JP2015132379A - Seal mechanism, drive unit of seal mechanism, transfer device and manufacturing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a seal mechanism which enhances sealing performance, a drive unit of the seal mechanism, a transfer device and a manufacturing device.SOLUTION: A seal mechanism partitions two spaces which are different in pressure or gases includes a housing, a shaft inserted into the housing, and a plurality of annular seal members which contact with a part of the shaft, or a radial outside surface of a rotating part which is fixed to the shaft, and seal clearances. The plurality of annular seal members include materials which are different in quality, and arranged in different positions in an axial direction parallel to a center axis of the shaft.

Description

  The present invention relates to a seal mechanism that separates two spaces having different pressures, a drive device for the seal mechanism, a transport device, and a manufacturing apparatus.

  In a manufacturing apparatus such as a transport apparatus, a semiconductor manufacturing apparatus, or a machine tool, a rotation mechanism that rotates a rotary stage or rotates a semiconductor substrate, a workpiece, or a tool is used. As such a rotation mechanism, for example, Patent Document 1 describes a positioning device (see FIG. 2).

JP 2007-9939 A

  The technique described in Patent Document 1 rotates a shaft while isolating a process chamber such as a vacuum chamber from an external environment by accommodating an O-ring that is a contact seal in a seal groove. is there. However, although the O-ring enhances the sealing performance, the O-ring is forced to be deformed and brought into contact with the shaft, so that the O-ring or the shaft may be deformed or worn. O-rings may have insufficient sealing properties when fitted in the process chamber, and may have advantages and disadvantages depending on the material, such as shortening the life due to the influence of the process chamber when adapted to the external environment. For this reason, there is a demand for a rotating mechanism that improves the sealing performance and suppresses the deterioration of components over time and reduces the frequency of component replacement.

  The present invention has been made in view of the above, and an object of the present invention is to provide a seal mechanism, a drive device for the seal mechanism, a transport device, and a manufacturing apparatus that enhance sealing performance.

  To achieve the above object, a sealing mechanism according to the present invention is a sealing mechanism that separates two spaces of different pressures or gases, and includes a housing, a shaft inserted into the housing, a part of the shaft, or the A plurality of annular seal members that are in contact with the radially outer surface of the rotating portion fixed to the shaft and seal the gap, and each of the plurality of annular seal members includes a material of a different material, and the center of the shaft It is arranged at different positions in the axial direction parallel to the axis.

  In this sealing mechanism, each of the plurality of annular sealing members can exhibit appropriate sealing performance according to different positions in the axial direction of the shaft, and can suppress the promotion of deterioration such as wear.

  As a desirable aspect of the present invention, the annular seal member located near the high-pressure side space among the two spaces having different pressures includes a material having a high sealing performance, and the annular seal member located near the low-pressure side space is: It is preferable to include a material having a high corrosion resistance. With this structure, the annular seal member positioned closer to the high-pressure side space is suppressed from being affected by a vacuum environment, a reduced pressure environment, and a process gas filling environment, and deterioration due to gas or the like is suppressed. Since the pressure in the high-pressure side space is reduced by the other annular seal members, the annular seal member located near the low-pressure side space receives only a slight pressure. Each of the plurality of annular seal members can exhibit appropriate sealing performance according to different positions in the axial direction of the shaft, and can suppress the promotion of deterioration such as wear.

  As a desirable aspect of the present invention, the plurality of annular seal members include materials having different hardnesses, and the annular seal member positioned closer to the high-pressure side space among the two spaces having different pressures is positioned closer to the low-pressure side space. It is preferable to include a material harder than the annular sealing member. Thereby, the influence of a vacuum environment, a pressure reduction environment, and a process gas filling environment is suppressed in the annular seal member positioned near the high-pressure side space, and deterioration due to gas or the like is suppressed. Since the pressure in the high-pressure side space is reduced by the other annular seal members, the annular seal member located near the low-pressure side space receives only a slight pressure. Thereby, each of the plurality of annular seal members can exhibit appropriate sealing performance according to different positions in the axial direction of the shaft, and can suppress the promotion of deterioration such as wear.

  As a desirable aspect of the present invention, the annular seal member includes a fixing portion that contacts the housing, a lip portion that contacts a radially outer surface of the rotating portion, and an annular connecting portion that connects the fixing portion and the lip portion. It is preferable to provide. Since this sealing mechanism can increase the contact pressure with which the annular seal member comes into contact with the rotating portion, high sealing performance can be realized.

  As a desirable mode of the present invention, it further includes a biasing member that biases the pressing force of the lip portion toward the rotating portion, and the biasing member includes the lip portion, the annular coupling portion, and the fixing portion. It is preferable to be provided in the surrounding space. With this structure, the sealing mechanism can improve the sealing performance.

  As a desirable aspect of the present invention, it is preferable that the shaft is rotatably supported. Thereby, the sealing mechanism can transmit the rotational motion between two spaces having different pressures or gases.

  As a desirable mode of the present invention, it is preferable that the shaft is supported so as to be linearly movable so that a relative position to the housing changes in an axial direction. This allows the seal mechanism to transmit linear motion between two different spaces of pressure or gas.

  As a desirable mode of the present invention, it is preferable that among the plurality of annular seal members, the distance between the annular seal members adjacent in the axial direction is larger than the axial stroke in which the shaft can linearly move. With this structure, different lubricants can be used for the annular seal members adjacent in the axial direction among the plurality of annular seal members. As a result, the lifetime of the annular seal member can be extended.

  As a desirable aspect of the present invention, a storage portion that supplies lubricant to one of the annular seal members adjacent in the axial direction among the plurality of annular seal members, and the annular seal member adjacent in the axial direction from the storage portion is provided. The distance to the other is preferably larger than the axial stroke in which the shaft can linearly move. With this structure, different lubricants can be used for the annular seal members adjacent in the axial direction among the plurality of annular seal members. As a result, the lifetime of the annular seal member can be extended.

  As a desirable mode of the present invention, it is preferable that a plurality of annular seal members are connected to a space between adjacent annular seal members in the axial direction, and include a flow path for exhaust or intake. With this structure, the start-up time of the seal mechanism can be shortened.

  As a desirable aspect of the present invention, it is preferable that a pressure fluctuation device is provided, and the pressure fluctuation device exhausts or sucks the flow path according to the pressure or gas flow rate of the flow path. With this structure, the start-up time of the seal mechanism can be shortened.

  As a desirable aspect of the present invention, it is preferable that a pressure fluctuation device is provided, and the pressure fluctuation device always exhausts the flow path. With this structure, the start-up time of the seal mechanism can be shortened. Further, with this structure, the sealing mechanism can improve the sealing performance.

  As a desirable mode of the present invention, it is preferable that a reservoir for supplying a lubricant is provided near the low pressure side space of all the annular seal members among the plurality of annular seal members. With this structure, the life of the annular seal member can be extended.

  As a desirable mode of the present invention, it is preferable that the seal mechanism drive device includes the above-described seal mechanism and a drive device that applies at least one of rotational motion and linear motion to the shaft. With this structure, the drive device of the seal mechanism can achieve high sealing performance.

  As a desirable aspect of the present invention, there is provided a transfer device that includes the above-described sealing mechanism and a movable member that moves the object to be transported, and at least one of the rotational motion and linear motion of the shaft and the motion of the movable member are interlocked. It is preferable. With this structure, the transfer device can achieve high sealing performance.

  As a desirable mode of the present invention, it is preferable that it is a manufacturing apparatus provided with the sealing mechanism mentioned above. With this structure, the manufacturing apparatus can achieve high sealing performance and can improve the quality of the product.

