CN102411302A - Control method of MEMS (micro-electromechanical system) micro-gyroscope based on direct self-adaptive fuzzy control - Google Patents

Control method of MEMS (micro-electromechanical system) micro-gyroscope based on direct self-adaptive fuzzy control Download PDF

Info

Publication number
CN102411302A
CN102411302A CN2011103484385A CN201110348438A CN102411302A CN 102411302 A CN102411302 A CN 102411302A CN 2011103484385 A CN2011103484385 A CN 2011103484385A CN 201110348438 A CN201110348438 A CN 201110348438A CN 102411302 A CN102411302 A CN 102411302A
Authority
CN
China
Prior art keywords
controller
fuzzy
centerdot
control
gyroscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2011103484385A
Other languages
Chinese (zh)
Inventor
费峻涛
隽婉茹
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Changzhou Campus of Hohai University
Original Assignee
Changzhou Campus of Hohai University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Changzhou Campus of Hohai University filed Critical Changzhou Campus of Hohai University
Priority to CN2011103484385A priority Critical patent/CN102411302A/en
Publication of CN102411302A publication Critical patent/CN102411302A/en
Pending legal-status Critical Current

Links

Images

Landscapes

  • Feedback Control In General (AREA)

Abstract

The invention discloses a control method of an MEMS (micro-electromechanical system) micro-gyroscope based on direct self-adaptive fuzzy control. A control system of the MEMS micro-gyroscope based on direct self-adaptive fuzzy control comprises a direct self-adaptive fuzzy controller, and is characterized in that: the direct self-adaptive fuzzy controller comprises a basic fuzzy controller which is built by a fuzzy logic system and is used for approximating an ideal controller of the MEMS micro-gyroscope, and a D (digital) controller which is used for ensuring that the state of a gyroscope system is bounded. In the control system of the MEMS micro-gyroscope based on direct self-adaptive fuzzy control, the direct self-adaptive fuzzy control method is applied to gyroscope control. The knowledge and the experience of experts can be combined with the fuzzy controller, and parameters in the fuzzy system are self-adaptively adjusted by a Lyapunov-based method, thereby the stability of the fuzzy control system is ensured. The fuzzy controller can be widely applied to the MEMS gyroscope control to improve the stability and the reliability of the system, and has great value in use in industry.

