JP2015194352A - temperature sensor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a temperature sensor that enables a sensor line of a temperature detection element to be easily and surely fixed to a holding body, and enables reduction in manufacturing costs.SOLUTION: A temperature sensor comprises: a heat reception plate 3 that is housed in a protective tube 2; a temperature detection element 4 that has sensor lines 12a and 12b extending from a temperature metering unit 9 mounted to the heat reception plate 3; and a holding body 5 that holds the heat reception plate 3 and the temperature detection element 4 at a home position within the protective tube 2. The holding body 5 includes: a pair of bar-like members 15a and 15b that extend along a long-side direction of the protective tube 2, and are arrayed in a radial direction of the protective tube 2; a support member 16 that is fixed across between the bar-like members, and receives one end of the heat reception plate; and at least three line guides 30a, 30b and 30c that are interposed between the bar-like members at a position adjacent to the support member, and are arrayed at an interval in a long-side direction of the bar-like member. The sensor line is alternatively run among the line guides so as to be across among the line guides to be wired in a zigzag way.

Description

  The present invention relates to a temperature sensor used in, for example, a heat treatment apparatus that heats a semiconductor wafer.

  2. Description of the Related Art A heat treatment apparatus such as a semiconductor manufacturing apparatus includes a temperature sensor that measures an atmospheric temperature in a processing container in which a semiconductor wafer is accommodated. For example, as disclosed in Patent Document 1, a conventional temperature sensor is mounted on a protection tube installed in a processing container, a plurality of heat receiving plates housed in the protection tube, and each heat receiving plate. And a thermocouple. The heat receiving plate and the thermocouple are held at fixed positions inside the protective tube via the support mechanism.

  The support mechanism has a plurality of connecting tubules and support tubules. The connection tubule is an element constituting the skeleton of the support mechanism, and is integrally connected via a connection wire. The coupled connecting tube is inserted into the protective tube after being bent at the connecting wire in the middle.

  In other words, a pair of rod-like connecting portions are formed by bending a connecting wire between adjacent connecting tubules, and the connecting portions are arranged at intervals in the radial direction of the protective tube. The support thin tube is interposed between the connecting portions. The support thin tube is fastened to the connecting portion to keep the interval between the connecting portions constant.

  The heat receiving plate straddles between the connecting portions, and a plurality of portions on both sides thereof are bound to the connecting portions via wires. Furthermore, the thermocouple has two metal wires, and a junction for measuring the temperature of the metal wire is bonded to the surface of the heat receiving plate.

  According to the conventional temperature sensor, the metal wire of the thermocouple is attached to the connecting part of the support mechanism so that the tension does not reach the bonded portion between the thermocouple and the heat receiving plate even when tension is applied to the metal wire. It is tied up with wires.

JP2013-164341A

  According to the conventional temperature sensor, the operation of binding the heat receiving plate to the connecting portion and the operation of binding the metal wire of the thermocouple to the connecting portion are both manually performed. For this reason, it is inevitable that much labor and labor are required for the operation of winding the wire around the connecting portion, and this is one factor that causes an increase in the manufacturing cost of the temperature sensor.

  Furthermore, the operation | work which binds the heat receiving plate or the metal wire of a thermocouple to a connection part using a wire requires skill. For this reason, a problem arises that it is not easy for an operator who has not reached the skilled level to firmly fix the heat receiving plate or the metal wire of the thermocouple to the connecting portion.

  An object of the present invention is to obtain a temperature sensor in which any number of people can easily and reliably fix a sensor wire of a temperature detection element to a holding body, and reduce manufacturing costs.

  In order to achieve the above object, a temperature sensor according to one aspect of the present invention includes a protective tube installed in an atmosphere in which temperature is to be detected, a heat receiving plate accommodated in the protective tube, and the heat receiving plate. A temperature detection element that is mounted and has a sensor wire extending from the temperature measurement unit, and is fixed to the inside of the protective tube, and is configured to hold the heat receiving plate and the temperature detection element at a fixed position in the protective tube. And a holding body.

  The holding body extends in the longitudinal direction of the protective tube in the protective tube and is fixed across a pair of rod-shaped members arranged at intervals in the radial direction of the protective tube, and the rod-shaped member, A support member that receives one end of the heat receiving plate, and at least three line guides that are interposed between the rod-shaped members at positions adjacent to the support member and are arranged at intervals in the longitudinal direction of the rod-shaped members; ,including. The sensor wires are alternately wound around the line guides so as to straddle between the line guides, and are wired in a meandering manner at positions adjacent to the support member.

  According to a preferred embodiment of the present invention, the line guide protrudes from one rod-shaped member toward the other rod-shaped member, and the sensor wire is passed between the tip of each line guide and the other rod-shaped member. A gap is provided.

  According to a preferred embodiment of the present invention, one end of the heat receiving plate is movably held by the support member.

