JP6478403B2 - Vibration isolator - Google Patents

Description

  The present invention relates to a vibration isolator.

  Patent Document 1 discloses a lower plate that is horizontally fixed, an upper plate that is horizontally disposed at a predetermined interval above the lower plate and supports a supported object such as a structure, and the lower plates. An intermediate plate horizontally disposed between the upper plate and a through hole in the center; a first viscoelastic body that connects the lower plate and the upper plate to each other through the through hole of the intermediate plate; and the lower plate At least three or more first compression coil springs arranged around the viscoelastic body so as to extend in the vertical direction between the plate and the intermediate plate, and the horizontal direction between the intermediate plate and the upper plate At least three or more second compression coil springs extending in the vertical direction at the same position as the first compression coil springs, and the corresponding first and second compression coil springs are respectively connected to the first viscous coil springs. Arranged at point symmetry or equiangular intervals around the center line of the elastic body An anti-vibration device that extends vertically between the lower plate and the intermediate plate so as to connect the lower plate and the intermediate plate to each other at a position that does not interfere with the first compression coil spring in the horizontal direction. A vibration isolator is described in which a plurality of second viscoelastic bodies are arranged.

  Patent Document 2 includes a plate-like equipment mounting bench, a vibration damper that supports the equipment mounting bench at the bottom four corners, a vibration sensor that measures the vibration of the equipment mounting bench, and the equipment mounting bench. In an active vibration isolator comprising a moving actuator and a controller that calculates a control output for the actuator based on vibration information from the vibration sensor, a coil spring is provided in the vertical direction as each of the vibration dampers, and is provided in the vicinity of the coil spring. An active type vibration isolator is described in which the actuator and the vibration sensor are provided.

JP 2008-20012 A JP 2002-195343 A

  In the prior art, it is necessary to replace the elastic body according to the change in the weight of the vibration isolating object, and the natural frequency when vibration is transmitted to the vibration isolating object cannot be sufficiently reduced. It was.

  In the present invention, the same elastic body can be used for a vibration isolating object whose weight is within a certain range, and the natural frequency when vibration is transmitted to the vibration isolating object can be reduced. An object is to provide an apparatus.

  The present invention according to claim 1 is a mounting portion on which a vibration-proof object is placed, a support portion that supports the placement portion, a connection mechanism that connects the placement portion and the support portion, The connection mechanism has at least two elastic bodies having one end side mounted on the mounting portion and the other end side mounted on the support portion, and the at least two elastic bodies are The vibration isolator is curved to have at least two inflection points.

  The present invention according to claim 2 is the vibration isolator according to claim 1, further comprising a position changing mechanism for changing a position at which the at least two elastic bodies are attached to the support portion.

  The present invention according to claim 3 is the vibration isolator according to claim 1 or 2, further comprising an angle changing mechanism for changing an angle at which the at least two elastic bodies are attached to the support portion.

  According to a fourth aspect of the present invention, in the at least two elastic bodies, a portion of the at least one inflection point that is closer to the one end than the one end is the thickness of the elastic body. The vibration isolator according to any one of claims 1 to 3, wherein the mounting unit is supported so as to push up the mounting unit in a direction intersecting the vertical direction.

  The present invention according to claim 5 is the vibration isolator according to claim 1, further comprising a position changing mechanism for changing the positions at which the at least two elastic bodies are attached to the mounting portion.

  The present invention according to claim 6 is the vibration isolator according to claim 1 or 5, further comprising an angle changing mechanism for changing an angle at which the at least two elastic bodies are attached to the mounting portion. .

  According to a seventh aspect of the present invention, in the at least two elastic bodies, a portion of the at least two inflection points closer to the other end portion than the inflection point closest to the other end portion is the elastic body. The anti-vibration device according to claim 1, 5 or 6, wherein the mounting unit is supported so as to push up the mounting unit in a direction intersecting with the thickness direction.

  The present invention according to claim 8 is the invention according to any one of claims 1 to 7, wherein the at least two elastic bodies are arranged so that the forces applied by the respective elastic bodies to the mounting portion are balanced in the horizontal plane direction. This is an anti-vibration device.

  The present invention according to claim 9 is a mounting portion on which a vibration-proof object is placed, a support portion that supports the placement portion, a connection mechanism that connects the placement portion and the support portion, The connecting mechanism has at least two suspension parts for suspending the mounting part, and at least two of which one end part is attached to the suspension part and the other end part is attached to the support part. A first elastic body, and at least two second elastic bodies having one end attached to the suspension and the other end attached to the mounting portion. Each of the first elastic bodies and the at least two second elastic bodies is a vibration isolator that is curved so as to have at least two inflection points.

  According to a tenth aspect of the present invention, there is provided a mounting portion on which a vibration-proof object is mounted, a first support portion that supports the mounting portion, and a second support that supports the first support portion. A first connecting mechanism that connects the mounting portion and the first supporting portion, and a second connecting mechanism that connects the first supporting portion and the second supporting portion. And the first connecting mechanism has at least two first elastic bodies having one end portion attached to the mounting portion and the other end portion attached to the first support portion. The second coupling mechanism has at least two second elastic bodies whose one end is supported by the first support and whose other end is supported by the second support. The at least two first elastic bodies and the at least two second elastic bodies are each curved so as to have at least two inflection points. And it has a vibration-damping device.

