JP2015145016A - Punching and manufacturing method of mesh plate - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a barrier membrane being an ultrathin mesh plate which can be mass produced at a low cost by preventing the ultrathin plate from biting into arrows due to simultaneous punching of plural micropores.SOLUTION: A punching and manufacturing method of a mesh plate used for the regeneration treatment with a barrier membrane comprises the steps of: positioning to a die 9 an ultrathin plate 8 being a workpiece which is manufactured by a press machine 1 having a punch 6 with at least plural arrows 7 and the die 9; lowering the punch 6; applying ultrasonic vibration 5a to at least one of the punch 6 and the die 9 with an ultrasonic oscillation mechanism 10; simultaneously punching plural holes 8a to the ultrathin plate 8 by bringing the plural arrows 7 into contact with the ultrathin plate 8 and pressing the plural arrows 7 against the ultrathin plate 8; and making the prulal arrows 7 pass through the ultrathin plate 8, and simultaneously punches the plural holes 8a while applying the ultrasonic vibration 5a to at least one of the punch 6 and the die 9.

Description

  The present invention relates to a method for manufacturing a mesh plate, and more particularly to a method for manufacturing a plurality of fine holes in a very thin mesh plate.

  In recent years, the development of regenerative medicine technology in medical associations has been remarkable. That is, a mesh plate is prepared, and research on the reconstruction of the jaw bone, the reconstruction of the orbital floor, or the regenerative treatment in dentistry is performed using this mesh plate, and there are some that have been put into practical use.

  Among them, as one of hard tissue regeneration treatment in dentistry, development of a periodontal disease treatment technique capable of regenerating periodontal tissue destroyed by periodontal disease is progressing. Periodontal disease is a disease that destroys the alveolar bone that supports the teeth. It is said to be the biggest cause of tooth loss in Japanese and is said to affect 80% of adults. It is also a trigger for dementia as a secondary disease that has lost teeth due to periodontal disease.

  As a treatment for such periodontal diseases, a tissue regeneration method using an artificial biological membrane (referred to as “barrier membrane”) has been put into practical use. The barrier membrane is a mesh plate in which a plurality of micropores said to be several thousand to several hundred thousand are formed in a thin plate material of about 10 μm. The periodontal disease and barrier membrane will be described below.

  FIG. 5 is a schematic cross-sectional view for explaining periodontal disease. (A) is sectional drawing showing the state which suffered from periodontal disease, (b) is sectional drawing showing the state by which periodontal disease was reproduced | regenerated. Periodontal disease means that the alveolar bone violated by bacteria gradually disappears and a space (cavity) is formed at the gums. Therefore, as a periodontal disease regenerating technique, this alveolar bone is regenerated using a barrier membrane to fill the space. Explaining the above regeneration method, as shown in FIG. 5 (a), when periodontal disease occurs, a portion of the alveolar bone 32 that encloses the tooth 31 is destroyed and lost as shown in the alveolar bone destruction region 34. It is. And if it raises, it will result in the tooth | gear 31 missing.

  Therefore, nutrients are absorbed from the micropores in the barrier membrane 33 by wrapping with a barrier membrane 33 made of an ultrathin mesh plate with micropores so as to cover the alveolar bone destruction region 34, as shown in FIG. 5 (b). As described above, the alveolar bone 32 is regenerated in the alveolar bone regeneration region 35. This is a technique called space making that induces new bone from the remaining bone tissue.

  Conventional barrier membranes have been formed of porous thin plates using polymers, mainly Teflon (registered trademark) materials. In this conventional barrier membrane, a mesh plate having a thickness of t = 200 μm, a hole diameter φ = 100 μm, and a pitch p = 500 to 600 μm was used. However, since the material is a polymer, it swells during use, lacks the biocompatibility required as an artificial biological membrane, and because it is thick, it occupies the tissue and inhibits regeneration, often leading to infection, It was insufficient as a barrier membrane.

  Therefore, in recent years, research for using “pure titanium material” or “titanium alloy material”, which has good biocompatibility, has strength, and can be made into an extremely thin plate material, as a barrier membrane has been advanced. Titanium is a difficult-to-process material, but recent technological advances have made it possible to process it for use as a barrier membrane. In order to use this titanium material as a barrier membrane, the plate thickness is t = 100 μm or less, preferably t = 50 μm or less, the pore diameter is φ = 50 μm or less, preferably φ = 30 μm or less. It is necessary to use a very thin micromesh plate with holes (generally referred to as thousands to hundreds of thousands).

