JP2016035512A - Optical super-resolution medium, hyper lens, method for producing the same and hyper lens array - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an optical super-resolution medium to be the material for a hyper lens that is mounted in conventional optical microscopes to greatly improve its spatial resolution for realizing super resolution, and functions in visible light or near infrared light areas, a hyper lens prepared therewith, and a method for production thereof.SOLUTION: An optical super-resolution medium 20 comprises the lamination of three or more and six or less unit laminates 21, 22, 23 and 24, in which each of the unit laminates is constituted of four, six, or eight layers, in which nonmetal layers and metal layers are alternately laminated. The lamination of the unit laminates is such that the nonmetal layer and the metal layer are in contact with each other between the unit laminates.SELECTED DRAWING: Figure 7

Description

  The present invention relates to an optical super-resolution medium, a hyper lens, a manufacturing method thereof, and a hyper lens array.

  If the processing accuracy of an optical component such as a lens is sufficiently high, the diffraction limit of microscopic observation is determined by the wavelength of the light source used (Non-Patent Document 1). For example, the resolution of a microscope is limited to half the wavelength of light due to the diffraction limit of light. In an optical microscope using visible light, the diffraction limit is determined by the resolution of visible light, and about 300 nm is the lower limit of the spatial resolution.

  The lower limit of the spatial resolution obtained by the combination of the above existing optical lenses is widely known as a diffraction limit, and an image obtained with a high spatial resolution exceeding the diffraction limit is called optical super-resolution.

There are also attempts to observe beyond the diffraction limit. One example is a scanning near field optical microscope (SNOM) using near-field light. This is also called NSOM (Near Field Scanning Optical Microscopy). It is included in a scanning probe microscope (SPM) in that the sample is scanned with a thin probe. The SPM includes a scanning tunneling microscope (STM) and an atomic force microscope (AFM).
However, there is a problem that operability is lacked in that it is necessary to scan the sample with a thin probe.

  The development of metal-insulator layered metamaterials (STIMs) has also been undertaken. The hyperlens using this metamaterial as a medium enables super-resolution imaging beyond the diffraction limit (Non-patent Documents 2-4). However, there is a problem that the operating wavelength at which super-resolution is obtained is in the ultraviolet region, or the ease of manufacturing is low and the cost is high because an insulator containing a rare element is used.

The effect of a layered structure using SiO ₂ on UV light has been studied (Non-Patent Documents 5 and 6).
Further, imaging using a hemispherical lens has been studied (Non-patent Documents 7-9). However, a lens that functions with ultraviolet light (Non-Patent Document 7), an in-plane lens that obtains an enlarged image only on a flat surface (Non-Patent Document 8), or an insulator made of a rare element (Non-Patent Document 9) It does not give any technical suggestion to the present application.

Patent Document 1 relates to a super-resolution microscope that presupposes staining of an observation target with fluorescent molecules. Patent Document 2 relates to a microscope apparatus that can perform super-resolution observation by performing image processing on images from a plurality of illuminations. Patent Document 3 relates to an optical resolution apparatus that aims at a super-resolution light spot by using a Fabry-Perot interferometer. Patent Document 4 is to improve the confocal microscope so that super-resolution can be obtained.
Therefore, although the above Patent Documents 1-4 are related to the super-resolution microscope, they are completely independent of the super-resolution microscope using the optical super-resolution medium of the present application, and give any suggestion to the present application. is not.

JP 2011-123314 A JP 2011-28208 A JP 7-49469 A JP-A-6-95038

E. Abbe, Archiv. f. Mikcoskopiche. Anat. 9, 413 (1873). S. A. Ramakrishna and J.M. B. Pendry, Phys. Rev. B 67, 20111 (2003). A. Salandrino and N.M. Engheta, Phys. Rev. B74, 075103 (2006). Z. Jacob, L .; V. Alexeyev, and E.M. Narimanov, Opt. Express 14, 8247 (2006). E. Verhagen, R.A. de Waele, L.M. Kuipers, and A.K. Polman, Phys. Rev. Lett. 105, 223901 (2010). T.A. Xu, A .; Agrawal, M.A. Abashin, K .; J. et al. Chau, and H.C. J. et al. Lezec, Nature 497, 470 (2013). Z. Liu, H .; Lee, Y .; Xiong, C.I. Sun, and X.J. Zhang, Science 315, 1686 (2007). I. I. Smolyaninov, Y.M. -J. Hung, and C.I. C. Davis, Science 315, 1699 (2007). J. et al. Rho, Z .; Ye, Y. Xiong, X. et al. Yin, Z. Liu, H .; Choi, G .; Bartal, and X.M. Zhang, Nat. Commun. 1, 143 (2010). M.M. Born and E.M. Worf, Principles of Optics, 7th edition (Cambridge University Press, 1999). L. Li, J. et al. Opt. Soc. Am. A 13,1024 (1996). L. Li, J. et al. Opt. Soc. Am. A 14, 2758 (1997). M.M. Iwanaga, Sci. Technol. Adv. Mater. 13,053002 (2012).

  The present invention, when mounted on a conventional optical microscope, becomes a material of a hyper lens that greatly improves its spatial resolution and obtains super resolution, and an optical super resolution medium that functions in the visible light or near infrared light region, It is an object of the present invention to provide a hyper lens using the same, a manufacturing method thereof, and a hammer lens array.

In view of the above circumstances, the present inventor has discovered a mode (herein referred to as hypermode) that suppresses the spread due to diffraction of light in STIMs by elucidating the transmission photonic Bloch state of STIMs. It was clarified that STIMs are optical super-resolution media in the wavelength region where hyper mode occurs. Furthermore, using this optical super-resolution medium, a hyper-lens array (HLA) was fabricated, mounted on an optical microscope, and its performance was examined. And a spatial resolution of 34 nm or less was obtained. Thus, the present invention has been completed by finding that this HLA-mounting optical microscope becomes a super-resolution optical microscope (SROM).
The present invention has the following configuration.

(1) Three to six unit laminates of four layers, six layers or eight layers in which nonmetal layers and metal layers are alternately laminated so that the nonmetal layers and the metal layers are in contact with each other between the unit laminates. An optical super-resolution medium characterized by being laminated.

(2) The surface of the first non-metal layer on the one surface side is a surface on which light is incident, and the surface of the metal layer on the other surface side is a surface on which light is emitted. The optical super-resolution medium as described.

(3) A four-layer unit laminate is provided, the thickness of the first non-metal layer of the four-layer unit laminate is not less than 45 nm and not more than 55 nm, and the thickness of the first metal layer is The thickness of the first nonmetallic layer is not less than 0.3 times and not more than 0.7 times, and the thickness of the second nonmetallic layer is not less than 1.5 times and not more than twice the thickness of the first nonmetallic layer. And the thickness of the second metal layer is not less than 0.3 times and not more than 0.7 times the thickness of the first non-metal layer. .