  According to a preferred embodiment of the present invention, the support member has a convex portion protruding toward the heat receiving plate, and the heat receiving plate has a fitting hole into which the convex portion fits.

  According to a preferred embodiment of the present invention, the fixing member further includes a fixing pin that continuously passes through one end of the support member and the heat receiving plate, and the fixing pin protrudes from the heat receiving plate toward the inner surface of the protective tube. .

  According to the present invention, since the sensor wire of the temperature detecting element is simply passed through the wire guide in a meandering manner, the free movement with respect to the holding body is limited, so that the sensor line can be easily placed at a desired position of the holding body. And it can fix reliably. Therefore, the productivity of the temperature sensor can be improved and the manufacturing cost can be reduced.

It is a front view which shows the external appearance of the temperature sensor which concerns on 1st Embodiment. (A) is sectional drawing of the temperature sensor which shows the detail of the A section of FIG. FIG. 2B is a cross-sectional view of the temperature sensor when FIG. 2A is viewed from the direction of arrow F2. It is sectional drawing of the temperature sensor which follows the F3-F3 line | wire of FIG. 2 (A). It is sectional drawing of the temperature sensor which shows the detail of the B section of FIG. It is sectional drawing of the temperature sensor which follows the F5-F5 line | wire of FIG. It is sectional drawing of the temperature sensor which follows the F6-F6 line | wire of FIG. It is a perspective view which shows roughly the positional relationship of the relay block to which the rod-shaped member was welded, and a cylindrical member. It is sectional drawing which shows the structure of the end cap fixed to the opening edge part of a protective tube. It is sectional drawing which fractured | ruptured the sensor line in the part which a sensor line penetrates a ferrule. It is sectional drawing of the temperature sensor which concerns on 2nd Embodiment. (A) is sectional drawing of the temperature sensor which concerns on 3rd Embodiment. FIG. 11B is a cross-sectional view of the temperature sensor when FIG. 11A is viewed from the direction of the arrow F11. (A) is sectional drawing of the temperature sensor which concerns on 4th Embodiment. FIG. 12B is a cross-sectional view of the temperature sensor when FIG. 12A is viewed from the direction of the arrow F12. It is sectional drawing of the temperature sensor which follows F13-F13 line | wire of FIG. 12 (A).

[First embodiment]
A first embodiment of the present invention will be described below with reference to FIGS.

  FIG. 1 shows an appearance of a multipoint temperature sensor 1 used in a heat treatment apparatus such as a semiconductor manufacturing apparatus. The temperature sensor 1 is an element for measuring the atmospheric temperature in the processing container in which the semiconductor wafer is accommodated, and is installed in the high-temperature atmosphere H in the processing container shown in FIG.

  The temperature sensor 1 includes a protective tube 2, a plurality of heat receiving plates 3, a plurality of thermocouples 4, a holding body 5, and an end cap 6 as main elements. As the protective tube 2, for example, a cylindrical quartz tube can be used. The protective tube 2 is not limited to a quartz tube, and may be made of another material having excellent heat resistance such as a SiC tube or an alumina tube.

  The protective tube 2 has a first straight tube portion 7a and a second straight tube portion 7b shorter than the first straight tube portion 7a. The first straight pipe portion 7a is erected vertically in the processing container, and its upper end is hermetically sealed. The second straight pipe portion 7b is bent at a right angle from the lower end of the first straight pipe portion 7a and extends horizontally.

  As shown in FIG. 2, the heat receiving plate 3 is accommodated in the first straight pipe portion 7 a of the protective tube 2. The heat receiving plate 3 is made of, for example, a silicon substrate, quartz, silicon carbide, carbon or the like, and is heated to a temperature equivalent to the high temperature atmosphere H by receiving heat of the high temperature atmosphere H. The heat receiving plates 3 are arranged at intervals in the longitudinal direction of the first straight pipe portion 7a so as to coincide with the position of the semiconductor wafer to be a temperature measurement object. The heat receiving plate 3 is a thin plate having a thickness of about 0.7 mm, for example, and has a flat mounting surface 3a.

  The thermocouple 4 is an example of a temperature detection element. The thermocouple 4 has two dissimilar metal wires 8a and 8b and a point-like temperature measuring unit 9 in which the tips of the metal wires 8a and 8b are joined. The temperature measuring unit 9 is mounted at the center of the mounting surface 3 a of the heat receiving plate 3. In the present embodiment, the temperature measuring unit 9 is adhered to the mounting surface 3 a using the sealant 10 and is kept in a state of being thermally connected to the heat receiving plate 3.

  Further, the metal wires 8a and 8b are each covered with an insulating sleeve 11. As the insulating sleeve 11, for example, a woven fabric made of alumina or ceramic fiber is used. Thereby, the metal wires 8a and 8b covered with the insulating sleeve 11 constitute two sensor wires 12a and 12b having both heat resistance and flexibility. The sensor wires 12a and 12b are led from the first straight pipe portion 7a to the second straight pipe portion 7b.

