JP2015168158A - Method of manufacturing thin film laminate - Google Patents

Method of manufacturing thin film laminate Download PDF

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JP2015168158A
JP2015168158A JP2014044865A JP2014044865A JP2015168158A JP 2015168158 A JP2015168158 A JP 2015168158A JP 2014044865 A JP2014044865 A JP 2014044865A JP 2014044865 A JP2014044865 A JP 2014044865A JP 2015168158 A JP2015168158 A JP 2015168158A
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thin film
temperature
winding
laminate
resin substrate
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敬祐 藤田
Keisuke Fujita
敬祐 藤田
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Toyota Motor Corp
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Toyota Motor Corp
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Abstract

PROBLEM TO BE SOLVED: To suppress generation of winding wrinkles on a thin film laminate by a simple structure.SOLUTION: A method of manufacturing a thin film laminate is provided in which a long resin substrate is continuously transferred by transfer rollers so that a thin film is continuously laminated on the resin substrate. In this method of manufacturing a thin film laminate, when laminating the thin film on the resin substrate, a heating process to heat to a prescribed heated temperature is performed by a heating part 30, and a laminate of the resin substrate and the thin film after the execution of heating process is wound up in a roll shape to a winding roll 28. In the winding process, the winding is performed with the ambient temperature of the laminate being adjusted to the cooling contraction temperature of the resin substrate or higher.

Description

本発明は、薄膜積層体の製造方法に関する。   The present invention relates to a method for manufacturing a thin film laminate.

従来の薄膜積層体の製造方法として、特許文献1に記載されているように、長尺の透明樹脂基材を連続的に搬送ローラにより搬送しつつ、その上に透明薄膜をスパッタリング法により連続的に形成するようにした方法が提案されている。スパッタリングを行うと、基材温度が上昇し、大きく熱膨張が起こり、ロール巻き取りの際に急激に温度低下が起こることから、基材となる高分子フィルムが収縮して巻きシワが発生する虞があった。これを防止するために、特許文献1には、基材巻き出し室と、スパッタ室と、基材巻き取り室とを一定の温度となるように調整することが記載されている。   As described in Patent Document 1, as a conventional method for producing a thin film laminate, a long transparent resin substrate is continuously conveyed by a conveyance roller, and a transparent thin film is continuously formed thereon by a sputtering method. There has been proposed a method for forming the above. When sputtering is performed, the temperature of the base material rises, a large thermal expansion occurs, and the temperature drops rapidly during winding of the roll, so that the polymer film serving as the base material may shrink and winding wrinkles may occur. was there. In order to prevent this, Patent Document 1 describes that the substrate unwinding chamber, the sputtering chamber, and the substrate winding chamber are adjusted to have a constant temperature.

特開2013−72112号公報JP 2013-72112 A 特開2012−52170号公報JP2012-52170A

しかしながら、前記従来の技術では、巻きシワの発生を抑制するために、過度の温度制御が行われており、構成が複雑であるという課題があった。   However, in the conventional technique, excessive temperature control is performed in order to suppress the occurrence of winding wrinkles, and there is a problem that the configuration is complicated.

本発明は、上述の課題の少なくとも一部を解決するためになされたものであり、以下の形態として実現することが可能である。   SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms.

