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Description
本発明の第１の発明に係る装置は、制御対象の位置を検出する位置検出手段と、前記制御対象の目標速度と目標位置を出力する目標発生手段と、前記制御対象を目標位置に追従させる制御量を算出する第１算出手段と、前記制御対象の速度を目標速度に制御する制御量を算出する第２算出手段と、前記制御対象の固定位置への位置制御中に、前記制御対象の姿勢変化へ抗する制御量である姿勢差補正量を記憶する記憶手段と、前記第１算出手段により算出された制御量と、前記第２算出手段により算出された制御量と、前記制御対象の速度を前記目標速度へと変更する制御中に、前記記憶手段から取得された前記姿勢差補正量と、を加算した総制御量にしたがって前記制御対象への制御信号を出力する制御信号出力手段と、を備える。
An apparatus according to a first aspect of the present invention includes a position detection unit that detects a position of a control target, a target generation unit that outputs a target speed and a target position of the control target, and causes the control target to follow the target position. a first calculating means for calculating a control amount, and a second calculating means for calculating a control amount for controlling the speed of the controlled object to the target speed, while the position control of the previous SL control target fixed position, the control target Storage means for storing a posture difference correction amount that is a control amount that resists a change in posture, a control amount calculated by the first calculation means, a control amount calculated by the second calculation means, and the control target Control signal output means for outputting a control signal to the control object in accordance with a total control amount obtained by adding the posture difference correction amount acquired from the storage means during the control of changing the speed to the target speed and, obtain Bei the.
Claims (25)
前記制御対象の目標速度と目標位置を出力する目標発生手段と、
前記制御対象を目標位置に追従させる制御量を算出する第１算出手段と、
前記制御対象の速度を目標速度に制御する制御量を算出する第２算出手段と、
前記制御対象の固定位置への位置制御中に、前記制御対象の姿勢変化へ抗する制御量である姿勢差補正量を記憶する記憶手段と、
前記第１算出手段により算出された制御量と、前記第２算出手段により算出された制御量と、前記制御対象の速度を前記目標速度へと変更する制御中に、前記記憶手段から取得された前記姿勢差補正量と、を加算した総制御量にしたがって前記制御対象への制御信号を出力する制御信号出力手段と、を備える
ことを特徴とする位置制御装置。 Position detecting means for detecting the position of the controlled object;
Target generating means for outputting the target speed and target position of the control object;
First calculation means for calculating a control amount for causing the control object to follow a target position;
Second calculation means for calculating a control amount for controlling the speed of the control target to a target speed ;
During position control Previous Stories control target fixed position, storing means for storing the posture difference correction amount is a control amount that resists the posture change of the controlled object,
The control amount calculated by the first calculation unit, the control amount calculated by the second calculation unit, and the control unit acquired during the control to change the speed of the control target to the target speed. position control device, characterized in said control signal output means for outputting a control signal to the controlled object, obtain Preparations to <br/> that according the total control amount obtained by adding, and the posture difference correction-amount.
前記記憶手段は、前記取得手段により取得された前記姿勢差補正量を記憶する The storage means stores the posture difference correction amount acquired by the acquisition means.
ことを特徴とする請求項１に記載の位置制御装置。The position control device according to claim 1.
ことを特徴とする請求項２に記載の位置制御装置。 It said acquisition means, claims, characterized in that for obtaining a throughput which has been subjected to low-pass filtering process on the total control quantity including a control amount or the control amount calculated by the first calculating means as the posture difference correction amount 2. The position control device according to 2.
前記制御信号出力手段は、前記第１算出手段及び前記第２算出手段によりそれぞれ算出された制御量または当該制御量と前記外乱推定オブザーバにより算出された外乱相殺制御量を加算した総制御量にしたがって前記制御対象への制御信号を出力する
ことを特徴とする請求項１から３のいずれか１項に記載の位置制御装置。 During position control for causing the control target to follow the target position, the disturbance is estimated from the control amount obtained by subtracting the attitude difference correction amount stored in the storage unit from the total control amount and the movement amount of the control target. A disturbance estimation observer for calculating a disturbance cancellation control amount that cancels
The control signal output means is in accordance with a control amount calculated by the first calculation means and the second calculation means or a total control amount obtained by adding the control amount and the disturbance cancellation control amount calculated by the disturbance estimation observer. position controller according to any one of claims 1 to 3, and outputs a control signal to the controlled object.
