JP2015217350A - Filter - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a filter which includes a fine filtering structure part and exhibits an excellent filter function.SOLUTION: The filter includes a filter 31, and a laminate 32 formed by laminating a plurality of unit members 41. The unit member 41 includes a groove part 44 which is positioned on one main surface 43a out of a pair of opposite main surfaces 43a, 43b of a flat-plate-shaped base material 42. The plurality of unit members 41 are laminated so that the main surfaces abut each other to form the laminate 32. As the groove part 44 is arranged, a filtering structure part 33 has a plurality of flow passages 34 partitioned by a thin part 45 of the base material 42 existing on the other main surface 43b.

Description

  The present invention relates to a filter, and more particularly to a filter that can be used to remove foreign substances contained in a fluid, or to recover a product contained in a fluid.

For example, in beverage production, if there is a particle that needs to be removed among the particles contained in the beverage, a removal step using a filter is provided. Conventionally, as a filter for removing particles contained in a fluid, a laminated filter in which a wire mesh or punching metal (a plate material having a hole of a desired size mechanically drilled) is used has been used. Yes. Such a filter expects the size of particles that can be captured, depending on the size of the opening diameter (interwire distance) of the wire mesh. Depending on the physical properties of the fluid, the size of the particles to be removed, etc., a desired opening can be obtained. A wire mesh having a caliber was used.
However, in a multilayer filter using a wire mesh, the control of passing particles and captured particles is unstable. Further, it is difficult to remove particles trapped in a wire mesh having a three-dimensionally complicated structure, and there is a problem in maintainability. In particular, in a process that requires strict environmental management for hygiene, such as in beverage production, a filter in which particles cannot be completely removed by cleaning during maintenance has to be replaced without being reused.
In order to solve the above problems, a filter in which metal thin plates having holes are stacked has been proposed. For example, etching is performed on a thin metal plate to form a through hole, a hole is formed, and such thin metal plates are stacked, and the size of the hole and the total thickness of the thin metal plate are calculated. Filters with improved aspect ratios have been proposed (Patent Documents 1 and 2).

JP 2000-109985 A JP 2011-147872 A

In order to improve the aspect ratio of the hole that expresses the filter function, it is necessary to stack a plurality of metal sheets in the filter in which the thin metal plates are laminated as described above. There was a problem that a deviation occurred, a step was generated in the hole inside the filter, the accuracy of the opening size (filter size) was lowered, and it was difficult to obtain a good filter function. In particular, the smaller the particles to be captured and the finer the hole, the lower the accuracy during stacking.
This invention is made | formed in view of the above situations, and it aims at providing the filter which has a fine filtration structure part and expresses the outstanding filter function.

  In order to solve such a problem, the filter of the present invention is a flat base material and the other of the base material facing one side of the base material that is located on one side of the base material. A plurality of unit members having a groove portion that reaches the side of the base member, and includes a laminated body that is laminated so as to contact the main surface, and the base material that is present on the other main surface by positioning the groove portion It was set as the structure provided with the filtration structure part which has the several flow path divided by this thin part.

As another aspect of the present invention, the laminate is configured such that a plurality of the unit members are laminated so that the principal surfaces on which the groove portions are located are in the same direction.
As another aspect of the present invention, the laminate is configured by laminating a plurality of unit laminates in which one set of the unit members is laminated so that the groove portions face each other.
As another aspect of the present invention, the thin portion is positioned at an end of the base member of the unit member, and a lid member that contacts a plurality of the thin portions arranged on one surface of the laminate is provided. It was set as the structure which has.

As another aspect of the present invention, the unit member is configured to have a notch or a through hole in the thin portion.
As another aspect of the present invention, the unit member has a through-hole extending from one main surface to the other main surface in the base material excluding the thin-walled portion, and the through-hole is connected to the filtration structure portion. Is configured as another filtering structure.
As another aspect of the present invention, the unit member has a groove part different from the groove part, and the groove part forms a filtration structure part different from the filtration structure part.

  The filter of the present invention has a structure in which the dimensional accuracy of the filtration structure portion is high and the size of the filtration structure portion can be controlled according to the particle size to be captured, and can exhibit an excellent filter function.

FIG. 1 is a perspective view for explaining an embodiment of the filter of the present invention. FIG. 2 is a perspective view of a unit member constituting the filter shown in FIG. FIG. 3 is a perspective view for explaining another embodiment of the filter of the present invention. FIG. 4 is a perspective view for explaining another embodiment of the filter of the present invention. FIG. 5 is a perspective view of a unit member constituting the filter shown in FIG. FIG. 6 is a perspective view for explaining another embodiment of the filter of the present invention. FIG. 7 is a perspective view of a unit member constituting the filter shown in FIG. FIG. 8 is a perspective view of a unit laminate body constituting the filter shown in FIG. FIG. 9 is a perspective view for explaining another embodiment of the filter of the present invention. FIG. 10 is a perspective view of a unit member constituting the filter shown in FIG. FIG. 11 is a perspective view of a unit laminate body constituting the filter shown in FIG. FIG. 12 is a perspective view for explaining another embodiment of the filter of the present invention. FIG. 13 is a perspective view of a unit member constituting the filter shown in FIG. FIG. 14 is a perspective view showing another example of the unit member. FIG. 15 is a perspective view for explaining another embodiment of the filter of the present invention. FIG. 16 is a perspective view of a unit member constituting the filter shown in FIG. FIG. 17 is a perspective view showing another example of the unit member. FIG. 18 is a perspective view for explaining another embodiment of the filter of the present invention. FIG. 19 is a perspective view of a unit member constituting the filter shown in FIG. FIG. 20 is a perspective view of a unit laminate body constituting the filter shown in FIG. FIG. 21 is a perspective view showing another example of the unit member and the unit laminate. FIG. 22 is a perspective view for explaining another embodiment of the filter of the present invention. FIG. 23 is a perspective view of a unit member constituting the filter shown in FIG. FIG. 24 is a perspective view of a unit laminate body constituting the filter shown in FIG. FIG. 25 is a perspective view showing another example of the unit member and the unit laminate body. FIG. 26 is a perspective view for explaining another embodiment of the filter of the present invention. 27 is a perspective view of a unit member constituting the filter shown in FIG. FIG. 28 is a perspective view for explaining another embodiment of the filter of the present invention. 29 is a perspective view of a unit member constituting the filter shown in FIG. FIG. 30 is a perspective view for explaining another embodiment of the filter of the present invention. FIG. 31 is a perspective view of a unit member constituting the filter shown in FIG. FIG. 32 is a perspective view of a unit laminate body constituting the filter shown in FIG. FIG. 33 is a perspective view for explaining an example of producing the filter of the present invention. FIG. 34 is a perspective view for explaining another example of producing the filter of the present invention.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
Note that the drawings are schematic or conceptual, and the dimensions of each member, the ratio of sizes between the members, etc. are not necessarily the same as the actual ones, and represent the same members. However, in some cases, the dimensions and ratios may be different depending on the drawing.

[First Embodiment]
FIG. 1 is a perspective view for explaining an embodiment of the filter of the present invention, and FIG. 2 is a perspective view of a unit member constituting the filter shown in FIG. 1 and 2, the filter 11 includes a laminated body 12 in which a plurality of unit members 21 and unit members 21 ′ are laminated, and a lid member 15.
The unit member 21 constituting the laminated body 12 is located on one side of the base material 22 located on one main surface 23a of the flat base material 22 and a pair of main surfaces 23a, 23b facing the base material 22. A groove portion 24 along the X direction shown in the figure so as to reach the other side 22b facing from 22a, and a thin portion 25 located on the main surface 23b side of the portion where the groove portion 24 is located in the base material 22. ing. The dimension of the groove part 24 determines the width W1 and height H of the flow path 14 mentioned later. In the illustrated example, the thin portion 25 is located at one end of the base material 22 in the illustrated Z direction.
The unit member 21 ′ constituting the laminated body 12 has a flat plate shape and is the same as the unit member 21 except that the groove portion 24 and the thin portion 25 are not provided.

Such a unit member 21 is joined so that the main surface 23a of one unit member 21 and the main surface 23b of another adjacent unit member 21 are in contact with each other and the groove portions 24 are arranged in parallel. They are stacked in the Y direction. Of the four unit members 21 stacked in this manner, the unit member 21 'is joined to the main surface 23a of the unit member 21 that is located on the outermost side and from which the main surface 23a and the groove 24 are exposed. Yes. As shown in FIG. 3, when the groove portion 24 of the unit member 21 located on the outermost side among the four unit members 21 stacked is not used as a flow path to be described later, the unit member 21. 'May not be joined. In the illustrated example, four unit members 21 are laminated, but the number of unit members 21 constituting the laminate 12 is not limited to this.
The lid member 15 is joined so as to contact the thin portions 25 of the plurality of unit members 21 arranged on one surface of the laminate 12 and the unit members 21 ′ and cover the groove portions 24.
Such a filter 11 includes a filtration structure portion 13 having a flow path 14 composed of groove portions 24 partitioned by a thin portion 25, and the filtration structure section 13 is smaller of either the width W 1 or the height H of the flow path 14. The size defines the size of particles that can pass through the filter 11.

