JP2015171185A - Power generation member and manufacturing method for the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a power generation member using a piezoelectric material which can increase an output voltage when vibration is applied to the power generating member.SOLUTION: In a power generation member 10 using a piezoelectric material, plural piezoelectric elements each of which has electrodes on both the surfaces of a piezoelectric layer 300 are provided on a substrate 100, and the plural piezoelectric elements 501 to 506 are electrically connected to one another in series. The plural piezoelectric elements may be formed to be arranged at predetermined intervals in a direction along the surface of the substrate. Furthermore, the power generation member 10 has plural first electrodes 201 to 204 formed on the substrate so as to be arranged at predetermined intervals in a direction along the surface of the substrate, a piezoelectric layer 300 formed on the plural first electrodes so as to straddle the plural first electrodes, and plural second electrodes 401 to 403 which are formed on the piezoelectric layer so as to confront the gaps of the plural first electrodes through the piezoelectric layer and be arranged at predetermined intervals in a direction along the surface of the substrate. The plural piezoelectric elements may be formed in plural areas where the first and second electrodes confront each other through the piezoelectric layer.

Description

  The present invention relates to a power generation member using a piezoelectric body and a manufacturing method thereof.

  2. Description of the Related Art Conventionally, a power generation member is known in which a piezoelectric element having a structure in which a piezoelectric layer (hereinafter referred to as a “piezoelectric layer”) is sandwiched between two electrodes is joined to the surface of a diaphragm that is held deformable by vibration. ing. In this power generation member, the electric charge generated in the piezoelectric element when the piezoelectric element vibrates and deforms together with the diaphragm can be output from the electrode as electric power. For example, Patent Documents 1 to 3 disclose power generation members in which a single piezoelectric element is bonded to the surface of a diaphragm. Patent Document 4 discloses a power generation member in which a plurality of piezoelectric elements are stacked and the piezoelectric elements are electrically connected in parallel.

  The above-described conventional power generation member has a low output voltage when vibration is applied, and there is a demand to increase the output voltage for practical use of a power generation member using a piezoelectric body.

  The present invention has been made in view of the above problems, and an object thereof is to improve an output voltage when vibration is applied to a power generation member using a piezoelectric body.

  In order to achieve the above object, the invention of claim 1 is a power generation member using a piezoelectric body, wherein a plurality of piezoelectric elements each having an electrode on each side of the piezoelectric layer are provided on the substrate, and the plurality of piezoelectric elements are provided. The elements are electrically connected in series.

  According to the present invention, it is possible to improve the output voltage when vibration is applied.

The fragmentary perspective view which shows one structural example of the electric power generation member which concerns on embodiment of this invention. The side view of the electric power generation member seen from the arrow A direction of FIG. Explanatory drawing which shows an example of the manufacturing method of the electric power generation member which concerns on this embodiment. Explanatory drawing which shows the mode of the polarization process in the manufacturing method of an electric power generation member. The side view of the electric power generation member which consists of a single piezoelectric element of a comparative example.

  Embodiments of the present invention will be described below with reference to the drawings. In addition, each figure referred in the following embodiment has shown only the shape, the magnitude | size, and positional relationship so that the content of this invention can be understood, Therefore, this invention is illustrated in each figure. It is not limited only to the shape, size, and positional relationship. Moreover, the numerical value illustrated below is only a suitable example of this invention, Therefore, this invention is not limited to the illustrated numerical value.

FIG. 1 is a partial perspective view showing a configuration example of a power generation member (also referred to as “piezoelectric power generation element” or “power generation element”) using a piezoelectric body according to an embodiment of the present invention. FIG. 2 is a side view of the power generation member viewed from the direction of arrow A in FIG.
The power generation member 10 of the present embodiment has a structure in which a plurality of piezoelectric elements having electrodes on both surfaces of the piezoelectric layer 300 are provided on the substrate 100, and the plurality of piezoelectric elements 501 to 506 are electrically connected in series. doing.

  In this embodiment, an example in which six piezoelectric elements 501 to 506 are formed will be described. However, the number N of piezoelectric elements may be other than six as long as it is plural. In this embodiment, an example in which a plurality of piezoelectric elements are formed so as to be arranged one-dimensionally (in a row) will be described. However, a plurality of piezoelectric elements may be formed so as to be arranged two-dimensionally. In the present embodiment, the plurality of piezoelectric elements are formed so as to be aligned in the direction along the surface of the substrate. However, the plurality of piezoelectric elements may be stacked in a direction perpendicular to the surface of the substrate. Good.

