JP2016036937A - Liquid discharge device, and head unit - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a liquid discharge device which can accurately detect a change of electromotive force of a piezoelectric element in accordance with residual vibration.SOLUTION: A liquid discharge device includes a piezoelectric element, a pressure chamber, a nozzle which discharges a liquid charged in an inside of the pressure chamber, a discharge state determination part which determines a discharge state of the liquid from the nozzle based on a residual vibration signal indicating a change of electromotive force of the piezoelectric element in response to residual vibration generated in the pressure chamber, a drive signal generation part which generates a drive signal, and an integrated circuit which transmits the drive signal to the piezoelectric element. An upper wiring layer of the integrated circuit includes first internal wiring, to which the drive signal is supplied, and second internal wiring, to which the electromotive force of the piezoelectric element is supplied. A lower wiring layer includes a residual vibration detection part which generates the residual vibration signal, a first switch which switches on and off of the piezoelectric element and the first internal wiring, and a second switch which switches on and off of the piezoelectric element and the second internal wiring. A shield part is arranged on a third wiring layer between the first wiring layer and the second wiring layer.SELECTED DRAWING: Figure 19

Description

  The present invention relates to a liquid ejection device and a head unit.

An ink jet type printer performs printing by discharging ink in a cavity from a nozzle. The ink thickens when dried. If the ink in the cavity thickens, it may cause ejection failure. Further, if bubbles in the ink in the cavity or paper dust adheres to the nozzle that ejects ink, it may cause ejection failure. Therefore, it is preferable to inspect the ejection state of ink from the nozzles.
Japanese Patent Application Laid-Open No. 2004-228561 discloses a method of determining the ink ejection state from a nozzle by applying vibration to ink in a cavity using a piezoelectric element and detecting the behavior of the ink with respect to the residual vibration.

Japanese Patent Laying-Open No. 2004-276544 (FIG. 31)

  By the way, the behavior of the ink is detected by the electromotive force of the piezoelectric element. Therefore, it is necessary to apply a driving signal for inspection to the piezoelectric element in the step of applying vibration to the ink, and to extract the electromotive force from the piezoelectric element in the step of inspecting the residual vibration of the ink. However, since the electromotive force of the piezoelectric element due to residual vibration has a small amplitude, there is a problem that the ink ejection state cannot be accurately determined when noise is superimposed on the electromotive force of the piezoelectric element.

  The present invention has been made in view of the above-described circumstances, and an object thereof is to accurately detect a change in electromotive force of a piezoelectric element in accordance with residual vibration.

  In order to solve the above problems, a liquid ejection apparatus according to the present invention includes a piezoelectric element, a pressure chamber in which liquid is filled and a pressure inside the pressure element is increased or decreased by displacement of the piezoelectric element, and a pressure chamber. A nozzle that discharges the liquid filled in the pressure chamber in response to an increase or decrease in pressure in the pressure chamber, and a residual that indicates a change in electromotive force of the piezoelectric element in response to residual vibration generated in the pressure chamber An ejection state determination unit that determines the ejection state of the liquid from the nozzle based on a vibration signal, a drive signal generation unit that generates a drive signal for driving the piezoelectric element, and the drive signal transmitted to the piezoelectric element And an integrated circuit for detecting a change in electromotive force of the piezoelectric element, a first external wiring for electrically connecting the integrated circuit and the piezoelectric element, the integrated circuit, and the ejection state determination unit. Connect electrically A residual vibration detecting unit that generates a residual vibration signal by amplifying a signal indicating a change in electromotive force of the piezoelectric element, the integrated circuit being provided in the first wiring layer. A first internal wiring provided in the second wiring layer and supplied with the drive signal; a second internal wiring provided in the second wiring layer and supplied with an electromotive force of the piezoelectric element; A first switch that is provided in one wiring layer and switches between conduction and non-conduction between the first external wiring and the first internal wiring; and provided in the first wiring layer, the first external wiring and the first A second switch that switches between conduction and non-conduction between two internal wirings, and a shield part that is provided in a third wiring layer between the first wiring layer and the second wiring layer, and is made of a conductive material. And the path length of the first external wiring is the length of the second external wiring. Shorter than a length, and wherein the.

According to the present invention, since the shield portion is provided in the third wiring layer between the first wiring layer and the second wiring layer, various circuits provided in the first wiring layer as compared with the case where the shield portion is not provided. It is possible to suppress the possibility that noise generated by the noise will propagate to the second internal wiring provided in the second wiring layer. For this reason, noise superimposed on the electromotive force of the piezoelectric element supplied to the second internal wiring can be reduced, and when determining the discharge state of the liquid from the nozzle based on the change in the electromotive force of the piezoelectric element, Accurate determination is possible.
Further, according to the present invention, it is possible to suppress the possibility that fluctuations in the potential of the drive signal and changes in the electromotive force of the piezoelectric element are propagated as noise to various circuits provided in the first wiring layer. The vibration detection unit can perform an accurate operation without the influence of noise, and can accurately determine the discharge state of the liquid from the nozzle.
Further, in order to make the path length of the first external wiring shorter than the path length of the second external wiring, the first external wiring has a path length longer than that of the second external wiring. Noise superimposed on the electromotive force of the piezoelectric element supplied to the external wiring can be reduced, and the liquid discharge state from the nozzle can be accurately determined.

  In the liquid ejecting apparatus described above, the integrated circuit is formed on a substrate, and when viewed from a direction perpendicular to the substrate, the first region including the first partial region and the second region including the second partial region The residual vibration detection unit is provided in the first region, the first switch and the second switch are provided in the second region, and the second internal wiring is connected to the first part. It is preferable that the shield part is provided in a region including at least the first partial region in the first region, provided in the region and the second partial region.

  According to this aspect, the possibility that the noise generated by the residual vibration detection unit propagates to the second internal wiring can be suppressed low, and the noise superimposed on the electromotive force of the piezoelectric element supplied to the second internal wiring is reduced. be able to. In addition, since the possibility that a change in the electromotive force of the piezoelectric element supplied to the second internal wiring is propagated as noise to the residual vibration detection unit can be suppressed low, the residual vibration detection unit can accurately eliminate the influence of noise. Operation is possible.

  In the liquid ejection apparatus described above, it is preferable that the shield portion is provided in a region including at least the second partial region in the second region.

  According to this aspect, it is possible to suppress the possibility that noise generated by the first switch and the second switch propagates to the second internal wiring, and noise superimposed on the electromotive force of the piezoelectric element supplied to the second internal wiring. Can be reduced.

  In the liquid ejection device described above, it is preferable that the first internal wiring is provided in the first partial region and the second partial region.

  According to this aspect, it is possible to suppress the possibility that the fluctuation of the potential of the drive signal is propagated as noise to various circuits provided in the first wiring layer. The operation becomes possible, and the discharge state of the liquid from the nozzle can be accurately determined.

  In the liquid ejecting apparatus described above, it is preferable that the integrated circuit is formed on a substrate, and the second wiring layer is a layer on the side opposite to the substrate as viewed from the third wiring layer.

  According to this aspect, even when the drive signal has a large amplitude, it is possible to prevent the substrate potential from fluctuating in conjunction with the fluctuation of the drive vibration potential, thereby preventing the occurrence of parasitic transistors on the substrate. Thus, malfunction of a circuit provided in the first wiring layer can be prevented.

  The head unit according to the present invention is a head unit provided in a liquid ejection device, and includes a piezoelectric element, a pressure chamber in which liquid is filled and a pressure inside the pressure element is increased or decreased by displacement of the piezoelectric element, A nozzle communicating with the pressure chamber and discharging a liquid filled in the pressure chamber in response to an increase or decrease in pressure inside the pressure chamber, and a drive signal for driving the piezoelectric element are transmitted to the piezoelectric element. An integrated circuit that detects a change in electromotive force of the piezoelectric element in response to residual vibration generated in the pressure chamber after the piezoelectric element is driven, and a first that electrically connects the integrated circuit and the piezoelectric element. An external wiring; and the integrated circuit is provided in a first wiring layer, and generates a residual vibration signal obtained by amplifying a signal indicating a change in electromotive force of the piezoelectric element, and a second wiring Provided in the layer The first internal wiring to which the drive signal is supplied, the second internal wiring that is provided in the second wiring layer and supplied with the electromotive force of the piezoelectric element, and the first wiring layer that is provided in the first wiring layer, A first switch that switches between conduction and non-conduction between an external wiring and the first internal wiring, and a conduction and non-conduction between the first external wiring and the second internal wiring provided in the first wiring layer. A second switch for switching conduction; and a shield portion provided in a third wiring layer between the first wiring layer and the second wiring layer and made of a conductive material.

According to this invention, since the shield portion is provided in the third wiring layer between the first wiring layer and the second wiring layer, noise generated by various circuits provided in the first wiring layer is provided in the second wiring layer. The possibility of propagation to the second internal wiring can be kept low. For this reason, noise superimposed on the electromotive force of the piezoelectric element can be reduced, and when determining the liquid discharge state from the nozzle based on the change in the electromotive force of the piezoelectric element, the liquid discharge state from the nozzle can be changed. It becomes possible to determine accurately.
In addition, according to the present invention, since the possibility that the fluctuation of the potential of the drive signal and the change of the electromotive force of the piezoelectric element are propagated as noise to various circuits provided in the first wiring layer can be suppressed, the residual vibration An accurate operation that eliminates the influence of noise can be performed in the detection unit. For this reason, when determining the discharge state of the liquid from the nozzle based on the change in the electromotive force of the piezoelectric element, an accurate determination is possible.

1 is a perspective view illustrating an outline of an inkjet printer 1 according to a first embodiment of the present invention. 1 is a block diagram illustrating a configuration of an inkjet printer 1. FIG. FIG. 6 is an explanatory diagram for explaining a configuration of a head unit 35. 2 is a schematic cross-sectional view of a recording head 20. FIG. It is explanatory drawing for demonstrating the change of the cross-sectional shape of the discharge part D at the time of supply of the drive signal COM. 3 is a circuit diagram showing a simple vibration model representing residual vibration in a discharge section D. FIG. It is a graph which shows the relationship between the experimental value of residual vibration in case the discharge state in the discharge part D is normal, and a calculated value. It is explanatory drawing which shows the state of the discharge part D when a bubble mixes in the discharge part D inside. It is a graph which shows the experimental value and calculated value of a residual vibration when the bubble to the inside of the discharge part D mixes. It is explanatory drawing which shows the state of the discharge part D when the ink of nozzle NZ vicinity adheres. It is a graph which shows the experimental value and calculated value of a residual vibration when the ink of nozzle NZ vicinity adheres. It is explanatory drawing which shows the state of the discharge part D when paper dust adheres to nozzle NZ vicinity. It is a graph which shows the experimental value and calculated value of a residual vibration when paper dust adheres to nozzle NZ vicinity. 1 is a block diagram showing a main part of an inkjet printer 1. 2 is a circuit diagram showing an IC chip 301 and peripheral circuits of the IC chip 301. FIG. It is a circuit diagram which shows the structure of supply part 352A. It is a circuit diagram which shows the structure of residual vibration detection part 356A. 2 is a plan view of an IC chip 301. FIG. 2 is a partial cross-sectional view of an IC chip 301. FIG. It is a timing chart which shows operation | movement of 352 A of supply parts. It is explanatory drawing for demonstrating operation | movement of 352A of supply parts. It is explanatory drawing for demonstrating operation | movement of 352A of supply parts. It is explanatory drawing for demonstrating operation | movement of 352A of supply parts. 3 is a timing chart showing the operation of a measurement unit 12. It is explanatory drawing for demonstrating the determination result signal Rs. It is a circuit diagram which shows the structure of the supply part 352B which concerns on 2nd Embodiment. It is a circuit diagram which shows the structure of the residual vibration detection part 356B which concerns on 2nd Embodiment. It is a top view of IC chip 301 concerning a 2nd embodiment. It is a fragmentary sectional view of IC chip 301 concerning a 2nd embodiment. It is a circuit diagram showing the composition of supply part 352C concerning the modification of a 2nd embodiment. It is a circuit diagram which shows the structure of supply part 352D which concerns on 3rd Embodiment. It is a timing chart which shows operation of supply part 352D. It is a circuit diagram which shows the structure of the supply part 352E which concerns on 4th Embodiment. It is a circuit diagram which shows the structure of the supply part 352F which concerns on the modification of 4th Embodiment. 6 is a plan view of an IC chip 301 according to Modification 1. FIG.

