JP2015189544A - Suction roller and transport device - Google Patents

Suction roller and transport device Download PDF

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JP2015189544A
JP2015189544A JP2014067589A JP2014067589A JP2015189544A JP 2015189544 A JP2015189544 A JP 2015189544A JP 2014067589 A JP2014067589 A JP 2014067589A JP 2014067589 A JP2014067589 A JP 2014067589A JP 2015189544 A JP2015189544 A JP 2015189544A
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porous body
suction roller
porous
roller
partial
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JP6258747B2 (en
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正治 澤田
Masaharu Sawada
正治 澤田
邦宏 山部
Kunihiro Yamabe
邦宏 山部
幸雄 野口
Yukio Noguchi
幸雄 野口
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Kyocera Corp
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Kyocera Corp
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Abstract

PROBLEM TO BE SOLVED: To enhance efficiency of suction energy when adsorbing an object body.SOLUTION: A cylindrical suction roller for transporting a sheet-like object body along a direction of rotation by rotating while adsorbing the object body on an outer surface of the suction roller comprises: a first porous body having the outer surface; and a second porous body that is disposed on a side closer to a rotary shaft than the first porous body and in contact with the first porous body. The thickness of the first porous body is smaller than the thickness of the second porous body, and the average pore diameter of the first porous body is smaller than the average pore diameter of the second porous body.

Description

本発明は、シート状の対象体を搬送するためのサクションローラ、およびサクションローラを用いた搬送装置に関するものである。   The present invention relates to a suction roller for transporting a sheet-like object and a transport device using the suction roller.

シート状の対象体の搬送を行う方法として、一対のローラによって対象体をニップして(挟んで)搬送を行うニップローラ方式と、円筒状のローラの外周面に対象体を吸着して搬送を行うサクションローラ方式とがある。   As a method of transporting a sheet-like target object, a nip roller system in which the target object is nipped (sandwiched) by a pair of rollers and a target object is attracted to the outer peripheral surface of a cylindrical roller and transported. There is a suction roller system.

サクションローラ方式では、シート状の対象体を円筒状のローラの外表面に吸着しながら回転することで対象体を回転の方向に沿って搬送する。対象体を円筒状のローラの外表面に吸着させる方法として、緻密体で構成したローラに吸着孔を設け、この吸着孔を吸引して低圧にして吸着孔の開口に対象体を吸着させる方法と、ローラ自体を多孔質体で形成して多孔質体の気孔を吸引することで対象体を吸着する方法がある。多孔質体の気孔を吸引する方法では、ローラの外表面全体で搬送体を吸着可能な状態としつつ、ローラの外表面に対象体を部分的に当接させて当接した部分のみで対象体を吸着する。   In the suction roller system, the object is conveyed along the direction of rotation by rotating the sheet-like object while adsorbing to the outer surface of the cylindrical roller. As a method of adsorbing an object on the outer surface of a cylindrical roller, a method is provided in which an adsorption hole is provided in a roller composed of a dense body, and the adsorption hole is sucked to a low pressure to adsorb the object to the opening of the adsorption hole. There is a method of adsorbing a target object by forming the roller itself with a porous body and sucking pores of the porous body. In the method of sucking the pores of the porous body, the target body is only brought into contact with the outer surface of the roller while the transport body can be adsorbed by the entire outer surface of the roller. To adsorb.

特開2002−160857号公報JP 2002-160857 A

吸着孔を設ける方法では、吸着孔の部分が集中して減圧されるので吸着孔の開口に対象体が必要以上に強く吸引され、対象体に損傷を与える場合があった。   In the method of providing the suction holes, the suction holes are concentrated and the pressure is reduced, so that the target object is sucked more strongly than necessary to damage the target object.

また、ローラ自体を多孔質体で形成してローラの外表面全体で搬送体を吸着可能な状態とする方法では、ローラの外表面全体に対して対象体が吸着される面積が小さくなるので、例えば所定時間で大量の空気を吸引する真空ポンプ等を用いたとしても、実際に吸着に寄与する量よりも大量の空気を、対象体Mが当接していない部分から吸い込むことになる。すなわちこの場合、全体の吸引のエネルギーに対して実際に吸着に寄与するエネルギーが小さくなり、吸引にともなうエネルギーの効率が低くなってしまうといった課題があった。   Further, in the method of forming the roller itself with a porous body so that the conveyance body can be sucked on the entire outer surface of the roller, the area on which the object is sucked on the entire outer surface of the roller is reduced, For example, even if a vacuum pump or the like that sucks a large amount of air in a predetermined time is used, a larger amount of air than the amount that actually contributes to adsorption is sucked from a portion where the object M is not in contact. That is, in this case, the energy that actually contributes to the adsorption becomes smaller than the energy of the entire suction, and there is a problem that the efficiency of the energy accompanying the suction is lowered.

