JP2015161004A - Film deposition apparatus, method for manufacturing clock exterior part, clock exterior part and clock - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide: a film deposition apparatus capable of efficiently forming a desired film by a method of reducing the waste of a material and reducing a load to environment; a method for manufacturing a clock exterior part using the film deposition apparatus; a clock exterior part manufactured by the manufacturing method using the material when manufactured; and a clock including the clock exterior part.SOLUTION: A film deposition apparatus comprises: an aerosol generating part 15 for generating aerosol obtained by dispersing particles P31 in a gas; a film deposition chamber for depositing a film P3 on a base material P1; a first nozzle 24 for supplying the aerosol; and a second nozzle 20 for supplying the gas. The second nozzle 20 supplies a reducing gas for reducing the constituents of the particles P31, and the pressure of the aerosol generating part 15 is controlled to be 0.01-1000KPa, and the pressure of the film deposition chamber is controlled to be 10 KPa or less.

Description

  The present invention relates to a film forming apparatus, a method for manufacturing a watch exterior part, a watch exterior part, and a watch.

  A watch is required to have a function as a practical product and to have excellent aesthetics (aesthetic appearance) as a decorative product.

  For this reason, materials having excellent texture such as various metal materials are used for the exterior parts for watches (for example, see Patent Document 1).

  In order to further improve aesthetics, a decorative layer (film) is provided in a predetermined pattern.

  Conventionally, in order to provide a decorative layer (film) with a predetermined pattern, vapor deposition such as vacuum deposition is performed with a mask (resist etc.) arranged, or film formation is performed on the entire surface of the substrate. After that, a method of removing unnecessary portions by etching or the like is adopted.

  However, in these methods, the constituent material of the coating contained in the final timepiece exterior part is a very small part of the material used for manufacturing, and the material is wasted, which is not preferable from the viewpoint of resource saving.

  Further, the recovery of the film forming material, the recycling of the recovered material, the use of resists, etc., increase in processes and the use of chemical substances have caused problems of environmental burden and cost increase.

JP 2008-150660 A

  An object of the present invention is to provide a film forming apparatus capable of efficiently performing desired film formation by a method with less waste of materials and less burden on the environment, less waste of materials, and burden on the environment. Providing a watch exterior parts manufacturing method that can efficiently manufacture watch exterior parts with excellent aesthetic appearance with a small method, excellent aesthetic appearance, less waste of materials during manufacture, and environmental friendliness It is another object of the present invention to provide a timepiece exterior component having a small load, and to provide a timepiece having a timepiece exterior component that is excellent in aesthetic appearance, has little waste of materials during manufacture, and has a low environmental impact.

Such an object is achieved by the present invention described below.
The film forming apparatus of the present invention includes an aerosol generating unit that generates an aerosol in which particles are dispersed in a gas,
A film forming chamber for forming a film on a substrate;
A first nozzle for supplying the aerosol;
And a second nozzle for supplying a gas.

  Accordingly, it is possible to provide a film forming apparatus capable of efficiently performing desired film formation by a method with less waste of materials and a small load on the environment.

  In the film forming apparatus of the present invention, it is preferable that the second nozzle supplies a reactive gas for chemically reacting the constituent material of the particles.

  Thereby, the composition of the particles as the raw material and the composition of the particles as the constituent material of the coating can be made different.

  In the film forming apparatus of the present invention, it is preferable that the second nozzle supplies a reducing gas for reducing the particles.

  Thereby, the adhesiveness of the base material of the particle | grains which comprise a film and a coating film, and the adhesiveness of the particles which comprise a film can be made especially excellent.

  In the film forming apparatus according to the aspect of the invention, it is preferable that the second nozzle supplies a gas that increases energy that contributes to the bonding between the particles.

  Thereby, the adhesiveness of a base material and a film can be made especially high, suppressing the power consumption as the whole apparatus.

In the film forming apparatus of the present invention, an angle formed between the supply direction of the aerosol from the first nozzle and the normal line of the surface of the base material in contact with the particles is 0 ° or more and 45 ° or less. Is preferred.
Thereby, the adhesiveness of the film with respect to a base material can be made especially excellent.

In the film forming apparatus of the present invention, it is preferable that the aerosol generating section and the film forming chamber are connected by a connecting pipe having an inner diameter of 1 mm or more and 10 mm or less.
Thereby, the conveyance property of the particle | grains in a connection pipe can be made especially excellent.

In the film forming apparatus of the present invention, it is preferable that a pump capable of exhaust pressure of 10 ⁻⁵ Pa is connected to the film forming chamber.

  As a result, it is possible to form a film in which the generation of defects is prevented at a higher film formation rate.

  In the film forming apparatus of the present invention, it is preferable that during the film formation, the pressure of the aerosol generating unit is controlled to 10 Pa or more and 1 MPa or less, and the pressure of the film forming chamber is controlled to 10 KPa or less.

  Thereby, the injection speed of the aerosol (particles) from the first nozzle can be more suitably controlled.

  In the film forming apparatus of the present invention, it is preferable that the stage on which the substrate is installed can be arbitrarily operated in the xy direction with respect to the first nozzle.

  Thereby, even a film having a complicated pattern can be easily and reliably formed.

  The method for manufacturing a watch exterior part according to the present invention is characterized in that the watch exterior part is manufactured using the film forming apparatus according to the present invention.

  Accordingly, it is possible to provide a method for manufacturing a watch exterior part that can efficiently manufacture a watch exterior part having an excellent aesthetic appearance by a method with less waste of materials and a low environmental load.

The watch exterior part of the present invention is manufactured using the film forming apparatus of the present invention.
As a result, it is possible to provide an exterior part for a watch that is excellent in aesthetic appearance, has little waste of materials during manufacture, and has a low environmental impact.

The timepiece exterior component of the present invention is manufactured using the method of the present invention.
As a result, it is possible to provide an exterior part for a watch that is excellent in aesthetic appearance, has little waste of materials during manufacture, and has a low environmental impact.

The timepiece of the present invention includes the timepiece exterior component of the present invention.
Thereby, it is possible to provide a timepiece having an exterior part for a timepiece that is excellent in aesthetic appearance, has little waste of materials at the time of manufacture, and has a low environmental load.

It is a longitudinal cross-sectional side view which shows typically suitable embodiment of the film-forming apparatus of this invention, and is a figure which shows the state at the time of film-forming. It is a longitudinal cross-sectional side view which shows typically suitable embodiment of the film-forming apparatus of this invention, and is a figure which shows the state at the time of film-forming standby. It is a longitudinal cross-sectional side view which shows an example of a structure of the crusher with which a film-forming apparatus is provided. It is a block diagram of the principal part of the film-forming apparatus shown in FIG. 1, FIG. It is sectional drawing which shows typically each process about suitable embodiment of the manufacturing method of the exterior components for timepieces of this invention. It is a typical top view showing a suitable embodiment at the time of applying a timepiece exterior part of the present invention to a cover glass. It is a fragmentary sectional view which shows suitable embodiment of the timepiece (portable timepiece) of this invention.

  Hereinafter, a film forming apparatus, a method for manufacturing a watch exterior part, a watch exterior part, and a watch according to the present invention will be described in detail based on preferred embodiments shown in the accompanying drawings.

<< Film deposition system >>
First, the film forming apparatus will be described.

  1 and 2 are vertical cross-sectional side views schematically showing a preferred embodiment of the film forming apparatus of the present invention, and FIG. 3 is a vertical cross-sectional side view showing an example of the configuration of a disintegrator included in the film forming apparatus. 4 is a block diagram of a main part of the film forming apparatus shown in FIGS. In particular, FIG. 1 is a diagram showing a state during film formation, and FIG. 2 is a diagram showing a state during standby for film formation. In the following, for convenience of explanation, the x axis, the y axis, and the z axis are shown as three axes orthogonal to each other in FIG. The x-axis is an axis along one of the horizontal directions, the y-axis is an axis along the horizontal direction and perpendicular to the x-axis, and the z-axis is a vertical direction (up and down Direction). In addition, the tip side of each illustrated arrow is a “positive side (+ side)” and the base end side is a “negative side (− side)”. Further, the upper side in FIG. 1 is referred to as “upper (upper)”, and the lower side is referred to as “lower (lower)”.

