JP2016033613A - MEMS device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a MEMS device capable of improving driving force of a movable part without increasing the size of the whole device.SOLUTION: A MEMS device includes: a substrate; a movable part having a magnetic body, and capable of moving in a tilt manner relatively to the substrate; a fixation part having a first magnetic pole and a second magnetic pole capable of applying a magnetic field to the magnetic body; and a conductive closed loop provided on the first magnetic pole side or the second magnetic pole side, with respect to the magnetic body. In the closed loop, the loop surface of the closed loop is arranged in a direction crossing a direction of the magnetic field, in the periphery of an area positioned between the magnetic body and the first magnetic pole or the second magnetic pole.SELECTED DRAWING: Figure 4

Description

  The present specification relates to a MEMS (Micro Electro Mechanical Systems) apparatus.

  2. Description of the Related Art A MEMS device including a substrate and a movable portion that can be tilted relative to the substrate is known. Such a MEMS device is applied as an optical deflection device, for example. In this type of optical deflection apparatus, the mirror is fixed to the movable part, and the angle of the mirror is adjusted by tilting the movable part with respect to the substrate.

  One method for tilting the movable part is electromagnetic driving. Patent Document 1 describes an electromagnetically driven MEMS device in which a permanent magnet is fixed to a movable part, and the movable part can be tilted by applying a magnetic field to the permanent magnet by an electromagnet.

JP 2011-197233 A

  In the MEMS device of Patent Document 1, in order to increase the driving force of the movable part, it is generally performed to increase the magnetic field of the electromagnet by increasing the number of coil turns of the electromagnet. When the number of coil turns is increased, the electromagnet must be enlarged, and it is not easy to improve the driving force of the movable part with a limited size. In general, an electromagnet is larger than a MEMS structure such as a movable part. When the electromagnet is enlarged, the entire MEMS device must be enlarged.

  A MEMS device disclosed in the present specification includes a substrate, a movable portion that has a magnetic body and can be tilted relative to the substrate, and a first magnetic pole and a second magnetic pole that can apply a magnetic field to the magnetic body. A fixed portion and a conductive closed loop provided on the first magnetic pole side or the second magnetic pole side with respect to the magnetic body are provided. The closed loop is disposed around a region located between the magnetic body and the first magnetic pole or the second magnetic pole so that the loop surface of the closed loop intersects the direction of the magnetic field.

  In the above MEMS device, an induced current flows in a closed loop by the magnetic field applied by the first magnetic pole and the second magnetic pole. This induced current cancels the magnetic field applied by the first magnetic pole and the second magnetic pole in the closed loop, and generates an induced magnetic field in a direction that strengthens the magnetic field applied by the first magnetic pole and the second magnetic pole outside the closed loop. . Since the closed loop is disposed around a region located between the magnetic body and the first magnetic pole or the second magnetic pole, the magnetic field applied to the magnetic body is strengthened by the induced magnetic field generated outside the closed loop. By the closed loop, the magnetic field applied to the magnetic body is strengthened, and the driving force of the movable part is improved. By providing the closed loop, the driving force of the movable portion can be improved without increasing the electromagnet.

  In the above MEMS device, the closed loop may be fixed to the movable part. Further, the closed loop may be fixed to the fixing portion.

  In the above MEMS device, the magnetic body has the N pole and the S pole at both ends, and one of the N pole and the S pole is fixed to the movable portion as the third magnetic pole, and the other is the fourth magnetic pole and the first magnetic pole and the first magnetic pole. You may arrange | position between 2 magnetic poles. In this case, the closed loop is preferably disposed around a region located between the fourth magnetic pole and the first magnetic pole or the second magnetic pole.

  In the MEMS device disclosed in the present application, the conductive loop may be an open / close type including a switch. The MEMS device includes a substrate, a movable portion having a magnetic body and capable of tilting relative to the substrate, a fixed portion including a first magnetic pole and a second magnetic pole capable of applying a magnetic field to the magnetic body, And a conductive open / close loop provided on the first magnetic pole side or the second magnetic pole side, which can be opened and closed by a switch. The open / close loop is arranged so that its loop surface intersects the direction of the magnetic field. When the movable part tilts, when the open / close loop is located around the region located between the magnetic body and the first magnetic pole or the second magnetic pole, the switch is closed, and the open / close loop is And the first magnetic pole or the second magnetic pole, the switch is opened.