  According to the eleventh aspect of the present invention, the force applied by the at least two first elastic bodies to the mounting portion and the force applied by the at least two second elastic bodies to the first support portion are described. Is the vibration isolator according to claim 10, wherein the directions are different from each other in the horizontal plane direction.

  According to the present invention, the same elastic body can be used for a vibration isolation object whose weight is within a certain range, and the natural frequency when vibration is transmitted to the vibration isolation object can be reduced. A vibration isolator can be provided.

It is a side view which shows the vibration isolator which concerns on the 1st Embodiment of this invention. It is a side view which shows typically the change mechanism which the vibration isolator shown in FIG. 1 has. It is a figure which expands and shows the elastic body which the vibration isolator shown in FIG. 1 has. The effect of the vibration isolator 10 shown in FIG. 1 is shown. FIG. 4A is a graph showing the measurement result of the vibration transmissibility when the angle θ at which the elastic body is attached to the support portion is defined as θ1. FIG. 4B is a graph showing the measurement result of the vibration transmissibility when θ is set to θ2, which is an angle different from θ1. In the vibration isolator shown in FIG. 1, a graph showing the result of measuring the natural frequency when the vibration is transmitted to the vibration isolating object at each angle by changing the angle at which the elastic body is attached to the support portion. It is. The effect of the vibration isolator shown in FIG. 1 is shown. FIG. 6A is a graph showing the measurement result of the vibration transmissibility when the distance d1 is moved from the position on the basis of the elastic body, and FIG. ) Is a graph showing measurement results of vibration transmissibility when the distance d2 is moved from the position relative to the elastic body, which is a distance different from the distance d1. In the vibration isolator shown in FIG. 1, a graph showing the result of measuring the natural frequency when vibration is transmitted to the vibration isolating object at each position by changing the position where the elastic body is attached to the support portion. It is. It is a side view which shows the vibration isolator which concerns on the 2nd Embodiment of this invention. It is a figure which expands and shows the elastic body which the vibration isolator shown in FIG. 8 has. It is a side view which shows the vibration isolator which concerns on the 3rd Embodiment of this invention. It is a side view which shows the vibration isolator which concerns on the 4th Embodiment of this invention. It is a top view which shows the modification of the vibration isolator which concerns on the 4th Embodiment of this invention. FIG. 13A shows a modification of the elastic body that can be used in the first embodiment, FIG. 13A shows the modification of the elastic body from above, and FIG. 13B shows the modification of the elastic body. FIG. It is a top view which shows the modification of the vibration isolator which concerns on the 1st Embodiment of this invention.

  Next, embodiments of the present invention will be described with reference to the drawings. FIG. 1 shows a vibration isolator 10 according to a first embodiment of the present invention. The anti-vibration device 10 is a device for suppressing and preferably preventing vibrations of the anti-vibration object 900. As shown in FIG. 1, the anti-vibration device 10 includes a support unit 100, a mounting unit 200, and a coupling mechanism. 300 and a leg member 402.

  The support unit 100 is a structure that supports the mounting unit 200, and includes a bottom plate 102 and a top plate 104. The bottom plate 102 and the top plate 104 are, for example, four (two are shown in FIG. 1). The frame body is formed by being connected by the column member 110. A through hole 106 is formed in the center of the top plate 104, for example.

  The leg member 402 is used as a horizontal vibration isolator for suppressing, preferably preventing, the horizontal vibration of the object 900 for vibration isolation, and supports the placement unit 200 from below in the direction of gravity. . The leg member 402 is attached to the downward surface of the bottom plate 102 at the upper end, and the lower end of the leg member 402 is in contact with the installation surface 920 when the vibration isolator 10 is installed on the installation surface 920. For example, a plurality of leg members 402 are provided, such as four (three are shown in FIG. 1).

  Further, the leg member 402 is a member that allows movement of the support portion 100 in the circumferential direction with respect to the installation surface 920. For example, a cylindrical rubber lump or a coil spring can be used. The leg member 402 only needs to be a viscoelastic body that is elastically deformed in the horizontal direction, and other members may be used instead of the rubber lump or the coil spring. The number of leg members 402 is not limited to four, and at least one leg member 402 is sufficient.

  The placement unit 200 is a structure on which the vibration isolation object 900 is placed. As the anti-vibration object 900, for example, an exposure machine that forms a circuit pattern of an electronic device used in a computer or communication equipment, or a three-dimensional shape measurement that reads a high-precision shape of an optical element used for optical measurement using a blue laser. Examples of such devices include devices that have a problem with nanometer accuracy, such as electron microscopes used in apparatus and gene analysis. The mounting unit 200 includes a bottom plate 202 and a top plate 204. The top plate 204 and the bottom plate 202 are connected to each other by, for example, four column members 210 (two are shown in FIG. 1). Forming the body. As shown in FIG. 1, the vibration proof object 900 is placed on the upward surface of the bottom plate 202 in the direction of gravity.

