JP2015177011A - Sheet adhering device and adhering method - Google Patents

Sheet adhering device and adhering method Download PDF

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JP2015177011A
JP2015177011A JP2014052164A JP2014052164A JP2015177011A JP 2015177011 A JP2015177011 A JP 2015177011A JP 2014052164 A JP2014052164 A JP 2014052164A JP 2014052164 A JP2014052164 A JP 2014052164A JP 2015177011 A JP2015177011 A JP 2015177011A
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sheet
double
adherend
sided adhesive
release
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JP6220706B2 (en
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芳昭 杉下
Yoshiaki Sugishita
芳昭 杉下
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Lintec Corp
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Lintec Corp
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Abstract

PROBLEM TO BE SOLVED: To provide a sheet adhering device and an adhering method that enables reduction of a risk that dust infiltrates into the gap between a double-side adhesive sheet and a second adherend.SOLUTION: A sheet adhering device 10 has lead-out means 20 for temporarily fixing a band-shaped first peeling sheet RL1 to a first contact face SA1, peeling a band-shaped second peeling sheet RL2 from an original fabric RS in which the band-shaped second peeling sheet RL2 is temporarily fixed on a second contact face SA2, leading out a double-side adhesive sheet AS while the first peeling sheet RL1 is temporarily fixed to the first contact face SA1, and folding back the first peeling sheet RL1 in both the directions to the opposite side of a temporarily fixed face AP1, adhering means 30 for adhesively attaching the double-side adhesive sheet AS from the first peeling sheet RL1 side to a first adherend WK1, press means 40 for pressing a second adherend WK2 against the double-side adhesive sheet AS, and pull-out means 50 for pulling out the first peeling sheet RL1 from the gap between the double-side adhesive sheet AS and the second adherend WK2.

Description

本発明は、被着体に接着シートを貼付するシート貼付装置および貼付方法に関する。   The present invention relates to a sheet sticking apparatus and a sticking method for sticking an adhesive sheet to an adherend.

従来、両面接着シートを介して第1被着体と第2被着体とを貼付するシート貼付装置が知られている(例えば、特許文献1参照)。
特許文献1に記載のシート貼付装置は、一方の面にセパレータ(剥離シート)が仮着された両面粘着テープ(両面接着シート)をウエハ(第1被着体)に押圧して貼付する貼付けローラと、ウエハに貼付された両面粘着テープからセパレータを剥離して回収するセパレータ回収部と、両面粘着テープを挟んでウエハと対向する位置に支持基板(第2被着体)を保持可能な複数の係止爪と、支持基板をウエハに押圧する押圧部材とを備え、両面粘着テープを介してウエハと支持基板とを貼付可能に構成されている。
Conventionally, a sheet sticking device for sticking a first adherend and a second adherend via a double-sided adhesive sheet is known (see, for example, Patent Document 1).
The sheet sticking device described in Patent Document 1 is a sticking roller for pressing and sticking a double-sided adhesive tape (double-sided adhesive sheet) having a separator (release sheet) temporarily attached to one surface to a wafer (first adherend). A separator collecting unit that peels and collects the separator from the double-sided adhesive tape affixed to the wafer, and a plurality of support substrates (second adherends) that can hold the support substrate (second adherend) at positions facing the wafer across the double-sided adhesive tape A locking claw and a pressing member that presses the support substrate against the wafer are provided, and the wafer and the support substrate can be attached via a double-sided adhesive tape.

特開2008−172159号公報JP 2008-172159 A

しかしながら、特許文献1に記載されたような従来のシート貼付装置は、第1被着体に貼付された両面接着シートから剥離シートを剥離した後に、当該両面接着シートに第2被着体を貼付するため、当該両面接着シートと第2被着体との間に塵埃が混入するリスクが大きくなるという不都合がある。
また、両面接着シートと第2被着体との間に空気が入り込まないように、第2被着体を湾曲させて接着シートに貼付するため、当該第2被着体に加わるストレスが大きくなってしまうという不都合がある。
However, the conventional sheet sticking apparatus described in Patent Document 1 sticks the second adherend to the double-sided adhesive sheet after peeling the release sheet from the double-sided adhesive sheet stuck to the first adherend. Therefore, there is an inconvenience that the risk that dust is mixed between the double-sided adhesive sheet and the second adherend increases.
Further, since the second adherend is curved and attached to the adhesive sheet so that air does not enter between the double-sided adhesive sheet and the second adherend, the stress applied to the second adherend increases. There is an inconvenience.

本発明の目的は、両面接着シートと第2被着体との間に塵埃が混入するリスクを低減することができるシート貼付装置および貼付方法を提供することにある。
また、本発明の別の目的は、第2被着体に加わるストレスを軽減することができるシート貼付装置および貼付方法を提供することにある。
The objective of this invention is providing the sheet sticking apparatus and sticking method which can reduce the risk that dust will mix between a double-sided adhesive sheet and a 2nd to-be-adhered body.
Another object of the present invention is to provide a sheet sticking device and a sticking method capable of reducing stress applied to the second adherend.

本発明のシート貼付装置は、一方の面が第1接着面とされ、他方の面が第2接着面とされた両面接着シートを介して第1被着体と第2被着体とを貼付するシート貼付装置であって、前記両面接着シートの第1接着面に帯状の第1剥離シートが仮着され、前記第2接着面に帯状の第2剥離シートが仮着された原反から当該第2剥離シートを剥離するとともに、前記第1剥離シートが前記第1接着面に仮着した状態のまま前記両面接着シートを繰り出し、前記第1接着面に仮着された仮着面の反対側の面方向に前記第1剥離シートを折り返して当該両面接着シートを供給する繰出手段と、前記繰出手段で供給された両面接着シートを前記第1剥離シート側から前記第1被着体に押圧して貼付する貼付手段とを備え、前記第2被着体は、前記折り返された第1剥離シートを間に挟んで、前記両面接着シートに押圧され、前記第2被着体と前記両面接着シートとの間から前記折り返された第1剥離シートを介して当該第1剥離シートを引き抜く引抜手段を備えることを特徴とする。   The sheet sticking device of the present invention sticks the first adherend and the second adherend through a double-sided adhesive sheet in which one surface is a first adhesive surface and the other surface is a second adhesive surface. A sheet sticking device that performs the process from an original fabric in which a belt-like first release sheet is temporarily attached to the first adhesive surface of the double-sided adhesive sheet, and the belt-like second release sheet is temporarily attached to the second adhesive surface. While peeling the second release sheet, the double-sided adhesive sheet is fed out while the first release sheet is temporarily attached to the first adhesive surface, and is opposite to the temporary attachment surface temporarily attached to the first adhesive surface. A feeding unit that folds the first release sheet in the surface direction and supplies the double-sided adhesive sheet, and presses the double-sided adhesive sheet supplied by the feeding unit from the first release sheet side to the first adherend. Pasting means for pasting, and the second adherend is folded back. The first release sheet is pressed between the second adherend and the double-sided adhesive sheet through the first release sheet folded between the second adherend and the double-sided adhesive sheet with the first release sheet sandwiched therebetween. It has a drawing means for pulling out the sheet.

