JP2015134952A - Pulverization and classification device and aerosol deposition device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a pulverization and classification device which has simple structure and can pulverize coarse particles among raw material particles in aerosol into fine particles, can classify coarse particles from the aerosol and efficiently guide only fine particles to an injection nozzle.SOLUTION: There is provided the pulverization and classification device that pulverizes coarse particles among raw material particles included in aerosol into fine particles and classifies coarse particles from the aerosol. The pulverization and classification device includes a tank 2 having a collision surface 5 to which the aerosol is injected, an introduction pipe 3 which introduces the aerosol into the tank 2, and a guide-out pipe 4 which guides the aerosol out of the tank 2. An introduction port 30 of the introduction pipe 3 is arranged to face the collision surface 5 at a predetermined interval. A guide-out port 40 of the guide-out pipe 4 is arranged in the tank 2 in such a way that a classification space S where fine particles fly up is interposed between the guide-out port 40 and the collision surface 5.

Description

The present invention relates to a pulverizing / classifying apparatus and an aerosol deposition apparatus used in a film forming apparatus (aerosol deposition apparatus) for forming a thin film on a substrate by an aerosol deposition method.

  Conventionally, raw material particles such as ceramic powder aerosolized by mixing with a carrier gas are introduced into a decompressed film forming chamber, and based on the differential pressure between the internal pressure of the film forming chamber and the internal pressure of the injection nozzle. A film forming apparatus (aerosol deposition apparatus) is known that forms a thin film on a substrate at room temperature by causing the raw material particles to collide and adhere to the substrate at high speed from an injection nozzle.

  In such an aerosol deposition apparatus, in order to form a dense thin film on a substrate that has good bondability with a base material, the raw material particles that collide with the substrate have a size (diameter) of 0.1 μm to The fine particles are required to be as small as about 1.0 μm and uniform in size. Therefore, the agglomerated raw material particles in the aerosol and the large raw material particles (hereinafter referred to as “coarse particles”) are pulverized and pulverized, and only the small raw material particles (fine particles) are led to the injection nozzle. A classification device is used (see, for example, Patent Document 1).

  In Patent Document 1, a shielding plate is horizontally disposed in a pulverization / classification apparatus, aerosol is sprayed from a nozzle disposed opposite to the shielding plate toward the shielding plate, and raw material particles are caused to collide with the shielding plate. Yes. Thereby, the coarse particles of the raw material particles are pulverized and atomized by impact, and the coarse particles are deposited on the shielding plate and removed from the aerosol. On the other hand, the fine particles are swept away by the aerosol flow and led out from the outlet port below the shielding plate. A fine thin film can be formed by spraying the fine particles toward the substrate and colliding and adhering to the substrate.

Japanese Patent No. 2998730

  However, as in Patent Document 1, coarse particles and fine particles are separated by a shielding plate facing the direction in which the aerosol flows, and further, the fine particles separated in the direction in which the aerosol flows flows to be derived from the pulverization / classification device. In addition, the separation of coarse particles and fine particles on the shielding plate is not performed sufficiently, so that the fine particles are deposited on the shielding plate, or the coarse particles are mixed with the fine particles and are derived from the pulverizing / classifying device. Cannot be derived from the crushing / classifying device.

  The present invention has been made to solve the above problems, and with a simple structure, coarse particles are pulverized and atomized out of the raw material particles in the aerosol, and the coarse particles are classified from the aerosol to obtain only fine particles. An object of the present invention is to provide a pulverizing / classifying device and an aerosol deposition device that can efficiently lead out the water to the injection nozzle.

The above object of the present invention is a pulverizing / classifying device used for an aerosol deposition apparatus, which pulverizes coarse particles of fine particles contained in an aerosol into fine particles and classifies the coarse particles from the aerosol. A tank having a collision surface, an introduction pipe for introducing the aerosol into the tank, and a lead-out pipe for deriving the aerosol from the tank. The introduction port of the introduction pipe has a predetermined distance from the collision surface. The outlet of the outlet pipe is disposed so as to be opposed to each other, and the outlet of the outlet pipe is disposed in the tank so that a classification space for causing the particles to rise upward is interposed between the collision surface and the outlet. This is achieved by a classifier.

