JP2015139053A - piezoelectric vibration device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a piezoelectric vibration device usable in a variety of applications such as VCXO, SPXO, TCXO, OCXO and on-vehicle X'tal.SOLUTION: A vibration-side first bonding pattern 251 and a vibration-side second bonding pattern 252 which are physical vapor deposited are formed on both main surfaces 211, 212 of a crystal diaphragm 2. A sealing-side first bonding pattern 321 which is physical vapor deposited is formed on a first seal member 3, and a sealing-side second joining pattern 421 which is physical vapor deposited is formed on a second seal member 4. The sealing-side first bonding pattern 321 and the vibration-side first bonding pattern 251 are diffusion-bonded, and the sealing-side second bonding pattern 421 and the vibration-side second bonding pattern 252 are diffusion-bonded. In the second seal member 4, connection terminals 431, 432 to be diffusion-bonded to a function part 7, where external electrode terminals 721, 722 directly bonded to a circuit board 61 are formed, are formed, the connection terminals being physical vapor deposited.

Description

  The present invention relates to a piezoelectric vibration device.

  In recent years, the operating frequency of various electronic devices has been increased, and the size of packages has been reduced (especially low profile). For this reason, piezoelectric vibration devices (for example, crystal resonators) are required to cope with higher frequencies and smaller packages with higher frequencies and smaller packages.

  In this type of piezoelectric vibration device, the casing is formed of a rectangular parallelepiped package. This package is composed of a first sealing member and a second sealing member, and a crystal diaphragm having excitation electrodes formed on both main surfaces, and the first sealing member and the second sealing member are crystal vibrations. The excitation electrode of the quartz crystal diaphragm that is laminated and bonded via the plate and disposed inside the package is hermetically sealed (for example, Patent Document 1). Hereinafter, such a laminated form of piezoelectric vibration devices is referred to as a sandwich structure.

  In the crystal resonator disclosed in Patent Document 1, mounting terminals are formed on the second sealing member, and the mounting terminals are bonded to the circuit board using solder.

JP2011-30198A

  By the way, as shown in the technology of Patent Document 1, in the conventional piezoelectric vibration device such as a crystal resonator, a product focused on one application has been developed, and VCXO, SPXO, TCXO, OCXO, and in-vehicle X'tal. No piezoelectric vibration device that can be applied to various uses such as these has been developed.

  Accordingly, in order to solve the above-described problems, an object of the present invention is to provide a piezoelectric vibration device corresponding to various uses such as VCXO, SPXO, TCXO, OCXO, and in-vehicle X'tal.

  In order to achieve the above object, a piezoelectric vibrating device according to the present invention is electrically connected to a circuit board, and in the piezoelectric vibrating device serving as a basis for oscillation in the circuit board, a first excitation electrode is provided on one main surface of the substrate. A piezoelectric diaphragm having a second excitation electrode formed on the other main surface of the substrate and paired with the first excitation electrode; and a crystal or glass covering the first excitation electrode of the piezoelectric diaphragm. A first sealing member and a second sealing member made of crystal or glass that covers the second excitation electrode of the piezoelectric diaphragm are provided, and the first sealing member and the piezoelectric diaphragm are joined to each other And the second sealing member and the piezoelectric diaphragm are joined to form an internal space in which the vibrating portion of the piezoelectric diaphragm including the first excitation electrode and the second excitation electrode is hermetically sealed. The first seal is formed on one main surface of the piezoelectric diaphragm. A vibration-side first bonding pattern for bonding to a member is formed, and the vibration-side first bonding pattern includes a base PVD film formed by physical vapor deposition on the one main surface, and the base PVD film The electrode PVD film is laminated by physical vapor deposition thereon, and a vibration-side second bonding pattern for bonding to the second sealing member is formed on the other main surface of the piezoelectric diaphragm. The vibration-side second bonding pattern includes a base PVD film formed by physical vapor deposition on the other main surface, and an electrode formed by physical vapor deposition on the base PVD film. The first sealing member is formed with a sealing side first joining pattern for joining to the piezoelectric diaphragm, and the sealing side first joining pattern is formed of the first sealing member. An underlying PVD film formed by physical vapor deposition on a member; An electrode PVD film formed by physical vapor deposition on the underlying PVD film, and a sealing-side second bonding pattern for bonding to the piezoelectric diaphragm is formed on the second sealing member. The sealing-side second bonding pattern is formed by stacking a base PVD film formed by physical vapor deposition on the second sealing member and a physical vapor deposition on the base PVD film. The sealing-side first bonding pattern and the vibration-side first bonding pattern are diffusion-bonded, and the sealing-side second bonding pattern and the vibration-side second bonding pattern are formed of an electrode PVD film formed. In the second sealing member that is diffusion-bonded, a connection terminal for diffusion-bonding is formed on the main surface that does not face the piezoelectric diaphragm on the function portion in which the external electrode terminal that directly matches the circuit board is formed, The connection terminal is the piezoelectric diaphragm A base PVD film formed by physical vapor deposition on a main surface not facing the surface, and an electrode PVD film formed by physical vapor deposition on the base PVD film and laminated. .

  According to the piezoelectric vibration device according to the present invention, a piezoelectric vibration device having an arbitrary function such as VCXO, SPXO, TCXO, OCXO, or in-vehicle X'tal can be obtained. It becomes possible to raise.

  According to this configuration, the sealing-side first bonding pattern and the vibration-side first bonding pattern are diffusion-bonded, and the sealing-side second bonding pattern and the vibration-side second bonding pattern are diffusion-bonded. In the first sealing member or the second sealing member, the connection terminal for diffusion bonding to the function portion is formed on the main surface that does not face the piezoelectric vibration plate. The diaphragm, the first sealing member, and the second excitation electrode are not joined, and the connection terminals are not deteriorated by high-temperature heating during joining.

  In the above configuration, the function part may be diffusion bonded to the second sealing member, and the external electrode terminal electrically connected to the circuit board may be formed in the function part.

  Thus, by providing the function unit, it can be used for a piezoelectric vibration device having an arbitrary function such as VCXO, SPXO, TCXO, OCXO, in-vehicle X'tal, etc., so the degree of freedom of the function of the piezoelectric vibration device is increased. It becomes possible to raise. Further, since the function portion is diffusion bonded to the second sealing member and the external electrode terminal is formed on the function portion, the function portion may be interposed when the piezoelectric diaphragm is mounted on the circuit board. As a result, it is possible to prevent a malfunction (for example, cracking of a solder joint crack) from occurring due to a difference in thermal expansion coefficient between the material of the circuit board and the constituent material of the piezoelectric device. Reliability is greatly improved. In other words, even when the piezoelectric vibration device is joined to a glass epoxy substrate, which is a circuit board, defects caused by the difference in thermal expansion coefficient between the material of the circuit board and the constituent material of the piezoelectric device (problems such as cracking of the solder joint crack) ) Does not occur.

  The said structure WHEREIN: In the said 1st sealing member, an oscillation circuit element may be provided in one main surface, and the said sealing side 1st joining pattern may be formed in the other main surface.

  In this case, an oscillation circuit element (for example, an IC) is provided on the one main surface of the first sealing member, and the sealing-side first bonding pattern is formed on the other main surface. It is possible to simplify the patterning of the oscillation circuit pattern formed by routing from the oscillation circuit element without forming the sealing-side first bonding pattern, and as a result, the oscillation circuit element having various characteristics can be obtained. It can be installed. In addition, since the routing of the oscillation circuit element and the oscillation circuit pattern can be simplified, it contributes to a reduction in height. In particular, in the conventional package type structure, a package larger than the planar view size of the oscillation circuit element is required. However, according to this configuration, the planar view size equivalent to the size of the oscillation circuit element can be obtained. It is possible to reduce the size. In addition, it is possible to mount the oscillation circuit elements having various characteristics only by changing the patterning of the oscillation circuit pattern, and even when producing a variety of products corresponding to various applications, The piezoelectric diaphragm and the second sealing member can be shared, which contributes to manufacturing cost reduction.

  Moreover, since a transparent member is used for the first sealing member, the second sealing member, and the piezoelectric diaphragm, it is not possible to perform normal marking. Since the oscillation circuit element is provided, marking can be performed using the oscillation circuit element.

  In the above configuration, the first sealing member and the piezoelectric diaphragm have a gap of 1.00 μm or less, and the second sealing member and the piezoelectric diaphragm have a gap of 1.00 μm or less. May be.

  In this case, the height of the package of the piezoelectric vibration device does not vary. For example, unlike the present configuration, when a metal paste sealing material such as an Sn bonding material having a gap larger than 1 μm is used, the metal paste sealing material is formed into a pattern (the vibration side first bonding pattern, the vibration side second The height at the time of formation on the bonding pattern, the sealing side first bonding pattern, and the sealing side second bonding pattern) varies. Further, even after bonding, due to the heat capacity distribution of the formed pattern (the vibration side first bonding pattern, the vibration side second bonding pattern, the sealing side first bonding pattern, the sealing side second bonding pattern). There is no uniform gap. Therefore, in the conventional technique, in the case of a structure in which the three members of the first sealing member, the second sealing member, and the piezoelectric diaphragm are stacked, a difference occurs in each gap between these three members. As a result, the three laminated members are joined in a state where the parallelism cannot be maintained. In particular, this problem becomes conspicuous as the height is lowered. On the other hand, in this configuration, since the upper limit is set to 1.00 μm, the three members of the first sealing member, the second sealing member, and the piezoelectric diaphragm are kept parallel. In this state, the layers can be laminated and bonded, and this configuration can cope with a low profile.

  The piezoelectric vibration device according to the present invention can be used for various applications such as VCXO, SPXO, TCXO, OCXO, and in-vehicle X'tal.

FIG. 1 is a schematic configuration diagram showing each configuration of the crystal resonator according to the present embodiment. FIG. 2 is a schematic plan view of the first sealing member of the crystal resonator according to the present embodiment. FIG. 3 is a schematic back view of the first sealing member of the crystal resonator according to the present embodiment. FIG. 4 is a schematic plan view of the crystal diaphragm of the crystal resonator according to the present embodiment. FIG. 5 is a schematic back view of the crystal diaphragm of the crystal resonator according to the present embodiment. FIG. 6 is a schematic plan view of the second sealing member of the crystal resonator according to the present embodiment. FIG. 7 is a schematic back view of the second sealing member of the crystal resonator according to the present embodiment. FIG. 8 is a schematic plan view of the function part of the crystal resonator according to the present embodiment. FIG. 9 is a schematic rear view of the function part of the crystal resonator according to the present embodiment. FIG. 10 is a schematic plan view of a function part of a crystal resonator according to another embodiment. FIG. 11 is a schematic plan view of a function part of a crystal resonator according to another embodiment of the present invention. FIG. 12 is a schematic back view of the function part of the crystal resonator according to another embodiment of the present invention. FIG. 13 is a schematic back view of a second sealing member of a crystal resonator according to another embodiment of the present invention. FIG. 14 is a schematic plan view of a function part of a crystal resonator according to another embodiment. FIG. 15 is a schematic back view of a function part of a crystal resonator according to another embodiment of the present invention. FIG. 16 is a schematic plan view of a function part of a crystal resonator according to another embodiment. FIG. 17 is a schematic back view of a function part of a crystal resonator according to another embodiment of the present invention. FIG. 18 is a perspective view showing a wiring state of the crystal resonator of the present embodiment. FIG. 19 is a schematic configuration diagram showing each configuration of the crystal oscillator according to the present embodiment. FIG. 20 is a schematic plan view of the first sealing member of the crystal oscillator according to the present embodiment. FIG. 21 is a schematic back view of the first sealing member of the crystal oscillator according to the present embodiment. FIG. 22 is a schematic plan view of the crystal diaphragm of the crystal oscillator according to the present embodiment. FIG. 23 is a schematic back view of the crystal diaphragm of the crystal oscillator according to the present embodiment. FIG. 24 is a schematic plan view of the second sealing member of the crystal oscillator according to the present embodiment. FIG. 25 is a schematic back view of the second sealing member of the crystal oscillator according to the present embodiment. FIG. 26 is a schematic plan view of a function unit of the crystal oscillator according to the present embodiment. FIG. 27 is a schematic back view of the function part of the crystal oscillator according to the present embodiment. FIG. 28 is a schematic configuration diagram of a function unit of a crystal oscillator according to another embodiment of the present invention. FIG. 29 is a schematic back view of the function part of the crystal oscillator according to another embodiment of the present invention.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following embodiment, a case where the present invention is applied to a crystal resonator as a piezoelectric vibration device that performs piezoelectric vibration is shown.

