JP2016069197A - Channel member - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a channel member having less un-jointed parts, and excellent in seal ability, even when a channel member has a channel in the vicinity of a center part.SOLUTION: A channel member 1 is formed of a disk-state ceramic joint body having a channel 4 formed on a joint surface, and when radial dimension from a center on the ceramic joint body is A, the channel 4 is formed in an area 5 having radial dimension of 0.6A from the center, and on the joint surface outside of the area 5, a surrounding groove 6 which is concentric to the area 5 is provided, therefore internal stress generated on outside of the area 5 can be easily released, and there are less un-jointed parts on outside of the area 5, and excellent in seal ability.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a flow path member.

  Conventionally, the main surface is used as a mounting surface for the object to be processed, and a warm fluid or a cold fluid is allowed to flow through a flow path formed inside, thereby heating the object to be processed or cooling the heat of the object to be processed. A channel member is used for temperature adjustment. And such a flow path member forms a flow path by forming a groove in one member or both members and joining these members.

  For example, in Patent Document 1, a groove for forming a fluid passage (flow path) is provided on at least one joint surface of the disk-shaped first fired ceramic molded body and the second fired ceramic molded body, A ceramic heater base which is a flow path member made of a ceramic joined body in which a fluid passage is provided by the groove and the other joining surface by joining the first fired ceramic formed body and the second fired ceramic formed body Has been proposed.

Japanese Patent Laid-Open No. 7-272834

  In recent years, there has been a demand for a flow path member having a configuration in which only the central portion of the placement surface, that is, the vicinity of the center of the flow path member, is used as the temperature adjustment region of the object to be processed. However, when the flow path member is formed only in the vicinity of the center so that only the vicinity of the center of the flow path member is the temperature adjustment region, and the flow path member is formed by bonding with the outside of the flow channel region as the bonding surface, There were many unjoined parts in the outside and there was a problem that the fluid tightness could not be maintained.

  The present invention has been devised to solve the above problem, and even if the flow path member has a structure in which the flow path is located near the center, the flow path member has few unjoined portions and has excellent sealing performance. The purpose is to provide.

The flow path member of the present invention comprises a disk-shaped ceramic joined body having a flow path formed on the joining surface, and when the radius dimension from the center of the ceramic joined body is A, the radius is 0.6 A from the center. The flow path is provided in a region having dimensions, and a surrounding groove is concentric with the region on a joint surface outside the region.

According to the flow path member of the present invention, it is composed of a disk-shaped ceramic joined body having a flow path formed on the joining surface, and when the radial dimension from the center of the ceramic joined body is A, 0.6 A from the center. The flow path is provided in a region having a radial dimension of, and the joint surface outside the region has a surrounding groove concentric with the region, so that there are few unjoined portions outside the region, and sealing performance Excellent.

An example of the flow path member of this embodiment is shown, (a) is a perspective view, (b) is a plane transparent view. It is a plane permeation | transmission figure which shows the other example of the flow-path member of this embodiment.

  Hereinafter, the flow path member of the present embodiment will be described in detail with reference to the drawings.

  1A and 1B show an example of a flow path member of the present embodiment, in which FIG. 1A is a perspective view, and FIG. The flow path member 1 of the example shown in FIG. 1 is composed of a joined body in which a first member 2 and a second member 3 are joined, and has an inlet 7 and an outlet 8 that are open on the main surface of the first member 2. doing. The flow path member 1 of the present embodiment is a ceramic joined body because both the first member 2 and the second member 3 are made of ceramics.

And as shown in FIG.1 (b), the inflow port 7 and the outflow port 8 are each connected with the flow path 4, and the flow path member 1 of this embodiment is in the flow path member 1 (ceramic joining body). When the distance from the center is A, the flow path 4 is provided in a region 5 (hereinafter, also simply referred to as region 5) having a radial dimension of 0.6 A from the center. In addition, the inscribed circle on the outer periphery of the flow path 4 is a region 5, and in FIG.

  And the flow-path member 1 of this embodiment has the surrounding groove | channel 6 concentric with the area | region 5 in the joint surface outside the area | region 5, as shown in FIG.1 (b). By satisfying such a configuration, there are few unjoined portions outside the region 5, and the flow path member 1 is excellent in hermeticity. As described above, the flow path member 1 having few unjoined portions outside the region 5 and having excellent airtightness can be obtained by having the surrounding groove 6 concentric with the region 5 on the joint surface outside the region 5. By doing so, it is possible to release internal stress generated outside the region 5 due to a deviation in the behavior of the first member and the second member due to expansion and contraction during joining.

  The surrounding groove 6 refers to a groove that overlaps the circumference of a concentric circle having the same center as that of the region 5 by 70% or more. The surrounding groove 6 does not have to be continuous, and short grooves may be provided concentrically. Moreover, it cannot be overemphasized that the shape of the flow path 4, the formation position of the inflow port 7 and the outflow port 8, etc. are not restricted to the example shown in FIG.

