JP2016030008A - Uv lamp - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a UV lamp which combines a high air deodorization sterilization function and a high surface modification function by making an air deodorization sterilization treatment compatible with a surface modification treatment, with optimal treatment conditions of the individual treatments being different from each other.SOLUTION: A UV lamp includes UV irradiation means (1) and a UV irradiation treatment chamber (3) arranged with an object (3) to be treated. At least when the object (2) is not being treated in the UV irradiation treatment chamber (3), air entering the UV irradiation treatment chamber (1) from suction means (41) is deodorized and sterilized by the UV irradiation means (1) and discharged out of the UV irradiation treatment chamber (3) by discharge means (42).SELECTED DRAWING: Figure 1

Description

  The present invention relates to an ultraviolet irradiation apparatus, and more particularly to a surface modification apparatus having a function of deodorizing and sterilizing indoor air when an object to be processed is not irradiated with ultraviolet rays.

  The surface reformer that performs UV ozone cleaning using ultraviolet light energy and ozone's strong oxidizing action is a dry process, does not require vacuum, and provides a reliable cleaning effect. Since it has excellent advantages such as not being damaged, it has been utilized as an ultra-precise cleaning method for finely processed surfaces.

  As such a surface modification apparatus using ultraviolet rays and ozone, there is described a cleaning treatment apparatus for biological implants that can quickly remove ozone generated by ultraviolet irradiation after performing ultraviolet irradiation on the biological implant. (Cited document 1).

  In such an apparatus, no operation is performed while the object to be processed is not irradiated with ultraviolet rays, and only the next processing is waited. For this reason, there is a problem that the operation rate of the apparatus is poor. Moreover, in the conventional biological implant processing apparatus using a mercury lamp, since it takes time to stabilize after starting the lighting, there is a problem that the surface modification processing of the implant cannot be performed immediately and the working efficiency is poor.

Japanese Patent Application Laid-Open No. 2012-157412

  The problem to be solved by the present invention is to provide an ultraviolet irradiation apparatus with added value by increasing the operating rate of the apparatus. It is another object of the present invention to provide a living body implant processing apparatus that can remove odor peculiar to a dental clinic and sterilize indoor air.

  The ultraviolet irradiation apparatus of the present invention includes an ultraviolet irradiation processing chamber provided with ultraviolet irradiation means, and enters the ultraviolet irradiation processing chamber at least when an object to be processed is not subjected to processing by the ultraviolet irradiation means in the ultraviolet irradiation processing chamber. The air that has been subjected to deodorization and sterilization treatment by the ultraviolet irradiation means and exits from the apparatus can provide an ultraviolet irradiation device having an air deodorization and sterilization function.

  Further, the object to be treated is subjected to surface modification treatment by ozone generated by the ultraviolet irradiation means, and the air that has entered the ultraviolet irradiation treatment chamber is subjected to deodorization and sterilization treatment by the ozone generated by the ultraviolet irradiation means. It is possible to provide an ultraviolet irradiation device that performs surface modification treatment with ozone and air deodorization / sterilization treatment with ozone.

  The ultraviolet irradiation apparatus of the present invention includes an ozone removal chamber spatially connected to the ultraviolet irradiation treatment chamber, an air circulation means for circulating air between the ultraviolet irradiation treatment chamber and the ozone removal chamber, and an ultraviolet treatment chamber. Provided with ozone removal means for removing ozone contained in the air entering the ozone removal chamber from and an exhaust means for discharging air from the ozone removal chamber to the outside of the apparatus, and subjected to deodorization and sterilization treatment by ozone generated by the ultraviolet irradiation means The ozone is removed by the ozone removal means, enters the ozone removal chamber by the air circulation means, and exits from the apparatus by the exhaust means, so that the air is circulated in the ultraviolet irradiation apparatus to remove ozone in the ultraviolet irradiation treatment chamber. Therefore, the ultraviolet irradiation treatment operation can be performed independently of the air deodorization / sterilization treatment operation.

  Further, by using an excimer lamp having an inner diameter of a discharge vessel of 30 mm or less as the ultraviolet irradiation means used in the ultraviolet irradiation apparatus according to the present invention, switching between the surface modification function and the air / sterilization function can be made favorable.