-Crystal resonator-
A crystal resonator 101 according to the present embodiment is electrically connected to a circuit board 61 and serves as a basis for oscillation in the circuit board 61. As shown in FIG. A piezoelectric diaphragm) and a first excitation electrode 221 (see FIG. 4) of the quartz diaphragm 2, and a first excitation electrode 221 formed on one main surface 211 of the quartz diaphragm 2 is hermetically sealed. The sealing member 3 and the other main surface 212 of the crystal diaphragm 2 cover the second excitation electrode 222 (see FIG. 5) of the crystal diaphragm 2 and are formed in pairs with the first excitation electrode 221. A second sealing member 4 that hermetically seals the two excitation electrodes 222 is provided.

  In the crystal resonator 101, the crystal diaphragm 2 and the first sealing member 3 are joined, and the crystal diaphragm 2 and the second sealing member 4 are joined to form a sandwich-structured package 12. And the 1st sealing member 3 and the 2nd sealing member 4 are joined via the crystal diaphragm 2, and the internal space 13 of the package 12 is formed, In this internal space 13 of this package 12, crystal | crystallization The vibration part 23 including the first excitation electrode 221 and the second excitation electrode 222 formed on both main surfaces 211 and 212 of the diaphragm 2 is hermetically sealed. As shown in FIG. 1, the internal space 13 is biased to one end side (left side in plan view) of the package 12 in plan view. This sandwich structure package 12 is provided with a function unit 7 to form a function expansion type crystal unit 101.

  The crystal resonator 101 according to the present embodiment has a package size of 1.0 × 0.8 mm, and is intended to be reduced in size and height. Further, with the downsizing, the package 12 does not form a castellation and uses the through holes (see the first through hole 261, the second through hole 441, and the third through hole 442) to conduct the electrodes. ing.

  Next, each configuration of the above-described crystal resonator 101 will be described with reference to FIGS. Here, each member configured as a single unit to which the constituent members of the crystal unit 101 are not joined will be described.

  As shown in FIGS. 4 and 5, the quartz diaphragm 2 is made of a quartz substrate, which is a piezoelectric material, and its main surfaces (one main surface 211 and the other main surface 212) are formed as flat smooth surfaces (mirror finish). Has been.

  Further, a pair of (paired) excitation electrodes (a first excitation electrode 221 and a second excitation electrode 222) are formed on both main surfaces 211 and 212 (one main surface 211 and the other main surface 212) of the crystal diaphragm 2. Has been. The two main surfaces 211 and 212 are formed with two cutout portions 24 (penetrating shape) so as to surround the pair of first excitation electrode 221 and second excitation electrode 222 in plan view (see FIGS. 4 and 5). Thus, the vibration unit 23 is configured. The cutout portion 24 includes a concave body 241 in plan view (a plan view body including three plan view rectangles formed by extending two rectangles from both ends of one plan view rectangle in a right angle direction) and a plan view. A rectangular body 242 is formed between the concave body 241 in plan view and the rectangular body 242 in plan view. The first excitation electrode 221 and the second excitation electrode 222 are connected to the external electrode terminal (first external electrode terminal) of the function unit 7. 721, the second external electrode terminal 722; see below) is a conduction path 213 in which extraction electrodes (first extraction electrode 223 and second extraction electrode 224) for extraction are arranged. Regarding the electrode pattern, the first extraction electrode 223 and the second extraction electrode 224 extracted from the pair of the first excitation electrode 221 and the second excitation electrode 222 respectively include the vibration side first bonding pattern 251 and the vibration side second bonding pattern 252. Via, the connection terminals (one connection terminal 431, the other connection terminal 432) formed on the second sealing member 4 are electrically connected. The connection terminals (one connection terminal 431 and the other connection terminal 432) are electrically connected to external electrode terminals (first external electrode terminal 721 and second external electrode terminal 722) formed in the function unit 7.

  In this quartz crystal vibrating plate 2, the first sealing member 3 and the second sealing member 4 are bonded to the outside along the vibrating portion 23 of both main surfaces 211 and 212 so as to surround the vibrating portion 23. Each of the vibration side sealing portions 25 is provided. As shown in FIGS. 4 and 5, the vibration-side sealing portion 25 is located on the left side of the two main surfaces 211 and 212 in plan view.

  A vibration-side first bonding pattern 251 for bonding to the first sealing member 3 is formed on the vibration-side sealing portion 25 of the one main surface 211 of the crystal diaphragm 2, and the first excitation electrode 221 is the vibration-side first electrode 221. One connection pattern 251 is connected. In addition, a vibration side second bonding pattern 252 for bonding to the second sealing member 4 is formed on the vibration side sealing portion 25 of the other main surface 212 of the crystal diaphragm 2, and the second excitation electrode 222 is on the vibration side. It is connected to the second bonding pattern 252. The internal space 13 is formed inside (inside) the vibration side first bonding pattern 251 and the vibration side second bonding pattern 252.

  A vibration side first bonding pattern 251 for bonding to the first sealing member 3 is formed on one main surface 211 of the crystal diaphragm 2, and the vibration side first bonding pattern 251 is physically formed on the one main surface 211. A base PVD film 2511 formed by chemical vapor deposition and an electrode PVD film 2512 formed by physical vapor deposition on the base PVD film 2511 and laminated. In addition, a vibration-side second bonding pattern 252 for bonding to the second sealing member 4 is formed on the other main surface 212 of the crystal diaphragm 2, and the vibration-side second bonding pattern 252 is formed on the other main surface 212. The base PVD film 2521 formed by physical vapor deposition on the substrate and the electrode PVD film 2522 formed by physical vapor deposition on the base PVD film 2521 are stacked. In addition, according to the film formed by physical vapor deposition, unlike electroplating or electroless plating of wet plating, there is no surface roughness and airtightness can be secured, and there is no surface roughness and diffusion is achieved. Bonding can be performed.

  As described above, the vibration-side first bonding pattern 251 and the vibration-side second bonding pattern 252 have the same configuration, and a plurality of layers are stacked on the vibration-side sealing portion 25 of both main surfaces 211 and 212. Then, a Ti layer (or Cr layer) and an Au layer are formed by vapor deposition from the lowermost layer side. Thus, in the vibration side first bonding pattern 251 and the vibration side second bonding pattern 252, the underlying PVD films 2511 and 2521 are made of a single material (Ti (or Cr)), and the electrode PVD films 2512 and 2522 are formed. The electrode PVD films 2512 and 2522 are made of a single material (Au) and are thicker than the underlying PVD films 2511 and 2521. Further, the first excitation electrode 221 and the vibration-side first bonding pattern 251 formed on the one main surface 211 of the crystal diaphragm 2 have the same thickness, and the first excitation electrode 221 and the vibration-side first bonding pattern 251 have the same thickness. The second excitation electrode 222 and the vibration side second bonding pattern 252 formed on the other major surface 212 of the quartz crystal plate 2 have the same thickness, and the second excitation electrode is made of the same metal. The surfaces (main surfaces) of 222 and the vibration side second bonding pattern 252 are made of the same metal. The vibration side first bonding pattern 251 and the vibration side second bonding pattern 252 are non-Sn patterns. When the vibration side first and second bonding patterns 251 and 252 are compared with the vibration side (the first excitation electrode 221 and the second excitation electrode 222) with the same metal and the same thickness on the same main surface. If the metal of the uppermost layer (at least the exposed surface) (electrode PVD films 2512, 2522, etc.) is the same, bonding is performed even if the type and thickness of the base metal (base PVD films 2511, 2521) are different. It is possible. Further, in the vibration side first bonding pattern 251 and the sealing side second bonding pattern 421, the electrode PVD films 2512 and 2522 are the surfaces of the scaly body in plan view, respectively. The scale-like body here refers to a form in which the activated and microscopic pieces of metal are superposed like a tatami mat and have no gap (or almost no gap) in plan view. Say.

  Further, as shown in FIGS. 4 and 5, a first through hole 261 is formed in the crystal diaphragm 2, and the vibration side first joining pattern connected to the first excitation electrode 221 through the first through hole 261. 251 is drawn to the other main surface 212 side. The first through hole 261 is disposed outside the internal space 13, and is located on the other end side (right side in plan view) of both the main surfaces 211 and 212 as shown in FIG. 261 is not formed inside the internal space 13. Here, the inside of the internal space 13 means strictly the inside of the inner peripheral surface of the bonding material 11 without including the bonding material 11.

The first sealing member 3 is made of a material having a bending rigidity (secondary moment of section × Young's modulus) of 1000 [N · mm ² ] or less. Specifically, as shown in FIGS. 2 and 3, the first sealing member 3 is a rectangular parallelepiped substrate formed from one glass wafer, and the other main surface 312 ( The surface to be bonded to the crystal diaphragm 2 is formed as a flat smooth surface (mirror finish).

  The other main surface 312 of the first sealing member 3 is provided with a sealing-side first sealing portion 32 for joining to the crystal diaphragm 2. As shown in FIG. 3, the sealing-side first sealing portion 32 is biased to the left of the other main surface 312 of the first sealing member 3 in plan view.

  A sealing-side first bonding pattern 321 for bonding to the crystal diaphragm 2 is formed on the sealing-side first sealing portion 32 of the first sealing member 3. The sealing side first bonding pattern 321 has the same width at all positions on the sealing side first sealing portion 32 of the first sealing member 3.

  The sealing-side first bonding pattern 321 is formed by stacking a base PVD film 3211 formed by physical vapor deposition on the first sealing member 3 and a physical vapor deposition on the base PVD film 3211. Electrode PVD film 3212 formed. In this embodiment, Ti (or Cr) is used for the base PVD film 3211 and Au is used for the electrode PVD film 3212. Moreover, the sealing side 1st joining pattern 321 is a non-Sn pattern. Specifically, the sealing side first bonding pattern 321 is configured by laminating a plurality of layers on the sealing side first sealing portion 32 of the other main surface 312, and the Ti layer (or from the lowermost layer side). Cr layer) and Au layer are formed by vapor deposition. In the sealing-side first bonding pattern 321, the electrode PVD film 3212 is the surface of the scaly body in plan view.