  The mounting unit 200 includes a mounting member 220 on which an end 310c side of a leaf spring member 310 described later is mounted, and a fixing member 230 for fixing the mounting member 220 to the top plate 204. The mounting member 220 is, for example, a plate-like member, and is disposed above the top plate 104 in the gravity direction and above the through hole 106 in the gravity direction. The fixing member 230 is, for example, a rod-shaped member, and is disposed so as to penetrate the through hole 106. The lower end side is fixed to the top plate 204, and the upper end side is fixed to the mounting member 220. Has been.

  The coupling mechanism 300 is a mechanism that couples the support unit 100 and the mounting unit 200 and includes, for example, two plate spring members 310 that are used as at least two elastic bodies. Each of the two leaf spring members 310 is used as an elastic body in which the end portion 310 c side is attached to the mounting portion 200 and the end portion 310 e side is attached to the support portion 100. More specifically, the two leaf spring members 310 are respectively attached to the attachment member 220 of the mounting portion 200 on the end portion 310c side, and the end portion 310e side of the support portion 100 via the changing mechanism 500 described later. Each is mounted on the top plate 104. In this embodiment, the coupling mechanism 300 includes two leaf spring members 310, but the coupling mechanism 300 may include at least two leaf spring members 310. The coupling mechanism 300 includes three or more leaf spring members. 310 may be included (see FIG. 12).

  As shown in FIG. 1, the vibration isolator 10 further includes a change mechanism 500. The changing mechanism 500 is used as a position changing mechanism that changes the position at which the leaf spring member 310 is attached to the support portion 100, and the angle θ (the angle at which the leaf spring member 310 is attached to the support portion 100). (See FIG. 2). The same number of changing mechanisms 500 as the leaf spring members 310 are provided, and two changing mechanisms 500 are provided in this embodiment. Details of the change mechanism 500 will be described later.

  FIG. 2 shows a change mechanism 500. As shown in FIG. 2, the changing mechanism 500 includes a mounting plate 504, a moving member 510, and a rail member 520. The mounting plate 504 is a member to which the end 310e side opposite to the side on which the mounting member 220 (see FIG. 1) of the plate spring member 310 is mounted, and is rotated using the hinge 512 to stop the hinge 512. It is attached to the moving member 510 so that it can. For mounting the leaf spring member 310 on the mounting plate 504, for example, a plurality of screw members (not shown) are used.

  Further, a through hole 506 is formed in the mounting plate 504, and a female screw 508 is formed in the through hole 506 so that a screw member 530 described later is engaged. Arrows a <b> 1 and a <b> 2 illustrated in FIG. 2 indicate directions in which the mounting plate 504 rotates around the hinge 512.

  The rail member 520 is used as a guide means for guiding the movement of the moving member 510 and is fixed to the top plate 104 of the support unit 100.

  The moving member 510 is guided by the rail member 520 and moves in a direction approaching the mounting member 220 and the fixing member 230 (see FIG. 1 respectively) and in a direction away from the mounting member 220 and the fixing member 230. Be able to. Further, the moving member 510 is provided with a screw member (not shown) that fixes the moving member 510 to the rail member 520, and the moving member 510 that has been moved to a desired position using this screw member. Is fixed to the rail member 520. An arrow b shown in FIG. 2 indicates a direction in which the moving member 510 moves.

  The changing mechanism 500 further includes a screw member 530 in which a male screw 532 is formed. The screw member 530 is attached to the mounting plate 504 so that the male screw 532 meshes with the female screw 508. Further, the screw member 530 restricts the rotation of the mounting plate 504 and the leaf spring member 310 in the direction of the arrow a1 due to the action of gravity by the tip portion 534 coming into contact with the moving member 510. In addition, the screw member 530 is operated so as to be rotated, thereby moving with respect to the mounting plate 504 in the directions indicated by arrows c1 and c2 shown in FIG.

  FIG. 3 shows the leaf spring member 310 in an enlarged manner. As shown in FIG. 3, the leaf spring member 310 is curved so as to have two inflection points 310a and 310b. In this embodiment, the leaf spring member 310 is curved so as to have two inflection points, but the leaf spring member 310 may be curved so as to have at least two inflection points. It may be curved so as to have three inflection points.

  Further, the leaf spring member 310 is an inflection point closest to the end portion 310c of the inflection point 310a and the inflection point 310b that is attached to the mounting portion 200. The mounting portion 200 is configured such that a tip portion 310d, which is a portion closer to the end portion 310c than a certain inflection point 310a, pushes up the mounting portion 200 in the direction of arrow d, which is the direction intersecting the thickness direction of the leaf spring member 310. Support. That is, the tip portion 310d supports the placement unit 200 so as to apply a force in the direction of gravity to the placement unit 200 while applying a force in the direction of the fixing member 230 to the placement unit 200. ing.

  Further, the leaf spring member 310 is an inflection point closest to the end portion 310c of the inflection point 310a and the inflection point 310b that is attached to the mounting portion 200. A rear end portion 310f, which is a portion closer to the end portion 310e attached to the changing mechanism 500 than a certain inflection point 310a, is used as a normal spring, that is, as a member that generates a reaction force according to deformation. It has been.