  In a preferred embodiment of the crushing / classifying apparatus of the present invention, the outlet of the outlet pipe is located above the collision surface.

  In another preferred embodiment of the crushing / classifying apparatus of the present invention, the inside of the tank is divided into a crushing space in which the classification space and the collision surface are provided, and the inlet of the introduction pipe is the crushing It is arranged at the upper part of the space, the outlet of the outlet pipe is arranged at the upper part of the classification space, and the classification space and the pulverization space communicate with each other at the lower part. In this embodiment, a partition plate that divides the internal space of the tank into two may be provided in the tank, and the tank is formed in a substantially U shape in which two pipe bodies are connected at the lower part. May be.

  In the pulverizing / classifying apparatus having the above-described configuration, it is preferable that the outlet of the outlet pipe is opened so as to face upward.

  The above object of the present invention is to connect an aerosol generator for generating an aerosol by dispersing raw material particles in a carrier gas, and to pulverize coarse particles out of the raw material particles contained in the aerosol into fine particles. A pulverization / classification apparatus having the above-described configuration for classifying particles from an aerosol; an injection nozzle connected to the pulverization / classification apparatus for injecting aerosol derived from the pulverization / classification apparatus; It is also achieved by an aerosol deposition apparatus that includes a substrate that is provided so as to face the injection nozzle and from which the aerosol is injected.

  According to the present invention, coarse particles among the raw material particles in the aerosol can be pulverized and atomized with a simple structure, and the coarse particles can be classified from the aerosol so that only the fine particles can be efficiently led to the injection nozzle. Therefore, it is possible to form a dense thin film having a good bondability with the base material on the substrate.

1 is a schematic configuration diagram of an aerosol deposition apparatus according to an embodiment of the present invention. It is sectional drawing which shows schematic structure of the grinding | pulverization / classification apparatus which concerns on one Embodiment of this invention. It is sectional drawing which shows schematic structure of the grinding | pulverization / classification apparatus which concerns on other embodiment. It is sectional drawing which shows schematic structure of the grinding | pulverization / classification apparatus which concerns on other embodiment. It is sectional drawing which shows schematic structure of the grinding | pulverization / classification apparatus which concerns on other embodiment. It is sectional drawing which shows schematic structure of the grinding | pulverization / classification apparatus which concerns on other embodiment. It is sectional drawing which shows schematic structure of the grinding | pulverization / classification apparatus which concerns on other embodiment. It is sectional drawing which shows schematic structure of the grinding | pulverization / classification apparatus which concerns on other embodiment. It is sectional drawing which shows schematic structure of the grinding | pulverization / classification apparatus which concerns on other embodiment.

Embodiments of the present invention will be described below with reference to the accompanying drawings. FIG. 1 is a schematic configuration diagram of an aerosol deposition apparatus 10 in which a pulverization / classification apparatus 1 according to an embodiment of the present invention is used. The aerosol deposition apparatus 10 is a film forming apparatus that forms a thin film on a substrate 14 by an aerosol deposition method (AD method), and includes an aerosol generator 11 that generates aerosol by dispersing raw material particles in a carrier gas, and an aerosol. A pulverization / classification apparatus 1 connected to the generator; an injection nozzle 12 connected to the pulverization / classification apparatus 1; and a substrate 14 provided in the film forming chamber 13 having a reduced pressure so as to face the injection nozzle 12. . Raw material particles such as ceramic powder that has been aerosolized by mixing with a carrier gas are guided into the decompressed film forming chamber 13 and collide and adhere to the substrate 14 from the injection nozzle 12 at a high speed. A thin film of raw material particles is formed.

