JP2015121441A - Spectroscopy apparatus - Google Patents

Spectroscopy apparatus Download PDF

Info

Publication number
JP2015121441A
JP2015121441A JP2013264588A JP2013264588A JP2015121441A JP 2015121441 A JP2015121441 A JP 2015121441A JP 2013264588 A JP2013264588 A JP 2013264588A JP 2013264588 A JP2013264588 A JP 2013264588A JP 2015121441 A JP2015121441 A JP 2015121441A
Authority
JP
Japan
Prior art keywords
lid member
housing
casing
fixed
fixing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2013264588A
Other languages
Japanese (ja)
Other versions
JP6306339B2 (en
Inventor
一成 横山
Kazunari Yokoyama
一成 横山
公彦 有本
Kimihiko Arimoto
公彦 有本
拓也 斧田
Takuya Onoda
拓也 斧田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Horiba Ltd
Original Assignee
Horiba Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Horiba Ltd filed Critical Horiba Ltd
Priority to JP2013264588A priority Critical patent/JP6306339B2/en
Publication of JP2015121441A publication Critical patent/JP2015121441A/en
Application granted granted Critical
Publication of JP6306339B2 publication Critical patent/JP6306339B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Abstract

PROBLEM TO BE SOLVED: To prevent a positional deviation of optical components positioned by reducing a strain of a housing generated by screwing a lid member on a plurality of sites of the housing.SOLUTION: A spectroscopy apparatus comprises: a plurality of optical components 2-5 used for spectroscopy; a housing 6 which has an opening H1 for fixing or positioning the optical components 2-5, and to which the plurality of optical components 2-5 are fixed; a lid member 7 closing the opening H1 and fixed to one site of the housing 6; and a pressing mechanism 10 pressing the lid member 7 against the housing 6 by elastic force.

Description

本発明は、筐体内に回折格子や凹面鏡等の光学部品が収容される光学装置である分光装置に関するものである。   The present invention relates to a spectroscopic device that is an optical device in which optical components such as a diffraction grating and a concave mirror are accommodated in a housing.

従来の分光器は、特許文献1に示すように、筐体内に、例えばスリット、反射ミラー、回折格子及び光検出器などの複数の光学部品が収容されており、それら部品は筐体内で位置調整した後に固定されている。具体的には、筐体から蓋部材が取り外された状態で、筐体内で光学部品を位置調整して固定し、その後、蓋部材を筐体に複数箇所(2点以上)でねじ止めしている。   As shown in Patent Document 1, a conventional spectroscope contains a plurality of optical components such as slits, reflection mirrors, diffraction gratings, and photodetectors in a casing, and the positions of these components are adjusted in the casing. After being fixed. Specifically, with the lid member removed from the housing, the optical component is positioned and fixed in the housing, and then the lid member is screwed to the housing at multiple locations (two or more points). Yes.

しかしながら、蓋部材を筐体に複数箇所でねじにより固定すると、複数のねじの締結に伴って、筐体が歪んでしまう。また、筐体及び蓋部材の熱膨張係数や熱容量が異なることにより、周囲温度が変化した場合に、筐体に応力が加わり、筐体が歪んでしまう。そして、筐体が歪むと当該筐体に固定された光学部品の位置が変化して調整が狂ってしまい、分光器の波長ずれが生じるという問題がある。   However, when the lid member is fixed to the casing with screws at a plurality of locations, the casing is distorted as the plurality of screws are fastened. In addition, when the ambient temperature changes due to the difference in thermal expansion coefficient and heat capacity between the casing and the lid member, stress is applied to the casing and the casing is distorted. When the housing is distorted, the position of the optical component fixed to the housing changes and the adjustment is out of order, resulting in a wavelength shift of the spectrometer.

なお、筐体や光学部品自体の剛性(機械的強度)を上げることで、蓋部材のねじ止めによる筐体の歪みや位置ずれを小さくすることが考えられるが、その場合には、筐体や光学部品が大きくなり重くなってしまう。   Note that it is possible to reduce the distortion and displacement of the casing due to screwing of the lid member by increasing the rigidity (mechanical strength) of the casing and the optical component itself. Optical parts become large and heavy.

特開2002−318158号公報JP 2002-318158 A

そこで本発明は、上記問題点を解決すべくなされたものであり、蓋部材を筐体の複数箇所にねじ止めすることに生じる筐体の歪みを低減して、位置調整された光学部品の位置ずれを防止することをその主たる所期課題とするものである。   Accordingly, the present invention has been made to solve the above-described problems, and reduces the distortion of the casing that occurs when the lid member is screwed to a plurality of locations of the casing. Preventing deviations is the main desired issue.