The material of the unit members 21, 21 ′ is, for example, austenitic, ferritic, martensitic stainless steel, titanium, titanium alloy, nickel, nickel alloy, niobium, tantalum, zirconium, cobalt alloy, chromium alloy, molybdenum alloy, It may be a tungsten alloy or the like. The thickness T of the unit member 21 is, for example, 20 to 200 μm, preferably 20 to 150 μm.
Moreover, the dimension of the groove part 24 determines the width W1 and height H of the flow path 14 mentioned above, for example, determines the width W1 in the range of 15-100 micrometers, and the height H in the range of 15-100 micrometers. Thus, the dimension of the groove portion 24 can be set. Such a groove portion 24 can be formed by, for example, dry etching, wet etching, grinding, or the like through an etching mask.

The unit members 21 and 21 'can be joined by, for example, diffusion joining, electric welding, or fastening with screws.
The material of the lid member 15 may be the same as or different from the material of the unit members 21 and 21 ′, and can be appropriately selected in consideration of the connection with the unit members 21 and 21 ′.
In such a filter 11, the filtration function can be expressed with respect to the fluid that is supplied to the filtration structure 13 and passes through the flow path 14 in the X direction shown in the drawing.

FIG. 4 is a perspective view for explaining another embodiment of the filter of the present invention, and FIG. 5 is a perspective view of a unit member constituting the filter shown in FIG. 4 and 5, the filter 31 has a laminated body 32 in which a plurality of unit members 41 and unit members 41 ′ are laminated.
The unit member 41 constituting the laminated body 32 is located on one side of the base 42 that is located on one main surface 43a of the flat plate-like base 42 and a pair of main surfaces 43a, 43b facing the base 42. A groove portion 44 along the X direction shown in the figure so as to reach the other side 42b facing from 42a, and a thin portion 45 positioned on the main surface 43b side of the portion where the groove portion 44 is located in the base material 42. doing. The dimension of the groove 44 determines the width W1 and the height H of the flow path 34 to be described later. In the example of illustration, the thin part 45 is located in the site | part spaced apart from the edge of the illustration Z direction of the base material 42. FIG.
The unit member 41 ′ constituting the laminated body 32 has a flat plate shape and is the same as the unit member 41 except that the groove portion 44 and the thin portion 45 are not provided.

  Such a unit member 41 abuts the main surface 43a of one unit member 41 and the main surface 43b of another adjacent unit member 41 and is joined so that the groove portions 44 are arranged in parallel. They are stacked in the Y direction. Of the four unit members 41 stacked in this manner, the unit member 41 ′ is joined to the main surface 43 a of the unit member 21 located on the outermost side and exposing the main surface 43 a and the groove 44. ing. Of the four unit members 41 stacked, when the groove portion 44 of the unit member 41 located on the outermost side is not used as a flow path to be described later, the unit member 41 'is not provided. It may be. In the illustrated example, four unit members 41 are stacked, but the number of unit members 41 constituting the stacked body 32 is not limited to this.

Further, a plurality of groove portions 44 of the unit member 41 may be formed in parallel on the main surface 43a. By forming a plurality of groove portions 44 in parallel, the filter 31 can form a plurality of parallel flow paths 34 on one main surface 43a, and the pressure loss of the filter 31 is reduced by increasing the number of flow paths. can do.
Such a filter 31 includes a filtration structure portion 33 having a flow path 34 composed of groove portions 44 partitioned by a thin portion 45, and the filtration structure portion 33 is smaller of either the width W 1 or the height H of the flow path 34. The size defines the size of particles that can pass through the filter 31.
The material of the unit members 41 and 41 ′ can be the same as that of the unit members 21 and 21 ′ described above.
Moreover, the dimension of the groove part 44 determines the width W1 and height H of the flow path 34 mentioned above, for example, determines the width W1 in the range of 15-100 micrometers, and the height H in the range of 30-200 micrometers. Thus, the dimension of the groove 44 can be set. Such a groove 44 can be formed by, for example, dry etching, wet etching, grinding, or the like through an etching mask.

The unit member 41 and the unit member 41 ′ can be joined by, for example, diffusion joining, electric welding, or fastening with screws.
In such a filter 31, a filtration function can be expressed with respect to the fluid supplied to the filtration structure 33 and passing through the flow path 34 in the X direction shown in the figure.
In the filters 11 and 31 described above, the width W1 or the height H of the flow paths 14 and 34 is determined by the dimensions and lengths of the groove portions 24 and 44 of the unit members 21 and 41 to be used. It is not affected by the accuracy when the members 41 are stacked. Further, by increasing the width of the base materials 22 and 42 (the length of the base material in the X direction in the drawing), the aspect ratio (the length of the flow path / the width of the flow path) of the flow paths 14 and 34 can be increased. Thus, the dimensional accuracy of the filtration structures 13 and 33 is high, and an excellent filter function is exhibited.

[Second Embodiment]
FIG. 6 is a perspective view for explaining another embodiment of the filter of the present invention, and FIG. 7 is a perspective view of a unit member constituting the filter shown in FIG. 6 and 7, the filter 51 includes a laminated body 52 in which a plurality of unit members 61 are laminated, and a lid member 55.
The unit member 61 constituting the laminated body 52 is located on one side of the base material 62 located on one main surface 63a of the flat base material 62 and a pair of main surfaces 63a and 63b facing the base material 62. The groove portion 64 along the X direction shown in the figure so as to reach the other side 62b facing from 62a, and the thin portion 65 located on the main surface 63b side of the portion where the groove portion 64 is located in the base material 62. doing. The dimension of the groove part 64 determines the width W1 and the height H of the flow path 54, which will be described later, when a set of unit members 61 constitutes the unit laminated body 60 as will be described later. In the illustrated example, the thin portion 65 is located at one end of the base material 62 in the illustrated Z direction.

As shown in FIG. 8, such a unit member 61 is laminated with the main surfaces 63 a in contact with each other so that the pair of unit members 61 faces the groove portion 64, thereby forming a unit laminate 60. . And this unit laminated body 60 is joined so that the groove part 64 may be arranged in parallel, and is laminated | stacked on the Y direction of illustration. In the illustrated example, three sets of unit laminated bodies 60 and a total of six unit members 61 are laminated, but the number of unit laminated bodies 60 constituting the laminated body 52 is not limited to this.
Further, the lid member 55 is in contact with the plurality of thin portions 65 arranged on one surface of the stacked body 52 and joined so as to cover the groove portion 64.
Such a filter 51 includes a filtration structure portion 53 having a flow path 54 composed of two opposed groove portions 64 that are partitioned by the thin portions 65 of the two unit members 61 that are in contact with each other. 53 defines the size of particles that can pass through the filter 51 depending on the smaller one of the width W1 and the height H of the channel 54.
The material of the unit member 61 can be the same as that of the unit member 21 described above.

  Moreover, the dimension of the groove part 64 determines the width W1 and the height H of the flow path 54 mentioned above when one set of groove parts 64 opposes in the unit laminated body 60. The dimension of the groove part 64 can be set so as to determine the range of 200 μm and the height H in the range of 30 to 200 μm. Such a groove portion 64 can be formed by, for example, dry etching, wet etching, grinding, or the like through an etching mask.

In this embodiment, the width W <b> 1 of the flow path 54 corresponds to twice the depth of the groove 64. For example, in the above-described first embodiment, when the thickness of the base member 22 of the unit member 21 to be used is thin and corresponds to the set maximum diameter of the passing particles, the groove portion 24 becomes deep and the thin portion 25 becomes extreme. In this embodiment, the depth of the groove portion 64 in one unit member 61 can be made half the maximum diameter of the set passing particles, even if the thickness may be reduced. . Accordingly, the thin portion 65 can be thickened, and further, by stacking the unit laminate 60, the thin portion defining each flow channel 54 is composed of the two thin portions 65, so that the strength is sufficiently high. It will be a thing.
The joining of the unit members 61 and the joining of the unit laminate 60 can be performed by, for example, diffusion joining, electric welding, or fastening with screws.
The material of the lid member 55 can be the same as that of the lid member 15 described above.
In such a filter 51, a filtration function can be expressed with respect to the fluid supplied to the filtration structure 53 and passing through the flow path 54 in the X direction shown in the figure.

