JP2015196169A - Laser processing apparatus, laser processing method, and program - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a laser processing apparatus which can precisely correct a positional deviation between a laser beam for processing and a visible laser beam for guiding, a control method, and a program.SOLUTION: A positional deviation by a chromatic aberration of an fθ lens 19 between coordinate data (x, y) that represent an irradiation position PQ of a laser beam Q on a work-piece 7 and coordinate data (X, Y) that represent an irradiation position PR of a visible laser beam R on the work-piece 7, is corrected. In the correction, the coordinate data (X, Y) that represent the irradiation position PR of the visible laser beam R on the work-piece 7 is corrected. Further, the correction is performed on the basis of a magnification and an optical axis coordinate with respect to the coordinate data (x, y) representing an irradiation position PQ of a laser beam Q on the work-piece 7 having a correspondence relation with the irradiation position PR of the visible laser beam R on the work-piece 7.

Description

  The present invention relates to a laser processing apparatus, a control method, and a program.

  Conventionally, a scanning laser that scans a processing laser for irradiating a processing target, a visible guide beam that does not have a processing function emitted coaxially with the processing laser, and a processing laser and a guide beam. Various proposals have been made regarding the technology of a laser processing apparatus including an optical system, a processing laser scanned by a scanning optical system, and a condensing lens that condenses guide light. For example, Patent Document 1 discloses a laser processing apparatus that corrects a positional shift caused by chromatic aberration of a condenser lens between a processing laser irradiation position and a guide light irradiation position.

  Specifically, the storage unit stores, as a data table, the amount of positional deviation between the irradiation position of the processing laser, which is a plurality of lattice points in the orthogonal coordinate system, and each irradiation position of the guide light corresponding to the irradiation position of the processing laser. And using this data table, the irradiation position of the guide light is corrected.

  Specifically, the data table includes a plurality of target coordinates of the guide light arranged corresponding to the lattice points on the processing plane, and a plurality of positional deviation amounts of the guide light corresponding to the plurality of target coordinates. When the irradiation position of the guide light is the same as the target coordinates stored in the data table, the positional deviation amount stored in the data table is added to the irradiation position of the guide light. When the irradiation position of the guide light is different from the target coordinates stored in the data table, linear interpolation is performed using the target coordinates close to the irradiation position of the guide light.

  Thereby, the deviation between the processing laser and the guide light can be eliminated. As a result, the user can know the irradiation position of the processing laser accurately by visually recognizing the guide light.

JP 2002-217395 A

  However, the shorter the interval between the lattice points as the target coordinates, the more accurately the positional deviation of the guide light can be corrected, but the data amount of the data table increases. In addition, when the irradiation position of the guide light is the same as the target coordinates stored in the data table, the irradiation position of the guide light can be specified only by adding the positional deviation amount. If it is different from the target coordinates stored in the table, a complicated process of calculating the guide light irradiation position by interpolating from the target coordinates around the guide light irradiation position is necessary.

  Specifically, in order to interpolate the irradiation position of the guide light inside the lattice distorted by the lens, complicated processing is required, and it is difficult to calculate with high accuracy.

  Therefore, the present invention has been made to solve the above-described problems, and a laser processing apparatus capable of accurately correcting a positional deviation between a processing laser beam and a guide visible laser beam. It is an object to provide a control method and a program.

  The invention according to claim 1 made to solve this problem is a laser processing apparatus, a laser oscillator for emitting laser light, and a visible laser for emitting visible laser light having a wavelength different from the laser light. An object to be processed while condensing the light source, the laser beam emitted coaxially or the scanning unit that scans the visible laser beam, and the laser beam or the visible laser beam scanned by the scanning unit A condensing unit that emits toward the object, a correction unit that corrects a positional deviation between the irradiation position of the laser light on the processing object and the irradiation position of the visible laser light on the processing object, and When the coordinate data representing the irradiation position of the laser beam on the processing object incident on the central axis of the scanning unit is used as the origin, the laser beam on the processing object incident on the optical axis of the light collecting unit The irradiation position The irradiation position of the visible laser beam on the processing object from the optical axis coordinate to the optical axis coordinate and the distance from the optical axis coordinate to the coordinate data representing the irradiation position of the laser beam on the processing object And a first scanning control means for controlling the scanning unit to scan the laser beam based on the coordinate data representing the irradiation position of the laser beam. And a second scanning control unit that controls the scanning unit and scans the visible laser beam based on coordinate data representing the irradiation position of the visible laser beam corrected by the correcting unit, and the correction The means includes coordinate data representing the irradiation position of the visible laser light on the processing object, coordinate data representing the irradiation position of the laser light on the processing object, and the magnification stored in the storage unit. The light It is corrected based on the coordinates, characterized by.

  The invention according to claim 2 is the laser processing apparatus according to claim 1, wherein the coordinate data representing the irradiation position of the laser beam on the object to be processed is (x, y), and the correcting means The coordinate data representing the irradiation position of the visible laser beam on the workpiece after correction with (X, Y) is taken as (X, Y), and the constants representing the magnification are “α (x)” and “α (y)”. And the constants representing the optical axis coordinates are “β (x)” and “β (y)”, X = α (x) × x + β (x), Y = α (y) × y + β (y) Each relational expression is satisfied.

  The invention according to claim 3 is the laser processing apparatus according to claim 2, wherein the irradiation position of the visible laser light on the processing object after being calculated by the respective relational expressions and the processing object The distance from the irradiation position of the laser beam on the object is calculated for a plurality of irradiation positions, a maximum value is calculated among the calculated distances, and the maximum value is calculated for a plurality of combinations of the constants. The correction means uses a combination of the constants when the smallest value among the calculated maximum values is calculated.

  The invention according to claim 4 is the laser processing apparatus according to claim 2, wherein the irradiation position of the visible laser beam on the processing object after being calculated by the respective relational expressions and the processing object The distance from the irradiation position of the laser beam on the object is calculated for a plurality of irradiation positions, the sum of the calculated distances is calculated, and the sum is calculated for a plurality of combinations of the constants, and is calculated. Further, the correction means uses the combination of the constants when the smallest value among the totals is calculated.

  An invention according to claim 5 is the laser processing apparatus according to any one of claims 2 to 4, wherein the laser processing apparatus includes a receiving unit that receives the change of each constant. .

  The invention according to claim 6 is a control method executed by a computer that controls a laser processing apparatus, and is a control method executed by a computer that controls the laser processing apparatus, wherein the laser processing apparatus comprises: A laser oscillator that emits laser light; a visible laser light source that emits visible laser light; the laser light emitted coaxially; or a scanning unit that scans the visible laser light; and the scan that is scanned by the scanning unit The processing target that has a correspondence relationship with a laser beam or a condensing unit that outputs the visible laser beam toward the processing target while condensing the visible laser light, and coordinate data representing an irradiation position of the laser light on the processing target A storage unit for storing a magnification of the coordinate data representing the irradiation position of the visible laser beam on the object and an optical axis coordinate; and the laser on the workpiece to be incident on a central axis of the scanning unit When the coordinate data representing the irradiation position of the laser beam is the origin, the optical axis coordinate representing the irradiation position of the laser beam on the workpiece to be incident on the optical axis of the light collecting unit, and the processing target from the optical axis coordinate A magnification of the distance from the optical axis coordinates to the coordinate data representing the irradiation position of the visible laser light on the workpiece, with respect to the distance to the coordinate data representing the irradiation position of the laser light on the object, In the control method, the coordinate data representing the irradiation position of the visible laser light on the processing object and the coordinate data representing the irradiation position of the laser light on the processing object are stored in the storage unit. A correction step of correcting based on the magnification and the optical axis coordinates; a first scanning control step of controlling the scanning unit and scanning the laser light based on coordinate data representing an irradiation position of the laser light; , The scanning unit Control to, on the basis of the visible laser beam to the coordinate data representing the irradiation position of the visible laser beam, further comprising a second scanning control step of scanning, and characterized.