本発明のシート貼付装置は、一方の面が第1接着面とされ、他方の面が第2接着面とされた両面接着シートを介して第1被着体と第2被着体とを貼付するシート貼付装置であって、前記両面接着シートの第1接着面に帯状の第1剥離シートが仮着され、前記第2接着面に帯状の第2剥離シートが仮着された原反から当該第2剥離シートを剥離するとともに、前記第1剥離シートが前記第1接着面に仮着した状態のまま前記両面接着シートを繰り出し、前記第1接着面に仮着された仮着面の反対側の面方向に前記第1剥離シートを折り返して当該両面接着シートを供給する繰出手段と、前記繰出手段で供給された両面接着シートを前記第1剥離シート側から前記第1被着体に押圧して貼付する貼付手段と、前記折り返された第1剥離シートを間に挟んで、前記第2被着体を前記両面接着シートに押圧する押圧手段と、前記第2被着体と前記両面接着シートとの間から前記折り返された第1剥離シートを介して当該第1剥離シートを引き抜く引抜手段とを備えることを特徴とする。   The sheet sticking device of the present invention sticks the first adherend and the second adherend through a double-sided adhesive sheet in which one surface is a first adhesive surface and the other surface is a second adhesive surface. A sheet sticking device that performs the process from an original fabric in which a belt-like first release sheet is temporarily attached to the first adhesive surface of the double-sided adhesive sheet, and the belt-like second release sheet is temporarily attached to the second adhesive surface. While peeling the second release sheet, the double-sided adhesive sheet is fed out while the first release sheet is temporarily attached to the first adhesive surface, and is opposite to the temporary attachment surface temporarily attached to the first adhesive surface. A feeding unit that folds the first release sheet in the surface direction and supplies the double-sided adhesive sheet, and presses the double-sided adhesive sheet supplied by the feeding unit from the first release sheet side to the first adherend. Between the pasting means for pasting and the folded first release sheet. The pressing means for pressing the second adherend against the double-sided adhesive sheet, and the first release sheet folded back from between the second adherend and the double-sided adhesive sheet. And a pulling means for pulling out the release sheet.

本発明のシート貼付装置において、前記引抜手段は、前記第1接着面から前記第1剥離シートを部分的に剥離する部分剥離が可能に設けられ、当該部分剥離で表出した前記第1接着面の一部に前記押圧手段で前記第2被着体を押圧して貼付してから、前記第1剥離シートを引き抜く制御が可能に設けられていることが好ましい。   In the sheet sticking apparatus of the present invention, the pulling means is provided so as to be able to partially peel the first release sheet from the first adhesive surface, and the first adhesive surface exposed by the partial peeling. It is preferable that the second adherend is pressed and pasted on a part of the first adhering member by the pressing means and then the first release sheet is pulled out.

本発明のシート貼付方法は、一方の面が第1接着面とされ、他方の面が第2接着面とされた両面接着シートを介して第1被着体と第2被着体とを貼付するシート貼付方法であって、前記両面接着シートの第1接着面に帯状の第1剥離シートが仮着され、前記第2接着面に帯状の第2剥離シートが仮着された原反から当該第2剥離シートを剥離するとともに、前記第1剥離シートが前記第1接着面に仮着した状態のまま前記両面接着シートを繰り出し、前記第1接着面に仮着された仮着面の反対側の面方向に前記第1剥離シートを折り返して当該両面接着シートを供給する工程と、供給された両面接着シートを前記第1剥離シート側から前記第1被着体に押圧して貼付する工程と、前記折り返された第1剥離シートを間に挟んで、前記第2被着体を前記両面接着シートに押圧する工程と、前記第2被着体と前記両面接着シートとの間から前記折り返された第1剥離シートを介して当該第1剥離シートを引き抜く工程とを備えることを特徴とする。   In the sheet sticking method of the present invention, a first adherend and a second adherend are pasted via a double-sided adhesive sheet in which one surface is a first adhesive surface and the other surface is a second adhesive surface. The sheet sticking method is a method in which the belt-like first release sheet is temporarily attached to the first adhesive surface of the double-sided adhesive sheet, and the belt-like second release sheet is temporarily attached to the second adhesive surface. While peeling the second release sheet, the double-sided adhesive sheet is fed out while the first release sheet is temporarily attached to the first adhesive surface, and is opposite to the temporary attachment surface temporarily attached to the first adhesive surface. Folding the first release sheet in the surface direction and supplying the double-sided adhesive sheet; and pressing and feeding the supplied double-sided adhesive sheet to the first adherend from the first release sheet side; The second adherend is sandwiched between the folded first release sheets. Pressing the double-sided adhesive sheet, and pulling out the first release sheet through the folded first release sheet from between the second adherend and the double-sided adhesive sheet. Features.

以上のような本発明によれば、第1被着体に貼付した接着シートと第2被着体との間から、第1剥離シートを引き抜いて第1被着体と第2被着体とを貼付するため、両面接着シートと第2被着体との間に塵埃が混入するリスクを低減することができる。また、第2被着体が折り曲げられることを極力防止することができるので、当該第2被着体に加わるストレスを軽減することができる。   According to the present invention as described above, the first and second adherends are drawn by pulling out the first release sheet from between the adhesive sheet and the second adherend adhered to the first adherend. Therefore, the risk of dust being mixed between the double-sided adhesive sheet and the second adherend can be reduced. Further, since the second adherend can be prevented from being bent as much as possible, the stress applied to the second adherend can be reduced.

また、引抜手段で第1剥離シートを部分的に剥離すれば、表出した第1接着面の一部を第2被着体に貼付することができるため、第1剥離シートを引き抜く際に、第2被着体が第1被着体に対して位置ずれすることを防止することができる。   Further, if the first release sheet is partially peeled by the pulling means, a part of the exposed first adhesive surface can be attached to the second adherend, so when pulling out the first release sheet, It is possible to prevent the second adherend from being displaced with respect to the first adherend.