  The holding body 5 is accommodated in the first straight pipe portion 7a so as to hold the heat receiving plate 3 on which the thermocouple 4 is mounted at a fixed position of the first straight pipe portion 7a. Specifically, since the thermocouple 4 needs to accurately detect a temperature change of a semiconductor wafer that is a temperature measurement object, the holding body 5 has a heat receiving plate 3 on which the thermocouple 4 is mounted as a temperature measurement object. The position of the heat receiving plate 3 is accurately defined so as to face the object.

  Since the structure which hold | maintains the several heat receiving plate 3 is mutually common, the heat receiving plate 3 located in the uppermost part of the 1st straight pipe part 7a is demonstrated as a representative. 2 and 3 show details of the A portion of FIG. 1 which is the upper end portion of the first straight pipe portion 7a.

  As shown in FIGS. 1 to 7, the holding body 5 includes a pair of rod-like members 15 a and 15 b, a plurality of support members 16 and a relay block 17. As the rod-shaped members 15a and 15b, for example, solid round bars made of quartz glass are used. The rod-like members 15a and 15b extend straight in the longitudinal direction of the first straight pipe portion 7a of the protective tube 2 and are arranged in parallel with a gap in the radial direction of the first straight pipe portion 7a. Yes.

  The support member 16 is made of, for example, a quartz glass plate, and is disposed at an interval in the longitudinal direction of the first straight pipe portion 7a so as to face the semiconductor wafer that is a temperature measurement object. The support member 16 includes a flat first surface 18a facing the rod-like members 15a and 15b, a second surface 18b facing the inner surface of the first straight pipe portion 7a on the opposite side of the first surface 18a, A pair of third surfaces 18c and 18d extending from both side edges of the second surface 18b toward both side edges of the first surface 18a. The third surfaces 18c and 18d are inclined so as to move away from both side edges of the second surface 18b toward both side edges of the first surface 18a. For this reason, the support member 16 is formed in a tapered shape from the first surface 18a toward the second surface 18b so as to avoid interference with the inner surface of the first straight pipe portion 7a.

  The support member 16 is placed parallel to the rod-shaped members 15a and 15b with the first surface 18a facing the rod-shaped members 15a and 15b, and the end of the support member 16 is the outer peripheral surface of the rod-shaped members 15a and 15b. It is thermally welded to.

  More specifically, the opposing portions of the both end portions of the support member 16 and the rod-like members 15a and 15b are melted by the flame ejected from the burner, and the outer peripheral surfaces of the rod-like members 15a and 15b from the both end portions of the support member 16 A welded portion 20 is formed. As a result, the support member 16 is fixed so as to straddle between the rod-shaped members 15a and 15b, and a gap 21 is formed between the first surface 18a of the support member 16 and the outer peripheral surface of the rod-shaped members 15a and 15b. . The gap 21 is formed slightly larger than the thickness t of the heat receiving plate 3.

  The relay block 17 is made of, for example, quartz glass, and is welded so as to abut the ends of the rod-like members 15a and 15b. As shown in FIG. 4, the relay block 17 is located at the corner 22 of the protective tube 2 defined by the first straight pipe portion 7a and the second straight pipe portion 7b.

  The relay block 17 has a tip surface 23 extending in a direction perpendicular to the rod-like members 15a and 15b on the opposite side of the rod-like members 15a and 15b, and a support surface perpendicular to the tip surface 23 and facing the second straight pipe portion 7b. 24 and a surface 25 located on the opposite side of the support surface 24. The front end surface 23 of the relay block 17 is abutted against the inner surface of the corner portion 22 of the protective tube 2 on the axis O1 of the first straight tube portion 7a. Thereby, the position of the holding body 5 with respect to the 1st straight pipe part 7a is prescribed | regulated.

  Further, a pair of wire insertion holes 26 a and 26 b are formed in the relay block 17. The wire insertion holes 26a and 26b extend in the longitudinal direction of the second straight pipe portion 7b, and are arranged at intervals in the radial direction of the second straight pipe portion 7b. The wire insertion holes 26 a and 26 b are opened on the support surface 24 and the surface 25 of the relay block 17.

  A connecting wire 27 having heat resistance is inserted into the wire insertion holes 26a and 26b. The connecting wire 27 crosses the surface 25 of the relay block 17 so as to straddle between the wire insertion holes 26a and 26b, and is led to the second straight pipe portion 7b through the wire insertion holes 26a and 26b.

  As shown in FIGS. 2 and 3, the heat receiving plate 3 is inserted into the gap 21 between the rod-shaped members 15 a and 15 b and the support member 16. In the present embodiment, the heat receiving plate 3 is along the outer peripheral surface of the rod-shaped members 15 a and 15 b, and the edge 3 b on the tip side along the insertion direction of the heat receiving plate 3 is abutted against the welded portion 20.