  Hereinafter, embodiments for carrying out the present invention will be described with reference to the drawings. However, in each figure, the size and scale of each part are appropriately changed from the actual ones. Further, since the embodiments described below are preferable specific examples of the present invention, various technically preferable limitations are attached thereto. However, the scope of the present invention is particularly limited in the following description. Unless otherwise stated, the present invention is not limited to these forms.

<A. First Embodiment>
In the present embodiment, the liquid ejecting apparatus will be described by exemplifying an ink jet printer that ejects ink (an example of “liquid”) to form an image on a recording paper P (an example of “medium”).

<1. Overall configuration of inkjet printer>
FIG. 1 is a schematic diagram illustrating a configuration of an ink jet printer 1 which is a kind of liquid ejection apparatus according to the first embodiment of the present invention. Hereinafter, the configuration of the inkjet printer 1 will be described with reference to FIG.
In the present embodiment, it is assumed that the inkjet printer 1 can eject four colors of ink of yellow, cyan, magenta, and black (CMYK). In the following description, in FIG. 1, the + Z side (upper side) may be referred to as “upper part” and the −Z side (lower side) may be referred to as “lower part”.

As shown in FIG. 1, the inkjet printer 1 is provided with a tray 91 for installing the recording paper P, a paper discharge outlet 92 for discharging the recording paper P in the + X direction in the drawing, and an operation panel 7. .
The operation panel 7 includes, for example, a liquid crystal display, an organic EL display, an LED lamp, and the like, and includes a display unit (not shown) that displays an error message and the like, and an operation unit (not shown) that includes various switches and the like. I have.
In addition, the inkjet printer 1 includes a printing unit 4 including a moving body 3 that reciprocates in the + Y direction or the −Y direction (hereinafter referred to as “Y-axis direction”), and the recording paper P with respect to the printing unit 4. A sheet feeding unit 5 that supplies and discharges, and a control unit 6 that controls the printing unit 4 and the sheet feeding unit 5 are provided.

  Under the control of the control unit 6, the paper feeding unit 5 intermittently feeds the recording paper P one by one in the + X direction. When the recording paper P passes through the lower part (−Z side) of the moving body 3, the moving body 3 reciprocates in the Y-axis direction intersecting the + X direction that is the feeding direction of the recording paper P and moves relative to the recording paper P. Then, printing on the recording paper P is performed by discharging the ink. That is, the Y-axis direction that is the reciprocating direction of the moving body 3 is the main scanning direction in printing, and the + X direction that is the direction in which the recording paper P is conveyed is the sub-scanning direction in printing.

  The moving body 3 includes four ink cartridges 31 corresponding to four colors of ink one to one, four head units 35 corresponding to four colors of ink one to one, four ink cartridges 31 and And a carriage 32 on which four head units 35 are mounted. Each ink cartridge 31 is filled with ink of a color corresponding to the ink cartridge 31. Each head unit 35 is supplied with ink from an ink cartridge 31 filled with ink of a color corresponding to the head unit 35. The ink cartridge 31 may be provided outside the carriage 32 instead of being mounted on the carriage 32.

In addition to the moving body 3, the printing unit 4 includes a carriage motor 41 serving as a drive source for reciprocating the moving body 3 in the main scanning direction, and a reciprocating mechanism for reciprocating the moving body 3 by receiving the rotation of the carriage motor 41. 42. The reciprocating mechanism 42 includes a carriage guide shaft 422 supported at both ends by a frame (not shown), and a timing belt 421 extending substantially parallel to the carriage guide shaft 422.
The carriage 32 is supported by the carriage guide shaft 422 so as to be reciprocally movable, and is fixed to a part of the timing belt 421. Then, when the carriage motor 41 causes the timing belt 421 to travel forward and backward via the pulley, the carriage 32 is guided by the carriage guide shaft 422 and reciprocates in the Y-axis direction. During this reciprocation, a printing process for forming an image on the recording paper P is performed by ejecting ink from each of the plurality of ejection units D provided in the recording head 20 included in the head unit 35. The recording head 20 and the discharge unit D will be described later.

The sheet feeding unit 5 includes a sheet feeding motor 51 that is a drive source of the sheet feeding unit 5 and a sheet feeding roller 52 that rotates by the operation of the sheet feeding motor 51.
The paper feed roller 52 includes a driven roller 52 a and a drive roller 52 b that are opposed to each other across the conveyance path of the recording paper P, and the drive roller 52 b is connected to the paper feed motor 51. For this reason, the paper feed roller 52 can feed the recording sheets P arranged on the tray 91 one by one toward the printing unit 4 and can discharge the recording sheets P from the printing unit 4 one by one. . Note that the inkjet printer 1 may have a configuration in which a paper feed cassette that accommodates the recording paper P can be detachably mounted instead of the tray 91.

  The control unit 6 controls each unit of the ink jet printer 1 based on the print data Img input from the host computer 8 such as a personal computer or a digital camera, for example, and causes the ink jet printer 1 to execute a printing process.

  FIG. 2 is a block diagram schematically showing the ink jet printer 1. As described above, the inkjet printer 1 includes the control unit 6, the operation panel 7, the head unit 35, the carriage motor 41, and the paper feed motor 51, and print data Img input from the host computer 8. Interface unit 9 for receiving various data, a carriage motor driver 43 for driving the carriage motor 41, a paper feed motor driver 53 for driving the paper feed motor 51, and a drive signal for driving the head unit 35. The drive signal generation unit 33 that generates COM, the discharge state determination unit 10 that executes the discharge state determination process for determining the ink discharge state in the discharge unit D included in the head unit 35, and the ink discharge state in the discharge unit D In the case of an abnormality, ink ejection from the ejection unit D It comprises a recovery mechanism 24 to perform the recovery process for restoring the state to the normal state, the.

The recovery mechanism 24 is configured so that when the ink cannot be normally ejected from the ejection unit D included in the head unit 35, that is, when the ejection state of the ink in the ejection unit D becomes abnormal, the ejection unit D normally A recovery process for recovering the ink to a state where it can be discharged is executed.
Here, the case where the ink ejection state is abnormal means that the ink cannot be ejected from the ejection unit D, or the ejection unit D cannot eject the amount of ink necessary to form the image indicated by the print data Img. And the case where ink is ejected in a direction different from the direction in which the ejection part D should originally eject.
The recovery process is a wiping process in which foreign matters such as paper dust adhered to the discharge part D are wiped with a wiper, a flushing process in which ink is preliminarily discharged from the discharge part D, and thickened ink or bubbles in the discharge part D Is a general term for processes for returning the ink ejection state of the ejection part D to normal, such as a pumping process for sucking the etc. by a tube pump (not shown).

As shown in FIG. 2, the control unit 6 controls the operation of each unit of the inkjet printer 1, thereby controlling the execution of various processes such as a printing process, an ejection state determination process, and a recovery process. Unit) 61 and a storage unit 62 for storing the control program of the inkjet printer 1 and other various information.
The storage unit 62 is an EEPROM (Electrically Erasable Programmable Read-Only Memory) that is a kind of nonvolatile semiconductor memory that stores print data Img supplied from the host computer 8 through the interface unit 9 in a data storage area (not shown); RAM (Random Access Memory) that temporarily stores various data used when executing ejection state determination processing or the like, or temporarily expands a control program for executing various processing such as printing processing, and the control program Etc., and a PROM which is a kind of nonvolatile semiconductor memory for storing the data. Each component of the control unit 6 is electrically connected via a bus (not shown).
When the print data Img is supplied from the host computer 8, the CPU 61 stores the print data Img in the storage unit 62. Then, the CPU 61 generates various control signals based on the print data Img, and the generated control signals are transferred to the inkjet printer 1 such as the carriage motor driver 43, the paper feed motor driver 53, the drive signal generation unit 33, the head unit 35, and the like. Are supplied to each part, thereby controlling each part of the ink jet printer 1, thereby controlling the execution of the printing process.

As described above, the moving body 3 includes the four head units 35 corresponding to the four colors of ink. However, in FIG. 2, only one head unit 35 is illustrated for the convenience of illustration.
Further, as described above, each head unit 35 includes a plurality of ejection units D. As will be described in detail later, each ejection unit D includes a piezoelectric element 200 that is displaced according to a drive signal COM, a cavity 220 that is filled with ink and whose internal pressure is increased or decreased by the displacement of the piezoelectric element 200, and a cavity And a nozzle NZ for discharging ink filled in 220.

<2. Configuration of head unit>
Next, the head unit 35 and the discharge part D provided in the head unit 35 will be described with reference to FIGS. 3 and 4.

FIG. 3 is a perspective view schematically showing the head unit 35. As shown in this figure, the head unit 35 includes a recording head 20 provided with a plurality of ejection portions D, and an IC (Integrated Circuit) chip mounted on the flexible cable 300 using COF (Chip On Film) technology. 301.
As shown in FIG. 3, the recording head 20 includes a nozzle plate 240 provided with a plurality of nozzles NZ. That is, a plurality of nozzles NZ are formed on the nozzle plate 240 so as to correspond to the plurality of ejection portions D provided in the recording head 20 on a one-to-one basis.

  An integrated circuit 30 is mounted on the IC chip 301. The integrated circuit 30 supplies the drive signal COM generated by the drive signal generation unit 33 to each of the plurality of discharge units D included in the recording head 20, so that each discharge unit D (strictly, the discharge unit D). Drive the piezoelectric element 200).

  The flexible cable 300 on which the IC chip 301 is mounted transmits various signals including the drive signal COM supplied from the main body side of the inkjet printer 1 (for example, the control unit 6, the drive signal generation unit 33, etc.) to the head unit 35. A flexible base film made of polyimide or the like, and a wiring pattern formed on the base film. One end portion of the flexible cable 300 is connected to a terminal portion (not shown) of the recording head 20, and the other end portion of the flexible cable 300 is a terminal of a substrate (not shown) that relays a signal from the main body side of the inkjet printer 1. Connected to the department.

  FIG. 4 is an example of a schematic partial cross-sectional view of the recording head 20. In this figure, among the recording heads 20, one ejection unit D among the plurality of ejection units D included in the recording head 20 and the one ejection unit D communicate with each other via the ink supply port 260. And a reservoir 250 for supplying ink from the ink cartridge 31 to the reservoir 250.

As shown in FIG. 4, the ejection part D includes a piezoelectric element 200, a cavity 220 filled with ink inside, a nozzle NZ communicating with the cavity 220, and a diaphragm 210. The ejection part D ejects the ink in the cavity 220 from the nozzles NZ by the displacement of the piezoelectric element 200 driven by the drive signal COM.
The cavity 220 of the discharge part D is a space defined by a cavity plate 230 formed in a predetermined shape having a recess, a nozzle plate 240 in which the nozzles NZ are formed, and the vibration plate 210. The cavity 220 communicates with the reservoir 250 via the ink supply port 260. The reservoir 250 communicates with one ink cartridge 31 through the ink intake port 270.

  In the present embodiment, for example, a unimorph (monomorph) type as shown in FIG. The piezoelectric element 200 includes an upper electrode 122, a lower electrode 124, and a piezoelectric body 201 provided between the upper electrode 122 and the lower electrode 124. When the lower electrode 124 is set to a predetermined reference potential VBS and the drive signal COM is supplied to the upper electrode 122, when a voltage is applied between the upper electrode 122 and the lower electrode 124, the applied voltage is set to the applied voltage. Accordingly, the piezoelectric element 200 bends in the vertical direction in the figure, and as a result, the piezoelectric element 200 vibrates.