すなわち本発明に係る分光装置は、分光に用いられる複数の光学部品と、前記光学部品を固定又は位置調整するための開口部を有し、前記複数の光学部品が固定される筐体と、前記開口部を閉塞し、前記筐体の一箇所に固定される蓋部材と、前記蓋部材を前記筐体に対して弾性力により押圧して密着させる押圧機構とを備えていることを特徴とする。
ここで、蓋部材を筐体の一箇所に固定する構成としては、例えば、ねじを用いた固定、カシメを用いた固定、釘を用いた固定、接着剤又は粘着剤を用いた固定などが考えられる。
That is, a spectroscopic device according to the present invention includes a plurality of optical components used for spectroscopy, an opening for fixing or adjusting the position of the optical components, and a housing to which the plurality of optical components are fixed, A lid member that closes the opening and is fixed to one position of the casing, and a pressing mechanism that presses the lid member against the casing by an elastic force to closely contact each other are provided. .
Here, as a configuration for fixing the lid member to one place of the housing, for example, fixing using a screw, fixing using a caulking, fixing using a nail, fixing using an adhesive or an adhesive, etc. are considered. It is done.

このようなものであれば、蓋部材が筐体の一箇所に固定されているので、蓋部材の固定により生じる筐体の歪みが生じ難く、また、分光装置の使用時における周囲温度の変化による筐体及び蓋部材の熱膨張係数や熱容量の差による筐体の歪みが生じにくい。これにより、調整後の光学部品が位置ずれして生じる分光装置の波長ずれを防止することができる。
また、押圧機構により蓋部材が筐体に押圧して密着されているので、一箇所の固定により生じ易い蓋部材の浮きを防ぐことができ、開口部を確実に閉塞することができる。
さらに、蓋部材を筐体に複数箇所でねじ止めする構造では無いので、ねじ止めにより生じる歪み影響を小さくするために筐体の機械的強度を増すべく壁厚を厚くする等の対策を不要とすることができる。
In such a case, since the lid member is fixed at one position of the casing, the casing is hardly distorted due to the fixing of the lid member, and also due to a change in ambient temperature when the spectroscopic device is used. The distortion of the casing due to the difference between the thermal expansion coefficient and the heat capacity of the casing and the lid member hardly occurs. Thereby, it is possible to prevent the wavelength shift of the spectroscopic device caused by the positional shift of the adjusted optical component.
In addition, since the lid member is pressed and closely adhered to the housing by the pressing mechanism, it is possible to prevent the lid member from being easily lifted by fixing at one place, and the opening can be reliably closed.
Furthermore, since the lid member is not structured to be screwed to the housing at a plurality of locations, measures such as increasing the wall thickness to increase the mechanical strength of the housing are not required in order to reduce the distortion effect caused by screwing. can do.

前記筐体及び前記蓋部材の間に介在して設けられ、前記筐体の一箇所に固定された蓋部材が前記筐体に対して回転することを防止する回転制限機構をさらに備えていることが望ましい。
これならば、開口部を閉塞した蓋部材が例えばねじ回り等の一箇所固定された部分を中心に回転して開口部が開放してしまうことを防止することができる。
A rotation limiting mechanism provided between the casing and the lid member and preventing the lid member fixed at one position of the casing from rotating relative to the casing; Is desirable.
If it is this, it can prevent that the cover member which closed the opening part rotates centering around the part fixed in one place, such as a screw circumference, and an opening part opens.

前記押圧機構が、前記筐体に設けられ、前記開口部を閉塞した状態の蓋部材を押圧する弾性部材により構成されており、前記弾性部材が、前記回転制限機構を構成するものであることが望ましい。
これならば、押圧機構及び回転制限機構を単一の弾性部材により構成することができ、分光装置の構成を簡単にすることができる。
The pressing mechanism is configured by an elastic member that is provided in the housing and presses the lid member in a state in which the opening is closed, and the elastic member constitutes the rotation limiting mechanism. desirable.
If this is the case, the pressing mechanism and the rotation limiting mechanism can be configured by a single elastic member, and the configuration of the spectroscopic device can be simplified.

回転制限機構の具体的な実施の態様としては、前記回転制限機構が、前記弾性部材と、前記蓋部材に形成された凹部とから構成されており、前記弾性部材が前記凹部の内面に接触することにより、前記蓋部材の前記筐体に対する回転が防止されることが望ましい。特に、前記弾性部材が、前記凹部の内面において前記蓋部材の回転方向を向く面に接触するように構成されていることが望ましい。
これならば、弾性部材が凹部の内面において回転方向を向く面に接触するように構成することで、蓋部材の回転角度をより小さくすることができる。
As a specific embodiment of the rotation limiting mechanism, the rotation limiting mechanism includes the elastic member and a recess formed in the lid member, and the elastic member contacts the inner surface of the recess. Accordingly, it is desirable that rotation of the lid member with respect to the housing is prevented. In particular, it is desirable that the elastic member is configured to come into contact with a surface of the inner surface of the recess that faces the rotation direction of the lid member.
In this case, the rotation angle of the lid member can be further reduced by configuring the elastic member to contact the surface facing the rotation direction on the inner surface of the recess.