FIG. 9 is a perspective view for explaining another embodiment of the filter of the present invention, and FIG. 10 is a perspective view of a unit member constituting the filter shown in FIG. 9 and 10, the filter 71 has a laminated body 72 in which a plurality of unit members 81 are laminated.
The unit member 81 constituting the laminated body 72 is located on one side of the base material 82 and is located on one main surface 83a of a pair of main surfaces 83a and 83b facing the base material 82 and the base material 82. A groove portion 84 along the X direction shown in the figure so as to reach the other side 82b facing from 82a, and a thin wall portion 85 located on the main surface 83b side of the portion where the groove portion 84 is located in the base material 82. doing. The dimension of the groove part 84 determines the width W1 and the height H of the flow path 74, which will be described later, when a set of unit members 81 constitutes the unit laminated body 80, as will be described later. In the illustrated example, the thin-walled portion 85 is located at a part of the base material 82 that is separated from the end in the illustrated Z direction.

As shown in FIG. 11, such a unit member 81 is laminated with the main surfaces 83 a in contact with each other so that the pair of unit members 81 faces the groove portion 84, thereby forming a unit laminate 80. . And this unit laminated body 80 is joined so that the groove part 84 may be arranged in parallel, and is laminated | stacked on the Y direction of illustration. In the illustrated example, three sets of unit laminated bodies 80 and a total of six unit members 81 are laminated, but the number of unit laminated bodies 80 constituting the laminated body 72 is not limited to this.
Further, a plurality of groove portions 84 of the unit member 81 may be formed in parallel on the main surface 83a. By forming a plurality of groove portions 84 in parallel, the filter 71 can form a plurality of parallel flow paths 74 in one unit laminate 80, and the number of flow paths can be increased to reduce the pressure loss of the filter 71. Can be reduced.
Such a filter 71 includes a filtration structure portion 73 having a flow path 74 composed of two opposed groove portions 84 defined by the thin portions 85 of the two unit members 81 that are in contact with each other. 73 defines the size of the particles that can pass through the filter 71 by the smaller one of the width W1 and the height H of the flow path 74.
The material of the unit member 81 can be the same as that of the unit member 21 described above.

Moreover, the dimension of the groove part 84 determines the width W1 and the height H of the flow path 74 mentioned above when one set of groove parts 84 opposes in the unit laminated body 80. The dimension of the groove portion 84 can be set so that the range of 200 μm and the height H are determined in the range of 30 to 200 μm. Such a groove 84 can be formed by, for example, dry etching, wet etching, grinding, or the like through an etching mask.
In this embodiment, the width W <b> 1 of the flow path 74 corresponds to twice the depth of the groove 84. For example, in the first embodiment described above, when the base member 42 of the unit member 41 to be used is thin and corresponds to the set maximum diameter of the passing particles, the groove 44 becomes deep and the thin portion 45 is extremely small. In this embodiment, the depth of the groove portion 84 in one unit member 81 can be set to half the maximum diameter of the set passing particles. . Therefore, the thin portion 85 can be thickened, and further, by laminating the unit laminated body 80, the thin portion defining each flow path 74 is composed of the two thin portions 85, so that the strength is sufficiently high. It will be a thing.

The joining of the unit member 81 and the joining of the unit laminate body 80 can be performed by, for example, diffusion joining, electric welding, or fastening with screws.
In such a filter 71, a filtration function can be expressed with respect to the fluid supplied to the filtration structure 73 and passing through the flow path 74 in the X direction shown in the figure.
In the filters 51 and 71 as described above, the width W1 or the height H of the flow paths 54 and 74 is determined by the dimensions and lengths of the groove portions 64 and 84 of the unit members 61 and 81 to be used. The width W1 of 54 and 74 is not affected by the accuracy when the unit member 61 and the unit member 81 are stacked. Further, by increasing the width of the base materials 62 and 82 (the length of the base material in the X direction in the drawing), the aspect ratio (the length of the flow path / the width of the flow path) of the flow paths 54 and 74 can be increased. Thus, the dimensional accuracy of the filtration structures 53 and 73 is high, and an excellent filter function is exhibited. Furthermore, it has sufficiently high strength without being influenced by the set maximum diameter of the passing particles.

[Third Embodiment]
FIG. 12 is a perspective view for explaining an embodiment of the filter of the present invention, and FIG. 13 is a perspective view of a unit member constituting the filter shown in FIG. 12 and 13, the filter 91 has a laminated body 92 in which a plurality of unit members 101, unit members 101 ′ and unit members 101 ″ are laminated, and a lid member 95. In FIG. The laminated body 92 and the lid member 95 are shown in a separated state.
The unit member 101 constituting the laminated body 92 is positioned on one side of the base material 102 and positioned on one main surface 103a of a pair of main surfaces 103a and 103b facing the base material 102. A groove portion 104 along the X direction in the drawing so as to reach the other side 102b facing from 102a, a thin portion 105 located on the main surface 103b side of the portion where the groove portion 104 is located in the base material 102, and the thin portion And a plurality of notches 106 located at 105. The dimension of the groove part 104 determines the width W1 and height H of the flow path 94 mentioned later. Further, in the illustrated example, the thin portion 105 is located at one end of the base material 102 in the illustrated Z direction. The width W2 of the notch 106 positioned in the thin portion 105 is set so that the pressure loss can be reduced by the fluid flowing through the flow path 94 described later flowing through the notch 106.

The unit member 101 ′ constituting the laminated body 92 has a flat plate shape and is the same as the unit member 101 except that the groove portion 104, the thin portion 105, and the notch portion 106 are not provided. Further, the unit member 101 ″ constituting the laminated body 92 has a flat plate shape, and is the same as the unit member 101 except that the notched portion 106 is not provided.
Such a unit member 101 abuts the main surface 103a of one unit member 101 and the main surface 103b of another adjacent unit member 101, and is joined so that the grooves 104 are arranged in parallel. They are stacked in the Y direction. Of the three unit members 101 stacked in this way, the unit member 101 located on the outermost side of one and exposing the main surface 103a and the groove 104 has a unit member 101 ′ on the main surface 103a. It is joined. In addition, the unit member 101 ″ is joined to the main surface 103b of the unit member 101, which is located on the other outermost side and from which the main surface 103b and the notch 106 are exposed, abutting the main surface 103a. In the illustrated example, three unit members 101 are laminated, but the number of unit members 101 constituting the laminated body 92 is not limited to this.

The lid member 95 is in contact with the thin portions 105 of the plurality of unit members 101 and the thin portions 105 of the unit members 101 ″ and the unit member 101 ′ arranged on one surface of the laminated body 92, and the groove portions 104 Are joined so as to cover the notch 106.
Such a filter 91 includes a filtration structure portion 93 having a flow path 94 composed of groove portions 104 partitioned by a thin portion 105, and the filtration structure section 93 is either the width W 1 or the height H of the flow path 94 which is smaller. The size defines the size of particles that can pass through the filter 91.
The material of the unit member 101, the unit member 101 ′, and the unit member 101 ″ can be the same as that of the unit members 21 and 21 ′ described above.
The material of the lid member 95 can be the same as that of the lid member 15 described above.

The dimension of the groove portion 104 determines the width W1 and the height H of the flow path 94 described above. For example, the width W1 is determined in the range of 15 to 100 μm and the height H is determined in the range of 15 to 100 μm. The dimension of the groove part 104 can be set. In addition, the notch 106 positioned in the thin wall portion 105 enables fluid flow in the Y direction in the figure, and if pressure rises in part of the fluid flowing in the X direction in the figure, the pressure is increased. Bypassing the fluid to the adjacent flow path having a low pressure reduces the pressure loss. The magnitude relationship between the width W2 of the notch 106 and the width W1 and height H of the flow path 94 is not particularly limited. In the illustrated example, the number of the notch portions 106 is two, but the number of the notch portions 106 may be set as appropriate so that the pressure loss can be reduced according to the length of the base material 102 in the X direction shown in the drawing. it can.
The groove 104 and the notch 106 can be formed by, for example, dry etching, wet etching, grinding, or the like through an etching mask.
The unit member 101, the unit member 101 ′, and the unit member 101 ″ can be joined by, for example, diffusion joining, electric welding, or fastening with screws.

In such a filter 91, a filtration function can be expressed with respect to the fluid supplied to the filtration structure part 93 and passing through the flow path 94 in the X direction shown in the figure.
In the present embodiment, the thin wall portion 105 may be provided with a through-hole portion 107 as shown in FIG. 14 instead of the notch portion 106. The magnitude relationship between the opening width W3 of the through hole 107 and the width W1 and the height H of the flow path is not particularly limited. The opening shape of the through-hole portion 107 (for example, the cross-sectional shape of the main surface 103b) is preferably a circular shape, but an elliptical shape, a polygon such as a square, a regular hexagon, or a regular octagon, and a corner portion of these polygons The shape may be rounded. The opening width W3 of the through-hole portion 107 is the diameter when the opening shape is circular, and when the opening shape is not constant, such as an ellipse or a polygon, The smallest opening dimension.
Such a through-hole portion 107 can be formed by, for example, dry etching, wet etching, grinding, or the like through an etching mask.