本発明の一実施形態に係るシート貼付装置の側面図。The side view of the sheet sticking apparatus which concerns on one Embodiment of this invention. シート貼付装置の動作説明図。Operation | movement explanatory drawing of a sheet sticking apparatus.

以下、本発明の一実施形態を図面に基づいて説明する。
また、本実施形態において、X軸、Y軸、Z軸は、それぞれが直交する関係にあり、X軸およびY軸は、所定平面内の軸とし、Z軸は、前記所定平面に直交する軸とする。さらに、本実施形態では、Y軸と平行な図1の手前方向から観た場合を基準とし、方向を示した場合、「上」がZ軸の矢印方向で「下」がその逆方向、「左」がX軸の矢印方向で「右」がその逆方向、「前」がY軸の紙面に直交する手前方向で「後」がその逆方向とする。
Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
In the present embodiment, the X axis, the Y axis, and the Z axis are orthogonal to each other, the X axis and the Y axis are axes within a predetermined plane, and the Z axis is an axis orthogonal to the predetermined plane. And Furthermore, in the present embodiment, when viewed from the near side of FIG. 1 parallel to the Y axis, when indicating the direction, “up” is the arrow direction of the Z axis, “down” is the opposite direction, “ “Left” is the X-axis arrow direction, “Right” is the opposite direction, “Front” is the front direction orthogonal to the Y-axis paper surface, and “Back” is the opposite direction.

図1において、シート貼付装置10は、一方の面が第1接着面SA1とされ、他方の面が第2接着面SA2とされた両面接着シートASを介して第1被着体WK1と第2被着体WK2とを貼付する装置であって、両面接着シートASの第1接着面SA1に帯状の第1剥離シートRL1が仮着され、第2接着面SA2に帯状の第2剥離シートRL2が仮着された原反RSから当該第2剥離シートRL2を剥離するとともに、第1剥離シートRL1が第1接着面SA1に仮着した状態のまま両面接着シートASを繰り出し、第1接着面SA1に仮着された仮着面AP1の反対側の面方向に第1剥離シートRL1を折り返して当該両面接着シートASを供給する繰出手段20と、繰出手段20で供給された両面接着シートASを第1剥離シートRL1側から第1被着体WK1に押圧して貼付する貼付手段としての押圧ローラ30と、折り返された第1剥離シートRL1を間に挟んで、第2被着体WK2を両面接着シートASに押圧する押圧手段40と、第2被着体WK2と両面接着シートASとの間から折り返された第1剥離シートRL1を介して当該第1剥離シートRL1を引き抜く引抜手段50とを備え、第1被着体WK1を支持する第1被着体支持手段60と、第2被着体WK2を供給する第2被着体供給手段70との近傍に配置されている。   In FIG. 1, the sheet sticking apparatus 10 includes a first adherend WK1 and a second adherend via a double-sided adhesive sheet AS having one surface as a first adhesive surface SA1 and the other surface as a second adhesive surface SA2. A device for affixing the adherend WK2, a belt-like first release sheet RL1 is temporarily attached to a first adhesive surface SA1 of a double-sided adhesive sheet AS, and a belt-like second release sheet RL2 is attached to a second adhesive surface SA2. The second release sheet RL2 is peeled off from the temporarily-attached original fabric RS, and the double-sided adhesive sheet AS is fed out while the first release sheet RL1 is temporarily attached to the first adhesive surface SA1. The feeding means 20 that folds the first release sheet RL1 in the surface direction opposite to the temporarily attached temporary attachment surface AP1 and supplies the double-sided adhesive sheet AS, and the double-sided adhesive sheet AS supplied by the feeding means 20 is the first. Release sheet RL The second adherend WK2 is pressed against the double-sided adhesive sheet AS with the pressing roller 30 as a sticking means for pressing and sticking to the first adherend WK1 from the side and the folded first release sheet RL1 sandwiched therebetween And a pulling means 50 for pulling out the first release sheet RL1 through the first release sheet RL1 folded back from between the second adherend WK2 and the double-sided adhesive sheet AS. The first adherend support means 60 for supporting the adherend WK1 and the second adherend supply means 70 for supplying the second adherend WK2 are disposed in the vicinity.

繰出手段20は、原反RSを支持する支持ローラ21と、原反RSを案内する複数のガイドローラ22と、第2剥離シートRL2を折り返して当該第2剥離シートRL2から両面接着シートASを剥離する剥離板23と、駆動機器としての回動モータ24Aによって駆動される駆動ローラ24との間に第2剥離シートRL2を挟み込むピンチローラ25と、第2剥離シートRL2を回収する回収ローラ26とを備えている。   The feeding means 20 folds the second release sheet RL2 and peels the double-sided adhesive sheet AS from the support roller 21 that supports the original fabric RS, a plurality of guide rollers 22 that guide the original fabric RS, and the second release sheet RL2. A pinch roller 25 for sandwiching the second release sheet RL2 between the release plate 23 to be driven and a driving roller 24 driven by a rotation motor 24A as a drive device, and a collection roller 26 for collecting the second release sheet RL2. I have.

押圧手段40は、駆動機器としてのリニアモータ41のスライダ41Aに支持された直動モータ42と、直動モータ42の出力軸42Aに支持されたベースプレート44の下面に支持されるとともに、ゴム、樹脂、またはスポンジ等の変形可能な部材で構成され、支持面45Aを有する支持部材45と、クーロン力によって支持面45Aに両面接着シートASを引き付けて保持可能な静電チャック46とを備えている。   The pressing means 40 is supported by a linear motion motor 42 supported by a slider 41A of a linear motor 41 as a drive device, and a lower surface of a base plate 44 supported by an output shaft 42A of the linear motion motor 42, and is also made of rubber or resin. Or a support member 45 having a support surface 45A and an electrostatic chuck 46 capable of attracting and holding the double-sided adhesive sheet AS on the support surface 45A by Coulomb force.

引抜手段50は、駆動機器としての回動モータ51Aによって駆動される駆動ローラ51と、駆動ローラ51との間に第1剥離シートRL1を挟み込むピンチローラ52と、駆動機器としての回動モータ53Aによって駆動され、第1剥離シートRL1を回収する回収ローラ53と、両面接着シートASに対する第1剥離シートRL1の剥離を抑制する剥離抑制手段としての剥離ストッパ54とを備えている。   The pulling means 50 includes a driving roller 51 driven by a rotating motor 51A as a driving device, a pinch roller 52 that sandwiches the first release sheet RL1 between the driving roller 51, and a rotating motor 53A as a driving device. A recovery roller 53 that is driven and collects the first release sheet RL1 and a release stopper 54 as a release suppression unit that suppresses the release of the first release sheet RL1 from the double-sided adhesive sheet AS are provided.