  In the vibration isolator 10 configured as described above, the operator can move the moving member 510 in the direction of the arrow b by operating the changing mechanism 500, and the plate can be moved by moving the moving member 510. The position where the spring member 310 is attached to the support portion 100 can be changed.

  Further, in the changing mechanism 500 configured as described above, the angle θ at which the leaf spring member 310 is attached to the support portion 100 can be changed by the operator operating the screw member 530. That is, by operating the screw member 530, the screw member 530 is moved in the c1 direction (see FIG. 2) with respect to the mounting plate 504, whereby the mounting plate 504 and the leaf spring member 310 are moved in the arrow a1 direction (FIG. 2). And the angle θ can be reduced. On the other hand, by moving the screw member 530 in the c2 direction (see FIG. 2) with respect to the mounting plate 504, the mounting plate 504 and the leaf spring member 310 can be rotated in the direction of arrow a2 (see FIG. 2). And the angle θ can be increased.

  In the vibration isolator 10, by changing at least one of a position where the leaf spring member 310 is attached to the support portion 100 and an angle θ where the leaf spring member 310 is attached to the support portion 100, The position where the inflection points 310a and 310b are generated in the leaf spring member 310 can be changed. Then, by changing the position of the inflection point 310a of the plate spring member 310, the length of the front end portion 310d and the length of the rear end portion 310f of the plate spring member 310 can be changed. Then, by changing the length of the front end portion 310d and the length of the rear end portion 310f of the leaf spring member 310, it is possible to adjust the force with which the leaf spring member 310 pushes up the mounting portion 200 in the arrow d direction.

  As described above, in the vibration isolator 10, at least one of the position where the leaf spring member 310 is attached to the support portion 100 and the angle θ where the leaf spring member 310 is attached to the support portion 100 is set. By changing, it is possible to adjust the force by which the leaf spring member 310 pushes up the mounting portion 200 in the direction of the arrow d, so that the leaf spring member 310 can be applied to the vibration isolation object 900 whose weight is within a certain range. The same leaf spring member 310 can be used without exchanging for another leaf spring member having a different strength.

  In the vibration isolator 10, at least one of a position where the leaf spring member 310 is attached to the support portion 100 and an angle θ where the leaf spring member 310 is attached to the support portion 100 is changed. Thus, it is possible to change the vibration transmission rate when vibration is transmitted to the vibration isolation object 900.

FIG. 4 shows the effect of the vibration isolator 10, and FIG. 4A shows the measurement result of the vibration transmissibility when the angle θ at which the leaf spring member 310 is attached to the support portion 100 is determined as θ1. FIG. 4B is a graph showing a measurement result of the vibration transmissibility when θ is set to θ2, which is an angle different from θ1. 4 (a) and 4 (b), the horizontal axis indicates the frequency of vibration in the vertical direction of the installation surface 920, and the vertical axis indicates the vibration-proof object 900 against vibration in the vertical direction of the installation surface 920. The vibration ratio in the vertical direction is shown. More specifically, the vertical axis is
Vibration transmissibility (dB) = 20 × Log ₁₀ (vibration of vibration-proof object 900 / vibration of installation surface 920)
Is shown.

  Comparing FIG. 4A and FIG. 4B, in the vibration isolator 10, by changing the angle θ at which the leaf spring member 310 is attached to the support portion 100, the vibration isolator 900 It can be seen that the vibration transmissibility to can be changed.

  As a result of the measurement, the natural frequency f0 that is the frequency of the installation surface 920 that maximizes the vibration transmissibility is 2.375 (Hz) when θ is θ1, and 0.25 when θ is θ2. (Hz). Here, the natural frequency f0 means that the smaller the numerical value is, the lower the transmission of vibration at a low frequency is, and the smaller the numerical value is, the greater the effect of suppressing the vibration is.

  FIG. 5 shows measurement results obtained by changing the angle θ at which the leaf spring member 310 is attached to the support portion 100 and measuring the natural frequency f0 at each θ.

FIG. 6 shows the effect of the vibration isolator 10, and FIG. 6A is a graph showing the measurement result of the vibration transmissibility when the leaf spring member 310 is moved by the distance d1 from the reference position. 6 (b) is a graph showing the measurement result of the vibration transmissibility when the distance d2 is moved from the position with the leaf spring member 310 as a reference. 6A and 6B, the horizontal axis indicates the frequency of vibration in the vertical direction of the installation surface 920, and the vertical axis indicates the vibration-proof object 900 against vibration in the vertical direction of the installation surface 920. The vibration ratio in the vertical direction is shown. More specifically, the vertical axis is
Vibration transmissibility (dB) = 20 × Log ₁₀ (vibration of vibration-proof object 900 / vibration of installation surface 920)
Is shown.

  Comparing FIG. 6A and FIG. 6B, in the vibration isolator 10, by changing the position where the leaf spring member 310 is attached to the support unit 100, the vibration isolator 900 is moved. It can be seen that the vibration transmissibility of can be changed.