  The invention according to claim 7 is a program executed by a computer that controls a laser processing apparatus, wherein the laser processing apparatus includes a laser oscillator that emits laser light and a visible laser light source that emits visible laser light. And a scanning unit that scans the laser beam or the visible laser beam emitted coaxially, and directs the laser beam scanned by the scanning unit or the visible laser beam toward the processing target And the magnification and light of the coordinate data representing the irradiation position of the visible laser light on the processing object that has a corresponding relationship with the coordinate data representing the irradiation position of the laser light on the processing object When the coordinate data representing the irradiation position of the laser beam on the object to be processed that is incident on the central axis of the scanning unit and the storage unit that stores the axis coordinates are used as the origin, An optical axis coordinate representing an irradiation position of the laser beam on the workpiece to be incident on an axis, and a distance from the optical axis coordinate to coordinate data representing an irradiation position of the laser beam on the workpiece; A storage unit that stores a magnification of a distance from an optical axis coordinate to coordinate data representing an irradiation position of the visible laser beam on the processing target and an optical axis coordinate, and the program is on the processing target. The coordinate data representing the irradiation position of the visible laser beam is based on the coordinate data representing the irradiation position of the laser beam on the workpiece, the magnification and the optical axis coordinate stored in the storage unit. A correction process for correcting, a first scanning control process for controlling the scanning unit, and scanning the laser beam based on coordinate data representing an irradiation position of the laser beam, and controlling the scanning unit, Visible laser light On the basis of the coordinate data representing the irradiation position of the visible laser beam and a second scanning control process of scanning, further comprising a, wherein.

  That is, in the laser processing apparatus according to the first aspect of the present invention, the positional deviation between the irradiation position of the laser beam on the processing object and the irradiation position of the visible laser beam on the processing object is corrected. The correction of the positional deviation is performed based on the magnification and the optical axis coordinates with respect to the coordinate data representing the irradiation position of the laser beam on the processing object that has a corresponding relationship with the irradiation position of the visible laser beam on the processing object. Therefore, it is possible to accurately correct the positional shift due to the chromatic aberration of the condensing part between the processing laser beam and the guide visible laser beam.

  In the laser processing apparatus according to the second aspect of the invention, correction is performed using the relational expressions X = α (x) × x + β (x) and Y = α (y) × y + β (y). Therefore, in the correction, only “α (x)” and “α (y)” that are constants indicating magnification, and “β (x)” and “β (y)” that are constants indicating optical axis coordinates are used. It is only memorized, and X and Y calculations have the same calculation amount regardless of the coordinate position. Therefore, the time for the correction and the data to be stored for the correction can be reduced. .

  Incidentally, regarding the laser beam for processing and the visible laser beam for guide, the emission angle from the condensing unit depends on the emission wavelength and the incident angle with respect to the condensing unit. In addition, the condensing unit is designed so that the distance from the optical axis to the irradiation position is approximately proportional to the incident angle, and the proportionality factor varies depending on the wavelength. Therefore, the irradiation position differs between the processing laser beam and the guide visible laser beam. However, since each of the different irradiation positions is proportional to the incident angle with respect to the condensing part, the ratio of the proportional coefficients corresponds to the primary coefficient (“α (x)” and “α (y)”). The relational expression used for correction is a linear function.

  In addition, since the optical system composed of the condensing unit is the optical axis target, the coefficients of the linear function (“α (x)” and “α (y)”), which are relational expressions used for correction, are approximate. Should match in the x and y directions, but the center axis of the scanning unit and the optical axis of the condensing unit may be misaligned due to insufficient adjustment, so the x and y directions may be different. There is sex. Therefore, if the coefficients of the linear function (“α (x)” and “α (y)”), which are relational expressions used for correction, are made different, the central axis of the scanning unit and the optical axis of the condensing unit Even if the deviation is, the irradiation position can be corrected.

  In addition, as for the central axis of the scanning unit and the optical axis of the condensing unit, if the position and the angle completely coincide with each other, the optical axis coordinate (“β (x)”) of a linear function which is a relational expression used for correction is used. And “β (y)”) are not required. However, it is difficult to adjust the center axis of the scanning unit and the optical axis of the condensing unit so that both the position and the angle are completely coincident with each other, and there is a possibility of deviation. Therefore, if the optical axis coordinates (“β (x)” and “β (y)”) of a linear function, which is a relational expression used for correction, are provided, the light of the scanning portion origin and the light collecting portion is obtained. Even if the axis is deviated, the irradiation position can be corrected.

  Further, in the case where the deviation between the origin of the scanning unit and the optical axis of the light collecting unit is different between the x direction and the y direction, the optical axis coordinates (“β (x)) of the linear function, which is a relational expression used for correction, are used. ”And“ β (y) ”) are different, the irradiation position can be corrected.

  In the laser processing apparatus according to the third aspect of the invention, first, between the irradiation position of the visible laser beam on the processing object and the irradiation position of the laser beam on the processing object after being calculated by each relational expression. The distance is calculated for a plurality of irradiation positions. Next, the maximum value among the distances is calculated. Next, such a maximum value is calculated for a plurality of combinations of each constant. A combination of constants when the smallest value among the calculated maximum values is calculated is used in each relational expression at the time of correction. That is, one combination of constants that minimizes the largest distance in the entire coordinate system is obtained from a large number of combinations of constants, and the obtained combination of constants is used in each relational expression. Therefore, the position shift due to the chromatic aberration of the condensing part between the processing laser beam and the guide visible laser beam can be accurately corrected under the correction that places importance on the largest distance in the entire coordinate system.

  Moreover, in the laser processing apparatus which is the invention which concerns on Claim 4, first, the irradiation position of the visible laser beam on the processing target after calculated by each relational expression and the irradiation position of the laser light on the processing target The distance is calculated for a plurality of irradiation positions. Next, the sum of the distances is calculated. Next, such a sum is calculated for a plurality of combinations of each constant. A combination of constants when the smallest value among the calculated sums is calculated is used in each relational expression at the time of correction. In other words, from among a large number of combinations of constants, one combination of constants that minimizes the sum of distances in the entire coordinate system is obtained, and the obtained combination of constants is used in each relational expression. Therefore, the position shift due to the chromatic aberration of the condensing part between the processing laser beam and the guide visible laser beam can be accurately corrected under the correction that places importance on the average of each distance in the entire coordinate system. .

  Further, in the laser processing apparatus according to the invention according to claim 5, since the change of each constant used in each relational expression can be accepted at the time of correction, it is made to correspond to the change of the laser beam emitted from the laser oscillator. be able to.

  In addition, since it is possible to accept changes in each constant used in each relational expression at the time of correction, in the laser processing apparatus according to the invention according to claim 5, a position (for example, a coordinate) in which the user pays attention in the coordinate system It is possible to perform correction with emphasis on the central part or the peripheral part of the system.

  In the control method according to the sixth aspect of the present invention, the positional deviation between the irradiation position of the laser beam on the processing object and the irradiation position of the visible laser beam on the processing object is corrected. The correction of the positional deviation is performed based on the magnification and the optical axis coordinates with respect to the coordinate data representing the irradiation position of the laser beam on the processing object that has a corresponding relationship with the irradiation position of the visible laser beam on the processing object. Therefore, it is possible to accurately correct the positional shift due to the chromatic aberration of the condensing part between the processing laser beam and the guide visible laser beam.

