JP2011128203A - Optical device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To install a permanent magnet in a movable part to restrain the gravity center of the movable part from being deviated from the swing center of the movable part in an optical device which swings the movable part by a magnetic force which acts between an electromagnet and a magnet installed in the movable part. <P>SOLUTION: A magnet installed in a movable part comprises two members, that is, an upper magnet and a lower magnet. The upper magnet is installed on the upper surface of the movable part, and the lower magnet is installed on the lower surface of the movable part. Consequently, the gravity center of the movable part is restrained from being deviated from the swing center of the movable part. Furthermore, the first magnetic pole of the upper magnet faces, across the movable part, the second magnetic pole of the lower magnet, and the upper magnet and the lower magnet are fixed to the movable part by the magnetic force. Since the amount of an adhesive used for fixing the magnets to the movable part is decreased, the gravity center of the movable part is restrained from being deviated from the swing center of the movable part due to the weight of the adhesive. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to an optical device that changes the reflection direction of a light beam (hereinafter referred to as “deflect”) by swinging a mirror with electromagnetic force.

  A technique for manufacturing an optical device that deflects a light beam by using MEMS technology has been developed. This type of optical device includes a substrate, a flexible beam, and a movable portion, and the movable portion is supported by the flexible beam so as to be swingable with respect to the substrate. A mirror is installed on the upper surface of the movable part. The mirror can be tilted at a predetermined angle by swinging the movable part with respect to the substrate.

  In an optical device using electromagnetic force, one of a magnet and an electromagnet is installed on a movable part, and the other is installed on a substrate. Non-Patent Document 1 discloses an optical device in which a magnet is attached to the lower surface of a movable part, and an electromagnet is installed on a substrate positioned below the movable part. The south pole of the magnet is attached to the lower surface of the movable part using an adhesive, and the north pole of the magnet extends toward the electromagnet.

  When a drive current is passed through the electromagnet, an electromagnetic force acts between the magnet and the electromagnet. By switching the energization direction, it is possible to switch between a state in which a part of the movable part is brought closer to the substrate and a state in which a part of the movable part is moved away from the substrate. The movable part can be swung by the electromagnetic force acting between the magnet and the electromagnet.

Takayuki Iseki et al., OPTICAL REVIEW, Vol.13, No.4 (2006), 189-194

The specific gravity of the magnet is greater than the specific gravity of the movable part. For example, the specific gravity of a neodymium magnet (Nd ₂ Fe ₁₄ B), which is an example of a magnet, is about three times the specific gravity of silicon, which is an example of a material used as a movable part. For this reason, when the magnet is attached to one side of the movable part (in the case of Non-Patent Document 1, the lower side of the movable part), the center of gravity of the entire movable part including the magnet is shifted to the magnet side, and the center of gravity of the movable part is moved to the movable part. Move away from the center of oscillation. When the center of gravity of the movable part moves away from the swing center, the swing characteristic of the movable part changes, and in some cases, the movable part vibrates when the movable part is tilted.

  An object of this application is to provide the technique which can suppress that the gravity center of a movable part shift | deviates from the rocking | fluctuation center of a movable part, when a magnet is installed in a movable part.

  An optical device according to the present application includes a substrate, a flexible beam, a movable part supported by the flexible beam so as to be swingable with respect to the substrate, a mirror fixed to the upper surface of the movable part, An upper magnet installed on the upper surface, a lower magnet installed on the lower surface of the movable part, an electromagnet that generates magnetic flux that generates torque that causes the upper magnet and the lower magnet to rotate the movable part around the flexible beam, It has. The upper magnet is installed such that the first magnetic pole (one of the N or S poles) faces the movable part, and the lower magnet has the second magnetic pole (the magnetic pole opposite to the first magnetic pole) faces the movable part. It is installed at. The lower magnet is installed at a position facing the upper magnet through the movable part.

  In the above optical device, the magnet is divided into two members, an upper magnet and a lower magnet. Since the upper magnet is installed on the upper surface of the movable part and the lower magnet is installed on the lower surface of the movable part, the center of gravity of the movable part is suppressed from being shifted from the swing center of the movable part. Further, the first magnetic pole of the upper magnet and the second magnetic pole of the lower magnet are opposed to each other through the movable part. For this reason, a movable part is inserted | pinched by the magnetic force which acts between the 1st magnetic pole of an upper magnet, and the 2nd magnetic pole of a lower magnet, and an upper magnet and a lower magnet are fixed to a movable part.