本発明の一形態は、長尺状の樹脂基材を連続的に搬送ローラによって搬送しつつ、前記樹脂基材に薄膜を連続的に積層する、薄膜積層体の製造方法であって;前記樹脂基材に前記薄膜を積層する際に、所定の加熱温度に加熱する加熱処理を行う加熱工程と;前記加熱処理が行われた後の、前記樹脂基材と前記薄膜との積層体を、ロール状に巻き取る巻取工程と;を備え;前記巻取工程は;前記積層体の周囲の温度を前記樹脂基材の冷却収縮温度以上に調整して、前記巻き取りを行う、薄膜積層体の製造方法である。この薄膜積層体の製造方法によれば、加熱工程後の積層体の周囲の温度を樹脂基材の冷却収縮温度以上に調整するだけで、樹脂基材の冷却収縮による薄膜積層体の巻きシワの発生を抑制することがきる。したがって、簡単な構成で巻きシワの発生を抑制することができる。   One aspect of the present invention is a method for producing a thin film laminate, in which a thin resin substrate is continuously conveyed by a conveyance roller, and a thin film is continuously laminated on the resin substrate; When laminating the thin film on the base material, a heating step of performing a heat treatment for heating to a predetermined heating temperature; a laminate of the resin base material and the thin film after the heat treatment is performed, A winding step that winds in a shape; and the winding step includes: adjusting the temperature around the laminated body to be equal to or higher than the cooling shrinkage temperature of the resin base material, and performing the winding. It is a manufacturing method. According to this method for manufacturing a thin film laminate, only by adjusting the temperature around the laminate after the heating step to be equal to or higher than the cooling shrinkage temperature of the resin base material, Generation can be suppressed. Therefore, it is possible to suppress the occurrence of winding wrinkles with a simple configuration.

なお、本発明は、種々の形態で実現することが可能である。例えば、前記形態の薄膜積層体の製造方法を備える燃料電池の製造方法、前記形態の薄膜積層体の製造方法の各工程に対応する構成を備える薄膜積層体の製造装置等の形態で実現することができる。   The present invention can be realized in various forms. For example, the present invention is realized in the form of a manufacturing method of a fuel cell including a manufacturing method of the thin film laminate of the above form, a thin film stack manufacturing apparatus having a configuration corresponding to each step of the manufacturing method of the thin film stack of the above form Can do.

本発明の第1実施形態としての薄膜積層体の製造装置を示す説明図である。It is explanatory drawing which shows the manufacturing apparatus of the thin film laminated body as 1st Embodiment of this invention. 冷却収縮温度を説明するためのグラフである。It is a graph for demonstrating cooling shrinkage temperature. 参考例としての薄膜積層体の製造装置を示す説明図である。It is explanatory drawing which shows the manufacturing apparatus of the thin film laminated body as a reference example. 第2実施形態としての薄膜積層体の製造装置を示す説明図である。It is explanatory drawing which shows the manufacturing apparatus of the thin film laminated body as 2nd Embodiment.

次に、本発明の実施形態を説明する。
A.第1実施形態:
図1は、本発明の第1実施形態としての薄膜積層体の製造装置を示す説明図である。この製造装置は、燃料電池に備えられる補強型電解質膜を製造する際に用いる中間積層体を薄膜積層体として製造している。この中間積層体は、長尺状(あるいは帯状、以下、同じ)のシートであり、電解質膜の一方側の面にバックシートを積層し、電解質膜の他方側の面に補強膜を積層したものである。
Next, an embodiment of the present invention will be described.
A. First embodiment:
FIG. 1 is an explanatory view showing an apparatus for manufacturing a thin film laminate as a first embodiment of the present invention. This manufacturing apparatus manufactures an intermediate laminate used when manufacturing a reinforced electrolyte membrane provided in a fuel cell as a thin film laminate. This intermediate laminate is a long (or belt-like, hereinafter the same) sheet in which a back sheet is laminated on one side of the electrolyte membrane and a reinforcing membrane is laminated on the other side of the electrolyte membrane. It is.

図1に示すように、薄膜積層体の製造装置10は、搬送部20と、加熱部30と、調温部40と、を備える。搬送部20は、ロール・ツー・ロールのウェブハンドリング装置を実現するためのもので、2つの巻き出し(巻出)ロール22、24と、複数の搬送ローラ26と、巻き取り(巻取)ロール28と、を備える。   As shown in FIG. 1, the thin film laminate manufacturing apparatus 10 includes a transport unit 20, a heating unit 30, and a temperature control unit 40. The conveyance unit 20 is for realizing a roll-to-roll web handling apparatus, and includes two unwinding (unwinding) rolls 22 and 24, a plurality of conveying rollers 26, and a winding (winding) roll. 28.