For the second sealing member 4, a material having a bending rigidity (secondary moment of section × Young's modulus) of 1000 [N · mm ² ] or less is used. Specifically, as shown in FIG. 6, the second sealing member 4 is a rectangular parallelepiped substrate formed from a single glass wafer, and one main surface 411 (quartz crystal vibration) of the second sealing member 4 The surface joined to the plate 2 is formed as a flat smooth surface (mirror finish).

  The main surface 411 of the second sealing member 4 is provided with a sealing-side second sealing portion 42 for joining to the crystal diaphragm 2. As shown in FIG. 6, the sealing-side second sealing portion 42 is located biased to the left of the main surface 411 of the second sealing member 4 in plan view.

  In addition, on the other main surface 412 of the second sealing member 4 (an outer main surface not facing the crystal diaphragm 2), a pair of connection terminals (one of which can be electrically connected to the function unit (see FIG. 8)). A connection terminal 431 and another connection terminal 432) are formed. The function unit 7 is formed with external electrode terminals (first external electrode terminal 721 and second external electrode terminal 722) that directly match the circuit board 61 as described below.

  One connection terminal 431 is electrically connected directly to the first excitation electrode 221 via the vibration side first bonding pattern 251, and the other connection terminal 432 is connected to the second excitation electrode 222 via the vibration side second bonding pattern 252. Electrically connected directly. As shown in FIG. 7, the one connection terminal 431 is arranged at a part of one end side in the longitudinal direction of the other main surface 412 of the second sealing member 4, and the other connection terminal 432 is arranged at a corner on the multi-end side. Has been. When the function unit 7 is an inductance unit 74 described later, as shown in FIG. 13, the one connection terminal 431 is arranged along the short side in the longitudinal direction in plan view. The pair of connection terminals (one connection terminal 431 and the other connection terminal 432) are formed on the base PVD films 4311 and 4321 and the base PVD films 4311 and 4321 formed by physical vapor deposition on the other main surface 412. The electrode PVD films 4312 and 4322 are formed by physical vapor deposition. Further, the underlying PVD films 4311 and 4321 of the connection terminals (one connection terminal 431 and the other connection terminal 432) are the vibration side first bonding pattern 251, the vibration side second bonding pattern 252, and the sealing side first bonding pattern 321. And the underlying PVD films 2511, 2521, 3211, and 4211 of the sealing-side second bonding pattern 421 have the same thickness.

  In addition, a sealing-side second bonding pattern 421 for bonding to the crystal diaphragm 2 is formed on the sealing-side second sealing portion 42 of the second sealing member 4. The sealing side second bonding pattern 421 has the same width at all positions on the sealing side second sealing portion 42 of the second sealing member 4.

  The sealing-side second bonding pattern 421 is formed by stacking a base PVD film 4211 formed by physical vapor deposition on the second sealing member 4 and a physical vapor deposition on the base PVD film 4211. The electrode PVD film 4212 is formed. Note that in this embodiment, Ti (or Cr) is used for the base PVD film 4211 and Au is used for the electrode PVD film 4212. Further, the sealing-side second bonding pattern 421 is a non-Sn pattern. Specifically, the sealing-side second bonding pattern 421 is configured by laminating a plurality of layers on the sealing-side second sealing portion 42 of the other main surface 412, and Ti layer (or from the lowermost layer side) Cr layer) and Au layer are formed by vapor deposition. In addition, in the sealing-side second bonding pattern 421, the electrode PVD film 4212 becomes the surface of the scaly body in plan view.

  In addition, as shown in FIGS. 1, 6, and 7, the second sealing member 4 has two through holes (a second through hole 441 and a third through hole 442). The second through-hole 441 and the third through-hole 442 are disposed outside the internal space 13, and the second through-hole 441 has both main surfaces (one main surface 411 and another main surface 412 as shown in FIGS. 6 and 7). The third through hole 442 is located on the upper left side in plan view, and the second through hole 441 and the third through hole 442 are not formed inside the internal space 13. Here, the inside of the internal space 13 means strictly the inside of the inner peripheral surface of the bonding material 11 without including the bonding material 11. Then, the vibration side first joint pattern 251 connected to the first excitation electrode 221 of the crystal diaphragm 2 and the one connection terminal 431 are electrically connected via the first through hole 261 and the second through hole 441 of the crystal diaphragm 2. Is done. The vibration side second bonding pattern 252 connected to the second excitation electrode 222 of the crystal diaphragm 2 is electrically connected to the other connection terminal 432 through the second through hole 441 and the sealing side second bonding pattern 421.

  In the crystal unit 101 having the above-described configuration, the crystal diaphragm 2 and the first sealing member 3 are connected to the vibration-side first bonding pattern 251 and the bonding member such as a separate adhesive as in the prior art. Diffusion bonding is performed in a state where the sealing-side first bonding pattern 321 is overlapped, and the crystal diaphragm 2 and the second sealing member 4 overlap the vibration-side second bonding pattern 252 and the sealing-side second bonding pattern 421. The sandwiched package 12 is manufactured by diffusion bonding. The sandwich-structured package 12 is in a form that can be distributed. The vibration side first bonding pattern 251 and the sealing side first bonding pattern 321 itself become the bonding material 11 generated after diffusion bonding, and the vibration side second bonding pattern 252 and the sealing side second bonding pattern 421 itself diffuse. It becomes the joining material 11 produced | generated after joining. In this embodiment, diffusion bonding is performed at room temperature. The normal temperature here means 5 to 35 degrees. Although this room temperature diffusion bonding has the following effects (suppression of gas generation and good bonding), this is a preferred example with a value lower than 183 degrees which is the melting point of eutectic solder. However, only room temperature diffusion bonding does not have the following effects, and it is sufficient that diffusion bonding is performed at a temperature of normal temperature or higher and lower than 230 degrees. In particular, when diffusion bonding is performed at a temperature of 200 ° C. or higher and lower than 230 ° C., the melting point of the Pb-free solder is less than 230 ° C. and the Au recrystallization temperature (200 ° C.) or higher is reached. The stable region can be stabilized. Further, in the present embodiment, since a dedicated bonding material such as Au—Sn is not used, there is no generation of a gas such as a plating gas, a binder gas, and a metal gas. Therefore, the recrystallization temperature can be made higher than Au.

  In the package 12 manufactured here, as described above, the sealing-side first bonding pattern 321 and the vibration-side first bonding pattern 251 are bonded by diffusion bonding, and the sealing-side second bonding pattern 421 and the vibration-side are bonded. The second bonding pattern 252 is bonded. In addition to this bonding, the sealing side first bonding pattern 321 and the vibration side first bonding pattern 251 are pressure diffusion bonded, and the sealing side second bonding pattern 421. And the vibration side second bonding pattern 252 may be pressure diffusion bonded. In this case, it becomes easy to secure the joint location by pressurizing (the joint area can be substantially increased), and the joining by only the diffusion joining can be performed more favorably without using the high temperature heating.

  Further, in the package 12 manufactured here, the first sealing member 3 and the crystal diaphragm 2 have a gap of 1.00 μm or less, and the second sealing member 4 and the crystal diaphragm 2 are 1 It has a gap of 0.000 μm or less. That is, the thickness of the bonding material 11 between the first sealing member 3 and the crystal vibrating plate 2 is 1.00 μm or less, and the bonding material 11 between the second sealing member 4 and the crystal vibrating plate 2 The thickness is 1.00 μm or less (specifically, 0.15 μm to 1.00 μm in the Au—Au bonding of the present embodiment). For comparison, a conventional metal paste sealing material using Sn has a thickness of 5 μm to 20 μm.

  Moreover, in the package 12 manufactured here, as shown in FIGS. 1-7, the internal space 13 is located on the left side in plan view. Further, the sealing side first bonding pattern 321 formed on the first sealing member 3 and the sealing side second bonding pattern 421 formed on the second sealing member 4 do not overlap in plan view. Specifically, the planar view area in the sealing-side first bonding pattern 321 is wider than the planar view area in the sealing-side second bonding pattern 421. In the present embodiment, the planar view area in the sealing-side first bonding pattern 321 is wider than the planar view area in the sealing-side second bonding pattern 421, but the present invention is not limited to this. The planar view region in the stop-side second joining pattern 421 may be wider than the planar view region in the sealing-side first joining pattern 321. However, since the one connection terminal 431 and the other connection terminal 432 are formed in the second sealing member 4, the planar view region in the sealing side first bonding pattern 321 is in the sealing side second bonding pattern 421. Thus, the wiring pattern can be easily routed (conducting a conduction path), and more wiring patterns can be provided (conduction ensuring area).

  In addition, compared with the vibration side first bonding pattern 251 and the vibration side second bonding pattern 252 formed on the crystal diaphragm 2, the sealing side first bonding pattern 321 formed on the first sealing member 3 and the first 2 The sealing-side second bonding pattern 421 formed on the sealing member 4 is wide.

  In this embodiment, the package 12 manufactured as described above is provided with a function unit 7 (FIG. 8) in which external electrode terminals that are directly coupled to the circuit board 61 are formed. The child 101 (function expansion type crystal resonator 101) is obtained. Specifically, the second sealing member 4 and the function unit 7 are connected to a connection terminal (one connection terminal 431, another connection terminal 432) and an internal electrode terminal (first internal electrode terminal 711, second internal electrode terminal 712). The function expansion type crystal unit 101 is manufactured by diffusion bonding in a state where the two are stacked. As shown in FIG. 1, the function expansion type crystal resonator 101 is directly coupled to the circuit board 61 using a fluid conductive bonding material 62 and is electrically connected thereto. In the function expansion type crystal resonator 101 manufactured here, the second sealing member 4 and the function portion 7 have a gap of 1.00 μm or less (specifically, the Au of the present embodiment). -0.15 μm to 1.00 μm for Au bonding). For comparison, a conventional metal paste sealing material using Sn has a thickness of 5 μm to 20 μm.

  As shown in FIG. 8, one main surface 701 of the function part 7 (inner main surface facing the vibration part 23) is a connection terminal (one connection terminal 431, other connection) formed on the second sealing member 4. Internal electrode terminals (first internal electrode terminal 711, second internal electrode terminal 712) that are directly connected to the terminal 432) and are electrically connected to the second sealing member 4, and internals that are electrically connected to elements to be described later Electrode terminals (third internal electrode terminal 713, fourth internal electrode terminal 714) are formed. The first internal electrode terminal 711 is electrically connected directly to the one connection terminal 431, and the second internal electrode terminal 712 is electrically connected directly to the other connection terminal 432. These internal electrode terminals (first internal electrode terminal 711, second internal electrode terminal 712, third internal electrode terminal 713, and fourth internal electrode terminal 714) are formed by physical vapor deposition on one main surface 701. The underlying PVD films 7111, 7121, 7131, 7141, and electrode PVD films 7112, 7122, 7132, 7142 formed by physical vapor deposition on the underlying PVD films 7111, 7121, 7131, 7141. Further, the underlying PVD films 7111, 7121, 7131, 7141 of the internal electrode terminals (first internal electrode terminal 711, second internal electrode terminal 712, third internal electrode terminal 713, fourth internal electrode terminal 714) Side first bonding pattern 251, vibration side second bonding pattern 252, sealing side first bonding pattern 321, sealing side second bonding pattern 421, and connection bases (one connection terminal 431, other connection terminal 432) The films 2511, 2521, 3211, 4211, 4311, and 4321 have the same thickness.