分光装置を小型化するためには、前記筐体の側壁内面に少なくとも1つの光学部品が固定されていることが望ましい。このように側壁に光学部材が固定される構成において、本発明の効果が一層顕著となる。   In order to reduce the size of the spectroscopic device, it is preferable that at least one optical component is fixed to the inner surface of the side wall of the casing. Thus, in the configuration in which the optical member is fixed to the side wall, the effect of the present invention becomes more remarkable.

このように構成した本発明によれば、蓋部材を筐体の複数箇所にねじ止めすることに生じる筐体の歪みを低減して、位置調整された光学部品の位置ずれを防止することができる。   According to the present invention configured as described above, it is possible to reduce the distortion of the casing that occurs when the lid member is screwed to a plurality of locations of the casing, and to prevent the positional deviation of the optical component whose position has been adjusted. .

本実施形態の分光光度計の蓋部材を取り外した状態を示す図。The figure which shows the state which removed the cover member of the spectrophotometer of this embodiment. 同実施形態の分光光度計の蓋部材を取り付けた状態を示す図。The figure which shows the state which attached the cover member of the spectrophotometer of the embodiment. 同実施形態の押圧機構を主として示す断面図。Sectional drawing which mainly shows the press mechanism of the embodiment. 同実施形態の押圧機構及び回転制限機構を示す斜視図。The perspective view which shows the press mechanism and rotation limitation mechanism of the embodiment.

以下に本発明に係る分光装置を用いた分光光度計の一実施形態について図面を参照して説明する。   An embodiment of a spectrophotometer using a spectroscopic device according to the present invention will be described below with reference to the drawings.

本実施形態の分光光度計は、例えばガス濃度を測定するガス濃度測定装置等に用いられるものであり、図1及び図2に示すように、複数の光学部品として、入射スリット2、2つの反射ミラー(凹面鏡)3a、3b、回折格子4及び光検出器5を備えており、これら複数の光学部品2〜5は、例えばアルミニウム製の筐体6内に収容されて固定されている。光検出器5は、回折格子4により分光された各波長の光を検出するための複数の受光素子が例えばライン状に左右に配列されたラインセンサ(多チャンネル検出器)である。   The spectrophotometer of the present embodiment is used in, for example, a gas concentration measuring device that measures a gas concentration. As shown in FIGS. 1 and 2, as a plurality of optical components, an incident slit 2, two reflections are used. Mirrors (concave mirrors) 3a and 3b, a diffraction grating 4 and a photodetector 5 are provided, and the plurality of optical components 2 to 5 are housed and fixed in a housing 6 made of, for example, aluminum. The light detector 5 is a line sensor (multi-channel detector) in which a plurality of light receiving elements for detecting light of each wavelength dispersed by the diffraction grating 4 are arranged in a line shape on the left and right, for example.

筐体6は、一面(本実施形態では上面)が開口した概略箱形状をなすものであり、底壁6aと当該底壁6aの上面に全周を囲繞するように形成された側周壁6b〜6eとを有している。そして、この側周壁6b〜6eの上端部により開口部H1が形成されており、当該開口部H1は、例えば鉄製の蓋部材7により閉塞される。この筐体6において、入射スリット2は、前側壁6bに固定されており、2つの反射ミラー(凹面鏡)3a、3bは、後側壁6cに固定されている。また、回折格子4及び光検出器5は、底壁6aに固定されている。   The housing 6 has a substantially box shape with one surface (upper surface in the present embodiment) opened, and the side wall 6b to the bottom wall 6a and the side wall 6b formed so as to surround the entire periphery of the top surface of the bottom wall 6a. 6e. And the opening part H1 is formed by the upper end part of these side surrounding walls 6b-6e, The said opening part H1 is obstruct | occluded with the iron cover member 7, for example. In this housing 6, the entrance slit 2 is fixed to the front side wall 6b, and the two reflecting mirrors (concave mirrors) 3a and 3b are fixed to the rear side wall 6c. Further, the diffraction grating 4 and the photodetector 5 are fixed to the bottom wall 6a.

具体的には、前側壁6bに形成された光導入ポートの近傍に入射スリット2が設けられており、当該入射スリット2を通過した光を反射する第1反射ミラー(凹面鏡)3aが前記前側壁6bに対向する後側壁6cの内面に設けられている。この後側壁6cの内面に設けられた第1反射ミラー3aによって反射された光は、前側壁6b側に設けられた回折格子4によって分光される。そしてこの分光された光は、後側壁6cの内面に設けられた第2反射ミラー(凹面鏡)3bによって反射される。この第2反射ミラー3bによって反射された光は、前側壁6b側に設けられた光検出器5によって検出される。これら光検出器5の複数の受光素子は、前記回折格子4によって分光された各波長毎に対応して設けられている。   Specifically, the entrance slit 2 is provided in the vicinity of the light introduction port formed in the front side wall 6b, and the first reflection mirror (concave mirror) 3a that reflects the light that has passed through the entrance slit 2 is the front side wall. It is provided on the inner surface of the rear side wall 6c opposite to 6b. The light reflected by the first reflecting mirror 3a provided on the inner surface of the rear side wall 6c is split by the diffraction grating 4 provided on the front side wall 6b side. The split light is reflected by a second reflecting mirror (concave mirror) 3b provided on the inner surface of the rear side wall 6c. The light reflected by the second reflecting mirror 3b is detected by the photodetector 5 provided on the front side wall 6b side. The plurality of light receiving elements of the photodetector 5 are provided corresponding to each wavelength separated by the diffraction grating 4.

