JP2015145532A - Mask device, and system and method for manufacturing mask device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a mask plate that can be expanded to an accurate position more precisely while avoiding fine deformation of a mask blanket due to tensile force when expanded into the mask blanket in manufacture of an organic light emitting diode (OLED).SOLUTION: There is provided a mask device for OLED such that: a mask plate 10 comprises a plurality of fixation parts 14 arranged surrounding a mask hole array 11 and four connection parts 12 extended in a cross shape from the plurality of fixation parts 14 in four directions; the mask plate 10 is stretched over a mask blanket by being changed into a grating shape having support ribs so that a plurality of mask plates 14 correspond to respective gratings; and the fixation parts 14 of the mask plate 10 and the support ribs of the mask blanket are welded after the fixation parts 14 are pressed and fixed to abut on the support ribs.

Description

  The present invention relates to a mask used in a process of manufacturing a display, and more particularly, to a plate metal mask device having a small OLED, a system and a method for manufacturing the mask device.

  OLED (Organic Light-Emitting Diode) belongs to a new type of display device and utilizes technology that can emit light spontaneously by applying a voltage. This is a major research theme and is currently attracting much attention in display technology worldwide. This is a strong competitor to LCDs and is well known as a new generation of display technology that has the greatest potential to replace LCDs in the display industry. Since the materials used in OLED devices may be organic small molecules or polymer polymers, the range of selection is wide, and various needs can be satisfied by designing, combining and cutting organic molecular structures. In addition to the display of any of the above colors, a large area display can be easily realized. Organic light-emitting display has high brightness, high efficiency, wide viewing angle, low drive voltage, low power consumption, fast response speed, no afterimage, low production cost, simple production technology, good resolution and flexibility Because it has the advantage of being able to be created as a device and is recognized as a new application technology for next-generation flat display, many manufacturers around the world are currently conducting research and development and are called “future display stars” Has been.

  In the initial OLED manufacturing process, the size of the substrate is small, so the tensioning method is to stretch one mask, and this method completely stretches all the mask hole arrays at the necessary positions. Can not do it. As the size of the substrate increases, the color mixing rate and the metal plate material are limited, and this method cannot be used. Naturally, as a disadvantage of such a small-generation OLED metal mask stretching method, since it is deformed by stress, the method of stretching with a single mask is adopted to effectively control the position of each cell. The mask hole array cannot be completely stretched at a necessary position. If this method is used in the case of a large generation substrate, a maximum tension error will be caused. Moreover, it is not easy to obtain a metal plate material lower than 40 um, which is necessary for manufacturing such a mask.

  Currently, the OLED mask plate stretching technology, which is a large generation of substrate dimensions, has been stretched using the split mask method, but this method cannot fully satisfy the needs for color mixture good rate. In addition, the mask frame is slightly deformed by the tension tension that is too large, and the mask manufacturer needs to correct the mask by adjusting the vapor deposition machine because it is limited to the production accuracy of the entire split single-plate mask by the mask manufacturer. Can not be stretched in position. Disadvantages of the large-generation OLED metal mask stretching method are that the split single plate mask can be stretched more accurately than a single mask. The position of each cell cannot be effectively controlled to completely stretch the mask at the required position. In order to prevent the sag after the split single-plate mask is stretched in advance, a large tension force is usually used, but some deformation is caused after the frame is stretched by the tension force that is too large. Similarly, it is not easy to obtain a metal plate material lower than 40 um, which is necessary for manufacturing such a mask.

  In response to the deficiencies of the prior art, the present invention provides a mask apparatus, a system and method for manufacturing the mask apparatus, overcomes the difficulties of the prior art, and simultaneously improves the mask plate and mask bracket, By changing the conventional mask bracket design from a large aperture type to a grid shape with support ribs in the middle, multiple mask plates correspond to each grid aperture and are stretched individually. Fine deformation can be avoided, and the mask plate can be accurately stretched by an accurate position.

  According to one aspect of the present invention, it includes a mask bracket and a plurality of mask plates provided on one side of the mask bracket, the mask bracket includes a plurality of support ribs, and is formed in a matrix between the plurality of support ribs. A plurality of arranged grid apertures are formed, and each mask plate is extended from the mask hole array and the mask hole array, and is connected to the support ribs of the mask bracket. And a mask device in which a mask hole array of one mask plate corresponds to one lattice opening in the mask bracket.

  Each of the mask plates extends outward from the plurality of fixing portions, and is sandwiched between a plurality of tensioning device clamping tools, and a plurality of connecting portions for stretching the mask plates are provided. Furthermore, it is preferable to include.