  A diaphragm 210 is installed in the opening on the upper surface of the cavity plate 230, and the lower electrode 124 is joined to the diaphragm 210. For this reason, when the piezoelectric element 200 vibrates by the drive signal COM, the diaphragm 210 also vibrates. The volume of the cavity 220 (pressure in the cavity 220) is changed by the vibration of the diaphragm 210, and the ink filled in the cavity 220 is ejected from the nozzle NZ. Ink is supplied from the reservoir 250 when the ink in the cavity 220 decreases due to ink ejection. Further, ink is supplied to the reservoir 250 from the ink cartridge 31 via the ink intake port 270.

<3. Discharge unit operation and residual vibration>
Next, the ink ejection operation from the ejection unit D and the residual vibration generated in the ejection unit D will be described with reference to FIGS.

  FIG. 5 is an explanatory diagram for explaining an ink ejection operation from the ejection unit D. FIG. In the state shown in FIG. 5A, when the drive signal COM is supplied from the integrated circuit 30 to the piezoelectric element 200 included in the ejection unit D, the piezoelectric element 200 corresponds to the electric field applied between the electrodes. Distortion occurs, and the diaphragm 210 of the discharge part D bends upward in the drawing. Thereby, compared with the initial state shown in FIG. 5A, as shown in FIG. 5B, the volume of the cavity 220 of the discharge section D is enlarged. In the state shown in FIG. 5B, when the potential indicated by the drive signal COM is changed, the diaphragm 210 is restored by its elastic restoring force, and goes downward in the figure beyond the position of the diaphragm 210 in the initial state. As a result, the volume of the cavity 220 rapidly contracts as shown in FIG. At this time, due to the compression pressure generated in the cavity 220, a part of the ink filling the cavity 220 is ejected as an ink droplet from the nozzle NZ communicating with the cavity 220.

  The vibration plate 210 of each cavity 220 undergoes damped vibration, that is, residual vibration until the next ink discharge operation is started after the end of the series of ink discharge operations. The residual vibration of the vibration plate 210 is determined by the acoustic resistance r due to the shape of the nozzle NZ and the ink supply port 260 or the viscosity of the ink, the inertance m due to the ink weight in the flow path, and the compliance Cm of the vibration plate 210. It is assumed that it has a natural vibration frequency.

A calculation model for residual vibration of the diaphragm 210 based on the above assumption will be described.
FIG. 6 is a circuit diagram illustrating a calculation model of simple vibration assuming residual vibration of the diaphragm 210. As shown in this figure, the calculation model of the residual vibration of the diaphragm 210 can be expressed by the sound pressure p, the inertance m, the compliance Cm, and the acoustic resistance r described above. When the step response when the sound pressure p is applied to the circuit of FIG. 6 is calculated for the volume velocity u, the following equation is obtained.
u = {p / (ω · m)} e ^−σt · sin (ωt)
ω = {1 / (m · Cm) −α ² } ^1/2
σ = r / (2m)

The calculation result (calculated value) obtained from this equation is compared with the experimental result (experimental value) in the residual vibration experiment of the discharge section D performed separately. Note that the residual vibration experiment is an experiment for detecting residual vibration generated in the vibration plate 210 of the ejection unit D after ejecting ink from the ejection unit D in which the ink ejection state is normal.
FIG. 7 is a graph showing the relationship between experimental values and calculated values of residual vibration. As can be seen from the graph shown in FIG. 7, when the ink ejection state in the ejection part D is normal, the two waveforms of the experimental value and the calculated value are almost the same.

  In spite of the ejection part D performing the ink ejection operation, the ink ejection state in the ejection part D is abnormal and the ink droplets are not ejected normally from the nozzles NZ of the ejection part D, that is, the ejection abnormality is present. May occur. The cause of the occurrence of this ejection abnormality is (1) mixing of bubbles into the cavity 220, (2) thickening or fixing of ink in the cavity 220 due to drying of the ink in the cavity 220, etc. (3) For example, paper dust adheres to the vicinity of the outlet of the nozzle NZ.

  As described above, the ejection abnormality typically means that ink cannot be ejected from the nozzles NZ, that is, a non-ejection phenomenon of ink appears. In this case, pixel missing in the image printed on the recording paper P is lost. Is to occur. Further, as described above, in the case of ejection abnormality, even if ink is ejected from the nozzle NZ, the amount of ink is too small or the flight direction (ballistic) of the ejected ink droplets is deviated. It will appear as a missing dot in the pixel. For this reason, in the following description, the ejection abnormality is simply referred to as “dot missing”, and the nozzle NZ provided in the ejection unit D that has caused ejection abnormality is sometimes referred to as “missing nozzle”.

  In the following, based on the comparison results shown in FIG. 7, at least one of the acoustic resistance r and the inertance m is set so that the calculated value of the residual vibration and the experimental value are substantially matched for each cause of the discharge abnormality occurring in the discharge unit D. Adjust the value of.

First, (1) the mixing of bubbles into the cavity 220, which is one of the causes of abnormal discharge, will be examined. FIG. 8 is a conceptual diagram for explaining a case where bubbles are mixed into the cavity 220. As shown in FIG. 8, when bubbles are mixed in the cavity 220, it is considered that the total weight of the ink filling the cavity 220 is reduced and the inertance m is reduced. Further, as illustrated in FIG. 8, when bubbles are attached in the vicinity of the nozzle NZ, it is considered that the diameter of the nozzle NZ is increased by the size of the diameter, and the acoustic resistance r is reduced. It is thought to do.
Therefore, the acoustic resistance r and the inertance m are set to be small compared with the case where the ink ejection state as shown in FIG. 7 is normal, and matched with the experimental value of the residual vibration when the bubbles are mixed. A result (graph) like 9 was obtained. As shown in FIG. 7 and FIG. 9, when bubbles are mixed in the cavity 220 and a discharge abnormality occurs, the frequency of the residual vibration becomes higher compared to the case where the discharge state is normal. It should be noted that the attenuation rate of the amplitude of the residual vibration is reduced due to the decrease in the acoustic resistance r, and it can be confirmed that the residual vibration is slowly decreasing the amplitude.

Next, (2) thickening or fixing of ink in the cavity 220, which is one of the causes of ejection abnormalities, will be examined. FIG. 10 is a conceptual diagram for explaining a case where ink near the nozzle NZ of the cavity 220 is fixed by drying. As shown in FIG. 10, when the ink near the nozzle NZ is dried and fixed, the ink in the cavity 220 is confined in the cavity 220. In such a case, it is considered that the acoustic resistance r increases.
Therefore, compared with the case where the ink ejection state as shown in FIG. 7 is normal, the acoustic resistance r is set to be large, and the experimental value of the residual vibration when the ink near the nozzle NZ is fixed or thickened. By matching, a result (graph) as shown in FIG. 11 was obtained. Note that the experimental values shown in FIG. 11 are obtained by measuring the residual vibration of the vibration plate 210 in a state in which the ejection unit D is left without a cap (not shown) attached for several days and the ink near the nozzle NZ is fixed. As shown in FIGS. 7 and 11, when the ink in the vicinity of the nozzle NZ in the cavity 220 is fixed, the residual vibration frequency is extremely low and the residual vibration is lower than when the ejection state is normal. A characteristic waveform in which is overdamped is obtained. This is because when the vibration plate 210 is drawn in the + Z direction (upward) to discharge ink, the vibration plate 210 moves in the −Z direction (downward) after the ink flows into the cavity 220 from the reservoir. In addition, since there is no escape path for ink in the cavity 220, the vibration plate 210 cannot vibrate rapidly (because it is overdamped).

Next, (3) paper dust adhesion near the outlet of the nozzle NZ, which is one of the causes of ejection abnormalities, will be examined. FIG. 12 is a conceptual diagram for explaining a case where paper dust adheres near the outlet of the nozzle NZ. As shown in FIG. 12, when paper dust adheres to the vicinity of the outlet of the nozzle NZ, the ink oozes out from the cavity 220 through the paper dust, and the ink cannot be ejected from the nozzle NZ. When paper dust adheres to the vicinity of the outlet of the nozzle NZ and the ink oozes out from the nozzle NZ, the amount of ink oozed out of the cavity 220 when viewed from the diaphragm 210 is greater than when the ejection state is normal. Is also considered to increase the inertance m. In addition, it is considered that the acoustic resistance r is increased by the fiber of the paper powder adhering to the vicinity of the outlet of the nozzle NZ.
Therefore, compared with the case where the ink ejection state as shown in FIG. 7 is normal, the inertance m and the acoustic resistance r are set larger, and the residual vibration when the paper dust adheres to the vicinity of the outlet of the nozzle NZ. By matching the values, results (graphs) as shown in FIG. 13 were obtained. As can be seen from the graphs of FIGS. 7 and 13, when paper dust adheres near the outlet of the nozzle NZ, the frequency of residual vibration is lower than when the ejection state is normal.
From the graphs shown in FIGS. 11 and 13, (3) in the case of paper dust adhering to the vicinity of the outlet of the nozzle NZ, (2) the residual vibration is compared with the case of thickening the ink in the cavity 220. It can be seen that the frequency is high.

  Here, in both (2) the case of ink thickening and (3) the case of paper dust adhering to the vicinity of the outlet of the nozzle NZ, the residual vibration is higher than that in the case where the ink ejection state is normal. The frequency is low. The causes of these two ejection abnormalities can be distinguished by comparing the residual vibration waveform, specifically, the frequency or period of the residual vibration with a predetermined threshold.

  As is clear from the above description, the discharge state of each discharge unit D can be determined based on the waveform of residual vibration generated when each discharge unit D is driven, particularly the frequency or cycle of the residual vibration. More specifically, based on the frequency or period of the residual vibration, whether or not the discharge state in each discharge unit D is normal, and if the discharge state in each discharge unit D is abnormal, the discharge abnormality It can be determined which of the above (1) to (3) corresponds to the cause of the above. The ink jet printer 1 according to the present embodiment executes a discharge state determination process for analyzing a residual vibration and determining a discharge state.

<4. Configuration of integrated circuit>
Hereinafter, the configuration of the integrated circuit 30 and the peripheral circuits of the integrated circuit 30 will be described with reference to FIGS. 14 to 19.

FIG. 14 is a block diagram illustrating a main part of the inkjet printer 1 related to determination of the ink ejection state in the ejection unit D.
As shown in this figure, the head unit 35 includes a recording head 20 and an integrated circuit 30 provided on the IC chip 301. As described above, the recording head 20 is provided with a plurality of ejection portions D. That is, the recording head 20 includes a plurality of piezoelectric elements 200. In the following description, the number of piezoelectric elements 200 (the number of ejection portions D) provided in the recording head 20 included in each head unit 35 is assumed to be n (n is a natural number of 2 or more).

As shown in FIG. 14, the integrated circuit 30 includes a supply unit 352A, a control signal generation unit 354, and a residual vibration detection unit 356A.
The control signal generation unit 354 generates the control signal S (S1 to Sn, Sc) and the control signal A (A1 to An) based on the print data SI and the clock signal supplied from the control unit 6.
The supply unit 352A supplies the drive signal COM supplied from the drive signal generation unit 33 to each piezoelectric element 200 based on the control signal A generated by the control signal generation unit 354.

When the drive signal COM is applied to the piezoelectric element 200, the inkjet printer 1 according to the present embodiment generates residual vibration that is a pressure change in the cavity 220 generated in the ejection unit D including the piezoelectric element 200. Is detected as a change in the electromotive force of the ink, and the ink ejection state in the ejection part D is determined based on the detection result.
Specifically, first, the supply unit 352A outputs, based on the control signal S generated by the control signal generation unit 354, the change in electromotive force of the piezoelectric element 200 included in the ejection unit D that is a target for detecting residual vibration. The signal OUT1 is generated, and the generated output signal OUT1 is supplied to the residual vibration detection unit 356A. Then, the residual vibration detection unit 356A generates a residual vibration signal Vd indicating the residual vibration generated in the discharge unit D based on the output signal OUT1 supplied from the supply unit 352A. Further, the ejection state determination unit 10 determines the ink ejection state in the ejection unit D based on the residual vibration signal Vd generated by the residual vibration detection unit 356A, and outputs a determination result signal Rs indicating the determination result.