上記課題を解決するため、本発明は、シート状の対象体を外表面に吸着しながら回転することで前記対象体を前記回転の方向に沿って搬送する円筒形状のサクションローラであって、前記外表面を有する第1多孔質体と、前記第1多孔質体よりも前記回転軸に近い側に配置された、前記第1多孔質体と当接する第2多孔質体とを有し、前記第1多孔質体の厚さは前記第2多孔質体の厚さよりも小さく、かつ前記第1多孔質体の平均気孔径は前記第2多孔質体の平均気孔径よりも小さいことを特徴とするサクションローラを提供する。また本発明は、サクションローラを用いて構成された搬送装置を併せて提供する。   In order to solve the above problems, the present invention is a cylindrical suction roller that conveys the object along the direction of rotation by rotating while adsorbing the sheet-like object on the outer surface, A first porous body having an outer surface, and a second porous body that is disposed closer to the rotation axis than the first porous body, and abuts on the first porous body, The thickness of the first porous body is smaller than the thickness of the second porous body, and the average pore diameter of the first porous body is smaller than the average pore diameter of the second porous body. Provide a suction roller. In addition, the present invention also provides a conveyance device configured using a suction roller.

本発明は、対象体を吸着する際の吸引エネルギーの効率を高くする。   The present invention increases the efficiency of suction energy when adsorbing an object.

本発明のサクションローラの一実施形態について説明する図であり、(a)は縦断面図を、(b)は横断面図をそれぞれ示すものである。It is a figure explaining one Embodiment of the suction roller of this invention, (a) shows a longitudinal cross-sectional view, (b) shows a cross-sectional view, respectively. 本発明のサクションローラの一実施形態の部分断面図である。It is a fragmentary sectional view of one embodiment of a suction roller of the present invention. 本発明のサクションローラの他の実施形態の部分断面図である。It is a fragmentary sectional view of other embodiments of the suction roller of the present invention. 本発明のサクションローラの他の実施形態の部分断面図である。It is a fragmentary sectional view of other embodiments of the suction roller of the present invention. 本発明のサクションローラの他の実施形態の部分断面図である。It is a fragmentary sectional view of other embodiments of the suction roller of the present invention. 本発明のサクションローラの他の実施形態の部分断面図である。It is a fragmentary sectional view of other embodiments of the suction roller of the present invention.

以下、本発明の一実施形態について説明する。図1は、本発明のサクションローラの一実施形態であるサクションローラ1(以降、単にローラ1ともいう)について説明する図であり、(a)は縦断面図、(b)は横断面図である。図2は、本発明のサクションローラの一実施形態の部分断面図である。   Hereinafter, an embodiment of the present invention will be described. FIG. 1 is a view for explaining a suction roller 1 (hereinafter, also simply referred to as a roller 1) as an embodiment of the suction roller of the present invention, where (a) is a longitudinal sectional view and (b) is a transverse sectional view. is there. FIG. 2 is a partial cross-sectional view of an embodiment of the suction roller of the present invention.

ローラ1は、シート状の対象体Mを外表面に吸着しながら回転することで対象体Mを回転の方向(図1中の矢印Rで示す)に沿って搬送する、回転の回転軸に沿って延びた円筒形状のサクションローラであって、外表面6Aを有する第1多孔質体6と、第1多孔質体6よりも回転軸Cに近い側に配置された、第1多孔質体6と当接する第2多孔質体5とを有し、第1多孔質体6の厚さは第2多孔質体5の厚さよりも小さく、かつ第1多孔質体6の平均気孔径は第2多孔質体5の平均気孔径よりも小さい。第2多孔質体5は、回転軸C方向に沿って並んだ複数の部分多孔質体3を有して構成されている。本実施形態では、図2に示すように、複数の部分多孔質体3の端面3A同士は直接当接している。第1多孔質体6は、溶射により成膜された溶射膜である。   The roller 1 conveys the object M along the direction of rotation (indicated by the arrow R in FIG. 1) by rotating while adsorbing the sheet-like object M on the outer surface, along the rotation axis of rotation. And a first porous body 6 having an outer surface 6 </ b> A and a first porous body 6 disposed closer to the rotation axis C than the first porous body 6. The first porous body 6 is smaller in thickness than the second porous body 5, and the average pore diameter of the first porous body 6 is the second porous body 5. It is smaller than the average pore diameter of the porous body 5. The second porous body 5 includes a plurality of partial porous bodies 3 arranged along the rotation axis C direction. In this embodiment, as shown in FIG. 2, the end surfaces 3A of the plurality of partial porous bodies 3 are in direct contact with each other. The first porous body 6 is a sprayed film formed by spraying.