第1の巻出ロール22には、電解質膜52にバックシート54が貼り合わされたバックシート付き電解質膜50が巻回されている。電解質膜52は、フッ素系電解質樹脂の前駆体高分子樹脂膜であり、例えば、高分子鎖末端がSO2Fである電解質前駆体樹脂を、押出成形機を用いて厚さ約20[μm]に成形したものである。バックシート54は、例えばポリテトラフルオロエチレン(PTFE)であり、厚さが約100[μm]である。なお、電解質膜52は、フッ素系電解質膜に換えて、炭化水素系電解質膜としてもよい。バックシート54は、PTFEに換えて、PFA等の他のフッ素系樹脂としてもよいし、ポリオレフィン系樹脂(ポリエチレン、ポリプロピレン等)としてもよいし、ポリエステル系樹脂(ポリエチレンテレフタラート、ポリブチレンテレフタラート等)としてもよい。なお、バックシート付き電解質膜50は、長尺状のシートである。バックシート54が、[発明の概要]の欄に記載の「樹脂基材」に相当する。 On the first unwinding roll 22, an electrolyte membrane 50 with a back sheet in which a back sheet 54 is bonded to an electrolyte membrane 52 is wound. The electrolyte membrane 52 is a precursor polymer resin membrane of a fluorine-based electrolyte resin. For example, an electrolyte precursor resin whose polymer chain end is SO 2 F is formed to a thickness of about 20 [μm] using an extruder. Molded. The back sheet 54 is, for example, polytetrafluoroethylene (PTFE) and has a thickness of about 100 [μm]. The electrolyte membrane 52 may be a hydrocarbon electrolyte membrane instead of the fluorine electrolyte membrane. The backsheet 54 may be replaced with other fluorine-based resins such as PFA, polyolefin resin (polyethylene, polypropylene, etc.), or polyester resin (polyethylene terephthalate, polybutylene terephthalate, etc.) instead of PTFE. ). In addition, the electrolyte membrane 50 with a back sheet is a long sheet. The back sheet 54 corresponds to the “resin substrate” described in the “Summary of the Invention” column.

第2の巻出ロール24には、補強膜60が巻回されている。補強膜60は、長尺状のPTFEであり、軟化した電解質を接合させることができる多孔質の部材である。補強膜60は、厚さが約5[μm]の長尺状のシートである。   A reinforcing film 60 is wound around the second unwinding roll 24. The reinforcing membrane 60 is a long PTFE, and is a porous member that can join a softened electrolyte. The reinforcing film 60 is a long sheet having a thickness of about 5 [μm].

第1の巻出ロール22から巻き出したバックシート付き電解質膜50と、第2の巻出ロール24から巻き出した補強膜60とは、複数の搬送ローラ26によって巻取ロール28に向かって搬送される。その搬送の途中である所定の搬送ローラ26aの位置で、バックシート付き電解質膜50と補強膜60とは、バックシート付き電解質膜50の電解質膜52側の面が補強膜60と接するように重ね合わされる。   The electrolyte membrane 50 with a back sheet unwound from the first unwinding roll 22 and the reinforcing film 60 unwound from the second unwinding roll 24 are conveyed toward the take-up roll 28 by a plurality of conveying rollers 26. Is done. The electrolyte film 50 with back sheet and the reinforcing film 60 are overlapped with each other so that the surface of the electrolyte film with back sheet 50 on the side of the electrolyte film 52 is in contact with the reinforcing film 60 at the position of the predetermined conveying roller 26a in the middle of the conveyance. Is done.

