JP2016013603A - Work carrier - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a work carrier which decreases an occupied area in a vacuum environment, and enables the high-speed carrying of work.SOLUTION: A work carrier is equipped with a supporting base 200; a supporting arm 300 coupled to the supporting base 200 so as to swivel around a main swiveling shaft X1; a hand holding arm 400 coupled to the supporting arm 300 so as to rotate about an elbow joint shaft X2; and at least two hands coupled to the hand holding arm 400 so as to rotate around a wrist joint shaft X3. The supporting base 200, the main swiveling shaft X1, the supporting arm 300, and the elbow joint shaft X2 are provided with an area in which a motor 220 for the supporting arm is disposed in the supporting base 200 and an airtight structure for airtightly holding the inside of the supporting arm 300.

Description

  The present invention relates to a workpiece transfer apparatus suitable for transferring a thin plate workpiece such as a glass substrate or a wafer in a vacuum environment.

  As shown in FIG. 17, in a processing system in which process chambers are arranged radially around the transfer chamber, the work transfer device arranged in the transfer chamber for transferring the work between the process chambers is in plan view. Since it is sufficient that the workpiece can be moved linearly in the radial direction, for example, an articulated arm type transfer device combined with a parallel link mechanism as shown in Patent Document 1 can be used. Such a conveying device can move the hand straightly in a plan view while maintaining the posture of the hand holding the workpiece with a small power source due to the function of the parallel link mechanism.

  By the way, in order to reduce the area occupied by the processing system and make it compact, as shown in FIG. 18, the transfer chamber TC is rectangular, and a plurality (two in the illustrated example) are provided along the opposing long sides. A new processing system in which a rectangular process chamber PC is arranged has been proposed. In such a new processing system, it is necessary to transfer the workpiece between the two process chambers PC along the long side while maintaining the same posture of the hand with respect to the long side. However, it is not possible to employ a work transfer device as shown in Patent Document 1 that is only possible.

  In the processing system as shown in FIG. 18, for example, it is conceivable to use a transport device as shown in Patent Document 2. The transport device disclosed in Patent Document 2 includes a first arm that can pivot with respect to a support base, a second arm that can pivot with respect to the first arm, and a hand that can pivot with respect to the second arm. It is configured. Since the first arm pivots with respect to the support base, the second arm pivots with respect to the first arm, and the hand pivots with respect to the second arm, the hand posture and the movement path of the hand can be freely set. Therefore, there is a possibility that the transfer device as shown in Patent Document 2 can transfer the workpiece between the process chambers in the processing system as shown in FIG.

  However, the transport apparatus shown in Patent Document 2 is not configured to be compatible with a vacuum environment, and actually requires panel transport in a vacuum environment such as a processing system in next-generation organic EL panel manufacturing. It cannot be used if

JP 2011-101912 A JP 2012-161858 A

  The present invention has been conceived under the circumstances described above, and is capable of transferring a workpiece in a vacuum environment, can increase the degree of freedom in setting a workpiece transfer path, and has an occupied area. It is an object of the present invention to provide a work transfer device that can reduce the size of the processing system and make the processing system compact and can transfer a work at high speed.

  In order to solve the above problems, the present invention employs the following technical means.

  The workpiece transfer device provided by the present invention includes a support base, a support arm connected to the support base so as to be capable of turning about a main turning axis, and a rotatable about the elbow joint axis with respect to the support arm. A workpiece holding device connected to the hand holding arm, and at least two hands rotatably connected to the hand holding arm around a wrist joint axis. A support arm motor for turning the arm is disposed in the support base, and a hand holding arm motor for rotating the hand holding arm with respect to the support arm is provided in the support base or The hand motor disposed in the support arm and for rotating the hand with respect to the hand holding arm is provided in the support arm. The elbow joint shaft is disposed with a joint shaft for allowing the hand holding arm to rotate with respect to the support arm, and at least two transmission shafts for transmitting power for rotating the hand. Are arranged coaxially, and the support base, the main pivot shaft, the support arm, and the elbow joint shaft include a region in the support base where the motor for the support arm is disposed and the inside of the support arm. An airtight structure for hermetically maintaining is provided.

  In a preferred embodiment, in the elbow joint shaft, the joint shaft is a hollow shaft, the coaxial transmission shaft is inserted into the joint shaft, and the joint shaft and the pivot shaft are rotatably supported. An airtight seal is provided between the transmission member, the transmission shaft and the joint shaft, and between the transmission shafts.

