JP2016034193A - Liquid cooling structure thin type coreless linear motor of piping sandwich type - Google Patents
Liquid cooling structure thin type coreless linear motor of piping sandwich type Download PDFInfo
- Publication number
- JP2016034193A JP2016034193A JP2014156207A JP2014156207A JP2016034193A JP 2016034193 A JP2016034193 A JP 2016034193A JP 2014156207 A JP2014156207 A JP 2014156207A JP 2014156207 A JP2014156207 A JP 2014156207A JP 2016034193 A JP2016034193 A JP 2016034193A
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- Prior art keywords
- coil
- piping
- pipe
- flow path
- coolant
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Motor Or Generator Cooling System (AREA)
- Linear Motors (AREA)
Abstract
Description
本発明は、コアレスリニアモータの電磁巻線コイル(以下コイル)を、効果的かつコンパクトに液体で冷却する方法に関するものである。 The present invention relates to a method for effectively and compactly cooling an electromagnetic winding coil (hereinafter referred to as a coil) of a coreless linear motor with a liquid.
一般的にコアレスリニアモータの液冷方式としてはコイルを支持する金属製のフレームに流路を設けてコイルを間接的に冷却する方法が採られている。
しかし、それでは冷却効率が低いためコイル直近に流路を設けて効果的に冷却する方法が求められている。
In general, as a liquid cooling method for a coreless linear motor, a method of indirectly cooling a coil by providing a flow path in a metal frame that supports the coil is employed.
However, since the cooling efficiency is low, there is a demand for a method of effectively cooling by providing a flow path near the coil.
永久磁石と組合せて推力を発生する同期型コアレスリニアモータのコイルユニットを効果的かつコンパクトに冷却する液冷方法である。 This is a liquid cooling method for effectively and compactly cooling a coil unit of a synchronous coreless linear motor that generates thrust in combination with a permanent magnet.
コアレスリニアモータで大きな定格推力が必要な場合や周囲環境に与える熱的影響を極力抑えたい場合には、コイルの発熱を低く抑えなければならない。
そこで、発熱源であるコイル直近に冷却液を通すことにより効果的にコイルを冷却可能な構造を提供する。
When a coreless linear motor requires a large rated thrust or when it is desired to minimize the thermal influence on the surrounding environment, the heat generation of the coil must be kept low.
In view of this, a structure is provided in which the coil can be effectively cooled by passing a coolant in the vicinity of the coil, which is a heat generation source.
本発明は、コイル巻線を厚さ方向に二分割してそこに冷却液の流路となる配管を配置するサンドイッチ構造とした。
併せて、挟みこんだ冷却液流路である金属管の断面形状を円形からだ円形に圧縮成型することにより、モータの厚さ方向の寸法増加を小さく抑えた。
In the present invention, the coil winding is divided into two in the thickness direction, and a sandwich structure is provided in which a pipe serving as a coolant flow path is arranged.
At the same time, the cross-sectional shape of the metal pipe, which is the sandwiched coolant flow path, is compression-molded into a circular to ellipse shape, thereby minimizing the increase in dimension in the thickness direction of the motor.
本発明は、コイル巻線を厚さ方向に二分割してそこに冷却液の流路となる配管を通すサンドイッチ構造とすることで、発熱源であるコイル巻線の中心部を効率良く冷却することを可能とした。
モータの厚さ方向の寸法増加が少ないためモータ性能とモータ効率の低下を少なくできた。
冷却液流路は1本の金属管を曲げて製作するため、モータ内部での冷却液漏れの危険がなくなった。
The present invention efficiently cools the central portion of the coil winding, which is a heat source, by dividing the coil winding into two in the thickness direction and passing through the piping that serves as a coolant flow path therethrough. Made it possible.
The decrease in motor performance and motor efficiency can be reduced because there is little increase in dimension in the motor thickness direction.
The coolant flow path is made by bending a single metal tube, eliminating the risk of coolant leakage inside the motor.
コイルの巻線を厚さ方向に二分割してそこに流路形状に曲げ加工と管断面をつぶし加工をされた冷却液配管を挟みこむ。
コイル、冷却液配管、配線は、樹脂モールドにより金属製フレームと一体化される。
The coil winding is divided into two in the thickness direction, and a coolant pipe that is bent into a flow path shape and crushes the cross section of the pipe is sandwiched there.
The coil, the coolant pipe, and the wiring are integrated with the metal frame by a resin mold.
Claims (7)
配管断面をだ円形状にすることでコイル部の厚みの増加を小さくすることが可能となる。 In order to suppress the increase in dimension in the thickness direction and expand the heat transfer area to the coil surface, the coolant pipe has an elliptical shape in which a circular cross-section pipe bent in advance to the shape of the piping route is compressed and deformed in the coil thickness direction. Mold.
By making the pipe cross section elliptical, it is possible to reduce the increase in the thickness of the coil portion.
併せて配管を樹脂補強材として利用することでコイルユニットの剛性が向上する。 Fixing the coolant piping with resin that molds the coil eliminates the need for piping fixing parts.
In addition, the rigidity of the coil unit is improved by using the piping as a resin reinforcing material.
及び熱による機械的変位を極力低減させることを可能とした。 Improving the rated thrust and eliminating the influence of heat on the surroundings by arranging the coolant piping in the immediate vicinity of the coil and efficiently reducing the heat generation of the coil,
In addition, the mechanical displacement due to heat can be reduced as much as possible.
金属管を曲げ加工して流路を形成する方式では金属フレームの長さに制限が無い。 In the method of providing a flow path in the metal frame and indirectly cooling the coil, the depth of the flow path is processed by gun drilling, but the metal frame length is limited.
There is no limitation on the length of the metal frame in the system in which the flow path is formed by bending a metal tube.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014156207A JP2016034193A (en) | 2014-07-31 | 2014-07-31 | Liquid cooling structure thin type coreless linear motor of piping sandwich type |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014156207A JP2016034193A (en) | 2014-07-31 | 2014-07-31 | Liquid cooling structure thin type coreless linear motor of piping sandwich type |
Publications (1)
Publication Number | Publication Date |
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JP2016034193A true JP2016034193A (en) | 2016-03-10 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2014156207A Pending JP2016034193A (en) | 2014-07-31 | 2014-07-31 | Liquid cooling structure thin type coreless linear motor of piping sandwich type |
Country Status (1)
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JP (1) | JP2016034193A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110637410A (en) * | 2017-05-26 | 2019-12-31 | Asml荷兰有限公司 | Actuator, linear motor and lithographic apparatus |
-
2014
- 2014-07-31 JP JP2014156207A patent/JP2016034193A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110637410A (en) * | 2017-05-26 | 2019-12-31 | Asml荷兰有限公司 | Actuator, linear motor and lithographic apparatus |
CN110637410B (en) * | 2017-05-26 | 2021-11-16 | Asml荷兰有限公司 | Actuator, linear motor and lithographic apparatus |
US11539280B2 (en) | 2017-05-26 | 2022-12-27 | Asml Netherlands B.V. | Actuator, linear motor and lithographic apparatus |
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