(4) A six-layer unit laminate is provided, the thickness of the first non-metal layer of the six-layer unit laminate is not less than 45 nm and not more than 55 nm, and the thickness of the first metal layer is The thickness of the first non-metallic layer is 0.2 to 0.5 times the thickness of the first non-metallic layer, and the thickness of the second non-metallic layer is 1.8 to 2.2 times the thickness of the first non-metallic layer. The thickness of the second metal layer is not less than 0.1 times and not more than 0.3 times the thickness of the first non-metal layer, and the thickness of the third non-metal layer is the first The thickness of the non-metal layer is not less than 0.2 times and not more than 0.5 times, and the thickness of the third metal layer is not less than 0.1 times and not more than 0.3 times the thickness of the first non-metal layer. The optical super-resolution medium according to (1), wherein

(5) An eight-layer unit laminate is provided, the thickness of the first non-metal layer of the eight-layer unit laminate is 120 nm or more and 140 nm or less, and the thickness of the first metal layer is The thickness of the first non-metallic layer is 0.05 to 0.08 times the thickness of the first non-metallic layer, and the thickness of the second non-metallic layer is 0.5 to 0.8 times the thickness of the first non-metallic layer. 2 or less, the thickness of the second metal layer is 0.03 or more and 0.06 or less of the thickness of the first non-metal layer, and the thickness of the third non-metal layer is the first The thickness of the non-metal layer is 0.55 times or more and 0.85 times or less, and the thickness of the third metal layer is 0.06 times or more and 0.09 times or less of the thickness of the first non-metal layer. The thickness of the fourth non-metal layer is not less than 0.35 times and not more than 0.65 times the thickness of the first non-metal layer, and the thickness of the fourth metal layer is the first non-metal layer 0.03 times to 0.06 times the thickness of Optical super-resolution medium according to (1), wherein the door.

(6) The optical super-resolution medium according to any one of (1) to (4), wherein the metal layer is made of any one metal selected from the group consisting of Ag, Al, and Au.

(7) The optical super-resolution medium according to any one of (1) to (4), wherein the non-metal layer is made of Si or Si oxide.

(8) The optical super-resolution medium according to any one of (1) to (7) and a substrate to which the optical super-resolution medium is bonded. A hyper lens, wherein a concave portion is formed on one surface of one non-metallic layer, and a convex portion is formed on one surface of the metal layer on the other surface side of the optical super-resolution medium.

(9) The hyper lens according to (8), wherein the concave portion has a substantially circular shape in a plan view and a substantially semicircular shape in a cross-sectional view.

(10) A hyper lens array comprising a plurality of hyper lenses according to (8) or (9).

(11) The method for manufacturing a hyper lens according to (8) or (9), wherein a metal mask is disposed on one surface of the substrate and then the one surface is etched by lithography, and the metal mask is removed. And a step of alternately laminating a metal layer and a non-metal layer in this order.

  The optical super-resolution medium according to the present invention includes 3 to 6 unit laminates of 4 layers, 6 layers or 8 layers in which nonmetal layers and metal layers are alternately laminated, and a nonmetal layer between the unit laminates. Therefore, the propagation of light in the inside can be described as a transmission photonic Bloch state. In principle, it is possible to know whether or not the hyper mode occurs by analyzing the light propagation characteristics of this transmission photonic Bloch state, but as a simple method to determine whether or not the hyper mode occurs There is a method for examining a transmission spectrum with respect to a wide incident angle. P-polarized light, which is perpendicular to the light incident surface and has an electric field vector in the incident surface between the incident vector and the reflection vector, is used as the incident light, and the incident angle changes in the range of 0 ° to 60 °. If the change rate of the light transmittance of the emitted light can be reduced to 20% or less when it is made incident, the necessary condition for generating the hyper mode is satisfied. When a hyper lens is formed in a wavelength region where this hyper mode occurs, light can be propagated while suppressing the diffraction spread of light within the lens, and an image can be formed beyond the diffraction limit.

  The hyper lens of the present invention includes the optical super-resolution medium described above and a substrate to which the optical super-resolution medium is bonded, and a first non-metallic layer on one surface side of the optical super-resolution medium. A concave portion is formed on one surface, and a convex portion is formed on one surface of the metal layer on the other surface side of the optical super-resolution medium, so that the optical image incident on the first non-metal layer and the other surface side In the optical image emitted from the metal layer, there is a difference between the inner diameter and the outer diameter of the concave surface, so that the optical image is enlarged. Imaging can be observed with an optical microscope.

  The method for manufacturing a hyper lens according to the present invention is the method for manufacturing a hyper lens described above, wherein a metal mask is disposed on one surface of a substrate and then the one surface is etched by lithography, and the metal mask is Since the structure has a step of alternately laminating the metal layer and the non-metal layer in this order after removal, a hyper lens capable of forming an image exceeding the diffraction limit can be easily manufactured.

2A and 2B are a diagram illustrating an example of a hyper lens and a hyper lens array according to the first embodiment of the present invention, which are a plan view and a cross-sectional view taken along line A-A ′. It is the B section enlarged view of Drawing 1 (b). It is a figure which shows the relationship between the incident vector to an optical super-resolution medium, an electric field vector, a reflection vector, and an incident surface. It is a figure which shows an example of a test object, Comprising: It is a top view (a), a side view (b), the C section enlarged view (c), and sectional drawing (d) in the D-D 'line. It is a layout drawing of the microscope observation which mounted the hyper lens. It is an optical path figure in microscope observation. It is an explanatory diagram showing an example of an optical path passing through the hole 41c21, hole 41c22 through the hole. It is process drawing which shows an example of the manufacturing method of the hyper lens which is embodiment of this invention. It is process drawing which shows an example of the manufacturing method of the hyper lens which is embodiment of this invention. It is a cross-sectional enlarged view which shows another example of an optical super-resolution medium. It is a layout view for examining the suppression of diffraction spread of light and verifying the hyper mode. It is the numerical calculation result which shows the diffraction spread suppression of light in the previous arrangement | positioning, Comprising: It is the numerical calculation result which visualized the propagation of light on the said conditions. A graph showing a measured value (a) of a real sample of a graph showing the wavelength dependence of an incident angle and transmittance, a numerical value (b) of a numerical calculation model, and a transmission photonic Bloch state (blacked portion) c). It is a numerical calculation result which shows the light propagation characteristic in arrangement | positioning except the optical super-resolution medium in FIG. The incident angle dependence of the transmittance spectrum of an optical super-resolution medium functioning at a wavelength of 510 nm is shown (numerical calculation value). The incident angle dependence of the transmittance spectrum of an optical super-resolution medium functioning at a wavelength of 1500 nm is shown (numerical calculation value). It is a manufacturing process figure of a hyper lens. It is an optical photograph of the manufactured hyper lens array. It is the electron micrograph of the hyper lens array seen from the air side. It is the cross-sectional electron microscope image (a) of a hole, and its schematic diagram (b). It is a layout drawing of the microscope observation which mounted the hyper lens. It is an optical photograph of a hyper lens array. 2 is a partial electron microscope image of a test object. It is an optical image of the part corresponding to FIG. It is a graph (b) which shows the optical intensity (vertical axis) in one optical super-resolution (a) and its F-F 'line (horizontal axis). It is a schematic diagram which obtains optical super-resolution with a hyper lens array. It is a graph (b) which shows another optical super-resolution (a) and the light intensity (vertical axis) in the G-G 'line (horizontal axis).