  Moreover, in the program which is invention which concerns on Claim 7, when the program is performed, position shift between the irradiation position of the laser beam on a processing target object and the irradiation position of the visible laser beam on a processing target object will be carried out. to correct. The correction of the positional deviation is performed based on the magnification and the optical axis coordinates with respect to the coordinate data representing the irradiation position of the laser beam on the processing object that has a corresponding relationship with the irradiation position of the visible laser beam on the processing object. Therefore, it is possible to accurately correct the positional shift due to the chromatic aberration of the condensing part between the processing laser beam and the guide visible laser beam.

It is a schematic structure of the laser processing system 1 which concerns on this embodiment. 2 is a block diagram showing an electrical configuration of a print information creation device 2 and a laser processing device 3. FIG. It is a figure which shows the optical path of the laser beam Q, and the optical path of the visible laser beam R. It is a figure which shows the distortion of the laser beam Q, and the distortion of the visible laser beam R. It is a flowchart which shows the correction process which CPU41 of the laser processing apparatus 3 performs. It is a flowchart which shows the determination process which determines the combination of the magnification and optical axis coordinate from which the maximum value of distance becomes the smallest. It is a flowchart which shows the determination process which determines the combination of the magnification | multiplying_factor and optical axis coordinate from which the sum total of distance becomes the smallest. It is a figure which shows the laser beam Q and visible laser beam R which were distortion-corrected by S12. It is a figure which shows the laser beam Q and visible laser beam R which were correct | amended by S13.

  Hereinafter, a laser processing apparatus, a control method, and a program according to the present invention will be described in detail based on an embodiment in which a laser processing system is embodied with reference to the drawings.

[1. Schematic configuration of laser processing system]
First, a schematic configuration of the laser processing system 1 according to the present embodiment will be described with reference to FIGS. A laser processing system 1 according to the present embodiment includes a print information creation device 2 and a laser processing device 3 that are configured by a personal computer or the like.

  The laser processing device 3 includes a laser processing device main body 5 and a laser controller 6. The laser processing apparatus main body 5 performs marking (printing) processing by two-dimensionally scanning the processing surface 8 of the processing object 7 with the laser beam Q.

  The laser controller 6 is configured by a computer, and is connected to the print information generating apparatus 2 so as to be capable of bidirectional communication, and is electrically connected to the laser processing apparatus main body 5. The laser controller 6 drives and controls the laser processing apparatus main body 5 based on the print information, control parameters, various instruction information, and the like transmitted from the print information creation apparatus 2. That is, the laser controller 6 controls the entire laser processing apparatus 3.

  A schematic configuration of the laser processing apparatus main body 5 will be described. In the description of the laser processing apparatus main body 5, the direction in which the laser light Q is emitted from the laser oscillator 21 is the front direction of the laser processing apparatus main body 5. In addition, the vertical direction to the attachment surface of the main body base 11 to which the laser oscillator 21 is attached is the vertical direction of the laser processing apparatus main body 5. The direction perpendicular to the vertical direction and the front-rear direction of the laser processing apparatus main body 5 is the left-right direction of the laser processing apparatus main body 5.

  The laser processing apparatus main body 5 includes a main body base 11, a laser oscillation unit 12 that emits a laser beam Q, an optical shutter unit 13, an optical damper (not shown), a half mirror 101 (see FIG. 3), and guide light. The unit 15, the reflection mirror 16, the optical sensor 17, the galvano scanner 18, the fθ lens 19, and the like are covered with a substantially rectangular parallelepiped housing cover (not shown).

  The laser oscillation unit 12 includes a laser oscillator 21, a beam expander 22, and a mounting base 23. The laser oscillator 21 is configured by a CO2 laser, a YAG laser, or the like, and outputs a laser beam Q for performing marking (printing) processing on the processing surface 8 of the processing object 7. The beam expander 22 adjusts the beam diameter of the laser light Q (for example, enlarges the beam diameter), and is provided coaxially with the laser oscillator 21. The mounting base 23 is attached so that the laser oscillator 21 can adjust the optical axis C of the laser light Q, and is fixed to the upper surface on the rear side of the main body base 11 with respect to the center position in the front-rear direction by the mounting screws 25.

  The optical shutter unit 13 includes a shutter motor 26 and a flat shutter 27. The shutter motor 26 is composed of a stepping motor or the like. The shutter 27 is attached to the motor shaft of the shutter motor 26 and rotates coaxially. When the shutter 27 is rotated to a position that interrupts the optical path of the laser beam Q emitted from the beam expander 22, the optical damper (not shown) provided the laser beam Q in the right direction with respect to the optical shutter unit 13. Reflect to. On the other hand, when the shutter 27 is rotated so as not to be positioned on the optical path of the laser beam Q emitted from the beam expander 22, the laser beam Q emitted from the beam expander 22 is transmitted to the front side of the optical shutter unit 13. Is incident on the half mirror 101.

  An optical damper (not shown) absorbs the laser beam Q reflected by the shutter 27. The optical damper (not shown) is cooled by a cooling device (not shown). The half mirror 101 is disposed so as to form an angle of 45 degrees obliquely in the lower left direction with respect to the optical path of the laser beam Q. The half mirror 101 transmits almost all of the laser beam Q incident from the rear side. The half mirror 101 reflects a part of the laser beam Q incident from the rear side, for example, 1% of the laser beam Q, to the reflection mirror 16 at a reflection angle of 45 degrees. The reflection mirror 16 is arranged in the left direction with respect to the approximate center position of the rear side surface on which the laser beam Q of the half mirror 101 is incident.

  The guide light unit 15 emits visible laser light R (see FIG. 3) that is visible coherent light, for example, a visible semiconductor laser 28 (see FIGS. 2 and 3) that emits red laser light, and a visible semiconductor laser 28. And a lens group (not shown) that converges the visible laser beam R into parallel light.

  The visible laser beam R has a wavelength different from that of the laser beam Q emitted from the laser oscillator 21. In the present embodiment, the wavelength of the laser beam Q is 1064 nm, and the wavelength of the visible laser beam R is 650 nm.

  The guide light unit 15 is arranged in the right direction with respect to a substantially central position where the laser light Q of the half mirror 101 is emitted. As a result, the visible laser beam R is incident at a substantially central position where the laser beam Q of the half mirror 101 is emitted at an incident angle of 45 degrees with respect to the front side surface of the half mirror 101, that is, the reflecting surface. Is reflected on the optical path of the laser beam Q at a reflection angle of.

  Here, the reflectance of the half mirror 101 has wavelength dependency. Specifically, the half mirror 101 is subjected to a surface treatment of a multilayer film structure of a dielectric layer and a metal layer, has a high reflectance with respect to the wavelength of the visible laser light R, and has a wavelength other than that. The light is configured to transmit almost (99%).

  The reflection mirror 16 is disposed so as to form an angle of 45 degrees obliquely in the lower left direction with respect to the front-rear direction parallel to the optical path of the laser beam Q, and the reflection mirror 16 reflects the laser beam Q reflected on the rear side surface of the half mirror 101. A part of the light is incident at an incident angle of 45 degrees with respect to a substantially central position of the reflecting surface. The reflection mirror 16 reflects the laser beam Q incident on the reflection surface at an incident angle of 45 degrees toward the front side at a reflection angle of 45 degrees.

  The optical sensor 17 is configured by a photodetector or the like that detects the emission intensity of the laser light Q, and is disposed in the front direction in FIG. 1 with respect to a substantially central position where the laser light Q of the reflection mirror 16 is reflected. As a result, the optical sensor 17 receives the laser beam Q reflected by the reflecting mirror 16 and detects the emission intensity of the incident laser beam Q. Therefore, it is possible to detect the emission intensity of the laser light Q output from the laser oscillator 21 via the optical sensor 17.

