JP2015202463A - Cleaning method for cleaning object - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enable cleaning works for a cleaning object such as immersion cleaning, steam cleaning, and drying with a cleaning liquid to be performed precisely with simple means.SOLUTION: After the steam cleaning or liquid cleaning of a cleaning object 8 is performed in a cleaning chamber 3, the cleaning object 8 is transferred into a drying chamber 4 that communicates with this cleaning chamber 3 to interrupt the communication of the cleaning chamber 3 with the drying chamber 4. Next, a depression mechanism 18 connected to the drying chamber 4 is actuated to perform the decompression drying of the cleaning object 8 in the drying chamber 4. After this decompression drying, outer air is introduced into the drying chamber 4 by opening a control valve 20 connected to the drying chamber 4 to bring the gas in a fluid contact with the cleaning object 8 in the drying chamber 4, thereby physically remove microparticles sticking to the surface of the cleaning object.

Description

  The present invention relates to a method for cleaning an object to be cleaned, and is intended to enable accurate cleaning operations such as immersion cleaning, steam cleaning, and drying using a cleaning liquid for the object to be cleaned. .

Conventionally, as a cleaning method for an object to be cleaned, as shown in Patent Document 1, it is a common practice to add different cleaning operations to one object to be cleaned, such as immersion cleaning with a cleaning liquid, steam cleaning, and drying. . This method is effective because contaminants adhering to the object to be cleaned can be removed by different means.
JP 05-78876 A

  However, the invention described in Patent Document 1 is effective for removing oil adhering to the object to be cleaned and particles having a relatively large particle size. However, it is not effective for removing fine particles adhering to the object to be cleaned. Inorganic fine particles and dust adhering to the object to be cleaned are easily reattached during the cleaning operation even if separated from the object to be cleaned in a normal cleaning operation.

  Accordingly, the present invention is intended to solve the above-described problems, and is intended to enable effective removal of fine particles adhering to an object to be cleaned with a simple configuration.

  The present invention relates to a method for cleaning an object to be cleaned. After performing a vapor cleaning or liquid cleaning of an object to be cleaned in the cleaning chamber, the object to be cleaned is transferred to a drying chamber communicating with the cleaning chamber. The communication between the drying chamber and the drying chamber is cut off, and the decompression mechanism connected to the drying chamber is operated to dry the objects to be washed under reduced pressure. After this decompression drying, the control valve connected to the drying chamber is opened to open the drying chamber. The outside air is continuously or intermittently introduced to the fluid, and the gas is brought into fluid contact with the object to be cleaned in the drying chamber.

  In addition, a partition rod having a central portion as an entrance / exit of the object to be cleaned is formed between the cleaning chamber and the drying chamber, and the object to be cleaned is placed on the cleaning chamber side of the partition wall. The body may be arranged to be movable up and down, and the upper surface of the outer peripheral portion may be in contact with the lower surface of the partition wall when the mounting body is moved in the direction of the drying chamber so that the cleaning chamber and the drying chamber can be shut off. .

  In addition, continuous introduction of outside air into the drying chamber introduces outside air by opening the control valve and continuously operating the pressure reducing mechanism from the time of pressure reducing operation for drying. Also good.

  In addition, intermittent introduction of outside air into the drying chamber introduces outside air by opening the control valve, stopping the operation of the decompression mechanism, returning the drying chamber to atmospheric pressure, and then reactivating the decompression mechanism. It may be.

  In addition, intermittent introduction of outside air into the drying chamber is achieved by opening the control valve and stopping the operation of the decompression mechanism, returning the drying chamber to atmospheric pressure, then closing the control valve and reactivating the decompression mechanism. After decompressing the drying chamber, the control valve may be opened and the outside air may be repeatedly introduced.

  Alternatively, the object to be cleaned cooled by contact with the flowing gas in the drying chamber may be reintroduced into the cleaning chamber and contacted with the cleaning vapor to perform precision steam cleaning of the object to be cleaned.

  Moreover, the outside air introduced into the drying chamber may be introduced via a cleaning filter.

  Moreover, the outside air introduced into the drying chamber may be introduced through a cooling mechanism.

  In addition, as the cleaning liquid, select one or more of chlorinated solvents, fluorinated solvents, brominated solvents, fluorinated liquids, alcohols, volatile solvents, hydrocarbon solvents, silicone solvents, terpene solvents, aqueous solvents. It may be used for the purpose.