15 is a perspective view for explaining another embodiment of the filter of the present invention, and FIG. 16 is a perspective view of a unit member constituting the filter shown in FIG. 15 and 16, the filter 111 has a laminated body 112 formed by laminating a plurality of unit members 121, a unit member 121 ′, and a unit member 121 ″. In FIG. A state is shown in which the filter 111 is divided and separated in the Z direction shown in the figure at a position where 114 is located.
The unit member 121 constituting the laminated body 112 is located on one side of the base material 122 located on one main surface 123a of the flat plate-like base material 122 and a pair of main surfaces 123a and 123b facing the base material 122. A groove portion 124 along the X direction in the drawing so as to reach the other side 122b facing from 122a, a thin portion 125 positioned on the main surface 123b side of the portion where the groove portion 124 is located in the base material 122, and this thin portion And a plurality of through-hole portions 127 located at 125. The dimension of the groove part 124 determines the width W1 and height H of the flow path 114 which will be described later. Moreover, in the example of illustration, the thin part 125 is located in the site | part spaced apart from one end of the base material 122 of the Z direction of illustration. The width W2 of the through-hole portion 127 located in the thin-walled portion 125 is set so that the pressure loss can be reduced by the fluid flowing through the flow path 114 described later flowing through the through-hole portion 127.

The unit member 121 ′ constituting the laminate 112 has a flat plate shape, and is the same as the unit member 121 except that the groove portion 124, the thin portion 125, and the through hole portion 127 are not provided. Further, the unit member 121 ″ constituting the laminated body 112 has a flat plate shape, and is the same as the unit member 121 described above except that the through-hole portion 127 is not provided.
Such a unit member 121 abuts the main surface 123a of one unit member 121 and the main surface 123b of another adjacent unit member 121 and is joined so that the grooves 124 are arranged in parallel. They are stacked in the Y direction. Of the three unit members 121 stacked in this way, the unit member 121 located on the outermost side of one and exposing the main surface 123a and the groove 124 has a unit member 121 ′ on the main surface 123a. It is joined. Further, the unit member 121 ″ is joined to the main surface 123b of the unit member 121 which is located on the other outermost side and from which the main surface 123b and the through-hole portion 127 are exposed, abutting the main surface 123a. In the illustrated example, three unit members 121 are laminated, but the number of unit members 121 constituting the laminated body 112 is not limited to this.

Such a filter 111 includes a filtration structure portion 113 having a flow path 114 composed of grooves 124 partitioned by a thin portion 125, and the filtration structure section 113 is smaller of either the width W 1 or the height H of the flow path 114. The size defines the size of particles that can pass through the filter 111.
The material of the unit member 121, the unit member 121 ′, and the unit member 121 ″ may be the same as that of the unit members 21 and 21 ′ described above.

The dimension of the groove 124 determines the width W1 and the height H of the flow path 114 described above. For example, the width W1 is determined in the range of 15 to 100 μm and the height H is determined in the range of 30 to 200 μm. Thus, the dimension of the groove part 124 can be set. Further, the through-hole portion 127 located in the thin-walled portion 125 enables the flow of fluid in the Y direction shown in the drawing. When a pressure rise occurs in a part of the fluid flowing in the X direction in the drawing, the pressure increases. Bypassing the fluid to the adjacent flow path having a low pressure reduces the pressure loss. The magnitude relationship between the width W2 of the through hole 127 and the width W1 and height H of the flow path 114 is not particularly limited.
The groove 124 and the through hole 127 can be formed by, for example, dry etching, wet etching, grinding, or the like through an etching mask.
The unit member 121, the unit member 121 ′, and the unit member 121 ″ can be joined by, for example, diffusion joining, electric welding, or fastening with screws.
In such a filter 111, a filtration function can be expressed with respect to the fluid supplied to the filtration structure 113 and passing through the flow path 114 in the X direction shown in the figure.

In the example shown in FIGS. 15 and 16, the through-hole portion 127 is formed to have the same length as the thin portion 125 in the Z direction in the drawing, but as shown in FIG. 17, the thin portion 125. Through-hole part 127 'may be formed so that it may become a part of length of the Z direction of illustration. The magnitude relationship between the opening width W3 of the through-hole portion 127 ′ and the width W1 and the height H of the flow path is not particularly limited. The opening shape of the through-hole portion 127 ′ (for example, the cross-sectional shape of the main surface 123b) is preferably circular, but is elliptical, polygonal such as square, regular hexagon, regular octagon, or the corner of these polygons. The shape etc. which have roundness in a part may be sufficient. The opening width W3 of the through-hole portion 127 ′ is the diameter when the opening shape is circular, and the opening shape when the opening size is not constant, such as an ellipse or a polygon. Is the minimum opening dimension.
Said through-hole part 127 'can be formed by dry etching through an etching mask, wet etching, grinding, etc., for example.

  In such filters 91 and 111, the width W1 or height H of the flow paths 94 and 114 is determined by the dimensions and lengths of the groove portions 104 and 124 of the unit members 101 and 121 to be used. It is not affected by the accuracy when the unit members 121 are stacked. Further, by increasing the width of the base materials 102 and 122 (the length of the base material in the X direction in the drawing), the aspect ratio (the length of the flow path / the width of the flow path) of the flow paths 94 and 114 can be increased. Thus, the dimensional accuracy of the filtration structures 93 and 113 is high, and an excellent filter function is exhibited. Moreover, the pressure loss is reduced by the notch 106 or the through-holes 107, 127, 127 ′ being located inside the filtration structures 93, 113.

[Fourth Embodiment]
FIG. 18 is a perspective view for explaining an embodiment of the filter of the present invention, and FIG. 19 is a perspective view of a unit member constituting the filter shown in FIG. 18 and 19, the filter 131 includes a laminated body 132 in which a plurality of unit members 141 and unit members 141 ′ are laminated, and a lid member 135. FIG. 18 shows a state in which the laminate 132 and the lid member 135 are separated from each other.

The unit member 141 constituting the laminate 132 is located on one side of the base material 142 and is located on one main surface 143a of the pair of main surfaces 143a and 143b facing the base material 142. A groove portion 144 along the X direction in the drawing so as to reach the other side 142b from 142a, a thin wall portion 145 located on the main surface 143b side of the portion where the groove portion 144 is located in the base material 142, and the thin wall portion And a plurality of notches 146 located at 145. The dimension of the groove 144 determines the width W1 and the height H of the flow path 134 described later. Further, in the illustrated example, the thin portion 145 is located at one end of the base material 142 in the illustrated Z direction. The width W2 of the notch 146 located in the thin portion 145 is set so that the pressure loss can be reduced by the fluid flowing through the flow path 134 described later flowing through the notch 146.
The unit member 141 ′ constituting the laminated body 132 has a flat plate shape and is the same as the unit member 141 except that the cutout portion 146 is not provided.

As shown in FIG. 20, such a unit member 141 has a pair of unit members 141 in which the main surfaces 143 b are in contact with each other so that the groove portion 144 faces in the opposite direction and the notch portion 146 is aligned. The unit laminated body 140 is configured. And this unit laminated body 140 is joined so that the groove parts 144 are arranged in parallel and laminated in the Y direction shown in the figure, and on both outer sides, the unit member 141 ′ is in contact with its main surface 143 a and joined. Has been. In the illustrated example, two sets of unit laminated bodies 140, that is, a total of four unit members 141 are laminated, but the number of unit laminated bodies 140 constituting the laminated body 132 is not limited to this.
Further, the lid member 135 is in contact with the thin portions 145 of the plurality of unit members 141 and unit members 141 ′ arranged on one surface of the laminated body 132, and is joined so as to cover the groove portion 144 and the notch portion 146. ing.
Such a filter 131 includes a filtration structure 133 having a flow path 134 composed of grooves 144 divided by a thin part 145, and the filtration structure 133 is smaller of the width W 1 and the height H of the flow path 134. The size defines the size of particles that can pass through the filter 131.

The material of the unit member 141 and the unit member 141 ′ can be the same as that of the unit members 21 and 21 ′ described above.
The material of the lid member 135 can be the same as that of the lid member 15 described above.
Further, the dimension of the groove 144 determines the width W1 and the height H of the above-described flow path 134 by the one set of grooves 144 facing each other. For example, the width W1 is set in a range of 30 to 200 μm and high. The dimension of the groove 144 can be set so that the height H is determined in the range of 30 to 200 μm.