  As a result of the measurement, the natural frequency f0 is 1.375 (Hz) when the distance d1 is moved from the position based on the leaf spring member 310, and the distance d2 is moved from the position based on the leaf spring member 310. In this case, it was 0.25 (Hz).

  FIG. 7 shows measurement results obtained by changing the distance d from the reference position of the leaf spring member 310 and measuring the natural frequency f0 at each distance d.

  Next, a vibration isolator 10 according to a second embodiment of the present invention will be described. FIG. 8 shows a vibration isolator according to the second embodiment of the present invention. The vibration isolator 10 according to the second exemplary embodiment of the present invention is similar to the vibration isolator 10 according to the first exemplary embodiment described above, and includes a support unit 100, a mounting unit 200, a coupling mechanism 300, and legs. A member 402 and a change mechanism 500 are included.

  In the vibration isolator 10 according to the second embodiment, the support unit 100 includes the bottom plate 102, the top plate 104, and, for example, four columns, like the vibration isolator 10 according to the first embodiment described above. Although having the member 110, the through hole 106 (see FIG. 1) formed in the vibration isolator 10 according to the first embodiment is not formed in the top plate 104. On the other hand, the vibration isolator 10 according to the second embodiment includes a mounting member 120 to which one end side of the leaf spring member 310 is mounted and a fixing member 130 for fixing the mounting member 120 to the top plate 104. Have.

  The mounting member 120 is, for example, a plate-like member, and is disposed on the lower side of the top plate 104 in the gravity direction. The fixing member 130 is, for example, a rod-shaped member, and is disposed so as to penetrate a through-hole 206 described later. The upper end side is fixed to the lower surface of the top plate 104, and the lower end side is It is fixed to the mounting member 120.

  Since the leg member 402 is equivalent to the vibration isolator 10 according to the first embodiment described above, the description thereof is omitted.

  The mounting unit 200 includes the bottom plate 202, the top plate 204, and, for example, four column members 210, like the vibration isolator 10 according to the first embodiment described above, but the first embodiment described above. The vibration isolator 10 according to the embodiment does not have the mounting member 220 and the fixing member 230 (see FIG. 1 respectively). On the other hand, in the vibration isolator 10 according to the second embodiment, a through hole 206 is formed in the top plate 204.

  The coupling mechanism 300 includes, for example, two leaf spring members 310, similarly to the vibration isolator 10 according to the first embodiment described above. Each of the two leaf spring members 310 is attached to the attachment member 120 of the support portion 100 on the end portion 310 c side, and the end portion 310 e side is attached to the top plate 204 of the placement portion 200 via the change mechanism 500. It is attached to. In this second embodiment as well, the coupling mechanism 300 only needs to have at least two leaf spring members 310, and the coupling mechanism 300 may have three or more leaf spring members 310.

  In the second embodiment, the change mechanism 500 is used as a position change mechanism that changes the position where the plate spring member 310 is mounted on the downward surface of the top plate 204 of the placement unit 200. The member 310 is used as an angle changing mechanism that changes the angle θ (see FIG. 9) at which the top plate 204 of the placement unit 200 is mounted on the downward surface.

  The component configuration of the change mechanism 500 is the same as that of the change mechanism 500 included in the vibration isolator 10 according to the first embodiment described above. In other words, the change mechanism 500 includes the mounting plate 504, the hinge 512, the moving member 510, the rail member 520, and the screw member 530 (see FIG. 2 respectively), as in the vibration isolator 10 according to the first embodiment described above. Have. In the vibration isolator 10 according to the first embodiment described above, the rail member 520 is fixed to the upward surface of the top plate 104, but in the vibration isolator 10 according to the second embodiment, It is fixed to the lower surface of the top plate 204.

  FIG. 9 shows the leaf spring member 310 in an enlarged manner. The leaf spring member 310 is curved so as to have two inflection points 310a and 310b, similar to the vibration isolator 10 according to the first embodiment described above. The leaf spring member 310 is an inflection point closest to the end portion 310c of the inflection point 310a and the inflection point 310b that is attached to the support portion 100. The mounting portion 200 is pushed so that a tip portion 310d, which is a portion closer to the end portion 310c than the inflection point 310a, pushes up the mounting portion 200 in the direction of arrow e, which is the direction intersecting the thickness direction of the leaf spring member 310. I support it. That is, the tip portion 310d supports the mounting unit 200 so as to apply a force in the direction of the gravity to the mounting unit 200 while applying a force in the direction of the fixing member 130 to the mounting unit 200. ing.

  The leaf spring member 310 is an inflection point closest to the end portion 310c of the inflection point 310a and the inflection point 310b that is attached to the support portion 100. A rear end portion 310f, which is a portion closer to the end portion 310e attached to the changing mechanism 500 than the inflection point 310a, is used as a normal spring, that is, as a member that generates a reaction force according to deformation. ing.