  As illustrated in FIG. 14, the discharge state determination unit 10 includes a measurement unit 12 and a determination unit 14. Based on the residual vibration signal Vd generated by the residual vibration detection unit 356A, the measurement unit 12 generates periodic data NTc indicating the period of the residual vibration and an validity flag Flag indicating that the periodic data NTc is valid. To do. The determination unit 14 determines the ink discharge state in each discharge unit D based on the period data NTc and the validity flag Flag, and outputs a determination result signal Rs indicating the determination result. Thereby, the ink jet printer 1 can determine the ink ejection state in the ejection part D.

  Since the drive signal COM needs to drive the piezoelectric element 200, the drive signal COM operates with a power supply voltage of 42V, for example. On the other hand, the residual vibration detection unit 356A and the ejection state determination unit 10 operate with a power supply voltage of 3.3 V, for example.

Next, wiring for electrically connecting the IC chip 301 and peripheral circuits of the IC chip 301 will be described with reference to FIG.
FIG. 15 is a block diagram showing an IC chip 301 on which the integrated circuit 30 is mounted and peripheral circuits of the IC chip 301. The IC chip 301 includes an input terminal x0, n connection terminals x1, and an output terminal x2.

As shown in FIG. 15, the input terminal x0 is electrically connected to the supply unit 352A by an internal wiring. The external wiring LX0 is connected to the input terminal x0. The external wiring LX0 is a wiring for electrically connecting the integrated circuit 30 and the drive signal generation unit 33, and supplies the drive signal COM output from the drive signal generation unit 33 to the integrated circuit 30.
Each connection terminal x1 is electrically connected to the supply unit 352A by an internal wiring. In addition, an external wiring LX1 (an example of “first external wiring”) is connected to each connection terminal x1. The external wiring LX1 is a wiring for electrically connecting the integrated circuit 30 and the piezoelectric element 200.
The output terminal x2 is electrically connected to the residual vibration detection unit 356A through internal wiring. The output terminal x2 is connected to an external wiring LX2 (an example of “second external wiring”). The external wiring LX2 is a wiring for electrically connecting the integrated circuit 30 and the ejection state determination unit 10, and supplies the residual vibration signal Vd generated by the residual vibration detection unit 356A to the ejection state determination unit 10.

  The external wirings LX0, LX1, and LX2 are all wirings formed on the flexible cable 300. The path length of the external wiring LX1 is shorter than the path length of the external wiring LX0 and shorter than the path length of the external wiring LX2. That is, the IC chip 301 on which the integrated circuit 30 is mounted has a substrate (or a signal from the body side) of the inkjet printer 1 on which the drive signal generation unit 33, the ejection state determination unit 10 and the like are provided in the flexible cable 300. It is provided at a position closer to one end connected to the recording head 20 than the other end connected to the substrate).

FIG. 16 is a circuit diagram showing an electrical configuration of the supply unit 352A and the n piezoelectric elements 200.
As illustrated in FIG. 16, the supply unit 352A includes an internal wiring L1 (an example of “first internal wiring”) to which the drive signal COM is supplied, and an internal wiring L2 to which the electromotive force Vout of the piezoelectric element 200 is supplied (“ An example of “second internal wiring”, and a selection circuit for selecting whether to supply the drive signal COM to the piezoelectric element 200 and whether to supply the electromotive force Vout of the piezoelectric element 200 to the internal wiring L2. A UX, a high-pass filter HPF1 that generates an output signal OUT1 indicating a change in the electromotive force Vout based on the electromotive force Vout, and a resistor R3 are provided.

As illustrated in FIG. 16, the selection circuit UX includes n selection units U (U1 to Un) corresponding to the n piezoelectric elements 200 on a one-to-one basis. The upper electrode 122 of each piezoelectric element 200 is electrically connected to each selection unit U. Further, the lower electrode 124 of each piezoelectric element 200 is electrically connected to a supply line Lv set to the reference potential VBS.
Each selection unit U includes two switches composed of transfer gates. For example, as illustrated in FIG. 16, the selection unit U1 includes a switch SW1 (an example of a “first switch”) and a switch SW2 (an example of a “second switch”). Below, although the selection unit U1 is illustrated and demonstrated as the selection unit U, the selection units U2-Un are comprised similarly to the selection unit U1.
In this embodiment, the transfer gate constituting the switch included in the selection unit U includes a P-channel transistor and an N-channel transistor connected in parallel, but is composed of any one of the channel-type transistors. It may be.

As shown in FIG. 16, the switch SW1 is turned on when the control signal A1 is at a high level, and supplies the drive signal COM to the piezoelectric element 200, while the control signal A1 is turned off when the control signal A1 is at a low level. The signal COM is not supplied. That is, the switch SW1 is arranged to be able to switch whether or not to supply the drive signal COM to the piezoelectric element 200.
The switch SW2 is turned on when the control signal S1 is at a high level and supplies the electromotive force Vout of the piezoelectric element 200 to the high pass filter HPF1, while the control signal S1 is turned off when the control signal S1 is at a low level. Not supplied to the high pass filter HPF1. That is, the switch SW2 is arranged to be able to switch whether or not to supply the electromotive force Vout of the piezoelectric element 200 to the high-pass filter HPF1.
Although details will be described later, in the present embodiment, the period in which the switch SW1 is in the ON state and the period in which the switch SW2 is in the ON state partially overlap, but the present invention is limited to such an embodiment. Instead, the switch SW1 and the switch SW2 may be exclusively turned on.

As shown in FIG. 16, the external wiring LX1, which is electrically connected to the upper electrode 122 of the piezoelectric element 200, the switch SW1, and the switch SW2 are electrically connected at the node N1.
The internal wiring L1 and the internal wiring L2 are electrically connected via a resistor R3. More specifically, one terminal of the internal wiring L1 and the resistor R3 is electrically connected at the node N2, and the other terminal of the internal wiring L2 and the resistor R3 is electrically connected at the node N3. Yes. The resistor R3 functions as a bias resistor that supplies the voltage of the drive signal COM to the node N3. The supply unit 352A includes a resistor R3 that biases the node N3, but the resistor R3 may not be provided.
Further, the switch SW1 and the drive signal generation unit 33 are electrically connected by the internal wiring L1, and the switch SW2 and the high-pass filter HPF1 are electrically connected by the internal wiring L2.

  The high pass filter HPF1 includes a capacitor C1, a resistor R1, and a switch SW3 provided in parallel with the resistor R1, and generates an output signal OUT1 based on the electromotive force Vout. One terminal of the capacitor C1 is electrically connected to the internal wiring L2, and the other terminal is electrically connected to one terminal of the resistor R1. An analog ground AGND having a fixed potential is supplied to the other terminal of the resistor R1. The potential of the analog ground AGND is set to, for example, the center potential between the high power supply potential and the low power supply potential of the residual vibration detection unit 356A.

  The switch SW3 is composed of a transfer gate, like the switch SW1. The switch SW3 is turned on when the control signal Sc is high and turned off when the control signal Sc is low. By turning on the switch SW3, the potential of the input terminal of the residual vibration detection unit 356A can be clamped to the analog ground AGND.

  A change in the electromotive force Vout of the piezoelectric element 200 indicates a change in the pressure inside the cavity 220. For this reason, the frequency band of residual vibration is narrower than the frequency band of the drive signal COM. In addition, noise may be superimposed on the residual vibration. The high-pass filter HPF1 attenuates frequency components that are lower than the frequency band of residual vibration. Thereby, the accuracy of the residual vibration detected by the residual vibration detection unit 356A can be improved.

  By the way, in the present embodiment, the maximum potential of the drive signal COM is 42V, whereas the high power supply potential of the residual vibration detector 356A is 3.3V and the low power supply potential is 0V. This is because a drive signal COM having a large amplitude is required to drive the piezoelectric element 200, while the residual vibration detection unit 356A is an analog signal processing circuit and does not require a large dynamic range. That is, the high power supply potential of the residual vibration detection unit 356A is lower than the maximum potential of the drive signal COM. For this reason, in this embodiment, the DC component of the electromotive force Vout is cut by the capacitor C1 of the high-pass filter HPF1.

Although details will be described later, the switch SW3 of the high-pass filter HPF1 is turned on except during a period in which the residual vibration is detected, and the input terminal of the residual vibration detector 356A is clamped to the analog ground AGND. That is, in the present embodiment, the switch SW3 is turned on during a period in which the potential of the node N3 changes greatly. Even if the direct current component is cut by the capacitor C1, if the potential of the node N3 changes greatly, the potential of the input terminal of the residual vibration detection unit 356A greatly changes beyond the high power supply potential. In such an electronic circuit, when a signal having a large amplitude exceeding the dynamic range is supplied as described above, each part of the circuit element is charged, and it may take a long time to operate normally. Further, when a signal with a large amplitude exceeding the dynamic range is supplied, it is necessary to increase the withstand voltage of components such as a transistor constituting the electronic circuit.
On the other hand, in the present embodiment, the switch SW3 is turned on during a period in which the potential of the node N3 greatly changes, and the potential of the input terminal of the residual vibration detection unit 356A is clamped to the analog ground AGND. For this reason, it is possible to immediately start detection of residual vibration during the residual vibration detection period, and it is possible to further reduce the withstand voltage of the components constituting the residual vibration detection unit 356A.

FIG. 17 shows a detailed configuration example of the residual vibration detection unit 356A. As shown in this figure, the residual vibration detection unit 356A includes a gain adjustment unit 36, a low-pass filter 37, and a buffer 38.
The gain adjusting unit 36 is a negative feedback type amplifier using an operational amplifier, and can adjust the amplitude of the output signal OUT1 by adjusting the midpoint of the variable resistor Vr that divides the output signal.
The low pass filter 37 attenuates the high frequency component of the output signal OUT1. The low-pass filter 37 in this example is a multiple feedback type using an operational amplifier, but any type may be used as long as the high-frequency component is attenuated from the residual vibration frequency band. By limiting the frequency range to be detected by the low-pass filter 37, it is possible to remove noise components.
The buffer 38 converts the impedance and outputs a low-impedance residual vibration signal Vd. The buffer 38 in this example is composed of a voltage follower using an operational amplifier.

  Such residual vibration detection unit 356A can generate a residual vibration signal Vd in which a noise component is removed from the output signal OUT1 and the amplitude of the output signal OUT1 is amplified. Therefore, it is possible to accurately determine the ink ejection state in the ejection part D based on the residual vibration signal Vd.

  In the integrated circuit 30, various components of the integrated circuit 30 such as transistors are formed in a plurality of wiring layers. Hereinafter, the wiring structure of the integrated circuit 30 will be described with reference to FIGS.

FIG. 18 is an example of a plan view of a part of the IC chip 301 on which the integrated circuit 30 is mounted as viewed in a plan view from a direction perpendicular to the substrate on which the integrated circuit 30 is formed. FIG. 19 is an example of a partial cross-sectional view of the IC chip 301 taken along line E-e in FIG.
In FIG. 18, for the sake of simplicity, some components of the integrated circuit 30 such as the internal wiring L1, the internal wiring L2, the selection circuit UX, and the residual vibration detection unit 356A are schematically illustrated.

  As illustrated in FIG. 19, each element constituting the integrated circuit 30 is mounted on a substrate 302. In this embodiment, the case where a P-type semiconductor substrate is used as the substrate 302 is illustrated. As the substrate 302, any substrate other than the P-type semiconductor substrate, for example, a semiconductor substrate such as an N-type semiconductor substrate, a glass substrate, or the like may be employed.