In this embodiment, the width W <b> 1 of the flow path 134 corresponds to twice the depth of the groove 144. For example, in the above-described third embodiment, when the thickness of the base member 102 of the unit member 101 to be used is thin and corresponds to the set maximum diameter of the passing particles, the groove portion 104 becomes deep and the thin portion 105 becomes extreme. In this embodiment, the depth of the groove 144 in one unit member 141 can be made half of the maximum diameter of the set passing particles, even if the thickness may be reduced. . Therefore, the thin wall portion 145 can be thickened, and further, by stacking the unit laminated body 140, the thin wall portion defining each flow path 134 is composed of the two thin wall portions 145, so that the strength is sufficiently high. It will be a thing.
Further, the notch 146 located in the thin wall portion 145 enables the flow of fluid in the Y direction in the figure, and if a pressure rise occurs in a part of the fluid flowing in the X direction in the figure, the pressure increases. Bypassing the fluid to the adjacent flow path having a low pressure reduces the pressure loss. The magnitude relationship between the width W2 of the notch 146 and the width W1 of the flow path 134 is not particularly limited.
The groove 144 and the notch 146 can be formed by, for example, dry etching, wet etching, grinding, or the like through an etching mask.
The unit member 141 and the unit member 141 ′ can be joined by, for example, diffusion joining, electric welding, or fastening with screws.

In such a filter 131, a filtration function can be expressed with respect to the fluid supplied to the filtration structure 133 and passing through the flow path 134 in the X direction shown in the figure.
In the present embodiment, the thin portion 145 may be provided with a through-hole portion 147 as shown in FIG. 21 instead of the notch portion 146. The size relationship between the opening width W3 of the through-hole portion 147 and the width W1 and the height H of the flow path is not particularly limited. The opening shape of the through-hole portion 147 (for example, the cross-sectional shape of the main surface 143b) is preferably circular, but is elliptical, polygonal such as square, regular hexagon, regular octagon, or the corner of these polygons. The shape may be rounded. The opening width W3 of the through-hole portion 147 is the diameter when the opening shape is circular, and when the opening size is not constant, such as an ellipse or a polygon, The smallest opening dimension. Such a through-hole part 147 can be formed by, for example, dry etching, wet etching, grinding, or the like through an etching mask.

  FIG. 22 is a perspective view for explaining another embodiment of the filter of the present invention, and FIG. 23 is a perspective view of a unit member constituting the filter shown in FIG. 22 and 23, the filter 151 has a laminated body 152 in which a plurality of unit members 161 and unit members 161 ′ are laminated. Note that FIG. 22 shows a state in which the filter 151 is divided and separated in the illustrated Z direction at a position where a flow path 154 described later is located.

The unit member 161 constituting the laminated body 152 is located on one side of the base material 162 and is located on one main surface 163a of the pair of main surfaces 163a and 163b facing each other. A groove portion 164 along the X direction in the drawing so as to reach the other side 162b facing from 162a, a thin portion 165 positioned on the main surface 163b side of the portion where the groove portion 164 is located in the base material 162, and this thin portion And a plurality of through-hole portions 167 positioned at 165. The dimension of the groove part 164 determines the width W1 and the height H of the flow path 154 to be described later. In the illustrated example, the thin-walled portion 165 is located at a part of the base material 162 that is separated from one end in the illustrated Z direction. The width W2 of the through-hole portion 167 located in the thin-walled portion 165 is set so that the pressure loss can be reduced by the fluid flowing through the flow path 154 described later flowing through the through-hole portion 167.
The unit member 161 ′ constituting the laminated body 152 has a flat plate shape, and is the same as the unit member 161 except that the through hole 167 is not provided.

As shown in FIG. 24, such a unit member 161 abuts the main surfaces 163b such that one set of unit members 161 directs the groove portion 164 in the opposite direction and the through-hole portions 167 coincide with each other. The unit laminated body 160 is configured. And this unit laminated body 160 is joined so that the groove parts 164 are arranged in parallel and laminated in the Y direction shown in the figure, and unit members 161 'are in contact with the main surface 163a on both sides and joined. Has been. In the illustrated example, two sets of unit laminated bodies 160 and a total of four unit members 161 are laminated, but the number of unit laminated bodies 160 constituting the laminated body 152 is not limited to this.
Such a filter 151 includes a filtration structure portion 153 having a flow path 154 composed of grooves 164 partitioned by a thin portion 165, and the filtration structure section 153 is the smaller of the width W 1 and the height H of the flow path 154. The size defines the size of particles that can pass through the filter 151.

The material of the unit member 161 and the unit member 161 ′ can be the same as that of the unit members 21 and 21 ′ described above.
In addition, the dimension of the groove part 164 determines the width W1 and the height H of the flow path 154 described above when the pair of groove parts 164 face each other. For example, the width W1 is set in a range of 30 to 200 μm and high. The dimension of the groove 164 can be set so that the height H is determined in the range of 30 to 200 μm.

In this embodiment, the width W <b> 1 of the flow path 154 corresponds to twice the depth of the groove 164. For example, in the above-described third embodiment, when the thickness of the base member 122 of the unit member 121 to be used is thin and corresponds to the set maximum diameter of the passing particles, the groove portion 124 becomes deep and the thin portion 125 becomes extreme. In this embodiment, the depth of the groove portion 124 in one unit member 121 can be set to half the maximum diameter of the set passing particle even if the thickness is reduced. . Therefore, the thin-walled portion 125 can be thickened, and further, by stacking the unit laminated body 160, the thin-walled portions that define each flow path 154 are composed of the two thin-walled portions 165, so that the strength is sufficiently high. It will be a thing.
Further, the through-hole portion 167 located in the thin wall portion 165 enables the flow of fluid in the Y direction in the figure, and if pressure rises in a part of the fluid flowing in the X direction in the figure, the pressure increases. Bypassing the fluid to the adjacent flow path having a low pressure reduces the pressure loss. The magnitude relationship between the width W2 of the through-hole portion 167 and the width W1 and the height H of the flow path 154 is not particularly limited.

The groove 164 and the through hole 167 can be formed by, for example, dry etching, wet etching, grinding, or the like through an etching mask.
The unit member 161 and the unit member 161 ′ can be joined by, for example, diffusion joining, electric welding, or fastening with screws.
In such a filter 151, a filtration function can be expressed with respect to the fluid supplied to the filtration structure 153 and passing through the flow path 154 in the X direction shown in the figure.
In the example shown in FIGS. 22 and 23, the through-hole portion 167 is formed to have the same length as that of the thin portion 165 in the Z direction shown in the figure. However, as shown in FIG. 25, the thin portion 165 A through-hole portion 167 ′ may be formed so as to be a part of the length in the Z direction shown in FIG. The magnitude relationship between the opening width W3 of the through-hole portion 167 ′ and the width W1 and the height H of the flow path 154 is not particularly limited. The opening shape of the through-hole portion 167 ′ (for example, the cross-sectional shape of the main surface 163b) is preferably circular, but is elliptical, polygonal, such as square, regular hexagon, regular octagon, and the corners of these polygons. The shape etc. which have roundness in a part may be sufficient. The opening width W3 of the through-hole portion 167 'is the diameter when the opening shape is circular, and the opening shape when the opening size is not constant such as an ellipse or a polygon. Is the minimum opening dimension. Such a through-hole portion 167 'can be formed, for example, by dry etching, wet etching, grinding, or the like through an etching mask.

  In such filters 131 and 151, the width W1 or height H of the flow paths 134 and 154 is determined by the dimensions and lengths of the groove portions 144 and 164 of the unit members 141 and 161 to be used. , 154 is not affected by the accuracy when the unit member 141 and the unit member 161 are stacked. Further, the aspect ratio (the length of the flow path / the width of the flow path) of the flow paths 134 and 154 can be increased by increasing the width of the base materials 142 and 162 (the length of the base material in the X direction in the drawing). Thus, the dimensional accuracy of the filtration structures 133 and 153 is high, and an excellent filter function is exhibited. In addition, the pressure loss is reduced because the notch portion 146 or the through-hole portions 147, 167, and 167 ′ are positioned inside the filtration structure portions 133 and 153. Furthermore, it has sufficiently high strength without being influenced by the set maximum diameter of the passing particles.

[Fifth Embodiment]
FIG. 26 is a perspective view for explaining another embodiment of the filter of the present invention. FIG. 27 is a perspective view of a unit member constituting the filter shown in FIG. 26 and 27, the filter 171 includes a laminated body 172 in which a plurality of unit members 181 and unit members 181 ′ are laminated, and a lid member 175.
The unit member 181 constituting the laminated body 172 is positioned on one side of the base material 182 located on one main surface 183a of the pair of main surfaces 183a and 183b facing the base material 182 and the base material 182. A groove portion 184 along the X direction in the figure so as to reach the other side 182b facing from 182a, and a thin portion 185 located on the main surface 183b side of the portion where the groove portion 184 is located in the base material 182. ing. The dimension of the groove 184 determines the width W1 and the height H of the flow path 174 described later. In the illustrated example, the thin portion 185 is located at one end of the base material 182 in the illustrated Z direction. Further, the unit member 181 has a through-hole 188 in the base material 182 extending from one main surface 183a to the other main surface 183b. The dimension of this through-hole 188 determines the width W4 of the flow path 177 described later. In the illustrated example, there are two through holes 188, but the number of through holes 188 is not limited to this.
The unit member 181 ′ constituting the laminate 172 has a flat plate shape and is the same as the unit member 181 except that the groove 184 and the thin portion 185 are not provided.