  As this micro-hole drilling technology, there are drilling by laser and drilling by press. Of these, laser processing is thermal processing, so if the counterpart is a pure titanium material, it will become brittle due to thermal denaturation and the physical properties will be devastatingly deteriorated, or the number of holes in the thousands to hundreds of thousands There is a disadvantage that the processing time is enormous. What can be considered is a punching technique using a press. According to the press working, a plurality of micro holes can be removed at the same time, so that the processing time can be greatly shortened.

  Next, a drilling technique using a press will be described. In Patent Document 1, metal, ceramic, plastic, and polymer are used as a plate-like plate, a mesh having a hole diameter of φ = 1 to φ50 μm, a pitch of t = 3 to 300 μm, and a plate thickness of t = 2 to 100 μm. The point of using a plate as a barrier membrane is described. As a method of processing the hole, in FIG. 12 to FIG. 14 of Patent Document 1, a hole is formed in the workpiece W using one punch P and a die D. Paragraph No. [0046] of Patent Document 1 According to the document, when a plurality of holes are formed, it is described that a plurality of through holes can be formed by moving the holding table 105 along the upper surface of the table 103. In other words, a technique for making a plurality of holes by moving a workpiece is disclosed.

  In general, since it is known to simultaneously punch a plurality of holes with a press, the present inventors tried a test for simultaneous punching. FIG. 6 shows a cross-sectional view of a conventional press working apparatus capable of simultaneously punching a plurality of minute holes. The press machine 40 includes an upper die 41, a lower die 42, and a drive source 43. The upper die 41 has a punch holder 44 and a punching arrow 46, and holds a punch 45 attached to the punch holder 44. The lower die 42 has a mesh plate (hereinafter referred to as “ultra-thin plate”) as a workpiece. A die 47 for positioning and holding 48 blanks. An air cylinder or a servo motor is used as the drive source 43.

  The operation will be described. First, the blank of the ultrathin plate 48 is positioned on the die 47, and the punch 45 with the arrow 46 having the number of holes is fixed by the punch holder 44 by the drive source 43 as indicated by the arrow 49. Apply pressure to drill holes. FIG. 7 is a cross-sectional view showing a state during drilling. According to FIG. 7, the arrow 46 provided on the punch 45 fixed to the punch holder 44 penetrates the ultrathin plate 48, and the arrow 46 enters a hole (not shown) of the die 47, so that drilling is performed. As a result, as will be described later with reference to FIG. 3, a large number of micro holes 8a are formed at a constant pitch by simultaneous processing.

JP 2011-142831 A

  As described above, in order to simultaneously remove a plurality of drilling processes, an ultrathin plate was manufactured by the method shown in FIG. 7 using the press machine shown in FIG. However, I faced a big problem here. In other words, as shown in FIG. 7, the hole can be made clean, but after the arrow 46 penetrates the ultrathin plate 48, if the ultrathin plate 48 is removed from the arrow 46, it cannot be removed from the arrow 46. After all, there was no other way but to remove it manually.

  In the case of a general press machine, a stripper is used to remove the arrow from the workpiece. In the case of drilling the ultrathin plate 48 of the present application, the diameter of the hole 8a (see FIG. 3) is 30 μm. There is no place or space to install the stripper because it is very small and the pitch spacing is very small and the number of open holes is very large. As a result, even if the stripper is attached around the punch, the thickness of the ultrathin plate 48 is as thin as 50 μm or less, so that the central portion of the ultrathin plate 48 cannot be pulled out from the arrow 46 and the central portion is deformed. As a result, there was a problem that it could not be adopted for mass production because it had to be manually removed with care.

  The reason why the ultrathin plate 48 cannot be removed from the arrow 46 is considered as follows. That is, FIG. 8 is a cross-sectional view for explaining the concept, and the reason will be described with reference to FIG. In the case of drilling by the press machine 40, a constant pressing force 49 is applied to the arrow 46 from above to pull out the hole 8a at once. As shown in FIG. 8, it can be presumed that a tightening force as indicated by an arrow 48a acts toward the periphery of the arrow 46. For this reason, it is considered that the ultrathin plate 48 that is the workpiece is not easily detached from the arrow 46. In addition, when several thousand to several hundreds of thousands of holes 8a are opened as in the present application, the sum of the tightening forces increases, and the ultrathin plate 48 is firmly fixed to the arrow.