  The flow path 4 and the surrounding groove 6 may be provided only on one side of the first member 2 side or the second member 3 side, or the flow path 4 is provided on the first member 2 side and the surrounding groove 6 is provided on the second member 3 side. Alternatively, the surrounding groove 6 may be provided on the first member 2 side, and the flow path 4 may be provided on the second member 3 side. Further, the flow path 4 may be formed by forming grooves in the first member 2 and the second member 3 and joining them together by bonding.

  Next, FIG. 2 is a plan transparent view showing another example of the flow path member of the present embodiment. As shown in FIG. 2, it is preferable to have a plurality of different concentric surrounding grooves 6. When the above configuration is satisfied, the internal stress generated outside the region 5 can be more easily released, so that the number of unjoined portions is further reduced, so that the flow path member 10 is further excellent in sealing performance.

  Further, as shown in FIG. 2, the surrounding groove 6 having the smallest radius is the first surrounding groove 6a, and the surrounding groove 6 having the second smallest radius is the second surrounding groove 6b. When the interval between the inner periphery of the surrounding groove 6a is X and the interval between the outer periphery of the first surrounding groove 6a and the inner periphery of the second surrounding groove 6b is Y, Y / X is within the range of 0.8 to 1.2. Preferably it is. When such a configuration is satisfied, while having an effect of releasing internal stress, a sufficient area can be secured on the joint surface between the surrounding grooves 6 and the mechanical characteristics can be reduced. Since the rib thickness between the surrounding grooves 6 is small, the flow path member 10 can be made more excellent in terms of fluid sealing performance and mechanical characteristics.

  As the ceramics constituting the flow path members 1 and 10 of this embodiment, any of oxide ceramics such as alumina, zirconia, cordierite and yttria, and non-oxide ceramics such as silicon carbide and silicon nitride can be applied. However, in order to efficiently use the heat of the fluid flowing through the flow path 4, it is preferable to use silicon carbide having a high thermal conductivity.

  Next, an example in which silicon carbide is applied will be described as an example of the method for manufacturing the flow path member of the present embodiment.

First, silicon carbide powder (average particle size D50 = 0.5 to 10 μm) as a starting material, boron carbide (B ₄ C) powder, carbon powder or aluminum oxide (Al ₂ O ₃ ) powder, yttrium oxide as a sintering aid After preparing (Y ₂ O ₃ ) powder and weighing a predetermined amount, the weighed powder together with a predetermined amount of solvent (water) is put into a pulverizer such as a ball mill to adjust the average particle size to 2 μm or less. To do. Thereafter, a suitable amount of a binder such as polyethylene glycol and polyethylene oxide is added to form a slurry, and the slurry is spray granulated using a spray dryer to obtain silicon carbide granules.

  Next, the silicon carbide granule is formed into a predetermined shape by a hydrostatic press molding method (rubber press) or a powder press molding method, and a molded body that becomes the first member 2 and a molded body that becomes the second member 3 by cutting. Get. Further, by further cutting, the flow path 4, the surrounding groove 6, the inflow port 7, the outflow port 8, and the like are provided in the formed body that becomes the first member 2 or the formed body that becomes the second member 3.

  Next, a bonding agent is applied to at least one of the bonding surfaces of the molded body to be the first member 2 and the molded body to be the second member 3. If the slurry at the time of producing the silicon carbide granule is used as the bonding agent used at this time, the same shrinkage as that of the molded body serving as the first member 2 and the molded body serving as the second member 3 during firing also serving as bonding. This is preferable because it shows a behavior. In addition, although application | coating of the bonding agent to the molded object used as the 1st member 2 and the molded object used as the 2nd member 3 may use a brush etc., in order to make application | coating thickness more uniform, it is a junction part. It is preferable to apply using a screen masked so that the bonding agent can only be applied.

  Then, after the bonding agent is applied, the bonding surfaces of the molded body to be the first member 2 and the molded body to be the second member 3 are bonded together and pressed at a predetermined pressure, and then this is non-oxidizing atmosphere in a firing furnace. The flow path member 1 of the present embodiment can be obtained by firing at a maximum temperature of 1800 to 2100 ° C. and subjecting the sintered body after firing to final finishing by grinding. In the cutting process of the molded body, if a plurality of surrounding grooves 6 are provided and the subsequent steps are produced by the method described above, a flow path member 10 as shown in FIG. 2 can be obtained.

