JP2016000860A - Evaporation unit and vacuum coating apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To decrease an evaporated material depositing on shielding means and improve yield.SOLUTION: A vacuum coating apparatus 100 for coating a web includes a first rotatable coating drum 11 and a second rotatable coating drum 12 disposed parallel to the first drum 11 with a gap 17 formed between the first and second coating drums 11, 12 for transporting at least one web 15. A first evaporator 21 has at least one evaporation source 21a for generating a first evaporation beam 31b, and the first evaporator 21 is arranged next to the first coating drum 11. A second evaporator 22 has at least one evaporation source 22a for generating a second evaporation beam 32b, and the second evaporator 22 is arranged next to the second coating drum 12. The first and second evaporators 21, 22 are inclined relative to each other.

Description

Background of the Invention

(Field of Invention)
Embodiments described herein relate to a vacuum coating apparatus for coating a web. More specifically, an embodiment of a vacuum coating apparatus having at least one deposition source and at least two coating drums will be described. A further embodiment relates to a vacuum coating apparatus having at least two coating drums and at least two deposition sources inclined relative to each other. A further embodiment relates to a vapor deposition unit having vapor deposition sources that are inclined with respect to each other.

(Description of related technology)
Coating equipment is used for coating webs such as foils or films with material overlay. The coating apparatus includes a vapor deposition source directed to the coating drum that conveys the web through a deposition zone formed between the vapor deposition source and the coating drum.
The material deposited from the deposition source forms a “deposition beam” having a specific opening angle, thereby spreading the deposited material. In order to limit the deposition of vapor deposition material on the web and to avoid deposition on other areas of the coating apparatus, a shielding means is provided to cover the area to be protected. These shielding means need to be cleaned regularly. Also, a significant amount of evaporated material is deposited on these shielding means, thus they are wasted and reduce yield.

  Therefore, it is necessary to improve the vacuum coating apparatus.

In view of the above, a vacuum coating apparatus according to claim 1 is provided. A vacuum coating apparatus according to claim 9 is provided. Furthermore, a vacuum coating apparatus according to claim 14 is provided. Furthermore, a vapor deposition unit according to claim 17 is provided. A web coating method according to claim 20 is also provided.

According to one embodiment, a vacuum coating apparatus for coating a web is provided. The apparatus includes a vacuum chamber, a first rotatable coating drum, and a second rotatable coating drum disposed in parallel with the first drum, between the first and second coating drums. A gap for conveying at least one web is formed. The first vaporizer includes at least one vapor deposition source for generating a first vapor deposition beam and is disposed next to the first coating drum. The second vapor deposition device includes at least one vapor deposition source for generating a second vapor deposition beam, and is disposed next to the second coating drum. The first and second vaporizers are inclined with respect to each other.

According to one embodiment, a vapor deposition unit is provided. The vapor deposition unit includes a first vapor deposition device having at least one vapor deposition source for generating a first vapor deposition beam, and a second vapor deposition device having at least one vapor deposition source for generating a second vapor deposition beam. including. The first and second vaporizers are inclined with respect to each other.

According to one embodiment, a method for coating a web is provided. This method
Providing a first rotatable coating drum and a second rotatable coating drum disposed parallel to the first drum, wherein a gap is formed between the first and second coating drums. And evaporating material from the first vapor deposition device from the first vapor deposition direction and vaporizing material from the second vapor deposition device from the second vapor deposition direction. Forming a common deposition zone adjacent to the surface of the coating drum;
Transporting at least one web through a common deposition zone by a second coating drum and / or a second coating drum.

In order that the above-described structure of the present invention may be understood in detail, a more specific description of the present invention, briefly summarized above, will be given with reference to the embodiments. Some embodiments are shown in the accompanying drawings. The accompanying drawings, however, merely illustrate exemplary embodiments of the invention and therefore should not be construed as limiting the scope thereof, and the invention may include other equally effective embodiments. It should be noted.
1 shows an embodiment of a vacuum coating apparatus in which two vapor deposition sources and two coating drums are arranged parallel to each other. 1 shows an enlarged cross-section of a vacuum coating apparatus having two vapor deposition sources for illustrating the configuration of the vapor deposition source for a coating drum according to an embodiment. 1 shows an enlarged cross-section of a vacuum coating apparatus having two vapor deposition sources for illustrating the configuration of the vapor deposition source for a coating drum according to an embodiment. 1 shows an enlarged cross-section of a vacuum coating apparatus having two vapor deposition sources for illustrating the configuration of the vapor deposition source for a coating drum according to an embodiment. 1 shows an embodiment of a vacuum coating apparatus in which one deposition source and two coating drums are arranged in parallel to each other. 1 illustrates one embodiment of a vacuum coating apparatus having two deposition sources and one coating drum. 1 shows an embodiment of a vacuum coating apparatus in which one deposition source and two coating drums are arranged in parallel to each other. 1 shows an embodiment of a vacuum coating apparatus in which two vapor deposition sources and two coating drums are arranged parallel to each other. 1 illustrates a vacuum coating apparatus according to one or more embodiments. 1 illustrates a vapor deposition unit according to one or more embodiments. ~ The vapor deposition beam of a vapor deposition source is shown. FIG. 3 shows a top view of two coating drums arranged in parallel to each other according to one or more embodiments.

To facilitate understanding, identical or similar reference numerals have been used, where possible, to designate identical elements that are common to the drawings. It is understood that elements disclosed in one embodiment may be beneficially used in other embodiments without specific reference.

Detailed description

Embodiments described herein can be used for a variety of coating processes, such as coating a web conveyed by at least one coating drum disposed in a vacuum chamber.

In the following detailed description, reference is made to the accompanying drawings that form a part hereof, and in which are shown by way of illustration specific embodiments in which the invention may be practiced. In this regard, directional terms (eg, “top”, “bottom”, “front”, “back”, “top”, “end”, etc.)
Used with reference to the orientation of the figures described. Since the components of the embodiments can be arranged in many different orientations, the directional terms are used for illustration purposes and are in no way limiting. It is to be understood that other embodiments may be used and structural or logical changes may be made. The following detailed description is, therefore, not to be construed in a limiting sense. The described embodiments employ specific language and should not be construed as limiting the scope of the appended claims.

It should be understood that the configurations of the various exemplary embodiments described herein can be combined with each other, unless otherwise specified. For example, the configurations illustrated or described as part of one embodiment can be used in combination with the configurations of other embodiments to obtain a further embodiment. This description is intended to include such modifications and variations.