  The present invention is configured as described above, and after the object to be cleaned is subjected to vapor cleaning or liquid cleaning in the cleaning chamber, the object to be cleaned is transferred to a drying chamber communicating with the cleaning chamber to dry the cleaning chamber and the drying chamber. The conventional cleaning process has been completed by shutting off the communication with the chamber and operating the pressure reducing mechanism to dry the object to be cleaned in the drying chamber. In this state, the fine particles mixed in the cleaning liquid remain on the surface of the object to be cleaned. In the present invention, after drying under reduced pressure, the control valve connected to the drying chamber is opened, outside air is introduced into the drying chamber, and the fluid is brought into fluid contact with the cleaning object in the drying chamber, thereby adhering to the surface of the cleaning object. It is possible to physically remove the fine particles.

  In addition, it is possible to cool the object to be cleaned, which has been heated by steam cleaning or liquid cleaning, by fluid contact with the gas, and it is easy to perform post-operation such as removing the object to be cleaned from the drying chamber. It can be carried out. In addition, the object to be cleaned can be cooled by fluid contact with the gas, so that it can be re-contacted with the solvent vapor as necessary, and the steam can be cleaned again, allowing precise cleaning of the object to be cleaned. And

  In addition, since the technical effects as described above can be realized by the mechanism provided in the conventional steam cleaning and vacuum drying apparatus, it is possible to perform highly precise cleaning at low cost without requiring a special mechanism. is there.

  An embodiment of the present invention will be described in detail with reference to the drawings. (1) is a cleaning tank for an object to be cleaned. The upper end is hermetically covered with a lid (2) and the inside is divided into two parts vertically, and the lower part is a cleaning chamber ( 3) and the upper part is the drying chamber (4). This cleaning chamber (3) is a kind of chlorine solvent, fluorine solvent, bromine solvent, fluorine liquid, alcohol, volatile solvent, hydrocarbon solvent, silicone solvent, terpene solvent, water solvent, etc. Alternatively, the cleaning liquid (5) can be heated by filling a cleaning liquid (5) selectively using a plurality of types and arranging a heating source (6) such as a heater and steam and a temperature sensor (7). Further, between the cleaning chamber (3) and the drying chamber (4), a partition wall (11) having a central portion as an entrance / exit (10) of the object to be cleaned (8) is provided on the lower surface with a packing (12). Projecting. In the cleaning chamber (3) on the lower surface side of the partition rod (11), a mounting body (13) for mounting the object to be cleaned (8) is arranged so as to be movable up and down by an appropriate lifting mechanism. ing. When the mounting body (13) moves in the direction of the drying chamber (4), the upper surface of the outer peripheral portion is brought into contact with the lower surface of the partition wall (11) so that the cleaning chamber (3) and the drying chamber (4) can be shut off. .

  In addition, a pool tank (15) for cleaning liquid (5) is connected to the cleaning chamber (3) via a first on-off valve (14), and a condenser (16) is connected to the pool tank (15). . In addition, the condenser (16) is connected to the drying chamber (4) via a second on-off valve (17), and a vacuum pump, an ejector or other decompression mechanism (18) is connected to the condenser (16). doing. The drying chamber (4) is provided with a control valve (20) for controlling the introduction of outside air into the drying chamber (4) separately from the second on-off valve (17). This control valve (20) may be one that directly introduces outside air, or one that introduces outside air via a fixed processing mechanism (21). This processing mechanism (21) may be a filter for purifying and introducing outside air, or may be a cooler for promoting the cooling of the object to be cleaned (8). Moreover, what combined these suitably may be used. Further, the outside air does not necessarily mean only the air existing outside the cleaning tank (1), but includes nitrogen gas, argon gas, etc., and is introduced into the drying chamber (4) from the outside. May be.

  In the first embodiment configured as described above, in order to clean the object to be cleaned (8), the mounting body (13) is raised by the elevating mechanism as shown in FIG. The upper surface of the outer periphery is closely attached to the lower surface of the partition wall (11), and the communication between the cleaning chamber (3) and the drying chamber (4) is blocked. This shut-off prevents vapor of the cleaning liquid (5) volatilized in the cleaning chamber (3) from flowing into the drying chamber (4). Next, the lid (2) of the cleaning tank (1) is opened, and the object to be cleaned (8) is inserted into the drying chamber (4) and placed by hand or by a lifting mechanism separate from the lifting mechanism. Place on top of body (13). Next, the lid (2) of the cleaning tank (1) is sealed, and as shown in FIG. 1, the mounting body (13) is lowered into the cleaning liquid (5) and the object to be cleaned (8) is cleaned with the cleaning liquid (5). Then, the object to be cleaned (8) is cleaned with the cleaning liquid (5).