搬送ローラ26aによって重ね合わされた後のシート(以下、「重ね合わせシート」と呼ぶ)70は、搬送部20によって加熱部30に送られる。加熱部30は、重ね合わせシート70を第1の温度T1以上に加熱するものである。第1の温度T1は、バックシート付き電解質膜50に含まれる電解質を接合することのできる温度(例えば140[℃])である。加熱部30によって第1の温度T1以上に加熱された重ね合わせシート70は、電解質膜50を構成する電解質が軟化され、補強膜60に接合されることで、中間積層体80となる。なお、本実施形態では、加熱部30は、加熱室を備え、加熱室内全体をヒータ等によって加熱する構成とした。室内全体を加熱する構成に換えて、一部の搬送ローラをホットローラとして、ホットローラによって加熱する構成としてもよい。   The sheet 70 (hereinafter referred to as “superposed sheet”) after being superposed by the conveyance roller 26 a is sent to the heating unit 30 by the conveyance unit 20. The heating unit 30 heats the overlapping sheet 70 to the first temperature T1 or higher. The first temperature T1 is a temperature (for example, 140 [° C.]) at which the electrolyte contained in the electrolyte membrane 50 with a back sheet can be joined. The superposed sheet 70 heated to the first temperature T1 or higher by the heating unit 30 becomes an intermediate laminate 80 when the electrolyte constituting the electrolyte membrane 50 is softened and joined to the reinforcing membrane 60. In the present embodiment, the heating unit 30 includes a heating chamber, and the entire heating chamber is heated by a heater or the like. Instead of a configuration in which the entire room is heated, a configuration may be adopted in which some of the transport rollers are used as hot rollers and heated by the hot rollers.

加熱部30によって加熱して得られた中間積層体80は、次いで調温部40に送られる。調温部40は、加熱部30よりも下流側の搬送ローラ26と、巻取ロール28と、を含む調温室42を備え、図示しない空調装置によって、調温室42内の温度を第2の温度T2に調整する。これによって、巻取ロール28による中間積層体80の巻き取りは、第2の温度T2以上の雰囲気下で行われることになる。すなわち、中間積層体80の周囲の温度を第2の温度T2以上に調整して、中間積層体80の巻き取りが行われる。なお、本実施形態では、第2の温度T2は78.5[℃]とした。第2の温度T2を78.5[℃]とした理由について、次に説明する。   The intermediate laminate 80 obtained by heating by the heating unit 30 is then sent to the temperature adjustment unit 40. The temperature control unit 40 includes a temperature control chamber 42 that includes a transport roller 26 downstream of the heating unit 30 and a take-up roll 28, and the temperature inside the temperature control chamber 42 is set to a second temperature by an air conditioner (not shown). Adjust to T2. As a result, the winding of the intermediate laminate 80 by the take-up roll 28 is performed in an atmosphere at the second temperature T2 or higher. That is, the temperature around the intermediate laminate 80 is adjusted to the second temperature T2 or higher, and the intermediate laminate 80 is wound. In the present embodiment, the second temperature T2 is set to 78.5 [° C.]. The reason why the second temperature T2 is set to 78.5 [° C.] will be described next.

本発明者は、バックシート54として用いるPTFEシート(厚さ100[μm])を適当な試験片に裁断し、引張試験機(例えばインストロン社製)に固定した後、室温から140[℃]まで昇温し5分間保持し、その後、40[℃]まで冷却させるという試験を行った。昇温から冷却までの引張試験機に付加した力[N]を測定し、その測定結果を図2のグラフに示した。グラフにおいて、1点鎖線が温度の変化であり、実線が付加した力の変化である。グラフから判るように、温度が約140[℃]から徐々に低下して78.5[℃]となるまでは、付加した力はほぼ0[N]であるが、78.5[℃]を下回ると、付加した力は急増する。これによって、本発明者は、図中の太い破線に示すように、78.5[℃]を下回ってから試験片に収縮応力が発生するということを見出した。この78.5[℃]が、[発明の概要]の欄に記載の「冷却収縮温度」に相当する。   The present inventor cuts a PTFE sheet (thickness 100 [μm]) used as the back sheet 54 into an appropriate test piece and fixes it to a tensile tester (for example, manufactured by Instron), and then from room temperature to 140 [° C.]. The temperature was raised to 50 ° C. and held for 5 minutes, and then cooled to 40 [° C.]. The force [N] applied to the tensile tester from temperature rise to cooling was measured, and the measurement result is shown in the graph of FIG. In the graph, a one-dot chain line is a change in temperature, and a solid line is a change in force applied. As can be seen from the graph, the applied force is almost 0 [N] until the temperature is gradually decreased from about 140 [° C.] to 78.5 [° C.], but 78.5 [° C.] is reduced. Below that point, the added force increases rapidly. As a result, the present inventor has found that the shrinkage stress is generated in the test piece after the temperature falls below 78.5 [° C.] as indicated by the thick broken line in the figure. This 78.5 [° C.] corresponds to the “cooling shrinkage temperature” described in the “Summary of the Invention” column.

