JP2015141243A - Laser scanning type microscope - Google Patents

Abstract

PROBLEM TO BE SOLVED: To suppress heat generation of a motor by improving heat radiation efficiency, and prevent a galvanometer from being broken.SOLUTION: A laser scanning type microscope is provided that comprises: a pair of galvanometers 30A and 30B including swing mirrors 33A and 33B capable of swinging around a prescribed swinging axis, and motors 31A and 31B swinging the swing mirrors 33A and 33B around the swinging axis, so that the prescribed swinging axes mutually cross, deflect laser light emitted from a light source by the swing mirror 33A and 33B, and two-dimensionally scan the deflected laser light on a sample; an illumination optical system that irradiates the sample with the laser light deflected by each of the swing mirrors 33A and 33B of the pair of galvanometers 30A and 30B; and a heat radiation mechanism 40 that is connected to both motors 31A and 31B, and can diffuse heat of the motors 31A and 31B.

Description

  The present invention relates to a laser scanning microscope.

  2. Description of the Related Art Conventionally, there is known a laser scanning microscope that prevents a motor from generating heat and damaging a galvanometer when a laser beam is scanned at a high speed by a pair of galvanometers having a galvanometer mirror and a motor that drives the galvanometer ( For example, see Patent Document 1.) In the laser scanning microscope described in Patent Document 1, a separate heat radiating member is connected to each motor, and heat is radiated by the heat radiating member when the motor generates heat by high-speed driving.

Japanese Patent No. 4905139

  However, normally, when scanning laser light at high speed in a laser scanning microscope, only one of the galvanometers is driven at high speed. In the case of rotation scanning in which the specimen is rotated on the screen by changing the scanning direction of the laser light, it is desirable that both motors can dissipate heat because the galvanometer to be driven at high speed is switched. In the scanning microscope, the heat dissipation member connected to the other motor does not contribute to the heat dissipation of one motor driven at a high speed, so that the heat dissipation efficiency is impaired.

  The present invention has been made in view of the above-described circumstances, and it is an object of the present invention to provide a laser scanning microscope that can improve heat dissipation efficiency, suppress heat generation of a motor, and prevent a galvanometer from being damaged. It is said.

In order to achieve the above object, the present invention provides the following means.
The present invention includes a peristaltic mirror that can be swung about a predetermined peristaltic axis, and a drive unit that perturbs the peristaltic mirror about the peristaltic axis, and is arranged so that the predetermined peristaltic axes intersect each other, A pair of scanning units for deflecting the laser beam emitted from the perturbation mirror and scanning the sample two-dimensionally, and irradiating the sample with the laser beam deflected by the peristaltic mirrors of the pair of scanning units Provided is a laser scanning microscope including an irradiation optical system and a heat dissipation mechanism that is connected to both of the drive units and can dissipate heat of the drive units.

  According to the present invention, the laser light emitted from the light source is deflected by the peristaltic mirrors of the pair of scanning units and is irradiated on the specimen by the irradiation optical system. Then, each drive unit swings one of the peristaltic mirrors at high speed to scan the laser beam in one direction, and then repeats the operation of swinging the other swinging mirror and switching the laser light to the next scanning line. Thus, the laser beam is scanned two-dimensionally on the specimen. Thereby, the specimen can be observed based on the return light returning from the scanning position of the laser beam in the specimen. Further, even when the drive unit generates heat when the peristaltic mirror is swung at a high speed, the heat can be dissipated by the heat dissipation mechanism to prevent the drive unit from reaching a high temperature.

  In this case, since both the drive units are connected to a common heat dissipation mechanism, the heat dissipation mechanism dissipates heat regardless of which drive unit generates heat. Therefore, there is no waste that there is a heat dissipation mechanism that does not contribute to heat dissipation unlike the conventional laser scanning microscope, and heat dissipation efficiency can be improved. Thereby, even when any of the peristaltic mirrors is perturbed at a high speed, the heat generation of the drive unit can be suppressed with high heat dissipation efficiency, and the scanning unit can be prevented from being damaged.

  In the above invention, the heat dissipation mechanism includes a support member that supports each drive unit, and a heat dissipation member that is fixed to the support member and has a higher thermal conductivity than the support member, and the support member includes It is good also as having a lower thermal expansion coefficient than the said heat radiating member.

  By configuring in this way, even if the drive unit generates heat, a heat radiating member having high thermal conductivity for heat transmitted from the drive unit to the support member while stably supporting the drive unit by suppressing thermal deformation of the support member. Can be actively dissipated. Thereby, the stable scanning of the laser beam by a pair of scanning part and highly efficient heat dissipation can be made compatible.