  In the above optical device, the upper magnet and the lower magnet are preferably the same member. Since the same member is installed on each of the upper and lower surfaces of the movable part, the center of gravity of the movable part does not deviate from the swing center of the movable part.

  In the above optical device, the upper magnet and the lower magnet may be fixed to the movable part only by magnetic force. Since no adhesive is used, the center of gravity of the movable part does not deviate from the swing center of the movable part due to the weight of the adhesive. On the other hand, an adhesive may be applied to the contact surface between the upper magnet and the movable portion and the contact surface between the lower magnet and the movable portion. Even when an adhesive is used, since the adhesive required to fix the upper magnet and the lower magnet to the movable part is reduced, the center of gravity of the movable part depends on the weight of the adhesive. Displacement is suppressed.

  According to the present invention, it is possible to suppress the center of gravity of the movable part from deviating from the swing center of the movable part by installing the magnet in the movable part.

1 is a perspective view of an optical device according to Example 1. FIG. It is a figure which shows the upper surface of the mirror part of the optical apparatus of FIG. It is a figure which shows the lower surface of the mirror part of FIG. FIG. 4 is a cross-sectional view taken along line IV-IV in FIGS. 2 and 3. FIG. 5 is a cross-sectional view taken along line VV in FIGS. 2 and 3. It is a figure which shows the movable part of the optical apparatus of Example 1, and the magnet installed in this. It is a figure which shows the movable part of the optical apparatus of Example 1, and the magnet installed in this. It is a figure which shows the movable part of the optical apparatus which concerns on a modification, and the magnet installed in this. It is a figure which shows the movable part of the optical apparatus which concerns on a modification, and the magnet installed in this. It is a figure which shows the movable part of the optical apparatus which concerns on a modification, and the magnet installed in this. It is a figure which shows the movable part of the optical apparatus which concerns on a modification, and the magnet installed in this. It is a figure which shows the movable part of the optical apparatus which concerns on a modification, and the magnet installed in this. 6 is a diagram illustrating a method for manufacturing the optical device according to the first embodiment. FIG. 6 is a diagram illustrating a method for manufacturing the optical device according to the first embodiment. FIG. 6 is a diagram illustrating a method for manufacturing the optical device according to the first embodiment. FIG. 6 is a diagram illustrating a method for manufacturing the optical device according to the first embodiment. FIG. 6 is a diagram illustrating a method for manufacturing the optical device according to the first embodiment. FIG. 6 is a diagram illustrating a method for manufacturing the optical device according to the first embodiment. FIG. It is a figure which shows a movable part and the penetration magnet which penetrates a movable part. It is the XX-XX sectional view taken on the line of FIG.

Preferred embodiments according to the present invention are embodied, for example, by examples having the characteristics listed below.
(Characteristic 1) The upper magnet and the lower magnet facing each other through the movable part are the same member, and are designed to have the same shape and weight using the same material.

(Optical device)
FIG. 1 is a perspective view of an optical device 10 according to the first embodiment. The optical device 10 includes a first electromagnet 20, a second electromagnet 40, and a mirror unit 30.

  The first electromagnet 20 includes a C-shaped iron core 201 and first coils 203 a and 203 b wound around the iron core 201. The iron core 201 includes a magnetic pole part 201a and a magnetic pole part 201b facing each other in the x-axis direction (second direction) with the mirror part 30 interposed therebetween, and the mirror part 30 is interposed between the magnetic pole part 201a and the magnetic pole part 201b. is set up. The second electromagnet 40 includes a C-shaped iron core 401 and second coils 403 a and 403 b wound around the iron core 401. The iron core 401 includes a magnetic pole part 401a and a magnetic pole part 401b that face each other in the y-axis direction (first direction) with the mirror part 30 interposed therebetween, and the mirror part 30 is interposed between the magnetic pole part 401a and the magnetic pole part 401b. is set up.

  When a current is passed through the first coils 203a and 203b of the first electromagnet 20, a magnetic field in the x-axis direction is generated between the magnetic pole part 201a and the magnetic pole part 201b. When a current is passed through the second coils 403a and 403b of the second electromagnet 40, a magnetic field in the y-axis direction is generated between the magnetic pole part 401a and the magnetic pole part 401b.