  The MEMS device disclosed in the present application may further include a control device that controls the magnetic fields of the first magnetic pole and the second magnetic pole. For example, when the first magnetic pole and the second magnetic pole are electromagnets, the control device controls the magnetic field of the first magnetic pole and the second magnetic pole by controlling the current signal input to the first magnetic pole and the second magnetic pole. It may be a control device. In this case, when the induced current flows through the closed loop or the open / close loop when the induced current does not flow through the closed loop or the open / close loop, when the phase of the magnetic field of the first magnetic pole and the second magnetic pole advances by dt, the control device May perform control to delay the phase of the current signal input to the first magnetic pole and the second magnetic pole by dt.

  According to the technology disclosed in this specification, a MEMS device capable of improving the driving force of a movable part without increasing the size of the entire MEMS device is provided.

1 is a perspective view showing a schematic configuration of an optical deflection apparatus 1. FIG. It is a figure which shows notionally the state which looked at a part of optical deflecting device 1 from the side. It is a figure which shows notionally the state which looked at a part of optical deflecting device 1 from the side. It is a figure which shows notionally an example of the closed loop arrange | positioned at the magnetic pole of a core. It is a figure which shows notionally an example of the closed loop arrange | positioned at the magnetic pole of a core. It is a figure explaining that the magnetic field applied to a permanent magnet by the magnetic pole of a core changes with the induced current of a closed loop. It is a figure which shows the positional relationship of the area | region where the magnetic field is strengthened by the permanent magnet of the optical deflection | deviation apparatus 1, and a closed loop induced current. It is a figure which shows notionally the state which looked at a part of optical deflection device concerning a modification from the side. It is a figure which shows notionally the state which looked at a part of optical deflection device concerning a modification from the side. It is a figure which shows notionally an example of the open / close-type loop arrange | positioned at the magnetic pole of the core which concerns on a modification. It is a figure which shows notionally an example of the closed loop arrange | positioned at the magnetic pole of the core which concerns on a modification. It is a figure which shows notionally an example of the closed loop arrange | positioned at the magnetic pole of the core which concerns on a modification.

(Example)
Hereinafter, the optical deflection apparatus 1 which is the MEMS apparatus according to the embodiment will be described with reference to FIGS. The optical deflecting device 1 includes an upper substrate 10, a lower substrate 20, a movable part 12, and cores 31 and 32. In FIG. 1, the upper substrate 10 and the lower substrate 20 are illustrated as being separated from each other, but actually, the lower surface of the upper substrate 10 and the upper surface of the lower substrate 20 are bonded. The upper part of the cores 31 and 32 (the positive direction of the z-axis) is disposed inside. The upper substrate 10 and the movable portion 12 are integrally formed using a semiconductor substrate as a material and using MEMS technology. The lower substrate 20 is made of a nonmagnetic material, and the cores 31 and 32 and the upper substrate 10 are fixed via the lower substrate 20. A coil is wound around each of the cores 31 and 32, but the illustration is omitted.

  The movable portion 12 has a gimbal structure, and includes a support frame 112, a mirror structure 140, flexible beams 111a and 111b connecting the upper substrate 10 and the support frame 112, a support frame 112, and a mirror structure 140. Are provided with flexible beams 121a and 121b. The flexible beams 111a and 111b extend in the y-axis direction shown in FIG. 1 and are twisted around the y-axis. Accordingly, the support frame 112 rotates around the y axis, and both end portions in the x direction can tilt in the z direction with respect to the upper substrate 10. The flexible beams 121a and 121b extend in the x-axis direction shown in FIG. 1 and are twisted around the x-axis. Accordingly, the mirror structure 140 rotates around the x axis, and both end portions in the y direction can tilt in the z direction with respect to the upper substrate 10.