For the purposes of this specification, the term “lateral” is intended to represent a direction that is perpendicular to the direction of the coating drum and substantially parallel to the connecting line connecting the rotation axes of the coating drum. Yes. The term “behind the coating drum” is intended to denote an area located behind the coating drum relative to the deposition source. Thus, the term “in front of the coating drum” is intended to denote an area between one or more coating drums and the deposition source.

FIG. 1 illustrates a vacuum coating apparatus 100 according to one embodiment, which can be combined with other embodiments described herein. The vacuum coating apparatus 100 is
The 1st coating drum 11 contains the 1st coating drum 11 which has the rotating shaft 11a which can rotate the circumference | surroundings. FIG. 1 shows an axis 11 a as the geometric center of the first coating drum 11. The vacuum coating apparatus 100 includes a second coating drum 12
Further includes a second coating drum 12 having a rotating shaft 12a rotatable about the circumference. FIG. 1 shows the axis 12 a as the geometric center of the second coating drum 12. The first and second coating drums 11 and 12 are arranged with each other such that their shafts 11a and 12a are arranged in parallel to each other. A gap 17 is formed between the outer peripheral surfaces 25 and 26 of the first and second coating drums 11 and 12.

The side-by-side arrangement of the first and second coating drums 11 and 12 increases the available surface on which the web 15 can be coated while in contact with the coating drum, as further described below. This allows the use of smaller coating drums compared to, for example, vacuum coating equipment using a single large coating drum.
If a smaller coating drum is used, the vacuum coating apparatus can be downsized. Furthermore, the driving force required to rotate the coating drum can be reduced. In an embodiment that can be combined with one or more embodiments described herein, the web 15 is a rotating outer surface 2 of the first and second rotating coating drums 11 and 12 that are rotating.
Supported by 5 and 26 and coated in contact with some of them.

The gap 17 can be relatively small, for example, to maintain a pressure differential between the upper and lower chambers, as further described below. The gap 17 is about 1 m
m to about 60 mm. Further, the ratio R / D between the radius R of the coating drums 11, 12 and the width D of the gap 17 can be in the range of about 500 to about 1. For example, the ratio R / D can be 15 or more. According to embodiments that can be combined with one or more embodiments described herein, the ratio R / D can be 100 or more.

In the embodiment shown in FIG. 1, both the first and second coating drums 11 and 12 have the same radius R. In a further embodiment, the first coating drum 11 is a second coating drum.
Can have a larger radius than the coating drum 12. Alternatively, first
The coating drum 11 can have a smaller radius than the second coating drum 12.

The vacuum coating apparatus 100 has at least one deposition source 21a.
One first vapor deposition device 21 is further included. Typically, the vacuum coating apparatus 100 includes a plurality of first vaporizers 21 each having a vapor deposition source 21a. Alternatively, the first vapor deposition device 21
Includes a plurality of vapor deposition sources 21a. Regardless of whether there is an individual first vapor deposition device 21 or only one vapor deposition source 21 having a plurality of vapor deposition sources 21a, the vapor deposition source 21a is a first and second coating drum. 11 and 12 can be arranged along a line parallel to the rotation axes 11a and 12a. And the vapor deposition source 21a is arrange | positioned in the 1st row | line parallel to the axis | shaft 11a. Since FIG. 1 shows a projection along the axes 11a, 12a, one deposition source 21a
Only shown. The first vapor deposition device 21 is disposed next to the first coating drum 11. In the first vapor deposition device 21, in particular, the vapor deposition source 21 a of the first vapor deposition device 21 is arranged closer to the first coating drum 11 than the second coating drum 12.

The second vaporizer 22 having the vapor deposition source 22 a can be disposed next to the second coating drum 12. In the second vapor deposition device 22, in particular, the vapor deposition source 22 a of the second vapor deposition device 22 is arranged near the second coating drum 12 rather than the first coating drum 11. The second vapor deposition device 22 can have a configuration similar to that of the first vapor deposition device 21.
For example, the second vapor deposition device 22 includes a plurality of vapor deposition sources 2 arranged in a second row parallel to the axis 12a.
2a can be included. The vapor deposition sources 21a and 22a in the first and second rows are shifted laterally with respect to each other, as will be described later.

The first and second vaporizers 21 and 22 are configured to generate respective vapor deposition beams 31b and 32b, which can also be referred to as vapor deposition lobes or radiation lobes of the vapor deposition material.
Each of the deposition beams 31b and 32b has a main deposition direction 31a and 32a that is typically normal to the surface of the respective deposition source 21a and 22a from which the material evaporates. The person skilled in the art
It will be understood that each deposition source 21a, 22a has a predetermined spatial extent. Thus, the deposition source is defined as the area where the material evaporates. As mentioned above, the first
Each of the second vaporizers 21 and 22 may include at least one vapor deposition source 21a and 22a. The deposition sources are separate from each other and spaced apart. For example, the vaporizer can include a ceramic crucible or boat configured to melt the metal. The crucible can be made of conductive ceramics and heated by passing an electric current directly. Induction heating is another option. A further option is electron beam heating. Therefore, the vapor deposition source is a heat source in which the material is evaporated by heating. The region of molten metal forms the actual deposition source. In FIG. 1, the vapor deposition beams 31b and 32b are indicated by broken lines.

Molten metal usually covers or wets certain areas of the crucible. The orientation of the crucible surface wetted by the molten metal determines the main vapor deposition direction orthogonal thereto. Therefore, the main vapor deposition direction can be changed by arranging the crucible in a given direction.

According to one embodiment that can be combined with one or more embodiments described herein, the first and second vaporizers 21 and 22 project perpendicularly to the first and second axes 11a and 12a. When viewed, they can be arranged in a staggered pattern. 8 and 10 illustrate this by showing a plurality of first vaporizers 21 each having a single vapor deposition source 21a and a plurality of second vaporizers 22 each having a plurality of vapor deposition sources. ing. In a further embodiment that can be combined with one or more embodiments described herein, the first and second vaporizers 21 and 22 are a single vaporizer unit having two rows of vapor deposition sources spaced from each other. Can be fused.

Those skilled in the art will appreciate that the distribution of the vapor deposition material within the vapor deposition beams 31b and 32b is not uniform and decreases from the center of the vapor deposition beam to their boundaries, here indicated by dashed lines 31b and 32b. Let's go. The vapor deposition beams 31b and 32b have a predetermined opening angle. The vapor deposition beam typically does not have a clear boundary due to the spatial distribution of the vapor deposition material. For illustration purposes only and not intended to be limiting in any way,
Consider an Al deposition source that is approximately 180 mm away from the surface. The deposition source has a lateral dimension of about 30 mm. The deposition source was deposited on a surface having a lateral extent of about 80-100 mm, where the layer thickness at the end of the deposition layer is only about 10% of the layer thickness in the middle of the deposition layer region. The deposition beam is generated at a predetermined temperature that results in an Al layer region.