  After the liquid cleaning is completed, the mounting body (13) is raised, and the object to be cleaned (8) is inserted into the drying chamber (4) from the entrance / exit (10) as shown in FIG. The upper surface of the outer periphery is closely attached to the lower surface of the partition wall (11), and the communication between the cleaning chamber (3) and the drying chamber (4) is blocked. This blocking prevents the volatile vapor of the cleaning liquid (5) in the cleaning chamber (3) from flowing into the drying chamber (4). If the second on-off valve (17) is opened and the pressure reducing mechanism (18) is operated in this state, the inside of the drying chamber (4) is depressurized, and the boiling point of the solvent adhering to the object to be cleaned (8) is lowered and volatilized. Thus, the object to be cleaned (8) is dried.

  Further, when the drying of the article to be cleaned (8) in the drying chamber (4) is completed, the outside air is continuously introduced into the drying chamber (4). The continuous introduction of the outside air is performed by opening the control valve (20) and continuously operating the pressure reducing mechanism (18) from the time of the pressure reducing operation for drying. The continuous introduction of the outside air causes a gas flow in the drying chamber (4) to come into contact with the object to be cleaned (8), thereby removing fine particles remaining on or reattached to the surface of the object to be cleaned (8). It becomes possible to do. Since oil and liquid adhering to the surface of the object to be cleaned (8) before the cleaning operation are removed by immersion cleaning, the fine particles remaining or reattached to the surface of the object to be cleaned (8) are It is easily removed by the flow of gas generated in the drying chamber (4). Further, if a plurality of outside air inlets and outlets are provided, a wide and complicated flow of gas can be generated on the surface of the object to be cleaned (8), so that fine particles can be removed more efficiently. .

  In addition, the introduction of outside air into the drying chamber (4) is to open the control valve (20) and continuously operate the pressure reducing mechanism (18) from the time of the pressure reducing operation for drying. However, other methods may intermittently introduce outside air into the drying chamber (4). For example, the intermittent introduction of outside air into the drying chamber (4) is performed after the control valve (20) is opened and the operation of the pressure reducing mechanism (18) is stopped to return the drying chamber (4) to atmospheric pressure. The outside air is introduced by re-activating the decompression mechanism (18). In another method, intermittent introduction of outside air into the drying chamber (4) opens the control valve (20) and stops the operation of the pressure reducing mechanism (18), thereby increasing the size of the drying chamber (4). After returning to atmospheric pressure, the control valve (20) is closed and the decompression mechanism (18) is re-actuated to depressurize the drying chamber (4), and then the control valve (20) is opened and outside air is repeatedly introduced. Is.

  If the decompression mechanism (18) introduces outside air by continuously operating from the time of the decompression drying step, the removal operation of the fine particles after drying can be performed continuously with the drying step, and the work efficiency Will be good. Further, the control valve (20) is opened and the operation of the pressure reducing mechanism (18) is stopped. After returning the inside of the drying chamber (4) to the atmospheric pressure, the pressure reducing mechanism (18) is restarted to introduce outside air. If this is the case, the evacuation mechanism (18) generates more turbulence in the drying chamber (4), compared to the case where the decompression mechanism (18) is continuously operated from the time of the vacuum drying process, and the object to be cleaned (8) and the outside air Can be efficiently contacted with each other and fine particles can be removed well.

  Further, if the introduction of the outside air is performed via the processing mechanism (21), it becomes possible to add the processing according to the work purpose to the outside air. For example, if the processing mechanism (21) is a filter, the outside air can be purified and introduced and brought into contact with the object to be cleaned (8), so that highly precise cleaning can be performed. Further, if the processing mechanism (21) is a cooler, the outside air can be cooled and introduced, so that the cooling effect of the object to be cleaned (8) is enhanced and the object to be cleaned (8) is transferred to the next process. Can be performed quickly without being disturbed by heat. Of course, the processing mechanism (21) can be used in combination with the above-described plurality of configurations. For example, after the outside air cooled by the cooler is filtered by a filter, it can be brought into contact with the object to be cleaned (8).