  At this time, since the dimension of the gap 21 is larger than the thickness t of the heat receiving plate 3, one end portion of the heat receiving plate 3 is received by the support member 16 so that it can move to some extent. Further, the mounting surface 3 a of the heat receiving plate 3 to which the thermocouple 4 is bonded is located on the opposite side of the support member 16. Therefore, the temperature measuring unit 9 of the thermocouple 4 is located between the rod-like members 15a and 15b. At the same time, the sensor wires 12a and 12b are wired between the rod-like members 15a and 15b.

  As shown in FIG. 2, the holding body 5 further includes first to third line guides 30a, 30b, and 30c. The first to third wire guides 30a, 30b, 30c are elements for fixedly determining the positions of the sensor wires 12a, 12b with respect to the holding body 5, and are made of, for example, a round bar made of quartz glass. . The first to third line guides 30a, 30b, and 30c are interposed between the rod-shaped members 15a and 15b at positions adjacent to the support member 16, and are spaced in the longitudinal direction of the rod-shaped members 15a and 15b. Are arranged.

  Specifically, the first line guide 30a is welded to one rod-like member 15b below the support member 16. The first line guide 30a protrudes from one rod-like member 15b toward the other rod-like member 15a. The second line guide 30b is welded to the other rod-like member 15a immediately below the first line guide 30a. The second line guide 30b protrudes from the other rod-shaped member 15a toward the one rod-shaped member 15b. Further, the third line guide 30c is welded to one rod-like member 15b immediately below the second line guide 30b. The third line guide 30c protrudes from one rod-like member 15b toward the other rod-like member 15a.

  According to this embodiment, between the protruding end of the first line guide 30a and the other rod-shaped member 15a, between the protruding end of the second line guide 30b and the one rod-shaped member 15b, and the third line guide. A gap 31 for passing the sensor wires 12a and 12b of the thermocouple 4 is formed between 30c and the other rod-shaped member 15a.

  As best shown in FIG. 2A, the sensor wires 12a and 12b of the thermocouple 4 are guided to the first to third wire guides 30a, 30b and 30c through the back of the support member 16. That is, the sensor wires 12a and 12b are routed from the back of the first line guide 30a to the front of the second line guide 30b through the gap 31 between the second line guide 30b and the rod-like member 15b. Further, the sensor wires 12a and 12b are routed behind the third line guide 30c through the gap 31 between the third line guide 30c and the rod-shaped member 15a.

  For this reason, the sensor wires 12a and 12b are alternately hung on the outer peripheral surfaces of the first to third line guides 30a, 30b, and 30c so as to straddle between the first to third line guides 30a, 30b, and 30c. Has been passed. Thereby, the sensor wires 12a and 12b extending from the heat receiving plate 3 are wired so as to bend in a meandering manner at positions adjacent to the support member 16, and the rod-like members 15a and 15b are constrained in a free movement state. Is held between.

  As a result, the heat receiving plate 3 to which the thermocouple 4 is bonded is held by the holding body 5 via the sensor wires 12a and 12b so as not to come out of the gap 21.

  As shown in FIGS. 4 to 7, a pair of cylindrical members 33 a and 33 b are accommodated inside the second straight pipe portion 7 b of the protective tube 2. The cylindrical members 33a and 33b are made of magnetic tubes, for example. The cylindrical members 33a and 33b extend in the longitudinal direction of the second straight pipe portion 7b, and are arranged at intervals in the radial direction of the second straight pipe portion 7b.

  One ends of the cylindrical members 33 a and 33 b are abutted against the support surface 24 of the relay block 17 so as to match the wire insertion holes 26 a and 26 b of the relay block 17. The connecting wire 27 passed through the wire insertion holes 26a and 26b is inserted into the cylindrical members 33a and 33b, and the relay block 17 and the cylindrical members 33a and 33b are connected to each other via the connecting wire 27. Yes.

  As shown in FIG. 8, the cylindrical members 33a and 33b through which the connecting wire 27 is passed protrude from the opening end 34 of the second straight pipe portion 7b to the outside of the protective tube 2. Further, the sensor wires 12a and 12b of the plurality of thermocouples 4 are drawn out of the protective tube 2 from the opening end 34 of the second straight tube portion 7b as a bundle. In FIG. 8, only one sensor line 12a is shown as a representative in order to prevent the drawing from becoming complicated.

  As shown in FIG. 8, the end cap 6 is fixed to the open end 34 of the second straight pipe portion 7 b of the protective tube 2. The end cap 6 includes a joint pipe 40, a joint cap 41, and a ferrule 42 as main elements.

  The joint pipe 40 is made of a metal material such as stainless steel. The joint pipe 40 includes a main body 43 that is coaxially fixed to the opening end 34 of the second straight pipe portion 7b by means of adhesion or the like, and a cylindrical connection that protrudes coaxially from the tip of the main body 43. Part 44. The connecting portion 44 has a smaller diameter than the main body portion 43, and a male screw portion 45 is formed on the outer peripheral surface of the connecting portion 44.