  The aerosol generator 11 is connected to a gas cylinder 15 serving as a carrier gas supply source by a gas supply path 6A, and a supply pipe 7 at the tip of the gas supply path 6A is disposed in the aerosol generator 11. Further, in the aerosol generator 11, a discharge pipe 8 for discharging the aerosol is disposed. An aerosol supply path 6B is connected to the discharge pipe 8. As an aerosol carrier gas, an inert gas such as argon, nitrogen or helium is used. The flow rate of the carrier gas is adjusted by the mass flow controller 17. The aerosol generator 11 is loaded with raw material particles such as ceramic powder. The raw material particles are mixed and dispersed in the carrier gas supplied from the gas cylinder 15 in the aerosol generator 11 to form an aerosol. The raw material particles are preferably fine particles having a size (average particle diameter) of about 0.1 μm to 1.0 μm. The average particle size can be measured with a laser diffraction particle size distribution measuring device (LA-950V2 manufactured by Horiba, Ltd.). In addition to the small-sized raw material particles (fine particles), the raw material particles include aggregates of small-sized raw material particles (fine particles) and large-sized large-sized raw material particles. (Coarse particles) are included.

  A holder 18 for holding the base material 14 is provided in the film forming chamber 13. The holder 18 is movable and / or rotatable in a horizontal plane while the base material 14 is held by the driving device 9. The holder 18 can also be moved in the direction perpendicular to the horizontal plane by the driving device 9. A vacuum pump 19 is connected to the film forming chamber 13, and the inside of the film forming chamber 13 is kept under reduced pressure by the vacuum pump 19. The injection nozzle 12 is disposed in the film forming chamber 13 so that the injection port 12 </ b> A faces the surface of the substrate 14. The spray nozzle 12 is connected to the lead-out pipe 4 via the aerosol lead-out path 6C, and the aerosol is supplied from the pulverization / classification device 1 to the spray nozzle 12 by the flow of the carrier gas and the suction of the vacuum pump 19. Then, the aerosol is injected from the injection nozzle 12 onto the surface of the base material 14 at a subsonic to supersonic injection speed. The spraying speed of the aerosol is adjusted by the supply pressure of the carrier gas from the gas cylinder 15 and the degree of decompression in the film forming chamber 13.

  In the above configuration, for the aerosol generator 11, the injection nozzle 12, the film forming chamber 13, etc. other than the pulverization / classification apparatus 1, any apparatus / parts that are normally used in the AD method can be used.

  The pulverization / classification apparatus 1 is configured to remove coarse particles (aggregates of large particle diameters and small particle diameters) from fine particles (small particle diameters) among the raw material particles contained in the aerosol supplied from the aerosol generator 11. The raw material particles) and coarse particles are classified from the aerosol to derive the aerosol to the injection nozzle 12. As shown in FIG. 2, the pulverization / classification apparatus 1 of the present embodiment derives the aerosol from the tank 2 having a sealed internal space, the introduction pipe 3 for introducing the aerosol into the tank 2, and the tank 2. A lead-out pipe 4 and a collision surface 5 on which aerosol is injected from the introduction pipe 3 are provided.

The tank 2 has a cylindrical shape, and in the present embodiment, includes a bottomed cylindrical (bottle-shaped) main body 20 and a lid 21 that closes the upper end opening of the main body 20. If the internal volume is too large, the main body 20 may not be able to efficiently extract the raw material particles from the outlet tube 4 to the injection nozzle 12, and if the internal volume is too small, the main body 20 may generate coarse particles from the aerosol introduced by the inlet tube 3. Therefore, the internal volume is formed to a size of about 200 ml to 3000 ml. Moreover, since the inside of the main body part 20 is decompressed, it is preferable that the corner part is formed in a rounded shape to eliminate the corner on the inner surface. As a material of the main-body part 20, it is preferable to have hardness more than glass, and metals, such as glass and SUS, can be used.