  In Example 1 described above, after performing liquid cleaning in which the object to be cleaned (8) is immersed in the cleaning liquid (5), the object to be cleaned (8) is dried under reduced pressure and brought into contact with flowing outside air. The cleaning method removes fine particles adhering to the surface. On the other hand, in the second embodiment, as shown in FIG. 3 and FIG. 4, the object to be cleaned (8) is brought into contact with the cleaning steam (22) and then the object to be cleaned (8) is removed. The cleaning method is to dry under reduced pressure and remove fine particles adhering to the surface in contact with flowing outside air. In this cleaning method, as shown in FIG. 4, the mounting body (13) is raised and the outer peripheral upper surface of the mounting body (13) is brought into close contact with the lower surface of the partition wall (11) by the elevating mechanism. The communication between the cleaning chamber (3) generating the water and the drying chamber (4) is shut off. This blocking prevents cleaning steam (22) generated in the cleaning chamber (3) from flowing into the drying chamber (4). Next, the lid (2) of the cleaning tank (1) is opened, and the object to be cleaned (8) is inserted into the drying chamber (4) manually or by the above-described lifting mechanism or a separate lifting mechanism. Place on top of (13). Next, the lid (2) of the cleaning tank (1) is sealed, and the mounting body (13) is lowered into the cleaning chamber (3) as shown in FIG. The object to be cleaned (8) is subjected to steam cleaning by bringing it into contact with (22) and condensing the cleaning steam (22) on the surface of the object (8) to be cleaned.

  After completion of this steam cleaning, the mounting body (13) is raised, and the object to be cleaned (8) is inserted into the drying chamber (4) from the entrance (10) as shown in FIG. 4, and the mounting body (13). The upper surface of the outer periphery is closely attached to the lower surface of the partition wall (11), and the communication between the cleaning chamber (3) and the drying chamber (4) is blocked. This blocking prevents the cleaning vapor (22) from the cleaning chamber (3) from flowing into the drying chamber (4). If the second on-off valve (17) is opened and the pressure reducing mechanism (18) is operated in this state, the inside of the drying chamber (4) is depressurized, and the boiling point of the solvent adhering to the object to be cleaned (8) is lowered and volatilized. Thus, the object to be cleaned (8) is dried. Further, the cleaning vapor (22) sucked into the pressure reducing mechanism (18) by the pressure reduction is condensed and liquefied by the condenser (16) and stored in the pool tank (15). The cleaning liquid (5) in the pool tank (15) is replenished as the cleaning liquid (5) in the cleaning chamber (3) is consumed.

  When the drying of the article to be cleaned (8) in the drying chamber (4) is completed, if the control valve (20) is opened and the outside air is introduced, gas flow occurs in the drying chamber (4) and the object to be cleaned (8 ), The fine particles remaining on the surface of the object to be cleaned (8) can be removed. Since oil and liquid adhering to the surface of the object to be cleaned (8) before the cleaning operation are removed by steam cleaning, the fine particles remaining or reattached to the surface of the object to be cleaned (8) are It is easily removed by the flow of gas generated in the drying chamber (4). Further, if a plurality of outside air inlets and outlets are provided, a gas flow can be widely generated on the surface of the object to be cleaned (8), so that fine particles can be removed more efficiently. Moreover, the method of introducing the outside air into the drying chamber (4) can be performed in the same manner as in the first embodiment.

  In addition, if the outside air is introduced through the processing mechanism (21), it is possible to apply processing according to the work purpose to the outside air as in the case of the first embodiment. Further, the processing mechanism (21) is a cooler, and the object to be cleaned (8) cooled by contact with the outside air introduced through the cooler or the normal temperature outside air is brought into contact with the cleaning steam (22) again. Steam cleaning can also be performed, and high-precision cleaning can be performed by re-steaming as compared with a single steam cleaning.

The conceptual diagram which shows the immersion cleaning state of the to-be-cleaned object of Example 1. FIG. The conceptual diagram which shows the dry state of the to-be-cleaned object of Example 1. FIG. The conceptual diagram which shows the vapor | steam cleaning state of the to-be-cleaned object of Example 2. FIG. The conceptual diagram which shows the dry state of the to-be-cleaned object of Example 2. FIG.

DESCRIPTION OF SYMBOLS 3 Cleaning chamber 4 Drying chamber 5 Cleaning liquid 8 Object to be cleaned 10 Entrance / exit 11 Divider 13 Placement body 18 Pressure reducing mechanism 20 Control valve

The present invention relates to a method for cleaning an object to be cleaned, and is intended to enable accurate cleaning operations such as immersion cleaning, steam cleaning, and drying using a cleaning liquid for the object to be cleaned. .

Conventionally, as a cleaning method for an object to be cleaned, as shown in Patent Document 1, it is a common practice to add different cleaning operations to one object to be cleaned, such as immersion cleaning with a cleaning liquid, steam cleaning, and drying. . This method is effective because contaminants adhering to the object to be cleaned can be removed by different means.
JP 05-78876 A

However, the invention described in Patent Document 1 is effective for removing oil adhering to the object to be cleaned and particles having a relatively large particle size. However, it is not effective for removing fine particles adhering to the object to be cleaned. Inorganic fine particles and dust adhering to the object to be cleaned are easily reattached during the cleaning operation even if separated from the object to be cleaned in a normal cleaning operation.