第1被着体支持手段60は、駆動機器としてのリニアモータ61のスライダ61Aに支持され、減圧ポンプや真空エジェクタ等の図示しない減圧手段によって第1被着体WK1を吸着保持可能な支持面62Aを有するテーブル62を備えている。   The first adherend support means 60 is supported by a slider 61A of a linear motor 61 serving as a driving device, and a support surface 62A capable of attracting and holding the first adherend WK1 by a decompression means (not shown) such as a decompression pump or a vacuum ejector. The table 62 having the above is provided.

第2被着体供給手段70は、上部開口下部閉塞型の筒状に形成され、複数の第2被着体WK2を収容可能な収容手段71と、収容手段71内に設けられた駆動機器としての直動モータ72の出力軸72Aに支持され、第2被着体WK2を載置可能なテーブル73と、最上部に位置する第2被着体WK2の上面を検知する光学センサや接触センサ等のセンサあるいはカメラ等の撮像手段からなる検知手段74とを備えている。   The second adherend supply means 70 is formed in a cylindrical shape having a closed upper opening and a lower part, and can accommodate a plurality of second adherends WK2 and a drive device provided in the accommodation means 71. The table 73 is supported by the output shaft 72A of the linear motor 72 and can place the second adherend WK2, and the optical sensor or contact sensor for detecting the upper surface of the second adherend WK2 located at the top. And detecting means 74 comprising imaging means such as a camera or a camera.

以上のシート貼付装置10において、両面接着シートASを介して第1被着体WK1と第2被着体WK2とを貼付する手順を説明する。
先ず、作業者が原反RSを図1中実線で示すようにセットし、複数の第2被着体WK2をテーブル73上に重ねて収容した後、操作パネルやパーソナルコンピュータ等の図示しない入力手段を介して運転開始の信号を入力すると、繰出手段20および引抜手段50が回動モータ24A、51A、53Aを駆動し、原反RSを繰り出す。そして、剥離板23上に位置する両面接着シートASが所定位置に到達したことを光学センサや撮像手段等の図示しない検知手段が検知すると、繰出手段20および引抜手段50が回動モータ24A、51A、53Aの駆動を停止し、当該繰出手段20がスタンバイ状態となる。次いで、第2被着体供給手段70が直動モータ72を駆動し、テーブル73を昇降させ、最上部に位置する第2被着体WK2の上面が検知手段74に検知されると、直動モータ72の駆動を停止する。そして、人手または多関節ロボットやベルトコンベア等の図示しない搬送手段により、図1中実線で示す初期位置にあるテーブル62上に第1被着体WK1を載置すると、第1被着体支持手段60が図示しない減圧手段を駆動し、当該第1被着体WK1を吸着保持した後、リニアモータ61を駆動し、テーブル62を左方向に移動させる。
In the above sheet sticking apparatus 10, the procedure for sticking the first adherend WK1 and the second adherend WK2 through the double-sided adhesive sheet AS will be described.
First, after an operator sets the original fabric RS as shown by a solid line in FIG. 1 and stores a plurality of second adherends WK2 on the table 73, input means (not shown) such as an operation panel or a personal computer. When the operation start signal is input via the, the feeding means 20 and the pulling means 50 drive the rotation motors 24A, 51A, 53A to feed out the original fabric RS. Then, when a detection means (not shown) such as an optical sensor or an imaging means detects that the double-sided adhesive sheet AS located on the peeling plate 23 has reached a predetermined position, the feeding means 20 and the drawing means 50 are rotated by the rotation motors 24A and 51A. , 53A is stopped, and the feeding means 20 enters a standby state. Next, when the second adherend supply means 70 drives the linear motion motor 72 to raise and lower the table 73 and the upper surface of the second adherend WK2 located at the uppermost position is detected by the detection means 74, the direct movement is performed. The drive of the motor 72 is stopped. Then, when the first adherend WK1 is placed on the table 62 at the initial position indicated by the solid line in FIG. 1 by a transport means (not shown) such as a manual or multi-joint robot or a belt conveyor, the first adherend support means 60 drives a decompression means (not shown) to suck and hold the first adherend WK1, and then drives the linear motor 61 to move the table 62 to the left.

そして、第1被着体WK1が剥離板23の下方の所定位置に到達したことが光学センサや撮像手段等の図示しない検知手段に検知されると、繰出手段20および引抜手段50がテーブル62の移動に同期して回動モータ24A、51A、53Aを駆動し、支持ローラ21から原反RSを繰り出すとともに、回収ローラ53から第1剥離シートRL1を繰り出す。これにより、剥離板23で両面接着シートASから第2剥離シートRL2を剥離するとともに、図1中右側の二点鎖線で示すように、第1剥離シートRL1が第1接着面SA1に仮着した状態のまま両面接着シートASを繰り出し、第1接着面SA1に仮着された仮着面AP1の反対側の面方向に第1剥離シートRL1を折り返して当該両面接着シートASを供給し、当該両面接着シートASを第1剥離シートRL1側から押圧ローラ30で第1被着体WK1に押圧して貼付する。そして、次の両面接着シートASが剥離板23上の所定位置で図示しない検知手段に検知されると、繰出手段20、引抜手段50、および第1被着体支持手段60が回動モータ24A、51A、53A、およびリニアモータ61の駆動を停止する。これにより、図1中左側の二点鎖線で示すように、第1被着体WK1に第2接着面SA2全面が貼付される。   When the detection means (not shown) such as an optical sensor or an imaging means detects that the first adherend WK1 has reached a predetermined position below the peeling plate 23, the feeding means 20 and the drawing means 50 are In synchronization with the movement, the rotation motors 24A, 51A, 53A are driven to feed out the original fabric RS from the support roller 21 and to feed out the first release sheet RL1 from the collection roller 53. As a result, the second release sheet RL2 is peeled from the double-sided adhesive sheet AS by the release plate 23, and the first release sheet RL1 is temporarily attached to the first adhesive surface SA1 as shown by the two-dot chain line on the right side in FIG. The double-sided adhesive sheet AS is fed out in the state, the first release sheet RL1 is folded back in the direction opposite to the temporary attachment surface AP1 temporarily attached to the first adhesive surface SA1, and the double-sided adhesive sheet AS is supplied. The adhesive sheet AS is applied to the first adherend WK1 by pressing with the pressing roller 30 from the first release sheet RL1 side. Then, when the next double-sided adhesive sheet AS is detected by a detection means (not shown) at a predetermined position on the peeling plate 23, the feeding means 20, the drawing means 50, and the first adherend support means 60 are rotated by the rotation motor 24A, The drive of 51A, 53A and the linear motor 61 is stopped. Thereby, as shown by the two-dot chain line on the left side in FIG. 1, the entire second adhesive surface SA2 is affixed to the first adherend WK1.