  As illustrated in FIG. 19, the substrate 302 is provided with an N well 303 formed by implanting an N-type impurity into the substrate 302. The N well 303 is provided with a plurality of P type impurity diffusion layers Pp formed by implanting P type impurities into the N well 303. The substrate 302 is provided with, for example, a P well in which a P-type impurity is implanted into the substrate 302 in a region where the N-well 303 is not formed, and the N-type impurity is implanted into the P well. A plurality of formed N-type impurity diffusion layers may be provided.

  In the example shown in FIG. 19, on the N well 303 (or P well), a plurality of wiring layers LY (LY1 to LY5) made of a metal or other conductive material such as aluminum and a plurality of nonconductive materials. Interlayer insulating layers LZ (LZ1 to LZ6) are provided. The wiring layer LY is a general term for one or a plurality of conductive terminals or wirings provided in the same layer.

In the example shown in FIGS. 18 and 19, in the wiring layers LY1 and LY2 of the wiring layers LY1 to LY5, electronic circuits (logic circuits) such as the residual vibration detection unit 356A and the selection circuit UX are formed. In the wiring layer LY3, a shield part SH (SH1, SH2) made of a conductive material is formed, and in the wiring layer LY5, internal wirings L1 and L2 are formed. Here, the shield part SH is electrically connected to a power supply part (not shown) set to a predetermined potential (for example, the potential of the analog ground AGND).
Hereinafter, the wiring layer LY in which the shield part SH is formed is referred to as a shield wiring layer (an example of “third wiring layer”), and the wiring layer LY on the substrate 302 side as viewed from the shield wiring layer is referred to as a lower wiring layer (“first wiring layer”). The wiring layer LY on the side opposite to the substrate 302 when viewed from the shield wiring layer is referred to as an upper wiring layer (an example of “second wiring layer”). That is, in the present embodiment, the lower wiring layer is a wiring layer in which an electronic circuit (logic circuit) is provided, and the upper wiring layer is a wiring layer in which internal wirings L1 and L2 are provided.

In FIG. 19, in order to facilitate understanding, two P-channel transistors are illustratively shown as an example of components constituting the residual vibration detection unit 356A. In this figure, each transistor has an example in which the gate electrode GT is provided in the wiring layer LY1 and the impurity diffusion layer Pp is used as the source or drain.
In this figure, a MOS transistor having an active layer on a semiconductor substrate is illustrated, but the transistor constituting the electronic circuit may be any liquor transistor. For example, a thin film transistor or a field effect transistor may be used.
In FIG. 19, the shield wiring layer is composed of one wiring layer LY3, the lower wiring layer is composed of two wiring layers LY1 and LY2, and the upper wiring layer is composed of two wiring layers LY4 and LY5. Although illustrated, each of the shield wiring layer, the lower wiring layer, and the upper wiring layer may be formed of one or more wiring layers LY. The lower wiring layer may include an N well 303 (and a P well) and an impurity diffusion layer.

The integrated circuit 30 has a low voltage region AR1 (in the “first region”) in which an electronic circuit composed of components having a low withstand voltage and wiring connected to the electronic circuit are formed in the lower wiring layer when viewed in plan. An example) and an electronic circuit composed of a high-voltage component, and a wiring connected to the electronic circuit are divided into a high voltage area AR2 (an example of a “second area”) formed in the lower wiring layer. The
In the present embodiment, as illustrated in FIG. 18, the residual vibration detection unit 356A is provided in the lower wiring layer of the low voltage region AR1, and the selection circuit UX is provided in the lower wiring layer of the high voltage region AR2.

In this embodiment, as illustrated in FIG. 18, the low voltage region AR1 includes a partial region AP1 (an example of “first partial region”), and the high voltage region AR2 includes a partial region AP2 (“second region”). An example of “partial region”. The internal wiring L1 is provided in the upper wiring layer of the partial region AP2, and the internal wiring L2 is provided in the upper wiring layer of the partial region AP1 and the upper wiring layer of the partial region AP2.
More specifically, the partial area AP2 includes a partial area AP2a and a partial area AP2b. The internal wiring L1 is provided in the upper wiring layer of the partial region AP2b in the high voltage region AR2, and the internal wiring L2 is provided in the upper wiring layer of the partial region AP2a in the high voltage region AR2.

In the present embodiment, as illustrated in FIG. 18, the shield part SH is provided in a region including at least the partial region AP1 and the partial region AP2 in plan view.
More specifically, in the present embodiment, the shield part SH includes a shield part SH1 and a shield part SH2. The shield portion SH1 is provided in a region including the partial region AP2b so as to cover the internal wiring L1, and the shield portion SH2 is provided in a region including the partial region AP1 and the partial region AP2a so as to cover the internal wiring L2. It is done.
In the example shown in this figure, the shield part SH is provided so that the shield parts SH1 and SH2 are separated from each other in plan view, but the shield part SH is provided so that the shield parts SH1 and SH2 are connected. May be. That is, in the example shown in this figure, the shield part SH is divided into two parts (SH1 and SH2). However, the shield part SH may be composed of one part or divided into three or more parts. May be.
In the example shown in FIGS. 18 and 19, the capacitor C1 of the high-pass filter HPF1 is provided in the wiring layers LY3 and LY4 in the low voltage region AR1, but the capacitor C1 is provided in any wiring layer LY. Also good.

As described above, in the present embodiment, the internal wiring L1 to which the drive signal COM that is a signal having a large amplitude is supplied as compared with the dynamic range of the electronic circuit constituting the residual vibration detection unit 356A, and the electromotive force Vout. Is formed in the upper wiring layer. In addition, an electronic circuit (logic circuit) constituting the residual vibration detection unit 356A is formed in the lower wiring layer. In the shield wiring layer between the lower wiring layer and the upper wiring layer, a shield part SH set to a predetermined potential is provided so as to cover the internal wirings L1 and L2 in plan view.
For this reason, it is possible to prevent the occurrence of parasitic capacitance between the internal wiring L1 or L2 and the electronic circuit (logic circuit), and fluctuations in the potential of the drive signal COM or fluctuations in the potential of the electromotive force Vout are regarded as noise. Propagation to the circuit can be prevented. Accordingly, in the electronic circuit such as the residual vibration detection unit 356A, it is possible to accurately detect the residual vibration without the influence of noise, and it is possible to accurately determine the ink ejection state in the ejection unit D.

As described above, the ink jet printer 1 detects a change in the electromotive force Vout of the piezoelectric element 200 and determines the ink ejection state in the ejection unit D based on the detection result. For this reason, when noise is superimposed on the electromotive force Vout, it is highly possible that the ink ejection state in the ejection part D cannot be accurately determined.
On the other hand, in this embodiment, since the shield part SH is provided in the shield wiring layer, it is possible to suppress the possibility that noise generated in the electronic circuit propagates to the internal wiring L2. That is, it is possible to prevent noise generated in the electronic circuit from being superimposed on the electromotive force Vout, and to improve the accuracy of the residual vibration detected by the residual vibration detection unit 356A.

<5. Operation of supply unit>
Next, the operation of the supply unit 352A will be described with reference to FIGS. FIG. 20 is a timing chart illustrating the operation of the supply unit 352A, and FIGS. 21 to 23 are explanatory diagrams illustrating the on and off states of the switches SW1, SW2, and SW3 in each period. Note that the examples illustrated in FIGS. 21 to 23 assume a case where the ink ejection state in the ejection unit D corresponding to the selection unit U1 is detected.

First, in a period T1 from time t0 to time t1, the drive signal COM includes the slight vibration pulse P1. When the fine vibration pulse P1 is applied to the piezoelectric element 200, the piezoelectric element 200 vibrates slightly. In this case, ink is not ejected from the nozzle NZ, but the ink in the cavity 220 can be agitated to suppress its thickening. In the period T1, since the control signals A1 and S1 are at a low level, the switches SW1 and SW2 are turned off. On the other hand, in the period T1, since the control signal Sc is at a high level, the switch SW3 is turned on. As a result, as shown in FIG. 21A, the potential of the node N4 is clamped to the analog ground AGND.
In the period T1, since the control signals A2 to An are at a high level and the control signals S2 to Sn are at a low level, the micro vibration pulse P1 is applied to the piezoelectric element 200 corresponding to the ejection unit D other than the inspection target, and the inspection is performed. Thickening is suppressed for the ink in the cavity 220 corresponding to the ejection part D other than the target.

Next, in the period T2 from time t1 to time t2, the inspection signal P2 is included in the drive signal COM. The period T2 is the same as the period T1 except that the control signal A1 is at a high level and the switch SW1 is turned on. That is, in the period T2, as illustrated in FIG. 21B, the switches SW1 and SW3 are turned on.
When the switch SW1 is turned on and the inspection pulse P2 is applied to the piezoelectric element 200, the piezoelectric element 200 bends in the direction of drawing ink into the cavity 220 in synchronization with the falling of the inspection pulse P2, and the inspection pulse P2 The ink is bent in the direction of pushing out from the cavity 220 in synchronization with the rise of the ink.
Here, the inspection pulse P2 may be adjusted in amplitude, phase and rise time so that ink is not ejected from the nozzle NZ, or ink may be ejected from the nozzle NZ by the inspection pulse P2. When the inspection pulse P2 has a waveform corresponding to non-ejection, it is possible to detect the residual vibration by executing the ejection state determination process during the period when the printing process is being performed. On the other hand, when the inspection pulse P2 has a waveform corresponding to ejection, for example, the ejection state determination process may be executed after the head unit 35 is moved to a position deviated from the recording paper P.

  Next, in a period T3 from time t2 to time t3, the drive signal COM is at a predetermined potential Vx. In the period T3, since the control signals A1, S1, and Sc are at a high level, the switches SW1, SW2, and SW3 are turned on. As a result, as shown in FIG. 22, the potential of the node N2 becomes the predetermined potential Vx, and the potential of the node N3 also becomes the predetermined potential Vx.

  Next, in a period T4 from time t3 to time t4, the drive signal COM is at a predetermined potential Vx. In the period T4, the control signal S1 maintains a high level, so that the switch SW2 is turned on. On the other hand, since the control signals A1 and Sc are at a low level, the switches SW1 and SW3 are turned off. As a result, as shown in FIG. 23, the potential of the node N2 becomes the predetermined potential Vx, and the potential of the node N3 is biased by the resistor R3, and the electromotive force Vout generated in the piezoelectric element 200 passes through the high-pass filter HPF1. And output as an output signal OUT1.

  Next, in a period T5 from time t4 to time t5, the drive signal COM is at a predetermined potential Vx. In the period T5, as in the period T3, the control signals A1, S1, and Sc are at a high level, so that the switches SW1, SW2, and SW3 are turned on. As a result, as shown in FIG. 22, the potential of the node N2 becomes the predetermined potential Vx, and the potential of the node N3 also becomes the predetermined potential Vx.

  Next, in the period T6 from the time t5 to the time t6, as in the period T2, the control signals A1 and Sc are at the high level, so that the switches SW1 and SW3 are turned on. On the other hand, since the control signal S1 is at a low level, the switch SW2 is turned off. As a result, as shown in FIG. 21B, the drive signal COM is applied to the piezoelectric element 200 via the switch SW1. Further, since the switch SW3 is turned on, the potential of the node N4 is clamped to the analog ground AGND.

Here, the switch SW1 is in the on state and the switch SW2 is in the off state in the first state, the switch SW1 is in the on state and the switch SW2 is in the second state, the switch SW1 is in the off state, and When the switch SW2 is turned on is referred to as a third state.
At this time, the control signal generation unit 354 controls the switch SW1 and the switch SW2 in the order of the first state (period T2) → second state (period T3) → third state (period T4). The control signal generator 354 controls the switch SW1 and the switch SW2 in the order of the third state (period T4) → second state (period T5) → first state (period T6).