  Further, on the other main surface 702 of the function part 7 (an outer main surface not facing the vibration part 23), as shown in FIG. 9, external electrode terminals that are directly connected to the circuit board 61 and electrically connected thereto. (First external electrode terminal 721, second external electrode terminal 722, third external electrode terminal 723, and fourth external electrode terminal 724) are formed. External electrode terminals (first external electrode terminal 721, second external electrode terminal 722, third external electrode terminal 723, fourth external electrode terminal 724) are internal electrode terminals (first internal electrode terminal 711, second internal electrode terminal). 712, the third internal electrode terminal 713, and the fourth internal electrode terminal 714) are electrically connected directly via the function part through hole 703. These external electrode terminals (first external electrode terminal 721, second external electrode terminal 722, third external electrode terminal 723, and fourth external electrode terminal 724) are formed by physical vapor deposition on the other main surface 702. The underlying PVD films 7211, 7221, 7231, and 7241, and the electrode PVD films 7212, 7222, 7232, and 7242 formed by physical vapor deposition on the underlying PVD films 7211, 7221, 7231, and 7241 are formed. In addition, the vibration side first bonding pattern 251, the vibration side second bonding pattern 252, the sealing side first bonding pattern 321, the sealing side second bonding pattern 421, and connection terminals (one connection terminal 431, another connection terminal 432). ) Of the underlying PVD films 2511, 2521, 3211, 4211, 4311, 4321, the external electrode terminals (first external electrode terminal 721, second external electrode terminal 722, third external electrode terminal 723, fourth The base PVD films 7211, 7221, 7231, 7241 of the external electrode terminal 724) are thick.

  The thickness of the bonding pattern in which the sealing-side first bonding pattern 321 and the vibration-side first bonding pattern 251 in the package 12 are diffusion-bonded is as follows: the sealing-side second bonding pattern 421 and the vibration-side second bonding pattern The external electrode terminals (first external electrode terminal 721, second external electrode terminal 722, third external electrode terminal 723, fourth external electrode) that are electrically connected to the outside are the same in thickness as the bonding pattern formed by diffusion bonding with 252. Unlike the thickness of the electrode terminal 724), the external electrode terminals (the first external electrode terminal 721, the second external electrode terminal 722, the third external electrode terminal 723, and the fourth external electrode terminal 724) are thicker than the other patterns.

  The function unit 7 shown in FIGS. 8 and 9 is provided with a temperature measuring element unit 73. The temperature measuring element unit 73 here is a thermistor, a diode, or the like. The temperature measuring element unit 73 is electrically connected via a third internal electrode terminal 713 and a fourth internal electrode terminal 714. According to this function unit 7, the conventional small crystal resonator 101 cannot be provided with the temperature measuring element. However, according to this configuration, even if the crystal resonator 101 is downsized, the temperature measuring element is not provided. Can be provided.

  As described above, the function unit 7 shown in FIGS. 8 and 9 is provided with the temperature measuring element unit 73, but the function unit 7 is limited to the one provided with the temperature measuring element unit 73. Instead, the form of the function unit 7 is not limited as long as it has an arbitrary function and forms an external electrode terminal. For example, the function unit 7 as shown in FIGS. 10-12, the external electrode terminals (the first external electrode terminal 721, the second external electrode terminal 722, the third external electrode terminal 723, and the fourth external electrode terminal 724) are The internal electrode terminals (the first internal electrode terminal 711, the second internal electrode terminal 712, the third internal electrode terminal 713, and the fourth internal electrode terminal 714) are electrically connected directly.

  The function unit 7 shown in FIG. 10 is provided with a heater unit 77 including a heater element instead of the temperature measuring element unit 73 of FIG. In the illustrated example, the heater portion 77 has a shape that meanders between the internal electrode terminals.

  11 and 12 uses an impact absorbing epoxy substrate. In this case, it can be used as a piezoelectric vibration device mounted on a vehicle, and the epoxy substrate absorbs the impact even under severe conditions in the impact environment, and the vibration portion 23 is not affected by the impact. 11 and 12 may be provided with a temperature measuring element portion 73 shown in FIG. 8, a heater portion 77 shown in FIG. 10, and an inductance portion 74 shown in FIGS.

  The function section 7 shown in FIGS. 14 and 15 is provided with an L element inductance section 74. The inductance portion 74 is obtained by winding a thin film conductive pattern around a substrate using an L element through hole 741. According to the function unit 7, it is possible to increase the capacity that decreases as the crystal unit 101 becomes smaller.

  When the function unit 7 is the inductance unit 74, the function unit 7 is placed under the function unit 7 as shown in FIGS. 16 and 17 in order to avoid contact between the inductance unit 74 provided on the other main surface 702 and the circuit board 61. It is preferable to provide the function unit 7 that avoids contact between the inductance unit 74 and the circuit board 61. That is, it is preferable to stack the function units 7 (see FIG. 18).

  As described above, the function unit 7 shown in FIGS. 15 and 16 is provided with the inductance unit 74. However, the function unit 7 is not limited to the one provided with the inductance unit 74, and is arbitrary. As long as the external electrode terminal is formed, the form of the function unit 7 is not limited. For example, the function unit 7 as shown in FIGS. 8 to 12, external electrode terminals (first external electrode terminal 721, second external electrode terminal 722, third external electrode terminal 723, and fourth external electrode terminal 724) are used. Are electrically connected directly to internal electrode terminals (first internal electrode terminal 711, second internal electrode terminal 712, third internal electrode terminal 713, and fourth internal electrode terminal 714).

  As described above, according to the crystal resonator 101 according to the present embodiment, since the connection terminals (one connection terminal 431 and the other connection terminal 432) are formed in the second sealing member 4, the inductance portion 74 ( Crystal unit 101 having an L element), crystal unit 101 having a temperature measuring unit 73 (thermometer unit), crystal unit 101 having a heater unit 77 (heater element), and in-vehicle X'tal It is possible to cope with various uses such as the quartz crystal resonator 101 of FIG.

  Further, according to the present embodiment, the fluid conductive bonding material 62 (Pb-free solder, conductive adhesive, or the like) cannot be directly bonded to the connection terminals (one connection terminal 431, the other connection terminal 432). . This is a thin PVD film 4311, 4321 of a connection terminal (one connection terminal 431, another connection terminal 432) formed by physical vapor deposition and is suitable for diffusion bonding, but high temperature heating is essential. This is because it is not suitable for the required joining (solder joining, etc.). Therefore, in the present embodiment, the connection terminals (one connection terminal 431 and the other connection terminal 432) cannot be directly combined with the circuit board 61 serving as an external member via the fluid conductive bonding material 62.

  For the above reason, the flowable conductive bonding material 62 is not directly bonded to the connection terminal (one connection terminal 431, the other connection terminal 432). Therefore, according to the present embodiment, the connection terminal (one connection terminal 431, The other connection terminal 432) is not eaten by the fluid conductive bonding material 62. Therefore, the connection terminals (the one connection terminal 431 and the other connection terminal 432) may be formed thin without considering the amount of the connection terminal (the one connection terminal 431 and the other connection terminal 432) eroded by the fluid conductive bonding material 62. As a result, the crystal resonator 101 can be reduced in height.

  Further, according to the present embodiment, the sealing side first bonding pattern 321 and the vibration side first bonding pattern 251 are diffusion bonded, and the sealing side second bonding pattern 421 and the vibration side second bonding pattern 252 are formed. In the second sealing member 4, connection terminals (one connection terminal 431 and another connection terminal 432) for diffusion bonding to the function unit 7 are formed on the other main surface 412 that does not face the crystal diaphragm 2 in the second sealing member 4. Therefore, the crystal diaphragm 2, the first sealing member 3, and the second excitation electrode 222 are not joined by the high temperature heating, and the connection terminals (one connection terminal 431 and the other connection terminal 432) are deteriorated by the high temperature heating at the time of joining. Does not cause.

  The function unit 7 is diffusion bonded to the second sealing member 4, and external electrode terminals (first external electrode terminal 721, second external electrode terminal 722, third external electrode terminal 723, fourth external electrode are connected to the function unit 7. Since the terminal 724) is formed, the function unit 7 can be interposed when the crystal diaphragm 2 is mounted on the circuit board 61. As a result, the heat of the material of the circuit board 61 and the constituent material of the crystal resonator 101 can be obtained. It is possible to prevent a malfunction (for example, cracking of a joint solder crack) due to a difference in expansion coefficient, and the reliability of the crystal unit 101 is greatly improved. In other words, even when the crystal resonator 101 is bonded to the current glass substrate 61, which is the circuit board 61, a defect caused by the difference in thermal expansion coefficient between the material of the circuit substrate 61 and the constituent material of the crystal resonator 101 (bonding solder) Problems such as crack disconnection do not occur.

  Further, according to the present embodiment, the height of the package of the crystal unit 101 does not vary. For example, unlike the present embodiment, the gap between the sealing members (the first sealing member 3 and the second sealing member 4 in the present embodiment), the crystal diaphragm 2 and the function unit 7 is greater than 1 μm. When a metal paste sealing material such as an Sn bonding material is used, the metal paste sealing material is patterned (vibration side first bonding pattern 251, vibration side second bonding pattern 252, sealing side first bonding pattern 321, sealing The height at the time of forming on the stop side second joining pattern 421) varies. Further, even after bonding, due to the heat capacity distribution of the formed patterns (vibration side first bonding pattern 251, vibration side second bonding pattern 252, sealing side first bonding pattern 321, sealing side second bonding pattern 421). Uniform gap (gap between the first sealing member 3 and the crystal diaphragm 2 in the present embodiment, gap between the second sealing member 4 and the crystal diaphragm 2 in the present embodiment, It is not a gap between the second sealing member 4 and the function portion 7 in the form. Therefore, for example, in the conventional technique, in the case of a structure in which three members of the first sealing member, the second sealing member, and the piezoelectric diaphragm are laminated, there is a difference in the gap between these three members. Arise. As a result, the three laminated members are joined in a state where the parallelism cannot be maintained. In particular, this problem becomes conspicuous as the height is lowered. On the other hand, in this embodiment, since the upper limit of the gap is set to 1.00 μm, in the package 12, the first sealing member 3, the second sealing member 4, and the crystal vibrating plate 2 are three pieces. (Furthermore, according to the function expansion type crystal resonator 101, the first sealing member 3, the second sealing member 4, the crystal diaphragm 2, and the function portion 7 or more members) are parallel. In this state, it can be laminated and joined, and this embodiment can cope with a reduction in height.

