JP2015232055A - Heat-resistant substrate composition - Google Patents

Heat-resistant substrate composition Download PDF

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JP2015232055A
JP2015232055A JP2012229154A JP2012229154A JP2015232055A JP 2015232055 A JP2015232055 A JP 2015232055A JP 2012229154 A JP2012229154 A JP 2012229154A JP 2012229154 A JP2012229154 A JP 2012229154A JP 2015232055 A JP2015232055 A JP 2015232055A
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江原 和也
Kazuya Ebara
和也 江原
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Nissan Chemical Corp
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Abstract

PROBLEM TO BE SOLVED: To provide a composition that provides a cured film suitable for a display substrate material having high strength, high heat resistance, moderate linear expansion coefficients and high transparency.SOLUTION: A heat-resistant substrate composition comprises at least one of a polyimide precursor comprising structural units represented by formula (1), formula (2) and formula (3) or an imidized polymer thereof, and organic solvent (in the formulas (1)-(3), Xrepresents a tetravalent group represented by formula (4), Y, Yand Yeach represent divalent groups represented by formulas (5), (6) and (7), and R-Rrepresent hydrogen atoms or the like).

Description

本発明は、耐熱性基盤用組成物に関し、詳細には高強度、高耐熱性、適度な線膨張係数及び高透明性を有する、電子デバイス、特にディスプレイの基盤材料に好適な硬化膜を与える耐熱性基盤用組成物に関する。   The present invention relates to a heat-resistant substrate composition, and in particular, has high strength, high heat resistance, an appropriate linear expansion coefficient, and high transparency, and provides a heat-resistant film suitable for a substrate material of an electronic device, particularly a display. It is related with the composition for sex bases.

近年、有機エレクトロルミネッセンス(以下、有機ELともいう。)ディスプレイや液晶ディスプレイなどの表示装置の分野においては、超薄化、軽量化、フレキシブル化といった要求がますます高まり、基盤材料として樹脂材料が注目されている。
しかしながら、高精細ディスプレイにはアクティブマトリックス駆動のパネルが使用されており、その製造プロセスにおいて、マトリックス状の画素電極に加えて、薄膜アクティブ素子を含むアクティブマトリックス層を形成するには、200℃以上の高温処理だけでなく、きわめて正確な位置合わせも必要となる。それゆえ、このようなディスプレイの基盤材料としてガラスの代わりに樹脂材料を用いると、耐熱性と寸法安定性を満足なものとすることが困難である。
In recent years, in the field of display devices such as organic electroluminescence (hereinafter also referred to as organic EL) displays and liquid crystal displays, there has been an increasing demand for ultra-thin, lightweight, flexible, and resin materials are attracting attention as a base material. Has been.
However, an active matrix driving panel is used for a high-definition display, and in order to form an active matrix layer including a thin film active element in addition to a matrix-like pixel electrode in the manufacturing process, a temperature of 200 ° C. or higher is required. Not only high temperature processing but also extremely accurate alignment is required. Therefore, when a resin material is used instead of glass as the base material of such a display, it is difficult to satisfy heat resistance and dimensional stability.

これに対し、耐熱性や寸法安定性の問題を回避できる樹脂材料として、いくつかの提案がなされている。例えば、特許文献1では脂環式構造含有テトラカルボン酸二無水物と各種ジアミンより得られるポリイミドを用いたディスプレイ基盤用ポリイミドフィルムが、特許文献2には、シクロヘキサン骨格を有する脂環式テトラカルボン酸二無水物とスルホン基を含有する芳香族ジアミンより得られるポリイミドを用いたディスプレイ基盤用ポリイミドフィルムが開示されている。   On the other hand, several proposals have been made as resin materials that can avoid problems of heat resistance and dimensional stability. For example, in Patent Document 1, a polyimide film for a display substrate using a polyimide obtained from an alicyclic structure-containing tetracarboxylic dianhydride and various diamines is disclosed, and in Patent Document 2, an alicyclic tetracarboxylic acid having a cyclohexane skeleton is disclosed. A polyimide film for a display substrate using a polyimide obtained from an diamine containing a dianhydride and a sulfone group is disclosed.

しかし、ディスプレイの基盤材料には高い透明性が必要となるが、特許文献1で用いるテトラカルボン酸二無水物は芳香族基を含むため、芳香族基を含まず脂環式炭化水素基からなるテトラカルボン酸二無水物を用いた場合と比べ、ポリイミド鎖の分子内共役や電荷移動相互作用によってフィルムの透明性が低くなるという問題がある。
また、特許文献2で用いる酸二無水物は、汎用性に乏しい、シス構造のシクロヘキサン骨格という特殊な構造を有する脂環式テトラカルボン酸二無水物であることから、同文献記載の技術を用いるとポリイミドの製造コストが割高となり、その点で改善の余地がある。
However, although high transparency is required for the base material of the display, since the tetracarboxylic dianhydride used in Patent Document 1 contains an aromatic group, it does not contain an aromatic group but consists of an alicyclic hydrocarbon group. Compared to the case of using tetracarboxylic dianhydride, there is a problem that the transparency of the film is lowered due to intramolecular conjugation of polyimide chains and charge transfer interaction.
In addition, the acid dianhydride used in Patent Document 2 is an alicyclic tetracarboxylic dianhydride having a special structure called a cyclohexane skeleton having a cis structure, which is poor in versatility. The manufacturing cost of polyimide is high, and there is room for improvement in that respect.

そのため、汎用性の高い酸二無水物を用いて製造できる、ディスプレイ基盤に必要な特性を備える材料が求められていたが、ポリイミドの合成で用いられる脂環式テトラカルボン酸二無水物として代表的な1,2,3,4−シクロブタンテトラカルボン酸二無水物(以下、CBDAともいう。)は、それにより誘導されるポリイミド前駆体のイミド化反応が立体構造上の理由により起こりにくく、その反応を完結するためにより高い温度が必要となり、これがポリイミドフィルムの着色の原因となるため、ディスプレイ基盤用のポリイミドの原料としてCBDAを用いることは有利ではないとの指摘があり、CBDAを用いて製造できる、ディスプレイ基盤に好適な材料は知られていなかった。   For this reason, a material having characteristics necessary for a display substrate that can be manufactured using a highly versatile acid dianhydride has been demanded, but it is a typical alicyclic tetracarboxylic dianhydride used in the synthesis of polyimide. 1,2,3,4-cyclobutanetetracarboxylic dianhydride (hereinafter also referred to as CBDA), the imidation reaction of the polyimide precursor induced thereby is less likely to occur due to the three-dimensional structure. It is pointed out that it is not advantageous to use CBDA as a raw material for polyimide for display substrates because it requires higher temperature to complete the process, which causes coloring of the polyimide film, and can be produced using CBDA. No material suitable for the display substrate has been known.

特開2008−231327号公報JP 2008-231327 A 特表2008−297360号公報Special table 2008-297360 gazette

本発明は、上記事情に鑑みてなされたものであり、汎用性の高いテトラカルボン酸二無水物を用いて、高強度、高耐熱性、適度な線膨張係数及び高透明性を併せ持つ薄膜を与える組成物を提供するものである。   The present invention has been made in view of the above circumstances, and uses a highly versatile tetracarboxylic dianhydride to provide a thin film having high strength, high heat resistance, an appropriate linear expansion coefficient, and high transparency. A composition is provided.

本発明者は、上記目的を達成するために鋭意検討を重ねた結果、1,2,3,4−シクロブタンテトラカルボン酸二無水物と、パーフルオロアルキル基を有するビフェニルジアミンと、イミダゾール骨格とベンゼン骨格を含むジアミンと、フェニレンジアミンとから誘導されるポリイミド前駆体及びそのイミド化重合体から選択される少なくとも1種と、有機溶媒とを含む組成物が、十分な膜強度と適度な柔軟性と共に、薄膜トランジスタ(TFT)形成プロセスに必要な耐熱性と、適度な線膨張係数と、高い透明性とを有することを見出し、本発明を完成させた。
すなわち、本発明は、
1. 式(1)で表される構造単位、式(2)で表される構造単位及び式(3)で表される構造単位を含むポリイミド前駆体及びそのイミド化重合体から選ばれる少なくとも1種と、有機溶媒とを含む耐熱性基盤用組成物、

Figure 2015232055

{式(1)〜(3)中、Xは、式(4)で表される4価の基を表し
Figure 2015232055

(式(4)中、R〜Rは、それぞれ独立して、水素原子、炭素数1〜6のアルキル基又は炭素数1〜6のパーフルオロアルキル基を表す。)、Yは、式(5)で表される2価の基を表し
Figure 2015232055

(式(5)中、R〜R12は、それぞれ独立して、水素原子、炭素数1〜6のアルキル基、炭素数1〜6のパーフルオロアルキル基又は炭素数6〜14の芳香族基を表す)、Yは、式(6)で表される2価の基を表し
Figure 2015232055

〔式(6)中、R13〜R20は、それぞれ独立して、水素原子、炭素数1〜6のアルキル基、炭素数1〜6のパーフルオロアルキル基又は炭素数6〜14の芳香族基を表す(但し、R13〜R20のうち少なくとも2つはパーフルオロアルキル基を表す。)。〕、Yは、式(7)で表される2価の基を表す
Figure 2015232055

(式(7)中、R21〜R24は、それぞれ独立して、水素原子、炭素数1〜6のアルキル基、炭素数1〜6のパーフルオロアルキル基又は炭素数6〜14の芳香族基を表す。)。}
2. 前記Yが、式(8)で表される2価の基である1の耐熱性基盤用組成物、
Figure 2015232055