  In the above invention, the heat dissipation mechanism has a support member that supports each of the drive units, a heat dissipation member having a higher thermal conductivity than the support member, and a heat conductivity higher than that of the support member. It is good also as providing the heat conductive member which connects a member and the said heat radiating member so that heat conduction is possible, and the said supporting member has a thermal expansion coefficient lower than the said heat conductive member.

  With this configuration, even if the drive unit generates heat, heat transfer from the drive unit to the support member is stably conducted while suppressing the thermal deformation of the support member and stably supporting the drive unit. It can be actively conducted and dissipated through the member to the heat dissipating member. Thereby, the stable scanning of the laser beam by a pair of scanning part and highly efficient heat dissipation can be made compatible.

In the said invention, the said heat conductive member is good also as having the softness | flexibility which does not fix the positional relationship of the said support member and the said heat radiating member.
By comprising in this way, the heat conductive member can relieve the restraining force of the support member by a heat radiating member. Thereby, the deformation of the support member caused by the restraining force of the heat radiating member, that is, the deformation of the peristaltic mirror can be prevented.

  In the above invention, the heat dissipation mechanism includes a first heat dissipation portion connected to one of the drive portions, a second heat dissipation portion connected to the other drive portion, and the first heat dissipation portion and the second heat dissipation portion. It is good also as providing the heat conductive member which connects these with heat conduction.

  By configuring in this way, heat generated in one drive unit by swinging one of the peristaltic mirrors at a high speed is transferred from the first heat radiating unit or the second heat radiating unit connected to the drive unit to the other. It is conducted and dissipated through the heat conducting member to the second heat dissipating part or the first heat dissipating part connected to the driving part. Therefore, even when any of the peristaltic mirrors is swung at a high speed, the heat radiation of the driving unit can be dissipated with high heat radiation efficiency by contributing the heat radiation to the two heat radiation members.

  In the said invention, the said 1st thermal radiation part and the said 2nd thermal radiation part support each said drive part, and have a lower thermal expansion coefficient than the said heat conductive member, and higher thermal conductivity than this support member The heat conduction member may have a higher thermal conductivity than the pair of support members to conduct heat between the heat radiation members.

  With this configuration, even if the drive unit generates heat, the support member stably supports the drive unit without thermal expansion, and heat transmitted from the drive unit to the support member has high thermal conductivity. It can be actively conducted and dissipated to each heat radiating member through the member. Thereby, the stable scanning of the laser beam by a pair of scanning part and highly efficient heat dissipation can be made compatible.

In the said invention, it is good also as providing the heat insulation member which can insulate between the said peristaltic mirror and the said irradiation optical system, and the said heat radiating member.
With this configuration, the heat insulating member can prevent the pair of peristaltic mirrors and the irradiation optical system from being displaced due to the influence of heat dissipated from the heat dissipation mechanism.

  In the said invention, it is good also as providing the housing | casing which accommodates the said perturbation mirror and the said irradiation optical system, arrange | positions the said thermal radiation mechanism outside, and the circulation apparatus which circulates the air around the said thermal radiation mechanism.

  By comprising in this way, the air around a heat radiating mechanism can be forcedly circulated by a circulation device, and the heat radiation effect can be improved. Also, the housing isolates the peristaltic mirror and the irradiation optical system from the heat dissipation mechanism, so that the peristaltic movement of the peristaltic mirror and the irradiation of the laser beam by the irradiation optical system are affected by the air that is forcibly circulated by the circulation device. It can be avoided.

  According to the present invention, it is possible to improve the heat dissipation efficiency, suppress the heat generation of the motor, and prevent the galvanometer from being damaged.

1 is a schematic configuration diagram illustrating a laser scanning microscope according to a first embodiment of the present invention. It is a schematic block diagram which shows the scanning part of FIG. It is a schematic block diagram which shows the scanning part of the laser scanning microscope which concerns on the 1st modification of 1st Embodiment of this invention. It is a schematic block diagram which shows the scanning part of the laser scanning microscope which concerns on the 2nd modification of 1st Embodiment of this invention. It is a schematic block diagram which shows the scanning part of the laser scanning microscope which concerns on the 3rd modification of 1st Embodiment of this invention. It is a schematic block diagram which shows the scanning part of the laser scanning microscope which concerns on the 4th modification of 1st Embodiment of this invention. It is a schematic block diagram which shows an example which provided the flow path in the thermal radiation mechanism of FIG. It is a schematic block diagram which shows the scanning part of the laser scanning microscope which concerns on the 5th modification of 1st Embodiment of this invention. It is a schematic block diagram which shows the scanning part of the laser scanning microscope which concerns on the 6th modification of 1st Embodiment of this invention. FIG. 10 is a cross-sectional view of the scanning device of FIG. 9 cut along a plane perpendicular to the rotation axis of the motor of one galvanometer. It is a schematic block diagram which shows the scanning part of the laser scanning microscope which concerns on the 7th modification of 1st Embodiment of this invention. It is a schematic block diagram which shows the scanning part of the laser scanning microscope which concerns on 2nd Embodiment of this invention.