(First embodiment of the present invention)
(Hyper lens and Hyper lens array)
First, a hyper lens and a hyper lens array according to the first embodiment of the present invention will be described.
FIG. 1 is a diagram illustrating an example of a hyper lens and a hyper lens array according to an embodiment of the present invention, and is a plan view (a) and a cross-sectional view AA ′.
As shown in FIG. 1B, a hyper lens 30 according to an embodiment of the present invention includes an optical super resolution medium 20 and a substrate 33 to which the optical super resolution medium 20 is bonded.
A concave portion 20c is formed on one surface of the optical super-resolution medium 20, and a convex portion 20d is formed on the other surface. This part can be used as a lens.

  The shape of the recess 20c is substantially circular in plan view, and is substantially hemispherical in cross section. Thereby, it can utilize as a lens. However, the shape is not limited to this, and may be, for example, a substantially band shape in a plan view and may have a pseudo hemispherical cross section. This shape can also be used as a lens.

  A plurality of recesses 20c are formed. In this way, by using the hyper lens array, a plurality of positions can be enlarged and observed simultaneously.

  In the hyper lens array, the recesses 20c are arranged in a regular pattern so that the center point interval r with the nearest recess 20c is the same and the directions of the nearest recesses 20c are the same in one surface. ing. Further, the arrangement intervals of the hyper lens arrays may be close. However, the layout is not limited to this, and an at-random layout may be used.

(Optical super-resolution medium)
Next, the optical super-resolution medium that is the first embodiment of the present invention will be described.
FIG. 2 is an enlarged view of a portion B in FIG.
As shown in FIG. 2, the optical super-resolution medium 20 according to the embodiment of the present invention is a laminated body in which non-metal layers and metal layers are alternately laminated. The hyper lens 30 includes the substrate 33 and the optical super resolution medium 20.
A recess 20 c is formed in a part of the first non-metallic layer 244 on the one surface 20 a side of the optical super-resolution medium 20.
Further, a convex portion 20 d is formed on a part of the metal layer 211 on the other surface 20 b side of the optical super resolution medium 20.
The concave portion 20c and the convex portion 20d have a substantially circular shape in plan view and a substantially semicircular shape in sectional view.

The optical super-resolution medium 20 includes four unit laminated bodies 21, 22, 23, and 24.
Four unit laminate bodies 21, 22, 23, and 24 are formed on the substrate 33 in this order.

The unit laminate 24 is formed by laminating a first non-metal layer 244, a first metal layer 243, a second non-metal layer 242, and a second metal layer 241.
The unit laminate 23 is formed by laminating a first non-metal layer 234, a first metal layer 233, a second non-metal layer 232, and a second metal layer 231.
The unit laminate 22 is formed by laminating a first non-metal layer 224, a first metal layer 223, a second non-metal layer 222, and a second metal layer 221.
The unit laminate 21 is formed by laminating a first non-metal layer 214, a first metal layer 213, a second non-metal layer 212, and a second metal layer 211.

That is, the unit laminate bodies 21, 22, 23, and 24 are formed by alternately laminating non-metal layers and metal layers.
Moreover, each unit laminated body 21, 22, 23, 24 is made into the 4 layer structure, and consists of the same layer structure.

  It is preferable that the metal layers 243, 233, 223, 213, 241, 231, 221, 211 are made of any one metal selected from the group of Ag, Al, and Au. Thus, an optical super-resolution medium can be configured based on the properties of drude metal.

The non-metal layers 244, 234, 224, 214, 242, 232, 222, 212 are preferably made of Si or Si oxide.
When SiO ₂ is used, an optical super-resolution medium can be configured in a wavelength range of 400 to 600 nm.
When Si is used, an optical super-resolution medium can be configured in the wavelength range of 1400 to 1600 nm.
As described above, by using silicon and oxygen or silicon as the constituent elements of the non-metal layer, the manufacturing cost of the optical super-resolution medium can be greatly reduced. Further, since the manufacturing technique is established, the manufacturing is easy.

  In the four-layer unit laminate, (1) the thickness of the first non-metal layers 244, 234, 224, 214 is 45 nm to 55 nm, and (2) the thickness of the first metal layers 243, 233, 223, 213 Is not less than 0.3 times and not more than 0.7 times the thickness of the first non-metal layer 244, 234, 224, 214, and (3) the thickness of the second non-metal layer 242, 232, 222, 212 is 1.5 to 2 times the thickness of the first non-metal layer 244, 234, 224, 214, (4) the thickness of the second metal layer 241, 231, 221, 211 is the first metal layer It is preferable that the thickness of 243, 233, 223, 213 is 0.8 times or more and 1.2 times or less. With this configuration, the wavelength range that functions as the optical super-resolution medium can be set to the visible light range.

FIG. 3 is a diagram illustrating a relationship between an incident vector, an electric field vector, a reflection vector, and an incident surface on the optical super-resolution medium.
One surface of the non-metal layer 244 is a surface on which light is incident.
An incident surface is formed perpendicular to the surface.
The incident surface is a plane between the incident vector and the reflection vector.
The incident vector and the reflection vector are at an angle of θ with respect to a line perpendicular to the light incident surface.
The electric field vector E is formed in the direction perpendicular to the incident vector in the incident plane.

  In the unit laminate, it is desirable that the light transmittance of the optical super-resolution medium does not change more than 20% with respect to the incident angle of 0 to 60 degrees with respect to the p-polarized light. This is a necessary condition for generating a transmission photonic Bloch state that suppresses the diffraction spread of light.

