JP2015182082A - Laser beam shut-off device and laser processor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a laser beam shut-off device and a laser processor that can suppress the generation of dust when a shutter is opened and closed and reduce an intensity of a laser beam leaking outside the housing when the shutter is blocked.SOLUTION: There are included a housing 3 having a wall part provide with a housing opening to shut off a laser beam with which the interior is irradiated, a box-type shutter 9 that slides with a first interval from the wall part between a block position blocking the housing opening and an open position opening the housing opening, and a box-type shutter cover 10 mounted on the wall part so as to cover the shutter 9 slidably between the block position and the open position to be provided with a cover opening. A second interval for connecting the cover opening with the first interval is provided between the shutter 9 and the shutter cover 10.

Description

  The present invention relates to a laser light blocking device and a laser processing device provided with a shutter that opens and closes an opening provided in a housing.

  2. Description of the Related Art Conventionally, there is known an optical component protection device that includes a cavity plate in which a laser beam path is disposed, and a shutter that is slidable with respect to the cavity plate and that opens and closes the laser beam path (patent). Reference 1).

Japanese Patent Laid-Open No. 08-088426

  In the conventional optical component protection device, when the shutter is opened and closed, dust may be generated by rubbing between the shutter and the cavity plate.

  The present invention provides a laser light blocking device and a laser processing device that can suppress the generation of dust when the shutter is opened and closed, and can reduce the intensity of laser light that leaks out of the housing when the shutter is closed. The challenge is to do.

  The laser light blocking device of the present invention has a wall portion provided with a housing opening, a housing for blocking the laser light irradiated inside, a closed position for closing the housing opening, and an opening for opening the housing opening A box-shaped shutter that slides with a first gap between the wall portion and the position, and is attached to the wall portion so as to slidably cover the shutter between the closed position and the open position, A box-type shutter cover provided with a cover opening, and a second gap connecting the cover opening and the first gap is provided between the shutter located at the closed position and the shutter cover. And

  According to this configuration, since the shutter slides with a first gap between the housing and the wall portion of the housing, the shutter and the wall portion of the housing are not rubbed, and dust is generated when the shutter is opened and closed. Can be suppressed. Further, since the first gap is provided between the shutter and the wall portion of the housing, laser light may leak from the housing opening even when the shutter is closed. By providing the second gap that connects the gap, the laser beam passes through the second gap and the first gap before reaching the housing opening, so that the number of times that the laser beam is reflected before leaking from the housing opening is increased. Can do. Therefore, dust can be prevented from being generated when the shutter is opened and closed, and the intensity of laser light leaking out of the housing when the shutter is closed can be reduced.

  In this case, it is preferable that the shutter has a box shape in which one surface facing the cover opening is opened.

  According to this configuration, since the shutter has a box shape in which one surface facing the cover opening is opened, the laser light is reflected on the inner surface of the shutter when the shutter is closed. Therefore, the number of times of reflection before leaking from the housing opening can be further increased.

  In this case, the shutter cover has a cover piece continuous from the opening edge of the opening position of the cover opening to the inside of the shutter cover from the opening edge in the sliding direction of the shutter, and the shutter cover is closed with the shutter positioned at the closing position. It is preferable that a part of the second gap is provided between the first shutter surface that is the inner surface of the shutter that becomes the rear when sliding to the position and the cover piece.

  According to this configuration, by providing a part of the second gap between the cover piece and the first shutter surface, even when the laser light is incident on the open edge side of the cover opening, the laser light is The number of reflections before leaking from the housing opening can be increased.

  In this case, it is preferable that the gap widths of the first gap and the second gap are 0.5 mm or more and 2 mm or less, respectively, and the length of the shortest side of the shutter is 10 mm or more and 20 mm or less.

  According to this configuration, the laser beam can be reflected an appropriate number of times.

  The laser processing apparatus of the present invention includes a laser irradiation unit that irradiates a workpiece with laser light, a wall portion provided with a housing opening into which the workpiece is carried, a housing that blocks laser light, and a housing opening A box-type shutter that slides between the wall portion and a closed position between the closed position and the open position. And a box-shaped shutter cover provided with a cover opening so as to be slidably covered with the cover, and between the shutter located at the closed position and the shutter cover, the cover opening and the first gap And a second gap for connecting the two.