ローラ1は、金属製の支持部材10を有している。支持部材10は円筒状であり、外周面10Aに、回転軸C方向に沿って延びた複数の溝12を備えている。支持部材10はまた、内部空間4と溝12とに繋がる複数の貫通孔16を備えている。また、支持部材10の回転軸C方向に沿った両側にはシャフト2が設けられており、図示しない回転機構を備える搬送装置がシャフト2を回転させることで、ローラ1が方向Rに沿って回転する。両端に設けられたシャフト2の一方(図中左側)は開口部2aを備え、シャフト2の他方(図中右側)は支持部材10の内部空間4を閉塞している。ローラ1が配置された搬送装置は図示しない吸気手段を有し、図示しない搬送装置は、この吸気手段によってシャフト2の開口部2aから内部空間4の空気を吸引して内部空間4を減圧させる。   The roller 1 has a metal support member 10. The support member 10 has a cylindrical shape and includes a plurality of grooves 12 extending along the rotation axis C direction on the outer peripheral surface 10A. The support member 10 also includes a plurality of through holes 16 connected to the internal space 4 and the groove 12. Moreover, the shaft 2 is provided in the both sides along the rotating shaft C direction of the support member 10, and the roller 1 rotates along the direction R when the conveying apparatus provided with the rotation mechanism which is not illustrated rotates the shaft 2. To do. One of the shafts 2 provided on both ends (left side in the figure) includes an opening 2a, and the other side (right side in the figure) of the shaft 2 closes the internal space 4 of the support member 10. The conveying device in which the roller 1 is disposed has an air intake means (not shown). The air conveying means (not shown) sucks the air in the internal space 4 from the opening 2a of the shaft 2 and depressurizes the internal space 4.

図示しない吸気手段で内部空間4を減圧させた場合、複数の貫通孔16を介して溝12内の気体も吸引される。加えて、溝12内の吸引にともなって、第2多孔質体5の気孔と第1多孔質体6の気孔とを介して、第1多孔質体6の外周面6Aの気孔の全体から気体が吸引される。外周面6Aのうち、対象体Mが当接している部分では、この対象体Mを吸着するような力が対象体Mに働く。本実施形態では、外周面6Aの全体から気体を吸引するので、ローラ1が回転しても、外周面6Aのうち対象体Mが当接する部分は、常にこの対象体Mを吸着することができる。   When the internal space 4 is depressurized by an intake means (not shown), the gas in the groove 12 is also sucked through the plurality of through holes 16. In addition, the gas from the entire pores of the outer peripheral surface 6A of the first porous body 6 passes through the pores of the second porous body 5 and the pores of the first porous body 6 along with the suction in the groove 12. Is sucked. In the portion of the outer peripheral surface 6A where the object M is in contact, a force that attracts the object M acts on the object M. In this embodiment, since gas is sucked from the entire outer peripheral surface 6A, even if the roller 1 rotates, the portion of the outer peripheral surface 6A with which the object M abuts can always adsorb the object M. .

