JP2015132586A - Vibration calculation device, vibration calculation method, and vibration calculation program - Google Patents

Abstract

PROBLEM TO BE SOLVED: To sequentially calculate information (vibration acceleration, vibration speed, and vibration displacement) acting on the vibration of this electrostatic induction type vibration sensor by a simple calculation from a power generation voltage of the electrostatic induction type vibration sensor.SOLUTION: An arithmetic device 1 calculates at least one of the vibration displacement, the vibration speed, and the vibration acceleration of this electrostatic induction type vibration sensor 3 using a power generation voltage of the electrostatic induction type vibration sensor 3 in a control part 11. The electrostatic induction type vibration sensor 3 generates power according to the change of the relative position between a charge electrode generated accompanied with the vibration and a counter electrode provided on a second substrate while the charge electrode provided on a first substrate and the counter electrode provided on a second substrate face each other. The arithmetic device 1 calculates at least one of the vibration displacement, the vibration speed, and the vibration acceleration of the electrostatic induction type vibration sensor 3 by a calculation under the condition that the electrode vibration speed acting on the change of the relative position of the counter electrode for the charge electrode becomes proportional to the power generation voltage.

Description

  The present invention relates to a technique for calculating information (vibration acceleration, vibration speed, vibration displacement) concerning vibration of a sensor from a power generation voltage of the sensor using an electrostatic induction vibration sensor that generates power by vibration.

  Conventionally, a system for monitoring the soundness of building structures such as bridges and buildings, and various machines used in factories, etc., using an electrostatic induction vibration sensor that generates electricity by vibration has been studied. An electrostatic induction type vibration sensor (hereinafter sometimes simply referred to as a vibration sensor) includes one using an electret described in Non-Patent Document 1. A vibration sensor using an electret generates and outputs a voltage corresponding to vibration. As is known, an electret is an insulator having a semi-permanent charge.

  Further, Non-Patent Document 2 describes a calculation method for calculating information (vibration acceleration, vibration speed, vibration displacement) concerning vibration of the vibration sensor from the generated voltage of the vibration sensor using the electret.

Development of a small "environmental vibration power generation device" that generates power with minute vibration (https://www.omron.co.jp/press/2008/11/c1111.html) Development of Passive Type Vibration Sensor Using Electret Vibration Power Generation Element Eiichi Sasaki, George Minezawa, Hiroshi Yamaguchi Tokyo Institute of Technology Graduate School of Science and Engineering Department of Civil Engineering, February 29, 2012

  However, as shown in Non-Patent Document 2, the relationship between the power generation voltage of the vibration sensor using the electret and the vibration acceleration, vibration speed, and vibration displacement of the vibration sensor is expressed by a differential equation. And this differential equation cannot find its solution analytically. For this reason, Non-Patent Document 2 proposes a calculation method for calculating the vibration speed of the vibration sensor from the generated voltage of the vibration sensor by numerical simulation.

  To calculate the vibration speed of the vibration sensor at an arbitrary time by numerical simulation, not only the power generation voltage of the vibration sensor at that time but also the power generation voltage of the vibration sensor measured before and after that time must be used. . For this reason, the processing load for calculating the vibration speed of the vibration sensor by simulation is heavy. In addition, in the calculation process for calculating the vibration speed of the vibration sensor by simulation, the vibration speed of the vibration sensor at an arbitrary time cannot be calculated sequentially.

  An object of the present invention is to sequentially calculate information (vibration acceleration, vibration speed, vibration displacement) related to vibration of the electrostatic induction vibration sensor from the generated voltage of the electrostatic induction vibration sensor by simple calculation. Provide technology that can

  In order to achieve the above object, the vibration calculation device of the present invention is configured as follows.

  In the electrostatic induction type vibration sensor, the charging electrode provided on the first substrate and the counter electrode provided on the second substrate face each other, and the relative position between the charging electrode generated by the vibration and the counter electrode is set. Power is generated in response to changes in A power generation voltage that is an output of the electrostatic induction vibration sensor is input to the input unit.

  The calculation unit uses the generated voltage of the electrostatic induction vibration sensor input to the input unit, the vibration displacement of the electrostatic induction vibration sensor, the vibration speed of the electrostatic induction vibration sensor, and the electrostatic induction vibration sensor. At least one of the vibration accelerations is calculated. This calculation unit is a calculation on the condition that the electrode vibration speed applied to the change in the relative position of the counter electrode with respect to the charging electrode is proportional to the generated voltage. At least one of the vibration speed of the inductive vibration sensor and the vibration acceleration of the electrostatic induction vibration sensor is calculated.

  The vibration calculation device is an approximate expression of a simple calculation obtained on the condition that the electrode vibration speed related to the change in the relative position of the counter electrode with respect to the charging electrode is proportional to the generated voltage. The information (at least one of vibration acceleration, vibration speed, and vibration displacement) concerning vibration of the vibration sensor is calculated. Accordingly, it is possible to reduce the processing load of the arithmetic processing for calculating information relating to the vibration of the electrostatic induction vibration sensor, and it is possible to sequentially calculate the vibration speed of the vibration sensor at an arbitrary time.

  For example, the power generation voltage value of the electrostatic induction vibration sensor at that time is input to the input unit at a predetermined time interval (Δ). The calculation unit calculates information related to the vibration of the electrostatic induction vibration sensor using a predetermined time interval (Δ) as a calculation target time. In this case, the calculation unit uses the power generation voltage value of the electrostatic induction vibration sensor corresponding to the calculation target time input to the input unit, and the calculation result of the calculation target time immediately before the calculation target time, Information relating to vibration of the electrostatic induction vibration sensor is calculated.

  In addition, the vibration calculation device may include an output unit that outputs information on the vibration of the electrostatic induction vibration sensor calculated by the calculation unit.

  Further, the information processing apparatus includes a determination unit that determines the soundness of the structure to which the electrostatic induction vibration sensor is attached using the information regarding the vibration of the electrostatic induction vibration sensor calculated by the calculation unit. It is good also as a structure which outputs the determination result of a part from an output part.

  Further, the vibration calculation method of the present invention is a simple calculation obtained by a computer on the condition that the electrode vibration speed applied to the relative position change of the counter electrode with respect to the charging electrode is proportional to the generated voltage. The information concerning the vibration of the electrostatic induction type vibration sensor is calculated by the approximate expression.

  Further, the vibration calculation program of the present invention is a simple calculation obtained on the condition that the generated voltage is proportional to the electrode vibration speed applied to the relative position change of the counter electrode with respect to the charging electrode. The information concerning the vibration of the electrostatic induction type vibration sensor is calculated by the approximate expression.

  According to the present invention, information (vibration acceleration, vibration speed, vibration displacement) concerning vibration of the electrostatic induction vibration sensor is sequentially calculated from the generated voltage of the electrostatic induction vibration sensor by simple calculation. Can do.