  In a preferred embodiment, the hermetic seal is a magnetic fluid seal.

  In a preferred embodiment, it has a first reduction mechanism that decelerates the output of the support arm motor, and the first reduction mechanism is disposed in the support base, and decelerates the output of the hand holding arm motor. A second reduction mechanism that is disposed in the support base or the support arm, has a third reduction mechanism that reduces the output of the hand motor, and The three speed reduction mechanism is disposed in the support arm or the hand holding arm.

  In a preferred embodiment, the at least two hands are rotatable coaxially about one wrist joint axis with respect to the hand holding arm.

  In a preferred embodiment, the support arm is constituted by two or more support arm members that are pivotably connected to each other, and the elbow joint axis is located on the support arm member on the most distal side. .

  In a preferred embodiment, the hand holding arm is constituted by two or more hand holding arm members that are pivotably connected to each other, and the wrist joint shaft is located on the most distal hand holding arm member. doing.

  According to the workpiece transfer device of the present invention having the above-described configuration, the support arm with respect to the support base, the hand holding arm with respect to the support arm, and two or more hands with respect to the hand support arm are independently swiveled. Alternatively, since it can be rotated, the workpiece can be transferred between the plurality of process chambers more efficiently, and the occupation area can be reduced to make the processing system more compact and to increase the processing speed. it can.

  Other features and advantages of the present invention will become more apparent from the detailed description given below with reference to the drawings.

1 is a schematic side view of a workpiece transfer apparatus 10A according to a first embodiment of the present invention. FIG. 2 is a schematic plan view of the workpiece transfer apparatus 10A shown in FIG. It is a schematic longitudinal cross-sectional view of the workpiece conveyance apparatus 10A shown in FIG. FIG. 4 is a schematic cross-sectional view taken along line IV-IV in FIG. 3. FIG. 5 is a schematic cross-sectional view taken along line VV in FIG. 3. It is an expanded sectional view which follows the VI-VI line of FIG. It is a schematic sectional drawing of the workpiece conveyance apparatus 10B which concerns on the 2nd Embodiment of this invention. FIG. 8 is a schematic cross-sectional view taken along line VIII-VIII in FIG. 7. FIG. 8 is a schematic cross-sectional view taken along line IX-IX in FIG. 7. It is a schematic longitudinal cross-sectional view of the workpiece conveyance apparatus 10C which concerns on the 3rd Embodiment of this invention. It is a schematic longitudinal cross-sectional view of the workpiece conveyance apparatus 10D which concerns on the 4th Embodiment of this invention. FIG. 12 is a schematic plan view of the workpiece transfer apparatus 10 </ b> D shown in FIG. 11. FIG. 12 is a schematic plan view of the workpiece transfer apparatus 10 </ b> D shown in FIG. 11. It is a schematic longitudinal cross-sectional view of the workpiece conveyance apparatus 10E which concerns on the 1st reference example of this invention. FIG. 15 is a schematic plan view of the workpiece transfer apparatus 10E shown in FIG. FIG. 15 is a schematic plan view of the workpiece transfer apparatus 10E shown in FIG. It is explanatory drawing of the example of arrangement | positioning of a process processing system. It is explanatory drawing of the other example of arrangement | positioning of a process processing system.

  Hereinafter, preferred embodiments of the present invention will be specifically described with reference to the drawings.

  1 to 6 show a workpiece transfer apparatus 10A according to a first embodiment of the present invention. The workpiece transfer apparatus 10A includes a fixed base 100, a support base 200, a support arm 300, a hand holding arm 400, and two hands 510 and 520. The workpiece transfer apparatus 10A is installed, for example, in a transfer chamber in a processing system performed in a vacuum environment.

  As clearly shown in FIG. 3, the fixed base 100 accommodates and holds the support base 200 so as to be movable up and down. The support base 200 is supported by a vertical guide (not shown) so that it can be moved up and down so that the upper part protrudes from an opening 102 provided in the ceiling plate 101 of the fixed base 100. The support base 200 is lifted and lowered by a ball screw mechanism 105 to which the rotation of the lifting motor 103 is transmitted via the belt / pulley transmission mechanism 104.