図1に示す実施形態において、第1多孔質体6と第2多孔質体5とがそれぞれ別の多孔質体ではなく、同一の平均気孔径を有する1つの仮想多孔質体V(図示せず)で構成されているとする。仮想多孔質体Vは、平気気孔径が小さいほど吸気にともなう抵抗が大きくなり、所定量の気体を吸引するのに大きなエネルギーを必要とする。一方で、仮想多孔質体Vの平均気孔径が大きくなり過ぎて吸気にともなう抵抗が小さくなり過ぎた場合も、対象体Mが当接していない部分から容易に大量の気体が吸引されてしまうことによるエネルギーロスが大きくなり過ぎ、結果として大きなエネルギーを必要とする。平均気孔径が小さい多孔質体であっても、例えば厚さを薄くすることで吸引に必要なエネルギーを小さく
することもできるが、厚さが薄くなり過ぎた場合は仮想多孔質体Vの強度が低くなり過ぎ、例えば溝12部分で破損し易くなってしまう。
In the embodiment shown in FIG. 1, the first porous body 6 and the second porous body 5 are not separate porous bodies, but one virtual porous body V (not shown) having the same average pore diameter. ). In the virtual porous body V, the smaller the flat pore diameter, the greater the resistance caused by the intake air, and a larger amount of energy is required to suck a predetermined amount of gas. On the other hand, even when the average pore diameter of the virtual porous body V becomes too large and the resistance due to intake air becomes too small, a large amount of gas is easily sucked from the portion where the object M is not in contact. The energy loss due to is too large, and as a result, a large amount of energy is required. Even if the porous body has a small average pore diameter, for example, the energy required for suction can be reduced by reducing the thickness. However, if the thickness is too thin, the strength of the virtual porous body V is reduced. Becomes too low, and for example, the groove 12 is easily damaged.

本実施形態では、ローラ1は、第1多孔質体6の厚さは第2多孔質体5の厚さよりも小さく、かつ第1多孔質体6の平均気孔径は第2多孔質体5の平均気孔径よりも小さい。これにより、厚さの比較的厚い第2多孔質体5によって充分な機械的強度を実現しつつ、平均気孔径が比較的小さい第1多孔質体6によって適度な吸気抵抗を実現し、対象体Mが当接していない部分からの気体の吸引を低減させて、対象体Mの吸引にともなうエネルギーロスを抑制することができる。本実施形態では、第2多孔質体5の厚さが比較的厚く充分な強度を確保しているが、第2多孔質体5の平均気孔径は比較的大きいので、吸引抵抗が必要以上に大きくなることが抑制されている。このように本実施形態のローラ1は、充分に高い機械的強度を有しながら、吸引にともなうエネルギーの効率が比較的高い。   In the present embodiment, the roller 1 is configured such that the thickness of the first porous body 6 is smaller than the thickness of the second porous body 5, and the average pore diameter of the first porous body 6 is that of the second porous body 5. It is smaller than the average pore diameter. As a result, an adequate intake resistance is realized by the first porous body 6 having a relatively small average pore diameter while realizing a sufficient mechanical strength by the relatively thick second porous body 5. It is possible to reduce the suction of the gas from the part where M does not contact, and to suppress the energy loss accompanying the suction of the object M. In this embodiment, the thickness of the second porous body 5 is relatively thick and sufficient strength is ensured. However, since the average pore diameter of the second porous body 5 is relatively large, the suction resistance is more than necessary. The increase is suppressed. As described above, the roller 1 of the present embodiment has a sufficiently high mechanical strength, and has a relatively high energy efficiency with suction.

第1多孔質体6の平均気孔径は、例えば10μm未満、好ましくは2μm以下、さらに好ましくは1μm以下であることが好ましい。また、第2多孔質体5の平均気孔径は、10μm以上かつ120μm以下であることが好ましい。また、第1多孔質体6の厚さは0.5μm〜2mmの範囲であることが好ましく、第2多孔質体5の厚さは2mm〜50mmの範囲であることが好ましい。この範囲とすることで、ローラ1は高い機械的強度を有しながら、吸引にともなうエネルギーの効率を比較的高くすることができる。なお平均気孔径は、例えばJIS R 1655に規定された水銀圧入法を用いて測定することができる。   The average pore diameter of the first porous body 6 is, for example, less than 10 μm, preferably 2 μm or less, more preferably 1 μm or less. Moreover, it is preferable that the average pore diameter of the 2nd porous body 5 is 10 micrometers or more and 120 micrometers or less. Moreover, it is preferable that the thickness of the 1st porous body 6 is the range of 0.5 micrometer-2 mm, and it is preferable that the thickness of the 2nd porous body 5 is the range of 2 mm-50 mm. By setting this range, the roller 1 can have a relatively high energy efficiency due to suction while having high mechanical strength. The average pore diameter can be measured using, for example, a mercury intrusion method defined in JIS R 1655.