(Usage form of hyper lens)
Next, a usage form of the hyper lens will be described.
FIG. 4 is a diagram illustrating an example of a test object, which is a plan view (a), a side view (b), an enlarged view of a C portion (c), and a sectional view (d) along the line DD ′.
The test object 41 is provided with a hole having a circular shape in plan view. The hole 41c21 and the hole 41c22 are formed side by side in the vicinity region. These diameters are made smaller than the hole 41c1. For example, the hole 41c21 and the hole 41c22 are assumed to have a hole diameter of 60 nm and a _center -to- _center distance L _{between centers} = 100 nm. However, it is not limited to this.

FIG. 5 is a layout view of microscopic observation in which a hyper lens is mounted.
First, the prism 45 is mounted on the prism holder 44 disposed under the objective lens 43.
Next, the test object 41 is placed on the prism 45.
Next, the hyper lens 30 is placed on the test object 41.
The recess 20c is arranged facing the test object 41 side. Further, for example, the hole 41c21 and the hole 41c22 are arranged so as to be in the recess 20c.

FIG. 6 is an optical path diagram in microscopic observation.
Light enters the prism 45 from one side of the prism holder 44 that is open to the atmosphere, passes through the hole 41c21 and the hole 41c22, passes through the protrusion 20d from the recess 20c, and enters the objective lens. It is observable at 43. The reflected light is emitted from the opposite side of the prism.

FIG. 7 is an explanatory diagram illustrating an example of an optical path passing through the hole 41c21 and the hole 41c22. For example, the thickness of the first non-metal layer is 50 nm, the thickness of the first metal layer is 25 nm, the thickness of the second non-metal layer is 80 nm, and the thickness of the second metal layer is 25 nm.
Light passing through the hole 41c21 and the hole 41c22 is applied to the inner wall surface of the recess 20c. At this time, one surface of the first non-metallic layer 244 of the unit laminate body 24 on the one surface 20a side of the optical super resolution medium 20 is a surface on which light is incident.
The light passes through the optical super-resolution medium 20, and the light passes through the substrate 33 and is emitted to the objective lens. That is, in the optical super-resolution medium 20, the other surface of the second metal layer 211 of the unit laminate body 21 on the other surface 20b side is a light emitting surface.

  At this time, in the optical super-resolution medium 20, the spread due to light diffraction is suppressed and the light propagates, so that the position and size of the holes are largely separated according to the tilt angle of the lens, and the substrate side Projected onto the metal layer. Thereby, this can be observed beyond the diffraction limit of light from the substrate 33 side through the objective lens of the optical microscope. Thereby, optical super-resolution can be obtained with an optical microscope. Specifically, when an objective lens having a numerical aperture of 0.9 is used, the spatial resolution can be 34 nm. This is a performance improvement of about an order of magnitude compared to the spatial resolution of 300 nm of a normal optical microscope.

The four-layer structure of the metal layer (Ag or Al) and the non-metal layer SiO ₂ is a structure that realizes propagation with suppressed diffraction spread of light having a wavelength of 410 nm, and can obtain optical super-resolution in the visible light region. it can.
The six-layer structure of the metal layer (Ag or Al) and the non-metal layer SiO ₂ is a structure that realizes propagation with suppressed diffraction spread of light with a wavelength of 510 nm, and can obtain optical super-resolution in the visible light region. it can.
The four-layer structure of the metal layer (Ag or Al or Au) and the non-metal layer Si is a structure that realizes propagation with suppressed diffraction spread of light having a wavelength of 1500 nm, and provides optical super-resolution in the near-infrared light region. Can be obtained.
For example, since the refractive index of Si (3.5) is larger than the refractive index of SiO ₂ (1.46), the optimum wavelength changes as described above.

  The unit laminate is not limited to a configuration in which four unit laminates are laminated, and may be a configuration in which three or more unit laminates are laminated. Even with this configuration, it is possible to achieve propagation while suppressing the diffraction spread of light, and this can be observed beyond the diffraction limit of light. If the number is less than 3, the thickness of the optical super-resolution medium is so small that the enlargement ratio of the hyper lens cannot be increased. In the case of more than six bodies, the optical path length passing through the optical super-resolution medium becomes long, causing a problem that the intensity of light passing through the hyper lens is greatly reduced.

  The unit laminate is not limited to a four-layer structure, and may be a six-layer or eight-layer structure. In the structure of three layers or less, when three or more unit laminates are stacked, the metal layers or non-metal layers always come into contact with each other, and the unit laminate cannot be defined correctly, and the two layers function as an optical super-resolution medium. This results in the conventional problem that the wavelength range to be made cannot be visible light, and a single layer cannot be a STIM in the first place. The five-layer structure causes the same problem as the three-layer unit laminate. The structure of 9 layers or more has the same problem as the case of 3 layers in an odd-numbered unit laminate, and is similar in any of 4 layers, 6 layers, or 8 layers in a unit laminate of 10 or more even layers. Design is possible, and the simplicity of production is impaired only by increasing the complexity of the design. Therefore, these layer structures are not preferable.

(Method for manufacturing hyper lens array)
Next, the manufacturing method of the hyper lens which is the 1st Embodiment of this invention is demonstrated.
8-9 is process drawing which shows an example of the manufacturing method of the hyper lens which is embodiment of this invention. It has an etching process and a lamination process.

(Etching process)
First, as shown in FIG. 8A, a metal mask 34 is disposed on one surface of the substrate 33. The metal mask 34 is provided with a hole 34c by a lithography method.
For example, a quartz substrate is used as the substrate, and a Cr mask is used as the metal mask.
Next, by performing immersion etching on the one surface, a desired position on one surface of FIGS. 8B and 8C and the substrate can be dug.
Next, the metal mask 34 is removed. As shown in FIG. 8D, a recess 33c is formed on one surface of the substrate.

(Lamination process)
Next, as shown in FIG. 9A, a metal layer 211 is formed.
Next, as shown in FIG. 9B, a non-metal layer 212 is formed.
Next, as shown in FIG. 9C, a metal layer 213 is formed.
Next, as shown in FIG. 9D, a non-metal layer 214 is formed.
As the film forming means, an ion beam sputtering method, a radio frequency sputtering method, or the like can be used.
Accordingly, the unit laminate 21 can be formed by alternately laminating the metal layer and the non-metal layer in this order.

Next, as shown in FIG. 9E, a metal layer 221 is formed.
Hereinafter, this is repeated and the unit laminated body 22 is formed.
Further, this is repeated to form unit laminate bodies 23 and 24.
As described above, the hyper lens 30 including the optical super resolution medium 20 can be manufactured.

(Second embodiment of the present invention)
Next, an optical super-resolution medium that is a second embodiment of the present invention will be described.
FIG. 10 is an enlarged sectional view showing another example of the optical super-resolution medium.
As shown in FIG. 10, the optical super-resolution medium 60 according to the second embodiment of the present invention is a laminate in which non-metal layers and metal layers are alternately laminated. Similar to the first embodiment of the present invention, it can be used as a hyperlens by being formed on the substrate 33 and forming concave and convex portions on both surfaces respectively.