Accordingly, the present invention is intended to solve the above-described problems, and is intended to enable effective removal of fine particles adhering to an object to be cleaned with a simple configuration.

The present invention relates to a method for cleaning an object to be cleaned. After performing a vapor cleaning or liquid cleaning of an object to be cleaned in the cleaning chamber, the object to be cleaned is transferred to a drying chamber communicating with the cleaning chamber. The communication between the drying chamber and the drying chamber is cut off, and the decompression mechanism connected to the drying chamber is operated to dry the objects to be washed under reduced pressure. After this decompression drying, the control valve connected to the drying chamber is opened to open the drying chamber. The outside air is continuously or intermittently introduced through the cleaning filter to bring the gas into fluid contact with the object to be cleaned in the drying chamber.

In addition, a partition rod having a central portion as an entrance / exit of the object to be cleaned is formed between the cleaning chamber and the drying chamber, and the object to be cleaned is placed on the cleaning chamber side of the partition wall. The body may be arranged to be movable up and down, and the upper surface of the outer peripheral portion may be in contact with the lower surface of the partition wall when the mounting body is moved in the direction of the drying chamber so that the cleaning chamber and the drying chamber can be shut off. .

In addition, continuous introduction of outside air into the drying chamber introduces outside air by opening the control valve and continuously operating the pressure reducing mechanism from the time of pressure reducing operation for drying. Also good.

In addition, intermittent introduction of outside air into the drying chamber introduces outside air by opening the control valve, stopping the operation of the decompression mechanism, returning the drying chamber to atmospheric pressure, and then reactivating the decompression mechanism. It may be.

In addition, intermittent introduction of outside air into the drying chamber is achieved by opening the control valve and stopping the operation of the decompression mechanism, returning the drying chamber to atmospheric pressure, then closing the control valve and reactivating the decompression mechanism. After decompressing the drying chamber, the control valve may be opened and the outside air may be repeatedly introduced.

Alternatively, the object to be cleaned cooled by contact with the flowing gas in the drying chamber may be reintroduced into the cleaning chamber and contacted with the cleaning vapor to perform precision steam cleaning of the object to be cleaned.

  Moreover, the outside air introduced into the drying chamber may be introduced through a cooling mechanism.

In addition, as the cleaning liquid, select one or more of chlorinated solvents, fluorinated solvents, brominated solvents, fluorinated liquids, alcohols, volatile solvents, hydrocarbon solvents, silicone solvents, terpene solvents, aqueous solvents. It may be used for the purpose.

The present invention is configured as described above, and after the object to be cleaned is subjected to vapor cleaning or liquid cleaning in the cleaning chamber, the object to be cleaned is transferred to a drying chamber communicating with the cleaning chamber to dry the cleaning chamber and the drying chamber. The conventional cleaning process has been completed by shutting off the communication with the chamber and operating the pressure reducing mechanism to dry the object to be cleaned in the drying chamber. In this state, the fine particles mixed in the cleaning liquid remain on the surface of the object to be cleaned. In the present invention, after drying under reduced pressure, the control valve connected to the drying chamber is opened, outside air is introduced into the drying chamber, and the fluid is brought into fluid contact with the cleaning object in the drying chamber, thereby adhering to the surface of the cleaning object. It is possible to physically remove the fine particles.

In addition, it is possible to cool the object to be cleaned, which has been heated by steam cleaning or liquid cleaning, by fluid contact with the gas, and it is easy to perform post-operation such as removing the object to be cleaned from the drying chamber. It can be carried out. In addition, the object to be cleaned can be cooled by fluid contact with the gas, so that it can be re-contacted with the solvent vapor as necessary, and the steam can be cleaned again, allowing precise cleaning of the object to be cleaned. And

In addition, since the technical effects as described above can be realized by the mechanism provided in the conventional steam cleaning and vacuum drying apparatus, it is possible to perform highly precise cleaning at low cost without requiring a special mechanism. is there.