Description

MEMS gyroscope control method based on the direct adaptive fuzzy control
Technical field
The present invention relates to the gyrostatic control system of MEMS, be specifically related to the application of direct adaptive fuzzy control method on the MEMS gyroscope.
Background technology
The MEMS gyroscope is the sensor of measured angular speed the most frequently used in the plurality of applications field, such as Navigation, Guide and Controlling stability.The MEMS gyroscope is to utilize Coriolis force (that is: Coriolis force) that the energy on the axle is transferred to the device on another; Traditional operator scheme lacks the driving gyroscope from the known oscillating motion of a pattern to; And detected Coriolis acceleration is coupled to the perceptual model of vibration; Vibration is vertical with drive pattern, and the response of vibration perceptual model provides the information about practical angular velocity.Because the error in the manufacturing process exists and the influence of environment temperature, causes the difference between original paper characteristic and the design, causes existing the stiffness coefficient and the ratio of damping of coupling, has reduced the sensitivity and the precision of gyroscope.In addition, itself belongs to multi-input multi-output system gyroscope, has the fluctuation that causes to systematic parameter of uncertainty and the external interference of parameter, and the compensation foozle becomes the subject matter that gyroscope is controlled with measured angular speed.And traditional control method concentrates in the control to driving shaft oscillation amplitude and frequency stabilization and diaxon frequency matching, exists not consider the parameter change, and environmental change makes a very bad impression, and can not solve problems such as zero angle speed output.Therefore, advanced control technology is asked to be applied in the control of MEMS gyroscope
Fuzzy control system does not need the mathematical model of controlled device, it with the people to the control experience of controlled device serve as according to and therefore CONTROLLER DESIGN is applicable to that structure confirms unknown parameters or uncertain system.The outstanding advantage of fuzzy control is can be with comparalive ease people's control experience to be incorporated in the controller, if but lack such control experience, be difficult to design high-caliber fuzzy controller.And, because fuzzy controller has adopted the IF-THEN control law, be not easy to the study and the adjustment of controlled variable, and be difficult to guarantee the stability of control system.
Adaptive Fuzzy Control is meant the fuzzy logic system with adaptive learning algorithm, and its learning algorithm is to rely on data message to adjust the parameter of fuzzy logic system, and can guarantee the stability of control system.Compare with traditional adaptive control system, the superiority of Adaptive Fuzzy Control is the language property fuzzy message that it can utilize operating personnel to provide, and traditional adaptive control then can not.This point is even more important to the gyroscope system with height uncertain factor.
At present, Adaptive Fuzzy Control is not applied in the control system of gyroscope as yet.
Summary of the invention
The present invention overcomes the defective that the gyrostatic control system of existing MEMS exists, and a kind of MEMS gyroscope control method based on the direct adaptive fuzzy control is provided.
The object of the invention and solve its technical matters and adopt following technical scheme to realize.The MEMS gyroscope differential equation does
q · · = - ( D + 2 Ω ) q · - k b q + u - - - ( 1 )
Reference model does
q · · m = - k m q m - - - ( 2 )
If parameter D, Ω, k bKnown, controller can be designed to
u * = ( D + 2 Ω ) q · + k b q + q · · m + k T e - - - ( 3 )
Can make e · · + k 1 e · + k 2 e = 0 , Wherein e = ( e , e · ) T . If select suitable parameters vector k=(k 2, k 1) TValue can make polynomial expression h (s)=s 2+ k 1S+k 2Root on a left side half-open plane, then Lim t → ∞ e ( t ) = 0 , Be that control task is accomplished.
Work as D, Ω, k bWhen unknown, controller (3) can't be used, and therefore needs fuzzy logic system construction direct adaptive fuzzy controller.The fuzzy controller of design is made up of two parts: first is basic fuzzy controller u c(x| θ) approaches u with it *Second portion is D controller u d(x), guarantee the state bounded of gyroscope system with it.
Be u=u c(x| θ)+u d(x) (4)
Wherein basic fuzzy controller u c ( x | θ ) = Σ i N θ i ξ i ( x ) = θ T ξ ( x ) , ξ (x) is fuzzy basis function.
D controller u d(x)=k dSgn (e TPb c), (5)
K in the formula d>0.
Definition optimized parameter vector:
θ * = arg min Π θ ∈ R i = 1 n m i [ sup x ∈ R n | u c ( x | θ ) - u * | ] - - - ( 6 )
The least confusion approximate error:
ω=u c(x|θ *)-u * (7)
Design Lyapunov function does V = 1 2 e T Pe + 1 2 γ Φ T Φ ,
The Lyapunov function to the derivative of time is:
V = - 1 2 e T Qe + 1 γ ( θ * - θ ) T [ γ e T P b c ξ ( x ) - θ ] - e T P b c u d ( x ) - e T P b c ω , In order to guarantee V · ≤ 0 , Get θ · = γ e T P b c ξ ( x ) = γ ( Ep 12 + e · p 22 ) ξ ( x ) Be the adaptive law of system, γ in the formula>0 is a law of learning.
By technique scheme, the gyrostatic control system of MEMS that the present invention is based on the direct adaptive fuzzy control has advantage at least:
1. adopting the direct adaptive fuzzy controller that gyroscope system is controlled, is to utilize the advantage of fuzzy controller and the combination of adaptive control advantage to design.This controller can directly utilize fuzzy control rule, and the parameter of self-adaptation adjustment fuzzy controller reduces the influence to systematic error of tracking error and external interference, thereby assurance MEMS gyroscope can be worked normally.
2. compare with traditional fuzzy controller, the direct adaptive fuzzy controller can self-adaptation the parameter of adjustment Fuzzy control system, guaranteed the progressive stability of closed-loop system, and this fuzzy controller has higher robustness.
3. this control system has adopted monitoring controller, can guarantee the state bounded of system.
In sum, the MEMS gyroscope control system based on the direct adaptive fuzzy control of the present invention's design is used the direct adaptive fuzzy control method in gyroscope control.It can be attached to the expertise experience in the fuzzy controller, adopts based on the parameter in the method self-adaptation adjustment fuzzy system of Lyapunov, thus the stability and the accuracy of assurance gyroscope system.This fuzzy controller can be widely used in the control of MEMS gyroscope, and to improve the stability and the reliability of system, it has the value on the industry.
Description of drawings
Fig. 1 is the principle assumption diagram of MEMS gyroscope of the present invention;
Fig. 2 is the The general frame that the present invention is based on the MEMS gyroscope control method of direct adaptive fuzzy control;
Fig. 3 and Fig. 4 are basic fuzzy controller u cThe aircraft pursuit course of (x| θ);
Fig. 5 and Fig. 6 are basic fuzzy controller u cThe tracking error of (x| θ);
Fig. 7 and Fig. 8 are controller u=u c(x| θ)+u d(x) aircraft pursuit course;
Fig. 9 and Figure 10 are controller u=u c(x| θ)+u d(x) tracking error;
Figure 11 and Figure 12 are controller u=u c(x| θ)+u d(x) control input curve;
Figure 13 and Figure 14 are controller u=u c(x| θ)+u d(x) sliding-mode surface curve.
Embodiment
Following specific embodiments of the invention is described in further detail.
1.MEMS gyroscope kinetics equation
The little gyrotron of MEMS generally comprises three ingredients: by the mass that resilient material supported, and electrostatic drive and sensing apparatus.Static driven circuit major function is the constant of amplitude when driving and keeping little gyrotron vibration; Sensing circuit is used for the position and the speed of perceived quality piece.Gyroscope can be reduced to one has a vibration-damping system by what mass and spring constituted.Fig. 1 has shown little gyrotron model of under cartesian coordinate system, simplifying.As far as the MEMS gyroscope, can think that mass is limited in the x-y plane, to move, and can not move along the Z axle.In fact, because the existence of manufacturing defect and mismachining tolerance can cause the additional dynamic coupling of x axle and y axle, like the stiffness coefficient and the ratio of damping of coupling.Consider foozle, the lumped parameter mathematical model of actual gyroscope is:
m x · · + d xx x · + d xy y · + k xx x + k xy y = τ x + 2 m Ω z y · (1)
m y · · + d xy x · + d yy y · + k xy x + k yy y = τ y - 2 m Ω z x ·
M is the quality of mass, and x, y are the coordinate of mass in rotation system, d Xx, d YyBe respectively the ratio of damping of x axle and y axle, k Xx, k YyBe respectively the spring constant of x axle and y axle, d Xy, k XyBe respectively ratio of damping and the spring constant of coupling of coupling, close and be called quadrature error, τ x, τ yBe the control input of diaxon, It is Coriolis force.
The non-guiding principle of model quantizes very valuable when design analysis, and when having big time frame difference, non-guiding principle quantizes numerical simulation is realized easily.Because non-guiding principle amount time t *=w 0T, the both sides of formula (1) are together divided by reference mass m, reference length q 0, and the resonant frequency of diaxon square
Figure BDA0000106083020000062
MEMS gyroscope model can be rewritten as:
q · · q 0 + D mw 0 q · q 0 + K a mw 0 2 q q 0 = u mw 0 2 q 0 - 2 Ω w 0 q · q 0 - - - ( 2 )
Here q = x y , u = u x u y , Ω = 0 - Ω z Ω z 0 , D = d Xx d Xy d Xy d Yy , K a = k Xx k Xy k Xy k Yy
It is following to define new parameter:
q * = q q 0 , D * = D mw 0 , Ω * = Ω w 0 , u x * = u x mw 0 2 q 0 , u y * = u y mw 0 2 q 0
w x 2 = k xx mw 0 2 , w y 2 = k yy mw 0 2 , w xy = k xy mw 0 2
The difference of ignoring symbolic representation, the non-guiding principle quantitative model of MEMS gyroscope can be written as
q · · + D q · + K b q = u - 2 Ω q · - - - ( 3 )
q = x y , u = u x u y , Ω = 0 - Ω z Ω z 0 , D = d xx d xy d xy d yy , K b = w x 2 w xy w xy w y 2
2. direct adaptive The Design of Fuzzy Logic Controller
The MEMS gyroscope differential equation does
q · · = - ( D + 2 Ω ) q · - k b q + u - - - ( 3 - 1 )
Reference model does
q · · m = - k m q m - - - ( 3 - 2 )
If parameter D, Ω, k bKnown, controller can be designed to
u * = ( D + 2 Ω ) q · + k b q + q · · m + k T e - - - ( 3 - 3 )
Can make e · · + k 1 e · + k 2 e = 0 , Wherein e = ( e , e · ) T . If select suitable parameters vector k=(k 2, k 1) TValue can make polynomial expression h (s)=s 2+ k 1S+k 2Root on a left side half-open plane, then Lim t → ∞ e ( t ) = 0 , Be that control task is accomplished.