  The support base 200 also has a space S2 surrounded by a cylindrical outer wall 201, a bottom plate 202, and a first vacuum seal unit 250 described later. The fixed base 100 includes a cylindrical outer wall 106, a bottom plate 107, a ceiling plate 101, a bottom plate 202 of the support base 200, and a bellows member interposed between the ceiling plate 101 and the bottom plate 202 of the support base 200. And a space S1 surrounded by. These spaces S1 and S2 communicate with each other, and atmospheric pressure outside the transfer chamber is introduced, but is blocked from the vacuum pressure in the transfer chamber TC by the first vacuum seal unit 250 and the bellows member 108. .

  Inside the support base 200, a support arm motor 220 for turning the support arm 300 about the main turning axis X <b> 1 extending in the vertical direction, a first speed reducer 221 for reducing the rotation of the support arm motor 220, A hand holding arm motor 230 for rotating the hand holding arm 400 around the elbow joint axis X2 to be described later and a second speed reducer 231 for reducing the rotation of the hand holding arm motor 230 are accommodated. As the first reduction gear 221 and the second reduction gear 231, for example, a known structure having a planetary gear mechanism built therein can be used.

  The support arm 300 is supported by the support base 200 via the first vacuum seal unit 250 so as to be rotatable around the main rotation axis X1. The first vacuum seal unit 250 rotatably supports a cylindrical shaft (not shown) on the support arm 300 side with respect to a cylindrical shaft (not shown) on the support base 200 side, and between these cylindrical shafts. For example, the first seal structure (not shown) made of a magnetic fluid seal is applied. In the present embodiment, the first vacuum seal unit 250 has a hollow portion 251 that penetrates in the vertical direction along the main turning axis X <b> 1, and the output portion of the second speed reducer 231 passes through the hollow portion 251. A first transmission shaft 232 to be rotated is extended into the support arm 300.

  The support arm 300 includes a case 301 that extends in the horizontal direction and has an airtight structure. Within the support arm 300, two hand motors 310 and 320 for rotating the two hands 510 and 520 around a wrist joint axis X3 to be described later, and the rotation of the respective hand motors 310 and 320 are decelerated. Two third reduction gears 311 and 321 are accommodated. Each output part of the two third reduction gears 311 and 321 is provided with a pulley 322 (the pulley provided on the output shaft of the reduction gear 311 does not appear in the figure, and the same applies hereinafter). The third reduction gears 311 and 321 can also be of a known structure including a planetary gear mechanism, for example.

  Between the distal end portion 300a of the support arm 300 and the proximal end portion 400a of the hand holding arm 400, the hand holding arm 400 is connected to the support arm 300 so as to be rotatable around the elbow joint axis X2, and two A second vacuum seal unit 350 including second and third transmission shafts 354 and 356 coaxial with the elbow joint axis X <b> 2, which transmits power for rotating the hands 510 and 520, is provided.

  As shown in detail in FIG. 6, the second vacuum seal unit 350 rotatably supports the cylindrical shaft portion 352 (joint shaft) on the hand holding arm 400 side inside the cylindrical shaft portion 351 on the support arm 300 side. In addition, a second seal structure 353 is provided between the cylindrical shaft portions 351 and 352, and the hollow second transmission shaft 354 is rotatably supported inside the cylindrical shaft portion 352 on the hand holding arm 400 side. A third seal structure 355 is provided between the cylindrical shaft portion 352 and the second transmission shaft 354, and the solid third transmission shaft 356 is rotatably supported in the hollow portion of the second transmission shaft 354. A fourth seal structure 357 is provided between the shaft 354 and the third transmission shaft 356. Since the third transmission shaft 356 is solid, the internal space S3 of the support arm 300 is hermetically sealed by the action of the second, third, and fourth seal structures 353, 355, and 357. The second, third, and fourth seal structures 353, 355, and 357 are suitably, for example, magnetic fluid seals.

  As a result, the internal space S1 of the fixed base 100, the internal space S2 of the support base 200, and the internal space S3 of the support arm 300 are communicated, hermetically sealed, and cut off from the vacuum pressure of the transfer chamber TC.