[First Embodiment]
A laser scanning microscope according to a first embodiment of the present invention will be described below with reference to the drawings.
As shown in FIG. 1, the laser scanning microscope 100 according to the present embodiment is reflected by a light source 1 that emits laser light, a reflection mirror 3 that reflects laser light emitted from the light source 1, and the reflection mirror 3. The scanning device 5 that deflects the laser light, the control unit 6 that controls the scanning device 5, the pupil projection lens 7 that condenses the laser light deflected by the scanning device 5, and the pupil projection lens 7. An imaging lens 9 that converts laser light into parallel light, a reflection mirror 11 that reflects the laser light from the imaging lens 9, and a laser beam reflected by the reflection mirror 11 is irradiated onto the sample S and returned from the sample S. And an objective lens 13 that condenses the return light. The pupil projection lens 7, the imaging lens 9, the reflection mirror 11, and the objective lens 13 are referred to as an irradiation optical system 10.

  In addition, the laser scanning microscope 100 includes a plurality of dichroic mirrors 15 that branch the return light that is collected by the objective lens 13 and returns to the optical path of the laser light from the optical path of the laser light, and is branched from the optical path of the laser light by the dichroic mirror 15. The reflection mirror 17 that reflects the returned light, the confocal lens 19 that collects the return light reflected from the reflection mirror 17, the pinhole 21 that restricts the passage of the return light, and the return that has passed through the pinhole 21 A collimator lens 23 that converts light into parallel light, a barrier filter 25 that removes reflected light of the laser light (hereinafter referred to as reflected laser light) out of the return light converted into parallel light, and the barrier filter 25. The detector 27 that detects the returned light and the image generation unit 29 that generates an image of the specimen S are provided.

  The light source 1 includes an AOTF (Acousto-Optic Tunable Filter: acousto-optic element, not shown) that controls wavelength selection and intensity adjustment of laser light. The light source 1 controls wavelength selection and intensity adjustment by AOTF, and can emit laser light having a predetermined intensity in a predetermined wavelength range.

  As shown in FIG. 2, the scanning device 5 includes a pair of galvanometers (scanning units) 30 </ b> A and 30 </ b> B arranged close to each other, and a heat dissipation mechanism 40 that dissipates heat from the galvanometers 30 </ b> A and 30 </ b> B.

  The pair of galvanometers 30A and 30B have the same configuration, and have motors (drive units) 31A and 31B each having a predetermined rotation shaft (peristaltic shaft), and the respective motors 31A and 31B around the respective rotation shafts. Are provided with peristaltic mirrors 33A and 33B. These galvanometers 30A and 30B are arranged with their predetermined rotation axes orthogonal to each other.

  The controller 6 controls the driving of the motors 31A and 31B. For example, the control unit 6 drives the motor 31A of one galvanometer 30A at a high speed to move the peristaltic mirror 33A at a high speed to perform line scanning (main scanning) of the laser beam in the X-axis direction, and the other galvanometer. By driving the motor 31B of 30B to swing the peristaltic mirror 33B and switching the laser light to the next scanning line in the Y-axis direction (sub-scanning), the laser light is two-dimensionally moved on the specimen S. To scan.

  In addition, the control unit 6 can change the drive waveforms of the motors 31A and 31B and perform the rotation scan of the sample S. For example, the control unit 6 drives the motor 31B of the other galvanometer 30B at a high speed to move the peristaltic mirror 33B at a high speed to perform line scanning (main scanning) of the laser light in the Y-axis direction. By driving the motor 31A of 30A to swing the peristaltic mirror 33A and switching the laser light to the next scanning line in the X-axis direction (sub scanning), the laser light is two-dimensionally moved on the specimen S. The sample S on the screen can be rotated 90 ° around the center of the screen. In addition, the control unit 6 can set the direction of main scanning to an arbitrary angle by controlling the motors 31A and 31B to perform line scanning by simultaneously operating in cooperation.

  The heat dissipation mechanism 40 is fixed to both the support members 41A and 41B that support the motors 31A and 31B of the pair of galvanometers 30A and 30B, the base plate 42 that supports these support members 41A and 41B, and the support members 41A and 41B. The heat radiating member 43 is provided.