Work as D, Ω, k bWhen unknown, controller (3-3) can't be used, and therefore needs fuzzy logic system construction direct adaptive fuzzy controller.The fuzzy controller of design is made up of two parts: first is basic fuzzy controller u c(x| θ) approaches u with it *Second portion is D controller u d(x), guarantee the state bounded of system with it.
Promptly
u=u c(x|θ)+u d(x) (3-4)
Wherein basic fuzzy controller u c ( x | θ ) = Σ i N θ i ξ i ( x ) = θ T ξ ( x ) , ξ (x) is fuzzy basis function.
The D controller
u d(x)=k dsgn(e TPb c),k d>0 (3-5)
Make e=q m-q,
Then can obtain:
e · · = q · · m - q · · = q · · m + ( D + 2 Ω ) q · + k b q - u (3-6)
= q · · m + ( D + 2 Ω ) q · + k b q - u c ( x | θ ) - u d ( x )
Formula (3-5) substitution is obtained:
e · · = - K T e + u * - u c ( x | θ ) - u c ( x ) - - - ( 3 - 7 )
Or be equivalent to
e · = Λe + b c [ u * - u c ( x | θ ) - u d ( x ) ] - - - ( 3 - 8 )
In the formula: Λ = 0 1 - k 2 - k 1 , b c = 0 1 .
Because Λ is stable matrix, promptly | sI-Λ |=s 2+ k 1S+k 2For stable, therefore certain positive definite symmetric matrices P that has unique 2 * 2 satisfies the Lyapunov equation
Λ TP+PΛ=-Q (3-9)
In the formula P = p 11 p 12 p 21 p 22 , Q is 2 * 2 positive definite matrixes arbitrarily.
Provide the adaptive law of parameter θ below.
Definition optimized parameter vector:
θ * = arg min Π θ ∈ R i = 1 n m i [ sup x ∈ R n | u c ( x | θ ) - u * | ] - - - ( 3 - 10 )
The least confusion approximate error:
ω=u c(x|θ *)-u * (3-11)
Then error equation (3-8) can be rewritten as
e · = Λe + b c [ u x ( x | θ * ) - u c ( x | θ ) ] - b c u d ( x ) - b c ω (3-12)
= Λe + b c ( θ * - θ ) T ξ ( x ) - b c u d ( x ) - b c ω
The adaptive law of getting parameter θ is:
θ · = γe T P b c ξ ( x ) = γ ( ep 12 + e · p 22 ) ξ ( x ) - - - ( 3 - 13 )
γ in the formula>0 is a law of learning.
3. stability and convergence analysis
Getting the Lyapunov function does V = 1 2 e T Pe + 1 2 γ ( θ T - θ ) T ( θ * - θ )
Make M=b c*-θ) Tξ (x)-b cu d(x)-b cω, then formula (3-12) becomes
Figure BDA0000106083020000089
Ask V to the derivative of time, have
V · = 1 2 e · T Pe + 1 2 e T P e · - 1 γ ( θ * - θ ) T θ ·
= - 1 2 e T Qe + 1 γ ( θ * - θ ) T [ γe T Pb c ξ ( x ) - θ · ] - e T Pb c u d ( x ) - e T Pb c ω
(3-13) can get based on formula
V · = = - 1 2 e T Qe - e T P b c u d ( x ) - e T Pb c ω ≤ - 1 2 e T Qe + | e T Pb c | ( sup t ≥ 0 | ω | - k d )
Get k d>=sup T>=0| ω |, then following formula can be changed into
V · ≤ - 1 2 e T Qe ≤ - λ min ( Q ) | | e | | 2 ≤ 0
Use inequality: λ here Min(Q) || s|| 2≤s TQs≤λ Max(Q) || s|| 2, λ in the formula Min(Q) be the minimum real part of matrix Q eigenwert.
Because
Figure BDA0000106083020000095
is negative semidefinite; So can release V, e and θ are bounded.Know by Lhasa your invariant set theorem (LaSalle ' s invariant set theorem), e (t) with asymptotic convergence to zero, promptly Lim t → ∞ e ( t ) = 0 .
4. simulation study
The gyroscope model does q · · = - ( D + 2 Ω ) q · - k b q + u . Gyroscope selection of parameter after the non-dimensionization is following:
ω x 2 = 355.3 , ω y 2 = 532.9 , ω xy=70.99.d xx=0.01,d yy=0.01,d xy=0.002,Ω=0.1
Go up 6 fuzzy sets of definition in interval [3,3], be respectively:
μ N3(x)=1/(1+exp(5(x+2)))μ N2(x)=exp(-(x+1.5) 2N1(x)=exp(-(x+0.5) 2P1(x)=exp(-(x-0.5) 2),μ P2(x)=exp(-(x-1.5) 2),μ P3(x)=1/(1+exp(-5(x-2)))
System initial state is [1,0,0,0], and the initial value of each element is 0 among the θ.X axle disturbance quantity does
Figure BDA0000106083020000101
The Y axle does
Figure BDA0000106083020000102
Auto-adaptive parameter γ=300, k 1=2, k 2=1, Q = 50 0 0 50 , k d=30.
Because the system that the uncontinuity of sgn function causes is slow excessively, the tan function of using a continuously smooth instead replaces in order to eliminate,
Be u=u c(x| θ)+u d(x)=θ Tξ (x)+k dTanh (e TPb c), define sliding-mode surface s=e this moment TPb c
The result of emulation such as Fig. 3 are to shown in Figure 14.
Fig. 3~Figure 10 has compared use u c(x| θ) and u=u c(x| θ)+u d(x) two kinds of tracking errors that controller is different, visible after using the D controller u=u c(x| θ)+u d(x) can be in the short period of time better track reference model, and effectively reduced system ambiguous approximate error and external disturbance influence to system's output error, guaranteed the robustness of Fuzzy control system.
Result by above specific embodiment shows; Under abundant input signal situation; The MEMS gyroscope direct adaptive Fuzzy control system of the present invention's design can make the tracking error vector converge to zero soon, simultaneously under the external disturbance situation; System still can well trace model, has good robustness.
Above embodiment is merely the present invention's a kind of embodiment wherein, and it describes comparatively concrete and detailed, but can not therefore be interpreted as the restriction to claim of the present invention.Should be pointed out that for the person of ordinary skill of the art under the prerequisite that does not break away from the present invention's design, can also make some distortion and improvement, these all belong to protection scope of the present invention.Therefore, the protection domain of patent of the present invention should be as the criterion with accompanying claims.