  In the present embodiment, glass is used for the first sealing member 3 and the second sealing member 4, but the present invention is not limited to this, and quartz may be used.

  In the present embodiment, the function part 7 is joined to the second sealing member 4. However, the present invention is not limited to this, and the function part 7 may be joined to the first sealing member 3. .

  In this embodiment, quartz is used for the piezoelectric diaphragm, but the present invention is not limited to this, and other materials may be used as long as they are piezoelectric materials, such as lithium niobate, lithium tantalate, etc. It may be.

  In the present embodiment, Ti (or Cr) and Au are used as the bonding material 11. However, the present invention is not limited to this, and the bonding material 11 may be composed of, for example, Ni and Au. .

  Moreover, in this Embodiment, in all the through-holes, although the electrically conductive film is formed in the inner wall surface of a through-hole, it is not limited to this, You may fill a through-hole with an electrically-conductive material.

  In the present embodiment, the vibration side first bonding pattern 251, the vibration side second bonding pattern 252, the sealing side first bonding pattern 321, and the sealing side second bonding pattern 421 include Ti (or Cr) and Au. However, it is not limited to this, Cu (Cu simple substance or Cu alloy) may be contained. In this case, it contributes to stress relaxation at the time of manufacturing (when joining, impact caused by external force such as pressurization) or during use (when impact caused by external force such as dropping, solder mounting, etc.) be able to. That is, the mechanical strength is improved by including Cu in the vibration side first bonding pattern 251, the vibration side second bonding pattern 252, the sealing side first bonding pattern 321, and the sealing side second bonding pattern 421.

  When Cr is used for the underlying PVD films 2511, 2521, 3211, and 4211, Cr diffuses into the electrode PVD films 2512, 2522, 3212, and 4212, and Cu is diffused into the underlying PVD films 2511, 2521, 3211, and 4211. It can suppress by including. As a result, even if the layer using Cr is thickened, it is possible to suppress the diffusion of Cr into the electrode PVD films 2512, 2522, 3212, and 4212, and the layer using Cr can be made thick. Variation can be suppressed. Actually, even if the Cr layer is 0.2 μm, the diffusion of Cr into the electrode PVD films 2512, 2522, 3212, and 4212 can be suppressed.

  In the present embodiment, the second sealing member 4 is a rectangular parallelepiped substrate formed from a single glass wafer, but is not limited to this, and the two sealing members 4 are formed from two rectangular parallelepipeds formed from a glass wafer. There may be. In this case, the sealing-side second bonding pattern 421, the third through-hole 442, and the other connection terminals 432 are formed in one rectangular parallelepiped substrate, and hermetically sealed by this substrate, and the other rectangular parallelepiped substrate is formed. The second through hole 441 and the one connection terminal 431 are formed. According to this configuration, the pair of connection terminals (one connection terminal 431 and the other connection terminal 432) can be completely separated, and a short circuit can be prevented. Further, when two rectangular parallelepiped second sealing members 4 are formed of a metal material instead of a glass wafer, there is no need to form third through holes 442, and the number of through holes is reduced, contributing to downsizing. it can.

  Moreover, in this Embodiment, although the 1st extraction electrode 223 and the 2nd extraction electrode 224 as shown in FIGS. 1-7 are formed, it is not limited to this, The 1st extraction electrode 223, the 1st extraction electrode Cr is used for the uppermost layer at an arbitrary position of the two extraction electrodes 224, and there is a gap between the first extraction electrode 223 and the second extraction electrode 224 and the vibration side first bonding pattern 251 and the vibration side second bonding pattern 252. There may be. In particular, the gap is preferably provided on the vibration side sealing portion 25. By adopting such a configuration, the first extraction electrode 223, the second extraction electrode 224, the vibration side first bonding pattern 251, and the vibration side second bonding pattern 252 before the heat-melt bonding in the manufacturing process are performed. Will not be electrically connected. As a result, various inspections for only the excitation electrodes (first excitation electrode 221 and second excitation electrode 222) can be performed in the inspection process for performing vibration inspection, and the degree of freedom of vibration inspection is increased.

  A glass epoxy substrate may be used for the function unit 7 shown in FIGS. In the case of using a glass-epoxy substrate, the electrode formed on the glass-epoxy substrate is difficult to perform diffusion bonding described in the previous embodiment, and therefore the electrode is formed by Au bumps. When the electrodes are formed by the Au bumps, the soldering between the function unit 7 (glass epoxy substrate) and the circuit board 61 becomes possible. Since the mounting solder used for joining has a small difference in thermal expansion coefficient from the glass epoxy substrate, it is possible to suppress the occurrence of solder cracks during mounting. Therefore, since it can be set as a highly reliable piezoelectric vibration device, it can be used for in-vehicle mounting. Note that the glass epoxy substrate may be provided with a temperature measuring element unit 73 shown in FIG. 8, a heater unit 77 shown in FIG. 10, and an inductance unit 74 shown in FIGS.

  In this embodiment, a crystal resonator is used as the piezoelectric vibration device. However, the present invention is not limited to this, and a crystal oscillator (see FIG. 19) may be used as described below. Hereinafter, a case where the present invention is applied to a crystal oscillator as a piezoelectric vibration device that performs piezoelectric vibration will be described. For the sake of convenience, the same reference numerals are assigned to the same components as those of the crystal unit 101 described above. Further, the operational effects produced by the common configuration are the same as those of the crystal resonator 101 shown in FIG.

-Crystal oscillator-
The crystal oscillator 102 according to the present embodiment is electrically connected to the circuit board 61 and serves as a basis for oscillation in the circuit board 61. As shown in FIG. A first sealing electrode that covers the first excitation electrode 221 (see FIG. 22) of the crystal diaphragm 2 and the first excitation electrode 221 formed on the one main surface 211 of the crystal diaphragm 2 in an airtight manner. A second member formed in a pair with the first excitation electrode 221 covering the second excitation electrode 222 (see FIG. 23) of the quartz diaphragm 2 on the stop member 3 and the other main surface 212 of the quartz diaphragm 2. A second sealing member 4 that hermetically seals the excitation electrode 222 and an electronic component element (IC5 in the present embodiment) other than the piezoelectric vibration element mounted on the first sealing member are provided.

  In this crystal oscillator 102, the crystal diaphragm 2 and the first sealing member 3 are joined, and the crystal diaphragm 2 and the second sealing member 4 are joined to constitute a package 12 having a sandwich structure. And the 1st sealing member 3 and the 2nd sealing member 4 are joined via the crystal diaphragm 2, and the internal space 13 of the package 12 is formed, In this internal space 13 of this package 12, crystal | crystallization The vibration part 23 including the first excitation electrode 221 and the second excitation electrode 222 formed on both main surfaces 211 and 212 of the diaphragm 2 is hermetically sealed. As shown in FIG. 19, the internal space 13 is offset toward one end side (left side in plan view) of the package 12 in plan view. The function unit 7 is provided in the package 12 having the sandwich structure, so that the function expansion type crystal oscillator 102 is obtained.

  The crystal oscillator 102 according to the present embodiment has a package size of 1.2 × 1.0 mm and is small and low-profile. In addition, with the miniaturization, the package 12 uses the through holes (fourth through hole 262 to eighteenth through hole 446) to conduct the electrodes without forming a castellation.

  Next, each configuration of the crystal oscillator 102 will be described with reference to FIGS. Here, each member constituted as a single unit to which the constituent members of the crystal oscillator 102 are not joined will be described.

  As shown in FIGS. 22 and 23, the crystal diaphragm 2 is made of a quartz crystal substrate, which is a piezoelectric material, and its main surfaces (one main surface 211 and the other main surface 212) are formed as flat smooth surfaces (mirror finishing). Has been.

  Further, a pair of (paired) excitation electrodes (a first excitation electrode 221 and a second excitation electrode 222) are formed on both main surfaces 211 and 212 (one main surface 211 and the other main surface 212) of the crystal diaphragm 2. Has been. The two main surfaces 211 and 212 are formed with two notches 24 (penetrating shape) so as to surround the pair of first excitation electrode 221 and second excitation electrode 222, thereby constituting the vibration part 23. . The cutout 24 includes a concave body 241 in plan view (three rectangles in plan view, each of which is formed by extending two rectangles from both ends of one rectangle in plan view in a direction perpendicular to the longitudinal direction of the rectangle). A plan view rectangular body 242 and a plan view concave shape body 241 and the plan view rectangular shape body 242 between the first excitation electrode 221 and the second excitation electrode 222 outside the function unit 7. A conduction path 213 is provided in which extraction electrodes (first extraction electrode 223 and second extraction electrode 224) for extraction to the electrode terminal are arranged. Regarding the electrode pattern, the first extraction electrode 223 and the second extraction electrode 224 extracted from the pair of the first excitation electrode 221 and the second excitation electrode 222 respectively include the vibration side first bonding pattern 251 and the vibration side second bonding pattern 252. Is electrically connected to the electrode pattern 33 formed on the first sealing member 3.

  In this quartz crystal vibrating plate 2, the first sealing member 3 and the second sealing member 4 are bonded to the outside along the vibrating portion 23 of both main surfaces 211 and 212 so as to surround the vibrating portion 23. Each of the vibration side sealing portions 25 is provided. As shown in FIGS. 22 and 23, the vibration-side sealing portion 25 is biased to the left of the two main surfaces 211 and 212 in plan view.

  A vibration-side first bonding pattern 251 for bonding to the first sealing member 3 is formed on the vibration-side sealing portion 25 of the one main surface 211 of the crystal diaphragm 2, and the first excitation electrode 221 is the vibration-side first electrode 221. One connection pattern 251 is connected. The vibration-side first bonding pattern 251 includes a base PVD film 2511 formed by physical vapor deposition on one main surface 211 and an electrode PVD formed by physical vapor deposition on the base PVD film 2511 and stacked. A film 2512. In addition, a vibration side second bonding pattern 252 for bonding to the second sealing member 4 is formed on the vibration side sealing portion 25 of the other main surface 212 of the crystal diaphragm 2, and the second excitation electrode 222 is on the vibration side. It is connected to the second bonding pattern 252. The vibration-side second bonding pattern 252 includes a base PVD film 2521 formed by physical vapor deposition on the other main surface 212 and an electrode PVD formed by physical vapor deposition on the base PVD film 2521 and stacked. A film 2522. Note that physical vapor deposition is one type of dry plating, and unlike electroplating or electroless plating of wet plating, there is no surface roughness and airtightness can be ensured. Diffusion bonding can be performed without any problems. The internal space 13 is formed inside (inside) the vibration side first bonding pattern 251 and the vibration side second bonding pattern 252.