As shown in FIG. 1, the vapor deposition beam 31 b of the first vapor deposition device 21 is inclined with respect to the surface of the first drum 11. The main vapor deposition direction 31a of the vapor deposition beam 31b is relative to an imaginary line between the vapor deposition source 21a of the first vapor deposition device 21 and the axis 11a of the first coating drum 11 when projected along the axis 11a. Inclined. Further, the vapor deposition beam 32 of the second vapor deposition unit 22 is used.
b is inclined with respect to the surface of the second drum 12. The main vapor deposition direction 3 of the vapor deposition beam 32b
2a is inclined with respect to an imaginary line between the vapor deposition source 22a of the second vapor deposition device 22 and the axis 12a of the second coating drum 12 when projected along the axis 12a. Therefore, the main vapor deposition directions 31a and 32a of the vapor deposition beams 31b and 32b are vertical but have a specific incident angle and do not collide with the outer surfaces 25 and 26 of the nearest coating drums 11 and 12, respectively.

Furthermore, the vapor deposition beams 31b and 32b can be tilted with respect to each other. As described above, the direction of the vapor deposition beams 31b and 32b can be defined by the direction of the vapor deposition sources 21a and 22a. In order to tilt the deposition beams 31b and 32b with respect to each other, the deposition sources 21a and 22a are tilted with respect to each other. In FIG. 1, when viewed along the axes 11a and 12a, the vapor deposition sources 21a and 22a are inclined with respect to each other, whereby the vapor deposition beams 31b and 32b are inclined toward each other and overlap each other. It shows that. Thus, a common deposition zone or a common vapor deposition cloud is formed.

As described above, the first and second vapor deposition sources 21a and 22a can be shifted in a direction parallel to the axes 11a and 12a. For example, the plurality of vapor deposition sources 21a and 22a can be arranged in a staggered manner. Therefore, the term “inclined towards each other” relates to the direction when projected along the axes 11a and 12a.

The first and second coating drums 11 and 12 carry the web 15 to be coated through the deposition zone along their outer peripheral surfaces 25 and 26. As shown in FIG. 1, the web 15 is conveyed around the lower half of the second coating drum 12, passes through the gap 17, is guided back through the gap 17 by the guide roller 18, and then the first Is conveyed along the lower half of the coating drum 11. The first and second coating drums 11 and 12 together form a large coating area where the web 15 can be coated. Due to the use of the guide roller 18, the web 15 is caused by a first coating that occurs when it is conveyed by the second coating drum 12 and a second coating that occurs when it is conveyed by the first coating drum 11. Double "coated. The first and second coating drums 11 and 12 have the same rotational direction.

The guide roller 18 can be cooled together with the first and second coating drums 11 and 12. It is also possible to cool only the guide roller 18. Alternatively, only the first and second coating drums 11 and 12 can be cooled.

The tilted arrangement of the vaporizers 21 and 22 avoids or at least significantly reduces material deposition in the outer region laterally outside of the first and second coating drums 11 and 12. These outer regions are arranged on the opposite side of the first and second coating drums 11 and 12 facing the gap 17. Thus, the tilted configuration increases the ratio of material deposited on the web 15 to material deposited on other surfaces (eg, shielding means) in the coating apparatus. Thus, the coating process becomes efficient, increasing yields and reducing production costs. This can also increase the transport speed of the web 15 because more material can be deposited in a given time.

By using an inclined arrangement of the first and second vaporizers 21 and 22, for example, a maximum of 90
% And even higher coating efficiencies are obtained. This is a significant improvement over commonly used vaporizer units that have multiple deposition sources oriented in the same direction with a coating efficiency of 60% or less.

Reduction of material deposition on the shielding means is useful for a number of reasons. Shielding means are typically used to limit deposition within the desired area and protect other areas from deposition.
For example, lateral shielding means can be provided in the “shaped” deposition zone. A tilted arrangement as described herein can be used to shape or focus the deposition zone, thereby requiring additional shielding means to constrain the deposition zone in some applications. And not. However, an optional shielding means may be used, for example, if deposition of material from the “outside” region of the vapor deposition beams 31b and 32b is to be avoided.
Although the deposition beams 31b and 32b are shown to cover only certain areas, those skilled in the art will appreciate that, to a lesser extent, material will also be deposited in areas outside the deposition beam. . However, if this small amount is deposited, the coating layer can be degraded. For example, webs are often coated with aluminum to obtain a reflective surface. Materials deposited from the “outside” of a technically useful vapor deposition beam can reduce reflectivity. In order to avoid this, a shielding means can be provided.

The reduction of the deposition of the vapor deposition material on the shielding means further facilitates the cleaning of the vacuum coating apparatus because it does not require frequent cleaning.

For example, the vapor deposition sources 21 a and 22 a of the first and second vapor deposition units 21 and 22 are connected to the virtual connection line 13.
And the axes 11a and 12a of the first and second coating drums 11 and 12, respectively.
Can be placed in a vertical line 65 passing through. The virtual line 13 connects the rotation shaft 11 a of the first coating drum 11 with the rotation shaft 12 a of the second coating drum 12. In other words, the deposition sources 21a and 22a are less than 2 * R + D, typically the distance L, which can typically be less than 2 * R, since the width D of the gap 17 is much smaller than the radius R. Are only spaced apart from each other. In one embodiment that can be combined with one or more embodiments described herein, L is less than or equal to radius R. The distance L can be set to 150 mm to 200 mm, for example.

When the deposition sources 21a and 22a are arranged at a relatively small distance from each other, for example less than 2 * R, the respective “outer” boundaries of the deposition beams 31b and 32b are shifted inward, thereby causing the axis 11a and When projected along 12a, the boundary is further away from the laterally outer ends of the respective coating drums 11 and 12. This concentrates the deposition away from the laterally outer region towards the center between the coating drums 11 and 12, so that material may be laterally deposited laterally outside the coating drums 11 and 12. Reduce.

This effect is more pronounced when tilting the vaporizers 21 and 22 towards each other as described above. The outer end portions of the vapor deposition units 21 and 22 are respectively connected to the first and second coating drums 11.
And 12 can be inclined toward the common center.