また本実施形態では、第2多孔質体5は、回転軸C方向に沿って並んだ複数の部分多孔質体3を有して構成されている。例えば比較的厚さが大きく、かつ軸方向に沿って比較的長い円筒状の多孔質体を製造するには比較的多くの製造コストが必要となるが、本実施形態では、製造コストが比較的低い、軸方向に短い円筒状の部分多孔質体3を複数製造して並べるだけで、容易に第2多孔質体5を形成することができる。   In the present embodiment, the second porous body 5 includes a plurality of partial porous bodies 3 arranged along the rotation axis C direction. For example, a relatively large manufacturing cost is required to manufacture a cylindrical porous body that is relatively thick and relatively long along the axial direction. In this embodiment, however, the manufacturing cost is relatively low. The second porous body 5 can be easily formed only by manufacturing and arranging a plurality of low, axially short cylindrical partial porous bodies 3.

ローラ1では、複数の部分多孔質体3の端面3A同士が直接当接している。ここで直接当接しているとは、部分多孔質体3の端面3A同士の間隙に接着剤等の他の部材が配置されることなく、端面3A同士が当接している状態という。本実施形態では、部分多孔質体3の端面3A同士の間隙が、接着剤等で閉塞されて気密化されていないので、この端面3A同士の間隙部分でも効率的に気体が吸引され、気体の吸引にともなうエネルギーロスがより少なくされる。   In the roller 1, the end faces 3 </ b> A of the plurality of partial porous bodies 3 are in direct contact with each other. Here, the direct contact refers to a state in which the end surfaces 3A are in contact with each other without any other member such as an adhesive disposed in the gap between the end surfaces 3A of the partial porous body 3. In the present embodiment, since the gap between the end faces 3A of the partial porous body 3 is not sealed and sealed with an adhesive or the like, the gas is efficiently sucked even in the gap between the end faces 3A. Energy loss associated with suction is reduced.

ローラ1の第1多孔質体6は、溶射により成膜された溶射膜である。第1多孔質体6を溶射によって形成することで、複数の部分多孔質体3の端面3Aの当接部分も含めて、軸方向に沿って比較的長い第2多孔質体5の表面の全体に、均一な厚さの第1多孔質体6を形成することができる。また溶射条件を調整することで、多孔質体6の機械強度や平均気孔径を調整することができる。   The first porous body 6 of the roller 1 is a sprayed film formed by spraying. By forming the first porous body 6 by thermal spraying, the entire surface of the second porous body 5 that is relatively long along the axial direction, including the contact portions of the end surfaces 3A of the plurality of partial porous bodies 3 In addition, the first porous body 6 having a uniform thickness can be formed. Moreover, the mechanical strength and average pore diameter of the porous body 6 can be adjusted by adjusting the thermal spraying conditions.

なお、第1多孔質体6の材質は特に限定されず、アルミナ、ジルコニア、タングステンカーバイト、酸化チタン、酸化クロムなどのセラミック溶射膜や、亜鉛やアルミニウム、アルミマグネシウム合金などの金属溶射膜、プラスチック、サーメットなどの溶射膜等があげられる。表面の耐摩耗性を向上させる観点では、第1多孔質体6は、セラミック溶射膜からなることが好ましい。また、アルミナやジルコニアなどの溶射膜の場合は白色の外表面6Aが得られ、汚れを判りやすくし、有色のフィルムとのコントラストを明確にすることができ、対象体Mが透明フィルムなどであれば、異物などの欠陥を検査する際に使用することが可能となる。   The material of the first porous body 6 is not particularly limited. Ceramic sprayed films such as alumina, zirconia, tungsten carbide, titanium oxide, and chromium oxide, metal sprayed films such as zinc, aluminum, and aluminum magnesium alloy, plastics And a sprayed film such as cermet. From the viewpoint of improving the wear resistance of the surface, the first porous body 6 is preferably made of a ceramic sprayed film. Further, in the case of a sprayed film such as alumina or zirconia, a white outer surface 6A can be obtained, the dirt can be easily understood, the contrast with the colored film can be clarified, and the object M can be a transparent film or the like. For example, it can be used when inspecting defects such as foreign matters.

