JP2016001149A - Vibration sensor unit - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a vibration sensor unit that helps suppress the cost required for a vibration sensor used for detecting abnormality in a ball screw device, a support bearing, and a linear motion guide device composing a linear motion table device.SOLUTION: The vibration sensor unit comprises: a housing 2 provided with a first magnetic part formed from a magnetic material; a holding member 4 provided with a second magnetic part formed from a magnetic material; a vibration sensor 5, fixed to the holding member 4, for detecting vibration in a prescribed direction; and a magnet 6 fixed to the holding member 4, the vibration sensor unit further having a rotary part 8 rotatably accommodated in the housing 2 and an electric magnet 7 accommodated in the housing 2 and disposed so that the rotary part 8 enters within a magnetic field. The vibration sensor unit is switchable between a first state in which the magnet 6 and the first magnetic part pull against each other and the rotary part 8 is fixed in place, and a second state in which the electric magnet 7 and the magnet 6 repels each other due to the application of a voltage to the electric magnet 7, the rotary part 8 rotates about 90° from the first state, the second magnetic part and the electric magnet 7 pull against each other, and the rotary part 8 is fixed in place.

Description

  The present invention relates to a vibration sensor unit, and more particularly to a vibration sensor unit for detecting an abnormality used in a linear motion table device supported by a linear motion guide device so as to be linearly movable and moved by a ball screw device.

  Conventionally, in a ball screw device that constitutes a linear motion table device, a support bearing that supports the ball screw device, and a linear motion guide device, a vibration sensor has been used as a means for detecting abnormalities such as damage to rolling elements and rolling paths. There is an abnormality detection means used (for example, Patent Documents 1 and 2).

JP 2010-60551 A JP 2010-38567 A

  However, in the linear motion table device configured by arranging the ball screw device and the linear motion guide device in parallel, the ball screw device, the support bearing that supports the ball screw device, and the linear motion guide device are for detecting an abnormality. Since the direction of vibration to be detected is different, when using a vibration sensor having only one axis for vibration measurement, it is necessary to attach a plurality of vibration sensors. In particular, when a machine tool is used, many vibration sensors are required, which increases the manufacturing cost.

  On the other hand, if a biaxial vibration sensor is used for the measurement direction, the vibration of the ball screw device and the support bearing that supports the ball screw device and the vibration of the linear guide device can be detected by a single vibration sensor. However, since the vibration sensor having a biaxial measurement direction is expensive, there is a problem that it is expensive.

  In view of the above problems, the present invention provides a vibration sensor unit that suppresses the cost of a vibration sensor used for detecting an abnormality in a ball screw device, a support bearing, and a linear motion guide device that constitute a linear motion table device. With the goal.

In order to solve the above problems, the present invention provides:
A housing having a first magnetic part formed of a magnetic material;
A holding member having a second magnetic portion made of a magnetic material; a vibration sensor fixed to the holding member for detecting vibration in a predetermined direction; and a magnet fixed to the holding member. A rotating part housed in a rotatable manner,
An electromagnet housed in the housing and disposed so that the rotating part enters the magnetic field;
A first state in which the magnet attracts the first magnetic part and the rotating part is fixed;
By applying a voltage to the electromagnet, the electromagnet and the magnet are repelled, the rotating portion rotates about 90 ° from the first state, the second magnetic portion attracts the electromagnet, and the rotation A vibration sensor unit characterized in that it can be switched between a second state in which the part is fixed.

  Preferably, by stopping the application of voltage to the electromagnet, the second magnetic portion and the electromagnet are unattracted, and the rotating portion rotates about 90 ° by gravity, so that the second magnetic portion The state is switched to the first state.

Preferably, the holding member has an L shape composed of a pair of flat plate portions,
The magnet and the vibration sensor are fixed inside the holding member.

  Preferably, the holding member is fixed to a rotation shaft that is long in the horizontal direction and rotatably attached to the housing.

  Preferably, in the holding member, two planes outside the pair of flat plate portions are in surface contact with a vertical plane formed in the casing in the first state and the second state, respectively.

  Preferably, the electromagnet is disposed on the opposite side of the holding member via the vertical plane.

  ADVANTAGE OF THE INVENTION According to this invention, the vibration sensor unit which suppresses the cost concerning the vibration sensor used for the abnormality detection of the ball screw apparatus which comprises a linear motion table apparatus, a support bearing, and a linear motion guide apparatus can be provided.

It is a front view which shows typically the internal structure of the vibration sensor unit which concerns on embodiment of this application. It is a side view which shows typically the state which looked at the internal structure of the vibration sensor unit which concerns on embodiment of this application from the right side of FIG. It is a front view which shows typically the internal structure of the state which applied the voltage to the electromagnet of the vibration sensor unit which concerns on embodiment of this application. It is a top view which shows the linear motion table apparatus which can use the vibration sensor unit which concerns on embodiment of this application.