  ADVANTAGE OF THE INVENTION According to this invention, the sealing mechanism which improves sealing performance, the drive device of a sealing mechanism, a conveying apparatus, and a manufacturing apparatus can be provided.

FIG. 1 is a cross-sectional view schematically illustrating a manufacturing apparatus including a rotation mechanism according to the first embodiment. FIG. 2 is a cross-sectional view schematically showing the rotation mechanism according to the first embodiment. FIG. 3 is an AA arrow view of FIG. FIG. 4 is an enlarged view of a gap of the rotation mechanism according to the first embodiment. FIG. 5 is a cross-sectional view schematically showing a rotation mechanism according to the second embodiment. FIG. 6 is a cross-sectional view schematically showing a rotation mechanism according to the third embodiment. FIG. 7 is a cross-sectional view schematically showing a sealing mechanism according to the fifth embodiment. FIG. 8 is a cross-sectional view schematically showing a sealing mechanism according to the sixth embodiment. FIG. 9 is a cross-sectional view schematically showing a sealing mechanism according to the seventh embodiment. FIG. 10 is a cross-sectional view schematically showing a sealing mechanism according to the eighth embodiment.

  Hereinafter, modes for carrying out the present invention (hereinafter referred to as embodiments) will be described with reference to the drawings. In addition, this invention is not limited by the following embodiment. In addition, constituent elements in the following embodiments include those that can be easily assumed by those skilled in the art, those that are substantially the same, and those in a so-called equivalent range. Furthermore, the constituent elements disclosed in the following embodiments can be appropriately combined.

(Embodiment 1)
FIG. 1 is a cross-sectional view schematically illustrating a manufacturing apparatus including a rotation mechanism according to the first embodiment. FIG. 2 is a cross-sectional view schematically showing the rotation mechanism according to the first embodiment. 1 and 2 show a cross section of the rotating mechanism 1 taken along a plane including the rotating center axis Zr of the rotating mechanism 1 and parallel to the rotating center axis Zr. In the first embodiment, the axial direction is a direction parallel to the rotation center axis Zr. FIG. 3 is an AA arrow view of FIG. FIG. 4 is an enlarged view of a gap of the rotation mechanism according to the first embodiment. The rotation mechanism 1 is a mechanical element that transmits rotation, and is used in a special environment such as a vacuum environment, a reduced pressure environment, or a process gas filling environment. The rotating mechanism 1 is applied to a manufacturing apparatus such as semiconductor manufacturing or machine tool manufacturing, a transport apparatus, and a driving apparatus. Here, as an example, a case where the rotation mechanism 1 is a rotation drive device (spindle unit) provided with a spindle as a rotation shaft in a manufacturing apparatus for semiconductor manufacturing will be described. It is not limited.

  As shown in FIG. 1, for example, a manufacturing apparatus 100 used for semiconductor manufacturing includes a rotation mechanism 1, a housing 10, an electric motor 8, and a control device 91 that controls the electric motor 8. The rotation mechanism 1 and the electric motor 8 transmit the rotation of the electric motor 8 as the seal mechanism driving device 6 to rotate the transport table (movable member) 33. The manufacturing apparatus 100 sets the internal space V of the housing 10 to a vacuum environment, a reduced pressure environment, and a process gas filling environment, and then transfers a transfer object (for example, a semiconductor substrate, a workpiece, or a tool) in the internal space V It is mounted on (movable member) 33 and moved. When the object to be transported is moved, if the electric motor 8 is installed in the internal space V, foreign matter may be generated by the operation of the electric motor 8. Therefore, the manufacturing apparatus 100 installs the electric motor 8 in the external space E while leaving the transfer table 33 in the internal space V. The rotation mechanism 1 is a seal mechanism that transmits the power of the electric motor 8 installed in the external space E to the internal space V while improving the sealing performance by separating the internal space V and the external space E. The electric motor 8 is, for example, a direct drive motor, a drive device using a belt drive, a linear motor, a servo motor, or the like. The control device 91 includes an input circuit, a central processing unit (CPU) that is a central processing unit, a memory that is a storage device, and an output circuit. According to the program stored in the memory, the electric motor 8 is controlled, and the object to be transported (for example, a semiconductor substrate, workpiece or tool) in the internal space V is mounted on the transport table (movable member) 33 and moved to manufacture. The apparatus 100 can produce a desired product.

  The rotation mechanism 1 includes a housing 2, a rotation member 3, and a bearing 4. The housing 2 is a member that accommodates the bearing 4. In the first embodiment, the housing 2 includes, as a housing body, a barrel portion 21 that is a cylindrical member, and a housing flange portion 22 provided at one end portion of the barrel portion 21. The housing 2 further includes a lid portion 23 fixed to the housing flange portion 22 with a bolt 27, and an outer ring stopper member 24 and a seal fixing spacer 25 disposed inside the body portion 21 of the housing body. . In the first embodiment, the body portion 21 is a cylindrical member (for example, a cylinder), and has through holes 21d, 21c, and 21b from one end portion to the other end portion.

  Each of the housing flange portions 22 is a plate-shaped flange member. In the first embodiment, the shape of the housing flange portion 22 is circular in plan view, but these shapes are not limited to circular. The housing flange portion 22 includes the through hole 21b described above that includes the rotation center axis Zr of the shaft 31 and penetrates in the thickness direction. In the housing 2, the housing flange portion 22 is applied from the outside of the housing 10 so as to cover the opening 10 e of the housing 10, and the housing flange portion 22 and the wall surface of the housing 10 are fastened with bolts (not shown). It is fixed to the housing 10. Thereby, the housing 2 can block the opening 10 e of the housing 10 from the outside of the housing 10. The housing flange portion 22 has an annular groove in a portion overlapping the housing 10 in plan view, and an O-ring (annular seal) 11 is fitted into the annular groove to improve the sealing performance between the housing flange portion 22 and the housing 10. ing.

  The rotating member 3 includes a shaft 31, a rotating part (outer peripheral part) 32, and a transfer table (movable member) 33. The shaft 31 is an output shaft (main shaft) of the rotation mechanism 1, and one end thereof is inserted into the housing 2. The other end of the shaft 31 is connected to the output shaft 81 of the electric motor 8 through a coupling 82. The transfer table (movable member) 33 is fixed to one end portion of the shaft 31 via the rotating portion 32.

  The transport table 33 and the rotating unit 32 rotate together with the shaft 31. In the transfer table 33, an object is placed on the surface opposite to one end of the shaft 31. In the first embodiment, the transport table 33 is a plate-like member and is circular in plan view. The conveyance table 33 projects to the outside in the radial direction of the rotating portion 32 that protrudes in the axial direction from the housing flange portion 22 of the housing 2.

  The bearing 4 is installed inside the housing 2, in the first embodiment, and rotatably supports the shaft 31. The bearing 4 includes a bearing 41 and a bearing 42, and is disposed at a distance along the rotation center axis Zr via a double cylindrical bearing spacer 43. Thereby, the bearing 4 can suppress the whirling of the shaft 31 by supporting the shaft 31 at a plurality of locations of the bearing 41 and the bearing 42. In the first embodiment, the shaft 31 is supported by the housing 2 by the two bearings 41 and 42, but the number of bearings is not limited to two.