The first and second vapor deposition devices 21 and 22 are perpendicular to the virtual connection line 13.
4 can be arranged at intervals in the horizontal direction. The perpendicular 14 passes through the gap 17. The respective lateral shifts due to the distances d1 and d2 can be selected according to specific needs. The distances d1 and d2 may be the same. Alternatively, the distances d1 and d2 may be different from each other. For example, if the first and second coating drums 11 and 12 have the same radius R, typically d1 is substantially equal to d2. If a different radius coating drum is used, d1 can be different from d2.

The web 15 can be any suitable strip-like flexible material. A typical example is foil. The coated foil can be used as a food packaging material. The deposition material can be any material that can be suitably deposited (eg, a metal or dielectric material). An example is aluminum. Another example is copper. The material can be supplied as a wire that is melted in a heated evaporator.

According to embodiments that can be combined with one or more embodiments described herein, the vaporizer 21
And 22, the vapor deposition material has a gap 17 along a straight line from the respective vapor deposition sources 21a and 22a.
Is arranged so that it cannot pass through. This is an enlarged detail view of FIG.
Shown in A. The vapor deposition sources 21 a and 22 a of the first and second vapor deposition devices 21 and 22 are inclined toward the coating drums 11 and 12 with respect to each other and with respect to the line 14 passing through the gap 17. The term “facing” is intended to describe that the main deposition direction of each deposition source refers to the indicated direction.

The vapor deposition sources 21 a and 22 a are disposed outside a region 63 that passes through the gap 17 and can be constituted by lines 61 and 62 that are common tangent lines of the first and second coating drums 11 and 12. Each line 61 and 62 forms a tangent to both the first and second coating drums 11 and 12. These lines 61 and 62 constrain a region 63 centered on the line 14. Region 63 is shown in gray. The material deposited outside the region 63 cannot pass directly through the gap 17 along a straight line. 1st and 2nd coating drum 1
1 and 12 form a shield for the gap 17 that prevents vapor deposition material from passing through the gap 17. Thus, the deposition zone is limited to a region that is substantially “in front of” the gap 17.

When the vapor deposition sources 21a and 22a are arranged as described above, no shielding means is required either in front of or behind the gap 17. This further improves the yield because no material is deposited on the shielding means that need to be cleaned periodically.

As shown in FIG. 2A, the vapor deposition sources 21a and 22a intersect at a point P (not shown here) where the geometric extension of the main vapor deposition directions 31a and 32a is located behind the gap 17. Are arranged as follows. By doing this, the vapor deposition material is more evenly distributed within the deposition zone and does not converge into a single region. On the other hand, since the vapor deposition beams 31b and 32b are inclined toward each other, the density of the vapor deposition material in the vapor deposition zone increases, which is due to the vapor deposition sources 21a and 22a.
Can be arranged at a further distance, for example, the thermal stress of the web 15 can be reduced. Furthermore, the conveyance speed of the web 15 can be increased.

FIG. 2B illustrates another embodiment that can be combined with one or more embodiments described herein. The configuration of the first and second vapor deposition units 21 and 22 is the same as that shown in FIG. 2A except that the first and second vapor deposition units 21 and 22 are more inclined toward each other. The geometrical intersection P between the main vapor deposition directions 31 a and 32 a is arranged in front of the gap 17. This further increases the concentration of the vapor deposition material, which also allows the distance between the vapor deposition sources 21a and 22a and the surfaces of the first and second coating drums 11 and 12 to be increased.

The vapor deposition beams 31b and 32b "cross" each other in this embodiment when viewed in the normal direction of the axes 11a and 12a before reaching the surfaces 25 and 26 of the coating drums 11 and 12. . In particular, a first vaporizer 21 arranged next to the first coating drum 11.
Is directed toward the second coating drum 12, while the second vaporizer 22 disposed next to the second coating drum 12 is directed toward the first coating drum 11. This causes “cross vapor deposition”.

The vapor deposition material from the first vapor deposition source 21 a “passes” through the outer surface 25 of the first coating drum 11. Deposition on the first coating drum 11 by the first vapor deposition source 21a also occurs. The material is deposited at an inclined angle with respect to the normal of the surface 25 of the first coating drum 11. Similarly, deposition on the second coating drum 12 from the second vapor deposition source 22a also occurs. Thus, when the web 15 is on the surface 25 of the first coating drum 11, it is coated by both vapor deposition sources 21 a and 22 a of the first and second vapor deposition sources 21 and 22. Similarly, when the web 15 is on the surface 26 of the second coating drum 12, it is coated by both the first and second deposition sources 21 and 22.

The rate of deposition on the first and second coating drums 11 and 12 with respect to one evaporation source can be adjusted by the inclination angle with respect to the normal of the drum surfaces 25 and 26 and the distance to the coating drums 11 and 12. it can.

According to one embodiment that can be combined with one or more embodiments described herein, the deposition from the first vaporizer 21 onto the second coating drum 12 is the first coating drum 1.
1 can occur at an angle greater than the angle at which deposition from the first vaporizer 21 occurs. The angle is defined relative to the surface of the coating drum where the main deposition direction hits the respective surface. Therefore, the deposition from the second vaporizer 22 on the first coating drum 11 may occur at an angle greater than the angle at which the deposition from the second vaporizer 22 onto the second coating drum 12 occurs. it can.

However, it is also possible to arrange the first and second vapor deposition devices 21 and 22 in the region 63. A "straight line" path is formed between the vapor deposition sources 21a and 22a and the gap 17, but the main vapor deposition directions 31a and 32a of the respective vapor deposition sources 21a and 22a are directed to the opposite coating drums, respectively. By tilting the evaporation sources 21a and 22a toward each other, deposition through the gap 17 can be significantly reduced. If necessary, a shield 58 can be provided to cover the gap 17.

The deposition source located next to the adjacent coating drum is directed toward another coating drum located at a greater distance from the deposition source than the adjacent coating drum, as shown in FIGS. 2B and 2C. It has been. In FIG. 2A, the deposition source is directed toward the coating drum adjacent to it and partially tilted toward another coating drum located distal to the deposition source.

The tilt angle between the deposition sources 21a and 22a (defined by the angle between the main deposition directions 31a and 32a) can be selected according to specific needs, for example about 60 ° to about 180 °. be able to.

According to one embodiment that can be combined with one or more embodiments described herein, the vacuum coating apparatus 200 can include only the first vaporizer 21, as shown in FIG. As described in relation to any of FIG. 1 and FIGS. 2A to 2C, the first vaporizer 21 can be similarly arranged. The first vaporizer 21 can have a position and arrangement relative to the first and second coating drums 11 and 12 as described in connection with any of FIGS. 2A-2C.