  In the internal space S3 of the support arm 300, an endless belt 362 is wound around a pulley 233 provided on the first transmission shaft 232 and a pulley 361 provided on the cylindrical shaft portion 352 on the hand holding arm 400 side. As a result, the rotational output of the hand holding arm motor 230 provided in the support base 200 is transferred to the cylinder on the hand holding arm 400 side via the first speed reducer 231, the first transmission shaft 232 or the belt / pulley transmission mechanism 360 described above. The hand holding arm 400 can be rotated around the elbow joint axis X <b> 2 with respect to the support arm 300 as transmitted to the shaft portion 352.

  Further, in the support arm 300, the pulleys 312 and 322 attached to the third reduction gears 311 and 321 attached to the hand motors 310 and 320, and the lower ends of the second transmission shaft and the third transmission shaft 354 and 356, respectively. Between the provided pulleys 364 and 366, endless belts 365 and 367 are wound around to form belt-pulley transmission mechanisms 371 and 372, respectively. Accordingly, the second transmission shaft and the third transmission shaft 354, 356 can be independently rotated by the rotational power of the hand motors 310, 320.

  The hand holding arm 400 has a case 410 extending in the horizontal direction. Unlike the case 301 of the support arm 300, the case 410 need not have an airtight structure. Two hands 510 and 520 are rotatably supported on the tip of the hand holding arm 400 around the wrist joint axis X3. Specifically, a hollow support shaft 521 extending from the lower second hand 520 is rotatably supported with respect to the upper wall 411 so as to penetrate the upper wall 411 of the case 410, and the upper first hand 510. A solid support shaft 511 extending from the hollow support shaft 521 is rotatably supported with respect to the hollow support shaft 521 so as to be inserted into the hollow support shaft 521. An endless belt 542 is wound between a pulley 522 provided at the lower end of the hollow support shaft 521 and a pulley 541 provided at the upper end of the third transmission shaft 356, and a pulley 512 provided at the lower end of the solid support shaft 511, An endless belt 552 is wound around a pulley 551 provided at the upper end of the second transmission shaft 354. Reference numerals 421 and 422 denote tension pulleys that contact the endless belts 542 and 552 and apply tension to the endless belts 542 and 552.

  As a result, the upper first hand 510 has the rotation output of the hand motor 310 such that the third speed reducer 311, the pulley, the endless belt 365, the pulley 364, the second transmission shaft 354, the pulley 551, the endless belt 552, and the pulley 512. Is rotated about the wrist joint axis X3 by the rotational force transmitted to the solid support shaft 511 via the. In the lower second hand 520, the rotational output of the hand motor 320 outputs the third speed reducer 321, the pulley 322, the endless belt 367, the pulley 366, the third transmission shaft 356, the pulley 541, the endless belt 542, and the pulley 521. With the rotational force transmitted to the hollow support shaft 521 through the center, the wrist joint axis X3 is rotated.

  In use, the workpiece transfer apparatus 10A of the present embodiment is installed in, for example, a transfer chamber TC in a system that performs a process on an organic EL substrate. Specifically, in the workpiece transfer apparatus 10A, the ceiling plate 101 of the fixed base 100 constitutes a part of the bottom surface of the transfer chamber TC, and the support arm 300, the hand holding arm 400, and the hands 510 and 520 are included in the transfer chamber TC. Installed to be located inside. As described above, the internal space S1 of the fixed base 100, the internal space S2 of the support base 200, and the internal space S3 of the support arm 300 are in communication with each other and are hermetically sealed. Even if the transfer chamber TC is in a vacuum environment, it can be maintained at atmospheric pressure. Therefore, the lifting / lowering motor 103, the support arm motor 220, the first reduction gear 221, the two hand motors 310 and 320, the second and third reduction gears 231, 311, and 321 are arranged without problems in these spaces. be able to.

  By the operation of the lifting / lowering motor 103, the configuration of the support base 200, the support arm 300 coupled thereto, the hand holding arm 400 to the two hands 510 and 520 can be lifted and lowered in the vertical direction. By the operation of the support arm motor 220, the support arm 300 can be turned around the main turning axis X <b> 1 with respect to the support base 200. The hand holding arm 400 can be rotated around the elbow joint axis X <b> 2 with respect to the support arm 300 by the operation of the hand holding arm motor 230. Further, by the operation of the hand motors 310 and 320, the two hands 510 and 520 can be rotated around the wrist joint axis X3 with respect to the hand holding arm 400.