  The film forming apparatus 1 is an apparatus for forming a film by spraying an aerosol obtained by dispersing separately prepared particles P31 in a gas from a nozzle.

  The film forming apparatus 1 includes an aerosol generator 15, a disintegrator 4, a film forming chamber 16, a connecting pipe 2 having a first nozzle 24, a second nozzle 20, a connecting pipe 8, and a gas supply. Means 3, pressure adjusting means 5, moving means 6, control unit 7, and guide member 9 are provided.

  The aerosol generator 15 is configured to maintain airtightness, and can store particles P31 therein.

  The particles P31 will be described in detail later. Examples of the constituent materials thereof include various metals, various metal oxides, various metal nitrides, various metal carbides, various metal borides, various metal sulfides, various carbon materials, Examples include various pigments and various resin materials.

The crusher 4 is connected to an aerosol generator 15 by a connecting pipe 8.
The crusher 4 has a function of crushing the particles P31 contained in the aerosol generated by the aerosol generator 15.

  The film forming chamber 16 is a part for forming the coating P3 on the base material P1. The film forming chamber 16 is provided independently of the aerosol generator 15 and the crusher 4. The film forming chamber 16 is also configured to maintain airtightness, and the base material P1 can be accommodated therein.

  The room temperature in the film forming chamber 16 is adjusted to 25 ° C. or higher and 30 ° C. or lower by, for example, water cooling, that is, by a refrigerant passing through the piping.

  The connecting pipe 2 connects the crusher 4 and the film forming chamber 16, and the lumen portion 22 functions as a flow path through which the particles P <b> 31 pass.

  The connecting pipe 2 has a first opening (one end opening) 25 opened at one end thereof facing the inside of the crusher 4, and a second opening (other end opening) 21 opened at the other end. It faces the film forming chamber 16.

  With such a configuration, the aerosol generator 15 and the film forming chamber 16 communicate with each other via the connecting pipe 8, the disintegrator 4 and the connecting pipe 2.

  The second opening 21 is arranged in parallel to the surface direction of the base material P <b> 1 accommodated in the film forming chamber 16. And the particle | grains P31 which pass through the connection pipe 2 (lumen part 22) are sprayed on the base material P1 from the 2nd opening part 21. FIG. Thereby, the coating P3 is formed. Thus, in the connecting pipe 2, the portion on the second opening 21 side functions as the nozzle portion (first nozzle) 24.

  The shape of the 2nd opening part 21 is not specifically limited, For example, although flat shape may be sufficient, it is preferable that it is circular. Thereby, even if it is the fine-shaped film P3, it can form suitably.

  The angle formed between the direction in which the aerosol is supplied from the first nozzle 24 and the normal of the surface of the substrate P1 that contacts the particles P31 is preferably 0 ° or more and 50 ° or less, and more preferably 0 ° or more and 45 ° or less. It is more preferable that

  Thereby, especially the adhesiveness of the film P3 with respect to the base material P1 can be made excellent.

  The first nozzle 24 may be configured such that the aerosol supply direction (angle, etc.) is variable.

  The average inner diameter of the connecting tube 2 is not particularly limited, but is preferably 1 mm or more and 10 mm or less, for example. Moreover, the internal diameter of the 2nd opening part 21 is although it does not specifically limit, For example, it is preferable that they are 0.1 mm or more and 5 mm or less.

  Thereby, the conveyance property of the particle | grains P31 in the connection pipe 2 can be made especially excellent.

  Moreover, it does not specifically limit as a constituent material of the connection pipe 2, For example, metal materials, such as stainless steel, can be used.

  Moreover, it is preferable that a heating mechanism 90 for heating the connection pipe 2 is provided on the outer peripheral portion of the connection pipe 2. By this heating mechanism 90, it is possible to prevent the particles P31 passing through the connecting pipe 2 from adhering to the inner peripheral portion (inner wall) of the connecting pipe 2-. In addition, it does not specifically limit as heating temperature, For example, 100 to 300 degreeC is preferable and 250 to 300 degreeC is more preferable.

  As shown in FIGS. 1 and 2, the gas supply means 3 supplies gas into the aerosol generator 15. In addition, it does not specifically limit as this supply amount, For example, it is preferable that they are 1 L / min or more and 90 L / min or less.

  The gas supply means 3 includes a tank 31 filled with gas, a connection pipe 32 that connects the tank 31 and the aerosol generator 15, and an electromagnetic valve 33 that is installed in the middle of the connection pipe 32.

The tank 31 can store gas in an airtight manner.
The gas stored in the tank 31 is not particularly limited. For example, nitrogen gas can be used, and other inert gas such as helium or argon can also be used. Moreover, when using what was comprised with the metal oxide as particle | grains P31, what contains oxygen can be used suitably as the said gas. Thereby, unintentional reduction of the particles P31 can be prevented.

  The tank 31 and the aerosol generator 15 are in communication with each other via a connecting pipe 32. The connecting tube 32 may be hard or flexible.

  The connecting pipe 32 is provided with an electromagnetic valve 33 in the middle of the longitudinal direction. The electromagnetic valve 33 opens and closes the connecting pipe 32. When the electromagnetic valve 33 is in the open state, the tank 31 and the aerosol generator 15 communicate with each other. Thereby, the gas is supplied from the tank 31 to the aerosol generator 15. Further, when the electromagnetic valve 33 is closed, the communication between the tank 31 and the aerosol generator 15 is blocked. Thereby, the supply of gas from the tank 31 to the aerosol generator 15 is stopped.

By supplying gas from the tank 31 to the aerosol generator 15, an aerosol is generated in which the particles P <b> 31 stored in the aerosol generator 15 are dispersed in the gas.
The aerosol generated in the aerosol generator 15 in this way is introduced into the crusher 4 through the connecting pipe 8 when the gas from the tank 31 functions as a carrier gas.

  As shown in FIG. 3, the crusher 4 includes a container 41 into which an aerosol containing particles P31 is introduced, an aerosol inlet 42 into which an aerosol containing particles P31 is introduced from a connecting pipe 8, and crushing of the particles P31. A crushing tool 43 for performing the above, an aerosol outlet 44 for leading the aerosol containing the crushed particles P31 to the connecting pipe 2, a brush 45 for removing the particles P31 when they adhere to the crushing tool 43, Gas inlets 46 a and 46 b for introducing gas into the container 41 and an ultrasonic vibration device 47 are provided.

  In the crusher 4, an aerosol inlet 42 is installed in a container 41, and a cylindrical crusher 43 is disposed at the tip of the crusher 4 so that the shaft can be rotated by a motor (not shown). The opening of the aerosol inlet 42 has a slit shape in which the cylindrical axis direction of the crushing tool 43 has a long side. The width of the slit is not particularly limited, but is preferably 1 mm or less.

  As the crushing tool 43, it is preferable that the cylindrical side surface on which the aerosol collides is made of a high hardness material such as titanium carbide.

  An aerosol outlet 44 is disposed above the crusher 43. Moreover, the brush 45 is installed so that the crushing tool 43 may be contact | connected. Gas inlets 46 a and 46 b are arranged in a space from the crushing tool 43 to the aerosol outlet 44, and an ultrasonic vibration device 47 is installed on the outer periphery of the aerosol outlet 44.