The upper surface (the surface in the positive z-axis direction) of the mirror structure 140 is a mirror, which deflects light. A rectangular parallelepiped permanent magnet 150 is fixed to the lower surface (surface in the negative direction of the z-axis) of the mirror structure 140. As the permanent magnet 150, for example, a neodymium magnet (Nd ₂ Fe ₁₄ B), a samarium cobalt magnet (SmCo ₅ (1-5 system), Sm ₂ Co ₁₇ (2-17 system), etc.), a ferrite magnet, or the like is used. Can do. In the present embodiment, as shown in FIG. 7, the permanent magnet 150 has an S pole on the movable part 12 side (the positive direction side of the z axis) and N on the cores 31 and 32 side (the negative direction side of the z axis). Although it is a pole, the direction of the N pole and the S pole can be reversed.

  As shown in FIGS. 1 to 3, the substantially U-shaped core 31 includes magnetic poles 311 and 312 that face each other in the x direction across the lower part of the permanent magnet 150. The substantially U-shaped core 32 includes magnetic poles 321 and 322 that face each other in the y direction across the lower part of the permanent magnet 150. The core 31 extends obliquely upward from the portion extending in the z direction toward the magnetic poles 311, 312 (that is, toward the permanent magnet 150), and approaches the upper substrate 10 toward the magnetic poles 311, 312. The core 32 extends obliquely upward from the portion extending in the z direction toward the magnetic poles 321 and 322 (that is, toward the permanent magnet 150), and approaches the upper substrate 10 toward the magnetic poles 321 and 322. The core 31 is symmetric with respect to the yz plane passing through the center in the x direction, and the core 32 is symmetric with respect to the zx plane passing through the center in the y direction. In FIG. 1, the optical deflecting device 1 shows a state in which the upper substrate 10 is disposed on the upper side and the cores 31 and 32 are disposed on the lower side. However, the installation direction of the optical deflecting device 1 is not limited to this direction. .

  Although not shown, the cores 31 and 32 are wound with a coil connected to an AC power source. When a current flows through the coil wound around the core 31 and a magnetic field in the x-axis direction is applied to the permanent magnet 150 by the magnetic poles 311 and 312, the flexible beams 111 a and 111 b are twisted to support the upper substrate 10. The frame 112 tilts around the y axis. When a current flows through the coil wound around the core 32 and a magnetic field in the y-axis direction is applied to the permanent magnet 150 by the magnetic poles 321 and 322, the flexible beams 121a and 121b are twisted to cause the mirror structure 140 to move to the x-axis. Tilt around. The optical deflection apparatus 1 further includes a control device (not shown) that can control the current flowing in the coils wound around the cores 31 and 32, respectively. By controlling the direction and magnitude of the current flowing in the coils wound around the cores 31 and 32 by the control device, it is possible to control the tilting direction and tilting angle of the support frame 112 and the mirror structure 140. Although not limited, a current having a frequency different from the torsional resonance frequency around the y axis of the mirror structure 140 flows in the coil of the core 31, and the coil around the x axis of the mirror structure 140 flows in the coil of the core 32. It is preferable that a current having a torsional resonance frequency flows.

  As shown in FIG. 4, eight closed loops 40a, 40b, 40c, 40d, 40f, 40g, 40h, and 40i are attached to the substantially square surface of the magnetic pole 311 of the optical deflector 1 with an insulating adhesive. It is attached. The eight closed loops 40 a, 40 b, 40 c, 40 d, 40 f, 40 g, 40 h, 40 i are substantially square conductive metal wire loops, and are arranged so as to surround the central region 42 on the surface of the magnetic pole 311. ing. As shown in FIG. 5, eight closed loops 41a, 41b, 41c, 41d, 41f, 41g, 41h, and 41i are attached to the substantially square surface of the magnetic pole 312 of the optical deflector 1 with an insulating adhesive. It is attached. The eight closed loops 41 a, 41 b, 41 c, 41 d, 41 f, 41 g, 41 h, 41 i are square conductive metal wire loops arranged so as to surround the central region 43 on the surface of the magnetic pole 312. Yes. Closed loop 40a and closed loop 41a, closed loop 40b and closed loop 41b, closed loop 40c and closed loop 41c, closed loop 40d and closed loop 41d, closed loop 40f and closed loop 41f, closed loop 40g and closed loop 41g, closed loop 40h and closed loop 41h, closed loop 40i and closed loop 41i, respectively They are arranged at the same position in the y direction and the z direction, and face the x direction. Therefore, the region 42 and the region 43 are at the same position in the y direction and the z direction, respectively, and face each other with the N pole of the permanent magnet 150 interposed therebetween. When a current flows through the coil of the core 31 and a magnetic field in the positive direction of the x-axis is applied to the permanent magnet 150 by the magnetic poles 311 and 312, as shown in FIGS. A clockwise induced current flows through the closed loops 41a to 41d and 41f to 41i when viewed from the positive direction of the x axis. The induced current generates a negative magnetic flux in the x-axis in each of the closed loops 40a to 40d, 40f to i, and the closed loops 41a to 41d and 41f to 41i. Magnetic flux is generated.