  The lid portion 21 is made of, for example, a synthetic resin and can be attached to and detached from the main body portion 20. The introduction pipe 3 and the outlet pipe 4 are fixed to the lid portion 21. The introduction pipe 3 has one end connected to the aerosol supply path 6 </ b> B and the other end extending downward in the main body 20, and a predetermined interval between the introduction port 30 and the bottom surface 20 </ b> A of the main body 20. It is arranged so as to face each other with a gap. The aerosol generated by the aerosol generator 11 is introduced into the tank 2 (main body part 20) of the pulverizing / classifying device 1 through the introduction pipe 3, and is injected to the bottom surface 20A of the tank 2 (main body part 20). In the present embodiment, the bottom surface 20 </ b> A of the tank 2 (main body portion 20) constitutes the collision surface 5, and the aerosol particles are injected onto the collision surface 5 at a high speed, so that the raw material particles collide with the collision surface 5. Due to this collision, among the raw material particles, aggregates (coarse particles) obtained by agglomerating a plurality of raw material particles are pulverized to be finely divided into individual small raw material particles. (Coarse particles) are also pulverized and atomized. If the distance D1 is too small, the raw material particles that collided with the collision surface 5 do not sufficiently diffuse into the tank 2 (main body portion 20) and accumulate on the collision surface 5 between the introduction port 30 and the collision surface 5 of the introduction pipe 3. If the interval is too wide, when the raw material particles injected from the inlet 30 of the introduction pipe 3 collide with the collision surface 5, a sufficient collision speed cannot be obtained, and the raw material particles (coarse particles) are pulverized. Therefore, it is preferable to set an appropriate distance D1 in consideration of these, and it can be set to about 5 mm to 50 mm, for example.

  One end of the outlet pipe 4 is connected to the injection nozzle 12 via the aerosol outlet path 6 </ b> C, the other end extends downward in the main body 20, and the outlet 40 is a bottom surface 20 </ b> A of the main body 20. That is, it is arranged above the collision surface 5. Thus, the outlet 40 of the outlet pipe 4 is arranged between the collision surface 5 and the classification space S for causing the fine particles to rise upward. The raw material particles after colliding with the collision surface 5 are diffused into the tank 2 (main body portion 20). Among them, the fine particles are light, and thus ride on the flow upward of the aerosol, The classification space S with the collision surface 5 rises upward and is sucked by the outlet 40. On the other hand, coarse particles remaining without being atomized (aggregates of fine particles and raw material particles having a large particle size) do not get on the aerosol flow due to gravity even if they are diffused into the tank 2 (main body portion 20). The classification space S is lowered and deposited on the bottom surface 20A. In this way, by providing the classification space S that extends upward and allows the fine particles to rise upward, between the outlet 40 of the outlet pipe 4 and the collision surface 5, the fine particles are separated in the classification space S. The coarse particles can be easily separated, and the coarse particles can be effectively classified from the aerosol. Therefore, only the fine particles can be efficiently led out to the injection nozzle 12 as an aerosol. If the distance D2 between the outlet 40 of the outlet pipe 4 and the collision surface, that is, the classification space S is too narrow, the fine particles and the coarse particles cannot be sufficiently separated in the classification space S, and the coarse particles are not fine particles. Therefore, it is preferable to set an appropriate distance D2 in consideration of these.

  In FIG. 2, the introduction pipe 3 extends downward in the tank 2 (main body part 20), and the introduction port 30 is arranged to face the bottom surface 20 </ b> A of the tank 2 (main body part 20) at a predetermined interval. However, as shown in FIG. 3, even if it is bent into an L shape in the tank 2 (main body part 20) and the introduction port 30 is arranged opposite to the side surface 20B of the tank 2 (main body part 20) with a predetermined interval. Good. As shown in FIG. 4, the introduction pipe 3 is fixed to the tank 2 (main body part 20) so as to extend in the horizontal direction, and the introduction port 30 is spaced from the side surface 20B of the tank 2 (main body part 20) by a predetermined distance. May be arranged opposite to each other. In the case of FIGS. 3 and 4, the side surface 20 </ b> B of the tank 2 (main body portion 20) constitutes the collision surface 5.

  In the example of FIG. 2 (and FIG. 3 and FIG. 4), the outlet tube 4 is provided so as to extend downward in the tank 2 (main body portion 20), but as shown in FIG. The tank 2 (main body portion 20) may be provided so as to extend in the horizontal direction. Further, as shown in FIGS. 6 and 7, the leading end of the outlet tube 4 may be bent and opened so that the outlet port 40 faces upward, in other words, the outlet port 40 may face upward.