  Hereinafter, a vibration sensor unit according to an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a front view schematically showing the internal structure of the vibration sensor unit 100 according to the embodiment of the present application. 2 is a side view schematically showing the internal structure of the vibration sensor unit 100 according to the embodiment of the present application as viewed from the right side of FIG. 1 and 2, the upper and lower sides of the drawings coincide with the upper and lower sides of the vibration sensor unit 100.

  The vibration sensor unit 100 includes a housing 2, a rotating shaft 3 rotatably attached to the housing 2 inside the housing 2, an L-shaped member 4 as a holding member fixed to the rotating shaft 3, The vibration sensor 5 fixed to the L-shaped member 4, the magnet 6 fixed to the L-shaped member 4 together with the vibration sensor 5, and the housing close to the portion of the L-shaped member 4 to which the magnet 6 is fixed. The electromagnet 7 accommodated in the body 2 is a main component.

  The housing 2 is made of a magnetic material and has a rectangular parallelepiped outer shape. The housing 2 includes a first housing portion 2a that houses the electromagnet 7, a rotating shaft 3, an L-shaped member 4, a vibration sensor 5, and a magnet. 6 is formed, and a second housing portion 2b for housing 6 is formed. The housing | casing 2 may be provided with the attaching part for attaching the vibration sensor unit 100 to a desired position.

  The rotary shaft 3 has a cylindrical shape that is long in the depth direction (horizontal direction) in FIG. 1, and both ends thereof are recessed portions 2c and 2d (FIG. 2) formed respectively on the front side member and the back side member of the second housing portion 2b. 2) and is rotatably attached to the housing 2.

  The L-shaped member 4 is composed of a pair of rectangular flat plate portions having a depth similar to that of the vibration sensor 5 in the depth direction of FIG. 1, and the short sides of the pair of flat plate portions are joined at an angle of 90 °. It has a shape. The pair of flat plate portions is longer in the flat plate portion on the side where the vibration sensor 5 is fixed than the flat plate portion on the side where the magnet 6 is attached. The L-shaped member 4 is accommodated in the second accommodating portion 2b, and is fixed to the intermediate portion of the rotation shaft 3 so that the inside of the corner portion, that is, the side forming the 90 ° angle is along the rotation shaft 3.

  The vibration sensor 5 is fixed to the longer flat plate portion inside the L-shaped member 4, that is, on the side where the pair of flat plate portions form an angle of 90 °. The vibration sensor 5 is a uniaxial vibration sensor that can detect vibration in the direction of the double arrow shown on the vibration sensor 5 in FIG. As the vibration sensor 5, a commercially available vibration sensor can be used. The cost can be further reduced by using a commercially available vibration sensor. The vibration sensor 5 has a cable 5a that extends outside the housing 2 and transmits a detection signal.

  The magnet 6 is fixed to the shorter flat plate inside the L-shaped member 4. As the magnet 6, a permanent magnet such as an alnico magnet, a ferrite magnet, or a neodymium magnet can be used. The vibration sensor 5, the L-shaped member 4, and the magnet 6 constitute a rotating unit 8 that can rotate within a range of about 90 ° about the rotating shaft 3.

  The electromagnet 7 is accommodated in the first accommodating portion 2a at a position close to the flat plate portion of the L-shaped member 4 to which the magnet 6 is fixed so that the rotating portion 8 enters the magnetic field. The electromagnet 7 extends to the outside of the housing 2 and has two plus and minus cables 7a and 7b for applying a voltage. The electromagnet 7 and the magnet 6 are arranged so as to repel the magnet 6 when a voltage is applied to the electromagnet 7.

  The vibration sensor unit 100 described above as a general lecturer can be used, for example, in the linear motion table device 200 shown in FIG. FIG. 4 is a plan view of the linear motion table device 200.

  The linear motion table device 200 includes a first linear motion guide device 10 that is fixed in a horizontal direction to the attached portion, and a first linear motion guide device 10 that is parallel to the first linear motion guide device 10 and is fixed to the attached portion at a predetermined interval. Two linear motion guide devices 11 are arranged in parallel with the linear motion guide devices at an intermediate position between the first linear motion guide device 10 and the second linear motion guide device 11, and are attached to the mounted portion by the support bearings 12a and 12b. The ball screw device 13 is supported, the first linear motion guide device 10, the second linear motion guide device 11, and the table 14 supported by the ball screw device 13.