さらに第1多孔質体6の材質が、例えば酸化チタンもしくは酸化クロム等の半導電性の溶射膜で形成した場合は、第1多孔質体6は半導電性を有することもできる。第1多孔質体6が半導電性を有していれば、対象体Mが絶縁物である場合などで発生する静電気を、第1多孔質体6の外表面6Aを介して効率的に除去することができる。多孔質体6が酸化チタンもしくは酸化クロムのいずれかを含む場合、多孔質体6は適度な半導電性を有するとともに、耐摩耗性も比較的高くすることができる。加えて、多孔質体6の外表面6Aを有色(黒色や灰色、青色)とすることができ、外表面6Aに汚れが付着した場合でも目立たなくすることができる。   Further, when the material of the first porous body 6 is formed of a semiconductive sprayed film such as titanium oxide or chromium oxide, the first porous body 6 can also be semiconductive. If the first porous body 6 has semiconductivity, static electricity generated when the object M is an insulator is efficiently removed through the outer surface 6A of the first porous body 6. can do. When the porous body 6 contains either titanium oxide or chromium oxide, the porous body 6 has moderate semiconductivity and can have relatively high wear resistance. In addition, the outer surface 6A of the porous body 6 can be colored (black, gray, blue), and can be made inconspicuous even when dirt is attached to the outer surface 6A.

図3〜図5は、本発明のサクションローラの部分断面図であり、図3〜図5でそれぞれ異なる実施形態を示している。図3および図4に示すように、複数の部分多孔質体3の端面3Aは面取り部7を有していてもよく、図5に示すように複数の部分多孔質体6の端面6Aは切り欠き部8を有していてもよい。面取り部7や切欠き部8を形成することで、複数の部分多孔質体3の端面3A同士が衝突することで生じる、端面3Aのエッジ部分の欠け等を抑制することができる。例えば溶射によって第1多孔質体6を形成する場合など、この面取り部7や切欠き部8に選択的に大きな溶射膜を形成することで、長さ方向に沿って一様な厚さの第1多孔質体6を形成することができる。第2多孔質層5の材質も特に限定されず、セラミックス、金属、樹脂いずれを用いても良い。例えば、アルミナを主剤とする多孔質材や、焼結金属から形成すればよい。   3 to 5 are partial cross-sectional views of the suction roller of the present invention, and different embodiments are shown in FIGS. As shown in FIGS. 3 and 4, the end surfaces 3A of the plurality of partial porous bodies 3 may have chamfers 7, and the end surfaces 6A of the plurality of partial porous bodies 6 are cut as shown in FIG. You may have the notch part 8. FIG. By forming the chamfered portion 7 and the notched portion 8, it is possible to suppress chipping of the edge portion of the end surface 3 </ b> A that occurs when the end surfaces 3 </ b> A of the plurality of partial porous bodies 3 collide with each other. For example, when the first porous body 6 is formed by thermal spraying, by selectively forming a large sprayed film on the chamfered portion 7 or the notch portion 8, the first porous body 6 having a uniform thickness along the length direction is formed. One porous body 6 can be formed. The material of the second porous layer 5 is not particularly limited, and any of ceramic, metal, and resin may be used. For example, it may be formed from a porous material mainly composed of alumina or a sintered metal.

図6も、本発明のサクションローラの他の実施形態の部分断面図である。図6に示す実施形態では、第1多孔質体6が、内側層6aと内側層6aよりも平均気孔径が小さい外側層6bとを有している。ローラにおける多孔質体の構成は特に限定されず、このように平均気孔径が異なる複数の層が積層されていてもよい。   FIG. 6 is also a partial cross-sectional view of another embodiment of the suction roller of the present invention. In the embodiment shown in FIG. 6, the first porous body 6 has an inner layer 6a and an outer layer 6b having an average pore diameter smaller than that of the inner layer 6a. The structure of the porous body in the roller is not particularly limited, and a plurality of layers having different average pore diameters may be laminated as described above.

次に、ローラ1の製造方法の一実施形態について説明する。まず、金属製の支持部材10を準備し、支持部材10に組み付けられた第2多孔質体5を形成するために、複数の部分多孔質体3を形成する。   Next, an embodiment of a method for manufacturing the roller 1 will be described. First, a metal support member 10 is prepared, and a plurality of partial porous bodies 3 are formed in order to form the second porous body 5 assembled to the support member 10.