  In addition, in Patent Document 1, for use as a barrier membrane, a hole diameter, a plate thickness, a pitch, or the like is described, and a plate-like plate that also discloses a hole processing method is described. . However, since it is a method of making a plurality of holes by moving the workpiece using a single punch, it is possible to provide a stripper around the punch, so this problem may be solved, In the method as disclosed in Patent Document 1, in the case of processing with a large number of holes, the processing time is enormous, so that only a barrier membrane having a very high cost can be obtained and mass production is difficult. doing.

  The present invention has been made in view of the above circumstances, and even if a plurality of micro-holes of several thousand to several hundred thousand are simultaneously punched by pressing, the holes in the ultrathin plate do not bite into the arrow, and are easy It is an object of the present invention to provide an ultra-thin mesh plate as a barrier membrane that can be mass-produced and is low in cost.

  In order to achieve the above object, a method for manufacturing a mesh plate according to the present invention includes a punch for holding at least a plurality of arrows in a method for manufacturing a mesh plate used in a regenerative treatment method using a barrier membrane setting operation. It is manufactured by a press having a die, and includes a step of positioning a plate as a workpiece on the die, a step of lowering the punch, and an ultrasonic oscillation mechanism on at least one of the punch or the die. Applying ultrasonic vibration; contacting and pressing the plurality of arrows with the plate to simultaneously drill a plurality of holes in the plate; and passing the plurality of arrows through the plate. And simultaneously drilling a plurality of holes while applying the ultrasonic vibration to at least one of the punch or the die. And wherein the door.

  Further, the material of the mesh plate is titanium, the mesh plate has a thickness of 1 μm to 100 μm, and the maximum diameter of holes formed in the mesh plate is 1 μm to 30 μm. The pitch is 10 μm or more and 200 μm or less.

  Further, the die is formed of a resin that is soft enough to sink a dregs at the time of drilling.

  Further, the ultrasonic oscillation mechanism has a main body and a horn, and the ultrasonic oscillation mechanism is placed horizontally, and the horizontal vibration of the main body can be converted into longitudinal vibration in the horn in the horizontal position, The ultrasonic oscillation mechanism has a frequency of 20 kHz and an amplitude of 1 to 10 μm, and imparts longitudinal vibration to the punch or the die.

  Further, the punching is performed while moving the punch up and down while applying ultrasonic vibration to the punch.

  The effect of the present invention is that processing is performed while applying ultrasonic vibration when drilling a hole, so that the arrow does not bite into the thin plate, and the thin plate can be easily discharged from the press machine. As a result, mass production became possible, and an inexpensive ultrathin plate barrier membrane could be provided.

It is sectional drawing which shows the process process by 1st Embodiment of this invention, and shows the relationship between an ultra-thin plate and an arrow, (a) Process shows the state before an arrow contacts a thin plate, ( Step b) shows the state where the arrow is in contact with the ultrathin plate, step (c) shows the state where the drilling process has progressed, and step (d) shows the state where the through hole is formed in the ultrathin plate. The schematic sectional drawing of the press machine when drilling to an ultra-thin plate is shown. It is a top view which shows the completed ultra-thin plate, (a) is a top view of an ultra-thin plate, (b) is AA sectional drawing of (a). It is sectional drawing which shows the manufacturing process by 2nd Embodiment of this invention, and performs punching which moves a punch up and down, providing an ultrasonic vibration to a punch, (a) As for the process, an arrow is very thin The state immediately before contacting the plate, (b) the state in which drilling is started while applying pressing force and ultrasonic vibration, (c) the state in which the punch is once lifted, and (d) the process is again A state in which drilling is further performed while applying a pressing force and ultrasonic vibration, (e) a state in which the punch is raised again, and (f) a state in which a through hole is formed in the ultrathin plate. Show. It is a schematic sectional drawing for demonstrating periodontal disease, (a) is sectional drawing showing the state which suffered from periodontal disease, (b) is sectional drawing showing the state by which periodontal disease was reproduced | regenerated. Sectional drawing of the conventional press work apparatus which can carry out the simultaneous punching of several micro holes is shown. It is sectional drawing which shows the state at the time of drilling. It is sectional drawing for demonstrating notionally why an ultra-thin plate cannot be removed from an arrow.