  FIG. 6 is a diagram showing that the magnetic field applied to the permanent magnet 150 by the magnetic poles 311 and 312 of the core 31 changes depending on the induced currents of the closed loops 40a to 40d and 40f to i and the closed loops 41a to 41d and 41f to 41i. is there. The vertical axis indicates the strength of the magnetic field, and the horizontal axis indicates time. The waveform indicated by reference numeral 91 is the permanent magnet 150 when an alternating current is passed through the coil wound around the core 31 in the state where the closed loops 40a to 40d, 40f to i, and the closed loops 41a to 41d and 41f to i exist. The time change of the magnetic field applied to is shown. The waveform indicated by reference numeral 92 is the permanent magnet 150 when an alternating current is passed through the coil wound around the core 31 in a state where the closed loops 40a to 40d, 40f to i, and the closed loops 41a to 41d and 41f to 41i do not exist. The time change of the magnetic field applied to is shown. The phase of the waveform 91 when the closed loops 40a to 40d, 40f to i, and the closed loops 41a to 41d and 41f to i are present is advanced by the amount indicated by dt than the waveform 92 when each closed loop does not exist. Since the optical deflecting device 1 includes closed loops 40 a to d and 40 f to i and closed loops 41 a to d and 41 f to i, the movable unit 12 is driven by a magnetic field indicated by a waveform 92. For this reason, in the optical deflection apparatus 1, the control device delays the phase of the current signal input to the coil wound around the core 31 according to the time dt, for example, in order to compensate for the advance of the phase. Specifically, for example, the phase of the current signal input to the coil wound around the core 31 is delayed by time dt. As a result, the movable portion 12 can be driven with a desired waveform as in the case where there is no closed loop.

  The broken lines indicated by reference numbers 45a and 45b in FIG. 7 represent the upper end 45a and the lower end 45b of the region sandwiched between the opposing region 42 and region 43, respectively. The N pole of the permanent magnet 150 is located between the upper end 45a and the lower end 45b, and is in a region sandwiched between the opposing region 42 and the region 43 (in this region, closed loops 40a to 40d, 40f to i). , The magnetic field is enhanced by the induced current flowing in the closed loops 41a to 41d and 41f to 41i. The south pole of the permanent magnet 150 is located above the upper end 45a and is disposed outside the region sandwiched between the region 42 and the region 43 facing each other. In the case of the optical deflecting device 1 in which the permanent magnet 150 is arranged in the direction of FIG. 7, among the magnetic poles of the permanent magnet 150, the N pole that is relatively far from the S pole that is relatively close to the rotation axis of the movable portion 12 is stronger. When the magnetic field is applied, the torque for moving the movable part 12 can be increased, and the movable part 12 can be driven greatly. Furthermore, since the directions of the magnetic forces received by the N and S poles from the same direction of the magnetic field are opposite to each other, if the magnetic field applied to the S pole of the permanent magnet 150 is strengthened, the driving of the movable portion 12 is hindered. It is done. That is, in order to drive the movable part 12 greatly, it is preferable that the magnetic field applied to the south pole of the permanent magnet 150 is not strengthened. In the optical deflecting device 1, the permanent magnet 150 positioned in the region sandwiched between the region 42 and the region 43 by the induced current flowing in the closed loops 40 a to d and 40 f to i and the closed loops 41 a to d and 41 f to i. The magnetic field applied to the N pole is strengthened and the magnetic field applied to the S pole is weakened. For this reason, the torque for moving the movable part 12 can be increased.