(式(8)中、R〜R12は、前記と同じ意味を表す。)
3. 前記Rが、水素原子であり、前記R〜R12が、それぞれ独立して、水素原子又は炭素数1〜6のパーフルオロアルキル基である1又は2の耐熱性基盤用組成物、
4. 前記Yが、式(9)で表される2価の基である1〜3のいずれかの耐熱性基盤用組成物、
Figure 2015232055

(式(9)中、R13〜R20は、前記と同じ意味を表す。)
5. 前記R13〜R20が、それぞれ独立して、水素原子又は炭素数1〜6のパーフルオロアルキル基である1〜4のいずれかの耐熱性基盤用組成物、
6. 前記Yが、式(10)で表される2価の基である1〜5のいずれかの耐熱性基盤用組成物、
Figure 2015232055

(式(10)中、R21〜R24は、前記と同じ意味を表す。)
7. 前記R21〜R24が、それぞれ独立して、水素原子又は炭素数1〜6のパーフルオロアルキル基である1〜6のいずれかの耐熱性基盤用組成物、
8. 前記R〜Rが、水素原子、メチル基又はトリフルオロメチル基である1〜7のいずれかの耐熱性基盤用組成物、
9. 1〜8のいずれかの耐熱性基盤用組成物を塗布し、加熱することにより得られる薄膜、
10.9の薄膜からなる基盤材料、
11.式(1)で表される構造単位、式(2)で表される構造単位及び式(3)で表される構造単位を含むポリイミド前駆体、
Figure 2015232055

{式(1)〜(3)中、Xは、式(4)で表される4価の基を表し
Figure 2015232055

(式(4)中、R〜Rは、それぞれ独立して、水素原子、炭素数1〜6のアルキル基又は炭素数1〜6のパーフルオロアルキル基を表す。)、Yは、式(5)で表される2価の基を表し
Figure 2015232055

(式(5)中、R〜R12は、それぞれ独立して、水素原子、炭素数1〜6のアルキル基、炭素数1〜6のパーフルオロアルキル基又は炭素数6〜14の芳香族基を表す)、Yは、式(6)で表される2価の基を表し
Figure 2015232055

〔式(6)中、R13〜R20は、それぞれ独立して、水素原子、炭素数1〜6のアルキル基、炭素数1〜6のパーフルオロアルキル基又は炭素数6〜14の芳香族基を表す(但し、R13〜R20のうち少なくとも2つはパーフルオロアルキル基を表す。)。〕、Yは、式(7)で表される2価の基を表す
Figure 2015232055

(式(7)中、R21〜R24は、それぞれ独立して、水素原子、炭素数1〜6のアルキル基、炭素数1〜6のパーフルオロアルキル基又は炭素数6〜14の芳香族基を表す。)。}
12.11のポリイミド前駆体のイミド化重合体
を提供する。 As a result of intensive studies to achieve the above object, the present inventor has obtained 1,2,3,4-cyclobutanetetracarboxylic dianhydride, biphenyldiamine having a perfluoroalkyl group, an imidazole skeleton, and benzene. A composition containing a diamine containing a skeleton, a polyimide precursor derived from phenylenediamine and an imidized polymer thereof, and an organic solvent, with sufficient film strength and appropriate flexibility The present invention has been completed by finding that it has heat resistance necessary for a thin film transistor (TFT) formation process, an appropriate linear expansion coefficient, and high transparency.
That is, the present invention
1. At least one selected from a structural unit represented by formula (1), a structural unit represented by formula (2), a polyimide precursor containing a structural unit represented by formula (3), and an imidized polymer thereof; , A composition for heat-resistant substrate comprising an organic solvent,
Figure 2015232055

{In Formulas (1) to (3), X 1 represents a tetravalent group represented by Formula (4).
Figure 2015232055

(In Formula (4), R < 1 > -R < 4 > represents a hydrogen atom, a C1-C6 alkyl group, or a C1-C6 perfluoroalkyl group each independently.) Y < 1 > Represents a divalent group represented by formula (5)
Figure 2015232055

(In Formula (5), R < 5 > -R < 12 > is respectively independently a hydrogen atom, a C1-C6 alkyl group, a C1-C6 perfluoroalkyl group, or a C6-C14 aromatic. And Y 2 represents a divalent group represented by the formula (6).
Figure 2015232055

[In Formula (6), R < 13 > -R < 20 > is respectively independently a hydrogen atom, a C1-C6 alkyl group, a C1-C6 perfluoroalkyl group, or a C6-C14 aromatic. Represents a group (provided that at least two of R 13 to R 20 represent a perfluoroalkyl group). Y 3 represents a divalent group represented by the formula (7).
Figure 2015232055

(In Formula (7), R < 21 > -R < 24 > is respectively independently a hydrogen atom, a C1-C6 alkyl group, a C1-C6 perfluoroalkyl group, or a C6-C14 aromatic. Represents a group). }
2. 1 for a heat-resistant substrate, wherein Y 1 is a divalent group represented by formula (8):
Figure 2015232055

(In formula (8), R 5 to R 12 represent the same meaning as described above.)
3. 1 or 2 heat-resistant base composition, wherein R 5 is a hydrogen atom, and R 6 to R 12 are each independently a hydrogen atom or a C 1-6 perfluoroalkyl group,
4). The heat-resistant base composition according to any one of 1 to 3, wherein Y 2 is a divalent group represented by formula (9):
Figure 2015232055

(In formula (9), R 13 to R 20 represent the same meaning as described above.)
5). R 13 to R 20 are each independently a heat resistant base composition according to any one of 1 to 4 which is a hydrogen atom or a C 1-6 perfluoroalkyl group,
6). The composition for heat-resistant base according to any one of 1 to 5, wherein Y 3 is a divalent group represented by formula (10):
Figure 2015232055

(In formula (10), R 21 to R 24 represent the same meaning as described above.)
7). Each of R 21 to R 24 is independently a hydrogen atom or a heat-resistant base composition according to any one of 1 to 6 which is a C 1-6 perfluoroalkyl group,
8). The heat-resistant base composition according to any one of 1 to 7, wherein R 1 to R 4 are a hydrogen atom, a methyl group, or a trifluoromethyl group;
9. A thin film obtained by applying and heating the heat-resistant base composition of any one of 1 to 8,
A base material consisting of a thin film of 10.9,
11. A polyimide precursor comprising a structural unit represented by formula (1), a structural unit represented by formula (2) and a structural unit represented by formula (3);
Figure 2015232055

{In Formulas (1) to (3), X 1 represents a tetravalent group represented by Formula (4).
Figure 2015232055

(In Formula (4), R < 1 > -R < 4 > represents a hydrogen atom, a C1-C6 alkyl group, or a C1-C6 perfluoroalkyl group each independently.) Y < 1 > Represents a divalent group represented by formula (5)
Figure 2015232055

(In Formula (5), R < 5 > -R < 12 > is respectively independently a hydrogen atom, a C1-C6 alkyl group, a C1-C6 perfluoroalkyl group, or a C6-C14 aromatic. And Y 2 represents a divalent group represented by the formula (6).
Figure 2015232055

[In Formula (6), R < 13 > -R < 20 > is respectively independently a hydrogen atom, a C1-C6 alkyl group, a C1-C6 perfluoroalkyl group, or a C6-C14 aromatic. Represents a group (provided that at least two of R 13 to R 20 represent a perfluoroalkyl group). Y 3 represents a divalent group represented by the formula (7).
Figure 2015232055

(In Formula (7), R < 21 > -R < 24 > is respectively independently a hydrogen atom, a C1-C6 alkyl group, a C1-C6 perfluoroalkyl group, or a C6-C14 aromatic. Represents a group). }
An imidized polymer of 12.11 polyimide precursor is provided.

本発明の耐熱性用組成物は、スピンコート法等のウェットプロセスにより成膜し加熱することで、高強度、高耐熱性、適度な線膨張係数及び高透明性を併せ持つ薄膜、特に、近年のディスプレイ分野に要求を満たす薄膜を与えるため、有機ELディスプレイ、液晶ディスプレイ等のデバイスの分野の進展に寄与し得る。   The heat-resistant composition of the present invention is a thin film having both high strength, high heat resistance, an appropriate linear expansion coefficient and high transparency by forming a film by a wet process such as a spin coat method and heating, particularly in recent years. In order to provide a thin film that satisfies the requirements in the display field, it can contribute to the development of device fields such as organic EL displays and liquid crystal displays.