FIG. 4 illustrates another embodiment that can be combined with one or more embodiments described herein. The vacuum coating apparatus 300 includes only one coating drum 11. 1st and 2nd
The vapor deposition devices 21 and 22 can be arranged as described above. 1st and 2nd vapor deposition machine 21
The geometrical extension of the main vapor deposition directions 31a and 32a of 22 and 22 intersect at the point P before reaching the surface 25 of the coating drum 11 and the web 15 conveyed by the coating drum 11, respectively. The point P corresponds to the outer surface 25 of the coating drum 11 by a distance B.
Spaced apart. Alternatively, point P is close to the outer surface 25 of the coating drum 11,
Or it can be on the outer surface 25. In a further alternative, the point P can be located between the outer surface 25 of the coating drum 11 and its axis of rotation 11a.

When the point P is separated from the outer peripheral surface of the coating drum 11, B is 0 mm to 100 mm.
It can be. Alternatively, if the point P is within the coating drum 11 “in”
B can be in the range of about 0 (surface) to about -R (the center of the coating drum), where R is the radius of the coating drum 11.

As described above, tilting the vapor deposition sources 21a and 22a toward each other is more than using a single vapor deposition source or using two vapor deposition sources facing in the same direction, that is, parallel to each other. Resulting in a more focused deposition zone with a more uniform distribution of vapor deposition material. Furthermore, the vapor deposition beam impinges on the outer peripheral surface 25 of the coating drum 11 and thus on the surface of the web 15 at an angle that is not perpendicular to the surface. This also improves the deposition process.

FIG. 5 illustrates a further embodiment of a vacuum coating apparatus 400 that can be combined with one or more embodiments described herein. The vacuum coating apparatus 400 has a gap 17 in FIG.
It includes two coating drums 11 and 12 arranged parallel to each other by a larger gap 17 '. The guide roller 18 includes first and second coating drums 11 and 12.
Is shifted laterally with respect to the normal 14 passing through the center between the two. The lateral displacement of the guide roller 18 ensures that the vapor deposition material passing through the gap 17 ′ is deposited on the web 15.

FIG. 6 illustrates a further embodiment of a vacuum coating apparatus 500 that can be combined with one or more embodiments described herein. The vacuum coating apparatus 500 includes two coating drums 11 and 12 that are arranged parallel to each other with a gap 17 formed therebetween. In contrast to FIG. 1, the web 15 ′ is conveyed by the first coating drum 11, while the web 15 ″ is conveyed by the second coating drum 12 and the two webs are coated simultaneously. And 12 can have the same direction of rotation, or alternatively, the coating drums 11 and 12 can have opposite directions of rotation.

FIG. 7 illustrates a further embodiment of a vacuum coating apparatus 600 that can be combined with one or more embodiments described herein. The vacuum coating apparatus 600 includes two coating drums 11 and 12 arranged in parallel to each other.
A gap 17 is formed between them. The vacuum coating apparatus 600 includes a housing 50 having an upper chamber 51 and a lower chamber 52. A rewind drum 41 and a take-up drum 42 are arranged in the upper chamber 51. The guide roller 18 is also disposed in the upper chamber 51. The first and second coating drums 11 and 12 are partially disposed in the upper chamber 51, while the lower chamber 52 forms a deposition chamber in which the deposition sources 21 and 22 are disposed, For example, the lower half protrudes. In order to avoid the possibility of deposits of vapor deposition material on the conveyed web 15, shielding means 57 can be arranged on the sides of the vapor deposition sources 21 and 22.

First, the upper chamber 51 can be evacuated via a valve 53, while the lower chamber 52 can be evacuated via a valve 54. There is typically a pressure difference between the upper and lower chambers 51 and 52. In order to maintain the pressure differential, the wall 55 extends close to the outer peripheral surface of the coating drum, leaving only a slight clearance. Gap 1
7 can also be made relatively small, thereby maintaining a vacuum pressure difference between the upper chamber 51 and the lower chamber 52.

FIG. 8 illustrates a vapor deposition unit 700 that can be combined with one or more embodiments described herein.
One embodiment is shown. The vapor deposition unit 700 includes two vapor deposition rows 701 and 701. Each row 701 and 702 is along a line 705 arranged perpendicular to the direction of movement of the web 15,
Each row 701 and 702 includes a plurality of vaporizers 721 and 722 spaced laterally from each other at a substantially constant distance. The web 15 is not shown here. The first and second coating drums 711 and 712 are indicated by fine lines.

The vapor deposition unit 700 is, for example, 25-30 arranged in two rows 701 and 702.
Individual vaporizers 721 and 722 may be included.

Rows 701 and 702 are offset from each other along line 705, thereby providing a staggered arrangement of individual vaporizers 721 and 722. Further, the vaporizers 721 and 722 in each row 701 and 702 can partially overlap each other when viewed along a line 705 parallel to the axis of rotation of the coating drum.

As shown in FIG. 8, the vaporizers 721 in the row 701 and the vaporizers 721 in the row 702 are inclined with respect to each other as described above to form a common vapor deposition zone.

The vapor deposition units 721 and 722 are formed by a heating crucible for melting the metal supplied here as the wire 770. Each crucible has an elongated shape to form a respective vapor deposition beam 732. 9A and 9B show the deposition beams 732 of the respective vaporizers 721 and 722 used in FIG.

The crucibles forming the vaporizers 721 and 722 are inclined with respect to each other. Each crucible is
Provided with a metal wire 770 that melts the metal. The supply rate of the wire 770 can be adjusted so that the melting rate is the same as the deposition rate. Excess molten metal can be reduced to avoid the molten metal flowing down from the inclined crucible. For example, the molten metal feed rate can be adjusted so that the surface of the crucible is only wetted by a thin liquid metal film. Each crucible 721 and 722 may have a width of 30 mm and a length of 180 mm, for example.

FIG. 10 illustrates a vapor deposition unit 800 that can be combined with one or more embodiments described herein.
One embodiment is shown. The vapor deposition unit 800 includes a first column 801 of vapor deposition units 821 and a second column 802 of vapor deposition units 822, each including respective vapor deposition sources 821a and 822a. Unlike the vapor deposition unit 700 of FIG. 8, the vaporizers 821 and 822 in each row 802 and 802 do not overlap each other when projected parallel to the axes 11a and 12a of the coating drums 11 and 12.