  As is clear from the above, a power transmission path for turning the support arm 300 with respect to the support base 200, a power transmission path for turning the hand holding arm 400 with respect to the support arm 300, and two hands The power transmission paths for rotating 510 and 520 relative to the hand holding arm 400 are configured independently of each other. Therefore, by independently controlling the turning of the support arm 300 with respect to the support base 200, the turning of the hand holding arm 400 with respect to the supporting arm 300, and the turning of the two hands 510 and 520 with respect to the hand holding arm 400, The degree of freedom in selecting the movement paths of the two hands 510 and 520 relative to the turning axis X1 and the postures of the hands 510 and 520 is increased. Therefore, even when the longitudinal center axis CL of each process chamber PC is shifted from the center of the transfer chamber TC as in the processing system shown in FIG. It is possible to insert and pull out along the longitudinal center line. In addition, by appropriately selecting the rotation angle of the hand holding arm 400 with respect to the support arm 300 in plan view and the rotation angle of the two hands 510 and 520 with respect to the hand holding arm 400, the support arm in the workpiece transfer apparatus 10A is selected. It is possible to reduce the minimum turning radius of components above 300, and it is possible to reduce the area occupied by the workpiece transfer apparatus 10A itself in the transfer chamber TC.

  Further, since two independently rotatable hands 510 and 520 are provided, for example, an unprocessed work to be loaded next to a predetermined process chamber is placed on the second hand 520 and interferes with the process chamber. With the second hand 520 retracted and rotated, the first hand 510 is inserted into the process chamber, the processed workpiece is received and pulled out, and the second hand 520 is retracted and rotated. By performing a series of operations such as inserting the hand 520 into the process chamber and loading the unprocessed work into the process chamber, the processed work is taken out from the process chamber and the unprocessed work is efficiently loaded. Can do.

  As a result of the operation described above, the occupation area of the processing system provided with the workpiece transfer device 10A can be reduced, and the processing system can be made compact.

  7 to 9 show a workpiece transfer apparatus 10B according to the second embodiment of the present invention. In these drawings, members or portions that are the same as or equivalent to those of the workpiece transfer apparatus 10A according to the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

  The work transfer device 10B is configured to rotate three hands (first, second, and third hands 510, 520, and 530) coaxially with respect to the hand holding arm 400. For this purpose, the support arm 300 is provided with three hand motors 310, 320, 330 and third speed reducers 311, 321, 331 attached to the motors 310, 320, 330. Further, the second vacuum seal unit 350 connects the hand holding arm 400 to the support arm 300 so as to be rotatable around the elbow joint axis X2, and power for rotating the three hands 510, 520, 530. Are configured to include second, third, and fourth transmission shafts 354, 356, and 358 that are coaxial with the elbow joint axis X2.

  Three hands 510, 520, and 530 are supported coaxially and pivotally around the wrist joint axis X 3 at the tip of the hand holding arm 400. The support shafts extending from the three hands 510, 520, and 530 are coaxial and can rotate with respect to each other. The three hands 510, 520, 530 are driven by the rotation outputs of the three hand motors 310, 320, 330, and the belt / pulley transmission mechanism, the second, third, and fourth transmission shafts 354, 356 in the support arm 300. , 358 through the belt / pulley transmission mechanism in the hand holding arm 400, the point of being independently rotated is similar to the workpiece transfer apparatus 10A according to the first embodiment.

  This workpiece transfer device 10B can also enjoy the same advantages as described above for the workpiece transfer device 10A, but since three hands that are independently rotated are provided, the workpiece between the process chambers can be obtained. The conveyance can be performed more efficiently.

  FIG. 10 shows a workpiece transfer apparatus 10C according to the third embodiment of the present invention. In this figure, the same or equivalent members or parts as those of the workpiece transfer apparatus 10A according to the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

  In the work transfer device 10C, a hand holding arm motor 230 and a second speed reducer 231 attached thereto are provided in a support arm 300. Accordingly, the endless belt 362 is wound around the pulley 233 provided at the output portion of the second reduction gear 231 and the pulley 361 provided at the cylindrical shaft portion 352 (joint shaft) on the hand holding arm 400 side. As a result, the rotation of the hand holding arm motor 230 is transmitted to the hand holding arm 400 via the second reduction gear 231 or the belt / pulley transmission mechanism 360, and the hand arm is centered on the elbow joint axis X2 with respect to the support arm 300. The holding arm 400 can be rotated.