  The surface modification apparatus of the present invention includes an ultraviolet irradiation treatment chamber provided with ultraviolet irradiation means, an ozone removal means for removing ozone contained in the air of the ultraviolet irradiation treatment chamber, and air from the ultraviolet irradiation treatment chamber to the outside of the apparatus. A surface modification operation mode in which an object to be treated is subjected to surface modification treatment by ozone generated by the ultraviolet irradiation means in the ultraviolet irradiation processing chamber, and the air entering the ultraviolet irradiation processing chamber is irradiated with ultraviolet rays. By having an air deodorizing / sterilizing operation mode that is deodorized and sterilized by ozone generated by the means, deodorized by the ozone removing means, and out of the apparatus by the exhaust means, the surface reforming function and the air deodorizing -The surface modification apparatus which can make a sterilization function compatible is provided.

  Furthermore, in the surface reforming operation mode, the amount of ultraviolet rays irradiated from the ultraviolet irradiation means to the object to be processed is increased compared with the air deodorizing / sterilizing operation mode. Compared to the reforming operation mode, by increasing the amount of air that goes out of the apparatus by the exhaust means, a surface reforming apparatus that can achieve both more suitable surface reforming treatment and air deodorization / sterilization treatment. Can be provided.

  The ultraviolet irradiation device according to the present invention combines an ultraviolet irradiation (surface modification) process and an air deodorization / sterilization process with different optimum processing conditions, and has an advanced air deodorization / sterilization process function and an ultraviolet irradiation process function. An ultraviolet irradiation device provided can be provided, and when performing surface modification treatment of a biological implant, it is possible to provide a biological implant processing device with high availability and work efficiency.

It is sectional drawing which shows the structure of the surface modification apparatus of 1st Embodiment. It is a figure which shows operation | movement of the surface modification apparatus of 1st Embodiment. It is sectional drawing which shows the structure of the surface modification apparatus of 2nd Embodiment. It is a figure which shows operation | movement of the surface modification apparatus of 2nd Embodiment.

(First embodiment)
1st Embodiment by this invention is an ultraviolet irradiation device which has the surface modification function by ultraviolet irradiation, the air deodorizing and disinfection function by a photocatalyst, and ultraviolet irradiation. FIG. 1 is a cross-sectional view showing the configuration of the ultraviolet irradiation device of the first embodiment. The ultraviolet irradiation apparatus of FIG. 1 includes an ultraviolet irradiation means 1 for irradiating ultraviolet rays, an object 2 to be treated for ultraviolet irradiation, and a photocatalyst for deodorizing and sterilizing air by being irradiated with ultraviolet rays. 10 is arranged.

  An excimer lamp is used as the ultraviolet irradiation means 1. The photocatalyst 10 is excited by irradiating with ultraviolet rays. When irradiating ultraviolet rays having a wavelength of 200 nm or less, ozone is generated in the ultraviolet irradiation processing chamber 3. The excimer lamp is connected to a power source (not shown) and supplied with power. The excimer lamp and the power source are cooled by a part of the air taken in by the intake means.

  By opening the door (not shown) of the ultraviolet irradiation processing chamber and placing the workpiece 2 (biological implant) on the processing table (not shown) installed in the ultraviolet irradiation processing chamber 3, the ultraviolet irradiation is performed. A workpiece 2 is placed in the irradiation area of the means 1.

  Air in the room (outside the apparatus) is put into the ultraviolet irradiation processing chamber 3 by the intake means 41. The intake means 41 has a function of adjusting the amount of air taken into the ultraviolet irradiation chamber. The intake means 41 is provided with a filter (not shown) to remove dust, moisture, and the like of the intake air.

  By the exhaust means 42, the air in the ultraviolet irradiation treatment chamber 3 is taken out of the apparatus (inside the room). The exhaust means 42 has a function of adjusting the amount of air discharged from the ultraviolet irradiation processing chamber 3. Note that it is only necessary to adjust the amount of air circulating between the room and the ultraviolet irradiation chamber by adjusting either the amount of air entering the ultraviolet irradiation chamber 3 or the amount of air entering the chamber.