  According to the pulverization / classification apparatus 1 having the above-described configuration, the aerosol containing the raw material particles generated by the aerosol generator 11 is introduced into the tank 2 (main body portion 20) by the introduction pipe 3, and is injected to the collision surface 5. After the raw material particles are crushed by the collision with the collision surface 5, the raw material particles are led out by the outlet pipe 4, but after the collision with the collision surface 5 and before being led out by the outlet pipe 4, the classification space S extending upward. Therefore, the light-weight, small-sized raw material particles (fine particles) reach the outlet 40 by being swung upward in the classification space S on the aerosol flow, and are sucked by the outlet 40 Thus, aggregates of raw material particles having a large particle diameter and raw material particles having a small particle diameter do not rise in the classification space S due to gravity and are deposited on the bottom surface 20 </ b> A without reaching the outlet 40. Thus, in the pulverization / classification apparatus 1 having the above-described configuration, the raw material particles in the aerosol can be atomized by the collision with the collision surface 5 with a simple structure, and the coarse particles can be effectively separated from the aerosol in the classification space S. By classifying, only the fine particles can be efficiently led to the injection nozzle 12. Therefore, a dense thin film with good bonding property to the substrate 14 can be formed on the substrate 14.

  As mentioned above, although one Embodiment of this invention was described, the specific aspect of this invention is not limited to the said embodiment. For example, in the above embodiment, the tank 2 is cylindrical, but can be formed in various shapes such as a spherical shape and a box shape. Moreover, in the said embodiment, although the tank 2 is comprised by the cover part 21 of the main body part 20 and the main-body part 20 which is another member, you may be comprised by one member.

  Moreover, in the said embodiment, although the bottom face 20A and side 20B of the tank 2 (main-body part 20) comprise the collision surface 5, it opposes the inlet 30 of the inlet tube 3 in the tank 2 (main-body part 20). Alternatively, the collision plate may be arranged, the surface of the collision plate may be the collision surface 5, the aerosol may be sprayed from the front, and the raw material particles may be pulverized and atomized by collision with the collision plate surface. As a collision board, it is preferable to have hardness more than glass, and metal plates, such as a glass plate and SUS, can be used.

  Moreover, in the said embodiment, although the introduction pipe 3 and the derivation | leading-out pipe 4 are provided in the tank 2 one each, you may be provided with two or more. Moreover, the front-end | tip of the one inlet tube 3 and the derivation | leading-out pipe 4 may be branched into plurality, and the inlet 30 and the outlets 40 may be provided with two or more.

  Moreover, in the said embodiment, the outlet 40 of the outlet tube 4 is arrange | positioned above the collision surface 5 (surface of the part facing the inlet 30 among the bottom face 20A and the side surface 20B of the tank 2 (main body part 20)). Thus, a classification space S is provided between the outlet 40 and the collision surface 5 that extends upward and allows the fine particles to rise upward. The configuration for providing the classification space S is as follows. However, the classification space S may be provided by configuring the pulverization / classification apparatus 1 as shown in FIG. In the embodiment of FIG. 8, the main body portion 20 is formed in a cylindrical shape with the upper end closed and the lower end opened, and a lid portion 21 is attached to the lower end opening of the main body portion 20. A partition plate 22 that partitions the internal space of the tank 2 into two spaces, a classification space S1 and a pulverization space S2, is provided on the upper surface 20C of the main body portion 20. The partition plate 22 has an opening 23 between the bottom surface 20 </ b> A (the lid portion 21) of the tank 2, and the classification space S and the pulverization space T communicate with each other at the lower part. The introduction pipe 3 and the lead-out pipe 4 are fixed to the lid portion 21, and the introduction port 30 is arranged above the grinding space T so as to face the upper surface 20C of the tank 2 (main body portion 20C) with a predetermined interval. The outlet 40 is arranged in the upper part of the classification space S. In the embodiment of FIG. 8, the upper surface 20 </ b> C of the tank 2 (main body portion 20) constitutes the collision surface 5.

