CN107014520A - A kind of capillary type high temperature fiber grating temperature sensor and preparation method thereof - Google Patents

A kind of capillary type high temperature fiber grating temperature sensor and preparation method thereof Download PDF

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Publication number
CN107014520A
CN107014520A CN201710353372.6A CN201710353372A CN107014520A CN 107014520 A CN107014520 A CN 107014520A CN 201710353372 A CN201710353372 A CN 201710353372A CN 107014520 A CN107014520 A CN 107014520A
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capillary
fiber
optical fiber
fiber grating
temperature
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陈爽
隋广慧
武洪波
江琴
张慧君
吴天
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Beijing Changcheng Institute of Metrology and Measurement AVIC
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Beijing Changcheng Institute of Metrology and Measurement AVIC
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K11/00Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
    • G01K11/32Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in transmittance, scattering or luminescence in optical fibres

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  • General Physics & Mathematics (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)

Abstract

The present invention relates to a kind of capillary type high temperature fiber grating temperature sensor and preparation method thereof, available for the accurate measurement of the high-temperature temperatures such as the structural member surface air temperature and current temperature in the fields such as Aero-Space, weapons, nuclear industry, belong to Fibre Optical Sensor field of measuring technique.The sensor includes the fiber grating as temperature survey sensing element and the nonmetallic capillary as encapsulating structure, the integrative packaging of optical fiber and capillary is realized using welding method, reduce sensor construction size, reduce the influence of thermal mismatching between encapsulating structure and optical fiber, avoid easy aging and creep caused by adhesive, and soften the problem of even decomposing under high temperature, improve the operating temperature range of sensor, and the long-time stability and reliability worked under the adverse circumstances such as high temperature, available for Aero-Space, weapons, the accurate measurement of the high-temperature temperatures such as the structural member surface air temperature and current temperature in the fields such as nuclear industry.