  In particular, when ozone is generated in the ultraviolet irradiation processing chamber 3, the air to be sucked contains at least oxygen. Further, the exhaust means 42 is provided with an ozone removing means (not shown), and after the ozone generated in the ultraviolet irradiation processing chamber 3 is removed, it is discharged into the room. In the present invention, “ozone removal” not only completely removes ozone but also means that the amount of ozone contained in the air is at least the environmental standard value or less (the same applies hereinafter). As the ozone removing means, metal oxides and hydroxides such as activated carbon, manganese, cobalt, nickel, iron, and silver can be used.

  In order to prevent ozone from flowing out of the ultraviolet irradiation processing chamber 3 into the room, the intake means 41 and the exhaust means 42 may have a function of spatially separating the ultraviolet irradiation processing chamber and the room. Note that a complete isolation state is not necessary as long as ozone can be prevented from flowing out. For example, the air circulation between the room and the ultraviolet irradiation chamber may be stopped.

  Various operation condition settings (operation modes) of the ultraviolet irradiation device are input to a storage device of a control unit (not shown) by an operation unit (not shown). The automatic operation mode based on the program and the manual operation mode by the operator's operation can be set. The control unit controls the operations of the ultraviolet irradiation unit 1, the intake unit 41, the exhaust unit 42, the door, and the processing table according to the condition setting. The condition setting and operation state of the apparatus are displayed on a display unit (not shown) and can be visually confirmed by an operator.

  In the present embodiment, the object to be processed is irradiated with ultraviolet rays by the ultraviolet irradiation means to cure the coating applied to the object to be processed, to deodorize and sterilize the object to be processed, and to modify the surface, etc. Processing can be performed. Further, when such treatment is not performed, the indoor air sucked by irradiating the photocatalyst with ultraviolet rays can be deodorized and sterilized.

The operation of the apparatus of this embodiment will be described with reference to FIG.
(1) Air deodorizing / sterilizing operation The air intake means 41 is activated (ON), so that the air in the room (outside the ultraviolet irradiation processing chamber, outside the apparatus) enters the ultraviolet irradiation processing chamber 3. After the ultraviolet irradiation means 1 is activated (ON) for the air that has entered the ultraviolet irradiation treatment chamber 3 to perform deodorization and sterilization treatment, the air is discharged into the room by the exhaust means 42.
(2) When the air deodorizing / sterilizing operation is finished by a preset program installed by the object to be processed or an operator's operation, a display indicating that the door can be opened is turned on. The door of the ultraviolet irradiation processing chamber 3 is opened, and the workpiece 2 is placed on the processing table of the ultraviolet irradiation processing chamber 3. At this time, the exhaust means 42 may be continuously operated to remove odors remaining in the ultraviolet irradiation chamber 3.
(3) The ultraviolet irradiation means 1 can be turned on by installing the ultraviolet irradiation operation processing object 2 on the object to be processed and closing the door of the ultraviolet irradiation processing chamber 3. Ultraviolet irradiation is performed on the workpiece 2 by the ultraviolet irradiation means 1. At this time, ultraviolet irradiation processing is performed in accordance with irradiation conditions (lighting power, time, movement / swing of the object to be processed, etc.) set by the control unit. The type of lamp to be lit, lighting power, number of lights, lighting time, etc. are determined by the ultraviolet irradiation means 1 according to the optimum processing conditions for the workpiece 2. In this case, multiple types of lamps (with different wavelengths of ultraviolet rays to be radiated) may be installed, and different lamps may be turned on under optimum conditions for UV irradiation operation and air deodorization / sterilization operation on the workpiece. good. For example, it is preferable to increase the efficiency of the ultraviolet irradiation treatment to the object to be processed by increasing the amount of ultraviolet irradiation (lighting power and number of lighting) by the ultraviolet irradiation means 1 as compared with the air deodorizing / sterilizing operation. Furthermore, when the processing table moves, swings, rotates, and tilts relative to the ultraviolet irradiation means 1, it is possible to uniformly irradiate the workpiece with ultraviolet rays. During the irradiation of ultraviolet rays onto the object to be irradiated, it is preferable to stop the intake or discharge of air into the ultraviolet irradiation treatment chamber or reduce the air flow rate. When the ultraviolet irradiation under the set conditions is completed, a display (processed display) indicating that the process is completed is turned on.
(4) When the processing is completed under the set conditions for taking out the workpiece, a display indicating that the door can be opened is turned on. The door of the ultraviolet irradiation processing chamber 3 is opened, and the workpiece 2 is taken out from the ultraviolet irradiation processing chamber 3. At this time, the exhaust means 42 may be continuously operated to remove odors remaining in the ultraviolet irradiation processing chamber. If the effect of processing the object to be processed is reduced if there is no removal for a certain period of time, the processed display may be turned off.
(5) Air deodorization / sterilization operation After the workpiece is taken out from the ultraviolet irradiation treatment chamber, the deodorization / sterilization treatment is performed on the air that has entered the ultraviolet irradiation treatment chamber in the same manner as (1) above. At this time, the amount of air entering the ultraviolet irradiation processing chamber and the amount of air exiting into the room (that is, the amount of air circulating between the ultraviolet irradiation processing chamber and the room) are increased as compared with the ultraviolet irradiation operation on the workpiece. It is recommended that the indoor air be deodorized and sterilized. Further, it is preferable to reduce the standby power consumption by reducing the amount of ultraviolet irradiation (lighting power and number of lighting) by the ultraviolet irradiation means 1. In addition, when performing deodorizing and sterilizing treatment in a wide area or rapidly in the room, it is possible to increase the air circulation rate without reducing the amount of ultraviolet irradiation compared to the case of ultraviolet irradiation operation on the object to be treated. good.