調温部40では、調温室42内の温度を第2の温度T2以上(例えば、80[℃])に調整することによって、中間積層体80を巻取ロール28に巻き取る際に、バックシート54の部分が上記の78.5[℃]を下回らないように温度調整を図っている。これによって、巻き取りの際に、中間積層体80に収縮応力が発生しないようにしている。こうして巻取ロール28に巻き取られた中間積層体80は、その後、含浸、加水分解、バックシート54を剥がす工程(図示せず)を経る等して、補強型電解質膜となる。この補強型電解質膜は、燃料電池用として用いられる。   The temperature adjustment unit 40 adjusts the temperature in the temperature adjustment chamber 42 to the second temperature T2 or higher (for example, 80 [° C.]), thereby winding the intermediate laminate 80 around the winding roll 28 as a back sheet. The temperature is adjusted so that the portion 54 does not fall below the above 78.5 [° C.]. This prevents shrinkage stress from being generated in the intermediate laminate 80 during winding. The intermediate laminate 80 wound up on the take-up roll 28 in this way becomes a reinforced electrolyte membrane through subsequent processes (not shown) such as impregnation, hydrolysis, and peeling off the back sheet 54. This reinforced electrolyte membrane is used for fuel cells.

図3は、参考例としての薄膜積層体の製造装置を示す説明図である。参考例としての薄膜積層体の製造装置910は、第1実施形態としての薄膜積層体の製造装置10と比べて、調温部40を備えないことが相違し、その他の構成は同一である。この構成では、加熱部30によって、140[℃]以上の高温で電解質を軟化させ補強膜60に接合させることによって得られた中間積層体80は、自然と徐々に冷却され、巻取ロール28に達する前に冷却収縮温度である78.5[℃]を下回ってしまう。中間積層体80に含まれるバックシートとしてのPTFEシートは、78.5[℃]を下回ると、大きな収縮応力が発生してしまい、巻取ロール28にロール状に巻き取る際にシワCRが生じさせてしまう。   FIG. 3 is an explanatory view showing a thin film laminate manufacturing apparatus as a reference example. The thin film laminate manufacturing apparatus 910 as a reference example is different from the thin film stack manufacturing apparatus 10 as the first embodiment in that it does not include the temperature control unit 40, and the other configurations are the same. In this configuration, the intermediate laminate 80 obtained by softening the electrolyte at a high temperature of 140 [° C.] or more by the heating unit 30 and bonding the electrolyte to the reinforcing film 60 is naturally cooled gradually, and is wound on the winding roll 28. Before reaching the temperature, it falls below the cooling shrinkage temperature of 78.5 [° C]. When the PTFE sheet as a back sheet included in the intermediate laminate 80 is less than 78.5 [° C.], a large shrinkage stress is generated, and a wrinkle CR is generated when the roll is wound around the winding roll 28. I will let you.

これに対して、第1実施形態としての薄膜積層体の製造装置によれば、加熱部30による加熱後、調温部によって、中間積層体80を巻取ロール28にロール状に巻き取る際に、バックシート54の部分が第2の温度T2を下回らないように温度調整が図られる。このために、バックシート54の部分の冷却収縮による中間積層体80の巻きシワの発生を抑制することできる。   On the other hand, according to the apparatus for manufacturing a thin film laminate as the first embodiment, when the intermediate laminate 80 is wound around the take-up roll 28 in a roll shape by the temperature control unit after heating by the heating unit 30. The temperature adjustment is performed so that the portion of the back sheet 54 does not fall below the second temperature T2. For this reason, generation | occurrence | production of the winding wrinkle of the intermediate | middle laminated body 80 by the cooling shrinkage | contraction of the part of the back seat | sheet 54 can be suppressed.