  As described above, in the optical deflecting device 1, eight closed loops are provided on the substantially square surfaces of the magnetic poles 311 and 312 facing each other in the x direction across the lower part of the permanent magnet 150 fixed to the lower surface of the mirror structure 140. 40a-d, 40f-i and closed loops 41a-d, 41f-i are installed. The closed loops 40a to 40d, 40f to 40i are arranged around a region located between the permanent magnet 150 and the magnetic pole 311. The normal vectors of these loop surfaces are in the x-axis direction, and the magnetic poles 311 and 312 are arranged. Is parallel to the direction of the magnetic field in the positive direction of the x axis applied to the permanent magnet 150. The closed loops 41a to 41d and 41f to 41i are arranged around a region located between the permanent magnet 150 and the magnetic pole 312. The normal vectors of those loop surfaces are in the x-axis direction, and the magnetic pole 311. , 312 is parallel to the direction of the positive magnetic field of the x axis applied to the permanent magnet 150. In other words, the loop surfaces of the closed loops 40a to 40d, 40f to i, and the closed loops 41a to 41d and 41f to i are arranged in a direction intersecting the direction of the magnetic field applied to the permanent magnet 150 by the magnetic poles 311 and 312.

  Eight closed loops 40a to 40d, 40f to i, and eight closed loops 41a to 41d and 41f to i respectively have nine closed loops in the z direction and the y direction on the surfaces of the magnetic pole 311 and the magnetic pole 312. They are arranged in a 3 × 3 arrangement, and are arranged in a positional relationship from which the closed loop located at the center is removed. The closed loops 40a to 40d and 40f to i are arranged so as to surround the area 42 as a whole, and the area 42 is arranged outside the closed loops 40a to 40d and 40f to i. By being placed in the magnetic field generated by the magnetic poles 311 and 312, an induced current flows through the closed loops 40 a to 40 d and 40 f to i. Since the region 42 is disposed outside the closed loops 40a to 40d and 40f to i, in the region 42, the magnetic field generated by the magnetic poles 311 and 312 is reinforced by the induced magnetic field generated by the closed loops 40a to 40d and 40f to i. Is done. Further, the closed loops 41a to 41d and 41f to i are arranged so as to surround the area 43, and the area 43 is arranged outside the closed loops 41a to 41d and 41f to i. By being placed in the magnetic field generated by the magnetic poles 311, 312, an induced current flows in the closed loops 41 a to 41 d and 41 f to i. Since the region 43 is arranged outside the closed loops 41a to 41d and 41f to i, in the region 43, the magnetic field generated by the magnetic poles 311 and 312 is strengthened by the induction magnetic field generated by the closed loops 41a to 41d and 41f to i. Is done. Since the N pole of the permanent magnet 150 is arranged in a region sandwiched between the region 42 and the region 43 facing each other, the permanent magnet 150 flows in the closed loops 40a to 40d, 40f to i, and the closed loops 41a to 41d and 41f to 41i. The magnetic field applied to the permanent magnet 150 is enhanced by the induced current. For this reason, in the optical deflecting device 1, the driving force of the movable part 12 can be improved without increasing the members constituting the electromagnet such as the core 31. In the above-described embodiment, the case where the core 31 is provided with the closed loop 40a and the like has been described as an example. However, similarly between the two magnetic poles 321 and 322 of the core 32 and the permanent magnet 150, a conductive closed loop is also provided. May be arranged. The closed loop is arranged in a direction in which the loop surface intersects the direction (y direction) of the magnetic field applied to the permanent magnet 150 by the two magnetic poles 321 and 322 of the core 32. Also, in this case, the control device delays the phase of the current signal input to the coil wound around the core 32 by the amount of advance of the phase that occurs when the induced current flows in the closed loop arranged for the core 32. May be.