  The present invention provides a process for drilling a plurality of holes at the same time while applying longitudinal ultrasonic vibration to an arrow or a die from the moment when the arrow contacts at least the ultrathin plate until the arrow finishes penetrating the ultrathin plate. To be processed.

(First embodiment)
FIG. 1 is a cross-sectional view showing a processing step according to the first embodiment of the present invention, showing a relationship between an ultrathin plate and an arrow, and FIG. 2 is an outline of a press machine when drilling in the ultrathin plate. A cross-sectional view is shown. 3A and 3B show the completed ultrathin plate. FIG. 3A is a plan view, FIG. 3B is a cross-sectional view, and only a part of the holes is shown.

  First, the press machine will be briefly described with reference to FIG. Reference numeral 1 denotes a press machine, which includes an upper die 2, a lower die 3, a driving device 4, and a control unit 13. The upper die 2 has a punch holder 5 and a punch 6 having a plurality of arrows 7 held by the punch holder 5, and the lower die 3 has a flat plate die 9. And on the die | dye 9, the ultra-thin plate 8 as a to-be-processed member is positioned and mounted. In this embodiment, the driving device 4 is a device that applies a pressing force in the direction of the arrow 4b to the punch holder 5 by the pressing portion 4a using a servo motor. Moreover, the control part 13 drives the below-mentioned ultrasonic oscillation mechanism 10 when the arrow 7 descend | falls to a fixed position.

  The press machine 1 is further provided with an ultrasonic oscillation mechanism 10 including a main body 11 and a horn 12. Since the ultrasonic oscillation mechanism 10 is a horizontal type in the present application, the main body 11 is a device having a vibration form in which a horizontal vibration 11a is generated and a horn 12 is converted into a vertical vibration 12a. In this way, there is an advantage that the apparatus can be miniaturized by using the ultrasonic oscillation mechanism 10 having the horizontal type configuration. In this embodiment, this ultrasonic oscillation mechanism 10 is connected to the punch 6.

  The operation of the press machine 1 will be described. A punch 6 having an arrow 7 attached to a punch holder 5 is held on the upper die 2, and an ultrathin plate 8 of a workpiece is placed on the die 9 and positioned on the lower die 3. Then, the longitudinal vibration 11 a of the main body 11 of the ultrasonic oscillation mechanism 10 is converted into the longitudinal vibration 12 a of the horn 12 and applied, thereby causing the punch holder 5 to generate the longitudinal vibration 5 b and inducing the longitudinal vibration in the punch 6. In this induced state, a punching process is performed on the ultrathin plate 8 with an arrow 7 while applying a pressing force 4 b to the punch 6 by the pressing portion 4 a of the driving device 4.

  In this embodiment, the ultrasonic vibration at this time has a frequency of 20 kHz and an amplitude of 6 μm. Moreover, although the arrow 7 has the number which can make several thousand to several hundred thousand holes, it shall have 200,000 arrows in a present Example. As an arrow, use a plate that has been ground in the vertical and horizontal directions using a grindstone to form protrusions of a predetermined size as many as the number of holes (hereinafter referred to as “Kenyama punch”). Yes.

  FIG. 3 shows an ultrathin plate 8 used in the present embodiment. 3A is a plan view of the ultrathin plate 8, and FIG. 3B is a cross-sectional view taken along the line AA in FIG. As shown in FIG. 3, a plate having a thickness of t = 10 μm is used, and the hole 8a has a diameter of 200,000 holes of φ = 20 μm. The pitch between the holes is p = 30 μm. The shape of the hole will be described as a circular shape, but a square shape can also be applied. Since the above-mentioned Kenzan punch can be used when the hole has a square shape, the manufacture is easier. In the case of a square hole, the length of the diagonal line is preferably 20 μm. Furthermore, an oval shape may be used, but in this case, the long side is preferably 20 μm. In short, the shape of the hole is not particularly limited, and basically the maximum dimension of the hole is preferably 20 μm.

  Next, the drilling process of the present invention will be described with reference to FIG. For simplification of the figure, only five arrows are shown.