  As shown in FIGS. 1 and 2, in the power generation member 10 of the present embodiment, the plurality of first electrodes 201 to 204 are formed on the substrate 100 so as to be aligned with a predetermined gap in the direction along the surface of the substrate 100. Has been. The piezoelectric layer 300 is formed on the plurality of first electrodes 201 to 204 so as to straddle the plurality of first electrodes 201 to 204. Further, the plurality of second electrodes 401 to 403 are opposed to the gaps of the plurality of first electrodes 201 to 204 via the piezoelectric layer 300 and are arranged at a predetermined gap in the direction along the surface of the substrate 100. It is formed on the piezoelectric layer 300. As indicated by broken lines in FIG. 2, the plurality of piezoelectric elements 501 to 506 are formed in a plurality of regions in which the first electrode and the second electrode face each other through the piezoelectric layer 300. The exposed portions of the first electrodes 201 and 204 at both ends in the arrangement direction of the plurality of first electrodes are output electrodes that output a voltage when vibration is applied.

  Next, the principle of the power generation function capable of outputting a voltage almost one digit higher in the shape equivalent to that of the conventional power generation member in the power generation member 10 having the above configuration will be described. The power generation member 10 of the present embodiment focuses on the principle of the stress-charge generation mechanism based on the piezoelectric effect, and is one digit higher than the output voltage (for example, 100 [mV] to several hundred [mV]) of the conventional power generation member. A high output voltage (for example, a voltage of 1 [V] or higher) is achieved.

  In general, when vibration is transmitted to a piezoelectric element through a substrate (vibrating plate), electric charges are generated on the electrodes on both sides of the piezoelectric element due to the piezoelectric effect. The generated charge can be estimated by the piezoelectric constant d (unit: [pC / N]), and it can be understood how many [C (Coulomb)] charges are generated by the product of the applied force and the piezoelectric constant d. The piezoelectric constant d varies depending on the material of the piezoelectric body, and in particular, the value of the piezoelectric constant d of a ceramic material of lead zirconate titanate (hereinafter abbreviated as “PZT”) is large. Here, if the generated charge per unit force due to vibration is increased, a material having a large piezoelectric constant d may be used.

  However, when a large electric power is to be obtained from a power generation member constituted by a piezoelectric element, it is not necessary to simply use a material having a large piezoelectric constant d. As shown below, the output terminal of the power generation member It is necessary to consider the capacitance seen from the above.

The electrical energy [J] stored in the piezoelectric element in which electric charges are generated by vibration is given by the following equation (1).
(1/2) · C · V ² (1)
Here, C is the capacitance [F] of the piezoelectric element, and V is the output voltage [V] generated between the electrodes of the piezoelectric element. As shown by the above formula (1), the electric energy in the piezoelectric element is proportional to the first order of the capacitance and proportional to the square of the voltage. Therefore, it can be seen that the electrical energy that can be extracted from the piezoelectric element contributes more to the output voltage than the capacitance of the piezoelectric element, and the higher the output voltage, the better.

On the other hand, the generated charge Q [Coulomb] generated in the piezoelectric element due to the piezoelectric effect is the output voltage V obtained by dividing the generated charge Q by the capacitance C as shown by the relational expression Q = CV. The capacitance C of the piezoelectric element can be obtained by the following equation (2) once the shape is determined.
C = ε _r · ε ₀ · (S / d) (2)
Here, epsilon _r is the relative permittivity of the piezoelectric, epsilon ₀ is the permittivity of vacuum. S and d are the area [m ² ] and the thickness [m] of the piezoelectric layer between the electrodes, respectively. Although the relative dielectric constant of PZT is about 2000, if the piezoelectric layer has the same shape, the capacitance C of the piezoelectric body having a small relative dielectric constant is small.