  The aerosol generated in the aerosol generator 15 is accelerated at the aerosol inlet 42 and collides with the cylindrical side surface of the crushing tool 43. Thick arrows in the figure indicate the traveling direction of the aerosol. The crushing tool 43 rotates in the clockwise direction as shown by the arrow in the figure. Therefore, the aerosol which changes the introduced position one after another collides with the cylindrical side surface of the crushing tool 43 while always changing the collision surface. Thereby, even if the aerosol generated in the aerosol generator 15 contains a relatively large amount of aggregated particles, the aggregated particles can be efficiently crushed.

  The particles P31 in the aerosol may adhere to the side surface of the cylinder to some extent, but the adhering powder is scraped off by the brush 45 and accumulated on the bottom of the container 41. Colliding with the crushing tool 43, the aggregated particles are crushed and converted into an aerosol rich in primary particles. Since the aerosol introduced from the aerosol inlet 42 obliquely collides with the cylindrical side surface of the crushing tool 43, most of the aerosol reflects along the tangential direction of the cylindrical side surface, but has a certain diffusion width. It is conceivable to collide with and adhere to the inner wall of the aerosol outlet 44. To prevent this, gas is introduced from the gas inlets 46a and 46b, and a curtain-like gas film is formed on the inner surface of the aerosol outlet 44. It is preferable to prevent the adhesion or to operate the ultrasonic vibration device 47 to vibrate the aerosol outlet 44 so that the adhesion does not proceed. The small arrows from the gas inlets 46a and 46b indicate the flow of gas introduced from here. Furthermore, it is preferable to neutralize the surface charge of the pulverized particles P31 by previously ionizing the gas to be introduced and prevent reaggregation in the aerosol.

  The aerosol converted into the primary particle-rich aerosol in this way is led to a nozzle (not shown), and thus can efficiently form a structure with no defects over a long period of time with few defects. Is possible.

  The aerosol that has been converted into a material rich in primary particles in the crusher 4 is introduced into the connecting pipe 2 and sprayed onto the base material P1 from the second opening 21. And the particle | grains P31 will collide and adhere to the base material P1, As a result, the film P3 is formed.

The second nozzle 20 supplies gas.
By providing such a second nozzle 20, for example, the following effects can be obtained.

  That is, by providing the second nozzle 20, the pressure in the vicinity of the portion where the particles P31 of the substrate P1 are deposited can be locally increased. As a result, the kinetic energy of the particle P31 is increased while preventing the energy consumption of the entire apparatus from increasing or the occurrence of unintentional deformation or adhesion of the particle P31 in the aerosol generator 15 or the like. The adhesion between the substrate P1 and the particles P31 can be easily and reliably improved.

  In addition, a reactive gas that chemically reacts with the constituent material of the particles P31 supplied from the first nozzle 24 can be supplied from the second nozzle 20, thereby, for example, the composition of the particles P31 as a raw material and The composition of the particles P31 as the constituent material of the coating P3 can be made different. As a result, for example, particles having a composition after the chemical reaction are likely to agglomerate, and when the particles are used as a raw material, it is difficult to stably form an aerosol. Even when there are problems such as large variations in size and shape, and unintentional variations in the film thickness and film quality of the coating film to be formed, the gas supplied from the second nozzle In the case of chemical reaction, occurrence of such a problem can be reliably prevented. In particular, since the collision energy of the particles P31 to the base material P1 is generally large, the chemical reaction can be suitably advanced. In addition, since the reactive gas can be locally supplied by supplying the reactive gas from the second nozzle 20, even when the amount of the reactive gas used is relatively small, the film forming apparatus The concentration of the reactive gas in the space where the chemical reaction in 1 (the space between the second opening 21 and the base material P1) occurs can be made sufficiently high. Therefore, the amount of the reactive gas used can be reduced, and the exhaust gas processing cost can be reduced, so that the effect of cost reduction required for film formation is great.

  In addition, a reducing gas for preventing the oxidation reaction of the particles P31 can be supplied from the second nozzle 20, and thus, for example, due to the collision energy when the particles P31 collide with the base material P1, the non-reducing gas is reduced. The intended chemical reaction can be prevented from proceeding, and the coating P3 having a desired composition can be more reliably formed.

  Moreover, the gas which raises the energy which contributes to the coupling | bonding of particle | grains P31 can be supplied from the 2nd nozzle 20, Thereby, the base material P1 can be carried out easily and reliably, suppressing the power consumption as the whole apparatus. And the coating P3 can have particularly high adhesion.

  For example, the second nozzle 20 may supply a gas having a higher specific gravity than the gas contained in the aerosol supplied by the first nozzle 24. Thereby, since energy (for example, frictional heat etc.) exchanged between the particle P31 and the gas when the particle P31 collides with the gas becomes large, the adhesion between the substrate P1 and the coating P3 is improved. It can be particularly high. In addition, when such a gas is supplied, the above-described chemical reaction can be more suitably advanced.

  In addition, the second nozzle 20 may supply a gas having a larger thermal conductivity coefficient than the gas contained in the aerosol supplied by the first nozzle 24. As a result, when the particles P31 collide with the gas, an increase in the thermal energy of the gas (local increase in gas temperature) occurs effectively, and the adhesion between the substrate P1 and the coating P3 is particularly high. can do. In addition, when such a gas is supplied, the above-described chemical reaction can be more suitably advanced.

  Further, when the guide member 9 to be described in detail later is functioned (when film formation on the base material P1 is not performed), the particles P31 are suitably supplied to the guide member 9 by supplying gas from the second nozzle 20. Can be guided. As a result, the effect by providing the guide member 9 which will be described in detail later is more remarkably exhibited.

  When the reactive gas is supplied from the second nozzle 20, examples of the reactive gas include an oxidizing gas such as oxygen, a sulfurizing gas such as hydrogen sulfide, a nitriding gas such as ammonia, and a reduction of hydrogen or the like. Examples include sex gases.

  Moreover, when supplying the reducing gas for preventing the oxidation reaction of the particle | grains P31 from the 2nd nozzle 20, hydrogen etc. can be used as the said reducing gas, for example.

  Moreover, when supplying the gas which raises the energy which contributes to the coupling | bonding of particle | grains P31 from the 2nd nozzle 20, inert gas, such as nitrogen gas and argon gas, etc. can be used as the said gas, for example.

  In this case, the gas injection flow rate from the second nozzle 20 is preferably 0.05 sccm (standard cc per minutes) to 10 SLM (standard litter per minutes), and preferably 0.1 sccm to 1 SLM. Is more preferable. Thereby, the effects as described above can be exhibited more significantly while reliably preventing the base material P1 from being damaged.

  The shape of the opening of the second nozzle 20 is not particularly limited, and may be any shape such as a flat shape, a circular shape, a rectangular shape, or a line shape.

  In particular, when the shape of the opening of the second nozzle 20 is a line, a stable laminar flow can be formed by the gas supplied from the second nozzle. Thereby, for example, the particles P31 and the gas supplied from the second nozzle can be more reliably collided.

  In the illustrated configuration, the first nozzle and the second nozzle are provided independently, but may be provided as having a double tube structure, for example. Thereby, for example, it is possible to reliably prevent the relative positional relationship between the first nozzle and the second nozzle from changing unintentionally. Moreover, when it has a double-pipe structure arrange | positioned so that the outer periphery of a 1st nozzle may surround the 2nd nozzle, it is more effective that the particle | grains learned from the 1st nozzle diffused unintentionally. Can be prevented.

  The gas supply from the second nozzle 20 may or may not always be performed while the aerosol (particle P31) is supplied from the first nozzle 24. For example, the gas supply from the second nozzle 20 may be performed continuously or intermittently with a predetermined feeling.

  The second nozzle 20 may be configured to be movable relative to the first nozzle 24.

  Similarly to the connecting pipe 2 including the first nozzle 24, the second nozzle 20 has a gas supply means (not shown) (for example, a gas supply having the same configuration as that described in the gas supply means 3 described above). Means) or a crusher (not shown) (for example, a crusher having the same configuration as described in the above-described crusher 4) may be connected.