FIG. 2 is a plan view of the mirror unit 30 shown in FIG. 1, and FIG. 3 is a diagram of the mirror unit 30 shown in FIG. As shown in FIGS. 2 and 3, the mirror unit 30 includes a substrate 301, a pair of first flexible beams 303a and 303b extending from the substrate 301, and a pair of first flexible beams 303a and 303b. A first movable part 305 supported, a pair of second flexible beams 309a and 309b extending from the first movable part 305, and a first pair of second flexible beams 309a and 309b. 2 movable part 311 and mirror 315 fixed to the upper surface of second movable part 311. First upper magnets 307a and 307b are fixed to the upper surface of the first movable portion 305, and first lower magnets 308a and 308b are fixed to the lower surface. Second upper magnets 313a and 313b are fixed to the upper surface of the second movable part 311 and second lower magnets 314a and 314b are fixed to the lower surface. The first upper magnets 307a and 307b, the first lower magnets 308a and 308b, the second upper magnets 313a and 313b, the second lower magnets 314a and 314b are permanent magnets made of a neodymium magnet (Nd ₂ Fe ₁₄ B) or the like. It is configured. Instead of the neodymium magnet, a samarium cobalt magnet (SmCo ₅ (1-5 system), Sm ₂ Co ₁₇ (2-17 system), etc.) or a ferrite magnet can be used.

  4 is a cross-sectional view taken along the line IV-IV in FIGS. 2 and 3, and FIG. 5 is a cross-sectional view taken along the line V-V in FIGS. 2 and 3. FIG. 6 is a diagram showing the positional relationship between the second movable part 311, the second upper magnet 313a, and the second lower magnet 314a. FIG. 7 shows the first movable part 305, the first upper magnet 307b, and the first lower magnet. It is a figure which shows the positional relationship of 308b.

  As shown in FIGS. 2 to 7, the first upper magnet 307 b is installed in the region 373 on the surface of the first movable unit 305, and the first lower magnet 308 b is installed in the region 383 on the back surface of the first movable unit 305. Is done. The second upper magnet 313 a is installed in the area 333 on the surface of the second movable part 311, and the second lower magnet 314 a is installed in the area 334 on the back surface of the second movable part 311. The region 373 and the region 383 and the region 333 and the region 334 are at the same position when the mirror unit 30 is viewed in plan. That is, the first upper magnet 307b and the first lower magnet 308b are installed at positions facing each other via the first movable portion 305, and the second upper magnet 313a and the second lower magnet 314a are the second movable portion 311. It is installed in the position which opposes via. Similarly, in FIGS. 2 and 3, the first upper magnet 307a and the first lower magnet 308a, and the second upper magnet 313b and the second lower magnet 314 are both on the upper surface side and the lower surface side of the second movable portion 311. Thus, the mirror unit 30 is installed at the same position when viewed in plan. That is, the first upper magnet 307a and the first lower magnet 308a are installed at positions facing each other via the first movable part 305, and the second upper magnet 313b and the second lower magnet 314b are the second movable part 311. It is installed in the position which opposes via.

  In FIG. 6, in the second upper magnet 313a, the surface 332 on the second movable portion 311 side is the S pole, and the surface 331 that is the opposite surface is the N pole. As for the 2nd lower magnet 314a, the surface 342 at the 2nd movable part 311 side is a north pole, and the surface 341 which is the opposite surface is a south pole. The surface 332 of the second upper magnet 313a, which is the S pole, and the surface 342 of the second lower magnet 314a, which is the N pole, are opposed to each other via the second movable portion 311, and a magnetic force acts therebetween. The second movable part 311 is sandwiched between the second upper magnet 313a and the second lower magnet 314a by the magnetic force, and the second upper magnet 313a and the second lower magnet 314a are fixed to the second movable part 311. Although not shown in FIG. 6, the surface on the second movable part 311 side of the second upper magnet 313b shown in FIG. 2 and the like is the S pole, and the surface on the second movable part 311 side of the second lower magnet 314b is the N pole. And are opposed to each other via the second movable portion 311. For this reason, similarly, the second upper magnet 313b and the second lower magnet 314b are also fixed to the second movable portion 311 by the magnetic force.