  In the vibration isolator 10 according to the second embodiment configured as described above, the position at which the leaf spring member 310 is mounted on the mounting portion 200 by the operator operating the changing mechanism 500. The angle θ at which the plate spring member 310 is mounted can be changed. In the vibration isolator 10 according to the second embodiment, the position at which the leaf spring member 310 is attached to the placement unit 200 and the angle at which the leaf spring member 310 is attached to the placement unit 200. By changing at least one of θ, the position where the inflection points 310a and 310b are generated in the leaf spring member 310 can be changed.

  Then, by changing the position of the inflection point 310a of the leaf spring member 310, the length of the front end portion 310d and the length of the rear end portion 310f of the leaf spring member 310 can be changed. By changing the length of 310d and the length of the rear end portion 310f, it is possible to adjust the force with which the leaf spring member 310 pushes the mounting portion 200 upward in the arrow e direction.

  Next, a vibration isolator 10 according to a third embodiment of the present invention will be described. FIG. 10 shows a vibration isolator 10 according to a third embodiment of the present invention. The vibration isolator 10 according to the third embodiment of the present invention is similar to the vibration isolator 10 according to the first embodiment described above. The support unit 100, the mounting unit 200, the coupling mechanism 300, the legs, A member 402 and a change mechanism 500 are included.

  Since the support part 100 is equivalent to the vibration isolator 10 according to the first embodiment described above, the description of the support part 100 is omitted.

  Since the leg member 402 is equivalent to the vibration isolator 10 according to the first embodiment described above, the description of the leg member 402 is omitted.

  The mounting unit 200 includes the bottom plate 202, the top plate 204, and, for example, four column members 210, like the vibration isolator 10 according to the first embodiment described above, but the first embodiment described above. The vibration isolator 10 according to the embodiment does not have the mounting member 220 and the fixing member 230 (see FIG. 1 respectively). On the other hand, in the vibration isolator 10 according to the third embodiment, a through hole 206 is formed in the top plate 204.

  The coupling mechanism 300 is used as a suspension part 380 for suspending the placement part 200, for example, two first leaf spring members 320 used as a first elastic body, and a second elastic body. For example, it has two second leaf spring members 330.

  The suspension part 380 includes a first mounting member 382 to which the first plate spring member 310 is mounted, a second mounting member 384 to which the second plate spring member 330 is mounted, a first mounting member 382 and a second mounting member. And a connecting member 386 for connecting the 384 to the 384. The first mounting member 382 is a plate-like member, for example, and is disposed above the top plate 104 and above the through hole 106. The second mounting member 384 is, for example, a plate-like member, and is disposed below the top plate 204 and below the through hole 206. The connecting member 386 is, for example, a rod-shaped member, and is disposed so as to penetrate the through hole 106 and the through hole 206, and has an end portion fixed to the first mounting member 382 and the other end portion. The side is attached to the second attachment member 384.

  The first leaf spring member 320 has substantially the same configuration as the leaf spring member 310 included in the vibration isolator 10 according to the first embodiment described above. That is, the leaf spring member 310 included in the vibration isolator 10 according to the first embodiment described above has the end 310c attached to the attachment member 220 (see FIG. 3), whereas the first leaf spring member. Although 320 has a difference that the end 320c is attached to the attachment member 382, the other part is the first leaf spring member 320 which the vibration isolator 10 according to the first embodiment described above has. It is equivalent to the leaf spring member 310.

  More specifically, the first leaf spring member 320 has the other end portion 320e on the support portion 100 via the change mechanism 500, like the leaf spring member 310 included in the vibration isolator 10 according to the first embodiment. The mounting mechanism is curved so as to have at least two inflection points, for example, two, and the change mechanism 500 is operated to change the mounting position with respect to the support unit 100, thereby changing the change mechanism. By operating 500, the angle with which the support unit 100 is mounted is changed.

  The 2nd leaf | plate spring member 330 is a structure substantially equivalent to the leaf | plate spring member 310 which the vibration isolator 10 which concerns on above-mentioned 2nd Embodiment has. That is, the leaf spring member 310 included in the vibration isolator 10 according to the second embodiment described above has the end 310c attached to the attachment member 120 (see FIG. 9), whereas the second leaf spring member. Although 330 is different from the end 330c being attached to the attachment member 384, the other part is the second leaf spring member 330 is the vibration isolator 10 according to the second embodiment described above. It is equivalent to the leaf spring member 310 having.

  More specifically, the second leaf spring member 330 has the other end portion 320e side via the changing mechanism 500, similarly to the leaf spring member 310 included in the vibration isolator 10 according to the second embodiment. Is mounted on the top plate 204, is curved so as to have at least two inflection points such as two, and is mounted on the mounting portion 200 by operating the changing mechanism 500. Is changed, and the angle attached to the placement unit 200 is changed by operating the change mechanism 500.

  Next, a vibration isolator 10 according to a fourth embodiment of the present invention will be described. FIG. 11 shows a vibration isolator 10 according to a fourth embodiment of the present invention. In the vibration isolator 10 according to the first embodiment described above, the support unit 100 that supports the mounting unit 200 is installed on the installation surface 920 via the leg member 402 (see FIG. 1). On the other hand, in the fourth embodiment, the first support portion 100 that supports the placement portion 200 is further supported by the second support portion 600, and the second support portion 600 is interposed via the leg member 402. Installed on the installation surface 920.