ことを特徴とする請求項４に記載の位置制御装置。 During the position control of the controlled object to the fixed position, the control signal output means adds the control amounts output by the first calculation means and the second calculation means without adding the disturbance cancellation control amount. The position control device according to claim 4 , wherein a control signal to the control object is output according to a total control amount.
前記総制御量は、前記第１算出手段により算出された制御量と、前記第２算出手段により算出された姿勢差補正後の制御量とを加算して取得される The total control amount is obtained by adding the control amount calculated by the first calculation unit and the control amount after the attitude difference correction calculated by the second calculation unit.
ことを特徴とする請求項１から５のいずれか１項に記載の位置制御装置。The position control device according to claim 1, wherein
ことを特徴とする請求項１から５のいずれか１項に記載の位置制御装置。 Said first calculating means is a feedback compensation unit, the second calculating means is position control device according to any one of claims 1-5, characterized in <br/> be feedforward compensation means .
前記制御対象の目標速度から算出される加速度情報を取得して前記制御量に変換する変換手段と、
前記加速度情報の収束を判定する収束判定処理手段と、
前記収束判定処理手段の出力と前記記憶手段から取得した前記姿勢差補正量とを乗算する乗算手段と、
前記乗算手段の出力と前記変換手段の出力とを加算する加算手段を備える
ことを特徴とする請求項７に記載の位置制御装置。 The second calculation means includes
Conversion means for acquiring acceleration information calculated from the target speed of the control target and converting it into the control amount;
Convergence determination processing means for determining convergence of the acceleration information;
Multiplication means for multiplying the output of the convergence determination processing means by the posture difference correction amount acquired from the storage means;
8. The position control apparatus according to claim 7 , further comprising addition means for adding the output of the multiplication means and the output of the conversion means.
ことを特徴とする請求項８に記載の位置制御装置。 The convergence determination processing means outputs zero when it is determined that the acceleration information has converged, and outputs a non-zero value when it is determined that the acceleration information has not converged. 9. The position control device according to 8 .
前記加速度情報を取得して前記制御対象の制御状態として加速状態であるか、または制動状態であるかを判定する状態判定手段と、
前記加算手段の出力と前記状態判定手段の出力とを乗算する乗算手段をさらに備える
ことを特徴とする請求項８または９に記載の位置制御装置。 The second calculation means includes
State determination means for acquiring the acceleration information and determining whether the control target is in an acceleration state or a braking state;
Position controller according to claim 8 or 9, further comprising a multiplying means for multiplying the outputs of said state determining means of the adding means.
ことを特徴とする請求項１０に記載の位置制御装置。 The state determination means outputs zero when it is determined that the control state of the control target is a braking state, and outputs a non-zero value when it is determined that the control state of the control target is not a braking state. The position control device according to claim 10 .
前記制御対象の目標速度と目標位置を出力するステップと、
前記制御対象を目標位置に追従させる第１の制御量を算出するステップと、
前記制御対象の速度を目標速度に制御する第２の制御量を算出するステップと、
前記制御対象の固定位置への位置制御中に、前記制御対象の姿勢変化へ抗する制御量である姿勢差補正量を記憶手段が記憶するステップと、
前記第１の制御量と、前記第２の制御量と、前記制御対象の速度を前記目標速度へと変更する制御中に、前記記憶手段から取得された前記姿勢差補正量と、を加算した総制御量にしたがって前記制御対象への制御信号を出力するステップと、を有する
ことを特徴とする位置制御方法。 The method comprising the steps of: detecting the position of the control target,
And outputting the target speed and the target position before Symbol controlled object,
Calculating a first control quantity to follow the pre-Symbol controlled object to a target position,
Calculating a second control quantity to control the speed of the previous SL controlled object to the target speed,
A step of pre-SL in position control to the controlled object of a fixed position, the storage memory means of attitude difference correction amount is a control amount that resists the posture change of the controlled object,
The first control amount, the second control amount, and the posture difference correction amount acquired from the storage unit during the control of changing the speed of the control target to the target speed are added. position control method according to claim Rukoto to have a, and outputting a control signal to the controlled object in accordance with the total control amount.