In the power generation member of this embodiment, a plurality (N: six in the illustrated example) of piezoelectric elements are arranged in a direction along the surface of the substrate 100 and are electrically connected in series. Here, when each of the N piezoelectric elements has the same capacitance C [F], the capacitance C _total of the entire N piezoelectric elements electrically connected in series is C / N [F. ]become. On the other hand, in the case of a single piezoelectric element having substantially the same shape as one piezoelectric element of the present embodiment, the capacitance of the single piezoelectric element is C [F]. Therefore, the electrostatic capacity C _total (= C / N) of the entire power generating member in which N piezoelectric elements of the present embodiment are connected in series is 1 / N of the electrostatic capacity C of a single piezoelectric element. Moreover, since the mechanical energy of the vibration received from the outside as a whole is the same for the power generation member of the present embodiment and the single piezoelectric element, the output voltage V _total of the power generation member of the present embodiment is the single unit. This is approximately N times the output voltage V of the piezoelectric element. In the example of the power generation member in FIG. 2, six piezoelectric elements electrically connected in series are formed, so that the output power V _total is almost six times the output voltage V of a single piezoelectric element.

Next, a method for manufacturing the power generation member 10 according to this embodiment will be described.
Drawing 3 is an explanatory view showing an example of the manufacturing method of power generation member 10 concerning this embodiment. In the example of FIG. 3, the power generation member 10 is manufactured on the rectangular substrate 100 by performing each process in order from the left in the drawing. Further, in FIG. 3, for convenience of illustration, a part of the front side of the power generation member 10 is illustrated.

In FIG. 3, first, a plurality of first electrodes 201 to 204 are formed on the substrate 100 so as to be aligned with a predetermined gap in the longitudinal direction along the surface of the substrate 100.
Next, the piezoelectric layer 300 is formed on the plurality of first electrodes 201 to 204 so as to extend over the plurality of first electrodes 201 to 204.
Next, on the piezoelectric layer 300, the gaps between the plurality of first electrodes 201 to 204 are opposed to each other with the piezoelectric layer 300 interposed therebetween and are arranged with a predetermined gap in the same direction as the arrangement direction of the first electrodes 201 to 204. A plurality of second electrodes 401 to 403 are formed.

  Then, after forming the plurality of second electrodes 401 to 403, the piezoelectric layer 300 is subjected to polarization treatment. In this polarization process, as shown in FIG. 4, a DC voltage is applied between the first electrodes 201 and 204 at both ends in the arrangement direction of the plurality of first electrodes 201 to 204. By this voltage application, each of the plurality of regions in which the first electrode and the second electrode are opposed to each other through the piezoelectric layer 300 is polarized so that the polarization axis is directed in the direction indicated by the arrow in FIG. The As a result, the plurality of regions corresponding to the respective piezoelectric elements 501 to 506 in the piezoelectric layer 300 exhibit piezoelectricity in a state having polarization axes that are alternately inverted in the arrangement direction of the respective regions in the drawing.

  Next, more specific Examples 1 and 2 of the power generation member 10 according to the present embodiment will be described together with Comparative Examples 1 and 2.

[Example 1]
The power generation member 10 of Example 1 was manufactured as shown in the following (1) to (5).
(1) As a substrate, a zirconia ceramic sheet (manufactured by Nippon Fine Ceramics Co., Ltd., thickness: 100 [μm]) made of a ceramic whose main component is zirconia was used.
(2) An electrode made of Pt (platinum) was formed as the first electrode. This Pt electrode was produced as a plurality of divided electrodes by printing a Pt paste manufactured by Tanaka Kikinzoku Co., Ltd. on a substrate by a screen printing method, followed by drying and degreasing steps and firing at 1300 [° C.]. The film thickness of the Pt electrode was 3 [μm].
(3) PZT (52/48) was used as the piezoelectric body. A PZT powder made by Sakai Chemical Industry Co., Ltd. was formulated into a screen printing paste, printed on a substrate on which a Pt electrode was formed, dried and degreased, and then fired at 1270 [° C.] to obtain a piezoelectric layer It was created. The film thickness of the piezoelectric layer is 20 [μm].
(4) As the second electrode, an electrode made of Ag / Pd (70/30) was formed. This Ag / Pd electrode was formed by printing Ag-Pd paste manufactured by Shoei Chemical Co., Ltd. on the piezoelectric layer by a screen printing method, followed by drying and degreasing steps and firing at 850 [° C.]. By forming the Ag / Pd electrodes as a plurality of divided electrodes, the number of electrically connected piezoelectric elements (PZT capacitors) was ten.
(5) The polarization treatment was performed under the conditions of temperature: 120 [° C.], DC electric field strength in the piezoelectric layer: 25 [kV / cm], and treatment time: 20 [min]. By this polarization treatment, piezoelectricity appeared in the piezoelectric layer portion of each piezoelectric element.