Such a unit member 181 abuts the main surface 183a of one unit member 181 and the main surface 183b of another adjacent unit member 181, the groove portions 184 are arranged in parallel, and the through holes 188 are aligned. They are joined so as to communicate with each other and stacked in the Y direction shown in the figure. Of the four unit members 181 stacked in this way, the through hole 188 is in communication with the main surface 183a of the unit member 181 that is located on the outermost side and exposes the main surface 183a and the groove 184. Thus, the unit member 181 'is joined.
The lid member 175 is joined so as to contact the thin portions 185 of the plurality of unit members 181 arranged on one surface of the laminated body 172 and the unit member 181 ′ and cover the groove portion 184.
Such a filter 171 includes a filtration structure 176 having a flow path 174 composed of grooves 184 partitioned by a thin part 185 and a flow path 177 configured to communicate with a through-hole 188. The filtration structure 173 defines the size of particles that can pass through the flow path 174 by the smaller one of the width W1 and the height H of the flow path 174. The filtration structure 176 The size of the particle that can pass through the flow path 177 is defined by the dimension of the width W4.
The material of the unit members 181 and 181 ′ can be the same as that of the unit members 21 and 21 ′ described above.
The material of the lid member 175 can be the same as that of the lid member 15 described above.

The dimension of the groove portion 184 determines the width W1 and the height H of the flow path 174 described above. For example, the width W1 is determined in the range of 15 to 100 μm and the height H is determined in the range of 15 to 100 μm. The dimension of the groove part 184 can be set. The dimension of the through hole 188 determines the width W4 of the flow path 177 described above. For example, the dimension W4 of the through hole 188 can be set so that the width W4 is determined in the range of 25 to 100 μm. it can. The opening shape of the through-hole 188 (for example, the cross-sectional shape of the main surfaces 183a and 183b) is preferably circular, but is elliptical, polygonal such as square, regular hexagon, regular octagon, and the corners of these polygons. The shape etc. which have roundness in a part may be sufficient. The opening width W4 of the through-hole 188 is the diameter when the opening shape is circular, and is the minimum in the opening shape when the opening shape is not constant, such as an ellipse or a polygon. Is the opening dimension. Such grooves 184 and through-holes 188 can be formed by, for example, dry etching, wet etching, or grinding through an etching mask.
The unit member 181 and the unit member 181 ′ can be joined by, for example, diffusion joining, electric welding, or fastening with screws.

In such a filter 171, the filtration function is expressed with respect to the fluid that is supplied to the filtration structure 173 and passes through the flow path 174, and the filtration function is performed with respect to the fluid that is supplied to the filtration structure 176 and passes through the flow path 177. Can be expressed. For example, when the particles that can pass through the flow channel 177 are larger than the particles that can pass through the flow channel 174, first, primary filtration is performed by flowing a fluid through the flow channel 177 in the Y direction shown in the figure. The fluid can be sent to the flow path 174 through the non-conducting conduit, and the secondary filtration can be performed on the fluid passing through the flow path 174 in the X direction shown in the figure. Thereby, a highly efficient filtration function can be expressed. Such primary and secondary filtration orders can be appropriately set according to the size of the particles that can pass through the flow path 174 and the size of the particles that can pass through the flow path 177.
Further, the filter 171 has a width W1 or a height H of the flow path 174 determined by the size and length of the groove 184 of the unit member 181 to be used, and the accuracy when the unit member 181 and the unit member 181 ′ are stacked. It is not affected by. Further, by increasing the width of the base material 182 (the length of the base material in the X direction in the drawing), the aspect ratio (the length of the flow path / the width of the flow path) of the flow path 174 can be increased. Thereby, the dimensional accuracy of the filtration structure part 173 is high, and the outstanding filter function is expressed.

  Further, the width W4 of the flow path 177 is set according to the dimensions of the through-holes 188 of the unit members 181 and 181 ′ to be used, and the aspect of the flow path 177 is increased by increasing the number of unit members 181 constituting the stacked body 172. The ratio (channel length / channel width) can be increased. However, when a positional deviation occurs between the through-holes 188 when the unit member 181 and the unit member 181 ′ are stacked, a step is generated in the flow path 177, and the accuracy of the opening size (filter size) is slightly reduced. Become. However, in the filter 171, primary filtration and secondary filtration can be performed as described above, and the filtration in the filtration structure 176 having the flow path 177 is primary filtration with relatively large particles to be captured. As a result, even if the accuracy during stacking is reduced, the influence can be minimized.

  Thus, the structure provided with two types of flow paths can also be employed in the above-described embodiment. For example, the base member 42 of the unit members 41 and 41 ′ shown in FIGS. 4 and 5 is provided with a through-hole from one main surface 43a to the other main surface 43b, and the unit member 61 shown in FIG. The base material 62 is provided with a through hole extending from one main surface 63a to the other main surface 63b, the base material 82 of the unit member 81 shown in FIG. 10, and from one main surface 83a to the other main surface 83b. Providing a through hole extending from one main surface 103a to the other main surface 103b in the base member 102 of the unit members 101 and 101 'shown in FIGS. The base member 122 of the unit members 121 and 121 ′ shown in FIG. 17 is provided with a through-hole from one main surface 123a to the other main surface 123b, and the unit members 141 and 141 ′ shown in FIGS. One main surface 1 on the base material 142 3a to the other main surface 143b, a through hole extending from one main surface 163a to the other main surface 163b in the base member 162 of the unit members 161 and 161 'shown in FIGS. By providing the above-described filter 31, 51, 71, 91, 111, 131, 151 of the present invention, a high-efficiency filtration function by primary filtration and secondary filtration can be exhibited.

[Sixth Embodiment]
FIG. 28 is a perspective view for explaining another embodiment of the filter of the present invention, and FIG. 29 is a perspective view of a unit member constituting the filter shown in FIG. 28 and 29, the filter 191 includes a laminated body 192 formed by laminating a plurality of unit members 201, a unit member 201 ′, and a unit member 201 ″, and a lid member 195.

The unit member 201 constituting the laminate 192 is located on one side of the base material 202 located on one main surface 203a of the flat plate-like base material 202 and a pair of main surfaces 203a, 203b facing the base material 202. A groove portion 204 along the X direction in the figure so as to reach the other side 202b facing from 202a, and a thin portion 205 located on the main surface 203b side of the portion where the groove portion 204 is located in the base material 202. ing. Further, the unit member 201 includes a groove portion 209 along the X direction in the drawing so as to reach the other side 202b opposite to the one side 202a of the base material 202 located on the main surface 203b. And a thin portion 210 located on the main surface 203a side of the portion to be located. The dimension of the groove part 204 determines the width W1 and height H1 of the flow path 194 mentioned later. The dimension of the groove 209 determines the width W5 and the height H2 of the flow path 197 described later. In the illustrated example, the thin portion 205 is positioned at one end of the base material 202 in the illustrated Z direction, and the thin portion 210 is positioned at a portion of the base material 202 that is separated from the one end in the illustrated Z direction.
The unit member 201 ′ constituting the laminated body 192 has a flat plate shape and is the same as the unit member 201 except that the groove portion 204 and the thin portion 205 are not provided. The unit member 201 ″ constituting the laminate 192 has a flat plate shape, and is the same as the unit member 201 except that the groove 209 and the thin portion 210 are not provided.

Such a unit member 201 is joined so that the main surface 203a of one unit member 201 and the main surface 203b of another adjacent unit member 201 are in contact, and the groove portions 204 and 209 are arranged in parallel. Are stacked in the Y direction shown. Of the three unit members 201 stacked in this way, the unit member 201 ′ is located on the main surface 203a of the unit member 201 which is located on the outermost side of one of the unit members 201 and the groove portion 204 is exposed. The main surface 203b is contacted and joined. In addition, the unit member 201 ″ is bonded to the main surface 203b of the unit member 201 which is located on the other outermost side and from which the main surface 203b and the groove portion 209 are exposed. In the illustrated example, three unit members 201 are laminated, but the number of unit members 201 constituting the laminate 192 is not limited to this.
The lid member 195 is in contact with the plurality of unit members 201 arranged on one surface of the laminate 192, the thin portion 205 of the unit member 201 ″, and the unit member 201 ′ so as to cover the groove portion 204. Has been.
Such a filter 191 includes a filtration structure portion 193 having a flow path 194 having a groove portion 204 partitioned by a thin portion 205 and a filtration structure portion 196 having a flow passage 197 having a groove portion 209 partitioned by a thin portion 210. Prepare. The filtration structure 193 defines the size of particles that can pass through the flow path 194 by the smaller one of the width W1 and the height H1 of the flow path 194, and the filtration structure 196 includes the flow path 197. The size of the particles that can pass through the flow path 197 is defined by the smaller one of the width W5 and the height H2.
The material of the unit members 201, 201 ′, 201 ″ can be the same as that of the unit members 21, 21 ′ described above.
The material of the lid member 195 can be the same as that of the lid member 15 described above.