It is the schematic which shows the example of the monitoring system using an electrostatic induction type vibration sensor. It is a figure which shows the structure of the principal part of an arithmetic unit. It is a figure explaining an electrostatic induction type vibration sensor. It is a schematic diagram of the power generation model of a vibration sensor. It is a figure which shows the electric power generation voltage of the vibration sensor detected for every detection time. It is a flowchart which shows the calculation process concerning calculation of the vibration speed u (t) of the vibration sensor in a calculating device. It is a flowchart which shows the calculation process concerning calculation of the vibration speed u (t) of the vibration sensor in a calculating device. It is a flowchart which shows the calculation process concerning calculation of the vibration displacement y (t) of the vibration sensor in a calculating device. It is a flowchart which shows the calculation process concerning calculation of the vibration displacement y (t) of the vibration sensor in a calculating device. It is a flowchart which shows the calculation process concerning calculation of the vibration acceleration a (t) of the vibration sensor in a calculating device. It is a flowchart which shows operation | movement of a calculating device. It is a flowchart which shows the calculation process concerning calculation of the vibration acceleration a (t) of the vibration sensor in a calculating device. It is a flowchart which shows operation | movement of a calculating device. It is a figure which shows the calculation result of the vibration speed u (t), vibration displacement y (t), and vibration acceleration a (t) of a vibration sensor in a calculating device.

  Embodiments of the present invention will be described below.

  FIG. 1 is a schematic diagram illustrating an example of a monitoring system using an electrostatic induction vibration sensor. This example is a system for monitoring the soundness of a bridge that is a building structure. This monitoring system includes an arithmetic device 1, a relay device 2, and an electrostatic induction vibration sensor 3.

  The electrostatic induction type vibration sensor 3 (hereinafter sometimes simply referred to as the vibration sensor 3) is attached to a plurality of locations such as a pier or a bridge of the bridge 5 for monitoring soundness, and vibrates together with the bridge 5. The vibration sensor 3 generates power according to the vibration. The output of the vibration sensor 3 is a generated voltage. In FIG. 1, only one vibration sensor 3 is illustrated.

  Similarly to the vibration sensor 3, the relay device 2 is also attached to a bridge pier or a bridge of the bridge 5. One or more vibration sensors 3 are connected to the relay device 2. Each vibration sensor 3 inputs a generated voltage as an output to the relay device 2.

  The relay device 2 measures the power generation voltage (output voltage) of each connected vibration sensor 3 at a predetermined measurement time interval. The relay device 2 transmits the measured power generation voltage to the arithmetic device 1 via the wireless network for each connected vibration sensor 3. The relay device 2 may be configured to transmit the measured power generation voltage to the arithmetic device 1 in real time for each connected vibration sensor 3, or at a predetermined transmission time interval (for example, 10 sec) The structure which transmits the power generation voltage for every detection time measured to 1 to the arithmetic unit 1 collectively may be sufficient.

  In this example, the relay device 2 has a wireless communication function for communicating with the arithmetic device 1, but records the measured power generation voltage in a recording medium such as an SD memory card for each connected vibration sensor 3. However, the wireless communication function may not be provided. In this case, a recording medium such as an SD memory card is manually collected, and the collected recording medium is set in the computing device 1 so that the measured power generation voltage of the vibration sensor 3 is input to the computing device 1. That's fine.

  FIG. 2 is a diagram illustrating a configuration of a main part of the arithmetic device. This computing device 1 corresponds to a vibration computing device according to the present invention. The arithmetic device 1 is an information processing device such as a general personal computer, and includes a control unit 11, an operation unit 12, a display unit 13, a communication unit 14, and an output unit 15. The arithmetic device 1 calculates at least one of the vibration acceleration of the vibration sensor 3, the vibration speed of the vibration sensor 3, and the vibration displacement of the vibration sensor 3 from the generated voltage of the vibration sensor 3 transmitted from the relay device 2. . Here, a procedure for calculating the vibration acceleration of the vibration sensor 3, the vibration speed of the vibration sensor 3, and the vibration displacement of the vibration sensor 3 will be described.

  The control unit 11 controls the operation of the main body of the arithmetic device 1, and information on vibrations of the vibration sensor 3 described later (vibration acceleration of the vibration sensor 3, vibration speed of the vibration sensor 3, and vibration displacement of the vibration sensor 3). The calculation is also performed. The control part 11 has the structure corresponded to the calculating part and determination part said by this invention.

  The operation unit 12 includes an input device such as a keyboard and a mouse, and accepts an input operation on the main body of the arithmetic device 1.

  The display unit 13 includes a display, and displays a screen according to an input to the arithmetic device 1 main body, a screen according to a processing result of arithmetic processing executed by the arithmetic device 1 main body, and the like.

  The communication unit 14 communicates with the relay device 2 via the wireless network and receives the generated voltage of the vibration sensor 3 transmitted from the relay device 2. The communication unit 14 corresponds to the input unit referred to in the present invention.

  The communication unit 14 may have a configuration in which the vibration sensor 3 is directly and electrically connected by wire (in this case, the relay device 2 is unnecessary), or the above-described relay device 2 is electrically connected by wire. It may be configured to be connected. That is, the communication unit 14 may be configured such that the generated voltage that is the output of the vibration sensor 3 is directly input, or may be configured to be input via the relay device 2 as described above. Also, the input form may be wired or wireless. Further, the vibration sensor 3 may be external to the relay device 2 as shown in FIG. 1 or may be built in the relay device 2.

  The output unit 15 outputs the processing result of the arithmetic processing in the main body of the arithmetic device 1 to an external device not shown.

  The display part 13 and the output part 15 are the structure corresponded to the output part said by this invention. Further, the arithmetic device 1 corresponds to a computer that executes the arithmetic method referred to in the present invention. The arithmetic device 1 corresponds to a computer that executes the arithmetic program referred to in the present invention.

  The monitoring system shown in FIG. 1 may be configured to directly input the generated voltage that is the output of the vibration sensor 3 to the arithmetic device 1. In this case, the relay device 2 described above can be dispensed with.

  Next, the vibration sensor 3 will be briefly described. This vibration sensor 3 uses an electret described in Non-Patent Documents 1, 2, and the like. FIG. 3 is a schematic diagram showing the configuration of the vibration sensor. In the vibration sensor 3, the electret electrode substrate 31 and the metal electrode substrate 33 are arranged to face each other with an appropriate interval. On the electret electrode substrate 31, electret electrodes 32 are formed at a predetermined interval. Further, counter electrodes 34 are formed on the metal electrode substrate 33 at predetermined intervals. The electret electrode substrate 31 is fixed to the case of the vibration sensor 3, but the metal electrode substrate 33 is attached so as to be movable in the vibration direction (left and right direction in FIG. 2). In the initial state, the electret electrode 32 and the counter electrode 34 substantially overlap each other in the facing direction. In the vibration state in which the metal electrode substrate 33 moves in the vibration direction along with the vibration, the vibration sensor 3 has an area where the electret electrode 32 and the counter electrode 34 overlap in the facing direction. A current corresponding to the change flows through the resistor R to generate power. The output of the vibration sensor 3 is the voltage across the resistor R.

