JP2015125788A5 - Manufacturing method of disk-shaped substrate and carrier for grinding or polishing - Google Patents
Manufacturing method of disk-shaped substrate and carrier for grinding or polishing Download PDFInfo
- Publication number
- JP2015125788A5 JP2015125788A5 JP2013270005A JP2013270005A JP2015125788A5 JP 2015125788 A5 JP2015125788 A5 JP 2015125788A5 JP 2013270005 A JP2013270005 A JP 2013270005A JP 2013270005 A JP2013270005 A JP 2013270005A JP 2015125788 A5 JP2015125788 A5 JP 2015125788A5
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- JP
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- Prior art keywords
- disk
- carrier
- substrate
- shaped substrate
- grinding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000758 substrate Substances 0.000 title claims description 28
- 239000000969 carrier Substances 0.000 title claims description 19
- 238000005498 polishing Methods 0.000 title claims description 12
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 238000005530 etching Methods 0.000 claims 10
- 239000003365 glass fiber Substances 0.000 claims 9
- 239000011521 glass Substances 0.000 claims 6
- 238000000034 method Methods 0.000 claims 6
- 239000000463 material Substances 0.000 claims 3
- 239000011347 resin Substances 0.000 claims 3
- 229920005989 resin Polymers 0.000 claims 3
- 239000000243 solution Substances 0.000 claims 3
- UYOMQIYKOOHAMK-UHFFFAOYSA-J tetrafluoroaluminate(1-) Chemical compound F[Al](F)(F)[F-] UYOMQIYKOOHAMK-UHFFFAOYSA-J 0.000 claims 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N HF Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims 2
- 239000007864 aqueous solution Substances 0.000 claims 2
- 239000008151 electrolyte solution Substances 0.000 claims 2
- 230000002093 peripheral Effects 0.000 claims 2
- JLDSOYXADOWAKB-UHFFFAOYSA-N Aluminium nitrate Chemical compound [Al+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O JLDSOYXADOWAKB-UHFFFAOYSA-N 0.000 claims 1
- DIZPMCHEQGEION-UHFFFAOYSA-H Aluminium sulfate Chemical compound [Al+3].[Al+3].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O DIZPMCHEQGEION-UHFFFAOYSA-H 0.000 claims 1
- 230000002378 acidificating Effects 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminum Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 150000002500 ions Chemical class 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 238000007517 polishing process Methods 0.000 claims 1
Description
本発明は、円板形状の基板の製造方法、及び研削又は研磨用キャリアに関する。 The present invention relates to a method for manufacturing a disk-shaped substrate and a carrier for grinding or polishing .
Claims (9)
ガラス繊維からなる複数のガラスクロスおよび前記複数のガラスクロスに含浸された樹脂材料からなる円板形状の基板用キャリアに設けられた基板保持孔に、円板形状の基板を保持させた状態で、前記円板形状の基板を上定盤と下定盤との間に保持させ、前記円板形状の基板の主表面を研削する研削処理又は前記主表面を研磨する研磨処理と、
前記研削処理又は研磨処理によって前記円板形状の基板用キャリアの主表面から露出したガラス繊維を、エッチング溶液によりエッチングするエッチング処理と、
を有する、円板形状の基板の製造方法。 A method of manufacturing a disk-shaped substrate,
In a state where a disk-shaped substrate is held in a substrate holding hole provided in a disk-shaped substrate carrier made of a resin material impregnated with a plurality of glass cloths made of glass fibers and the plurality of glass cloths, a polishing treatment is held, to polish the grinding process or said main surface grinding the main surface of the substrate of the disc-shaped between the upper platen and the lower platen of the substrate of the disc-shaped,
Etching treatment that etches the glass fiber exposed from the main surface of the disk-shaped substrate carrier by the grinding treatment or polishing treatment with an etching solution;
A method of manufacturing a disk-shaped substrate having:
前記エッチング溶液はフッ酸を含み、
前記エッチング処理により生じたフッ化アルミン酸塩を除去する除去処理をさらに有する、請求項１に記載の円板形状の基板の製造方法。 The glass fiber contains aluminum as a component,
The etching solution includes hydrofluoric acid;
The manufacturing method of the disk-shaped board | substrate of Claim 1 which further has the removal process which removes the fluoroaluminate produced by the said etching process.