  Also in the embodiment of FIG. 8, the aerosol generated by the aerosol generator 11 is introduced into the tank 2 of the pulverizing / classifying device 1 through the introduction pipe 3 and injected onto the collision surface 5 of the tank 2. The aerosol is jetted onto the collision surface 5 at a high speed, so that the raw material particles collide with the collision surface 5, and agglomerates (coarse particles) obtained by agglomerating a plurality of small raw material particles among the raw material particles due to the collision. Are pulverized into individual raw material particles having a small particle size, and large raw material particles (coarse particles) are also pulverized and atomized. The raw material particles after colliding with the collision surface 5 flow downward in the pulverization space T by the flow of aerosol, and flow into the classification space S through the lower opening 23. Since the raw material particles that flow into the classification space S are light in weight, they ride on the upward flow of the aerosol classification space S, soar up the classification space S, and are sucked by the outlet 40. On the other hand, coarse particles remaining without being atomized (aggregates of fine particles and raw material particles having a large particle diameter) are deposited in the classification space S by being moved down by gravity without being applied to the aerosol flow. As described above, in the embodiment shown in FIG. 8, the collision surface 5 and the outlet port 40 of the outlet pipe 4 are arranged in the pulverizing space T and the classification space S that are partitioned from each other, thereby introducing the collision surface 5 and the outlet pipe 4. Between the outlet 40, there is provided a classification space S that extends upward and allows fine particles to rise upward. Thus, as in the above embodiment, the fine particles and the coarse particles can be easily separated in the classification space S, and the coarse particles can be effectively classified from the aerosol, so that only the fine particles are efficiently aerosolized. To the injection nozzle 12. Therefore, a dense thin film with good bonding property to the substrate 14 can be formed on the substrate 14.

  Moreover, you may provide the classification space S by comprising the grinding | pulverization / classification apparatus 1 as shown in FIG. In the embodiment of FIG. 9, the tank 2 is formed in a substantially U shape (including a U shape and a U shape), and includes two tubular bodies 24 and 25 and lower portions of both tubular bodies 24 and 25. A connecting portion 26 that connects each other is integrally provided. The internal space in the tank 2 is partitioned into a pulverization space T that is an internal space of one tubular body 24 and a classification space S that is an internal space of the other tubular body 25. The classification space S and the pulverization space T Are communicated by a lower connecting portion 26. The introduction tube 3 is fixed to a lid portion 27 that closes the upper end opening of one tube body 24. The leading end of the introduction tube 3 is bent and opens so that the introduction port 30 faces upward, in other words, the introduction port 30 faces upward. A collision plate 29 is disposed in the upper part of the tube body 24 (grinding space T) so as to face the inlet 30. The aerosol supplied from the introduction tube 3 into the tube body 24 is sprayed from the front onto the surface (collision surface 5) of the collision plate 29, and the raw material particles are pulverized and collided with the collision plate surface (collision surface 5). Turn into. On the other hand, the lead-out tube 4 is fixed to a lid portion 28 that closes the upper end opening of the other tube body 25, and the lead-out port 40 is disposed in the upper part of the classification space S.

Also in the embodiment of FIG. 9, the aerosol generated by the aerosol generator 11 is introduced into the pulverization space T of one tubular body 24 through the introduction pipe 3 and is injected to the collision surface 5. The aerosol is jetted onto the collision surface 5 at a high speed, so that the raw material particles collide with the collision surface 5, and agglomerates (coarse particles) obtained by agglomerating a plurality of small raw material particles among the raw material particles due to the collision. Are pulverized into individual raw material particles having a small particle size, and large raw material particles (coarse particles) are also pulverized and atomized. The raw material particles that have collided with the collision surface 5 flow downward in the pulverization space T due to the flow of aerosol, and flow into the classification space S of the other tubular body 25 through the connecting portion 26. Since the raw material particles flowing into the classification space S are light in weight, they ride on the flow upward of the aerosol classification space S, soar up the classification space S, and are sucked by the outlet 40. On the other hand, the coarse particles remaining without being atomized (aggregates of fine particles and large-sized raw material particles) are moved down the classification space S without being applied to the aerosol flow due to gravity, and the bottom surface 24A of the tube body 24 Deposited on the bottom surface 25 </ b> A of the tube body 25 and the connecting portion 26. Also in the embodiment of FIG. 9, the collision surface 5 and the outlet port 40 of the outlet tube 4 are arranged in the pulverizing space T and the classification space S that are partitioned from each other, whereby the outlet port 40 of the outlet surface 4 and the outlet surface 4 are arranged. Between 40, a classification space S is provided that extends upward and allows fine particles to rise upward. Thus, as in the above embodiment, the fine particles and the coarse particles can be easily separated in the classification space S, and the coarse particles can be effectively classified from the aerosol, so that only the fine particles are efficiently aerosolized. Can be derived to the injection nozzle 12 as follows. Therefore, a dense thin film with good bonding property to the substrate 14 can be formed on the substrate 14.