Claims (4)

1. MEMS gyroscope control method based on the direct adaptive fuzzy control; It comprises the direct adaptive fuzzy controller, it is characterized in that: said direct adaptive fuzzy controller comprises two parts: one is the basic fuzzy controller u of fuzzy logic system construction c(x| θ), it is used for approaching the desirable controller u of said MEMS gyroscope *One is D controller u d(x), be used for guaranteeing the state bounded of said gyroscope system.
2. the MEMS gyroscope control method based on the direct adaptive fuzzy control according to claim 1 is characterized in that: said basic controller satisfies: u c ( x | θ ) = Σ i N θ i ξ i ( x ) = θ T ξ ( x ) , Wherein ξ (x) is fuzzy basis function; Auto-adaptive parameter in the formula satisfies: θ · = γ e T P b c ξ ( x ) = γ ( Ep 12 + e · p 22 ) ξ ( x ) , Law of learning in the formula satisfies γ>0.
3. the MEMS gyroscope control method based on the direct adaptive fuzzy control according to claim 1 is characterized in that: said D controller satisfies: u d(x)=k dSgn (e TPb c), k in the formula d>0.
4. the MEMS gyroscope control method based on the direct adaptive fuzzy control according to claim 1; It is characterized in that: said direct adaptive fuzzy controller adopts based on method self-adaptation its fuzzy logic system of adjustment of Lyapunov and the parameter in the D controller, to satisfy the control requirement of system.
CN2011103484385A 2011-11-07 2011-11-07 Control method of MEMS (micro-electromechanical system) micro-gyroscope based on direct self-adaptive fuzzy control Pending CN102411302A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2011103484385A CN102411302A (en) 2011-11-07 2011-11-07 Control method of MEMS (micro-electromechanical system) micro-gyroscope based on direct self-adaptive fuzzy control