  In FIG. 7, in the first upper magnet 307b, the surface 372 on the first movable portion 305 side is the S pole, and the surface 371 that is the opposite surface is the N pole. As for the 2nd lower magnet 308b, the surface 382 at the side of the 1st movable part 305 is a north pole, and the surface 381 which is the opposite side is a south pole. Therefore, similarly, the first upper magnet 307b and the first lower magnet 308b are fixed to the first movable portion 305 by the magnetic force. Although not shown in FIG. 7, similarly, the surface on the first movable part 305 side of the first upper magnet 307a shown in FIG. 2 and the like is an S pole, and the surface on the first movable part 305 side of the first lower magnet 308a. The surface is an N pole, and faces through the first movable part 305. For this reason, similarly, the first upper magnet 307a and the first lower magnet 308a are also fixed to the first movable portion 305 by the magnetic force.

  As shown in FIGS. 1 to 3, the mirror unit 30 has a line connecting the connection point between the substrate 301 and the first flexible beam 303 a and the connection point between the substrate 301 and the first flexible beam 303 b in the same direction as the y-axis direction. The connection point between the first movable part 305 and the second flexible beam 309a and the line connecting the connection point between the first movable part 305 and the second flexible beam 309b are set so as to coincide with the x-axis direction. Yes. The direction orthogonal to the xy plane coincides with the z-axis direction, and a mirror 315 is provided on the upper surface side of the second movable portion 311 where the z-axis is positive. Then, the first flexible beams 303 a and 303 b extend from the substrate 301 in the y-axis direction and are connected to the first movable portion 305. The second flexible beams 309 a and 309 b extend from the first movable portion 305 in the x-axis direction and are connected to the second movable portion 311. The y-axis that is the first direction and the x-axis that is the second direction are orthogonal to each other in a plane parallel to the substrate.

  The first movable portion 305 is supported by the first flexible beams 303a and 303b so as to be swingable about the y-axis with respect to the substrate 301. The second movable portion 311 includes the second flexible beams 309a and 303b. By 309b, it is supported to be swingable about the x-axis with respect to the first movable portion 305. Thus, the second movable portion 311 can swing independently with respect to the substrate 300 around the y axis (first axis) and the x axis (second axis).

  When a current is passed through the first coils 203a and 203b of the first electromagnet 20 shown in FIG. 1, a magnetic field in the x-axis direction is generated between the magnetic pole part 201a and the magnetic pole part 201b, and the mirror part 30 installed therebetween. Electromagnetic force acts on the first upper magnets 307a and 307b and the first lower magnets 308a and 308b. As a result, the first flexible beams 303a and 303b are twisted, and the first movable portion 305, the second flexible beams 309a and 309b, the second movable portion 311 and the mirror 315 are integrated around the y axis. Rocks.

For example, when a current is passed through the first coils 203a and 203b so that the magnetic pole part 201a has an N pole and the magnetic pole part 201b has an S pole, the N poles of the first upper magnets 307a and 307b and the first lower magnets 308a and 308b The repulsive force is received from the magnetic pole part 201a and the attractive force is received from the magnetic pole part 201b. The south poles of the first upper magnets 307a and 307b and the first lower magnets 308a and 308b receive an attractive force from the magnetic pole part 201a and a repulsive force from the magnetic pole part 201b. As a result, the first flexible beams 303 a and 303 b are twisted, and the first movable portion 305, the second flexible beams 309 a and 309 b, the second movable portion 311, and the mirror 315 are on the magnetic pole portion 201 a side above the substrate 301. And the magnetic pole part 201 b side is inclined below the substrate 301. Conversely, when a current is passed through the first coils 203a and 203b so that the magnetic pole part 201a has the S pole and the magnetic pole part 201b has the N pole, the first movable part 305, the second flexible beams 309a and 309b, (2) The movable part 311 and the mirror 315 are inclined such that the magnetic pole part 201 a side is below the substrate 301 and the magnetic pole part 201 b side is above the substrate 301.
Note that the magnetic field in the x-axis direction generated between the magnetic pole part 201a and the magnetic pole part 201b causes the second upper magnets 313a and 313b and the second lower magnets 314a and 314b to move the second movable part 311 around the y-axis. Generate torque to rotate. The second flexible beams 309a and 309b are designed to be easily twisted around the x-axis, but not easily deformed with respect to the torque rotated around the y-axis. For this reason, the second flexible beams 309a and 309b are not deformed by the torque generated in the second movable portion 311 and the second movable portion 311 is not inclined with respect to the first movable portion 305. 303b is twisted. Since the torque generated in the first movable portion 305 and the torque generated in the second movable portion 311 are in the same direction, the entire first movable portion 305 and the second movable portion 311 are integrated to form the first flexible beam 303a. , Oscillates around 303b.