まず、アルミナを主成分とするセラミックス体を粉砕し、粉砕によって得られたセラミック粉体を得る。この際、粒径の大きさにより50μm〜200μmの範囲にあるものと、10μm以下にあるものを選択分類する。そして、成形用金型内の所望の底面および壁面の所定部位にバインダーを添加した粒径10μm以下のセラミック粉末を塗布し、さらにその内側にバインダーを添加した50μm〜200μmのセラミック粉末を充填し、これを円筒状に成形した後に所定の温度で焼成し、部分多孔質体3を得る。部分多孔質体3はそれぞれ1つずつ成形し、複数個を同時に焼成すればよい。   First, a ceramic body mainly composed of alumina is pulverized to obtain a ceramic powder obtained by pulverization. At this time, depending on the size of the particle size, those in the range of 50 μm to 200 μm and those in the range of 10 μm or less are selectively classified. Then, a ceramic powder having a particle size of 10 μm or less to which a binder is added is applied to a predetermined bottom surface and a predetermined wall surface in a molding die, and further filled with a ceramic powder of 50 μm to 200 μm to which a binder is added, This is formed into a cylindrical shape and then fired at a predetermined temperature to obtain a partially porous body 3. The partial porous bodies 3 may be formed one by one and fired at the same time.

焼成によって多孔質のセラミックを得る場合、焼成時の自重によって、焼成後のセラミック体の平均気孔径がばらつく場合がある。本実施形態では、軸方向に沿った長さが比較的小さい部分多孔質体3を複数組み合わせて、軸方向に沿って長い第2多孔質体5を構成している。このため、1つ1つの部分多孔質体3は小さくコンパクトに形成することができ、これら部分多孔質体3の焼成の際、自重によって部分多孔質体3に発生する平均気孔径のばらつきは小さく抑制されている。この後、支持部材10に複数の部分多孔質体3を組み付けて、組み付けた構成体の外周(部分多孔質体3の外周)を研削加工して形状を調整して第2多孔質体5を形成する。   When a porous ceramic is obtained by firing, the average pore size of the fired ceramic body may vary depending on its own weight during firing. In the present embodiment, a plurality of partial porous bodies 3 having relatively small lengths along the axial direction are combined to constitute the second porous body 5 that is long along the axial direction. Therefore, each of the partial porous bodies 3 can be formed small and compact, and when these partial porous bodies 3 are fired, variation in the average pore diameter generated in the partial porous bodies 3 due to their own weight is small. It is suppressed. Thereafter, the plurality of partial porous bodies 3 are assembled to the support member 10, the outer periphery of the assembled structure (the outer periphery of the partial porous body 3) is ground and the shape is adjusted, and the second porous body 5 is adjusted. Form.

その後、形成した第2多孔質体5の表面に、溶射によって第1多孔質体6を成膜する。溶射によって第1多孔質体6を形成することで、第2多孔質体5の表面に強固に接合した第1多孔質体6を形成することができる。この溶射の際、上述の面取り部7や切欠き部8を有する場合は、面取り部7や切欠き部8に選択的に大きな溶射膜を形成することで、長
さ方向に沿って一様な厚さの第1多孔質体6を形成することができる。
Thereafter, the first porous body 6 is formed on the surface of the formed second porous body 5 by thermal spraying. By forming the first porous body 6 by thermal spraying, the first porous body 6 firmly bonded to the surface of the second porous body 5 can be formed. In the case of the thermal spraying, when the chamfered portion 7 or the notch portion 8 described above is provided, a large sprayed film is selectively formed on the chamfered portion 7 or the notch portion 8 so as to be uniform along the length direction. The first porous body 6 having a thickness can be formed.

以上、本発明の実施形態について説明したが、本発明は上述の各種実施形態に限定されるものでなく、本発明の要旨を逸脱しない範囲において、各種の改良および変更を行なってもよいのはもちろんである。   As mentioned above, although embodiment of this invention was described, this invention is not limited to the above-mentioned various embodiment, In the range which does not deviate from the summary of this invention, it is possible to perform various improvements and changes. Of course.