  By adopting the above-described configuration, the air that has entered the ultraviolet irradiation treatment chamber is deodorized and sterilized by the ultraviolet irradiation means when the workpiece is not subjected to the treatment by the ultraviolet irradiation means in at least the ultraviolet irradiation treatment chamber. In response, the air can be deodorized and sterilized indoors by going out of the apparatus, and the time during which the ultraviolet irradiation apparatus is on standby can be effectively utilized. In addition, it is possible to carry out both the air deodorization / sterilization treatment and the ultraviolet irradiation treatment with different optimum treatment conditions.

  In this embodiment, when a small-diameter excimer lamp with an inner diameter of the discharge vessel of 30 mm or less is used, the responsiveness to the switching of the operation is good, and the time until the process can be started stably after the lamp is lit is shortened. Can do. Furthermore, the device configuration is also compact. In this embodiment, an excimer lamp is used, but ultraviolet rays may be irradiated by a mercury lamp or a UV-LED. For example, it is preferable to turn on / off a highly responsive excimer lamp or UV-LED in accordance with switching of operation while a mercury lamp is lit constantly. Further, ozone may be generated by silent discharge.

  In the present embodiment, the manual operation mode has been mainly described. However, in the automatic operation mode, the apparatus may automatically operate based on a predetermined program in accordance with the operation of the operator. .

(Second Embodiment)
The second embodiment according to the present invention is a surface modification apparatus having an air deodorizing / sterilizing function using ozone, a surface modifying function using ultraviolet irradiation and ozone. FIG. 3 is a cross-sectional view showing the configuration of the surface modification apparatus of the second embodiment. In the surface modification apparatus of FIG. 3, an ultraviolet irradiation unit 101 that generates ozone by irradiating ultraviolet rays and an object to be processed 102 that is subjected to surface modification treatment by ultraviolet rays and ozone are disposed in an ultraviolet irradiation treatment chamber 103. ing.

  An excimer lamp is used as the ultraviolet irradiation means. By irradiating ultraviolet rays having a wavelength of 200 nm or less, ozone is generated in the ultraviolet irradiation treatment chamber 3. That is, the ultraviolet irradiation means also serves as the ozone generation means. The excimer lamp is connected to a power source (not shown) and supplied with power. The excimer lamp and the power source are cooled by a part of the air taken in by the intake means.