Description

A kind of capillary type high temperature fiber grating temperature sensor and preparation method thereof
Technical field
The present invention relates to a kind of capillary type high temperature fiber grating temperature sensor and preparation method thereof, available for aviation boat My god, the accurate measurement of the high-temperature temperature such as structural member surface air temperature and current temperature in the field such as weapons, nuclear industry, belong to optical fiber Sensing measurement technical field.
Technical background
, it is necessary to structural member or air-flow isothermal in the application of the extreme environments such as Aero-Space, weapons, nuclear industry Spend the measurement stablize, its operating temperature majority is higher than 300 DEG C, apply individually such as even more than 1000 DEG C of engine with On, simultaneously as the influence of limitation and electromagnetic interference to arrangement of temperature sensor size etc., such as thermocouple and pyrometer It is often difficult to use in such adverse circumstances etc. conventional sensors.
Fiber grating is the sensing element built in a fiber, is detected by the reflectance spectrum to specific wavelength, can To realize the measurement to environment temperature, and optical signal transmission mode makes the advantage that it possesses electromagnetism interference.By using temperature The difference of degree and working environment, optical fiber can use silica fibre or possess the crystal type optical fiber such as more dystectic sapphire, light Fine grating can use the mode of scribing of PRK or femtosecond laser realize, meanwhile, fiber grating is due to its sensitive member The small and reusable advantage of part size can preferably realize the measurement in temperature field.But, if in installation or embedded high temperature etc. Before adverse circumstances, it is necessary to which fiber grating is further encapsulated, temperature sensor is formed, for being used under hot environment Fiber-optical grating temperature sensor, its durability and life-span depend not only on fiber grating in itself, and depending on sensor envelope The implementation method of the design of assembling structure, the selection of encapsulating material and packaging technology.
Therefore, having carried out many researchs encapsulated for fiber-optical grating temperature sensor both at home and abroad, such as:Wang Hong-Liang et al. carries The double optical fiber grating sensor gone out.Using base material of the high temperature constant elastic alloy as fiber grating, and by bonded adhesives, it will press Power sensor fibre grating and temperature sensing optical fiber grating are packaged as a whole with base material, constitute temperature and pressure double optical fiber grating Sensor, the structure can realize temperature survey and compensation at 315 DEG C;The novel fire resistant fiber grating that Zhang Zhiyu et al. is proposed Temperature sensor encapsulates grating with heat-insulating material, is connected by lever construction with aluminium bar, and producing strain by grating realizes height Temperature measurement, the structure measurement temperature is up to 310 DEG C;VenkataReddyMamidi et al. propose it is a kind of based on fiber grating and The fibre optic temperature sensor of aln structure, aluminium nitride long capillary tube 20cm, diameter 2mm, due to aluminium nitride it is more crisp, therefore again Secondary to be encapsulated into a stainless steel tube, its temperature in use is 20 DEG C -650 DEG C;Amir Azhari et al. propose a kind of based on light The fibre optic temperature sensor of fine grating and zirconia ceramics pipe, the sensor temperature in use is more than 600 DEG C;Application No. 201210264642.3 patent provides the high-temperature resistant optical fiber grating sensor and its manufacture method of a kind of metal package, and this is special Profit uses the regeneration fiber grating obtained through the high temperature anneal as sensing element, with magnetically controlled sputter method in optical fiber surface shape Optical fiber is embedded in flexible structure metallic substrates into adhesive linkage and conductive layer, and by electro-plating method, metal package is realized, passed Sensor has good TEMP performance in 20-600 DEG C;The patent of Application No. 201080015823.1 discloses one kind Temperature sensor encapsulation including noble metal pipeline and two optical fiber, passes through high-temperature ceramic materials or refractory ceramics and metal dust Mixture realize sensor encapsulation with it is Nian Jie, the sensor is mainly used in the high temperature measurement in coal gasifier, and measurement temperature is most It is high reachable 1204 DEG C.
In summary, existing fiber grating temperature sensor is mostly using metal as encapsulating structure, and metal structure has The advantage that heat conduction is fast, robustness is high, but there is the problem of physical dimension is big, manufacture difficulty is high, at the same its thermal coefficient of expansion with Had differences between optical fiber, the thermal mismatching especially under high temperature is increased, and reduces the reliability of sensor;If using non- Metal Packaging structure, also using ceramic base as body of material, has that fragility is larger, needs the problem of design secondary encapsulation is protected. In addition, the connection between fiber grating and encapsulating structure realizes that organic bond holds with fixed many methods using organic bond Organic bond accelerated ageing under easy aging and creep, especially hot conditions, it is most of organic after temperature is more than 250 DEG C Adhesive starts softening or even decomposed, and produces the hydrogen that there is stress corrosion to act on to silica fibre, accelerates the tired of silica fibre Labor process, it is impossible to realize effective connection between fiber grating and encapsulating structure, with longer working time, the reliability of sensor Gradually reduce, it is impossible to be applied to the temperature survey of the hot environment such as more than 400 DEG C well.