  The pressure adjusting means 5 makes the pressure in the film forming chamber 16 lower than the pressure in the aerosol generator 15 and the pressure in the disintegrator 4.

  By providing such a pressure adjusting means (first pressure adjusting means) 5 together with the gas supply means (second pressure adjusting means) 3 described above, the pressure between the film forming chamber 16 and the aerosol generator 15 is increased. The difference can be adjusted more suitably, and the injection speed of the aerosol (particles P31) from the first nozzle 24 can be controlled more suitably. In addition, unintended pressure fluctuations in the film forming chamber 16 can be more effectively suppressed, and a more stable film forming environment can be maintained.

  As shown in FIGS. 1 and 2, the pressure adjusting means 5 includes a pump 51 that sucks the inside of the film forming chamber 16, a connecting pipe 52 that connects the pump 51 and the film forming chamber 16, and a midway of the connecting pipe 52. And an installed electromagnetic valve 53.

The pump 51 sucks the gas G ₂ in the film forming chamber 16. By this suction, the gas G _{2 in} the film forming chamber 16 is introduced into the connecting pipe 52 from the exhaust port 521 which is the end of the connecting pipe 52 on the film forming chamber 16 side, and is discharged to the outside of the film forming chamber 16. Is done. Therefore, the pressure in the film forming chamber 16 is surely lower than the pressure in the aerosol generator 15 and the pressure in the disintegrator 4. Thereby, the particle | grains P31 can flow out reliably in 16, Therefore Formation of the film P3 can be performed reliably.

  The pressure in the film forming chamber 16 depends on the pressure in the aerosol generator 15 and the like, but can be, for example, less than 10 kPa when the pressure in the aerosol generator 15 is 10 kPa or more and 1 MPa or less. .

  Thereby, the injection speed of the aerosol (particle P31) from the first nozzle 24 can be controlled more suitably.

Further, when the pump 51 is capable of exhaust pressure up to 10 ⁻⁵ Pa, the coating P3 in which the occurrence of defects is prevented can be formed at a higher deposition rate. In addition, the guide member 9 described in detail later can more suitably guide the particles P31 to the exhaust port 521.

  Moreover, it does not specifically limit as the pump 51, For example, a turbo-molecular pump, a dry pump, a mechanical booster pump, a rotary pump etc. can be used.

  The pump 51 is connected to the film forming chamber 16 through a connecting pipe 52. The connecting pipe 52 may be hard or flexible.

  The connecting pipe 52 is provided with an electromagnetic valve 53 in the middle of its longitudinal direction. The electromagnetic valve 53 opens and closes the connecting pipe 52. When the electromagnetic valve 53 is in the open state, the inside of the film forming chamber 16 can be sucked by the suction force of the pump 51, and thus the inside of the film forming chamber 16 can be decompressed. Further, when the electromagnetic valve 53 is in a closed state, the suction force of the pump 51 is prevented from reaching the film forming chamber 16.

  As shown in FIGS. 1 and 2, the moving means 6 moves the base material P <b> 1 relative to the second opening 21. As shown in FIGS. 1, 2, and 4, the moving means 6 includes a stage (table) 61 on which the base material P <b> 1 is installed, an x-axis motor 62 x that moves the stage 61 in the x-axis direction, and x An x-axis motor driver 63x that controls driving of the axis motor 62x, a y-axis motor 62y that moves the stage 61 in the y-axis direction, a y-axis motor driver 63y that controls driving of the y-axis motor 62y, and a stage 61 Has a z-axis motor 62z that moves the z-axis motor 62z and a z-axis motor driver 63z that controls driving of the z-axis motor 62z.

  The stage 61 is a plate-like member made of a metal material such as stainless steel. This stage 61 is supported horizontally.

  The x-axis motor 62x is electrically connected to the x-axis motor driver 63x, the y-axis motor 62y is electrically connected to the y-axis motor driver 63y, and the z-axis motor 62z is z-axis The motor driver 63z is electrically connected.

  As described above, when the stage 61 can be arbitrarily operated in the xy direction with respect to the first nozzle 24, the particles P31 can be easily and reliably supplied to a desired portion of the substrate P1 by a desired amount. Even the coating P3 having a complicated pattern can be easily and reliably formed.

  In addition, since the stage 61 can be arbitrarily operated in the z direction with respect to the first nozzle 24, the surface of the base material P1 (the surface on which the coating film P3 is to be formed) has a relatively large unevenness. However, it is possible to suitably form a film.

  The film forming apparatus 1 includes a guide member 9 that guides the particles P31 to the exhaust port 521 when necessary.

  Thereby, for example, when the supply amount of the aerosol (particles P31) to the film forming chamber 16 is not sufficiently stabilized, such as when the film forming apparatus 1 is started up (when the power is turned on), or a plurality of substrates In the case where it is not desired to supply the particles P31 to the substrate P1, such as when the substrate P1 is replaced when the substrate P1 is used, the particles P31 are placed in unintentional portions of the film forming chamber 16 or the substrate P1. It can prevent effectively that it adheres.

  Particularly, in the illustrated configuration, the guide member 9 has a tubular shape having a hollow portion through which the particles P31 flow.

  With such a structure, the particles P31 can be taken into the guide member 9, and the particles P31 once taken in are effectively prevented from leaking unintentionally. It can prevent more effectively that it adheres to an unintentional site | part. In addition, by incorporating the aerosol containing the particles P31 into the hollow portion, a gas flow toward the exhaust port 521 is efficiently generated in the hollow portion. For this reason, the particles P31 can be more effectively prevented from adhering to the guide member 9, and the efficiency of discharging the particles P31 to the outside of the film forming chamber 16 can be improved.

  The angle θ formed by the aerosol supply direction from the first nozzle 24 and the normal line of the surface of the guide member 9 where the particles P31 come into contact is preferably 40 ° or more, and is 45 ° or more and 85 ° or less. Is more preferable.

  Thereby, the adhesion of the particles P31 to the guide member 9 can be more effectively prevented. As a result, the efficiency of discharging the particles P31 to the outside of the film forming chamber 16 can be made particularly excellent, and the frequency of maintenance of the film forming apparatus 1 can be reduced. In addition, the retention of the particles P31 in the film forming chamber 16 can be further effectively prevented, and the yield of the product having the coating P3 can be improved.

  The guide member 9 may be made of any material. Examples of the constituent material of the guide member 9 include various metal materials such as stainless steel, ceramic materials such as titanium carbide, and various resin materials. It is done.

  Moreover, the surface which the particle | grains P31 of the guide member 9 can contact may be given the surface treatment which prevents adhesion of the particle | grains P31.

  Thereby, the adhesion of the particles P31 to the guide member 9 can be more effectively prevented. As a result, the efficiency of discharging the particles P31 to the outside of the film forming chamber 16 can be made particularly excellent, and the frequency of maintenance of the film forming apparatus 1 can be reduced.

  The surface treatment may be any process that prevents the adhesion of the particles P31, but it is preferable to form an adhesion preventing film.

  Thereby, adhesion of the particles P31 to the guide member 9 can be further effectively prevented. As a result, the efficiency of discharging the particles P31 to the outside of the film forming chamber 16 can be further improved, and the frequency of maintenance of the film forming apparatus 1 can be further reduced. Even if the shape of the guide member 9 is complicated, the above-described effects can be obtained easily and reliably.

  Examples of the constituent material of the adhesion preventing film include fluorine resins such as polytetrafluoroethylene, DLC (diamond-like carbon), and the like.

  The thickness of the adhesion preventing film is not particularly limited, but is preferably 50 μm or more and 3 mm or less, and more preferably 100 μm or more and 1 mm or less.

  Thereby, the effect mentioned above can be acquired more stably over a longer period, suppressing the production cost of the guide member 9.