The dimension of the groove 204 determines the width W1 and the height H1 of the flow path 194 described above. For example, the width W1 is determined in the range of 15 to 100 μm and the height H1 is determined in the range of 15 to 100 μm. The dimension of the groove part 204 can be set. The dimension of the groove 209 determines the width W5 and the height H2 of the above-described flow path 197. For example, the width W5 is determined in the range of 20 to 200 μm and the height H2 is determined in the range of 20 to 200 μm. Thus, the dimension of the groove 209 can be set. Such groove part 204 and groove part 209 can be formed by, for example, dry etching, wet etching, grinding, or the like through an etching mask.
The unit member 201, the unit member 201 ′, and the unit member 201 ″ can be joined by, for example, diffusion joining, electric welding, or fastening with a screw.

  In such a filter 191, a filtration function can be expressed with respect to the fluid that is supplied to the filtration structure 193 and passes through the flow path 194, and the fluid that is supplied to the filtration structure 196 and passes through the flow path 197. On the other hand, a filtration function can be expressed. For example, when the particles that can pass through the flow path 197 are larger than the particles that can pass through the flow path 194, first, primary filtration is performed by flowing a fluid through the flow path 197 of the filtration structure 196 in the X direction shown in the figure. Then, a fluid can be sent to the flow path 194 of the filtration structure 193 through a conduit (not shown), and secondary filtration can be performed on the fluid passing through the flow path 194 in the X direction shown in the figure. Thereby, a highly efficient filtration function can be expressed. Such primary and secondary filtration orders can be appropriately set according to the size of particles that can pass through the flow channel 194 and the size of particles that can pass through the flow channel 197.

Further, the filter 191 has a width W1 or a height H1 of the flow path 194 determined by the dimensions and lengths of the groove portions 204 of the unit members 201 and 201 ″ to be used, and the groove portions of the unit members 201 and 201 ′ to be used. The width W5 or height H2 of the flow path 197 is determined by the size and length of 209, and is not affected by the accuracy when the unit member 201 and the unit member 201 ′ are stacked. The aspect ratio (the length of the flow path / the width of the flow path) of the flow paths 194 and 197 can be increased by increasing the width (the length of the base material in the X direction in the drawing). The dimensional accuracy of 193 and 195 is high, and an excellent filter function is exhibited.
Thus, the structure provided with two types of flow paths can also be employed in the above-described embodiment. For example, a groove is provided on the main surface 43b of the base member 42 of the unit members 41 and 41 ′ shown in FIGS. 4 and 5, and the main member 102 of the unit members 101 and 101 ′ shown in FIGS. In the above-described filters 31, 91 and 111 of the present invention, a groove is provided on the surface 103b, and a groove is provided on the main surface 123b of the base member 122 of the unit members 121 and 121 'shown in FIGS. A highly efficient filtration function by primary filtration and secondary filtration can be expressed.

[Seventh Embodiment]
FIG. 30 is a perspective view for explaining another embodiment of the filter of the present invention, and FIG. 31 is a perspective view of a unit member constituting the filter shown in FIG. 30 and 31, the filter 211 includes a laminated body 212 in which a plurality of unit members 221 and unit members 221 ′ are laminated, and a lid member 215.
The unit member 221 constituting the laminated body 212 is positioned on one side of the base material 222 and is located on one main surface 223a of a pair of main surfaces 223a and 223b facing the base material 222 and the base material 222. A groove portion 224 along the X direction in the figure so as to reach the other side 222b facing from 222a, and a thin portion 225 located on the main surface 223b side of the portion where the groove portion 224 is located in the base material 222 ing. Further, the unit member 221 has a groove portion 229 along the X direction shown in the drawing so as to be located on the main surface 223b and from the one side 222a of the base material 222 to the other side 222b facing the base member 222. And a thin portion 230 positioned on the main surface 223a side of the portion to be positioned. The dimension of the groove part 224 determines the width W1 and the height H1 of the flow path 214 described later. The dimension of the groove 229 determines the width W5 and the height H2 of the flow path 217 described later. In the illustrated example, the thin portion 225 is located at one end of the base material 222 in the Z direction shown in the drawing, and the thin portion 230 is located at a portion away from one end of the base material 222 in the Z direction shown in the drawing.

The unit member 221 ′ constituting the laminated body 212 has a flat plate shape, and is the same as the unit member 221 except that the groove portion 209 and the thin portion 230 are not provided.
As shown in FIG. 32, such a unit member 221 is configured by laminating a pair of unit members 221 with the main surfaces 223 b in contact with each other so that the groove portions 229 face each other, thereby constituting a unit laminated body 220. . And this unit laminated body 220 is joined so that the groove parts 224 are arranged in parallel and laminated in the Y direction shown in the figure, and unit members 221 'are in contact with the main surface 223a and joined to both outer sides thereof. Has been. In the illustrated example, two sets of unit laminated bodies 220 and a total of four unit members 221 are laminated, but the number of unit laminated bodies 220 constituting the laminated body 212 is not limited to this.
The lid member 215 is in contact with the thin portions 225 of the plurality of unit members 221 and unit members 221 ′ arranged on one surface of the stacked body 212 and is joined so as to cover the groove portion 224.

Such a filter 211 includes a filtration structure part 213 having a flow path 214 composed of a groove part 224 partitioned by a thin part 225 and a filtration structure part 216 having a flow path 217 composed of a groove part 229 partitioned by a thin part 230. Prepare. And the filtration structure part 213 prescribes | regulates the magnitude | size of the particle | grains which can pass the flow path 214 by the dimension which is smaller of either the width | variety W1 or the height H1 of the flow path 214. The size of the particles that can pass through the flow path 217 is defined by the smaller one of the width W5 and the height H2 of 217.
The material of the unit members 221 and 221 'can be the same as that of the unit members 21 and 21' described above.
The material of the lid member 215 can be the same as that of the lid member 15 described above.
The dimension of the groove part 224 determines the width W1 and the height H1 of the above-mentioned flow path 214 when a pair of groove parts 224 face each other. For example, the width W1 is in the range of 40 to 200 μm and the height H1. The dimension of the groove portion 224 can be set so as to be determined in the range of 40 to 200 μm. In addition, the dimension of the groove portion 229 determines the width W5 and the height H2 of the flow path 217 described above when one set of the groove portions 229 is opposed to each other in the unit laminated body 220. The dimension of the groove part 229 can be set so that the range of 200 μm and the height H2 are determined in the range of 30 to 200 μm. Such groove 224 and groove 229 can be formed by, for example, dry etching, wet etching, grinding, or the like through an etching mask.

The unit member 221 and the unit member 221 ′ can be joined by, for example, diffusion joining, electric welding, or fastening with screws.
In such a filter 211, a filtration function can be expressed with respect to the fluid that is supplied to the filtration structure 213 and passes through the flow path 214, and the fluid that is supplied to the filtration structure 216 and passes through the flow path 217. On the other hand, a filtration function can be expressed. For example, when the particles that can pass through the flow channel 217 are smaller than the particles that can pass through the flow channel 214, first, the primary filtration is performed by flowing a fluid through the flow channel 214 of the filtration structure 213 in the X direction shown in the figure. Then, a fluid can be sent to the flow path 217 of the filtration structure 216 via a conduit (not shown), and the secondary filtration can be performed on the fluid passing through the flow path 217 in the X direction shown in the figure. Thereby, a highly efficient filtration function can be expressed. Such primary and secondary filtration orders can be appropriately set according to the size of particles that can pass through the flow channel 214 and the size of particles that can pass through the flow channel 217. In this embodiment, the channel 214 is formed with the groove 224 facing each other, and the channel 217 is formed with the groove 229 facing each other. Therefore, the width W2 of the channel 214 is adjusted by adjusting the dimensions of the groove 224 and the groove 229, The magnitude relationship of the width W5 of the channel 217 can be set in a wide range.