  Moreover, the other manufacturing method of the flow-path member of this embodiment is demonstrated. First, until the molded body that becomes the first member 2 and the molded body that becomes the second member 3 in which the flow path 4, the surrounding groove 6, the inflow port 7, the outflow port 8, and the like are already formed by cutting are obtained. After firing these to obtain the first member 2 and the second member 3 made of a silicon carbide sintered body, a bonding agent made of glass is applied to at least one of the bonding surfaces, Heat treatment. Details of the bonding will be described below.

As the glass bonding agent, glass such as Y ₂ O ₃ —Al ₂ O ₃ —SiO _2, Yb ₂ O ₃ —Al ₂ O ₃ —SiO ₂ , Lu ₂ O ₃ —Al ₂ O ₃ —SiO ₂ can be applied. Here, an example using Y ₂ O ₃ —Al ₂ O ₃ —SiO ₂ will be described. First, prepare yttrium oxide powder (average particle size 0.5 to 1.5 μm), alumina powder (average particle size 0.5 to 2 μm), and silicon oxide powder (average particle size 1 μm or less), weigh a predetermined amount, and then use a stirring mill. To make a mixed powder. Then, an appropriate amount of alumina powder and an organic solvent (such as isopropyl alcohol) added to the mixed powder is placed in a cylindrical plastic container, and mixed by rotating for 8 hours or more using a rotating device.

  Thereafter, the slurry is discharged from the cylindrical plastic container into the metal container, and after discharging, the slurry is dried in the dryer at a predetermined temperature for 8 hours or more while the slurry is put in the metal container. Is crushed into a raw material for a bonding agent.

  Next, a bonding material, a solvent, and a dispersant are prepared. In addition, as preparation amount, a solvent is 10-20 mass% and a dispersing agent is weighed in the ratio of 0.5-2 mass% with respect to 100 mass% of raw materials for bonding agents. Here, as the solvent, it is preferable to use a hydrophobic organic solvent, for example, a paraffin-based solvent. As the dispersant, a nonionic surfactant suitable for the hydrophobic solvent is preferably used. For example, sucrose fatty acid ester, polyoxyethylene sorbitan fatty acid ester, fatty acid alkanolamide and the like are preferably used. Then, after weighing, it is put into a cylindrical plastic container and mixed for 8 hours or more while being rotated by a rotating device.

Next, a bonding agent is applied to at least one bonding surface of the first member 2 and the second member 3 made of the silicon carbide sintered body. To apply the bonding agent, prepare a screen where only the bonding portion is opened, and the others are plugged, align the opening portion of the screen with the bonding portion, hang the bonding agent on the screen, and use a resin squeegee. A bonding agent is applied through a screen. At this time, the application thickness of the bonding agent is, for example, in the range of 10 to 500 μm. Thereafter, the first member 2 and the second member
After bonding the joining surfaces of the members 3 and pressurizing them with a predetermined pressure, the flow path members 1 and 10 of the present embodiment are heat-treated by holding them at 1200 to 1500 ° C. for 0.5 to 3 hours in a nitrogen atmosphere. Can be obtained.

Next, the confirmation method of the presence or absence of an unjoined part is demonstrated. First, as an apparatus, an ultrasonic flaw detector (manufactured by Jeanes Co., Ltd.) is used. A flow path member is set at a predetermined position in the water tank of the ultrasonic flaw detector, a measurement distance of 30 to 100 mm, a probe output of 15 MHz, and a scanning pitch. An unjoined part can be confirmed by measuring under the conditions of 1 mm and a detection frequency of 500 MHz and confirming the obtained chart. Further, if the total junction area is A and the area of the unjoined portion confirmed by the chart is B, the junction area ratio can be calculated by calculating B / A × 100.

  The joining area rate of the flow path member 1 of the embodiment shown in FIG. 1 is 90% or more, and the joining area rate of the flow path member 10 of the embodiment shown in FIG. 2 is 93% or more. As is apparent from the results, the flow path member of the present embodiment has few unjoined portions outside the region 5 and is excellent in hermeticity.

1: Channel member 2: First member 3: Second member 4: Channel 5: Area (area) having a radial dimension of 0.6 A from the center
6: Go groove 7: Inlet 8: Outlet

Claims (3)

  It is made of a disk-shaped ceramic joined body having a flow path formed on the joining surface, and when the radial dimension from the center of the ceramic joined body is A, the flow is within a region of a radial dimension of 0.6 A from the center. A flow path member comprising a channel and having a surrounding groove concentric with the region on a joint surface outside the region.   The flow path member according to claim 1, comprising a plurality of different concentric surrounding grooves.   The surrounding groove with the smallest radius is the first surrounding groove, the surrounding groove with the second smallest radius is the second surrounding groove, and the distance between the outer periphery of the region and the inner periphery of the first surrounding groove is X The Y / X is in the range of 0.8 to 1.2, where Y is the distance between the outer periphery of the first surrounding groove and the inner periphery of the second surrounding groove. Item 3. The flow path member according to Item 2.