An embodiment of the present invention will be described in detail with reference to the drawings. (1) is a cleaning tank for an object to be cleaned. The upper end is hermetically covered with a lid (2) and the inside is divided into two parts vertically, and the lower part is a cleaning chamber ( 3) and the upper part is the drying chamber (4). This cleaning chamber (3) is a kind of chlorine solvent, fluorine solvent, bromine solvent, fluorine liquid, alcohol, volatile solvent, hydrocarbon solvent, silicone solvent, terpene solvent, water solvent, etc. Alternatively, the cleaning liquid (5) can be heated by filling a cleaning liquid (5) selectively using a plurality of types and arranging a heating source (6) such as a heater and steam and a temperature sensor (7). Further, between the cleaning chamber (3) and the drying chamber (4), a partition wall (11) having a central portion as an entrance / exit (10) of the object to be cleaned (8) is provided on the lower surface with a packing (12). Projecting. And in the washing | cleaning chamber (3) of the lower surface side of this partition rod (11), the mounting body (1) for mounting a to-be-cleaned object (8)
3) is arranged so as to be movable up and down by an appropriate lifting mechanism. Drying chamber (4) of this mounting body (13)
When moving in the direction, the upper surface of the outer peripheral part comes into contact with the lower surface of the partition wall (11), and the cleaning room (3) and the drying room (4)
Can be shut off.

In addition, a pool tank (15) for cleaning liquid (5) is connected to the cleaning chamber (3) via a first on-off valve (14), and a condenser (16) is connected to the pool tank (15). . In addition, the condenser (16) is connected to the drying chamber (4) via a second on-off valve (17), and a vacuum pump, an ejector or other decompression mechanism (18) is connected to the condenser (16). doing. The drying chamber (4) has the second
A control valve (20) for controlling the introduction of outside air into the drying chamber (4) is provided separately from the on-off valve (17). This control valve (20) introduces outside air through a cleaning filter (21) for purifying and introducing outside air. The cleaning filter (21) may be combined with a cooler for promoting cooling of the object to be cleaned (8). Further, the outside air does not necessarily mean only the air existing outside the cleaning tank (1), but includes nitrogen gas, argon gas, etc., and is introduced into the drying chamber (4) from the outside. May be.

In the first embodiment configured as described above, in order to clean the object to be cleaned (8), the mounting body (13) is raised by the elevating mechanism as shown in FIG. The upper surface of the outer periphery is closely attached to the lower surface of the partition wall (11), and the communication between the cleaning chamber (3) and the drying chamber (4) is blocked. This shut-off prevents vapor of the cleaning liquid (5) volatilized in the cleaning chamber (3) from flowing into the drying chamber (4). Next, the lid (2) of the washing tank (1)
And the object to be cleaned (8) is removed from the drying chamber by a manual or an elevating mechanism separate from the elevating mechanism.
(4) Insert in and place on the upper surface of the mounting body (13). Next, seal the lid (2) of the washing tank (1),
As shown in FIG. 1, the mounting body (13) is lowered into the cleaning liquid (5), the object to be cleaned (8) is immersed in the cleaning liquid (5), and the liquid of the object to be cleaned (8) is washed with the cleaning liquid (5). Wash.

After this liquid cleaning is completed, the mounting body (13) is raised, and the object to be cleaned (8) is moved in and out of the entrance (as shown in FIG. 2).
10) is inserted into the drying chamber (4) and the outer peripheral upper surface of the mounting body (13) is brought into close contact with the lower surface of the partition wall (11) to block communication between the cleaning chamber (3) and the drying chamber (4). To do. This blocking prevents the volatile vapor of the cleaning liquid (5) in the cleaning chamber (3) from flowing into the drying chamber (4). In this state, the second on-off valve (17)
If the pressure reducing mechanism (18) is opened and the inside of the drying chamber (4) is depressurized, the boiling point of the solvent adhering to the object to be cleaned (8) is lowered and volatilized to dry the object to be cleaned (8). Done.

Further, when the drying of the article to be cleaned (8) in the drying chamber (4) is completed, the outside air is continuously introduced into the drying chamber (4). This continuous introduction of outside air opens the control valve (20) and reduces the pressure reducing mechanism (
18) is performed by continuously operating the pressure reducing operation for drying. The continuous introduction of the outside air causes a gas flow in the drying chamber (4) to come into contact with the object to be cleaned (8), thereby removing fine particles remaining on or reattached to the surface of the object to be cleaned (8). It becomes possible to do. Since oil and liquid adhering to the surface of the object to be cleaned (8) before the cleaning operation are removed by immersion cleaning, the fine particles remaining or reattached to the surface of the object to be cleaned (8) are Drying room
(4) Easily removed by the flow of gas generated inside. Further, if a plurality of outside air inlets and outlets are provided, a wide and complicated flow of gas can be generated on the surface of the object to be cleaned (8), so that fine particles can be removed more efficiently. .