As described above, the reason why the second state is provided during the transition from the first state to the third state and during the transition from the third state to the first state is that the switch SW1 is switched on and the switch SW2 is switched on. This is to prevent switching noise from occurring due to a change in the potential of the node N3 at the time.
That is, in the second state, the node N3 is supplied with the predetermined potential Vx of the drive signal COM through the path of the switch SW1, the node N1, and the switch SW2, and the predetermined potential of the drive signal COM through the path of the node N2 and the resistor R3. Vx is supplied.
When the transition from the second state to the third state is made, the switch SW1 changes to the off state, but the path of the node N2 → the resistor R3 remains, and the predetermined potential Vx of the drive signal COM is biased to the node N3 by the resistor R3. The Therefore, when the transition from the first state to the third state is made, the potential of the node N3 does not change greatly, so that switching noise can be reduced. In addition, by controlling the switch SW1 and the switch SW2 in the sequence of the first state → the second state → the third state, the current from the piezoelectric element 200 can flow continuously, so that the back electromotive force of the coil It is possible to eliminate the occurrence of a surge voltage during such switching. As a result, it is possible to detect residual vibration simultaneously with the start of the period T4.

Further, when the transition is made from the second state to the first state, the switch SW2 transits to the off state, but the drive signal COM is applied to the piezoelectric element 200 via the switch SW1 even in the second state, and the potential of the node N2 Is at the predetermined potential Vx of the drive signal COM, so that noise superimposed on the voltage applied to the piezoelectric element 200 can be reduced.
In addition, in the first state (period T2 and period T6) and the second state (period T3 and period T5), the switch SW3 is turned on, so that the potential of the node N4 is clamped to the analog ground AGND. As shown in FIG. 16, a parasitic capacitance Ca exists between the internal wiring L1 to which the drive signal COM is supplied and the internal wiring L2 to which the node N3 is connected and the electromotive force Vout based on the residual vibration is supplied. For this reason, even when the switch SW2 is turned off in the period T2, the inspection pulse P2 having a large amplitude is transmitted to the node N3 via the parasitic capacitance Ca. According to the present embodiment, in the periods T2 and T3, the switch SW3 is turned on, and the node N4 is clamped to the analog ground AGND. For this reason, it is possible to prevent the inspection pulse P2 from interfering with the residual vibration detector 356A.

<6. Operation of discharge state determination unit>
Next, the operation of the ejection state determination unit 10 will be described with reference to FIGS. 24 and 25.
As described above, the discharge state determination unit 10 includes the measurement unit 12 and the determination unit 14.
The measurement unit 12 includes a residual vibration signal Vd obtained by shaping the output signal OUT1 in the residual vibration detection unit 356A, a mask signal Msk generated by the control unit 6, and a threshold value determined by the potential at the amplitude center level of the residual vibration signal Vd. The potential Vth_c, the threshold potential Vth_o determined to be higher than the threshold potential Vth_c, and the threshold potential Vth_u determined to be lower than the threshold potential Vth_c are supplied. Based on these signals and the like, the measurement unit 12 outputs periodic data NTc indicating the time of one period of residual vibration and an validity flag Flag indicating whether or not the periodic data NTc is an effective value. To do.

FIG. 24 is a timing chart showing the operation of the measurement unit 12.
As shown in this figure, the measurement unit 12 compares the potential indicated by the residual vibration signal Vd with the threshold potential Vth_c, and becomes high level when the potential indicated by the residual vibration signal Vd is equal to or higher than the threshold potential Vth_c. When the potential indicated by the vibration signal Vd is less than the threshold potential Vth_c, the comparison signal Cmp1 that is at a low level is generated.
Further, the measurement unit 12 compares the potential indicated by the residual vibration signal Vd with the threshold potential Vth_o, and becomes high when the potential indicated by the residual vibration signal Vd is equal to or higher than the threshold potential Vth_o, and indicates the residual vibration signal Vd. When the potential is lower than the threshold potential Vth_o, the comparison signal Cmp2 that is at a low level is generated.
Further, the measurement unit 12 compares the potential indicated by the residual vibration signal Vd with the threshold potential Vth_u, and becomes high when the potential indicated by the residual vibration signal Vd is less than the threshold potential Vth_u, and indicates the residual vibration signal Vd. When the potential is equal to or higher than the threshold potential Vth_u, the comparison signal Cmp3 that becomes high level is generated.

  The mask signal Msk is a signal that becomes a high level only for a predetermined period Tmsk after the supply of the residual vibration signal Vd from the residual vibration detection unit 356A is started. In the present embodiment, the periodic data NTc is generated only for the residual vibration signal Vd after the lapse of the period Tmsk in the residual vibration signal Vd, so that the noise component superimposed immediately after the start of the residual vibration is removed. High cycle data NTc can be obtained.

The measurement unit 12 includes a counter (not shown). The counter starts counting a clock signal (not shown) at time t11 when the potential indicated by the residual vibration signal Vd is first equal to the threshold potential Vth_c after the mask signal Msk falls to a low level. . That is, the counter is the earlier of the timing at which the comparison signal Cmp1 first rises to the high level after the mask signal Msk falls to the low level, or the timing at which the comparison signal Cmp1 first falls to the low level. Counting starts at time t11, which is the timing. The counter then finishes counting the clock signal at time t12, which is the timing when the potential indicated by the residual vibration signal Vd becomes the threshold potential Vth_c for the second time after starting the count, and the obtained count value Is output as periodic data NTc. That is, the counter is earlier of the timing at which the comparison signal Cmp1 rises to the high level for the second time after the mask signal Msk falls to the low level, or the timing at which the comparison signal Cmp1 falls to the low level for the second time. At time t12, which is the other timing, the counting is finished.
As described above, the measurement unit 12 generates the period data NTc by measuring the time length from the time t11 to the time t12 as the time length for one period of the residual vibration signal Vd.

By the way, as shown by the one-dot chain line in FIG. 24, when the amplitude of the residual vibration signal Vd is small, there is a high possibility that the period of the residual vibration signal Vd cannot be measured accurately. Further, when the amplitude of the residual vibration signal Vd is small, even if it is determined that the discharge state of the discharge portion D is normal based only on the result of the periodic data NTc, the discharge abnormality actually occurs. There is a possibility that has occurred. For example, when the amplitude of the residual vibration signal Vd is small, it can be considered that the ink cannot be ejected because the ink is not injected into the cavity 220.
Therefore, in the present embodiment, it is determined whether or not the amplitude of the residual vibration signal Vd has a sufficient magnitude for the measurement of the periodic data NTc, and the result of the determination is output as the validity flag Flag. .
Specifically, the measurement unit 12 determines that the potential indicated by the residual vibration signal Vd exceeds the threshold potential Vth_o during the period when the counter is counting, that is, the period from the time t11 to the time t12. When the potential is less than the potential Vth_u, the validity flag Flag is set to a value “1” indicating that the period data NTc is valid. In other cases, the validity flag Flag is set to “0”. The sex flag Flag is output.

  As described above, in the present embodiment, the measurement unit 12 generates the periodic data NTc indicating the time length of one period of the residual vibration signal Vd, and the residual vibration signal Vd is sufficient for measuring the periodic data NTc. Since it is determined whether or not the amplitude has a large magnitude, it is possible to more accurately determine the ink ejection state in the ejection section D.

The determination unit 14 determines the ink ejection state in the ejection unit D based on the period data NTc and the validity flag Flag, and outputs the determination result as a determination result signal Rs.
FIG. 25 is an explanatory diagram for explaining the contents of the determination in the determination unit 14. As shown in this figure, the determination unit 14 sets the time length indicated by the cycle data NTc to the threshold value Tth1, the threshold value Tth2 indicating a time length longer than the threshold value Tth1, and the threshold value Tth3 indicating a time length longer than the threshold value Tth2. Are compared (or some of these three thresholds).
Here, the threshold value Tth1 is the time length of one period of residual vibration when bubbles are generated in the cavity 220 and the frequency of residual vibration is high, and one period of residual vibration when the discharge state is normal. It is a value for indicating the boundary with the time length of. The threshold value Tth2 is a time length corresponding to one period of residual vibration when paper dust adheres near the nozzle NZ outlet and the frequency of residual vibration is low, and one period of residual vibration when the ejection state is normal. This is a value to indicate the boundary with the minute time length. The threshold value Tth3 is the time length of one period of the residual vibration when the frequency of the residual vibration is lower than the case where paper dust adheres due to adhesion or thickening of the ink in the vicinity of the nozzle NZ, and the nozzle NZ exit. It is a value for indicating a boundary with a time length corresponding to one cycle of residual vibration when paper dust adheres in the vicinity.

As shown in FIG. 25, when the value of the validity flag Flag is “1” and “TTH1 ≦ NTc ≦ TTH2” is satisfied, the determination unit 14 has a normal ink ejection state in the ejection unit D. And a value “1” indicating that the ejection state is normal is set for the determination result signal Rs.
On the other hand, when the value of the validity flag Flag is “1” and “NTc <TTH1” is satisfied, the determination unit 14 determines that an ejection abnormality has occurred due to bubbles generated in the cavity 220. For the determination result signal Rs, a value “2” indicating that ejection abnormality due to bubbles has occurred is set. In addition, when the value of the validity flag Flag is “1” and “TTH2 <NTc ≦ TTH3” is satisfied, the determination unit 14 generates a discharge abnormality due to paper dust adhering to the vicinity of the nozzle NZ outlet. The value “3” indicating that a discharge abnormality due to paper dust has occurred is set for the determination result signal Rs. Further, when the value of the validity flag Flag is “1” and “TTH3 <NTc” is satisfied, the determination unit 14 determines that ejection abnormality has occurred due to ink thickening, and determination is made. For the result signal Rs, a value “4” indicating that a discharge abnormality due to ink thickening has occurred is set. Further, when the value of the validity flag Flag is “0”, the determination unit 14 indicates that an ejection abnormality has occurred with respect to the determination result signal Rs due to some cause such as no ink being injected. Is set to a value “5”.

  As described above, the determination unit 14 determines the discharge state in the discharge unit D, and outputs the determination result as the determination result signal Rs. For this reason, the control part 6 can grasp | ascertain in which discharge part D the discharge abnormality has arisen among the n discharge parts D provided in each head unit 35 based on the determination result signal Rs. It becomes. And the control part 6 can control operation | movement of the inkjet printer 1 so that a printing process may be interrupted and a recovery process may be performed when discharge abnormality has arisen. As a result, it is possible to minimize a decrease in print quality due to the ejection abnormality.

<7. Conclusion of First Embodiment>
As described above, in the present embodiment, the shield part SH is provided between the upper wiring layer and the lower wiring layer so as to cover the internal wirings L1 and L2 in plan view. For this reason, it is possible to prevent the fluctuation of the potential in the internal wiring L1 or L2 from propagating as noise to the electronic circuit, and to prevent the noise generated in the electronic circuit from being superimposed on the electromotive force Vout. it can. As a result, it is possible to accurately detect the residual vibration that eliminates the influence of noise, and to accurately determine the ink discharge state in the discharge portion D.

By the way, if a wiring for supplying a signal with a large amplitude is provided in the vicinity of the substrate 302, the potential of the substrate 302 fluctuates due to noise or the like from the wiring, and a P-type region on the substrate 302 and an N-type region Parasitic diodes or parasitic transistors may occur at the junction with the region. When these parasitic diodes and parasitic transistors operate, the electronic circuit formed on the substrate 302 cannot operate normally.
On the other hand, in the present embodiment, internal wirings L1 and L2 to which a signal with a large amplitude is supplied are provided in the upper wiring layer, and a shield part SH is further provided between the upper wiring layer and the substrate 302. Therefore, generation of parasitic diodes and parasitic transistors can be prevented on the substrate 302, and it is possible to accurately detect residual vibration while preventing malfunction of the electronic circuit in the residual vibration detector 356A and the like.

  In the present embodiment, the path length of the external wiring LX1 is shorter than the path length of the external wiring LX2. For this reason, compared with the case where the path length of the external wiring LX1 is longer than the path length of the external wiring LX2, the degree of noise superimposed on the electromotive force Vout of the piezoelectric element 200 can be reduced, and the accurate residual vibration can be reduced. Can be detected.