FIG. 10 further shows a movable shielding means 56 covering the respective ends of the coating drums 11 and 12. The shielding means 56 is used to limit the deposition and to adapt the deposition zone when using different sized band materials.

According to one embodiment that can be combined with one or more embodiments described herein, a vacuum coating apparatus for coating a web is provided. The apparatus is parallel to the first drum having a vacuum chamber, a first rotatable coating drum, and a gap formed between the first and second coating drums for conveying at least one web. A second rotatable coating drum is disposed. The first vaporizer includes at least one vapor deposition source configured to generate a first vapor deposition beam, and the first vaporizer is disposed next to the first coating drum. The second vapor deposition device includes at least one vapor deposition source configured to generate a second vapor deposition beam, and the second vapor deposition device is disposed next to the second coating drum. The first and second vapor deposition units are arranged such that their vapor deposition beams are inclined with respect to each other.

According to one embodiment that can be combined with one or more embodiments described herein, a vacuum coating apparatus for coating a web is provided. The apparatus is parallel to the first drum having a vacuum chamber, a first rotatable coating drum, and a gap formed between the first and second coating drums for conveying at least one web. A second rotatable coating drum is disposed. The first vapor deposition device includes at least one vapor deposition source disposed next to the first coating drum. The second vaporizer is the second
At least one deposition source disposed next to the coating drum. The first and second vaporizers are inclined with respect to each other.

According to one embodiment that can be combined with one or more embodiments described herein, each of the deposition beams of the first and second vaporizers includes a main vapor deposition direction, and the geometry of the respective main vapor deposition direction. The extended lines intersect at a point P located in front of the gap.

According to one embodiment that can be combined with one or more embodiments described herein, each of the deposition beams of the first and second vaporizers includes a main vapor deposition direction, and the geometry of the respective main vapor deposition direction. The extended lines intersect at a point P located behind the gap.

According to one embodiment that can be combined with one or more embodiments described herein, each of the deposition beams of the first and second vaporizers includes a main vapor deposition direction, and the geometry of the respective main vapor deposition direction. Extension lines intersect at a point P located in the gap.

According to one embodiment that can be combined with one or more embodiments described herein, the first and second coating drums are configured to convey a web through a gap, and the first
And the second vapor deposition device such that the gap is hidden from view by each one of the first and second coating drums when viewed from the vapor deposition source of the respective vapor deposition device.
Arranged against the coating drum.

According to one embodiment that can be combined with one or more embodiments described herein, each of the first and second coating drums has a radius R and a gap between the first and second coating drums. Has a width D when the rotation axis of the first coating drum is measured along a virtual connection line connecting the rotation axis of the second coating drum, and the ratio R / D is 15 or more, in particular 100. Exceed.

According to one embodiment that can be combined with one or more embodiments described herein, the vacuum coating apparatus includes first and second relative to the first and second vaporizers to guide the web through the gap. And a guide roller disposed behind the two coating drums.

  According to one embodiment that can be combined with one or more embodiments described herein, the first and second deposition beams are between the first and second vaporizers and the first and second coating drums. To form a common deposition zone.

According to one embodiment that can be combined with one or more embodiments described herein, the common deposition zone is a single when viewed along the axis of the first and second coating drums. It has a more uniform distribution of deposited material than the deposition zone formed by the vaporizer.

According to one embodiment that can be combined with one or more embodiments described herein, the vacuum coating apparatus conveys the first web by the first coating drum through the gap and at the same time the second coating drum by the second coating drum. Configured to transport web.

According to one embodiment that can be combined with one or more embodiments described herein, a vacuum coating apparatus for coating a web is provided. The apparatus includes: a vacuum chamber;
A first rotatable coating drum and a second rotatable coating drum disposed in parallel with the first drum for conveying a web through the gap between the first and second coating drums A gap is formed. At least one first vaporizer having a vapor deposition source is disposed next to the first coating drum for depositing material on the web when conveyed by the second coating drum through the gap, 2 inclined towards the coating drum. The vapor deposition source of the first vapor deposition device is disposed closer to the first coating drum than the second coating drum, and when viewed from the vapor deposition source of the first vapor deposition device, the gap is visible by the first coating drum. So as to be hidden from the first and second coating drums.

According to one embodiment, which can be combined with one or more embodiments described herein, the vacuum coating apparatus applies to a first coating drum that deposits material on the web when conveyed by the first coating drum. And further comprising at least one second vapor deposition device having a vapor deposition source inclined toward the second vapor deposition device, the second vapor deposition device being disposed closer to the second coating drum than the first coating drum. When viewed from the evaporation source, the gap is hidden from view by the second coating drum, and is disposed with respect to the first and second coating drums.

According to one embodiment that can be combined with one or more embodiments described herein, the first vapor deposition device has a first main vapor deposition direction, and the second vapor deposition device has a second main vapor deposition direction. Have. The first main vapor deposition direction and the second main vapor deposition direction intersect at a point P disposed behind the gap formed between the first and second coating drums.

According to one embodiment that can be combined with one or more embodiments described herein, the first vapor deposition device has a first main vapor deposition direction, and the second vapor deposition device has a second main vapor deposition direction. Have. The first main vapor deposition direction and the second main vapor deposition direction intersect at a point P disposed behind the gap formed between the first and second coating drums.

According to one embodiment that can be combined with one or more embodiments described herein, each of the first and second coating drums includes a radius R. The deposition source of the first deposition device is separated from the deposition source of the second deposition device by a distance L that is less than the radius R of the coating drum.

According to one embodiment that can be combined with one or more of the embodiments described herein, the radius R of the first and second coating drums is determined between the first coating drum and the deposition source of the second vaporizer. Greater than the distance between and / or greater than the distance between the second coating drum and the deposition source of the first vaporizer.

According to one embodiment that can be combined with one or more embodiments described herein, a vacuum coating apparatus for coating a web is provided. Vacuum coating equipment
A vacuum chamber; at least one rotatable coating drum having a rotating shaft and a surface for conveying the web; a first vaporizer having at least one vapor deposition source; and a second having at least one vapor deposition source. Includes vapor deposition equipment. The first and second vaporizers are disposed next to the coating drum and are inclined with respect to each other.

According to one embodiment that can be combined with one or more embodiments described herein, the deposition source of the first deposition device is configured to generate a first deposition beam having a first main deposition direction. The vapor deposition source of the second vapor deposition unit is configured to generate a second vapor deposition beam including a second main vapor deposition direction. The first and second vapor deposition units are arranged so that the vapor deposition beams are inclined with respect to each other.