次に、押圧手段40が直動モータ42および静電チャック46を駆動し、図1中実線で示す初期位置にある支持部材45を下降させ、支持面45Aで第2被着体WK2を保持した後、当該支持部材45を初期位置に復帰させる。その後、第2被着体供給手段70が直動モータ72を駆動し、テーブル73を上昇させて、最上部に位置する次の第2被着体WK2の上面が検知手段74に検知されると、直動モータ72の駆動を停止する。   Next, the pressing means 40 drives the linear motion motor 42 and the electrostatic chuck 46 to lower the support member 45 at the initial position shown by the solid line in FIG. 1, and hold the second adherend WK2 on the support surface 45A. Thereafter, the support member 45 is returned to the initial position. Thereafter, when the second adherend supplying means 70 drives the linear motor 72 to raise the table 73 and the upper surface of the next second adherend WK2 located at the uppermost position is detected by the detecting means 74. Then, the drive of the linear motor 72 is stopped.

次に、押圧手段40がリニアモータ41を駆動し、初期位置にある支持部材45を右方向に移動させ、当該支持部材45が図1中左側の二点鎖線で示す位置で停止しているテーブル62の上方の所定位置に到達すると、リニアモータ41の駆動を停止する。次いで、押圧手段40が直動モータ42を駆動し、支持手段43を下降させることで、折り返された第1剥離シートRL1を間に挟んで、第2被着体WK2を両面接着シートASに押圧する。そして、引抜手段50が回動モータ51A、53Aを駆動し、第1剥離シートRL1を巻き取り、図2(A)に示すように、第2被着体WK2と両面接着シートASとの間から折り返された第1剥離シートRL1を介して当該第1剥離シートRL1を引き抜き、第1接着面SA1全体が第2被着体WK2に押圧されて貼付される。引き抜かれた第1剥離シートRL1は、図2(B)に示すように、剥離ストッパ54によって次の両面接着シートASに対する剥離が抑制され、トルクセンサやリミットスイッチ等の図示しない検知手段が当該第1剥離シートRL1の張力が所定値に達したことを検知すると、引抜手段50が回動モータ51A、53Aの駆動を停止する。このとき、引き抜かれた第1剥離シートRL1は、剥離ストッパ54によって次の両面接着シートASに対する剥離が抑制されるため、当該次の両面接着シートASの第1接着面SA1から第1剥離シートRL1が剥離されることで、第1接着面SA1部分に塵埃が付着することを防止することができる。   Next, the pressing means 40 drives the linear motor 41 to move the support member 45 in the initial position to the right, and the support member 45 is stopped at the position indicated by the two-dot chain line on the left side in FIG. When a predetermined position above 62 is reached, the driving of the linear motor 41 is stopped. Next, the pressing means 40 drives the linear motion motor 42 and lowers the supporting means 43, thereby pressing the second adherend WK2 against the double-sided adhesive sheet AS with the folded first release sheet RL1 interposed therebetween. To do. Then, the pulling means 50 drives the rotation motors 51A and 53A, winds up the first release sheet RL1, and, as shown in FIG. 2A, from between the second adherend WK2 and the double-sided adhesive sheet AS. The first release sheet RL1 is pulled out via the folded first release sheet RL1, and the entire first adhesive surface SA1 is pressed and pasted to the second adherend WK2. As shown in FIG. 2B, the pulled-off first release sheet RL1 is prevented from being peeled from the next double-sided adhesive sheet AS by the release stopper 54, and detection means (not shown) such as a torque sensor and a limit switch are used for the first release sheet RL1. When it is detected that the tension of the one release sheet RL1 has reached a predetermined value, the pulling means 50 stops driving the rotation motors 51A and 53A. At this time, the pulled-out first release sheet RL1 is prevented from being peeled off from the next double-sided adhesive sheet AS by the release stopper 54, and therefore the first release sheet RL1 from the first adhesive surface SA1 of the next double-sided adhesive sheet AS. By peeling off, it is possible to prevent dust from adhering to the first adhesive surface SA1 portion.

次に、押圧手段40が静電チャック46の駆動を停止した後、直動モータ42およびリニアモータ41を駆動し、支持部材45を初期位置に復帰させる。そして、第1被着体支持手段60が図示しない減圧手段の駆動を停止した後、人手または図示しない搬送手段が第2被着体WK2が貼付された第1被着体WK1を次工程に搬送し、第1被着体支持手段60がリニアモータ61を駆動し、テーブル62を初期位置に復帰させ、以降上記同様の動作が繰り返される。   Next, after the pressing means 40 stops driving the electrostatic chuck 46, the linear motion motor 42 and the linear motor 41 are driven to return the support member 45 to the initial position. Then, after the first adherend support means 60 stops driving the decompression means (not shown), the first adherend WK1 to which the second adherend WK2 is affixed is transported to the next process by a manual or transport means (not shown). Then, the first adherend support means 60 drives the linear motor 61 to return the table 62 to the initial position, and thereafter the same operation as described above is repeated.

以上のような実施形態によれば、第1被着体WK1に貼付した両面接着シートASと第2被着体WK2との間から、第1剥離シートRL1を引き抜いて第1被着体WK1と第2被着体WK2とを貼付するため、両面接着シートASと第2被着体WK2との間に塵埃が混入するリスクを低減することができる。また、第2被着体WK2が折り曲げられることを極力防止することができるので、当該第2被着体WK2に加わるストレスを軽減することができる。   According to the embodiment as described above, the first release sheet RL1 is pulled out from between the double-sided adhesive sheet AS and the second adherend WK2 attached to the first adherend WK1, and the first adherend WK1. Since the second adherend WK2 is affixed, the risk of dust being mixed between the double-sided adhesive sheet AS and the second adherend WK2 can be reduced. Moreover, since it is possible to prevent the second adherend WK2 from being bent as much as possible, the stress applied to the second adherend WK2 can be reduced.