  In addition, # 300 was used for the mesh of the electrode forming screen plate when forming the first electrode and the second electrode. Further, the division width (gap) between adjacent electrodes of the plurality of first electrodes was set to 20 [μm]. In addition, also for the plurality of second electrodes, the division width (gap) between adjacent electrodes was set to 20 [μm].

[Comparative Example 1]
As Comparative Example 1, as shown in FIG. 5, the first electrode 250, the piezoelectric layer 350, and the second electrode 350 are stacked on the substrate 100 without dividing the first electrode and the second electrode. A power generation member 10 ′ was produced from one piezoelectric element. Other manufacturing processes and materials are the same as those in the first embodiment.

The dimensions of each part of the power generation members of Example 1 and Comparative Example 1 were set as follows.
In the case of Comparative Example 1, the pattern of the first electrode is 2 [mm] wide and 14 [mm] long, the pattern of the piezoelectric layer (PZT) is 2 [mm] wide and 13 [mm] long, The two-electrode pattern had a width of 1.9 [mm] and a length of 12 [mm]. The capacitance of the piezoelectric element (PZT capacitor) sandwiched between the first electrode and the second electrode was 23.2 [nF] (measurement frequency: 10 [kHz]). The relative dielectric constant of PZT was calculated to be 2300 from the measured capacitance value and the element dimension value, and it was confirmed that this was a typical value.

  In the first embodiment, the split electrode (first electrode and second electrode) includes the gap 20 [μm], but the electrode area is negligibly small with respect to the length 12 [mm]. Also, the measurement result of the electrostatic capacitance was reduced to 1/10 (2.3 [nF]) in the case of Comparative Example 1.

  The performance as an energy harvester (environmental power generation device) of the power generation members of Example 1 and Comparative Example 1 was performed by a conventionally known method after being held in a cantilever shape. Specifically, the output voltage was measured by applying a vibration having a frequency 1/20 of the resonance frequency of the cantilever using an exciter, a vibration sensor, an element output amplifier, and a recorder (oscilloscope). The impedance matching of the FET (element output amplifier) used for the measurement seems to be necessary, but here, the effect of Example 1 (the effect of electrode division) was verified by focusing on the relative change of the output voltage.

  The output voltage of the power generation member of Comparative Example 1 was 200 [mV] (vibration condition: frequency = 60 [Hz], acceleration = 0.08 G). On the other hand, the output voltage of the power generation member of Example 1 is 2.05 [V] (the same vibration condition: frequency = 60 [Hz], acceleration = 0.08 G), which is increased to about 10 times that of Comparative Example 1. I was able to.

[Example 2]
PZT used in Example 1 above contains lead, and the content thereof occupies 60 [mass%]. When used as a stand-alone power source for diagnosis of infrastructure equipment, a small number of power generation members are arranged, but a large number are arranged. If lead is contained in a large number of power generation members arranged in this way, the environmental impact cannot be ignored. Therefore, in the second embodiment, a piezoelectric material not containing lead is used as an alternative material for PZT.

  Further, in Example 1 above, in order to fire PZT, a Pt (platinum) electrode was employed as the first electrode formed on the substrate. This is because platinum is the only material having heat resistance up to 1300 [° C.] in an atmosphere containing oxygen. However, since platinum is expensive and includes price fluctuation factors, it is not preferable to use platinum as an electrode when considering commercialization. Therefore, the use of inexpensive base metal materials other than platinum is not recommended. desired.

  If ceramics can be fired in an atmosphere in which oxygen is extremely reduced, an inexpensive Ni (nickel) material is a candidate for an electrode material. In firing oxide ceramics, the ceramics are reduced in the absence of oxygen, and cannot be produced as they are. Therefore, firing in a reducing atmosphere (under an oxygen partial pressure that does not oxidize Ni) is effective for obtaining a Ni electrode used in the production of ceramic capacitors.

  In Example 2, the above problems were solved and the performance as an energy harvester (environmental power generation device) was also improved.

  In Example 1, a zirconia ceramic sheet was used. However, this material is reduced when the oxygen partial pressure is low, which is not preferable as a substrate.