  As described above, the vibration-side first bonding pattern 251 and the vibration-side second bonding pattern 252 have the same configuration, and a plurality of layers are stacked on the vibration-side sealing portion 25 of both main surfaces 211 and 212. Then, a Ti layer (or Cr layer) and an Au layer are formed by vapor deposition from the lowermost layer side. Thus, in the vibration side first bonding pattern 251 and the vibration side second bonding pattern 252, the underlying PVD films 2511 and 2521 are made of a single material (Ti (or Cr)), and the electrode PVD films 2512 and 2522 are formed. The electrode PVD films 2512 and 2522 are made of a single material (Au) and are thicker than the underlying PVD films 2511 and 2521. Further, the first excitation electrode 221 and the vibration-side first bonding pattern 251 formed on the one main surface 211 of the crystal diaphragm 2 have the same thickness, and the first excitation electrode 221 and the vibration-side first bonding pattern 251 have the same thickness. The second excitation electrode 222 and the vibration side second bonding pattern 252 formed on the other major surface 212 of the quartz crystal plate 2 have the same thickness, and the second excitation electrode is made of the same metal. The surfaces (main surfaces) of 222 and the vibration side second bonding pattern 252 are made of the same metal. The vibration side first bonding pattern 251 and the vibration side second bonding pattern 252 are non-Sn patterns. When the vibration side first and second bonding patterns 251 and 252 are compared with the vibration side (the first excitation electrode 221 and the second excitation electrode 222) with the same metal and the same thickness on the same main surface. If the metal of the uppermost layer (at least the exposed surface) (electrode PVD films 2512, 2522, etc.) is the same, bonding is performed even if the type and thickness of the base metal (base PVD films 2511, 2521) are different. It is possible. Further, in the vibration side first bonding pattern 251 and the sealing side second bonding pattern 421, the electrode PVD films 2512 and 2522 are the surfaces of the scaly body in plan view, respectively. The scale-like body here refers to a form in which the activated and microscopic pieces of metal are superposed like a tatami mat and have no gap (or almost no gap) in plan view. Say.

  Further, as shown in FIGS. 22 and 23, the crystal diaphragm 2 has through holes (fourth through hole 262, fifth through hole 263, sixth through hole 264, seventh through hole 265, and eighth through hole 266. ) And the vibration side second bonding pattern 252 connected to the second excitation electrode 222 is drawn out to the one main surface 211 side through the fourth through hole 262. The fifth through hole 263 is connected to the tenth through hole 342 of the first sealing member 3 and the fifteenth through hole 443 of the second sealing member 4. This is a conduction path for conducting to the first external electrode terminal 721 via the internal electrode terminal 711. The sixth through hole 264 is connected to the eleventh through hole 343 of the first sealing member 3 and the sixteenth through hole 444 of the second sealing member. This is a conduction path for conducting to the second external electrode terminal 722 via the electrode terminal 712. The seventh through hole 265 is connected to the twelfth through hole 344 of the first sealing member 3 and the seventeenth through hole 445 of the second sealing member, and the IC 5 is connected to the third connection terminal 435 and the third internal hole. This is a conduction path for conducting to the third external electrode terminal 723 through the electrode terminal 713. The eighth through hole 266 is connected to the thirteenth through hole 345 of the first sealing member 3 and the eighteenth through hole 446 of the second sealing member, and the IC 5 is connected to the fourth connection terminal 436 and the fourth internal hole. This is a conduction path for conducting to the fourth external electrode terminal 724 via the electrode terminal 714. The fourth through hole 262, the fifth through hole 263, the sixth through hole 264, the seventh through hole 265, and the eighth through hole 266 are formed outside the internal space 13. Further, the fourth through hole 262, the fifth through hole 263, the sixth through hole 264, the seventh through hole 265, and the eighth through hole 266 are not formed inward of the internal space 13. Here, the inside of the internal space 13 means strictly the inside of the inner peripheral surface of the bonding material 11 without including the bonding material 11.

The first sealing member 3 is made of a material having a bending rigidity (secondary moment of section × Young's modulus) of 1000 [N · mm ² ] or less. Specifically, as shown in FIGS. 20 and 21, the first sealing member 3 is a rectangular parallelepiped substrate formed from a single glass wafer, and the other main surface 312 of the first sealing member 3 ( The surface to be bonded to the quartz crystal plate 2 and one main surface 311 (surface on which the IC 5 is mounted) are formed as a flat smooth surface (mirror finish).

  The other main surface 312 of the first sealing member 3 is provided with a sealing-side first sealing portion 32 for joining to the crystal diaphragm 2. As shown in FIG. 21, the first sealing portion 32 on the sealing side is biased to the left side of the first main surface 312 of the first sealing member 3 in a plan view.

  A sealing-side first bonding pattern 321 for bonding to the crystal diaphragm 2 is formed on the sealing-side first sealing portion 32 of the first sealing member 3. The sealing side first bonding pattern 321 has the same width at all positions on the sealing side first sealing portion 32 of the first sealing member 3.

  The sealing-side first bonding pattern 321 is formed by stacking a base PVD film 3211 formed by physical vapor deposition on the first sealing member 3 and a physical vapor deposition on the base PVD film 3211. Electrode PVD film 3212 formed. In this embodiment, Ti (or Cr) is used for the base PVD film 3211 and Au is used for the electrode PVD film 3212. Moreover, the sealing side 1st joining pattern 321 is a non-Sn pattern. Specifically, the sealing side first bonding pattern 321 is configured by laminating a plurality of layers on the sealing side first sealing portion 32 of the other main surface 312, and the Ti layer (or from the lowermost layer side). Cr layer) and Au layer are formed by vapor deposition. In the sealing-side first bonding pattern 321, the electrode PVD film 3212 is the surface of the scaly body in plan view.

  In addition, on one main surface 311 of the first sealing member 3, six electrode patterns 33 including a mounting pad for mounting the IC 5 that is an oscillation circuit element are formed. These six electrode patterns 33 are individually guided to the ninth through hole 341, the tenth through hole 342, the eleventh through hole 343, the twelfth through hole 344, the thirteenth through hole 345, and the fourteenth through hole 346, respectively. Yes. The tenth through-hole 342, the eleventh through-hole 343, the twelfth through-hole 344, and the thirteenth through-hole 345 are through holes for conducting the oscillator, and the ninth through hole 341 (the second excitation electrode 222). Through-holes for connecting the first vibrating electrode 221) and the fourteenth through-holes 346 (through-holes for connecting the first excitation electrode 221) are through-holes for conducting the crystal diaphragm 2.

For the second sealing member 4, a material having a bending rigidity (secondary moment of section × Young's modulus) of 1000 [N · mm ² ] or less is used. Specifically, as shown in FIGS. 24 and 25, the second sealing member 4 is a rectangular parallelepiped substrate formed from one glass wafer, and one main surface 411 ( The surface to be bonded to the crystal diaphragm 2 is formed as a flat smooth surface (mirror finish).

  The main surface 411 of the second sealing member 4 is provided with a sealing-side second sealing portion 42 for joining to the crystal diaphragm 2. As shown in FIG. 24, the second sealing portion 42 on the sealing side is biased to the left of the main surface 411 of the second sealing member 4 in the plan view.

  In addition, on the other main surface 412 of the second sealing member 4 (an outer main surface that does not face the crystal diaphragm 2), an external electrode terminal that directly meets the circuit board 61 is formed (FIG. 26, FIG. 26). 27), four connection terminals (first connection terminal 433, second connection terminal 434, third connection terminal 435, and fourth connection terminal 436) that can be electrically connected are formed. The first connection terminal 433, the second connection terminal 434, the third connection terminal 435, and the fourth connection terminal 436 are formed at four corners, respectively. These connection terminals (first connection terminal 433, second connection terminal 434, third connection terminal 435, and fourth connection terminal 436) are the underlying PVD film 4331 formed by physical vapor deposition on the other main surface 412. , 4341, 4351, 4361, and electrode PVD films 4332, 4342, 4352, 4362 formed by physical vapor deposition on the underlying PVD films 4331, 4341, 4351, 4361. Further, the underlying PVD films 4331, 4341, 4351, and 4361 of the connection terminals (the first connection terminal 433, the second connection terminal 434, the third connection terminal 435, and the fourth connection terminal 436) are the vibration-side first bonding patterns described above. Each of the underlying PVD films 2511, 2521, 3211, and 4211 of 251, the vibration-side second bonding pattern 252, the sealing-side first bonding pattern 321, and the sealing-side second bonding pattern 421 has the same thickness.

  In addition, a sealing-side second bonding pattern 421 for bonding to the crystal diaphragm 2 is formed on the sealing-side second sealing portion 42 of the second sealing member 4. The sealing side second bonding pattern 421 has the same width at all positions on the sealing side second sealing portion 42 of the second sealing member 4.

  The sealing-side second bonding pattern 421 is formed by stacking a base PVD film 4211 formed by physical vapor deposition on the second sealing member 4 and a physical vapor deposition on the base PVD film 4211. The electrode PVD film 4212 is formed. Note that in this embodiment, Ti (or Cr) is used for the base PVD film 4211 and Au is used for the electrode PVD film 4212. Further, the sealing-side second bonding pattern 421 is a non-Sn pattern. Specifically, the sealing-side second bonding pattern 421 is configured by laminating a plurality of layers on the sealing-side second sealing portion 42 of the one main surface 411, and the Ti layer (or from the lowermost layer side) Cr layer) and Au layer are formed by vapor deposition. In addition, in the sealing-side second bonding pattern 421, the electrode PVD film 4212 becomes the surface of the scaly body in plan view.

  Further, as shown in FIGS. 19, 24, and 25, the second sealing member 4 has four through holes (a fifteenth through hole 443, a sixteenth through hole 444, a seventeenth through hole 445, and an eighteenth through hole 446. ) Is formed. The fifteenth through-hole 443, the sixteenth through-hole 444, the seventeenth through-hole 445, and the eighteenth through-hole 446 are disposed outside the internal space 13, and the fifteenth through-hole 443, the sixteenth through-hole 444, the seventeenth through-hole. The through hole 445 and the eighteenth through hole 446 are not formed inward of the internal space 13.

  In the crystal oscillator 102 having the above-described configuration, the crystal diaphragm 2 and the first sealing member 3 are connected to the vibration-side first bonding pattern 251 and the sealing-side first without using a separate bonding-dedicated material as in the prior art. Diffusion bonding is performed in a state in which the bonding pattern 321 is overlaid, and diffusion bonding is performed in a state in which the crystal diaphragm 2 and the second sealing member 4 are overlaid on the vibration side second bonding pattern 252 and the sealing side second bonding pattern 421. As a result, the package 12 having the sandwich structure shown in FIG. 19 is manufactured. The vibration side first bonding pattern 251 and the sealing side first bonding pattern 321 itself become the bonding material 11 generated after diffusion bonding, and the vibration side second bonding pattern 252 and the sealing side second bonding pattern 421 itself diffuse. It becomes the joining material 11 produced | generated after joining. In this embodiment, diffusion bonding is performed at room temperature (5 degrees to 35 degrees). However, the present invention is not limited to room temperature diffusion bonding, and may be diffusion bonded at a temperature not lower than room temperature and lower than 230 degrees. In particular, when diffusion bonding is performed at a temperature of 200 ° C. or higher and lower than 230 ° C., the melting point of the Pb-free solder is less than 230 ° C. and the Au recrystallization temperature (200 ° C.) or higher is reached. The stable region can be stabilized. In the present embodiment, since a bonding-dedicated material such as Au—Sn is not used, there is no generation of plating gas, binder gas, metal gas, or the like. Therefore, the recrystallization temperature can be made higher than Au.