  The support members 41A and 41B are formed in a substantially prismatic shape rising from the base plate 42 in the vertical direction, and support the motors 31A and 31B at intermediate positions in the height direction. Specifically, the support members 41A and 41B are configured so that the rotation axes of the motors 31A and 31B are orthogonal to the height direction, and the positions of the rotation axes are slightly shifted from each other in the height direction. 31B is supported. Further, the support members 41A and 41B support the heat radiating member 43 from below at their upper ends.

The heat radiating member 43 includes a flat plate portion 45 and a plurality of plate-like heat radiation fins 47 that are formed integrally with the flat plate portion 45 and project from the surface of the flat plate portion 45 in the plate thickness direction. .
The other flat surface of the flat plate portion 45 opposite to the one surface from which the heat radiating fins 47 protrude is fixed to the upper ends of the support members 41A and 41B. The plurality of radiating fins 47 are arranged at a predetermined interval from each other over the entire surface of one surface of the flat plate portion 45.

The support members 41A and 41B are made of a material having a low coefficient of thermal expansion in order to suppress deformation due to heat, such as brass or SUS.
The heat dissipating member 43 is formed of a material having high thermal conductivity so that both the flat plate portion 45 and the heat dissipating fins 47 have a heat dissipating effect such as aluminum or copper.

  The plurality of dichroic mirrors 15 have different transmission wavelength and reflection wavelength characteristics, and are held by a substantially disk-shaped mirror turret 16. These dichroic mirrors 15 reflect the laser light reflected by the reflecting mirror 3 toward the scanning device 5 according to the wavelength characteristics, while the laser beam from the sample S passes through the objective lens 13 and the scanning device 5. The return light returning from the optical path of the light can be transmitted and branched from the optical path of the laser light.

  The mirror turret 16 is provided so as to be rotatable around a predetermined rotation axis, and holds a plurality of (for example, eight) dichroic mirrors 15 at intervals in the circumferential direction around the rotation axis. The mirror turret 16 rotates around a predetermined rotation axis, so that one of the dichroic mirrors 15 can be selectively disposed on the optical path of the laser light from the reflection mirror 3 and the return light from the scanning device 5. It can be done.

The detector 27 is a PMT (photomultiplier tube), for example, and outputs a light intensity signal corresponding to the detected luminance of the fluorescence.
The image generation unit 29 generates an image of the specimen S based on the light intensity signal output from the detector 27.

The operation of the laser scanning microscope 100 configured as described above will be described.
In order to observe the sample S with the laser scanning microscope 100 according to this embodiment, first, the mirror turret 16 causes the dichroic mirror 15 having a wavelength characteristic to reflect a laser beam having a specific frequency generated from the light source 1 to the laser beam. Place on the optical path. Then, the sample S is placed on a stage (not shown), and a laser beam having a specific frequency is generated from the light source 1.

  The laser light emitted from the light source 1 is reflected by the reflection mirror 3 and the dichroic mirror 15 and then deflected by the pair of galvanometers 30A and 30B of the scanning device 5. The laser beams deflected by the pair of galvanometers 30 </ b> A and 30 </ b> B are collected by the pupil projection lens 7, converted into parallel light by the imaging lens 9, and irradiated onto the sample S by the objective lens 13 through the reflection mirror 11. .

  In the scanning device 5, under the control of the control unit 6, the motor 31A of one galvanometer 30A is driven at high speed and the peristaltic mirror 33A is swung at high speed, and the laser beam is scanned on the sample S in the X-axis direction (main scanning). The oscillating mirror 31B is swung by the motor 31B of the other galvanometer 30B, and the operation of switching the laser light to the next scanning line in the Y-axis direction (sub-scanning) is repeated. As a result, the laser beam irradiated by the objective lens 13 is two-dimensionally scanned on the specimen S in accordance with the swing angles of the swing mirrors 33A and 33B of the pair of galvanometers 30A and 30B.

  When fluorescence is generated in the specimen S by being irradiated with the laser light, the fluorescence is condensed by the objective lens 13 together with the reflected laser light reflected on the specimen S, and then the reflection mirror 11, the imaging lens 9, and the pupil. The optical path of the laser light returns through the projection lens 7 and the peristaltic mirrors 33A and 33B, passes through the dichroic mirror 15 on the optical path, and is branched from the optical path of the laser light.

  The return light transmitted through the dichroic mirror 15 is collected by the confocal lens 19 via the reflection mirror 17, and the return light including the fluorescence generated at the focal position of the objective lens 13 in the sample S of the return light passes through the pinhole 21. pass.

  The return light that has passed through the pinhole 21 is converted into parallel light by the collimator lens 23, and then the reflected laser light is removed by the barrier filter 25, and only the fluorescence is detected by the detector 27. Then, the image generation unit 29 generates an image of the sample S based on the light intensity signal output from the detector 27. Thereby, the sample S can be observed on the screen by displaying an image on a monitor or the like (not shown).