  Preferably, the plurality of fixing portions are arranged so as to surround the mask hole array, and are extended in a cross shape in four directions from the plurality of fixing portions surrounding the four connecting portions. .

  In addition, it is preferable that at least one wrinkle-preventing notch that is recessed inward is provided at an outer end of the connecting portion.

Moreover, it is preferable that the said wrinkle prevention notch part is circular arc shape.
Moreover, it is preferable that the range of the length of the said mask board is 100 mm-500 mm, and the range of the width is 100 mm-500 mm.

  Further, it is preferable that two adjacent mask plates are respectively connected to both sides of the same support rib in the mask bracket.

According to another aspect of the present invention, there is also provided a system for manufacturing the above mask apparatus,
A plurality of protrusions extending from the plurality of fixing portions so that the mask hole array is aligned with the lattice apertures of the mask bracket and the mask plate approaches the mask bracket but does not come into contact when the mask plate is stretched. A plurality of tensioning device clamping devices for clamping the connecting portion of
A pressing device for pressing the mask hole array of the mask plate correspondingly to the lattice holes of the mask bracket so that the fixed portion of the mask plate is in contact with the support rib of the mask bracket;
A welding device for welding the fixing portion and the support rib;
And a cutting device for cutting off the connecting portion after welding is completed.

Moreover, it is preferable that the said welding apparatus is a laser apparatus.
The cutting device is preferably a laser device.

The welding device and the cutting device are preferably the same laser device.
In addition, a first surveying device for measuring the accuracy of the tension position, and / or a second surveying device for measuring the flatness of the lattice opening,
It is preferable that the pressing device adjusts the compression height and angle according to the accuracy of the tension position and / or the flatness of the lattice aperture.

According to yet another aspect of the present invention, there is also provided a method for manufacturing the above mask device, the method comprising:
While aligning the mask hole array with the lattice holes of the mask bracket, and using the plurality of tensioning device clamping tools so that the mask plate approaches the mask bracket when the mask plate is stretched, Pinching a plurality of connecting portions extending outward from the plurality of fixing portions;
Pressing the mask hole array of the mask plate correspondingly to the lattice openings of the mask bracket so that the fixed portion of the mask plate is in contact with the support rib of the mask bracket;
Welding the fixed portion and the support rib;
Cutting the connecting portion.

  Moreover, it is preferable that the position of the holding device clamping device does not fluctuate when the mask plate is pressed against the mask bracket.

  Moreover, it is preferable to press the said fixing | fixed part so that the said mask board may be pressed to the said mask bracket with a pressing device.

The method further includes the step of measuring the accuracy of the tension position with the first surveying device and / or the step of measuring the flatness of the lattice opening with the second surveying device,
It is preferable that the pressing device adjusts the compression height and angle according to the accuracy of the tension position and / or the flatness of the lattice aperture.

  Moreover, it is preferable to spot-weld the said fixing | fixed part and the said support rib with a laser apparatus.

  Moreover, it is preferable to cut off the connecting portion with a laser device.

  Compared with the prior art, since the above technique is used, the mask apparatus of the present invention, and the system and method for manufacturing the mask apparatus improve the mask and the mask bracket at the same time, and design the conventional mask bracket. Changing from a large aperture type to a grid with a support rib in the middle, the conventional mask plate is changed to multiple mask plates, and the multiple mask plates correspond to each grid respectively. , Each will be tensioned. As a result, the mask plate can be stretched accurately with an accurate position, accurate measurement for the flatness of each lattice opening and adjustment of the compression height can be performed more conveniently, and the mask alignment can be performed. Improved accuracy. On the other hand, the drooping phenomenon can be overcome without requiring a large tension, and the mask bracket does not cause a fine deformation phenomenon, and is applicable to a large generation substrate having a large size.

Other features, objects and advantages of the present invention will become more apparent upon reading the detailed description of the non-limiting embodiments with reference to the following drawings.
2 shows a partially exploded schematic view of a mask device according to an embodiment of the present invention. 1 shows a plan view of a mask plate according to an embodiment of the present invention. FIG. 1 shows a structural diagram of a system for manufacturing a mask apparatus according to an embodiment of the present invention. FIG. 2 shows a flowchart of a method for manufacturing a mask device according to an embodiment of the present invention. 1 shows a schematic view of a mask plate according to an embodiment of the present invention held between tensioning devices. 1 shows a schematic diagram for measuring the height of a tension position in a method for manufacturing a mask device according to an embodiment of the present invention. FIG. 4 shows a schematic view of pressing a middle part of a mask plate with a mask bracket in a method for manufacturing a mask device according to an embodiment of the present invention. 2 shows a schematic view of spot welding a fixing portion around a mask hole array and a support rib of a mask bracket in a method for manufacturing a mask device according to an embodiment of the present invention. Fig. 3 shows a schematic diagram for cutting off a connecting part in a method for manufacturing a mask device according to an embodiment of the present invention; 1 shows a plan view of a mask device according to an embodiment of the present invention. FIG. 1 is a partial cross-sectional view of a mask device according to an embodiment of the present invention.