  In this example, the vibration sensor 3 has the metal electrode substrate 33 movably attached in the vibration direction. However, the metal electrode substrate 33 is fixed to the case of the vibration sensor 3 and the electret electrode substrate 31 is moved in the vibration direction. It may be configured so as to be freely movable. That is, the vibration sensor 3 only needs to have a configuration in which the facing area between the electret electrode 32 and the counter electrode 34 is changed by vibration.

  A schematic diagram of a power generation model of the vibration sensor 3 is shown in FIG. As shown in Non-Patent Document 2, a differential equation governing the amount of power generation can be obtained by solving an equivalent circuit in which the electret electrode 32 is regarded as a variable capacitor. Specifically, a differential equation governing the power generation amount is obtained by simultaneously solving the following numbers (1-1) to (1-5).

  The number (1-1) represents Gauss's law in the electromagnetic field, and indicates that the surface charge is equal to the sum of the electric fields on the plane. The numbers (1-2) and (1-3) indicate that the potential drop due to the electret is equal to the total potential. The number (1-4) indicates that the charge amount Q stored in the circuit is constant. The number (1-5) shows the relationship (Ohm's law) between the current flowing by electrostatic induction and the generated voltage.

  As described above, the solutions of the numbers (1-1) to (1-5) cannot be obtained analytically.

  In the arithmetic device 1 according to this example, the vibration speed according to the relative position change of the metal electrode substrate 33 (counter electrode 34) with respect to the electret electrode substrate 31 (electret electrode 32) of the vibration sensor 3 is proportional to the generated voltage. The information (vibration acceleration, vibration speed, vibration displacement) concerning the vibration of the vibration sensor 3 is calculated by the calculation of the approximate expression obtained on the condition of the above.

  The vibration sensor 3 shown in FIG. 4 has the same length (x1 (t) + x2 (t)) in the vibration direction of the electret electrode 32 and the counter electrode 34. Further, in FIG. 4, x1 (t) indicates a length in which the electret electrode 32 and the counter electrode 34 overlap in the vibration direction.

  About an approximate expression on the condition that the vibration speed of the relative position change of the metal electrode substrate 33 (counter electrode 34) with respect to the electret electrode substrate 31 (electret electrode 32) of the vibration sensor 3 is proportional to the generated voltage. explain. The arithmetic device 1 calculates information related to the vibration of the vibration sensor 3 by calculating the approximate expression.

  Differentiating the above number (1-4) with time t,

  It becomes. When this number (2) is rewritten into an equation in which the electrostatic fields Ea, Eb, Ec are eliminated using the number (1-1), the number (1-2), and the number (1-3),

  It becomes. Therefore, the generated voltage V (t) of the vibration sensor 3 is multiplied by R on both sides,

  Can be expressed as Here, when the change in the relative position of the metal electrode substrate 33 (counter electrode 34) with respect to the electret electrode substrate 31 (electret electrode 32) is x (t), x1 (t) and x2 in equation (4) (T)

  It is represented by In the equation (5), W0 is the width of the electret electrode 32 in the vibration direction. Using this number (5) and rewriting number (4),

It becomes. Here, in a general vibration sensor 3 using an electret, the thickness d of the electret electrode 32 is about 1.50 × 10 ⁻⁵ m, and the width W0 of the electret electrode 32 in the vibration direction is 7.00 × 10 ^−3. m. The distance g between the electret electrode 32 and the counter electrode 34 is about 7.00 × 10 ⁻⁵ m. The dielectric constant ε0 of vacuum is 8.85 × 10 ⁻¹² F / m, and the relative dielectric constant ε of the electret electrode 32 is about 2.10.

Using these values, the coefficient of the term concerning V (t) x (t) on the right side in the equation (6) is 1.90 × 10 ⁻⁴ ,
The coefficient of the term concerning V (t) is 1.40 × 10 ⁻⁵ ,
The coefficient of the term concerning x (t) is 1.20.

  Moreover, in the general vibration sensor 3 using an electret, the maximum value of the generated voltage is about 1 V, and the change width of the relative position of the counter electrode 34 with respect to the electret electrode 32 is several mm. Therefore, the value of the term concerning V (t) x (t) on the right side and the term concerning V (t) in the number (6) are values that are orders of magnitude smaller than the term concerning x (t). It is. For this reason, the number (6) is an approximate expression in which the term concerning V (t) x (t) on the right side and the term concerning V (t) are ignored,

Can be expressed as D in this number (7) is
D = (d + εg) / (dδLR)
It is. From the approximate expression (7), the power generation voltage (output voltage) of the vibration sensor 3 is proportional to the vibration speed of the electrode according to the relative position change between the electret electrode 32 and the counter electrode 34. It can be said. Further, as apparent from the above description, x ′ (t) in the number (7) is the vibration speed of the electrode according to the relative position change between the electret electrode 32 and the counter electrode 34, and the vibration sensor 3. It is not its own vibration speed (vibration speed of the bridge 5 at the position where the vibration sensor 3 is attached).

  As shown in Non-Patent Document 2, the relationship between the displacement x (t) of the relative position of the counter electrode 34 with respect to the electret electrode 32 and the displacement y (t) of the vibration sensor 3 is as follows. As an equation of motion,

  Can be expressed as Since the vibration speed u (t) of the vibration sensor 3 and the displacement y (t) of the vibration sensor 3 have a relationship of u (t) = y ′ (t), both sides of the number (8) are expressed as time t. Differentiated by

  When this number (9) is eliminated by using the number (7), x (t)

  It becomes. The number (10) indicates the relationship between the vibration speed u (t) of the vibration sensor 3 and the power generation voltage V (t) of the vibration sensor 3. That is, the vibration speed u (t) of the vibration sensor 3 can be calculated from the detected power generation voltage V (t) of the vibration sensor 3 by the number (10). Specifically, by integrating and organizing both sides of the number (10) twice,

  Can be obtained. The constants A and B in this number (11) may be determined so that the average value and the average inclination of the vibration velocity u (t) of the vibration sensor 3 are both zero. That is, the constants A and B are parameters for correcting the base line of the vibration speed u (t) of the vibration sensor 3. This number (11) is an arithmetic expression for calculating the vibration speed u (t) of the vibration sensor 3 from the power generation voltage V (t) of the vibration sensor 3 given as a continuous function that can be integrated.

  As described above, the power generation voltage of the vibration sensor 3 measured at a predetermined measurement time interval is input to the arithmetic device 1. The measurement time interval Δ is, for example, 10 msec. Therefore, the power generation voltage of the vibration sensor 3 input to the arithmetic device 1 is discrete data.