  As shown in FIG. 2, the bearings 41 and 42 include outer rings 41a and 42a, rolling elements 41b and 42b, and inner rings 41c and 42c. The inner rings 41c and 42c are disposed on the radially inner side of the outer rings 41a and 42a. Thus, in Embodiment 1, the bearings 41 and 42 are both rolling bearings. The rolling elements 41b and 42b are disposed between the outer rings 41a and 42a and the inner rings 41c and 42c. In the bearings 41 and 42, outer rings 41 a and 42 a are in contact with the inner wall of the through hole 21 d of the body portion 21 of the housing 2.

  As shown in FIG. 2, the outer ring 41 a has one end in the axial direction in contact with the positioning portion 21 a in which the inner wall of the through hole 21 d of the body portion 21 is carved. The outer ring pressing portion 24a of the outer ring stopper member 24 positions and fixes one end of the outer ring 42a in the axial direction. For this reason, the positioning part 21a and the outer ring stopper member 24 sandwich and fix the bearing 41, the bearing spacer 43, and the bearing 42 in the axial direction. With such a structure, the bearings 41 and 42 are attached to the housing 2. In the first embodiment, both the bearings 41 and 42 are ball bearings, but the types of the bearings 41 and 42 as rolling bearings are not limited to ball bearings. In the first embodiment, the bearings 41 and 42 are both rolling bearings, but may be sliding bearings.

  The rotating portion 32 has a cylindrical shape having a hollow recess, and the radially outer surface faces the housing 2 with a gap 55 having a predetermined size. The rotating part 32 of the first embodiment is coaxial with the shaft 31, but the rotating part 32 protrudes larger in diameter than the shaft 31. As described above, the rotating portion 32 has a concave portion in which the radially outer surface 32p of the rotating portion 32 has a larger outer shape than the outer periphery 31b of the shaft 31, and the one end 31c of the shaft 31 can be inserted into the hollow portion inside the rotating portion 32. An inner wall 32u is provided. Thus, the rotating part 32 has a cover structure that covers the one end 31 c of the shaft 31. By inserting the one end 31c of the shaft 31 into the rotation part 32, the rotation center axis of the rotation part 32 and the rotation center axis Zr of the shaft 31 are aligned, so that the adjustment work of the rotation center axis becomes unnecessary. For this reason, the rotation mechanism 1 of the first embodiment also facilitates component replacement during maintenance.

  As shown in FIG. 2, the rotating part 32 has through-holes 32 h 1 and 32 h 2 penetrating in the axial direction from the transport table (movable member) 33 side which is one end part toward the shaft 31 side which is the other end part. I have. The through hole 32h1 is opened coaxially with the rotation center axis Zr of the rotation unit 32. A plurality of through-holes 32h2 are opened at point-symmetrical positions with respect to the rotation center axis Zr of the rotating part 32. Here, the conveyance table (movable member) 33 described above includes a through hole 33h1 penetrating in the axial direction from one end to the other end. A plurality of through holes 33h1 are opened at point-symmetrical positions with respect to the rotation center axis Zr of the transport table (movable member) 33. On the other hand, a screw hole 31h1 and a screw hole 31h2 are formed in the end surface of one end 31c of the shaft 31. The screw hole 31h1 is opened coaxially with the rotation center axis Zr of the shaft 31. A plurality of screw holes 31h2 are formed at positions symmetrical with respect to the rotation center axis Zr of the shaft 31.

  The bolt 34 penetrates the through hole 32h1 and is fastened to the screw hole 31h1 in a state where the one end 31c of the shaft 31 is inserted into the hollow portion inside the rotating portion 32, thereby fixing the rotating portion 32 and the shaft 31. . In a state where the rotating part 32 and the shaft 31 are fixed by the bolt 34, the plurality of bolts 35 penetrate the through hole 33h1 and the through hole 32h2, and are fastened to the screw hole 31h2. And fix. The bolt 34 may be fastened to the through hole 32h2 with at least one inside of the through hole 32h2 as a female screw.

  As described above, the rotating part 32 of the first embodiment is coaxial with the shaft 31, but the rotating part 32 protrudes larger in diameter than the shaft 31. For this reason, the rotation part 32 can contact | abut at least one part of the end surface 32a on the opposite side of the conveyance table 33 to the inner ring | wheel 42c, and can be used as an inner ring | wheel presser. With this structure, the number of parts can be reduced, and an inexpensive rotation mechanism 1 can be provided. One end of the inner ring 41c in the axial direction is in contact with the positioning portion 31a of the outer peripheral recess of the shaft 31. Since the rotating part 32 positions and fixes one end of the inner ring 42c in the axial direction, the positioning part 31a and the rotating part 32 sandwich and fix the bearing 41, the bearing spacer 43 and the bearing 42 in the axial direction. With such a structure, the bearings 41 and 42 are attached to the shaft 31. The bolt 34 fixes the rotating portion 32 and the shaft 31 so that the rotating portion 32 can apply an appropriate pressing force in the axial direction of the inner ring 42c.

  The inner wall 32u of the hollow portion inside the rotating portion 32 is provided with an O-ring (second annular seal member) 36 fitted in an annular groove that is annularly recessed in a plane parallel to the axial direction. The O-ring (second annular seal member) 36 can suppress the gas leaking through the through hole 32h1 and improve the sealing performance of the rotating mechanism 1.

  The seal fixing spacer 25 defines the size of the gap 55 and fixes the annular seal member 5A. As shown in FIG. 3, the seal fixing spacer 25 is an annular member. As shown in FIG. 4, the seal fixing spacer 25 includes a spacer positioning portion 25a, a seal fixing concave portion 25b, a radial inner peripheral portion 25c, and a radial outer periphery. A part 25d, an annular convex part 25e projecting toward the rotating part 32 rather than the radially inner peripheral part 25c, an axial one end 25j, and an axial other end 25g are provided. At least a part of the radially outer peripheral portion 25 d is in contact with the inner wall of the through hole 21 b of the trunk portion 21. Since the seal fixing spacer 25 acts as a guide for the annular seal member 5A, the contact pressure with which the annular seal member 5A comes into contact with the rotating portion 32 can be set to an appropriate set value.

  The housing flange portion 22 is formed with an annular groove 22a concentrically with the rotation center axis Zr, and at least a part of the radially outer peripheral portion 25d is a part of the wall surface of the annular groove 22a. When the lid portion 23 is fixed to the housing flange portion 22 with bolts 27, the O-ring (third annular seal member) 26 fitted in the annular groove 22a improves the sealing performance and seals. The lid portion 23 abuts against one end 25j in the axial direction of the seal fixing spacer 25. The O-ring (third annular seal member) 26 is disposed at a position where the diameter is larger than that of the annular seal member 5A. The spacer positioning portion 25a is sandwiched and fixed between the outer ring stopper member 24 and the inner wall of the through hole 21b of the body portion 21 described above. The annular groove 22a and the O-ring (third annular seal member) 26 need not be provided when the degree of vacuum in the internal space V is low.

  As shown in FIG. 3, the annular seal member 5 </ b> A rotates in the same manner as the rotating portion 32, the seal fixing spacer 25, the O-ring (third annular seal member) 26 fixed to the housing flange portion 22, and the O-ring 11. It arrange | positions so that a concentric circle may be drawn centering on the central axis Zr. The annular seal member 5B is the same as the annular seal member 5A. As shown in FIG. 2, the annular seal members 5 </ b> A and 5 </ b> B are disposed closer to the internal space V on the low pressure side among the two spaces having pressures different from those of the bearing 4. With this structure, the annular seal members 5A and 5B prevent the lubricant used in the bearing 4 from scattering to the internal space V side.