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2011103484385A CN102411302A (en) 2011-11-07 2011-11-07 Control method of MEMS (micro-electromechanical system) micro-gyroscope based on direct self-adaptive fuzzy control

Publications (1)

Publication Number Publication Date
CN102411302A true CN102411302A (en) 2012-04-11

Family

ID=45913424

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2011103484385A Pending CN102411302A (en) 2011-11-07 2011-11-07 Control method of MEMS (micro-electromechanical system) micro-gyroscope based on direct self-adaptive fuzzy control

Country Status (1)

Country Link
CN (1) CN102411302A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102681443A (en) * 2012-06-05 2012-09-19 河海大学常州校区 Micro electromechanical system gyroscope fuzzy self-adaptive control system based on fuzzy compensation
CN102866633A (en) * 2012-09-21 2013-01-09 河海大学常州校区 Dynamic sliding-mode control system of miniature gyroscope
CN103336430A (en) * 2013-06-24 2013-10-02 河海大学常州校区 Self-adaptive fuzzy H infinite control method for micro-gyroscope
CN104090487A (en) * 2014-03-28 2014-10-08 河海大学常州校区 Micro-gyroscope self-adaptive dynamic sliding mode control system based on inversion design, and method
CN104122794A (en) * 2014-07-02 2014-10-29 河海大学常州校区 Self-adaption fuzzy neural compensating nonsingular terminal sliding mode control method of micro gyroscope
CN109974750A (en) * 2018-12-11 2019-07-05 中国航空工业集团公司北京长城计量测试技术研究所 A kind of ring laser Temperature Modeling and compensation method based on fuzzy logic system
CN110389526A (en) * 2019-07-18 2019-10-29 西北工业大学 MEMS gyro adaptive sliding-mode observer method based on Super-Twisting algorithm
CN110457768A (en) * 2019-07-18 2019-11-15 东南大学 Consider the configuration method of the MEMS device parameter based on reliability under fabrication error

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5465620A (en) * 1993-06-14 1995-11-14 Rensselaer Polytechnic Institute Micromechanical vibratory gyroscope sensor array
CN100538276C (en) * 2007-11-16 2009-09-09 北京航空航天大学 A kind of MEMS gyroscopes error compensation method for micro satellite based on integrated neural network

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5465620A (en) * 1993-06-14 1995-11-14 Rensselaer Polytechnic Institute Micromechanical vibratory gyroscope sensor array
CN100538276C (en) * 2007-11-16 2009-09-09 北京航空航天大学 A kind of MEMS gyroscopes error compensation method for micro satellite based on integrated neural network

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
佟绍成,周军: "非线性模糊间接和直接自适应控制器的设计和稳定性分析", 《控制与决策》 *
陈殿生 等: "MEMS陀螺仪随机误差滤波", 《北京航空航天大学学报》 *
魏利胜 等: "用于陀螺仪随机误差估计的BP自适应模糊辨识法", 《第25届中国控制会议论文集(上册)》 *

