JP2015228437A - Process liquid pipe fitting for semiconductor production - Google Patents

Abstract

PROBLEM TO BE SOLVED: To perform replacement work of a container for reserving process liquid, in a short time without using a tool or the like.SOLUTION: In a pipe fitting 1 including a body 30 used for pipes 20, 21 where the process liquid for semiconductor production flowing therethrough has a positive pressure, and into which the pipes 20, 21 are inserted, and nuts 40, 41 being screwed over the body 30 and fastening the pipe inserted thereinto thus connecting the body 30 and the pipes 20, 21, external diameter of the nuts 40, 41 is two times or more of the external diameter of the pipes 20, 21 inserted into the body 30. On the outer peripheral surface of the nuts 40, 41, grips 40c, 41a are formed at more than one points of a protrusion and a recess formed in the length direction of the pipes 20, 21.

Description

  The present invention relates to a joint for connecting piping for supplying a processing liquid such as a resist solution, and more particularly to a joint used for connecting a processing liquid for semiconductor manufacturing.

  For example, in a photolithography process in a semiconductor device manufacturing process, a resist solution is applied on a wafer to form a resist film, or a developing solution is supplied to develop a resist film. Done.

  The supply of the treatment liquid in such a liquid treatment is performed, for example, by pressurizing the inside of the container storing the treatment liquid with nitrogen or the like as disclosed in Patent Document 1. As shown in FIG. 11, a cap 202 formed integrally with the supply pipe 201 is attached to the opening of the container 200, and the inside of the container 200 can be pressurized through the cap 202. Then, the processing liquid pumped from the container 200 by pressurization is supplied onto the wafer from the coating nozzle through the pipe 203 connected to the cap 202 via the joint 204.

JP 2011-233789 A

  Incidentally, in the photolithography process, various processes such as a heat treatment and an exposure process are performed in addition to the above-described liquid treatment. For this reason, a coating / development processing system equipped with a processing unit that executes a series of these processes, a transport unit that transports a wafer between the processing units, and the like is used in a normal photolithography process.

  Since the coating and developing processing system is provided with a plurality of liquid processing units, a plurality of containers for supplying the processing liquid to each liquid processing unit are also provided. FIG. 12 shows an example when a plurality of containers 200 are installed in the coating and developing treatment system. As shown in FIG. 12, for example, a plurality of containers 200 are provided side by side on shelves 211 provided in multiple stages in the vertical direction of the mounting rack 210.

  By the way, since the pressurized processing liquid flows through the pipe 203, the joint 204 needs to be tightened with a predetermined tightening torque. Therefore, the joint 204 is disassembled using a predetermined tool in order to tighten with high torque or perform torque management. However, in order to minimize the footprint of the coating and developing processing system, the mounting rack 210 is generally configured to a minimum size, and no space for working with tools is prepared. .

  Therefore, when the inside of the container 200 becomes empty and the container 200 is replaced, for example, as shown in FIG. 12, a replacement tray 220 is installed in the mounting rack 210 to replace the empty container 200 or the replacement. It is necessary to temporarily place the container 200 for replacement on the replacement tray 220 and perform the work. Therefore, the exchanging operation of the container 200 requires ancillary operations such as attachment / detachment of the replacement tray 220 and temporary placement of the container 200.

  For example, when working on the grating in a clean room, if a tool or the like used to replace the container 200 falls, the tool may collide with equipment or workers below the grating. Therefore, when replacing the container 200, for example, it is desired to develop a replacement method that does not use a tool.

  This invention is made | formed in view of this point, and it is aimed at performing the exchange operation | work of the container for process liquid storage in a short time, without using a tool etc.

  In order to achieve the above-mentioned object, the present invention is used in a pipe in which a processing solution for manufacturing a semiconductor flowing inside becomes a positive pressure, and is screwed into a main body part into which the pipe is inserted and the main body part. A nut for connecting the main body and the pipe by tightening a pipe inserted into the main body, and a processing liquid piping joint for semiconductor manufacturing, wherein the outer diameter of the nut is in the main body A grip that is more than twice the outer diameter of the pipe to be inserted, and is formed on the outer peripheral surface of the nut portion by a convex protrusion and a concave recess formed along the length of the pipe. The part is formed in at least one place.