同定用入力と前記入力に対する同定モデルの応答と同定対象の応答に基づいて、前記同定モデルの応答が前記同定対象の応答に一致するように前記同定モデルのパラメータを適応同定する適応同定手段と、
前記制御対象が停止状態の場合の当該停止状態を維持するための制御量である姿勢差補正量を記憶する記憶手段と、を備え、
前記適応同定手段の同定用入力は、前記第１算出手段により算出された制御量から前記記憶手段の記憶している姿勢差補正量を演算した制御量に応じた制御量であり、同定対象の応答は前記制御対象の移動量である
ことを特徴とする位置制御装置。 First calculation means for calculating a control amount for causing the control object to follow the target position according to the position of the control object detected by the position detection means;
Adaptive identification means for adaptively identifying parameters of the identification model based on an identification input, an identification model response to the input, and an identification target response so that the identification model response matches the identification target response;
Storage means for storing a posture difference correction amount that is a control amount for maintaining the stop state when the control target is in a stop state;
The input for identification of the adaptive identification unit is a control amount corresponding to a control amount obtained by calculating the posture difference correction amount stored in the storage unit from the control amount calculated by the first calculation unit, and the identification target The response is a movement amount of the control object.
前記制御対象の速度を目標速度に制御する制御量を算出する第２算出手段と、
同定用入力と前記入力に対する同定モデルの応答と同定対象の応答に基づいて、前記同定モデルの応答が前記同定対象の応答に一致するように前記同定モデルのパラメータを適応同定する適応同定手段と、
前記制御対象が停止状態の場合の当該停止状態を維持するための制御量である姿勢差補正量を記憶する記憶手段と、を備え、
前記適応同定手段の同定用入力は、前記第１算出手段により算出された制御量と前記第２算出手段により算出された制御量とを加算した制御量から前記記憶手段の記憶している姿勢差補正量を演算した制御量に応じた制御量であり、同定対象の応答は前記制御対象の移動量である
ことを特徴とする位置制御装置。 First calculation means for calculating a control amount for causing the control object to follow the target position according to the position of the control object detected by the position detection means;
Second calculation means for calculating a control amount for controlling the speed of the control target to a target speed;
Adaptive identification means for adaptively identifying parameters of the identification model based on an identification input, an identification model response to the input, and an identification target response so that the identification model response matches the identification target response;
Storage means for storing a posture difference correction amount that is a control amount for maintaining the stop state when the control target is in a stop state;
The identification input of the adaptive identification means is an attitude difference stored in the storage means from a control quantity obtained by adding the control quantity calculated by the first calculation means and the control quantity calculated by the second calculation means. A position control device, which is a control amount corresponding to a control amount obtained by calculating a correction amount, and a response to be identified is a movement amount of the control target.
ことを特徴とする請求項１３項または１４に記載の位置制御装置。 When the posture difference correction amount, which is a control amount for maintaining the stopped state when the controlled object is in the stopped state, is not stored in the storage unit, the adaptive identification unit does not perform adaptive identification. The position control device according to claim 13 or 14 .
ことを特徴とする請求項１３項または１４に記載の位置制御装置。 When the storage update of the attitude difference correction amount, which is a control amount for maintaining the stop state when the control target is in the stop state, is not performed for a predetermined period or longer in the storage unit, the adaptive identification unit is adapted position controller according to claim 13, wherein or 14, characterized in that does not perform identification.
ことを特徴とする請求項１３項に記載の位置制御装置。 The first calculation means is a feedback compensation means, and calculates a control amount obtained by calculating an attitude difference correction amount stored in the storage means from a feedback control amount as an input for identification of the adaptive identification means. The position control device according to claim 13 .