蓋部材7は、平板状をなすものであり、筐体6の一箇所にねじ固定される。具体的に蓋部材7は、筐体6の側周壁6b〜6eの平面状をなす上面を覆う平板であり、例えば右側壁6dに形成された1つの雌ねじ孔8(図1参照)を介して1つの固定ねじ9(図2参照)によって固定される。つまり、蓋部材7の右側辺部が、固定ねじ9により筐体6に固定される。このように蓋部材7を筐体6に対して一箇所で固定(一点止め)することで、周囲温度の変化により、材質の異なる蓋部材7と筐体6との間で熱膨張差が生じても、固定ねじ9を中心として平面方向に自由に膨張することができる。つまり、固定ねじ9による固定箇所(一点止め部)が熱膨張変形の起点となって、筐体6及び蓋部材7が相対的に移動する。言い換えれば、固定ねじ9による固定は、当該固定箇所が熱膨張変形の起点となるように固定するものである。   The lid member 7 has a flat plate shape and is screwed to one location of the housing 6. Specifically, the lid member 7 is a flat plate that covers the planar upper surface of the side peripheral walls 6b to 6e of the housing 6, and is, for example, via one female screw hole 8 (see FIG. 1) formed in the right side wall 6d. It is fixed by one fixing screw 9 (see FIG. 2). That is, the right side portion of the lid member 7 is fixed to the housing 6 by the fixing screw 9. By fixing the lid member 7 to the housing 6 at one point in this way (stopping at one point), a difference in thermal expansion occurs between the lid member 7 and the housing 6 made of different materials due to a change in ambient temperature. However, it can expand freely in the plane direction around the fixing screw 9. That is, the fixing part (one-point stopper) by the fixing screw 9 becomes a starting point of thermal expansion deformation, and the housing 6 and the lid member 7 move relatively. In other words, the fixing with the fixing screw 9 is to fix the fixing portion so as to be a starting point of thermal expansion deformation.

また、本実施形態では、一箇所でねじ止めされた蓋部材7が筐体6の開口部H1から浮いて外部の光が内部に侵入してしまうこと又は蓋部材7がガタつくことを防止するために、蓋部材7を筐体6に押圧する押圧機構10を備えている。   Further, in this embodiment, the lid member 7 screwed in one place is prevented from floating from the opening H1 of the housing 6 and external light entering the inside or preventing the lid member 7 from rattling. For this purpose, a pressing mechanism 10 that presses the lid member 7 against the housing 6 is provided.

この押圧機構10は、筐体6又は蓋部材7に設けられ、蓋部材7を筐体6に対して弾性力により押圧して密着させるものである。具体的に押圧機構10は、蓋部材7の筐体6に対する固定ねじ9を中心とした平面方向(水平方向)の移動を許容するとともに、蓋部材7を筐体6に対して垂直方向に下向きに押圧(開口部H1に向かって押圧)するものである。ここで、押圧機構10による筐体6に対する蓋部材7の押圧力は、前記ねじ9による筐体6に対する蓋部材7の固定力よりも小さくなるように構成されている。本実施形態の押圧機構10は、筐体6の側周壁6b〜6eの何れかの外面に設けられ、開口部H1を閉塞した状態の蓋部材6の上面を下方に向かって押圧する弾性部材101により構成されている。   The pressing mechanism 10 is provided on the housing 6 or the lid member 7, and presses the lid member 7 against the housing 6 with an elastic force so as to be in close contact therewith. Specifically, the pressing mechanism 10 allows the movement of the lid member 7 in the plane direction (horizontal direction) around the fixing screw 9 with respect to the housing 6, and causes the lid member 7 to face downward in the vertical direction with respect to the housing 6. Is pressed (pressed toward the opening H1). Here, the pressing force of the lid member 7 on the housing 6 by the pressing mechanism 10 is configured to be smaller than the fixing force of the lid member 7 on the housing 6 by the screw 9. The pressing mechanism 10 of the present embodiment is provided on the outer surface of any of the side peripheral walls 6b to 6e of the housing 6, and is an elastic member 101 that presses the upper surface of the lid member 6 with the opening H1 closed downward. It is comprised by.