  By opening the door (not shown) of the ultraviolet irradiation treatment chamber and placing the treatment object 102 on a treatment table (not shown) that can be pulled out from the ultraviolet irradiation treatment chamber 3, the treatment object 102 is made ultraviolet. An object to be processed 102 is placed in the irradiation area of the irradiation means 101.

  Air inside the room (outside the apparatus) is sucked into the ultraviolet irradiation processing chamber 103 by the air intake means 141. The intake means 141 has a function of adjusting the amount of air entering the ultraviolet irradiation processing chamber. Further, the intake means 141 is provided with a filter (not shown), and removes dust, moisture, and the like of the intake air. Inhaled air contains at least oxygen.

  An ozone removal chamber 113 is provided so as to be spatially connected to the ultraviolet irradiation treatment chamber 103. The ozone removing chamber 113 is provided with ozone removing means 105 on the side for sucking air from the ultraviolet irradiation processing chamber 103, and air circulation means 120 on the side for discharging air to the ultraviolet irradiation processing chamber 103. Note that the air circulation means 120 may be provided on the side of sucking air from the ultraviolet irradiation processing chamber 103. That is, the air circulation means 120 may be provided so as to circulate air between the ozone removal chamber 113 and the ultraviolet irradiation processing chamber 103. The air circulation means 120 has a function of adjusting the flow rate of the circulating air and spatially separating the ozone removal chamber 113 and the ultraviolet irradiation chamber.

  The air from which ozone has been removed by the exhaust means 142 exits from the ozone removal chamber 113 into the room. The exhaust unit 142 has a function of adjusting the flow rate of air discharged from the ozone removal chamber 113 into the room. In addition, by operating with any one of the intake means 141, the air circulation means 120, the exhaust means 142, or a combination thereof, the amount of air circulating in the room and the ultraviolet irradiation chamber, and the ultraviolet irradiation chamber and the ozone removal chamber are circulated. It is sufficient if the amount of air to be adjusted is adjustable.

  In order to prevent ozone from flowing out of the ultraviolet irradiation processing chamber 103 into the room, the intake means 141 and the exhaust means 142 may have a function of spatially separating the ultraviolet irradiation processing chamber and the room. Note that a complete isolation state is not necessary as long as ozone can be prevented from flowing out. For example, it is only necessary to stop the air circulation between the room and the ultraviolet irradiation treatment room, and there is no need to spatially separate the ozone removal room 113 and the room.

  The condition setting (operation mode) for various operations of the surface modification device is input to a storage device of a control unit (not shown) by an operation unit (not shown). The automatic operation mode based on the program and the manual operation mode by the operator's operation can be set. The control unit controls each operation of the ultraviolet irradiation means 101, the intake means 141, the exhaust means 142, the air circulation means 120, the door, and the processing table according to the condition setting. The condition setting and operation state of the apparatus are displayed on a display unit (not shown) and can be visually confirmed by an operator.

  In the present embodiment, the object to be treated can be subjected to surface modification treatment by ultraviolet irradiation and ozone, and the inhaled indoor air can be deodorized and sterilized. A photocatalyst may be provided for deodorizing and sterilizing air. It is effective against peculiar smells derived from chemicals used in dental clinics (formalin chemicals).

  Moreover, although the active oxygen and ozone resulting from oxygen were produced | generated using the excimer lamp (ultraviolet irradiation means) which radiates | emits an ultraviolet-ray with a wavelength of 200 nm or less as an ozone production | generation means, ozone may be produced | generated by silent discharge. Further, the generated ozone may be decomposed into active oxygen and oxygen by irradiating with ultraviolet rays near 255 nm. In order to exert such a function, an excimer lamp (ultraviolet irradiation means) as ozone decomposing means may be separately arranged.

  UV ozone cleaning used for surface modification is the application of ultraviolet rays to the energy required to break chemical bonds of contaminants (carbon compounds) deposited on the object to be processed. By efficiently combining strong oxidizing power, the high molecular compound is oxidized and decomposed into a low molecular weight compound, and further oxidized to a gas such as H 2 O, CO 2, NOX and volatilized. In order to confirm the effect of surface modification by UV ozone cleaning, it is possible to determine the degree of surface contamination by measuring the surface tension using the close relationship between the surface cleanliness and the surface tension (contact angle). Further, the generated active oxygen can be reacted with air taken in from the room, thereby deodorizing and sterilizing the air.