  In the illustrated configuration, when the guide member 9 is caused to function, the relative positional relationship between the first nozzle 24 and the second nozzle is different from that during film formation on the substrate P1. In particular, in the illustrated configuration, the particle P31 is guided to the guide member 9 by changing the angle of the second nozzle 20. Thereby, the effect by providing the guide member 9 as mentioned above is exhibited more notably.

  Further, by supplying the gas from the second nozzle from the direction shown in the figure, the angle formed by the incident direction of the particle P31 and the normal line of the surface of the guide member 9 (the surface on which the particle P31 collides) is described above. Greater than θ. As a result, the adhesion of the particles P31 to the guide member 9 can be further effectively prevented, the efficiency of discharging the particles P31 to the outside of the film forming chamber 16 can be further improved, and the film forming apparatus can be used. The maintenance frequency of 1 can be further reduced.

  Examples of the timing for guiding the particles P31 to the exhaust port 521 by the guide member 9 include, for example, when the film forming apparatus 1 is started up (when power is turned on), when the substrate P1 is replaced when a plurality of substrates P1 are used, and the like. Can be mentioned.

The guide member 9 includes a motor 92 that moves in the y-axis direction and a motor driver 93 that controls driving of the motor 92.
The motor 92 is electrically connected to the motor driver 93.

  Each operation of the gas supply means 3, the pressure adjustment means 5, the moving means 6, the guide member 9, the second nozzle 20, etc. is controlled by the control unit 7. The control unit 7 is, for example, a personal computer (PC) with a built-in CPU (Central Processing Unit).

  As shown in FIG. 4, the control unit 7 includes an electromagnetic valve 33 of the gas supply unit 3, a pump 51 and an electromagnetic valve 53 of the pressure adjusting unit 5, an x-axis motor driver 63 x and a y-axis motor driver 63 y of the moving unit 6. The z-axis motor driver 63z and the motor driver 93 of the guide member 9 are electrically connected to each other. And the control part 7 can operate these each independently. The control program is stored in advance in a storage unit (recording medium) 71 built in the control unit 7.

  The storage unit 71 includes, for example, RAM (Random Access Memory: including both volatile and nonvolatile), FD (Floppy Disk (Floppy is a registered trademark)), HD (Hard Disk), CD-ROM (Compact It is composed of a magnetic or optical recording medium such as a disc read-only memory or a semiconductor memory.

Next, the operation of the film forming apparatus 1 will be described in detail.
At the time of film formation, as shown in FIG. 1, the stage 61 is aligned with the second opening 21 of the connecting tube 2 so that the second opening 21 of the connecting tube 2 faces the substrate P1. . This alignment is performed using a CCD (Charge Coupled Device) camera based on an image captured by the CCD camera.

At this time, the pressure adjusting means 5 is operating in the film forming apparatus 1. Thereby, the pressure in the film forming chamber 16 becomes lower than the pressure in the aerosol generator 15. This state is maintained until the formation of the coating P3 is completed.
In the film forming apparatus 1, the gas supply means 3 is also operating.

  Then, the moving means 6 is operated, that is, the stage 61 is moved in the x-axis direction and the y-axis direction.

  As described above, the gas supply means 3, the pressure adjusting means 5, the moving means 6, etc. are operated, so that the aerosol containing the particles P 31 generated in the aerosol generator 15 passes through the connecting pipe 2 toward the film forming chamber 16. Pass through reliably. The particles P31 can pass through the connecting pipe 2 smoothly by the carrier gas. Thereafter, the particles P31 are discharged from the second opening 21 and sprayed and adhered to a desired portion of the base material P1.

  At this time, the above-described effects can be obtained by supplying gas from the second nozzle 20.

  In addition, when the film forming apparatus 1 is operating, it is not desired to attach the particles P31 to the base material P1 (for example, when the film forming apparatus 1 is started up (when the power is turned on), a plurality of base materials P1 are used. For example, when the base material P1 is replaced in the case, the guide member 9 is operated to lead the particles P31 supplied from the second opening 21 to the exhaust port 521, and the particles P31 collide with the base material P1. This can be surely prevented.

  Thereby, a predetermined amount of particles P31 can be selectively attached to a desired portion of the substrate P1, and as a result, a coating P3 having a desired shape and pattern can be rapidly formed. In addition, by using the film forming apparatus 1 as described above, film formation can be performed by a method with less waste of materials and less burden on the environment as compared with conventional methods such as vapor phase film formation.

  In addition, when the particle P31 is guided to the exhaust port 521 by the guide member 9, it is preferable to relatively move the stage 61 on which the base material P1 is installed and the first nozzle 24.

  Thereby, it can prevent more reliably that adhesion of the unintentional particle | grains P31 arises in the base material P1.

In particular, in the configuration shown in FIG. 2, the stage 61 is moved in the positive z-axis direction so that the distance from the first nozzle 24 is increased.
Thereby, the effects as described above are more remarkably exhibited.

<< Method of manufacturing exterior parts for watches >>
Next, the manufacturing method of the timepiece exterior part of the present invention will be described.

  In the present invention, a watch exterior part is a component part of a watch, and means a part that is visible from the outside when the watch is used. It is a concept that includes parts housed in

  Examples of watch exterior parts include cover glass (windshield), dial, hands (earthquake, minute hand, second hand, etc.), bezel, case, back cover, crown, disc hands, date wheel, day wheel, and age plate. Rotating display bodies such as

  FIG. 5 is a cross-sectional view schematically showing each step in a preferred embodiment of the method for manufacturing a watch exterior part according to the present invention.

  As shown in FIG. 5, the manufacturing method of this embodiment includes a base material preparation step (1a) for preparing a base material P1, a base layer formation step (1b) for forming a base layer P2 on the surface of the base material P1, and A film forming step (1c) for forming the film P3 on the surface of the underlayer, and an antireflection film forming step (1d) for forming the antireflection film P4 on the surface side of the substrate P1 on which the film P3 is provided. doing.

<Base material preparation process>
In the base material preparation step, a base material P1 is prepared (1a).

  Although the base material P1 may be comprised with what kind of material, it is preferable that it is transparent.

  Thereby, for example, the aesthetic appearance of the watch exterior part P10 can be made particularly excellent. Further, for example, in a timepiece equipped with a timepiece exterior component P10, even when the surface opposite to the surface provided with the coating P3 of the timepiece exterior component P10 is arranged to face the outer surface side, The user or the like can preferably visually recognize the coating P3, and can effectively prevent the coating P3 and the like from being damaged by friction or the like while effectively demonstrating the effects provided by the coating P3. The durability of the timepiece can be made particularly excellent. In the present specification, “the aesthetic appearance of the watch exterior part P10” means a state in which the watch exterior part P10 is incorporated in the watch in addition to the aesthetic appearance when the watch exterior part P10 is observed alone. The aesthetic appearance of the part is also included.

  In the present specification, “having transparency” is not limited as long as it transmits at least part of visible light, but has a light transmittance (wavelength: light transmittance of 600 nm) of 85%. The above is preferable, and 90% or more is more preferable.

  Suitable constituent materials for the substrate P1 include, for example, sapphire glass, quartz, plastic, and the like.

  When the base material P1 is composed of a material including one or more selected from these groups, the aesthetic appearance of the watch exterior part P10 can be further improved. Further, the durability of the timepiece including the timepiece exterior component P10 can be further improved.

  The base material P1 may have a uniform composition in each part, or may have a different composition. For example, it may be composed of a laminated body in which layers having different compositions in the thickness direction are laminated, or a gradient material whose composition changes in a gradient manner.

  The substrate P1 prepared in this step may be subjected to a cleaning treatment such as water washing, alkali washing, acid washing, washing with an organic solvent, or the like.

  Moreover, the surface treatment may be performed for the purpose of improving the adhesion with the layer formed on the substrate P1.

<Underlayer formation process>
In the foundation layer forming step, the foundation layer P2 is formed on the surface of the substrate P1 (1b).