  Embodiments of a mask apparatus and a system and method for manufacturing the mask apparatus of the present invention will be described below with reference to the drawings. It should be noted that the following description of the examples is for explaining the spirit of the present invention in detail, and is not intended to limit the present invention directly. At the same time, in the following embodiments and drawings, all parts not directly related to the present invention are omitted because they are omitted. In addition, the dimensional relationship and the number of parts in the drawings are only for easy understanding, and are not intended to limit the actual ratio, actual size, and actual quantity.

  FIG. 1 shows a partially exploded schematic view of a mask apparatus according to an embodiment of the present invention. As shown in FIG. 1, the mask apparatus of the present invention includes a mask bracket 40 and a plurality of mask plates 10 provided on one side of the mask bracket 40. The mask bracket 40 includes a plurality of support ribs 42, and includes a plurality of support ribs 42. A plurality of lattice openings 41 arranged in a matrix are formed between the support ribs 42, and one mask plate 10 is mounted correspondingly for each lattice opening 41. For clarity, only one mask plate 10 is shown in FIG. 1, but this is not a limitation. Depending on the technology needs, a mask plate 10 with a different mask hole array can be attached to each lattice opening 41.

  FIG. 2 shows a plan view of a mask plate according to an embodiment of the present invention. As shown in FIG. 2, each mask plate 10 includes a mask hole array 11 and a plurality of fixing portions 14 extending outward from the mask hole array 11. The overall shape of the mask hole array 11 may be rectangular, but is not limited thereto. The fixing portion 14 is used to connect to the support rib 42 of the mask bracket 40, and the mask hole array 11 of one mask plate 10 corresponds to one lattice opening 41 in the mask bracket 40 (see FIG. 1). ). Each mask plate 10 further includes a plurality of connecting portions 12 extending outward from the plurality of fixing portions 14, and the connecting portions 12 are sandwiched by a plurality of tensioning device holding tools 20, and the mask plate 10. Used to stretch. In the present embodiment, the plurality of fixing portions 14 are provided so as to surround the mask hole array 11. However, the present invention is not limited to this, and the plurality of fixing portions 14 may be separated from each other. . A “round” -shaped area from the dotted frame to the mask hole array 11 in FIG. 2 is constituted by four fixing portions 14 surrounding the mask hole array 11. In this embodiment, the four connecting portions 12 are extended from the four fixed portions 14 surrounding the four connecting portions 12 in four directions in a cross shape. The quantity, extending direction, and length of the connecting portion 12 can be determined according to actual needs, and are not limited thereto.

  At least one arc-shaped wrinkle-preventing notch 13 that is recessed inward is provided at the outer end of each connecting portion 12, and the wrinkle-preventing notched portion 13 is formed after the connecting portion 12 around the mask plate 10 is stretched. It is possible to effectively prevent the plate 10 from being wrinkled, and to prevent the wrinkle from being hindered from being stretched.

  The range of the length of the mask plate 10 is 100 mm to 500 mm, and the range of the width is 100 mm to 500 mm, which is smaller than the size of a normal mask.

  FIG. 3 shows a structural diagram of a system for manufacturing a mask apparatus according to an embodiment of the present invention. As shown in FIG. 3, the system for manufacturing the mask device of the present invention includes a plurality of holding device clamping devices 20, a pressing device 30, a first surveying device 50, and a second surveying device (not shown). And a laser device 60. The tensioning device sandwiching tool 20 aligns the mask hole array 11 with the lattice openings 41 of the mask bracket 40, and closes the mask plate 40 when the mask plate 10 is stretched. Each of the plurality of connecting portions 12 extending outward from the portion 14 is sandwiched. The pressing device 30 correspondingly presses the mask hole array 11 of the mask plate 10 to the lattice holes 41 of the mask bracket 40 so that the fixing portion 14 of the mask plate 10 is pressed against the support rib 42 of the mask bracket 40. In the present embodiment, the laser device 60 is used for welding the fixing portion 14 and the support rib 42, but is also used for cutting the connecting portion 12 after the welding is completed. That is, the laser device 60 is a welding device and a cutting device. During this period, the first surveying device 50 is used to measure the accuracy of the stretched position, the second surveying device is used to measure the flatness of the lattice openings, and the pressing device 30 is used to measure the stretched position. The height and angle of the compression are adjusted according to the accuracy and / or the flatness of the lattice openings.