以下、本発明について詳細に説明する。
本発明の耐熱性基盤用組成物は、式(1)で表される構造単位、式(2)で表される構造単位及び式(3)で表される構造単位を含むポリイミド前駆体及びそのイミド化重合体から選ばれる少なくとも1種を含む。

Figure 2015232055
Hereinafter, the present invention will be described in detail.
The composition for heat-resistant substrates of the present invention comprises a structural unit represented by the formula (1), a structural unit represented by the formula (2) and a polyimide precursor containing the structural unit represented by the formula (3) and It contains at least one selected from imidized polymers.
Figure 2015232055

本発明において、イミド化重合体とは、上記ポリイミド前駆体中のアミド基とカルボン酸基が反応してイミド基となったものことであり、式(11)〜(19)から選ばれる少なくとも1種を含む。

Figure 2015232055
In the present invention, the imidized polymer means that an amide group and a carboxylic acid group in the polyimide precursor react to form an imide group, and at least one selected from formulas (11) to (19). Including species.
Figure 2015232055

式(1)〜(19)中、Xは、式(4)で表される4価の基を表す。

Figure 2015232055
In formulas (1) to (19), X 1 represents a tetravalent group represented by formula (4).
Figure 2015232055

式(4)中、R〜Rは、それぞれ独立して、水素原子、炭素数1〜6のアルキル基又は炭素数1〜6のパーフルオロアルキル基を表す。
炭素数1〜6のアルキル基の具体例としては、メチル、エチル、n−プロピル、i−プロピル、n−ブチル、i−ブチル、s−ブチル、t−ブチル、n−ペンチル、1−メチル−n−ブチル、2−メチル−n−ブチル、3−メチル−n−ブチル、1,1−ジメチル−n−プロピル、n−ヘキシル基等が挙げられる。
炭素数1〜6のパーフルオロアルキル基としては、上記炭素数1〜6のアルキル基中の全ての水素原子がフッ素原子に置換された基が挙げられる。
その具体例としては、トリフルオメチル、ペンタフルオロエチル、ヘプタフルオロ−n−プロピル、ヘプタフルオロ−i−プロピル、ノナフルオロ−n−ブチル、ノナフルオロ−i−ブチル、ノナフルオロ−s−ブチル、ノナフルオロ−t−ブチル基等が挙げられる。
これらの中でも、得られる硬化膜の透明性と耐熱性のバランスを考慮すると、R〜Rは、水素原子、メチル基又はトリフルオロメチル基であることが好ましく、全て水素原子であることがより好ましい。
In formula (4), R < 1 > -R < 4 > represents a hydrogen atom, a C1-C6 alkyl group, or a C1-C6 perfluoroalkyl group each independently.
Specific examples of the alkyl group having 1 to 6 carbon atoms include methyl, ethyl, n-propyl, i-propyl, n-butyl, i-butyl, s-butyl, t-butyl, n-pentyl, 1-methyl- Examples include n-butyl, 2-methyl-n-butyl, 3-methyl-n-butyl, 1,1-dimethyl-n-propyl, n-hexyl group and the like.
As a C1-C6 perfluoroalkyl group, the group by which all the hydrogen atoms in the said C1-C6 alkyl group were substituted by the fluorine atom is mentioned.
Specific examples thereof include trifluoromethyl, pentafluoroethyl, heptafluoro-n-propyl, heptafluoro-i-propyl, nonafluoro-n-butyl, nonafluoro-i-butyl, nonafluoro-s-butyl, nonafluoro-t-butyl. Groups and the like.
Among these, in consideration of the balance between transparency and heat resistance of the obtained cured film, R 1 to R 4 are preferably a hydrogen atom, a methyl group, or a trifluoromethyl group, and are all hydrogen atoms. More preferred.

式(1)及び(11)〜(13)中、Yは、式(5)で表される2価の基を表す。

Figure 2015232055

式(5)中、R〜R12は、それぞれ独立して、水素原子、炭素数1〜6のアルキル基、炭素数1〜6のパーフルオロアルキル基又は炭素数6〜14の芳香族基を表す。
炭素数6〜14の芳香族基としては、フェニル、1−ナフチル、2−ナフチル、1−アントリル、2−アントリル、9−アントリル、1−フェナントリル、2−フェナントリル、3−フェナントリル、4−フェナントリル、9−フェナントリル基等が挙げられる。
炭素数1〜6のアルキル基及び炭素数1〜6のパーフルオロアルキル基としては、上記と同様のものが挙げられる。 In formulas (1) and (11) to (13), Y 1 represents a divalent group represented by formula (5).
Figure 2015232055

In formula (5), R 5 to R 12 are each independently a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, a perfluoroalkyl group having 1 to 6 carbon atoms, or an aromatic group having 6 to 14 carbon atoms. Represents.
Examples of the aromatic group having 6 to 14 carbon atoms include phenyl, 1-naphthyl, 2-naphthyl, 1-anthryl, 2-anthryl, 9-anthryl, 1-phenanthryl, 2-phenanthryl, 3-phenanthryl, 4-phenanthryl, A 9-phenanthryl group and the like can be mentioned.
Examples of the alkyl group having 1 to 6 carbon atoms and the perfluoroalkyl group having 1 to 6 carbon atoms are the same as those described above.

式(5)で表される2価の基の例としては、式(8)で表される2価の基が挙げられる。

Figure 2015232055

式(8)中、R〜R12は、上記と同じ意味を示す。
特に、得られる硬化膜の透明性と耐熱性のバランスを考慮すると、式(5)及び(8)中、Rが、水素原子又はメチル基であり、R〜R12が、水素原子又は炭素数1〜6のパーフルオロアルキル基であることが好ましく、R〜R12が、全て水素原子であることがより好ましい。 Examples of the divalent group represented by the formula (5) include a divalent group represented by the formula (8).
Figure 2015232055

In formula (8), R 5 to R 12 have the same meaning as described above.
In particular, considering the balance between transparency and heat resistance of the cured film obtained, in formulas (5) and (8), R 5 is a hydrogen atom or a methyl group, and R 6 to R 12 are a hydrogen atom or A perfluoroalkyl group having 1 to 6 carbon atoms is preferred, and R 5 to R 12 are all preferably hydrogen atoms.

式(2)及び式(14)〜(16)中、Yは、式(6)で表される2価の基を表す。

Figure 2015232055

式(6)中、R13〜R20は、それぞれ独立して、水素原子、炭素数1〜6のアルキル基、炭素数1〜6のパーフルオロアルキル基又は炭素数6〜14の芳香族基を表すが、R13〜R20のうち少なくとも2つはパーフルオロアルキル基である。
炭素数1〜6のアルキル基、炭素数1〜6のパーフルオロアルキル基及び炭素数6〜14の芳香族基としては、上記と同様のものが挙げられる。 In Formula (2) and Formulas (14) to (16), Y 2 represents a divalent group represented by Formula (6).
Figure 2015232055

In formula (6), R 13 to R 20 are each independently a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, a perfluoroalkyl group having 1 to 6 carbon atoms, or an aromatic group having 6 to 14 carbon atoms. In the formula, at least two of R 13 to R 20 are perfluoroalkyl groups.
Examples of the alkyl group having 1 to 6 carbon atoms, the perfluoroalkyl group having 1 to 6 carbon atoms, and the aromatic group having 6 to 14 carbon atoms are the same as those described above.

式(6)で表される2価の基の例としては、式(9)で表される2価の基が挙げられる。

Figure 2015232055

式(9)中、R13〜R20は、上記と同じ意味を示す。
特に、得られる硬化膜の耐熱性のバランスを考慮すると、式(6)及び(9)中、R13〜R20の2〜4つが炭素数1〜6のパーフルオロアルキル基であり、それ以外は水素原子であることが好ましく、R13〜R20の2〜4つが炭素数1〜4のパーフルオロアルキル基であり、それ以外は水素原子であることがより好ましい。 Examples of the divalent group represented by the formula (6) include a divalent group represented by the formula (9).
Figure 2015232055

In formula (9), R 13 to R 20 have the same meaning as described above.
In particular, considering the balance of heat resistance of the obtained cured film, in formulas (6) and (9), 2 to 4 of R 13 to R 20 are perfluoroalkyl groups having 1 to 6 carbon atoms. Is preferably a hydrogen atom, 2 to 4 of R 13 to R 20 are perfluoroalkyl groups having 1 to 4 carbon atoms, and the others are more preferably hydrogen atoms.

式(3)及び(17)〜(19)中、Yは、式(7)で表される2価の基を表す。

Figure 2015232055

式(7)中、R21〜R24は、それぞれ独立して、水素原子、炭素数1〜6のアルキル基、炭素数1〜6のパーフルオロアルキル基又は炭素数6〜14の芳香族基を表す。
炭素数1〜6のアルキル基、炭素数1〜6のパーフルオロアルキル基及び炭素数6〜14の芳香族基としては、上記と同様のものが挙げられる。 In formulas (3) and (17) to (19), Y 3 represents a divalent group represented by formula (7).
Figure 2015232055

In formula (7), R 21 to R 24 are each independently a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, a perfluoroalkyl group having 1 to 6 carbon atoms, or an aromatic group having 6 to 14 carbon atoms. Represents.
Examples of the alkyl group having 1 to 6 carbon atoms, the perfluoroalkyl group having 1 to 6 carbon atoms, and the aromatic group having 6 to 14 carbon atoms are the same as those described above.

式(7)で表される2価の基の例としては、式(10)で表される2価の基が挙げられる。

Figure 2015232055

式(10)中、R21〜R24は、上記と同じ意味を示す。
特に、得られる硬化膜の耐熱性のバランスを考慮すると、式(7)及び(10)中、R21〜R24は、水素原子又は炭素数1〜6のパーフルオロアルキル基であることが好ましく、水素原子又はトリフルオロメチルであることがより好ましく、全て水素原子であることがより一層好ましい。 Examples of the divalent group represented by the formula (7) include a divalent group represented by the formula (10).
Figure 2015232055

In formula (10), R 21 to R 24 have the same meaning as described above.
In particular, in consideration of the heat resistance balance of the obtained cured film, in formulas (7) and (10), R 21 to R 24 are preferably a hydrogen atom or a C 1-6 perfluoroalkyl group. More preferably a hydrogen atom or trifluoromethyl, and even more preferably all hydrogen atoms.