  Further, the control unit 6 changes the drive waveforms of the motors 31A and 31B, and the peristaltic mirror 33B of the other galvano mirror 30B is perturbed at high speed to cause the laser beam to perform line scanning (main scanning) in the Y-axis direction. By repeatedly moving the laser beam to the next scanning line in the X-axis direction (sub-scanning) by moving the peristaltic mirror 33A of the galvano mirror 30A, the laser beam is scanned two-dimensionally on the sample S. The upper specimen S can be observed by being rotated by 90 ° around the center of the screen. In addition, the main scanning direction can be set to an arbitrary angle by controlling the motors 31 </ b> A and 31 </ b> B to perform line scanning by simultaneously operating in a coordinated manner.

  Here, in the galvanometers 30A and 30B, the motors 31A and 31B tend to generate heat when the motors 31A and 31B are driven at high speed for main scanning. In the laser scanning microscope 100 according to this embodiment, when the motor 31A generates heat, the heat of the motor 31A is conducted to the heat radiating member 43 via the support member 41A by the heat radiating mechanism 40, and a plurality of the heat radiating members 43 are arranged. It is dissipated by the radiation fins 47. Thereby, it can prevent that motor 31A becomes high temperature.

Even when the motor 31B generates heat during the rotation scan, the heat of the motor 31B is conducted to the same heat radiating member 43 through the support member 41B by the heat radiating mechanism 40 and is dissipated by the plurality of heat radiating fins 47 of the heat radiating member 43. The Thereby, it can also prevent that the motor 31B becomes high temperature.
That is, regardless of which motor 31A, 31B generates heat, the heat dissipation mechanism 40 dissipates the heat.

  Further, since the support members 41A and 41B are made of a material having a low coefficient of thermal expansion, even if the motors 31A and 31B generate heat, the motors 31A and 31B are stabilized without being thermally expanded by the support members 41A and 41B. Can be supported. Moreover, since the heat radiating member 43 is formed of a material having high thermal conductivity, the heat transmitted from the motors 31A and 31B by the support member 41 can be actively conducted to the heat radiating member 43 and dissipated.

  As described above, according to the laser scanning microscope 100 according to the present embodiment, both the motors 31A and 31B are connected to the common heat radiation member 43 via the support members 41A and 41B, so Even when the mirrors 33A and 33B are swung at a high speed, the heat radiation member 43 dissipates heat from the motors 31A and 31B. Therefore, there is no waste that there is a heat radiating member that does not contribute to heat radiation unlike the conventional laser scanning microscope, and the heat radiation efficiency can be improved. Thereby, the heat generation of the motors 31A and 31B can be suppressed with high heat dissipation efficiency, and the galvanometers 30A and 30B can be prevented from being damaged. In addition, since both the motors 31A and 31B share the heat radiating member 43, the heat radiating member 43 can be reduced in size if the same heat radiating capability as that of the related art is sufficient.

  Further, even if the motors 31A and 31B generate heat, the motors 31A and 31B stably support the motors 31A and 31B to prevent the displacement of the peristaltic mirrors 33A and 33B, and the heat dissipation members 43 from the motors 31A and 31B. Therefore, it is possible to achieve both stable scanning of the laser beam by the pair of galvanometers 30A and 30B and high-efficiency heat dissipation.

This embodiment can be modified as follows.
That is, in this embodiment, although the structure which fixed the heat radiating member 43 to support member 41A, 41B was illustrated and demonstrated, as a 1st modification, it is not fixing the heat radiating member 43 to support member 41A, 41B. For example, as shown in FIG. 3, the heat radiation member 43 is fixed to a support column 48 different from the support members 41 </ b> A and 41 </ b> B, and the support column 48 slightly places the heat radiation member 43 between the support members 41 </ b> A and 41 </ b> B. It is good also as supporting the heat radiating member 43 so that a clearance gap may be open. Further, a soft heat conduction sheet 49 is sandwiched between the heat radiation member 43 and the support members 41A and 41B, and the heat radiation member 43 and the support members 41A and 41B are thermally connected via the heat conduction sheet 49. Also good. By doing so, it is possible to prevent deformation of the support members 41A and 41B caused by the restraining force of the heat dissipation member 43, that is, deformation of the peristaltic mirrors 33A and 33B.

  As a second modification, as shown in FIG. 4, the laser scanning microscope 100 has a low thermal conductivity that insulates between the heat radiation member 43 and the optical system including the peristaltic mirrors 33 </ b> A and 33 </ b> B and the irradiation optical system 10. It is good also as providing the heat insulation member 51 which consists of material.