B.第2実施形態:
図4は、第2実施形態としての薄膜積層体の製造装置を示す説明図である。第2実施形態としての薄膜積層体の製造装置210は、第1実施形態としての薄膜積層体の製造装置10と比べて、調温部40を備えないことと、加熱部30を搬出された中間積層体80は、直ちに巻取ロール28によって巻き取りがなされることが相違する。加熱部30を搬出された中間積層体80は、温度グラフTGに示すように徐々に冷却されるが、第2の温度T2(=冷却収縮温度)である78.5[℃]に達するタイミングが巻取ロール28への巻き取りのタイミングとなっている。第2実施例におけるその他の構成は、第1実施例における構成と同一であるので、同一の構成要素については、図4において、図1と同一の符合を付し、その説明を省略する。
B. Second embodiment:
FIG. 4 is an explanatory view showing an apparatus for manufacturing a thin film laminate as a second embodiment. Compared with the thin film laminate manufacturing apparatus 10 according to the first embodiment, the thin film laminate manufacturing apparatus 210 according to the second embodiment does not include the temperature control unit 40 and the intermediate where the heating unit 30 is carried out. The laminated body 80 is different in that it is immediately wound by the winding roll 28. The intermediate laminated body 80 transported out of the heating unit 30 is gradually cooled as shown in the temperature graph TG, but the timing of reaching the second temperature T2 (= cooling shrinkage temperature) of 78.5 [° C.] is reached. The timing of winding onto the winding roll 28 is reached. Since the other configurations in the second embodiment are the same as those in the first embodiment, the same components are denoted by the same reference numerals in FIG. 4 as those in FIG.

こうした構成の第2実施形態としての薄膜積層体の製造装置210によれば、加熱部30による加熱後、中間積層体80が第2の温度T2を下回るよりも前に、巻取ロール28への巻き取りがなされる。このために、第1実施形態と同様に、バックシート54の部分の冷却収縮による中間積層体80の巻きシワの発生を抑制することできる。   According to the thin film laminate manufacturing apparatus 210 as the second embodiment having such a configuration, after the heating by the heating unit 30, before the intermediate laminate 80 falls below the second temperature T <b> 2, Winding is performed. For this reason, like the first embodiment, it is possible to suppress the occurrence of winding wrinkles of the intermediate laminate 80 due to the cooling shrinkage of the portion of the back sheet 54.

C.変形例:
・変形例1:
前記実施形態およびその変形例では、第2の温度T2を、冷却収縮温度に相当する78.5[℃]とした。これに対して、冷却収縮温度は、必ず78.5[℃]ではなく、バックシート54として用いるPTFEシートの厚さや、その他の材料の厚さ等を変えた構成とし、PTFEシートの冷却収縮温度は変動する。このため、材料等によって定まる実施形態に応じた冷却収縮温度の値に第2の温度T2を定める構成としてもよい。
C. Variation:
・ Modification 1:
In the embodiment and the modification thereof, the second temperature T2 is set to 78.5 [° C.] corresponding to the cooling shrinkage temperature. On the other hand, the cooling shrinkage temperature is not necessarily 78.5 [° C.], but the thickness of the PTFE sheet used as the back sheet 54, the thickness of other materials, and the like are changed, and the cooling shrinkage temperature of the PTFE sheet is changed. Will fluctuate. For this reason, it is good also as a structure which determines 2nd temperature T2 to the value of the cooling shrinkage temperature according to embodiment defined by material etc.

・変形例2:
前記実施形態およびその変形例では樹脂基材をバックシート54とした。これに対して、変形例では、樹脂基材を電解質膜そのものとしてもよい。
Modification 2
In the embodiment and the modification thereof, the resin base material is the back sheet 54. On the other hand, in a modification, the resin base material may be the electrolyte membrane itself.