The optical super-resolution medium 60 is composed of four unit laminated bodies 51, 52, 53, and 54.
Four unit laminated bodies 51, 52, 53, and 54 are laminated in this order.

The unit laminate body 54 includes a first non-metal layer 546, a first metal layer 545, a second non-metal layer 544, a second metal layer 543, a third non-metal layer 542, and a third metal layer 541. Are laminated.
The unit stacked body 53 includes a first non-metal layer 536, a first metal layer 535, a second non-metal layer 534, a second metal layer 533, a third non-metal layer 532, and a third metal layer 531. Are laminated.
The unit laminate body 52 includes a first non-metal layer 526, a first metal layer 525, a second non-metal layer 524, a second metal layer 523, a third non-metal layer 522, and a third metal layer 521. Are laminated.
The unit laminate body 51 includes a first non-metal layer 516, a first metal layer 515, a second non-metal layer 514, a second metal layer 513, a third non-metal layer 512, and a third metal layer 511. Are laminated.

That is, each unit laminated body 51, 52, 53, 54 is laminated so that the non-metal layer and the metal layer are in contact with each other.
Moreover, each unit laminated body 51, 52, 53, 54 is made into 6 layer structure, and is made into the same layer structure.

  In the six-layer unit laminate, (1) the thickness of the first non-metal layers 546, 536, 526, and 516 is not less than 45 nm and not more than 55 nm, and (2) the first metal layers 545, 535, 525, 515 Is not less than 0.2 times and not more than 0.5 times the thickness of the first non-metal layer 546, 536, 526, 516, and (3) the second non-metal layer 544.534, 524, 514 Of the first non-metal layers 546, 536, 526, and 516 are not less than 1.8 times and not more than 2.2 times, and (4) the second metal layers 543, 533, 523, and 513 The thickness is not less than 0.1 times and not more than 0.3 times the thickness of the first non-metal layers 546, 536, 526, 516, and (5) the third non-metal layers 542, 532, 522, 512 A thickness of 0.2 to 0.5 times the thickness of the first non-metal layer; a third metal layer 541; It is preferable that the thickness of 31,521,511 is less than 0.3 times 0.1 times or more the thickness of the first non-metallic layer 546,536,526,516.

For example, the thickness of the first non-metal layer is 51.2 nm, the thickness of the first metal layer is 14.7 nm, the thickness of the second non-metal layer is 101.8 nm, and the thickness of the second metal layer The thickness of the third non-metal layer is 15.4 nm, and the thickness of the third metal layer is 9.5 nm.
As described above, the unit laminate structure is not limited to the four-layer structure, and may be a six-layer structure or an eight-layer structure.

  In the eight-layer unit laminate, (1) the thickness of the first non-metallic layer is not less than 120 nm and not more than 140 nm, and (2) the thickness of the first metal layer is equal to the thickness of the first non-metallic layer. 0.05 to 0.08 times, and (3) the thickness of the second nonmetallic layer is 0.5 to 0.8 times the thickness of the first nonmetallic layer, 4) The thickness of the second metal layer is not less than 0.03 times and not more than 0.06 times the thickness of the first nonmetal layer, and (5) the thickness of the third nonmetal layer is the first thickness. (5) the thickness of the third metal layer is 0.06 times or more and 0.09 times the thickness of the first nonmetal layer. (7) the thickness of the fourth non-metal layer is not less than 0.35 times and not more than 0.65 times the thickness of the first non-metal layer, and (8) the thickness of the fourth metal layer The thickness is 0.03 to 0.06 times the thickness of the first non-metallic layer It is preferable that.

For example, the thickness of the first non-metal layer is 130.9 nm, the thickness of the first metal layer is 8.2 nm, the thickness of the second non-metal layer is 84.5 nm, and the thickness of the second metal layer The thickness of the third non-metallic layer is 91.3 nm, the third metal layer is 10.0 nm thick, the fourth non-metallic layer is 64.6 nm thick, The thickness of the metal layer is 5.8 nm.
As shown above, the unit laminate structure is not limited to a four-layer or six-layer structure, and may have an eight-layer structure.

  The optical super-resolution medium 20 or 60 according to the embodiment of the present invention is composed of 3 to 6 unit laminates of 4 layers, 6 layers, or 8 layers in which non-metal layers and metal layers are alternately laminated. Since the non-metal layer and the metal layer are stacked so as to be in contact with each other between the stacked bodies, the propagation of light in the inside can be described as a transmission photonic Bloch state. In principle, it is possible to know whether or not the hyper mode occurs by analyzing the light propagation characteristics of this transmission photonic Bloch state, but as a simple method to determine whether or not the hyper mode occurs There is a method for examining a transmission spectrum with respect to a wide incident angle. P-polarized light, which is perpendicular to the light incident surface and has an electric field vector in the incident surface between the incident vector and the reflection vector, is used as the incident light, and the incident angle changes in the range of 0 ° to 60 °. If the change rate of the light transmittance of the emitted light can be reduced to 20% or less when it is made incident, the necessary condition for generating the hyper mode is satisfied. When a hyper lens is formed in a wavelength region where the hyper mode occurs, light can be propagated while suppressing the diffraction spread of the light in the lens, and an image can be formed beyond the diffraction limit.

  In the optical super-resolution media 20 and 60 according to the embodiment of the present invention, one surface of the first non-metallic layer on one side is a surface on which light is incident, and one surface of the metal layer on the other side is emitted. Since the optical image is incident on the first non-metal layer and the optical image emitted from the other metal layer is a difference between the inner diameter and the outer diameter of the concave surface, the optical image is enlarged. If the optical image magnified on the emission side is greatly magnified beyond the diffraction limit, the image can be observed as it is with an ordinary optical microscope.

  An optical super-resolution medium 20 according to an embodiment of the present invention includes four unit laminates 21, 22, 23, and 24, and the thickness of the first non-metallic layer of the four unit laminates. The thickness of the first non-metallic layer is not less than 0.3 times and not more than 0.7 times the thickness of the first non-metallic layer. Is not less than 1.5 times and not more than twice the thickness of the first non-metal layer, and the thickness of the second metal layer is not less than 0.3 times and not more than 0.7 times the thickness of the first non-metal layer. Since the configuration is as follows, p-polarized light that is perpendicular to the light incident surface and has an electric field vector in the incident surface between the incident vector and the reflection vector is used as incident light, and the incident angle is 0 ° or more and 60 °. If the change rate of the light transmittance of the emitted light can be reduced to 20% or less when the incident light is changed in the range of ° or less, the hyper mode must be generated. It will meet the requirements. When a hyper lens is formed in a wavelength region where this hyper mode occurs, light can be propagated while suppressing the diffraction spread of light within the lens, and an image can be formed on the light exit surface beyond the diffraction limit.