  In this case, the configuration of the laser scanning microscope 100 other than the heat radiating member 43 is accommodated in the housing 53, the opening of the housing 53 is closed by the lid portion 54, and the heat radiating member 43 is disposed on the lid portion 54. You can do that. Further, the heat insulating member 51 may be provided on substantially the entire inner surface of the lid portion 54.

  By doing in this way, optical systems, such as peristaltic mirrors 33A and 33B of a pair of galvanometer mirrors 30A and 30B, and irradiation optical system 10, are shifted by heat insulation member 51 under the influence of the heat dissipated from heat dissipation member 43. Can be prevented.

As a third modified example, as shown in FIG. 5, in addition to the configuration of the first modified example, the laser scanning microscope 100 includes a heat radiation fan (circulation device) 55 that circulates air around the heat radiation member 43. It is good as well.
In this case, the heat radiating fan 55 may be disposed on the lid portion 54 of the housing 53 so as to face the heat radiating member 43, and wind may be sent toward the heat radiating member 43 by the heat radiating fan 55.

  By doing in this way, the air around the heat radiating member 43 can be forcedly circulated by the heat radiating fan 55 to improve the heat radiating effect. Further, the casing 53 isolates the peristaltic mirrors 33A and 33B and the irradiation optical system 10 from the heat radiating member 43, so that the peristaltic operations of the peristaltic mirrors 33A and 33B and the irradiation of the laser beam by the irradiation optical system 10 are performed by the heat dissipation fan 55. Therefore, it is possible to avoid the influence of the forcedly circulated air.

  As a fourth modification, as shown in FIG. 6, the laser scanning microscope 100 may include a heat radiating fan 55 and a second housing 57 that can accommodate an expansion unit such as a detector.

  In this case, for example, four support legs 59 are arranged at the four corners of the lid portion 54, and the second casing 57 is supported by the support legs 59 while forming a space for arranging the heat radiation member 43 above the lid portion 54. What should I do? Thus, even when an extension unit is connected to the laser scanning microscope 100, the heat of the motors 31A and 31B can be efficiently dissipated by the heat dissipation member 43.

In this modification, as shown in FIG. 7, a flow path 61 including the heat dissipation member 43 is formed in the space between the lid portion 54 and the second casing 57, and the heat dissipation fan 55 surrounds the heat dissipation member 43. The air may flow along the flow path 61.
In this case, for example, it is desirable to form the opening 62 of the flow path 61 on the opposite side of the heat dissipation fan 55 with the heat dissipation member 43 interposed therebetween.

  By doing in this way, the air around the heat radiating member 43 is caused to flow along the flow path 61 by the wind sent from the heat radiating fan 55 and discharged from the opening 62, and the heat of the motors 31A and 31B can be efficiently dissipated. it can.

As a fifth modified example, as shown in FIG. 8, in addition to the configuration of the fourth modified example, a control board 63 that controls ON / OFF switching of the heat dissipation fan 55 may be provided.
In this case, the control board 63 synchronizes the ON / OFF switching of the motors 31A and 31B and the ON / OFF switching of the heat dissipation fan 55, and turns on the heat dissipation fan 55 when the motors 31A and 31B are in the OFF state. The heat radiating fan 55 may be turned off when 31A and 31B are in the ON state.

  In this way, the control board 63 can automatically operate the heat radiating fan 55 only while the laser beam is not scanned by the scanning device 5. Accordingly, it is possible to prevent the image accuracy from being reduced due to the influence of the vibration of the heat radiating fan 55. Further, it is possible to efficiently cool the motors 31A and 31B while the motors 31A and 31B are OFF and not generating heat, and to shorten the time until the heat of the radiating fan 55 decreases.

  As a sixth modification, as shown in FIGS. 9 and 10, the heat dissipation mechanism 40 connects the support member 41 </ b> A and the heat dissipation member 43 so as to be capable of conducting heat, and the support member 41 </ b> B and the heat dissipation member. It is good also as providing the heat conductive member 65B which connects 43 with heat conduction.

  The support members 41A and 41B are preferably members having a low coefficient of thermal expansion (for example, brass, stainless steel, etc.) in order to suppress thermal deformation, but these members generally tend to have low thermal conductivity. . In this case, the heat conducting members 65A and 65B are formed in a flat plate shape with a material having a higher thermal conductivity than the support members 41A and 41B, such as aluminum and copper, for example. A surface located near a certain motor 31A, 31B. Further, one end surfaces of the heat conducting members 65A and 65B protrude above the upper end portions of the support members 41A and 41B, and the flat plate portion 45 of the heat radiating member 43 is fixed to one end surfaces of these heat conducting members 65A and 65B. The heat dissipating member 43 may be supported from below by the heat conducting members 65A and 65B.