  The vibration speed of the vibration sensor 3 can be calculated from the discrete data of the power generation voltage of the vibration sensor 3 by performing the following calculation.

  The detection time t of the generated voltage of the vibration sensor 3 in the discrete data is set to t = 0, Δ, 2Δ, 3Δ,. Here, the initial value of the detection time t is set to zero. The measurement time interval Δ is determined so that the change in the generated voltage of the vibration sensor 3 is reduced to some extent, in other words, it does not change significantly.

  Here, the two auxiliary variables Wi and Xi are

  Then, from the discrete data of the generated voltage of the vibration sensor 3 measured at the measurement time interval Δ, the vibration speed u (t) of the vibration sensor 3 at an arbitrary detection time t (t = 0, Δ, 2Δ, 3Δ,. ..NΔ)

  It can be calculated by This number (13) is an arithmetic expression obtained based on the number (7), and the generated voltage (output voltage) of the vibration sensor 3 depends on the change in the relative position between the electret electrode 32 and the counter electrode 34. It is an approximate expression on condition that it is proportional to the vibration speed of the electrode.

  As is clear from this number (13), the vibration speed u (t) of the vibration sensor 3 at the detection time t can be calculated by simple four arithmetic operations. The vibration speed u (t) of the vibration sensor 3 was obtained by calculating the power generation voltage V (nΔ) at the current measurement time nΔ (= t) and the vibration speed at the immediately previous measurement time (n−1) Δ. It is only necessary to use auxiliary variables Wn-1 and Xn-1. Therefore, the vibration speed u (t) of the vibration sensor 3 at the detection time t can be sequentially calculated with a simple calculation, and the load applied to this calculation process can be reduced.

  The constants A and B in the equation (13) cannot be obtained unless the vibration speed u (t) of the vibration sensor 3 is known. Therefore, when the constants A and B are not known (for example, when the vibration speed u (t) of the vibration sensor 3 is calculated for the first time after installation, or the constants A and B previously calculated in consideration of environmental changes and the like are updated. Sometimes)), once A = B = 0, the vibration speed u (t) of the vibration sensor 3 at each detection time t is calculated by the above calculation. Thereafter, the discrete data of the vibration velocity u (t) of the vibration sensor 3 at each detection time t is subjected to linear regression analysis to calculate the constants A and B. Then, using the obtained constants A and B, the previously calculated vibration speed u (t) of the vibration sensor 3 at each detection time t is corrected. Specifically, using the calculated constants A and B, correction related to (u (t) − (At + B)) is performed. This correction is referred to as primary correction here. The calculated constants A and B are stored in a memory (not shown) included in the control unit 11. When the constants A and B are known (when the constants A and B stored in the memory are used), the above-described processing for calculating the constants A and B is not performed. ) In real time.

  Next, calculation for calculating the vibration displacement of the vibration sensor 3 will be described.

  The vibration displacement y (t) of the vibration sensor 3 is obtained by integrating the vibration speed u (t) of the vibration sensor 3 with time t. Therefore, by integrating and organizing both sides of the number (11) at time t,

  Can be obtained. This number (14) is also an arithmetic expression obtained based on the number (7), and the generated voltage (output voltage) of the vibration sensor 3 depends on the change in the relative position between the electret electrode 32 and the counter electrode 34. It is an approximate expression on condition that it is proportional to the vibration speed of the electrode.

The constants A, B, and C in this number (14) are determined so that the approximate quadratic curve of the vibration displacement y (t) of the vibration sensor 3 is A / 2t ² + Bt + C. That is, the constants A, B, and C are parameters for correcting the baseline of the vibration displacement y (t) of the vibration sensor 3. The constants A and B are the same values as the constants A and B used in the description of the vibration velocity u (t) of the vibration sensor 3 described above.

  This number (14) is an arithmetic expression for calculating the vibration displacement y (t) of the vibration sensor 3 from the power generation voltage V (t) of the vibration sensor 3 given by a continuous function that can be integrated. The power generation voltage of the vibration sensor 3 measured at a predetermined measurement time interval is input to the arithmetic device 1. Therefore, the power generation voltage of the vibration sensor 3 input to the arithmetic device 1 is discrete data.

  The vibration displacement of the vibration sensor 3 can be calculated from the discrete data of the power generation voltage of the vibration sensor 3 by performing the following calculation.

  Here, the three auxiliary variables Wi, Xi, and Yi are

  Then (the auxiliary variables Wi and Xi are represented by the number (12)), the vibration sensor 3 at an arbitrary detection time t from the discrete data of the generated voltage of the vibration sensor 3 measured at the measurement time interval Δ. Vibration displacement y (t) (t = 0, Δ, 2Δ, 3Δ,... NΔ),

  It can be calculated by This number (16) is an arithmetic expression obtained based on the number (7), and the generated voltage (output voltage) of the vibration sensor 3 depends on the change in the relative position between the electret electrode 32 and the counter electrode 34. It is an approximate expression on condition that it is proportional to the vibration speed of the electrode.

  As apparent from this number (16), the vibration displacement y (t) of the vibration sensor 3 at the detection time t can be calculated by simple four arithmetic operations. The vibration displacement y (t) of the vibration sensor 3 was obtained by calculating the vibration displacement at the current detection time t (= nΔ) and the vibration displacement at the immediately preceding measurement time (n−1) Δ. It is only necessary to use auxiliary variables Wn-1, Xn-1, and Yn-1. Therefore, the vibration displacement y (t) of the vibration sensor 3 at an arbitrary detection time t can be calculated sequentially as in the case of the vibration speed u (t) described above, and the load applied to the calculation process is small. it can.

The constants A, B, and C in the equation (16) cannot be obtained unless the vibration displacement y (t) of the vibration sensor 3 is known. Therefore, when the constants A, B, and C are not known (for example, when calculating the vibration transition y (t) of the vibration sensor 3 for the first time after installation, the constants A, B, When updating C)), once set A = B = C = 0, the vibration displacement y (t) of the vibration sensor 3 at each detection time t is calculated by the above calculation. Thereafter, the discrete data of the vibration displacement y (t) of the vibration sensor 3 at each detection time t is subjected to regression analysis to calculate constants A, B, and C. Then, using the obtained constants A, B, and C, the vibration displacement y (t) of the vibration sensor 3 calculated at each detection time t is corrected. Specifically, using the calculated constants A, B, and C, correction related to (y (t) − (A / 2t ² + Bt + C)) is performed. This correction is referred to herein as secondary correction. Further, the calculated constants A, B, and C are stored in a memory (not shown) included in the control unit 11. When the constants A, B, and C are known (when the constants A, B, and C stored in the memory are used), the above-described processing for calculating the constants A, B, and C is not performed. Can be calculated in real time.