  Further, the joint pipe 40 has a first hollow portion 47 and a second hollow portion 48. The first hollow part 47 communicates with the second straight pipe part 7 b of the protective tube 2. The cylindrical members 33 a and 33 b protruding from the opening end 34 of the second straight pipe portion 7 b are abutted against the bottom of the first hollow portion 47 through the first spacer ring 49. Therefore, the cylindrical members 33a and 33b are interposed between the relay block 17 and the joint pipe 40 to support the relay block 17 from the direction of the second straight pipe portion 7b.

  The second hollow portion 48 includes a small diameter portion 48a and a large diameter portion 48b. The small diameter portion 48 a is opened coaxially at the bottom of the first hollow portion 47. The large diameter portion 48 b is opened at the distal end surface of the connecting portion 44. A tapered portion 50 is formed at a boundary portion between the small diameter portion 48a and the large diameter portion 48b. The tapered portion 50 has a pressing surface 51 that is inclined so as to expand from the small diameter portion 48a toward the large diameter portion 48b.

  The joint cap 41 is made of a metal material such as stainless steel. The joint cap 41 has a concave portion 52 into which the connecting portion 44 of the joint pipe 40 enters, and a through hole 53 opened at the bottom of the concave portion 52. A female screw portion 54 is formed on the inner peripheral surface of the recess 52. The female thread portion 54 of the joint cap 41 is screwed into the male thread portion 45 of the joint pipe 40. By this screwing, the joint pipe 40 and the joint cap 41 are connected coaxially.

  The ferrule 42 is accommodated in the second hollow portion 48 of the joint cap 41. The ferrule 42 has a cylindrical shape, and is made of, for example, a rubber-like elastic body that can be elastically deformed. The ferrule 42 is interposed between the second spacer ring 57 and the pressing surface 51 of the tapered portion 50. The second spacer ring 57 is supported by the bottom of the recess 52 of the joint cap 41 and enters the large diameter portion 48 b of the second hollow portion 48.

  As representatively showing one sensor wire 12a in FIG. 8, the plurality of sensor wires 12a and 12b led out in a bundle from the open end 34 of the second straight pipe portion 7b are the first spacers. The ring 49, the small diameter portion 48 a of the second hollow portion 48, the ferrule 42, the second spacer ring 57, and the through hole 53 of the joint cap 41 are led out of the end cap 6.

  According to this embodiment, at least at positions corresponding to the ferrule 42 and the second spacer ring 57, the insulating sleeve 11 is removed from the sensor wire 12a as shown in FIG. The insulating tube 58 is exposed.

  Further, although not shown in the figure, the first spacer ring 49 and the small diameter portion 48a of the second hollow portion 48 are also provided in the connecting wire 27 passed through the cylindrical members 33a and 33b, similarly to the sensor wires 12a and 12b. The ferrule 42, the second spacer ring 57, and the through hole 53 of the joint cap 41 are led out of the end cap 6.

  The sensor wires 12a and 12b and the connecting wire 27 led out of the end cap 6 are formed by using a protective tube 60, a first heat shrinkable tube 61 and a second heat shrinkable tube 62 using Teflon (registered trademark). The joint cap 41 is sealed.

  In such an end cap 6, when the joint cap 41 is tightened, the joint cap 41 moves in a direction approaching the joint pipe 40. Accordingly, the second spacer ring 57 pushes the ferrule 42 toward the tapered portion 50, and the ferrule 42 is pressed against the pressing surface 51 of the tapered portion 50.

  As a result, the ferrule 42 is forcibly elastically deformed so as to reduce the inner diameter, and the sensor wires 12 a and 12 b and the connecting wire 27 inserted inside the ferrule 42 are tightened by the ferrule 42.

  In particular, in this embodiment, at the position corresponding to the ferrule 42, the insulating sleeve 11 is removed from the sensor wires 12a and 12b, and the polyimide insulating tube 58 is exposed. Since the insulating tube 58 made of polyimide is more easily adapted to the ferrule 42 than the insulating sleeve 11 using a woven fabric, the adhesion between the ferrule 42 and the insulating tube 58 is improved.

  Therefore, the sensor wires 12a and 12b drawn from the protective tube 2 can be tightly fixed at the position of the end cap 6, and even if the tension for pulling the sensor wires 12a and 12b out of the protective tube 2 is applied to the sensor wire 12a, , 12b, the tension does not reach the bonded portion between the temperature measuring section 9 of the thermocouple 4 and the heat receiving plate 3.

  Therefore, it can prevent that the temperature measuring part 9 of the thermocouple 4 peels from the heat receiving plate 3, or the temperature measuring part 9 and the heat receiving plate 3 are damaged.

  Next, a procedure for assembling the temperature sensor 1 will be briefly described.