  The galvano scanner 18 is attached to the upper side of the through hole formed in the front end portion of the main body base 11, and receives the laser beam Q emitted from the laser oscillation unit 12 and the visible laser beam R reflected by the half mirror 101. Two-dimensional scanning is performed downward. The galvano scanner 18 includes a galvano X-axis motor 31 and a galvano Y-axis motor 32 that are fitted into the mounting portion 33 from the outside so that the respective motor shafts are orthogonal to each other. Scanning mirrors 18X and 18Y (see FIG. 3) attached to the tip end face each other inside. Then, the rotation of the motors 31 and 32 is controlled to rotate the scanning mirrors 18X and 18Y, thereby two-dimensionally scanning the laser beam Q and the visible laser beam R downward. The two-dimensional scanning direction is a front-rear direction (X direction) and a left-right direction (Y direction).

  The fθ lens 19 condenses the laser beam Q and the visible laser beam R that are two-dimensionally scanned by the galvano scanner 18 on the processing surface 8 of the processing object 7 disposed below. Accordingly, by controlling the rotation of the motors 31 and 32, the laser beam Q and the visible laser beam R are formed in a desired print pattern on the processing surface 8 of the processing object 7 in the front-rear direction (X direction) and the left-right direction. Two-dimensional scanning is performed in the (Y direction).

  Next, the circuit configuration of the printing information creation device 2 and the laser processing device 3 constituting the laser processing system 1 will be described with reference to FIG. First, the circuit configuration of the laser processing apparatus 3 will be described with reference to FIG.

  As shown in FIG. 2, the laser processing apparatus 3 includes a laser controller 6, a galvano controller 35, a galvano driver 36, a laser driver 37, a semiconductor laser driver 38, and the like that control the entire laser processing apparatus 3. The laser controller 6 is electrically connected to a galvano controller 35, a laser driver 37, a semiconductor laser driver 38, an optical sensor 17, a shutter motor 26, and the like. An external print information creation device 2 is connected to the laser controller 6 so as to be capable of bidirectional communication. The print information transmitted from the print information creation device 2, the control parameters of the laser processing device main body 5, Instruction information and the like can be received.

  The laser controller 6 includes a CPU 41, a RAM 42, a ROM 43, a timer 44 for measuring time, and the like as a calculation device and a control device that control the entire laser processing device 3. The CPU 41, the RAM 42, the ROM 43, and the timer 44 are connected to each other via a bus line (not shown) and exchange data with each other.

  The RAM 42 is for temporarily storing various calculation results calculated by the CPU 41, XY coordinate data of the print pattern, and the like. The ROM 43 stores various programs, and stores various programs such as calculating the XY coordinate data of the print pattern based on the print information transmitted from the print information creating apparatus 2 and storing it in the RAM 42. ing. The ROM 43 stores data such as the font start point, end point, focal point, curvature, etc. of each character composed of straight lines and elliptical arcs for each font type.

  In the ROM 43, the thickness, depth, and number of print patterns corresponding to the print information received from the print information creation device 2, the laser output of the laser oscillator 21, the laser pulse width of the laser light Q, and the laser from the galvano scanner 18 are stored. A program for storing various control parameters such as galvano scanning speed information indicating the speed at which the light Q is scanned in the RAM 42 is stored.

  The CPU 41 performs various calculations and controls based on various programs stored in the ROM 43. For example, the program stored in the ROM 43 includes the program of the flowchart shown in FIG.

  In addition, the CPU 41 outputs XY coordinate data, galvano scanning speed information, and the like of the print pattern calculated based on the print information input from the print information creation device 2 to the galvano controller 35. Further, the CPU 41 outputs laser drive information such as the laser output of the laser oscillator 21 and the laser pulse width of the laser light Q set based on the print information input from the print information generating device 2 to the laser driver 37. The CPU 41 outputs a laser output control signal of the laser oscillator 21 to the laser driver 37 based on the emission intensity of the laser light Q input from the optical sensor 17.

  The CPU 41 outputs to the semiconductor laser driver 38 an on signal for instructing the start of lighting of the visible semiconductor laser 28 or an off signal for instructing to turn it off. The CPU 41 instructs the shutter motor 26 to rotate the shutter 27 to a position that does not block the optical path of the laser beam Q, or to block the shutter 27 to a position that does not block the optical path of the laser beam Q. An opening instruction signal for instructing is output.

  The galvano controller 35 is based on the XY coordinate data (X, Y) of the print pattern input from the laser controller 6, galvano scanning speed information, etc., and the driving angle and rotational speed of the galvano X-axis motor 31 and galvano Y-axis motor 32. Etc. and motor drive information representing the drive angle and rotation speed is output to the galvano driver 36. The galvano driver 36 drives and controls the galvano X-axis motor 31 and the galvano Y-axis motor 32 based on the motor drive information indicating the drive angle and the rotation speed input from the galvano controller 35, and the laser beam Q or the visible laser beam. R is scanned two-dimensionally.

  The laser driver 37 controls the laser oscillator 21 on the basis of laser drive information such as the laser output of the laser oscillator 21 input from the laser controller 6, the laser pulse width of the laser light Q, and the laser output control signal of the laser oscillator 21. To drive. Further, the semiconductor laser driver 38 drives the visible semiconductor laser 28 to turn on or off based on the ON signal or OFF signal input from the laser controller 6.

  Next, the circuit configuration of the print information creating apparatus 2 will be described with reference to FIG. As shown in FIG. 2, the print information creating apparatus 2 includes a control unit 51 that controls the entire print information creating apparatus 2, an input operation unit 55 including a mouse 52 and a keyboard 53 shown in FIG. LCD) 56, CD-ROM 57, and the like, CD-R / W 58 for writing and reading various data, programs, and the like. An input operation unit 55, a liquid crystal display 56, a CD-R / W 58, and the like are connected to the control unit 51 via an input / output interface (not shown).

  The CD-R / W 58 reads various application software or the like from the CD-ROM 57 or writes to the CD-ROM 57.

  The control unit 51 includes a CPU 61, a RAM 62, a ROM 63, a timer 65 for measuring time, a hard disk drive (hereinafter referred to as “HDD”) 66, and the like as an arithmetic device and a control device that perform overall control of the print information creation device 2. I have. The CPU 61, the RAM 62, the ROM 63, and the timer 65 are connected to each other via a bus line (not shown), and exchange data with each other. The CPU 61 and the HDD 66 are connected via an input / output interface (not shown) to exchange data with each other.

  The RAM 62 is for temporarily storing various calculation results calculated by the CPU 61. The ROM 63 stores various programs.

  The HDD 66 stores various application software programs and various data files.

[2. Displacement of laser light and visible laser light irradiation position]
Next, the deviation of the irradiation positions of the laser beam Q and the visible laser beam R will be described with reference to FIG.

  As shown in FIG. 3, the laser light Q is emitted from a laser oscillation unit 12 including a laser oscillator 21, a beam expander 22, and the like. The emitted laser beam Q passes through the half mirror 101. The transmitted laser beam Q is two-dimensionally scanned by the scanning mirrors 18X and 18Y of the galvano scanner 18. The two-dimensionally scanned laser beam Q is incident on the fθ lens 19. The incident laser light Q is condensed on the fθ lens 19 and emitted from the fθ lens 19.