  The present invention is not limited to the above-described embodiment, and various modifications are possible within the scope shown in the claims, and a form obtained by appropriately combining the components disclosed in the embodiment is also a technique of the present invention. Included in the scope.

  The present invention will be further described below using examples. However, the present invention is not limited to this embodiment. As an example, a film was formed on the substrate 14 by the aerosol deposition apparatus 10 using the pulverization / classification apparatus 1 according to the embodiment of FIG. 2 of the present invention.

  As the aerosol generator 11, the upper end opening of a glass bottle (mayonnaise 450 manufactured by Nippon Yamamura Glass Co., Ltd.) having an outer diameter of 80 mm, a height of 129.5 mm, and an internal volume of about 450 ml is made of Teflon (registered trademark). The top lid (made by Unitech Co., Ltd.) was used so that it could be opened and closed. As the supply pipe 7 and the discharge pipe 8, stainless steel (SUS304) pipes having an outer diameter of 6.35 mm and a thickness of 0.8 mm were used. Both the supply pipe 7 and the discharge pipe 8 were arranged so as to pass through the upper lid of the aerosol generator and open in the bottle. In the aerosol generator, 100 g of Admafine SO-C2 (average particle size 0.5 μm) manufactured by Admatech Co., Ltd. was stored as raw material particles.

  As the crushing / classifying device 1, the top opening of the glass bottle-shaped main body 20 (mayonnaise 450 manufactured by Nihon Yamamura Glass Co., Ltd.) having an outer diameter of 80 mm, a height of 129.5 mm, and an internal volume of about 450 ml is teflon. A lid portion 21 (manufactured by Unitech Co., Ltd.) made of (registered trademark) was used so as to be opened and closed. As the introduction pipe 3 and the lead-out pipe 4, stainless steel (SUS304) pipes having an outer diameter of 6.35 mm and a thickness of 0.8 mm were used. Both the introduction tube 3 and the lead-out tube 4 are arranged so as to penetrate the lid portion 21 and open in the main body portion 20. The introduction pipe 3 is positioned at a height of 20 mm from the bottom surface 20 </ b> A of the main body 20, and the outlet pipe 4 is positioned at a height of 80 mm from the bottom surface 20 </ b> A of the main body 20. Each arranged.

  As the injection nozzle 12 connected to the pulverization / classification apparatus 1, a unit having an opening width of 10 mm and a clearance of 0.3 mm manufactured by Unitech Co., Ltd. was used. Further, a film forming apparatus manufactured by Unitech Co., Ltd. was used for the film forming chamber 13. The substrate 14 was an aluminum plate (A1050P, thickness: 1 mm) manufactured by TP Giken.