  The seal fixing spacer 28 defines the size of the gap 55 and fixes the annular seal member 5B. Similar to the seal fixing spacer 25 shown in FIG. 3, the seal fixing spacer 28 is an annular member. As shown in FIG. 4, the seal fixing spacer 28 protrudes closer to the rotating portion 32 than the seal fixing recess 28 b, the radial inner peripheral portion 28 c, the radial outer peripheral portion 28 d, and the radial inner peripheral portion 28 c. An annular convex portion 28e, an axial one end 28j, and an axial other end 28g. At least a part of the radially outer peripheral portion 28 d is in contact with the inner wall of the through hole 21 c of the trunk portion 21. Since the seal fixing spacer 28 acts as a guide for the annular seal member 5B, the contact pressure with which the annular seal member 5B comes into contact with the rotating portion 32 can be set to an appropriate set value. One end 28 j in the axial direction is an end face facing the other end 25 g in the axial direction of the seal fixing spacer 25, and the other end 28 g in the axial direction is an end face facing the outer ring stopper member 24. The seal fixing spacer 28 is fixed by being sandwiched between the seal fixing spacer 25 and the outer ring stopper member 24.

  As shown in FIG. 4, the annular seal members 5 </ b> A and 5 </ b> B are formed on the fixing portion 52 in contact with the radial inner peripheral portions 25 c and 28 c of the seal fixing spacers 25 and 28 of the housing 2 and the radial outer surface 32 p of the rotating portion 32. The lip part 51 which contacts, the cyclic | annular connection part 53 which connects the fixing | fixed part 52 and the lip part 51, and the seal flange part 54 are provided. With this structure, the fixed portion 52, the annular connecting portion 53, and the lip portion 51 have a substantially U-shaped cross section, and the space surrounded by the fixed portion 52, the annular connecting portion 53, and the lip portion 51 has different pressures. Of the two spaces, it opens toward the external space E on the high pressure side.

  The material of the annular seal members 5A and 5B is more preferably polyethylene or polytetrafluoroethylene. Polyethylene or polytetrafluoroethylene is excellent in wear resistance and chemical resistance as a material of the annular seal members 5A and 5B, and is suitable for lubrication with the rotating portion 32.

  As the material of the rotating portion 32 that comes into contact, any one of high carbon chrome bearing steel, martensitic stainless steel, precipitation hardening stainless steel, and precipitation hardening stainless steel high silicon alloy containing 3.4 mass% or more of Si is used. preferable. With this structure, wear of the annular seal members 5A and 5B is suppressed, and in the first embodiment, the rotation mechanism 1 can improve the sealing performance.

  The material of the rotating part 32 that is in contact is hardened so that the Rockwell hardness of the radially outer surface 32p of the rotating part 32 is 50 HRC or more using a material that can increase the surface hardness. The curing process is performed by coating the diamond-like carbon (DLC) on the radially outer surface 32p of the rotating portion 32. Or a hardening process is performed by carrying out hard chrome plating to the radial direction outer surface 32p of the rotation part 32. FIG. Thereby, the lifetime of the rotation part 32 can be extended. For example, when the Rockwell hardness of the shaft 31 is about 50 HRC, the Rockwell hardness of the radially outer surface 32p of the rotating part 32 can be made larger than 50 HRC, so that the radially outer surface 32p of the rotating part 32 is The shaft 31 can be harder than the outer surface in the radial direction. The rotation mechanism 1 can suppress the usage amount of the material whose surface hardness can be increased to suppress wear by using the shaft 31 as another material. The radial outer surface 32p of the rotating part 32 can be harder than the radial outer surface of the shaft 31. Since the rotating part 32 and the shaft 31 are separate bodies, the degree of freedom in selecting the material of the shaft 31 can be obtained, and the range of the curing process can be limited. Therefore, the rotating mechanism 1 can reduce the manufacturing cost.

  The annular seal members 5A and 5B are not limited to two and may be three or more. The plurality of annular seal members 5 </ b> A and 5 </ b> B can improve the sealing performance of the rotation mechanism 1. Since the annular seal members 5A and 5B are made of different materials, both corrosion resistance and durability can be achieved.

  For example, in the internal space V, the material of the annular seal member may be further deteriorated due to the influence of the vacuum environment, the reduced pressure environment, and the process gas filling environment. By the way, each of the annular seal members 5 </ b> A and 5 </ b> B is disposed at a different position in the axial direction of the shaft 31 and is in contact with the radially outer surface 32 p of the rotating portion 32. Therefore, in the rotating mechanism 1, the annular seal member 5B located on the high pressure side (external space E side) of the two spaces having different pressures uses a material having high sealing performance, such as polyethylene, and the low pressure side (internal For the annular seal member 5A located on the space V side), a material having high corrosion resistance, such as polytetrafluoroethylene, is used. Thereby, the annular seal member 5B with high sealing performance is suppressed from being affected by the vacuum environment, the reduced pressure environment, and the process gas filling environment in the internal space V, and the deterioration due to gas or the like is suppressed. Since the pressure on the high pressure side (external space E side) is reduced by the annular seal member 5B, the annular seal member 5A receives only a slight pressure. And each of annular seal member 5A, 5B can exhibit appropriate sealing performance according to the position where the axial direction of shaft 31 differs, and can suppress promotion of degradation, such as wear.

  As shown in FIG. 4, when the lid portion 23 is fixed to the housing flange portion 22 with bolts 27, the seal fixing spacer 25 sandwiches the seal flange portion 54 inserted into the seal fixing recess 25 b with the lid portion 23. Fix it. Thereby, the rotation mechanism 1 of Embodiment 1 can suppress the possibility that the annular seal member 5 </ b> A rotates together with the rotation of the rotation part 32 by providing the annular seal member 5 </ b> A with the seal flange portion 54. When the lid portion 23 is fixed to the housing flange portion 22 with the bolts 27, the seal fixing spacer 25 presses the seal fixing spacer 28. The seal flange portion 54 in which the seal fixing spacer 25 is inserted into the seal fixing recess 28 b is sandwiched and fixed by the seal fixing spacer 28. Thereby, the rotation mechanism 1 of Embodiment 1 can suppress the possibility that the annular seal member 5B rotates together with the rotation of the rotation unit 32 by the annular seal member 5B including the seal flange portion 54.

  The lid 23 can adjust the degree of vacuum by appropriately setting the distance Δd1 of the gap s1 between the radially inner side surface 23f and the radially outer surface 32p. The distance Δd1 is preferably 0.001 mm or more and 0.5 mm or less, for example. Similarly, the annular convex portion 25e can adjust the degree of vacuum by appropriately setting the distance Δd2 of the gap s2 between the radially inner side surface 25f and the radially outer surface 32p. The distance Δd2 is preferably 0.001 mm or more and 0.5 mm or less, for example. Further, the annular convex portion 28e can adjust the degree of vacuum by appropriately setting the distance Δd3 of the gap s3 between the radially inner side surface 28f and the radially outer surface 32p. The distance Δd3 is preferably 0.001 mm or more and 0.5 mm or less, for example. When the distance Δd1, the distance Δd2, and the distance Δd3 are reduced, it is possible to easily hold a lubricant such as grease in the gap 55.

  As shown in FIG. 4, an urging member 56 is disposed inside the space surrounded by the fixed portion 52, the annular coupling portion 53, and the lip portion 51, and urges the pressing force of the lip portion 51 toward the rotating portion 32. be able to. The urging member 56 is, for example, stainless steel, and is an elastic body that has a V-shaped cross-sectional view in which the flat plate-like portion 56a and the plate-like portion 56b are bent at the bent portion 56c. The urging member 56 is urged so that the tips of the plate-like portion 56a and the plate-like portion 56b spread.