  The first linear motion guide device 10 and the second linear motion guide device 11 can slide on the guide rails 10a and 11a fixed to the mounted portion and the guide rails 10a and 11a via rolling elements (not shown), respectively. The sliders 10b, 10c, 11b, and 11c are attached.

  The ball screw device 13 includes a screw shaft 13a that is rotatably supported by the support bearings 12a and 12b, and a nut 13b that is attached to the screw shaft 13a via a ball (not shown) so as to be capable of spiral movement. Consists of.

  The table 14 is supported by sliders 10b, 10c, 11b, 11c, and a nut 13b. The table 14 is moved in the axial direction by rotating the screw shaft 13a by a driving device (not shown) and moving the nut 13b in the axial direction.

  The vibration sensor unit 100 according to the embodiment of the present application shown in FIG. 1 can be attached to an arbitrary place on the table 14. The direction in which the vibration sensor unit 100 is attached to the table 14 is such that the left and right directions in FIG. 1 are parallel to the moving direction of the table 14 of the linear motion table apparatus 200.

  When the vibration sensor unit 100 is attached to the linear motion table device 200 as described above, the directions of the white double arrows shown on the right side of the vibration sensor unit 100 shown in FIG. The vibration direction is a detection target of the linear motion guide devices 10 and 11.

  The vibration sensor unit 100 shown in FIG. 1 shows a first state in which no voltage is applied to the electromagnet 7. In this first state, the rotating unit 8 is caused by a force that rotates clockwise around the rotation axis 3 due to gravity and a force that attracts the magnet 6 and a part of the housing 2 (first magnetic unit). The rotation force about the rotation axis 3 is received clockwise. On the other hand, the vertical plane on the electromagnet 7 side of the second housing portion 2b is in surface contact with the flat plate portion of the L-shaped member 4 to which the magnet 6 is fixed, so that the rotating portion 8 does not rotate any more. ing. Thereby, the rotation part 8 can maintain the position irrespective of the movement of the table 14. At this time, since the detection direction of the vibration sensor 5 is the direction of the double arrow shown in the vibration sensor 5 of FIG. 1, that is, the vertical direction, the vibration sensor 5 includes the first and second linear motion guide devices 10 and 11. The vibration to be detected can be detected.

  On the other hand, the vibration direction to be detected by the ball screw device 13 and the support bearings 12a and 12b is the axial direction of the screw shaft 13a. Therefore, when detecting these vibrations, a voltage is applied to the electromagnet 7 to repel the magnet 6, thereby rotating the rotating portion 8 by 90 ° around the rotating shaft 3 counterclockwise.

  FIG. 3 is a front view schematically showing the internal structure of a state (second state) in which a voltage is applied to the electromagnet of the vibration sensor unit according to the embodiment of the present application.

  Also in this second state, the rotating portion 8 receives a force that rotates clockwise around the rotation axis 3 due to gravity, but a part of the L-shaped member 4 (second state) located near the electromagnet 7. The magnetic part) and the electromagnet 7 are attracted to each other to receive a force rotating counterclockwise, and the L-shaped member 4 is temporarily fixed in contact with the side surface of the second accommodating part 2b on the electromagnet 7 side. The

  In FIG. 3, since the white double-headed arrow described on the lower side of the vibration sensor unit 100 is the vibration direction to be detected by the ball screw device 13 and the support bearings 12a and 12b, the vibration of the vibration sensor 5 is detected. In accordance with the direction, the vibration sensor 5 can detect the vibration.

  When detecting the vibrations of the first and second linear motion guide devices 10 and 11 again, if the application of voltage to the electromagnet 7 is stopped, the rotating unit 8 rotates clockwise around the rotation axis 3 by gravity. Then, the magnet 6 and the housing 2 are attracted to return to the state shown in FIG.

  Next, a detailed configuration for detecting the vibration in which the vibration sensor unit 100 using the vibration sensor having the vibration detection direction of one axis operates as described above and the vibration directions differ by about 90 ° will be described.

  First, the vibration detection direction of the vibration sensor 5 differs by 90 ° between the first state where no voltage is applied to the electromagnet 7 shown in FIG. 1 and the second state where voltage is applied to the electromagnet shown in FIG. Must be configured as follows. For this reason, in the present embodiment, when the vibration sensor 5 is fixed inside the L-shaped member 4 having an angle of 90 °, and the L-shaped member 4 rotates in both directions around the rotation shaft 3, The two outer surfaces of the L-shaped member 4, that is, the two planes on the side forming an angle of 270 °, are configured to be in surface contact with the side surfaces of the second accommodating portion 2 b that form the same plane. Yes.