The content of the invention
The invention aims to overcome, existing fiber grating temperature sensor metallization packaged physical dimension is big, make Difficulty is high, thermal mismatching is big and organic bond heatproof is low, poor reliability deficiency, and proposes a kind of capillary type light Fine grating high temperature sensor and preparation method thereof, the sensor can realize the temperature survey of (- 55~1100) DEG C.
The purpose of the present invention is achieved through the following technical solutions.
A kind of capillary type high temperature fiber grating temperature sensor, including:It is used as the optical fiber light of temperature survey sensing element Grid, nonmetallic capillary, optical fiber and cavity as encapsulating structure, wherein fiber grating are engraved on optical fiber.Annexation is:Will It is carved with the optical fiber of fiber grating insertion capillary, there is certain spacing as cavity between fiber end face and capillary end surface, Cavity size is by design, it is ensured that freely stretching for fiber grating, to completely cut off strain, realizes temperature survey.
Wherein, the optical fiber can be the resistance to height such as silica fibre, sapphire fiber, YAG crystal optical fibres, photonic crystal fiber Warm optical fiber.
The fiber grating can scribe obtained grating by PRK or femtosecond laser.
The nonmetallic capillary can be quartz glass capillary, borosilicate glass capillaries and sapphire crystal capillary Can resistant to elevated temperatures nonmetallic capillary.
The nonmetallic capillary can be dual-end capillary or single-ended closing capillary.
The capillary type high temperature fiber grating temperature sensor can required subsequently according to experimental enviroment, use your gold Belong to the structures such as pipe, earthenware and carry out secondary encapsulation, to improve robustness and reliability.
A kind of preparation method of capillary type high temperature fiber grating temperature sensor, comprises the following steps:
(1) fiber grating is obtained by laser scoring on optical fiber;
(2) optical fiber and capillary are placed;
(3) optical fiber is aligned with capillary and connect with wearing;
(4) weld.
In the step (1), scribed by PRK or femtosecond laser and obtain fiber grating.
In the step (2), optical fiber is put into cylindrical fiber fixture, a regulation of welding system platform is placed into In frame;Capillary is placed into capillary tube holder, is placed into No. two adjusting brackets of welding system platform.
In the step (3), welding system platform, regulation are observed by the CCD9 being connected with computer measurement control platform A number knob and No. two knobs, are directed at optical fiber and capillary, and optical fiber is penetrated into capillary.
In the step (4), laser guiding light is opened, No. two knobs of capillary tube holder is adjusted, determines welding position Put, and adjust a knob of fiber clamp and determine distance between the position that optical fiber is penetrated, i.e. fiber end face and capillary end surface; The laser pulse that laser is launched is controlled by computer measurement control platform, by light path, the weldering of optical fiber and capillary is realized Connect;Solder joint shape is observed by CCD9, welding quality just sentence;Pass through the spectrum demodulated equipment pair being connected with optical fiber connector Fiber grating spectral signal is detected, confirms the package quality of fiber-optical grating temperature sensor.
Wherein, step (4) described laser can be CO2The solids such as the gas lasers such as laser, femto-second laser swash The diode-pumped lasers such as light device, optical fiber laser.
The cavity in sensor capillary shown in the present invention can be air chamber, and can also be filled in subsequent technique can Resistant to elevated temperatures Heat Conduction Material, to improve heat transfer efficiency.
Beneficial effect:
Present invention contrast prior art has following notable innovative point:
1. by the use of can resistant to elevated temperatures nonmetallic capillary as the encapsulating structure of fiber-optical grating temperature sensor, reduce biography Sensor physical dimension, it is to avoid the problem of thermal matching between metal material and optical fiber differs greatly.
2. realizing the installation and fixation of fiber grating sensing element and capillary encapsulating structure using laser welding technology, keep away The problem of softening is even decomposed under the easy aging of organic bond and creep and high temperature is exempted from.
Add after above-mentioned innovative point, the invention has the advantages that:
The fiber-optical grating temperature sensor realized is integrated by two above innovative point, fiber-optical grating temperature sensor is extended Operating temperature range, improve long-time stability that fiber-optical grating temperature sensor works under the adverse circumstances such as high temperature and can By property.
Brief description of the drawings
Fig. 1 is high temperature fiber grating temperature sensor theory structure schematic diagram of the present invention;
Fig. 2 is high temperature fiber grating temperature sensor production method theory diagram of the present invention;
Fig. 3 is optical fiber clamping and stuck-module close-up schematic view in preparation method of the present invention;