ことを特徴とする請求項１４から１６のいずれか１項に記載の位置制御装置。 The first calculation means is a feedback compensation means, and the second calculation means is an adaptive control means, and the storage means stores the control amount obtained by adding the feedback control amount and the adaptive control amount. The position control device according to claim 14 , wherein a control amount obtained by calculating a posture difference correction amount is calculated as an identification input of the adaptive identification unit.
ことを特徴とする請求項１８に記載の位置制御装置。 The second calculating unit obtains a normative response to a target speed of the normative model, converts it into a normative control amount, calculates the normative control amount and the output of the adaptive identification unit, and calculates an adaptive control amount. The position control device according to claim 18 .
ことを特徴とする請求項１３から１８のいずれか１項に記載の位置制御装置。 19. The storage device according to claim 13 , wherein the storage unit stores, as the posture difference correction amount, a passage amount obtained by performing low-pass filter processing on the control amount calculated by the first calculation unit. The position control device described.
ことを特徴とする請求項１から１１、１３から２０のいずれか１項に記載の位置制御装置。 The position control device according to any one of claims 1 to 11, and 13 to 20 , wherein the control target is driven by an actuator having no holding force when thrust is not generated.
ことを特徴とする光学機器。 An optical apparatus comprising the position control device according to claim 21 and an optical element driven by the actuator .
ことを特徴とする撮像装置。 An image pickup apparatus comprising: the position control device according to claim 21; and an optical element driven by the actuator .
同定用入力と前記入力に対する同定モデルの応答と同定対象の応答に基づいて、前記同定モデルの応答が前記同定対象の応答に一致するように前記同定モデルのパラメータを適応同定する適応同定ステップと、
前記制御対象が停止状態の場合の当該停止状態を維持するための制御量である姿勢差補正量を記憶する記憶ステップと、を有し、
前記適応同定ステップにおける同定用入力は、前記第１算出ステップで算出された制御量から前記記憶ステップで記憶している姿勢差補正量を演算した制御量に応じた制御量であり、同定対象の応答は前記制御対象の移動量である
ことを特徴とする位置制御方法。 A first calculation step of calculating a control amount for causing the control object to follow the target position according to the position of the control object detected by the position detection unit;
An adaptive identification step for adaptively identifying parameters of the identification model based on an input for identification, a response of the identification model to the input and a response of the identification target, so that the response of the identification model matches the response of the identification target;
Storing an attitude difference correction amount that is a control amount for maintaining the stop state when the control target is in a stop state; and
The input for identification in the adaptive identification step is a control amount according to a control amount obtained by calculating the posture difference correction amount stored in the storage step from the control amount calculated in the first calculation step. The response is a movement amount of the control object.
前記制御対象の速度を目標速度に制御する制御量を算出する第２算出ステップと、
同定用入力と前記入力に対する同定モデルの応答と同定対象の応答に基づいて、前記同定モデルの応答が前記同定対象の応答に一致するように前記同定モデルのパラメータを適応同定する適応同定ステップと、
前記制御対象が停止状態の場合の当該停止状態を維持するための制御量である姿勢差補正量を記憶する記憶ステップと、を有し、
前記適応同定ステップにおける同定用入力は、前記第１算出ステップで算出された制御量と前記第２算出ステップで算出された制御量とを加算した制御量から前記記憶手段の記憶している姿勢差補正量を演算した制御量に応じた制御量であり、同定対象の応答は前記制御対象の移動量である
ことを特徴とする位置制御方法。
A first calculation step of calculating a control amount for causing the control object to follow the target position according to the position of the control object detected by the position detection unit;
A second calculation step of calculating a control amount for controlling the speed of the control target to a target speed;
An adaptive identification step for adaptively identifying parameters of the identification model based on an input for identification, a response of the identification model to the input and a response of the identification target, so that the response of the identification model matches the response of the identification target;
Storing an attitude difference correction amount that is a control amount for maintaining the stop state when the control target is in a stop state; and
The identification input in the adaptive identification step is an attitude difference stored in the storage means from a control amount obtained by adding the control amount calculated in the first calculation step and the control amount calculated in the second calculation step. A position control method characterized in that the control amount is a control amount corresponding to a control amount obtained by calculating a correction amount, and the response to be identified is a movement amount of the control object.
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