  According to this configuration, since the shutter slides with a first gap between the housing and the wall portion of the housing, the shutter and the wall portion of the housing are not rubbed, and dust is generated when the shutter is opened and closed. Can be suppressed. Thereby, it is possible to perform laser processing on the workpiece in an environment with little dust, and it is possible to suppress the quality of the workpiece from being damaged by the dust. Further, when the shutter is opened and closed, the workpiece can be carried into the housing from the housing opening and the cover opening. Thereby, a workpiece | work can be processed by irradiating a laser beam. In addition, since the first gap is provided between the shutter and the wall of the housing, laser light may leak from the housing opening even when the shutter is closed, but the cover opening and the first gap are connected. By providing the shutter cover provided with the second gap, it is possible to increase the number of times the laser beam is reflected before leaking from the housing opening. Therefore, dust can be prevented from being generated when the shutter is opened and closed, and the intensity of laser light leaking out of the housing when the shutter is closed can be reduced.

It is a block diagram of the laser processing apparatus which concerns on one Embodiment of this invention. It is a perspective view of the carrying-in port of a laser processing apparatus, (a) is a state in which a shutter is located in the obstruction | occlusion position, (b) has shown the state in which a shutter is located in an open position. It is sectional drawing of the carrying-in port of a 1st example. It is sectional drawing of the carrying-in port of a 2nd example.

Hereinafter, with reference to the attached drawings, a laser processing apparatus using the laser beam blocking device of the present invention will be described. This laser processing apparatus, for example, irradiates a workpiece with a class 4 level high-power laser beam and applies marking processing such as a serial number or an ID to a desired position of the workpiece. As the workpiece, for example, an electronic component such as an inkjet head component is used. The laser processing apparatus is installed in a clean room.
In the following, description will be made using “front”, “rear”, “upper”, “lower”, “left”, and “right” shown in the drawings, but these directions are for convenience of description, and the present invention is implemented. Is not limited to these directions.

  As shown in FIG. 1, a laser processing apparatus 1 includes a laser irradiation unit 2 that irradiates a workpiece W with laser light, and a laser light blocking unit 4 that includes a housing 3 that blocks laser light irradiated by the laser irradiation unit 2. And a transport unit 5 accommodated in the housing 3.

  The laser irradiation unit 2 irradiates the workpiece W carried into the housing 3 with laser light.

  The conveyance part 5 conveys the workpiece | work W from the entrance 6 mentioned later to the exit 7. FIG. The conveying unit 5 is preferably one that generates less dust, and for example, a linear motor driven one can be used.

  The laser light blocking unit 4 includes a housing 3 that blocks high-power laser light so as not to leak outside. Further, the laser light blocking unit 4 includes a carry-in side shutter unit 8 a provided at the carry-in port 6 and a carry-out side shutter unit 8 b provided at the carry-out port 7.

  The carry-in side shutter unit 8a and the carry-out side shutter unit 8b each include a shutter 9 that opens and closes the carry-in port 6 or the carry-out port 7, and a shutter cover 10 that is attached to the wall surface of the housing 3 so as to cover the shutter 9 with a gap. And an air cylinder 11 that slides the shutter 9 up and down in the shutter cover 10 and a linear motion guide (not shown) that slidably supports the shutter 9. In addition, let the structure of the carrying-in side shutter part 8a and the carrying-out side shutter part 8b in this embodiment be a "1st example."

The housing 3 has a substantially rectangular parallelepiped shape, and includes a housing upper wall T1, a housing lower wall B1, a housing left wall L1, a housing right wall R1, a housing front wall F1, and a housing rear wall Re1, and a laser irradiation portion on the housing rear wall Re1. 2 is attached. The workpiece W is carried in from a carry-in entrance 6 provided in the housing left wall L1 by a carry-in robot (not shown), and the work W is carried out from a carry-out port 7 provided in the housing right wall R1 by a carry-out robot (not shown). . Since the carry-in side shutter unit 8a and the carry-out side shutter unit 8b have the same configuration, the carry-in side shutter unit 8a will be described below as a representative.
The housing left wall L1 is an example of the “wall portion” in the claims.