Wherein, 1- optical fiber, 2- solder joints, 3- fiber gratings, the nonmetallic capillaries of 4-, 5- cavitys, 6- fiber end faces, 7- capillarys End surfaces, 8- light paths, 9-CCD, 10- computer measurement control platforms, 11- lasers, 12- welding system platforms, 13- optical fiber light Grid temperature sensor, 14- spectrum demodulated equipments, 15- cylindrical fiber fixtures, number adjusting bracket of 16-, 17- capillary tube holders, No. bis- adjusting brackets of 18-, number knob of 19-, No. bis- knobs of 20-.
Embodiment
The invention will be further described with reference to the accompanying drawings and examples.
Embodiment 1
As shown in figure 1, a kind of capillary type high temperature fiber grating temperature sensor, including:It is used as the sensitive member of temperature survey The fiber grating 3 of part, nonmetallic capillary 4, optical fiber 1 and cavity 5 as encapsulating structure, wherein fiber grating 3 are engraved in optical fiber 1 On.Annexation is:The optical fiber 1 for being carved with fiber grating 3 is inserted in nonmetallic capillary 4, fiber end face 6 and capillary end surface There is certain spacing as cavity 5 between 7, the size of cavity 5 is by design, it is ensured that freely stretching for fiber grating 3, answered with completely cutting off Become, realize temperature survey.
The fiber grating sensing element and the quartz glass wool of dual-end scribed below with silica fibre, PRK Exemplified by tubule, the preparation method for specifically describing sensor.
A kind of preparation method of capillary type high temperature fiber grating temperature sensor, as shown in Fig. 2 comprising the following steps:
(1) scribed on optical fiber 1 by PRK and obtain fiber grating 3;
(2) optical fiber 1 is put into cylindrical fiber fixture 15, is placed into an adjusting bracket 16 of welding system platform 12 In, as shown in Figure 3;
(3) the nonmetallic capillary 4 of dual-end is placed into capillary tube holder 17, is placed into welding system platform In 12 No. two adjusting brackets 18;
(4) welding system platform 12 is observed by the CCD9 being connected with computer measurement control platform 10, adjusts a rotation Button 19 and No. two knobs 20, are directed at optical fiber 1 and nonmetallic capillary 4, and optical fiber 1 is penetrated into nonmetallic capillary 4.
(5) the guiding light of laser 11 is opened, No. two knobs 20 is adjusted, determines welding position;
(6) adjust knob 19 and determine the position that optical fiber 1 is penetrated, i.e., between fiber end face 6 and capillary end surface 7 away from From;
(7) control the laser pulse that laser 11 is launched, by light path 8, realize by computer measurement control platform 10 The welding of optical fiber 1 and nonmetallic capillary 4;
(8) shape of solder joint 2 is observed by CCD9, welding quality just sentence;
(9) spectral signal of fiber grating 3 is detected by the spectrum demodulated equipment 14 being connected with optical fiber 1, confirmed The package quality of fiber-optical grating temperature sensor 13.
(10) sensor can realize the temperature survey of (- 55~600) DEG C.
Embodiment 2
As shown in figure 1, a kind of capillary type high temperature fiber grating temperature sensor, including:It is used as the sensitive member of temperature survey The fiber grating 3 of part, nonmetallic capillary 4, optical fiber 1 and cavity 5 as encapsulating structure, wherein fiber grating 3 are engraved in optical fiber 1 On.Annexation is:The optical fiber 1 for being carved with fiber grating 3 is inserted in nonmetallic capillary 4, fiber end face 6 and capillary end surface There is certain spacing as cavity 5 between 7, the size of cavity 5 is by design, it is ensured that freely stretching for fiber grating 3, answered with completely cutting off Become, realize temperature survey.
The fiber grating sensing element and the sapphire crystal hair of single-ended closing scribed below with silica fibre, femtosecond laser Exemplified by tubule, the preparation method for specifically describing sensor.
A kind of preparation method of capillary type high temperature fiber grating temperature sensor, as shown in Fig. 2 comprising the following steps:
(1) scribed on optical fiber 1 by femtosecond laser and obtain fiber grating 3;
(2) optical fiber 1 is put into cylindrical fiber fixture 15, is placed into an adjusting bracket 16 of welding system platform 12 In, as shown in Figure 3;
(3) the nonmetallic capillary 4 of single-ended closing is placed into capillary tube holder 17, is placed into welding system platform In 12 No. two adjusting brackets 18;
(4) welding system platform 12 is observed by the CCD9 being connected with computer measurement control platform 10, adjusts a rotation Button 19 and No. two knobs 20, are directed at optical fiber 1 and nonmetallic capillary 4, and optical fiber 1 is penetrated into capillary 4.
(5) the guiding light of laser 11 is opened, No. two knobs 20 is adjusted, determines welding position;
(6) adjust knob 19 and determine the position that optical fiber 1 is penetrated, i.e., between fiber end face 6 and capillary end surface 7 away from From;
(7) control the laser pulse that laser 11 is launched, by light path 8, realize by computer measurement control platform 10 The welding of optical fiber 1 and nonmetallic capillary 4;
(8) shape of solder joint 2 is observed by CCD9, welding quality just sentence;
(9) spectral signal of fiber grating 3 is detected by the spectrum demodulated equipment 14 being connected with optical fiber 1, confirmed The package quality of fiber-optical grating temperature sensor 13.
The embodiment of the present invention is described above in association with accompanying drawing, but these explanations can not be understood to limitation The scope of the present invention, protection scope of the present invention is limited by appended claims, any in the claims in the present invention base Change on plinth is all protection scope of the present invention.