  In the annular seal members 5 </ b> A and 5 </ b> B, in addition to the pressure due to the elastic deformation of the lip portion 51, the lip portion 51 that has received the pressure applied to the urging member 56 contacts the radially outer surface 32 p of the rotating portion 32. For this reason, the rotation mechanism 1 can increase the contact pressure at which the lip portion 51 contacts the radially outer surface 32 p of the rotation portion 32. Furthermore, since the space surrounded by the fixing portion 52, the annular coupling portion 53, and the lip portion 51 is open toward the external space E on the high pressure side among the two spaces having different pressures, the two spaces having different pressures are provided. This pressure difference can increase the contact pressure at which the lip portion 51 contacts the radially outer surface 32p of the rotating portion 32. Thereby, even if the rotation mechanism 1 makes the vacuum of the internal space V high, it can maintain high sealing performance. Further, not only the inner peripheral side tip 51a of the lip part 51 contacts the radial outer surface 32p, but also at least a part of the inner peripheral side base part 51d of the lip part 51 close to the annular connecting part 53 also has the radial outer surface 32p. To touch. As a result, since the inner peripheral side of the lip portion 51 is in contact with the radially outer surface 32p by the surface, the sealing performance can be maintained.

  Even if the lip portion 51 or the shaft 31 is worn or deformed, the biasing member 56 acts to maintain the contact pressure. For this reason, the rotation mechanism 1 can reduce the replacement frequency of the annular seal members 5 </ b> A, 5 </ b> B or the shaft 31 that is a component that enhances the sealing performance.

  As described above, the rotation mechanism 1 can separate the two internal spaces V and the external space E having different pressures. The rotating mechanism 1 includes a housing 2, a shaft 31 inserted into the housing 2, a bearing 4 that is provided in the housing 2, and rotatably supports the shaft 31, and is fixed to the one end of the shaft 31 as a separate member. The rotating portion 32 and the annular seal members 5 </ b> A and 5 </ b> B that rotate together with the radial outer surface 32 p are opposed to the seal fixing spacer 25 of the housing 2 with a gap 55 having a predetermined size. The annular seal members 5A and 5B include different materials, and are arranged at different positions in the axial direction parallel to the rotation center axis Zr of the shaft. These annular seal members 5A and 5B seal the gap 55.

  With this structure, the annular seal member 5B located closer to the high-pressure side space is less affected by the vacuum environment, the reduced pressure environment, and the process gas filling environment in the internal space V, and the deterioration due to gas or the like is suppressed. Since the pressure on the high-pressure side (external space E side) is reduced by the annular seal member 5B, the annular seal member 5A located closer to the low-pressure side space receives only a slight pressure. And each of annular seal member 5A, 5B can exhibit appropriate sealing performance according to the position where the axial direction of shaft 31 differs, and can suppress promotion of degradation, such as wear.

  The annular seal members 5 </ b> A and 5 </ b> B according to the first embodiment may be so-called O-rings having a circular cross section. However, as described above, the fixing portion 52 in contact with the seal fixing spacer 25 of the housing 2 and the rotating portion 32. It is preferable to include a lip portion 51 that is in contact with the radially outer surface 32p, and an annular connecting portion 53 that connects the fixed portion 52 and the lip portion 51. The urging member 56 urges the pressing force of the lip portion 51 toward the rotating portion 32 side. Since the rotation mechanism 1 can increase the contact pressure with which the annular seal members 5 </ b> A and 5 </ b> B come into contact with the rotating portion 32, high sealing performance can be realized. Thereby, the rotation mechanism 1 can also make a high vacuum by lowering the pressure of one of the two spaces having different pressures. And even if a dimensional change arises by abrasion of the lip | rip part 51, since the urging | biasing member 56 presses the lip | rip part 51, the sealing performance fall can be suppressed. For this reason, the rotation mechanism 1 can improve sealing performance.

  A space surrounded by the lip portion 51, the annular connecting portion 53, and the fixed portion 52 is open to the high-pressure side external space E among the two internal spaces V and external spaces E having different pressures. With this structure, the pressure due to the elastic deformation of the lip portion 51 itself of the annular seal members 5A and 5B and the pressure applied by the urging member 56 are synergistic, and the annular seal members 5A and 5B come into contact with the rotating portion 32. Contact pressure can be increased.

  The urging member 56 is preferably provided in a space surrounded by the fixing portion 52, the annular coupling portion 53, and the lip portion 51. With this structure, the lip portion 51 can be in surface contact with the rotating portion 32 easily.

(Embodiment 2)
FIG. 5 is a cross-sectional view schematically showing a rotation mechanism according to the second embodiment. The same components as those in the first embodiment described above are denoted by the same reference numerals, and description thereof is omitted. The rotating mechanism 1 according to the second embodiment does not include the inner wall 32u of the recessed portion into which the one end 31c of the shaft 31 can be inserted in the hollow portion inside the rotating portion 32, and is a solid structure. The convex portion 32T at one end 32t of the rotating portion 32 has a circular shape in a plan view, is smaller in diameter than the radially outer surface 32p of the rotating portion 32, and is inserted into a space that surrounds the inner peripheral side of the inner ring 42c. Fit together. One end 32 t of the rotating part 32 is in contact with one end 31 c of the shaft 31. The convex portion 32T includes an O-ring (second annular seal member) 37 fitted in an annular groove that is annularly recessed in a plane parallel to the axial direction. The O-ring (second annular seal member) 37 can suppress the gas leaking through the through hole 32h1 and improve the sealing performance of the rotating mechanism 1. An annular groove may be provided at one end 31c of the shaft 31, and an O-ring (second annular seal member) 37 may be provided on the shaft 31 side.

  In the rotation mechanism 1 according to the second embodiment, since the rotation center axis of the rotation unit 32 and the rotation center axis of the shaft 31 are aligned, the adjustment work of the rotation center axis Zr becomes unnecessary. For this reason, the rotation mechanism 1 of the second embodiment also facilitates component replacement during maintenance.

  As shown in FIG. 5, the urging member 56 is made of, for example, stainless steel, and is an elastic member that is U-shaped in cross-section when both the flat plate-like portion 56a and the plate-like portion 56b are bent at the bent portion 56c. Is the body. The bent portion 56c is bent so as to have a predetermined curvature. The urging member 56 is urged so that the tips of the plate-like portion 56a and the plate-like portion 56b spread.

(Embodiment 3)
FIG. 6 is a cross-sectional view schematically showing a rotation mechanism according to the third embodiment. The same components as those in the first embodiment or the second embodiment described above are denoted by the same reference numerals, and description thereof is omitted. The rotating mechanism 1 according to the third embodiment is not provided with a concave inner wall 32u into which the one end 31c of the shaft 31 can be inserted into the hollow portion inside the rotating portion 32, and is integral with the shaft 31, It is a part.

(Embodiment 4)
The rotating mechanism 1 according to the fourth embodiment is the same as the rotating mechanism according to the first to third embodiments, but the materials of the annular seal members 5A and 5B are different. The same components as those in the first embodiment, the second embodiment, or the third embodiment described above are denoted by the same reference numerals, and the description thereof is omitted.