及びY〜Yの組み合わせは、R〜Rが水素原子、メチル基又はトリフルオロメチル基である式(4)で表される4価の基と、Rが水素原子又はメチル基であり、R〜R12が水素原子又は炭素数1〜6のパーフルオロアルキル基である式(5)で表される2価の基と、R13〜R20の2〜4つが炭素数1〜6のパーフルオロアルキル基であり、それ以外は水素原子である式(6)で表される2価の基と、R21〜R24が水素原子又は炭素数1〜6のパーフルオロアルキル基である式(7)で表される2価の基が好ましく、R〜Rが水素原子、メチル基又はトリフルオロメチル基である式(4)で表される4価の基と、Rが水素原子又はメチル基であり、R〜R12が水素原子又は炭素数1〜6のパーフルオロアルキル基である式(8)で表される2価の基と、R13〜R20の2〜4つが炭素数1〜6のパーフルオロアルキル基であり、それ以外は水素原子である式(9)で表される2価の基と、R21〜R24が水素原子又は炭素数1〜6のパーフルオロアルキル基である式(10)で表される2価の基がより好ましく、R〜Rが全て水素原子である式(4)で表される4価の基と、R〜R12が全て水素原子である式(8)で表される2価の基と、R13〜R20の2〜4つが炭素数1〜4のパーフルオロアルキル基であり、それ以外は水素原子である式(9)で表される2価の基と、R21〜R24が全て水素原子である式(10)で表される2価の基がより一層好ましい。 The combination of X 1 and Y 1 to Y 3 is such that R 1 to R 4 are a hydrogen atom, a methyl group or a trifluoromethyl group, a tetravalent group represented by the formula (4), and R 5 is a hydrogen atom or A divalent group represented by the formula (5) which is a methyl group and R 6 to R 12 are a hydrogen atom or a perfluoroalkyl group having 1 to 6 carbon atoms, and 2 to 4 of R 13 to R 20 A divalent group represented by the formula (6) which is a perfluoroalkyl group having 1 to 6 carbon atoms and is a hydrogen atom, and R 21 to R 24 are a hydrogen atom or a perfluorocarbon group having 1 to 6 carbon atoms. A divalent group represented by formula (7) which is a fluoroalkyl group is preferred, and a tetravalent group represented by formula (4) wherein R 1 to R 4 are a hydrogen atom, a methyl group or a trifluoromethyl group. When, R 5 is a hydrogen atom or a methyl group, R 6 to R 12 is C1-6 hydrogen or C Divalent group and represented by the formula (8) is a perfluoroalkyl group, one to four of R 13 to R 20 is a perfluoroalkyl group having 1 to 6 carbon atoms, is a hydrogen atom otherwise A divalent group represented by the formula (9) and a divalent group represented by the formula (10) in which R 21 to R 24 are a hydrogen atom or a C 1-6 perfluoroalkyl group are more preferable. A tetravalent group represented by the formula (4) in which R 1 to R 4 are all hydrogen atoms, and a divalent group represented by the formula (8) in which R 5 to R 12 are all hydrogen atoms; 2 to 4 of R 13 to R 20 are perfluoroalkyl groups having 1 to 4 carbon atoms, and other than that, a divalent group represented by formula (9) which is a hydrogen atom, and R 21 to R 24 A divalent group represented by the formula (10) in which all are hydrogen atoms is even more preferable.

以下に式(9)で表される2価の基の例を示すが、これらに限定されるわけではない。

Figure 2015232055
Although the example of the bivalent group represented by Formula (9) below is shown, it is not necessarily limited to these.
Figure 2015232055

ポリイミド前駆体及びイミド化重合体の重合平均分子量は、ポリスチレン換算にて3,000〜150,000であることが好ましい。重量平均分子量が、3,000未満であると得られる薄膜が脆くなることがあり、150,000を超えると組成物(ワニス)の粘度が高くなり過ぎる可能性があり、その結果、取扱いが難しくなることがあるためである。   The polymerization average molecular weight of the polyimide precursor and imidized polymer is preferably 3,000 to 150,000 in terms of polystyrene. If the weight average molecular weight is less than 3,000, the resulting thin film may become brittle, and if it exceeds 150,000, the viscosity of the composition (varnish) may become too high, resulting in difficulty in handling. It is because it may become.

ポリイミド前駆体中の式(1)で表される構造単位の数n、式(2)で表される構造単位の数n及び式(3)で表される構造単位の数nは、n/(n+n)=70/30〜99/1を満たすことが好ましく、75/25〜95/5を満たすことがより好ましい。
また、n及びnが、n/n=10/90〜90/10を満たすことが好ましく、n/n=40/60〜60/40を満たすことがより好ましい。
The number n 1 of structural units represented by the formula (1) in the polyimide precursor, the number n 2 of structural units represented by the formula (2), and the number n 3 of structural units represented by the formula (3) are: , N 2 / (n 1 + n 3 ) = 70/30 to 99/1 is preferable, and 75/25 to 95/5 is more preferable.
Further, n 1 and n 3 are, it is preferable to satisfy n 1 / n 3 = 10 / 90~90 / 10, more preferably satisfies the n 1 / n 3 = 40 / 60~60 / 40.

本発明の組成物を調製する際に用いられる溶媒としては、ポリイミド前駆体やイミド化重合体を良好に溶解し得る溶媒であれば、特に限定されるものではない。
このような溶媒としては、例えば、N,N−ジメチルアセトアミド、N,N−ジエチルアセトアミド、N,N−ジメチルホルムアミド、N−メチル−2−ピロリドン、ヘキサメチルホスホルアミド、ジメチルスルホキシド、γ−ブチロラクトン、1,3−ジメチル−2−イミダゾリジノン、1,2−ジメトキシエタン−ビス(2−メトキシエチル)エーテル、テトラヒドロフラン、1,4−ジオキサン、ピコリン、ピリジン、アセトン、クロロホルム、トルエン、キシレン等の非プロトン性溶媒、及びフェノール、o−クレゾール、m−クレゾール、p−クレゾール、o−クロロフェノール、m−クロロフェノール、p−クロロフェノール等のプロトン性溶媒等が挙げられ、その使用量は使用する溶媒全体に対して5〜100質量%とすることができる。これらの溶媒は単独で又は2種類以上を組み合わせて使用してもよい。
The solvent used in preparing the composition of the present invention is not particularly limited as long as it can dissolve the polyimide precursor and the imidized polymer satisfactorily.
Examples of such solvents include N, N-dimethylacetamide, N, N-diethylacetamide, N, N-dimethylformamide, N-methyl-2-pyrrolidone, hexamethylphosphoramide, dimethyl sulfoxide, and γ-butyrolactone. 1,3-dimethyl-2-imidazolidinone, 1,2-dimethoxyethane-bis (2-methoxyethyl) ether, tetrahydrofuran, 1,4-dioxane, picoline, pyridine, acetone, chloroform, toluene, xylene, etc. Examples include aprotic solvents, and protic solvents such as phenol, o-cresol, m-cresol, p-cresol, o-chlorophenol, m-chlorophenol, p-chlorophenol, and the like. 5 to 100% by mass with respect to the total solvent Can. These solvents may be used alone or in combination of two or more.

また、基材に対する濡れ性の向上、溶媒の表面張力の調整、極性の調整、沸点の調整等の目的で、シクロヘキサノール、エチレングリコール、1,3−オクチレングリコール、ジエチレングリコール、ジプロピレングリコール、トリエチレングリコール、トリプロピレングリコール、1,3−ブタンジオール、2,3−ブタンジオール、1,4−ブタンジオール、プロピレングリコール、へキシレングリコールといったポリイミドやイミド化重合体を良好に溶解し得ない溶媒を、ポリイミド前駆体やイミド化重合体が析出しない範囲内で組成物に加えても良い。これらの溶媒は1種単独で、又は2種以上混合して用いることができる   In addition, cyclohexanol, ethylene glycol, 1,3-octylene glycol, diethylene glycol, dipropylene glycol, triethylene glycol are used for the purpose of improving the wettability with respect to the substrate, adjusting the surface tension of the solvent, adjusting the polarity, adjusting the boiling point, and the like. Solvents that cannot dissolve polyimide or imidized polymers such as ethylene glycol, tripropylene glycol, 1,3-butanediol, 2,3-butanediol, 1,4-butanediol, propylene glycol, and hexylene glycol. The polyimide precursor and imidized polymer may be added to the composition as long as they do not precipitate. These solvents can be used alone or in combination of two or more.

本発明の組成物は、上記ポリイミド前駆体及び/又はポリイミド重合体を、上述の溶媒へ溶解することで製造できる。また、後述のポリイミド前駆体の反応で得られる反応液を、そのまま又は濃縮若しくは希釈して、本発明の組成物として用いることもできる。   The composition of this invention can be manufactured by melt | dissolving the said polyimide precursor and / or a polyimide polymer in the above-mentioned solvent. Moreover, the reaction liquid obtained by reaction of the below-mentioned polyimide precursor can also be used as the composition of the present invention as it is or after being concentrated or diluted.

本発明の組成物のポリイミド前駆体及びイミド化重合体の濃度は、使用する溶媒の総質量(合計質量)に対して、通常5〜40質量%であるが、組成物の保存安定性を考慮すると、好ましくは8〜30質量%であり、より好ましくは10〜20質量%である。   The concentration of the polyimide precursor and imidized polymer in the composition of the present invention is usually 5 to 40% by mass with respect to the total mass (total mass) of the solvent used, but the storage stability of the composition is taken into consideration. Then, it is preferably 8 to 30% by mass, and more preferably 10 to 20% by mass.