(Modification)
In the optical deflecting device 1, the configuration in which the closed loops 40 a to d and 40 f to i and the closed loops 41 a to 41 d and 41 f to i are fixed to the two magnetic poles 311 and 312 facing each other of the core 31 has been described as an example. The position where the closed loop is installed is not limited to this. For example, as shown in FIG. 8, closed loops may be arranged on plate-like members 141 and 142 extending downward from the upper substrate 10a. The plate-like members 141 and 142 are rectangular flat plates, the plane thereof is orthogonal to the x direction, and the lower end thereof extends to the lower end of the permanent magnet 150. A plate-shaped member 141 is disposed between the permanent magnet 150 and the magnetic pole 311, and a plate-shaped member 142 is disposed between the permanent magnet 150 and the magnetic pole 312. For example, at least one of the surface 141a on the magnetic pole 311 side of the plate member 141, the surface 141b on the permanent magnet 150 side, the surface 142a on the magnetic pole 312 side of the plate member 142, and the surface 142b on the permanent magnet 150 side is insulated. The closed loop may be bonded and fixed using a sex adhesive or the like.

  9, plate-like members 431 and 432 extending from the lower substrate 20 side toward the upper substrate 10 side are provided, and the surface 431a on the magnetic pole 311 side and the surface 431b on the permanent magnet 150 side of the plate-like member 431 are provided. Alternatively, a closed loop may be bonded and fixed to at least one of the surface 432a on the magnetic pole 312 side and the surface 432b on the permanent magnet 150 side of the plate member 432 using an insulating adhesive or the like. Moreover, although FIG. 4 illustrated and demonstrated the form which arrange | positions the closed loops 40a-d and 40f-i on the same plane surrounding the area | region 42, all the closed loops do not need to exist on the same plane. For example, in FIG. 4, the closed loops 40 a to 40 d and 40 f to i all have the same position in the x direction, but the position of each closed loop in the x direction may be shifted.

  Further, the optical deflecting device may include an open / closed conductive loop including a switch instead of the closed loop. In FIG. 10, nine open / close-type conductive loops 50 a to 50 i may be used instead of the eight closed loops 40 a to 40 d and 40 f to i illustrated in FIG. 4. The nine loops 50a to 50i are arranged in a 3 × 3 array in the z direction and the y direction. The eight loops 50a to 50d and 50f to i are arranged at the same positions as the eight closed loops 40a to 40d and 40f to i shown in FIG. The loop 50e is arranged at the position of the region 42 shown in FIG. The eight loops 50a to 50d, 50f to 50i are arranged so as to surround the loop 50e.

  In this optical deflecting device, nine loops 50a to 50i are connected to a control circuit. The control circuit can switch the switching of the loops 50a to 50i. As shown in FIG. 10, when the switch of the loop 50e is opened and the switches of the loops 50a to d and 50f to i are closed, an induction magnetic field is generated by the loops 50a to 50d and 50f to i, as shown in FIG. In a region similar to the region 42 (a region where the loop 50e is disposed in FIG. 10), the magnetic field applied to the permanent magnet 150 is strengthened by the magnetic poles 311 and 312. Note that this open / close loop can be similarly arranged with respect to the core 32.

  In the form shown in FIG. 10, the control circuit can also switch the opening and closing of the loops 50 a to 50 i according to the tilt of the movable portion 12. For example, when the inclination of the movable part is small, the switch of the loop 50e is controlled to be open and the switches of the loops 50a to d and 50f to i are closed as shown in FIG. When the position of the N pole of the permanent magnet 150 moves upward, the loop 50b may be opened and the other loops 50a and 50c to i may be closed. When the position of the permanent magnet 150 changes due to the tilting of the movable portion 12, when the positions of the loops 50 a to 50 i are around the region located between the permanent magnet 150 and the magnetic pole 311, the switch is turned on. When it is within the region located between the permanent magnet 150 and the magnetic pole 311, it is applied to the permanent magnet 150 regardless of the tilt angle of the movable part 12 by controlling the switch to open. Can be strengthened.