  Next, calculation for calculating the vibration acceleration of the vibration sensor 3 will be described.

  The vibration acceleration a (t) of the vibration sensor 3 may be obtained by differentiating the vibration speed u (t) of the vibration sensor 3 with respect to time t. That is, by integrating and organizing both sides of the number (10) at time t,

  Can be obtained. This number (17) is also an arithmetic expression obtained based on the number (7), and the power generation voltage (output voltage) of the vibration sensor 3 is affected by the relative position change between the electret electrode 32 and the counter electrode 34. It is an approximate expression on condition that it is proportional to the vibration speed of the electrode.

  The constant A in this number (17) is determined so that the average value of the vibration acceleration a (t) of the vibration sensor 3 is zero. That is, the constant A is a parameter for correcting the base line of the vibration acceleration a (t) of the vibration sensor 3. The constant A is the same value as the constant A used in the description of the vibration velocity u (t) of the vibration sensor 3 and the vibration displacement y (t) described above.

  This number (17) is also an arithmetic expression for calculating the vibration acceleration a (t) of the vibration sensor 3 from the generated voltage V (t) of the vibration sensor 3 given as a continuous function that can be integrated. As described above, since the power generation voltage of the vibration sensor 3 measured at a predetermined measurement time interval is input to the arithmetic device 1, the power generation voltage of the vibration sensor 3 input to the arithmetic device 1 is discrete data. is there.

  The vibration acceleration of the vibration sensor 3 can be calculated from the discrete data of the power generation voltage of the vibration sensor 3 by performing the following calculation. From the discrete data of the generated voltage of the vibration sensor 3 measured at the measurement time interval Δ, the vibration acceleration a (t) of the vibration sensor 3 at an arbitrary detection time t (t = 0, Δ, 2Δ, 3Δ,... NΔ )

  It can be calculated by This number (18) is an arithmetic expression obtained based on the number (7), and the generated voltage (output voltage) of the vibration sensor 3 depends on the change in the relative position between the electret electrode 32 and the counter electrode 34. It is an approximate expression on condition that it is proportional to the vibration speed of the electrode.

  As is clear from this number (18), the vibration acceleration a (t) of the vibration sensor 3 at the detection time t can be calculated by simple four arithmetic operations. The vibration acceleration a (t) of the vibration sensor 3 is the power generation voltage V ((n−1) Δ) at the previous detection time t (= (n−1) Δ) and the current detection time t (= nΔ). It is only necessary to use the auxiliary variable Wn-1 obtained by calculating the vibration displacement at the power generation voltage V (nΔ) and the immediately preceding measurement time (n-1) Δ. Accordingly, the vibration acceleration a (t) of the vibration sensor 3 at an arbitrary detection time t can be calculated sequentially as in the case of the vibration velocity u (t) described above, and the load applied to the calculation process is small. it can.

  The constant A in the equation (18) cannot be obtained unless the vibration acceleration a (t) of the vibration sensor 3 is known. Therefore, when the constant A is not known (for example, when calculating the vibration acceleration a (t) of the vibration sensor 3 for the first time after installation, or when updating the constant A previously calculated in consideration of environmental changes, etc.) Once A = 0, the vibration acceleration a (t) of the vibration sensor 3 at each detection time t is calculated by the above calculation. Thereafter, the linear regression analysis is performed on the discrete data of the vibration acceleration a (t) of the vibration sensor 3 at each detection time t, and the constant A is calculated. Then, using the obtained constant A, the vibration acceleration a (t) of the vibration sensor 3 calculated at each detection time t is corrected. Specifically, the correction relating to (a (t) −A) is performed using the calculated constant A. This correction is referred to as zero-order correction here. Further, the calculated constant A is stored in a memory (not shown) included in the control unit 11. When the constant A is known (when the constant A stored in the memory is used), the above-described processing for calculating the constant A is not performed, so that the vibration acceleration a (t) of the vibration sensor 3 can be calculated in real time. .

  Next, the operation of the arithmetic device 1 according to this example will be described. The relay device 2 measures the power generation voltage V (t) of the vibration sensor 3 at predetermined measurement time intervals. FIG. 5 is a diagram illustrating a measurement result of the generated voltage of the vibration sensor 3 with a measurement time of 10 msec. The relay device 2 may be configured to transmit the power generation voltage of the vibration sensor 3 at each measurement time Δ shown in FIG. 5 to the arithmetic device 1 in almost real time, or for each predetermined transmission time, the transmission time. The generated voltage of the vibration sensor 3 for each measurement time Δ may be collectively transmitted.

  In the communication unit 14, the arithmetic device 1 receives the generated voltage V (t) of the vibration sensor 3 transmitted from the relay device 2. Thereby, the power generation voltage V (t) of the vibration sensor 3 measured at the measurement time Δ interval is input to the arithmetic device 1.

  The arithmetic device 1 calculates information related to the vibration of the vibration sensor 3 by using the generated power generation voltage V (t) of the vibration sensor 3 for each input measurement time Δ. The information relating to the vibration of the vibration sensor 3 is at least one of the vibration speed u (t) of the vibration sensor 3, the vibration displacement y (t) of the vibration sensor 3, and the vibration acceleration a (t) of the vibration sensor 3.

  FIG. 6 and FIG. 7 are flowcharts showing a calculation process related to the calculation of the vibration speed u (t) of the vibration sensor in the calculation device. FIG. 6 shows a calculation process of the vibration speed u (t) of the vibration sensor when the constants A and B are not known, and FIG. 7 shows the vibration speed u (t) of the vibration sensor when the constants A and B are known. The calculation process is shown. FIG. 8 and FIG. 9 are flowcharts showing calculation processing related to calculation of the vibration displacement y (t) of the vibration sensor in the calculation device. FIG. 8 shows a calculation process of the vibration change y (t) of the vibration sensor when the constants A, B, and C are not known, and FIG. 9 shows the vibration change of the vibration sensor when the constants A, B, and C are known. The calculation process of y (t) is shown. Furthermore, FIG. 10 and FIG. 11 are flowcharts showing calculation processing related to calculation of vibration acceleration a (t) of the vibration sensor in the calculation device. FIG. 10 shows a calculation process of the vibration acceleration a (t) of the vibration sensor when the constant A is not known, and FIG. 11 shows a calculation process of the vibration acceleration a (t) of the vibration sensor when the constant A is known. Show.

  First, with reference to FIG. 6, a calculation process related to the calculation of the vibration speed u (t) of the vibration sensor 3 when the constants A and B are not known will be described. This calculation process is performed by the control unit 11. The control unit 11 sets the auxiliary variables W and X defined by the number (12) to the initial value (= 0), and sets the calculation target time t (detection time t) to the initial value (= 0) (s1 ). In s1, the values of the constants A and B are temporarily set to 0 (A = B = 0).

  The control unit 11 sets the input power generation voltage V (t) of the vibration sensor 3 at the calculation target time t as the parameter V (s2).