  When the L-shaped member 4 rotates around the rotation axis 3, the corners of the L-shaped member 4 move so as to swell toward the electromagnet 7 with respect to the plane on the same plane. In order to prevent interference with the corners of the L-shaped member 4, a recess 2 c that is recessed toward the electromagnet 7 side is provided.

  Moreover, in the 2nd state shown in FIG. 3, the rotation part 8 must maintain this state against gravity. Therefore, the counterclockwise rotational force generated by the electromagnet 7 and the L-shaped member 4 is configured to be sufficiently larger than the clockwise rotational force generated by gravity. That is, the electromagnet 7 has a height that extends above the rotating shaft 3 and a counterclockwise rotational force that is sufficiently large to maintain the position of the rotating portion 8 can be obtained. It is set as follows.

  Further, since the rotating unit 8 returns from the state shown in FIG. 3 to the state shown in FIG. 1 by gravity, the gravity is configured to apply a clockwise rotational force to the rotating unit 8 around the rotating shaft 3. That is, the rotating shaft 3 is disposed on the electromagnet 7 side of the vertical line passing through the center of gravity of the rotating unit 8.

  According to the vibration sensor unit according to the embodiment of the present application described above, the cost of the vibration sensor used for detecting abnormality of the ball screw device, the support bearing, and the linear motion guide device that constitute the linear motion table device is reduced. Can do. That is, by configuring the uniaxial vibration sensor to be able to rotate 90 °, the ball screw device, the support bearing, and the linear motion that constitute the linear motion table device can be obtained by providing only one uniaxial vibration sensor. It is possible to detect abnormality of the guide device.

  In addition, although specific embodiment was mentioned and demonstrated in order to help understanding of this invention, this invention is not restricted to the vibration sensor unit which concerns on the said embodiment, A various change and improvement are possible.

  For example, the vibration direction detected by the vibration sensor 5 is the horizontal direction in the first state and detects vibrations of the ball screw device 13 and the support bearings 12a and 12b, and the vertical direction in the second state is the linear motion guide device 10; 11 vibrations may be detected.

  Moreover, the thing of other shapes, such as a frame-shaped member, can be used instead of an L-shaped member.

  The detection direction of the vibration sensor and the direction of the vibration to be detected are preferably exactly the same direction, but may be in a range where an abnormality can be detected even if they are not exactly the same direction. Therefore, the rotation angle of the rotating unit 8 is not limited to 90 °, and may be slightly changed.

  The linear motion table device that can use the vibration sensor unit 100 is not limited to the linear motion table device 13 shown in FIG. 4, and any linear motion table device having a ball screw device and a linear motion guide device may be used. Can be used.

2 Housing 2a First housing portion 2b Second housing portion 2c Recess 3 Rotating shaft 4 L-shaped member 5 Vibration sensor 6 Magnet 7 Electromagnet 8 Rotating portion 10 First linear motion guide device 10a Guide rail 10b, 10c Slider 11 Second Linear motion guide device 11a Guide rails 11b, 11c Slider 12a, 12b Support bearing 13 Ball screw device 13a Screw shaft 13b Nut 14 Table 100 Vibration sensor unit 200 Linear motion table device

Claims (6)

A housing having a first magnetic part formed of a magnetic material;
A holding member having a second magnetic portion made of a magnetic material; a vibration sensor fixed to the holding member for detecting vibration in a predetermined direction; and a magnet fixed to the holding member. A rotating part housed in a rotatable manner,
An electromagnet housed in the housing and disposed so that the rotating part enters the magnetic field;
A first state in which the magnet attracts the first magnetic part and the rotating part is fixed;
By applying a voltage to the electromagnet, the electromagnet and the magnet are repelled, the rotating portion rotates about 90 ° from the first state, the second magnetic portion attracts the electromagnet, and the rotation A vibration sensor unit characterized in that it can be switched between a second state in which the part is fixed.   By stopping the application of voltage to the electromagnet, the second magnetic part and the electromagnet are attracted to each other, and the rotating part rotates about 90 ° by gravity, so that the second state is The vibration sensor unit according to claim 1, wherein the vibration sensor unit is switched to a first state. The holding member has an L shape composed of a pair of flat plate portions,
The vibration sensor unit according to claim 1, wherein the magnet and the vibration sensor are fixed inside the holding member.   The vibration sensor unit according to claim 3, wherein the holding member is fixed to a rotary shaft that is long in the horizontal direction and rotatably attached to the housing.   In the holding member, two planes outside the pair of flat plate portions are in surface contact with a vertical plane formed in the casing in the first state and the second state, respectively. The vibration sensor unit according to claim 3 or 4.   The vibration sensor unit according to claim 5, wherein the electromagnet is disposed on a side opposite to the holding member via the vertical plane.

Images