ガラス繊維からなる複数のガラスクロスおよび前記複数のガラスクロスに含浸された樹脂材料からなる円板形状の基板用キャリアに設けられた基板保持孔に、円板形状の基板の外周端面を保持させた状態で、前記円板形状の基板用キャリアおよび前記円板形状の基板を上定盤と下定盤との間に保持させ、前記円板形状の基板の主表面を研削する研削処理又は前記主表面を研磨する研磨処理と、
前記研削処理又は研磨処理を複数回行う毎に、前記研削処理又は研磨処理を複数回行うことによって前記円板形状の基板用キャリアの主表面から露出したガラス繊維を、エッチング溶液によりエッチングするエッチング処理と、を含む、円板形状の基板の製造方法。 A method of manufacturing a disk-shaped substrate,
A plurality of glass cloths made of glass fibers and a substrate holding hole provided in a disk-shaped substrate carrier made of a resin material impregnated in the plurality of glass cloths, the outer peripheral end face of the disk-shaped substrate was held. In the state, the disk-shaped substrate carrier and the disk-shaped substrate are held between an upper surface plate and a lower surface plate, and a grinding process for grinding the main surface of the disk-shaped substrate or the main surface a polishing process for polishing,
Every a plurality of times the grinding treatment or polishing treatment, the glass fiber exposed from the main surface of the carrier substrate of the disc-shaped by a plurality of times the grinding treatment or polishing treatment, etching treatment for etching with an etching solution And a method for manufacturing a disk-shaped substrate.
前記キャリアは、ガラス繊維からなる複数のガラスクロスおよび前記複数のガラスクロスに含浸された樹脂材料からなり、The carrier is composed of a plurality of glass cloths made of glass fibers and a resin material impregnated in the plurality of glass cloths,
前記キャリアには、前記円板形状の基板を保持する基板保持孔が設けられ、The carrier is provided with a substrate holding hole for holding the disk-shaped substrate,
前記キャリアの主表面には、前記キャリアの主表面において露出したガラス繊維がエッチングされてなる前記主表面の凹部が設けられている、ことを特徴とする研削又は研磨用キャリア。A grinding or polishing carrier characterized in that a main surface of the carrier is provided with a concave portion of the main surface formed by etching glass fibers exposed on the main surface of the carrier.
前記ギア部の外壁面には、前記キャリアの外壁面において露出したガラス繊維がエッチングされてなる前記外壁面の凹部が設けられている、請求項７又は８に記載の研削又は研磨用キャリア。The grinding or polishing carrier according to claim 7 or 8, wherein a concave portion of the outer wall surface is formed on the outer wall surface of the gear portion by etching glass fibers exposed on the outer wall surface of the carrier.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013270005A JP6152340B2 (en) | 2013-12-26 | 2013-12-26 | Manufacturing method of disk-shaped substrate and carrier for grinding or polishing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013270005A JP6152340B2 (en) | 2013-12-26 | 2013-12-26 | Manufacturing method of disk-shaped substrate and carrier for grinding or polishing |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015125788A JP2015125788A (en) | 2015-07-06 |
| JP2015125788A5 true JP2015125788A5 (en) | 2017-02-09 |
| JP6152340B2 JP6152340B2 (en) | 2017-06-21 |
Family
ID=53536390
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013270005A Active JP6152340B2 (en) | 2013-12-26 | 2013-12-26 | Manufacturing method of disk-shaped substrate and carrier for grinding or polishing |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6152340B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112091811B (en) * | 2016-03-31 | 2022-09-06 | Hoya株式会社 | Carrier and method for manufacturing substrate using the same |
| JP2023158771A (en) * | 2022-04-19 | 2023-10-31 | 株式会社Sumco | Carrier for double-sided polishing, double-sided polishing method and device for silicon wafer using the same |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006088314A (en) * | 2004-08-27 | 2006-04-06 | Showa Denko Kk | Substrate for magnetic disk and manufacturing method of magnetic disk |
| JP5741157B2 (en) * | 2011-04-07 | 2015-07-01 | 旭硝子株式会社 | Polishing carrier, glass substrate polishing method using the carrier, and glass substrate manufacturing method |
| JP5746758B2 (en) * | 2011-05-02 | 2015-07-08 | Hoya株式会社 | Method and apparatus for manufacturing glass substrate of cover glass for electronic device and method and apparatus for removing alkali fluoride fluoroaluminate |
-
2013
- 2013-12-26 JP JP2013270005A patent/JP6152340B2/en active Active
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