具体的に弾性部材101は、図1及び図2に示すように、蓋部材7の平面視において、固定ねじ9による固定箇所とは異なる位置、より好ましくは前記固定箇所に対向する位置を押圧する構成であり、本実施形態では、蓋部材7の前側面及び左側面の角部又はその近傍の上面を押圧するように構成されている。より詳細には、図3及び図4に示すように、弾性部材101は、左側壁6e外面の前側壁6b側に、例えばねじにより固定されており、左側壁6eの上方において内側に折れ曲がった板ばねにより構成されている。この弾性部材101は、左側壁6eに固定される固定片部101aと、当該固定片部101aの上端に連続して、蓋部材7の上面に弾性復帰力を作用させる可動片部101bとを有している。これにより、弾性部材101が開口部H1を閉塞した状態の蓋部材6の上面を下方に向かって押圧して、蓋部材7を筐体6の側周壁6b〜6eの上面に密着させる。   Specifically, as shown in FIG. 1 and FIG. 2, the elastic member 101 presses a position different from the fixing position by the fixing screw 9, more preferably a position facing the fixing position, in the plan view of the lid member 7. In this embodiment, the front side surface and the left side corner portion of the lid member 7 or the upper surface in the vicinity thereof is pressed. More specifically, as shown in FIGS. 3 and 4, the elastic member 101 is fixed to the front wall 6b side of the outer surface of the left side wall 6e by, for example, screws, and is a plate bent inwardly above the left side wall 6e. It is constituted by a spring. The elastic member 101 has a fixed piece portion 101a fixed to the left side wall 6e and a movable piece portion 101b that applies an elastic return force to the upper surface of the lid member 7 continuously from the upper end of the fixed piece portion 101a. doing. Thereby, the elastic member 101 presses the upper surface of the lid member 6 in a state where the opening H <b> 1 is closed downward to bring the lid member 7 into close contact with the upper surfaces of the side peripheral walls 6 b to 6 e of the housing 6.

また、本実施形態では、筐体6及び蓋部材7の間に介在して設けられ、筐体6の一箇所にねじ固定された蓋部材7が筐体6に対して回転することを防止する回転制限機構11をさらに備えている。   In the present embodiment, the lid member 7 provided between the housing 6 and the lid member 7 and screwed to one location of the housing 6 is prevented from rotating with respect to the housing 6. A rotation limiting mechanism 11 is further provided.

この回転制限機構11は、前記固定機構10の弾性部材101と、蓋部材7に形成された凹部71とから構成されている。この凹部71は、蓋部材7の側面に内側に向かって形成されたものであり、具体的には蓋部材7の左側面に前記弾性部材101の幅寸法よりも若干大きい幅寸法を有する凹部71が形成されている。また、蓋部材7は、筐体6の開口部H1を閉塞した状態(固定ねじ9により固定された状態)において、少なくとも凹部71が形成された部分が、左側壁6dの外面よりも外側に延出している。これにより、筐体6の左側壁6eから上方に延びる弾性部材101の一部が凹部71内に収容される。そして、蓋部材7が筐体6に対して回転すると、凹部71の内面、具体的には、前側内面71a又は後側内面71b(回転方向を向く面)が弾性部材101の幅方向端部(前後端部)に当接することによって、蓋部材7の回転が制限される。なお、蓋部材7の平面方向における自由に膨張を確保すべく、凹部71の内面と弾性部材101との間には、若干の隙間を形成しておく。   The rotation limiting mechanism 11 includes an elastic member 101 of the fixing mechanism 10 and a recess 71 formed in the lid member 7. The concave portion 71 is formed on the side surface of the lid member 7 toward the inside. Specifically, the concave portion 71 has a width dimension slightly larger than the width dimension of the elastic member 101 on the left side surface of the lid member 7. Is formed. Further, in the state where the opening H1 of the housing 6 is closed (a state where the lid member 7 is fixed by the fixing screw 9), at least a portion where the concave portion 71 is formed extends outward from the outer surface of the left side wall 6d. I'm out. Thereby, a part of the elastic member 101 extending upward from the left side wall 6 e of the housing 6 is accommodated in the recess 71. When the lid member 7 rotates with respect to the housing 6, the inner surface of the recess 71, specifically, the front inner surface 71 a or the rear inner surface 71 b (the surface facing the rotation direction) is the end in the width direction of the elastic member 101 ( The rotation of the lid member 7 is restricted by contacting the front and rear end portions. Note that a slight gap is formed between the inner surface of the recess 71 and the elastic member 101 in order to ensure free expansion in the planar direction of the lid member 7.

次に本実施形態の分光光度計1の組み立てについて簡単に説明する。   Next, the assembly of the spectrophotometer 1 of this embodiment will be briefly described.