  In the package 12 manufactured here, as described above, the sealing-side first bonding pattern 321 and the vibration-side first bonding pattern 251 are bonded by diffusion bonding, and the sealing-side second bonding pattern 421 and the vibration-side are bonded. The second bonding pattern 252 is bonded. In addition to this bonding, the sealing side first bonding pattern 321 and the vibration side first bonding pattern 251 are pressure diffusion bonded, and the sealing side second bonding pattern 421. And the vibration side second bonding pattern 252 may be pressure diffusion bonded. In this case, it becomes easy to secure the joint location by pressurizing (the joint area can be substantially increased), and the joining by only the diffusion joining can be performed more favorably without using the high temperature heating.

  Further, in the package 12 manufactured here, the first sealing member 3 and the crystal diaphragm 2 have a gap of 1.00 μm or less, and the second sealing member 4 and the crystal diaphragm 2 are 1 It has a gap of 0.000 μm or less. That is, the thickness of the bonding material 11 between the first sealing member 3 and the crystal vibrating plate 2 is 1.00 μm or less, and the bonding material 11 between the second sealing member 4 and the crystal vibrating plate 2 The thickness is 1.00 μm or less (specifically, 0.15 μm to 1.00 μm in the Au—Au bonding of the present embodiment). For comparison, a conventional metal paste sealing material using Sn has a thickness of 5 μm to 20 μm.

  Moreover, in the package 12 manufactured here, as shown in FIG. 19, the internal space 13 is located on the left side in plan view. Further, the sealing side first bonding pattern 321 formed on the first sealing member 3 and the sealing side second bonding pattern 421 formed on the second sealing member 4 do not overlap in plan view. Specifically, the planar view area in the sealing-side first bonding pattern 321 is wider than the planar view area in the sealing-side second bonding pattern 421. In the present embodiment, the planar view area in the sealing-side first bonding pattern 321 is wider than the planar view area in the sealing-side second bonding pattern 421, but the present invention is not limited to this. The planar view region in the stop-side second joining pattern 421 may be wider than the planar view region in the sealing-side first joining pattern 321. However, since the connection terminals (the first connection terminal 433, the second connection terminal 434, the third connection terminal 435, and the fourth connection terminal 436) are formed on the second sealing member, the sealing-side first bonding pattern The planar view area in 321 is wider than the planar view area in the sealing-side second bonding pattern 421. Therefore, the wiring pattern can be easily routed (conducting a conduction path), and the wiring pattern routing area (conduction ensuring area) can be increased.

  In addition, compared with the vibration side first bonding pattern 251 and the vibration side second bonding pattern 252 formed on the crystal diaphragm 2, the sealing side first bonding pattern 321 formed on the first sealing member 3 and the first 2 The width | variety of the sealing side 2nd joining pattern 421 formed in the sealing member 4 is wide.

  In this embodiment, a space for providing the IC 5 need not be provided in the crystal diaphragm 2, and the package can be reduced in height. Further, it is possible to cope with an arbitrary oscillation condition simply by changing the pattern for the IC 5 formed on the one main surface 311 of the first sealing member 3. Further, marking can be performed on the back surface of the IC 5, and special marking is not required even when a transparent material is used for the first sealing member 3. Further, in the prior art, since the first sealing member 3 and the crystal diaphragm 2 are provided with a recess and the IC 5 is always mounted in the recess, the outer shape of the piezoelectric vibration device is always larger than the IC 5. However, according to the present embodiment, in the first sealing member 3, the IC 5 is provided on the one main surface 311 and the other main surface 312 is joined to the one main surface 211 of the crystal diaphragm 2. The size and the size of the crystal oscillator 102 can be made the same, which is advantageous for miniaturization and low profile.

  In addition, compared with the vibration side first bonding pattern 251 and the vibration side second bonding pattern 252 formed on the crystal diaphragm 2, the sealing side first bonding pattern 321 formed on the first sealing member 3 and the first 2 The sealing-side second bonding pattern 421 formed on the sealing member 4 is wide.

  In the present embodiment, the external electrode terminals (first external electrode terminal 721, second external electrode terminal 722, third external electrode terminal 723, direct connection with the circuit board 61 are directly connected to the package 12 manufactured as described above. A function unit 7 (FIGS. 26 and 27) in which a fourth external electrode terminal 724, a fifth external electrode terminal 725, and a sixth external electrode terminal 726) are formed is provided. Various functions are provided depending on the elements mounted on the function unit 7. Crystal oscillator 102 (function-expanded crystal oscillator 102) for various applications. Specifically, the second sealing member 4 and the function part 7 are connected to the connection terminals (first connection terminal 433, second connection terminal 434, third connection terminal 435, fourth connection terminal 436) and internal electrode terminals ( The first internal electrode terminal 711, the second internal electrode terminal 712, the third internal electrode terminal 713, and the fourth internal electrode terminal 714) are diffusion-bonded in a superposed state to manufacture the function expansion type crystal oscillator 102. Then, as shown in FIG. 19, since the function expansion type crystal oscillator 102 is directly coupled to the circuit board 61 using the fluid conductive bonding material 62, it is mounted on the crystal resonator 101, the IC 5, and the function unit 7. Each element is electrically connected to the circuit board 61. In the function expansion type crystal oscillator 102 manufactured here, the second sealing member 4 and the function unit 7 have a gap of 1.00 μm or less (specifically, the Au − of the present embodiment). (0.15 μm to 1.00 μm for Au bonding). For comparison, a conventional metal paste sealing material using Sn has a thickness of 5 μm to 20 μm.

  As shown in FIG. 26, one main surface 701 of the function portion 7 (inner main surface facing the vibration portion 23) is a connection terminal (first connection terminal 433, first connection terminal) formed on the second sealing member 4. Internal electrode terminals (first internal electrode terminal 711, second internal electrode terminal) which are directly connected to the second connection member 434, the third connection terminal 435, the fourth connection terminal 436) and electrically connected to the second sealing member 4. 712, the third internal electrode terminal 713, the fourth internal electrode terminal 714) and the fifth internal electrode terminal 715 and the sixth internal electrode terminal 716 that connect elements (for example, heater elements, temperature control elements, L elements, etc.) Is formed. The first internal electrode terminal 711 is electrically connected directly to the first connection terminal 433, the second internal electrode terminal 712 is electrically connected directly to the second connection terminal 434, and the third internal electrode terminal 713 is The third connection terminal 435 is electrically connected directly, and the fourth internal electrode terminal 714 is electrically connected directly to the fourth connection terminal 436. These internal electrode terminals (first internal electrode terminal 711, second internal electrode terminal 712, third internal electrode terminal 713, fourth internal electrode terminal 714, fifth internal electrode terminal 715, sixth internal electrode terminal 716) are Physical PVD films 7111, 7121, 7131, 7141, 7151, 7161 and physical PVD films 7111, 7121, 7131, 7141, 7151, 7161 formed by physical vapor deposition on the main surface 701 are formed. The electrode PVD films 7112, 7122, 7132, 7142, 7152, and 7162 are formed by phase growth. In addition, the base of the internal electrode terminals (first internal electrode terminal 711, second internal electrode terminal 712, third internal electrode terminal 713, fourth internal electrode terminal 714, fifth internal electrode terminal 715, sixth internal electrode terminal 716) The PVD films 7111, 7121, 7131, 7141, 7151, and 7161 are the vibration side first bonding pattern 251, vibration side second bonding pattern 252, sealing side first bonding pattern 321, and sealing side second bonding pattern 421. And connection terminals (first connection terminal 433, second connection terminal 434, third connection terminal 435, fourth connection terminal 436) for the underlying PVD films 2511, 2521, 3211, 4211, 4331, 4341, 4351, 4361 Have the same thickness.

  In addition, on the other main surface 702 of the function unit 7 (an outer main surface that does not face the vibration unit 23), as shown in FIG. 27, there are six externally connected directly to the circuit board 61 and electrically connected thereto. Electrode terminals (first external electrode terminal 721, second external electrode terminal 722, third external electrode terminal 723, fourth external electrode terminal 724, fifth external electrode terminal 725, and sixth external electrode terminal 726) are formed. . The first external electrode terminal 721 is electrically connected directly to the first internal electrode terminal 711 via the function part through hole 703, and the second external electrode terminal 722 is connected to the second internal electrode terminal 712 through the function part. The third external electrode terminal 723 is electrically connected directly to the third internal electrode terminal 713 via the function part through hole 703, and the fourth external electrode terminal 724 is electrically connected to the fourth external electrode terminal 724 via the hole 703. The fifth internal electrode terminal 714 is electrically connected directly to the fifth internal electrode terminal 714 via the function part through hole 703, and the fifth external electrode terminal 725 is electrically connected to the fifth internal electrode terminal 715 via the function part through hole 703. The sixth external electrode terminal 726 is electrically connected directly to the sixth internal electrode terminal 716 through the function part through hole 703. These six external electrode terminals (first external electrode terminal 721, second external electrode terminal 722, third external electrode terminal 723, fourth external electrode terminal 724, fifth external electrode terminal 725, and sixth external electrode terminal 726) are , Physical PVD films 7211, 7221, 7231, 7241, 7251, 7261, and physical PVD films 7211, 7221, 7231, 7241, 7251, 7261 formed by physical vapor deposition on the other main surface 702. Electrode PVD films 7212, 7222, 7232, 7242, 7252, and 7262 formed by stacking by chemical vapor deposition. Further, the vibration side first bonding pattern 251, the vibration side second bonding pattern 252, the sealing side first bonding pattern 321, the sealing side second bonding pattern 421, and connection terminals (first connection terminal 433, second connection). Terminal 434, third connection terminal 435, fourth connection terminal 436) and internal electrode terminals (first internal electrode terminal 711, second internal electrode terminal 712, third internal electrode terminal 713, fourth internal electrode terminal 714, fifth Internal electrode terminal 715, sixth internal electrode terminal 716) with each underlying PVD film 2511, 2521, 3211, 4211, 4331, 4341, 4351, 4361, 7111, 7121, 7131, 7141, 7151, 7161 Electrode terminals (first external electrode terminal 721, second external electrode terminal 722, third external electrode terminal 723, fourth external electrode terminal 724, fifth external Terminal 725, sixth base PVD film 7211,7221,7231,7241,7251,7261 external electrode terminal 726) is thicker.

  The thickness of the bonding pattern in which the sealing-side first bonding pattern 321 and the vibration-side first bonding pattern 251 in the package 12 are diffusion-bonded is as follows: the sealing-side second bonding pattern 421 and the vibration-side second bonding pattern The external electrode terminals (first external electrode terminal 721, second external electrode terminal 722, third external electrode terminal 723, fourth external electrode) that are electrically connected to the outside are the same in thickness as the bonding pattern formed by diffusion bonding with 252. Unlike the thicknesses of the electrode terminal 724, the fifth external electrode terminal 725, and the sixth external electrode terminal 726), external electrode terminals (first external electrode terminal 721, second external electrode terminal 722, third external electrode terminal 723, fourth) The external electrode terminal 724, the fifth external electrode terminal 725, and the sixth external electrode terminal 726) are thicker than the other patterns.