Claims (9)

1. a kind of capillary type high temperature fiber grating temperature sensor, it is characterised in that:It is used as the light of temperature survey sensing element Fine grating, nonmetallic capillary, optical fiber and cavity as encapsulating structure, wherein fiber grating are engraved on optical fiber;Annexation For:The optical fiber for being carved with fiber grating is inserted in nonmetallic capillary, between having necessarily between fiber end face and capillary end surface Away from as cavity, cavity size is by design, it is ensured that freely stretching for fiber grating, to completely cut off strain, realizes temperature survey.
2. a kind of capillary type high temperature fiber grating temperature sensor as claimed in claim 1, it is characterised in that:Described light Fibre can be silica fibre, sapphire fiber, YAG crystal optical fibres, photonic crystal fiber.
3. a kind of capillary type high temperature fiber grating temperature sensor as claimed in claim 1, it is characterised in that:Described light Fine grating can be scribed by PRK or femtosecond laser and obtained.
4. a kind of capillary type high temperature fiber grating temperature sensor as claimed in claim 1, it is characterised in that:Described is non- Metal capillary includes quartz glass capillary, borosilicate glass capillaries, sapphire crystal capillary.
5. a kind of capillary type high temperature fiber grating temperature sensor as claimed in claim 1, it is characterised in that:Described is non- Metal capillary can be dual-end capillary or single-ended closing capillary.
6. a kind of capillary type high temperature fiber grating temperature sensor as claimed in claim 1, it is characterised in that:Described chamber Body can be air chamber, can also be filled in subsequent technique can resistant to elevated temperatures Heat Conduction Material, to improve heat transfer efficiency.
7. a kind of capillary type high temperature fiber grating temperature sensor as claimed in claim 1, it is characterised in that:Described hair Thin-tube type high temperature fiber grating temperature sensor can required subsequently according to experimental enviroment, use noble metal pipe, earthenware etc. Structure carries out secondary encapsulation, to improve robustness and reliability.
8. a kind of preparation method of capillary type high temperature fiber grating temperature sensor, it is characterised in that comprise the following steps:
Step 1: obtaining fiber grating by laser scoring on optical fiber:It can be scribed by PRK or femtosecond laser Obtain fiber grating;
Step 2: placing optical fiber and capillary:Optical fiber is put into cylindrical fiber fixture, the one of welding system platform is placed into In number adjusting bracket;Capillary is placed into capillary tube holder, is placed into No. two adjusting brackets of welding system platform;
Connect Step 3: optical fiber is aligned with capillary with wearing:Welding is observed by the CCD9 being connected with computer measurement control platform System platform, a number knob of regulation and No. two knobs, are directed at optical fiber and capillary, and optical fiber is penetrated into capillary;
Step 4: welding:Laser guiding light is opened, No. two knobs of capillary tube holder is adjusted, determines welding position, and adjust A number knob of section fiber clamp determines the distance between the position that optical fiber is penetrated, i.e. fiber end face and capillary end surface;Pass through meter The laser pulse of calculation machine measurement control platform control laser transmitting, by light path, realizes the welding of optical fiber and capillary;Pass through CCD9 observes solder joint shape, and welding quality just sentence;By the spectrum demodulated equipment that is connected with optical fiber connector to optical fiber light Grating spectrum signal is detected, confirms the package quality of fiber-optical grating temperature sensor.
9. a kind of preparation method of capillary type high temperature fiber grating temperature sensor as claimed in claim 8, its feature exists In:Laser in the step 4 can be CO2The gas laser of laser, the solid state laser of femto-second laser or The diode-pumped laser of optical fiber laser.
CN201710353372.6A 2017-05-18 2017-05-18 A kind of capillary type high temperature fiber grating temperature sensor and preparation method thereof Pending CN107014520A (en)