  FIG. 4 shows a flowchart of a method for manufacturing a mask device according to an embodiment of the present invention. As shown in FIG. 4, the method for manufacturing the mask apparatus of the present invention employs the above manufacturing apparatus and includes the following steps.

  Step S101: Align the mask hole array with the lattice openings of the mask bracket and use a plurality of tensioning device clamping tools so that the mask plate approaches the mask bracket but does not come into contact when the mask plate is stretched. A plurality of connecting portions 12 extending outward from the fixing portion 14 are sandwiched.

  Step S102: The mask hole array of the mask plate is pressed correspondingly to the lattice holes of the mask bracket so that the fixed portion of the mask plate is brought into contact with the support rib of the mask bracket.

Step S103: welding the fixing portion and the support rib.
Step S104: Cut the connecting part.

  FIG. 5 shows a schematic view in which a mask plate according to an embodiment of the present invention is sandwiched between tensioning devices. FIG. 6 shows a schematic diagram for measuring the height of the tension position in the method for manufacturing a mask device according to an embodiment of the present invention. Hereinafter, step S101 of FIG. 4 will be further described with reference to FIGS.

  As shown in FIG. 5, in the process of holding the mask plate in step S101, all the connecting portions 12 around the mask hole array 11 in the mask plate 10 are respectively extended by the plurality of extension device holding tools 20. The entire mask plate 10 is pulled and approaches the mask bracket, but does not come into contact. In the azimuth shown in FIG. 6 in the present embodiment, “approaching the mask bracket but not contacting” means that the mask plate 10 is located at a certain height above the mask bracket 40, and the height is as follows: The height H of the tensioning position referred to in FIG.

  As shown in FIG. 6, in step S <b> 101, the height H of the extension position is measured with a height measurement laser device (not shown), and the flatness of each lattice opening 41 is measured. For example, a CCD is used for positioning. The CCD first measures the position of the alignment hole in the support rib 42, calculates the position of the center point, and then measures the (x, y) coordinates of the mask opening position when it is stretched. The center point is compared with the position of the set value so as to ensure that the mask hole array 11 in the plate 10 is positioned above the lattice aperture 41 of the mask bracket 40 and is accurately aligned (however, Not exclusively.).

  FIG. 7 is a schematic view for pressurizing the middle part of the mask plate to the mask bracket in the method for manufacturing the mask device according to the embodiment of the present invention. In step S102 in FIG. 4, as shown in FIG. 7, the fixing unit 14 around the mask plate 10 is pressed by the pressing device 30 so that the fixing unit 14 and the support rib 42 of the mask bracket 40 are pressed against each other. The mask plate 10 is pressed against the mask bracket 40. The pressing device 30 adjusts the compression height and angle according to the flatness of each lattice opening 41.

  The pressing device 30 does not make contact with the mask hole array 11 in the process of pressing, and the mask hole array 11 is not damaged or deformed by pressure. In the process of press-fitting the mask plate 10 to the mask bracket 40, the mask plate 10 maintains the tensioned state, and the position of the tensioning device clamping tool 20 does not vary.

  FIG. 8 shows a schematic view of spot welding a fixing portion around a mask hole array and a support rib of a mask bracket in a method for manufacturing a mask device according to an embodiment of the present invention. In step S103 in FIG. 4, as shown in FIG. 8, the laser device 60 laser welds the fixing portion 14 around the mask hole array 11 and the support rib 42 of the mask bracket 40. The laser welding points 61 are arranged within the range of the fixed part 14. At this time, the position of the tension device 20 is higher than the spot welding position of the mask plate 10.

  FIG. 9 is a schematic diagram for cutting off a connecting portion in a method for manufacturing a mask apparatus according to an embodiment of the present invention. In FIG.4 S104, the connection part 12 is cut off with the laser apparatus 60 so that FIG. 9 may be referred. The laser cutting line is preferably located between the laser welding point 61 and the pressing device 30, but is not limited thereto.

  FIG. 10 is a plan view of a mask apparatus according to an embodiment of the present invention. Using the method for manufacturing such a mask device, the mask plate 10 is stretched in each lattice opening 41 of the mask bracket 40, and finally the state shown in FIG. 10 is obtained. The mask plate 10 is disposed in all the lattice openings 41 of the mask bracket 40, and a mask device that can be used for vapor deposition is obtained.