  For example, in the internal space V, the material of the annular seal member may be further deteriorated due to the influence of the vacuum environment, the reduced pressure environment, and the process gas filling environment. By the way, each of the annular seal members 5 </ b> A and 5 </ b> B is disposed at a different position in the axial direction of the shaft 31 and is in contact with the radially outer surface 32 p of the rotating portion 32. Therefore, the rotating mechanism 1 uses a low-hardness material such as polyethylene having a high sealing performance as the annular seal member 5B located on the high pressure side (external space E side) of the two spaces having different pressures. For the annular seal member 5A located on the low pressure side (inside the internal space V), a highly durable high hardness material such as polytetrafluoroethylene is used.

  As described above, the annular seal member 5B located near the high-pressure side space (external space E) of the two spaces having different pressures is harder than the annular seal member 5A located near the low-pressure side space (internal space V). Is used. As a result, the annular seal member 5B located closer to the high-pressure side space (external space E) is restrained from being affected by the vacuum environment, the reduced pressure environment, and the process gas filling environment in the internal space V, and the deterioration due to gas or the like is suppressed. The Since the pressure on the high pressure side (external space E side) is reduced by the annular seal member 5B, the annular seal member 5A located closer to the low pressure side space (internal space V) receives only a slight pressure. Thereby, each of the annular seal members 5A and 5B can exhibit an appropriate sealing property according to different positions in the axial direction of the shaft 31, and can suppress the promotion of deterioration such as wear.

(Embodiment 5)
FIG. 7 is a cross-sectional view schematically showing a sealing mechanism according to the fifth embodiment. The seal mechanism 1A according to the fifth embodiment can separate two spaces having different pressures as in the rotation mechanism 1 according to the first to fourth embodiments. It differs in that it can move linearly in the direction. The materials of the annular seal members 5A and 5B are different. The same components as those in the first to fourth embodiments described above are denoted by the same reference numerals and description thereof is omitted.

A seal mechanism 1 </ b> A according to the fifth embodiment includes a housing 2 and a rotating member 3. The housing 2 does not accommodate the bearing 4 and the shaft 31 penetrates like the rotation mechanism 1 according to the first embodiment described above. As described above, in the sealing mechanism 1A according to the fifth embodiment, the axial position of the shaft 31 is not restricted by the bearing 4 or the like as in the rotating mechanism 1 described above.
In the fifth embodiment, the housing 2 has a seal fixing spacer 28A, a seal fixing spacer 25A, and a lid portion 23A as the housing body, and the seal fixing spacer 28A, the seal fixing spacer 25A, and the lid portion 23A are in the axial direction. Are stacked. The lid 23A according to the fifth embodiment is fixed to the seal fixing spacer 25A by a fixing member 27A such as a bolt. Similarly to the housing flange portion 22 according to the first embodiment, the lid portion 23A according to the fifth embodiment is fixed to the housing 10 at a portion overlapping with the housing 10 in a plan view by a fixing member 27B such as a bolt. The lid portion 23A according to the fifth embodiment has an annular groove in a portion overlapping the housing 10 in a plan view, and an O-ring (annular seal) 11 is fitted into the annular groove to seal the lid portion 23A and the housing 10 together. Has improved. When the lid 23A is fixed to the seal fixing spacer 25A with a fixing member 27A such as a bolt, an O-ring (third annular seal member) 26A fitted in the annular groove enhances the sealing performance and seals. The lid 23A abuts against one end in the axial direction of the seal fixing spacer 25A. The O-ring (third annular seal member) 26A is disposed at a position having a larger diameter than the annular seal member 5A.

  In the seal fixing spacer 28A according to the fifth embodiment, a portion overlapping the seal fixing spacer 25A in a plan view is fixed by a fixing member 27C such as a bolt. The seal fixing spacer 28A according to the fifth embodiment has an annular groove in a portion overlapping with the seal fixing spacer 25A in a plan view, and an O-ring (third annular seal member) 26B is fitted into this annular groove, and the seal fixing spacer The sealability between 25A and the seal fixing spacer 28A is improved. When the seal fixing spacer 28A is fixed to the seal fixing spacer 25A with a fixing member 27C such as a bolt, the O-ring 26B fitted in the annular groove improves the sealing performance and seals. The seal fixing spacer 28A is in contact with the other axial end of the seal fixing spacer 25A. The O-ring 26B is disposed at a position where the diameter is larger than that of the annular seal member 5B.

  The seal mechanism drive device 6 according to the fifth embodiment includes a rotation drive device 8A and a linear motion drive device 8B. The rotation drive device 8A and the linear motion drive device 8B are connected by a linear motion guide mechanism 89.

  The rotating member 3 includes a shaft 31 and a transport table (movable member) 33. The shaft 31 is an output shaft (main shaft) of the seal mechanism 1 </ b> A, and one end thereof is inserted into the housing 2. The other end portion of the shaft 31 is connected to the output shaft 81 of the motor portion 83 of the rotational drive device 8A via a coupling 82. The transfer table (movable member) 33 is fixed to one end of the shaft 31.

  The rotational drive device 8 </ b> A includes a motor unit 83 and a detector 84 that detects the rotation of the output shaft 81 in the motor housing 80. The motor unit 83 includes a motor stator 83 a and a motor rotor 83 b in the motor housing 80.

  The motor unit 83 is supported by a bearing 4A in which the bearings 44, 45, and 46 are combined so that the motor rotor 83b can rotate about the rotation center axis Zr with respect to the motor housing 80. The motor housing 80 has a hollow cylindrical shape centering on the rotation center axis Zr, and a motor stator 83a and outer rings of the bearings 44, 45, and 46 are fixed to the inner peripheral side. The inner rings of the bearings 44, 45 and 46 are fixed to the outer periphery of the output shaft 81. Since the other end portion of the shaft 31 is connected to the output shaft 81 of the motor portion 83 of the rotational drive device 8A via the coupling 82, the bearing 4A can also rotatably support the shaft 31.

  An excitation coil is wound around the motor stator 83a via an insulating insulator. The motor stator 83a is a cylindrical tube manufactured by laminating thin plates such as electromagnetic steel plates and cold rolled steel plates by means such as adhesion, bosses, and caulking. The exciting coil is a linear electric wire, and can receive a power supply under the control of the control device 91 to excite the motor stator 83a to generate a rotating magnetic field. The motor stator 83 a is a so-called stator of the motor unit 83.

  The motor rotor 83b has a magnet fixed to the outer peripheral side of the core material with the rotation center axis Zr as the center. In the motor rotor 83b, a plurality of magnets are attached along the outer circumferential surface on the radially outer side of the motor rotor 83b, and a plurality of magnets are provided in the circumferential direction. The magnet is a permanent magnet, and S poles and N poles are alternately arranged at equal intervals in the circumferential direction of the motor rotor 83b. Such a motor rotor 83b is called a PM (Permanent Magnet) type rotor. The motor rotor 83b rotates according to the rotating magnetic field excited by the exciting coil on the teeth of the motor stator core.

  The detector 84 is, for example, a resolver device, and is positioned at the end of the motor unit 83 in the axial direction (direction parallel to the rotation center). The detector 84 includes a resolver stator 84a and a resolver rotor 84b. The resolver rotor 84b is fixed to one end of the motor rotor 83b. The resolver stator 84 a is fixed to the motor housing 80. The detector 84 can output a detection signal from the resolver stator 84a in accordance with the rotation of the resolver rotor 84b interlocked with the rotation of the motor rotor 83b. A detection signal from the resolver stator 84a is input to the control device 91, and the control device 91 can detect the rotation of the output shaft 81. The detector 84 is not limited to a resolver device, for example, and may be another magnetic sensor or a rotation detection sensor.