  According to the present inventor, in a conventional coating and developing treatment system or the like, a tool is used for constructing a joint that connects a pipe and a container for storing a processing liquid. As a result, a strong tightening torque by the tool was necessary. However, since the pressure of nitrogen or the like for pressurizing the inside of the container is considerably smaller than the design pressure of the piping, it has been confirmed that the design pressure may be lowered. Therefore, the present inventor reduces the torque required for tightening the joint by lowering the design pressure of the pipe than before, and uses a joint that can be tightened with high torque without using a tool. It was considered that the replacement work of the container can be performed in a short time without using a tool or the like.

  The present invention is based on the above-described idea. According to the present invention, a grip portion is formed on the outer peripheral portion of the nut portion screwed with the main body portion of the joint, and the outer diameter of the nut portion is connected to the pipe. By setting it to twice or more of the outer diameter, the workability when tightening the nut portion with a bare hand can be improved, and a desired tightening torque can be generated even with the bare hand. Therefore, by using the joint of the present invention to connect the processing liquid storage container and the pipe, it is not necessary to use a tool for replacing the container, and the work can be performed in a short time. In addition, since a tool is not required for the container replacement operation, it is possible to prevent the tool from colliding with equipment or workers below the grating due to the dropping of the tool.

  The main body part and the nut part may be formed with a tightening confirmation mechanism that notifies the operator of the completion of tightening when the tightening of the nut part is completed.

  The tightening confirmation mechanism is fitted when the nut portion is tightened to a tightening completion position formed on a surface of the main body portion facing the nut portion and a surface of the nut portion facing the main body portion. The uneven | corrugated | grooved part which unites may be sufficient.

  The tightening confirmation mechanism includes a nut built in at least one of a surface of the main body portion facing the nut portion or a surface of the nut portion facing the main body portion, and tightening the nut portion to a tightening completion position. It is a microcapsule pigment that bursts at the time, and the nut portion may be formed of a transparent material.

  The tightening confirmation mechanism is an annular member provided between the main body portion and the nut portion, and the annular member is configured such that the main body portion and the nut portion when the nut portion is tightened to a tightening completion position. It may be formed with a thickness that does not rotate between the two.

  The outer peripheral surface of the nut part further includes an annular adapter part formed so as to be freely fitted from the length direction of the pipe through which the nut is inserted, and the adapter part has a length of the pipe. A notch having a width larger than the diameter of the pipe may be formed along the direction.

  The nut part and the main body part may be screwed together by a multi-thread screw.

  According to the present invention, the replacement operation of the container for storing the processing liquid can be performed in a short time without using a tool or the like.

It is a piping system diagram which shows an example of the piping system of the process liquid supply apparatus to which the coupling for piping concerning this Embodiment is applied. It is a perspective view which shows the outline of a structure of the coupling for piping concerning this Embodiment. It is an enlarged view which shows the structure of a main-body part and a nut part vicinity. It is explanatory drawing of the side surface which shows the state by which the container and piping were connected via the coupling for piping. It is explanatory drawing of the side surface which shows the state which removed the coupling for piping from the container. It is explanatory drawing of the side surface which shows the state which removed piping from the coupling for piping. It is a perspective view which shows the outline of a structure of the coupling for piping concerning other embodiment. It is an enlarged view which shows the structure of the main-body part and nut part vicinity concerning other embodiment. It is explanatory drawing at the time of applying the nut part concerning this Embodiment with respect to a valve. It is a perspective view which shows the outline of a structure of the coupling for piping concerning other embodiment. It is explanatory drawing of the side surface which shows the state by which the supply pipe | tube was connected to the container. It is explanatory drawing which shows the state by which the container for process liquid storage was mounted in the mounting rack.

  Embodiments of the present invention will be described below. FIG. 1 is a piping system diagram illustrating an example of a piping system of a processing liquid supply apparatus 10 to which the piping joint 1 according to the present embodiment is applied. The processing liquid supply apparatus 10 supplies, for example, a processing liquid for semiconductor manufacturing, and the piping joint 1 according to the present embodiment is a joint used for piping of a processing liquid for semiconductor manufacturing.

  The processing liquid supply apparatus 10 includes a container 11 that stores the processing liquid therein, a supply nozzle 12 that supplies the processing liquid to the wafer, and a pump 13 that pumps the processing liquid to the supply nozzle 12. A reservoir tank 14 is provided between the container 11 and the pump 13 to temporarily store the processing liquid. The reservoir tank 14 serves as a buffer tank, and even when the resist solution supplied from the container 11 runs out, the processing solution stored in the reservoir tank 14 can be supplied to the supply nozzle 12. A gas supply source (not shown) is connected to the container 11. By supplying, for example, nitrogen gas from the gas supply source into the container 11 and pressurizing, the processing liquid in the container 11 is supplied into the reservoir tank 14. Is done. The maximum pressure when pressurizing the inside of the container 11 is approximately 1.5 MPa.