In addition, the introduction of outside air into the drying chamber (4) is to open the control valve (20) and continuously operate the pressure reducing mechanism (18) from the time of the pressure reducing operation for drying. However, other methods may intermittently introduce outside air into the drying chamber (4). For example, the intermittent introduction of outside air into the drying chamber (4) is performed after the control valve (20) is opened and the operation of the pressure reducing mechanism (18) is stopped to return the drying chamber (4) to atmospheric pressure. , Pressure reducing mechanism (18)
The outside air is introduced by re-activating. In another method, intermittent introduction of outside air into the drying chamber (4) opens the control valve (20) and stops the operation of the pressure reducing mechanism (18), thereby increasing the size of the drying chamber (4). After returning to atmospheric pressure, the control valve (20) is closed and the decompression mechanism (18) is re-actuated to depressurize the drying chamber (4), and then the control valve (20) is opened and outside air is repeatedly introduced. Is.

If the decompression mechanism (18) introduces outside air by continuously operating from the time of the decompression drying step, the removal operation of the fine particles after drying can be performed continuously with the drying step, and the work efficiency Will be good. Further, the control valve (20) is opened and the operation of the pressure reducing mechanism (18) is stopped. After returning the inside of the drying chamber (4) to the atmospheric pressure, the pressure reducing mechanism (18) is restarted to introduce outside air. If this is the case, the evacuation mechanism (18) generates more turbulence in the drying chamber (4), compared to the case where the decompression mechanism (18) is continuously operated from the time of the vacuum drying process, and the object to be cleaned (8) and the outside air Can be efficiently contacted with each other and fine particles can be removed well.

Further, if the outside air is introduced through the cleaning filter (21), the outside air can be purified and introduced and brought into contact with the object to be cleaned (8), so that highly precise cleaning can be performed. . Further, if the cleaning filter (21) is combined with a cooling mechanism, the outside air can be cooled and introduced. Therefore, the cooling effect of the object to be cleaned (8) is enhanced, and the object to be cleaned (8) to the next process. Can be quickly transferred without being disturbed by heat.

In Example 1 described above, after performing liquid cleaning in which the object to be cleaned (8) is immersed in the cleaning liquid (5), the object to be cleaned (8) is dried under reduced pressure and brought into contact with flowing outside air. The cleaning method removes fine particles adhering to the surface. On the other hand, in the second embodiment, as shown in FIG. 3 and FIG. 4, the object to be cleaned (8) is brought into contact with the cleaning steam (22) and then the object to be cleaned (8) is removed. The cleaning method is to dry under reduced pressure and remove fine particles adhering to the surface in contact with flowing outside air.
In this cleaning method, as shown in FIG. 4, the placing body (13) is lifted by the lifting mechanism to place the placing body (13).
The cleaning chamber (3) in which the upper surface of the outer periphery is closely attached to the lower surface of the partition wall (11) and the cleaning vapor (22) is generated.
And the communication of the drying chamber (4) is cut off. Cleaning steam generated in the cleaning chamber (3) by this shut-off
(22) does not flow into the drying chamber (4). Next, the lid (2) of the cleaning tank (1) is opened, and the object to be cleaned (8) is inserted into the drying chamber (4) manually or by the above-described lifting mechanism or a separate lifting mechanism. Place on top of (13). Next, the lid (2) of the cleaning tank (1) is sealed, and as shown in FIG.
The mounting body (13) is lowered into the cleaning chamber (3), the object to be cleaned (8) is brought into contact with the cleaning vapor (22), and the cleaning vapor (22) is condensed on the surface of the object to be cleaned (8). By doing so, the object to be cleaned (8) is subjected to steam cleaning.

After completion of this steam cleaning, the mounting body (13) is raised, and the object to be cleaned (8) is moved in and out as shown in FIG.
(10) is inserted into the drying chamber (4), and the outer peripheral upper surface of the mounting body (13) is brought into close contact with the lower surface of the partition wall (11) so that the cleaning chamber (3) and the drying chamber (4) communicate with each other. Cut off. This blocking prevents the cleaning vapor (22) from the cleaning chamber (3) from flowing into the drying chamber (4). If the second on-off valve (17) is opened and the pressure reducing mechanism (18) is operated in this state, the inside of the drying chamber (4) is depressurized, and the boiling point of the solvent adhering to the object to be cleaned (8) is lowered and volatilized. Thus, the object to be cleaned (8) is dried. In addition, the decompression mechanism
The cleaning vapor (22) sucked into (18) is condensed and liquefied by the condenser (16) and stored in the pool tank (15). The cleaning liquid (5) in the pool tank (15) is replenished as the cleaning liquid (5) in the cleaning chamber (3) is consumed.