  When a current is passed through the second coils 403a and 403b of the second electromagnet 40 shown in FIG. 1, a magnetic field in the y-axis direction is generated between the magnetic pole part 401a and the magnetic pole part 401b, and the mirror part 30 installed therebetween. Electromagnetic force acts on the second upper magnets 313a and 313b and the second lower magnets 314a and 314b. As a result, the second flexible beams 309a and 309b are twisted, and the second movable portion 311 and the mirror 315 are integrally swung around the x-axis.

For example, when a current is passed through the second coils 403a and 403b so that the magnetic pole part 401a of the second electromagnet 40 is an N pole and the magnetic pole part 401b is an S pole, the N poles of the second magnets 313a, 313b, 314a, and 314b are The repulsive force is received from the magnetic pole portion 401a and the attractive force is received from the magnetic pole portion 401b. As a result, the second flexible beams 309 a and 309 b are twisted, and the second movable portion 311 and the mirror 315 are inclined such that the magnetic pole portion 401 a side is above the substrate 301 and the magnetic pole portion 401 b side is below the substrate 301. Conversely, when a current is passed through the second coils 403a and 403b so that the magnetic pole portion 401a has the S pole and the magnetic pole portion 401b has the N pole, the second movable portion 311 and the mirror 315 have the magnetic pole portion 401a side on the substrate side. The magnetic pole part 401 b is inclined upwardly with respect to the substrate 301.
Note that the magnetic field in the y-axis direction generated between the magnetic pole part 401a and the magnetic pole part 401b causes the first upper magnets 307a and 307b and the second lower magnets 308a and 308b to move the first movable part 305 around the x axis. Generate torque to rotate. The first flexible beams 303a and 303b are designed to be easily twisted around the y axis, but not easily deformed with respect to the torque rotated around the x axis. For this reason, the first flexible beams 303 a and 303 b are not deformed by the torque generated in the first movable portion 305 and the first movable portion 305 is not inclined with respect to the substrate 301.

  In the first embodiment, the first upper magnets 307a and 307b and the first lower magnets 308a and 308b are the same members, are designed in the same shape using the same material, and have the same weight. The first upper magnets 307 a and 307 b that are the same members are installed on the upper surface side of the first movable part 305, and the first lower magnets 308 a and 308 b are installed on the lower surface side of the first movable part 305. For this reason, by installing the first upper magnets 307a and 307b and the first lower magnets 308a and 308b, the center of gravity of the first movable portion 305 does not shift vertically from the swing center (y axis). Further, if the first upper magnets 307a and 307b and the first lower magnets 308a and 308b are designed as the same member, the manufacturing cost can be reduced.

  Similarly, the second upper magnets 313a and 313b and the second lower magnets 314a and 314b are the same member, are designed in the same shape using the same material, and have the same weight. For this reason, by installing the second upper magnets 313a and 313b and the second lower magnets 314a and 314b, the center of gravity of the second movable portion 311 does not shift vertically from the swing center (x axis). Moreover, the manufacturing cost can be reduced by designing the second upper magnets 313a and 313b and the second lower magnets 314a and 314b as the same member.

  As a method for suppressing the center of gravity of the movable part from deviating from the center of swing in the vertical direction, as shown in FIGS. 19 and 20, a method in which one magnet is installed so as to penetrate the movable part in the vertical direction is also considered. It is done. FIG. 19 shows a magnet 713a installed in the vicinity of the connection portion between the second movable portion 711 and the second flexible beam 709a, and FIG. 20 is a sectional view taken along line XX-XX in FIG. As shown in FIGS. 19 and 20, when the penetrating magnet 713 a passes through the second movable portion 711, an adhesive 870 is filled between the side surface of the penetrating magnet 713 a and the second movable portion 711. The penetrating magnet 713a is fixed to the second movable portion 711 only by the adhesive force of the adhesive 870.