φ80mm×500mmL、シャフトの両端の長さ700mmL、シャフト径φ30の円筒形状をもつ、上記実施形態のローラ1を製作した。第2多孔質体5は、アルミナセラミックスを主成分とする10個の部分多孔質体3を並べて配置したものを使用した。第2多孔質体5の平均気孔径は50μmであり、厚さは10mmであった。この第2多孔質体の上に、アルミナを主成分とする溶射膜からなる第1多孔質体を形成した。第1多孔質体の厚さは800μmとし、表面側の多孔質層の平均気孔径が2μm以下になるように表面を研削して調整した。このサクションローラを用いてフィルムを搬送したところ、問題なくフィルムは吸着し、搬送することができた。   The roller 1 of the above embodiment having a cylindrical shape of φ80 mm × 500 mmL, a length of both ends of the shaft of 700 mmL, and a shaft diameter of φ30 was manufactured. As the second porous body 5, a structure in which ten partial porous bodies 3 mainly composed of alumina ceramics were arranged side by side was used. The average pore diameter of the second porous body 5 was 50 μm, and the thickness was 10 mm. On this 2nd porous body, the 1st porous body which consists of a sprayed film | membrane which has an alumina as a main component was formed. The thickness of the 1st porous body was 800 micrometers, and the surface was ground and adjusted so that the average pore diameter of the porous layer of the surface side might be 2 micrometers or less. When the film was transported using this suction roller, the film was adsorbed and transported without any problem.

1・・・サクションローラ
2・・・シャフト
3・・・円筒状多孔質セラミックブロック
4・・・内部空間
5・・・内部側の多孔質層
6・・・表面側の多孔質層
7・・・面取り部
8・・・切欠き部
9・・・境界部
DESCRIPTION OF SYMBOLS 1 ... Suction roller 2 ... Shaft 3 ... Cylindrical porous ceramic block 4 ... Internal space 5 ... Internal porous layer 6 ... Surface side porous layer 7 ...・ Chamfer 8 ... Notch 9 ... Border

Claims (9)

シート状の対象体を外表面に吸着しながら回転することで前記対象体を前記回転の方向に沿って搬送する円筒形状のサクションローラであって、
前記外表面を有する第1多孔質体と、
前記第1多孔質体よりも前記回転軸に近い側に配置された、前記第1多孔質体と当接する第2多孔質体とを有し、
前記第1多孔質体の厚さは前記第2多孔質体の厚さよりも小さく、かつ前記第1多孔質体の平均気孔径は前記第2多孔質体の平均気孔径よりも小さいことを特徴とするサクションローラ。
A cylindrical suction roller that conveys the object along the direction of rotation by rotating while adsorbing the sheet-like object on the outer surface,
A first porous body having the outer surface;
A second porous body disposed on the side closer to the rotation axis than the first porous body, and in contact with the first porous body;
The thickness of the first porous body is smaller than the thickness of the second porous body, and the average pore diameter of the first porous body is smaller than the average pore diameter of the second porous body. Suction roller.
前記第1多孔質体は半導電性を有することを特徴とする請求項1に記載のサクションローラ。   The suction roller according to claim 1, wherein the first porous body has semiconductivity. 前記第1多孔質体は、酸化チタンもしくは酸化クロムのいずれかを含むことを特徴とする請求項1または2に記載のサクションローラ。   The suction roller according to claim 1 or 2, wherein the first porous body contains either titanium oxide or chromium oxide. 前記第2多孔質体は、前記回転軸方向に沿って並んだ複数の部分多孔質体を有して構成されていることを特徴とする請求項1〜3のいずれかに記載のサクションローラ。   The suction roller according to any one of claims 1 to 3, wherein the second porous body has a plurality of partial porous bodies arranged along the rotation axis direction. 複数の前記部分多孔質体の端面同士が当接していることを特徴とする請求項4に記載のサクションローラ。   The suction roller according to claim 4, wherein end surfaces of the plurality of partial porous bodies are in contact with each other. 複数の前記部分多孔質体の端面は面取り部を有することを特徴とする請求項5に記載のサクションローラ。   The suction roller according to claim 5, wherein end surfaces of the plurality of partial porous bodies have chamfered portions. 複数の前記部分多孔質体の端面は切り欠き部を有することを特徴とする請求項5に記載のサクションローラ。   The suction roller according to claim 5, wherein end faces of the plurality of partial porous bodies have cutout portions. 前記第1多孔質体が、溶射により成膜された溶射膜であることを特徴とする請求項1〜7のいずれかに記載のサクションローラ。   The suction roller according to claim 1, wherein the first porous body is a sprayed film formed by spraying. 請求項1〜8のいずれかに記載のサクションローラを用いて構成された搬送装置。   A conveyance device configured using the suction roller according to claim 1.
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