  Further, the positional relationship in which the closed loop and the open / close loop are arranged is not limited to the positional relationship shown in FIGS. The closed loop or the open / close loop does not need to surround the entire periphery of the region where the magnetic field is to be strengthened. If at least one loop is arranged around the region, the effect of strengthening the magnetic field can be obtained. For example, as shown in FIG. 11, no closed loop or open / close loop is arranged in the vertical vertical direction (z direction) and horizontal direction (y direction) of the region 53 where the magnetic field is to be strengthened. The closed loops 51a to 51d may be arranged in an oblique vertical direction of approximately 45 ° with respect to the horizontal direction.

  Further, the closed loop or the open / close loop need not be substantially square, but may be other polygonal shape, circular shape, elliptical shape, or indefinite shape. For example, it may be L-shaped like closed loops 55a to 55d shown in FIG. Also, all loops need not be the same shape and size. The closed loops 51a to 51d and 55a to 55d can be replaced with an open / close loop having a switch similar to that shown in FIG.

  As mentioned above, although the Example of this invention was described in detail, these are only illustrations and do not limit a claim. The technology described in the claims includes various modifications and changes of the specific examples illustrated above.

  The technical elements described in this specification or the drawings exhibit technical usefulness alone or in various combinations, and are not limited to the combinations described in the claims at the time of filing. In addition, the technology illustrated in the present specification or the drawings achieves a plurality of objects at the same time, and has technical utility by achieving one of the objects.

1: Optical deflection device 10: Upper substrate 12: Movable portion 20: Lower substrates 31, 32: Cores 40a-d, 40f-i, 41a-d, 41f-i, 51a-d, 55a-d: Closed loops 42, 43 53: Field 50a-i where magnetic field is strengthened: Opening and closing loops 111a, 111b, 121a, 121b: Flexible beam 112: Support frame 140: Mirror structures 141, 142, 431, 432: Plate member 150: Permanent magnets 311, 312, 321, 322: magnetic poles

Claims (6)

A substrate,
A movable part having a magnetic body and tiltable relative to the substrate;
A fixed portion including a first magnetic pole and a second magnetic pole capable of applying a magnetic field to the magnetic body;
A conductive closed loop provided on the first magnetic pole side or the second magnetic pole side with respect to the magnetic body,
The closed loop is arranged around a region located between the magnetic body and the first magnetic pole or the second magnetic pole in a direction in which the loop surface of the closed loop intersects the direction of the magnetic field.
MEMS device.   The MEMS device according to claim 1, wherein the closed loop is fixed to a movable part.   The MEMS device according to claim 1, wherein the closed loop is fixed to a fixing portion. The magnetic body has an N pole and an S pole at both ends,
One of the N pole and the S pole is fixed to the movable part as a third magnetic pole, and the other is arranged as a fourth magnetic pole between the first magnetic pole and the second magnetic pole,
4. The MEMS device according to claim 1, wherein the closed loop is disposed around a region located between the fourth magnetic pole and the first magnetic pole or the second magnetic pole. 5. A substrate,
A movable part having a magnetic body and tiltable relative to the substrate;
A fixed portion including a first magnetic pole and a second magnetic pole capable of applying a magnetic field to the magnetic body;
A conductive open / close loop provided on the first magnetic pole side or the second magnetic pole side, which can be opened and closed by a switch, with respect to the magnetic body,
The open / close loop is arranged in a direction in which the loop surface intersects the direction of the magnetic field,
When the movable part is tilted, if the open / close loop is located around a region located between the magnetic body and the first magnetic pole or the second magnetic pole, the switch is closed, The MEMS device, wherein the switch is opened when the open / close loop is located in a region located between the magnetic body and the first magnetic pole or the second magnetic pole. The first magnetic pole and the second magnetic pole are electromagnets,
The MEMS device further includes a control device that controls a magnetic field of the first magnetic pole and the second magnetic pole by controlling a current signal input to the first magnetic pole and the second magnetic pole,
When the phase of the magnetic field of the first magnetic pole and the second magnetic pole advances by dt when the induced current flows through the closed loop or the open / close loop compared to when the induced current does not flow through the closed loop or the open / close loop. The MEMS device according to any one of claims 1 to 5, wherein the control device delays a phase of a current signal input to the first magnetic pole and the second magnetic pole by dt.

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