  The control unit 11 sets the auxiliary variable W to (W + V × Δ) and sets the auxiliary variable X to (X + t × V × Δ) (s3).

The control unit 11 determines the vibration speed u (t) of the vibration sensor 3 at the calculation target time point t.
u (t) = (pt + q) W−pX + DV
(S4).

  The control unit 11 sets the calculation target time t to a time point advanced by Δ which is a measurement time interval (s5). The control unit 11 determines whether or not the calculation target time t at this time is within the range of the calculation target time for calculating the vibration speed u (t) of the vibration sensor 3 (s6). When the control unit 11 determines in s6 that the calculation target time t at this time is within the range of the calculation target time for calculating the vibration speed u (t) of the vibration sensor 3, the control unit 11 returns to s2 and repeats the above processing. .

  On the other hand, when the control unit 11 determines in s6 that the calculation target time t at this time is not within the range of the calculation target time for calculating the vibration speed u (t) of the vibration sensor 3, the control unit 11 temporarily sets it to 0 in s1. Constants A and B are calculated and stored in the memory (s7).

In s7, the average value of the vibration velocity u (t) of the vibration sensor 3 for each calculation target time point t repeatedly calculated in s4, and the constants A and B for which the average inclination is both 0 are calculated. Specifically, the vibration velocity u (t) of the vibration sensor 3 at each calculation target time t calculated repeatedly in s4 is obtained by linear regression analysis.
The average value of u (t) + (At + B) and the constants A and B with which the average slope is 0 are calculated. The control unit 11 stores the calculated constants A and B in the memory.

  Using the constants A and B calculated in s7, the control unit 11 corrects the vibration velocity u (t) of the vibration sensor 3 for each calculation target time t calculated in s4 to u (t) + (At + B). Primary correction is performed (s8).

  As described above, when the constants A and B are not known, it is necessary to calculate the values of the constants A and B. Therefore, there is a slight time lag before the vibration speed u (t) of the vibration sensor 3 can be calculated.

  Next, with reference to FIG. 7, a description will be given of a calculation process related to the calculation of the vibration velocity u (t) of the vibration sensor 3 when the constants A and B are known. In FIG. 7, the same step numbers (s **) are assigned to the same processes as those in FIG.

  The control unit 11 sets the auxiliary variables W and X defined by the number (12) to the initial value (= 0), and sets the calculation target time t (detection time t) to the initial value (= 0) (s11). ). In s11, the values of the constants A and B are set to the values stored in the memory.

  The control unit 11 performs the processing related to s2 to s4 described above, and calculates the vibration speed u (t) of the vibration sensor 3. Further, the control unit 11 performs primary correction on the vibration velocity u (t) of the vibration sensor 3 calculated in s4 using the constants A and B set in s11 (s18). This primary correction is the same processing as in s8 described above.

  The control unit 11 advances the calculation target time t by Δ which is the measurement time interval (s5), and the calculation target time t at this time is within the calculation target time within which the vibration speed u (t) of the vibration sensor 3 is calculated. It is determined whether or not (s6). When the control unit 11 determines in s6 that the calculation target time t at this time is within the range of the calculation target time for calculating the vibration speed u (t) of the vibration sensor 3, the control unit 11 returns to s2 and repeats the above processing. .

  On the other hand, when the control unit 11 determines in s6 that the calculation target time t at this time is not within the range of the calculation target time for calculating the vibration speed u (t) of the vibration sensor 3, the present process is terminated.

  As described above, when the constants A and B are known, it is not necessary to perform processing for calculating the values of the constants A and B, so that the vibration speed u (t) of the vibration sensor 3 can be calculated in real time. In addition, you may perform the calculation concerning s4 and the calculation concerning s18 by the calculation put together into one.

  Next, with reference to FIG. 8, a calculation process related to the calculation of the vibration displacement y (t) of the vibration sensor 3 when the constants A, B, and C are not known will be described. This calculation process is performed by the control unit 11. The control unit 11 sets the auxiliary variables W, X, and Y defined by the number (14) to the initial value (= 0), and sets the calculation target time t (detection time t) to the initial value (= 0). (S21). In s21, the values of the constants A, B, and C are temporarily set to 0 (A = B = C = 0).

  The control unit 11 sets the input power generation voltage V (t) of the vibration sensor 3 at the calculation target time point t as the parameter V (s22).

  The control unit 11 sets the auxiliary variable W to (W + V × Δ), sets the auxiliary variable X to (X + t × V × Δ), and further sets the auxiliary variable Y to (Y + t × t × V × Δ). (S23).

The control unit 11 calculates the vibration displacement y (t) of the vibration sensor 3 at the calculation target time t.
y (t) = (p * t * t / 2 + q * t + D) * W- (p * t + q) * X + p / 2 * Y
(S24).

  The control unit 11 sets the calculation target time point t to a time point advanced by Δ which is a measurement time interval (s25). The control unit 11 determines whether or not the calculation target time t at this time is within the calculation target time for calculating the vibration displacement y (t) of the vibration sensor 3 (s26). If the control unit 11 determines in s26 that the calculation target time t at this time is within the range of the calculation target time for calculating the vibration displacement y (t) of the vibration sensor 3, the control unit 11 returns to s22 and repeats the above processing. .

  On the other hand, when the control unit 11 determines in s26 that the calculation target time t at this time is not within the range of the calculation target time for calculating the vibration displacement y (t) of the vibration sensor 3, it is temporarily set to 0 in s21. Constants A, B, and C are calculated and stored in the memory (s27).

In s27, constants A, B, and C are calculated such that the approximate quadratic curve of the vibration displacement y (t) of the vibration sensor 3 at each calculation target time point t calculated repeatedly in s24 is − (A / 2t ² + Bt + C). To do. Specifically, an approximate quadratic curve of the vibration displacement y (t) is − (A / 2t ² ) by regression analysis of the vibration displacement y (t) of the vibration sensor 3 at each calculation target time point t repeatedly calculated in s14. Constants A, B, and C that are + Bt + C) are calculated. The control unit 11 stores the calculated constants A, B, and C in the memory.

The control unit 11 uses the constants A, B, and C calculated in s27 to calculate the vibration displacement y (t) of the vibration sensor 3 for each calculation target time t calculated in s24 as y (t) + (A / 2t ⁽² + Bt + C) The secondary correction is performed (s28).

  Thus, when the constants A, B, and C are not known, it is necessary to calculate the values of the constants A, B, and C. Therefore, until the vibration shift y (t) of the vibration sensor 3 can be calculated, There is a time lag.

  Next, with reference to FIG. 9, a description will be given of a calculation process related to the calculation of the vibration transition y (t) of the vibration sensor 3 when the constants A, B, and C are known. In FIG. 9, the same step number (s **) is assigned to the same process as in FIG. 8.