The operation of the apparatus of this embodiment will be described with reference to FIG.
(1) Air deodorizing / sterilizing operation The intake means 141 is activated (ON), and air in the room (outside the ultraviolet irradiation processing chamber, outside the apparatus) is put into the ultraviolet irradiation processing chamber 103. The UV ozone treatment (deodorization / sterilization) is performed by activating (ON) the ultraviolet irradiation means 101 for the air that has entered the ultraviolet irradiation processing chamber 103. Here, for ozone generation, only the ozone generation means provided separately may be activated, or both the ultraviolet irradiation means and the ozone generation means may be activated. The air subjected to the UV ozone treatment is discharged into the room by the exhaust means after ozone is removed by the ozone removing means. Here, the air circulation means 120 does not need to be operated (ON).
(2) Ozone removal operation When the air deodorization / sterilization operation is completed by a preset program or operator operation, the ultraviolet irradiation means 101 is automatically turned off (OFF) and the air circulation means 120 is activated (ON). Then, air is circulated between the ultraviolet irradiation processing chamber 103 and the ozone removal chamber 113. The circulating air passes through the ozone removing means 105 to reduce the ozone concentration in the ultraviolet irradiation processing chamber 103. At this time, the air intake unit 141 may be operated (ON) and indoor air may be put into the ultraviolet irradiation processing chamber 103. Further, the exhaust unit 142 may be operated (ON), and the air from which the ozone is removed by the ozone removing unit 105 may be discharged into the room.
(3) When the ozone concentration in the ultraviolet irradiation processing chamber 103 in which the object to be processed is lowered, the door of the ultraviolet irradiation processing chamber is opened, and the object to be processed 102 is placed on the processing table in the ultraviolet irradiation processing chamber 103. At this time, the air circulation means 120 and the exhaust means 142 may be continuously operated to remove odors remaining in the ultraviolet irradiation processing chamber 103.
(4) UV ozone treatment operation of the workpiece When the workpiece 102 is installed and the door of the ultraviolet irradiation chamber 103 is closed, the UV ozone treatment is automatically started. The ultraviolet irradiation means 101 is activated (ON), and the UV ozone treatment is performed on the workpiece. At this time, automatic processing is performed according to the irradiation program (lighting power, time, movement / swing of the object to be processed, etc.). The type of lamp to be lit, lighting power, number of lights, lighting time, etc. are determined for the ultraviolet irradiation means 101 according to the optimum processing conditions for the workpiece 102. In this case, a plurality of types of lamps (with different wavelengths of radiated ultraviolet rays) may be installed, and different lamps may be turned on under optimum conditions for UV ozone treatment and air deodorization / sterilization operation. Further, the processing table moves, swings, rotates, and tilts relative to the ultraviolet irradiation means 101, so that the workpiece 102 can be irradiated with ultraviolet rays uniformly. During the UV ozone treatment of the object to be irradiated, it is preferable to stop the intake or discharge of air into the ultraviolet irradiation treatment chamber or reduce the air flow rate. When the UV ozone treatment under the set conditions is completed, a display (processed display) indicating that the treatment is completed is turned on.
(5) Ozone removal operation When the processing is completed under the set conditions, the ultraviolet irradiation means 101 is automatically turned off (OFF), the air circulation means 120 is activated (ON), and the ultraviolet irradiation treatment chamber 103 and ozone removal are performed. Air is circulated between the chamber 113. The circulating air passes through the ozone removing means 105 to reduce the ozone concentration in the ultraviolet irradiation processing chamber 103. Here, the air circulating means 120 may be activated after the operator performs the removal operation. In the ozone removal operation, the air intake unit 141 may be operated (ON) and indoor air may be put into the ultraviolet irradiation processing chamber 103. Further, the exhaust unit 142 may be operated (ON), and the air from which the ozone is removed by the ozone removing unit 105 may be discharged into the room.
(6) Taking out the object to be processed When the ozone concentration in the ultraviolet irradiation processing chamber 103 is lowered, the door of the ultraviolet irradiation processing chamber is opened and the object 102 is taken out from the ultraviolet irradiation processing chamber 103. At this time, the air circulation means 120 and the exhaust means 142 may be continuously operated to remove odors remaining in the ultraviolet irradiation processing chamber 103. If there is no removal for a certain time or longer, the UV ozone treatment is performed by the ultraviolet irradiation means 101 intermittently or at a low output in order to maintain the effect of treating the object 102. Furthermore, if there is no removal for a certain period of time, the processed display may be turned off. Here, when a UV ozone treatment of a certain level or more is performed or when the use limit time has elapsed, the display of “unusable” is turned on.
(7) Air deodorization and sterilization operation By removing the object to be treated from the ultraviolet irradiation processing chamber and closing the ultraviolet irradiation processing chamber door, the air entering the ultraviolet irradiation processing chamber is reduced as in (1) above. Perform UV ozone treatment. At this time, the amount of air entering the ultraviolet irradiation processing chamber and the amount of air exiting into the room (that is, the amount of air circulating between the ultraviolet irradiation processing chamber and the room) are increased as compared with the ultraviolet irradiation operation on the workpiece. It is recommended that the indoor air be deodorized and sterilized. Further, it is preferable to reduce standby power consumption by reducing the amount of ultraviolet irradiation (lighting power and number of lighting) by the ultraviolet irradiation means 101. In addition, when performing deodorizing and sterilizing treatment in a wide area or rapidly in the room, it is possible to increase the air circulation rate without reducing the amount of ultraviolet irradiation compared to the case of ultraviolet irradiation operation on the object to be treated. good. During air deodorization sterilization, UV ozone treatment, and ozone removal, the ultraviolet irradiation treatment chamber door may be locked.