  Thereby, for example, the adhesion between the substrate P1 and the coating P3 (adhesion via the base layer P2) can be made particularly excellent. Further, for example, by making the base layer P2 function as a colored layer, the aesthetic appearance of the watch exterior part P10 can be further improved. Further, by making the underlayer P2 function as a gap layer, it is possible to obtain a three-dimensional appearance such that the coating P3 is lifted.

The average thickness of the underlayer P2 is preferably 0.01 μm or more and 10 μm or less.
Thereby, the foundation layer P2 can more effectively exhibit the functions as described above.

  The underlayer P2 may be made of any material, and examples of the constituent material of the underlayer P2 include TiN, AlN, SiN, GaN, SiO, SiON, etc. , TiN, AlN, and SiN are preferably made of a material containing one or more selected from the group consisting of TiN, AlN, and SiN.

  As a result, adhesion between the substrate P1 and the coating P3 (adhesion through the base layer P2), particularly adhesion when the coating P3 is made of a metal material, metal oxide, or metal nitride. Can be made particularly excellent. Further, since TiN, AlN, and SiN are materials having a high thickness as described above, it is possible to more effectively prevent adverse effects on the appearance of the watch exterior part P10 as a whole. it can.

  In the configuration shown in the figure, the base layer P2 is formed on the entire surface of the base material P1 on which the coating P3 is provided. However, for example, the base layer P2 is selectively applied only to a portion in contact with the coating P3. It may be formed. In addition, the base layer P2 may be provided only in a part of the portion covered with the coating P3 of the substrate P1.

  In the configuration shown in the figure, one base layer P2 is formed, but two or more base layers may be formed.

  The underlayer P2 may have a uniform composition at each site or may have a different composition. For example, it may be composed of a laminated body in which layers having different compositions in the thickness direction are laminated, or a gradient material whose composition changes in a gradient manner.

  The underlayer P2 can be formed by, for example, a vapor deposition method (dry plating method) such as vacuum deposition, ion plating, sputtering, chemical vapor deposition (CVD), wet plating method, dipping, or the like.

  The underlayer P2 is formed in the same manner as the coating P3, that is, an aerosol in which particles (particles made of the constituent material of the underlayer P2) are dispersed in a gas is directed from the nozzle toward the substrate P1. A method of spraying and forming the base layer P2 by the impact force may be employed. Thereby, the foundation layer P2 can be selectively and efficiently formed at a desired site.

<Film formation process>
Next, a coating P3 is formed on a part of the surface of the base layer P2 (1c).
In particular, the film P3 is formed using the film forming apparatus of the present invention as described above.

  As a result, it is possible to provide a watch exterior part P10 that is excellent in aesthetic appearance, has little waste of materials during manufacture, and has a low environmental impact. That is, particles P31 (including those that have undergone a chemical reaction and a composition change) can be deposited in a desired amount at a desired site, and the formed film P3 has a desired shape and pattern. In addition, since it is possible to selectively form a film at a target site, waste of materials can be suppressed. Further, pre-processing such as mask formation and post-processing such as removal of unnecessary film forming portions can be omitted or simplified. In addition, the coating P3 made of a material having an excellent texture can be formed.

  Further, in such a method, since it is not necessary to use a volatile solvent or the like, a problem caused by volatilization of a volatile component (volatile organic compound) in a state where the watch exterior part P10 is incorporated in the watch (movement) Occurrence of trouble, occurrence of trouble, fogging of cover glass, etc.) can be effectively prevented.

  Examples of the constituent material of the particles P31 include various metals, various metal oxides, various metal nitrides, various metal carbides, various metal borides, various metal sulfides, various carbon materials, various pigments, various resin materials, and the like. It is done.

  Examples of the metal material constituting the particle P31 include Au, Pt, Pd, Ni, Ag, Al, Cu, Ti, Cr, and an alloy containing at least one of these, but includes Au. Is preferred.

  Examples of the metal oxide constituting the particle P31 include aluminum oxide, titanium oxide, chromium oxide, and silicon oxide.

  Examples of the metal nitride constituting the particle P31 include titanium nitride, chromium nitride, zirconium nitride, hafnium nitride, tantalum nitride, and silicon nitride.

  Examples of the metal carbide constituting the particle P31 include titanium carbide, chromium carbide, zirconia carbide, aluminum carbide, calcium carbide, tungsten carbide, hafnium carbide, vanadium carbide, tantalum carbide, niobium carbide, silicon carbide, and the like.

  Examples of the metal boride constituting the particle P31 include zirconium boride and molybdenum boride.

  Examples of the metal sulfide constituting the particle P31 include zinc sulfide, chromium sulfide, cadmium sulfide and the like.

  Examples of the carbon material constituting the particle P31 include graphite, graphene, diamond, carbon nanotube, and fullerene.

  Examples of the pigment constituting the particle P31 include the following.

  That is, examples of the black pigment include carbon black such as furnace black, channel black, acetylene black, and thermal black, copper oxide, manganese dioxide, titanium oxide, aniline black, activated carbon, nonmagnetic ferrite, and magnetite.

  Examples of the yellow pigment include yellow lead, zinc yellow, yellow iron oxide, cadmium yellow, chrome yellow, Hansa yellow, Hansa yellow 10G, benzidine yellow G, benzidine yellow GR, selenium yellow, quinoline yellow, and permanent yellow. NCG etc. are mentioned.

  Examples of the orange pigment include red chrome yellow, molybdenum orange, permanent orange GTR, pyrazolone orange, vulcan orange, benzidine orange G, indanthrene brilliant orange RK, and indanthrene brilliant orange GK.

  Red pigments include Bengala, cadmium red, red lead, mercury sulfide, watch young red, permanent red 4R, risor red, brilliantamine 3B, brilliantamine 6B, dapon oil red, pyrazolone red, rhodamine B rake, lake red C , Rose bengal, oxin red, alizarin lake and the like.

  Examples of the blue pigment include, for example, bitumen, cobalt blue, alkali blue lake, Victoria blue lake, fast sky blue, indanthrene blue BC, aniline blue, ultramarine blue, calco oil blue, methylene blue chloride, phthalocyanine blue, and phthalocyanine green. And malachite green oxalelate.

  Examples of purple pigments include manganese purple, fast violet B, and methyl violet lake.

Examples of the green pigment include chromium oxide, chromium green, pigment green, malachite green lake, final yellow green G, and the like.
Examples of white pigments include zinc white, titanium oxide, antimony white, and zinc sulfide.

  Examples of extender pigments include barite powder, barium carbonate, clay, silica, white carbon, talc, and alumina white.

  Examples of the resin material include (meth) acrylic resins, polystyrene resins, styrene- (meth) acrylic resins, rosin-modified resins, terpene resins, polyester resins, polyamide resins, epoxy resins, vinyl chloride resins, Vinyl chloride-vinyl acetate copolymer, fiber-based resin (eg, cellulose acetate butyrate, hydroxypropyl cellulose, etc.), polyvinyl butyral, polyvinyl alcohol (PVA), polyvinyl pyrrolidone (PVP), polyurethane resin, urea resin, etc. Is mentioned.

A plurality of different types of particles may be used as the particles P31.
The average particle size of the particles P31 is preferably 10 nm or more and 150 μm or less, and more preferably 100 nm or more and 100 μm or less.

  Thereby, the aesthetic appearance of the timepiece exterior component P10 can be made particularly excellent. Further, the adhesion between the base material P1 and the coating P3 (adhesion through the base layer P2) can be made particularly excellent, and the durability of the watch exterior part P10 can be made particularly excellent. it can. Further, the formation efficiency of the coating P3 is particularly excellent, and the productivity of the watch exterior part P10 can be particularly excellent.