As shown in FIGS. 2 and 3, the shutter 9 has a substantially rectangular parallelepiped box shape whose right surface is open, and the shutter upper wall T2, the shutter lower wall B2, and the front of the shutter are arranged on the five surfaces excluding the right surface, respectively. A wall F2, a shutter rear wall Re2, and a shutter left wall L2 are provided. The shutter 9 opens and closes the carry-in port 6 by moving between an open position P1 that opens the carry-in port 6 and a closed position P2 that closes the carry-in port 6. The shutter 9 slides up and down with a left gap G1 provided between the shutter left wall L2 and the housing left wall L1. The gap width of the left gap G1 is, for example, not less than 0.5 mm and not more than 2 mm. Further, the first shutter surface, which is the inner surface of the shutter upper wall T2 that is rearward when the shutter 9 is slid to the closing position P2 in a state where the shutter 9 is located at the closing position P2, faces a cover piece 14 described later.
The left gap G1 is an example of the “first gap” in the claims.

The shutter cover 10 includes a cover upper wall T3, a cover lower wall B3, a cover front wall F3, a cover rear wall Re3, and a cover right wall R3. The cover right wall R3 is provided with a cover opening 13 at a position matching the housing opening 12. The cover right wall R <b> 3 has a cover piece 14 that extends from the opening edge on the upper side (opening position side in the sliding direction) of the cover opening 13 to the inside of the shutter cover 10. An upper gap G2 is provided between the cover piece 14 and the first shutter surface facing the cover piece 14. Further, a lower gap G3 is provided between the shutter lower wall B2 and the cover lower wall B3 in a state where the shutter 9 is located at the closing position P2. The gap width of the lower gap G3 is, for example, not less than 0.5 mm and not more than 2 mm. The length of the short side including both the lower gap G3 and the left gap G1 is, for example, 10 mm or more and 20 mm or less.
The upper gap G2 is an example of “a part of the second gap” in the claims, and the lower gap G3 is an example of the “second gap” in the claims.

  The air cylinder 11 has a piston rod 15 that moves up and down by air pressure, and the tip of the piston rod 15 is fixed to the shutter upper wall T <b> 2 of the shutter 9. By moving the piston rod 15 back and forth, the shutter 9 can be moved up and down between the open position P1 and the closed position P2.

  In addition, it is preferable that each component of the laser beam blocking unit 4 is subjected to an antireflection process such as a matte process so that the laser beam is diffusely reflected.

  Next, the laser processing apparatus 1 operates in the following flow. The laser processing apparatus 1 moves the shutter 9 of the carry-in side shutter unit 8 a to the open position P <b> 1, opens the carry-in entrance 6, loads the workpiece W by a carry-in robot or the like, and places it on the transfer unit 5. Subsequently, the laser processing apparatus 1 moves the shutter 9 to the closing position P <b> 2 and closes the carry-in port 6. The workpiece W placed on the conveyance unit 5 is conveyed rightward by the conveyance unit 5, the conveyance unit 5 stops at the irradiation position of the laser beam, and the workpiece W is processed by the laser irradiation unit 2. The processed workpiece W is again conveyed rightward by the conveyance unit 5 and conveyed to the carry-out side shutter unit 8b. The laser processing apparatus 1 moves the shutter 9 of the carry-out side shutter portion 8b to the open position P1, opens the carry-out port 7, and takes out the workpiece W to the outside of the housing 3 by a carry-out robot or the like. After taking out the workpiece W, the laser processing apparatus 1 moves the shutter 9 of the carry-out side shutter unit 8b to the closing position P2, and closes the carry-out port 7.

As described above, according to the laser processing apparatus 1 according to the embodiment of the present invention, the shutter left wall L2 slides with the left gap G1 between the shutter left wall L1 and the housing left wall L1. However, it is possible to prevent dust from being generated when the shutter 9 is opened and closed without being rubbed. Further, since the left gap G1 is provided between the shutter left wall L2 and the housing left wall L1, laser light may leak from the housing opening 12 even when the shutter 9 is closed. Since the lower gap G3 connecting the cover opening 13 and the left gap G1 is provided, the laser beam passes through the lower gap G3 and the left gap G1 before reaching the housing opening 12, and therefore leaks from the housing opening 12. You can increase the number of reflections before exiting. Further, since the shutter 9 has a box shape in which one surface facing the cover opening 13 is opened, when the shutter 9 is closed, the laser light is reflected from the inner surface of the shutter 9 and leaks from the housing opening 12. The number of reflections can be further increased. The number of times the laser beam is reflected before leaking from the housing opening 12 is, for example, a total of six reflections. In addition, the intensity of the laser beam is reduced to 1/10 in one reflection. When reflected six times in total, the intensity of the laser light is reduced to 1/10 ⁶ . Therefore, dust can be prevented from being generated when the shutter 9 is opened and closed, and the intensity of the laser light leaking out of the housing when the shutter 9 is closed can be reduced.