  An optical super-resolution medium 60 according to an embodiment of the present invention includes six unit laminated bodies 51, 52, 53, and 54, and the thickness of the first non-metallic layer of the six layer unit laminated body. The thickness of the first non-metallic layer is not less than 0.2 times and not more than 0.5 times the thickness of the first non-metallic layer. Is not less than 1.8 times and not more than 2.2 times the thickness of the first nonmetal layer, and the thickness of the second metal layer is not less than 0.1 times the thickness of the first nonmetal layer and is not more than 0.1. 3 times or less, the thickness of the third non-metal layer is 0.2 to 0.5 times the thickness of the first non-metal layer, and the thickness of the third metal layer is the first The thickness of the non-metallic layer is 0.1 to 0.3 times the thickness of the non-metal layer, so that the p is perpendicular to the light incident surface and has an electric field vector in the incident surface between the incident vector and the reflection vector. Incident polarized light When the incident angle is changed within the range of 0 ° to 60 ° and the incident light is incident, the change rate of the light transmittance of the emitted light can be reduced to 20% or less. It will be. When a hyper lens is formed in a wavelength region where this hyper mode occurs, light can be propagated while suppressing the diffraction spread of light within the lens, and an image can be formed on the light exit surface beyond the diffraction limit.

  An optical super-resolution medium according to an embodiment of the present invention includes an eight-layer unit laminate, and the thickness of the first non-metal layer of the eight-layer unit laminate is 120 nm or more and 140 nm or less. The thickness of the first metal layer is 0.05 times or more and 0.08 times or less of the thickness of the first nonmetal layer, and the thickness of the second nonmetal layer is that of the first nonmetal layer. 0.5 to 0.8 times the thickness, the thickness of the second metal layer is 0.03 to 0.06 times the thickness of the first non-metal layer, The thickness of the non-metallic layer is 0.55 to 0.85 times the thickness of the first non-metallic layer, and the thickness of the third metal layer is equal to the thickness of the first non-metallic layer. The thickness of the fourth non-metal layer is not less than 0.06 times and not more than 0.09 times, and the thickness of the first non-metal layer is not less than 0.35 times and not more than 0.65 times; The thickness of the layer is 0 of the thickness of the first non-metallic layer Since 03 times or more and 0.06 times or less construction, it can be imaged beyond the diffraction limit in the surface to be light emitting.

  In the optical super-resolution media 20 and 60 according to the embodiment of the present invention, the metal layer is composed of any one metal selected from the group of Ag, Al, and Au. Therefore, based on the nature of the drude metal. An optical super-resolution medium can be a constituent element.

  In the optical super-resolution medium 20, 60 according to the embodiment of the present invention, the non-metal layer is made of Si or Si oxide, so that the production cost of the optical super-resolution medium can be greatly reduced, and the production technique is good. Facilitates fabrication because it is known.

  A hyper lens 30 according to an embodiment of the present invention includes optical super resolution media 20 and 60 and a substrate 33 to which the optical super resolution medium is bonded, and includes a first lens on one surface side of the optical super resolution medium. Since the concave portion 20c is formed on one surface of one non-metal layer and the convex portion 20d is formed on one surface of the metal layer on the other surface side of the optical super-resolution medium, the image is formed beyond the diffraction limit. Can do.

  The hyper lens 30 according to the embodiment of the present invention has a configuration in which the concave portion 10c has a substantially circular shape in a plan view and a substantially semicircular shape in a cross-sectional view, and therefore can form an image beyond the diffraction limit.

  Since the hyper lens array according to the embodiment of the present invention has a configuration in which a plurality of recesses 20c are formed, it is possible to form an image exceeding the diffraction limit at a plurality of points.

  The method for manufacturing a hyperlens according to an embodiment of the present invention includes a step of etching a surface of the substrate by a lithography method after disposing a metal mask on the surface of the substrate, and removing the metal mask, and then the metal layer and the nonmetal. Since the structure includes the step of alternately stacking the layers in this order, a hyper lens capable of forming an image beyond the diffraction limit can be easily manufactured.

  The optical super-resolution medium, the hyper lens, and the manufacturing method thereof according to the embodiments of the present invention are not limited to the above-described embodiments, and various modifications are made within the scope of the technical idea of the present invention. Can do. Specific examples of this embodiment are shown in the following examples. However, the present invention is not limited to these examples.

Example 1
(Verification of hyper mode that suppresses diffraction spread of light)
FIG. 11 is a layout diagram for examining the diffraction spread suppression of light and verifying the hyper mode.
The transmission layer in FIG. 11 is an air layer, the metal is Ag, the insulator is SiO ₂ , a Cr mask (slit width 100 nm) is used, and the incident layer is a quartz substrate. The thickness of the first metal layer (Ag) is 25 nm, the thickness of the first non-metal layer (SiO ₂ ) is 80 nm, the thickness of the second metal layer is 25 nm, and the thickness of the second non-metal layer Was made 50 nm, and the unit laminate structure had a four-layer structure. The hyper mode was verified in the SSIM in which four unit laminates were laminated. The incident light propagates upward from the lower end of FIG. 11, and the incident electric field vector E is parallel to the x axis.

FIG. 12 is a numerical calculation result showing suppression of diffraction spread of light in the previous arrangement, and is a numerical calculation result visualizing light propagation under the above conditions. In this numerical calculation, Maxwell's equation, which is a basic equation of electromagnetic waves, was executed according to the calculation methods of Non-Patent Documents 11 and 12. Experimental values were adopted for the dielectric constants of the metal layer and the nonmetal layer as in Non-Patent Document 13. The following numerical calculations are the same.
The wavelength of the incident light was 410 nm.

As shown in FIG. 12, light propagates from a slit (slit width 100 nm) provided in the Cr mask while suppressing diffraction spread, and has a width of 140 nm on the emission side, and the lower limit (0. 61 × wavelength / numerical aperture of objective lens) (Non-Patent Document 10) is smaller than 278 nm. However, the numerical aperture was set to 0.9 as a typical value. Therefore, optical super-resolution is realized, indicating that the STIM is an optical super-resolution medium having a hyper mode.