  In the present specification, “average particle diameter” refers to an average particle diameter based on mass. This average particle diameter can be obtained, for example, by measuring the mobility of the aerosol and determining the aerodynamic diameter. For the measurement of the particle diameter, for example, a differential electrostatic classifier manufactured by TSI can be used. In addition, you may obtain | require an average particle diameter from the measurement result of a scanning electron microscope or a transmission electron microscope.

  Moreover, in this process, while supplying the aerosol containing particle | grains P31, gas is supplied from a different nozzle (2nd nozzle). Thereby, as described above, the composition of the constituent material of the coating P3 is suitably controlled, and the adhesion between the substrate P1 and the coating P3 (adhesion through the underlayer P2) is particularly excellent. Etc.

The processing conditions in this step may be constant or may change over time.
For example, the incident angle of the particles P31 and the spray pressure of the aerosol containing the particles P31 may be changed over time. Thereby, the shape of the film P3 to be formed can be suitably adjusted.

  The coating P3 is preferably provided selectively on a part of the observable part in the state where the watch exterior part P10 is incorporated in the watch.

  As a result, due to the effect that the coating P3 itself has a specific pattern and the effect of the combination of the portion where the coating P3 is provided and the portion where the coating P3 is not provided, the watch exterior part P10, the watch The aesthetic appearance can be made particularly excellent.

  Further, conventionally, when the watch exterior part is incorporated in the watch, the material at the time of manufacturing the watch exterior part is provided when the coating is selectively provided on a part of the observable part. However, according to the present invention, it is possible to reliably prevent the occurrence of such a problem. Therefore, when the coating P3 is selectively provided on a part of the portion that can be observed in the state where the watch exterior part P10 is incorporated in the watch, the effect of the present invention is more remarkably exhibited. .

In the state in which the watch exterior part P10 is incorporated in the watch, the area ratio occupied by the part provided with the coating P3 among the observable parts of the watch exterior part P10 (the surface of the watch exterior part P10 is flat) If it is, the area ratio when observed from the normal direction of the surface is not particularly limited, it is preferably 70% or less, more preferably 2% or more and 50% or less.
Thereby, the effects as described above are more remarkably exhibited.

  The average thickness of the coating P3 is preferably 0.01 μm or more and 300 μm or less, more preferably 0.05 μm or more and 160 μm or less, and further preferably 0.10 μm or more and 70 μm or less.

  Thereby, the aesthetic appearance of the timepiece exterior component P10 can be made particularly excellent. Further, the durability of the watch exterior part P10 can be made particularly excellent. Further, the productivity of the watch exterior part P10 can be made particularly excellent.

  The coating P3 formed in this step may have a uniform composition at each site or may have a different composition. For example, the watch exterior part P10 may have a plurality of types of coatings P3 having different textures (for example, different colors) in a predetermined pattern. Thereby, the further improvement of the aesthetic appearance of timepiece exterior component P10 can be aimed at.

<Antireflection film formation process>
In the antireflection film forming step, an antireflection film P4 is formed on the surface side of the substrate P1 on which the coating P3 is provided (1d).

  Thereby, unintentional reflection of external light can be effectively prevented, and the aesthetic appearance of the watch exterior part P10 can be made particularly excellent.

  Further, when the watch exterior part P10 is applied to a cover glass (windshield), the effect of improving the aesthetic appearance as described above can be obtained, and the visibility of the dial can be improved. The overall aesthetic appearance can be made particularly excellent. In addition, the function as a practical product is improved, for example, the distinguishability such as time is improved.

  The antireflection film P4 can be formed by, for example, a vapor deposition method (dry plating method) such as vacuum deposition, ion plating, sputtering, chemical vapor deposition (CVD), wet plating method, dipping or the like.

  The thickness of the antireflection film P4 is not particularly limited, but is preferably 0.2 μm or more and 10 μm or less, and more preferably 0.3 μm or more and 7 μm or less.

  Thereby, the functions as described above can be more effectively exhibited while effectively preventing the watch exterior part P10 from becoming larger and thicker.

  In the illustrated configuration, the antireflection film P4 is formed on the entire surface of the base material P1 on which the coating P3 is provided. For example, the antireflection film P4 is provided with the coating P3 of the base material P1. It may be selectively provided only on a part of the surface on the other side.

  According to the method for manufacturing a timepiece exterior component of the present invention as described above, it is possible to efficiently manufacture a timepiece exterior component excellent in aesthetic appearance by a method with less waste of materials and less burden on the environment. A method for manufacturing a watch exterior part can be provided.

<< Exterior parts for watches >>
Next, the timepiece exterior component of the present invention will be described.

  The timepiece exterior component of the present invention is manufactured using the film forming apparatus of the present invention described above.

  As a result, it is possible to provide an exterior part for a watch that is excellent in aesthetic appearance, has little waste of materials during manufacture, and has a low environmental impact.

  Hereinafter, a specific example when the exterior part for a watch of the present invention is applied to a cover glass (windshield) will be described.

  FIG. 6 is a schematic plan view showing a preferred embodiment when the timepiece exterior component of the present invention is applied to a cover glass.

  As shown in FIG. 6, the watch exterior part P <b> 10 of the present embodiment as the cover glass is selectively provided with a coating P <b> 3 in the vicinity of the outer periphery when viewed in plan.

  The timepiece exterior component is preferably arranged so that the surface on which the coating film of the base material is provided faces inward when it is incorporated in the timepiece. Thereby, unintentional peeling of the film can be prevented more effectively, and the durability of the watch can be made particularly excellent.

  In particular, in the illustrated configuration, the coating is provided in a predetermined pattern (arabesque pattern). As described above, even if the coating film P3 has a complicated pattern, according to the present invention, it is possible to obtain the coating material P3 with a small waste of material at the time of manufacture and a small environmental load.

<< Clock >>
Next, the timepiece of the invention will be described.

The timepiece of the present invention has the timepiece exterior component of the present invention as described above.
Thereby, it is possible to provide a timepiece having an exterior part for a timepiece that is excellent in aesthetic appearance, has little waste of materials at the time of manufacture, and has a low environmental load.

  Further, the watch as a whole can have an excellent aesthetic appearance, can be made with little waste of materials during manufacture, and can have a low environmental impact.

  In addition, the timepiece of the present invention only needs to have the timepiece exterior part of the present invention as at least one timepiece exterior part, and other parts may be known ones, Next, an example of the configuration of the timepiece of the present invention will be described.

FIG. 7 is a cross-sectional view showing a preferred embodiment of the timepiece (watch) of the present invention.
As shown in FIG. 7, a wristwatch (portable watch) P100 of the present embodiment includes a trunk (case) P82, a back cover P83, a bezel (edge) P84, and a glass plate (cover glass) P85. . Further, in the case P82, a timepiece dial plate P7, a solar battery P94, and a movement P81 are housed, and a hand (pointer) (not shown) and the like are housed.

  The glass plate P85 is usually made of highly transparent transparent glass, sapphire, or the like. As a result, the visibility of the timepiece dial P7, hands, etc. can be made sufficiently excellent, and a sufficient amount of light can be made incident on the solar cell P94.

Movement P81 drives the pointer using the electromotive force of solar cell P94.
Although omitted in FIG. 7, in the movement P81, for example, an electric double layer capacitor for storing the electromotive force of the solar battery P94, a lithium ion secondary battery, a crystal oscillator as a time reference source, and a crystal vibration A semiconductor integrated circuit that generates a driving pulse for driving a clock based on the oscillation frequency of the child, a step motor that drives the pointer every second in response to this driving pulse, and a wheel that transmits the movement of the step motor to the pointer A row mechanism is provided.

  The movement P81 includes a radio wave receiving antenna (not shown). And it has the function to perform time adjustment etc. using the received electromagnetic wave.

  The solar cell P94 has a function of converting light energy into electric energy. The electric energy converted by the solar battery P94 is used for driving the movement.