  FIG. 11 is a partial cross-sectional view of a mask device according to an embodiment of the present invention. As shown in FIG. 11, at this time, two adjacent mask plates 10 are spot welded to both sides of the same support rib 42 in the mask bracket 40, and two rows of laser welding points 61 remain on the support rib 42. It was done.

  As described above, the mask apparatus of the present invention, the system and method for manufacturing the mask apparatus, improve the mask and the mask bracket at the same time, and change the design of the conventional mask bracket from the large opening type to the intermediate support rib. The conventional mask plate is changed to a plurality of mask plates, and the plurality of mask plates correspond to the respective lattices and are stretched. As a result, the mask plate can be stretched accurately with an accurate position, accurate measurement for the flatness of each lattice opening and adjustment of the compression height can be performed more conveniently, and the mask alignment can be performed. Improved accuracy. On the other hand, the drooping phenomenon can be overcome without requiring a large tension, and the mask bracket does not cause a fine deformation phenomenon, and is applicable to a large generation substrate having a large size.

  The foregoing has been described with reference to specific embodiments of the invention. It should be understood that the present invention is not limited to the above-described specific embodiments, and that those skilled in the art can make various changes or modifications within the scope of the claims and do not affect the substantial contents of the present invention. .

DESCRIPTION OF SYMBOLS 10 Mask board 11 Mask hole array 12 Connection part 13 Wrinkle prevention notch part 14 Fixing part 20 Tensioning device 30 Pressing device 40 Mask bracket 41 Lattice opening 42 Support rib 50 Surveying device 60 Laser device 61 Laser welding point

Claims (5)

Including a mask bracket (40) and a plurality of mask plates (10) provided on one side of the mask bracket (40);
The mask bracket (40) includes a plurality of support ribs (42), and a plurality of lattice openings (41) arranged in a matrix are formed between the plurality of support ribs (42).
Each mask plate (10) extends outward from the mask hole array (11) and the mask hole array (11), and is connected to the support rib (42) of the mask bracket (40). A plurality of fixing portions (14), and the plurality of fixing portions (14) extending outward from the plurality of fixing portions (14). A mask hole array (11) of one mask plate (10) and one lattice opening (41) in the mask bracket (40). Correspondingly,
The plurality of fixing parts (14) are arranged so as to surround the mask hole array (11), and the four fixing parts (14) surrounded by the four connecting parts (12) are arranged in four directions. A mask device characterized by being extended in a cross shape.   The mask device according to claim 1, wherein at least one wrinkle-preventing notch (13) is provided at an outer end of the connecting portion (12).   2. The mask apparatus according to claim 1, wherein two adjacent mask plates are respectively connected to both sides of the same support rib in the mask bracket. A system for manufacturing the mask device according to claim 1,
The mask hole array (11) is aligned with the lattice openings (41) of the mask bracket (40), and approaches the mask bracket (40) but does not come into contact when the mask plate (10) is stretched. A plurality of tensioning device clamping devices (20) for clamping the plurality of connecting portions (12) extending outward from the plurality of fixing portions (14);
The mask hole array (11) of the mask plate (10) is moved to the mask bracket (40) so that the fixing portion (14) of the mask plate (10) contacts the support rib (42) of the mask bracket (40). ) Pressing device (30) for correspondingly pressing the lattice openings (41);
A welding apparatus for welding the fixing portion (14) and the support rib (42);
A cutting device for cutting off the connecting part (12) after welding is completed;
A first surveying device (50) for measuring the accuracy of the tension position and / or a second surveying device for measuring the flatness of the lattice openings,
The pressure device (30) adjusts the compression height and angle according to the accuracy of the tension position and / or the flatness of the lattice aperture. A method for manufacturing the mask device according to claim 1, comprising:
While aligning the mask hole array with the lattice holes of the mask bracket, and using the plurality of tensioning device clamping tools so that the mask plate approaches the mask bracket when the mask plate is stretched, Pinching a plurality of connecting portions extending outward from the plurality of fixing portions;
Pressing the mask hole array of the mask plate correspondingly to the lattice openings of the mask bracket so that the fixed portion of the mask plate is in contact with the support rib of the mask bracket;
Welding the fixed portion and the support rib;
Cutting the connecting portion;
Measuring the accuracy of the tension position with the first surveying device, and / or measuring the flatness of the lattice aperture with the second surveying device,
When pressing the mask plate against the mask bracket, the position of the clamping device for tensioning device does not vary,
Pressing the fixed part so as to press the mask plate against the mask bracket with a pressing device,
A method in which the pressing device adjusts the compression height and angle according to the accuracy of the tension position and / or the flatness of the lattice holes.

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