本発明の組成物は、得られる薄膜の耐熱性、透明性、線膨張係数及び柔軟性を大きく損なわない範囲内で、架橋剤(以下、架橋性化合物ともいう)を含んでもよい。
架橋性化合物は、本発明の組成物を用いて得られる塗膜を硬化膜に転換する工程で、ポリイミド前駆体とイミド化重合体の少なくとも一方に含有される有機基と、反応し得る基を有する化合物であれば特に限定されるものではないが、例えば、エポキシ基を2個以上含有する化合物や、アミノ基の水素原子が、メチロール基、アルコキシメチル基又はその両方で置換された基を有する、メラミン誘導体、ベンゾグアナミン誘導体又はグリコールウリル等が挙げられる。このメラミン誘導体及びベンゾグアナミン誘導体は、二量体又は三量体であっても良く、単量体、2量体及び3量体から任意に選ばれる混合物であっても良い。これらの架橋剤は、1種単独で、又は2種以上組み合わせて用いることができる。
The composition of the present invention may contain a crosslinking agent (hereinafter also referred to as a crosslinkable compound) within a range that does not significantly impair the heat resistance, transparency, linear expansion coefficient and flexibility of the thin film obtained.
The crosslinkable compound is a step of converting a coating film obtained using the composition of the present invention into a cured film, and a group capable of reacting with an organic group contained in at least one of a polyimide precursor and an imidized polymer. Although it will not specifically limit if it is a compound having, for example, a compound containing two or more epoxy groups or a group in which a hydrogen atom of an amino group is substituted with a methylol group, an alkoxymethyl group or both , Melamine derivatives, benzoguanamine derivatives or glycoluril. The melamine derivative and benzoguanamine derivative may be a dimer or a trimer, and may be a mixture arbitrarily selected from a monomer, a dimer and a trimer. These crosslinking agents can be used alone or in combination of two or more.

以下に、架橋性化合物の具体例を挙げるが、これに限定されない。
エポキシ基を2個以上含有する化合物としては、エポリードGT−401、エポリードGT−403、エポリードGT−301、エポリードGT−302、セロキサイド2021、セロキサイド3000(以上、(株)ダイセル製)等のシクロヘキセン構造を有するエポキシ化合物;エピコート1001、エピコート1002、エピコート1003、エピコート1004、エピコート1007、エピコート1009、エピコート1010、エピコート828(以上、ジャパンエポキシレジン(株)(現 三菱化学(株)、現 jER(登録商標)シリーズ)製)等のビスフェノールA型エポキシ化合物;エピコート807(ジャパンエポキシレジン(株)(現 三菱化学(株)、現 jER(登録商標)シリーズ))製)等のビスフェノールF型エポキシ化合物;エピコート152、エピコート154(以上、ジャパンエポキシレジン(株)(現 三菱化学(株)、現 jER(登録商標)シリーズ)製)、EPPN201、EPPN202(以上、日本化薬(株)製)等のフェノールノボラック型エポキシ化合物;ECON−102、ECON−103S、ECON−104S、ECON−1020、ECON−1025、ECON−1027(以上、日本化薬(株)製)、エピコート180S75(ジャパンエポキシレジン(株)(現 三菱化学(株)、現 jER(登録商標)シリーズ)製)等のクレゾールノボラック型エポキシ化合物;V8000−C7(DIC(株)製)等のナフタレン型エポキシ化合物;デナコールEX−252(ナガセケムテックス(株)製)、CY175、CY177、CY179、アラルダイトCY−182、アラルダイトCY−192、アラルダイトCY−184(以上、BASF社製)、エピクロン200、エピクロン400(以上、DIC(株)製)、エピコート871、エピコート872(以上、ジャパンエポキシレジン(株)(現 三菱化学(株)、現 jER(登録商標)シリーズ)製)、ED−5661、ED−5662(以上、セラニーズコーティング(株)製)等の脂環式エポキシ化合物;デナコールEX−611、デナコールEX−612、デナコールEX−614、デナコールEX−622、デナコールEX−411、デナコールEX−512、デナコールEX−522、デナコールEX−421、デナコールEX−313、デナコールEX−314、デナコールEX−312(以上、ナガセケムテックス(株)製)等の脂肪族ポリグリシジルエーテル化合物が挙げられる。
Although the specific example of a crosslinkable compound is given to the following, it is not limited to this.
Examples of the compound containing two or more epoxy groups include cyclohexene structures such as Epolide GT-401, Epolide GT-403, Epolide GT-301, Epolide GT-302, Celoxide 2021, Celoxide 3000 (manufactured by Daicel Corporation). Epicoat 1001, Epicoat 1002, Epicoat 1003, Epicoat 1004, Epicoat 1007, Epicoat 1009, Epicoat 1010, Epicoat 828 (above, Japan Epoxy Resin Co., Ltd. (currently Mitsubishi Chemical Corporation, presently jER) Bisphenol A type epoxy compounds such as Epicote 807 (manufactured by Japan Epoxy Resin Co., Ltd. (currently Mitsubishi Chemical Corporation, presently jER (registered trademark) series))) Poxy compounds; Epicoat 152, Epicoat 154 (above, Japan Epoxy Resin Co., Ltd. (currently Mitsubishi Chemical Corporation, presently jER (registered trademark) series)), EPPN201, EPPN202 (above, Nippon Kayaku Co., Ltd.) Phenol novolac epoxy compounds such as: ECON-102, ECON-103S, ECON-104S, ECON-1020, ECON-1025, ECON-1027 (above, Nippon Kayaku Co., Ltd.), Epicoat 180S75 (Japan Epoxy Resin ( Cresol novolak type epoxy compounds such as (manufactured by Mitsubishi Chemical Corporation, currently jER (registered trademark) series); naphthalene type epoxy compounds such as V8000-C7 (manufactured by DIC Corporation); Denacol EX-252 ( Nagase ChemteX Corporation), CY175, C Y177, CY179, Araldite CY-182, Araldite CY-192, Araldite CY-184 (above, manufactured by BASF), Epicron 200, Epicron 400 (above, manufactured by DIC Corporation), Epicoat 871, Epicoat 872 (above, Japan) Cycloaliphatic epoxy compounds such as Epoxy Resin Co., Ltd. (currently Mitsubishi Chemical Co., Ltd., present jER (registered trademark) series), ED-5661, ED-5661 (above, Celanese Coating Co., Ltd.); Denacol EX-611, Denacol EX-612, Denacol EX-614, Denacol EX-622, Denacol EX-411, Denacol EX-512, Denacol EX-522, Denacol EX-421, Denacol EX-313, Denacol EX-314, Denacor EX-31 (Above, manufactured by Nagase ChemteX Corporation) aliphatic polyglycidyl ether compounds, and the like.

アミノ基の水素原子がメチロール基、アルコキシメチル基又はその両方で置換された基を有する、メラミン誘導体、ベンゾグアナミン誘導体又はグリコールウリルとしては、トリアジン環1個当たりメトキシメチル基が平均3.7個置換されているMX−750、トリアジン環1個当たりメトキシメチル基が平均5.8個置換されているMW−30(以上、(株)三和ケミカル製);サイメル300、サイメル301、サイメル303、サイメル350、サイメル370、サイメル771、サイメル325、サイメル327、サイメル703、サイメル712等のメトキシメチル化メラミン;サイメル235、サイメル236、サイメル238、サイメル212、サイメル253、サイメル254等のメトキシメチル化ブトキシメチル化メラミン;サイメル506、サイメル508等のブトキシメチル化メラミン;サイメル1141のようなカルボキシル基含有メトキシメチル化イソブトキシメチル化メラミン;サイメル1123のようなメトキシメチル化エトキシメチル化ベンゾグアナミン;サイメル1123−10のようなメトキシメチル化ブトキシメチル化ベンゾグアナミン;サイメル1128のようなブトキシメチル化ベンゾグアナミン;サイメル1125−80のようなカルボキシル基含有メトキシメチル化エトキシメチル化ベンゾグアナミン;サイメル1170のようなブトキシメチル化グリコールウリル;サイメル1172のようなメチロール化グリコールウリル(以上、三井サイアナミッド(株)(現 サイテック インダストリーズ社)製)等が挙げられる。   As the melamine derivative, benzoguanamine derivative, or glycoluril having a group in which the hydrogen atom of the amino group is substituted with a methylol group, an alkoxymethyl group, or both, an average of 3.7 methoxymethyl groups are substituted per triazine ring. MX-750, MW-30 substituted with an average of 5.8 methoxymethyl groups per triazine ring (above, manufactured by Sanwa Chemical Co., Ltd.); Cymel 300, Cymel 301, Cymel 303, Cymel 350 Methoxymethylated melamine such as Cymel 370, Cymel 771, Cymel 325, Cymel 327, Cymel 703, Cymel 712 and the like; Cymel 235, Cymel 236, Cymel 238, Cymel 212, Cymel 253, Cymel 254 and the like Mela Butylmethylated melamines such as Cymel 506 and Cymel 508; carboxyl group-containing methoxymethylated isobutoxymethylated melamines such as Cymel 1141; methoxymethylated ethoxymethylated benzoguanamines such as Cymel 1123; Methoxymethylated butoxymethylated benzoguanamine; butoxymethylated benzoguanamine such as Cymel 1128; carboxyl-containing methoxymethylated ethoxymethylated benzoguanamine such as Cymel 1125-80; butoxymethylated glycoluril such as Cymel 1170; Cymel 1172 Such as methylolated glycoluril (manufactured by Mitsui Cyanamid Co., Ltd. (currently Cytec Industries)).