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CN108106751A (en) * 2017-12-13 2018-06-01 俞婷 The preparation process of sapphire photonic crystal fiber grating superhigh temperature distributed sensor
CN108332878A (en) * 2018-01-31 2018-07-27 北京航天控制仪器研究所 A kind of fiber-optical grating temperature sensor and preparation method
CN108362394A (en) * 2018-02-12 2018-08-03 南开大学 Crystal optical waveguide speckle thermometry and system based on femtosecond laser write-in
CN109357786A (en) * 2018-12-03 2019-02-19 湖北工业大学 A kind of system for detecting temperature and method based on sapphire fiber grating sensor
CN109668652A (en) * 2019-02-28 2019-04-23 武汉工程大学 A kind of optical fibre temperature survey apparatus of glass tube filling
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CN110220613A (en) * 2019-06-24 2019-09-10 南京师范大学 A kind of sapphire pipe blackbody chamber optical fiber temperature-measurement device
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CN110631728A (en) * 2019-06-26 2019-12-31 兴勤(宜昌)电子有限公司 Automatic welding and packaging equipment for glass packaging temperature sensor
CN111060214A (en) * 2019-12-24 2020-04-24 上海传输线研究所(中国电子科技集团公司第二十三研究所) Fiber grating temperature measurement sensor and temperature measurement method of inner conductor of radio frequency cable
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CN112378429A (en) * 2020-10-13 2021-02-19 西北大学 Fiber bragg grating temperature and pressure sensor based on capillary tube packaging
CN112731585A (en) * 2020-12-08 2021-04-30 北京信息科技大学 Method for preparing sapphire regeneration grating high-temperature sensor by high-temperature annealing
CN112880584A (en) * 2021-02-09 2021-06-01 北京航天控制仪器研究所 High-temperature-resistant strain sensor with fiber bragg grating preloaded compressive stress and preparation method thereof
CN113155163A (en) * 2020-10-13 2021-07-23 西北大学 Optical fiber temperature and pressure sensor based on double-capillary packaging
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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6125216A (en) * 1997-06-19 2000-09-26 British Aerospace Public Limited Company Strain isolated optical fibre bragg grating sensor
CN201794579U (en) * 2010-05-28 2011-04-13 北京康华盛鸿能源科技发展有限公司 Packaging structure of quasi-distributed fiber grating temperature sensor
US20120039357A1 (en) * 2010-08-16 2012-02-16 Marc Levesque Fiber-optic temperature sensor assembly
CN202599565U (en) * 2012-05-18 2012-12-12 南开大学 Nonmetal packaging fiber grating sensor