<B. Second Embodiment>
The inkjet printer 1 according to the second embodiment is the first embodiment except that the supply unit 352B is used instead of the supply unit 352A and the residual vibration detection unit 356B is used instead of the residual vibration detection unit 356A. The ink jet printer 1 is configured in the same manner.
In addition, about the element which an effect | action and a function are equivalent to 1st Embodiment in 2nd Embodiment illustrated below, the code | symbol referred by the above description is diverted and each detailed description is abbreviate | omitted suitably (below). The same applies to the modification described in the above.

  FIG. 26 is a circuit diagram illustrating the configuration of the supply unit 352B and the n piezoelectric elements 200. As shown in the drawing, the supply unit 352B includes a selection circuit UX having n selection units U (U1 to Un), a resistor R3, a high-pass filter HPF1, and a high-pass filter HPF2.

  The supply unit 352B generates a differential output signal OUT1 and an output signal OUT2, and supplies them to the residual vibration detection unit 356B. For this reason, the supply unit 352B has a high-pass filter HPF2 added to the supply unit 352A.

  The high pass filter HPF2 includes a capacitor C2 provided between the node N2 and the node N5, a resistor R2 having one terminal connected to the node N5 and the other terminal supplied with the analog ground AGND, and a resistor R2 in parallel. And a connected switch SW4. The switch SW4 is composed of a transfer gate, like the switch SW1, the switch SW2, and the switch SW3. Further, the control signal Sc is supplied to the switch SW4, and the on state and the off state are switched at the same timing as the switch SW3.

  That is, the supply unit 352B uses the signal of the internal wiring L2 to which the switch SW2 is connected and the signal of the internal wiring L1 to which the drive signal COM is supplied as a differential input signal, and is reduced by the high-pass filters HPF1 and HPF2. Output signals OUT1 and OUT2 in which the frequency components are attenuated are output to the residual vibration detector 356B in a differential format.

FIG. 27 shows the configuration of the residual vibration detector 356B. In the residual vibration detection unit 356B,
The gain adjustment unit 36, the low-pass filter 37, and the buffer 38 are the same as the residual vibration detection unit 356A of the first embodiment, and the differential amplification unit 39 is different. The differential amplifier 39 is an instrumentation amplifier configured using three operational amplifiers. The gain G of the differential amplifier 39 is given by the following equation.
G = OUT3 / (OUT1-OUT2)
= (1 + 2 * R4 / R3) * (R6 / R5)

Since the differential amplifying unit 39 has a high common mode rejection ratio, even if common mode noise is mixed in the internal wiring L1 and the internal wiring L2, the differential amplification unit 39 can suppress the common mode noise and generate a single-ended output signal OUT3. it can.
In the output signal OUT3, the high frequency component is attenuated by the low-pass filter 37, the gain is adjusted by the gain adjusting unit 36, the impedance is converted by the buffer 38, and the residual vibration signal Vd is supplied to the ejection state determining unit 10. .

  As described above, in the second embodiment, the supply unit 352B that outputs the electromotive force Vout of the piezoelectric element 200 caused by the residual vibration in a differential format and the common-mode noise included in the differential output signals OUT1 and OUT2 are removed. However, since the differential amplifier 39 that generates the single-ended output signal OUT3 is provided, the ejection state can be determined more accurately.

  FIG. 28 is an example of a plan view when a part of the IC chip 301 on which the integrated circuit 30 according to the second embodiment is mounted is viewed from a direction perpendicular to the substrate on which the integrated circuit 30 is formed. FIG. 29 is an example of a partial cross-sectional view of the IC chip 301 shown in FIG. 28 taken along the line Ff in FIG.

As illustrated in FIGS. 28 and 29, in the integrated circuit 30 according to the second embodiment, as in the first embodiment, the residual vibration detection unit 356B is provided in the lower wiring layer of the low voltage region AR1, and the supply unit 352B is provided. The selection circuit UX is provided in the lower wiring layer of the high voltage region AR2.
The internal wiring L1 is provided in the upper wiring layer of the partial region AP1 and the upper wiring layer of the partial region AP2. That is, the second embodiment is different from the first embodiment in that the internal wiring L1 is provided in the upper wiring layer of the partial region AP1.
More specifically, the partial area AP1 includes a partial area AP1a and a partial area AP1b. The internal wiring L1 is provided in the upper wiring layer of the partial region AP1b in the low voltage region AR1 and the upper wiring layer of the partial region AP2b in the high voltage region AR2, and the internal wiring L2 is provided in the low voltage region AR1. Are provided in the upper wiring layer of the partial region AP1a and the upper wiring layer of the partial region AP2a in the high voltage region AR2.

In the second embodiment, as illustrated in FIG. 28, the shield part SH is provided in a region including at least the partial region AP1 and the partial region AP2 in plan view.
More specifically, the shield part SH1 of the shield part SH is provided in a region including the partial area AP1b and the partial area AP2b so as to cover the internal wiring L1, and the shield part SH2 of the shield part SH is the internal wiring. It is provided in a region including the partial region AP1a and the partial region AP2a so as to cover L2.
As illustrated in FIGS. 28 and 29, the capacitor C1 of the high-pass filter HPF1 and the capacitor C2 of the high-pass filter HPF2 are provided in the wiring layers LY3 and LY4 in the low voltage region AR1.

As described above, in the second embodiment, in the shield wiring layer between the upper wiring layer in which the internal wirings L1 and L2 are provided and the lower wiring layer in which the electronic circuit constituting the residual vibration detection unit 356B is provided. The shield part SH is provided so as to cover the internal wirings L1 and L2 in plan view.
For this reason, it is possible to prevent the potential fluctuation in the internal wiring L1 or the potential fluctuation in the internal wiring L2 from propagating as noise to the electronic circuit. Further, it is possible to prevent noise generated in the electronic circuit from propagating to the internal wiring L2. Accordingly, in the electronic circuit such as the residual vibration detection unit 356B, it is possible to accurately detect the residual vibration without the influence of noise, and it is possible to accurately determine the ink ejection state in the ejection unit D.

In the second embodiment, the supply unit 352B treats the signal supplied by the internal wiring L1 and the signal supplied by the internal wiring L2 as a differential input signal. Without being limited thereto, as shown in FIG. 30, the signal supplied by the internal wiring L1 or the internal wiring L2 and the signal supplied by the supply line Lv may be handled as differential input signals. .
FIG. 30 is a circuit diagram of a supply unit 352C according to a modification of the second embodiment. As shown in this figure, the reference potential VBS is supplied to the high pass filter HPF2. According to the example shown in this figure, the common-mode noise superimposed on the internal wiring L2 and the supply line Lv can be effectively suppressed.

<C. Third Embodiment>
The inkjet printer 1 according to the third embodiment is the first implementation except that the supply unit 352D is used instead of the supply unit 352A, and that the drive signal generation unit 33 generates the drive signal COMa and the drive signal COMb. It is comprised similarly to the inkjet printer 1 which concerns on a form.

  FIG. 31 is a circuit diagram showing the configuration of the supply unit 352D and the n piezoelectric elements 200. As shown in the drawing, the supply unit 352D includes a selection circuit UXA having n selection units UA (UA1 to UAn), a resistor R3, and a high-pass filter HPF1.

In the third embodiment, the internal wiring L1 includes the internal wiring L1a and the internal wiring L1b, the driving signal COMa is supplied to the internal wiring L1a, and the driving signal COMb is supplied to the internal wiring L1b. In the third embodiment, the piezoelectric element 200 is driven using two types of drive signals COMa and COMb. Therefore, various drive pulses can be applied to the piezoelectric element 200 to eject ink droplets having different sizes from the nozzle NZ.
Specifically, as shown in FIG. 31, the supply unit 352D is electrically connected between the internal wiring L1 including the internal wiring L1a and the internal wiring L1b, the internal wiring L2, and the internal wiring L1a and the resistor R3. And a switch SW6 electrically connected between the internal wiring L1b and the resistor R3.

  The selection unit UA1 is the same as the selection unit U1 according to the first embodiment except that a switch SW1a for the drive signal COMa and a switch SW1b for the drive signal COMb are provided instead of the switch SW1. It is configured. The switch SW1a is controlled to be turned on / off based on the control signal A1 generated by the control signal generator 354, and the switch SW1b is controlled to be turned on / off based on the control signal B1 generated by the control signal generator 354. In the present embodiment, the switch SW1a and the switch SW1b are examples of the “first switch”. The other selection units UA2 to UAn are configured similarly to the selection unit UA1.

  The switch SW5 is turned on when the control signal Sa becomes high level, and turned off when the control signal Sa becomes low level. The switch SW6 is turned on when the control signal Sb is at a high level, and is turned off when the control signal Sb is at a low level.

In the integrated circuit 30 according to the third embodiment, as in the first embodiment, the selection circuit UXA of the supply unit 352D is provided in the lower wiring layer of the high voltage region AR2, and the internal wiring L1a and the internal wiring L1b. Including the internal wiring L1 is provided in the upper wiring layer of the partial region AP2 (partial region AP2b), and the internal wiring L2 includes the upper wiring layer of the partial region AP1 (partial region AP1a) and the partial region AP2 (partial region AP2a). (See FIG. 18).
In the present embodiment, similarly to the first embodiment, the shield part SH is provided in a region including at least the partial region AP1 and the partial region AP2 in plan view (see FIG. 18).

FIG. 32 is a timing chart illustrating an example of the operation of the supply unit 352D. As shown in this figure, the drive signal COMa includes the inspection pulse P2 in the period T10, becomes the predetermined potential Vx in the period T11 to the period T13, falls from the predetermined potential Vx to the reference potential Vref in the period T14, and in the period T15 The potential Vref is maintained, the period T16 includes the fine vibration pulse P1, and the reference potential Vref is maintained in the periods T17 to T21.
On the other hand, the drive signal COMb includes the slight vibration pulse P1 in the period T10, maintains the reference potential Vref in the periods T11 to T15, includes the inspection pulse P2 in the period T16, and maintains the predetermined potential Vx in the periods T17 to T19. In the period T20, the voltage drops from the predetermined potential Vx to the reference potential Vref, and in the period T21, the reference potential Vref is maintained.
That is, the waveform of the drive signal COMa in the unit period Ta composed of the periods T10 to T15 is substantially the same as the waveform of the drive signal COMb in the unit period Tb composed of the periods T16 to T21, and the drive signal COMa in the unit period Tb. The waveform is substantially the same as the waveform of the drive signal COMb in the unit period Ta.

  In the example shown in FIG. 32, the inspection pulse P2 is applied to the piezoelectric element 200 connected to the selection unit UA1 in the unit period Ta, and the residual vibration in the piezoelectric element 200 is detected in the period T12 of the unit period Ta. Further, in the unit period Tb, the inspection pulse P2 is applied to the piezoelectric element 200 connected to the selection unit UA2, and the residual vibration in the piezoelectric element 200 is detected in the period T18 of the unit period Tb. In addition, the micro vibration pulse P1 is applied to the piezoelectric elements 200 corresponding to the other selection units UA3 to UAn in the unit period Ta and the unit period Tb.

  In the example shown in FIG. 32, first, the operation of the supply unit 352D in the period T10 is examined. In the period T10, in the selection unit UA1, since the control signal A1 becomes high level, the switch SW1a for the drive signal COMa is turned on, and the inspection pulse P2 of the drive signal COMa is supplied to the piezoelectric element 200-1. Further, in the selection unit UA2, since the control signal B2 becomes high level, the switch SW1b for the drive signal COMb is turned on, and the fine vibration pulse P1 of the drive signal COMb is supplied to the piezoelectric element 200-2. Further, in the selection units UA3 to UAn, the control signals B3 to Bn become high level, so that the switch SW1b for the drive signal COMb is turned on, and the micro vibration pulse P1 is supplied to the piezoelectric elements 200-3 to 200-n. .