  Further, in the vibration isolator 10 according to the first embodiment described above, the placement unit 200 and the support unit 100 are coupled by the coupling mechanism 300 (see FIG. 1). On the other hand, in the fourth embodiment, the placement unit 200 and the first support unit 100 are connected by the first connection mechanism 300, and the first support unit 100 is connected by the second connection mechanism 700. The 2nd support part 600 is connected.

  The placement unit 200 is equivalent to the placement unit 200 in the first embodiment described above. For this reason, description of the mounting part 200 is abbreviate | omitted.

  The first support unit 100 is used as a first support unit that supports the placement unit 200, and includes a bottom plate 102 and a top plate 104. The bottom plate 102 and the top plate 104 are, for example, four pieces (see FIG. In FIG. 11, a frame body is formed by being connected by two column members 110. Further, a through hole 106 is formed in the center portion of the bottom plate 102, for example.

  Further, the first support portion 100 includes a mounting member 120 to which an end portion 710c of a second leaf spring member 710, which will be described later, is mounted, and a fixing member 130 for fixing the mounting member 120 to the top plate 104. . The mounting member 120 is, for example, a plate-like member, and is disposed above the top plate 604 described below in the gravity direction and above the through hole 606 described below in the gravity direction. The fixing member 130 is, for example, a rod-like member, and is disposed so as to penetrate the through hole 606. The lower end side is fixed to the top plate 104, and the upper end side is fixed to the mounting member 120. Has been.

  The second support portion 600 is a structure that supports the first support portion 100, and includes a bottom plate 602 and a top plate 604. The bottom plate 602 and the top plate 604 are, for example, four pieces (two pieces in FIG. 11). The frame body is formed by being connected by the column member 610 of FIG. A through hole 606 is formed, for example, at the center of the top plate 604.

  The leg member 402 is equivalent to the leg member 402 according to the first embodiment described above. For this reason, the description of the leg member 402 is omitted.

  The configuration of the first coupling mechanism 300 is substantially the same as that of the coupling mechanism 300 in the first embodiment described above. That is, the first coupling mechanism 300 includes, for example, two first leaf spring members 310 that are used as at least two first elastic bodies, and each of the two first leaf spring members 310 has an end portion. The 310c side is attached to the mounting part 200, and the end part 310e side is attached to the first support part 100. More specifically, the two first leaf spring members 310 are respectively attached to the attachment member 220 of the mounting portion 200 on the end portion 310 c side, and the first support portion is provided on the end portion 310 e side via the change mechanism 500. Each of the 100 bottom plates 102 is mounted on an upward surface. Since the changing mechanism 500 is the same as the changing mechanism 500 in the first embodiment, the description thereof is omitted.

  Similar to the leaf spring member 310 in the first embodiment, the first leaf spring member 310 is curved so as to have at least two inflection points such as two.

  The second connection mechanism 700 is a mechanism for connecting the first support part 100 and the second support part 600, and has, for example, two second leaf spring members 710 used as at least two second elastic bodies. . Each of the two second leaf spring members 710 is attached to the first support portion 100 on the end portion 710 c side and attached to the second support portion 600 on the end portion 710 e side. More specifically, the two second leaf spring members 710 are respectively attached to the attachment member 120 of the first support portion 100 on the end portion 710 c side, and the second support is provided on the end portion 710 e side via the change mechanism 500. Each is mounted on the upward surface of the top plate 604 of the unit 600. Since the changing mechanism 500 is the same as the changing mechanism 500 in the first embodiment, the description thereof is omitted.

  Similar to the leaf spring member 310 in the first embodiment, the second leaf spring member 710 is curved so as to have at least two inflection points such as two.

  FIG. 12 shows a modification of the vibration isolator 10 according to the above-described fourth embodiment. In the vibration isolator 10 according to the above-described fourth embodiment, the force that the first leaf spring member 310 applies to the mounting portion 200 and the force that the second leaf spring member 710 applies to the first support portion 100. Was the same direction in the horizontal direction. On the other hand, in this modification, the force F1 that the first leaf spring member 310 applies to the mounting portion 200 and the force F2 that the second leaf spring member 710 applies to the first support portion 100 are: As shown in FIG. 12, the directions are different from each other in the horizontal plane direction.

  FIG. 13 shows an elastic structure 340 that can be used as an elastic body in place of the plate spring member 310. The elastic structure 340 has, for example, a plurality of bar-like elastic bodies 342 such as five, and these rod-like elastic bodies 342 are supported by fixing one end portion to the support member 344, and the other end portion is supported. It is supported by being fixed to the support member 346.

  Similarly to the fact that the elastic structure 340 can be used instead of the plate spring member 310, the elastic structure 340 can be used instead of the first plate spring member 320 (see FIG. 10), and the second plate spring member. The elastic structure 340 can be used instead of 330 (see FIG. 10). Further, the elastic structure 340 can be used instead of the first leaf spring member 310 (see FIG. 11), and the elastic structure 340 can be used instead of the second leaf spring member 710 (see FIG. 11). it can.