本発明の組成物に含まれるポリイミド前駆体も、本発明の対象であり、例えば、式(20)で表されるテトラカルボン酸二無水物と、3つのジアミン、すなわち、式(21)で表されるジアミン、式(22)で表されるジアミン及び式(23)で表されるジアミンとを反応させることで得ることができる。

Figure 2015232055
The polyimide precursor contained in the composition of the present invention is also an object of the present invention, for example, tetracarboxylic dianhydride represented by the formula (20) and three diamines, that is, represented by the formula (21). It can be obtained by reacting the diamine represented by formula (22) and the diamine represented by formula (23).
Figure 2015232055

式(20)〜式(23)中、R〜R24は、上記と同じ意味を示す。
上記反応において、式(21)で表されるジアミンの物質量M、式(22)で表されるジアミンの物質量M及び式(23)で表されるジアミンの物質量Mが、M/(M+M)=70/30〜99/1を満たすことが好ましく、75/25〜95/5を満たすことがより好ましい。
また、M及びMは、M/M=10/90〜90/10を満たすことが好ましく、M/M=40/60〜60/40を満たすことがより好ましい。
In formula (20) to formula (23), R 1 to R 24 have the same meaning as described above.
In the above reaction, the diamine substance amount M 1 represented by the formula (21), the diamine substance amount M 2 represented by the formula (22), and the diamine substance amount M 3 represented by the formula (23) are: It is preferable to satisfy M 2 / (M 1 + M 3 ) = 70/30 to 99/1, and it is more preferable to satisfy 75/25 to 95/5.
Further, M 1 and M 3, it is preferable to satisfy the M 1 / M 3 = 10 / 90~90 / 10, more preferably satisfies the M 1 / M 3 = 40 / 60~60 / 40.

上記反応において式(20)で表されるカルボン酸二無水物成分と全ジアミン(式(21)〜(23)で表されるジアミン)の仕込み比は、カルボン酸ニ無水物1モルに対して、通常、全ジアミン0.8〜1.2モル程度であり、好ましくは0.95〜1.05モル程度である。   In the above reaction, the charge ratio of the carboxylic dianhydride component represented by formula (20) and the total diamine (diamine represented by formulas (21) to (23)) is 1 mol of carboxylic dianhydride. Usually, the total diamine is about 0.8 to 1.2 mol, preferably about 0.95 to 1.05 mol.

上記ポリイミド前駆体の反応に用いる溶媒は、原料化合物を溶解でき、かつ、反応を阻害しないものであれば、特に限定されるものではない。
その具体例としては、N,N−ジメチルアセトアミド、N,N−ジエチルアセトアミド、N,N−ジメチルホルムアミド、N−メチル−2−ピロリドン、ヘキサメチルホスホルアミド、ジメチルスルホキシド、γ−ブチロラクトン、1,3−ジメチル−2−イミダゾリジノン、1,2−ジメトキシエタン−ビス(2−メトキシエチル)エーテル、テトラヒドロフラン、1,4−ジオキサン、ピコリン、ピリジン、アセトン、クロロホルム、トルエン、キシレン等の非プロトン性溶媒、及びフェノール、o−クレゾール、m−クレゾール、p−クレゾール、o−クロロフェノール、m−クロロフェノール、p−クロロフェノール等のプロトン性溶媒等が挙げられる。これらの溶媒は単独で又は2種類以上を組み合わせて使用してもよい。
The solvent used for the reaction of the polyimide precursor is not particularly limited as long as it can dissolve the raw material compound and does not inhibit the reaction.
Specific examples thereof include N, N-dimethylacetamide, N, N-diethylacetamide, N, N-dimethylformamide, N-methyl-2-pyrrolidone, hexamethylphosphoramide, dimethyl sulfoxide, γ-butyrolactone, 1, Aprotic such as 3-dimethyl-2-imidazolidinone, 1,2-dimethoxyethane-bis (2-methoxyethyl) ether, tetrahydrofuran, 1,4-dioxane, picoline, pyridine, acetone, chloroform, toluene, xylene Examples include solvents and protic solvents such as phenol, o-cresol, m-cresol, p-cresol, o-chlorophenol, m-chlorophenol, and p-chlorophenol. These solvents may be used alone or in combination of two or more.

反応温度は、用いる溶媒の融点から溶媒の沸点までの範囲で適宜設定すればよく、通常−20〜100℃程度であり、好ましくは15〜80℃程度である。また、重合の反応時間は、通常1〜72時間程度である。   What is necessary is just to set reaction temperature suitably in the range from the melting | fusing point of the solvent to be used to the boiling point of a solvent, and is about -20-100 degreeC normally, Preferably it is about 15-80 degreeC. The polymerization reaction time is usually about 1 to 72 hours.

一方、本発明の組成物に含まれるイミド化重合体も、本発明の対象であり、例えば、上記ポリイミド前駆体を脱水閉環(イミド化)することで得ることができる。脱水閉環する方法は、加熱による脱水閉環(熱イミド化)、触媒による脱水閉環のいずれも採用できる。
加熱による脱水閉環の加熱温度は、閉環反応が進行する限り特に限定されるものではないが、通常100〜450℃であり、好ましくは100〜420℃である。
また、触媒による脱水閉環は、例えば、塩基と酸の存在下で行う。触媒による脱水閉環をするための温度は、その反応が進行する限りにおいて、任意の温度を選択できる。
On the other hand, the imidized polymer contained in the composition of the present invention is also an object of the present invention, and can be obtained, for example, by dehydrating and ring-closing (imidizing) the polyimide precursor. As a method of dehydrating and cyclizing, either dehydration cyclization by heating (thermal imidization) or dehydration cyclization by a catalyst can be adopted.
The heating temperature of dehydration and cyclization by heating is not particularly limited as long as the cyclization reaction proceeds, but is usually 100 to 450 ° C, preferably 100 to 420 ° C.
Further, the dehydration ring closure using a catalyst is performed in the presence of a base and an acid, for example. As the temperature for dehydration ring closure by the catalyst, any temperature can be selected as long as the reaction proceeds.

上記反応で用いるテトラカルボン酸二無水物及びジアミンは、市販品を使用してもよく、公知の方法により合成したものを使用してもよい。   As the tetracarboxylic dianhydride and diamine used in the above reaction, commercially available products may be used, or those synthesized by a known method may be used.

以上で説明した組成物(ワニス)を基材上に塗布し、溶媒を蒸発させることで基材上に基盤材料に好適な薄膜を形成させることができる。
ワニスの塗布方法としては、特に限定されるものではなく、キャストコート法、スピンコート法、ブレードコート法、ディップコート法、ロールコート法、バーコート法、ダイコート法、インクジェット法、印刷法(凸版、凹版、平版、スクリーン印刷等)等が挙げられる。
また、ワニスを塗布するための基材としては、例えば、プラスチック(ポリカーボネート、ポリメタクリレート、ポリスチレン、ポリエステル、ポリオレフィン、エポキシ、メラミン、トリアセチルセルロース、ABS、AS、ノルボルネン系樹脂等)、金属、木材、紙、ガラス、スレート等が挙げられる。
A thin film suitable for the base material can be formed on the substrate by applying the composition (varnish) described above onto the substrate and evaporating the solvent.
The coating method of the varnish is not particularly limited, and the cast coating method, spin coating method, blade coating method, dip coating method, roll coating method, bar coating method, die coating method, ink jet method, printing method (letter plate, Intaglio, lithographic, screen printing, etc.).
Moreover, as a base material for apply | coating a varnish, plastics (polycarbonate, polymethacrylate, polystyrene, polyester, polyolefin, epoxy, melamine, triacetylcellulose, ABS, AS, norbornene resin etc.), metal, wood, Examples include paper, glass, and slate.

ワニスの溶媒は、例えば、ホットプレートやオーブンを用いて、適切な雰囲気下、すなわち大気、窒素等の不活性ガス、真空中等で蒸発させればよい。これにより、均一な成膜面を有する薄膜を得ることが可能である。
焼成温度は、通常100〜450℃、好ましくは100〜420℃である。この場合、より高い均一成膜性を発現させたり、基材上で反応を進行させたりする目的で、2段階以上の温度変化をつけてもよい。
The solvent of the varnish may be evaporated in an appropriate atmosphere, that is, in an inert gas such as air, nitrogen, or in a vacuum using a hot plate or an oven, for example. Thereby, a thin film having a uniform film formation surface can be obtained.
A calcination temperature is 100-450 degreeC normally, Preferably it is 100-420 degreeC. In this case, two or more stages of temperature changes may be applied for the purpose of developing higher uniform film forming properties or allowing the reaction to proceed on the substrate.

硬化膜の膜厚は、特に限定されないが、特にフレキシブルディスプレイ等のベースフィルム(基盤材料)として用いる場合、好ましく1〜50μmであり、より好ましくは5〜40μmである。
膜厚を変化させる方法としては、ワニス中の固形分濃度を変化させたり、塗布時の基材上の溶液量を変化させたりする等の方法がある。
Although the film thickness of a cured film is not specifically limited, When using especially as base films (base material), such as a flexible display, Preferably it is 1-50 micrometers, More preferably, it is 5-40 micrometers.
Methods for changing the film thickness include methods such as changing the solid content concentration in the varnish and changing the amount of the solution on the substrate during application.