  This work transfer device 10C can also enjoy the same advantages as described above for the work transfer device 10A.

  11 to 13 show a workpiece transfer apparatus 10D according to the fourth embodiment of the present invention. In this figure, the same or equivalent members or parts as those of the workpiece transfer apparatus 10A according to the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

  In this work transfer device 10D, a hand holding arm 400 connected to a support arm 300 so as to be rotatable about an elbow joint axis X2 is divided into two forks, and an arm 400A, which is divided into two forks. One hand 510, 520 is connected to each tip of 400B so as to be rotatable around the wrist joint axis X3. Power transmission to the hands 510 and 520 in the hand holding arm 400 is performed by a belt / pulley transmission mechanism similar to that of the first embodiment.

  Since the two hands 510 and 520 are also rotatably connected to the hand holding arm 400 in the work transfer device 10D, the same as described above for the work transfer device 10A according to the first embodiment. You can enjoy the benefits.

  14 to 16 show a workpiece transfer apparatus 10E according to a fifth embodiment of the present invention. The workpiece transfer device 10E is a modification of the workpiece transfer device 10B according to the second embodiment. In FIGS. 14 to 16, the same or equivalent members or parts as the workpiece transfer device 10B according to the second embodiment are used. Are denoted by the same reference numerals, and detailed description thereof is omitted.

  The workpiece transfer device 10E includes a first hand holding arm 400C that rotates the hand holding arm 400 about the elbow joint axis X2, and a first hand that is rotatably connected to the tip of the first hand holding arm 400C. The arm is divided into two hand holding arms 400D, and two hands 510 and 520 are rotatably connected around the wrist joint axis X3 at the tip of the second hand holding arm 400D.

  That is, one of the three power transmission paths introduced into the first hand holding arm 400C by the second, third and fourth transmission shafts 354, 356 and 358 is held by the second hand holding the first hand holding arm 400C. The other two are used for rotating the hands 510 and 520 relative to the second hand holding arm 400D. In the case of the present embodiment, in the first hand holding arm 400C, between the pulley 541 provided at the upper end of the fourth transmission shaft 358 and the pulley 413 provided on the support shaft 412 integral with the second hand holding arm 400D. An endless belt 414 is wound around the pulley 551 provided at the upper end of the third transmission shaft 356, and a pulley 416 that passes through the support shaft 412 in the axial direction and is provided on a support shaft 415 coaxial with the support shaft 412. The endless belt 417 is wound around the belt. Further, an endless belt 420 is provided between a pulley 561 provided at the upper end of the second transmission shaft 354 and a pulley 419 penetrating the support shaft 415 in the axial direction and provided on the support shaft 415 and the coaxial support shaft 418. Is multiplied. In the second hand holding arm 400D, an endless belt 552 is hung between a pulley 430 provided on the support shaft 415 and a pulley 512 provided on a support shaft 511 integrated with the hand 510. An endless belt 553 is wound around a pulley 432 provided on the shaft 418 and a pulley 522 provided on a support shaft 521 integrated with the hand 520. In the case of this embodiment, among the three motors 310, 320, and 330 that are arranged in the support arm 300 and transmit power toward the inside of the first hand holding arm 400C, the motor denoted by reference numeral 330 is: It functions as a motor for rotating the second hand holding arm 400D with respect to the first hand holding arm 400C, and the motors denoted by reference numerals 310 and 320 move the hands 510 and 520 to the second hand holding arm 400D. It functions as a motor for rotating.

  In the work transfer device 10E, as shown in FIG. 15, the support arm 300, the first hand holding arm 400C, the second hand holding arm 400D and the hands 510, 520 (in FIGS. 15 and 16, the hand 520 is 16), the hand 510, 520 can be extended further away from the main turning axis X1, as shown in FIG. 16, while achieving the minimum turning radius. In addition, the degree of freedom in selecting the movement route of the hands 510 and 520 can be further increased.

  Of course, the scope of the present invention is not limited to the above-described embodiments, and all modifications within the scope of the matters described in the claims are included in the scope of the present invention.