  The function section 7 shown in FIGS. 26 and 27 is provided with a heater section 77 having a heater element. The heater unit 77 is a meandering electrode film formed on one main surface 701 of the function unit 7. One end of the electrode film of the heater unit 77 is electrically connected to the fifth internal electrode terminal 715, and the heater unit The other end of the electrode film 77 is electrically connected to the sixth internal electrode terminal 716. The function unit 7 can have intermediate characteristics between TCXO and OCXO. In addition, although the heater part 77 of this embodiment is the shape meandering between internal electrode terminals, it is not restricted to this shape, The square shape covering the substantially whole surface of the one main surface 701 may be sufficient.

  As described above, the function unit 7 shown in FIGS. 26 and 27 is provided with the heater unit 77 provided with the heater element, but the function unit 7 is limited to the one provided with the heater unit 77. The form of the function unit 7 is not limited as long as it has an arbitrary function and forms an external electrode terminal. For example, the one provided with the temperature measuring element 73 as described above (see FIG. 8), the one provided with the inductance part 74 of the L element (see FIGS. 14 and 15), the substrate of the function part 7 Even if it is an epoxy board | substrate and a glass substrate, it has the same effect. In the crystal oscillator 102, the substrate of the function unit 7 may be a ceramic substrate. In this case, when the function expansion type crystal oscillator 102 is bonded to the circuit board 61 via the fluid conductive bonding material 62, The creeping up of the fluid conductive bonding material 62 can be confirmed.

  In the crystal oscillator 102 according to the above-described embodiment, the external electrode terminals are the first external electrode terminal 721, the second external electrode terminal 722, the third external electrode terminal 723, the fourth external electrode terminal 724, and the fifth external electrode. Although the six terminals of the electrode terminal 725 and the sixth external electrode terminal 726 are used, the present invention is not limited to this, and the present invention can be applied to any external terminal having four terminals or eight terminals. it can.

  Further, as another specific example, as shown in FIGS. 28 and 29, six external electrode terminals 765 are formed on the other main surface 702 of the function unit 7. 12 may be bonded, and an optional electronic component element 8 may be bonded adjacent to the package 12. A temperature compensation circuit may be added to the electronic component element 8 using a thermistor. In addition, a plurality of timing devices may be used by using the package 12 including the first sealing member 3, the second sealing member 4, and the crystal diaphragm 2 as the electronic component element 8. In this case, a plurality of packages 12 can be mounted on one substrate (function unit 7). As a result, as shown in FIG. 29, the Vcc external electrode terminal 765 and the GND external electrode terminal 765 are shared. Thus, high-density mounting can be achieved.

  As described above, the crystal oscillator 102 according to the present embodiment has the same operational effects as the above-described sandwiched crystal resonator 101. That is, according to the crystal oscillator 102 according to the present embodiment, it is possible to cope with various uses such as VCXO, SPXO, TCXO, OCXO. Thus, since the crystal oscillator 102 having an arbitrary function such as VCXO, SPXO, TCXO, OCXO or the like can be obtained, the degree of freedom of the function of the crystal oscillator 102 can be increased.

  In addition, since the IC 5 is provided on the one main surface 311 of the first sealing member 3 and the sealing side first bonding pattern 321 is formed on the other main surface 312, the sealing side first bonding pattern is formed on the one main surface 311. Without forming 321, the patterning of the oscillation circuit pattern drawn from the IC 5 can be simplified. As a result, the IC 5 having various characteristics can be mounted. In addition, since the routing of the IC 5 and the oscillation circuit pattern can be simplified, it contributes to a reduction in height. In particular, in the conventional package type structure, a package that is necessarily larger than the planar view size of the oscillation circuit element is necessary. However, according to the present embodiment, the planar view size equivalent to the size of the IC 5 can be obtained. Can be downsized. Further, by simply changing the patterning of the oscillation circuit pattern, it is possible to mount ICs 5 having various characteristics, and even when producing a variety of products corresponding to various applications, The second sealing member 4 can be shared, which contributes to manufacturing cost reduction.

  Moreover, since a transparent member is used for the first sealing member 3, the second sealing member 4, and the crystal diaphragm 2, normal marking cannot be performed, but one main surface 311 of the first sealing member 3. Since IC5 is provided in the IC, marking can be performed using IC5.

  It should be noted that the present invention can be implemented in various other forms without departing from the spirit, gist, or main features. Therefore, the above-described embodiment is merely an example in all respects and should not be interpreted in a limited manner. The scope of the present invention is indicated by the claims, and is not restricted by the text of the specification. Further, all modifications and changes belonging to the equivalent scope of the claims are within the scope of the present invention.

  For example, as described above, the piezoelectric vibration device having the sandwich structure is used in the two embodiments, but the present invention is not limited to the piezoelectric vibration device having the sandwich structure, and the lid for hermetically sealing the piezoelectric vibration plate itself. The present invention can also be applied to a piezoelectric vibration device having a package structure including a base and a base.

  The present invention is suitable for a crystal vibration device (a crystal resonator, a crystal oscillator, or the like) using quartz as a material for a substrate of a piezoelectric vibration plate.

101 Crystal oscillator 102 Crystal oscillator 11 Bonding material 12 Package 13 Internal space 2 Crystal diaphragm 211 One main surface 212 Other main surface 213 Conducting path 221 First excitation electrode 222 Second excitation electrode 223 First extraction electrode 224 Second extraction electrode 23 vibration part 24 notch part 241 concave shape body 242 planar rectangular body 25 vibration side sealing part 251 vibration side first bonding pattern 2511 base PVD film 2512 electrode PVD film 252 vibration side second bonding pattern 2521 base PVD Film 2522 Electrode PVD film 261 First through hole 262 Fourth through hole 263 Fifth through hole 264 Sixth through hole 265 Seventh through hole 266 Eighth through hole 3 First sealing member 311 One main surface 312 Other main surface 32 Sealing side first sealing portion 321 Sealing side first bonding pattern 3211 Base PVD film 3212 Electrode PVD film 33 Electrode pattern 341 9th through hole 342 10th through hole 343 11th through hole 344 12th through hole 345 13th through hole 346 14th through hole 4 2nd sealing member 411 One main surface 412 Other main surface 42 Sealing side first 2 sealing portion 421 sealing side second bonding pattern 4211 base PVD film 4212 electrode PVD film 431 one connection terminal 4311 base PVD film 4312 electrode PVD film 432 other connection terminal 4321 base PVD film 4322 electrode PVD film 433 first connection terminal 4331 Base PVD film 4332 Electrode PVD film 434 Second connection terminal 4341 Base PVD film 4342 Electrode PVD film 435 Third connection terminal 4351 Base PVD film 4352 Electrode PVD film 436 Fourth connection terminal 4361 Base PVD film 4362 Electrode PVD film 441 Second penetration Hole 442 Third through hole 443 Fifteenth through hole 444 Sixteen through Holes 445 17th through hole 446 18th through hole 5 IC
61 circuit board 62 fluid conductive bonding material 7 function part 701 one main surface 702 other main surface 703 function part through-hole 711 first internal electrode terminal 7111 base PVD film 7112 electrode PVD film 712 second internal electrode terminal 7121 base PVD film 7122 Electrode PVD film 713 Third internal electrode terminal 7131 Base PVD film 7132 Electrode PVD film 714 Fourth internal electrode terminal 7141 Base PVD film 7142 Electrode PVD film 715 Fifth internal electrode terminal 7151 Base PVD film 7152 Electrode PVD film 716 Sixth internal Electrode terminal 7161 Base PVD film 7162 Electrode PVD film 721 First external electrode terminal 7211 Base PVD film 7212 Electrode PVD film 722 Second external electrode terminal 7221 Base PVD film 7222 Electrode PVD film 723 Third external electrode terminal 7231 Base PVD film 7 32 Electrode PVD film 724 Fourth external electrode terminal 7241 Base PVD film 7242 Electrode PVD film 725 Fifth external electrode terminal 7251 Base PVD film 7252 Electrode PVD film 726 Sixth external electrode terminal 7261 Base PVD film 7262 Electrode PVD film 73 Temperature measuring element Part 74 inductance part 741 through hole 765 for L element external electrode terminal 77 heater part 8 electronic component element

Claims (4)

In the piezoelectric vibration device that is electrically connected to the circuit board and is the basis of oscillation in the circuit board,
A piezoelectric diaphragm in which a first excitation electrode is formed on one main surface of the substrate and a second excitation electrode paired with the first excitation electrode is formed on the other main surface of the substrate;
A first sealing member made of crystal or glass that covers the first excitation electrode of the piezoelectric diaphragm;
A second sealing member made of crystal or glass that covers the second excitation electrode of the piezoelectric diaphragm is provided,
The piezoelectric vibration including the first excitation electrode and the second excitation electrode, wherein the first sealing member and the piezoelectric diaphragm are joined, and the second sealing member and the piezoelectric diaphragm are joined. An internal space in which the vibration part of the plate is hermetically sealed is formed,
A vibration-side first bonding pattern for bonding to the first sealing member is formed on one main surface of the piezoelectric diaphragm, and the vibration-side first bonding pattern is formed on the one main surface with physical air. A base PVD film formed by phase growth and an electrode PVD film formed by physical vapor deposition on the base PVD film,
A vibration-side second bonding pattern for bonding to the second sealing member is formed on the other main surface of the piezoelectric diaphragm, and the vibration-side second bonding pattern is formed on the other main surface with physical air. A base PVD film formed by phase growth and an electrode PVD film formed by physical vapor deposition on the base PVD film,
The first sealing member is formed with a sealing-side first bonding pattern for bonding to the piezoelectric diaphragm, and the sealing-side first bonding pattern is formed on the first sealing member with physical air. A base PVD film formed by phase growth and an electrode PVD film formed by physical vapor deposition on the base PVD film,
The second sealing member is formed with a sealing-side second bonding pattern for bonding to the piezoelectric diaphragm, and the sealing-side second bonding pattern is formed on the second sealing member. A base PVD film formed by phase growth and an electrode PVD film formed by physical vapor deposition on the base PVD film,
The sealing side first bonding pattern and the vibration side first bonding pattern are diffusion bonded, and the sealing side second bonding pattern and the vibration side second bonding pattern are diffusion bonded.
In the second sealing member, on the main surface not facing the piezoelectric diaphragm, a connection terminal is formed for diffusion bonding to a function part in which an external electrode terminal directly mated with the circuit board is formed. A base PVD film formed by physical vapor deposition on a main surface not facing the piezoelectric diaphragm, and an electrode PVD film formed by physical vapor deposition on the base PVD film A piezoelectric vibration device characterized by that. The piezoelectric vibration device according to claim 1,
The function part is diffusion bonded to the second sealing member,
The piezoelectric vibration device, wherein the external electrode terminal electrically connected to a circuit board is formed in the function part. The piezoelectric vibration device according to claim 1 or 2,
In the first sealing member, the oscillation circuit element is provided on one main surface, and the sealing-side first bonding pattern is formed on the other main surface. The piezoelectric vibration device according to any one of claims 1 to 3,
The first sealing member and the piezoelectric diaphragm have a gap of 1.00 μm or less, and the second sealing member and the piezoelectric diaphragm have a gap of 1.00 μm or less. Piezoelectric vibration device.

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