まず、筐体6から蓋部材7が外された状態(開口部H1が開放された状態)で、筐体6の内部に入射スリット2、第1反射ミラー3a、第2反射ミラー3b、回折格子4、光検出器5を取り付けるとともにそれらの位置調整を行う。その後、蓋部材7を、筐体6の上面と弾性部材101との間に挟まれるように挿入して、固定ねじ9により筐体6にねじ止めする。これにより、蓋部材7は、一箇所で筐体6にねじ止めされるとともに、一箇所で押圧機構10により筐体6に押圧される。このように本実施形態では、1つの固定ねじ9によって蓋部材7を筐体6に固定することができる。   First, in a state where the lid member 7 is removed from the housing 6 (a state where the opening H1 is opened), the entrance slit 2, the first reflecting mirror 3a, the second reflecting mirror 3b, and the diffraction grating are formed inside the housing 6. 4. Attach the photodetector 5 and adjust its position. Thereafter, the lid member 7 is inserted so as to be sandwiched between the upper surface of the housing 6 and the elastic member 101, and is screwed to the housing 6 with a fixing screw 9. As a result, the lid member 7 is screwed to the housing 6 at one location and is pressed against the housing 6 by the pressing mechanism 10 at one location. Thus, in the present embodiment, the lid member 7 can be fixed to the housing 6 with one fixing screw 9.

このように構成した分光光度計1によれば、蓋部材7が筐体6の一箇所に固定ねじ9により固定されているので、蓋部材7の固定により生じる筐体6の歪みが生じ難く、また、使用時における周囲温度の変化による筐体6及び蓋部材7の熱膨張係数や熱容量の差による筐体6の歪みが生じにくい。これにより、調整後の光学部品2〜5が位置ずれして生じる分光装置の波長ずれを防止することができる。   According to the spectrophotometer 1 configured as described above, since the lid member 7 is fixed to the housing 6 at one location by the fixing screw 9, the housing 6 is hardly distorted due to the fixing of the lid member 7. In addition, the housing 6 is less likely to be distorted due to a difference in thermal expansion coefficient or heat capacity between the housing 6 and the lid member 7 due to a change in ambient temperature during use. Thereby, the wavelength shift of the spectroscopic device caused by the positional shift of the adjusted optical components 2 to 5 can be prevented.

また、押圧機構10により蓋部材7を筐体6に押圧して密着されているので、一箇所のねじ固定により生じ易い蓋部材7の浮き及びガタつきを防ぐことができ、開口部H1を確実に閉塞することができる。   In addition, since the lid member 7 is pressed and closely adhered to the housing 6 by the pressing mechanism 10, it is possible to prevent the lid member 7 from being easily lifted and rattled by screw fixing at one place, and the opening H1 can be reliably secured. Can be occluded.

さらに、蓋部材7を筐体6に複数箇所でねじ止めする構造では無いので、ねじ止めにより生じる歪み影響を小さくするために筐体6の機械的強度を増すべく壁厚を厚くする等の対策を不要とすることができる。   Furthermore, since the lid member 7 is not structured to be screwed to the housing 6 at a plurality of locations, measures such as increasing the wall thickness to increase the mechanical strength of the housing 6 in order to reduce the distortion effect caused by screwing, etc. Can be made unnecessary.

なお、本発明は前記実施形態に限られるものではない。   The present invention is not limited to the above embodiment.

例えば、前記実施形態では、押圧機構10となる弾性部材101が筐体6に固定されているが、蓋部材7に固定されて、筐体の一部に係止することで、弾性力を作用するものであっても良い。また、押圧機構10を筐体6及び蓋部材7に設けずに、筐体6及び蓋部材7の外部に押圧機構を設けても良い。例えば、筐体6が搭載されるラック等の周囲部材に押圧機構10となる弾性部材を設けて、当該弾性部材により蓋部材を筐体に押圧するように構成しても良い。   For example, in the above-described embodiment, the elastic member 101 serving as the pressing mechanism 10 is fixed to the housing 6. However, the elastic member 101 is fixed to the lid member 7 and locked to a part of the housing, thereby applying an elastic force. It may be what you do. Further, the pressing mechanism 10 may be provided outside the housing 6 and the lid member 7 without providing the pressing mechanism 10 on the housing 6 and the lid member 7. For example, an elastic member serving as the pressing mechanism 10 may be provided on a peripheral member such as a rack on which the housing 6 is mounted, and the lid member may be pressed against the housing by the elastic member.

また、回転制限機構11は、蓋部材7の側面に形成された凹部71内に弾性部材101の一部が収容されることによって構成されているが、蓋部材7の上面に弾性部材101の可動片部101bの接触部が嵌る凹部を形成することにより構成しても良い。また、回転制限機構11は、蓋部材7に凹部71を形成することなく、弾性部材101は、蓋部材7の側面に接触することにより構成されるものであっても良い。   Further, the rotation limiting mechanism 11 is configured by accommodating a part of the elastic member 101 in the recess 71 formed on the side surface of the lid member 7, but the movable member of the elastic member 101 is movable on the upper surface of the lid member 7. You may comprise by forming the recessed part which the contact part of the piece part 101b fits. Further, the rotation limiting mechanism 11 may be configured such that the elastic member 101 is in contact with the side surface of the lid member 7 without forming the recess 71 in the lid member 7.