  The container 11 and the reservoir tank 14 are connected by pipes 20 and 21 via the pipe joint 1. The pump 13 and the supply nozzle 12 are connected by a pipe 22. The pipe joint 1 and the pipes 20 and 21 are designed to withstand a maximum pressure of 1.5 MPa when the inside of the container 11 is pressurized.

  For example, a filter 23 is provided between the pump 13 and the supply nozzle 12, and the processing liquid is filtered by the filter 23 and supplied to the supply nozzle 12.

  In the pipe 21, for example, a valve 24 is provided between the pump 13 and the reservoir tank 14, and when the container 11 is replaced, the pump 13 and the container 11 can be shut off. Similarly, a system shutoff valve 25 is provided between the pump in the pipe 22 and the supply nozzle 12.

  Next, the configuration of the piping joint 1 according to the present embodiment will be described. FIG. 2 is a perspective view showing an example of a schematic configuration of the pipe joint 1 used in the pipes 20 and 21 between the container 11 and the reservoir tank 14, for example.

  The pipe joint 1 has, for example, a main body part 30 into which the pipes 20 and 21 are inserted, and substantially annular nut parts 40 and 41 that are screwed with screws 30 a formed on the outer peripheral surface of the main body part 30. doing. Between the pipes 20 and 21 inserted into the main body part 30 and the main body part 30, a substantially annular member called a so-called ferrule having an outer peripheral surface tapered is interposed, and the screw part 30 a of the main body part 30. The nut portions 40 and 41 are tightened to connect the main body portion 30 and the pipes 20 and 21 via the ferrule. In addition, about the mechanism which fastens the main-body part 30 and the piping 20 and 21 by fastening the nut parts 40 and 41 to the thread part 30a of the main-body part 30, the various mechanisms used for a well-known piping joint can be used. However, it is not limited to the contents of the present embodiment.

  On the outer peripheral surface of the nut portion 40, there are convex protrusions 40 a formed along the length direction (extending direction) of the pipes 20, 21 inserted into the main body portion 30, and the lengths of the pipes 20, 21. Concave depressions 40b formed along the vertical direction are provided adjacent to each other. A grip portion 40c is formed by the protrusion 40a and the recess 40b. Note that FIG. 2 illustrates a state in which the grip portions 40c are provided at five locations at equal intervals, but the grip portions 40c may be provided at least at one or more locations on the outer peripheral surface of the nut portion 40. Good.

  The outer diameter of the nut part 40 is set to, for example, twice or more the outer diameter of the pipe 20 inserted into the main body part 30. In the present embodiment, the outer diameter of the pipe 20 is 6 mm, and the nut part The outer diameter of 40 is set to 12 mm, which is about twice the outer diameter of the pipe. Thus, the grip part 40c is provided in the outer peripheral part of the nut part 40, and an operator can hold the nut part 40 firmly by ensuring the outer diameter of the nut part 40 about 12 mm. Therefore, the nut portion 40 can be tightened with a desired tightening torque even with bare hands. In other words, the tightening torque of the nut portion 40 is determined by, for example, the product of the rotation radius of the nut portion 40 and the force with which the operator turns the nut portion 40. Therefore, when the force with which the operator turns the nut portion 40 is the same, a larger torque can be obtained by increasing the rotation radius of the nut portion 40, that is, the outer diameter of the nut portion 40. Note that the outer diameter of the nut portion 40 here does not indicate, for example, the diameter of a circle connecting the apexes of the protrusions 40a, but contacts the nut portion 40 when an operator grips and tightens the nut portion 40. It means the diameter of the part to do. Therefore, the outer diameter of the nut portion 40 is appropriately changed depending on the shape of the grip portion 40c and the number of grip portions 40c to be installed. That is, for example, in the nut portion 40 having a shape as shown in FIG. 2, the “outer diameter” may be a diameter of a circle connecting the vertices of the protrusions 40a, or for example, the grip portion 40c shown in FIG. May be the diameter of the base portion of the grip portion 40c, that is, the diameter of a circle passing through the recess portion 40b.