According to one embodiment that can be combined with one or more embodiments described herein, the first main vapor deposition direction and the second main vapor deposition direction are the coatings when viewed in parallel with the rotation axis. The first and second vaporizers are arranged so as to intersect at a point P arranged between the drum and the first and second vaporizers.

According to one embodiment that can be combined with one or more embodiments described herein, a first vaporizer comprising at least one vapor deposition source for generating a first vapor deposition beam (31a);
A second vapor deposition device comprising at least one vapor deposition source (22a) for generating a second vapor deposition beam, wherein the first vapor deposition unit and the second vapor deposition device are inclined with respect to each other; A vapor deposition apparatus is provided.

According to one embodiment that can be combined with one or more embodiments described herein, the vapor deposition device or vapor deposition device is a first row of first vapor deposition devices, each of the first vapor deposition devices being A first row configured to generate a first vapor deposition beam and a second row of second vapor deposition devices, each of the second vapor deposition devices having a second vapor deposition beam. It further includes a second column configured to generate. The first and second rows are arranged in parallel to each other, and the first vapor deposition device in the first row and the second vapor deposition device in the second row are along the first and second rows. When viewed by projection, the vapor deposition beam of the first vapor deposition device is disposed so as to be inclined with respect to the vapor deposition beam of the second vapor deposition device.

According to one embodiment that can be combined with one or more embodiments described herein, the first and second vaporizers are arranged in a staggered manner.

According to one embodiment that can be combined with one or more embodiments described herein, a vacuum coating apparatus is provided. The vacuum coating apparatus includes a vacuum chamber and a first shaft having a shaft.
And a second coating drum having a shaft disposed in parallel with the first drum, wherein a gap is formed between the first and second coating drums.
And at least one first vaporizer having a vapor deposition source directed to the second coating drum for depositing material on the web when transported by the second coating drum through the gap including. The vapor deposition source of the first vapor deposition device is defined between a first imaginary line that passes through the gap and is tangent to both the first and second coating drums when projected parallel to the axis. Placed outside the area.

According to one embodiment that can be combined with one or more embodiments described herein, a vacuum coating apparatus is configured to deposit a material on a web when transported by a first coating drum. At least one having a deposition source towards the coating drum
One second vaporizer is further included. The vapor deposition source of the second vapor deposition device is disposed outside the region defined between the first imaginary lines when viewed in parallel with the axis.

According to one embodiment that can be combined with one or more embodiments described herein, the axes are arranged together along a virtual connection line through the gap. The vapor deposition source of the first vapor deposition device and / or the second vapor deposition device is disposed between a second virtual line passing through one of the axes of the first and second coating drums and perpendicular to the virtual connection line. Arranged within a defined area.

According to one embodiment that can be combined with one or more embodiments described herein, a vacuum coating apparatus for coating a web is provided. The vacuum coating apparatus includes a vacuum chamber, a first rotatable coating drum, and a second rotatable coating drum disposed in parallel with the first drum, between the first and second coating drums. Is formed with a gap for conveying the web through the gap. Axes are arranged relative to each other along a virtual connection line passing through the gap. At least one having a deposition source
One first vaporizer is directed toward the second coating drum to deposit material on the web as it is conveyed by the second coating drum through the gap. The first vaporizer is disposed with respect to the first and second coating drums such that a straight line from the vapor deposition source passing through the gap is blocked by the first coating drum.

According to one embodiment that can be combined with one or more embodiments described herein, a method for web coating is provided. The method includes providing a first rotatable coating drum and a second rotatable coating drum disposed parallel to the first drum, the first and second coating drums being disposed between the first and second coating drums. The first step by evaporating the material from the first vapor deposition device from the first vapor deposition direction and vaporizing the material from the second vapor deposition device from the second vapor deposition direction. Forming a common deposition zone adjacent to the surface of the second coating drum, and conveying at least one web through the common deposition zone by the first coating drum and / or the second coating drum. including.

While the above is directed to embodiments of the present invention, other and further embodiments of the invention may be made without departing from the basic scope of the invention, the scope of which is set forth in the following claims It is determined based on.

Claims (16)