  The linear drive device 8 </ b> B includes a drive motor 90, a screw shaft 85, a connecting portion 86, a support member 87, a positioning portion 88, and a linear motion guide mechanism 89. The drive motor 90 is an electric motor similar to the electric motor 8. The linear drive device 8 </ b> B is not limited to this configuration as long as it is a linear drive device that gives a degree of freedom of linear motion parallel to the axial direction of the shaft 31.

  The drive motor 90 has a reference position relative to the housing 10 fixed by a support member 87. The screw shaft 85 and the connecting portion 86 are a ball screw mechanism, and the rotation of the screw shaft 85 transmitted by the drive motor 90 is converted into a linear motion, and the connecting portion 86 is extended in the direction in which the screw shaft 85 extends (the screw shaft 85). In the MZ direction parallel to the axial direction). The connecting portion 86 is connected to the positioning portion 88, and the position of the positioning portion 88 is interlocked with a position determined along the guide of the linear motion guide mechanism 89 according to the linear motion of the connecting portion 86. The positioning unit 88 is a table on which the rotational driving device 8A is mounted. For this reason, the linear drive device 8B can move the shaft 31 on a straight line (linear motion) along the axial direction of the shaft 31 together with the rotary drive device 8A.

  The control device 91 according to the fifth embodiment controls the motor unit 83 of the rotational drive device 8A and the drive motor 90 of the linear motion drive device 8B to give the shaft 31 at least one of rotational motion and linear motion. For this reason, the control device 91 according to the fifth embodiment provides the motor unit 83 of the rotational drive device 8A and the linear motion drive device 8B so that the transfer table (movable member) 33 is given at least one of rotational motion and linear motion. The drive motor 90 can be controlled.

  In the annular seal members 5A and 5B according to the fifth embodiment, for example, in the internal space V, the material of the annular seal member may be further deteriorated due to the influence of the vacuum environment, the reduced pressure environment, and the process gas filling environment. By the way, each of the annular seal members 5 </ b> A and 5 </ b> B is disposed at a different position in the axial direction of the shaft 31 and is in contact with the radially outer surface 32 p of the rotating portion 32. Therefore, in the seal mechanism 1A, the annular seal member 5B located on the high pressure side (external space E side) of the two spaces having different pressures uses a material having high sealing performance, such as polyethylene, and the low pressure side (internal For the annular seal member 5A located on the space V side), a material having high corrosion resistance, such as polytetrafluoroethylene, is used. Thereby, the annular seal member 5B with high sealing performance is suppressed from being affected by the vacuum environment, the reduced pressure environment, and the process gas filling environment in the internal space V, and the deterioration due to gas or the like is suppressed. Since the pressure on the high pressure side (external space E side) is reduced by the annular seal member 5B, the annular seal member 5A receives only a slight pressure. And each of annular seal member 5A, 5B can exhibit appropriate sealing performance according to the position where the axial direction of shaft 31 differs, and can suppress promotion of degradation, such as wear. The annular seal members 5A and 5B are not limited to two and may be three or more. The plurality of annular seal members 5A and 5B can enhance the sealing performance of the seal mechanism 1A. Since the annular seal members 5A and 5B are made of different materials, both corrosion resistance and durability can be achieved.

  The annular seal members 5A and 5B according to the fifth embodiment are subjected to rotational and linear motion stresses. For this reason, it is more preferable that the strength of the annular seal members 5A and 5B is stronger than the elastic modulus of 0.1 GPa.

(Embodiment 6)
FIG. 8 is a cross-sectional view schematically showing a sealing mechanism according to the sixth embodiment. The same components as those in the first to fifth embodiments described above are denoted by the same reference numerals, and description thereof is omitted.

  The annular seal members 5A and 5B according to the sixth embodiment are arranged so as to be separated by a distance L1 in the axial direction. In the seal mechanism 1A according to the sixth embodiment, at least one pair of adjacent annular seal members 5A and 5B among the plurality of annular seal members is made of a different material. Different lubricants may be suitable for the annular seal members 5A and 5B of different materials. When the shaft 31 is linearly moved in the axial direction as described above, when different lubricants are used for the annular seal members 5A and 5B made of different materials, the outer peripheral surface of the shaft 31 to which the respective lubricants are attached is an annular seal. There is a possibility of contacting both of the members 5A and 5B.

  In the sealing mechanism 1 </ b> A according to the sixth embodiment, it is preferable that the distance L <b> 1 is not less than a stroke that is the maximum length allowed by the linear motion of the shaft 31. Accordingly, different lubricants can be used for the annular seal members 5A and 5B made of different materials. As a result, mixing of different lubricants is suppressed, and each of the different lubricants can maintain the lubrication effect for a long time.

  The pressure in the space between the annular seal member 5 </ b> A and the annular seal member 5 </ b> B (hereinafter referred to as the pressure between seals) is an intermediate pressure between the internal space V and the external space E of the housing 10. Alternatively, when the annular seal member 5A gives priority to corrosion resistance and the seal performance is lower than that of the annular seal member 5B, the pressure between seals is a pressure close to the internal space V of the housing 10, for example, low vacuum.

  The pressure between the seals changes in a first-order lag system with respect to the state change on the internal space V side of the housing 10. For this reason, it is desirable for the sealing mechanism 1A according to the fifth embodiment described above to secure the time until the pressure between the seals is stabilized as the startup time. In contrast, the seal mechanism 1A according to the sixth embodiment includes the housing 2 with a flow path 25H serving as an exhaust line or an intake line connected to the space between the annular seal member 5A and the annular seal member 5B. The gas Air in the space between the annular seal member 5A and the annular seal member 5B is exhausted or sucked through the flow path 25H, so that the pressure between the seals becomes constant. As a result, the sealing mechanism 1A according to the sixth embodiment can shorten the activation time.

  The seal mechanism 1A according to the sixth embodiment may further include a pump as the pressure fluctuation device 92 and a measuring device 93 that measures the pressure or the gas flow rate in the flow path 25H. The control device 91 controls the discharge amount or the inflow amount of the gas air of the pressure fluctuation device 92 according to the measured pressure or gas flow rate in the flow path 25H, and controls the pressure so that the pressure between the seals is constant. May be. Thereby, 1 A of sealing mechanisms concerning Embodiment 6 can shorten starting time.

  The seal mechanism 1A according to the sixth embodiment records the change over time in the pressure or gas flow rate in the flow path 25H measured by the control device 91, and when the predetermined threshold is exceeded, the annular seal member 5A or the annular seal member 5B. Can warn of deterioration. As a result, it is possible to confirm the replacement time of the annular seal member 5A or the annular seal member 5B before greatly affecting the internal space V of the housing 10.

(Embodiment 7)
FIG. 9 is a cross-sectional view schematically showing a sealing mechanism according to the seventh embodiment. The same components as those in the first to sixth embodiments described above are denoted by the same reference numerals and description thereof is omitted.