  For example, as shown in FIG. 2, a substantially gear-shaped grip portion 41 a is formed on the outer peripheral surface of the nut portion 41 over the entire periphery of the nut portion 41. The outer diameter of the nut portion 41 is also set to, for example, twice or more the outer diameter of the pipe 21 inserted into the main body portion 30. In the present embodiment, the outer diameter of the pipe 21 is 6 mm, and the nut portion The outer diameter of 41 is set to 12 mm, which is about twice the outer diameter of the pipe. The definition of the “outer diameter” of the nut portion 41 is the same as that of the nut portion 40. For example, as shown in FIG. 2, when the grip portion 41a having a fine pitch is formed, The diameter of the circle connecting the vertices corresponds to the “outer diameter”.

  A protrusion 30b is formed on the surface of the main body 30 facing the nut 41, for example. As shown in FIGS. 2 and 3, the protruding portion 30 b is formed to protrude in the length direction of the pipe 21 at a predetermined height. Moreover, as shown in FIG. 3, the hollow part 41b fitted to the projection part 30b is formed in the surface facing the main-body part 30 in the nut part 41. As shown in FIG. When the nut portion 41 is tightened to the main body portion 30 and the nut portion 41 is tightened to a position where the tightening is completed, It arrange | positions at the main-body part 30 and the nut part 41 so that the hollow part 41b may fit, respectively. Accordingly, when the nut portion 41 is tightened to a position where the tightening is completed, the protrusion 30b and the recess portion 41b are fitted to generate sound and vibration. Therefore, the protrusion 30b and the recess 41b function as a tightening confirmation mechanism that notifies the operator of the completion of tightening by sound or vibration when the nut 41 is completely tightened. 2 and 3, the projection 30b is provided on the main body 30 and the depression 41b is provided on the nut 41. However, the projection 30b is provided on the nut 41 and the depression 41b is provided on the nut 41. The main body 30 may be provided. Also, the nut portion 40 may be provided with the protruding portion 30b or the recessed portion 41b, and the recessed portion 41b or the protruding portion 30b may be provided on the surface of the main body portion 30 facing the nut portion 40.

  Next, the pipe joint 1 according to the present embodiment is used for connecting a pipe 20 connected to a cap 202 provided in the container 11 and a pipe 21 communicating with the reservoir tank 14 as shown in FIG. The replacement operation of the container 11 on the mounting rack 210 in the case of being present will be described.

  In exchanging the container 11, the pipe 20 or the pipe 21 is removed from the pipe joint 1. For example, when removing the pipe 20, an operator loosens the nut portion 40 with a bare hand and pulls out the pipe 20 from the main body portion 30. Thereby, for example, as shown in FIG. 5, the pipe 21 is removed from the container 11 together with the pipe joint 1. At this time, the nut portion 40 is provided with a grip portion 40c, and the outer diameter of the nut portion 40 is secured to about 12 mm, so that the nut portion 40 can be easily rotated with high torque even with bare hands, The nut portion 40 can be easily removed.

  Since the container 11 can be moved by removing the pipe 21 from the container 11, the container 11 from which the pipe 21 has been removed is replaced with a new container 11 together with the cap 202 and the pipe 20, for example, from the mounting rack 210. Then, the pipe 20 of the new container 11 and the pipe joint 1 are connected. In this case, the piping 20 and the piping 20 are connected by inserting the piping 20 into the main body 30 and then tightening the nut 40 into the main body 30. Also at this time, the nut portion 40 can be fastened with a high torque with a bare hand, so that the work can be easily performed without using a tool. Thereby, the piping 20 and the piping 21 are connected through the joint 1 for piping, and the replacement | exchange operation | work of the container 11 is complete | finished.

  According to the above embodiment, since the grip part 40c is provided in the nut part 40, and the outer diameter of the nut part 40 is secured about 12 mm, an operator can hold the nut part 40 firmly. . Therefore, even with bare hands, the nut portion 40 can be tightened with a desired tightening torque, and the pipe 20 can be attached and detached with the bare joint 1 with bare hands. Therefore, when replacing the container 11, it is not necessary to perform a work using a tool as in the prior art. As a result, all operations relating to the replacement of the container 11 can be performed in a state where the container 11 is placed on the placement rack 210. Therefore, by using the piping joint 1 of the present invention, it is not necessary to attach or detach the replacement tray 220 or temporarily place the container 11 on the replacement tray 220 as in the prior art, and the container 11 can be replaced. Can be performed in a short time.