本発明は、上述の実施形態や実施例、変形例に限られるものではなく、その趣旨を逸脱しない範囲において種々の構成で実現することができる。例えば、発明の概要の欄に記載した各形態中の技術的特徴に対応する実施形態、実施例、変形例中の技術的特徴は、上述の課題の一部又は全部を解決するために、あるいは、上述の効果の一部又は全部を達成するために、適宜、差し替えや、組み合わせを行うことが可能である。また、前述した実施形態および各変形例における構成要素の中の、独立請求項で記載された要素以外の要素は、付加的な要素であり、適宜省略可能である。   The present invention is not limited to the above-described embodiments, examples, and modifications, and can be realized with various configurations without departing from the spirit thereof. For example, the technical features in the embodiments, examples, and modifications corresponding to the technical features in each embodiment described in the summary section of the invention are to solve some or all of the above-described problems, or In order to achieve part or all of the above effects, replacement or combination can be performed as appropriate. Moreover, elements other than the elements described in the independent claims among the constituent elements in the above-described embodiments and modifications are additional elements and can be omitted as appropriate.

10…薄膜積層体の製造装置
20…搬送部
22…第1の巻出ロール
24…第2の巻出ロール
26…搬送ローラ
28…巻取ロール
30…加熱部
40…調温部
42…調温室
50…バックシート付き電解質膜
52…電解質膜
54…バックシート
60…補強膜
70…重ね合わせシート
80…中間積層体
210…薄膜積層体の製造装置
DESCRIPTION OF SYMBOLS 10 ... Manufacturing apparatus of thin film laminated body 20 ... Conveying part 22 ... 1st unwinding roll 24 ... 2nd unwinding roll 26 ... Conveying roller 28 ... Winding roll 30 ... Heating part 40 ... Temperature control part 42 ... Conditioning room DESCRIPTION OF SYMBOLS 50 ... Electrolyte membrane with a back sheet 52 ... Electrolyte membrane 54 ... Back sheet 60 ... Reinforcement membrane 70 ... Overlapping sheet 80 ... Intermediate laminated body 210 ... Manufacturing apparatus of a thin film laminated body

Claims (1)

長尺状の樹脂基材を連続的に搬送ローラによって搬送しつつ、前記樹脂基材に薄膜を連続的に積層する、薄膜積層体の製造方法であって、
前記樹脂基材に前記薄膜を積層する際に、所定の加熱温度に加熱する加熱処理を行う加熱工程と、
前記加熱処理が行われた後の、前記樹脂基材と前記薄膜との積層体を、ロール状に巻き取る巻取工程と、
を備え、
前記巻取工程は、
前記積層体の周囲の温度を前記樹脂基材の冷却収縮温度以上に調整して、前記巻き取りを行う、薄膜積層体の製造方法。
A method for producing a thin film laminate, in which a thin resin substrate is continuously conveyed by a conveyance roller while a thin film is continuously laminated on the resin substrate,
When laminating the thin film on the resin base material, a heating step of performing a heat treatment to heat to a predetermined heating temperature;
A winding step of winding the laminate of the resin base material and the thin film into a roll after the heat treatment is performed,
With
The winding step
The manufacturing method of a thin film laminated body which adjusts the temperature around the said laminated body more than the cooling shrinkage temperature of the said resin base material, and performs the said winding.
JP2014044865A 2014-03-07 2014-03-07 Method of manufacturing thin film laminate Pending JP2015168158A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106379024A (en) * 2016-08-31 2017-02-08 华中科技大学 Mobile phone outer shell diffuse reflection film body covering device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007003766A (en) * 2005-06-23 2007-01-11 Konica Minolta Opto Inc Optical film, manufacturing method of optical film, polarizing plate and display device
JP2009015273A (en) * 2007-07-06 2009-01-22 Sanritsutsu:Kk Production of polarizing plate

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007003766A (en) * 2005-06-23 2007-01-11 Konica Minolta Opto Inc Optical film, manufacturing method of optical film, polarizing plate and display device
JP2009015273A (en) * 2007-07-06 2009-01-22 Sanritsutsu:Kk Production of polarizing plate

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106379024A (en) * 2016-08-31 2017-02-08 华中科技大学 Mobile phone outer shell diffuse reflection film body covering device
CN106379024B (en) * 2016-08-31 2019-03-05 华中科技大学 A kind of phone housing diffusing reflection membrane body cladding system

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