さらに、押圧機構10と回転制限機構11とを別々に設けても良い。この場合、回転制限機構11は、筐体6又は蓋部材7の一方に設けられ、筐体6又は蓋部材7の他方に接触する接触片を有する構成であっても良い。   Further, the pressing mechanism 10 and the rotation limiting mechanism 11 may be provided separately. In this case, the rotation restricting mechanism 11 may be provided on one of the housing 6 or the lid member 7 and may have a contact piece that contacts the other of the housing 6 or the lid member 7.

その上、蓋部材7をねじ止めする位置は、前記実施形態に限られず、筐体6の側周壁6b〜6eの任意の位置であれば良い。ここで、ねじ止めによる反射ミラー3a、3bの位置ずれを可及的に小さくするためには、反射ミラー3a、3bから離れた位置が望ましく、例えば反射ミラー3a、3bが設けられた側壁に対向する壁が考えられる。   In addition, the position where the lid member 7 is screwed is not limited to the above embodiment, and may be any position on the side peripheral walls 6b to 6e of the housing 6. Here, in order to minimize the positional deviation of the reflection mirrors 3a and 3b due to screwing, a position away from the reflection mirrors 3a and 3b is desirable, for example, facing the side wall provided with the reflection mirrors 3a and 3b. A wall that can be considered.

さらにその上、前記実施形態では、蓋部材7を筐体6に対して固定ねじ9を用いて一箇所に固定するものであったが、蓋部材7を筐体6の一箇所に固定する構成としては、当該固定箇所が熱膨張変形の起点となるように固定するものであれば良く、カシメを用いた固定、釘を用いた固定、接着剤又は粘着剤を用いた固定などであっても良い。なお、分光装置を構成する場合には、固定ねじを用いた固定あるいは接着剤又は粘着剤を用いた固定が望ましい。   Furthermore, in the said embodiment, although the cover member 7 was fixed to the housing | casing 6 in one place using the fixing screw 9, the structure which fixes the lid member 7 to one place of the housing | casing 6 is used. As long as it can be fixed so that the fixing part becomes the starting point of thermal expansion deformation, fixing using caulking, fixing using nail, fixing using adhesive or adhesive, etc. good. In the case of configuring the spectroscopic device, it is desirable to fix using a fixing screw or fix using an adhesive or an adhesive.

加えて、前記実施形態では、分光装置について説明したが、その他、筐体内に、例えばスリット、反射ミラー、回折格子及び光検出器などの複数の光学部品が固定されてなる干渉計等の光学装置にも適用することができる。   In addition, in the above-described embodiment, the spectroscopic device has been described. In addition, an optical device such as an interferometer in which a plurality of optical components such as a slit, a reflection mirror, a diffraction grating, and a photodetector are fixed in a housing. It can also be applied to.

その他、本発明は前記実施形態に限られず、その趣旨を逸脱しない範囲で種々の変形が可能であるのは言うまでもない。   In addition, it goes without saying that the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the spirit of the present invention.

1・・・分光光度計
2・・・入射スリット
3・・・反射ミラー(凹面鏡)
4・・・回折格子
5・・・光検出器
6・・・筐体
H1・・・開口部
7・・・蓋部材
8・・・雌ねじ孔
9・・・固定ねじ
10・・・押圧機構
11・・・回転制限機構
DESCRIPTION OF SYMBOLS 1 ... Spectrophotometer 2 ... Incident slit 3 ... Reflection mirror (concave mirror)
DESCRIPTION OF SYMBOLS 4 ... Diffraction grating 5 ... Photo detector 6 ... Housing | casing H1 ... Opening part 7 ... Cover member 8 ... Female screw hole 9 ... Fixing screw 10 ... Pressing mechanism 11 ... Rotation limiting mechanism

Claims (5)