  FIG. 14 shows a modification of the vibration isolator 10 according to the first embodiment described above. The vibration isolator 10 according to the first embodiment described above has two leaf spring members 310 used as elastic bodies. On the other hand, this modification has five leaf spring members 310. The five leaf spring members 310 are arranged so that the force applied to the placement unit 200 is balanced in the horizontal plane direction. For example, when the strengths of the five leaf spring members 310 are all the same, the five leaf spring members 310 are arranged so that the angles between the two leaf spring members 310 adjacent to each other are all the same.

  As a modification of the vibration isolator 10 according to the first embodiment, as a modification of the vibration isolator 10 according to the second embodiment, the vibration isolator 10 according to the second embodiment is provided with five leaf spring members 310. The vibration device 10 may be provided with five leaf spring members 310. As a modification of the vibration isolator 10 according to the third embodiment, the vibration isolator 10 can be provided with five first leaf spring members 320, and the vibration isolator 10 has five second leaf spring members 330. Can be provided. Further, as a modified example of the vibration isolator 10 according to the fourth embodiment, the vibration isolator 10 can be provided with five first leaf spring members 310 and five second leaf spring members 710 can be provided. .

  As described above, the present invention can be applied to a vibration isolator.

DESCRIPTION OF SYMBOLS 10 ... Vibration isolator 100 ... Support part, 1st support part 200 ... Mounting part 300 ... Connection mechanism, 1st connection mechanism 310 ... Leaf spring member, 1st leaf spring member 310a 310b ... Inflection point 320 ... 1st leaf spring member 330 ... 2nd leaf spring member 380 ... Suspension part 500 ... Change mechanism 600 ... 2nd support part 700 ... -2nd connection mechanism 710 ... 2nd leaf | plate spring member 900 ... Anti-vibration target object

Claims (10)

A placement unit on which the object of vibration isolation is placed;
A support part for supporting the mounting part,
A connecting mechanism for connecting the mounting portion and the support portion;
Have
The connection mechanism has at least two elastic bodies having one end portion mounted on the mounting portion and the other end portion mounted on the support portion,
The at least two elastic bodies each bend to have at least two inflection points ;
An anti-vibration device further comprising a position changing mechanism for changing a position at which the at least two elastic bodies are attached to the support portion . It said at least two elastic body vibration damping apparatus according to claim 1, further comprising an angle changing mechanism for changing the respective angles that are attached to the supporting part. The at least two elastic bodies are arranged in a direction in which a portion of the at least one inflection point closest to the one end portion from the inflection point intersects the thickness direction of the elastic body. The vibration isolator of Claim 1 or 2 which supports the said mounting part so that a part may be pushed up. A placement unit on which the object of vibration isolation is placed;
A support part for supporting the mounting part,
A connecting mechanism for connecting the mounting portion and the support portion;
Have
The connection mechanism has at least two elastic bodies having one end portion mounted on the mounting portion and the other end portion mounted on the support portion,
The at least two elastic bodies each bend to have at least two inflection points ;
The vibration isolator which further has a position change mechanism which changes the position where the said at least 2 elastic body is mounted | worn with respect to the said mounting part to each . The vibration isolator according to claim 4 , further comprising an angle changing mechanism that changes an angle at which the at least two elastic bodies are attached to the mounting portion. The at least two elastic bodies are arranged such that, of the at least two inflection points, a portion closer to the other end portion than the inflection point closest to the other end portion intersects the thickness direction of the elastic body. 6. The anti-vibration device according to claim 4 or 5 , wherein the anti-vibration device supports the pre-placement portion that pushes up the pre-placement portion. The vibration isolator according to any one of claims 1 to 6, wherein the at least two elastic bodies are arranged so that the forces applied by the respective elastic bodies to the mounting portion are balanced in the horizontal plane direction. A placement unit on which the object of vibration isolation is placed;
A support part for supporting the mounting part,
A connecting mechanism for connecting the mounting portion and the support portion;
Have
The coupling mechanism is
A suspension part for suspending the mounting part;
At least two first elastic bodies whose one end is attached to the suspension and whose other end is attached to the support;
At least two second elastic bodies, one end of which is attached to the suspension part and the other end of which is attached to the mounting part;
Have
The vibration-proof device in which the at least two first elastic bodies and the at least two second elastic bodies are respectively curved so as to have at least two inflection points. A placement unit on which the object of vibration isolation is placed;
A first support portion for supporting the placement portion;
A second support part for supporting the first support part;
A first coupling mechanism that couples the placement unit and the first support unit;
A second coupling mechanism that couples the first support part and the second support part;
Have
The first coupling mechanism has at least two first elastic bodies whose one end is attached to the mounting portion and whose other end is attached to the first support portion,
The second coupling mechanism has at least two second elastic bodies whose one end is supported by the first support and whose other end is supported by the second support.
The vibration-proof device in which the at least two first elastic bodies and the at least two second elastic bodies are respectively curved so as to have at least two inflection points. The force applied by the at least two first elastic bodies to the mounting portion and the force applied by the at least two second elastic bodies to the first support portion are mutually oriented in the horizontal plane direction. The vibration isolator according to claim 9 which is different.

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