FIG. 13 shows a measured value (a) of an actual sample of a graph showing the wavelength dependency of the incident angle and transmittance, a numerical value (b) of a numerical calculation model, and a transmission photonic Bloch state (black portion). It is a graph (c) which shows.
The measured value (a) of the actual sample of the transmission spectrum obtained by changing the incident angle from 0 deg (0 °) to 60 deg (60 °) with respect to the previous optical super-resolution medium, and the corresponding numerical calculation value (b ) And a graph (c) showing the transmitted photonic Bloch state in black. k _x and k ₀ are the x component of the wave number of incident light and the wave number of light in vacuum, respectively.
The spectrum of the measured value and the numerical calculation value were almost the same. In any graph, even when the incident angle was changed from 0 ° to 60 °, the peak position and the peak spectrum shape in the vicinity of 400 nm of the transmission spectrum were hardly changed. This wavelength range corresponds to the widest transmission photonic Bloch state energy position (3 eV, arrow position) in FIG.

(Comparative Example 1)
(Verification of propagation characteristics accompanied by diffraction spread of light)
Propagation accompanied by diffraction spread of light consisting only of a Cr mask (slit width 100 nm) and a quartz substrate is verified by numerical calculation.
FIG. 14 is a numerical calculation result in which light propagation is visualized under the above conditions, and is a numerical calculation result showing the light propagation characteristic in the arrangement excluding the optical super-resolution medium in FIG.
As shown in FIG. 14, when there was no layered structure, the light proceeded from the slit provided in the Cr mask while exhibiting a diffraction spread, and the result was 800 nm width on the emission side. Thus, the conventional optical microscope has a lower limit of spatial resolution due to the diffraction spread of light.

(Example 2)
(Transmission spectrum of an optical super-resolution medium functioning at a wavelength of 510 nm)
The thickness of the first non-metal layer (SiO ₂ ) is 51.2 nm, the thickness of the first metal layer (Ag) is 14.7 nm, the thickness of the second non-metal layer is 101.8 nm, The thickness of the metal layer was 7.4 nm, the thickness of the third non-metal layer was 15.4 nm, the thickness of the third metal layer was 9.5 nm, and the unit laminate structure was a six-layer structure.
FIG. 15 shows the incident angle dependence of the transmittance spectrum of an optical super-resolution medium functioning at a wavelength of 510 nm (numerical calculation value).
It is the transmission spectrum (numerical calculation value) obtained by changing the incident angle from 0 ° to 60 ° with respect to the SSIM in which four unit laminated bodies having the six-layer structure are laminated. When the incident angle is changed from 0 ° to 60 °, the transmittance changes only by about 10% at a wavelength of 510 nm, suggesting the existence of a hyper mode. The suppression of the diffraction spread of light by the hyper mode was confirmed in the same manner as in Example 2.

(Example 3)
(Transmission spectrum of optical super-resolution medium functioning at a wavelength of 1500 nm)
The thickness of the first non-metal layer (Si) is 130.9 nm, and the thickness of the first metal layer (Ag) is 8.5 as in Example 2 except that Si is used instead of SiO ₂ . 2 nm, the thickness of the second non-metal layer is 84.5 nm, the thickness of the second metal layer is 4.7 nm, the thickness of the third non-metal layer is 91.3 nm, the thickness of the third metal layer The unit laminate was made to have an eight-layer structure with a thickness of 10.0 nm, a thickness of the fourth non-metal layer of 64.6 nm, and a thickness of the fourth metal layer of 5.8 nm.
FIG. 16 shows the incident angle dependence of the transmittance spectrum of an optical super-resolution medium functioning at a wavelength of 1500 nm (numerical calculation value).
It is the transmission spectrum (numerical calculation value) obtained by changing the incident angle from 0 ° to 60 ° with respect to the SSIM in which the four unit laminated bodies having the eight-layer structure are laminated. When the incident angle is changed from 0 ° to 60 °, the transmittance at a wavelength of 1500 nm hardly changes, suggesting the existence of a hyper mode.

Example 4
(Demonstration of optical super-resolution in an optical microscope equipped with a hyper lens)
FIG. 17 is a manufacturing process diagram of a hyper lens.
It consists of an etching process and a lamination process.

(Etching process)
First, a quartz substrate was prepared.
Next, as shown in FIG. 17A, a Cr metal mask provided with holes was disposed on one surface of the substrate.
Next, as shown in FIGS. 17B and 17C, the one surface was etched to a predetermined depth by lithography.
Next, as shown in FIG. 17D, the metal mask 34 was removed. Thus, a concave portion having a substantially circular shape in plan view and a substantially semicircular shape in sectional view was formed on one surface of the substrate. A plurality of recesses were formed in a lattice arrangement.
The planar view diameter of the recess was 1.2 μm and the depth was 0.6 μm.

(Lamination process)
Next, a metal layer made of Ag was formed to a thickness of 25 nm on the surface where the recesses were formed.
Next, a non-metal layer made of SiO _{2 was formed} to a thickness of 80 nm so as to cover the metal layer.
Next, a metal layer made of Ag was formed to a thickness of 25 nm so as to cover the non-metal layer.
Next, a non-metal layer made of SiO _{2 was formed} to a thickness of 50 nm so as to cover the metal layer.
As shown in FIG. 17E, a first unit laminate was formed by alternately laminating a metal layer (M) made of Ag and a non-metal layer (I) made of SiO ₂ in this order.
Ion beam sputtering was used as the film forming means.

Next, a metal layer was formed so as to cover the non-metal layer of the first unit laminate.
A second laminate was formed in the same manner as in the previous lamination step.

Next, a metal layer was formed so as to cover the non-metal layer of the second unit laminate.
A third laminate was formed in the same manner as in the previous lamination step.

Next, a metal layer was formed so as to cover the non-metal layer of the third unit laminate body.
A fourth laminate was formed in the same manner as in the previous lamination step.
As described above, a hyper lens provided with an optical super-resolution medium in which four unit laminates of four layers were laminated was manufactured. A plurality of hyper lenses were simultaneously formed in an array shape to form a hyper lens array.

FIG. 18 is an optical photograph of the manufactured hyper lens array.
FIG. 19 is an electron micrograph of a hyperlens array viewed from the air side.
Holes were formed so as to be located at the apex angles of equilateral triangles, the diameter of the holes was 1.2 μm, and the interval between adjacent holes was 6 μm.
FIG. 20 is a cross-sectional electron microscope image (a) of the hole and a schematic diagram (b) thereof. The white scale bar in FIG. 20 (a) indicates 1 micron.

FIG. 21 is a layout diagram of microscopic observation in which a hyper lens is mounted.
Next, as shown in FIG. 15, the test object was placed on the prism, the hyper lens substrate (HLAsubstrate) was placed on the test object, and the test object was placed under the object lens of the microscope.