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102681443A (en) * 2012-06-05 2012-09-19 河海大学常州校区 Micro electromechanical system gyroscope fuzzy self-adaptive control system based on fuzzy compensation
CN102681443B (en) * 2012-06-05 2014-10-29 河海大学常州校区 Micro electromechanical system gyroscope fuzzy self-adaptive control system based on fuzzy compensation
CN102866633B (en) * 2012-09-21 2015-04-22 河海大学常州校区 Dynamic sliding-mode control system of miniature gyroscope
CN102866633A (en) * 2012-09-21 2013-01-09 河海大学常州校区 Dynamic sliding-mode control system of miniature gyroscope
CN103336430A (en) * 2013-06-24 2013-10-02 河海大学常州校区 Self-adaptive fuzzy H infinite control method for micro-gyroscope
CN104090487A (en) * 2014-03-28 2014-10-08 河海大学常州校区 Micro-gyroscope self-adaptive dynamic sliding mode control system based on inversion design, and method
CN104122794A (en) * 2014-07-02 2014-10-29 河海大学常州校区 Self-adaption fuzzy neural compensating nonsingular terminal sliding mode control method of micro gyroscope
CN109974750A (en) * 2018-12-11 2019-07-05 中国航空工业集团公司北京长城计量测试技术研究所 A kind of ring laser Temperature Modeling and compensation method based on fuzzy logic system
CN109974750B (en) * 2018-12-11 2020-10-02 中国航空工业集团公司北京长城计量测试技术研究所 Ring laser temperature modeling and compensating method based on fuzzy logic system
CN110389526A (en) * 2019-07-18 2019-10-29 西北工业大学 MEMS gyro adaptive sliding-mode observer method based on Super-Twisting algorithm
CN110457768A (en) * 2019-07-18 2019-11-15 东南大学 Consider the configuration method of the MEMS device parameter based on reliability under fabrication error
CN110389526B (en) * 2019-07-18 2022-03-29 西北工业大学 MEMS gyroscope self-adaptive sliding mode control method based on Super-Twisting algorithm
CN110457768B (en) * 2019-07-18 2022-12-13 东南大学 Method for configuring reliability-based MEMS device parameters under consideration of process errors

Similar Documents

Publication Publication Date Title
CN102411302A (en) Control method of MEMS (micro-electromechanical system) micro-gyroscope based on direct self-adaptive fuzzy control
CN102298322B (en) Micro gyroscope adaptive control method based on model reference
CN102298315B (en) Adaptive control system based on radial basis function (RBF) neural network sliding mode control for micro-electromechanical system (MEMS) gyroscope
CN104281056B (en) The gyroscope Robust Adaptive Control method learnt based on the neutral net upper bound
CN105045097B (en) A kind of gyroscope inverting global sliding mode fuzzy control method based on neutral net
CN102636995B (en) Method for controlling micro gyro based on radial basis function (RBF) neural network sliding mode
CN102393639B (en) Micro-gyroscope tracking control method based on adaptive fuzzy sliding mode
CN104122794B (en) The adaptive fuzzy nerve compensation non-singular terminal sliding-mode control of gyroscope
CN103885339B (en) The inverting method of adaptive fuzzy sliding mode control of gyroscope
Wang et al. Robust adaptive sliding mode control of MEMS gyroscope using T–S fuzzy model
CN103279038B (en) Based on the gyroscope Sliding Mode Adaptive Control method of T-S fuzzy model
CN103994698B (en) The simple sliding-mode control of guided missile pitch channel based on overload with angular velocity measurement
Patel et al. Adaptive backstepping control scheme with integral action for quanser 2-dof helicopter
CN104155874B (en) Method for controlling inversion adaptive fuzzy dynamic sliding mode of micro gyroscope
Sukvichai et al. Double-level ball-riding robot balancing: From system design, modeling, controller synthesis, to performance evaluation
CN105929694A (en) Adaptive neural network nonsingular terminal sliding mode control method for micro gyroscope
CN103529701A (en) Method of global sliding mode control of neural network of micro-gyroscope
CN107678282A (en) Consider the MEMS gyro intelligent control method of unknown dynamics and external disturbance
CN106338918A (en) Adaptive dynamic-surface double neural network control method of micro gyroscope
Zhang et al. Sliding mode control of MEMS gyroscopes using composite learning
CN104199291A (en) Dissipative structure theory based TORA (Translation oscillators with a rotating actuator) system self-adaption control method
CN107608217A (en) MEMS gyroscope modified fuzzy sliding mode controlling method based on Hybrid Learning
CN105487382A (en) Micro gyroscope self-adaptive fuzzy sliding mode control method based on dynamic surface
CN102866633B (en) Dynamic sliding-mode control system of miniature gyroscope
CN103336430A (en) Self-adaptive fuzzy H infinite control method for micro-gyroscope

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C12 Rejection of a patent application after its publication
RJ01 Rejection of invention patent application after publication

Application publication date: 20120411