以上のように、本発明を実施するための最良の構成、方法等は、前記記載で開示されているが、本発明は、これに限定されるものではない。すなわち、本発明は、主に特定の実施形態に関して特に図示され、かつ説明されているが、本発明の技術的思想および目的の範囲から逸脱することなく、以上述べた実施形態に対し、形状、材質、数量、その他の詳細な構成において、当業者が様々な変形を加えることができるものである。また、上記に開示した形状、材質などを限定した記載は、本発明の理解を容易にするために例示的に記載したものであり、本発明を限定するものではないから、それらの形状、材質などの限定の一部もしくは全部の限定を外した部材の名称での記載は、本発明に含まれる。   As described above, the best configuration, method and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this. That is, the invention has been illustrated and described with particular reference to certain specific embodiments, but without departing from the spirit and scope of the invention, Various modifications can be made by those skilled in the art in terms of material, quantity, and other detailed configurations. In addition, the description of the shape, material, and the like disclosed above is exemplary for ease of understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded the limitation of some or all of such restrictions is included in this invention.

例えば、貼付手段は、ブレード材、ゴム、樹脂、スポンジ等による押圧部材を採用することができ、エア噴き付けにより押圧する構成も採用することができる。
また、押圧手段40は、減圧ポンプや真空エジェクタ等の減圧手段によって、支持面45Aに第2被着体WK2を引き付けて保持するように構成してもよいし、メカチャックで第2被着体WK2を保持するように構成してもよい。
さらに、押圧手段40は、エア噴き付けにより第2被着体WK2を両面接着シートASに押圧する構成を採用してもよいし、ベースプレート44を介さずに支持部材45を支持してもよい。
また、押圧手段40を設けずに、人手で第2被着体WK2を押圧するようにしてもよい。
For example, a pressing member made of a blade material, rubber, resin, sponge, or the like can be used as the pasting means, and a configuration of pressing by air blowing can also be used.
Further, the pressing means 40 may be configured to attract and hold the second adherend WK2 on the support surface 45A by a decompression means such as a decompression pump or a vacuum ejector, or the second adherend with a mechanical chuck. You may comprise so that WK2 may be hold | maintained.
Further, the pressing means 40 may adopt a configuration in which the second adherend WK2 is pressed against the double-sided adhesive sheet AS by air blowing, or may support the support member 45 without the base plate 44 interposed therebetween.
Further, the second adherend WK2 may be pressed manually without providing the pressing means 40.

さらに、引抜手段50は、第1接着面SA1から第1剥離シートRL1を部分的に剥離する部分剥離が可能に設けられ、当該部分剥離で表出した第1接着面SA1の一部に押圧手段40または人手で第2被着体WK2を押圧して貼付してから、第1剥離シートRL1を引き抜く制御が可能に構成されてもよい。この場合、押圧手段40または人手で第2被着体WK2を両面接着シートASに押圧する前の段階で、引抜手段50が回動モータ51A、53Aを駆動し、第1接着面SA1の一部を表出させればよい。
また、引抜手段50が回動モータ51A、53Aの駆動を停止するタイミングは、引き抜かれた第1剥離シートRL1が所定の位置に達したことを光学センサやカメラ等の撮像手段が検知したときでもよい。
さらに、引抜手段50は、回動モータ51A、駆動ローラ51およびピンチローラ52を設けずに、回動モータ53Aによって回収ローラ53を駆動し、第1剥離シートRL1を引き抜いてもよい。
また、引抜手段50は、剥離抑制手段を設けなくてもよいし、図2(B)中二点鎖線で示すように、押圧ローラ30に第1剥離シートRL1を掛け回し、当該押圧ローラ30を剥離抑制手段として機能させてもよい。
Further, the pulling means 50 is provided so as to be able to partially peel the first release sheet RL1 from the first adhesive surface SA1, and presses the part of the first adhesive surface SA1 exposed by the partial peeling. For example, the second adherend WK2 may be pressed and pasted by 40 or manually, and then the first release sheet RL1 may be pulled out. In this case, before the second adherend WK2 is pressed against the double-sided adhesive sheet AS by the pressing means 40 or manually, the pulling means 50 drives the rotation motors 51A and 53A, and a part of the first adhesive surface SA1. Can be expressed.
Further, the timing at which the pulling means 50 stops driving the rotation motors 51A and 53A is when the image pickup means such as an optical sensor or a camera detects that the pulled first release sheet RL1 has reached a predetermined position. Good.
Further, the pulling means 50 may drive the collection roller 53 by the rotation motor 53A and pull the first release sheet RL1 without providing the rotation motor 51A, the drive roller 51, and the pinch roller 52.
Further, the pulling means 50 does not need to be provided with a peeling suppressing means, and as shown by a two-dot chain line in FIG. 2B, the first peeling sheet RL1 is hung around the pressing roller 30, and the pressing roller 30 is moved. You may make it function as a peeling suppression means.

また、本発明における両面接着シートASおよび各被着体WK1、WK2の材質、種別、形状等は、特に限定されることはない。例えば、両面接着シートASは、円形、楕円形、三角形や四角形等の多角形、その他の形状であってもよいし、感圧接着性、感熱接着性等の接着形態のものであってもよく、感熱接着性の両面接着シートASが採用された場合は、当該両面接着シートASを加熱する適宜なコイルヒータやヒートパイプ等の加熱手段を設けるといった適宜な方法で接着されればよい。また、このような両面接着シートASは、例えば、接着剤層だけの単層のものや、単層又は複層の中間層を有するもの、中間層のない複層のものであってよい。また、各被着体WK1、WK2としては、例えば、食品、樹脂容器、シリコン半導体ウエハや化合物半導体ウエハ等の半導体ウエハ、回路基板、光ディスク等の情報記録基板、ガラス板、鋼板、陶器、木板または樹脂板等、任意の形態の部材や物品なども対象とすることができる。なお、両面接着シートASを機能的、用途的な読み方に換え、例えば、情報記載用ラベル、装飾用ラベル、保護シート、ダイシングテープ、ダイアタッチフィルム、ダイボンディングテープ、記録層形成樹脂シート等の任意の形状の任意のシート、フィルム、テープ等を前述のような任意の被着体に貼付することができる。   In addition, the material, type, shape, and the like of the double-sided adhesive sheet AS and the adherends WK1 and WK2 in the present invention are not particularly limited. For example, the double-sided adhesive sheet AS may have a circular shape, an elliptical shape, a polygonal shape such as a triangle or a quadrangle, or other shapes, or may have an adhesive form such as pressure-sensitive adhesiveness or heat-sensitive adhesiveness. When the heat-sensitive adhesive double-sided adhesive sheet AS is employed, it may be bonded by an appropriate method such as providing a heating means such as an appropriate coil heater or heat pipe for heating the double-sided adhesive sheet AS. Moreover, such a double-sided adhesive sheet AS may be, for example, a single layer having only an adhesive layer, a single layer or a multilayer having an intermediate layer, or a multilayer having no intermediate layer. The adherends WK1 and WK2 include, for example, food, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, information recording substrates such as circuit boards and optical disks, glass plates, steel plates, ceramics, wood plates, Arbitrary forms of members and articles such as resin plates can also be targeted. In addition, the double-sided adhesive sheet AS is replaced with a functional and intended reading, for example, any information label, decorative label, protective sheet, dicing tape, die attach film, die bonding tape, recording layer forming resin sheet, etc. Any sheet, film, tape or the like having the shape can be attached to any adherend as described above.