  In the solar cell P94, for example, a p-type impurity and an n-type impurity are selectively introduced into a non-single-crystal silicon thin film, and a p-type non-single-crystal silicon thin film and an n-type non-single-crystal silicon thin film It has a pin structure provided with an i-type non-single-crystal silicon thin film with a low impurity concentration in between.

  A winding stem pipe P86 is fitted and fixed to the trunk P82, and a shaft portion P871 of a crown P87 is rotatably inserted into the winding stem pipe P86.

  The body P82 and the bezel P84 are fixed by a plastic packing P88, and the bezel P84 and the glass plate P85 are fixed by a plastic packing P89.

  Further, a back cover P83 is fitted (or screwed) to the body P82, and a ring-shaped rubber packing (back cover packing) P92 is inserted in a compressed state at the joint (seal part) P93. Has been. With this configuration, the seal portion P93 is sealed in a liquid-tight manner, and a waterproof function is obtained.

  A groove P872 is formed on the outer periphery of the shaft portion P871 of the crown P87, and a ring-shaped rubber packing (crown packing) P91 is fitted in the groove P872. The rubber packing P91 is in close contact with the inner peripheral surface of the winding stem pipe P86 and is compressed between the inner peripheral surface and the inner surface of the groove P872. With this configuration, the space between the crown P87 and the winding stem pipe P86 is sealed in a liquid-tight manner to obtain a waterproof function. When the crown P87 is rotated, the rubber packing P91 rotates together with the shaft portion P871 and slides in the circumferential direction while being in close contact with the inner peripheral surface of the winding stem pipe P86.

  In the above description, a wristwatch (portable clock) as a solar radio timepiece has been described as an example of a clock. Can be applied similarly. Further, the present invention can be applied to any timepiece such as a solar timepiece excluding a solar radio timepiece and a radio timepiece excluding a solar radio timepiece.

  The preferred embodiment of the present invention has been described above, but the present invention is not limited to the above.

  For example, in the film forming apparatus, the watch exterior part, and the watch of the present invention, the configuration of each part can be replaced with any configuration that exhibits the same function, and any configuration can be added. it can.

  In the above-described embodiment, the film forming apparatus has been described with respect to the configuration including one each of the first nozzle and the second nozzle. However, at least one of the first nozzle and the second nozzle is Two or more may be provided.

  In the above-described embodiment, the case where the guide member has a tubular structure has been described as a representative example, but the guide member may have any shape. For example, the guide member may be a plate-like member having a groove that generates a gas flow for guiding particles to the exhaust port.

In the above-described embodiment, the description has been focused on the configuration in which the pressure adjusting exhaust port of the film forming chamber also serves as the exhaust port for discharging the gas in the film forming chamber together with the particles guided by the guide member. The pressure adjusting exhaust port of the film forming chamber and the exhaust port for discharging particles guided by the guide member may be separate.
Further, the film forming apparatus of the present invention may not include the guide member.

  In the above-described embodiment, the case where the watch exterior part includes a base layer and an antireflection film in addition to the base material and the coating has been mainly described. What is necessary is just to be provided with a film, and the thing which is not provided with the base layer and the antireflection film may be sufficient.

  Moreover, in the manufacturing method of the timepiece exterior component of the present invention, a pretreatment process, an intermediate treatment process, and a posttreatment process may be performed as necessary.

  In the above-described embodiment, the case where the watch exterior part is manufactured using the film forming apparatus of the present invention has been mainly described. However, the film forming apparatus of the present invention is used for manufacturing the watch exterior part. It does not have to be.

  In addition, the opening of the connecting pipe of the film forming apparatus faces the z-axis negative direction in the above-described embodiment, but is not limited to this. For example, the x-axis positive direction, the x-axis negative direction, and the y-axis positive direction , May be directed in the negative y-axis direction or positive z-axis direction.

Further, the moving means of the film forming apparatus is configured to move the base material with respect to the nozzle portion of the connecting pipe in the embodiment, but is not limited thereto, for example, the nozzle portion of the connecting pipe is used as the base material. However, it may be configured to move.
Further, the film forming apparatus may be configured such that the stage is rotatable.

  In the above-described embodiment, the film forming apparatus is described as including the crusher. However, a film that does not include the crusher may be used for forming the coating film.

  In the above-described embodiment, the film forming apparatus is described as including a heating mechanism that heats the connecting pipe. However, a film that does not include the heating mechanism may be used for forming the coating film.

P100 …… Watch (portable watch)
P10: Watch exterior parts P1: Base material P2: Underlayer P3: Coating P31: Particles P4: Anti-reflection coating P7: Watch dial P81: Movement P82: Cylinder (case)
P83 …… Back cover P84 …… Bezel (edge)
P85 …… Glass plate (cover glass)
P86 ... Winding pipe P87 ... Crown P871 ... Shaft P872 ... Groove P88 ... Plastic packing P89 ... Plastic packing P91 ... Rubber packing (Crown packing)
P92 …… Rubber packing (back cover packing)
P93 …… Joint part (seal part)
P94 …… Solar cell 1 …… Deposition device 2 …… Connecting tube 21 …… Second opening (the other end opening)
22 …… Inner lumen 24 …… Nozzle (first nozzle)
25 …… First opening (one-end opening)
3. Gas supply means 31 ... Tank 32 ... Connecting pipe 33 ... Solenoid valve 4 ... Crusher 41 ... Container 42 ... Aerosol inlet 43 ... Crusher 44 ... Aerosol outlet 45 ... ... Brush 46a ... Gas inlet 46b ... Gas inlet 47 ... Ultrasonic vibration device 5 ... Pressure adjusting means 51 ... Pump 52 ... Connecting pipe 521 ... Exhaust port 53 ... Solenoid valve 6 ... Movement Means 61 …… Stage (table)
62x …… x-axis motor 62y …… y-axis motor 62z …… z-axis motor 63x …… x-axis motor driver 63y …… y-axis motor driver 63z …… z-axis motor driver 7 …… control unit 71 …… memory unit ( recoding media)
8 …… Connecting tube 15 …… Aerosol generator 16 …… Deposition chamber 20 …… Second nozzle 9 …… Guide member 92 …… Motor 93 …… Motor driver 90 …… Heating mechanism G ₂ …… Gas

Claims (13)

An aerosol generator for generating an aerosol in which particles are dispersed in a gas;
A film forming chamber for forming a film on a substrate;
A first nozzle for supplying the aerosol;
And a second nozzle for supplying a gas.   The film forming apparatus according to claim 1, wherein the second nozzle supplies a reactive gas for chemically reacting the constituent material of the particles.   The film forming apparatus according to claim 2, wherein the second nozzle supplies a reducing gas for reducing the particles.   4. The film forming apparatus according to claim 1, wherein the second nozzle supplies a gas that increases energy that contributes to the bonding between the particles. 5.   The angle formed between the supply direction of the aerosol from the first nozzle and the normal line of the surface of the substrate that contacts the particles is 0 ° or more and 45 ° or less. The film forming apparatus according to item.   The film formation apparatus according to claim 1, wherein the aerosol generation unit and the film formation chamber are connected by a connecting pipe having an inner diameter of 1 mm or more and 10 mm or less. The film forming apparatus according to claim 1, wherein a pump capable of exhaust pressure up to 10 ⁻⁵ Pa is connected to the film forming chamber.   The film forming apparatus according to claim 1, wherein the pressure of the aerosol generation unit is controlled to 10 Pa or more and 1 MPa or less and the pressure of the film forming chamber is controlled to 10 KPa or less during film formation. .   The film forming apparatus according to claim 1, wherein the stage on which the base material is installed can be arbitrarily operated in the xy direction with respect to the first nozzle.   A method for manufacturing a watch exterior part, wherein the watch exterior part is manufactured using the film forming apparatus according to claim 1.   An exterior part for a watch, which is manufactured by using the film forming apparatus according to claim 1.   An exterior part for a timepiece manufactured using the method according to claim 10.   A timepiece comprising the timepiece exterior component according to claim 11.

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