  Further, since the tool is not required by performing the work with bare hands, it is possible to avoid a situation where the tool collides with equipment or workers below the grating in the clean room due to a trouble such as dropping of the tool.

  5 shows a state in which the pipe joint 1 is removed from the pipe 20 when replacing the container 11, but when replacing the container 11, either the nut portion 40 or the nut portion 41 is loosened (removed). This is arbitrarily determined in consideration of the work environment and the like, and is not limited to the contents of the present embodiment. Therefore, when replacing the container 11, for example, as shown in FIG. 6, the pipe joint 1 may be left on the container 11 side and the pipe 21 may be removed from the pipe joint 1. In such a case, for example, the nut portion 41 is loosened and the pipe 21 is pulled out from the main body portion 30 to make the container 11 movable.

  In addition, the shape of the nut parts 40 and 41 shown in the said embodiment is only an example, and this invention is not limited to this example. It is obvious for those skilled in the art that various modifications or modifications can be conceived within the scope of the idea described in the claims, and these naturally belong to the technical scope of the present invention. It is understood. Moreover, in the above embodiment, although the nut part 40 and the nut part 41 were different shapes, naturally the nut parts 40 and 41 may be the same shape.

  In the above embodiment, the nut portions 40 and 41 are directly turned with bare hands. For example, in order to improve workability when turning the nut portions 40 and 41 and generate higher torque, for example, FIG. An adapter 50 as shown may be used.

  For example, as shown in FIG. 7, the adapter 50 has a substantially annular shape in which a notch 50 a having a width D larger than the outer diameter of the pipe 21 is formed along the length direction of the pipe 21. . Since the adapter 50 has the notch 50a, the adapter 50 can be attached to and detached from the pipe 21 connected to the pipe joint 1, for example.

  The adapter 50 can be fitted into the grip portion 51 having a predetermined uneven shape and the outer peripheral surface of the nut portion 41, that is, the grip portion 41 a formed on the nut portion 41 from the length direction of the pipe 21. The surface 52 has the joint part 53 formed in the inner peripheral surface. The grip part 51 has an outer diameter larger than the outer diameter of the nut part 41.

  When the adapter 50 is used, as shown in FIG. 7, the pipe 21 is passed through the notch 50 a, for example, the center axis of the adapter 50 is aligned with the center axis of the nut portion 41, and the adapter 50 is connected to the nut portion 41. Push in the direction of. Thereby, the nut part 41 and the fitting surface 52 provided in the junction part 53 of the adapter 50 fit. And since the grip part 51 of the adapter 50 has a larger outer diameter than the grip part 41a of the nut part 41, the grip part 41a of the adapter 50 in a state where the nut part 41 and the adapter 50 are fitted by an operator. By gripping and rotating the nut, it is possible to obtain a higher tightening torque than when the nut portion 41 is directly gripped. Thereby, the workability in connecting the pipes 20 and 21 is further improved. For example, as shown in FIG. 7, the adapter 50 may be provided with a drop cord 54 for preventing dropping.

  Moreover, in order to improve workability | operativity at the time of turning the nut parts 40 and 41, even if it uses multiple thread | threads, such as a double thread and a triple thread, for example, the thread part 30a of the main-body part 30, and the nut parts 40 and 41 Good. By using the multi-threaded screw, the nut portions 40 and 41 can be tightened with respect to the main body portion 30 with a smaller number of rotations, and work for attaching and detaching the pipes 20 and 21 can be performed more efficiently.

  In the above embodiment, as the tightening confirmation mechanism, the projecting portion 30b and the recessed portion 41b for notifying the operator of the completion of tightening by sound or vibration are provided in the main body portion 30 and the nut portion 41, respectively. The mechanism for checking is not limited to the contents of the present embodiment. For example, the microcapsule pigment is disposed inside the hollow portion 41b so as to burst when the nut portion 41 is tightened to the tightening completion position, and the nut portion 41 is made of a transparent material such as Teflon (registered trademark) resin. By forming with the member, the pigment may ooze out when the tightening of the nut portion 41 is completed, and the nut portion 41 may be colored inside or around the nut portion 41. In such a case, the completion of tightening of the nut portion 41 can be visually recognized by the color change.