  In a stage before the heat receiving plate 3 and the holding body 5 to which the thermocouple 4 is bonded are accommodated in the protective tube 2, the end (upper end) of the first straight tube portion 7a of the protective tube 2 is opened. It is in. In this state, the holding body 5 holding the heat receiving plate 3 is inserted into the first straight pipe portion 7a from the opening end of the first straight pipe portion 7a in a posture with the relay block 17 at the head. At this time, the connecting wire 27 is passed through the wire insertion holes 26a and 26b of the relay block 17 in advance.

  When the relay block 17 reaches the corner portion 22 of the protective tube 2, the connecting wire 27 drawn out from the wire insertion holes 26a and 26b and the bundled sensor wires 12a and 12b are opened in the second straight tube portion 7b. It is pulled out of the protective tube 2 through the end 34.

  Thereafter, the two cylindrical members 33a and 33b are inserted into the second straight pipe portion 7b from the opening end 34 of the second straight pipe portion 7b, and the cylindrical members 33a and 33b are inserted into the relay block 17. It abuts against the support surface 24. When the cylindrical members 33a and 33b are inserted into the second straight pipe portion 7b, the connecting wire 27 drawn from the wire insertion holes 26a and 26b is passed through the cylindrical members 33a and 33b.

  Thereafter, the end (upper end) of the first straight pipe portion 7a is heated and sealed in a hemispherical shape, and the joint pipe 40 of the end cap 6 is bonded to the open end 34 of the second straight pipe portion 7b. To do. Thereby, the cylindrical members 33a and 33b are sandwiched between the relay block 17 of the holding body 5 and the first spacer ring 49 of the end cap 6, and the position of the holding body 5 with respect to the protective tube 2 is determined.

  Thereafter, the joint cap 41 of the end cap 6 is tightened, and the ferrule 42 is forcibly elastically deformed. Thereby, the plurality of sensor wires 12a and 12b and the connecting wire 27 that are bundled are fastened and fixed by the ferrule 42, and a series of assembly operations of the temperature sensor 1 is completed.

  According to the first embodiment, the sensor wires 12a and 12b of the thermocouple 4 extending from the heat receiving plate 3 are simply meandered between the first to third wire guides 30a, 30b and 30c, so that the sensor wires 12a , 12b can be restrained. For this reason, the troublesome and troublesome work of tying the sensor wires 12a and 12b to the rod-like members 15a and 15b with dedicated wires becomes unnecessary, and the sensor wires 12a and 12b are simply and reliably fixed to the desired position of the holding body 15. be able to.

  Moreover, in the first embodiment, there are gaps 31 between the second line guide 30b and the rod-like member 15b and between the third line guide 30c and the rod-like member 15a, respectively. By passing the sensor wires 12a and 12b, the sensor wires 12a and 12b can be guided to the outer peripheral surface of the second line guide 30b and the outer peripheral surface of the third line guide 30b. Therefore, the work at the time of wiring the sensor wires 12a and 12b in a meandering manner can be easily performed. Therefore, the productivity of the temperature sensor 1 can be improved and the manufacturing cost can be reduced.

  At the same time, the first to third wire guides 30a, 30b, and 30c that meander the sensor wires 12a and 12b are an integral structure with the holding body 5. Therefore, the wires that fix the sensor wires 12a and 12b to the holding body 5 are used. Alternatively, components other than the holding body 5 such as a clip can be omitted. As a result, the number of parts of the temperature sensor 1 can be reduced, which also has the advantage of contributing to the cost reduction of the temperature sensor 1.

  In addition, according to the first embodiment, the heat receiving plate 3 to which the thermocouple 4 is bonded cannot be dropped into the gap 21 between the support member 16 and the rod-shaped members 15a and 15b via the sensor wires 12a and 12b. The heat receiving plate 3 itself is not fixed to the support member 16.

  In other words, when the sensor wires 12a and 12b expand under the influence of the heat of the high-temperature atmosphere H, the heat receiving plate 3 moves to some extent with respect to the support member 16 so as to absorb the thermal expansion of the sensor wires 12a and 12b. It is kept in the situation that you get.

  For this reason, even if the sensor wires 12a and 12b are thermally expanded, it is possible to prevent stress from being generated in the bonded portion between the temperature measuring unit 9 and the heat receiving plate 3. Therefore, it can avoid that the temperature measuring part 9 peels from the heat receiving plate 3, or the temperature measuring part 9 and the heat receiving plate 3 receive damage, and the temperature sensor 1 with high quality can be obtained.

[Second Embodiment]
FIG. 10 discloses a second embodiment.

  The second embodiment is different from the first embodiment in matters relating to the first to third line guides 30a, 30b, and 30c that meander the sensor wires 12a and 12b. Other configurations of the temperature sensor 1 are the same as those in the first embodiment. For this reason, in the second embodiment, the same components as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted.