  Thus, even if the motors 31A and 31B generate heat, the motors 31A and 31B can be stably supported by the support members 41A and 41B having a low coefficient of thermal expansion, and the support members 41A and 41B can be supported from the motors 31A and 31B. The heat transmitted to the heat radiation member 43 can be actively conducted and dissipated through the heat conduction members 65A and 65B having high thermal conductivity. This makes it possible to achieve both stable scanning of the laser light by the pair of galvanometers 30A and 30B and highly efficient heat dissipation.

  In the present modification, the heat radiating member 43 and the heat conducting members 65A and 65B are described as being formed by separate members. Instead, for example, the heat radiating member 43 and the heat conducting members 65A and 65B are replaced with each other. It is good also as forming integrally with the same member and functioning heat conductive member 65A, 65B as a part of heat radiating member.

  In the sixth modified example, the configuration in which the heat radiating member 43 is fixed to the heat conducting members 65A and 65B has been described as an example. However, as the seventh modified example, the heat radiating member 43 is fixed to the heat conducting members 65A and 65B. Instead, for example, as shown in FIG. 11, the heat radiating member 43 is fixed to a support column 48 different from the support members 41A and 41B, and the heat radiating member 43 and the heat conducting members 65A and 65B are fixed by the support column 48. It is good also as supporting the heat radiating member 43 so that a clearance gap may be left in between. Further, a soft heat conductive sheet 49 is sandwiched between the heat radiating member 43 and the heat conducting members 65A and 65B, and the heat radiating member 43 and the heat conducting members 65A and 65B are thermally connected via the heat conductive sheet 49. It is good as well. By doing in this way, the deformation | transformation which arises in support member 41A, 41B via heat conductive member 65A, 65B by the restraining force of the thermal radiation member 43, ie, the deformation | transformation of peristaltic mirror 33A, 33B, can be prevented.

[Second Embodiment]
Next, a laser scanning microscope according to the second embodiment of the present invention will be described.
In the laser scanning microscope 200 according to the present embodiment, as shown in FIG. 12, instead of the heat dissipation member 43, the heat dissipation mechanism 40 is fixed to the heat dissipation member 143 </ b> A fixed to the support member 41 </ b> A and the support member 41 </ b> B. It differs from 1st Embodiment by the point provided with the thermal conduction member 165 which connects the thermal radiation member 143B, the thermal radiation member 143A, and the thermal radiation member 143B so that heat conduction is possible. A set of the support member 41A and the heat dissipation member 143A is a first heat dissipation portion, and a set of the support member 41B and the heat dissipation member 143B is a second heat dissipation portion.
In the following, portions having the same configuration as those of the laser scanning microscope 100 according to the first embodiment are denoted by the same reference numerals and description thereof is omitted.

  Similarly to the heat dissipation member 43 of the first embodiment, the heat dissipation members 143A and 143B are configured by flat plate portions 45A and 45B and a plurality of plate-shaped heat radiation fins 47A and 47B. These heat radiating members 143A and 143B are fixed to the side surfaces of the support members 41A and 41B, and the heat radiating fins 47A and 47B protrude from the flat plate portions 45A and 45B in a direction perpendicular to the height direction of the support members 41A and 41B. It is arranged to do.

  The heat conducting member 165 is formed in a long plate shape from a material such as aluminum or copper having a higher thermal conductivity than the support members 41A and 41B, and is bent into an L shape of the alphabet at a midpoint in the length direction. . The heat conducting member 165 has one bent side surface fixed to the back surface of the flat plate portion 14A of the heat radiating member 143A and the other bent side surface fixed to the back surface of the flat plate portion 14B of the heat radiating member 143B.

The operation of the laser scanning microscope 200 configured as described above will be described.
In the present embodiment, only the operation of the heat dissipation mechanism 40 will be described, and the description of the irradiation of the sample S with the laser light and the detection of the return light returning from the sample S will be omitted because they are the same as in the first embodiment.

  Heat generated by driving the motor 31A at high speed in one galvanometer 30A is conducted and dissipated from the motor 31A through the support member 41A to the heat dissipation member 143A. Further, the heat of the motor 31A is conducted from the heat radiating member 143A to the heat radiating member 143B connected to the motor 31B of the other galvanometer 30B through the heat conducting member 165, and is also dissipated from the heat radiating member 143B.

  Further, in the rotation scan, the heat generated by driving the motor 31B of the galvanometer 30B at high speed is conducted and dissipated from the motor 31B via the support member 41B to the heat radiating member 143B. Furthermore, the heat of the motor 31B is conducted from the heat radiating member 143B to the heat radiating member 143A via the heat conducting member 165, and is also dissipated from the heat radiating member 143A.