  In FIG. 1, the step (a) shows a state before the arrow 7 is still in contact with the thin plate 8, and no ultrasonic vibration is applied. However, a constant pressing force 4b is applied to the punch 6 by the driving device 4, and the punch 6 is lowered. Step (b) shows a state in which the punch 6 is lowered by the pressing force 4 b of the driving device 4 and the tip of the arrow 7 is in contact with the ultrathin plate 8. The control unit 13 senses immediately before the arrow 7 contacts the ultrathin plate 8 and the ultrasonic oscillation mechanism 10 is driven. Then, the ultrasonic vibration 5 a in the vertical direction is applied to the punch 6 and the ultrasonic vibration is transmitted to the arrow 7. As described above, the ultrasonic vibration at this time has a vibration frequency of 20 kHz and an amplitude of 6 μm. This starts drilling the ultrathin plate 8 with the arrow 7.

  Step (c) shows a state where the drilling process has progressed to some extent, and a plurality of fine holes 8a are simultaneously formed in the ultrathin plate 8 while performing vertical movement 5a with an amplitude of 6 μm while a pressing force 4b is applied to the arrow 7. It shows the state. Step (d) shows a state where the arrow 7 penetrates the thickness of the ultrathin plate 8 and the through hole 8a is formed in the ultrathin plate 8. As described above, 200,000 holes are simultaneously drilled. Since the die 9 uses a resin plate material, the hole 7 penetrates the die 9 somewhat after the hole 8a has penetrated, so that the punched bite bites into the die 9 and remains in the die 9. The material of the die 9 is optimally thin Teflon (registered trademark), but is not limited thereto.

  Thereafter, when the punch 6 is raised by the driving device 4, the ultrathin plate 8 is easily detached from the arrow 7 and remains on the die 9. Therefore, the work for carrying out the ultrathin plate 8 can be easily performed. As a result, as shown in FIG. 3, it was possible to easily obtain an ultrathin plate 8 in which 200,000 fine holes having a thickness t = 10 μm, a hole diameter φ = 20 μm, and a pitch p = 30 μm were opened.

  By the way, the reason why the ultrathin plate 8 is easily detached from the arrow 7 is considered as follows. Referring to FIG. 10, since ultrasonic vibration is applied to the arrow 7 at the time of drilling, drilling is executed while the drilling speed is slowed and at the same time the ultrasonic amplitude is moved up and down. . For this reason, the deformation resistance given to the ultrathin plate 8 can be greatly reduced. Therefore, as described in the prior art of FIG. 10, the elastic force 48a does not remain around the hole 8a, and the hole 8a is completely plastically deformed. Therefore, it is considered that the arrow 7 can be smoothly extracted from the hole 8a. Therefore, mass production processing has become possible, and it has become possible to obtain an inexpensive barrier membrane.

(Second Embodiment)
A second embodiment of the present invention will be described. FIG. 4 is a sectional view in which the ultrasonic vibration 5a is applied to the punch 6 and the punching process is performed on the ultrathin plate 8 while the punch 6 is moved up and down by the driving device 4 as well. For simplicity, arrows 7 show only three. (A) The process is a state immediately before the arrow 7 contacts the ultrathin plate 8 on the die 9, and at this time, the longitudinal vibration of the ultrasonic vibration 5 a having an amplitude of 6 μm is given to the punch 6 by the control unit 13. . Step (b) is a state in which the drilling of the arrow 7 has started in the ultrathin plate 8 while applying the ultrasonic vibration 5a together with the pressing force 4b. Step (c) shows a state where the punch 6 is once raised while the ultrasonic vibration 5a is applied by the driving device 4. The ultrathin plate 8 has a bottomed hole 8aa.

  Step (d) shows a state in which deeper drilling is performed while applying the pressing force 4b again and applying the ultrasonic vibration 5a. (E) A process shows the state which raised the punch 6 once again. As a result, a bottomed hole 8ab deeper than the bottomed hole 8aa shown in FIG. (F) A process shows the state by which the arrow 7 was penetrated and the through-hole 8a was formed in the ultra-thin plate 8. FIG. That is, in the second embodiment, punching is performed while moving the punch 6 up and down while applying the ultrasonic vibration 5a. Although this process takes somewhat more processing time than the first embodiment, there is an effect that the burden on the arrow 7 can be reduced and the bending of the arrow 7 can be reduced as much as possible. The number of vertical movements of the arrow 7 is appropriately determined.