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6125216A (en) * 1997-06-19 2000-09-26 British Aerospace Public Limited Company Strain isolated optical fibre bragg grating sensor
CN201794579U (en) * 2010-05-28 2011-04-13 北京康华盛鸿能源科技发展有限公司 Packaging structure of quasi-distributed fiber grating temperature sensor
US20120039357A1 (en) * 2010-08-16 2012-02-16 Marc Levesque Fiber-optic temperature sensor assembly
CN202599565U (en) * 2012-05-18 2012-12-12 南开大学 Nonmetal packaging fiber grating sensor

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CN108106751A (en) * 2017-12-13 2018-06-01 俞婷 The preparation process of sapphire photonic crystal fiber grating superhigh temperature distributed sensor
CN108106751B (en) * 2017-12-13 2019-10-25 武汉从时光瑞光电技术有限公司 The preparation process of sapphire photonic crystal fiber grating superhigh temperature distributed sensor
CN108332878A (en) * 2018-01-31 2018-07-27 北京航天控制仪器研究所 A kind of fiber-optical grating temperature sensor and preparation method
CN108362394B (en) * 2018-02-12 2019-08-23 南开大学 Crystal optical waveguide speckle thermometry and system based on femtosecond laser write-in
CN108362394A (en) * 2018-02-12 2018-08-03 南开大学 Crystal optical waveguide speckle thermometry and system based on femtosecond laser write-in
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CN111579113A (en) * 2019-02-18 2020-08-25 中国科学院半导体研究所 Temperature field measuring device and method
CN109668652A (en) * 2019-02-28 2019-04-23 武汉工程大学 A kind of optical fibre temperature survey apparatus of glass tube filling
CN109668652B (en) * 2019-02-28 2020-10-23 武汉工程大学 Optical fiber temperature measuring device filled with glass tube
CN110031936A (en) * 2019-04-02 2019-07-19 武汉光迅科技股份有限公司 A kind of laser melting formula optical fiber collimator and its tools and method
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CN110631728B (en) * 2019-06-26 2020-11-10 兴勤(宜昌)电子有限公司 Automatic welding and packaging equipment for glass packaging temperature sensor
CN110579287A (en) * 2019-09-16 2019-12-17 西北大学 Optical fiber sensor packaged based on single capillary glass tube and testing method
CN110579288A (en) * 2019-09-16 2019-12-17 西北大学 Optical fiber sensor based on double capillary glass tube packaging
CN110579288B (en) * 2019-09-16 2020-11-13 西北大学 Optical fiber sensor based on double capillary glass tube packaging
CN111060214A (en) * 2019-12-24 2020-04-24 上海传输线研究所(中国电子科技集团公司第二十三研究所) Fiber grating temperature measurement sensor and temperature measurement method of inner conductor of radio frequency cable
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CN112731585A (en) * 2020-12-08 2021-04-30 北京信息科技大学 Method for preparing sapphire regeneration grating high-temperature sensor by high-temperature annealing
CN112731585B (en) * 2020-12-08 2022-10-11 北京信息科技大学 Method for preparing sapphire regenerated grating high-temperature sensor by utilizing high-temperature annealing
CN112880584A (en) * 2021-02-09 2021-06-01 北京航天控制仪器研究所 High-temperature-resistant strain sensor with fiber bragg grating preloaded compressive stress and preparation method thereof
CN114199406A (en) * 2021-12-10 2022-03-18 哈尔滨电机厂有限责任公司 Manufacturing process method of optical fiber temperature measuring element of generator
CN114199406B (en) * 2021-12-10 2024-05-07 哈尔滨电机厂有限责任公司 Manufacturing process method of optical fiber temperature measuring element of generator
CN114935115A (en) * 2022-06-20 2022-08-23 武汉理工大学 Integrated temperature measurement structure for fluid pipeline and packaging method
CN114935115B (en) * 2022-06-20 2023-01-03 武汉理工大学 Integrated temperature measurement structure for fluid pipeline and packaging method

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Application publication date: 20170804