  Therefore, even when any of the swing mirrors 33A and 33B is swung at a high speed, the heat radiation of the motors 31A and 31B can be dissipated with high heat dissipation efficiency by contributing to the heat dissipation of the two heat dissipation members 143A and 143B.

  Therefore, according to the laser scanning microscope 200 according to the present embodiment, there is no waste that there is a heat dissipating member that does not contribute to heat dissipation unlike the conventional laser scanning microscope, and heat dissipation efficiency can be improved. Further, even if the motors 31A and 31B generate heat, the heat transmitted from the motors 31A and 31B to the support members 41A and 41B is heated while the support members 41A and 41B stably support the motors 31A and 31B without thermal expansion. The heat dissipation members 143A and 143B can be actively conducted through the conductive member 165 to be dissipated. This makes it possible to achieve both stable scanning of the laser light by the pair of galvanometers 30A and 30B and highly efficient heat dissipation.

  As mentioned above, although embodiment of this invention was explained in full detail with reference to drawings, the specific structure is not restricted to this embodiment, The design change etc. of the range which does not deviate from the summary of this invention are included. For example, the present invention is not limited to those applied to each of the above embodiments, and may be applied to embodiments in which these embodiments are appropriately combined, and is not particularly limited.

Further, for example, also in the laser scanning microscope 100 according to the first modification, the fourth modification, and the fifth modification of the first embodiment, the heat insulating member 51 shown in the second modification may be employed.
The configurations of the second to sixth modifications of the first embodiment may be applied to the laser scanning microscope 200 according to the second embodiment. Also in this case, the same effect as the laser scanning microscope 100 according to the second to fifth modifications of the first embodiment can be obtained.

DESCRIPTION OF SYMBOLS 1 Light source 10 Irradiation optical system 30A, 30B Galvanometer (scanning part)
31A, 31B Motor (drive unit)
33A, 33B Peristaltic mirror 40 Heat radiation mechanism 41A, 41B Support member 43, 143A, 143B Heat radiation member 51 Heat insulation member 53 Housing 55 Heat radiation fan (circulation device)
65A, 65B, 165 Thermal conduction member 100, 200 Laser scanning microscope S Specimen

Claims (8)

A peristaltic mirror that can be swung around a predetermined peristaltic axis, and a drive unit that perturbs the peristaltic mirror around the peristaltic axis, and is arranged so that the predetermined peristaltic axes cross each other and emitted from a light source A pair of scanning units for deflecting laser light by the peristaltic mirror and scanning the sample two-dimensionally;
An irradiation optical system for irradiating the sample with laser light deflected by the respective peristaltic mirrors of the pair of scanning units;
A laser scanning microscope comprising: a heat dissipation mechanism connected to both of the drive units and capable of dissipating heat of the drive units. The heat dissipation mechanism includes a support member that supports each drive unit, and a heat dissipation member that is fixed to the support member and has a higher thermal conductivity than the support member,
The laser scanning microscope according to claim 1, wherein the support member has a lower coefficient of thermal expansion than the heat dissipation member. The heat dissipation mechanism has a support member that supports each drive unit, a heat dissipation member having a higher thermal conductivity than the support member, and a heat conductivity higher than the support member, and the support member and the heat dissipation member And a heat conducting member that connects the heat conducting member in a heat conducting manner,
The laser scanning microscope according to claim 1, wherein the support member has a lower coefficient of thermal expansion than the heat conducting member.   The laser scanning microscope according to claim 3, wherein the heat conducting member has flexibility that does not fix a positional relationship between the support member and the heat radiating member.   The heat dissipation mechanism can conduct heat between a first heat dissipation portion connected to one of the drive portions, a second heat dissipation portion connected to the other drive portion, and the first heat dissipation portion and the second heat dissipation portion. A laser scanning microscope according to claim 1, further comprising a heat conducting member coupled to the laser scanning microscope. The first heat radiating portion and the second heat radiating portion each support the driving portion and have a lower thermal expansion coefficient than the heat conductive member, and the heat support higher than the support member and the support. A heat dissipating member fixed to the member,
The laser scanning microscope according to claim 5, wherein the heat conducting member has higher heat conductivity than the pair of support members and conducts heat between the heat radiating members.   The laser scanning microscope according to any one of claims 1 to 3 and claim 6, further comprising a heat insulating member capable of insulating between the peristaltic mirror and the irradiation optical system and the heat radiating member. A housing that houses the peristaltic mirror and the irradiation optical system, and that disposes the heat dissipation mechanism to the outside;
The laser scanning microscope according to any one of claims 1 to 7, further comprising a circulation device that circulates air around the heat dissipation mechanism.

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