  In the manufacturing process, when the ratio between the portion of the penetrating magnet 713a that protrudes above the second movable portion 711 and the portion that protrudes below the second movable portion 711 is shifted, or the amount of the adhesive 870 is When the second movable portion 711 is distributed in the vertical direction, the center of gravity of the movable portion is a factor that shifts from the swing center in the vertical direction. Even if the application amount of the adhesive is controlled, for example, as shown in FIGS. 19 and 20, the adhesive is unevenly distributed on the upper surface side of the second movable portion 711, or conversely, the adhesive flows on the lower surface side. The adhesive 870 is likely to be distributed in the vertical direction of the second movable portion 711.

  On the other hand, in the first embodiment, the first upper magnets 307a and 307b, the first lower magnets 308a and 308b, the second upper magnets 313a and 313b, and the second lower magnets 314a and 314b are used by using only the magnetic force. The first movable unit 305 and the second movable unit 311 are respectively fixed. If the shapes and sizes of the upper magnet and the lower magnet are adjusted, the center of gravity of the movable portion will not shift vertically from the center of swing due to the weight deviation of the magnet. In addition, since the adhesive for fixing the magnet to the movable part is not used, the center of gravity of the first movable part 305 and the second movable part 311 changes vertically from the respective swing center by changing the amount of the adhesive. There is no slippage.

  As described above, in the optical device according to the first embodiment, the magnet is divided into two members, the upper magnet and the lower magnet. Since the upper magnet is installed on the upper surface of the movable part and the lower magnet is installed on the lower surface of the movable part, the center of gravity is prevented from deviating from the swing center of the movable part. Further, the first magnetic pole of the upper magnet and the second magnetic pole of the lower magnet are opposed to each other through the movable part. For this reason, a movable part is inserted | pinched by the magnetic force which acts between the 1st magnetic pole of an upper magnet, and the 2nd magnetic pole of a lower magnet, and an upper magnet and a lower magnet are fixed to a movable part.

  The upper magnet, the lower magnet and the movable part are fixed only by magnetic force, and no adhesive is used. For this reason, the center of gravity of the movable part does not deviate vertically from the center of swing due to the weight of the adhesive. Further, in the prior art, since the moment of inertia of the movable part changes depending on the weight of the adhesive added during mass production, there is an adverse effect such that the resonance frequency varies from device to device. In Example 1, since no adhesive is used, it is possible to suppress variation in resonance frequency for each device.

(Method for manufacturing optical device)
Next, a method for manufacturing the optical device according to the first embodiment will be described. The optical device shown in FIG. 1 can be manufactured by manufacturing a mirror part using a silicon substrate or the like as a material and arranging the manufactured mirror part with respect to the first electromagnet 20 and the second electromagnet 40. In the manufacturing method of the mirror part, first, a structure such as a movable part is formed on a silicon substrate or the like using a MEMS technique, and a silicon structure that is a mirror part in a state where no magnet is installed is formed. Next, an upper magnet and a lower magnet are installed in this silicon structure. Thereby, the mirror part 30 as shown in FIG. 2 etc. can be manufactured. The method of manufacturing the silicon structure can be manufactured by a method of manufacturing a mirror device using ordinary MEMS technology. Hereinafter, a method of installing the upper magnet and the lower magnet in the silicon structure will be described with reference to FIGS.

  First, as shown in FIG. 13, a jig 900 is prepared. In the first embodiment, the jig 900 is made of glass. The jig 900 is formed with a hole for inserting the lower magnet and a hole for inserting an alignment guide used when placing the silicon structure on the jig 900. In FIG. A state in which the second lower magnets 314a and 314b are placed on the jig 900 so as to be on the upper side is shown. Although not shown, the first lower magnets 308a and 308b are also placed on the jig 900 in the same manner in the step shown in FIG.

  Next, as shown in FIG. 14, an alignment guide 902 is inserted into the jig 900, and the silicon structure is placed on the jig 900 using the alignment guide 902. Although FIG. 14 shows a pair of alignment guides 902 in the left-right direction, at least one pair of alignment guides 902 is also installed in a direction perpendicular to the paper surface of FIG. When the silicon structure is placed on the jig 900 such that the outer edge of the substrate 301 is attached to the alignment guide 902, the position of the magnet and the movable part can be adjusted. For example, as shown in FIG. 14, it is possible to adjust the position where the silicon structure is placed so that the second movable part 311 is located on the upper surface side of the second lower magnets 314a, 314b placed on the jig 900. it can. For example, a silicon wafer can be used as the alignment guide 902.