  The control unit 11 sets the auxiliary variables W, X, and Y defined by the number (14) to the initial value (= 0), and sets the calculation target time t (detection time t) to the initial value (= 0). (S31). In s31, the values of the constants A, B, and C are set to the values stored in the memory.

  The control part 11 performs the process concerning s22-s24 mentioned above, and calculates the vibration transition y (t) of the vibration sensor 3. FIG. Further, the control unit 11 performs secondary correction on the vibration shift y (t) of the vibration sensor 3 calculated in s24 using the constants A, B, and C whose values are set in s31 (s38). This secondary correction is the same processing as in s28 described above.

  The control unit 11 advances the calculation target time t by Δ which is a measurement time interval (s25), and the calculation target time t at this time is within the range of the calculation target time for calculating the vibration transition y (t) of the vibration sensor 3. It is determined whether or not (s26). When the control unit 11 determines in s26 that the calculation target time t at this time is within the range of the calculation target time for calculating the vibration transition y (t) of the vibration sensor 3, the control unit 11 returns to s22 and repeats the above processing. .

  On the other hand, when the control unit 11 determines in s26 that the calculation target time t at this point is not within the range of the calculation target time for calculating the vibration transition y (t) of the vibration sensor 3, the present process is terminated.

  As described above, when the constants A, B, and C are known, it is not necessary to perform processing for calculating the values of the constants A, B, and C. Therefore, the vibration transition y (t) of the vibration sensor 3 can be set in real time. It can be calculated. Note that the calculation according to s24 and the calculation according to s38 may be performed by a single calculation.

  Next, with reference to FIG. 10, a calculation process related to the calculation of the vibration acceleration a (t) of the vibration sensor 3 when the constant A is not known will be described. This calculation process is also performed by the control unit 11. The control unit 11 sets the auxiliary variable W defined by the number (12) to an initial value (= 0), sets the auxiliary variable Vprev to an initial value (= 0), and further calculates a calculation target time t (detection time). t) is set to an initial value (= 0) (s41). In s41, the value of the constant A is temporarily set to 0 (A = 0).

  The control unit 11 sets the input power generation voltage V (t) of the vibration sensor 3 at the calculation target time t as the parameter V (s42).

  The control unit 11 sets the auxiliary variable W to (W + V × Δ) and sets the auxiliary variable dv to ((V−Vprev) / Δ) (s43).

The control unit 11 calculates the vibration acceleration a (t) of the vibration sensor 3 at the calculation target time point t.
a (t) = p × W + q × V + D × dV
(S44).

  The control unit 11 sets the auxiliary variable Vprev to V at this time (the value set in s42), and sets the calculation target time t to a time advanced by Δ which is a measurement time interval (s45). The control unit 11 determines whether or not the calculation target time t at this time is within the calculation target time for calculating the vibration acceleration a (t) of the vibration sensor 3 (s46). When the control unit 11 determines in s46 that the calculation target time t at this time is within the range of the calculation target time for calculating the vibration acceleration a (t) of the vibration sensor 3, the control unit 11 returns to s42 and repeats the above processing. .

  On the other hand, when the control unit 11 determines in s46 that the calculation target time t at this time is not within the range of the calculation target time for calculating the vibration acceleration a (t) of the vibration sensor 3, the control unit 11 temporarily sets it to 0 in s41. The constant A is calculated and stored in the memory (s47).

In s47, a constant A is calculated such that the average value of the vibration acceleration a (t) of the vibration sensor 3 at each calculation target time t calculated repeatedly in s44 is zero. Specifically, the vibration acceleration a (t) of the vibration sensor 3 at each calculation target time t calculated repeatedly in s24 is obtained by linear regression analysis.
A constant A is calculated so that the average value of a (t) + A is zero. The control unit 11 stores the calculated value of the constant A in the memory.

  The control unit 11 uses the constant A calculated in s47 and uses the constant A calculated in s44 to calculate the vibration acceleration a (t) of the vibration sensor 3 for each calculation target time t calculated in s44 as a (t ) Zero-order correction for correcting to + A is performed (s48).

  Thus, when the constants A, B, and C are not known, it is necessary to calculate the values of the constants A, B, and C. Therefore, until the vibration shift y (t) of the vibration sensor 3 can be calculated, There is a time lag.

  Next, with reference to FIG. 11, a calculation process related to the calculation of the vibration acceleration a (t) of the vibration sensor 3 when the constant A is known will be described. In FIG. 11, the same step number (s **) is assigned to the same process as in FIG. 10.

  The control unit 11 sets the auxiliary variable W defined by the number (12) to an initial value (= 0), sets the auxiliary variable Vprev to an initial value (= 0), and further calculates a calculation target time t (detection time). t) is set to an initial value (= 0) (s51). In s51, the value of the constant A is set to the value stored in the memory.

  The control unit 11 performs the processes according to s42 to s44 described above, and calculates the vibration acceleration a (t) of the vibration sensor 3. Further, the control unit 11 performs zero-order correction on the vibration acceleration a (t) of the vibration sensor 3 calculated in s44, using the constant A set in s51 (s58). This zero-order correction is the same processing as in s48 described above.

  The control unit 11 performs the processes related to s45 and s46 described above, and in s46, the calculation target time t at this time is within the calculation target time range for calculating the vibration acceleration a (t) of the vibration sensor 3. If it determines, it will return to s42 and repeat the said process.

  On the other hand, when the control unit 11 determines in s46 that the calculation target time t at this point is not within the range of the calculation target time for calculating the vibration acceleration a (t) of the vibration sensor 3, the process ends.

  As described above, when the constant A is known, it is not necessary to perform a process for calculating the value of the constant A, so that the vibration acceleration a (t) of the vibration sensor 3 can be calculated in real time. Note that the calculation according to s44 and the calculation according to s58 may be performed as a single calculation.

  FIG. 9 is a diagram showing the vibration speed u (t), vibration displacement y (t), and vibration acceleration a (t) of the vibration sensor calculated by the above-described calculation processing.

  As described above, the arithmetic device 1 calculates at least one of the vibration speed u (t), the vibration displacement y (t), and the vibration acceleration a (t) of the vibration sensor 3. In other words, the arithmetic unit 1 may not calculate any of the vibration sensor 3 vibration speed u (t), vibration displacement y (t), or vibration acceleration a (t).

  The arithmetic unit 1 outputs the vibration speed u (t), vibration displacement y (t), or vibration acceleration a (t) of the vibration sensor 3 calculated by the above-described processing to an external device (not shown) in the output unit 15. To do. In addition, the display unit 13 may display the vibration sensor 3 vibration speed u (t), vibration displacement y (t), or vibration acceleration a (t) calculated by the above-described processing on a display.

  In addition, the calculation method of the above-mentioned constants A, B, and C is not limited to the above-described example, and a known baseline correction method may be used or another method may be used.