  The emitted laser beam Q irradiates the workpiece 7. The irradiation position PQ of the laser beam Q is indicated by (x, y) in the XY coordinate data with the position of the optical axis C of the fθ lens 19 on the workpiece 7 as the origin O. That is, if the coordinate data representing the irradiation position PQ of the laser beam Q on the workpiece 7 incident on the optical axis C of the fθ lens 19 is the origin O, the coordinates of the irradiation position PQ of the laser beam Q on the workpiece 7 The data is indicated by (x, y).

  On the other hand, the visible laser beam R is emitted from the visible semiconductor laser 28. The emitted visible laser beam R is reflected on the optical path of the laser beam Q by the half mirror 101. The reflected visible laser light R is two-dimensionally scanned by the scanning mirrors 18X and 18Y of the galvano scanner 18. The two-dimensionally scanned visible laser light R enters the fθ lens 19. The incident visible laser beam R is condensed on the fθ lens 19 and emitted from the fθ lens 19. The emitted visible laser beam R is irradiated on the workpiece 7.

  The emitted visible laser beam R irradiates the workpiece 7. The irradiation position PR of the visible laser beam R is indicated by (X, Y) in the coordinate data of the XY coordinates with the position of the optical axis C of the fθ lens 19 on the workpiece 7 as the origin O. That is, if the coordinate data representing the irradiation position PQ of the laser beam Q on the workpiece 7 incident on the optical axis C of the fθ lens 19 is the origin O, the irradiation position PR of the visible laser beam R on the workpiece 7 is set. The coordinate data is indicated by (X, Y).

  A positional deviation Z occurs between the irradiation position PR of the visible laser beam R and the irradiation position PQ of the laser beam Q. The positional deviation Z is caused by chromatic aberration of the fθ lens 19.

[3. Relational expression of irradiation position of laser beam and visible laser beam]
Coordinate data (X, Y) representing the irradiation position PR of the visible laser light R on the processing object 7 which has a corresponding relationship with the coordinate data (x, y) representing the irradiation position PQ of the laser light Q on the processing object 7 The following relational expressions (1) and (2) shall be established.
X = α (x) × x + β (x) (1)
Y = α (y) × y + β (y) (2)
Here, “β (x)” and “β (y)” are fθ when the coordinate data representing the irradiation position of the laser beam on the workpiece 7 incident on the central axis of the galvano scanner 18 is the origin O. The irradiation position of the laser beam on the workpiece 7 incident on the optical axis C of the lens 19 is a constant representing the surface optical axis coordinates, and “α (x)” and “α (y)” are the optical axis coordinates β Visible laser on the processing object 7 from the optical axis coordinates β (x), β (y) with respect to the distance from (x), β (y) to the coordinate data representing the irradiation position of the laser beam on the processing object 7 It is a constant representing the magnification of the distance to the coordinate data representing the light irradiation position.

  By the way, regarding the laser beam Q for marking (printing) processing and the visible laser beam R for guide, the emission angle from the fθ lens 19 depends on the incident wavelength and the incident angle with respect to the fθ lens 19. The fθ lens 19 is designed so that the distance from the optical axis C to the irradiation position (representing coordinate data (x, y) (X, Y)) is approximately proportional to the incident angle. The coefficient varies depending on the wavelength.

  In this regard, as described above, in the present embodiment, the wavelength of the laser beam Q is 1064 nm, and the wavelength of the visible laser beam R is 650 nm. Therefore, the coordinate data (x, y) representing the irradiation position PQ of the laser beam Q for marking (printing) processing is different from the coordinate data (X, Y) representing the irradiation position PR of the visible laser beam R for guide. .

  However, since each of the different irradiation positions PQ and PR is proportional to the incident angle with respect to the fθ lens 19, the ratio of the proportional coefficients is a primary coefficient (“α (x)” and “α (y)”). In addition, the above relational expressions (1) and (2) are linear functions. By using the above relational expressions (1) and (2), the guide visible laser is corrected by correcting the coordinate data (x, y) representing the irradiation position PQ of the laser beam Q for marking (printing) processing. Coordinate data (X, Y) representing the irradiation position PR of the light R can be calculated.

  Further, since the optical system constituted by the fθ lens 19 is an axis object centered on the optical axis C, the coefficients of the linear functions (“(1) and (2)) used for correction (“ α (x) ”and“ α (y) ”) should approximately match in the x and y directions, but the center axis of the galvano scanner 18 and the optical axis C of the fθ lens 19 are under-adjusted. May be different from each other in the x direction and the y direction.

  Therefore, if the coefficients of the linear function (“α (x)” and “α (y)”) in the above relational expressions (1) and (2) used for correction are made different, the galvano scanner 18 Even if the center axis of the lens and the optical axis C of the fθ lens 19 are deviated, by correcting the coordinate data (x, y) representing the irradiation position PQ of the laser beam Q for marking (printing) processing, the visible light for the guide Coordinate data (X, Y) representing the irradiation position PR of the laser light R can be calculated.

  If the position and the angle of the origin of the galvano scanner 18 and the optical axis C of the fθ lens 19 are completely coincident with each other, the linear functions represented by the above relational expressions (1) and (2) used in the correction are obtained. Optical axis coordinates (“β (x)” and “β (y)”) are not required. However, it is difficult to adjust the position and angle of the origin of the galvano scanner 18 and the optical axis C of the fθ lens 19 so that they completely coincide with each other, and there is a possibility that they will be shifted. Therefore, if the optical axis coordinates (“β (x)” and “β (y)”) of the linear function, which are the above-described relational expressions (1) and (2) used in correction, are provided, the galvano Even if the origin of the scanner 18 and the optical axis C of the fθ lens 19 are misaligned, the coordinate data (x, y) representing the irradiation position PQ of the laser beam Q for marking (printing) processing is corrected, so that the guide data Coordinate data (X, Y) representing the irradiation position PR of the visible laser light R can be calculated.

  Further, in the case where the deviation between the origin of the galvano scanner 18 and the optical axis C of the fθ lens 19 is different between the x direction and the y direction, the linear expressions represented by the above relational expressions (1) and (2) used for correction. If the optical axis coordinates (“β (x)” and “β (y)”) of the function are made different, coordinate data (x, y) representing the irradiation position PQ of the laser beam Q for marking (printing) processing Is corrected, coordinate data (X, Y) representing the irradiation position PR of the visible laser beam R for guide can be calculated.

[4. Determination of magnification and optical axis coordinates (Part 1)]
The linear function coefficients (“α (x)” and “α (y)”) and the optical axis coordinates (“β (x)”), which are the above-described relational expressions (1) and (2) used in the correction. “Β (y)”) is determined according to the combination determination process shown in FIG.

  In S20, first, the laser oscillator 21 irradiates the N lattice points PQ (1) to PQ (N) on the workpiece 7 with the laser beam Q. The recorder records the coordinates PQ of the N processing marks on the processing object 7 processed by the laser beam Q as coordinate data (x, y).

  In S21, each of the above relational expressions using a predetermined combination of coefficients (“α (x)” and “α (y)”) and optical axis coordinates (“β (x)” and “β (y)”). (1) The visible laser beam R is irradiated to N lattice points PR (1) to PR (N) on the workpiece 7 with (2). The irradiation positions of the N visible laser beams R on the workpiece 7 are recorded as coordinate data (X, Y).

In S22, coordinate data (X, Y) representing the irradiation position PR of the visible laser beam R on the workpiece 7 and coordinate data (X, Y) representing the irradiation position PQ of the laser beam Q on the workpiece 7 actually processed. The distance L to x, y) is calculated by the following formula (3) for N irradiation positions.
L (n) = {(X (n) −x (n)) ² + (Y (n) −y (n)) ² } ^1/2 (3)
n = 1 to N

  Specifically, for example, as shown in FIG. 4, when the outer frame of the reference position is a square, the distortion of the laser beam Q is indicated by a one-dot chain line, and the distortion of the visible laser beam R is indicated by a dotted line. . Here, when the reference position whose outer frame is a square is configured by a plurality of matrices, the N distances L (n) are obtained by the above equation (3) for each of the N lattice points.