本発明における手段および工程は、それら手段および工程について説明した動作、機能または工程を果たすことができる限りなんら限定されることはなく、まして、前記実施形態で示した単なる一実施形態の構成物や工程に全く限定されることはない。例えば、繰出手段は、両面接着シートの第1接着面に帯状の第1剥離シートが仮着され、第2接着面に帯状の第2剥離シートが仮着された原反から当該第2剥離シートを剥離するとともに、第1剥離シートが第1接着面に仮着した状態のまま両面接着シートを繰り出し、第1接着面に仮着された仮着面の反対側の面方向に第1剥離シートを折り返して当該両面接着シートを供給可能なものであれば、出願当初の技術常識に照らし合わせ、その技術範囲内のものであればなんら限定されることはない(他の手段および工程についての説明は省略する)。
また、前記実施形態における駆動機器は、回動モータ、直動モータ、リニアモータ、単軸ロボット、多関節ロボット等の電動機器、エアシリンダ、油圧シリンダ、ロッドレスシリンダおよびロータリシリンダ等のアクチュエータ等を採用することができる上、それらを直接的又は間接的に組み合せたものを採用することもできる(実施形態で例示したものと重複するものもある)。
The means and steps in the present invention are not limited in any way as long as they can perform the operations, functions, or steps described with respect to those means and steps. The process is not limited at all. For example, the feeding means includes a second stripping sheet from a raw material in which a strip-shaped first release sheet is temporarily attached to the first adhesive surface of the double-sided adhesive sheet and a strip-shaped second release sheet is temporarily attached to the second adhesive surface. The double-sided adhesive sheet is fed out while the first release sheet is temporarily attached to the first adhesive surface, and the first release sheet is opposite to the temporary attachment surface temporarily attached to the first adhesive surface. If it is possible to supply the double-sided adhesive sheet by folding back, it is not limited in any way as long as it is within the technical scope in light of the technical common sense at the beginning of the application (description of other means and processes) Is omitted).
The drive device in the embodiment includes an electric device such as a rotation motor, a linear motion motor, a linear motor, a single axis robot, an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition to these, a combination of them directly or indirectly may be employed (some of them overlap with those exemplified in the embodiment).

10 シート貼付装置
20 繰出手段
30 押圧ローラ(貼付手段)
40 押圧手段
50 引抜手段
AP1 仮着面
AS 両面接着シート
RL1 第1剥離シート
RL2 第2剥離シート
RS 原反
SA1 第1接着面
SA2 第2接着面
WK1 第1被着体
WK2 第2被着体
DESCRIPTION OF SYMBOLS 10 Sheet sticking apparatus 20 Feeding means 30 Pressing roller (sticking means)
40 Pressing means 50 Pulling means AP1 Temporary attachment surface AS Double-sided adhesive sheet RL1 First release sheet RL2 Second release sheet RS Original fabric SA1 First adhesive surface SA2 Second adhesive surface WK1 First adherend WK2 Second adherend

Claims (4)