Therefore, in Example 2, a power generation member was produced as shown in the following (1) to (6) using an alumina ceramic sheet that does not change even under a low oxygen partial pressure.
(1) As the substrate, an alumina ceramic sheet (manufactured by Nippon Fine Ceramics Co., Ltd., thickness: 100 [μm]) made of ceramic whose main component is alumina was used.
(2) As the first electrode, an electrode made of Ni (nickel) was formed. This Ni electrode was dried by printing a Ni paste manufactured by Daiken Chemical Industry Co., Ltd. by a screen printing method. The film thickness of the Ni electrode was 3 [μm].
(3) Barium titanate (BT01, BT05 powder manufactured by Sakai Chemical Industry Co., Ltd., distribution was BT01: 20 parts, BT05: 80 parts) was used as the piezoelectric body. In order to prevent barium titanate from being reduced at a low oxygen partial pressure, Mn was added at a ratio of 1 [mol%] to the weight of barium titanate. Manganese dioxide was used as the Mn reagent at this time. And after formulating into a paste for screen printing, printing and drying were performed. The film thickness after printing and drying was set so that the film thickness after firing was 20 [μm].
(4) A Ni electrode was used as the second electrode and was formed under the same conditions as the first electrode.
(5) After laminating three layers (first electrode, piezoelectric layer, and second electrode) on the substrate, a piezoelectric element was fabricated by firing in a degreasing and reducing atmosphere. This is a simultaneous firing process of an electrode and a dielectric material performed in a multilayer ceramic capacitor. As the reducing atmosphere, H ₂ gas (nitrogen balance) having a concentration of 3 [%] was introduced into the tubular furnace, the oxygen partial pressure was 1 × 10 ⁻⁸ [Pa] or less, and the firing temperature was 1350 [° C.]. By this firing treatment, inexpensive Ni could be employed as the electrode. By forming this Ni electrode as a plurality of divided electrodes, the number of electrically connected piezoelectric elements (barium titanate capacitors) was ten.
(6) The polarization treatment was performed under the conditions of temperature: 120 [° C.], DC electric field strength in the piezoelectric layer: 25 [kV / cm], and treatment time: 20 [min]. By this polarization treatment, piezoelectricity appeared in the piezoelectric layer portion of each piezoelectric element.

  In addition, # 300 was used for the mesh of the electrode forming screen plate when forming the first electrode and the second electrode. Further, the division width (gap) between adjacent electrodes of the plurality of first electrodes was set to 20 [μm]. In addition, also for the plurality of second electrodes, the division width (gap) between adjacent electrodes was set to 20 [μm].

[Comparative Example 2]
As Comparative Example 2, as shown in FIG. 5, the first electrode 250, the piezoelectric layer 350, and the second electrode 350 are stacked on the substrate 100 without dividing the first electrode and the second electrode. A power generation member 10 ′ was produced from one piezoelectric element. Other manufacturing processes and materials are the same as those in the second embodiment.

The dimension in each part of the electric power generation member of Example 2 and Comparative Example 2 was set as follows.
In the case of Comparative Example 2, the pattern of the first electrode is 2 [mm] wide and 14 [mm] long, and the pattern of the piezoelectric layer (barium titanate) is 2 [mm] wide and 13 [mm] long. The second electrode pattern had a width of 1.9 [mm] and a length of 12 [mm]. The capacitance of the piezoelectric element (barium titanate capacitor) sandwiched between the first electrode and the second electrode was 13.2 [nF] (measurement frequency: 10 [kHz]). The relative dielectric constant of barium titanate was calculated to be 1300 from the measured capacitance value and the element dimension value, confirming that it was a typical value.

  In Example 2, the split electrode (the first electrode and the second electrode) includes the gap 20 [μm]. However, the electrode area can be ignored with respect to the length 12 [mm]. Also, the measurement result of the electrostatic capacitance was reduced to 1/10 (1.3 [nF]) in the case of Comparative Example 2.

  The performance of the power generation members of Example 2 and Comparative Example 2 as an energy harvester (environmental power generation device) was maintained in a cantilever shape and then performed by a conventionally known method. That is, the output voltage was measured by applying vibration having a frequency 1/20 of the resonance frequency of the cantilever with an exciter, a vibration sensor, an element output amplifier, and a recorder (oscilloscope). Although it seems that impedance matching of the FET (element output amplifier) used for the measurement is necessary, the effect of Example 2 (effect of electrode division) was verified by paying attention to the relative change in the output voltage.

