JP2015210850A5 - - Google Patents
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- Publication number
- JP2015210850A5 JP2015210850A5 JP2014089691A JP2014089691A JP2015210850A5 JP 2015210850 A5 JP2015210850 A5 JP 2015210850A5 JP 2014089691 A JP2014089691 A JP 2014089691A JP 2014089691 A JP2014089691 A JP 2014089691A JP 2015210850 A5 JP2015210850 A5 JP 2015210850A5
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- movable
- side electrode
- movable side
- vacuum valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910001220 stainless steel Inorganic materials 0.000 claims 1
- 239000010935 stainless steel Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014089691A JP6214459B2 (ja) | 2014-04-24 | 2014-04-24 | 真空バルブ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014089691A JP6214459B2 (ja) | 2014-04-24 | 2014-04-24 | 真空バルブ |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015210850A JP2015210850A (ja) | 2015-11-24 |
| JP2015210850A5 true JP2015210850A5 (https=) | 2017-02-02 |
| JP6214459B2 JP6214459B2 (ja) | 2017-10-18 |
Family
ID=54612917
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014089691A Active JP6214459B2 (ja) | 2014-04-24 | 2014-04-24 | 真空バルブ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6214459B2 (https=) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4312015Y1 (https=) * | 1965-06-08 | 1968-05-24 |
-
2014
- 2014-04-24 JP JP2014089691A patent/JP6214459B2/ja active Active
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