  The seal mechanism 1A according to the seventh embodiment includes a seal fixing spacer 28A, a seal fixing spacer 25A, and a lid portion 23B as the housing 2 main body, and the seal fixing spacer 28A, the seal fixing spacer 25A, and the lid portion 23B are provided. They are stacked in the axial direction. The lid portion 23B has an annular groove gr1 disposed near the inner space V of the annular seal member 5A, and stores a lubricant for the annular seal member 5A in the space of the groove gr1. Accordingly, the lubricant is always supplied from the groove gr1 to the annular seal member 5A. The distance L2 from the surface on the inner space V side of the lid portion 23B to the groove gr1 is preferably equal to or longer than the stroke that is the maximum length allowed for the linear motion of the shaft 31. Thereby, in the sealing mechanism 1A according to the seventh embodiment, for example, when the internal space V is in a high vacuum environment, a decrease in the degree of vacuum (deterioration) may occur due to the lubricant attached to the surface of the shaft 31 from the groove gr1. Can be reduced. Here, in order to set the distance L2, the sealing mechanism 1A according to the seventh embodiment includes a cylindrical portion in which the end portion of the lid portion 23B on the inner space V side of the housing 10 has a cylindrical portion on the shaft 31 side. There is a step on the outer peripheral side. The structure for setting the distance L2 is not limited to this step, but the seal mechanism 1A according to the seventh embodiment can be reduced in size by using the lid portion 23B.

  In the seal mechanism 1A according to the seventh embodiment, the seal fixing spacer 25A has an annular groove gr2 disposed near the inner space V of the annular seal member 5B, and a lubricant for the annular seal member 5B in the space of the groove gr2. Have accumulated. Thereby, the lubricant is always supplied from the groove gr2 to the annular seal member 5B. The distance L3 from the annular seal member 5A to the groove gr2 is preferably equal to or longer than the stroke that is the maximum length allowed by the linear motion of the shaft 31. Accordingly, even when different lubricants are used for the annular seal members 5A and 5B of different materials, mixing of different lubricants is suppressed, and each of the different lubricants can maintain the lubrication effect for a long time. it can.

  The seal mechanism 1A according to the seventh embodiment includes grooves gr1 and gr2 as lubricant storage portions. The grooves gr1 and gr2 may be holes instead of grooves, and any shape can be used as long as it is a reservoir that can store the lubricant.

  In the seal mechanism 1A according to the seventh embodiment, the pump as the pressure fluctuation device 92 keeps exhausting the flow path 25H constantly. The sealing mechanism 1A according to the seventh embodiment can obtain high sealing performance as well as shortening the startup time by performing exhaust.

(Embodiment 8)
FIG. 10 is a cross-sectional view schematically showing a sealing mechanism according to the eighth embodiment. The same components as those in the first to seventh embodiments described above are denoted by the same reference numerals and description thereof is omitted.

  In the seal mechanism 1A according to the eighth embodiment, the rotating member 3 includes a shaft 31A and an outer peripheral portion 31B. The outer peripheral portion 31B has a cylindrical shape having a hollow recess, similar to the rotating portion 32 of the first embodiment, and the radially outer surface faces the housing 2 with a gap of a predetermined size. The outer peripheral portion 31B of the eighth embodiment is coaxial with the shaft 31A, but the outer peripheral portion 31B protrudes larger in diameter than the shaft 31A. The annular seal members 5A and 5B come into contact with a part of the outer periphery of the outer peripheral portion 31B. By disassembling and taking out the outer peripheral portion 31B from the shaft 31A of the rotating member 3, it is possible to improve the workability of component replacement. Since the shaft 31A can be used by returning to the seal mechanism 1A after exchanging the outer peripheral portion 31B, the shaft 31A can have a long life and cost can be reduced.

  As mentioned above, although Embodiment 1 to Embodiment 8 were described, it is not limited by the content mentioned above. In addition, at least one of various omissions, substitutions, and changes of the components can be made without departing from the gist of the first to eighth embodiments.

1 Rotating mechanism (seal mechanism)
DESCRIPTION OF SYMBOLS 1A Seal mechanism 2 Housing 3 Rotating member 4, 4A, 41, 42, 44, 45, 46 Bearing 5A, 5B Annular seal member 6 Drive device of seal mechanism 8 Electric motor 8A Rotation drive device 8B Direct drive device 21 Body 22 Housing Flange portion 23, 23A, 23B Lid portion 23f Radial inner diameter side 24 Outer ring stopper member 25, 25A Seal fixing spacer 25a Spacer positioning portion 25b Seal fixing recess 25c Radial inner peripheral portion 25d Radial outer peripheral portion 28, 28A Seal fixing Spacer 32 Rotating part 33 Transfer table (movable member)
41a, 42a Outer ring 41c, 42c Inner ring 51 Lip part 51a Inner peripheral side tip 51d Inner peripheral base part 52 Fixing part 54 Seal flange part 55 Gap 56 Biasing member 56c Bending part 91 Control apparatus 100 Manufacturing apparatus E External space V Internal space

Claims (16)

A sealing mechanism that separates two spaces of different pressures or gases,
A housing;
A shaft inserted into the housing;
A plurality of annular seal members that contact a part of the shaft or a radially outer surface of a rotating portion fixed to the shaft and seal a gap;
Including
The plurality of annular seal members include materials of different materials, and are arranged at different positions in the axial direction parallel to the central axis of the shaft.
A sealing mechanism characterized by that. The annular seal member positioned closer to the high-pressure side space among the two spaces having different pressures includes a material having a high sealing performance,
The seal mechanism according to claim 1, wherein the annular seal member positioned closer to the low-pressure side space includes a material made of a material having high corrosion resistance. The plurality of annular seal members include materials having different hardnesses,
2. The seal mechanism according to claim 1, wherein the annular seal member positioned closer to the high-pressure side space among the two spaces having different pressures includes a material harder than the annular seal member positioned closer to the low-pressure side space.   The said annular seal member is provided with the fixing | fixed part which contacts the said housing, the lip | rip part which contact | connects the radial direction outer surface of the said rotation part, and the cyclic | annular connection part which connects the said fixing | fixed part and the said lip | rip part. The sealing mechanism according to any one of the above. A biasing member that biases the pressing force of the lip portion toward the rotating portion;
The sealing mechanism according to claim 4, wherein the urging member is provided in a space surrounded by the lip portion, the annular coupling portion, and the fixing portion.   The seal mechanism according to claim 1, wherein the shaft is rotatably supported.   The seal mechanism according to any one of claims 1 to 6, wherein the shaft is supported so as to be linearly movable so that a relative position with respect to the housing changes in an axial direction.   The seal mechanism according to claim 7, wherein a distance between the annular seal members adjacent in the axial direction among the plurality of annular seal members is larger than an axial stroke in which the shaft can linearly move.   Among the plurality of annular seal members, a storage portion that supplies a lubricant to one of the annular seal members adjacent in the axial direction, and the distance from the storage portion to the other of the annular seal members adjacent in the axial direction is The sealing mechanism according to claim 7, wherein the shaft is larger than an axial stroke capable of linear movement.   10. The device according to claim 1, further comprising a flow path for exhaust or intake air connected to a space between the annular seal members adjacent in the axial direction among the plurality of annular seal members. Seal mechanism.   The seal mechanism according to claim 10, further comprising a pressure fluctuation device, wherein the pressure fluctuation device exhausts or sucks the flow path according to a pressure or a gas flow rate of the flow path.   The seal mechanism according to claim 10, further comprising a pressure fluctuation device, wherein the pressure fluctuation device constantly exhausts the flow path.   The seal mechanism according to any one of claims 1 to 12, further comprising a storage portion that supplies a lubricant, close to a low pressure side space of all the annular seal members among the plurality of annular seal members.   A seal mechanism drive device comprising: the seal mechanism according to any one of claims 1 to 13; and a drive device that applies at least one of rotational motion and linear motion to the shaft.   A seal mechanism according to any one of claims 1 to 13 and a movable member that moves an object to be conveyed, wherein at least one of a rotational motion and a linear motion of the shaft and a motion of the movable member are linked. Conveying device.   A manufacturing apparatus provided with the sealing mechanism of any one of Claims 1-13.

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