  In the state of FIG. 14, after temporarily fixing the jig 900 and the silicon structure using a resist, the alignment guide 920 is removed, and the state shown in FIG. 15 is obtained. FIG. 15 shows a state in which the silicon structure is temporarily fixed on the jig 900 by the resist 920.

The jig 900 in the state shown in FIG. 15 is placed on top of the magnet 930 as shown in FIG. The magnet 930 is a permanent magnet made of a neodymium magnet (Nd ₂ Fe ₁₄ B) or the like. The magnet 930 has an N pole on the top surface and an S pole on the bottom surface, and the jig 900 is placed on the N pole of the magnet 930. On the jig 900, lower magnets (the second lower magnets 314a and 314b are exemplarily shown in FIG. 16) are placed so that the upper surface is an N pole and the lower surface is an S pole. Is attracted to the magnet 930. If an upper magnet is installed on the upper surface of the movable part in this state, the state shown in FIG. 16 is obtained. FIG. 16 exemplarily shows a state where the second upper magnets 313a and 313b are installed so as to be in the same position as the second lower magnets 314a and 314b when the silicon structure is viewed in plan. In order to install the upper magnet on the movable part with the jig 900 placed on the upper part of the magnet 930, when the upper magnet is installed, the magnetic force acting between the upper magnet and the lower magnet is used. It is possible to prevent the temporary fixing with the jig 900 from coming off.

  Next, as shown in FIG. 17, the resist 920 is removed. Thereafter, when the jig 900 is moved from above the magnet 930 and the silicon structure is removed from the jig 900 without receiving the magnetic force of the magnet 930, the upper magnet and the lower magnet are placed on the silicon structure as shown in FIG. The installed mirror part can be obtained. As exemplarily shown in FIG. 18, the second upper magnet 313a and the second lower magnet 314a, and the second upper magnet 313b and the second lower magnet 314b sandwich the second movable portion 311 by the magnetic force acting on each other, and are fixed. Thus, a mirror part in a state of being made can be obtained.

  As described above, in the optical device according to the first embodiment, the upper magnet and the lower magnet can be easily installed on the movable portion using a jig or the like. As shown in FIGS. 19 and 20, in the method of installing one magnet so as to penetrate the movable part in the vertical direction, the silicon structure and the penetrating magnet installed in the movable part (for example, the second movable part 711). An adhesive is poured between the side surface of the penetrating magnet and the movable portion in a state where the penetrating magnet (713a, for example) is installed on the jig. In this case, the adhesive to be poured reaches the surface of the jig and adheres, and the jig and the silicon structure or magnet may be bonded. On the other hand, in the optical device according to Example 1, since the magnet is fixed to the movable part without using an adhesive, the adhesive does not adhere to a jig or the like during mass production, and the yield does not decrease.

(Modification)
In the first exemplary embodiment, the optical device in which the movable portion is a biaxial drive type is described as an example. However, the movable portion may be a single-axis drive optical device. Also in the single-axis drive type optical device, the same operation effect can be obtained by using the same upper magnet and lower magnet as those in the first embodiment as the magnets installed in the movable part. Further, the upper magnet and the lower magnet may not be the same member. Since the upper magnet and the lower magnet are opposed to each other via the movable part, the ratio of the part projecting to the upper surface side and the part projecting to the lower surface side of the movable part of the magnet installed in the movable part is more balanced. Thus, the center of gravity of the movable part is prevented from being displaced from the center of oscillation.

  In Example 1, the upper magnet and the lower magnet are fixed to the movable part without using an adhesive, but the contact surface between the upper magnet and the movable part and the contact surface between the lower magnet and the movable part are An adhesive may be applied. Even when an adhesive is used, the adhesive required to fix the upper magnet and the lower magnet to the movable part is reduced, so that the center of gravity of the movable part may deviate from the center of oscillation due to the weight of the adhesive. It is suppressed.

  For example, as shown in FIG. 8, even when an adhesive is used, the amount of adhesive required to fix the upper magnet and the lower magnet to the movable part can be reduced. Since the amount of the necessary adhesive is reduced, it is possible to suppress the center of gravity of the movable part from deviating from the swing center due to the variation in the amount of the adhesive. In FIG. 8, since the second movable portion 311 is not provided with a through hole, for example, the adhesive applied to the upper surface of the second movable portion 311 flows to the back surface of the second movable portion 311 and the adhesive 801a and The weight of the adhesive 801b does not deviate from the design value.