  The output voltage of the power generation member of Comparative Example 2 was 170 [mV] (vibration condition: frequency = 60 [Hz], acceleration = 0.08 G). On the other hand, the output voltage of the power generation member of Example 2 is 1.75 [V] (same vibration condition: frequency = 60 [Hz], acceleration = 0.08 G), which is increased to about 10 times that of Comparative Example 2. I was able to.

  The difference in output voltage between Example 1 and Example 2 described above is caused by the difference in piezoelectric constant between PZT (Example 1) and barium titanate (Example 2) used as the material of the piezoelectric layer. doing. In terms of relative permittivity, barium titanate is smaller, which is advantageous in terms of output voltage. However, the piezoelectric constant of PZT is 300 [pm / V], and the piezoelectric constant of barium titanate (150 [pm / V]). Twice as much.

However, the power generation member of Example 2 has the following advantages.
・ Output is a practically achievable value.
Adjustment to an actual device is possible by increasing the number of piezoelectric elements (number of first electrodes, number of second electrodes) arranged side by side on the substrate.
・ Does not contain lead.
-It can be manufactured without using expensive platinum materials that have price fluctuation factors.

What has been described above is merely an example, and the present invention has a specific effect for each of the following modes.
(Aspect A)
In the power generation member 10 using a piezoelectric body, a plurality (N) of piezoelectric elements having electrodes on both surfaces of the piezoelectric layer 300 are provided on the substrate 100, and the plurality of piezoelectric elements 501 to 506 are electrically connected in series. It is connected.
According to this, as described in the above embodiment, the output voltage when a plurality of (N) piezoelectric elements 501 to 506 that are electrically connected in series constituting the power generation member are vibrated is a single output voltage. N times the output voltage of the piezoelectric element. Therefore, it is possible to improve the output voltage when vibration is applied to the power generation member using the piezoelectric body.
(Aspect B)
In the aspect A, the plurality (N) of piezoelectric elements are formed so as to be aligned with a predetermined gap in a direction along the surface of the substrate.
According to this, as described in the above embodiment, the amount of deformation of the power generation member when vibration is applied can be reduced as compared with a structure in which a plurality of piezoelectric elements are stacked on the substrate. The output voltage when vibration is applied can be further increased. Moreover, since it is not necessary to repeatedly form and laminate a plurality of piezoelectric elements on the substrate, the manufacturing process of the power generation member is simplified, and the manufacturing cost can be reduced.
(Aspect C)
In the above aspect B, a plurality of first electrodes 201 to 204 formed on the substrate so as to be aligned with a predetermined gap in a direction along the surface of the substrate, and a plurality of first electrodes so as to straddle the plurality of first electrodes. The piezoelectric layer 300 is formed on the piezoelectric layer so as to face the gap between the plurality of first electrodes via the piezoelectric layer and to be aligned with a predetermined gap in the direction along the surface of the substrate. A plurality of second electrodes 401 to 403, and the plurality of piezoelectric elements 501 to 506 are formed in a plurality of regions in which the first electrode and the second electrode face each other through the piezoelectric layer. Yes.
According to this, as described in the above embodiment, a plurality of first electrodes can be collectively formed on the same layer on the substrate, and the piezoelectric layer formed thereon needs to be formed separately. And can be formed as a single layer. Further, the plurality of second electrodes can be collectively formed in the same layer on the piezoelectric layer. Therefore, the manufacturing process of the power generation member is simplified, and the manufacturing cost can be reduced.
(Aspect D)
In any one of the above aspects A to C, the material of the piezoelectric layer 300 is a material in which the main component to which manganese is added is barium titanate.
According to this, as described in the above embodiment, since it is not necessary to use expensive platinum as a material for the electrode formed between the substrate and the piezoelectric layer, the manufacturing cost can be further reduced.
(Aspect E)
In any of the above aspects A to D, the substrate 100 is a substrate whose main component is ceramic of alumina or zirconia.
According to this, as described in the above embodiment, since the substrate made of ceramics whose main component is alumina or zirconia has excellent resistance to the piezoelectric film forming process, the piezoelectric characteristics of the piezoelectric element It is possible to provide a highly reliable power generation member having excellent stability and reproducibility. In particular, in the case of a substrate made of a ceramic whose main component is alumina, the substrate is not altered even when the piezoelectric layer is fired in a reducing atmosphere (low oxygen partial pressure) in which an inexpensive electrode material such as Ni is difficult to oxidize. . Therefore, it is possible to prevent the substrate from being deteriorated and to reduce the manufacturing cost.
(Aspect F)
A method of manufacturing a power generation member in which piezoelectric elements having electrodes on both surfaces of a piezoelectric layer 300 are provided on a substrate 100, and a voltage can be output when the piezoelectric element vibrates, in a direction along the surface of the substrate 100 Forming a plurality of first electrodes 201 to 204 on the substrate 100 so as to be arranged at a predetermined gap, and a piezoelectric body on the plurality of first electrodes 201 to 204 so as to straddle the plurality of first electrodes 201 to 204. The step of forming the layer 300 and the piezoelectric so as to be opposed to the gap between the plurality of first electrodes 201 to 204 through the piezoelectric layer 300 and to be arranged at a predetermined gap in the same direction as the arrangement direction of the first electrodes 201 to 204. A DC voltage is applied between the step of forming the plurality of second electrodes 401 to 403 on the body layer 300 and the first electrodes 201 and 204 at both ends in the arrangement direction of the plurality of first electrodes 201 to 204. More, and a step of performing polarization processing for each of a plurality of regions where the first electrode and the second electrode through the piezoelectric layer 300 face each other.
According to this, as described in the above embodiment, a plurality of first electrodes can be collectively formed on the same layer on the substrate, and the piezoelectric layer formed thereon needs to be formed separately. And can be formed as a single layer. Further, the plurality of second electrodes can be collectively formed in the same layer on the piezoelectric layer. In addition, the polarization treatment for each of the plurality of regions in which the first electrode and the second electrode are opposed to each other via the piezoelectric layer 300 can be performed collectively. Therefore, the manufacturing process of the power generation member is simplified, and the manufacturing cost can be reduced.