  Then, the 2nd example which is a modification of the carrying-in side shutter part 8a and the carrying-out side shutter part 8b in the laser processing apparatus 1 of this embodiment is demonstrated (refer FIG. 4). The shutter 9 provided in the carry-in side shutter unit 8a and the carry-out side shutter unit 8b of the second example is a box shape in which one surface facing the cover opening 13 is not opened, that is, a block shape. Is different. Hereinafter, different points will be mainly described.

  The shutter 9 includes a shutter upper wall T2, a shutter lower wall B2, a shutter front wall F2, a shutter rear wall Re2, a shutter left wall L2, and a shutter right wall R2.

  The shutter cover 10 has a cover opening 13 at a position that matches the housing opening 12, but does not have a cover piece 14.

  As described above, in the laser processing apparatus 1 of the present embodiment, even when the carry-in side shutter portion 8a of the second example is provided, the shutter left wall L2 slides with the left gap G1 between the housing left wall L1. Therefore, the shutter left wall L2 and the housing left wall L1 are not rubbed, and generation of dust when the shutter 9 is opened and closed can be suppressed. Since the left gap G1 is provided between the shutter left wall L2 and the housing left wall L1, the laser light may leak from the housing opening 12 even when the shutter 9 is closed. However, if the laser light passes through the cover opening 13 and enters the lower gap G3 side, the shutter cover 10 provides the lower gap G3 connecting the cover opening 13 and the left gap G1, so that the laser light However, the number of times of reflection before leaking from the housing opening 12 can be increased. Therefore, dust can be prevented from being generated when the shutter 9 is opened and closed, and the intensity of the laser light leaking out of the housing 3 when the shutter 9 is closed can be reduced.

  DESCRIPTION OF SYMBOLS 3 ... Housing, 4 ... Laser-light interruption | blocking part, 9 ... Shutter, 10 ... Shutter cover, 12 ... Housing opening, 13 ... Cover opening, P1 ... Opening position, P2 ... Closure position, G1 ... Left gap, G3 ... Bottom gap

Claims (5)

A housing having a wall portion provided with a housing opening, and blocking a laser beam irradiated inside;
A box-type shutter that slides between the wall portion and a closed position that closes the housing opening, and an open position that opens the housing opening, with a first gap between the wall portion, and
A box-shaped shutter cover attached to the wall so as to slidably cover the shutter between the closed position and the open position, and provided with a cover opening;
A laser light blocking device, wherein a second gap connecting the cover opening and the first gap is provided between the shutter located at the closed position and the shutter cover.   The laser light blocking device according to claim 1, wherein the shutter has a box shape in which one surface facing the cover opening is opened.   The shutter cover has a cover piece that extends from the open edge on the open position side in the sliding direction of the shutter in the opening edge of the cover opening to the inside of the shutter cover, and the shutter is in the closed position. 3. A part of the second gap is provided between the first shutter surface, which is the inner surface of the shutter that is rearward when sliding to the closed position, and the cover piece. The laser beam shut-off device described in 1.   The gap width of the first gap and the second gap is 0.5 mm or more and 2 mm or less, respectively, and the length of the shortest side of the shutter is 10 mm or more and 20 mm or less. The laser light blocking device according to any one of 1 to 3. A laser irradiation unit for irradiating the workpiece with laser light;
A wall portion provided with a housing opening into which the workpiece is carried, and a housing for blocking laser light;
A box-type shutter that slides between the wall portion and a closed position that closes the housing opening, and an open position that opens the housing opening, with a first gap between the wall portion, and
A box-shaped shutter cover attached to the wall so as to slidably cover the shutter between the closed position and the open position, and provided with a cover opening;
A laser processing apparatus, wherein a second gap connecting the opening of the cover and the first gap is provided between the shutter located at the closed position and the shutter cover.

Images