分光に用いられる複数の光学部品と、
前記光学部品を固定又は位置調整するための開口部を有し、前記複数の光学部品が固定される筐体と、
前記開口部を閉塞し、前記筐体の一箇所に固定される蓋部材と、
前記蓋部材を前記筐体に対して弾性力により押圧して密着させる押圧機構とを備えている分光装置。
A plurality of optical components used for spectroscopy;
A housing having an opening for fixing or adjusting the position of the optical component, and the plurality of optical components being fixed;
A lid member that closes the opening and is fixed to one location of the housing;
A spectroscopic device comprising: a pressing mechanism that presses the lid member against the casing by an elastic force to closely contact the casing.
前記筐体及び前記蓋部材の間に介在して設けられ、前記筐体の一箇所に固定された蓋部材が前記筐体に対して回転することを防止する回転制限機構をさらに備えている請求項1記載の分光装置。   And a rotation limiting mechanism that is provided between the casing and the lid member and prevents the lid member fixed at one position of the casing from rotating relative to the casing. Item 1. The spectroscopic device according to Item 1. 前記押圧機構が、前記筐体に設けられ、前記開口部を閉塞した状態の蓋部材を押圧する弾性部材により構成されており、
前記弾性部材が、前記回転制限機構を構成するものである請求項2記載の分光装置。
The pressing mechanism is configured by an elastic member that is provided in the casing and presses the lid member in a state of closing the opening.
The spectroscopic apparatus according to claim 2, wherein the elastic member constitutes the rotation limiting mechanism.
前記回転制限機構が、前記弾性部材と、前記蓋部材に形成された凹部とから構成されており、前記弾性部材が前記凹部の内面に接触することにより、前記蓋部材の前記筐体に対する回転が防止される請求項3記載の分光装置。   The rotation limiting mechanism includes the elastic member and a concave portion formed in the lid member, and the elastic member contacts the inner surface of the concave portion, whereby rotation of the lid member with respect to the casing is performed. The spectroscopic device according to claim 3, which is prevented. 前記筐体の側壁内面に少なくとも1つの光学部品が固定されている請求項1乃至4の何れかに記載の分光装置。   The spectroscopic device according to claim 1, wherein at least one optical component is fixed to an inner surface of the side wall of the housing.
JP2013264588A 2013-12-20 2013-12-20 Spectrometer Active JP6306339B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2013264588A JP6306339B2 (en) 2013-12-20 2013-12-20 Spectrometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013264588A JP6306339B2 (en) 2013-12-20 2013-12-20 Spectrometer

Publications (2)

Publication Number Publication Date
JP2015121441A true JP2015121441A (en) 2015-07-02
JP6306339B2 JP6306339B2 (en) 2018-04-04

Family

ID=53533183

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013264588A Active JP6306339B2 (en) 2013-12-20 2013-12-20 Spectrometer

Country Status (1)

Country Link
JP (1) JP6306339B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020003235A (en) * 2018-06-25 2020-01-09 株式会社リコー Support frame, spectrometer, spectroscopic analysis unit, and image formation device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005156383A (en) * 2003-11-27 2005-06-16 Shimadzu Corp Spectrophotometer
JP2013250118A (en) * 2012-05-31 2013-12-12 Hitachi Aloka Medical Ltd Radiation measuring apparatus
JP2013253849A (en) * 2012-06-06 2013-12-19 Horiba Ltd Optical device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005156383A (en) * 2003-11-27 2005-06-16 Shimadzu Corp Spectrophotometer
JP2013250118A (en) * 2012-05-31 2013-12-12 Hitachi Aloka Medical Ltd Radiation measuring apparatus
JP2013253849A (en) * 2012-06-06 2013-12-19 Horiba Ltd Optical device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020003235A (en) * 2018-06-25 2020-01-09 株式会社リコー Support frame, spectrometer, spectroscopic analysis unit, and image formation device
JP7024624B2 (en) 2018-06-25 2022-02-24 株式会社リコー Support frame, spectroscope, spectroscopic analysis unit, and image forming apparatus

Also Published As

Publication number Publication date
JP6306339B2 (en) 2018-04-04

Similar Documents

Publication Publication Date Title
EP3472581B1 (en) Integrated spectral unit
JP5767883B2 (en) Spectrometer
TWI443314B (en) Splitter
JP5767882B2 (en) Spectrometer
Neumann et al. Tunable infrared detector with integrated micromachined Fabry-Perot filter
JP6893667B2 (en) Integrated polarization interferometer and snapshot spectroscopic polarization meter to which it is applied
JP5718091B2 (en) Spectroscopic module
TWI655414B (en) Beamsplitters and methods for manufacturing the same
JP6325268B2 (en) Spectrometer and method of manufacturing the spectrometer
WO2015119094A1 (en) Spectrometer, and spectrometer production method
JP6306339B2 (en) Spectrometer
JP5556370B2 (en) Spectrometer and optical spectrum analyzer using the same
Rissanen et al. Tunable MOEMS Fabry-Perot interferometer for miniaturized spectral sensing in near-infrared
JP2010008706A (en) Diffraction grating and spectrometer
US10436639B2 (en) Spectrometer and optical input portion thereof
US20180149465A1 (en) Housing system for michelson interferometer
JP6353999B1 (en) Spectrometer
FI20215358A1 (en) Spectroscopic unit and spectroscopic module
JP6725068B2 (en) Beam splitter assembly
KR102082769B1 (en) Michelson interferometer having moveable reflective mirror
JP2009128193A (en) Wavelength sensor
JP6293967B2 (en) Spectrometer and method of manufacturing the spectrometer
JP6328303B2 (en) Spectrometer
CN115615543A (en) Spectrometer and assembling method thereof
JP2013253849A (en) Optical device

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20160822

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20170713

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20170718

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20170919

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20180215

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20180308

R150 Certificate of patent or registration of utility model

Ref document number: 6306339

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250