DESCRIPTION OF SYMBOLS 10 Power generation member 100 Substrate 201-204 1st electrode 300 Piezoelectric layer 401-403 2nd electrode 501-506 Piezoelectric element

JP 2013-146180 A JP 2013-187828 A JP 2013-110920 A JP2012-023345A

Claims (6)

A power generation member using a piezoelectric body,
A power generating member, wherein a plurality of piezoelectric elements each having an electrode on each side of a piezoelectric layer are provided on a substrate, and the plurality of piezoelectric elements are electrically connected in series. The power generation member according to claim 1,
The power generation member, wherein the plurality of piezoelectric elements are formed so as to be arranged with a predetermined gap in a direction along a surface of the substrate. The power generation member according to claim 2,
A plurality of first electrodes formed on the substrate so as to be aligned with a predetermined gap in a direction along the surface of the substrate;
A piezoelectric layer formed on the plurality of first electrodes so as to straddle the plurality of first electrodes;
A plurality of second electrodes formed on the piezoelectric layer so as to face the gaps of the plurality of first electrodes via the piezoelectric layer and to be aligned with a predetermined gap in a direction along the surface of the substrate; With
The power generation member, wherein the plurality of piezoelectric elements are formed in a plurality of regions in which the first electrode and the second electrode face each other through the piezoelectric layer. In the electric power generation member in any one of Claims 1 thru | or 3,
The power generation member according to claim 1, wherein the piezoelectric layer is made of barium titanate as a main component to which manganese is added. In the electric power generation member in any one of Claims 1 thru | or 4,
The power generation member, wherein the substrate is a substrate whose main component is ceramic of alumina or zirconia. A method for producing a power generation member using a piezoelectric body,
Forming a plurality of first electrodes on the substrate so as to be aligned with a predetermined gap in a direction along the surface of the substrate;
Forming a piezoelectric layer on the plurality of first electrodes so as to straddle the plurality of first electrodes;
A plurality of second electrodes on the piezoelectric layer so as to face the gaps of the plurality of first electrodes through the piezoelectric layer and to be arranged at a predetermined gap in the same direction as the arrangement direction of the plurality of first electrodes. Forming a step;
By applying a DC voltage between the first electrodes at both ends in the arrangement direction of the plurality of first electrodes, the first electrode and the second electrode are opposed to each other through the piezoelectric layer. Performing a polarization treatment on each of the plurality of regions;
The manufacturing method of the electric power generation member characterized by including.