FIG. 22 is an optical photograph of a hyper lens array.
FIG. 23 is a partial electron microscope image of the test object. E is an enlarged view. In the test object, a plurality of holes having a diameter of 200 nm and a hole having a diameter of 60 nm were formed. A plurality of combinations of pairs formed by arranging the holes of φ60 nm in parallel with a center-to-center distance of 71 nm.
FIG. 24 is an optical image of a portion corresponding to FIG.
The dotted circle corresponds to the hyperlens position, and the hole was clearly separated and observed in this hyperlens position. This observation image is an optical super-resolution using a hyper lens. Separate observations were not possible in parts other than the hyperlens position.

FIG. 25 is a graph (b) showing one optical super-resolution (a) and light intensity (vertical axis) along the FF ′ line (horizontal axis). It could be separated into two peaks. The peak-to-peak distance was 564.7 nm. Therefore, the magnification of the optical microscope on which the hyper lens was mounted was 564.7 / 71 = 8.0 times. From this magnification, the lower limit of the spatial resolution is a value obtained by dividing the lower limit of the spatial resolution of an ordinary optical microscope (0.61 × wavelength / numerical aperture of the objective lens) by 8.0, that is, 34 nm. It was revealed. However, the numerical aperture was set to 0.9 as a typical value.
FIG. 26 is a schematic diagram for obtaining optical super-resolution with a hyper lens array. 2 schematically shows optical super-resolution obtained by a hyperlens array using STIM as a medium.

  FIG. 27 is a graph (b) showing another optical super-resolution (a) and the light intensity (vertical axis) along the G-G ′ line (horizontal axis). It could be separated into two peaks. That is, it was proved that two objects could be observed as two optical images.

  The optical super-resolution medium of the present invention functions in the visible light region or near-infrared light region, and if this is used for a hyper lens, the observation object can be observed on the spot without using rare elements, and the probe. Therefore, in order to enable high-speed and fluorescent label-free optical super-resolution observation, it can be used in the microscope industry and the like.

DESCRIPTION OF SYMBOLS 20 ... Optical super-resolution medium, 20a ... One side, 20b ... Other side, 20c ... Concave part, 20d ... Convex part, 21, 22, 23, 24 ... Unit laminated body, 30 ... Hyper lens, 33 ... Substrate, 33c ... Hole 34, metal mask, 34c, hole, 41 ... test object, 41c1, 41c21, 41c22 ... hole, 42 ... substrate, 43 ... objective lens, 45 ... prism, 44 ... prism holder, 60 ... optical super solution Image medium, 211, 221, 231, 241 ... first metal layer, 212, 222, 232, 242 ... first non-metal layer, 213, 223, 233, 243 ... second metal layer, 214, 224, 234, 244 ... second non-metal layer, 511, 521, 531, 541 ... first metal layer, 512, 522, 532, 542 ... first non-metal layer, 513, 523, 5 3, 543 ... second metal layer, 514, 524, 534, 544 ... second non-metal layer, 515, 525, 535, 545 ... third metal layer, 516, 526, 536, 546 ... third Non-metallic layer.

Claims (11)

  Three, six or less unit laminates of four, six or eight layers in which nonmetal layers and metal layers are alternately laminated are laminated so that the nonmetal layers and the metal layers are in contact with each other between the unit laminates. An optical super-resolution medium. One surface of the first non-metallic layer on one surface side is a surface on which light is incident,
2. The optical super-resolution medium according to claim 1, wherein one surface of the metal layer on the other surface side is a surface from which light is emitted.   A four-layer unit laminate, wherein the thickness of the first non-metal layer of the four-layer unit laminate is not less than 45 nm and not more than 55 nm, and the thickness of the first metal layer is the first non-layer. 0.3 to 0.7 times the thickness of the metal layer, the thickness of the second nonmetal layer is 1.5 to 2 times the thickness of the first nonmetal layer, 2. The optical super-resolution medium according to claim 1, wherein the thickness of the second metal layer is not less than 0.3 times and not more than 0.7 times the thickness of the first non-metal layer.   A six-layer unit laminate, wherein the thickness of the first non-metal layer of the six-layer unit laminate is not less than 45 nm and not more than 55 nm, and the thickness of the first metal layer is the first non-layer. The thickness of the metal layer is 0.2 times or more and 0.5 times or less, and the thickness of the second nonmetal layer is 1.8 times or more and 2.2 times or less of the thickness of the first nonmetal layer. And the thickness of the second metal layer is not less than 0.1 times and not more than 0.3 times the thickness of the first non-metal layer, and the thickness of the third non-metal layer is the first non-metal layer. The thickness of the third metal layer is not less than 0.2 times and not more than 0.5 times, and the thickness of the third metal layer is not less than 0.1 times and not more than 0.3 times the thickness of the first non-metal layer. The optical super-resolution medium according to claim 1.   An eight-layer unit laminate, wherein the first non-metal layer of the eight-layer unit laminate has a thickness of 120 nm or more and 140 nm or less, and the first metal layer has a thickness of the first non-layer. The thickness of the metal layer is 0.05 times or more and 0.08 times or less, and the thickness of the second nonmetal layer is 0.5 times or more and 0.8 times or less of the thickness of the first nonmetal layer. The thickness of the second metal layer is not less than 0.03 times and not more than 0.06 times the thickness of the first non-metal layer, and the thickness of the third non-metal layer is the first non-metal layer 0.55 to 0.85 times the thickness of the first metal layer, the thickness of the third metal layer is 0.06 to 0.09 times the thickness of the first non-metal layer, The thickness of the fourth non-metallic layer is 0.35 to 0.65 times the thickness of the first non-metallic layer, and the thickness of the fourth metal layer is the thickness of the first non-metallic layer. 0.03 times or more and 0.06 times or less of Optical super-resolution medium of claim 1,.   The optical super-resolution medium according to any one of claims 1 to 4, wherein the metal layer is made of any one metal selected from the group consisting of Ag, Al, and Au.   The optical super-resolution medium according to claim 1, wherein the non-metallic layer is made of Si or Si oxide. The optical super-resolution medium according to any one of claims 1 to 7,
A substrate to which the optical super-resolution medium is bonded,
A recess is formed on one surface of the first non-metallic layer on one surface side of the optical super-resolution medium,
A hyper lens, wherein a convex portion is formed on one surface of the metal layer on the other surface side of the optical super-resolution medium.   The hyper lens according to claim 8, wherein the concave portion has a substantially circular shape in a plan view and a substantially semicircular shape in a sectional view.   A hyperlens array comprising a plurality of hyperlenses according to claim 8 or 9. It is a manufacturing method of the hyper lens according to claim 8 or 9,
A step of etching the one surface by lithography after disposing a metal mask on one surface of the substrate;
And a step of alternately laminating a metal layer and a non-metal layer in this order after removing the metal mask.