By depressurizing the film forming chamber 13, the pulverization / classification apparatus 1 and the aerosol generator 11 connected thereto were also depressurized. Then, aerosol was generated by supplying dry air from the gas cylinder 15 at 5 L / min into the aerosol generator 11. The generated aerosol is automatically supplied from the introduction tube 3 into the pulverizing / classifying device 1 due to the pressure difference between the aerosol generator 11 and the pulverizing / classifying device 1 and pulverized / classified. Further, the pulverized / classified raw material particles are automatically discharged from the outlet tube 4 due to the pressure difference between the pulverizing / classifying apparatus 1 and the film forming chamber 13 and supplied to the injection nozzle 12. It sprayed toward the base material 14 installed in 18. At this time, a film of raw material particles was formed on the substrate 14 while the holder 18 was reciprocated in one direction with respect to the spray nozzle 12. The scanning width of the holder 18 was 20 mm, the scanning speed was 40 mm / min, and the film formation time was 10 minutes, 20 minutes, and 30 minutes.

As a comparative example, the pulverizing / classifying device 1 is not provided between the aerosol generator 11 and the injection nozzle 12, and the aerosol generated by the aerosol generator 11 is directly used as the injection nozzle 12.
Configured to supply. The other conditions were the same as in the example.

  When the thickness of the film on the substrate 14 formed in the example and the comparative example was measured using a micrometer, as shown in Table 1, the thickness of the film formed in the example was 10 minutes. The thickness of the film deposited in the comparative example was 8 μm in 10 minutes, 9 μm in 20 minutes, 9 μm in 30 minutes, and 11 μm, compared with 30 μm, 42 μm in 20 minutes, and 56 μm in 30 minutes. It was. From the above results, it can be seen that in the example, a dense film with good bonding property to the base material 14 can be formed on the substrate 14, and the film formation speed can be improved. Therefore, the pulverizing / classifying device 1 can pulverize and atomize coarse particles out of the raw material particles in the aerosol, and classify the coarse particles from the aerosol so that only the fine particles can be efficiently led to the injection nozzle 12. Recognize.

DESCRIPTION OF SYMBOLS 1 Crushing and classification apparatus 2 Tank 3 Introducing pipe 4 Deriving pipe 5 Colliding surface 10 Aerosol deposition apparatus 11 Aerosol generator 12 Injection nozzle 13 Deposition chamber 14 Substrate 22 Partition plate 24, 25 Tube 30 Inlet 40 Outlet S Classification Space T Grinding space

Claims (7)

A pulverizing / classifying device that is used in an aerosol deposition device and pulverizes coarse particles of fine particles contained in an aerosol into fine particles and classifies the coarse particles from the aerosol.
A tank having a collision surface into which aerosol is injected;
An introduction tube for introducing aerosol into the tank;
A lead-out pipe for deriving aerosol from the inside of the tank,
The introduction port of the introduction pipe is arranged to face the collision surface with a predetermined interval,
The outlet of the outlet pipe is a crushing / classifying device arranged in the tank so that a classification space for causing the particles to rise upward is interposed between the outlet and the collision surface.   The crushing / classifying apparatus according to claim 1, wherein the outlet of the outlet pipe is located above the collision surface. The inside of the tank is divided into a classification space and a pulverization space provided with the collision surface,
The introduction port of the introduction pipe is disposed at an upper portion of the pulverization space, the discharge port of the discharge tube is disposed at an upper portion of the classification space, and the classification space and the pulverization space communicate with each other at a lower portion. The crushing / classifying device described.   The crushing / classifying apparatus according to claim 3, wherein a partition plate that divides the internal space of the tank into two is provided in the tank.   The said tank is a grinding | pulverization / classification apparatus of Claim 3 currently formed in the substantially U shape where two pipe bodies were connected in the lower part.   The pulverizing / classifying apparatus according to claim 1, wherein the outlet of the outlet pipe is opened so as to face upward. An aerosol generator for generating aerosol by dispersing raw material particles in a carrier gas;
The pulverization / classification apparatus according to any one of claims 1 to 6, wherein the pulverization / classification apparatus is connected to the aerosol generator and pulverizes coarse particles into fine particles among raw particles contained in the aerosol and classifies the coarse particles from the aerosol.
An injection nozzle connected to the pulverizing / classifying device and for injecting aerosol derived from the pulverizing / classifying device;
An aerosol deposition apparatus, comprising: a substrate that is provided in a depressurized film formation chamber so as to face the spray nozzle and sprays aerosol from the spray nozzle.

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