unit 200 performs a swinging motion in the circumferential direction about the point P as a virtual center, as indicated by an arrow c. The circumferential swinging motion of the mounting portion 200 cancels the circumferential motion of the support portion 100. As described above, in the vibration isolator 10 according to the sixth embodiment, the horizontal vibration applied to the vibration isolator 10 is caused by the circumferential movement of the support portion 100 with respect to the installation surface 920 and the point P. Is converted into two motions, ie, a swinging motion in the circumferential direction of the mounting portion 200 with the virtual center as the center.

  FIG. 15 shows a vibration isolator 10 according to a seventh embodiment of the present invention. Hereinafter, the difference between the vibration isolator 10 according to the sixth embodiment and the vibration isolator 10 according to the seventh embodiment will be described.

  In the vibration isolator 10 according to the sixth embodiment described above, the four suspension members 352 have line segments L extending from one end portion 352a to the other end portion 352b of the four suspension members 352, respectively. The points P are arranged so as to intersect at one point, and the point P is located above the top plate 104 (see FIG. 13B). On the other hand, in the vibration isolator 10 according to the seventh embodiment, the four suspension members 352 are respectively attached to the upper surface of the top plate 204 of the placement unit 200 at one end 352a. The other end 352b is supported at a point P, which is one point on the top plate 104 of the support unit 100.

  In the vibration isolator 10 according to the seventh embodiment, when the support unit 100 starts to move in the circumferential direction by applying horizontal vibration to the vibration isolator 10 (see FIG. 14), As the suspension member 352 expands and contracts, the placement unit 200 starts rotating around the point P. Then, the rotational movement of the mounting part 200 cancels the rotational movement of the support part 100. Since the parts other than those described above are the same as those of the vibration isolator 10 according to the sixth embodiment described above, description thereof will be omitted.

  FIG. 16 shows a vibration isolator 10 according to a comparative example. Hereinafter, the difference between the vibration isolator 10 according to the sixth embodiment of the vibration isolator 10 according to the comparative example will be described.

  In the vibration isolator 10 according to the sixth embodiment described above, the four suspension members 352 have line segments L extending from one end portion 352a to the other end portion 352b of the four suspension members 352, respectively. It was arranged so as to intersect at one point P. On the other hand, in this comparative example, the four hanging members 352 are parallel to each other.

  In the vibration isolator 10 according to the comparative example, each suspension member 352 expands and contracts when the support unit 100 starts moving in the circumferential direction by applying horizontal vibration to the vibration isolator 10. However, the movement of the placement unit 200 does not become a circumferential movement and does not cancel the movement of the support unit 100.

FIG. 17 is a graph showing the effect of the present invention. The vibration transmissibility of the vibration isolator 10 (see FIGS. 12 to 14) according to the sixth embodiment of the present invention is shown in FIG. 10 (see FIG. 16) and the vibration transmissibility of the active anti-vibration table. In FIG. 17, the horizontal axis represents the frequency of vibration in the horizontal direction of the installation surface 920, and the vertical axis represents the ratio of the vibration in the horizontal direction of the mounting portion 200 to the vibration in the horizontal direction of the installation surface 920. More specifically, the vertical axis is
Vibration transmissibility (dB) = 20 × Log ₁₀ (vibration of mounting part 200 / vibration of installation surface 920)
Is shown.

  In FIG. 17, line L1 indicates the vibration characteristic of the vibration isolator 10 according to the sixth embodiment of the present invention, and line L2 indicates the vibration characteristic of the vibration isolator 10 according to the comparative example. A line L3 indicates a vibration characteristic of a general active vibration isolation table. Here, the active shaking table is a device that detects vibration with a vibration sensor and moves a mounting portion on which a vibration isolating object is mounted with an actuator so as to cancel the detected vibration.

  As shown in FIG. 17, when the frequency is around 3 (Hz), the vibration transmissibility of the vibration isolator 10 according to the sixth embodiment of the present invention is greater than the vibration transmissibility of the vibration isolator according to the comparative example. However, when the frequency is 0.1 to 1.1 (Hz) and 3 to 10 (Hz), the vibration transmissibility of the vibration isolator 10 according to the sixth embodiment of the present invention is The vibration transmission rate of the vibration isolator according to the comparative example is lower than the vibration transmission rate of a general active vibration isolation table.

  As described above, the present invention can be applied to a vibration isolator.

DESCRIPTION OF SYMBOLS 10 ... Vibration isolator 100 ... Support part 200 ... Mounting part 300 ... Connection mechanism 302 ... Suspension board 304 ... Suspension member 350 ... 1st viscoelastic body 352: Suspension member 354 ... Leg member 356 ... Leaf spring member 400 ... Second viscoelastic body 402 ... Leg member 900 ... Anti-vibration object

Claims (5)

A support that is supported by at least one first viscoelastic body to allow circumferential movement;
A placement unit on which the object of vibration isolation is placed;
A connection mechanism connecting the support part and the mounting part;
Have
The vibration isolator having at least one second viscoelastic body that allows the connection mechanism to allow a circumferential movement of the mounting portion relative to the support portion. The connection mechanism further includes a suspension part for suspending the placement part,
The vibration isolator according to claim 1, wherein the suspension portion is supported from below in the direction of gravity by at least one of the second viscoelastic bodies. The connection mechanism further includes a suspension part for suspending the placement part,
The vibration isolator according to claim 1, wherein the suspension portion is suspended by a plurality of the second viscoelastic bodies. The connection mechanism has a plurality of the second viscoelastic bodies,
The plurality of second viscoelastic bodies are:
Each hangs the mounting section,
One end side is connected to each of the above-mentioned mounting parts,
The antivibration device according to claim 1, wherein line segments respectively extending from the one end side to the other end side intersect at one point. The connection mechanism has a plurality of the second viscoelastic bodies,
The plurality of second viscoelastic bodies are:
Each hangs the mounting section,
One end side is connected to each of the above-mentioned mounting parts,
The vibration isolator according to claim 1, wherein the other end side is arranged so as to be supported at one point.

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