  As shown in FIG. 10, the first to third line guides 30a, 30b, 30c are fixed across the rod-shaped members 15a, 15b. That is, one end of the first to third line guides 30a, 30b, 30c is abutted against and welded to one rod-like member 15b, and the other end of the first to third line guides 30a, 30b, 30c is the other rod-like member. It is welded against 15a.

  In the second embodiment, the sensor wires 12 a and 12 b of the thermocouple 4 drawn out from the heat receiving plate 3 are guided to the first to third wire guides 30 a, 30 b, and 30 c through the back of the support member 16. That is, the sensor wires 12a and 12b are routed forward of the second line guide 30b through a square region surrounded by the first line guide 30a, the second line guide 30b, and the rod-like members 15a and 15b. Further, the sensor wires 12a and 12b are routed behind the third line guide 30c through a square region surrounded by the second line guide 30b, the third line guide 30c, and the rod-like members 15a and 15b.

  For this reason, the sensor wires 12a and 12b are alternately hung on the outer peripheral surfaces of the first to third line guides 30a, 30b, and 30c so as to straddle between the first to third line guides 30a, 30b, and 30c. Has been passed. Thereby, the sensor wires 12a and 12b extending from the heat receiving plate 3 are wired so as to bend in a meandering manner at positions adjacent to the support member 16, and the rod-like members 15a and 15b are constrained in a free movement state. Is held between.

  According to the second embodiment, the sensor wires 12a and 12b of the thermocouple 4 extending from the heat receiving plate 3 are simply meandered between the first to third wire guides 30a, 30b, and 30c, so that the sensor Free movement of the lines 12a, 12b can be constrained. Therefore, the sensor wires 12a and 12b can be easily and reliably fixed to a desired position of the holding body 15, and the same effect as in the first embodiment can be obtained.

[Third embodiment]
FIG. 11 discloses a third embodiment.

  The third embodiment is different from the first embodiment in that the heat receiving plate 3 is fixed to the support member 16. Other configurations of the temperature sensor 1 are the same as those in the first embodiment. Therefore, in the third embodiment, the same components as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted.

  As shown in FIG. 11, the support member 16 has a convex portion 71 at a position away from the welded portion 20. The convex portion 71 protrudes from the support member 16 between the rod-shaped members 15a and 15b. Further, the convex portion 71 has a surface 72 curved in a hemispherical shape.

  On the other hand, the heat receiving plate 3 has a circular fitting hole 73. The fitting hole 73 is provided in the heat receiving plate 3 at a position overlapping the support member 16. For this reason, when the heat receiving plate 3 is inserted into the gap 21 between the rod-like members 15a and 15b and the support member 16, the surface 72 of the convex portion 71 is exposed to the heat receiving plate when the edge 3b of the heat receiving plate 3 hits the welded portion 20. 3 is fit into the three fitting holes 73. Thereby, the heat receiving plate 3 is fixed to the support member 16 so as not to come out of the gap 21.

  According to the third embodiment, the heat receiving plate 3 itself to which the thermocouple 4 is bonded is fixed to the support member 16. For this reason, when the sensor wires 12a and 12b expand under the influence of the high temperature atmosphere H, the heat receiving plate 3 cannot move so as to absorb the thermal expansion of the sensor wires 12a and 12b.

  However, since the sensor wires 12a and 12b of the thermocouple 4 are held by the holding body 5 by meandering through the first to third wire guides 30a, 30b and 30c, the sensor wires 12a and 12b are heated. When expanded, the sensor wires 12a and 12b can be bent in a meandering region so as to absorb thermal expansion.

  Therefore, even if the heat receiving plate 3 is fixed to the support member 16, the sensor wires 12 a and 12 b meander, and stress is generated at the bonding portion between the temperature measuring unit 9 of the thermocouple 4 and the heat receiving plate 3. Can be prevented. For this reason, it can avoid that the temperature measuring part 9 peels from the heat receiving plate 3, or the temperature measuring part 9 and the heat receiving plate 3 receive damage, and the temperature sensor 1 with sufficient quality can be obtained.

[Fourth Embodiment]
12 and 13 disclose a fourth embodiment.

  The fourth embodiment is different from the third embodiment in the configuration for fixing the heat receiving plate 3 to the support member 16. Other configurations of the temperature sensor 1 are the same as those in the first embodiment. Therefore, in the fourth embodiment, the same components as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted.

  As shown in FIGS. 12 and 13, the support member 16 has a first pin hole 81 at a position away from the welded portion 20. In addition, the heat receiving plate 3 has a second pin hole 82. When the heat receiving plate 3 is inserted into the gap 21 between the rod-shaped members 15a and 15b and the support member 16, and the edge 3b of the heat receiving plate 3 hits the welded portion 20, the second pin hole 82 It matches with the pin hole 81.

  The fixing pin 83 is inserted between the first pin hole 81 and the second pin hole 82. The fixing pin 83 is closely fitted into the first pin hole 81 and the second pin hole 82 and is held by both the support member 16 and the heat receiving plate 3. For this reason, the heat receiving plate 3 is fixed to the support member 16 via the fixing pin 83 so as not to come out of the gap 21.