A vacuum coating apparatus for coating a web,
A vacuum chamber (50);
A first rotatable coating drum (11) having a rotating shaft (11a) around which the first coating drum (11) can rotate, and a rotating shaft around which the second coating drum (12) can rotate. A second rotatable coating drum (12) having (12a) and arranged parallel to the first drum (11), between the first and second coating drums (11, 12) A first rotatable coating drum (11) and a second rotatable coating drum (12) formed with a gap (17) for conveying at least one web (15);
A first vaporizer (21) comprising at least one vapor deposition source (21a) for generating a first vapor deposition beam (31b) and arranged next to the first coating drum (11);
A second vaporizer (22) disposed next to the second coating drum (12), including at least one vapor deposition source (22a) for generating a second vapor deposition beam (32b);
When viewed along the axes (11a, 12a) of the first and second coating drums (11, 12), the first and second vaporizers (21, 22) are inclined with respect to each other. The first and second vapor deposition units (21, 22) include main vapor deposition directions (31a, 32a),
A vacuum coating apparatus in which the main vapor deposition direction (31a) of the first vapor deposition device (21) is inclined with respect to the surfaces of the first coating drum (11) and at least one web (15) .   2. The vacuum coating apparatus according to claim 1, wherein the geometrical extension lines in the respective main deposition directions (31a, 32a) intersect at a point P arranged in front of the gap (17).   The first and second coating drums (11, 12) are configured to transport the web (15) through the gap (17), and the first and second vaporizers (21, 22) are respectively deposited. When viewed from the vapor deposition source (21a, 22a) of the vessel (21, 22), the gap (17) is hidden from view by each one of the first and second coating drums (11, 12). 3. A vacuum coating device according to claim 1 or 2, wherein the vacuum coating device is arranged with respect to the first and second coating drums (11, 12).   Each of the first and second coating drums (11, 12) has a radius R, and the gap (17) between the first and second coating drums (11, 12) is a first coating drum ( 11) having a width D when measured along a virtual connection line (13) connecting the rotation axis (11a) of the second coating drum (12) to the rotation axis (12a) of the second coating drum (12), and the ratio R / D is 15 It is the above, The vacuum coating apparatus of any one of Claims 1-3.   The first and second vapor deposition units (21, 22) are arranged so that the first and second vapor deposition beams (31b, 32b) are the same as the first and second vapor deposition units (21, 22). 5. The vacuum coating apparatus according to claim 1, wherein the vacuum coating apparatus is arranged to form a common deposition zone arranged between the coating drums (11, 12).   The vapor deposition sources (21a, 22a) are inclined with respect to each other, whereby the vapor deposition beams (31b, 32b) are inclined toward each other when viewed along the rotation axes (11a, 12a). The vacuum coating apparatus according to any one of claims 1 to 5, which overlap each other. A vacuum coating apparatus for coating a web,
A vacuum chamber (50);
A first rotatable coating drum (11) and a second rotatable coating drum (12) arranged parallel to the first drum (11), the first and second coating drums (11) , 12) between the first rotatable coating drum (11) and the second rotatable coating drum (11) formed with a gap (17) for conveying the web (15) through the gap (17). 12)
The first main vapor deposition direction (31a) includes at least one first vapor deposition device (21) disposed adjacent to the first coating drum (11 ) and having a first main vapor deposition direction (31a). Is inclined toward the second coating drum (12) for depositing material on the web (15) when conveyed by the second coating drum (12) through the gap (17), The vapor deposition source of the first vapor deposition device (21) is disposed closer to the first coating drum (11) than the second coating drum (12), and is from the vapor deposition source (21a) of the first vapor deposition device (21). A device arranged relative to the first and second coating drums (11, 12) such that when viewed, the gap (17) is hidden from view by the first coating drum (11, 12).   At least one second comprising an evaporation source (22a) inclined toward the first coating drum (11) for depositing material on the web (15) when conveyed by the first coating drum (11). Including a vapor deposition device (22), wherein the second vapor deposition device (22) is disposed closer to the second coating drum (12) than the first coating drum (11), and the second vapor deposition device (22). When viewed from the deposition source (22a), the second coating drum (12) is arranged with respect to the first and second coating drums (11, 12) so that the gap (17) is hidden from view. The vacuum coating apparatus according to claim 7.   The second vapor deposition device (22) includes the second main vapor deposition direction (32a), and the first main vapor deposition direction (31a) and the second main vapor deposition direction (32a) are the first and second coating drums. The vacuum coating apparatus according to claim 8, which intersects at a point (P) disposed behind a gap (17) formed between (11, 12).   Each of the first and second coating drums (11, 21) includes a radius (R), and the deposition source (21a) of the first vaporizer (21) is a radius (R) of the coating drum (11, 12). The vacuum coating apparatus according to claim 8 or 9, wherein the vacuum coating apparatus is separated from the vapor deposition source (22a) of the second vapor deposition device (22) by a distance (L) that is less than.   The radius (R) of the first and second coating drums (11, 12) is greater than the distance between the first coating drum (11) and the deposition source (22a) of the second deposition device (22). The vacuum according to any one of claims 7 to 10, wherein the vacuum is larger and / or larger than the distance between the second coating drum (12) and the deposition source (21a) of the first deposition device (21). Coating equipment. A vacuum coating apparatus for coating a web,
A vacuum chamber (50);
A rotating shaft (11a) and at least one rotatable coating drum (11) comprising a surface (25) for conveying the web (15);
A first vaporizer (21) comprising at least one vapor deposition source (21a);
A second vaporizer (22) comprising at least one vapor deposition source (22a), wherein the first and second vaporizers (21, 22) are arranged next to the coating drum (11); A second vaporizer (22) inclined relative to each other when viewed along the axis (11a) of (11),
Each of the first and second vapor deposition devices (21, 22) includes a main vapor deposition direction (31a, 32a), and the main vapor deposition directions (31a, 32a) of the first and second vapor deposition devices (21, 22). The vacuum coating apparatus in which the geometrical extension lines intersect at point P before reaching the surface (25) of the coating drum (11) and the web (15) conveyed by the coating drum (11), respectively. The vapor deposition source (21a) of the first vapor deposition device (21) is configured to generate a first vapor deposition beam (31a) including a first main vapor deposition direction (31a),
The vapor deposition source (22a) of the second vapor deposition machine is configured to generate a second vapor deposition beam (32a) including a second main vapor deposition direction (32a),
The vacuum coating apparatus according to claim 12, wherein the first and second vapor deposition units (21, 22) are arranged such that their vapor deposition beams (31b, 32b) are inclined with respect to each other. When the first and second vapor deposition units (21, 22) are projected in parallel to the rotation axis (11a), the first main vapor deposition direction (31a) and the second main vapor deposition direction (32a). 14. The vacuum coating apparatus according to claim 13, wherein is disposed so as to intersect at a point P disposed between the coating drum (11) and the first and second vapor deposition units (21, 22). A first vaporizer (21) including at least one vapor deposition source (21a) for generating a first vapor deposition beam (31a);
A second vapor deposition device (22) including at least one vapor deposition source (22a) for generating a second vapor deposition beam (32a), wherein the first and second vapor deposition devices (21, 22) are: A second vaporizer (22) inclined relative to each other;
A first row (701) of first vaporizers (721), each of the first vaporizers (721) being configured to generate a first vapor deposition beam (732). 1 column (701),
A second row (702) of second vaporizers (722), each of the second vaporizers (722) being configured to generate a second vapor deposition beam (732); And the second row (701, 702) includes a second row (702) arranged parallel to each other,
The first vaporizer (721) in the first row (701) and the second vaporizer (722) in the second row (702) are along the first and second rows (701, 702). When viewed by projection, the vapor deposition beam (732) of the first vapor deposition device (721) is arranged to be inclined with respect to the vapor deposition beam (732) of the second vapor deposition device (722),
The first and second vapor deposition units (721, 722) are vapor deposition units arranged in a staggered manner. A method for coating a web, comprising:
Providing a first rotatable coating drum (11) and a second rotatable coating drum (12) disposed in parallel with the first drum (11), wherein the first and second A step in which a gap (17) is formed between the coating drums (11, 12);
The material from the first vapor deposition device (21) including the first main vapor deposition direction (31a) is evaporated, and the material from the second vapor deposition device (22) including the second main vapor deposition direction (32a) is vaporized. Forming a common deposition zone adjacent to the surfaces of the first and second coating drums (11, 12), wherein the first and second deposition devices (21, 22) When projected along the axes (11a, 12a) of the first and second coating drums (11, 12), they are inclined with respect to each other, and the first of the first vaporizer (21). The main vapor deposition direction (31a) is inclined with respect to the surfaces of the first coating drum (11) and at least one web (15) ;
Conveying at least one web (15) through a common deposition zone by at least one of a first coating drum (11), a second coating drum (12), and combinations thereof.