  For example, the support arm 300 may be configured such that a plurality of support arm members that are kept airtight are connected to each other so as to be rotatable. That is, the first support arm is connected to the support base 200 so as to be rotatable around the main pivot axis X1, and the second support arm is connected to the first support arm so as to be rotatable. 200, the first support arm, and the second support arm communicate with each other and maintain airtightness so that the internal pressure can be maintained at atmospheric pressure. On the other hand, a hand holding arm 400 that does not maintain hermeticity is connected to be rotatable about the elbow joint axis X2, and the hands 510 and 520 are connected to the hand holding arm 400 around the wrist joint axis X3 at the tip of the second support arm. It is good also as a structure of connecting so that rotation is possible. In this case, a predetermined first vacuum seal unit 250 is employed as a configuration for enabling the support arm 300 to pivot with respect to the support base 200, and the hand holding arm 400 can be rotated with respect to the second support arm. For this purpose, a predetermined second vacuum seal unit 350 is employed.

  Moreover, as the 3rd reduction gear 321 which decelerates the output of the hand motors 310 and 320, the output side pulley has a larger diameter than the input side pulley, and an endless belt is wound around these pulleys. It is also possible to employ a belt / pulley transmission mechanism, and in the case of this type of reduction gear, this third reduction gear 321 can be formed in the hand holding arm 400 in which vacuum pressure acts. It becomes.

X1 Main pivot axis X2 Elbow joint axis X3 Wrist joint axis 10A Work transfer device (first embodiment)
10B Work transfer device (second embodiment)
10C Work Conveying Device (Third Embodiment)
10D work transfer device (fourth embodiment)
10E Work transfer device (first reference example)
10F Work transfer device (second reference example)
100 Fixed base 103 Lifting motor 104 Belt / pulley transmission mechanism 105 Ball screw mechanism 108 Bellows member 200 Support base 220 Support arm motor 221 First reduction gear 230 Hand holding arm motor 231 Second reduction gear 232 First transmission shaft 250 First vacuum seal unit 300 Support arm 310 Hand motor 311 Third reducer 320 Hand motor 321 Third reducer 350 Second vacuum seal unit 400 Hand holding arm 510 First hand 520 Second hand

Claims (7)

A support base, a support arm coupled to the support base so as to be pivotable about a main pivot axis, a hand holding arm coupled to the support arm so as to be pivotable about an elbow joint axis, and the hand A workpiece transfer device comprising: at least two hands rotatably connected to a holding arm around a wrist joint axis;
A support arm motor for turning the support arm with respect to the support base is disposed in the support base,
The hand holding arm motor for rotating the hand holding arm with respect to the support arm is disposed in the support base or the support arm,
A hand motor for rotating the hand with respect to the hand holding arm is disposed in the support arm,
The elbow joint shaft is coaxial with a joint shaft for enabling the hand holding arm to rotate with respect to the support arm and at least two transmission shafts for transmitting power for rotating the hand. Are located in
The support base, the main turning shaft, the support arm, and the elbow joint shaft are provided with a region in the support base where the motor for the support arm is disposed and an airtight structure that keeps the inside of the support arm airtight. A workpiece transfer device.   In the elbow joint shaft, the joint shaft is a hollow shaft, the coaxial transmission shaft is inserted into the joint shaft, and between the joint shaft and a member that rotatably supports the joint shaft. The work conveying apparatus according to claim 1, wherein an airtight seal is provided between the transmission shaft and the joint shaft and between the transmission shafts.   The workpiece transfer device according to claim 2, wherein the airtight seal is a magnetic fluid seal. A first reduction mechanism that decelerates the output of the motor for the support arm, and the first reduction mechanism is disposed in the support base;
A second reduction mechanism that decelerates the output of the motor for the hand holding arm, and the second reduction mechanism is disposed in the support base or the support arm;
4. The apparatus according to claim 1, further comprising a third reduction mechanism that decelerates an output of the hand motor, wherein the third reduction mechanism is disposed in the support arm or the hand holding arm. Work transfer device.   5. The workpiece transfer device according to claim 1, wherein the at least two hands are rotatable coaxially around one wrist joint axis with respect to the hand holding arm.   The said support arm is comprised by the 2 or more support arm member connected so that rotation was mutually possible, and the said elbow joint axis | shaft is located in the support arm member of the most front side. The workpiece transfer apparatus according to any one of 5.   The hand holding arm is constituted by two or more hand holding arm members that are pivotably connected to each other, and the wrist joint shaft is located on the most distal hand holding arm member. Item 7. The workpiece transfer device according to any one of Items 1 to 6.

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