  By adopting the above-described configuration, at least when the workpiece is not subjected to UV ozone treatment in the ultraviolet irradiation treatment chamber, the air that has entered the ultraviolet irradiation treatment chamber is subjected to deodorization and sterilization treatment by ultraviolet rays and ozone. By removing the ozone, it can be deodorized and sterilized indoors by taking it out of the apparatus, and the time when the ultraviolet irradiation apparatus is on standby can be effectively utilized. In addition, it is possible to carry out both the air deodorization / sterilization treatment and the ultraviolet irradiation treatment with different optimum treatment conditions. Further, by circulating the air in the apparatus by the air circulation means, ozone in the ultraviolet irradiation treatment chamber is removed, and the worker can safely put in and out the workpiece.

  In this embodiment, when a small-diameter excimer lamp with an inner diameter of the discharge vessel of 30 mm or less is used, the responsiveness to the switching of the operation is good, and the time until the process can be started stably after the lamp is lit is shortened. Can do. Furthermore, the device configuration is also compact. In this embodiment, an excimer lamp is used, but ultraviolet rays may be irradiated by a mercury lamp or a UV-LED. For example, it is preferable to turn on / off a highly responsive excimer lamp or UV-LED in accordance with switching of operation while a mercury lamp is lit constantly. Further, ozone may be generated by silent discharge.

  In the present embodiment, the automatic operation mode has been mainly described. However, in the manual operation mode, the operation may be performed by an operator's operation.

In the automatic operation mode, the following setting items are provided.
(1) As an operation mode related to UV ozone treatment, a high processing mode for increasing the amount of UV irradiation when processing an object to be processed, and a low level for not increasing the amount of UV irradiation compared to when not processing. A processing mode is provided. When the amount of ultraviolet irradiation is increased, the amount of cooling to the ultraviolet irradiation means may be increased. Different light sources may be turned on according to each mode. For example, a light source that is constantly turned on and a light source that is turned on only in the high processing mode may be selected depending on the processing conditions of the object to be processed.
(2) The operation mode related to air deodorization and sterilization is a high deodorization mode that increases the amount of air sucked and discharged when the workpiece is not treated, and the amount of air sucked.・ Equipped with a low deodorization mode that does not increase emissions. In the high deodorization mode, it is preferable to increase the irradiation amount of ultraviolet rays and the generation amount of ozone. In particular, when there is no risk of harm to people, ozone may be released into the room.