  When n = 1, coordinate data (X (1), Y) representing the irradiation position PR (1) of the visible laser light R on the workpiece 7 after being calculated by the above relational expressions (1) and (2). A distance L (1) between (1)) and coordinate data (x (1), y (1)) representing the irradiation position PQ (1) of the laser beam Q on the workpiece 7 is obtained.

  When n = N, coordinate data (X (N)) representing the irradiation position PR (N) of the visible laser light R on the workpiece 7 calculated by the above relational expressions (1) and (2). , Y (N)) and coordinate data (x (N), y (N)) representing the irradiation position PQ (N) of the laser beam Q on the workpiece 7 are obtained.

  In FIG. 4, the reference position having a square outer frame is configured by 16 matrices, and there are 25 lattice points. Therefore, (N =) 25 distances L are obtained.

In S23, the maximum value among the distances L (n) is calculated. That is, the maximum value is calculated by the following formula (4).
MAX (L (1), L (2), ..., L (n-1), L (n)) (4)
n = N

  Next, the coefficients (“α (x)” and “α (y)”) and optical axis coordinates (“β (x)” and “β (y)”) in the above relational expressions (1) and (2) are used. , The maximum value obtained through the above equations (3) and (4) is the coefficient (“α (x)” and “α (y)”) and the optical axis coordinate (“β (x)”). ”And“ β (y) ”).

  In S24, coefficients (“α (x)” and “α (y)”) and optical axis coordinates (“β (x)” and “β”) when the smallest value among the calculated maximum values is calculated. β (y) ") combination is determined. The combination is used in the relational expressions (1) and (2) at the time of correction.

  That is, from among combinations of a large number of coefficients (“α (x)” and “α (y)”) and optical axis coordinates (“β (x)” and “β (y)”), One combination of coefficients (“α (x)” and “α (y)”) and optical axis coordinates (“β (x)” and “β (y)”) that minimize the largest distance L in the whole. Ask.

  The obtained combinations of the constants are used in the above relational expressions (1) and (2). Therefore, the position shift Z caused by the chromatic aberration of the fθ lens 19 between the marking (printing) processing laser beam Q and the guide visible laser beam R is corrected under the correction that emphasizes the largest distance L in the entire XY coordinate system. Can be corrected with high accuracy.

[5. Determination of magnification and optical axis coordinates (Part 2)]
The linear function coefficients (“α (x)” and “α (y)”) and the optical axis coordinates (“β (x)”), which are the above-described relational expressions (1) and (2) used in the correction. “Β (y)”) may be determined according to the combination determination process shown in FIG.

  In S20, first, the laser oscillator 21 irradiates the N lattice points PQ (1) to PQ (N) on the workpiece 7 with the laser beam Q. The recorder records N irradiation positions PQ on the processing object 7 as coordinate data (x, y).

  In S21, each of the above relational expressions using a predetermined combination of coefficients (“α (x)” and “α (y)”) and optical axis coordinates (“β (x)” and “β (y)”). (1) The visible laser beam R is irradiated to N lattice points PR (1) to PR (N) on the workpiece 7 with (2). The recorder records the irradiation positions PR of the N visible laser beams R on the workpiece 7 as coordinate data (X, Y).

In S22, coordinate data (X, Y) representing the irradiation position PR of the visible laser beam R on the workpiece 7 and coordinate data (X, Y) representing the irradiation position PQ of the laser beam Q on the workpiece 7 actually processed. The distance L to x, y) is calculated by the following formula (3) for N irradiation positions.
L (n) = {(X (n) −x (n)) ² + (Y (n) −y (n)) ² } ^1/2 (3)
n = 1 to N

  Specifically, for example, as shown in FIG. 4, when the outer frame of the reference position is a square, the distortion of the laser beam Q is indicated by a one-dot chain line, and the distortion of the visible laser beam R is indicated by a dotted line. . Here, when the reference position whose outer frame is a square is configured by a plurality of matrices, the N distances L (n) are obtained by the above equation (3) for each of the N lattice points.

  When n = 1, coordinate data (X (1), Y) representing the irradiation position PR (1) of the visible laser light R on the workpiece 7 after being calculated by the above relational expressions (1) and (2). A distance L (1) between (1)) and coordinate data (x (1), y (1)) representing the irradiation position PQ (1) of the laser beam Q on the workpiece 7 is obtained.

  When n = N, coordinate data (X (N)) representing the irradiation position PR (N) of the visible laser light R on the workpiece 7 calculated by the above relational expressions (1) and (2). , Y (N)) and coordinate data (x (N), y (N)) representing the irradiation position PQ (N) of the laser beam Q on the workpiece 7 are obtained.

  In FIG. 4, the reference position having a square outer frame is configured by 16 matrices, and there are 25 lattice points. Therefore, (N =) 25 distances L are obtained.

In S33, the total sum of the distances L (n) is calculated. That is, the sum is calculated by the following equation (5).
L (1) + L (2) + ... + L (n-1) + L (n) (5)
n = N

  Next, the coefficients (“α (x)” and “α (y)”) and optical axis coordinates (“β (x)” and “β (y)”) in the above relational expressions (1) and (2) are used. , The sum obtained through the above formulas (3) and (5) is changed to the coefficient (“α (x)” and “α (y)”) and the optical axis coordinate (“β (x)”). And “β (y)”).

  In S34, the coefficients (“α (x)” and “α (y)”) and the optical axis coordinates (“β (x)” and “β” when the smallest value among the calculated sums is calculated. (Y) ")) is determined. The combination is used in the relational expressions (1) and (2) at the time of correction.

  That is, from among combinations of a large number of coefficients (“α (x)” and “α (y)”) and optical axis coordinates (“β (x)” and “β (y)”), A combination of a coefficient (“α (x)” and “α (y)”) that minimizes the total sum of the distances L and the optical axis coordinates (“β (x)” and “β (y)”) in the whole. Ask.

  The obtained combinations of the constants are used in the above relational expressions (1) and (2). Therefore, the position shift due to the chromatic aberration of the fθ lens 19 between the marking (printing) processing laser beam Q and the guide visible laser beam R under correction with an emphasis on the average of each distance L in the entire XY coordinate system. Z can be accurately corrected.

[6. Correction processing]
Next, the correction process which CPU41 of the laser processing apparatus 3 of the laser processing system 1 which concerns on this embodiment performs is demonstrated based on FIG.

  In S <b> 10, the CPU 41 accepts changes of the constants “α (x)”, “α (y)”, “β (x)”, and “β (y)”. Specifically, the CPU 41 causes the LCD 56 to display a screen for changing each constant. The user inputs the values of the constants via the input operation unit 55 including the mouse 52 and the keyboard 53 shown in FIG. The CPU 41 causes the RAM 62 to store each constant value input via the input operation unit 55. Thereby, the user can adjust the irradiation position of the visible laser beam R to a desired position. For example, the coefficients (“α (x)” and “α (y)”) and the optical axis coordinates (“β (x)”) used in the above relational expressions (1) and (2) at the time of correction in S13. And “β (y)”) can be adjusted by the user's operation. Therefore, the visible laser beam R at the position (for example, the origin O or the peripheral portion in FIG. 4) of the user's attention in the XY coordinate system It is possible to correct the irradiation position desired by the user, such as emphasizing a value that matches the laser beam Q.