  Next, processing in which the arithmetic device 1 determines the soundness of a structure such as the bridge 5 to which the vibration sensor 3 is attached will be described.

  The arithmetic device 1 compares the vibration speed u (t), vibration displacement y (t), or vibration acceleration a (t) of the vibration sensor 3 calculated by the above-described processing with reference data, and determines its soundness. . The arithmetic device 1 stores reference data for determining soundness.

  For example, when the calculation device 1 calculates the vibration speed u (t) of the vibration sensor 3 by the above-described processing, the vibration speed reference data stored for the bridge 5 and the vibration sensor calculated by the above-described calculation are used. 3 is compared with the vibration speed u (t), and the degree of soundness of the bridge 5 is determined from the magnitude of the shift amount between the two data.

  Soundness can also be determined using the vibration displacement y (t) of the vibration sensor 3 or the vibration acceleration a (t) of the vibration sensor 3. Moreover, the determination accuracy of the soundness level can be improved by using a plurality of vibration speeds u (t) of the vibration sensor 3, vibration displacement y (t) of the vibration sensor 3, and vibration acceleration a (t) of the vibration sensor 3. It can be improved.

  Furthermore, external factors that affect the vibration of the structure, such as wind speed, vehicle data (weight, etc.) of the traveling vehicle and data relating to the traveling data (speed and acceleration) are input to the computing device 1, and the computing device 1 The soundness of a structure such as a bridge may be determined by adding data relating to the external factor.

  The computing device 1 may be configured to output the soundness determination result determined for the structure such as the bridge 5 from the output unit 15 to the external device.

  In addition, although the example which determines the soundness of the bridge 5 was shown in said example, even if it is other building structures, such as a building and a highway, the soundness is determined by attaching the vibration sensor 3. can do.

  Further, as is clear from the above description, on the condition that the generated voltage (output voltage) of the vibration sensor 3 is proportional to the vibration speed of the electrode applied to the relative position change between the electret electrode 32 and the counter electrode 34. By doing so, the vibration speed, vibration displacement, and vibration acceleration of the electrode depending on the relative position change between the electret electrode 32 and the counter electrode 34 can also be calculated by a simple calculation.

DESCRIPTION OF SYMBOLS 1 ... Arithmetic device 2 ... Relay device 3 ... Static induction type vibration sensor (vibration sensor)
DESCRIPTION OF SYMBOLS 5 ... Bridge 11 ... Control part 12 ... Operation part 13 ... Display part 14 ... Communication part 15 ... Output part 31 ... Electret electrode substrate 32 ... Electret electrode 33 ... Metal electrode substrate 34 ... Counter electrode

Claims (7)

The charging electrode provided on the first substrate and the counter electrode provided on the second substrate face each other, and power generation is performed according to a relative position change between the charging electrode and the counter electrode generated due to vibration. An input unit for inputting a generated voltage that is an output of an electrostatic induction vibration sensor that
Using the generated voltage of the electrostatic induction vibration sensor input to the input unit, vibration displacement of the electrostatic induction vibration sensor, vibration speed of the electrostatic induction vibration sensor, and electrostatic induction vibration A calculation unit that calculates at least one of vibration accelerations of the sensor,
The calculation unit calculates the vibration displacement of the electrostatic induction vibration sensor under a condition that an electrode vibration speed applied to a change in a relative position of the counter electrode with respect to the charging electrode is proportional to a generated voltage. A vibration calculation device that calculates at least one of a vibration speed of the electrostatic induction vibration sensor and a vibration acceleration of the electrostatic induction vibration sensor. The input unit inputs a power generation voltage value of the electrostatic induction vibration sensor at a predetermined time interval at a predetermined time interval,
The calculation unit sets the time interval as a calculation target time for each predetermined time interval, the vibration displacement of the electrostatic induction vibration sensor, the vibration speed of the electrostatic induction vibration sensor, and the electrostatic induction The vibration calculation device according to claim 1, wherein at least one of vibration accelerations of the vibration sensor is calculated.   The calculation unit uses the power generation voltage value of the electrostatic induction vibration sensor corresponding to the calculation target time input to the input unit, and the calculation result of the calculation target time immediately before the calculation target time, The vibration according to claim 2, wherein at least one of vibration displacement of the electrostatic induction vibration sensor, vibration speed of the electrostatic induction vibration sensor, and vibration acceleration of the electrostatic induction vibration sensor is calculated. Arithmetic unit.   The output part which outputs the vibration displacement of the said electrostatic induction type vibration sensor which the said calculating part calculated, the vibration speed of the said electrostatic induction type vibration sensor, or the vibration acceleration of the said electrostatic induction type vibration sensor is provided. The vibration arithmetic apparatus in any one of 1-3. The electrostatic induction vibration sensor using the vibration displacement of the electrostatic induction vibration sensor calculated by the arithmetic unit, the vibration speed of the electrostatic induction vibration sensor, or the vibration acceleration of the electrostatic induction vibration sensor. A determination unit for determining the soundness of a structure to which
The vibration calculation apparatus according to claim 1, further comprising: an output unit that outputs a determination result of the determination unit. The charging electrode provided on the first substrate and the counter electrode provided on the second substrate, which are input to the input unit, are opposed to each other by the computer, and the charging electrode generated due to vibration and the counter electrode Using a generated voltage that is an output of an electrostatic induction vibration sensor that generates electric power in accordance with a change in relative position, vibration displacement of the electrostatic induction vibration sensor, vibration speed of the electrostatic induction vibration sensor, and A vibration calculation method for executing a calculation step of calculating at least one of vibration accelerations of the electrostatic induction vibration sensor,
The calculation step is a calculation on the condition that an electrode vibration speed according to a change in a relative position of the counter electrode with respect to the charging electrode is proportional to a generated voltage, and vibration displacement of the electrostatic induction vibration sensor. A vibration calculation method for calculating at least one of a vibration speed of the electrostatic induction vibration sensor and a vibration acceleration of the electrostatic induction vibration sensor. The charging electrode provided on the first substrate and the counter electrode provided on the second substrate, which are input to the input unit, face each other, and the charging electrode generated due to vibration and the counter electrode are relatively Using a generated voltage that is an output of an electrostatic induction vibration sensor that generates electric power according to a change in position, vibration displacement of the electrostatic induction vibration sensor, vibration speed of the electrostatic induction vibration sensor, and electrostatic A vibration calculation program for causing a computer to execute a calculation step for calculating at least one of vibration accelerations of an inductive vibration sensor,
The calculation step is a calculation on the condition that an electrode vibration speed according to a change in a relative position of the counter electrode with respect to the charging electrode is proportional to a generated voltage, and vibration displacement of the electrostatic induction vibration sensor. A vibration calculation program that is a step of calculating at least one of a vibration speed of the electrostatic induction vibration sensor and a vibration acceleration of the electrostatic induction vibration sensor.