Further, in the filter 211, the width W1 or the height H1 of the flow channel 214 is determined by the size and length of the groove 224 of the unit members 221 and 221 ″ to be used, and the size of the groove 229 of the unit member 221 to be used. The width W5 or the height H2 of the flow path 217 is determined by the length, and in particular, the width W1 of the flow path 214 and the width W5 of the flow path 217 are the accuracy when the unit member 221 and the unit member 221 ′ are stacked. In addition, by increasing the width of the base material 222 (the length of the base material in the X direction in the figure), the aspect ratio of the flow paths 214 and 217 (the length of the flow path / the width of the flow path) As a result, the dimensional accuracy of the filtration structures 213 and 215 is high, and an excellent filter function is exhibited.
Thus, the structure provided with two types of flow paths can also be employed in the above-described embodiment. For example, a groove is provided on the main surface 63b of the base member 62 of the unit member 61 that is not located on the outermost side of the laminated body 52 among the unit members 61 shown in FIGS. 6 to 8, and the units shown in FIGS. A groove is provided on the main surface 83b of the base member 82 of the unit member 81 that is not located on the outermost side of the laminated body 72 of the members 81, and the main surface 143b of the base member 142 of the unit member 141 shown in FIGS. By providing a groove on the main surface 163b of the base material 162 of the unit member 161 shown in FIGS. 22 to 25, the primary filtration is performed in the above-described filters 51, 71, 131, 151 of the present invention. A highly efficient filtration function by secondary filtration can be expressed.

The above-described embodiments are examples, and the filter of the present invention is not limited to these embodiments.
For example, as shown in FIG. 33, the above-described filter 11 increases the length of the laminated body 12 in the illustrated X direction by setting the length of the base member 22 of the unit member 21 in the illustrated X direction longer. Corresponding to this, the length of the lid member 15 in the illustrated X direction may be set longer. Such a filter 11 has a desired value for the aspect ratio of the flow path 14 by cutting at a desired position along the YZ plane shown in the figure (in the example shown, the cutting site is indicated by a chain line). A filter can be obtained. Similarly, as shown in FIG. 34, the above-described filter 171 increases the length in the X direction of the laminated body 172 by setting the length of the base member 182 of the unit member 181 in the X direction shown in the drawing. The length of the lid member 175 in the X direction shown in the figure may be set to be long. Such a filter 17 is cut at a desired position along the YZ plane shown in the figure between adjacent flow paths 177 (in the illustrated example, the cutting site is indicated by a chain line). A filter having a desired aspect ratio and a desired number of channels 177 can be obtained. This can be applied to any filter of the present invention in addition to the illustrated filters 11 and 171.

  Further, in the filter 171 described above, a plurality of flow paths 177 are arranged in the X direction shown in the figure, but a plurality of flow paths 177 may also be arranged in the Z direction shown in the figure. In this case, the width W4 of the flow path 177 at each stage in the Z direction shown in the figure may be different, which enables third-order or higher filtration. Similarly, in the above-described filters 191, 212, and 231, a plurality of flow paths 197, 217, and 237 are arranged in the illustrated Y direction, but a plurality of channels 197, 217, and 237 may also be arranged in the illustrated Z direction. Also in this case, the width W5 and the height H2 of the flow paths 197, 217, and 237 of the respective stages in the Z direction shown in the figure may be made different, thereby enabling third-order or higher filtration.

Next, the present invention will be described in more detail by showing specific examples.
Stainless steel (SUS304, 150 mm × 150 mm, thickness 100 μm) was prepared as a base material for the unit member.
After laminating a photosensitive dry film (manufactured by Asahi Kasei Co., Ltd., Sunfort AQ-2558) on both main surfaces of this base material, exposure is performed through a desired mask, and development is performed, whereby etching mask 1 and etching mask 2 are obtained. Was formed on each opposing main surface. The etching mask 1 thus formed had a strip-shaped opening having a width of 25 μm at a position parallel to the side end of the substrate having a length of 150 mm and spaced 50 mm from the side end. The formed etching mask 2 covers the entire main surface of the substrate.

Next, in a state where the base material is kept horizontal so that the etching mask 1 is on the upper surface side, a groove is formed by etching from the etching mask 1 side of the base material by spray etching under the following etching conditions, Etching mask 1 and etching mask 2 were removed and cleaned.
(Etching conditions)
・ Etching solution: Ferric chloride solution ・ Specific gravity: 49 Baume (Be)
・ Temperature: 75 ℃
・ Spray pressure: 3kg / cm ²

By such spray etching, the width of 35 μm across one side of the main surface of the substrate is parallel to the side edge of the length of 150 mm and spaced from the side edge by 50 mm, A band-shaped groove portion having a depth of 15 μm was formed, and a thin portion was formed on the other main surface where the groove portion was located. Thereby, the unit member as shown in FIG. 5 was obtained.
Sixteen unit members were produced in the same manner as described above. Moreover, one unit member in which no groove was formed was prepared.
Next, the main surfaces of the unit members having the 16 unit members in contact with each other so that the groove portions face in the same direction and are parallel to each other, and the groove portions are exposed on the outermost side. A unit member not formed with a groove was brought into contact therewith. In this state, the unit members were temporarily bonded by means of electric welding at four locations, and then a plurality of unit members were joined by diffusion bonding under the following conditions to produce a laminate.

This laminated body had 16 flow paths in which the groove portion of each unit member was partitioned by a thin portion.
(Diffusion bonding conditions)
・ Atmosphere: Vacuum
-Joining temperature: 1000 ° C
-Joining time: 9 hours

The laminate produced as described above is cut perpendicularly to the length direction of the flow path so that the length direction of the flow path is 0.1 mm to produce a filter as shown in FIG. did.
The flow path provided in the filter thus prepared has a width W1 (see FIG. 4) of 15 μm and a height H (see FIG. 4) of 35 μm, and an aspect ratio (flow path length / minimum opening dimension of the flow path). ) Was about 6.7, and it was confirmed to form a fine filtration structure.

  When such a filter is attached to a filtration device, and filtration is performed using a fluid containing 10 g / L of weak flour (particle size distribution width: 5 to 100 μm) in pure water, the pressure loss in the flow path is It was about 0.28 MPa. Further, after the filtration operation for 0.1 hours, the filter removed from the filtration device was washed with pure water and then with ethanol. As a result, the weak flour captured by the filter could be completely eliminated.

  It can be used for the filtration of various fluids and can be used for the manufacture of various products that require a fluid filtration process.

11, 31, 51, 71, 91, 111, 131, 151, 171, 191, 211 ... Filter 12, 32, 52, 72, 92, 112, 132, 152, 172, 192, 212 ... Laminate 13, 33 , 53, 73, 93, 113, 133, 153, 173, 176, 193, 196, 213, 216 ... Filtration structure 14, 34, 54, 74, 94, 114, 134, 154, 174, 177, 194 197, 214, 217 ... flow paths 60, 80, 140, 160, 220 ... unit laminates 21, 21 ', 41, 41', 61, 81, 101, 101 ', 101 ", 121, 121', 121" , 141, 141 ′, 161, 161 ′, 181, 181 ′, 201, 201 ′, 221, 221 ′, unit members 24, 44, 64, 84, 104, 24, 144, 164, 184, 204, 209, 224, 229 ... grooves 25, 45, 65, 85, 105, 125, 145, 165, 185, 205, 210, 225, 230 ... thin-walled portions 106, 146 ... cut Notch 107, 127, 127 ', 147, 167, 167' ... through-hole 188 ... through-hole

Claims (7)

  A plurality of unit members each having a flat plate-like base material and a groove portion that is located on one of a pair of principal surfaces facing the base material and that extends from one side of the base material to the other side, A filtration structure having a plurality of flow paths partitioned by thin portions of the base material existing on the other main surface when the groove portion is positioned, with a laminated body laminated so as to abut the main surface A filter characterized by comprising.   2. The filter according to claim 1, wherein the laminated body is obtained by laminating a plurality of the unit members so that main surfaces on which the groove portions are located are in the same direction.   2. The filter according to claim 1, wherein the laminated body is obtained by laminating a plurality of unit laminated bodies in which one set of the unit members is laminated so that the groove portions face each other.   The said thin part is located in the edge of the said base material of the said unit member, It has a cover member contact | abutted to the said several thin part currently arranged in one surface of the said laminated body. The filter according to any one of claims 1 to 3.   The filter according to any one of claims 1 to 4, wherein the unit member has a cutout portion or a through-hole portion in the thin portion.   The unit member has a through-hole extending from one main surface to the other main surface in the base material excluding the thin-wall portion, and the through-port constitutes a filtration structure portion different from the filtration structure portion. The filter according to any one of claims 1 to 5, wherein the filter is provided.   The said unit member has a groove part different from the said groove part, This groove part comprises the filtration structure part different from the said filtration structure part, The any one of Claim 1 thru | or 5 characterized by the above-mentioned. The filter described.

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