  First, in S11, the CPU 41 acquires coordinate data of a target position. Specifically, the CPU 41 receives coordinate data for drawing a print pattern from the print information creation device 2. The CPU 41 calculates coordinate data (x ′, y ′) representing the position in the XY coordinates on the workpiece 7 based on the print information transmitted from the print information creation device 2. The CPU 41 stores the calculated coordinate data (x ′, y ′) in the RAM 42.

  Ideally, the laser beam is irradiated onto the PQ ′ shown in FIG. 4 by the coordinate data (x ′, y ′) of the target position. However, actually, the laser beam Q and the visible laser beam R are displaced from the target position due to the distortion of the fθ lens 19. Specifically, when the laser beam Q is irradiated onto the workpiece 7 according to the coordinate data (x ′, y ′), the laser beam Q is irradiated onto the PQ shown in FIG. Further, when the visible laser beam R is irradiated onto the workpiece 7 according to the coordinate data (x ′, y ′), the PR shown in FIG. 4 is irradiated.

In S <b> 12, the CPU 41 corrects the coordinate data (x ′, y ′) stored in the RAM with the distortion correction formula of the fθ lens 19. Specifically, the CPU 41 performs correction by a known method described in Patent Document 1. The distortion-corrected laser is obtained by correcting the distortion of the coordinate data (x ′, y ′) representing the position in the XY coordinates on the workpiece 7 acquired in S11 by the following relational expressions (6) and (7). Coordinate data (x, y) representing the irradiation position PQ of the light Q is acquired.
x = x ′ + A (x ′) × y ′ ² × x ′ + B (x ′) × y ′ (6)
y = y ′ + A (y ′) × x ′ ² × y ′ + B (y ′) × x ′ (7)
Here, the coefficients (“A (x ′)” and “A (y ′)” and optical axis coordinates (“B (x ′)” and “B”) used in the above relational expressions (6) and (7). (Y ′) ”) has already been obtained for each wavelength of the laser beam Q, and is stored in the correction data table in the ROM 43.

  When the coordinate data (x ′, y ′) of the visible laser beam R and the laser beam Q is corrected by the relational expressions (6) and (7), the irradiation of the visible laser beam R and the laser beam Q as shown in FIG. The position is corrected. Specifically, when the laser beam Q is irradiated onto the workpiece 7 according to the coordinate data (x, y), the laser beam Q is irradiated onto PQ (x, y) shown in FIG. Further, when the visible laser beam R is irradiated onto the workpiece 7 according to the coordinate data (x, y), the PR (x, y) shown in FIG. 8 is irradiated.

In S13, the CPU 41 corrects the distortion-corrected coordinate data (x, y) with a correction formula. Specifically, the distortion corrected visible light using the coordinate data (x, y) representing the irradiation position PQ of the laser beam Q corrected in distortion in S12 and the following relational expressions (1) and (2). Coordinate data (X, Y) representing the irradiation position PR of the laser light R is obtained.
X = α (x) × x + β (x) (1)
Y = α (y) × y + β (y) (2)

  When the coordinate data (x, y) of the visible laser beam R is corrected by the relational expressions (1) and (2), the irradiation position of the visible laser beam R is corrected as shown in FIG. Specifically, when the visible laser beam R is irradiated on the workpiece 7 according to the coordinate data (X, Y), the PR (X, Y) shown in FIG. 9 is irradiated.

  Here, the coefficients (“α (x)” and “α (y)”) and optical axis coordinates (“β (x)” and “β (y)” used in the above relational expressions (1) and (2) are used. ) ") Is the above described [4. Determination of magnification and optical axis coordinates (1)] or [5. Determination of magnification and optical axis coordinates (Part 2)] has already been obtained and stored in the ROM 43.

  The storage form will be described below. In the present embodiment, the coefficients (“A” in the above relational expressions (6) and (7) for obtaining the coordinate data (x, y) representing the irradiation position PQ of the laser beam Q whose distortion has been corrected in S12. (X ') "and" A (y') "and optical axis coordinates (" B (x ') "and" B (y') ") are used for coordinate data (x ', y') The CPU 41 performs simple multiplication, and the CPU 41 obtains coordinate data (X, Y) representing the irradiation position PR of the visible laser light R whose distortion has been corrected in S13. ) (2) using the coefficients (“α (x)” and “α (y)”) and the optical axis coordinates (“β (x)” and “β (y)”), the coordinate data (x, y )

  In S14, the CPU 41 controls the galvano scanner 18 to convert the visible laser light R emitted from the visible semiconductor laser 28 into coordinate data (X, Y) representing the irradiation position of the visible laser light R corrected in S12 and S13. Based on the scan. Specifically, the CPU 41 outputs coordinate data (X, Y), galvano scanning speed information, and the like to the galvano controller 35. The galvano controller 35 calculates the drive angle, rotation speed, and the like of the galvano X-axis motor 31 and the galvano Y-axis motor 32 based on the coordinate data (X, Y), galvano scanning speed information, etc. Is output to the galvano driver 36. The galvano driver 36 drives and controls the galvano X-axis motor 31 and the galvano Y-axis motor 32 based on the motor drive information indicating the drive angle and the rotational speed input from the galvano controller 35, and two-dimensionally visible laser light R. Scan.

  In S15, the CPU 41 controls the galvano scanner 18 to scan the laser light Q emitted from the laser oscillator 21 based on the coordinate data (x, y) representing the irradiation position of the laser light Q corrected in S12. . Specifically, the CPU 41 outputs coordinate data (x, y), galvano scanning speed information, and the like to the galvano controller 35. The galvano controller 35 calculates the drive angle, rotation speed, and the like of the galvano X-axis motor 31 and galvano Y-axis motor 32 based on the coordinate data (x, y), galvano scanning speed information, etc. Is output to the galvano driver 36. The galvano driver 36 drives and controls the galvano X-axis motor 31 and the galvano Y-axis motor 32 based on the motor drive information indicating the drive angle and rotation speed input from the galvano controller 35, and performs two-dimensional scanning with the laser beam Q. To do. CPU41 complete | finishes a correction process after completion | finish of S15.

[7. Summary]
That is, in the laser processing system 1 according to the present embodiment, the coordinate data (x, y) representing the irradiation position PQ of the laser light Q on the processing object 7 and the irradiation position PR of the visible laser light R on the processing object 7. The positional deviation Z due to the chromatic aberration of the fθ lens 19 with respect to the coordinate data (X, Y) representing is corrected. The correction of the positional deviation Z is performed on the coordinate data (x, y) representing the irradiation position PQ of the laser beam Q on the processing object 7 that has a corresponding relationship with the irradiation position PR of the visible laser beam R on the processing object 7. This is performed based on the magnification (“α (x)” and “α (y)”) and the optical axis coordinates (“β (x)” and “β (y)”) (S13). Therefore, the positional deviation L due to the chromatic aberration of the fθ lens 19 between the marking (printing) processing laser beam Q and the guide visible laser beam R can be accurately corrected.

In the laser processing system 1 according to the present embodiment, distortion correction is performed using the following relational expressions (1) and (2) (S13).
X = α (x) × x + β (x) (1)
Y = α (y) × y + β (y) (2)
Therefore, in the distortion correction, only “α (x)” and “α (y)” that are constants representing magnification, and “β (x)” and “β (y)” that are constants representing optical axis coordinates are used. Since it is only stored in the ROM 43 and each calculation of X and Y has the same calculation amount regardless of the coordinate position, the time for the correction and the data to be stored for the correction should be reduced. Can do.