  Next, in the example illustrated in FIG. 32, in the period T12, the control signals S1 and Sa become high level, and the switch SW2 and the switch SW5 of the selection unit UA1 are turned on. Further, since the control signals Sc, A1, and B1 are at a low level, the switches SW1a and SW1b and the switch SW3 of the selection unit UA1 are turned off. For this reason, the electromotive force Vout generated in the piezoelectric element 200-1 is transmitted through the path of the switch SW2, the internal wiring L2, the capacitor C1, and the node N4, and is output as the output signal OUT1. At this time, the potential of the node N3 is biased to the predetermined potential Vx of the drive signal COMa by the resistor R3.

  In the example shown in FIG. 32, the control signals Sa, Sc, A1, and S1 are at a high level in the period T11 and the period T13. For this reason, the switches SW1a and SW2 of the selection unit UA1 are turned on, and the switches SW3 and SW5 are turned on. In this way, by simultaneously turning on the switches SW1a and SW2, it is possible to suppress the occurrence of switching noise due to the potential of the node N3 changing. Further, since the switch SW3 is turned on, the potential of the node N4 is clamped to the analog ground AGND. Thereby, switching noise can be prevented from being superimposed on the output signal OUT1.

  Next, in the example shown in FIG. 32, the control signal A1 becomes a high level and the switch SW1a is turned on in the period T14, so that the drive signal COMa is supplied to the piezoelectric element 200-1. As a result, the potential of the upper electrode 122 of the piezoelectric element 200-1 is returned to the reference potential Vref.

  In this way, in the example shown in FIG. 32, the residual vibration of the head corresponding to the piezoelectric element 200-1 is measured in the unit period Ta using the drive signal COMa. At this time, since the switch SW1b for the drive signal COMb of the selection unit UA2 is turned on, the drive signal COMb is supplied to the piezoelectric element 200-2.

Next, in the example shown in FIG. 32, each of the period T16 to the period T21 of the unit period Tb corresponds to each of the period T10 to the period T15 of the unit period Ta. Specifically, the control signal Sa of the unit period Tb is the same as the control signal Sb of the unit period Ta, the control signal Sb of the unit period Tb is the same as the control signal Sa of the unit period Ta, and the control of the unit period Tb is performed. The signal Sc is the same as the control signal Sc in the unit period Ta, the control signal A1 in the unit period Tb is the same as the control signal B2 in the unit period Ta, and the control signal B1 in the unit period Tb is the control signal B1 in the unit period Ta. The control signal S1 of the unit period Tb is the same as the control signal S2 of the unit period Ta, the control signal A2 of the unit period Tb is the same as the control signal A2 of the unit period Ta, and the control of the unit period Tb The signal B2 is the same as the control signal A1 in the unit period Ta, and the control signal S2 in the unit period Tb is the same as the control signal S1 in the unit period Ta.
Therefore, in the unit period Tb, the selection unit UA2 selects the drive signal COMb, applies the inspection pulse P2 to the piezoelectric element 200-2, and detects the residual vibration of the piezoelectric element 200-2.

  In the third embodiment, in the period T10, the inspection pulse P2 is included in the drive signal COMa and the fine vibration pulse P1 is included in the drive signal COMb. However, an ejection pulse for ejecting ink instead of the fine vibration pulse P1. May be included. In this case, it is possible to mix a nozzle NZ that ejects ink and a nozzle NZ that does not eject ink and detects residual vibration.

<D. Fourth Embodiment>
The inkjet printer 1 according to the fourth embodiment is configured in the same manner as the inkjet printer 1 of the third embodiment, except that a supply unit 352E is used instead of the supply unit 352D.

  FIG. 33 is a circuit diagram illustrating the configuration of the supply unit 352E and the n piezoelectric elements 200. As shown in the drawing, the supply unit 352E has a configuration in which a high-pass filter HPF2 is added to the supply unit 352D of the third embodiment described above. Accordingly, the supply unit 352E supplies the differential output signals OUT1 and OUT2 to the residual vibration detection unit 356B (see FIG. 27). The residual vibration detection unit 356B includes the differential amplification unit 39 that generates the single-ended output signal OUT3 while removing the common-mode noise included in the differential output signals OUT1 and OUT2. It becomes possible to judge.

In the integrated circuit 30 according to the fourth embodiment, as in the second embodiment, the selection circuit UXA of the supply unit 352E is provided in the lower wiring layer of the high voltage region AR2, and the internal wiring L1a and the internal wiring L1b. Including the internal wiring L1 is provided in the upper wiring layer of the partial area AP1 (partial area AP1b) and the upper wiring layer of the partial area AP2 (partial area AP2b).
It is provided in the upper wiring layer of partial region AP1 (partial region AP1a) and the upper wiring layer of partial region AP2 (partial region AP2a) (see FIG. 28).
In the fourth embodiment, similarly to the second embodiment, the shield part SH is provided in a region including at least the partial region AP1 and the partial region AP2 in plan view (see FIG. 28).

Incidentally, in the fourth embodiment, the supply unit 352E treats the signal supplied by the internal wiring L1 and the signal supplied by the internal wiring L2 as differential input signals, but the present invention is not limited to this. Instead, the signal supplied from the internal wiring L1 or the internal wiring L2 and the signal supplied from the supply line Lv may be handled as differential input signals.
FIG. 34 is a circuit diagram of a supply unit 352F according to a modification of the fourth embodiment. As shown in this figure, the high-pass filter HPF2 is supplied with the reference potential VBS. According to this modification, it is possible to effectively suppress the common-mode noise superimposed on the internal wiring L2 and the supply line Lv.

<E. Modification>
The present invention is not limited to the above-described embodiments, and for example, various modifications described below are possible. In addition, each modification may be appropriately combined with each other, and may be appropriately combined with each of the above-described embodiments.

<Modification 1>
In the embodiment described above, the shield part SH is provided so as to include at least the partial region AP1 of the low voltage region AR1 and the partial region AP2 of the high voltage region AR2, but the present invention is limited to such a mode. For example, as shown in FIG. 35, the shield SH may be provided in the partial region AP1 of the low voltage region AR1.
The electronic circuit formed in the high voltage region AR2 is a circuit for processing a large amplitude signal,
Even in the case where the shield part SH is not provided, it is less susceptible to noise from the internal wirings L1 and L2 than the electronic circuit formed in the low voltage region AR1. Therefore, by providing the shield part SH so as to include at least the partial area AP1 in plan view, that is, to cover the internal wirings L1 and L2 in the low voltage area AR1, the electronic circuit constituting the integrated circuit 30 is provided. It becomes possible to prevent malfunction.

<Modification 2>
In the embodiment and the modification described above, the IC chip 301 having the integrated circuit 30 is mounted on the flexible cable 300. However, the present invention is not limited to such an aspect. May be provided.

<Modification 3>
In the embodiment and the modification described above, the serial printer in which the main scanning direction of the head is different from the sub-scanning direction of the paper feed is described as an example of the liquid ejection device. However, the present invention is not limited to this, and the head May be a line printer whose width is the width of the paper. Since the determination of the ejection state due to residual vibration can be performed without ejecting ink onto the paper, it is possible to inspect the ejection state during printing in the line printer.

<Modification 4>
In the embodiment and the modification described above, the ink jet printer capable of ejecting four colors of CMYK inks has been described as an example of the liquid ejecting apparatus. However, it is sufficient that one or more inks can be ejected. That is, in the above-described embodiment and modification, the case where four head units 35 are provided has been described as an example, but the number of head units 35 may be one or more.

DESCRIPTION OF SYMBOLS 1 ... Inkjet printer, 6 ... Control part, 10 ... Ejection state determination part, 20 ... Recording head, 30 ... Integrated circuit, 33 ... Drive signal generation part, 35 ... Head unit, 200 ... piezoelectric element, 300 ... flexible cable, 301 ... IC chip, 352A ... supply unit, 354 ... control signal generation unit, 356A ... residual vibration detection unit, D ... Discharge unit, NZ ... Nozzle, L1 ... Internal wiring, L2 ... Internal wiring, LX1 ... External wiring, LX2 ... External wiring, U ... Selection unit, SW1,. -Switch, SW2 ... Switch, SH ... Shield part SH.

Claims (6)

A piezoelectric element;
A pressure chamber in which liquid is filled and a pressure of the inside is increased or decreased by displacement of the piezoelectric element;
A nozzle that communicates with the pressure chamber and discharges the liquid filled in the pressure chamber in accordance with the increase or decrease of the pressure in the pressure chamber;
A discharge state determination unit that determines a discharge state of the liquid from the nozzle based on a residual vibration signal indicating a change in electromotive force of the piezoelectric element according to the residual vibration generated in the pressure chamber;
A drive signal generator for generating a drive signal for driving the piezoelectric element;
An integrated circuit for transmitting the drive signal to the piezoelectric element and detecting a change in electromotive force of the piezoelectric element;
First external wiring for electrically connecting the integrated circuit and the piezoelectric element;
A second external wiring for electrically connecting the integrated circuit and the ejection state determination unit;
With
The integrated circuit comprises:
A residual vibration detection unit provided in the first wiring layer and amplifying a signal indicating a change in electromotive force of the piezoelectric element to generate the residual vibration signal;
A first internal wiring provided in the second wiring layer and supplied with the drive signal;
A second internal wiring provided in the second wiring layer and supplied with an electromotive force of the piezoelectric element;
A first switch that is provided in the first wiring layer and switches between conduction and non-conduction between the first external wiring and the first internal wiring;
A second switch that is provided in the first wiring layer and switches between conduction and non-conduction between the first external wiring and the second internal wiring;
A shield portion provided in a third wiring layer between the first wiring layer and the second wiring layer and made of a conductive material;
Comprising
The path length of the first external wiring is:
Shorter than the path length of the second external wiring,
A liquid discharge apparatus characterized by that. The integrated circuit comprises:
Formed on a substrate and viewed from a direction perpendicular to the substrate, the first region including the first partial region and the second region including the second partial region,
The residual vibration detector is
Provided in the first region;
The first switch and the second switch are:
Provided in the second region;
The second internal wiring is
Provided in the first partial region and the second partial region;
The shield part is
Provided in a region including at least the first partial region of the first region;
The liquid ejecting apparatus according to claim 1, wherein the liquid ejecting apparatus is a liquid ejecting apparatus. The shield part is
Provided in a region including at least the second partial region of the second region,
The liquid ejecting apparatus according to claim 2, wherein the liquid ejecting apparatus is a liquid ejecting apparatus. The first internal wiring is
Provided in the first partial region and the second partial region,
The liquid ejecting apparatus according to claim 2, wherein the liquid ejecting apparatus is a liquid ejecting apparatus. The integrated circuit comprises:
Formed on the substrate,
The second wiring layer is
When viewed from the third wiring layer, the layer is on the opposite side of the substrate.
The liquid ejecting apparatus according to claim 1, wherein the liquid ejecting apparatus is a liquid ejecting apparatus. A head unit provided in the liquid ejection device,
A piezoelectric element;
A pressure chamber in which liquid is filled and a pressure of the inside is increased or decreased by displacement of the piezoelectric element;
A nozzle that communicates with the pressure chamber and discharges the liquid filled in the pressure chamber in accordance with the increase or decrease of the pressure in the pressure chamber;
An integrated circuit for transmitting a drive signal for driving the piezoelectric element to the piezoelectric element and detecting a change in electromotive force of the piezoelectric element according to residual vibration generated in the pressure chamber after the piezoelectric element is driven; ,
A first external wiring that electrically connects the integrated circuit and the piezoelectric element;
With
The integrated circuit comprises:
A residual vibration detection unit that is provided in the first wiring layer and generates a residual vibration signal obtained by amplifying a signal indicating a change in electromotive force of the piezoelectric element;
A first internal wiring provided in the second wiring layer and supplied with the drive signal;
A second internal wiring provided in the second wiring layer and supplied with an electromotive force of the piezoelectric element;
A first switch that is provided in the first wiring layer and switches between conduction and non-conduction between the first external wiring and the first internal wiring;
A second switch that is provided in the first wiring layer and switches between conduction and non-conduction between the first external wiring and the second internal wiring;
A shield portion provided in a third wiring layer between the first wiring layer and the second wiring layer and made of a conductive material;
Comprising
A head unit characterized by that.

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