  As described above, since the operation mode required for processing the object to be processed and the operation mode required for air deodorization / sterilization can be set, both the surface reforming function and the air deodorization / sterilization function can be achieved.

  In the first and second embodiments, the ultraviolet irradiation means and the object to be processed are arranged opposite to each other in the ultraviolet irradiation processing chamber. However, the isolation means (shutter) that shields between the ultraviolet irradiation means and the object to be processed is provided. ) And the object to be processed does not need to be subjected to UV ozone treatment even when the ultraviolet irradiation means is operating (lighted). Further, not all of the sucked air enters the ultraviolet irradiation treatment chamber, but even when a processing object is processed by providing another flow path, the sucked air can be discharged after the UV ozone treatment. By adopting such a configuration, air deodorization and sterilization can be performed even in a state where an object to be processed is arranged in the ultraviolet irradiation processing chamber.

  It is possible to provide both a surface modification function of an object to be processed and an air deodorizing / sterilizing function, and a living body implant processing apparatus having an air deodorizing / sterilizing function in a dental clinic can be provided.

DESCRIPTION OF SYMBOLS 1 Ultraviolet irradiation means 2 To-be-processed object 3 Ultraviolet irradiation processing chamber 41 Intake means 42 Exhaust means

Claims (6)

In an ultraviolet irradiation apparatus comprising an ultraviolet processing chamber in which an ultraviolet irradiation means is disposed,
When the object to be treated is not subjected to the treatment by the ultraviolet irradiation means at least in the ultraviolet treatment chamber,
An ultraviolet irradiation apparatus, wherein the air entering the ultraviolet treatment chamber is deodorized and sterilized by the ultraviolet irradiation means and exits from the apparatus. The object to be treated is subjected to treatment with ultraviolet rays irradiated from the ultraviolet irradiation means and ozone generated by the ultraviolet rays,
The ultraviolet irradiation apparatus according to claim 1, wherein the air that has entered the ultraviolet treatment chamber is subjected to a deodorizing and sterilizing treatment using ultraviolet rays emitted from the ultraviolet irradiation means and ozone generated by the ultraviolet rays. An ozone removal chamber spatially connected to the ultraviolet treatment chamber; an air circulation means for circulating air between the ultraviolet treatment chamber and the ozone removal chamber; and air entering the ozone removal chamber from the ultraviolet treatment chamber In an ultraviolet irradiation device comprising ozone removing means for removing ozone contained in the gas, and exhaust means for discharging air from the ozone removing chamber to the outside of the device,
The air that has been deodorized and sterilized by the ozone generated by the ultraviolet irradiation means is removed by the ozone removal means, enters the ozone removal chamber by the air circulation means, and exits from the apparatus by the exhaust means. The ultraviolet irradiation device according to claim 2. The ultraviolet irradiation apparatus according to any one of claims 1 to 3, wherein the ultraviolet irradiation means is an excimer lamp having an inner diameter of a discharge vessel of 30 mm or less. Surface modification comprising an ultraviolet treatment chamber provided with ultraviolet irradiation means, ozone removal means for removing ozone contained in the air of the ultraviolet treatment chamber, and exhaust means for discharging air out of the apparatus from the ultraviolet treatment chamber A surface modification operation mode in which an object to be treated is subjected to surface modification treatment by ozone generated by the ultraviolet irradiation means in the ultraviolet treatment chamber;
The air entering the ultraviolet treatment chamber is deodorized and sterilized by ozone generated by the ultraviolet irradiation means, the ozone is removed by the ozone removing means, and the air is removed from the apparatus by the exhaust means. A surface modification apparatus having a sterilization operation mode. In the surface modification operation mode, compared to the air deodorization / sterilization operation mode, the amount of ultraviolet rays irradiated from the ultraviolet irradiation means to the object to be processed is increased,
6. The surface reforming apparatus according to claim 5, wherein in the air deodorizing / sterilizing operation mode, an amount of air that is discharged out of the apparatus by the exhaust means is increased as compared with the surface reforming operation mode. .

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