[8. Others]
In addition, this invention is not limited to the said embodiment, A various change is possible in the range which does not deviate from the meaning.
In S13, the coefficients (“α (x)” and “α (y)”) and optical axis coordinates (“β (x)” and “β (y)” used in each of the relational expressions (1) and (2) above are used. Each value of “)”) is described in [4. Determination of magnification and optical axis coordinates (1)] and [5. Determination of magnification and optical axis coordinates (2)] may be evaluated and selected from their distribution state. In such a case, α (x) = 1.021, α (y) = 1.003, β (x) = 0.094 [mm], and β (y) = 0.070 [mm].

  Further, the program of the flowchart shown in FIG. 5 may be stored in the ROM 63 of the print information creating apparatus 2. Alternatively, the program of the flowchart shown in FIG. 5 may be stored in the HDD 66, read from a storage medium such as the CD-ROM 57, or downloaded from a network such as the Internet (not shown). In these cases, the program of the flowchart shown in FIG. 5 is executed by the CPU 61 of the print information creating apparatus 2.

DESCRIPTION OF SYMBOLS 1 Laser processing system 2 Print information preparation apparatus 3 Laser processing apparatus 5 Laser processing apparatus main-body part 6 Laser controller 7 Processing target object 41, 61 CPU
42, 62 RAM
43, 63 ROM
52 Mouse 53 Keyboard 55 Input operation unit 56 Liquid crystal display (LCD)
66 HDD
101 Half mirror Q Laser light R Visible laser light

Claims (7)

A laser oscillator that emits laser light;
A visible laser light source that emits visible laser light having a wavelength different from that of the laser light;
A scanning unit that scans the laser beam emitted on the same axis or the visible laser beam; and
A condensing unit that emits the laser beam scanned by the scanning unit or the visible laser beam toward the processing target while condensing the visible laser beam;
Correction means for correcting a displacement between the irradiation position of the laser beam on the processing object and the irradiation position of the visible laser beam on the processing object;
The laser beam on the workpiece that is incident on the optical axis of the condensing unit when the origin is coordinate data representing the irradiation position of the laser beam on the workpiece that is incident on the central axis of the scanning unit The visible laser beam on the object to be processed from the optical axis coordinates to the optical axis coordinates representing the irradiation position of the laser beam and the distance from the optical axis coordinates to the coordinate data representing the irradiation position of the laser beam on the object to be processed A storage unit for storing a magnification of a distance to coordinate data representing an irradiation position of light;
First scanning control means for controlling the scanning unit and scanning the laser beam based on coordinate data representing an irradiation position of the laser beam;
Second scanning control means for controlling the scanning unit and scanning the visible laser light based on coordinate data representing the irradiation position of the visible laser light corrected by the correcting means,
The correction means includes coordinate data representing an irradiation position of the visible laser light on the processing object, coordinate data representing an irradiation position of the laser light on the processing object, and the storage unit stored in the storage unit. A laser processing apparatus, wherein correction is performed based on a magnification and the optical axis coordinates. The laser processing apparatus according to claim 1,
Coordinate data representing the irradiation position of the laser beam on the workpiece is (x, y),
Coordinate data representing the irradiation position of the visible laser beam on the workpiece after being corrected by the correcting means is (X, Y),
Constants representing the magnification are “α (x)” and “α (y)”,
When constants representing the optical axis coordinates are “β (x)” and “β (y)”,
X = α (x) × x + β (x),
Y = α (y) × y + β (y)
A laser processing apparatus characterized in that each of the following relational expressions is satisfied. A laser processing apparatus according to claim 2,
The distance between the irradiation position of the visible laser beam on the processing object and the irradiation position of the laser beam on the processing object after being calculated by each relational expression is calculated for a plurality of irradiation positions,
The maximum value is calculated among the calculated distances,
The maximum value is calculated for a plurality of combinations of the constants;
A laser processing apparatus, wherein the correction means uses a combination of the constants when the smallest value among the calculated maximum values is calculated. A laser processing apparatus according to claim 2,
The distance between the irradiation position of the visible laser beam on the processing object and the irradiation position of the laser beam on the processing object after being calculated by each relational expression is calculated for a plurality of irradiation positions,
The sum of the calculated distances is calculated,
The sum is calculated for a plurality of combinations of the constants;
A laser processing apparatus, wherein the correction means uses a combination of the constants when the smallest value among the calculated sums is calculated. A laser processing apparatus according to any one of claims 2 to 4,
A laser processing apparatus comprising: a receiving unit configured to receive a change of each constant. A control method executed by a computer for controlling a laser processing apparatus,
The laser processing apparatus is
A laser oscillator that emits laser light;
A visible laser light source that emits visible laser light;
A scanning unit that scans the laser beam emitted on the same axis or the visible laser beam; and
A condensing unit that emits the laser beam scanned by the scanning unit, or the visible laser beam toward a processing target while condensing the visible laser beam;
A storage unit for storing the magnification of the coordinate data representing the irradiation position of the visible laser light on the processing object and the optical axis coordinates which are in correspondence with the coordinate data representing the irradiation position of the laser light on the processing object When,
The laser beam on the workpiece that is incident on the optical axis of the condensing unit when the origin is coordinate data representing the irradiation position of the laser beam on the workpiece that is incident on the central axis of the scanning unit The visible laser beam on the object to be processed from the optical axis coordinates to the optical axis coordinates representing the irradiation position of the laser beam and the distance from the optical axis coordinates to the coordinate data representing the irradiation position of the laser beam on the object to be processed A magnification of the distance to the coordinate data representing the irradiation position of light, and
In the control method, coordinate data representing the irradiation position of the visible laser beam on the workpiece is
A correction step of correcting the coordinate data representing the irradiation position of the laser beam on the workpiece based on the magnification and the optical axis coordinate stored in the storage unit,
A first scanning control step of controlling the scanning unit and scanning the laser beam based on coordinate data representing an irradiation position of the laser beam;
A second scanning control step of controlling the scanning unit and scanning the visible laser light based on coordinate data representing an irradiation position of the visible laser light;
A control method characterized by comprising: A program executed by a computer that controls a laser processing apparatus,
The laser processing apparatus is
A laser oscillator that emits laser light;
A visible laser light source that emits visible laser light;
A scanning unit that scans the laser beam emitted on the same axis or the visible laser beam; and
A condensing unit that emits the laser beam scanned by the scanning unit, or the visible laser beam toward a processing target while condensing the visible laser beam;
A storage unit for storing the magnification of the coordinate data representing the irradiation position of the visible laser light on the processing object and the optical axis coordinates which are in correspondence with the coordinate data representing the irradiation position of the laser light on the processing object When,
The laser beam on the workpiece that is incident on the optical axis of the condensing unit when the origin is coordinate data representing the irradiation position of the laser beam on the workpiece that is incident on the central axis of the scanning unit The visible laser beam on the object to be processed from the optical axis coordinates to the optical axis coordinates representing the irradiation position of the laser beam and the distance from the optical axis coordinates to the coordinate data representing the irradiation position of the laser beam on the object to be processed A storage unit for storing the magnification of the distance to the coordinate data representing the irradiation position of the light and the optical axis coordinates;
The program is
The coordinate data representing the irradiation position of the visible laser beam on the workpiece, coordinate data representing the irradiation position of the laser beam on the workpiece, the magnification and the optical axis stored in the storage unit Correction processing for correcting based on the coordinates,
A first scanning control process for controlling the scanning unit and scanning the laser beam based on coordinate data representing an irradiation position of the laser beam;
And a second scanning control process for controlling the scanning unit to scan the visible laser light based on coordinate data representing an irradiation position of the visible laser light.

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