  As mentioned above, although this invention was demonstrated in 1st Embodiment and 2nd Embodiment, it is not limited to this, A change in a claim can be various. For example, although the explanation has been given by applying the ultrasonic vibration by the ultrasonic oscillation mechanism to the punch, the ultrasonic vibration may be applied to the die. According to this configuration, even when the processing of FIG. 4 is performed, since the ultrasonic vibration is applied not to the punch that moves up and down by the driving device but to the die that does not move up and down, the device is further simplified.

  In addition, although the ultrasonic oscillation mechanism is a horizontal type, there is no problem even if the vertical type is configured to apply vertical vibration to the punch or die. However, the punch is more preferably longitudinal vibration. In addition, we explained that the punch can be processed with a square punch, but the height of the arrow is very small, so if you use a processing method such as etching, you can use a variety of shapes. Can be drilled. However, in the case of etching processing, secondary processing for sharpening the corner of the punch is required.

  Further, the thickness of the ultrathin plate 8 can be changed in the range of t = 1 to 100 μm, but as a preferable range, the thickness of the barrier membrane is preferably t = 1 to 50 μm, more preferably. T = 5 to 30 μm. Moreover, although the hole diameter was described as φ = 20 μm, φ = 10 to 50 μm is a preferable range. Furthermore, although it has been described that 200,000 holes are simultaneously processed, the number of holes may be plural, and may be in the range of several thousand to several hundred thousand. The upper and lower limits of these numerical values are determined by the range that can be used as a barrier membrane.

  In addition, the drilling process has been described with one simultaneous punching, but if a progressive die is used, for example, a method of forming 200,000 pieces by 5 times of 40,000 pieces can be adopted. That is, it is possible to process one ultrathin plate in multiple times. This method simplifies arrow production.

  Although the present invention has been described as an ultrathin plate for regeneration treatment of periodontal disease, that is, a barrier membrane, it can also be used for the treatment of implants, and in addition, reconstruction of reconstruction of the jaw bone and reconstruction of the orbital floor It is very effective when used as a mesh plate for various regenerative treatments, such as for treatment.

DESCRIPTION OF SYMBOLS 1, 40: Press machine 2, 41: Upper mold | type 3, 42: Lower mold | type 4: Drive device 4a: Press 5,44: Punch holder 6, 45: Punch 7, 46: Arrow 8, 48: Ultra-thin plate 8a: Hole 9, 47: Die 10: Ultrasound oscillation mechanism 11: Main body 12: Horn 13: Control unit 31: Teeth 32: Alveolar bone 33: Barrier membrane 34: Alveolar bone destruction area 35: Alveolar bone regeneration area 43: Drive source t : Thickness p: Pitch φ: Hole diameter

Claims (5)

In the manufacturing method of the perforation of the mesh plate used for the regenerative treatment method by the installation operation of the barrier membrane,
It is manufactured by a press machine having a punch and die holding at least a plurality of arrows,
Positioning a plate as a workpiece on the die;
Lowering the punch,
Applying ultrasonic vibration to at least one of the punch or the die by an ultrasonic oscillation mechanism;
Contacting and pressing the plurality of arrows to the plate to simultaneously drill a plurality of holes in the plate;
Passing the plurality of arrows from the plate,
A method of manufacturing a mesh plate, comprising: simultaneously punching a plurality of holes while applying ultrasonic vibration to at least one of the punch or the die.   The mesh plate is made of titanium, and the mesh plate has a thickness of 1 μm or more and 100 μm or less, and the maximum diameter of holes formed in the mesh plate is 1 μm or more and 30 μm or less. It is 10 micrometers or more and 200 micrometers or less, The perforation manufacturing method of the mesh plate of Claim 1 characterized by the above-mentioned.   3. The method for manufacturing a mesh plate according to claim 1, wherein the die is formed of a resin that is soft enough to sink a dregs at the time of drilling. 4.   The ultrasonic oscillating mechanism has a main body and a horn, and the ultrasonic oscillating mechanism is horizontally placed, and is a device capable of converting the horizontal vibration of the main body into longitudinal vibration in the horn in a horizontally placed state. The sound wave oscillation mechanism has a vibration frequency of 20 kHz and an amplitude of 1 to 10 µm, and applies longitudinal vibration to the punch or the die. A method for producing a perforated mesh plate according to claim 1. 5. The method of manufacturing a mesh plate according to claim 1, wherein the punching is performed while moving the punch up and down while applying ultrasonic vibration to the punch.

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