When the drying of the article to be cleaned (8) in the drying chamber (4) is completed, if the control valve (20) is opened and the outside air is introduced, gas flow occurs in the drying chamber (4) and the object to be cleaned (8 ), The fine particles remaining on the surface of the object to be cleaned (8) can be removed. Since oil and liquid adhering to the surface of the object to be cleaned (8) before the cleaning operation are removed by steam cleaning, the object to be cleaned (8)
The fine particles remaining on or reattached to the surface of the water are easily removed by the flow of gas generated in the drying chamber (4). Further, if a plurality of outside air inlets and outlets are provided, a gas flow can be widely generated on the surface of the object to be cleaned (8), so that fine particles can be removed more efficiently. Moreover, the method of introducing the outside air into the drying chamber (4) can be performed in the same manner as in the first embodiment.

Further, if the outside air is introduced through the cleaning filter (21), the outside air can be purified and introduced and brought into contact with the object to be cleaned (8), so that highly precise cleaning can be performed. This is the same as in the first embodiment. In addition, if a cooling mechanism is combined with the cleaning filter (21), the object to be cleaned (8) cooled by contact with the outside air can be again brought into contact with the cleaning steam (22) and cleaned with steam. Compared to a single steam cleaning, a high degree of precision cleaning is possible.

The conceptual diagram which shows the immersion cleaning state of the to-be-cleaned object of Example 1. FIG. The conceptual diagram which shows the dry state of the to-be-cleaned object of Example 1. FIG. The conceptual diagram which shows the vapor | steam cleaning state of the to-be-cleaned object of Example 2. FIG. The conceptual diagram which shows the dry state of the to-be-cleaned object of Example 2. FIG.

DESCRIPTION OF SYMBOLS 3 Cleaning room 4 Drying room 5 Cleaning liquid 8 Object to be cleaned 10 Entrance / exit 11 Divider 13 Mounted body 18 Depressurization mechanism 20 Control valve 21 Cleaning filter

Claims (9)

  After the object to be cleaned is subjected to vapor cleaning or liquid cleaning in the cleaning chamber, the object to be cleaned is transferred to the drying chamber communicating with the cleaning chamber, and the communication between the cleaning chamber and the drying chamber is cut off and connected to the drying chamber. Activate the decompression mechanism to decompress the object to be cleaned in the drying chamber, open the control valve connected to the drying chamber after this decompression drying, and continuously or intermittently introduce outside air into the drying chamber, A cleaning method for an object to be cleaned, characterized in that gas is brought into fluid contact with the object to be cleaned in a drying chamber.   A partition rod having a central portion as an entrance / exit of the object to be cleaned is formed between the cleaning chamber and the drying chamber, and a mounting body for placing the object to be cleaned is placed on the cleaning chamber side of the partition wall. 2. The apparatus according to claim 1, wherein the cleaning chamber and the drying chamber can be shut off by being arranged so as to be vertically movable and contacting the upper surface of the outer peripheral portion with the lower surface of the partition wall when the mounting body is moved in the direction of the drying chamber. To clean the object to be cleaned.   The continuous introduction of the outside air into the drying chamber is characterized by introducing the outside air by opening the control valve and continuously operating the pressure reducing mechanism from the time of the pressure reducing operation for drying. The method for cleaning an object to be cleaned according to claim 1.   The intermittent introduction of the outside air into the drying chamber is to introduce the outside air by opening the control valve and stopping the operation of the decompression mechanism, returning the inside of the drying chamber to the atmospheric pressure, and then reactivating the decompression mechanism. The method for cleaning an object to be cleaned according to claim 1.   Intermittent introduction of outside air into the drying chamber is achieved by opening the control valve and stopping the operation of the decompression mechanism, returning the drying chamber to atmospheric pressure, then closing the control valve and reactivating the decompression mechanism. 2. The method for cleaning an object to be cleaned according to claim 1, wherein after the pressure is reduced, the control valve is opened and the outside air is repeatedly introduced.   The object to be cleaned, which has been cooled by contact with the flowing gas in the drying chamber, is reintroduced into the cleaning chamber and brought into contact with the cleaning vapor to perform precision steam cleaning of the object to be cleaned. How to clean the wash.   2. The method for cleaning an object to be cleaned according to claim 1, wherein the outside air introduced into the drying chamber is introduced through a cleaning filter.   2. The method for cleaning an object to be cleaned according to claim 1, wherein the outside air introduced into the drying chamber is introduced through a cooling mechanism.   As the cleaning liquid, one or more of chlorine-based solvent, fluorine-based solvent, bromine-based solvent, fluorine-based liquid, alcohol, volatile solvent, hydrocarbon-based solvent, silicone-based solvent, terpene-based solvent, and aqueous-based solvent are selectively used. The method for cleaning an object to be cleaned according to claim 1, wherein the method is used.

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