  Moreover, the area | region which installs the upper magnet and lower magnet of a movable part does not need to be flat. FIG. 9 shows a state in which a recess 334 for installing the second upper magnet 313a is formed in the surface area of the second movable portion 311. Thus, if the hollow for installing a magnet is provided in a movable part, it will become possible to suppress that a magnet shifts in the plane direction of a movable part.

  FIG. 10 shows a state where a hole 335 is formed in a part of a region 333 where the second upper magnet 313a is installed on the surface of the second movable portion 311. In FIG. 10, the region 334 on the back surface side of the second movable portion 311 shown in FIG. 6 is not shown, but the hole portion 335 penetrates the second movable portion 311 and the second movable portion 311 The area of the hole 335 on the front surface and the back surface is smaller than the areas of the region 333 and the region 334. Thus, there may be a hole between the upper magnet and the lower magnet where no movable part exists. Moreover, when using an adhesive agent, you may apply | coat an adhesive agent through this hole. Since the area of the hole 335 occupying on the front surface and the back surface of the second movable portion 311 is smaller than the areas of the region 333 and the region 334, for example, even when the adhesive is used in the step shown in FIG. Stops on the upper surface side of the second lower magnet 314a, flows out to the side surface side, and the jig 900 is not bonded to the second lower magnet 314a or the second movable portion 311.

  The shapes of the upper magnet and the lower magnet are not limited to the shapes described in the above embodiments. For example, as shown in FIGS. 11 and 12, a part of the upper magnet and the lower magnet may have a protrusion. In addition, in FIG. 11, illustration is abbreviate | omitted about the area | region 334 of the back surface side of the 2nd movable part 311 shown in FIG. 11 and 12, a hole 336 is formed in a part of a region 333 where the second upper magnet 313 a is installed on the second movable portion 311, and the second upper magnet 313 a provided with the protrusion 337 A state is shown in which the second lower magnet 338 including the protrusion 338 is installed on the second movable portion 311 so that the protrusion 337 and the protrusion 338 are inserted into the hole 336. Thus, if the upper magnet and a part of the lower magnet have protrusions and can be inserted into the depressions or holes provided in the movable part, the magnet will be displaced in the plane direction of the movable part. It becomes possible to suppress more.

  As mentioned above, although the Example of this invention was described in detail, these are only illustrations and do not limit a claim. The technology described in the claims includes various modifications and changes of the specific examples illustrated above.

  The technical elements described in this specification or the drawings exhibit technical usefulness alone or in various combinations, and are not limited to the combinations described in the claims at the time of filing. In addition, the technology exemplified in this specification or the drawings can achieve a plurality of objects at the same time, and has technical usefulness by achieving one of the objects.

DESCRIPTION OF SYMBOLS 10 Optical apparatus 20 1st electromagnet 30 Mirror part 40 2nd electromagnet 201 Iron core 201a, 201b Magnetic pole part 203a, 203b 1st coil 301 Board | substrate 303a, 303b 1st flexible beam 305 1st movable part 307a, 307b 1st upper magnet 308a , 308b First lower magnet 309a, 309b Second flexible beam 311 Second movable part 313a, 313b Second upper magnet 314a, 314b Second lower magnet 315 Mirror 401 Iron core 401a, 401b Magnetic pole 403a, 403b Second coil

Claims (3)

A substrate,
A flexible beam;
A movable part that is swingably supported by the flexible beam with respect to the substrate;
A mirror fixed to the upper surface of the movable part;
An upper magnet installed on the upper surface of the movable part in a posture in which the first magnetic pole faces the movable part;
A lower magnet installed on the lower surface of the movable part at a position facing the upper magnet via the movable part in a posture in which the second magnetic pole faces the movable part;
An optical device comprising: an electromagnet that generates a magnetic flux that generates a torque that causes the upper magnet and the lower magnet to rotate the movable portion around the flexible beam.   The optical apparatus according to claim 1, wherein the upper magnet and the lower magnet are the same member.   The optical device according to claim 1, wherein an adhesive is applied to a contact surface between the upper magnet and the movable portion and a contact surface between the lower magnet and the movable portion.

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