  Further, the fixing pin 83 has a protruding portion 84 that protrudes behind the heat receiving plate 3. The protruding portion 84 penetrates between the sensor wires 12a and 12b, and the tip thereof is close to the inner surface of the first straight tube portion 7a of the protective tube 2. Therefore, the fixing pin 83 has a total length slightly smaller than the inner diameter of the first straight pipe portion 7a.

  According to the fourth embodiment, the heat receiving plate 3 itself to which the thermocouple 4 is bonded is fixed to the support member 16 via the fixing pin 83. Therefore, when the sensor wires 12a and 12b expand under the influence of the high temperature atmosphere H, the heat receiving plate 3 cannot move so as to absorb the thermal expansion of the sensor wires 12a and 12b.

  However, since the sensor wires 12a and 12b of the thermocouple 4 are held by the holding body 5 by meandering through the first to third wire guides 30a, 30b and 30c, the sensor wires 12a and 12b are heated. When expanded, the sensor wires 12a and 12b can be bent in a meandering region so as to absorb thermal expansion.

  Therefore, even if the heat receiving plate 3 is fixed to the support member 16, the sensor wires 12 a and 12 b meander, and stress is generated at the bonding portion between the temperature measuring unit 9 of the thermocouple 4 and the heat receiving plate 3. Can be prevented. For this reason, it can avoid that the temperature measuring part 9 peels from the heat receiving plate 3, or the temperature measuring part 9 and the heat receiving plate 3 receive damage, and the temperature sensor 1 with sufficient quality can be obtained.

  Furthermore, the fixing pin 83 has a protruding portion 84 that protrudes behind the heat receiving plate 3, and the tip of the protruding portion 84 is maintained in a state of being close to the inner surface of the first straight pipe portion 7 a. For this reason, for example, even if the fixing pin 83 tries to move in the axial direction, the tip of the fixing pin 83 hits the inner surface of the first straight pipe portion 7a, and the movement of the fixing pin 83 is restricted. Therefore, the fixing pin 83 can be prevented from falling off from the support member 16 and the heat receiving plate 3, and the fixed state between the heat receiving plate 3 and the support member 16 can be reliably maintained.

  Although several embodiments of the present invention have been described, these embodiments are presented by way of example and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the scope of the invention.

  For example, the number of line guides that meander the sensor lines is not limited to three, and may be four or more depending on the length of the rod-shaped member.

  Furthermore, the rod-shaped member constituting the holding body is not limited to a solid round bar, and may be composed of, for example, a solid square bar or a hollow pipe material.

  DESCRIPTION OF SYMBOLS 1 ... Temperature sensor, 2 ... Protective tube, 3 ... Heat receiving plate, 4 ... Temperature detection element (thermocouple), 5 ... Holding body, 9 ... Temperature measuring part, 12a, 12b ... Sensor wire, 15a, 15b ... Rod-shaped member, 16: Support members, 30a, 30b, 30c: First to third line guides

Claims (8)

A protective tube installed in the atmosphere to detect the temperature;
A heat receiving plate housed in the protective tube;
A temperature detecting element mounted on the heat receiving plate and having a sensor wire extending from the temperature measuring unit;
A temperature sensor that is fixed inside the protective tube and configured to hold the heat receiving plate and the temperature detection element at a fixed position in the protective tube,
The holder is
A pair of rod-shaped members extending in the longitudinal direction of the protective tube and arranged in the radial direction of the protective tube within the protective tube,
A support member fixed between the rod-shaped members and receiving one end of the heat receiving plate;
Including at least three line guides interposed between the rod-shaped members at positions adjacent to the support member and arranged at intervals in the longitudinal direction of the rod-shaped members,
A temperature sensor in which the sensor wires are alternately wound around the line guides so as to straddle between the line guides and are arranged in a meandering manner at positions adjacent to the support member.   The said line guide is protruded toward the other rod-shaped member from one rod-shaped member, and the clearance gap which lets the said sensor wire pass between the front-end | tip of each line guide and said other rod-shaped member was provided. The temperature sensor described in 1.   The temperature sensor according to claim 1, wherein the line guide is fixed between the rod-shaped members.   The temperature sensor according to any one of claims 1 to 3, wherein one end portion of the heat receiving plate is movably held by the support member.   The temperature sensor according to claim 1, wherein one end of the heat receiving plate is fixed to the support member.   The temperature sensor according to claim 5, wherein the support member has a convex portion protruding toward the heat receiving plate, and the heat receiving plate has a fitting hole into which the convex portion is fitted.   The temperature sensor according to claim 6, wherein the convex portion has a spherically curved surface.   The temperature sensor according to claim 5, further comprising a fixing pin continuously passing through one end of the support member and the heat receiving plate, wherein the fixing pin protrudes from the heat receiving plate toward the inner surface of the protective tube.

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