  As another example of the tightening confirmation mechanism, for example, as shown in FIG. 8, an annular spacer member 60 having a predetermined thickness H is sandwiched between the nut portion 41 and the main body portion 30, and the nut portion 41. It can be proposed to set the thickness H so that the spacer member 60 does not rotate due to the frictional force between the spacer member 60, the nut portion 41, and the main body portion 30 when tightening with a desired torque. In such a case, for example, the protrusion 60a is provided on a part of the spacer member 60, and the operator can check whether the protrusion 60a is rotated, thereby confirming the completion of the tightening of the nut 41.

  The preferred embodiments of the present invention have been described above with reference to the accompanying drawings, but the present invention is not limited to such examples. It is obvious for those skilled in the art that various modifications or modifications can be conceived within the scope of the idea described in the claims, and these naturally belong to the technical scope of the present invention. It is understood. The present invention is not limited to this example and can take various forms. In the above embodiment, although the example in the case of using the joint for piping concerning the present invention for the piping system which supplies processing liquid to a semiconductor wafer was explained, the present invention is not restricted to the joint which connects piping, for example. For example, as shown in FIG. 9, nut portions 40 and 41 are applied to both ends of a small valve 70 used in a piping system for processing liquid for semiconductor manufacturing, and the valve 70 and the pipes 20 and 21 are connected. Can also be used.

  Moreover, in the operation | work which turns the nut parts 40 and 41 etc. of the joint 1 for piping concerning this Embodiment, use of a tool is not denied, for example, as shown in FIG. 10, the main-body part 30, the adapter 50, etc. In addition, for example, an opening 110 into which a general-purpose tool 100 such as a hexagon stick wrench can be inserted is formed, and the adapter 50 is rotated through the tool 100 inserted into the opening 110 or the main body 30 is fixed. Good. Of course, the opening 110 may be provided in the nut portions 40 and 41.

  The present invention is useful when performing work involving pipe removal, such as replacement of a container for storing processing liquid.

1 Piping joint 20, 21 Piping 30 Main body 40, 41 Nut 40c Grip 50 Adapter

Claims (7)

The processing liquid for semiconductor manufacturing flowing inside is used for a pipe that becomes a positive pressure, and the main body part into which the pipe is inserted and the pipe inserted into the main body part by screwing with the main body part are tightened to A processing liquid piping joint for semiconductor manufacturing comprising a main body portion and a nut portion for connecting the piping,
The outer diameter of the nut part is at least twice the outer diameter of the pipe inserted into the main body part,
On the outer peripheral surface of the nut portion, at least one or more grip portions formed by convex protrusions and concave depressions formed along the length direction of the pipe are formed. A processing liquid piping joint for semiconductor manufacturing. The semiconductor manufacturing process according to claim 1, wherein a tightening confirmation mechanism for notifying an operator of completion of tightening when the tightening of the nut portion is completed is formed in the main body portion and the nut portion. Liquid piping joint. The tightening confirmation mechanism is fitted when the nut portion is tightened to a tightening completion position formed on a surface of the main body portion facing the nut portion and a surface of the nut portion facing the main body portion. The processing liquid piping joint for semiconductor manufacturing according to claim 2, wherein the processing liquid piping joint is a concavo-convex portion. The tightening confirmation mechanism includes a nut built in at least one of a surface of the main body portion facing the nut portion or a surface of the nut portion facing the main body portion, and tightening the nut portion to a tightening completion position. A microcapsule pigment that bursts when
The said nut part is formed with the transparent material, The process liquid piping joint for semiconductor manufacture as described in any one of Claim 2 or 3 characterized by the above-mentioned. The tightening confirmation mechanism is an annular member provided between the main body portion and the nut portion,
The said annular member is formed in the thickness which is not rotated between the said main-body part and the said nut part, when the said nut part is tightened to the completion position of clamping, The any one of Claims 2-4 characterized by the above-mentioned. The processing liquid piping joint for semiconductor manufacture as described in one. The outer peripheral surface of the nut part further has an annular adapter part formed so as to be freely fitted from the length direction of the pipe passing through the nut part,
The notch which has a width | variety larger than the diameter of the said piping is formed in the said adapter part along the length direction of the said piping, The Claim 1 characterized by the above-mentioned. Treatment liquid piping joint for semiconductor manufacturing. The said nut part and the said main-body part are screwed together by a multi-thread screw, The process liquid piping joint for semiconductor manufacture as described in any one of Claims 1-6 characterized by the above-mentioned.

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