一方の面が第1接着面とされ、他方の面が第2接着面とされた両面接着シートを介して第1被着体と第2被着体とを貼付するシート貼付装置であって、
前記両面接着シートの第1接着面に帯状の第1剥離シートが仮着され、前記第2接着面に帯状の第2剥離シートが仮着された原反から当該第2剥離シートを剥離するとともに、前記第1剥離シートが前記第1接着面に仮着した状態のまま前記両面接着シートを繰り出し、前記第1接着面に仮着された仮着面の反対側の面方向に前記第1剥離シートを折り返して当該両面接着シートを供給する繰出手段と、
前記繰出手段で供給された両面接着シートを前記第1剥離シート側から前記第1被着体に押圧して貼付する貼付手段とを備え、
前記第2被着体は、前記折り返された第1剥離シートを間に挟んで、前記両面接着シートに押圧され、
前記第2被着体と前記両面接着シートとの間から前記折り返された第1剥離シートを介して当該第1剥離シートを引き抜く引抜手段を備えることを特徴とするシート貼付装置。
A sheet sticking device for sticking the first adherend and the second adherend through a double-sided adhesive sheet in which one surface is a first adhesive surface and the other surface is a second adhesive surface,
While peeling the said 2nd peeling sheet from the raw material by which the strip | belt-shaped 1st peeling sheet was temporarily attached to the 1st adhesion surface of the said double-sided adhesive sheet and the strip | belt-shaped 2nd peeling sheet was temporarily attached to the said 2nd adhesion surface, The double-sided adhesive sheet is fed out while the first release sheet is temporarily attached to the first adhesive surface, and the first release is performed in a direction opposite to the temporary attachment surface temporarily attached to the first adhesive surface. A feeding means for folding the sheet and supplying the double-sided adhesive sheet;
A sticking means for pressing and sticking the double-sided adhesive sheet supplied by the feeding means to the first adherend from the first release sheet side;
The second adherend is pressed against the double-sided adhesive sheet with the folded first release sheet interposed therebetween,
A sheet sticking apparatus comprising: a pulling means for pulling out the first release sheet from the space between the second adherend and the double-sided adhesive sheet via the folded first release sheet.
一方の面が第1接着面とされ、他方の面が第2接着面とされた両面接着シートを介して第1被着体と第2被着体とを貼付するシート貼付装置であって、
前記両面接着シートの第1接着面に帯状の第1剥離シートが仮着され、前記第2接着面に帯状の第2剥離シートが仮着された原反から当該第2剥離シートを剥離するとともに、前記第1剥離シートが前記第1接着面に仮着した状態のまま前記両面接着シートを繰り出し、前記第1接着面に仮着された仮着面の反対側の面方向に前記第1剥離シートを折り返して当該両面接着シートを供給する繰出手段と、
前記繰出手段で供給された両面接着シートを前記第1剥離シート側から前記第1被着体に押圧して貼付する貼付手段と、
前記折り返された第1剥離シートを間に挟んで、前記第2被着体を前記両面接着シートに押圧する押圧手段と、
前記第2被着体と前記両面接着シートとの間から前記折り返された第1剥離シートを介して当該第1剥離シートを引き抜く引抜手段とを備えることを特徴とするシート貼付装置。
A sheet sticking device for sticking the first adherend and the second adherend through a double-sided adhesive sheet in which one surface is a first adhesive surface and the other surface is a second adhesive surface,
While peeling the said 2nd peeling sheet from the raw material by which the strip | belt-shaped 1st peeling sheet was temporarily attached to the 1st adhesion surface of the said double-sided adhesive sheet and the strip | belt-shaped 2nd peeling sheet was temporarily attached to the said 2nd adhesion surface, The double-sided adhesive sheet is fed out while the first release sheet is temporarily attached to the first adhesive surface, and the first release is performed in a direction opposite to the temporary attachment surface temporarily attached to the first adhesive surface. A feeding means for folding the sheet and supplying the double-sided adhesive sheet;
A pasting means for pressing and pasting the double-sided adhesive sheet supplied by the feeding means to the first adherend from the first release sheet side;
A pressing means for pressing the second adherend against the double-sided adhesive sheet with the folded first release sheet interposed therebetween;
A sheet sticking apparatus comprising: a pulling means for pulling out the first release sheet through the folded first release sheet from between the second adherend and the double-sided adhesive sheet.
前記引抜手段は、前記第1接着面から前記第1剥離シートを部分的に剥離する部分剥離が可能に設けられ、当該部分剥離で表出した前記第1接着面の一部に前記第2被着体を押圧して貼付してから、前記第1剥離シートを引き抜く制御が可能に設けられていることを特徴とする請求項1または請求項2に記載のシート貼付装置。   The pulling means is provided so as to be able to partially peel off the first release sheet from the first adhesive surface, and the second covering portion is provided on a part of the first adhesive surface exposed by the partial peeling. The sheet sticking device according to claim 1 or 2, wherein the sheet sticking device is provided so as to be able to control the pulling out of the first release sheet after the pressing and sticking. 一方の面が第1接着面とされ、他方の面が第2接着面とされた両面接着シートを介して第1被着体と第2被着体とを貼付するシート貼付方法であって、
前記両面接着シートの第1接着面に帯状の第1剥離シートが仮着され、前記第2接着面に帯状の第2剥離シートが仮着された原反から当該第2剥離シートを剥離するとともに、前記第1剥離シートが前記第1接着面に仮着した状態のまま前記両面接着シートを繰り出し、前記第1接着面に仮着された仮着面の反対側の面方向に前記第1剥離シートを折り返して当該両面接着シートを供給する工程と、
供給された両面接着シートを前記第1剥離シート側から前記第1被着体に押圧して貼付する工程と、
前記折り返された第1剥離シートを間に挟んで、前記第2被着体を前記両面接着シートに押圧する工程と、
前記第2被着体と前記両面接着シートとの間から前記折り返された第1剥離シートを介して当該第1剥離シートを引き抜く工程とを備えることを特徴とするシート貼付方法。
A sheet pasting method for pasting a first adherend and a second adherend through a double-sided adhesive sheet in which one surface is a first adhesive surface and the other surface is a second adhesive surface,
While peeling the said 2nd peeling sheet from the raw material by which the strip | belt-shaped 1st peeling sheet was temporarily attached to the 1st adhesion surface of the said double-sided adhesive sheet and the strip | belt-shaped 2nd peeling sheet was temporarily attached to the said 2nd adhesion surface, The double-sided adhesive sheet is fed out while the first release sheet is temporarily attached to the first adhesive surface, and the first release is performed in a direction opposite to the temporary attachment surface temporarily attached to the first adhesive surface. Folding the sheet and supplying the double-sided adhesive sheet;
A step of pressing and feeding the supplied double-sided adhesive sheet to the first adherend from the first release sheet side;
Pressing the second adherend against the double-sided adhesive sheet with the folded first release sheet sandwiched therebetween,
And a step of pulling out the first release sheet from the space between the second adherend and the double-sided adhesive sheet through the folded first release sheet.
JP2014052164A 2014-03-14 2014-03-14 Sheet sticking device and sticking method Expired - Fee Related JP6220706B2 (en)

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Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03241168A (en) * 1990-02-15 1991-10-28 Eidai Co Ltd Execution of floor panel
JP2000109767A (en) * 1998-10-02 2000-04-18 Minnesota Mining & Mfg Co <3M> Double sided adhesive tape and release liner used therefor
JP2002081671A (en) * 2000-09-07 2002-03-22 Harman Kikaku:Kk Floor heating panel and its anchoring method
JP2006225574A (en) * 2005-02-21 2006-08-31 Toshiba Matsushita Display Technology Co Ltd Method for laminating surfaces
JP2006278519A (en) * 2005-03-28 2006-10-12 Toshiba Corp Method of manufacturing laminated semiconductor device
JP2008117988A (en) * 2006-11-07 2008-05-22 Lintec Corp Method and device for pasting sheet
JP2010062357A (en) * 2008-09-04 2010-03-18 Lintec Corp Sheet peeling device and peeling method
JP2010219467A (en) * 2009-03-19 2010-09-30 Lintec Corp Sheet peeling device and sheet peeling method

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03241168A (en) * 1990-02-15 1991-10-28 Eidai Co Ltd Execution of floor panel
JP2000109767A (en) * 1998-10-02 2000-04-18 Minnesota Mining & Mfg Co <3M> Double sided adhesive tape and release liner used therefor
JP2002081671A (en) * 2000-09-07 2002-03-22 Harman Kikaku:Kk Floor heating panel and its anchoring method
JP2006225574A (en) * 2005-02-21 2006-08-31 Toshiba Matsushita Display Technology Co Ltd Method for laminating surfaces
JP2006278519A (en) * 2005-03-28 2006-10-12 Toshiba Corp Method of manufacturing laminated semiconductor device
JP2008117988A (en) * 2006-11-07 2008-05-22 Lintec Corp Method and device for pasting sheet
JP2010062357A (en) * 2008-09-04 2010-03-18 Lintec Corp Sheet peeling device and peeling method
JP2010219467A (en) * 2009-03-19 2010-09-30 Lintec Corp Sheet peeling device and sheet peeling method

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