以上で説明した方法により得られる硬化膜は、適度な柔軟性、優れた耐熱性、適度な線膨張係数及び高い透明性を有するため、液晶ディスプレイ、有機EL照明、電子ペーパー等といった、これらの特性が必要となるデバイスの分野での基盤材料としての利用が期待される。   The cured film obtained by the method described above has moderate flexibility, excellent heat resistance, moderate linear expansion coefficient, and high transparency, so these characteristics such as liquid crystal display, organic EL lighting, electronic paper, etc. It is expected to be used as a base material in the field of devices that need to be used.

以下、実施例を挙げて、本発明をより具体的に説明するが、本発明は下記の実施例に限定されるものではない。   EXAMPLES Hereinafter, although an Example is given and this invention is demonstrated more concretely, this invention is not limited to the following Example.

[1]実施例で用いる略記号
PDA:p−フェニレンジアミン(東京化成工業(株)製)
APAB:2−(3−アミノフェニル)−5−アミノベンズイミダゾール(Changzhou Sunlight Pharmaceutical Co.,Ltd製)(式(24))
TFMB:2,2’−ビス(トリフルオロメチル)ベンジジン(東京化成工業(株)製)(式(25))
BAPPS:ビス[4−(3−アミノフェノキシ)フェニル]スルホン(東京化成工業(株)製)(式(26))
BAPS:ビス(3−アミノフェニル)スルホン(東京化成工業(株)製)(式(27))
[1] Abbreviations used in the examples PDA: p-phenylenediamine (manufactured by Tokyo Chemical Industry Co., Ltd.)
APAB: 2- (3-aminophenyl) -5-aminobenzimidazole (manufactured by Changzhou Sunlight Pharmaceutical Co., Ltd.) (formula (24))
TFMB: 2,2′-bis (trifluoromethyl) benzidine (manufactured by Tokyo Chemical Industry Co., Ltd.) (formula (25))
BAPPS: Bis [4- (3-aminophenoxy) phenyl] sulfone (manufactured by Tokyo Chemical Industry Co., Ltd.) (formula (26))
BAPS: bis (3-aminophenyl) sulfone (manufactured by Tokyo Chemical Industry Co., Ltd.) (formula (27))

Figure 2015232055
Figure 2015232055

[2]ポリマーの重量平均分子量(以下、Mwともいう。)と分子量分布の測定
ポリマーのMwと分子量分布の測定に使用したゲル浸透クロマトグラフィー(GPC)装置及びその条件は以下の通りである。なお、Mwはポリスチレン換算値とした。
GPC:ChromNav、JASCO製
カラム:昭和電工(株)製 Shodex[登録商標]SB803HQ及びSB804HQ
カラム温度:40℃
溶媒:N,N−ジメチルホルムアミド(0.9mL/分)
検出器:RI
[2] Measurement of polymer weight average molecular weight (hereinafter also referred to as Mw) and molecular weight distribution The gel permeation chromatography (GPC) apparatus used for the measurement of polymer Mw and molecular weight distribution and the conditions thereof are as follows. In addition, Mw was made into the polystyrene conversion value.
GPC: ChromNav, manufactured by JASCO Column: manufactured by Showa Denko KK Shodex [registered trademark] SB803HQ and SB804HQ
Column temperature: 40 ° C
Solvent: N, N-dimethylformamide (0.9 mL / min)
Detector: RI

[3]ポリイミド前駆体酸の合成及びワニスの製造
[実施例1]
TFMB16g(0.005モル)、APAB 1.4g(0.0006モル)、PDA 0.63g(0.0006モル)を170gに溶解し、CBDA(東京化成工業(株)製)12g(0.061モル)を添加した後、窒素雰囲気下、23℃で24時間反応させてポリマーを得た(Mw38,700 分子量分布2.1)
得られたポリマー溶液をそのまま実施例1のワニスとして後述する硬化膜の作製に使用した(固形分15%)。
[3] Synthesis of polyimide precursor acid and production of varnish [Example 1]
TFMB 16 g (0.005 mol), APAB 1.4 g (0.0006 mol), PDA 0.63 g (0.0006 mol) were dissolved in 170 g, and CBDA (Tokyo Chemical Industry Co., Ltd.) 12 g (0.061 The polymer was obtained by reacting at 23 ° C. for 24 hours under a nitrogen atmosphere (Mw 38,700 molecular weight distribution 2.1).
The obtained polymer solution was directly used as a varnish of Example 1 for production of a cured film described later (solid content: 15%).

[比較例1]
BAPPS 4.13g(0.0095モル)をNMP 14.0gに溶解し、CBDA 1.87g(0.0095モル)を添加した後、窒素雰囲気下、23℃で24時間反応させてポリマーを得た(Mw19,800 分子量分布2.1)。
得られたポリマー溶液をそのまま比較例1のワニスとして後述する硬化膜の作製に使用した(固形分30%)。
[Comparative Example 1]
4.13 g (0.0095 mol) of BAPPS was dissolved in 14.0 g of NMP, and 1.87 g (0.0095 mol) of CBDA was added, followed by reaction at 23 ° C. for 24 hours in a nitrogen atmosphere to obtain a polymer. (Mw 19,800 molecular weight distribution 2.1).
The obtained polymer solution was directly used as a varnish of Comparative Example 1 for the production of a cured film described later (solid content 30%).

[比較例2]
BAPS 3.35g(0.013モル)をNMP 14.0gに溶解し、CBDA 2.65g(0.014モル)を添加した後、窒素雰囲気下、23℃で24時間反応させて、ポリマーを得た(Mw13,600 分子量分布3.1)
得られたポリマー溶液をそのまま比較例2のワニスとして後述する硬化膜の作製に使用した(固形分30%)。
[Comparative Example 2]
3.35 g (0.013 mol) of BAPS was dissolved in 14.0 g of NMP, and 2.65 g (0.014 mol) of CBDA was added, followed by reaction at 23 ° C. for 24 hours in a nitrogen atmosphere to obtain a polymer. (Mw 13,600 molecular weight distribution 3.1)
The obtained polymer solution was directly used as a varnish of Comparative Example 2 for production of a cured film described later (solid content 30%).

[4]硬化膜の作製及びその評価
<硬化膜の作製及び膜厚の評価>
実施例1及び比較例1,2で作製したワニスをバーコーターでガラス基板上に塗布し、減圧下で、110℃で10分、230℃で30分、300℃で30分、350℃で120分間、順次加熱して硬化膜を得た。
得られた硬化膜の膜厚を、接触式膜厚測定器((株)ULVAC製Dektak 3ST)を用いて測定した。
[4] Preparation of cured film and evaluation thereof <Preparation of cured film and evaluation of film thickness>
The varnishes produced in Example 1 and Comparative Examples 1 and 2 were coated on a glass substrate with a bar coater, and under reduced pressure, 110 ° C. for 10 minutes, 230 ° C. for 30 minutes, 300 ° C. for 30 minutes, 350 ° C. for 120 minutes. A cured film was obtained by sequential heating for minutes.
The film thickness of the obtained cured film was measured using a contact-type film thickness measuring device (Dektak 3ST manufactured by ULVAC, Inc.).

<自己支持性の評価>
表面に硬化膜が形成されたガラス基板を、70℃の純水中に静置して硬化膜を剥離した。剥離した硬化膜を折り曲げる手法により自己支持性を評価した。
<Evaluation of self-supporting>
The glass substrate with the cured film formed on the surface was left in pure water at 70 ° C. to peel the cured film. The self-supporting property was evaluated by a method of bending the peeled cured film.

<耐熱性測定>
剥離した硬化膜から重さ約5mgの小片を切り出し、この小片を加熱(50℃から500℃まで毎分5℃で昇温)してその5%質量減少を測定することで耐熱性を評価した。評価には、TG/DTA−2000SA(ブルカー・エイエックスエス(株)製)を用いた。
<Heat resistance measurement>
A small piece having a weight of about 5 mg was cut out from the peeled cured film, this small piece was heated (heated from 50 ° C. to 500 ° C. at a rate of 5 ° C. per minute), and its 5% mass reduction was measured to evaluate the heat resistance. . For the evaluation, TG / DTA-2000SA (manufactured by Bruker AXS Co., Ltd.) was used.

<透過率測定>
上記で作製したガラス基板付の硬化膜の透過率を、(株)島津製作所製 自記分光光度計UV−3100PCを用いて測定した。
<Transmittance measurement>
The transmittance of the cured film with the glass substrate prepared above was measured using a self-recording spectrophotometer UV-3100PC manufactured by Shimadzu Corporation.

<線膨張係数>
剥離した硬化膜から20mm×5mmの短冊を切り出し、この短冊をTMA−4000SA(ブルカー・エイエックスエス(株)製)を用いて、50℃から150℃まで5℃/分の条件で加熱し、冷却後、再度、50℃から400℃の条件で加熱して線膨張係数を測定した。なお、比較例2の硬化膜は、十分な自己支持性を有さないため、線膨張係数を測定できなかった。
<Linear expansion coefficient>
A 20 mm × 5 mm strip was cut out from the peeled cured film, and this strip was heated from 50 ° C. to 150 ° C. at 5 ° C./min using TMA-4000SA (manufactured by Bruker AXS Co., Ltd.) After cooling, it was heated again at 50 ° C. to 400 ° C. to measure the linear expansion coefficient. In addition, since the cured film of Comparative Example 2 did not have sufficient self-supporting property, the linear expansion coefficient could not be measured.

上記評価の結果を表1に示す。なお、透過率は、波長400nmでの値である。
表1に示すように、実施例1のワニスから得られた硬化膜は、比較例1及び2で作製したワニスから得られたものと比較して、線膨張係数が低いだけでなく、優れた透明性と自己支持性及び耐熱性を有するとする結果が得られた。

Figure 2015232055

※1 ○:自己支持性あり。90度に曲げても割れない。
△:自己支持性あり。但し衝撃で割れる。
×:自己支持性なし。 The results of the evaluation are shown in Table 1. The transmittance is a value at a wavelength of 400 nm.
As shown in Table 1, the cured film obtained from the varnish of Example 1 was not only low in linear expansion coefficient but also superior to those obtained from the varnishes produced in Comparative Examples 1 and 2. The result of having transparency, self-supporting property and heat resistance was obtained.
Figure 2015232055

* 1 ○: Self-supporting. Even if it is bent at 90 degrees, it does not break.
Δ: Self-supporting. However, it breaks on impact.
X: No self-supporting property.

Claims (12)

式(1)で表される構造単位、式(2)で表される構造単位及び式(3)で表される構造単位を含むポリイミド前駆体及びそのイミド化重合体から選ばれる少なくとも1種と、有機溶媒とを含む耐熱性基盤用組成物。
Figure 2015232055

{式(1)〜(3)中、Xは、式(4)で表される4価の基を表し
Figure 2015232055

(式(4)中、R〜Rは、それぞれ独立して、水素原子、炭素数1〜6のアルキル基又は炭素数1〜6のパーフルオロアルキル基を表す。)、Yは、式(5)で表される2価の基を表し
Figure 2015232055

(式(5)中、R〜R12は、それぞれ独立して、水素原子、炭素数1〜6のアルキル基、炭素数1〜6のパーフルオロアルキル基又は炭素数6〜14の芳香族基を表す)、Yは、式(6)で表される2価の基を表し
Figure 2015232055

〔式(6)中、R13〜R20は、それぞれ独立して、水素原子、炭素数1〜6のアルキル基、炭素数1〜6のパーフルオロアルキル基又は炭素数6〜14の芳香族基を表す(但し、R13〜R20のうち少なくとも2つはパーフルオロアルキル基を表す。)。〕、Yは、式(7)で表される2価の基を表す
Figure 2015232055

(式(7)中、R21〜R24は、それぞれ独立して、水素原子、炭素数1〜6のアルキル基、炭素数1〜6のパーフルオロアルキル基又は炭素数6〜14の芳香族基を表す。)。}
At least one selected from a structural unit represented by formula (1), a structural unit represented by formula (2), a polyimide precursor containing a structural unit represented by formula (3), and an imidized polymer thereof; And a heat-resistant substrate composition comprising an organic solvent.
Figure 2015232055

{In Formulas (1) to (3), X 1 represents a tetravalent group represented by Formula (4).
Figure 2015232055

(In Formula (4), R < 1 > -R < 4 > represents a hydrogen atom, a C1-C6 alkyl group, or a C1-C6 perfluoroalkyl group each independently.) Y < 1 > Represents a divalent group represented by formula (5)
Figure 2015232055

(In Formula (5), R < 5 > -R < 12 > is respectively independently a hydrogen atom, a C1-C6 alkyl group, a C1-C6 perfluoroalkyl group, or a C6-C14 aromatic. And Y 2 represents a divalent group represented by the formula (6).
Figure 2015232055

[In Formula (6), R < 13 > -R < 20 > is respectively independently a hydrogen atom, a C1-C6 alkyl group, a C1-C6 perfluoroalkyl group, or a C6-C14 aromatic. Represents a group (provided that at least two of R 13 to R 20 represent a perfluoroalkyl group). Y 3 represents a divalent group represented by the formula (7).
Figure 2015232055

(In Formula (7), R < 21 > -R < 24 > is respectively independently a hydrogen atom, a C1-C6 alkyl group, a C1-C6 perfluoroalkyl group, or a C6-C14 aromatic. Represents a group). }
前記Yが、式(8)で表される2価の基である請求項1に記載の耐熱性基盤用組成物。
Figure 2015232055

(式(8)中、R〜R12は、前記と同じ意味を表す。)
The heat-resistant base composition according to claim 1, wherein Y 1 is a divalent group represented by formula (8).
Figure 2015232055

(In formula (8), R 5 to R 12 represent the same meaning as described above.)
前記Rが、水素原子であり、前記R〜R12が、それぞれ独立して、水素原子又は炭素数1〜6のパーフルオロアルキル基である請求項1又は2に記載の耐熱性基盤用組成物。 The R 5 is a hydrogen atom, and the R 6 to R 12 are each independently a hydrogen atom or a C 1-6 perfluoroalkyl group. Composition. 前記Yが、式(9)で表される2価の基である請求項1〜3のいずれか1項に記載の耐熱性基盤用組成物。
Figure 2015232055

(式(9)中、R13〜R20は、前記と同じ意味を表す。)
Wherein Y 2 is, heat resistance based composition according to claim 1 is a divalent group represented by the formula (9).
Figure 2015232055

(In formula (9), R 13 to R 20 represent the same meaning as described above.)
前記R13〜R20が、それぞれ独立して、水素原子又は炭素数1〜6のパーフルオロアルキル基である請求項1〜4のいずれか1項に記載の耐熱性基盤用組成物。 Said R < 13 > -R < 20 > is a hydrogen atom or a C1-C6 perfluoroalkyl group each independently, The composition for heat resistant base | substrates of any one of Claims 1-4. 前記Yが、式(10)で表される2価の基である請求項1〜5のいずれか1項に記載の耐熱性基盤用組成物。
Figure 2015232055

(式(10)中、R21〜R24は、前記と同じ意味を表す。)
Wherein Y 3 is, heat resistance based composition according to claim 1 is a divalent group represented by the formula (10).
Figure 2015232055

(In formula (10), R 21 to R 24 represent the same meaning as described above.)
前記R21〜R24が、それぞれ独立して、水素原子又は炭素数1〜6のパーフルオロアルキル基である請求項1〜6のいずれか1項に記載の耐熱性基盤用組成物。 Wherein R 21 to R 24 are each independently of the heat resistance based composition according to any one of claims 1 to 6 is a hydrogen atom or a perfluoroalkyl group having 1 to 6 carbon atoms. 前記R〜Rが、水素原子、メチル基又はトリフルオロメチル基である請求項1〜7のいずれか1項に記載の耐熱性基盤用組成物。 Said R < 1 > -R < 4 > is a hydrogen atom, a methyl group, or a trifluoromethyl group, The composition for heat resistant base | substrates of any one of Claims 1-7. 請求項1〜8のいずれか1項に記載の耐熱性基盤用組成物を塗布し、加熱することにより得られる薄膜。   The thin film obtained by apply | coating the composition for heat resistant base | substrates of any one of Claims 1-8, and heating. 請求項9に記載の薄膜からなる基盤材料。   A base material comprising the thin film according to claim 9. 式(1)で表される構造単位、式(2)で表される構造単位及び式(3)で表される構造単位を含むポリイミド前駆体。
Figure 2015232055

{式(1)〜(3)中、Xは、式(4)で表される4価の基を表し
Figure 2015232055

(式(4)中、R〜Rは、それぞれ独立して、水素原子、炭素数1〜6のアルキル基又は炭素数1〜6のパーフルオロアルキル基を表す。)、Yは、式(5)で表される2価の基を表し
Figure 2015232055

(式(5)中、R〜R12は、それぞれ独立して、水素原子、炭素数1〜6のアルキル基、炭素数1〜6のパーフルオロアルキル基又は炭素数6〜14の芳香族基を表す)、Yは、式(6)で表される2価の基を表し
Figure 2015232055

〔式(6)中、R13〜R20は、それぞれ独立して、水素原子、炭素数1〜6のアルキル基、炭素数1〜6のパーフルオロアルキル基又は炭素数6〜14の芳香族基を表す(但し、R13〜R20のうち少なくとも2つはパーフルオロアルキル基を表す。)。〕、Yは、式(7)で表される2価の基を表す
Figure 2015232055

(式(7)中、R21〜R24は、それぞれ独立して、水素原子、炭素数1〜6のアルキル基、炭素数1〜6のパーフルオロアルキル基又は炭素数6〜14の芳香族基を表す。)。}
The polyimide precursor containing the structural unit represented by Formula (1), the structural unit represented by Formula (2), and the structural unit represented by Formula (3).
Figure 2015232055

{In Formulas (1) to (3), X 1 represents a tetravalent group represented by Formula (4).
Figure 2015232055

(In Formula (4), R < 1 > -R < 4 > represents a hydrogen atom, a C1-C6 alkyl group, or a C1-C6 perfluoroalkyl group each independently.) Y < 1 > Represents a divalent group represented by formula (5)
Figure 2015232055

(In Formula (5), R < 5 > -R < 12 > is respectively independently a hydrogen atom, a C1-C6 alkyl group, a C1-C6 perfluoroalkyl group, or a C6-C14 aromatic. And Y 2 represents a divalent group represented by the formula (6).
Figure 2015232055

[In Formula (6), R < 13 > -R < 20 > is respectively independently a hydrogen atom, a C1-C6 alkyl group, a C1-C6 perfluoroalkyl group, or a C6-C14 aromatic. Represents a group (provided that at least two of R 13 to R 20 represent a perfluoroalkyl group). Y 3 represents a divalent group represented by the formula (7).
Figure 2015232055

(In Formula (7), R < 21 > -R < 24 > is respectively independently a hydrogen atom, a C1-C6 alkyl group, a C1-C6 perfluoroalkyl group, or a C6-C14 aromatic. Represents a group). }
請求項11に記載のポリイミド前駆体のイミド化重合体。   The imidized polymer of the polyimide precursor of Claim 11.
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